Temperature sensor

Abstract

The invention provides a temperature sensor comprising a temperature measuring element used for measuring the temperature of a chemical liquid; the protective sleeve is arranged outside the temperature measuring element in a sleeving manner and is used for protecting the temperature measuring element from being in contact with the chemical liquid; the purging module is used for providing purging gas for the interior of the protective sleeve; wherein the purging module comprises an air inlet channel and an air outlet, the air inlet end of the air inlet channel is connected with an external air supply device, the air outlet end of the air inlet channel is located at the lower end of the protective sleeve and blows air into the protective sleeve, and the air outlet is located in the side wall of the protective sleeve. By arranging the purging module, dryness in the protective sleeve is guaranteed, the temperature sensor is prevented from being corroded and infiltrated to cause failure, and therefore the stability of the process is guaranteed; through the mode that the purging module comprises the gas inlet channel, heat exchange between purging gas and chemical liquid is achieved, and the measurement accuracy of the temperature sensor is guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor process technology, and in particular to a temperature sensor. Background Art

[0002] In the semiconductor manufacturing process, the chemical solution used in the substrate cleaning process is a factor that has a greater impact on the semiconductor process yield. In order to ensure the stability of the process, a temperature sensor is usually used to monitor the temperature in the chemical solution tank.

[0003] The temperature sensors currently used in the process are made of metal. In order to prevent them from being corroded by chemical liquids, plastic coatings or protective sleeves are usually used to protect the temperature sensors. However, the plastic coating is usually no thicker than 0.5 mm, and the adhesion between the plastic coating and the metal body is poor. During use, the plastic coating is easily damaged, causing the metal temperature sensor to be exposed to the chemical liquid, corroding the temperature sensor, contaminating the chemical liquid, and even causing the product to be scrapped. In the case of a protective sleeve on the outside of the temperature sensor, since the protective sleeve and the temperature sensor cannot be completely fitted, condensed water will be generated between the temperature sensor and the protective sleeve during the continuous heating and cooling cycle. After long-term use, the temperature sensor will rust, resulting in inaccurate temperature detection or the inability to detect temperature. Summary of the invention

[0004] An object of the present invention is to provide a temperature sensor for measuring the temperature of a chemical liquid in a semiconductor process.

[0005] To achieve the above-mentioned object and other related objects, the present invention provides a temperature sensor, characterized in that it includes:

[0006] Temperature measuring element, used to measure the temperature of chemical liquid;

[0007] A protective sleeve, which is sleeved on the outside of the temperature measuring element and is used to protect the temperature measuring element from contact with the chemical liquid;

[0009] A purge module, used for providing purge gas to the interior of the protective casing;

[0010] Among them, the purge module includes an air inlet channel and an exhaust port, the air inlet end of the air inlet channel is connected to an external air supply device, the air outlet end of the air inlet channel is located at the lower end of the protective sleeve and blows air into the interior of the protective sleeve, and the exhaust port is located on the side wall of the protective sleeve.

[0011] As an optional solution of the present invention, the air intake passage is an air intake pipe.

[0012] As an optional solution of the present invention, the air intake pipe includes a spiral section.

[0013] As an optional solution of the present invention, the air inlet pipe is located in the protective sleeve.

[0014] As an optional solution of the present invention, the diameter of the air inlet pipe is less than or equal to 1 / 2 of the diameter of the protective sleeve.

[0015] As an optional solution of the present invention, the air inlet pipe is arranged outside the protective sleeve, the air outlet end extends into the outside of the protective sleeve, and the air inlet pipe is made of corrosion-resistant material.

[0016] As an optional solution of the present invention, the air inlet pipe is wrapped around the outer wall of the protective sleeve.

[0017] As an optional solution of the present invention, a partition is provided in the protective sleeve, and the partition divides the interior of the protective sleeve into a first space and a second space that are interconnected. The first space is an air inlet channel, and the temperature measuring element and the exhaust port are arranged in the second space.

[0018] As an optional solution of the present invention, the partition is arranged along the length direction of the protective sleeve.

[0019] As an optional solution of the present invention, the exhaust port is located higher than the air inlet end.

[0020] As an optional solution of the present invention, the protective sleeve is made of anti-penetration and anti-corrosion material.

[0021] As an optional solution of the present invention, a pressure reducing valve and a flow switch are provided between the air inlet passage and the external air supply device.

[0022] As an optional solution of the present invention, an exhaust pipe is provided on the exhaust port, and a one-way valve is provided on the exhaust pipe.

[0023] As an optional solution of the present invention, the external gas supply device is used to supply inert gas.

[0024] As an optional solution of the present invention, the temperature measuring element is located at the bottom of the protective sleeve, and the temperature measuring element is a thermal resistor or a thermocouple.

[0025] The technical solution of the present invention ensures that the protective sleeve can be kept dry for a long time during the process by setting a purge module, preventing the temperature sensor from being corroded and infiltrated and causing failure, thereby ensuring the stability of the process. The technical solution of the present invention realizes heat exchange between the purge gas and the chemical liquid by setting a purge module including an air inlet channel, thereby ensuring the accuracy of the temperature sensor measurement result. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A cross-sectional view of a first temperature sensor provided in an embodiment of the present invention is illustrated;

[0027] Figure 2 A cross-sectional view of a second temperature sensor provided in an embodiment of the present invention is illustrated;

[0028] Figure 3 A cross-sectional view of a third temperature sensor provided in an embodiment of the present invention is illustrated.

[0029] Reference numerals:

[0030] 100. Temperature measuring element; 200. Protective sleeve; 300. Purge module; 301. Air inlet channel; 3011. Air inlet end; 3012. Air inlet port; 3013. Air inlet pipe; 3014. First space; 3015. Air outlet end; 302. Partition; 303. Pressure reducing valve; 304. Flow switch; 305. First three-way connector; 3061. Exhaust port; 3062. Exhaust pipe; 307. One-way valve; 308. Second three-way connector; 309. Second space. DETAILED DESCRIPTION

[0031] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0032] See also Figures 1 to 3 A temperature sensor provided by the present invention includes a temperature measuring element 100 and a protective sleeve 200. The temperature measuring element 100 can be a thermocouple or a thermal resistor, etc., which is used to be immersed in the chemical liquid during the process to continuously monitor the temperature of the chemical liquid and feed back to the heating / cooling module to perform constant temperature control of the chemical liquid, thereby ensuring that the chemical liquid is constant at a certain temperature during the cleaning process. The temperature measuring element 100 is placed in the protective sleeve 200, generally placed near the bottom, that is, the temperature sensing end of the temperature sensor, to protect the temperature measuring element 100 from reacting with the chemical liquid. Since the protective sleeve 200 is a hollow tube, condensed water will be generated in the tube under multiple heating and cooling, and the temperature measuring element 100 is usually made of metal, which will cause rust if exposed to a humid environment for a long time, thereby causing inaccurate chemical liquid temperature monitoring or failure of the temperature measuring element 100. Therefore, in a temperature sensor provided by the present invention, a protective sleeve 200 is provided with an air inlet 3012, which is connected to an external air supply device and is used to introduce external gas into the protective sleeve 200 to purge the condensed water in the tube. The side wall of the protective sleeve 200 is also provided with an exhaust port 3061, which is used to discharge the purge gas in the protective sleeve 200 and take the condensed water generated in the protective sleeve 200 out of the protective sleeve 200.

[0033] In order to more fully remove the condensed water in the protective sleeve 200, the exhaust port 3061 can be set at the upper end or top of the side wall of the protective sleeve, and the air inlet 3012 can be set at the lower end or bottom of the side wall of the protective sleeve, so that the external gas can be used as the purge gas for the condensed water in the tube and blow from the bottom of the tube upward along the tube wall to the exhaust port 3061. The external gas is usually an inert gas such as nitrogen, argon, helium, etc.

[0034] like Figure 1 As shown, in a specific embodiment, an air inlet pipe 3013 can also be used to insert air into the protective sleeve 200 from the side wall, and the air outlet end 3015 of the air inlet pipe 3013 located in the protective sleeve 200 is set at the bottom of the protective sleeve 200, and the external gas is introduced into the bottom of the protective sleeve 200 to start purging. In order to further ensure the purging effect of the external gas from the bottom to the top along the tube wall, the position of the exhaust port 3061 is usually set at a position higher than the air inlet 3012. In addition to better discharging condensed water, this air intake method of blowing from the bottom can also increase the air intake path of the external supply gas, so that the external gas can fully exchange heat when it is blown into the protective sleeve 200. In actual use, the diameter of the air inlet pipe 3013 is less than or equal to 1 / 2 of the diameter of the protective sleeve 200. On the one hand, the reasonable setting of the air inlet pipe 3013 in the protective sleeve 200 is ensured. The air inlet pipe 3013 can be set in a winding manner to extend the air inlet path of the external gas, thereby improving the heat exchange effect of the external gas, making the temperature of the external gas close to the temperature of the chemical liquid, and improving the accuracy of the temperature sensor measurement; on the other hand, the rate and pressure of the external gas purge are increased, thereby improving the efficiency of discharging condensed water. Figure 1 The air intake pipe 3013 shown in the figure is spiral-shaped. In other embodiments, the air intake pipe 3013 may also be a straight pipe or other forms.

[0035] like Figures 1 to 3As shown, the air inlet channel 301 of the temperature sensor provided by the present invention is connected to the external air supply device, and a pressure reducing valve 303 and a flow switch 304 can also be arranged between the air inlet end 3011 of the air inlet channel 301 and the external air supply device. When the gas purge starts, the external air supply device starts to supply gas, and the flow switch 304 has the function of flow monitoring and control. When the purge gas pressure is too high, the pressure and flow of the external gas are adjusted by the pressure reducing valve 303 and the flow switch 304 to prevent the gas pressure from being too high to damage the protective sleeve 200, so that the chemical liquid penetrates into the protective sleeve 200 and corrodes the temperature sensor. In addition, an exhaust pipe 3062 is arranged on the exhaust port 3061, and a one-way valve 307 is arranged on the exhaust pipe 3062 to prevent the purge gas from flowing back and bringing the chemical liquid into the protective sleeve 200, causing the temperature sensor to fail. The above-mentioned pressure reducing valve 303, flow switch 304, and one-way valve 307 are arranged to control the pressure, flow, and flow direction of the external gas respectively to ensure the stability of the purge gas.

[0036] exist Figures 1 to 3 In the illustrated embodiment, the air inlet 3012 and the air outlet 3061 of the protective sleeve 200 are provided with a first three-way joint 305 and a second three-way joint 308. The first three-way joint 305 and the second three-way joint 308 respectively fix the air inlet pipe 3013 and the air outlet pipe 3062 to prevent them from falling off or shifting during use, and also facilitate installation and maintenance.

[0037] In actual use, the temperature sensor needs to keep the temperature sensing end immersed in the chemical liquid, and the ambient temperature in the protective sleeve 200 is the same as or close to the temperature of the chemical liquid. Considering that the external gas introduced directly blows toward the temperature measuring element 100, the temperature of the external gas will affect the temperature measurement result. After the temperature measuring element 100 feeds back the wrong signal to the heating / cooling module, the chemical liquid temperature will deviate from the set process temperature, resulting in a reduction in the process yield. The air inlet pipe 3013 provided by the present invention has a certain length, so that the gas does not directly enter the pipe, but is blown into the protective sleeve 200 after a period of heat exchange at the process temperature in the pipe, so that the temperature of the introduced process gas is closer to the temperature of the chemical liquid.

[0038] In order to better perform heat exchange, the air inlet pipe 3013 may be a spiral section or one section thereof may be configured as a spiral section, such as Figure 1 As shown, this winding arrangement increases the heat exchange path and time of the gas in the tube, so that the supply gas and the chemical liquid can fully exchange heat, ensuring that the temperature of the supply gas is closer to the temperature of the chemical liquid, thereby improving the accuracy of the temperature sensor measurement result. The air inlet pipe 3013 here can be one or more.

[0039] In another specific embodiment, see Figure 2, which is different from the first specific implementation method in that the air inlet pipe 3013 is arranged outside the protective sleeve 200, and the air outlet end 3015 of the air inlet pipe 3013 extends into the lower end of the protective sleeve 200, and air is taken in from below. On the one hand, it can ensure that the air inlet pipe 3013 is immersed in the chemical liquid, and before the external gas enters the pipe to purge the condensed water, sufficient heat exchange is carried out to make the temperature of the external gas entering the pipe closer to the temperature of the chemical liquid; on the other hand, the condensed water in the protective sleeve 200 can also be blown away. In this way, the air inlet pipe 3013 can be a spiral section, and one section can also be set as a spiral section to increase the heat exchange contact area between the purge gas and the chemical liquid and improve the preheating effect of the purge gas. Please refer to Figure 2 The spiral section of the air intake pipe 3013 can be directly wound around the outer wall of the protective sleeve 200, which can not only increase the heat exchange area, but also make the structure of the entire temperature sensor simpler without complicated wiring harnesses. In addition, since the air intake channel 301 is immersed in the chemical liquid, the spiral section is made of corrosion-resistant material to extend the service life of the spiral section. Figure 1 and Figure 2 As shown, the air inlet 3012 and the air outlet 3061 are respectively opened on the same side of the protective sleeve 200 and face the same direction. Figure 1 and Figure 2 It is not intended to limit the specific positions of the air inlet 3012 and the air outlet 3061. In other embodiments, the directions of the air inlet 3012 and the air outlet 3061 may be different or opposite, and may be located at any position on the outer circumference of the protective sleeve 200 in the radial direction.

[0040] See also Figure 3The present invention also provides another specific implementation. The difference between this implementation and the first specific implementation is that the air inlet pipe 3013 is not used in this implementation. Instead, a partition 302 is arranged in the protective sleeve 200. The partition 302 extends to the bottom of the protective sleeve 200 and leaves a distance. The partition 302 divides the protective sleeve 200 into a first space 3014 and a second space 309. The temperature measuring element 100 and the exhaust port 3061 are arranged in the second space 3014, and the first space 3014 is the air inlet channel 301. On the one hand, the partition 302 effectively isolates the external gas and the temperature measuring element 100, preventing the external gas from blowing directly onto the temperature measuring element 100, thereby improving the accuracy of temperature measurement; on the other hand, the partition 302 divides the protective sleeve 200 into two to form a gas purge path, and the air inlet end 3011 of the air inlet channel 301 introduces the supply gas, so that the purge gas enters the first space 3014 from the air inlet port 3012, purges downward along the tube wall, reaches the air outlet end 3015 of the air inlet channel 301, continues to enter the second space 309, and then purges upward along the tube wall in the second space 309, and finally takes the condensed water out of the protective sleeve 200 from the exhaust port 3061. The partition 302 divides the air inlet channel 301 of the protective sleeve 200 into the first space 3014 and the second space 309. After the external supply gas enters the first space 3014, it enters the second space 309 to complete the purge. By setting the temperature measuring element 100 in the second space 309, it is avoided that the external gas directly blows onto the temperature measuring element 100, ensuring that the external gas fully exchanges heat with the chemical liquid in the air inlet channel 301. After the temperature of the external gas reaches a temperature close to that of the chemical liquid, it contacts the temperature measuring element 100, thereby improving the measurement accuracy of the temperature sensor. In actual use, the partition 302 is usually arranged along the length direction of the protective sleeve 200 to guide the purge gas to form a regular flow path inside the protective sleeve 200, thereby preventing the purge gas from affecting the stability of the temperature sensor due to uneven pressure distribution in the protective sleeve 200. Figure 3 As shown, the air inlet 3012 and the exhaust port 3061 are respectively opened on both sides of the protective sleeve 200, facing opposite directions. In other embodiments, the directions of the air inlet 3012 and the exhaust port 3061 may not be completely opposite, and they may be respectively set at any position on the outer circumference of the protective sleeve 200 corresponding to the first space 3014 and the second space 309.

[0041] The material of the protective sleeve 200 in multiple embodiments of the present invention is an anti-permeability and anti-corrosion material to prevent the chemical liquid from penetrating into the temperature measuring element 100, causing the temperature sensor to fail, and prolonging the service life of the temperature sensor. In some embodiments, polytetrafluoroethylene material or quartz material or a composite material with anti-permeation and corrosion function can be selected. In order to ensure the measurement effect of the temperature sensor, the diameter of the protective sleeve 200 is usually not greater than 0.25 inches to prevent the gas in the inner cavity of the protective sleeve 200 from affecting the heat exchange effect between the temperature measuring element 100 and the chemical liquid, thereby affecting the measurement accuracy.

[0042] In the semiconductor process, by using the temperature sensor of the present application, during the continuous heating and cooling cycle, by providing a purge gas, on the one hand, the generation of condensed water between the temperature measuring element 100 and the protective sleeve 200 can be avoided or reduced, and on the other hand, the generated condensed water can be discharged in time to protect the temperature measuring element 100 from erosion by the condensed water.

[0043] In summary, the present invention has specifically and fully disclosed the relevant technology through the above-mentioned implementation modes and related drawings, so that those skilled in the art can implement it accordingly. The above-mentioned embodiments are only used to illustrate the present invention, not to limit the present invention. The scope of rights of the present invention should be defined by the claims of the present invention. As for the change of the number of elements described herein or the replacement of equivalent elements, etc., they should still fall within the scope of rights of the present invention.

Claims

1. A temperature sensor, characterized in that: include: Temperature measuring element, used to measure the temperature of chemical liquid; A protective sleeve, which is sleeved on the outside of the temperature measuring element and is used to protect the temperature measuring element from contact with the chemical liquid; A purge module, used for providing purge gas to the interior of the protective casing; Among them, the purge module includes an air inlet channel and an exhaust port, the air inlet end of the air inlet channel is connected to an external air supply device, the air outlet end of the air inlet channel is located at the lower end of the protective sleeve and blows air into the interior of the protective sleeve, and the exhaust port is located on the side wall of the protective sleeve.

2. The temperature sensor according to claim 1, characterized in that: The air intake passage is an air intake pipe.

3. The temperature sensor according to claim 2, characterized in that: The air inlet pipe includes a spiral section.

4. The temperature sensor according to claim 2, characterized in that: The air inlet pipe is located in the protective sleeve.

5. The temperature sensor according to claim 4, characterized in that: The diameter of the air inlet pipe is less than or equal to 1 / 2 of the diameter of the protective sleeve.

6. The temperature sensor according to claim 2, characterized in that: The air intake pipe is arranged outside the protective sleeve and is made of corrosion-resistant material.

7. The temperature sensor according to claim 6, characterized in that: The air inlet pipe is wound around the outer wall of the protective sleeve.

8. The temperature sensor according to claim 1, characterized in that: A partition is arranged inside the protective sleeve, and the partition divides the interior of the protective sleeve into a first space and a second space which are interconnected. The first space is an air inlet channel, and the temperature measuring element and the exhaust port are arranged in the second space.

9. The temperature sensor according to claim 8, characterized in that: The partition is arranged along the length direction of the protective sleeve.

10. The temperature sensor according to claim 1, characterized in that: The exhaust port is located higher than the air inlet end.

11. The temperature sensor according to claim 1, characterized in that: The protective sleeve is made of anti-penetration and anti-corrosion material.

12. The temperature sensor according to claim 1, characterized in that: A pressure reducing valve and a flow switch are provided between the air inlet passage and the external air supply device.

13. The temperature sensor according to claim 1, characterized in that: An exhaust pipe is arranged on the exhaust port, and a one-way valve is arranged on the exhaust pipe.

14. The temperature sensor according to claim 1, characterized in that: The external gas supply device is used for supplying inert gas.

15. The temperature sensor according to claim 1, characterized in that The temperature measuring element is arranged in the protective sleeve at a position close to the bottom, and the temperature measuring element is a thermal resistor or a thermocouple.

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