Method for improving AR waveguide display efficiency and uniformity

Abstract

Embodiments of the present disclosure generally relate to methods of modifying and engineering the effective thickness of an optical device substrate. The method provides for depositing a material that is coefficient-matched to the substrate to alter the thickness profile of the optical device. By adjusting the thickness distribution, the optical path of the light is modulated to direct the light to the outcoupling grating.

Description

background Technical Field

[0001] Embodiments of the present disclosure are generally related to optical devices. More specifically, embodiments described herein provide methods for modifying and engineering the effective thickness of optical device substrates.

[0002] Description of the Prior Art

[0003] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has a palpable physical presence. The virtual reality experience can be generated in 3D and viewed through a head-mounted display (HMD), such as glasses or other wearable display devices with near-eye display panels as optics to display a virtual reality environment that replaces the real environment.

[0004] However, augmented reality enables an experience in which the user can still view the surrounding environment through the optics of the glasses or other HMD device, and can also see images of virtual objects generated for display and presented as part of the environment. Augmented reality can include any type of input, such as audio and tactile input, as well as virtual images, graphics, and images of the environment that enhance or augment the user's experience. As an emerging technology, augmented reality has many challenges and design limitations.

[0005] In particular, maintaining color uniformity and high coupling efficiency in an optical device can be challenging. Color uniformity and coupling efficiency are related to optical interference between different optical paths within the optical device. Accordingly, what is needed in the art is an improved method of modulating optical interference to enhance light coupling efficiency to an output coupler and optimize efficiency across a field of view. Summary of the invention

[0006] In one embodiment, an optical device is provided. The optical device includes: a substrate having a substrate thickness distribution defined by a top surface of the substrate and a bottom surface of the substrate. The substrate thickness distribution varies along a first length parallel to the top surface and a second length perpendicular to the first length. The optical device further includes: a coefficient matching layer disposed on the bottom surface of the substrate, the coefficient matching layer having an engineered thickness distribution defined by an outer surface of the coefficient matching layer and the bottom surface of the substrate. The engineered thickness distribution varies along the first length and the second length perpendicular to the first length. The optical device further includes: a plurality of optical device structures, the plurality of optical device structures being formed on the top surface of the substrate; a low coefficient layer, the low coefficient layer being disposed above the plurality of optical device structures; and an anti-reflection layer, the anti-reflection layer being disposed above the outer surface of the coefficient matching layer.

[0007] In another embodiment, a method of forming a designed thickness distribution in an optical device is provided. The method includes: measuring a substrate thickness distribution of a substrate, the substrate thickness distribution being defined by a distance between a top surface of the substrate and a bottom surface of the substrate along a first length parallel to the top surface and a second length perpendicular to the first length; disposing a coefficient matching layer on the bottom surface of the substrate; and etching the coefficient matching layer to have an engineered thickness distribution to form a designed thickness distribution. The designed thickness distribution is defined by the engineered thickness distribution and the substrate thickness distribution, and the designed thickness distribution varies along the first length and the second length.

[0008] In yet another embodiment, a method of forming a designed thickness distribution in an optical device is provided. The method includes: measuring a substrate thickness distribution of a substrate, the substrate thickness distribution being defined by a distance between a top surface of the substrate and a bottom surface of the substrate along a first length parallel to the top surface and a second length perpendicular to the first length; generating a phase map from the substrate thickness distribution across the bottom surface of the substrate; measuring a non-uniformity of a pitch between adjacent optical device structures of a plurality of optical device structures disposed on the top surface of the substrate; generating an engineered phase profile by subtracting the phase map and the non-uniformity of the pitch from a designed phase map corresponding to a phase to be formed at each position of the optical device; and converting the engineered phase profile into an engineered thickness distribution. The method further includes: disposing a coefficient matching layer on the bottom surface of the substrate to have the engineered thickness distribution to form a designed thickness distribution. The designed thickness distribution is defined by the engineered thickness distribution and the substrate thickness distribution, and the designed thickness distribution varies along the first length and the second length. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In order to be able to understand the above-mentioned features of the present disclosure in detail, the present disclosure briefly summarized above will be described in more detail by reference to embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of the scope, as the present disclosure may admit to other equally effective embodiments.

[0010] Figure 1 is a perspective front view of an optical device according to embodiments described herein.

[0011] Figure 2 is a flow chart of a method of modifying the thickness of an optical device according to embodiments described herein.

[0012] Figures 3A to 3D is a schematic side view of an optical device during a method according to embodiments described herein.

[0013] Figure 4 is a flow chart of a method of modifying the thickness of an optical device according to embodiments described herein.

[0014] Figures 5A to 5D is a schematic side view of an optical device during a method according to embodiments described herein.

[0015] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. DETAILED DESCRIPTION

[0016] Embodiments of the present disclosure are generally related to optical devices. More specifically, embodiments described herein provide methods for modifying and engineering the effective thickness of an optical device substrate. Methods described herein for modulating optical interference of an optical device improve waveguide efficiency, color uniformity, and eye zone uniformity. The methods include removing or applying an additional dielectric layer on an optical device substrate. The thickness of the dielectric layer varies in a two-dimensional plane parallel to the optical device substrate.

[0017] Figure 1 1 is a perspective front view of the optical device 100. It should be understood that the optical device 100 described below is an exemplary optical device. In one embodiment that can be combined with other embodiments described herein, the optical device 100 is a waveguide combiner, such as an augmented reality waveguide combiner. The optical device 100 includes a plurality of optical device structures 102 disposed on a top surface 103 of a substrate 101. The optical device structure 102 may be a nanostructure having a submicron size (e.g., a nanometer size). In one embodiment that can be combined with other embodiments described herein, an area of ​​the optical device structure 102 corresponds to one or more gratings 104, such as a first grating 104a, a second grating 104b, and a third grating 104c. In another embodiment that can be combined with other embodiments described herein, the optical device 100 is a waveguide combiner, including at least a first grating 104a corresponding to an input coupling grating and a third grating 104c corresponding to an output coupling grating. The waveguide combiner according to an embodiment that can be combined with other embodiments described herein includes a second grating 104b corresponding to an intermediate grating.

[0018] Although Figure 1While the optical device structures 102 are depicted as having a cross-section that is square or rectangular in shape, the cross-section of the optical device structures 102 may have other shapes, including but not limited to a circular, triangular, elliptical, regular polygonal, irregular polygonal, and / or irregularly shaped cross-section. In some embodiments that may be combined with other embodiments described herein, the cross-sections of the plurality of optical device structures 102 have cross-sections of different shapes. In other embodiments that may be combined with other embodiments described herein, the cross-sections of the optical device structures 102 have cross-sections of substantially the same shape. The plurality of optical device structures 102 may also be angled relative to the top surface 103 of the substrate 101.

[0019] The light engine 110 is configured to direct the light beam 112 to the optical device 100. In one example, the light engine 110 includes a microdisplay to provide a pattern to the optical device 100 via the light beam 112. The light beam 112 undergoes total internal reflection through the optical device 100. The optical device 100 directs the light beam 112 away to the human eye of a user of the optical device 100. In order to improve the coupling efficiency and color uniformity of the optical device 100, the optical device 100 may be modulated to direct more of the light beam 112 in the first direction 114 compared to the second direction 116. The first direction 114 corresponds to a direction toward the third grating 104c, while the second direction 116 corresponds to a direction away from the third grating 104c. When the local substrate thickness variation is small (e.g., the variation is less than 500nm), the first direction 114 has a high probability of being destructive interference, while the second direction 116 has a high probability of being constructive interference. The constructive interference along the second direction 116 and the destructive interference along the first direction 114 will reduce the coupling efficiency of the optical device 100 .

[0020] The methods 200 and 400 described below include removing or applying an additional dielectric layer on the optical device substrate. The thickness of the dielectric layer varies in a two-dimensional plane parallel to the substrate 101. The methods 200 and 400 described herein allow the optical path of the optical device 100 to be adjusted after manufacturing to improve one or more characteristics of the optical device 100. For example, an optical device 100 that does not meet a predetermined threshold of optical efficiency can be retroactively adjusted to meet the threshold using the embodiments described herein.

[0021] Figure 2 is a flow chart of a method 200 of modifying the thickness of an optical device 100 . Figures 3A to 3Dis a schematic side view of the optical device 100 during the method 200. The method 200 improves the display efficiency and display uniformity of the optical device 100 without compromising and / or reducing the display resolution. The method 200 also rescues the optical device 100 that has low efficiency or display uniformity below a predetermined threshold. The optical device 100 has been formed but may have low efficiency due to the thickness of the optical device or the pitch uniformity of the optical device structure. Adjusting the thickness variation will allow the light to follow the correct optical path toward the output coupling grating, such as the third grating 104c. The phase profile is adjusted by changing the thickness of the optical device 100.

[0022] like Figures 3A to 3D As shown in FIG. 1 , the optical device 100 includes a plurality of optical device structures 102 formed on a substrate 101. The method 200 is applied to the optical device structures 102 having well-controlled pitch uniformity and angular uniformity (eg, high uniformity). The pitch of the optical device structures 102 (see FIG. 1 ) is preferably a plurality of optical device structures 102 formed on a substrate 101. Figure 5A ) is defined as the distance between the leading or trailing edges of adjacent optical device structures 102. If the ratio of the standard deviation of the pitch to the nominal value of the pitch is less than about 10 -4 , the optical device structure 102 is well controlled.

[0023] The substrate 101 includes a bottom surface 105 and a top surface 103. The region of the optical device structure 102 corresponds to one or more gratings 104, such as a first grating 104a, a second grating 104b, and a third grating 104c. Prior to the method 200, the optical device 100 is inspected. For example, a metrology process inspects the optical device 100 to determine whether the optical device 100 meets predetermined thresholds for display efficiency and display uniformity.

[0024] At operation 201, Figure 3A , a substrate thickness profile 302 of a substrate 101 is measured. The substrate thickness profile 302 is measured using a laser interferometer. The substrate thickness profile 302 is defined by the distance between the top surface 103 and the bottom surface 105 of the substrate along a first length 107 of the substrate 101. The first length 107 is parallel to the top surface 103 of the substrate 101. The substrate thickness profile 302 may also vary along a second length 109 that is perpendicular to the first length 107. The substrate thickness profile 302 is collected as data and sent to a controller or computer.

[0025] At operation 202, a design thickness distribution 304 is determined. The design thickness distribution 304 is a target thickness distribution to be formed from the substrate thickness distribution 302. The design thickness distribution 304 can vary across the first length 107 of the substrate in a linear or non-linear distribution. The design thickness distribution 304 can also vary along a direction perpendicular to the first length 107, for example, the design thickness distribution 304 can vary along the second length 109.

[0026] At operation 203, an engineered thickness profile 306 is determined. The engineered thickness profile 306 is determined by subtracting the designed thickness profile 304 at each location along the first length 107 from the substrate thickness profile 302 at each location along the first length 107. The engineered thickness profile may also be determined to vary along a direction perpendicular to the first length 107, for example, the designed thickness profile 304 may vary along the second length 109. The engineered thickness profile 306 is calculated using physical optics and ray tracing optical models with design information of the complete optical device 100, for example, critical dimensions of the optical device structures 102, heights, pitches and angles of the optical device structures 102, optical material properties of the optical device 100.

[0027] At operation 204, if Figure 3B , an index matching layer 308 having an engineered thickness profile 306 is provided to form a designed thickness profile 304. The designed thickness profile 304 is different from the substrate thickness profile 302. The index matching layer 308 is provided over the bottom surface 105 of the substrate 101. The index matching layer 308 has a first refractive index that matches or substantially matches a second refractive index of the substrate 101. For example, the first refractive index and the second refractive index are within about 5% of each other. The refractive index of the substrate 101 and the index matching layer 308 is between about 1.7 and about 2.9. The difference between the refractive index of the substrate 101 and the index matching layer 308 is between about 0 and about 0.1.

[0028] The substrate 101 and the coefficient matching layer 308 may be formed of any suitable material, as long as the substrate 101 can sufficiently transmit light in the target wavelength or wavelength range and can serve as a suitable support for the optical device 100. The substrate 101 may be a material including, but not limited to, amorphous dielectrics, non-amorphous dielectrics, crystalline dielectrics, silicon oxide, polymers, and combinations thereof. In some embodiments that may be combined with other embodiments described herein, the substrate 101 includes a transparent material. In one example, the substrate 101 includes one or more of the following: high coefficient glass, silicon dioxide (SiO2), fused silica, quartz, silicon carbide (SiC), LiNbO3, diamond (C), gallium nitride (GaN), sapphire, or combinations thereof. The coefficient matching layer 308 is a material containing silicon nitride (SiN), titanium oxide (TiO x ), tantalum oxide (TaO x ), niobium oxide (NbO x )、ZrO x), or a deposited thin film of a synthetic nanoparticle material. For example, the coefficient matching layer 308 is a titanium oxide (TiO2) or zirconium oxide (ZrO2) material with nanoparticles embedded in a polymer matrix. In one example, the substrate 101 and the coefficient matching layer 308 are different materials. In another example, the substrate 101 and the coefficient matching layer 308 are the same material.

[0029] The substrate 101 and the coefficient matching layer 308 are combined to form a designed thickness distribution 304. The designed thickness distribution 304 is defined by the distance between the top surface 103 of the substrate 101 and the outer surface 310 of the coefficient matching layer 308 along the first length 107 and the second length 109 perpendicular to the first length 107. The outer surface 310 faces away from the substrate 101. The designed thickness distribution 304 and the engineered thickness distribution 306 are not limited to Figures 3A to 3D And can be distributed in a determined manner to improve the performance of the optical device.

[0030] In a first embodiment, which may be combined with other embodiments described herein, a coefficient matching layer 308 is disposed above the bottom surface 105 of the substrate 101. The coefficient matching layer 308 is selectively etched to form an engineered thickness profile 306. The selective etching includes at least one of ion implantation, ion beam etching (IBE), reactive ion etching (RIE), directional RIE, plasma etching, and thermal atomic layer etching. The engineered thickness profile 306 is combined with the substrate thickness profile 302 to form the designed thickness profile 304. In a second embodiment, which may be combined with other embodiments described herein, the coefficient matching layer 308 is selectively deposited. For example, an inkjet printing process is used to selectively deposit the coefficient matching layer 308 to form the engineered thickness profile 306. The engineered thickness profile 306 is combined with the substrate thickness profile 302 to form the designed thickness profile 304.

[0031] At optional operation 205, as Figure 3C As shown in FIG. 3 , an anti-reflection layer 312 is disposed over an outer surface 310 of the coefficient matching layer 308. The anti-reflection layer 312 is conformal to the coefficient matching layer 308. In one embodiment, the anti-reflection layer 312 includes a plurality of stacked material layers. For example, the anti-reflection material layer includes one or more of the following: SiO x 、ZrO x , and TiO x The anti-reflection layer 312 may include alternating low-index layers and high-index layers. The low-index layers have a refractive index between about 1.4 and about 1.7. The high-index layers have a refractive index greater than about 2. The low-index layers are SiO x The high coefficient layer is a metal oxide material. The anti-reflection layer 312 is configured to increase the efficiency of the optical device by reducing light lost due to reflection. The anti-reflection layer 312 is provided via an ALD process.

[0032] At optional operation 206, as Figure 3D As shown in FIG. 1 , a low coefficient layer 314 is disposed above the plurality of optical device structures 102. The low coefficient layer 314 is SiO x The low-index layer 314 is used to improve the anti-reflection performance. The low-index layer 314 has a refractive index of about 1.4 to about 1.7.

[0033] The phase change of the optical device 100 is adjusted to modulate the optical interference between different optical paths by forming the designed thickness distribution 304. Forming the designed thickness distribution 304 will enhance the light coupling efficiency to the output coupling grating (e.g., the third grating 104c) and optimize the efficiency across the optical device 100. The method 200 can be utilized to allow an optical device 100 that has been manufactured and does not meet a predetermined efficiency threshold to meet the predetermined efficiency threshold.

[0034] Figure 4 is a flow chart of a method 400 of modifying the thickness of an optical device 100 . Figures 5A to 5D is a schematic side view of the optical device 100 during the method 400. The method 400 improves the display efficiency and display uniformity of the optical device 100 without compromising and / or reducing the display resolution. The method 400 also rescues the optical device 100 that has low efficiency or display uniformity below a predetermined threshold. The optical device 100 has been formed but may have low efficiency due to the thickness of the optical device or the pitch uniformity of the optical device structure. Adjusting the thickness variation will allow the light to follow the correct optical path toward the output coupling grating, such as the third grating 104c. The phase profile is adjusted by changing the thickness of the optical device 100.

[0035] like Figure 5A As shown in FIG. 4 , optical device 100 includes a plurality of optical device structures 102 formed on substrate 101. Method 400 is applied to optical device structures 102 having uncontrolled pitch uniformity and angular uniformity (e.g., low uniformity). If the ratio of the standard deviation of pitch 516 to the nominal value of pitch 516 is greater than about 10 -4 , the optical device structure 102 is considered to be well controlled.

[0036] The substrate 101 includes a bottom surface 105 and a top surface 103. The region of the optical device structure 102 corresponds to one or more gratings 104, such as a first grating 104a, a second grating 104b, and a third grating 104c. An anti-reflection layer 512 is disposed over the bottom surface 105 of the substrate 101. A low coefficient layer 514 is disposed over the plurality of optical device structures 102.

[0037] Prior to method 400, optical device 100 is inspected. For example, a metrology process inspects optical device 100 to determine whether optical device 100 meets predetermined thresholds for display efficiency and display uniformity. If optical device 100 does not meet the predetermined thresholds, method 400 may be performed. Method 400 may be performed to restore optical device 100 to meet the predetermined thresholds.

[0038] At operation 401, Figure 5A As shown in FIG. 5 , a substrate thickness distribution 502 of a substrate 101 is measured and a phase map is generated. The substrate thickness distribution 502 is measured using a laser interferometer. The substrate thickness distribution 502 is defined by the distance between the top surface 103 and the bottom surface 105 of the substrate 101 along a first length 107 of the substrate 101 and perpendicular to the first length 107, for example, along a second length 109 perpendicular to the first length 107. The substrate thickness distribution 502 is collected as data and sent to a controller or computer. A phase map is generated based on the substrate thickness distribution 502. The phase map specifies the phase at each location on the substrate 101 across the bottom surface 105 of the substrate 101. The phase map is generated by determining the phase change at each location. The phase change is determined by taking the thickness change at each location and dividing by the wavelength of the transmitted light multiplied by 2pi.

[0039] At operation 402, a design thickness profile 504 is determined and a design phase map is generated. The design thickness profile 504 is a target thickness profile to be formed from the substrate thickness profile 502. The design thickness profile 504 may vary in a linear or nonlinear profile across the first length 107 and along the second length 109 perpendicular to the first length 107 of the substrate 101. A design phase map is generated from the design thickness profile 504. The design phase map specifies the phase to be formed at each location on the substrate 101 in the final optical device 100. The design phase map is generated by a waveguide design software application.

[0040] At operation 403, non-uniformity of the pitch 516 of the plurality of optical device structures 102 is measured. The pitch 516 is defined as the distance between the leading edge or the trailing edge of adjacent optical device structures 102. The pitch 516 of each adjacent optical device structure 102 is measured to determine the degree of non-uniformity of the pitch 516 across the substrate 101. The pitch 516 at each location across the substrate 101 is plotted. The uniformity of the optical device structures 102 is defined by the ratio of the standard deviation of the pitch 516 to the nominal value of the pitch 516.

[0041] At operation 404, an engineered phase profile is generated. The engineered phase profile is a change in the phase of the phase map to form a designed phase map. The engineered phase profile is generated by subtracting the phase map and the pitch 516 non-uniformity from the designed phase map at each location across the optical device 100. The engineered phase profile can be generated using an engineered phase at each location along the first length 107 and in a direction perpendicular to the first length 107, for example, along the second length 109.

[0042] At operation 405, the engineered phase profile is converted to an engineered thickness profile 506. The engineered phase profile is converted to an engineered thickness profile 506 by dividing the phase change at each location by the wavelength of the transmitted light times 2pi.

[0043] The engineered thickness distribution 506 is determined by subtracting the designed thickness distribution 504 at each location along the first length 107 from the substrate thickness distribution 502 at each location along the first length 107 and perpendicular to the first length 107 (e.g., along the second length 109). The engineered thickness distribution 506 is calculated using physical optics and ray tracing optical models with design information of the complete optical device 100 (e.g., critical dimensions of the optical device structures 102, heights, pitches and angles of the optical device structures 102, optical material properties of the optical device 100).

[0044] At operation 406, Figure 5B As shown in FIG. 4 , the anti-reflective layer 512 is removed. The anti-reflective layer 512 is removed by an etching process. At operation 407, as shown in FIG. Figure 5B and 5C , an index matching layer 508 is provided. The index matching layer 508 is provided over the bottom surface 105 of the substrate 101. The index matching layer 508 has a first refractive index that matches or substantially matches a second refractive index of the substrate 101.

[0045] In combination with other embodiments described herein Figure 5B and Figure 5C In the first embodiment shown in FIG. 1 , the coefficient matching layer 508 is disposed above the bottom surface 105 of the substrate 101 (see Figure 5B ). The coefficient matching layer 508 is selectively etched to form an engineered thickness distribution 506. The selective etching includes at least one of: ion implantation, ion beam etching (IBE), reactive ion etching (RIE), directional RIE, plasma etching, and thermal atomic layer etching. The engineered thickness distribution 506 is combined with the substrate thickness distribution 502 to form a designed thickness distribution 504.

[0046] In combination with other embodiments described herein Figure 5CIn the second embodiment shown in , the coefficient matching layer 508 is selectively deposited. For example, an inkjet printing process is used to selectively deposit the coefficient matching layer 508 to form the engineered thickness distribution 506. In other words, the coefficient matching layer 508 is deposited to have the engineered thickness distribution 506 without an etching process. Therefore, Figure 5B The operations shown are optional. Engineered thickness profile 506 is combined with substrate thickness profile 502 to form designed thickness profile 504.

[0047] The substrate 101 and the coefficient matching layer 508 are combined to form a designed thickness distribution 504. The designed thickness distribution 504 is defined by the distance between the top surface 103 of the substrate 101 and the outer surface 510 of the coefficient matching layer 508 along the first length 107 and perpendicular to the first length 107, such as along the second length 109. The designed thickness distribution 504 is different from the substrate thickness distribution 502. The outer surface 510 faces away from the substrate 101. The designed thickness distribution 504 and the engineered thickness distribution 506 are not limited to Figures 5A to 5D , and can be distributed in a determined manner to improve the performance of the optical device.

[0048] At optional operation 408, as Figure 5D , an anti-reflective layer 512 is disposed over an outer surface 510 of the coefficient matching layer 508. The anti-reflective layer 512 is conformal to the coefficient matching layer 508. In one embodiment, the anti-reflective layer 512 includes a plurality of stacked material layers. The anti-reflective material may include alternating low coefficient layers and high coefficient layers. The anti-reflective layer 512 is configured to increase the efficiency of the optical device by reducing light lost due to reflection. The anti-reflective layer 512 is disposed via an ALD process.

[0049] By forming the designed thickness profile 504, the phase change of the optical device 100 is adjusted to modulate the optical interference between the different optical paths. Forming the designed thickness profile 304 will enhance the light coupling efficiency to the output coupling grating (e.g., the third grating 104c) and optimize the efficiency across the optical device 100. The method 400 can be utilized to allow an optical device 100 that has been manufactured that does not meet a predetermined efficiency threshold to meet the predetermined efficiency threshold.

[0050] In summary, methods are provided to modify and engineer the effective thickness of an optical device substrate. The methods provide for depositing a material that matches the substrate coefficient to modify the thickness profile of the optical device. By adjusting the thickness profile, the optical path of the light is modulated to direct the light to the output coupling grating. The methods improve display efficiency and uniformity without compromising display resolution. The methods are also used to modify an optical device that does not meet a predetermined efficiency threshold so that the optical device meets the predetermined threshold.

[0051] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope of the disclosure is to be determined by the following claims.

Claims

1. An optical device, comprising: a substrate having a substrate thickness profile defined by a top surface of the substrate and a bottom surface of the substrate, wherein the substrate thickness profile varies along a first length parallel to the top surface and a second length perpendicular to the first length; a coefficient matching layer disposed on the bottom surface of the substrate, the coefficient matching layer having an engineered thickness profile defined by an outer surface of the coefficient matching layer and the bottom surface of the substrate, wherein the engineered thickness profile varies along the first length and the second length perpendicular to the first length; a plurality of optical device structures formed on the top surface of the substrate; A low coefficient layer, the low coefficient layer being disposed above the plurality of optical device structures; and An anti-reflection layer is disposed over the outer surface of the coefficient matching layer.

2. The optical device of claim 1, wherein the substrate has a first refractive index and the index matching layer has a second refractive index, wherein the second refractive index substantially matches the first refractive index.

3. The optical device of claim 1, wherein the engineered thickness profile varies in a first direction parallel to the top surface and in a second direction perpendicular to the first direction. The optical device of claim 1 , wherein the anti-reflection layer comprises two or more material stack layers.

5. The optical device of claim 4, wherein the antireflection layer comprises alternating low-index layers and high-index layers, wherein the low-index layers have a refractive index between about 1.4 and about 1.7 and the high-index layers have a refractive index greater than about 2.

0.

6. The optical device of claim 1, wherein the low-index layer has a refractive index of about 1.4 to about 1.

7.

7. The optical device of claim 1, wherein the low coefficient layer is a silicon oxide material.

8. The optical device of claim 1, wherein the plurality of optical device structures are angled relative to the bottom surface of the substrate.

9. The optical device of claim 1, wherein the coefficient matching layer is a polymer material or a nanoparticle-based material.

10. A method for forming a designed thickness distribution in an optical device, comprising: measuring a substrate thickness profile of a substrate, the substrate thickness profile being defined by a distance between a top surface of the substrate and a bottom surface of the substrate along a first length parallel to the top surface and a second length perpendicular to the first length; providing a coefficient matching layer on the bottom surface of the substrate; and The coefficient matching layer is etched to have an engineered thickness profile to form a designed thickness profile, wherein the designed thickness profile is defined by the engineered thickness profile and the substrate thickness profile, wherein the designed thickness profile varies along the first length and the second length.

11. The method of claim 10, wherein the etching comprises at least one of ion implantation, ion beam etching (IBE), reactive ion etching (RIE), directional RIE, plasma etching, and thermal atomic layer etching.

12. The method of claim 10, further comprising: An anti-reflection layer is disposed above the coefficient matching layer.

13. The method of claim 10, further comprising: A low coefficient layer is disposed over a plurality of optical devices disposed on the top surface of the substrate.

14. A method for forming a designed thickness distribution in an optical device, comprising: measuring a substrate thickness profile of a substrate, the substrate thickness profile being defined by a distance between a top surface of the substrate and a bottom surface of the substrate along a first length parallel to the top surface and a second length perpendicular to the first length; generating a phase map from the substrate thickness profile across the bottom surface of the substrate; measuring a non-uniformity of a pitch between adjacent optical device structures of a plurality of optical device structures disposed on the top surface of the substrate; generating an engineered phase profile by subtracting the phase map and the pitch non-uniformity from a designed phase map corresponding to the phase to be formed at each position of the optical device; converting the engineered phase profile into an engineered thickness profile; and A coefficient matching layer is disposed on the bottom surface of the substrate to have the engineered thickness profile to form a designed thickness profile, wherein the designed thickness profile is defined by the engineered thickness profile and the substrate thickness profile, wherein the designed thickness profile varies along the first length and the second length.

15. The method of claim 14, wherein the coefficient matching layer is disposed via an inkjet printing process to have the engineered thickness profile.

16. The method of claim 14, wherein the substrate has a first refractive index and the index matching layer has a second refractive index, wherein the second refractive index substantially matches the first refractive index.

17. The method of claim 14, further comprising: An anti-reflection layer is removed from the bottom surface of the substrate before providing the coefficient matching layer.

18. The method of claim 17, further comprising: The anti-reflection layer is disposed over an outer surface of the coefficient matching layer via an ALD process.

19. The method of claim 17, wherein the anti-reflective layer comprises two or more material stack layers.

20. The method of claim 17, wherein the antireflection layer comprises alternating low index layers and high index layers, wherein the low index layers have a refractive index between about 1.4 and about 1.7 and the high index layers have a refractive index greater than about 2.0.

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