Tail gas treatment equipment, tail gas treatment method and diffusion furnace

Abstract

The present application relates to an exhaust gas treatment device, an exhaust gas treatment method and a diffusion furnace. The exhaust gas treatment device comprises: a first air intake pipeline for receiving exhaust gas; a first filter assembly, the air intake end of the first filter assembly is connected to the first air intake pipeline; a second filter assembly, the air intake end of the second filter assembly is connected to the first air intake pipeline; an exhaust pipeline, the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both connected to the exhaust pipeline; wherein the first filter assembly comprises N liquid filters, the second filter assembly comprises M liquid filters, and M and N satisfy the relationship: M>N. The present application is conducive to reducing the use cost and maintenance cost of the exhaust gas treatment equipment.

Description

Technical Field

[0001] The present application relates to the technical field of waste gas treatment, and in particular to tail gas treatment equipment, a tail gas treatment method and a diffusion furnace. Background Art

[0002] The element diffusion process is an indispensable step in the production process of solar cells. By controlling parameters such as the heat treatment parameters and the concentration of the diffusant, the performance of the solar cell can be adjusted and optimized. It is one of the key technologies for manufacturing high-efficiency solar cells. For example, the boron diffusion equipment can be used to diffuse the boron element on the surface of the solar cell material, improve the material properties, increase the light absorption capacity of the solar cell, and improve the photoelectric conversion efficiency of the solar cell. The current boron diffusion equipment uses a cooling liquid effusion bottle and a fiber filter for exhaust gas treatment during operation. However, the exhaust gas treatment device of the current boron diffusion equipment has the problem of high operation and maintenance costs. Summary of the invention

[0003] Based on this, it is necessary to provide an exhaust gas treatment device, an exhaust gas treatment method and a diffusion furnace that can reduce operating costs and maintenance costs in order to address the above problems.

[0004] In a first aspect, an embodiment of the present application provides an exhaust gas treatment device, comprising:

[0005] A first air intake pipeline, for receiving exhaust gas;

[0006] a first filter assembly, wherein an air inlet end of the first filter assembly is in communication with the first air inlet pipeline;

[0007] a second filter assembly, wherein an air inlet end of the second filter assembly is in communication with the first air inlet pipeline;

[0008] An exhaust pipeline, the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both in communication with the exhaust pipeline;

[0009] The first filter assembly includes N liquid filter elements, the second filter assembly includes M liquid filter elements, and M and N satisfy the relationship: M>N.

[0010] In one embodiment, the first filter assembly and the second filter assembly share at least one liquid filter element.

[0011] In one embodiment, the first filter assembly includes a first branch pipeline and a liquid filter element arranged in series;

[0012] One end of the first branch pipeline away from the liquid filter is connected to the first air inlet pipeline, and the air outlet end of the liquid filter is connected to the exhaust pipeline; a first on-off control element is arranged on the first branch pipeline.

[0013] In one embodiment, the second filter assembly includes at least two of the liquid filter elements arranged in series;

[0014] Among the at least two liquid filters, the inlet end of the liquid filter closest to the first air inlet pipeline is connected to the first air inlet pipeline, and the liquid filter closest to the exhaust pipeline and the liquid filter in the first filter assembly are configured as the same liquid filter.

[0015] In one of the embodiments, along the flow direction of the exhaust gas, the volume of the filtered liquid in each of the liquid filter elements of the second filter assembly gradually decreases.

[0016] In one embodiment, the exhaust gas treatment equipment further comprises:

[0017] A second air inlet pipeline is used to receive clean gas; the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both connected to the second air inlet pipeline;

[0018] A second on-off control component is provided on the second air intake pipeline;

[0019] a third filter element, wherein the third filter element is provided with a first port and a second port; an air inlet end of the first filter element and an air inlet end of the second filter element are both in communication with the first port;

[0020] a liquid discharge pipeline, connected to the second port;

[0021] The third on-off control component is arranged on the liquid discharge pipeline.

[0022] In one of the embodiments, the third filter element is further provided with a third port, and the third port is communicated with the first air intake pipeline.

[0023] In one of the embodiments, the exhaust gas treatment device further includes a liquid inlet pipeline for receiving liquid, and the first filter assembly and the second filter assembly are both in communication with the liquid inlet pipeline.

[0024] In one embodiment, the liquid inlet pipeline comprises:

[0025] Main road;

[0026] Multiple second branch pipelines correspond one by one to the liquid filter elements of the first filter assembly and the second filter assembly; one end of each of the second branch pipelines is connected to the main pipeline, and the other end is connected to the corresponding liquid filter element; each of the second branch pipelines is also provided with a fourth on-off control element.

[0027] In one embodiment, the exhaust gas treatment device also includes a multi-way valve, which includes a first interface, a second interface and a third interface, the first interface is connected to the outlet end of the first air intake pipe, the second interface is connected to the inlet end of the first filter component, and the third interface is connected to the inlet end of the second filter component.

[0028] In one of the embodiments, the exhaust gas treatment device further includes a suction piece, and the suction piece is arranged on the exhaust pipe.

[0029] In one embodiment, the exhaust gas treatment equipment further comprises:

[0030] A cooling element, arranged on the first air intake pipeline;

[0031] a fifth on-off control component, disposed on the first air intake pipeline;

[0032] The sixth on-off control component is arranged on the exhaust pipe.

[0033] In a second aspect, an embodiment of the present application provides a diffusion furnace, comprising:

[0034] a reaction chamber; and

[0035] As described in the first aspect of the embodiment of the exhaust gas treatment equipment; the first air inlet pipeline of the exhaust gas treatment equipment is connected to the exhaust gas outlet end of the reaction chamber.

[0036] The tail gas treatment equipment and diffusion furnace provided in the embodiment of the present application are provided with a first filter assembly and a second filter assembly, and the air inlet ends of the first filter assembly and the second filter assembly are both connected to the first air inlet pipeline, and the air outlet ends of the first filter assembly and the second filter assembly are both connected to the exhaust pipeline, and the number of liquid filter elements in the second filter assembly is greater than the number of liquid filter elements in the first filter assembly. In this way, when the tail gas is treated, the tail gas can be selectively passed into the first filter assembly or the second filter assembly according to the actual working conditions of the reaction chamber, such as: when the boron oxide content in the tail gas is high, the tail gas is passed into the second filter assembly, and when the boron oxide content in the tail gas is low, the tail gas is passed into the first filter assembly. In this way, on the one hand, compared with the conventional method of constantly replacing the filter element to maintain the tail pipe filtration structure and solve the problem of tail pipe blockage, the method of only replacing the filter liquid can be simpler. Therefore, compared with the conventional filtering method, the maintenance cycle can be improved and the maintenance cost can be reduced. On the other hand, when the boron oxide content in the exhaust gas is low, only a small number of liquid filters need to be passed through the exhaust gas, which is beneficial to reduce the load on the components on the exhaust pipe (such as the suction piece), thereby increasing the service life of the suction piece and reducing the cost of use.

[0037] In a third aspect, an embodiment of the present application provides a tail gas treatment method, comprising:

[0038] Provide an exhaust gas treatment device; the exhaust gas treatment device comprises a first air inlet pipeline, a first filter assembly, a second filter assembly and an exhaust pipeline, one end of the first air inlet pipeline is connected to the exhaust gas outlet end of the reaction chamber, the air inlet end of the first filter assembly and the air inlet end of the second filter assembly are both connected to the other end of the first air inlet pipeline, the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both connected to the exhaust pipeline, the first filter assembly comprises N liquid filter elements, the second filter assembly comprises M liquid filter elements, and M and N satisfy the relationship: M>N;

[0039] A first preset parameter of the reaction chamber is obtained. If the first preset parameter is greater than a first threshold, the tail gas of the reaction chamber is controlled to flow into the second filter component. If the first preset parameter is equal to the first threshold, the tail gas of the reaction chamber is controlled to flow into the first filter component.

[0040] In one embodiment, after providing the tail gas treatment equipment and before obtaining the first preset parameter of the reaction chamber, the method further includes:

[0041] A second preset parameter of the reaction chamber is obtained. If the second preset parameter is less than or equal to a second threshold, the step of obtaining the first preset parameter of the reaction chamber is performed. If the second preset parameter is greater than the second threshold, the first filter component and the second filter component are cleaned.

[0042] In one embodiment, the exhaust gas treatment device further includes a second air intake pipeline, a third filter element, a liquid discharge pipeline, a liquid intake pipeline and a suction element; the air outlet end of the first filter component and the air outlet end of the second filter component are both connected to the second air intake pipeline; the third filter element is provided with a first port and a second port, the air intake end of the first filter component and the air intake end of the second filter component are both connected to the first port, and the liquid discharge pipeline is connected to the second port; the first filter component and the second filter component are both connected to the liquid intake pipeline; the suction element is provided on the exhaust pipeline;

[0043] The cleaning of the first filter assembly and the second filter assembly comprises:

[0044] Passing clean gas into the second air inlet pipeline to discharge the liquid in the first filter assembly and the second filter assembly from the drain pipeline via the third filter element;

[0045] Passing a cleaning liquid into the liquid inlet pipeline to clean the first filter assembly and the second filter assembly, and discharging the cleaning liquid in the first filter assembly and the second filter assembly from the liquid discharge pipeline via the third filter element;

[0046] Passing the filtered liquid into the liquid filter elements of the first filter assembly and the second filter assembly through the liquid inlet pipeline;

[0047] Cleaning gas is introduced into the second air inlet pipeline to purge the suction member.

[0048] The exhaust gas treatment method provided in the embodiment of the present application can selectively pass the exhaust gas into the first filter component or the second filter component according to the actual working conditions of the reaction chamber when performing exhaust gas treatment. In this way, on the one hand, compared with the conventional method of constantly replacing the filter element to maintain the tail exhaust pipe filtration structure and solve the problem of tail exhaust pipe blockage, the method of only replacing the filter liquid can be simpler, so compared with the conventional filtering method, the maintenance cycle can be increased and the use cost and maintenance cost can be reduced; on the other hand, when the boron oxide content in the exhaust gas is low, it is only necessary to pass the exhaust gas into a smaller number of liquid filters, which is beneficial to reduce the load of the components (such as the suction piece) on the exhaust pipe, thereby increasing the service life of the suction piece and reducing the use cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the technical solutions in the embodiments or exemplary embodiments of the present application, the drawings required for use in the description of the embodiments or exemplary embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0050] Figure 1 A schematic structural diagram of a diffusion furnace provided in one embodiment of the present application.

[0051] Figure 2 for Figure 1 The schematic diagram of the tail gas treatment equipment of the diffusion furnace is shown in the first state.

[0052] Figure 3 for Figure 1 A schematic diagram of the tail gas treatment equipment of the diffusion furnace is shown in the second state.

[0053] Figure 4 for Figure 1 A schematic diagram of the tail gas treatment equipment of the diffusion furnace is shown in the third state.

[0054] Figure 5 for Figure 1 A schematic diagram of the tail gas treatment equipment of the diffusion furnace is shown in the fourth state.

[0055] Figure 6A schematic diagram of the arrangement of a first filter component and a second filter component of an exhaust gas treatment device provided in one embodiment of the present application.

[0056] Figure 7 A simplified schematic diagram of an exhaust gas treatment device provided in one embodiment of the present application.

[0057] Figure 8 A schematic flow chart of an exhaust gas treatment method provided in one embodiment of the present application.

[0058] Fig. 9 Another schematic flow chart of an exhaust gas treatment method provided in one embodiment of the present application.

[0059] Fig.10 for Fig. 9 A flow chart of S200 in FIG.

[0060] Reference numerals:

[0061] 1. Diffusion furnace; 11. Exhaust treatment equipment; 11a. Liquid filter; 111. First air inlet pipeline; 112. First filter assembly; 1121. First branch pipeline; 1122. First on-off control element; 113. Second filter assembly; 1131. Third branch pipeline; 1132. Seventh on-off control element; 114. Exhaust pipeline; 115. Suction element; 116. Second air inlet pipeline; 117. Second on-off control element; 118. Third filter; 118a. First port; 118b. Second port; 118c. Third port; 11 9. Liquid discharge pipeline; 1110. Third on-off control element; 1111. Liquid inlet pipeline; 1111-1. Main pipeline; 1111-2. Second branch pipeline; 1111-3A. Fourth on-off control element a; 1111-3B. Fourth on-off control element b; 1111-3C. Fourth on-off control element c; 1112. Cooling element; 1113. Fifth on-off control element; 1114. Sixth on-off control element; 1115. Multi-way valve; 1115a. First interface; 1115b. Second interface; 1115c. Third interface; 12. Reaction chamber. DETAILED DESCRIPTION

[0062] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0063] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0064] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0065] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0066] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0067] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0068] Related technology 1 uses cooling liquid accumulator and fiber filter for tail gas treatment. However, due to the different mesh sizes of the fiber filter element, it will put pressure on the load of the vacuum pump, making the vacuum pump prone to blockage and increase the load, or due to insufficient filtering capacity, dust will accumulate in the vacuum pump, causing the vacuum pump to jam. Therefore, frequent maintenance is required, and the maintenance cycle is generally 3 to 10 days. The maintenance frequency is high, and the consumption of tail exhaust accessories is large, resulting in high operating and maintenance costs.

[0069] Related technology 2 adopts a liquid water filtration solution, but the liquid water filtration system has a large resistance, which causes the vacuum pump to be overloaded and its life is shortened, thereby increasing maintenance costs.

[0070] In view of at least one of the above problems, embodiments of the present application provide an exhaust gas treatment device, an exhaust gas treatment method and a diffusion furnace that can reduce operating costs and maintenance costs.

[0071] First, refer to Figure 1 As shown, the embodiment of the present application provides an exhaust gas treatment device 11, which includes a first air intake pipeline 111, a first filter assembly 112, a second filter assembly 113 and an exhaust pipeline 114. The first air intake pipeline 111 is used to receive exhaust gas. The air intake end of the first filter assembly 112 is connected to the first air intake pipeline 111, and the air outlet end of the first filter assembly 112 is connected to the exhaust pipeline 114. The air intake end of the second filter assembly 113 is connected to the first air intake pipeline 111, and the air outlet end of the second filter assembly 113 is connected to the exhaust pipeline 114.

[0072] The first filter assembly 112 includes N liquid filter elements 11a, and the second filter assembly 113 includes M liquid filter elements 11a, where M and N satisfy the relationship: M>N. That is, the number of liquid filter elements 11a in the first filter assembly 112 is less than the number of liquid filter elements 11a in the second filter assembly 113.

[0073] The tail gas treatment equipment 11 in the embodiment of the present application can be used for filtering operations of various gases to be filtered according to actual needs, and the filtering liquid in the liquid filter element 11a can be selected to use various required solutions according to the type of gas to be filtered and the actual filtering needs, which is not limited here. For example, for the tail gas filtration of the boron diffusion equipment, when the tail gas treatment equipment 11 of the present application is used to filter the chlorine and boron oxide contained in its tail gas, the first air inlet pipeline 111 is connected to the tail gas outlet end of the reaction chamber 12, and water can be used as the filtering liquid. Based on the water-soluble characteristics of chlorine and boron oxide, the chlorine and boron oxide in the tail gas can be reacted with water and then filtered out. The reaction of boron oxide and chlorine with water can be based on the following chemical formula:

[0074]

[0075] The tail gas treatment device 11 provided in the embodiment of the present application is provided with a first filter assembly 112 and a second filter assembly 113, and the inlet ends of the first filter assembly 112 and the second filter assembly 113 are both connected to the first inlet pipeline 111, and the outlet ends of the first filter assembly 112 and the second filter assembly 113 are both connected to the exhaust pipeline 114, and the number of liquid filter elements 11a in the second filter assembly 113 is greater than the number of liquid filter elements 11a in the first filter assembly 112. In this way, when the tail gas is treated, the tail gas can be selectively passed into the first filter assembly 112 or the second filter assembly 113 according to the actual working conditions of the reaction chamber 12, such as: when the boron oxide content in the tail gas is high (such as when the doping source gas is passed into the reaction chamber 12), the tail gas is passed into the second filter assembly 113, and when the boron oxide content in the tail gas is low (such as when the doping source gas is not passed into the reaction chamber 12), the tail gas is passed into the first filter assembly 112. It is understandable that when no doping source gas is introduced into the reaction chamber 12 , residual doping source gas may exist in the reaction chamber 12 .

[0076] In this way, on the one hand, compared with the conventional method of constantly replacing the filter element to maintain the tail pipe filtration structure and solve the problem of tail pipe blockage, the method of only replacing the filter liquid can be simpler, so compared with the conventional filtering method, the maintenance cycle can be improved and the maintenance cost can be reduced; on the other hand, when the boron oxide content in the exhaust gas is low, it is only necessary to pass a smaller number of liquid filter elements 11a into the exhaust gas, which is beneficial to reduce the load on the components on the exhaust pipe 114 (such as the suction element 115), thereby increasing the service life of the suction element 115 and reducing the cost of use.

[0077] It is understandable that the liquid filter element 11a can adopt a variety of structures, as long as the exhaust gas passes through the filtered liquid during the flow process and reacts with the filtered liquid. Technical personnel in this field can set the size, specification, shape of the liquid filter element 11a and arrange other auxiliary accessories according to actual needs, which is not limited here.

[0078] In one embodiment, the exhaust gas treatment device 11 further includes a suction member 115, which is disposed on the exhaust pipe 114. For example, the suction member 115 may be a vacuum pump or a diaphragm pump. The suction member 115 may draw the exhaust gas into the exhaust pipe 114 and discharge the exhaust gas from the exhaust end of the exhaust pipe 114.

[0079] In one embodiment, referring to Figure 1 As shown, the first filter assembly 112 and the second filter assembly 113 may be arranged in a non-parallel manner, for example, the first filter assembly 112 and the second filter assembly 113 share at least one liquid filter element 11a. That is, at least one liquid filter element 11a is both a part of the first filter assembly 112 and a part of the second filter assembly 113. In this way, the number of liquid filter elements 11a is reduced, which not only reduces the occupied space of the exhaust gas treatment device 11, but also reduces the cost.

[0080] For example, Figure 1 For example, the first filter assembly 112 includes a C liquid filter element 11 a, and the second filter assembly 113 includes an A liquid filter element 11 a, a B liquid filter element 11 a, and a C liquid filter element 11 a.

[0081] In one embodiment, the first filter assembly 112 includes a first branch pipeline 1121 and a liquid filter element 11a arranged in series. The end of the first branch pipeline 1121 away from the liquid filter element 11a is connected to the first air inlet pipeline 111, and the air outlet end of the liquid filter element 11a is connected to the exhaust pipeline 114; the first branch pipeline 1121 is provided with a first on-off control element 1122. In this way, the first filter assembly 112 is equivalent to a single-stage filtering system.

[0082] By setting the first on-off control element 1122, it is possible to control whether the exhaust gas flows into the liquid filter element 11a of the first filter assembly 112. When the content of boron oxide in the exhaust gas is low, the first on-off control element 1122 is opened, and the first branch pipe 1121 can introduce the exhaust gas into the liquid filter element 11a of the first filter assembly 112; when the content of boron oxide in the exhaust gas is high, the first on-off control element 1122 is closed, and the exhaust gas flows into the second filter assembly 113.

[0083] It can be understood that the liquid filter element 11 a of the first filter component 112 is also a part of the second filter component 113 .

[0084] In one embodiment, the second filter assembly 113 includes at least two liquid filter elements 11a arranged in series. In this way, the second filter assembly 113 is equivalent to a multi-stage filtration system. Among the at least two liquid filter elements 11a, at least one liquid filter element 11a and the liquid filter element 11a in the first filter assembly 112 are configured as the same liquid filter element 11a.

[0085] Furthermore, among the at least two liquid filters 11a, the air inlet end of the liquid filter 11a closest to the first air inlet pipeline 111 is connected to the first air inlet pipeline 111, and the liquid filter 11a closest to the exhaust pipeline 114 and the liquid filter 11a in the first filter assembly 112 are configured as the same liquid filter 11a. In this way, it is convenient to arrange the liquid filters 11a in the first filter assembly 112 and the second filter assembly 113 reasonably.

[0086] In one example, if Figure 1 As shown, the second filter assembly 113 includes three liquid filter elements 11a, namely, liquid filter element A 11a, liquid filter element B 11a and liquid filter element C 11a from left to right, and the exhaust gas is transmitted from left to right. The air inlet end of liquid filter element A 11a is connected to the first air inlet pipeline 111, and liquid filter element C 11a and the liquid filter element 11a in the first filter assembly 112 are configured as the same liquid filter element 11a.

[0087] In another example, referring to Figure 6 As shown, the first filter assembly 112 includes the A liquid filter element 11a, the second filter assembly 113 includes the A liquid filter element 11a, the B liquid filter element 11a and the C liquid filter element 11a, one end of the first air inlet pipeline 111 is connected to the air outlet end of the A liquid filter element 11a, and the other end is connected to the air inlet end of the exhaust pipeline 114. At this time, the first filter assembly 112 and the second filter assembly 113 share the A liquid filter element 11a.

[0088] In one embodiment, along the flow direction of the exhaust gas, the volume of the filtrate in each liquid filter element 11a of the second filter assembly 113 gradually decreases. That is, the volume of the filtrate in the A liquid filter element 11a is the largest, the volume of the filtrate in the B liquid filter element 11a is the second largest, and the volume of the filtrate in the C liquid filter element 11a is the smallest.

[0089] It should be noted that the first liquid filter 11a (A liquid filter 11a) through which the tail gas passes filters the most chlorine and boric oxide, that is, the first liquid filter 11a has the largest processing capacity. By maximizing the volume of the filtrate in the A liquid filter 11a, the processing capacity of the A liquid filter 11a can be maximized. The second liquid filter 11a (B liquid filter 11a) and the third liquid filter 11a (C liquid filter 11a) through which the tail gas passes filter oxygen and boric oxide gradually decrease, so that the volume of the filtrate in the B liquid filter 11a and the C liquid filter 11a gradually decreases, which is beneficial to reducing the resistance of the tail gas during the flow process, thereby reducing the load of the suction member 115.

[0090] It should also be noted that when the boron oxide content in the exhaust gas is low, the filtering capacity requirement for the first filter component 112 is not particularly high. Since the volume of the filtrate in the C liquid filter element 11a is the smallest, by using the C liquid filter element 11a as the liquid filter element 11a shared by the first filter component 112 and the second filter component 113, the filtering capacity of the first filter component 112 can be matched with the boron oxide content in the exhaust gas. In addition, the liquid resistance in the first filter component 112 can be reduced, thereby reducing the load of the suction component 115.

[0091] When the boron oxide content in the tail gas is low, the flow direction of the tail gas is as follows Figure 2 When the boron oxide content in the tail gas is high, the flow direction of the tail gas is as follows Figure 3 shown.

[0092] In one embodiment, referring to Figure 1 As shown, the exhaust gas treatment device 11 further includes a second air intake pipeline 116 , a second on-off control element 117 , a third filter element 118 , a drain pipeline 119 and a third on-off control element 1110 .

[0093] The second air inlet pipeline 116 is used to receive clean gas, and the air outlet end of the first filter assembly 112 and the air outlet end of the second filter assembly 113 are both connected to the second air inlet pipeline 116. The second on-off control member 117 is provided on the second air inlet pipeline 116. The third filter element 118 is provided with a first port 118a and a second port 118b, and the air inlet end of the first filter assembly 112 and the air inlet end of the second filter assembly 113 are both connected to the first port 118a, and the drain pipeline 119 is connected to the second port 118b. The third on-off control member 1110 is provided on the drain pipeline 119.

[0094] In this way, clean gas (such as air) can be introduced into the second air inlet pipeline 116, so that the liquid in the first filter assembly 112 and the second filter assembly 113 can be discharged from the drain pipeline 119 through the third filter element 118, so as to facilitate the replacement of the filtered liquid in the first filter assembly 112 and the second filter assembly 113, and reduce the maintenance difficulty and cost. Among them, the third filter element 118 can filter the liquid in the first filter assembly 112 and the second filter assembly 113 to prevent the discharged liquid from not meeting the discharge requirements.

[0095] Specifically, Figure 4 As shown, when discharging liquid (the solution after the reaction of the filtered liquid and the filtered gas), the clean gas passes through the C liquid filter element 11a, the B liquid filter element 11a and the A liquid filter element 11a in sequence, and the liquid in the C liquid filter element 11a, the B liquid filter element 11a and the A liquid filter element 11a is discharged from the third filter element 118 and the liquid discharge pipeline 119. It can be understood that when discharging liquid, the second on-off control element 117 and the third on-off control element 1110 are opened.

[0096] In one embodiment, the third filter element 118 is further provided with a third port 118c, and the third port 118c is connected to the first air intake pipe 111. In this way, the exhaust gas first enters the third filter element 118 to achieve preliminary filtering (such as gas-liquid separation), and then enters the first filter component 112 or the second filter component 113, which is conducive to improving the filtering effect of the first filter component 112 or the second filter component 113.

[0097] In one embodiment, referring to Figure 1 As shown, the exhaust gas treatment device 11 also includes a liquid inlet pipeline 1111 for receiving liquid, and the first filter assembly 112 and the second filter assembly 113 are both connected to the liquid inlet pipeline 1111. In this way, not only can the liquid (cleaning liquid) required for cleaning be injected into the first filter assembly 112 and the second filter assembly 113 through the liquid inlet pipeline 1111, but also the liquid (filtrate) required for filtering can be injected into the first filter assembly 112 and the second filter assembly 113 through the liquid inlet pipeline 1111, thereby reducing the difficulty of cleaning and injecting liquid (filtrate) of the first filter assembly 112 and the second filter assembly 113, thereby reducing the maintenance cost of the first filter assembly 112 and the second filter assembly 113. Exemplarily, the liquid (cleaning liquid) required for cleaning and the liquid (filtrate) required for filtering can both be water.

[0098] In one embodiment, referring to Figure 1As shown, the liquid inlet pipeline 1111 also includes a main pipeline 1111-1 and a plurality of second branch pipelines 1111-2. The plurality of second branch pipelines 1111-2 correspond one-to-one to the liquid filter elements 11a of the first filter assembly 112 and the second filter assembly 113; one end of each second branch pipeline 1111-2 is connected to the main pipeline 1111-1, and the other end is connected to the corresponding liquid filter element 11a; each second branch pipeline 1111-2 is also provided with a fourth on-off control element. Exemplarily, the liquid inlet pipeline 1111 includes three second branch pipelines 1111-2, and the three second branch pipelines 1111-2 are respectively provided with a fourth on-off control element a 1111-3A, a fourth on-off control element b 1111-3B, and a fourth on-off control element c 1111-3C. In this way, water can be added to each liquid filter element 11a separately, so that the volume of the filtered liquid in each liquid filter element 11a meets the design requirements, which is beneficial to improving the filtering efficiency.

[0099] It should be noted that when the liquid (filtrate) required for filtration is injected into the A liquid filter element 11a, the fourth on-off control element a 1111-3A is opened, and the fourth on-off control element b 1111-3B and the fourth on-off control element c 1111-3C are closed. When the liquid (filtrate) required for filtration is injected into the B liquid filter element 11a, the fourth on-off control element b 1111-3B is opened, and the fourth on-off control element a 1111-3A and the fourth on-off control element c 1111-3C are closed. When the liquid (filtrate) required for filtration is injected into the C liquid filter element 11a, the fourth on-off control element c 1111-3C is opened, and the fourth on-off control element b 1111-3B and the fourth on-off control element a 1111-3A are closed. In the embodiment of the present application, the filtrate can be added to each liquid filter element 11a separately, so that the liquid level in each liquid filter element 11a can be independently controlled, which is conducive to improving the filtering effect. It is understandable that the filter plates (baffles) in each liquid filter element 11 a may be arranged in a different manner, thereby increasing the tail gas retention time and improving the filtering effect.

[0100] like Figure 5As shown, during cleaning, only the fourth on-off control element c 1111-3C corresponding to the C liquid filter element 11a is opened, and the fourth on-off control element b 1111-3B and the fourth on-off control element a 1111-3A are closed. Cleaning liquid is injected into the C liquid filter element 11a, and after the injection is completed, the fourth on-off control element c 1111-3C is closed, and the C liquid filter element 11a is soaked for a period of time, and then the second on-off control element 117 and the third on-off control element 1110 are opened, and clean gas is introduced, and the clean gas discharges the cleaning liquid in the C liquid filter element 11a through the B liquid filter element 11a, the A liquid filter element 11a, the third filter element 118 and the drain pipe 119 in sequence. In this way, all the liquid filters 11a are backwashed, which can ensure that the pipes in the second filter assembly 113 are not blocked. In addition, the cleanliness of the liquid filter element 11a can be improved, which is conducive to improving the filtering effect.

[0101] In one embodiment, referring to Figure 1 As shown, the exhaust gas treatment device 11 further includes a cooling element 1112, a fifth on-off control element 1113 and a sixth on-off control element 1114. The cooling element 1112 is disposed on the first air intake pipeline 111; the fifth on-off control element 1113 is disposed on the first air intake pipeline 111; and the sixth on-off control element 1114 is disposed on the exhaust pipeline 114.

[0102] It should be noted that the cooling element 1112 can condense certain gas components in the exhaust gas into liquid. A heat diffusion device can be provided at the inlet of the cooling element 1112, and the exhaust gas first passes through the heat diffusion device to reduce the temperature, and then enters the cooling cavity of the cooling element 1112 for cooling and condensation. When the exhaust gas passes through the cooling element 1112, some of the exhaust gas will not be cooled and condensed. Therefore, the exhaust gas that has not been cooled and condensed can enter the third filter element 118, and then enter the first filter component 112 or the second filter component 113.

[0103] It is understandable that when draining and cleaning are performed, the fifth on-off control element 1113 and the sixth on-off control element 1114 are closed, and when filtering the exhaust gas, the fifth on-off control element 1113 and the sixth on-off control element 1114 are opened.

[0104] In one embodiment, the third filter element 118 is a gas-liquid separator. On the one hand, when the tail gas contains misty tail gas, the misty tail gas will carry liquid when entering the liquid filter element 11a, thereby reducing the concentration of the filtered liquid and weakening the filtering effect. By setting the third filter element 118, the misty tail gas can be filtered in advance, thereby improving the filtering effect of the liquid filter element 11a. It is understandable that when the third filter element 118 is used as a gas-liquid separator, the liquid in the third filter element 118 (the liquid formed by filtering the misty tail gas) can be discharged through the drain pipe 119.

[0105] On the other hand, the third filter element 118 can achieve multiple uses; for example, when the filtrate in the first filter component 112 and the second filter component 113 is replaced, the discarded filtrate is discharged through the third filter element 118, or, when the first filter component 112 and the second filter component 113 are cleaned, the cleaning liquid is discharged through the third filter element 118 to prevent the discharged liquid from failing to meet the discharge requirements.

[0106] It should be noted that the exhaust gas treatment device 11 provided in the embodiment of the present application can also purge the suction piece 115. Specifically, the second on-off control piece 117 and the sixth on-off control piece 1114 are turned on, and clean gas is introduced from the second air inlet line 116, and the clean gas passes through the suction piece 115 and flows out from the exhaust line 114. In this way, the suction piece 115 can be kept dry and clean, which is conducive to improving the service life of the suction piece 115.

[0107] It can be understood that the first on-off control element 1122, the second on-off control element 117, the third on-off control element 1110, the fourth on-off control element a 1111-3A, the fourth on-off control element b 1111-3B, the fourth on-off control element c 1111-3C, the fifth on-off control element 1113 and the sixth on-off control element 1114 can be electric control valves, and the embodiments of the present application do not particularly limit the specific type of control valves.

[0108] In one embodiment, if Figure 1 As shown, the exhaust gas treatment device 11 also includes a multi-way valve 1115, which includes a first interface 1115a, a second interface 1115b and a third interface 1115c, the first interface 1115a is connected to the outlet end of the first air inlet pipeline 111, the second interface 1115b is connected to the air inlet end of the first filter component 112, and the third interface 1115c is connected to the air inlet end of the second filter component 113. Exemplarily, the multi-way valve 1115 is a three-way valve. During use of the exhaust gas treatment device 11, the multi-way valve 1115 can be set to a normally open mode.

[0109] It should be noted that during the cleaning process of the first filter component 112 and the second filter component 113, the cleaning liquid will reversely flush the multi-way valve 1115 (such as the cleaning liquid flows into the right side of the multi-way valve 1115 and flows out from the left side of the multi-way valve 1115), thereby flushing away the residual particles in the multi-way valve 1115 and preventing the multi-way valve 1115 from being blocked.

[0110] In one embodiment, if Figure 7As shown, the first filter assembly 112 and the second filter assembly 113 are arranged in parallel. Specifically, the exhaust gas treatment device 11 includes a first branch pipeline 1121, a first on-off control member 1122, a third branch pipeline 1131 and a seventh on-off control member 1132. The first filter assembly 112 includes a liquid filter element 11a, and the first on-off control member 1122 and the liquid filter element 11a of the first filter assembly 112 are arranged on the first branch pipeline 1121. The second filter assembly 113 includes two liquid filters 11a, and the seventh on-off control member 1132 and the two liquid filters 11a of the second filter assembly 113 are arranged on the third branch pipeline 1131.

[0111] Furthermore, the exhaust gas treatment equipment 11 also includes a multi-way valve 1115, a first interface 1115a of the multi-way valve 1115 is connected to the outlet end of the first air inlet pipeline 111, a second interface 1115b of the multi-way valve 1115 is connected to the air inlet end of the first branch pipeline 1121, a third interface 1115c of the multi-way valve 1115 is connected to the air inlet end of the third branch pipeline 1131, and the air outlet end of the first air inlet pipeline 111 and the air outlet end of the third branch pipeline 1131 are both connected to the air inlet end of the exhaust pipeline 114.

[0112] In this way, by arranging the first filter component 112 and the second filter component 113 in parallel, the first filter component 112 and the second filter component 113 can filter the exhaust gas under different working conditions respectively, which is beneficial to increase the service life of the filter liquid in the first filter component 112 and the second filter component 113, thereby reducing the replacement cycle of the filter liquid.

[0113] It should be noted that "connected" in this application can be "directly connected" or "indirectly connected". For example: A and B are directly connected, which means A and B are directly connected and connected to each other. When one end of C is directly connected to A and the other end is directly connected to B, we consider A and B to be indirectly connected.

[0114] Second, refer to Figure 1 As shown, the embodiment of the present application provides a diffusion furnace 1, which includes a reaction chamber 12 and an exhaust gas treatment device 11. The first air inlet pipeline 111 of the exhaust gas treatment device 11 is connected to the exhaust gas outlet end of the reaction chamber 12.

[0115] The diffusion furnace 1 provided in the embodiment of the present application is provided with a first filter assembly 112 and a second filter assembly 113, and the air inlet ends of the first filter assembly 112 and the second filter assembly 113 are both connected to the first air inlet pipeline 111, and the air outlet ends of the first filter assembly 112 and the second filter assembly 113 are both connected to the exhaust pipeline 114, and the number of liquid filter elements 11a in the second filter assembly 113 is greater than the number of liquid filter elements 11a in the first filter assembly 112. In this way, when the tail gas is treated, the tail gas can be selectively passed into the first filter assembly 112 or the second filter assembly 113 according to the actual working conditions of the reaction chamber 12, such as: when the boron oxide content in the tail gas is high, the tail gas is passed into the second filter assembly 113, and when the boron oxide content in the tail gas is low, the tail gas is passed into the first filter assembly 112. In this way, on the one hand, compared with the conventional method of constantly replacing the filter element to maintain the tail pipe filtration structure and solve the problem of tail pipe blockage, the method of only replacing the filter liquid can be simpler. Therefore, compared with the conventional filtering method, the maintenance cycle can be improved and the maintenance cost can be reduced. On the other hand, when the boron oxide content in the exhaust gas is low, it is only necessary to pass a smaller number of liquid filter elements 11a into the exhaust gas, which is beneficial to reduce the load of the suction element 115, thereby increasing the service life of the suction element 115 and reducing the cost of use.

[0116] It is understandable that the diffusion furnace 1 may further include a control host and a detector, the detector is used to detect the working condition of the reaction chamber 12, and the detector and the on-off control component in the tail gas treatment device 11 are all connected to the control host for communication. The control host controls the operation of the on-off control component and the suction component.

[0117] Thirdly, refer to Figure 8 As shown, the embodiment of the present application provides a tail gas treatment method, comprising:

[0118] S100: Provide an exhaust gas treatment device 11. The exhaust gas treatment device 11 includes a first air intake pipeline 111, a first filter assembly 112, a second filter assembly 113 and an exhaust pipeline 114. One end of the first air intake pipeline 111 is connected to the exhaust gas outlet end of the reaction chamber 12. The air intake end of the first filter assembly 112 and the air intake end of the second filter assembly 113 are both connected to the other end of the first air intake pipeline 111. The air outlet end of the first filter assembly 112 and the air outlet end of the second filter assembly 113 are both connected to the exhaust pipeline 114. The first filter assembly 112 includes N liquid filter elements 11a, and the second filter assembly 113 includes M liquid filter elements 11a. M and N satisfy the relationship: M>N.

[0119] S300: Obtain a first preset parameter of the reaction chamber 12. If the first preset parameter is greater than a first threshold, control the tail gas of the reaction chamber 12 to flow into the second filter component 113. If the first preset parameter is equal to the first threshold, control the tail gas of the reaction chamber 12 to flow into the first filter component 112. It can be understood that the control host can obtain the first preset parameter through the detector and control the exhaust gas flow direction by controlling the on-off control element.

[0120] Exemplarily, the first preset parameter may be a volume flow rate of a specific gas (such as chlorine and / or boron oxide), and the first threshold may be 0. If the volume flow rate of the specific gas is greater than 0, the tail gas of the reaction chamber 12 is controlled to flow into the second filter assembly 113; if the volume flow rate of the specific gas is equal to 0, the tail gas of the reaction chamber 12 is controlled to flow into the first filter assembly 112.

[0121] Here, it should be noted that the above steps are for the process state of the diffusion furnace 1. In the process state, according to the relationship between the first preset parameter and the first threshold, it is determined whether to use the first filter component 112 or the second filter component 113 for filtering. When the volume flow rate of the specific gas is equal to 0, there is gas (such as chlorine and / or boron oxide) that needs to be treated in the reaction chamber 12, so the tail gas needs to be filtered through the first filter component 112.

[0122] The tail gas treatment method provided in the embodiment of the present application can selectively pass the tail gas into the first filter component 112 or the second filter component 113 according to the actual working conditions of the reaction chamber 12 when treating the tail gas. In this way, on the one hand, compared with the conventional method of constantly replacing the filter element to maintain the tail exhaust pipe filtration structure and solve the problem of tail exhaust pipe blockage, the method of only replacing the filter liquid can be simpler, so compared with the conventional filtering method, the maintenance cycle can be increased and the use cost and maintenance cost can be reduced; on the other hand, when the boron oxide content in the tail gas is low, it is only necessary to pass the tail gas into a smaller number of liquid filter elements 11a, which is conducive to reducing the load of the components (such as the suction element 115) on the exhaust pipe 114, thereby increasing the service life of the suction element 115 and reducing the use cost.

[0123] In one embodiment, referring to Fig. 9 As shown, after S100 and before S300, the following steps are also included:

[0124] S200: Obtain the second preset parameter of the reaction chamber 12. If the second preset parameter is less than or equal to the second threshold, the step of obtaining the first preset parameter of the reaction chamber 12 is performed. If the second preset parameter is greater than the second threshold, the first filter component 112 and the second filter component 113 are cleaned. Exemplarily, the second preset parameter may be the pressure of the reaction chamber 12, and the second threshold may be the preset pressure. If the second preset parameter is less than or equal to the preset pressure, it is determined that the reaction chamber 12 is in a process state, and S300 is executed; if the second preset parameter is greater than the preset pressure, it is determined that the reaction chamber 12 is in a non-process state, and the first filter component 112 and the second filter component 113 are cleaned. It can be understood that the control host can obtain the second preset parameter through the detector and control the cleaning process by controlling the on-off control member.

[0125] In a specific embodiment, the second threshold is a preset pressure, and the preset pressure has a pressure range of 110 mbar-700 mbar. For example, the second threshold may be 110 mbar, 200 mbar, 300 mbar, 400 mbar, 500 mbar, 600 mbar, 700 mbar, etc.

[0126] Further, if the second preset parameter is less than or equal to the second threshold, it is determined that the reaction chamber 12 is in a process state. If the second preset parameter is greater than a preset pressure, it is determined that the reaction chamber 12 is in a non-process state.

[0127] In one embodiment, the exhaust gas treatment device 11 further includes a second air intake pipeline 116, a third filter element 118, a liquid discharge pipeline 119, a liquid intake pipeline 1111 and a suction piece 115; the air outlet end of the first filter component 112 and the air outlet end of the second filter component 113 are both connected to the second air intake pipeline 116; the third filter element 118 is provided with a first port 118a and a second port 118b, the air intake end of the first filter component 112 and the air intake end of the second filter component 113 are both connected to the first port 118a, and the liquid discharge pipeline 119 is connected to the second port 118b; the first filter component 112 and the second filter component 113 are both connected to the liquid intake pipeline 1111. The suction piece 115 is provided on the exhaust pipeline 114. It should be noted that the exhaust gas treatment device 11 in the embodiment of the second aspect can be the same as the exhaust gas treatment device 11 in the first aspect, and the specific structure of the exhaust gas treatment device 11 is not described in detail here.

[0128] Specifically, refer to Fig.10 As shown, S200 specifically includes the following steps:

[0129] S210: Clean gas is introduced into the second air inlet pipeline 116 to discharge the liquid in the first filter assembly 112 and the second filter assembly 113 from the drain pipeline 119 via the third filter element 118. Figure 4 As shown, the second on-off control element 117 and the third on-off control element 1110 are opened, and the first on-off control element 1122, the fourth on-off control element (such as the fourth on-off control element a 1111-3A, the fourth on-off control element b 1111-3B, the fourth on-off control element c 1111-3C), the fifth on-off control element 1113 and the sixth on-off control element 1114 are closed, and a clean gas (such as air) is introduced into the second air intake pipe 116, and the clean gas passes through the C liquid filter element 11a, the B liquid filter element 11a and the A liquid filter element 11a in sequence, and the liquid in the C liquid filter element 11a, the B liquid filter element 11a and the A liquid filter element 11a is discharged from the third filter element 118 and the drain pipe 119.

[0130] S220: A cleaning liquid is introduced into the liquid inlet pipeline 1111 to clean the first filter assembly 112 and the second filter assembly 113, and the cleaning liquid in the first filter assembly 112 and the second filter assembly 113 is discharged from the liquid discharge pipeline 119 through the third filter element 118. Figure 5As shown, only the fourth on-off control element c 1111-3C corresponding to the C liquid filter element 11a is opened, and the first on-off control element 1122, the second on-off control element 117, the fifth on-off control element 1113, the sixth on-off control element 1114 and other fourth on-off control elements (such as the fourth on-off control element b 1111-3B and the fourth on-off control element a 1111-3A) are all closed, and liquid is injected into the C liquid filter element 11a. After the injection is completed, the fourth on-off control element c 1111-3C is closed, and the C liquid filter element 11a is soaked for a period of time, and then the second on-off control element 117 and the third on-off control element 1110 are opened, and clean gas is introduced. The clean gas discharges the liquid in the C liquid filter element 11a through the B liquid filter element 11a, the A liquid filter element 11a, the third filter element 118 and the drain pipe 119 in sequence. In this way, all liquid filter elements 11a are backwashed to ensure that the pipeline in the second filter assembly 113 is not blocked. Further, the exhaust gas treatment device 11 also includes a multi-way valve 1115, and the multi-way valve 1115 includes a first interface 1115a, a second interface 1115b and a third interface 1115c. The first interface 1115a is connected to the outlet end of the first air inlet pipeline 111, the second interface 1115b is connected to the air inlet end of the first filter assembly 112, and the third interface 1115c is connected to the air inlet end of the second filter assembly 113. Exemplarily, the multi-way valve 1115 is a three-way valve. During use of the exhaust gas treatment device 11, the multi-way valve 1115 can be set to a normally open mode. During the process of cleaning all the liquid filters 11a, the cleaning liquid will reversely flush the multi-way valve 1115 (such as the cleaning liquid flows into the right side of the multi-way valve 1115 and flows out from the left side of the multi-way valve 1115), thereby flushing away the residual particles in the multi-way valve 1115 and preventing the multi-way valve 1115 from being blocked.

[0131] S230: The filtered liquid is introduced into the liquid filter element 11a of the first filter component 112 and the second filter component 113 through the liquid inlet pipeline 1111. Specifically, when the liquid (filtrate) required for filtration is injected into the A liquid filter element 11a, the fourth on-off control element a 1111-3A is opened, and the fourth on-off control element b 1111-3B and the fourth on-off control element c 1111-3C are closed. When the liquid (filtrate) required for filtration is injected into the B liquid filter element 11a, the fourth on-off control element b 1111-3B is opened, and the fourth on-off control element a 1111-3A and the fourth on-off control element c 1111-3C are closed. When the liquid (filtrate) required for filtration is injected into the C liquid filter element 11a, the fourth on-off control element c 1111-3C is opened, and the fourth on-off control element b 1111-3B and the fourth on-off control element a 1111-3A are closed. It can be understood that when the filtrate is injected, the first on-off control element 1122 , the second on-off control element 117 , the third on-off control element 1110 , the fifth on-off control element 1113 and the sixth on-off control element 1114 are all closed.

[0132] S240: introducing clean gas into the second air inlet pipeline 116 to purge the suction member 115. Specifically, the second on-off control member 117 and the sixth on-off control member 1114 are opened, and air is introduced from the second air inlet pipeline 116 to purge and dry the suction member 115.

[0133] In one embodiment, in combination Figure 3 As shown, the exhaust gas from the reaction chamber 12 is controlled to flow into the second filter component 113, specifically in the following manner: open the fifth on-off control element 1113 and the sixth on-off control element 1114, close the first on-off control element 1122, the second on-off control element 117, the third on-off control element 1110 and the fourth on-off control element (such as the fourth on-off control element a 1111-3A, the fourth on-off control element b 1111-3B, the fourth on-off control element c 1111-3C), and the exhaust gas flows through the cooling element 1112, the third filter element 118, the A liquid filter element 11a, the B liquid filter element 11a, the C liquid filter element 11a, the suction element 115 in sequence, and flows out from the exhaust pipe 114.

[0134] In one embodiment, referring to Figure 2As shown, the exhaust gas from the reaction chamber 12 is controlled to flow into the first filter component 112, specifically in the following manner: open the first on-off control element 1122, the fifth on-off control element 1113 and the sixth on-off control element 1114, and close the second on-off control element 117, the third on-off control element 1110 and the fourth on-off control element (such as the fourth on-off control element a 1111-3A, the fourth on-off control element b 1111-3B, the fourth on-off control element c 1111-3C), and the exhaust gas flows through the cooling element 1112, the third filter element 118, the first branch pipe 1121, the C liquid filter element 11a, the suction element 115 in sequence, and flows out from the exhaust pipe 114.

[0135] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0136] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A tail gas treatment device for tail gas filtration of a boron diffusion device, characterized in that: include: A first air intake pipeline, for receiving exhaust gas; a first filter assembly, wherein an air inlet end of the first filter assembly is in communication with the first air inlet pipeline; A second filter assembly, wherein the air inlet end of the second filter assembly is connected to the first air inlet pipeline; the second filter assembly comprises at least two liquid filter elements arranged in series; among the at least two liquid filter elements, the air inlet end of the liquid filter element closest to the first air inlet pipeline is connected to the first air inlet pipeline, and the liquid filter element closest to the exhaust pipeline and the liquid filter element in the first filter assembly are configured as the same liquid filter element; along the flow direction of the exhaust gas, the volume of the filtered liquid in each of the liquid filter elements of the second filter assembly gradually decreases; An exhaust pipeline, the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both in communication with the exhaust pipeline; Wherein, the first filter assembly includes N liquid filter elements, the second filter assembly includes M liquid filter elements, and M and N satisfy the relationship: M>N; The tail gas treatment equipment also includes: A second air inlet pipeline is used to receive clean gas; the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both connected to the second air inlet pipeline; A second on-off control component is provided on the second air intake pipeline; A third filter element, wherein the third filter element is provided with a first port and a second port; the air inlet end of the first filter assembly and the air inlet end of the second filter assembly are both connected to the first port; the third filter element is further provided with a third port, and the third port is connected to the first air inlet pipeline; the third filter element is a gas-liquid separator; a liquid discharge pipeline, connected to the second port; A third on-off control component is provided on the liquid discharge pipeline; The exhaust gas treatment device further comprises a liquid inlet pipeline for receiving liquid, and the first filter assembly and the second filter assembly are both in communication with the liquid inlet pipeline; The liquid inlet pipeline comprises: Main road; A plurality of second branch pipelines, corresponding one to one with the liquid filter elements of the first filter assembly and the second filter assembly; one end of each of the second branch pipelines is connected to the main pipeline, and the other end is connected to the corresponding liquid filter element; each of the second branch pipelines is also provided with a fourth on-off control element; The exhaust gas treatment device further includes a fifth on-off control element, which is disposed on the first air intake pipeline and is located between the air intake end of the first air intake pipeline and the third filter element; The exhaust gas treatment equipment further comprises a suction piece, which is arranged on the exhaust pipe and is a vacuum pump.

2. The tail gas treatment equipment according to claim 1, characterized in that: The first filter assembly and the second filter assembly share at least one liquid filter element.

3. The tail gas treatment equipment according to claim 1, characterized in that: The first filter assembly includes a first branch pipeline and a liquid filter element arranged in series; One end of the first branch pipeline away from the liquid filter is connected to the first air inlet pipeline, and the air outlet end of the liquid filter is connected to the exhaust pipeline; a first on-off control element is arranged on the first branch pipeline.

4. The tail gas treatment equipment according to claim 1, characterized in that: The exhaust gas treatment device also includes a multi-way valve, which includes a first interface, a second interface and a third interface. The first interface is connected to the outlet end of the first air intake pipeline, the second interface is connected to the inlet end of the first filter component, and the third interface is connected to the inlet end of the second filter component.

5. The tail gas treatment equipment according to claim 1, characterized in that: The tail gas treatment equipment also includes: A cooling element, arranged on the first air intake pipeline; The sixth on-off control component is arranged on the exhaust pipe.

6. A diffusion furnace, characterized in that: include: a reaction chamber; and The exhaust gas treatment equipment according to any one of claims 1 to 5; The first air inlet pipeline of the tail gas treatment equipment is communicated with the tail gas outlet end of the reaction chamber.

7. A tail gas treatment method for tail gas filtration of a boron diffusion device, characterized in that: include: Provide an exhaust gas treatment device; the exhaust gas treatment device comprises a first air inlet pipeline, a first filter assembly, a second filter assembly and an exhaust pipeline, one end of the first air inlet pipeline is connected to the exhaust gas outlet end of the reaction chamber, the air inlet end of the first filter assembly and the air inlet end of the second filter assembly are both connected to the other end of the first air inlet pipeline, the air outlet end of the first filter assembly and the air outlet end of the second filter assembly are both connected to the exhaust pipeline, the first filter assembly comprises N liquid filter elements, the second filter assembly comprises M liquid filter elements, and M and N satisfy the relationship: M>N; Acquire a first preset parameter of the reaction chamber, and if the first preset parameter is greater than a first threshold, control the tail gas of the reaction chamber to flow into the second filter component; if the first preset parameter is equal to the first threshold, control the tail gas of the reaction chamber to flow into the first filter component; After providing the tail gas treatment equipment and before obtaining the first preset parameter of the reaction chamber, the method further includes: acquiring a second preset parameter of the reaction chamber, and if the second preset parameter is less than or equal to a second threshold, executing the step of acquiring the first preset parameter of the reaction chamber, and if the second preset parameter is greater than the second threshold, cleaning the first filter component and the second filter component; The exhaust gas treatment device also includes a second air intake pipeline, a third filter element, a drain pipeline, a liquid intake pipeline and a suction element; the air outlet end of the first filter component and the air outlet end of the second filter component are both connected to the second air intake pipeline; the third filter element is provided with a first port and a second port, the air intake end of the first filter component and the air intake end of the second filter component are both connected to the first port, and the drain pipeline is connected to the second port; the first filter component and the second filter component are both connected to the liquid intake pipeline; the suction element is arranged on the exhaust pipeline; the exhaust gas treatment device also includes a fifth on-off control element, the fifth on-off control element is arranged on the first air intake pipeline, and is located between the air intake end of the first air intake pipeline and the third filter element; the third filter element is a gas-liquid separator; the suction element is a vacuum pump; The cleaning of the first filter assembly and the second filter assembly comprises: Passing clean gas into the second air inlet pipeline to discharge the liquid in the first filter assembly and the second filter assembly from the drain pipeline via the third filter element; Passing a cleaning liquid into the liquid inlet pipeline to clean the first filter assembly and the second filter assembly, and discharging the cleaning liquid in the first filter assembly and the second filter assembly from the liquid discharge pipeline via the third filter element; Passing the filtered liquid into the liquid filter elements of the first filter assembly and the second filter assembly through the liquid inlet pipeline; Cleaning gas is introduced into the second air inlet pipeline to purge the suction member.

Images