Molecular Pump Test System

Abstract

The present application relates to the technical field of molecular pump testing, and discloses a molecular pump testing system, including: a support, a connecting flange, a molecular pump, a vacuum cover, a fixing member and a driving bolt, the support having a connected installation space and a first installation hole, the vacuum cover including a connected cover body and a first installation portion, the connecting flange passing through the first installation hole and being detachably connected between the first installation portion and the molecular pump, the connecting flange being selectively moved from one side of the first installation surface through the first installation hole to the installation space, or from the installation space through the first installation hole to one side of the first installation surface, the fixing member being fixed to the support, the fixing member including a support portion, the first installation portion having a first threaded hole, the support portion having a through hole corresponding to the first threaded hole, the driving bolt passing through the through hole and extending into the first threaded hole to drive the first installation portion to separate from the connecting flange. Thus, the vacuum cover does not need to be disassembled during the replacement process of the molecular pump and the connecting flange, and the replacement process is simple and efficient.

Description

Technical Field

[0001] The present application relates to the technical field of molecular pump testing, and in particular to a molecular pump testing system. Background Art

[0002] As an ultra-high vacuum acquisition device, the molecular pump needs to have efficient, stable and reliable performance. Therefore, it is necessary to test the performance parameters of the molecular pump such as vacuum degree, pumping speed and compression ratio through a molecular pump test system. Among them, the molecular pump test system is usually composed of a test platform, a vacuum cover, a connecting flange, a vacuum gauge and other components.

[0003] In the related art, one end of the connecting flange in the molecular pump test system is connected to the vacuum cover, and the other end is connected to the molecular pump, and the connecting flange is also fixedly connected to the support plate of the test platform by bolts. Since the interface size of the molecular pump often needs to be changed during the test, the corresponding connecting flange needs to be replaced. When the molecular pump needs to be replaced, the vacuum cover connected to the connecting flange and various vacuum testing instruments on the vacuum cover need to be disassembled first. This is because the vacuum testing instrument has various connecting lines. If the vacuum testing instrument is not disassembled, the vacuum testing instrument will move together with the vacuum cover, which may easily pull the lines or bump and damage the vacuum testing instrument. The connecting flange can only be removed after the vacuum cover is removed from the test platform and placed on the ground. The entire disassembly and replacement process is time-consuming and labor-intensive, and the replacement is relatively complicated. Summary of the invention

[0004] The present application provides a molecular pump testing system, which solves the problem of time-consuming and labor-intensive removal of the connecting flange. During the replacement of the molecular pump and the connecting flange, there is no need to remove the vacuum cover and the testing instrument on the vacuum cover. The replacement process is simple and efficient, thereby improving the replacement efficiency.

[0005] In order to achieve the above objectives, the main technical solutions adopted in this application include:

[0006] In a first aspect, an embodiment of the present application provides a molecular pump testing system, comprising:

[0007] A support member, the support member includes a support plate and a support frame, along a first direction, the support plate has a first mounting surface and a second mounting surface that are arranged opposite to each other, the second mounting surface is fixedly connected to the support frame to jointly define a mounting space, a first mounting hole is provided between the first mounting surface and the second mounting surface, and the first mounting hole is connected to the mounting space;

[0008] A connecting flange, a molecular pump and a vacuum cover, wherein the vacuum cover comprises a connected cover body and a first mounting portion, wherein the first mounting portion protrudes outwardly in the radial direction of the cover body and surrounds the cover body in the circumferential direction of the cover body, and the connecting flange is penetrated through the first mounting hole and detachably connected between the first mounting portion and the molecular pump, wherein the molecular pump is located in the installation space, the vacuum cover is arranged on one side of the first installation surface, and the connecting flange is movable relative to the support member, so that the connecting flange is suitable for fixed assembly with the support plate, or the connecting flange can be selectively moved from one side of the first installation surface through the first mounting hole to the installation space, or from the installation space through the first mounting hole to one side of the first installation surface;

[0009] A fixing member, the fixing member is fixedly arranged on the first mounting surface, the fixing member forms a first avoidance space, the cover body is suitable for passing through the first avoidance space, the fixing member comprises a supporting portion, along the first direction, the supporting portion is located on a side of the first mounting portion away from the supporting plate and is spaced apart from the first mounting portion, the first mounting portion has a first threaded hole, and the supporting portion has a through hole arranged corresponding to the first threaded hole;

[0010] A driving bolt passes through the through hole and extends into the first threaded hole, and the supporting portion abuts against the head of the driving bolt, so that the first threaded hole and the driving bolt are assembled by thread connection to drive the first mounting portion to be separated from the connecting flange.

[0011] The molecular pump testing system proposed in the first aspect of the embodiment of the present application is a system in which the connecting flange can be replaced from the installation space side during the entire replacement process, without removing the vacuum cover and the testing instrument on the vacuum cover, thereby solving the problem of time-consuming and labor-intensive removal of the connecting flange. The replacement process is simple and efficient, thereby improving the replacement efficiency.

[0012] Optionally, there are a plurality of first threaded holes, and the plurality of first threaded holes are arranged at intervals along the circumference of the first mounting portion.

[0013] Optionally, there are multiple fixing members, and the multiple fixing members are arranged in sequence around the circumference of the vacuum cover.

[0014] Optionally, the hole wall of the first mounting hole has a plurality of second mounting portions protruding radially inwardly of the first mounting hole, the plurality of second mounting portions are evenly spaced along the circumference of the first mounting hole, the plurality of second mounting portions jointly define a virtual mounting hole, and a second avoidance space is formed between any two adjacent second mounting portions;

[0015] The connecting flange includes a flange body and a plurality of third mounting portions, the plurality of second mounting portions correspond to the plurality of third mounting portions one by one, each of the third mounting portions protrudes outwardly in the radial direction of the flange body, and the plurality of third mounting portions are evenly spaced and arranged in the circumferential direction of the flange body.

[0016] The flange body is passed through the first mounting hole and is detachably connected between the first mounting portion and the molecular pump. The maximum diameter of the flange body is smaller than the diameter of the virtual mounting hole. The connecting flange can be rotated to the first position or the second position relative to the support plate along the axial direction. When the connecting flange is rotated to the first position, each third mounting portion is opposite to the corresponding second avoidance space, and each third mounting portion is suitable for passing through the corresponding second avoidance space along the first direction so that the connecting flange enters the mounting space. When the connecting flange is rotated to the second position, each third mounting portion is opposite to the corresponding second mounting portion along the first direction, so that each third mounting portion is fixedly connected to the corresponding second mounting portion.

[0017] Optionally, it further includes: a first sealing member, the connecting flange has a first sealing groove surrounding the connecting flange along the circumference, and the first sealing groove is arranged opposite to the first mounting portion, and the first sealing member is arranged in the first sealing groove.

[0018] Optionally, it also includes: a second sealing member, the connecting flange also has a second sealing groove surrounding the circumference of the connecting flange, the first mounting portion has a third sealing groove arranged opposite to the second sealing groove, the second sealing groove and the third sealing groove form a sealing space, and the second sealing member is arranged in the sealing space.

[0019] Optionally, it also includes: a vacuum gauge, which is connected to the cover body through a connecting pipeline.

[0020] Optionally, it also includes: reinforcing ribs, which are fixedly arranged on the second mounting surface, and each second mounting portion is correspondingly provided with at least one reinforcing rib, and at least a part of each reinforcing rib is fixedly connected to the corresponding second mounting portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 A schematic diagram of the assembly of a molecular pump test system provided by one embodiment of the present application;

[0023] Figure 2 Figure 1 A partial enlarged view of the middle A;

[0024] Figure 3 A schematic diagram of the assembly of a molecular pump testing system provided by another embodiment of the present application;

[0025] Figure 4A schematic diagram of the assembly of a molecular pump test system provided by yet another embodiment of the present application;

[0026] Figure 5 Figure 4 A partial enlarged view of point B in the middle;

[0027] Figure 6 A schematic diagram of the assembly of a molecular pump testing system provided by another embodiment of the present application;

[0028] Figure 7 A top view of a molecular pump testing system provided by one embodiment of the present application;

[0029] Figure 8 A schematic diagram of the assembly of a support member and a connecting flange provided in one embodiment of the present application;

[0030] Fig. 9 A front view of a support member provided in accordance with an embodiment of the present application;

[0031] Fig.10 A three-dimensional view of a support member provided according to an embodiment of the present application.

[0032] [Description of Reference Numerals]

[0033] Molecular pump test system 100;

[0034] Support member 1; support plate 11; first mounting surface 111; second mounting surface 112; first mounting hole 113; second mounting portion 1131; second avoidance space 1132; support frame 12; mounting space 13; virtual mounting hole 14;

[0035] Connecting flange 2; flange body 21; third mounting portion 22; first sealing groove 23; second sealing groove 24;

[0036] Molecular pump 3;

[0037] Vacuum cover 4; cover body 41; first mounting portion 42; first threaded hole 421; third sealing groove 422;

[0038] Driving bolt 5;

[0039] Fixing member 6; first avoidance space 61; support portion 62; through hole 621;

[0040] A first sealing member 7;

[0041] A second sealing member 8;

[0042] Vacuum gauge 9;

[0043] Reinforcement rib 10;

[0044] The first direction X. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0046] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned drawings and any variations thereof are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary and secondary relationship.

[0047] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0048] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "attached" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0049] The term "and / or" in this application is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this application generally indicates that the associated objects before and after are in an "or" relationship.

[0050] The term "multiple" as used in the present application refers to more than two (including two). Similarly, the term "multiple groups" refers to more than two groups (including two groups), and the term "multiple sheets" refers to more than two sheets (including two sheets).

[0051] It should be noted that as an ultra-high vacuum acquisition device, the molecular pump needs to have efficient, stable and reliable performance. Therefore, it is necessary to test the performance parameters of the molecular pump such as vacuum degree, pumping speed and compression ratio through a molecular pump test system. Among them, the molecular pump test system is usually composed of a test platform, a vacuum cover, a connecting flange, a vacuum gauge and other components.

[0052] In the related art, one end of the connecting flange in the molecular pump test system is connected to the vacuum cover, and the other end is connected to the molecular pump, and the connecting flange is also fixedly connected to the support plate of the test platform by bolts. Since the interface size of the molecular pump often needs to be changed during the test, the corresponding connecting flange needs to be replaced. When the molecular pump needs to be replaced, the vacuum cover connected to the connecting flange and various vacuum testing instruments on the vacuum cover need to be disassembled first. This is because the vacuum testing instrument has various connecting lines. If the vacuum testing instrument is not disassembled, the vacuum testing instrument will move together with the vacuum cover, which may easily pull the lines or bump and damage the vacuum testing instrument. The connecting flange can only be removed after the vacuum cover is removed from the test platform and placed on the ground. The entire disassembly and replacement process is time-consuming and labor-intensive, and the replacement is relatively complicated.

[0053] Based on this, the present application proposes a molecular pump testing system 100. During the entire replacement process, the connecting flange 2 can be replaced from the side of the installation space 13 without removing the vacuum cover 4 and the testing instrument on the vacuum cover 4, thereby solving the problem of time-consuming and labor-intensive disassembly of the connecting flange 2. The replacement process is simple and efficient, thereby improving the replacement efficiency.

[0054] The molecular pump testing system 100 proposed in the embodiment of the present application is described below with reference to the accompanying drawings.

[0055] like Figure 1-Figure 10As shown, according to the molecular pump testing system 100 of the first embodiment of the present application, the molecular pump testing system 100 includes: a support member 1, a connecting flange 2, a molecular pump 3, a vacuum cover 4, a fixing member 6 and a driving member. The support member 1 includes a supporting plate 11 and a supporting frame 12. Along a first direction X, the supporting plate 11 has a first mounting surface 111 and a second mounting surface 112 that are arranged opposite to each other. The second mounting surface 112 is fixedly connected to the supporting frame 12 to jointly define an installation space 13. A first mounting hole 113 is provided between the first mounting surface 111 and the second mounting surface 112, and the first mounting hole 113 is connected to the installation space 13. The connecting flange 2 passes through It is arranged in the first mounting hole 113 and is detachably connected between the vacuum cover 4 and the molecular pump 3, wherein the molecular pump 3 is located in the mounting space 13, the vacuum cover 4 is arranged on one side of the first mounting surface 111, and the connecting flange 2 is movable relative to the support member 1, so that the connecting flange 2 is suitable for fixed assembly with the support plate 11, or the connecting flange 2 can be selectively moved from one side of the first mounting surface 111 through the first mounting hole 113 to the mounting space 13, or from the mounting space 13 through the first mounting hole 113 to one side of the first mounting surface 111, and the driving member is used to drive the vacuum cover 4 to separate from the connecting flange 2.

[0056] Specifically, if Figure 1 and Figure 3 As shown, the molecular pump test system 100 is arranged as a whole along a first direction X (height direction), wherein the support member 1 includes a support plate 11 and a support frame 12, along the first direction X, the support plate 11 has a first mounting surface 111 (upper mounting surface) and a second mounting surface 112 (lower mounting surface) arranged opposite to each other, the support member 1 is located below the support plate 11 and is fixedly connected to the second mounting surface 112, so that an installation space 13 is formed below the support plate 11, further, continue to refer to Figure 1 The vacuum cover 4, the connecting flange 2, and the molecular pump 3 are sequentially connected from top to bottom along the first direction X, the molecular pump 3 is located in the installation space 13 (i.e., located below the support plate 11), the vacuum cover 4 is arranged on one side of the first installation surface 111 (i.e., located above the support plate 11), the connecting flange 2 is penetrated through the first installation hole 113, and it is ensured that at least part of the connecting flange 2 is located above the support plate 11 and at least part of it is located below the support plate 11, so that the connecting flange 2 can be detachably connected to the vacuum cover 4 above the support plate 11 and detachably connected to the molecular pump 3 below the support plate 11.

[0057] Furthermore, the connecting flange 2 is movable relative to the support member 1, so that there can be multiple assembly relationships between the connecting flange 2 and the support member 1. In the first case, the connecting flange 2 can be fixedly assembled with the support plate 11. In the second case, the connecting flange 2 can also be moved from one side of the first mounting surface 111 through the first mounting hole 113 to the mounting space 13, that is, the connecting flange 2 can be moved from the top of the support plate 11 to the bottom of the support plate 11 through the first mounting hole 113. In the third case, the connecting flange 2 can also be moved from the mounting space 13 through the first mounting hole 113 to one side of the first mounting surface 111, that is, the connecting flange 2 can be moved from the bottom of the support plate 11 to the top of the support plate 11 through the first mounting hole 113, thereby satisfying both the abutment and fixed assembly of the connecting flange 2 and the support plate 11 and the shuttle movement of the connecting flange 2 relative to the support plate 11 above and below the support plate 11 through the first mounting hole 113.

[0058] The connecting flange 2 and the support plate 11 can be provided with a variety of structures to achieve the above-mentioned functions. For example, a folding plate is provided in the first mounting hole 113. When the connecting flange 2 is inserted into the first mounting hole 113 and it is ensured that at least part of the connecting flange 2 is located above the support plate 11 and at least part of it is located below the support plate 11, the folding plate of the first mounting hole 113 is unfolded, so that the connecting flange 2 can be fixedly assembled with the folding plate. For example, the folding plate and the connecting flange 2 have correspondingly arranged second threaded holes, which are screwed to the second threaded holes of the folding plate and the second threaded holes of the connecting flange 2 in sequence by connecting bolts to achieve a fixed connection between the folding plate and the connecting flange 2. When the connecting flange 2 needs to be replaced, the connecting flange 2 is disassembled from the folding plate, and the folding plate is folded so that the connecting flange 2 can smoothly pass through the first mounting hole 113 and shuttle back and forth above and below the support plate 11. Of course, other structures can also be provided for the connecting flange 2 and the support plate 11 to achieve the above-mentioned functions, such as reserving avoidance space, etc., which will not be explained one by one here.

[0059] The following specifically describes the assembly of the molecular pump test system 100 and the replacement of the molecular pump 3 and the connecting flange 2 with reference to an example. When the molecular pump test system 100 is assembled, the connecting flange 2 is installed from top to bottom to ensure that at least part of the connecting flange 2 is located above the support plate 11 and at least part of it is located below the support plate 11, and the connecting flange 2 is fixedly assembled with the support plate 11 by means of fixing parts 6 such as bolts (for example, the connecting flange 2 is connected to the folding plate unfolded in the first mounting hole 113 of the support plate 11), and then the vacuum cover 4 is assembled from top to bottom onto the connecting flange 2, and the fixing parts 6 such as bolts are used to realize the fixed connection between the connecting flange 2 and the vacuum cover 4, and then the molecular pump 3 moved into the installation space 13 is assembled from bottom to top onto the connecting flange 2, and the fixing parts 6 such as bolts are used to realize the fixed connection between the connecting flange 2 and the molecular pump 3, and finally the vacuum test instrument is installed in conjunction with the vacuum cover 4, and thus, the molecular pump test system 100 is assembled.

[0060] When the molecular pump 3 and the connecting flange 2 need to be replaced, first remove the bolts between the molecular pump 3 and the connecting flange 2, remove the molecular pump 3 from the connecting flange 2 and remove it from the installation space 13, then remove the bolts between the connecting flange 2 and the vacuum cover 4, and drive the vacuum cover 4 to separate from the connecting flange 2 through a driving member. The driving member can be a hydraulic cylinder, a pneumatic cylinder or a telescopic motor. No specific restrictions are made here. It can be understood that when the vacuum cover 4 is separated from the connecting flange 2, the vacuum cover 4 will not press on the connecting flange 2, thereby facilitating the movement of the connecting flange 2. For example, when the folding plate is folded and retracted, the connecting flange 2 can be moved to the bottom of the support plate 11 through the first mounting hole 113, and then the connecting flange 2 is taken out from the installation space 13.

[0061] When the connecting flange 2 is replaced, the connecting flange 2 to be replaced is first placed in the installation space 13, and then (in this process, the folding plate is in a folded and retracted state), when the connecting flange 2 is moved to a suitable position, the folding plate is unfolded so that the connecting flange 2 is located in a position where it can be fixedly assembled with the support plate 11 by bolts, and then the vacuum cover 4 is driven by the driving member to fit with the connecting flange 2. It can be understood that, except for the change in the interface size of the replaced connecting flange 2, the position of the second threaded hole corresponding to the connecting flange 2 and the support plate 11 and the vacuum cover 4 has not changed, thereby ensuring that after the second threaded hole of the connecting flange 2 is aligned with the support plate 11, the second threaded hole of the connecting flange 2 and the vacuum cover 4 is also aligned accordingly, thereby facilitating the bolted fixed connection between the connecting flange 2 and the support plate 11 and the vacuum cover 4 after replacement. When the connecting flange 2 is assembled with the support plate 11 and the vacuum cover 4, the molecular pump 3 to be replaced is moved into the installation space 13 and assembled on the connecting flange 2 from bottom to top, thereby realizing the replacement of the molecular pump 3 and the connecting flange 2. It can be seen from this that during the entire replacement process, the connecting flange 2 is replaced from the side of the installation space 13, and there is no need to remove the vacuum cover 4 above the first installation surface 111 and the testing instrument on the vacuum cover 4, which solves the problem of time-consuming and labor-intensive disassembly of the connecting flange 2. The replacement process is simple and efficient, thereby improving the replacement efficiency.

[0062] According to the molecular pump testing system 100 proposed in the first aspect of the present application, during the entire replacement process, the connecting flange 2 can be replaced from the side of the installation space 13, without removing the vacuum cover 4 and the testing instrument on the vacuum cover 4, thereby solving the problem of time-consuming and labor-intensive disassembly of the connecting flange 2, and the replacement process is simple and efficient, thereby improving the replacement efficiency.

[0063] In some embodiments of the present application, Figure 1 As shown, the vacuum cover 4 includes a connected cover body 41 and a first mounting portion 42, the first mounting portion 42 protrudes outwardly along the radial direction of the cover body 41 and surrounds the cover body 41 along the circumferential direction of the cover body 41, the first mounting portion 42 is detachably connected to the connecting flange 2, and the driving member is used to drive the first mounting portion 42 to separate from or fit with the connecting flange 2.

[0064] Specifically, if Figure 1As shown, the vacuum cover 4 includes a cover body 41 and a first mounting portion 42, wherein a vacuum space is formed inside the cover body 41, and the vacuum space inside the cover body 41 is connected to the molecular pump 3 through the connecting flange 2, and the first mounting portion 42 is located at the lower end of the cover body 41, and the first mounting portion 42 protrudes outward along the radial direction of the cover body 41 and surrounds the cover body 41 along the circumferential direction of the cover body 41, that is, the first mounting portion 42 is annular in structure as a whole, and the first mounting portion 42 is used to be detachably connected to the connecting flange 2. For example, the first mounting portion 42 and the connecting flange 2 are respectively provided with corresponding third threaded holes, so that the first mounting portion 42 and the connecting flange 2 can be fixedly connected by bolt connection. When the first mounting portion 42 and the connecting flange 2 need to be disassembled, the bolts can be removed. With this arrangement, the installation and disassembly of the first mounting portion 42 and the connecting flange 2 are relatively simple and convenient.

[0065] Furthermore, after the connecting bolts between the first mounting portion 42 and the connecting flange 2 are removed, the first mounting portion 42 can be driven to separate from or fit together with the connecting flange 2 by a driving member, and the driving member can be a hydraulic cylinder, a pneumatic cylinder or a telescopic motor. For example, assuming that the driving member is a hydraulic cylinder, the hydraulic cylinder can be fixedly mounted on the support plate 11, and the transmission rod of the hydraulic cylinder can be telescopic along the first direction X, and the transmission movable rod of the hydraulic cylinder is fixedly connected to the first mounting portion 42 of the vacuum cover 4. The first mounting portion 42 can be separated from the connecting flange 2 by driving the transmission rod up and down by the hydraulic cylinder. In this way, by driving the vacuum cover 4 to separate from the connecting flange 2, it can be ensured that the vacuum cover 4 will not press on the connecting flange 2 during the replacement of the connecting flange 2, which facilitates the subsequent replacement operation of the connecting flange 2.

[0066] In some embodiments of the present application, Figure 1 , Figure 3-Figure 7 As shown, the fixing member 6 is fixed to the first mounting surface 111, and the fixing member 6 forms a first avoidance space 61. The cover body 41 is suitable for passing through the first avoidance space 61. The fixing member 6 includes a support portion 62. Along the first direction X, the support portion 62 is located on the side of the first mounting portion 42 away from the support plate 11 and is spaced apart from the first mounting portion 42. The first mounting portion 42 has a first threaded hole 421, and the support portion 62 has a through hole 621 arranged corresponding to the first threaded hole 421. The driving member is constructed as a driving bolt 5, and the driving bolt 5 passes through the through hole 621 and extends into the first threaded hole 421, and the support portion 62 abuts against the head of the driving bolt 5, so that the first threaded hole 421 and the driving bolt 5 are screwed together to drive the first mounting portion 42 to be separated from the connecting flange 2.

[0067] Specifically, the fixing member 6 can be constructed as an annular structure, and a first avoidance space 61 is formed in the middle area of ​​the annular fixing member 6. When the vacuum cover 4 is assembled with the connecting flange 2, the fixing member 6 is fixedly installed on the first mounting surface 111 of the support plate 11 from top to bottom, and during the installation of the fixing member 6, it is ensured that the cover body 41 passes through the first avoidance space 61 of the fixing member 6. Furthermore, the fixing member 6 includes a supporting portion 62. When the fixing member 6 is fixedly installed with the support plate 11, the supporting portion 62 of the fixing member 6 is located above the upper surface of the first mounting portion 42 and is spaced apart from the first mounting portion 42. It should be noted that the third threaded hole that cooperates with the first mounting portion 42 and the connecting flange 2 is located in the first avoidance space 61. Such a configuration facilitates the installation and disassembly of the first mounting portion 42 and the connecting flange 2.

[0068] Furthermore, the first mounting portion 42 of the vacuum cover 4 is further provided with a first threaded hole 421, the support portion 62 has a through hole 621 corresponding to the first threaded hole 421, and the driving member is configured as a driving bolt 5. When the connecting bolts of the first mounting portion 42 and the connecting flange 2 are removed, as shown in FIG. Figure 4 and Figure 5 As shown, the driving bolt 5 is passed through the through hole 621 of the supporting portion 62 and screwed into the first threaded hole 421. When the supporting portion 62 of the fixing member 6 abuts against the head of the driving bolt 5, as the driving bolt 5 continues to be screwed in, under the action of the reaction force of the fixing member 6, the first threaded hole 421 and the driving bolt 5 are assembled through threaded connection to drive the vacuum hood 4 to move upward, thereby separating the first mounting portion 42 from the connecting flange 2. It can be understood that the maximum distance that the vacuum hood 4 moves upward is the spacing distance between the supporting portion 62 and the first mounting portion 42.

[0069] Furthermore, after the first mounting portion 42 is separated from the connecting flange 2, the subsequent connecting flange 2 can be replaced. After the replaced connecting flange 2 is fixedly mounted on the support plate 11, the driving bolt 5 in the first threaded hole 421 is screwed in reverse so that the driving bolt 5 is removed from the first threaded hole 421. The vacuum cover 4 moves downward under the action of its own gravity to fit with the connecting flange 2 again.

[0070] With such arrangement, the vacuum cover 4 and the connecting flange 2 can be separated or attached by simply cooperating with the fixing member 6 and the driving bolt 5. The driving method is simple and reliable, and there is no need to set a more complicated driving structure, which is low-cost.

[0071] In some embodiments of the present application, Figure 7As shown, there are multiple first threaded holes 421, and the multiple first threaded holes 421 are arranged at intervals along the circumference of the first mounting portion 42. That is to say, the first mounting portion 42 of the vacuum cover 4 can be provided with multiple first threaded holes 421, and the multiple first threaded holes 421 are arranged at intervals along the circumference of the first mounting portion 42. For example, the number of the first threaded holes 421 can be 2, 3, 4, 5, 6, which is specifically set according to actual needs and is not specifically limited here. It can be understood that the support portion 62 is also provided with multiple through holes 621 corresponding to the first threaded holes 421, wherein each group of first threaded holes 421 and through hole 621 is correspondingly provided with a driving bolt 5. When the connecting bolts of the first mounting portion 42 and the connecting flange 2 are removed, each driving bolt 5 is passed through the corresponding through hole 621 of the support portion 62 and screwed into the corresponding first threaded hole 421. In this way, the vacuum cover 4 can be driven to move upward by multiple driving bolts 5, and the driving bolts 5 are distributed at intervals along the circumference of the first mounting portion 42, which is conducive to improving the stability of the vacuum cover 4 during movement.

[0072] In some embodiments of the present application, Figure 7 As shown, there are multiple fixing members 6, and the multiple fixing members 6 are sequentially arranged around the circumference of the vacuum cover 4. That is to say, the number of fixing members 6 can be multiple, and the multiple fixing members 6 are sequentially arranged around the circumference of the vacuum cover 4. For example, the number of fixing members 6 can be 2, 3, 4, 5, and 6, which are specifically set according to actual needs and are not specifically limited here. It can be understood that each fixing member 6 can be selectively provided with a corresponding through hole 621 according to the number of first threaded holes 421, and the fixing member 6 can be replaced and adjusted according to different numbers of first threaded holes 421, which is conducive to improving the versatility of the fixing member 6.

[0073] In some embodiments of the present application, Figure 8-Figure 9 As shown, the hole wall of the first mounting hole 113 has a plurality of second mounting portions 1131 protruding inwardly in the radial direction of the first mounting hole 113, and the plurality of second mounting portions 1131 are evenly spaced and arranged along the circumference of the first mounting hole 113, and the plurality of second mounting portions 1131 jointly define a virtual mounting hole 14, and a second avoidance space 1132 is formed between any two adjacent second mounting portions 1131. For example, the second mounting portion 1131 can be constructed as an arc-shaped plate, and the plurality of arc-shaped plates are arranged along the first mounting hole 113 The inner walls of the arc plates are evenly spaced along the circumference of the first mounting hole 113, and the inner walls of the arc plates are arc-shaped. With this arrangement, a virtual mounting hole 14 is formed on the inner walls of the arc plates evenly arranged along the circumference of the first mounting hole 113. The diameter of the virtual mounting hole 14 is the distance from the inner wall of the arc plate to the center of the first mounting hole 113. Furthermore, a second avoidance space 1132 is formed between any two adjacent arc plates. It can be understood that a plurality of second mounting portions 1131 are correspondingly formed with a plurality of second avoidance spaces 1132.

[0074] Further, the connecting flange 2 includes a flange body 21 and a plurality of third mounting portions 22, and the plurality of second mounting portions 1131 correspond one-to-one to the plurality of third mounting portions 22, that is, the plurality of third mounting portions 22 correspond one-to-one to the plurality of second avoidance spaces 1132, wherein each third mounting portion 22 protrudes outwardly in the radial direction of the flange body 21, and the plurality of third mounting portions 22 are evenly spaced and arranged along the circumference of the flange body 21. For example, Figure 8 As shown, the third mounting portion 22 can be constructed as an arc-shaped plate. It should be noted that in some embodiments of the present application, the size of the third mounting portion 22 is smaller than the size of the second avoidance space 1132.

[0075] Furthermore, the flange body 21 is passed through the first mounting hole 113 and is detachably connected between the first mounting portion 42 and the molecular pump 3. The maximum diameter of the flange body 21 is smaller than the diameter of the virtual mounting hole 14. That is, one end of the flange body 21 is detachably connected to the first mounting portion 42 of the vacuum cover 4, and the other end is detachably connected to the molecular pump 3. The flange body 21 can move up and down in the virtual mounting hole 14, that is, the flange body 21 can move up and down in the first mounting hole 113.

[0076] Further, the connecting flange 2 can be rotated to the first position or the second position relative to the support plate 11 in the axial direction. When the connecting flange 2 is rotated to the first position, each third mounting portion 22 is opposite to the corresponding second avoidance space 1132, and each third mounting portion 22 is suitable for passing through the corresponding second avoidance space 1132 along the first direction X, so that the connecting flange 2 enters the installation space 13. When the connecting flange 2 is rotated to the second position, each third mounting portion 22 is opposite to the corresponding second mounting portion 1131 along the first direction X, so that each third mounting portion 22 is fixedly connected to the corresponding second mounting portion 1131. It should be noted that the first position and the second position in the present application are not fixed positions, wherein the position where each third mounting portion 22 is opposite to the corresponding second avoidance space 1132 is the first position, and the position where each third mounting portion 22 is opposite to the corresponding second mounting portion 1131 is the second position.

[0077] Furthermore, in order to enable those skilled in the art to better understand the present solution, the assembly of the molecular pump test system 100 and the replacement of the molecular pump 3 and the connecting flange 2 are specifically described below with reference to examples.

[0078] Specifically, when the molecular pump test system 100 is assembled, the connecting flange 2 is installed from top to bottom to ensure that at least part of the connecting flange 2 is located above the support plate 11 and at least part of it is located below the support plate 11. At the same time, the connecting flange 2 is rotated to the second position, and each third mounting portion 22 of the connecting flange 2 is opposite to the corresponding second mounting portion 1131 on the support plate 11, wherein the second mounting portion 1131 is located above the third mounting portion 22, and the second mounting portion 1131 has a certain supporting effect. The connecting flange 2 and the support plate 11 are fixedly assembled by bolts and other fixing members 6, and then the vacuum cover 4 is removed from the Assemble it from top to bottom onto the connecting flange 2, and use bolts and other fixing parts 6 to achieve fixed connection between the connecting flange 2 and the vacuum cover 4, and install testing instruments such as the vacuum gauge 9 in conjunction with the vacuum cover 4, then fix the fixing part 6 to the first mounting surface 111 of the support plate 11 from top to bottom, and during the installation of the fixing part 6, ensure that the cover body 41 passes through the first avoidance space 61 of the fixing part 6, finally, assemble the molecular pump 3 moved into the installation space 13 onto the connecting flange 2 from bottom to top, and use bolts and other fixing parts 6 to achieve fixed connection between the connecting flange 2 and the molecular pump 3, in this way, the molecular pump test system 100 is assembled.

[0079] When the molecular pump 3 and the connecting flange 2 need to be replaced, first remove the bolts between the molecular pump 3 and the connecting flange 2, remove the molecular pump 3 from the connecting flange 2 and remove it from the installation space 13, then remove the connecting bolts between the connecting flange 2 and the vacuum cover 4, then pass the driving bolt 5 through the through hole 621 of the supporting portion 62 and screw it into the first threaded hole 421 of the vacuum cover 4, when the supporting portion 62 of the fixing member 6 abuts against the head of the driving bolt 5, as the driving bolt 5 continues to be screwed in, under the action of the reaction force of the fixing member 6, the first threaded hole 421 and the driving bolt 5 can drive the vacuum cover 4 to move upward through the screw assembly, so that the first installation portion 42 is separated from the connecting flange 2, and then the connecting flange 2 is rotated to the first position, so that each third installation portion 22 is opposite to the corresponding second avoidance space 1132, and since the size of each third installation portion 22 is smaller than the size of the second avoidance space 1132, the connecting flange 2 can be smoothly moved through the first installation hole 113 to the installation space 13 below the support plate 11, and then the connecting flange 2 is taken out from the installation space 13.

[0080] When the connecting flange 2 is replaced, the connecting flange 2 to be replaced is first placed in the installation space 13, and then the connecting flange 2 is rotated to the first position, and the connecting flange 2 is passed upward from the first installation hole 113, and at least part of the connecting flange 2 is moved above the support plate 11. It should be noted that the position of the third mounting portion 22 of the connecting flange 2 needs to be higher than the second mounting portion 1131, and then the connecting flange 2 is rotated to the second position so that each third mounting portion 22 is opposite to the corresponding second mounting portion 1131, and then the second mounting portion 1131 is installed above the third mounting portion 22 and It is fixed by connecting bolts. When the replaced connecting flange 2 is fixedly installed on the support plate 11, the driving bolt 5 in the first threaded hole 421 is screwed in the reverse direction to move the driving bolt 5 out of the first threaded hole 421. The vacuum cover 4 moves downward under the action of its own gravity to fit with the connecting flange 2 again, thereby facilitating the subsequent fixed connection between the vacuum cover 4 and the connecting flange 2. When the connecting flange 2 is assembled with the support plate 11 and the vacuum cover 4, the molecular pump 3 to be replaced is moved into the installation space 13 and assembled on the connecting flange 2 from bottom to top, thereby realizing the replacement of the molecular pump 3 and the connecting flange 2.

[0081] It can be seen from this that during the entire replacement process, the connecting flange 2 is replaced from the side of the installation space 13, and there is no need to remove the vacuum cover 4 above the first installation surface 111 and the testing instrument on the vacuum cover 4, which solves the problem of time-consuming and labor-intensive disassembly of the connecting flange 2. The replacement process is simple and efficient, and the vacuum cover 4 and the connecting flange 2 can be driven to separate or fit together through the simple cooperation of the fixing part 6 and the driving bolt 5. The driving method is simple and reliable, and there is no need to set up a more complicated driving structure, and the cost is low.

[0082] In some embodiments of the present application, Figure 2 As shown, it also includes: a first sealing member 7 , the connecting flange 2 has a first sealing groove 23 surrounding the connecting flange 2 along the circumference, and the first sealing groove 23 is arranged opposite to the first mounting portion 42 , and the first sealing member 7 is arranged in the first sealing groove 23 .

[0083] Specifically, the flange body 21 of the connecting flange 2 is provided with a first sealing groove 23, and the first sealing groove 23 surrounds the circumference of the connecting flange 2, that is, the first sealing groove 23 is configured as an annular groove, and the first sealing groove 23 is arranged opposite to the first mounting portion 42. Further, continue to refer to Figure 2 As shown, a first sealing member 7 is provided in the first sealing groove 23. For example, the first sealing member 7 may be selected from but not limited to a sealing ring. By providing the first sealing member 7 between the connecting flange 2 and the connecting area of ​​the vacuum cover 4, it is beneficial to improve the sealing performance between the connecting flange 2 and the vacuum cover 4, and avoid defects such as air leakage at the connection between the connecting flange 2 and the vacuum cover 4.

[0084] In some embodiments of the present application, Figure 2 As shown, it also includes: a second sealing member 8, the connecting flange 2 also has a second sealing groove 24 surrounding the circumference of the connecting flange 2, the first mounting portion 42 has a third sealing groove 422 arranged opposite to the second sealing groove 24, the second sealing groove 24 and the third sealing groove 422 form a sealing space, and the second sealing member 8 is arranged in the sealing space.

[0085] Specifically, the flange body 21 of the connecting flange 2 is further provided with a second sealing groove 24, and the second sealing groove 24 surrounds the circumference of the connecting flange 2. The first mounting portion 42 of the vacuum cover 4 has a third sealing groove 422 arranged opposite to the second sealing groove 24. It should be noted that the size of the second sealing groove 24 can be consistent with the size of the third sealing groove 422. In this way, the second sealing groove 24 and the third sealing groove 422 form a sealed space. Further, continue to refer to Figure 2 As shown, the second seal 8 is arranged in the sealed space. For example, the second seal 8 can be a sealing ring or a metal sealing blade. This arrangement is equivalent to setting two seals between the connecting flange 2 and the vacuum cover 4 connecting area, which is beneficial to further improve the sealing performance between the connecting flange 2 and the vacuum cover 4.

[0086] It should be noted that the above-mentioned first seal 7 (sealing ring) and second seal 8 (metal sealing blade) can also be used selectively, and the sealing method is selected according to the test requirements. Compared with the sealing ring, the sealing performance of the metal sealing blade is better than that of the sealing ring. Generally speaking, the sealing ring can be used for sealing occasions with a vacuum degree higher than 10-6 Pa, so the sealing ring can be used for sealing on the production line where the ultimate vacuum degree is not measured, and the metal sealing blade can be used for sealing occasions with a vacuum degree lower than 10-6 Pa. Therefore, metal sealing blades are usually used for sealing in occasions where the ultimate vacuum degree of vacuum needs to be measured. However, the price of the metal sealing blade is much higher than that of the sealing ring, so the cost factor should also be considered when using it. In this way, the reasonable selection of the sealing method according to the test requirements can improve the versatility of the test system.

[0087] In some embodiments of the present application, Figure 1 , Figure 3 and Figure 4 As shown, it also includes: a vacuum gauge 9, which is connected to the cover body 41 through a connecting pipeline. Specifically, the molecular pump test system 100 performs a vacuum degree test through the vacuum gauge 9, and the vacuum gauge 9 is connected to the cover body 41 through a connecting pipeline, wherein the connecting pipeline of the vacuum gauge 9 can extend into the cover body 41, thereby improving the accuracy of the vacuum degree measurement.

[0088] In some embodiments of the present application, Fig.10As shown, it also includes: reinforcing ribs 10, which are fixedly arranged on the second mounting surface 112, and each second mounting portion 1131 is correspondingly provided with at least one reinforcing rib 10, and at least a part of each reinforcing rib 10 is fixedly connected to the corresponding second mounting portion 1131. In other words, at least one reinforcing rib 10 is provided under each second mounting portion 1131, and the reinforcing ribs 10 can improve the bearing capacity of the second mounting portion 1131, thereby facilitating the improvement of the stability of the installation of the connecting flange 2 and the vacuum cover 4.

[0089] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0090] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0091] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

[0092] Although the embodiments of the present application have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump testing system, characterized in that: include: A support member, the support member comprising a support plate and a support frame, the support plate having a first mounting surface and a second mounting surface arranged opposite to each other along a first direction, the second mounting surface being fixedly connected to the support frame to jointly define a mounting space, a first mounting hole being arranged between the first mounting surface and the second mounting surface, and the first mounting hole being communicated with the mounting space; A connecting flange, a molecular pump and a vacuum cover, wherein the vacuum cover comprises a connected cover body and a first mounting portion, wherein the first mounting portion protrudes outwardly in the radial direction of the cover body and surrounds the cover body in the circumferential direction of the cover body, wherein the connecting flange is passed through the first mounting hole and is detachably connected between the first mounting portion and the molecular pump, wherein the molecular pump is located in the installation space, the vacuum cover is disposed on one side of the first mounting surface, and the connecting flange is movable relative to the support member, so that the connecting flange is suitable for fixed assembly with the support plate, or the connecting flange can be selectively moved from one side of the first mounting surface through the first mounting hole to the installation space, or from the installation space through the first mounting hole to one side of the first mounting surface; a fixing member, the fixing member is fixedly arranged on the first mounting surface, the fixing member forms a first avoidance space, the cover body is suitable for passing through the first avoidance space, the fixing member comprises a supporting portion, along the first direction, the supporting portion is located at a side of the first mounting portion away from the supporting plate and is spaced apart from the first mounting portion, the first mounting portion has a first threaded hole, and the supporting portion has a through hole arranged corresponding to the first threaded hole; A driving bolt, the driving bolt passes through the through hole and extends into the first threaded hole, and the supporting portion abuts against the head of the driving bolt, so that the first threaded hole and the driving bolt are screwed together to drive the first mounting portion to be separated from the connecting flange; The hole wall of the first mounting hole has a plurality of second mounting portions protruding inwardly in the radial direction of the first mounting hole, the plurality of second mounting portions are evenly spaced and arranged along the circumference of the first mounting hole, the plurality of second mounting portions jointly define a virtual mounting hole, and a second avoidance space is formed between any two adjacent second mounting portions; The connecting flange comprises a flange body and a plurality of third mounting portions, the plurality of second mounting portions correspond to the plurality of third mounting portions one by one, each of the third mounting portions protrudes outwardly in the radial direction of the flange body, and the plurality of third mounting portions are evenly spaced and arranged in the circumferential direction of the flange body. The flange body is penetrated through the first mounting hole and is detachably connected between the first mounting portion and the molecular pump. The maximum diameter of the flange body is smaller than the diameter of the virtual mounting hole. The connecting flange can be rotated to a first position or a second position relative to the support plate along the axial direction. When the connecting flange is rotated to the first position, each of the third mounting portions is opposite to the corresponding second avoidance space, and each of the third mounting portions is suitable for passing through the corresponding second avoidance space along the first direction. When the connecting flange is rotated to the second position, each of the third mounting portions is opposite to the corresponding second mounting portion along the first direction, so that each of the third mounting portions is fixedly connected to the corresponding second mounting portion.

2. The molecular pump testing system according to claim 1, characterized in that: There are a plurality of first threaded holes, and the plurality of first threaded holes are arranged at intervals along the circumference of the first mounting portion.

3. The molecular pump testing system according to claim 2, characterized in that: There are a plurality of fixing members, and the plurality of fixing members are sequentially arranged around the circumference of the vacuum cover.

4. The molecular pump testing system according to claim 1, characterized in that: Also includes: The first sealing member is provided in the connecting flange and has a first sealing groove surrounding the connecting flange in a circumferential direction, and the first sealing groove is arranged opposite to the first mounting portion, and the first sealing member is arranged in the first sealing groove.

5. The molecular pump testing system according to claim 4, characterized in that: Also includes: The second sealing member, the connecting flange also has a second sealing groove surrounding the circumference of the connecting flange, the first mounting portion has a third sealing groove arranged opposite to the second sealing groove, the second sealing groove and the third sealing groove form a sealing space, and the second sealing member is arranged in the sealing space.

6. The molecular pump testing system according to claim 1, characterized in that: Also includes: A vacuum gauge is connected to the cover body through a connecting pipeline.

7. The molecular pump testing system according to any one of claims 1 to 6, characterized in that: Also includes: A reinforcing rib, wherein the reinforcing rib is fixedly arranged on the second mounting surface, Each of the second mounting portions is correspondingly provided with at least one reinforcing rib, and at least a portion of each of the reinforcing ribs is fixedly connected to the corresponding second mounting portion.

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