Six-degree-of-freedom adaptive active-passive hybrid spatial electromagnetic array damper

Abstract

The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper belongs to the technical field of precision vibration isolation, and utilizes six sets of electromagnetic vibration isolation dampers arranged in a Stewart manner between a connecting upper plate and a base plate to generate low-frequency high-damping and high-frequency low-damping characteristics in six degrees of freedom, thereby effectively and omnidirectionally isolating micro-vibration interference of different frequencies. Each set of electromagnetic vibration isolation damper is constructed by 4n (n≥1, n∈N + ) layers of equal-section magnetic rings arranged in an axial array and vertically magnetized between adjacent layers to construct a high-damping excitation magnetic field, and in real time responds to changes in an external excitation frequency, precisely controls the size and direction of a coil current through a speed feedback control method, dynamically adjusts a damping force to adapt to different working conditions, and ensures optimal vibration isolation effect. The adaptability and stability of the adaptive active-passive composite spatial electromagnetic array damper enable it to still maintain high vibration isolation performance in a multi-degree-of-freedom and frequency diversified vibration environment, thereby providing protection for the stable operation of precision instruments and equipment.

Description

Technical Field

[0001] This invention belongs to the field of precision vibration isolation technology, specifically a six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper. Background Technology

[0002] In the assembly, testing, and experimentation of precision instruments and equipment, low-frequency micro-amplitude vibration interference from the environment has become a key issue affecting research results. Equipping precision instruments and equipment with low-frequency vibration isolation platforms has gradually become a major technical means in the field of precision engineering to suppress environmental micro-vibrations. Damping, as a key indicator for measuring vibration isolation effectiveness, directly relates to the ability of the vibration isolation platform to handle vibrations in various frequency bands. The impact of damping on vibration isolation effectiveness is mainly reflected in two aspects: Firstly, high damping can effectively reduce the resonance region and reduce the amplification effect of low-frequency vibrations, which is crucial for suppressing low-frequency micro-vibrations; secondly, low damping helps to accelerate the dissipation of high-frequency vibrations and improve the adaptability of the vibration isolation system to high-frequency vibrations. Therefore, the required damping value varies for vibrations of different frequencies, which necessitates that the vibration isolation system can effectively control the damping.

[0003] However, most current vibration isolators maintain a constant damping coefficient when facing vibrations of different frequencies, which greatly limits their adaptability and practicality in various vibration environments. To improve vibration isolation performance, the problem of damping control must be solved, thereby automatically adjusting the damping coefficient according to different vibration frequencies. Furthermore, current research mostly focuses on single-degree-of-freedom (DOF) vibration isolation, while research on damping control in the more practical field of six-DOF vibration isolation is relatively scarce. Six-DOF vibration isolation systems can simultaneously suppress vibrations in six directions, which is of great significance for improving the stability and accuracy of precision equipment. Therefore, research on dampers in six-DOF vibration isolation systems should be strengthened, and variable damping technology suitable for six-DOF vibration isolation should be explored to provide more efficient and reliable vibration isolation solutions for precision instruments and equipment, and promote the development of the precision engineering field.

[0004] Patent CN202210957290.3 discloses a magnetorheological damper with a toothed flow channel. The toothed piston adopts a gear-like design, and three sets of excitation coils are evenly distributed and wound inside the piston cylinder to increase the magnetic flux utilization rate. Patent CN202210441343.6 discloses a multi-excitation multi-disc magnetorheological broadband vibration isolator, which replaces the liquid environment in the flow working mode with a non-woven fabric-based composite matrix magnetorheological material to expand the adjustable range of damping force and reduce the hardening effect under medium and high frequency excitation. In order to adjust the damping force, patent CN202111522940.3 discloses a multi-stage excitation dual-cylinder magnetorheological damper and its control method. By sequentially and alternately arraying N magnetic yokes and (N-1) coils in the axial direction of the inner cylinder, and coaxially nesting them with the outer cylinder, (2N-1) magnetorheological fluid flow paths are constructed; and by adjusting the magnetic field, the number of flow gaps is dynamically changed to ensure adjustable damping. The above technical solutions are characterized by the following: 1) Damping and vibration isolation can only be achieved in a single degree of freedom. When faced with multi-directional vibration interference in complex environments, the vibration isolation effect is poor; 2) The damping coefficient is positively correlated with the coil current and its amplitude-frequency characteristics are constant, and the damping effect is stable within a certain frequency range. However, it cannot provide effective vibration isolation when faced with vibration interference of different frequencies or a wider frequency range; 3) The properties of magnetorheological fluids are unstable and easily affected by external environmental factors such as temperature and humidity. In high-temperature or low-temperature environments, its damping performance may change, and it may even fail to work properly; 4) Long-term use or improper use may cause slag to be generated inside the magnetorheological damper, affecting the damping effect and service life.

[0005] Guangxi University of Science and Technology has proposed a damper that combines electromagnetic energy feeding with magnetorheological fluid (1. "An electromagnetic energy feeding stepped magnetorheological damper", CN202310051772.7; 2. "A dual-cylinder embedded hybrid electromagnetic energy feeding damper", CN202210120495.6; 3. "A hybrid energy feeding electromagnetic vibration isolation damper", CN202210120558.8; 4. "A hybrid electromagnetic energy feeding damper", CN202210120502.2). By setting a stepped magnetorheological fluid damping gap between the inner side of the cylinder and the piston head, the effective damping channel length is increased. At the same time, the electromagnetic energy feeding damping structure composed of a permanent magnet array and coils is combined to dissipate vibration energy in the form of heat energy, thereby increasing the damping amplitude and realizing the adjustment of damping. The above technical solutions are characterized by: 1) Damping and vibration isolation can only be achieved in a single degree of freedom. When faced with multi-directional vibration interference in a complex environment, the vibration isolation effect is not good; 2) The damping coefficient is positively correlated with the coil current and its amplitude-frequency characteristics are constant. It is impossible to adjust the damping force in real time according to the dynamic changes of the external excitation frequency, which limits its ability to provide the best vibration isolation effect under different working conditions.

[0006] In summary, the challenge lies in developing a six-degree-of-freedom electromagnetic damper capable of adaptively adapting to changes in excitation frequency through structural and principle innovation. This damper should respond in real-time to changes in the external excitation frequency and dynamically adjust the damping force to control the six degrees of freedom in space (along the excitation frequency). x , y , z Translation and rotation of the axis x , y , z The rotation of the shaft effectively eliminates or attenuates micro-vibration interference of various frequencies in the environment, ensuring the optimal working environment for precision instruments and equipment. This innovation not only marks a new leap forward in the technology of optimizing the working environment of precision instruments and equipment, but will also directly promote its working accuracy to a new level, meeting the urgent needs of scientific research and industrial fields for high-precision and high-stability equipment today and in the future. Summary of the Invention

[0007] This invention addresses the lack of six-degree-of-freedom (DOF) vibration isolation dampers in existing research, and the limitations of traditional vibration isolators in adaptability and isolation performance under diverse vibration frequencies due to their fixed damping coefficients. It proposes a six-DOF adaptive active-passive composite spatial electromagnetic array damper. This device utilizes six sets of electromagnetic vibration isolation dampers to generate adjustable damping characteristics, effectively isolating vibration interference from multiple degrees of freedom and different frequencies. Each set of electromagnetic vibration isolation dampers utilizes four… n ( n ≥1, n∈N + The inner and outer magnetic ring arrays, composed of axially arranged layers of uniformly magnetized magnetic rings with perpendicular magnetization between adjacent layers, form a high magnetic density excitation magnetic field. When the conductor plate moves relative to this magnetic field, it generates unadjustable high damping characteristics. When the external excitation frequency changes, the damping force is dynamically adjusted by precisely controlling the current in the coils coaxially nested on the outside of the conductor plate, thereby effectively isolating vibration interference of different frequencies. The adaptability and stability of the adaptive active-passive composite spatial electromagnetic array damper enable it to maintain high vibration isolation performance in multi-degree-of-freedom and complex and variable vibration environments, ensuring that various precision instruments and equipment operate in the optimal working environment, thereby promoting a double leap in their accuracy and performance.

[0008] The technical solution of this invention is:

[0009] A six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper can precisely adapt to changes in excitation frequency and generate adjustable high damping characteristics in real time, effectively isolating micro-vibration interference at different frequencies in multiple degrees of freedom. It includes an upper plate, a base plate, and six sets of electromagnetic vibration isolation dampers arranged in a Stewart configuration connecting the two. The upper plate has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate. The top of each electromagnetic vibration isolation damper is connected to a fixed component at the bottom of the upper plate via an upper flexible hinge, and its bottom is connected to a fixed component at the top of the base plate via a lower flexible hinge. Each electromagnetic vibration isolation damper is composed of a vertically magnetized spatial electromagnetic array damping structure connected in parallel with a helical spring. The magnetized space electromagnetic array damping structure includes an inner magnetic ring array, an inner magnetic array mounting component, a coil, a conductor plate, an outer magnetic array fixing component, an outer magnetic ring array, an upper actuator, and a lower connector. The overall structure is axially symmetrical. The inner magnetic ring array, conductor plate, and outer magnetic ring array are coaxially nested and arranged with equal gaps from the axis outwards along the radius. The inner magnetic ring array is coaxially nested, tightly fitted, and fixedly mounted on the inner magnetic array mounting component, with a radial gap between it and the conductor plate. The inner magnetic array mounting component is a cylindrical structure with an inverted T-shaped cross-section. Its bottom is fixedly connected to the outer magnetic array fixing component by threads, and its top has a gap with the conductor plate and a radial gap with the outer magnetic array fixing component. The conductor plate... The sleeve is annular, with its top end fixedly connected to the upper actuator via a thread, and its bottom having an annular boss with an annular groove inside. The top end of the helical spring is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate, and its bottom end is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing component. The coil is symmetrical about the axial height of the inner magnetic ring array, and is coaxially nested, tightly fitted, and fixedly installed on the outer side of the conductor plate, with a gap along the radial direction between it and the outer magnetic array fixing component. The magnitude and direction of the coil current are adaptively adjusted by the controller using a speed feedback control algorithm based on the frequency of external micro-vibration interference. The outer magnetic array fixing component is located on the outer side along a circular... The annular sleeve with a deep groove has an axial gap between its top and the upper flexible hinge, and its bottom is fixedly connected to the lower connector by a thread. The outer magnetic ring array is coaxially nested, tightly fitted, and fixedly installed in the deep groove outside the outer magnetic array fixing component. Both the inner and outer magnetic ring arrays are composed of multiple layers of magnetic rings with equal cross-sections arranged in an axial array and perpendicularly magnetized between adjacent layers. The odd-numbered layers of magnetic rings have the same height, and the even-numbered layers have the same height. The first layer of the inner and outer magnetic ring arrays is magnetized in the same radial direction. On the right half of the front sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0010] Preferably, the inner magnetic ring array and the outer magnetic ring array have 4 layers. n ,in n ≥1, n∈N + .

[0011] Preferably, the heights of the magnetic rings in the same layer of the inner magnetic ring array and the outer magnetic ring array are equal.

[0012] Preferably, the bottom surface of the first layer of magnetic rings in the inner magnetic ring array coincides with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array.

[0013] Preferably, the conductor plate is a metal material with high electrical conductivity and high magnetic permeability, such as copper, iron, cobalt, or nickel.

[0014] Preferably, the radially magnetized magnetic rings in the inner and outer magnetic ring arrays are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12, or 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0015] Preferably, the inner magnetic array mounting component and the outer magnetic array fixing component are made of non-magnetic conductive materials such as aluminum alloy and titanium alloy.

[0016] The technical innovation and positive effects of this invention are as follows:

[0017] (1) This invention innovatively proposes a vertically magnetized spatial electromagnetic array damping technology with adjustable high damping characteristics. Multiple layers of axially arranged, vertically magnetized, uniformly cross-section magnetic rings are coaxially nested to form an inner and outer magnetic ring array, thereby creating a high magnetic density excitation magnetic field around the conductor plate. This initially achieves high-intensity, but previously unadjustable, damping characteristics. Furthermore, a speed feedback control algorithm precisely regulates the magnitude and direction of the current flowing through the coils coaxially nested outside the conductor plate, thereby dynamically adjusting the excitation magnetic field and damping force, effectively attenuating vibration interference. This innovation not only improves the magnetic field utilization rate but also achieves adjustable damping. This is one of the innovative points that distinguishes this invention from existing technologies.

[0018] (2) This invention can achieve optimal precision vibration isolation under different working conditions in six degrees of freedom. It employs six sets of electromagnetic vibration dampers consisting of a vertically magnetized spatial electromagnetic array damping structure connected in parallel with helical springs, which can sense and analyze the load in real time. x , y , z Three straight directions and around x , y , zThe frequency variations of micro-vibration disturbances experienced in the three rotational directions of the axes are controlled by a velocity feedback control algorithm to regulate the magnitude and direction of the energized current in the coil nested on the outer side of the conductor plate. This allows for dynamic control of six-degree-of-freedom vibration isolation damping without altering the load-bearing conditions. This not only enhances the stability of the micro-vibration isolation system but also maintains high vibration isolation performance in complex and variable multi-degree-of-freedom vibration environments, providing an "ultra-quiet" working environment for advanced instruments and equipment. This significantly promotes a leapfrog improvement in the precision of precision instruments and equipment. This is the second innovative aspect of this invention, distinguishing it from existing technologies.

[0019] (3) This invention has high stability and is not affected by external environmental interference. Moreover, the design of the magnetic levitation structure fundamentally eliminates the nonlinearity problem introduced by friction. The vertically magnetized spatial electromagnetic array damping structure uses the principle of electromagnetic induction to generate eddy current damping effect, which not only has an instantaneous and sensitive response speed, but also has high stability. Its damping force is almost unaffected by external environmental factors (such as temperature fluctuations and humidity changes). In addition, the non-contact magnetic levitation design has no mechanical friction, avoiding the nonlinearity caused by friction. This not only extends the service life of the device, but also reduces subsequent maintenance costs and improves the economic efficiency of the device. This is the third innovative point of this invention that distinguishes it from the prior art. Attached Figure Description

[0020] Figure 1 A three-dimensional view of a six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper;

[0021] Figure 2 A three-dimensional cross-sectional schematic diagram of an electromagnetic vibration isolation damper;

[0022] Figure 3 This is a front sectional view of an electromagnetic vibration isolation damper;

[0023] Figures 4-10 A schematic diagram showing the relative positions and magnetization directions of the inner and outer magnetic ring arrays when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are spliced ​​together to form radially magnetized magnetic rings.

[0024] Part numbers in the diagram: 1 Inner magnetic ring array, 2 Inner magnetic array mounting component, 3 Coil, 4 Conductor plate, 5 Outer magnetic array fixing component, 6 Outer magnetic ring array, 71 Upper actuator, 72 Lower connector, 8 Helical spring, 9 Upper plate, 10 Base plate, 11 Vertical magnetized spatial electromagnetic array damping structure, 12 Fixing component, 13 Electromagnetic vibration damper, 14 Upper flexible hinge, 15 Lower flexible hinge. Detailed Implementation

[0025] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0026] A six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper can precisely adapt to changes in excitation frequency and generate adjustable high damping characteristics in real time, achieving effective isolation of micro-vibration interference at different frequencies in multiple degrees of freedom. It includes an upper plate 9, a base plate 10, and six sets of electromagnetic vibration isolation dampers 13 connected to the upper plate 9 in a Stewart arrangement. The upper plate 9 has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate 10. The top of the electromagnetic vibration isolation damper 13 is connected to the fixing member 12 at the bottom of the upper plate 9 via an upper flexible hinge 14, and its bottom is connected to the fixing member 12 at the top of the base plate 10 via a lower flexible hinge 15. The electromagnetic vibration isolation damper 13 consists of a vertically magnetized spatial electromagnetic array damping structure 11 and a helical spring 8. The vertically magnetized spatial electromagnetic array damping structure 11 is composed of an inner magnetic ring array 1, an inner magnetic array mounting component 2, a coil 3, a conductor plate 4, an outer magnetic array fixing component 5, an outer magnetic ring array 6, an upper actuator 71, and a lower connecting component 72. The overall structure is axially symmetrical. The inner magnetic ring array 1, the conductor plate 4, and the outer magnetic ring array 6 are coaxially nested and arranged with equal gaps from the axis outward along the radius. The inner magnetic ring array 1 is coaxially nested, tightly fitted, and fixedly installed on the inner magnetic array mounting component 2, with a radial gap between it and the conductor plate 4. The inner magnetic array mounting component 2 is a cylindrical structure with an inverted T-shaped cross-section. Its bottom is fixedly connected to the outer magnetic array fixing component 5 by threads, and its top is gapped with the conductor plate 4. The fixing component 5 has a gap; the conductor plate 4 is an annular sleeve, its top end is fixedly connected to the upper actuator 71 by a thread, and its bottom end is provided with an annular boss, with an annular groove inside the boss; the top end of the helical spring 8 is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate 4, and its bottom end is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing component 5; the coil 3 is symmetrical about the axial height center of the inner magnetic ring array 1, and is coaxially nested, tightly fitted, and fixedly installed on the outer side of the conductor plate 4, with a gap in the radial direction between it and the outer magnetic array fixing component 5; the magnitude and direction of the current flowing through the coil 3 are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixing component 5 is an annular sleeve with a deep groove on its outer side along the circumference. Its top end has an axial gap with the upper flexible hinge 14, and its bottom end is fixedly connected to the lower connector 72 by a thread. The outer magnetic ring array 6 is coaxially nested, tightly fitted, and fixedly installed in the deep groove outside the outer magnetic array fixing part 5. Both the inner magnetic ring array 1 and the outer magnetic ring array 6 are composed of multiple layers of magnetic rings with equal cross-sections arranged in an axial array and perpendicularly magnetized between adjacent layers. The height of the odd-numbered layers of magnetic rings is equal, and the height of the even-numbered layers of magnetic rings is equal. The first layer of the inner magnetic ring array 1 and the outer magnetic ring array 6 is magnetized in the same radial direction. On the right half of the front sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0027] As one specific implementation, the inner magnetic ring array 1 and the outer magnetic ring array 6 have a total of 4 layers. n,in n ≥1, n∈N + .

[0028] In one specific implementation, the heights of the magnetic rings in the same layer of the inner magnetic ring array 1 and the outer magnetic ring array 6 are equal.

[0029] In one specific implementation, the bottom surface of the first layer of magnetic rings in the inner magnetic ring array 1 coincides with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array 6.

[0030] In one specific implementation, the conductor plate 4 is made of high electrical conductivity and high magnetic permeability metal materials such as copper, iron, cobalt, and nickel.

[0031] In one specific implementation, the radially magnetized magnetic rings in the inner magnetic ring array 1 and the outer magnetic ring array 6 are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0032] In one specific implementation, the inner magnetic array mounting component 2 and the outer magnetic array fixing component 5 are made of non-magnetic conductive metal materials such as aluminum alloy and titanium alloy.

[0033] The following is combined Figures 1-3 An embodiment of the present invention is given.

[0034] The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper consists of an upper plate 9, a base plate 10, and six sets of electromagnetic vibration isolation dampers 13 connected to the upper plate in a Stewart arrangement. It can precisely adapt to changes in excitation frequency, generating adjustable high-damping characteristics in real time, and effectively isolating micro-vibration interference at different frequencies in multiple degrees of freedom. The upper plate 9 has a longitudinal axis relative to the base plate 10. x , y , z The three degrees of freedom of axis translation and the rotation around the axis x , y , z The shaft has three degrees of freedom for rotation. In each set of electromagnetic vibration damping devices 13, the top of the upper actuator 71 is connected to the fixing member 12 at the bottom of the upper plate 9 through four threaded holes evenly distributed on the upper flexible hinge 14, and the bottom of the lower connector 72 is connected to the fixing member 12 on the base plate 10 through four threaded holes evenly distributed on the lower flexible hinge 15. The axes of two adjacent sets of low-frequency electromagnetic vibration dampers 13 are perpendicular to each other.

[0035] The electromagnetic vibration damper 13 is composed of a vertically magnetized spatial electromagnetic array damping structure 11 connected in parallel with a helical spring 8. The vertically magnetized spatial electromagnetic array damping structure 11 includes an inner magnetic ring array 1, an inner magnetic array mounting component 2, a coil 3, a conductor plate 4, an outer magnetic array fixing component 5, an outer magnetic ring array 6, an upper actuating component 71, and a lower connecting component 72. The overall structure is axially symmetrical. The inner magnetic ring array 1, the conductor plate 4, and the outer magnetic ring array 6 are coaxially nested and arranged with equal gaps from the axis outward along the radius. The inner magnetic ring array 1 is coaxially nested, tightly fitted, and fixedly mounted on the inner magnetic array mounting component 2, with a radial gap between it and the conductor plate 4. The inner magnetic array mounting component 2 and the outer magnetic array fixing component 5 are made of non-magnetic conductive metal materials such as aluminum alloy and titanium alloy. The inner magnetic array mounting component 2 is a cylindrical structure with an inverted T-shaped cross-section. Its bottom is fixedly connected to the outer magnetic array fixing component 5 through four evenly distributed threaded holes. The top end maintains a gap of 3mm to 10mm with the conductor plate 4, and there is a gap between it and the outer magnetic array fixing component 5 in the radial direction. The conductor plate 4 is an annular sleeve made of high electrical conductivity and high magnetic permeability metal materials such as copper, iron, cobalt, and nickel. Its top end is fixedly connected to the upper actuator 71 through threads, and its bottom end is provided with an annular boss with an annular groove inside the boss. The top end of the helical spring 8 is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate 4, and its bottom end is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing component 5.

[0036] Coil 3 is made of copper wire wound turn by turn, with a wire diameter of not less than 0.25mm and not more than 2mm. Each layer or section of copper wire is insulated with insulating varnish, insulating paper, or insulating sleeve to prevent short circuits. The height of coil 3 is the same as that of the inner magnetic ring array 1 and the outer magnetic ring array 6. The current carrying capacity does not exceed 10A. The heat dissipation efficiency can be improved by increasing the heat dissipation area (such as by using heat sinks or increasing air circulation). Alternatively, efficient cooling methods such as liquid cooling or phase change cooling can be used to quickly and effectively dissipate the heat generated during operation and prevent overheating. The coil 3 is symmetrical about the axial height of the inner magnetic ring array 1, and is coaxially nested, tightly fitted, and fixedly installed on the conductor plate 4, with a gap along the radial direction between it and the outer magnetic array fixing member 5; the magnitude and direction of the current flowing through the coil 3 are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixing member 5 is an annular sleeve with a deep groove on its outer side along the circumference, with its top end maintaining a 3mm~10mm gap with the upper flexible hinge 14 in the axial direction, and its bottom being fixedly connected to the lower connector 72 by threads; the outer magnetic ring array 6 is coaxially nested, tightly fitted, and fixedly installed in the deep groove on the outside of the outer magnetic array fixing member 5.

[0037] Both the inner magnetic ring array 1 and the outer magnetic ring array 6 are composed of multiple layers of uniform cross-section magnetic rings arranged axially and perpendicularly magnetized between adjacent layers. Furthermore, the heights of the magnetic rings in the same layer are equal in both the inner and outer magnetic ring arrays 1 and 6. All magnetic rings are N44H grade neodymium iron boron permanent magnets, with a remanence of 13.54 kGs, intrinsic coercivity of 12.66 kOe, and relative permeability... μ r =1.23. The inner and outer radii of the inner magnetic ring array are 2mm and 4.3mm, respectively. The height of the odd-numbered inner magnetic rings is 2.5mm, and the height of the even-numbered inner magnetic rings is 3.7mm. The inner and outer radii of the outer magnetic ring array 6 are 14mm and 16.5mm, respectively. The height of the odd-numbered outer magnetic rings is 2.5mm, and the height of the even-numbered outer magnetic rings is 3.7mm. Both the inner and outer magnetic rings in the first layer are magnetized radially outward from the axis, and their bottom surfaces coincide. On the right half of the front sectional view, with each additional layer of magnetic rings, the magnetization direction of the inner magnetic rings rotates 90° clockwise, and the magnetization direction of the outer magnetic rings rotates 90° counterclockwise. The radially magnetized magnetic rings in both the inner magnetic ring array 1 and the outer magnetic ring array 6 are composed of eight 42° tile-shaped magnets spliced ​​together, with a gap of 3° between adjacent tile-shaped magnets. When the heights of the same layer of magnetic rings in the inner magnetic ring array 1 and the outer magnetic ring array 6 are equal, the damping value generated by the vertically magnetized spatial electromagnetic array damping structure 11 is the highest.

[0038] The helical spring 8 stably supports the vibration-isolation load placed on top of the upper plate 9 and effectively isolates micro-vibrations in the mid-to-high frequency range, providing a solid support foundation for precision equipment. When the vibration-isolation load vibrates up and down due to interference, it drives the conductor plate 4 to move relative to the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6. During this process, the conductor plate 4 cuts the magnetic field lines, causing a change in its internal magnetic flux, thereby exciting ring-shaped eddy currents on the conductor surface. These eddy currents then apply a damping force to the conductor plate 4 in the opposite direction to its motion and proportional to the relative motion speed. This damping force effectively converts the kinetic energy of the vibration-isolation load into electrical energy inside the conductor plate 4. Subsequently, the electrical energy is dissipated in the form of heat energy, achieving the effect of energy dissipation and vibration reduction. When the frequency of external micro-vibration interference changes, the magnitude and direction of the current in the coil coaxially nested on the outside of the conductor plate 4 are precisely controlled through a speed feedback control algorithm. This allows for immediate response to changes in the external excitation frequency and dynamic adjustment of the damping force, ensuring optimal vibration isolation under different operating conditions. Specifically, for high-frequency vibrations, by precisely controlling the magnitude and direction of the current in coil 3, the magnetic field generated by the energized coil can partially counteract the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6, thereby reducing the damping force of the electromagnetic vibration damper 13 and accelerating the attenuation of high-frequency vibrations. For low-frequency vibrations or vibrations close to the natural frequency of the helical spring 8, by precisely controlling the magnitude and direction of the current in the coil, the magnetic field generated by the energized coil can enhance the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6, thereby increasing the damping force generated by the electromagnetic vibration damper 13 and effectively attenuating vibration interference in the low-frequency or resonant range.

[0039] The vertically magnetized spatial electromagnetic array damping structure 11 utilizes magnetic levitation to generate high damping characteristics and dynamically adjusts the damping magnitude through precise control of the electromagnetic field, effectively attenuating micro-vibrations of different frequencies. Its rapid response and high-precision control characteristics ensure stability even in complex and variable vibration environments. As a non-contact, highly stable, adjustable damping structure, it is characterized by the absence of mechanical friction, thus avoiding nonlinear problems caused by friction and preventing the introduction of additional stiffness, without affecting the stiffness characteristics of the vibration isolation system and fully guaranteeing the vibration isolation bandwidth. By using the vertically magnetized spatial electromagnetic array damping structure 11 in parallel with the helical spring 8 to support the load, vibration isolation performance can be improved without affecting the load-bearing capacity, providing an "ultra-quiet" working environment for cutting-edge instruments and equipment such as ultra-precision lithography machines, high-resolution satellite cameras, and ultra-precision machine tools.

[0040] The magnetization process of radially magnetized magnetic rings is complex, and the magnetization effect cannot be guaranteed. Therefore, they are often made by splicing together multiple tile-shaped magnets that are uniformly magnetized radially. Figures 4-10The diagram shows the relative positions and magnetization directions of the inner magnetic ring array 1 and the outer magnetic ring array 6 when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are spliced ​​together to form radial magnetized magnetic rings. The gap between adjacent tile-shaped magnets is usually no more than 3° to ensure the continuity and uniformity of the magnetic field.

Claims

1. A six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper, which can accurately adapt to changes in excitation frequency and generate adjustable high damping characteristics in real time, effectively isolating micro-vibration interference of different frequencies in multiple degrees of freedom; including an upper plate (9), a base plate (10) and six sets of electromagnetic vibration isolation dampers (13) arranged in a Stewart manner connecting the two, the upper plate (9) has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate (10), the top of the electromagnetic vibration isolation damper (13) is connected to the fixing member (12) at the bottom of the upper plate (9) through an upper flexible hinge (14), and its bottom is connected to the fixing member (12) at the top of the base plate (10) through a lower flexible hinge (15); characterized in that: The electromagnetic vibration damper (13) is composed of a vertically magnetized spatial electromagnetic array damping structure (11) and a helical spring (8) connected in parallel. The vertically magnetized spatial electromagnetic array damping structure (11) includes an inner magnetic ring array (1), an inner magnetic array mounting component (2), a coil (3), a conductor plate (4), an outer magnetic array fixing component (5), an outer magnetic ring array (6), an upper actuator (71), and a lower connecting component (72). The overall structure is axially symmetrical. The inner magnetic ring array (1), the conductor plate (4), and the outer magnetic ring array (6) are coaxially nested and arranged with equal gaps from the axis outward along the radius. The inner magnetic ring array (1) is coaxially nested. The inner magnetic array mounting component (2) is tightly fitted and fixedly installed on the inner magnetic array mounting component (2), with a radial gap between it and the conductor plate (4); the inner magnetic array mounting component (2) is a cylindrical structure with an inverted T-shaped cross section, its bottom is fixedly connected to the outer magnetic array fixing component (5) by threads, and its top is gapped with the conductor plate (4), with a radial gap between it and the outer magnetic array fixing component (5); the conductor plate (4) is an annular sleeve, its top is fixedly connected to the upper actuator (71) by threads, and its bottom is provided with an annular boss, with an annular groove inside the boss; the top of the helical spring (8) is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate (4), and its The bottom is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing part (5); the coil (3) is symmetrical about the axial height center of the inner magnetic ring array (1), and is coaxially nested, tightly fitted and fixedly installed on the outer side of the conductor plate (4), with a gap in the radial direction between it and the outer magnetic array fixing part (5); the magnitude and direction of the current carrying the coil (3) are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixing part (5) is an annular sleeve with a deep groove opened along the circumference on the outer side, with a gap in the axial direction between its top end and the upper flexible hinge (14), and the bottom is connected by a screw The inner magnetic ring array (1) and the outer magnetic ring array (6) are fixedly connected; the outer magnetic ring array (6) is coaxially nested, tightly fitted and fixedly installed in the deep groove outside the outer magnetic array fixing part (5). The inner magnetic ring array (1) and the outer magnetic ring array (6) are both composed of multiple layers of magnetic rings with equal cross-sections arranged in an axial array and vertically magnetized between adjacent layers. The height of the odd-numbered layers of magnetic rings is equal and the height of the even-numbered layers of magnetic rings is equal. The first layer of the inner magnetic ring array (1) and the outer magnetic ring array (6) is magnetized in the same radial direction. On the right half of the front sectional view, for each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

2. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to claim 1, characterized in that: The inner magnetic ring array (1) and the outer magnetic ring array (6) have a layer count of 4. n ,in n ≥1, n ∈ N + .

3. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to any one of claims 1 and 2, characterized in that: The inner magnetic ring array (1) and the outer magnetic ring array (6) have the same height of magnetic rings in the same layer.

4. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to claim 1, characterized in that: The bottom surface of the first layer of magnetic rings in the inner magnetic ring array (1) coincides with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array (6).

5. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to claim 1, characterized in that: The conductor plate (4) is made of high electrical conductivity and high magnetic permeability metal materials such as copper, iron, cobalt, and nickel.

6. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to any one of claims 1 and 4, characterized in that: The inner magnetic ring array (1) and the outer magnetic ring array (6) are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

7. The six-degree-of-freedom adaptive active-passive composite spatial electromagnetic array damper according to claim 1, characterized in that: The inner magnetic array mounting component (2) and the outer magnetic array fixing component (5) are made of non-magnetic conductive materials such as aluminum alloy and titanium alloy.

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