Large precise micro-vibration isolation self-adaptive active and passive composite space electromagnetic array damping regulation and control device

Abstract

A large-scale precise micro-vibration isolation self-adaptive active and passive composite space electromagnetic array damping regulation and control device belongs to the technical field of vibration isolation and adopts 4n (n is greater than or equal to 1 and n belongs to N +) layers of uniform-section magnetic rings which are arranged in an array along the axial direction and are vertically magnetized between adjacent layers to form an inner permanent magnet array and an outer permanent magnet array which are coaxially nested, so that a high-flux-density excitation magnetic field is constructed around a conductor plate; the conductor plate moves relative to the magnetic field to generate a strong damping effect. When the external excitation frequency changes, the current in the coaxial nested coil on the outer side of the conductor plate is accurately regulated and controlled through speed feedback, and the damping force is dynamically adjusted. The high damping characteristic is shown during low-frequency micro-vibration, and the vibration transmissibility is effectively reduced; and during high-frequency micro-vibration, the low-damping characteristic is presented, and high-efficiency attenuation of vibration interference is realized. According to the active and passive composite damping regulation and control strategy, the adaptability and stability of large-scale precise micro-vibration isolation and the vibration isolation performance of the large-scale precise micro-vibration isolation in a complex vibration environment are enhanced.

Description

Technical Field

[0001] The invention belongs to the technical field of precision vibration isolation, in particular to a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device. Background Art

[0002] During the installation, testing and experiment of precision instruments and equipment, low-frequency micro-vibration interference in the environment has become one of the key issues affecting the research results. Equipping precision instruments and equipment with low-frequency vibration isolation platforms has gradually become the main technical means to suppress environmental micro-vibrations in the field of precision engineering. Damping is one of the core parameters that determine the vibration isolation effect, which directly affects the effect of the vibration isolation platform on vibrations of different frequencies. Specifically, high damping helps to reduce the vibration gain of the vibration isolation platform in the low-frequency to resonant frequency range. On the contrary, low damping can effectively promote the rapid attenuation of high-frequency vibrations by the vibration isolation platform. This means that the damping value required to achieve effective attenuation is different for vibrations of different frequencies. However, the damping coefficient of the existing vibration isolation platform remains constant in the amplitude-frequency characteristics, which limits its adaptability and effectiveness in vibration environments with various frequencies. Therefore, how to effectively regulate the damping coefficient of the vibration isolation platform has become a key issue that needs to be solved to improve vibration isolation performance.

[0003] The research on existing damping control devices is mainly focused on small optical micro-vibration isolation platforms and devices, the mass of which is usually within kilograms to hundreds of kilograms, and rarely exceeds tons. When facing the damping control needs of large precision micro-vibration isolation platforms of hundreds of tons and above, these devices are difficult to provide a sufficiently high damping force to effectively adjust the damping coefficient, causing the damping coefficient of large platforms to tend to be fixed. In addition, the damping coefficient of existing damping control devices also shows a constant characteristic in terms of amplitude-frequency characteristics, which can only slightly increase the damping coefficient of large precision micro-vibration isolation platforms, but cannot dynamically adjust the damping according to changes in the excitation frequency, and thus cannot achieve high-performance vibration isolation in a multi-frequency vibration environment.

[0004] Patent No. CN202210957290.3 discloses a magnetorheological damper with a toothed flow channel. The toothed piston adopts a gear-like design, and the excitation coils are evenly distributed in three groups and wound around the inner layer of the piston cylinder to increase the utilization rate of the magnetic flux. Patent No. CN202210441343.6 discloses a multi-excitation multi-disc magnetorheological broadband vibration isolator, which replaces the liquid environment in the flow working mode with a composite matrix magnetorheological material based on non-woven fabric to expand the adjustable range of the damping force and reduce the hardening effect under medium and high frequency excitation. In order to adjust the damping force, Patent No. CN202111522940.3 discloses a multi-stage excitation double-cylinder magnetorheological damper and its control method, which constructs (2N-1) magnetorheological fluid flow paths by alternating N yokes and (N-1) coils in the axial direction of the inner cylinder and coaxially nesting with the outer cylinder; and by regulating the magnetic field, the number of flow gaps is dynamically changed to ensure adjustable damping. There are limitations when magnetorheological dampers are used in the field of large-scale precision micro-vibration isolation: 1) The shear yield strength of magnetorheological dampers is low, and it is difficult to produce damping sufficient to regulate large-scale precision micro-vibration isolation of hundreds of tons or above; increasing the damping by increasing the number of excitation coils, excitation voltage / current, effective magnetic field area, throttling channel length, etc. will increase energy consumption and cost; 2) The properties of magnetorheological fluids are unstable and easily affected by external environmental factors such as temperature and humidity. In high or low temperature environments, their damping performance may change, and they may even fail to work properly; 3) Long-term use or improper use may cause residue to form inside the magnetorheological damper, affecting the damping effect and service life.

[0005] Professor Cui Junning of Harbin Institute of Technology proposed an ultra-low frequency air spring isolator (1. "Air spring isolator based on electromagnetic negative stiffness structure", ZL202010605223.6; 2. Ultra-low frequency isolator based on vertical magnetized magnetic ring negative stiffness structure, ZL202010605241.4; 3. Ultra-low frequency air spring isolator based on axial magnetized magnetic ring negative stiffness structure, ZL202010606309.0; 4. Large load ultra-low frequency air spring isolator based on negative stiffness magnetic spring, ZL202010605236.3). The device can use the inner and outer magnetic rings with radial reverse magnetization, axial co-magnetization or vertical magnetization to achieve negative stiffness characteristics, and use the eddy currents generated by the throttle hole and the relative movement of the inner and outer magnetic rings to achieve the damping effect. In the above scheme, the inner and outer magnetic rings are permanent magnets uniformly magnetized in a certain direction, and their excitation magnetic fields are symmetrical. In practical applications, only one side of the magnetic field realizes the damping characteristics, while the other side of the magnetic field is in an idle state, and the magnetic field utilization rate is low.

[0006] Guangxi University of Science and Technology proposed a damper that is a composite of electromagnetic energy feeding and magnetorheological fluid (1. "An electromagnetic energy feeding stepped magnetorheological damper", CN202310051772.7; 2. "A double-tube embedded hybrid electromagnetic energy feeding damper", CN202210120495.6; 3. "A hybrid energy feeding electromagnetic damper", CN202210120558.8; 4. "A hybrid electromagnetic energy feeding damper", CN202210120502.2). By setting a stepped magnetorheological fluid damping gap between the inner side of the cylinder body and the piston head, the effective damping channel length is increased; at the same time, the electromagnetic energy feeding damping structure composed of the Halburg permanent magnet array and the coil is composited to increase the damping amplitude and realize the adjustment of the damping. Beijing Institute of Technology proposed a damping rotation positioning spring (1. "An eddy current damping magnetic spring based on multiple Halbach permanent magnet arrays", CN201610855716.9; 2. "An eddy current damping magnetic spring", CN201610857360.2), which uses the magnetic field generated face to face by multiple coaxially nested Halbach permanent magnet arrays and the leakage magnetic field on the back to achieve high positioning stiffness and high-speed switching of the magnetic spring. The characteristics of this technical solution are: 1) For the Halbach permanent magnet array that constitutes the damping rotation positioning spring, the excitation magnetic field it generates has significant imbalance, which can significantly improve the utilization rate of the magnetic field. 2) The eddy current damping element constructed using the Halbach permanent magnet array only has a damping effect on rotational motion, but cannot isolate the low-frequency micro-vibration interference in the environment where large precision instruments and equipment are located. 3) The damping cannot be adjusted in real time according to the dynamic changes of the external excitation frequency, which limits its ability to provide the best vibration isolation effect under different working conditions.

[0007] In summary, how to develop a large-scale precision micro-vibration isolation damping control device with adaptive excitation frequency changes through structural and principle innovation, without changing its large load-bearing capacity, to produce high damping characteristics for low-frequency micro-vibration excitation, and low damping characteristics for high-frequency micro-vibration excitation, effectively eliminate or attenuate micro-vibration interference of various frequencies in the environment, and ensure the optimal working environment of precision instruments and equipment. This innovation not only marks a new leap in the technology of optimizing the working environment of precision instruments and equipment, but will also directly promote its working accuracy to a new height, meeting the urgent needs of today's and even future scientific research and industrial fields for high-precision and high-stability equipment. Summary of the invention

[0008] The core goal of this invention is to solve the adverse effects of environmental vibration interference on the research results of precision instruments and equipment. In view of the current lack of research on large-scale precision micro-vibration isolation damping control mechanisms and the inability to adapt to changes in excitation frequency, a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device is proposed. This device uses 4n (n ≥ 1, n ∈ N +) layers are arranged in an axial array, and adjacent layers are magnetized perpendicularly to form an equal-section magnetic ring. The inner and outer permanent magnet arrays are coaxially nested to form a high magnetic density excitation magnetic field. When the conductor plate moves relative to the high magnetic density excitation magnetic field, a high damping characteristic is generated. In addition, by precisely controlling the magnitude and direction of the current in the coil coaxially nested on the outside of the conductor plate, it can respond instantly to changes in the external excitation frequency and dynamically adjust the damping force to ensure high damping characteristics during low-frequency micro-vibration excitation and low damping characteristics during high-frequency micro-vibration excitation, thereby providing the best vibration isolation effect under different working conditions. This active and passive composite damping control strategy not only enhances the adaptability and stability of large-scale precision micro-vibration isolation, but also significantly improves its vibration isolation performance in complex vibration environments, thereby ensuring that various types of precision instruments and equipment operate in the optimal working environment, thereby promoting further improvements in their accuracy and performance.

[0009] The technical solution of the present invention is:

[0010] The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to the changes in the excitation frequency and generate adjustable high damping characteristics in real time, thereby realizing the effective isolation of large-scale precision micro-vibration isolation above 100 tons from micro-vibration interference of different frequencies. It is characterized by comprising a load platform, a vertically magnetized space electromagnetic array and a large-scale air-floating micro-vibration isolation device. The large-scale air-floating micro-vibration isolation device comprises an upper cover plate, an elastic membrane, an air tank and compressed gas. The upper cover plate is fixedly connected to the load platform and forms a closed air chamber with the elastic membrane and the air tank. Compressed gas is introduced into the inner part; the vertical magnetization space electromagnetic array includes an inner permanent magnetic array, an inner magnetic array fixing part, an inner permanent magnetic array cover plate, an outer permanent magnetic array, an outer magnetic array fixing part, a conductor plate and a coil; the inner permanent magnetic array, the conductor plate and the outer permanent magnetic array are coaxially nested and arranged in sequence with equal gaps along the radius from the axis to the outside; the inner magnetic array fixing part is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top of which maintains a certain gap with the load platform; the inner permanent magnetic array is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixing part 3, and the top of which is through The inner permanent magnetic array cover is pressed and fixed; the conductor plate is an annular cylinder with deep grooves arranged along the circumference of the outer cylindrical surface, the top of which is fixedly connected to the load platform and the bottom maintains a certain gap with the ground; the coil is coaxially tightly matched and fixedly installed in the deep groove on the outer side of the conductor plate, and the magnitude and direction of the current passing through it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixture is an annular cylinder with deep grooves arranged along the circumference on the inner side, and the outer permanent magnetic array is coaxially tightly matched and fixedly installed on the outer magnetic array fixture In the deep groove on the inner side; the inner permanent magnet array and the outer permanent magnet array are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array and the outer permanent magnet array are equal, the heights of the magnetic rings in the odd-numbered layers are equal, and the heights of the magnetic rings in the even-numbered layers are equal; the first layer of magnetic rings in the inner permanent magnet array and the outer permanent magnet array are magnetized in the same direction in the radial direction, and their bottom surfaces coincide; on the right half of the front section view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0011] Preferably, the vertical magnetization space electromagnetic array and the large air-floating isolation micro-vibrator are arranged in adjacent gaps or the vertical magnetization space electromagnetic array is coaxially nested and fixedly installed in the gas tank of the large air-floating isolation micro-vibrator.

[0012] Preferably, the number of layers of the inner permanent magnetic array and the outer permanent magnetic array satisfies 4n, where n≥1, n∈N + .

[0013] Preferably, the conductor plate is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, aluminum, iron, and nickel.

[0014] Preferably, the deep grooves of the outer cylindrical array of the conductor plate are rectangular, triangular or arc-shaped.

[0015] Preferably, the large air-floating micro-vibrator is sealed by a steel ring, an O-ring, a diaphragm or a pressure self-sealing method.

[0016] Preferably, the pressure of the compressed gas is 0.1 MPa to 0.8 MPa.

[0017] Preferably, the radially magnetized magnetic rings in the inner permanent magnet array and the outer permanent magnet array are spliced ​​by multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0018] Preferably, the inner magnetic array fixing member and the outer magnetic array fixing member are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0019] The technical innovation and good effects of the present invention are:

[0020] (1) The present invention innovatively proposes a vertical magnetization space electromagnetic array technology with adjustable high damping characteristics. Multiple layers of equal-section magnetic rings arranged in an axial array and magnetized vertically between adjacent layers are coaxially nested to form inner and outer permanent magnet arrays, thereby forming a high magnetic density excitation magnetic field around the conductor plate, achieving high damping characteristics; and dynamically adjusting the damping force by precisely controlling the magnitude and direction of the current in the coil coaxially nested on the outside of the conductor plate to achieve efficient attenuation of vibration interference; not only the magnetic field utilization rate is improved, but also adjustable damping characteristics are achieved. This is one of the innovative points that distinguish the present invention from the prior art.

[0021] (2) The present invention can ensure that large-scale precision micro-vibration isolation can provide the best vibration isolation effect under different working conditions. When the vertically magnetized space electromagnetic array and the large air-floating micro-vibration isolation are connected in parallel to support the load platform, the frequency changes of external micro-vibration interference are sensed in real time to adjust the magnitude and direction of the current in the coil coaxially nested on the outer side of the conductor plate. This can achieve dynamic regulation of vibration isolation damping without changing the large load of the isolator, ensuring high damping characteristics when low-frequency micro-vibration is excited and low damping characteristics when high-frequency micro-vibration is excited. It can not only enhance the stability of large-scale precision micro-vibration isolation systems, but also enable them to maintain high-performance vibration isolation effects in complex and changeable vibration environments, providing a "super-quiet" working environment for cutting-edge instruments and equipment, thereby effectively promoting a leap-forward improvement in the accuracy of precision instruments and equipment. This is the second innovation that distinguishes the present invention from the prior art.

[0022] (3) The present invention has a fast response speed and high stability, and avoids the nonlinearity caused by friction. The vertically magnetized space electromagnetic array uses the principle of electromagnetic induction to produce an eddy current damping effect. It not only has an instant and sensitive response speed, but also has high stability. Its damping force is almost unaffected by the external environment (such as temperature fluctuations and humidity changes). In addition, the non-contact magnetic levitation design has no mechanical friction, avoiding the nonlinearity caused by friction, which not only extends the service life, but also reduces the subsequent maintenance costs and improves the economy of the device. This is the third innovation that distinguishes the present invention from the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional view of an electromagnetic array in perpendicularly magnetized space;

[0024] Figure 2 A large front cross-sectional view of a vertically magnetized space electromagnetic array;

[0025] Figure 3 and Figure 4 They are respectively a three-dimensional diagram and a front cross-sectional view of Example 1 of a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device;

[0026] Figure 5 and Figure 6 They are respectively a three-dimensional diagram and a front cross-sectional view of Example 2 of a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device;

[0027] Figure 7 to Figure 13 Schematic diagram of the relative position and magnetization direction of the inner permanent magnet array and the outer permanent magnet array when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are spliced ​​together to form a radially magnetized magnetic ring.

[0028] Explanation of the part numbers in the figure: 1 ground, 2 inner permanent magnetic array, 3 inner magnetic array fixing part, 4 outer permanent magnetic array, 5 outer magnetic array fixing part, 6 conductor plate, 7 compressed gas, 8 load platform, 9 vertical magnetization space electromagnetic array, 10 large air-floating micro-vibrator, 11 upper cover plate, 12 elastic membrane, 13 gas tank, 14 inner permanent magnetic array cover plate, 15 coil. DETAILED DESCRIPTION

[0029] The specific implementation modes of the present invention are described in detail below with reference to the accompanying drawings.

[0030] The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to the change of the excitation frequency and generate adjustable high damping characteristics in real time, thereby realizing the effective isolation of large-scale precision micro-vibration isolation above 100 tons from micro-vibration interference of different frequencies. It is characterized by comprising a load platform 8, a vertically magnetized space electromagnetic array 9 and a large-scale air-floating micro-vibrator 10. The large-scale air-floating micro-vibrator 10 comprises an upper cover plate 11, an elastic membrane 12, an air tank 13 and compressed gas 7. The upper cover plate 11 is fixedly connected to the load platform 8, and forms a closed air chamber with the elastic membrane 12 and the air tank 13 , compressed gas 7 is introduced into the closed air chamber; the vertical magnetization space electromagnetic array 9 includes an inner permanent magnetic array 2, an inner magnetic array fixing part 3, an inner permanent magnetic array cover 14, an outer permanent magnetic array 4, an outer magnetic array fixing part 5, a conductor plate 6 and a coil 15, the inner permanent magnetic array 2, the conductor plate 6 and the outer permanent magnetic array 4 are coaxially nested, and are arranged in sequence with equal gaps along the radius from the axis to the outside; the inner magnetic array fixing part 3 is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top of which maintains a certain gap with the load platform 8; the inner permanent magnetic array 2 is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixing part 3 The conductor plate 6 is an annular cylinder with deep grooves arranged along the circumference of the outer cylindrical surface, the top of which is fixedly connected to the load platform 8, and the bottom maintains a certain gap with the ground 1; the coil 15 is coaxially tightly matched and fixedly installed in the deep groove on the outer side of the conductor plate 6, and the magnitude and direction of the current passing through it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixing member 5 is an annular cylinder with deep grooves arranged along the circumference on the inner side, and the outer permanent magnetic array 4 is coaxially tightly matched and fixedly installed on the outer magnetic In the deep groove on the inner side of the array fixing part 5; the inner permanent magnet array 2 and the outer permanent magnet array 4 are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized vertically between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array 2 and the outer permanent magnet array 4 are equal, the heights of the magnetic rings in the odd-numbered layers are equal, and the heights of the magnetic rings in the even-numbered layers are equal; the first layer of magnetic rings in the inner permanent magnet array 2 and the outer permanent magnet array 4 are magnetized in the same direction in the radial direction, and their bottom surfaces coincide; on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0031] As a specific implementation, the vertical magnetization space electromagnetic array 9 and the large air-floating isolation micro-vibrator 10 are arranged in adjacent gaps or the vertical magnetization space electromagnetic array 9 is coaxially nested and fixedly installed in the gas tank 13 of the large air-floating isolation micro-vibrator 10 .

[0032] As a specific implementation, the number of layers of the inner permanent magnetic array 2 and the outer permanent magnetic array 4 satisfies 4n, where n≥1, n∈N + .

[0033] As a specific implementation, the conductor plate 6 is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, aluminum, iron, and nickel.

[0034] As a specific implementation, the deep grooves of the cylindrical array outside the conductor plate 6 are rectangular, triangular or arc-shaped.

[0035] As a specific implementation, the large air-floating micro-vibrator 10 adopts a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing method.

[0036] As a specific implementation, the pressure of the compressed gas 7 is 0.1 MPa to 0.8 MPa.

[0037] As a specific implementation method, the radially magnetized magnetic rings in the inner permanent magnet array 2 and the outer permanent magnet array 4 are spliced ​​by multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0038] As a specific implementation, the inner magnetic array fixing member 3 and the outer magnetic array fixing member 5 are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0039] Combine the following Figure 1 to Figure 4 An embodiment of the present invention is given.

[0040] The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device is composed of a load platform 8, a vertical magnetization space electromagnetic array 9 and a large air-floating micro-vibrator 10. The vertical magnetization space electromagnetic array 9 and the large air-floating micro-vibrator 10 are arranged in adjacent gaps and support the load platform 8 in parallel. The large air-floating micro-vibrator 10 is the core equipment of the ultra-precision air-floating micro-vibrator isolation technology. It is a non-metallic spring that fills compressed gas 7 in the elastic membrane 12 and uses the compressibility of the gas to achieve elastic support. Structurally, the large air-floating micro-vibrator 10 is composed of an upper cover plate 11, an elastic membrane 12, a gas tank 13 and compressed gas 7. The upper cover plate 11 is fixedly connected to the load platform 8, and forms a closed air chamber with the elastic membrane 12 and the gas tank 13 through a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing method. The closed air chamber is filled with 0.1MPa to 0.8MPa compressed gas 7. When external micro-vibration interference acts on the large air-floating micro-vibration isolation device 10, the compressed gas 7 in the closed air chamber will be compressed and expanded accordingly according to the frequency and amplitude of the micro-vibration, thereby effectively absorbing and dissipating the vibration energy and achieving the vibration isolation effect. At the same time, by adjusting the pressure of the compressed gas 7 in the closed air chamber, stable support for vibration isolation equipment of different masses and high-performance vibration isolation effects in the medium and high frequency bands can be achieved.

[0041] The vertical magnetization space electromagnetic array 9 includes an inner permanent magnetic array 2, an inner magnetic array fixture 3, an inner permanent magnetic array cover 14, an outer permanent magnetic array 4, an outer magnetic array fixture 5, a conductor plate 6 and a coil 15. The inner permanent magnetic array 2, the conductor plate 6 and the outer permanent magnetic array 4 are coaxially nested and arranged in sequence with equal gaps from the axis along the radius outward. The inner magnetic array fixture 3, the inner permanent magnetic array cover 14 and the outer magnetic array fixture 5 are all non-magnetic or weakly magnetic aluminum alloy and titanium alloy materials. The inner magnetic array fixture 3 is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed, and the top maintains a gap of 30mm to 100mm with the load platform 8; the inner permanent magnetic array 22 is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixture 33, and its top is pressed and fixed by the inner permanent magnetic array cover 14. The conductor plate 6 is an annular cylinder made of a metal material with high electrical conductivity and high magnetic permeability such as copper, aluminum, iron, nickel, etc., and a deep groove is arranged along the circumference of the outer cylindrical surface; the material with high conductivity can reduce the resistance loss caused by eddy current and improve the eddy current strength. The top of the conductor plate 6 is fixedly connected to the load platform 8, and the bottom is kept at a gap of 30mm to 100mm with the ground 1; the coil 15 is wound by a circle of copper wire, and the diameter of the copper wire is not less than 0.25mm and not more than 2mm. Insulation treatment is performed between each layer or each section of the copper wire using insulating paint, insulating paper or insulating sleeve and other materials to prevent short circuit. The height of the coil 15 is equal to that of the inner permanent magnetic array 2 and the outer permanent magnetic array 4, and the current is not more than 10A. The heat dissipation efficiency can be improved by increasing the heat dissipation area of ​​the coil 15 surface (such as using a heat sink or increasing air circulation), and liquid cooling or phase change cooling and other efficient cooling methods can also be used to quickly and effectively dissipate the heat generated by the coil 15 when it is working to prevent the coil 15 from overheating. The coil 15 is coaxially and tightly fitted and fixedly installed in the deep groove on the outer side of the conductor plate 6. The magnitude and direction of the current carried by it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference, ensuring high damping characteristics during low-frequency micro-vibration excitation and low damping characteristics during high-frequency micro-vibration excitation; the external magnetic array fixing part is an annular cylinder with deep grooves arranged along the circumference on the inner side, and the external permanent magnetic array 4 is coaxially and tightly fitted and fixedly installed in the deep groove on the inner side of the external magnetic array fixing part.

[0042] The inner permanent magnet array 2 and the outer permanent magnet array 4 are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the magnetic rings in the same layer of the inner permanent magnet array 2 and the outer permanent magnet array 4 are equal. The magnetic rings are all N44H brand Ru-Fe-B permanent magnets, with a remanence of 13.54 kGs, an intrinsic coercive force of 12.66 kOe, and a relative magnetic permeability μ r=1.23. The inner radius and outer radius of the inner permanent magnet array 2 are 13mm and 64mm respectively, the height of the inner magnetic ring of the odd-numbered layers is 20mm, and the height of the inner magnetic ring of the even-numbered layers is 34mm. The inner radius and outer radius of the outer permanent magnet array 4 are 70mm and 100mm respectively, the height of the outer magnetic ring of the odd-numbered layers is 20mm, and the height of the outer magnetic ring of the even-numbered layers is 34mm. The first layer of inner and outer magnetic rings are magnetized along the radius toward the axis, and their bottom surfaces coincide; on the right half of the front section view, with each additional layer of magnetic rings, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise. The radially magnetized magnetic rings in the inner permanent magnet array 2 and the outer permanent magnet array 4 are both composed of 8 42° tile-shaped magnets spliced ​​together, and the gap between adjacent tile-shaped magnets is 3°. When the heights of the magnetic rings in the same layer in the inner permanent magnetic array 2 and the outer permanent magnetic array 4 are equal, the damping value generated by the vertical magnetization space electromagnetic array 9 is the largest.

[0043] The large-scale air-floating micro-vibration isolation device 10 stably supports the load platform 8 of hundreds of tons and above in an air-floating manner, and effectively isolates the vibration in the medium and high frequency bands, providing a solid support foundation for precision equipment. When the load platform 8 vibrates up and down due to vibration interference, it will drive the conductor plate 6 to produce relative movement relative to the excitation magnetic field of the inner permanent magnetic array 2 and the outer permanent magnetic array 4. In this process, the conductor plate 6 cuts the magnetic flux lines, causing its internal magnetic flux to change, thereby exciting a circular eddy current on the surface of the conductor. These eddy currents then apply a damping force to the conductor plate 6 that is opposite to its direction of movement and proportional to its movement speed. When the frequency of external micro-vibration interference changes, the controller adopts a speed feedback control algorithm, and by precisely regulating the size and direction of the current in the coil 15 coaxially nested on the outside of the conductor plate 6, it can respond to the change of the external excitation frequency in real time, dynamically adjust the damping force, and ensure that it presents high damping characteristics when low-frequency micro-vibration is excited, and low damping characteristics when high-frequency micro-vibration is excited, thereby providing the best vibration isolation effect under different working conditions. From the perspective of energy conversion, eddy currents generate a damping force in the magnetic field that is proportional to the speed, and this damping force effectively converts the kinetic energy of the load platform 8 into electrical energy inside the conductor plate 6. Subsequently, the electrical energy is dissipated in the form of heat energy, achieving the effect of energy consumption and vibration reduction.

[0044] The vertical magnetized space electromagnetic array 9 uses magnetic levitation to produce high damping characteristics, and dynamically adjusts the damping size by precisely controlling the changes in the electromagnetic field, effectively attenuating micro-vibrations of different frequencies. Its rapid response capability and high-precision control characteristics can still remain stable in the face of complex and changeable vibration environments; as a non-contact high-stability adjustable damping structure, it is characterized by no mechanical friction, thereby avoiding the nonlinear problem caused by friction, and also preventing the introduction of additional stiffness, without affecting the stiffness characteristics of the vibration isolation system, and fully ensuring the vibration isolation bandwidth. In addition, the structure exhibits excellent dynamic performance in the low-speed area, and the damping characteristics have high linearity, which is particularly effective for micro-vibration isolation. The vertical magnetized space electromagnetic array 9 and the large air-floating micro-vibrator 10 are used in parallel to support the load platform 8, which can improve the vibration isolation performance without affecting the load-bearing quality, and provide an "ultra-quiet" working environment for cutting-edge instruments and equipment such as ultra-precision lithography machines, high-resolution satellite cameras, and ultra-precision machine tools.

[0045] Figure 5 and Figure 6 They are respectively a three-dimensional diagram and a front cross-sectional view of the second embodiment of a large-scale precision micro-vibration isolation adaptive active and passive composite space electromagnetic array damping control device. Among them, the vertical magnetization space electromagnetic array 9 is coaxially nested and fixedly installed in the gas tank 13, and supports the load platform 8 in parallel with the large air-floating micro-vibrator 10. The top of the conductor plate 6 is fixedly connected to the bottom of the upper cover plate 11, and its bottom is kept at a gap of 30mm to 100mm with the upper surface of the lower bottom plate of the gas tank 13; the inner permanent magnetic array 22 is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixing part 33, and its top is pressed and fixed by the inner permanent magnetic array cover plate 14; the outer permanent magnetic array 4 is coaxially tightly matched and fixedly installed in the deep groove on the inner side of the outer magnetic array fixing part; the bottoms of the inner magnetic array fixing part 3 and the outer magnetic array fixing part 5 are fixedly installed in the gas tank 13 of the large air-floating micro-vibrator 10, and are fixedly connected to the upper surface of the lower bottom plate of the gas tank 13, and its top is kept at a gap of 30mm to 100mm with the bottom of the upper cover plate 11.

[0046] The radial magnetization process of the magnetic ring is complicated and the magnetization effect cannot be guaranteed. Therefore, multiple tile-shaped magnets that are uniformly magnetized radially are often spliced ​​together. Figure 7 to Figure 13 Schematic diagram of the relative position and magnetization direction of the inner permanent magnet array 2 and the outer permanent magnet array 4 when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are respectively spliced ​​to form a radial magnetized magnetic ring. The gap between adjacent tile-shaped magnets is usually no more than 3° to ensure the continuity and uniformity of the magnetic field.

Claims

1. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to the changes in the excitation frequency and produce adjustable high damping characteristics in real time, thereby achieving effective isolation of micro-vibration interference of different frequencies by large-scale precision micro-vibration isolation above 100 tons; it is characterized by The invention comprises a load platform (8), a vertical magnetization space electromagnetic array (9) and a large air-floating micro-vibrator (10). The large air-floating micro-vibrator (10) comprises an upper cover plate (11), an elastic membrane (12), a gas tank (13) and compressed gas (7). The upper cover plate (11) is fixedly connected to the load platform (8) and forms a closed air chamber with the elastic membrane (12) and the gas tank (13). The compressed gas (7) is introduced into the closed air chamber. The vertical magnetization space electromagnetic array (9) comprises an inner permanent magnetic array (2), an inner magnetic array fixing member (3), an inner permanent magnetic array cover plate (14) and a plurality of inner permanent magnetic array fixing members (4). ), an outer permanent magnetic array (4), an outer magnetic array fixing part (5), a conductor plate (6) and a coil (15); the inner permanent magnetic array (2), the conductor plate (6) and the outer permanent magnetic array (4) are coaxially nested and arranged in sequence with equal gaps along the radius from the axis to the outside; the inner magnetic array fixing part (3) is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top of which maintains a certain gap with the load platform (8); the inner permanent magnetic array (2) is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixing part (3), and the top of which is pressed and fixed by the inner permanent magnetic array cover plate (14); the conductor plate (6 ) is an annular cylinder with deep grooves arranged along the circumference of the outer cylindrical surface, the top of which is fixedly connected to the load platform (8) and the bottom of which is kept at a certain gap with the ground (1); the coil (15) is coaxially tightly matched and fixedly installed in the deep groove on the outer side of the conductor plate (6), and the magnitude and direction of the current passing through it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the external magnetic array fixing member (5) is an annular cylinder with deep grooves arranged along the circumference of the inner side, and the external permanent magnetic array (4) is coaxially tightly matched and fixedly installed in the deep groove inside the external magnetic array fixing member (5). The inner permanent magnet array (2) and the outer permanent magnet array (4) are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array (2) and the outer permanent magnet array (4) are equal, the heights of the magnetic rings in odd-numbered layers are equal, and the heights of the magnetic rings in even-numbered layers are equal; the first layer of magnetic rings in the inner permanent magnet array (2) and the outer permanent magnet array (4) are magnetized in the same direction in the radial direction, and their bottom surfaces overlap; on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

2. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The vertical magnetization space electromagnetic array (9) and the large air-floating isolation micro-vibrator (10) are arranged in adjacent gaps or the vertical magnetization space electromagnetic array (9) is coaxially nested and fixedly installed in the gas tank (13) of the large air-floating isolation micro-vibrator (10).

3. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The number of layers of the inner permanent magnetic array (2) and the outer permanent magnetic array (4) satisfies 4n, where n≥1, n∈N + .

4. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The conductor plate (6) is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, aluminum, iron, and nickel.

5. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claims 1 and 4 is characterized in that: The deep grooves of the outer cylindrical array of the conductor plate (6) are rectangular, triangular or arc-shaped.

6. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claims 1 and 2 is characterized by: The large air-floating micro-vibrator (10) adopts a steel ring seal, an O-type seal, a diaphragm seal or a pressure self-sealing method.

7. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The pressure of the compressed gas (7) is 0.1 MPa to 0.8 MPa.

8. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claims 1 and 3 is characterized by: The radially magnetized magnetic rings in the inner permanent magnet array (2) and the outer permanent magnet array (4) are formed by splicing a plurality of tile-shaped magnets uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 or 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

9. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The inner magnetic array fixing member (3) and the outer magnetic array fixing member (5) are made of non-magnetic or weakly magnetic conductive metal conductive materials such as aluminum alloy and titanium alloy.

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