Parallel decoupling precision yaw motion platform

Abstract

The present invention discloses a parallel decoupling precision yaw motion platform, comprising a base, a yaw table group, a deformable connector, a deformable group, and a drive assembly. The yaw table group comprises an upper yaw table and a lower yaw table arranged in a stacked and spaced manner. The upper yaw table comprises a first upper yaw arm and a second upper yaw arm connected perpendicularly to each other. The lower yaw table comprises a first lower yaw arm and a second lower yaw arm connected perpendicularly to each other. The lower yaw table is fixedly connected to the base. The upper yaw table is used to carry objects to be loaded. The deformable connector is provided at the geometric center of the yaw table group. The deformable connector connects the upper yaw table and the lower yaw table. The first drive member is used to drive the first upper arm to deflect, and the second drive member is used to drive the second upper arm to deflect. The parallel decoupling precision yaw motion platform has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves motion range.

Description

Technical Field

[0001] The present invention relates to the technical field of precision motion positioning, and in particular to a parallel decoupling precision yaw motion platform. Background Art

[0002] The two-axis yaw precision positioning motion platform is an important equipment in many high-tech fields. For example, it can be used in optical engineering, semiconductor manufacturing, astronomical observation, biological operations, etc., and is the core actuation carrier for achieving related goals.

[0003] In existing technology, two-axis rotary precision motion platforms are primarily implemented using a tandem approach: a single-axis oscillating platform stacked orthogonally on another single-axis oscillating platform. This approach is simple and easy to implement, but suffers from drawbacks such as accumulated motion errors, bulky structure, poor dynamic response, and weak rigidity. Furthermore, two-axis parallel yaw motion platforms based on the principle of flexible mechanisms often fail to achieve kinematic decoupling, meaning multiple inputs correspond to multiple outputs. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a parallel decoupled precision yaw motion platform that has high rigidity and low control complexity while ensuring high motion accuracy and increasing motion range.

[0005] The embodiment of the present application provides a parallel decoupling precision yaw motion platform, including a base, a yaw table group, a deformable connecting member, a deformable group and a driving component, the yaw table group includes an upper yaw table and a lower yaw table arranged in a stacked and spaced manner, the upper yaw table includes a first upper yaw arm and a second upper yaw arm connected vertically to each other, the lower yaw table includes a first lower yaw arm and a second lower yaw arm connected vertically to each other, the lower yaw table is fixedly connected to the base, the upper yaw table is used to carry the object to be loaded, the deformable connecting member is located at the geometric center of the yaw table group, and the deformable The group includes a first deformable member, a second deformable member, a third deformable member and a fourth deformable member, the first deformable member is connected to the first upper deflection arm and the deformable connecting member, the second deformable member is connected to the second upper deflection arm and the deformable connecting member, the third deformable member is connected to the first lower deflection arm and the deformable connecting member, the fourth deformable member is connected to the second lower deflection arm and the deformable connecting member, the driving assembly includes a first driving member and a second driving member, the first driving member is used to drive the first upper deflection arm to deflect, and the second driving member is used to drive the second upper deflection arm to deflect.

[0006] According to the parallel decoupling precision deflection motion platform of the embodiment of the present application, an upper deflection table and a lower deflection table connected by a deformable connecting member are provided, and a first deformable member for connecting the first upper deflection arm and the deformable connecting member respectively, a second deformable member for connecting the second upper deflection arm and the deformable connecting member, a third deformable member for connecting the first lower deflection arm and the deformable connecting member, and a fourth deformable member for connecting the second lower deflection arm and the deformable connecting member, and the first upper deflection arm is driven to deflect by the first driving member, and the second driving member is driven to deflect the second upper deflection arm, so that the upper deflection table can rotate with the second upper deflection arm as the axis, can also rotate with the first upper deflection arm as the axis, and can also rotate with the first upper deflection arm and the second upper deflection arm as the axis at the same time, thereby realizing two-axis parallel connection and, at the same time, realizing single-input and single-output decoupling motion. The parallel decoupling precision deflection motion platform has high rigidity and low control complexity, and at the same time, ensures high motion accuracy and improves motion stroke.

[0007] In a possible implementation of the present application, the deformable connecting member includes two oppositely arranged first split members and two oppositely arranged second split members, the projections of the two first split members on the base are located within the projection of the first upper deflection arm on the base, and the projections of the two second split members on the base are located within the projection of the second upper deflection arm on the base; the first split member connects the first deformable member and the third deformable member, and the second split member connects the second deformable member and the fourth deformable member.

[0008] In a possible implementation of the present application, the first split part includes a first split upper section and a first split lower section, the first split upper section and the first split lower section are connected by a fifth deformable part, the first deformable part connects the first upper deflection arm and the first split upper section, and the third deformable part connects the first lower deflection arm and the first split lower section; the second split part includes a second split upper section and a second split lower section, the second split upper section and the second split lower section are connected by a sixth deformable part, the second deformable part connects the second upper deflection arm and the second split upper section, and the fourth deformable part connects the second lower deflection arm and the second split lower section.

[0009] In a possible implementation of the present application, the first deformable member, the second deformable member, the third deformable member, and the fourth deformable member are all sheet-shaped, and are arranged in plurality at intervals.

[0010] In a possible implementation of the present application, the tilting platform assembly, the deformable connecting member, and the deformable group are an integrally formed structure.

[0011] In a possible implementation of the present application, the drive assembly also includes a first drive base and a second drive base; the first drive base is connected to one end of the first upper deflection arm, and the first drive member is installed on the first drive base. When the first drive member drives the first upper deflection arm to deflect, the output end of the first drive member abuts against the base; the second drive base is connected to one end of the second upper deflection arm, and the second drive member is installed on the second drive base. When the second drive member drives the second upper deflection arm to deflect, the output end of the second drive member abuts against the base.

[0012] In a possible implementation of the present application, the drive assembly also includes a first elastic member and a second elastic member; the first elastic member is connected to the other end of the first upper deflection arm, and when the first upper deflection arm is deflected, the first elastic member has a preload force; the second elastic member is connected to the other end of the second upper deflection arm, and when the second upper deflection arm is deflected, the second elastic member has a preload force.

[0013] In a possible implementation of the present application, the drive assembly also includes a first elastic mounting seat and a second elastic mounting seat; the first elastic mounting seat includes a first seat and a second seat, the first seat is connected to the other end of the first upper deflection arm, one end of the first elastic member is connected to the first mounting portion of the first seat, the second seat is connected to the base, the other end of the first elastic member is connected to the second mounting portion of the second seat, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; the second elastic mounting seat includes a third seat and a fourth seat, the third seat is connected to the other end of the second upper deflection arm, one end of the second elastic member is connected to the third mounting portion of the third seat, the fourth seat is connected to the base, the other end of the second elastic member is connected to the fourth mounting portion of the fourth seat, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

[0014] In a possible implementation of the present application, the tilting and deflecting table assembly further includes a loading platform, which is connected to the upper tilting and deflecting table.

[0015] In a possible implementation of the present application, the upper yaw table and the lower yaw table have the same structure and are arranged opposite to each other; the first upper yaw arm and the second upper yaw arm are both U-shaped.

[0016] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0018] Figure 1 2 is a schematic structural diagram of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention;

[0019] Figure 2 is a structural schematic diagram of a parallel decoupling precision yaw motion platform according to another embodiment of the present invention;

[0020] Figure 3 is a perspective view of a deformable connector of a parallel decoupling precision yaw motion platform according to an embodiment of the present invention;

[0021] Figure 4 3. This is a front view of a deformable connector of a parallel decoupling precision yaw motion platform according to an embodiment of the present invention;

[0022] Figure 5 is a top view of a deformable connector of a parallel decoupling precision yaw motion platform according to an embodiment of the present invention;

[0023] Figure 6 2 is a schematic structural diagram of a first elastic member or a second elastic member of a parallel decoupling precision yaw motion platform according to an embodiment of the present invention;

[0024] Figure 7 2 is a schematic structural diagram of a first driving member or a second driving member of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention;

[0025] Figure 8 2 is a structural diagram of a parallel decoupling precision yaw motion platform according to another embodiment of the present invention;

[0026] Figure 9 3. A top view of a yaw table assembly of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention;

[0027] Figure 10 3. It is a front view of the yaw table assembly of the parallel decoupled precision yaw motion platform according to an embodiment of the present invention.

[0028] Reference numerals:

[0029] Precision yaw motion platform 100,

[0030] Base 10,

[0031] The tilting platform assembly 20, the upper tilting platform 21, the first upper tilting arm 211, the second upper tilting arm 212, the lower tilting platform 22, the first lower tilting arm 221, the second lower tilting arm 222, the loading platform 23,

[0032] Deformable connecting member 30, first split member 31, first split upper section 311, first split lower section 312, second split member 32, second split upper section 321, second split lower section 322,

[0033] The deformable group 40, the first deformable member 41, the second deformable member 42, the third deformable member 43, the fourth deformable member 44, the fifth deformable member 45, the sixth deformable member 46,

[0034] Driving assembly 50, first driving member 51, second driving member 52, first driving base 53, second driving base 54, first elastic member 55, second elastic member 56,

[0035] The first elastic mounting seat 57, the first seat 571, the second seat 572,

[0036] The second elastic mounting seat 58 , the third seat 581 , and the fourth seat 582 . DETAILED DESCRIPTION

[0037] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0039] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0040] Please refer to the following Figures 1-10 The parallel decoupled precision yaw motion platform 100 according to an embodiment of the present application is described.

[0041] Reference Figure 1 and Figure 2, a parallel decoupling precision deflection motion platform 100 provided in an embodiment of the present application includes a base 10, a deflection table group 20, a deformable connecting member 30, a deformable group 40 and a driving assembly 50, the deflection table group 20 includes an upper deflection table 21 and a lower deflection table 22 arranged in a stacked and spaced manner, the upper deflection table 21 includes a first upper deflection arm 211 and a second upper deflection arm 212 connected perpendicularly to each other, the lower deflection table 22 includes a first lower deflection arm 221 and a second lower deflection arm 222 connected perpendicularly to each other, the lower deflection table 22 is fixedly connected to the base 10, the upper deflection table 21 is used to carry the object to be loaded, the deformable connecting member 30 is arranged at the geometric center of the deflection table group 20, the deformable group 40 includes It includes a first deformable member 41, a second deformable member 42, a third deformable member 43 and a fourth deformable member 44. The first deformable member 41 is connected to the first upper deflection arm 211 and the deformable connecting member 30, the second deformable member 42 is connected to the second upper deflection arm 212 and the deformable connecting member 30, the third deformable member 43 is connected to the first lower deflection arm 221 and the deformable connecting member 30, and the fourth deformable member 44 is connected to the second lower deflection arm 222 and the deformable connecting member 30. The driving assembly 50 includes a first driving member 51 and a second driving member 52. The first driving member 51 is used to drive the first upper deflection arm 211 to deflect, and the second driving member 52 is used to drive the second upper deflection arm 212 to deflect.

[0042] Specifically, refer to Figure 1 and Figure 2 The parallel decoupling precision yaw motion platform 100 in the embodiment of the present invention includes a base 10, which is used to support the yaw table group 20, the deformable connecting member 30, the deformable group 40 and the driving component 50.

[0043] Reference Figure 1 and Figure 2The deflection table group 20 includes an upper deflection table 21 and a lower deflection table 22 that are stacked and spaced apart, that is, the upper deflection table 21 and the lower deflection table 22 are not directly connected. Exemplarily, the upper deflection table 21 and the lower deflection table 22 can be stacked and spaced apart along the thickness direction of the base 10. The upper deflection table 21 and the lower deflection table 22 can be arranged in sequence from bottom to top, or from top to bottom. The upper deflection table 21 includes a first upper deflection arm 211 and a second upper deflection arm 212 that are vertically connected to each other. Exemplarily, the first upper deflection arm 211 and the second upper deflection arm 212 can be fixedly connected by welding, threaded connection, snap connection or connecting components, or integrally formed. The lower deflection table 22 includes a first lower deflection arm 221 and a second lower deflection arm 222 that are vertically connected to each other. Exemplarily, the first lower deflection arm 221 and the second lower deflection arm 222 can be fixedly connected by welding, threaded connection, snap connection or connecting components, or integrally formed. The lower tilting platform 22 is fixedly connected to the base 10. The lower tilting platform 22 and the base 10 can be connected by welding, threading, snap connection, or connecting members. The upper tilting platform 21 is used to support the load. For example, the upper tilting platform 21 can have a load-bearing portion, which supports the load, or can be connected to other structural members to support the load.

[0044] The deformable connector 30 is located at the geometric center of the tilting platform assembly 20. Specifically, the deformable connector 30 is perpendicular to the upper tilting platform 21 and the lower tilting platform 22. Furthermore, the deformable connector 30 is located between the upper tilting platform 21 and the lower tilting platform 22. The deformable connector 30 is not directly connected to either the upper tilting platform 21 or the lower tilting platform 22. The deformable connector 30 can undergo slight deformation.

[0045] Reference Figure 1 and Figure 2 The deformable group 40 includes a first deformable member 41, a second deformable member 42, a third deformable member 43 and a fourth deformable member 44. The first deformable member 41 is connected to the first upper deflection arm 211 and the deformable connecting member 30, the second deformable member 42 is connected to the second upper deflection arm 212 and the deformable connecting member 30, the third deformable member 43 is connected to the first lower deflection arm 221 and the deformable connecting member 30, and the fourth deformable member 44 is connected to the second lower deflection arm 222 and the deformable connecting member 30. Since the lower deflection platform 22 is fixedly connected to the base 10, at least one of the first lower deflection arm 221 and the second lower deflection arm 222 is fixedly connected to the base 10. The lower deflection platform 22 provides support for the deformable connecting member 30 through the third deformable member 43 and the fourth deformable member 44. The deformable connecting member 30 provides support for the first upper deflection arm 211 and the second upper deflection arm 212 through the first deformable member 41 and the second deformable member 42.

[0046] It can be understood that the two ends of the first deformable member 41 are respectively connected to the first upper deflection arm 211 and the deformable connecting member 30, the two ends of the second deformable member 42 are respectively connected to the second upper deflection arm 212 and the deformable connecting member 30, the two ends of the third deformable member 43 are respectively connected to the first lower deflection arm 221 and the deformable connecting member 30, and the two ends of the fourth deformable member 44 are respectively connected to the second lower deflection arm 222 and the deformable connecting member 30. They can be fixedly connected, for example, by welding, threaded connection, snap connection or connection through connecting components, etc., or can be formed as one piece.

[0047] The first driving member 51 is used to drive the first upper deflection arm 211 to deflect. Specifically, the first driving member 51 is used to drive the first upper deflection arm 211 to rotate with the second upper deflection arm 212 as the axis, and the second driving member 52 is used to drive the second upper deflection arm 212 to deflect. Specifically, the second driving member 52 is used to drive the second upper deflection arm 212 to rotate with the first upper deflection arm 211 as the axis. In this way, the upper deflection platform 21 can rotate with the second upper deflection arm 212 as the axis, or can rotate with the first upper deflection arm 211 as the axis, or can rotate with the first upper deflection arm 211 and the second upper deflection arm 212 as the axis at the same time. When the upper deflection platform 21 rotates with the second upper deflection arm 212 as the axis, the deformable connecting member 30 deforms in its rotation direction and does not deform in other directions, thereby realizing two-axis parallel connection and decoupling at the same time. The parallel decoupling precision deflection motion platform 100 has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves the motion stroke.

[0048] Therefore, refer to Figure 1 and Figure 2According to the parallel decoupling precision yaw motion platform 100 of the embodiment of the present application, an upper yaw table 21 and a lower yaw table 22 connected by a deformable connecting member 30 are provided, and a first deformable member 41 for connecting the first upper yaw arm 211 and the deformable connecting member 30, a second deformable member 42 for connecting the second upper yaw arm 212 and the deformable connecting member 30, a third deformable member 43 for connecting the first lower yaw arm 221 and the deformable connecting member 30, and a fourth deformable member 44 for connecting the second lower yaw arm 222 and the deformable connecting member 30, and the first upper yaw arm 211 is driven to deflect by the first driving member 51, and the second driving member 51 is driven to deflect the second upper yaw arm 211. 52 drives the second upper deflection arm 212 to deflect, so that the upper deflection platform 21 can rotate with the second upper deflection arm 212 as the axis, and can also rotate with the first upper deflection arm 211 as the axis, and can also rotate with the first upper deflection arm 211 and the second upper deflection arm 212 as the axis at the same time. When the upper deflection platform 21 rotates with the second upper deflection arm 212 as the axis, the deformable connecting member 30 deforms in its rotation direction and does not deform in other directions, thereby realizing two-axis parallel connection and decoupling at the same time. The parallel decoupling precision deflection motion platform 100 has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves the motion range.

[0049] In some embodiments, the lengths of the first deformable member 41 , the second deformable member 42 , the third deformable member 43 and the fourth deformable member 44 can be set according to actual needs, and the deflection stroke can be increased by increasing their lengths.

[0050] In some embodiments of the present application, reference Figure 3 、 Figure 4 and Figure 5 The deformable connecting member 30 includes two oppositely arranged first split members 31 and two oppositely arranged second split members 32. The projections of the two first split members 31 on the base 10 are located within the projection of the first upper deflection arm 211 on the base 10, and the projections of the two second split members 32 on the base 10 are located within the projection of the second upper deflection arm 212 on the base 10; the first split member 31 connects the first deformable member 41 and the third deformable member 43, and the second split member 32 connects the second deformable member 42 and the fourth deformable member 44.

[0051] Specifically, the first split member 31 and the second split member 32 are evenly staggered along the circumferential direction perpendicular to the central axis of the upper and lower deflection platforms 21 and 22. The shapes of the first split member 31 and the second split member 32 can be the same or different. For example, the first split member 31 and the second split member 32 can be one or both of a cuboid, a cylinder, and a cube. The two first split members 31 are respectively located on either side of the second upper deflection arm 212, and the two second split members 32 are respectively located on either side of the first upper deflection arm 211. The first split component 31 located on the same side of the second upper deflection arm 212 and the first upper deflection arm 211 are connected by at least one first deformable component 41, the second split component 32 located on the same side of the first upper deflection arm 211 and the second upper deflection arm 212 are connected by at least one second deformable component, the first split component 31 located on the same side of the second lower deflection arm 222 and the first lower deflection arm 221 are connected by at least one third deformable component 43, and the second split component 32 located on the same side of the first lower deflection arm 221 and the second lower deflection arm 222 are connected by at least one fourth deformable component 44.

[0052] In some embodiments of the present application, reference Figure 3 、 Figure 4 and Figure 5 The first split component 31 includes a first split upper section 311 and a first split lower section 312, the first split upper section 311 and the first split lower section 312 are connected by the fifth deformable component 45, the first deformable component 41 connects the first upper deflection arm 211 and the first split upper section 311, the third deformable component 43 connects the first lower deflection arm 221 and the first split lower section 312; the second split component 32 includes a second split upper section 321 and a second split lower section 322, the second split upper section 321 and the second split lower section 322 are connected by the sixth deformable component 46, the second deformable component 42 connects the second upper deflection arm 212 and the second split upper section 321, and the fourth deformable component 44 connects the second lower deflection arm 222 and the second split lower section 322.

[0053] Connecting the first split upper section 311 and the first split lower section 312 through the fifth deformable member 45 is conducive to the deflection of the second upper deflection arm 212 around the first upper deflection arm 211; connecting the second split upper section 321 and the second split lower section 322 through the sixth deformable member 46 is conducive to the deflection of the first upper deflection arm 211 around the second upper deflection arm 212.

[0054] The first deformable member 41 connects the first upper deflection arm 211 and the first split upper section 311, the third deformable member 43 connects the first lower deflection arm 221 and the first split lower section 312, the second deformable member 42 connects the second upper deflection arm 212 and the second split upper section 321, and the fourth deformable member 44 connects the second lower deflection arm 222 and the second split lower section 322. That is, the first upper deflection arm 211 is connected to the first lower deflection arm 221 in sequence through the first deformable member 41, the first split member 31, and the third deformable member 43, and the second upper deflection arm 212 is connected to the second lower deflection arm 222 in sequence through the second deformable member 42, the second split member 32, and the fourth deformable member 44. In this way, when the first upper deflection arm 211 and the second upper deflection arm 212 are deflected under the drive of the drive assembly 50, the number of structures that can be deformed and the deformation displacement that can be generated are increased, thereby increasing the movement range.

[0055] In some embodiments of the present application, reference Figure 3 、 Figure 4 and Figure 5 The first deformable member 41 , the second deformable member 42 , the third deformable member 43 and the fourth deformable member 44 are all sheet-shaped and are arranged in a plurality at intervals.

[0056] By setting the first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 to be sheet-shaped, deformation is facilitated. Specifically, the first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 can be metal sheets, for example, stainless steel sheets, etc. The first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 are all arranged in a plurality at intervals, thereby improving the reliability of the connection between the upper deflection table 21 and the lower deflection table 22, as well as the rigidity of the entire structure. Preferably, the plurality of first deformable members 41, the plurality of second deformable members, the plurality of third deformable members 43 and the plurality of fourth deformable members 44 are evenly distributed.

[0057] In some embodiments of the present application, the tilt table assembly 20, deformable connector 30, and deformable group 40 are integrally molded. Specifically, the tilt table assembly 20, deformable connector 30, and deformable group 40 are integrally formed using a wire cutting process, with threading holes designed into the structure to facilitate wire cutting. This integrally molded structure avoids problems such as mismatched deflection centers, installation gaps, and vibration that can arise from multi-unit assembly.

[0058] In some embodiments of the present application, reference Figure 7The driving assembly 50 also includes a first driving base 53 and a second driving base 54; the first driving base 53 is connected to one end of the first upper deflection arm 211, and the first driving member 51 is installed on the first driving base 53. When the first driving member 51 drives the first upper deflection arm 211 to deflect, the output end of the first driving member 51 abuts against the base 10; the second driving base 54 is connected to one end of the second upper deflection arm 212, and the second driving member 52 is installed on the second driving base 54. When the second driving member 52 drives the second upper deflection arm 212 to deflect, the output end of the second driving member 52 abuts against the base 10.

[0059] By providing the first driving base 53 and the second driving base 54, it is convenient to install the first driving member 51 and the second driving member 52 on the first upper deflection arm 211 and the second upper deflection arm 212 respectively. The output end of the first driving member 51 and the output end of the second driving member 52 are both in contact with the base 10. In this way, when the output end of the first driving member 51 and the output end of the second driving member 52 are extended, the first upper deflection arm 211 and the second upper deflection arm 212 can be pushed to deflect.

[0060] Specifically, the first drive member 51 and the first drive base 53, and the first drive base 53 and the first upper yaw arm 211, can be detachably connected, for example, by threaded connections, snap connections, or connections via connecting members, to facilitate installation and replacement. Alternatively, they can be fixedly connected, for example, by welding or integral molding. The first drive base 53 can be L-shaped. The first drive member 51 can be a linear motor.

[0061] The connection relationship between the second driving member 52 and the second driving base 54 , and between the second driving base 54 and the second upper yaw arm 212 is the same as above and will not be repeated here.

[0062] In some embodiments of the present application, reference Figure 6 The driving assembly 50 also includes a first elastic member 55 and a second elastic member 56; the first elastic member 55 is connected to the other end of the first upper deflection arm 211, and when the first upper deflection arm 211 is deflected, the first elastic member 55 has a preload force; the second elastic member 56 is connected to the other end of the second upper deflection arm 212, and when the second upper deflection arm 212 is deflected, the second elastic member 56 has a preload force.

[0063] Specifically, because the output end of the first driving member 51 only abuts the base 10 and is not connected thereto, it can only drive the first upper yaw arm 211 to deflect, but cannot reset. Therefore, a first elastic member 55 is provided, connected to the other end of the first upper yaw arm 211, and the first elastic member 55 exerts a preload force when the first upper yaw arm 211 deflects. Thus, when the driving force is removed, the first elastic member 55, under the action of the preload force, can reset the first upper yaw arm 211, thereby achieving forward and reverse deflection of the first upper yaw arm 211.

[0064] It should be noted that when the first upper deflection arm 211 is deflected by the first driver 51, the first elastic member 55 can be in an extended or compressed state, which is not limited herein and can be configured according to actual needs. The first elastic member 55 can be a spring, etc. The first driver 51 can be a piezoelectric actuator or piezoelectric ceramic, etc.

[0065] The functions and configurations of the second elastic member 56 and the second driving member 52 are the same as those of the first elastic member 55 and the first driving member 51 , and are not described in detail here.

[0066] In some embodiments of the present application, reference Figure 6 The driving assembly 50 also includes a first elastic mounting seat 57 and a second elastic mounting seat 58; the first elastic mounting seat 57 includes a first seat 571 and a second seat 572, the first seat 571 is connected to the other end of the first upper deflection arm 211, one end of the first elastic member 55 is connected to the first mounting portion of the first seat 571, the second seat 572 is connected to the base 10, the other end of the first elastic member 55 is connected to the second mounting portion of the second seat 572, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; the second elastic mounting seat 58 includes a third seat 581 and a fourth seat 582, the third seat 581 is connected to the other end of the second upper deflection arm 212, one end of the second elastic member 56 is connected to the third mounting portion of the third seat 581, the fourth seat 582 is connected to the base 10, the other end of the second elastic member 56 is connected to the fourth mounting portion of the fourth seat 582, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

[0067] The first elastic mounting seat 57 facilitates mounting the first elastic member 55 on the first upper yaw arm 211. A first seat 571 and a second seat 572 are provided, respectively connecting the first upper yaw arm 211 and the base 10, and connecting both ends of the first elastic member 55 to the first seat 571 and the second seat 572, respectively, so that the first elastic member 55 can extend or contract when the first upper yaw arm 211 deflects.

[0068] Specifically, the first seat 571 may be L-shaped, with one end abutting and connected to the first upper yaw arm 211, and the other end forming a first mounting portion for positionally engaging with one end of the first elastic member 55 to adjust the length of the first elastic member 55. The second seat 572 may be U-shaped, with an open end forming a second mounting portion. The two second mounting portions are vertically located above and below the first mounting portion, respectively. The other end of the first elastic member 55 is positionally engaged with one of the open ends of the second seat 572.

[0069] Of course, the present application is not limited thereto, and the structure of the first elastic mounting seat 57 may be other structures, as long as the first elastic member 55 can drive the first upper deflection arm 211 to deflect in the opposite direction under the action of the preload force.

[0070] The structure of the second elastic mounting seat 58 may be the same as that of the first elastic mounting seat 57 , and will not be described in detail here.

[0071] In some embodiments of the present application, reference Figure 8 The tilting platform assembly 20 further includes a loading platform 23 , which is connected to the upper tilting platform 21 .

[0072] By providing the stage 23 , larger objects can be mounted, for example, a reflective mirror, a crystal, a clamp, a template, etc. can be mounted.

[0073] Specifically, the loading platform 23 is connected to the first upper yaw arm 211 and the second upper yaw arm 212 to deflect under the drive of the first upper yaw arm 211 and the second upper yaw arm 212. The loading platform 23 and the upper yaw platform 21 can be fixedly connected or detachably connected.

[0074] In some embodiments of the present application, reference Figure 9 and Figure 10 The upper deflection platform 21 and the lower deflection platform 22 have the same structure and are arranged opposite to each other; the first upper deflection arm 211 and the second upper deflection arm 212 are both U-shaped.

[0075] The first upper yaw arm 211 and the second upper yaw arm 212 are both U-shaped, and the upper yaw platform 21 and the lower yaw platform 22 have the same structure. In this way, the motion platform is enclosed in a hollow structure with a compact internal structure and high structural stability. It is also convenient to install the drive mounting seat and the elastic mounting seat.

[0076] Throughout this specification, reference to terms such as "embodiment" or "example" indicates that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0077] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A parallel decoupling precision yaw motion platform, characterized in that: include: base; A tilting platform group, the tilting platform group includes an upper tilting platform and a lower tilting platform stacked and spaced apart, the upper tilting platform includes a first upper tilting arm and a second upper tilting arm vertically connected to each other, the lower tilting platform includes a first lower tilting arm and a second lower tilting arm vertically connected to each other, the lower tilting platform is fixedly connected to the base, and the upper tilting platform is used to carry objects to be loaded; A deformable connecting member, the deformable connecting member being arranged at the geometric center of the tilting and deflecting platform assembly; a deformable group, the deformable group comprising a first deformable member, a second deformable member, a third deformable member, and a fourth deformable member, the first deformable member connecting the first upper deflection arm and the deformable connecting member, the second deformable member connecting the second upper deflection arm and the deformable connecting member, the third deformable member connecting the first lower deflection arm and the deformable connecting member, and the fourth deformable member connecting the second lower deflection arm and the deformable connecting member; The driving assembly includes a first driving member and a second driving member, wherein the first driving member is used to drive the second upper deflection arm to deflect.

2. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The deformable connecting member includes two first split members arranged opposite to each other and two second split members arranged opposite to each other, wherein the projections of the two first split members on the base are located within the projection of the first upper deflection arm on the base, and the projections of the two second split members on the base are located within the projection of the second upper deflection arm on the base; The first split member connects the first deformable member and the third deformable member, and the second split member connects the second deformable member and the fourth deformable member.

3. The parallel decoupling precision yaw motion platform according to claim 2, characterized in that: The first split member includes a first split upper section and a first split lower section, the first split upper section and the first split lower section are connected by a fifth deformable member, the first deformable member connects the first upper deflection arm and the first split upper section, and the third deformable member connects the first lower deflection arm and the first split lower section; The second split part includes a second split upper section and a second split lower section, the second split upper section and the second split lower section are connected by a sixth deformable part, the second deformable part connects the second upper deflection arm and the second split upper section, and the fourth deformable part connects the second lower deflection arm and the second split lower section.

4. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The first deformable member, the second deformable member, the third deformable member and the fourth deformable member are all sheet-shaped and are arranged in plural at intervals.

5. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The tilting platform assembly, the deformable connecting member and the deformable group are an integrally formed structure.

6. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The drive assembly further includes a first drive base and a second drive base; The first driving base is connected to one end of the first upper deflection arm, and the first driving member is installed on the first driving base. When the first driving member drives the first upper deflection arm to deflect, the output end of the first driving member abuts against the base; The second driving base is connected to one end of the second upper deflection arm, and the second driving member is installed on the second driving base. When the second driving member drives the second upper deflection arm to deflect, the output end of the second driving member abuts against the base.

7. The parallel decoupling precision yaw motion platform according to claim 6, characterized in that: The driving assembly further includes a first elastic member and a second elastic member; The first elastic member is connected to the other end of the first upper deflection arm, and when the first upper deflection arm deflects, the first elastic member has a pre-tightening force; The second elastic member is connected to the other end of the second upper deflection arm, and when the second upper deflection arm is deflected, the second elastic member has a pre-tightening force.

8. The parallel decoupling precision yaw motion platform according to claim 7, characterized in that: The drive assembly further includes a first elastic mounting seat and a second elastic mounting seat; The first elastic mounting seat includes a first seat and a second seat, the first seat is connected to the other end of the first upper deflection arm, one end of the first elastic member is connected to the first mounting portion of the first seat, the second seat is connected to the base, and the other end of the first elastic member is connected to the second mounting portion of the second seat, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; The second elastic mounting seat includes a third seat and a fourth seat, the third seat is connected to the other end of the second upper deflection arm, one end of the second elastic member is connected to the third mounting portion of the third seat, the fourth seat is connected to the base, and the other end of the second elastic member is connected to the fourth mounting portion of the fourth seat, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

9. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The tilting platform assembly further includes a loading platform, which is connected to the upper tilting platform.

10. The parallel decoupling precision yaw motion platform according to claim 1, characterized in that: The upper tilting platform and the lower tilting platform have the same structure and are arranged opposite to each other; The first upper yaw arm and the second upper yaw arm are both U-shaped.

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