Testing device and testing method for probe card

Abstract

The invention discloses a probe card testing device and method, and relates to the technical field of probe card testing devices.The probe card testing device comprises a bottom plate, the upper surface of the bottom plate is fixedly connected with two rectangular plates, the right side face of one rectangular plate is fixedly connected with a testing device, a packaging mechanism is arranged above the bottom plate, and a replacement mechanism is arranged above the bottom plate; the packaging mechanism comprises a placing unit, the placing unit is arranged above the bottom plate, the placing unit can place the tested probe card into the box, the packaging mechanism further comprises a cover sealing unit, the cover sealing unit is arranged above the bottom plate, and the cover sealing unit is used in cooperation with the placing unit. According to the probe card testing device and the probe card testing method, the placement unit, the cover sealing unit and the replacement mechanism are arranged, so that the problem that the probe card is collided and damaged due to external reasons such as workers after the probe card is tested can be effectively avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of probe card testing devices, and in particular to a probe card testing device and a testing method. Background Art

[0002] The probe card test device is a special equipment used to test the integrity of the probe card. The probe card is a key tool used to connect the pads or bumps on the wafer to the test equipment in semiconductor testing. Therefore, the main function of the test device is to ensure that the probe card has no defects before wafer testing and can correctly contact and test semiconductor devices. This can improve the accuracy of the test and avoid test failures caused by probe card problems, thereby ensuring the quality and production efficiency of semiconductor products.

[0003] At present, when the existing probe card testing device is in use, the probe cards without quality problems need to be cut and packaged for storage. This process requires manual operation by workers, and the workers will wear anti-static clothing and anti-static gloves when working. Wearing these clothes will undoubtedly bring inconvenience to the workers and reduce their hand flexibility. Therefore, when the tested probe cards are cut, it is easy for the probe cards to be damaged by collision due to the lack of hand flexibility of the workers.

[0004] In view of the above problems, it is found that it is difficult to avoid the above problems at the same time when using the existing probe card test devices on the market, and even if they can be solved, they need to be solved through external tools, which makes it impossible to achieve the desired effect. Therefore, we propose a probe card test device and test method. Summary of the invention

[0005] The object of the present invention is to provide a testing device and a testing method for a probe card to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: a test device for a probe card, comprising a base plate, two rectangular plates are fixedly connected to the upper surface of the base plate, a test device is fixedly connected to the right side of one of the rectangular plates, a packaging mechanism is arranged above the base plate, and a replacement mechanism is arranged above the base plate; The packaging mechanism includes a placement unit, which is arranged above the bottom plate and can place the tested probe card into the box; The packaging mechanism further comprises a capping unit, which is arranged above the bottom plate and is used in conjunction with the placement unit. The capping unit can cap the box containing the probe card; The replacement mechanism is arranged above the bottom plate and is used in conjunction with the packaging mechanism. The replacement mechanism can discharge the air around the probe card and fill its vicinity with inert gas.

[0007] Preferably, the placement unit includes two first rotating shafts, the outer surfaces of the two first rotating shafts are rotatably connected to the inner walls of the two rectangular plates, the outer surface of each of the first rotating shafts is fixedly connected to a first gear shaft, the outer surfaces of the two first gear shafts are meshed with a first toothed belt, a stepper motor is arranged on the left side of the first toothed belt, the output end of the stepper motor is fixedly connected to the left end of one of the first rotating shafts, the bottom surface of the stepper motor is fixedly connected to a support block, the right side surface of the support block is fixedly connected to the left side surface of one of the rectangular plates, a fixing frame is fixedly connected to one side surface of the two rectangular plates close to each other, ten rollers are rotatably connected to the inner wall of the fixing frame, a movable plate is arranged below the fixing frame, and the movable plate Four first connecting plates are fixedly connected to the bottom surface of the movable plate, and the inner walls of every two of the first connecting plates are rotatably connected to the first rotating cylinder, and the outer surface of each of the first rotating cylinders is in contact with the upper surface of the bottom plate, and the upper surface of the movable plate is fixedly connected to two first return springs, and the top ends of the two first return springs are commonly fixedly connected to an inclined frame, and a card block is clamped inside the inclined frame, and the top end of the card block is fixedly connected to a baffle, and the back side of the baffle is fixedly connected to a flexible pad, and a placement box is arranged above the inclined frame, and the bottom surface of the placement box is in contact with the upper surface of the inclined frame, and the front side of the placement box is in contact with the back side of the flexible pad, and the left side and the inner wall of the placement box are fixedly connected to two fixed blocks, and each of the fixed blocks The outer surfaces are fixedly connected with rubber plates, the right sides of the two rubber plates are respectively in contact with the left side and inner wall of the placement box, the inner wall of the placement box is fixedly connected with a breathable ring, the inner wall of the breathable ring is fixedly connected with breathable cotton, the front of each rectangular plate is fixedly connected with a pressure plate, the two side surfaces of the inclined frame are fixedly connected with connecting blocks, the inner wall of each connecting block is rotatably connected with a roller, the outer surface of each roller is in contact with the bottom surface of the pressure plate, the outer surface of the other first rotating shaft is respectively fixedly connected with a first gear and a first transmission gear, the inner wall of one of the rectangular plates is rotatably connected with the first transmission shaft, the inner wall of the other rectangular plate is rotatably connected with the second transmission shaft, the outer surface of the first transmission shaft The outer surface and the outer surface of the second transmission shaft are jointly fixedly connected with a magnetic coupling, the outer surface of the first transmission shaft is fixedly connected with a second gear, the outer surface of the second gear and the outer surface of the first gear are jointly meshed with a first transmission toothed belt, the outer surface of the second transmission shaft is fixedly connected with a rolling gear, the back side of the movable plate is fixedly connected with a toothed plate, the teeth of the toothed plate are meshed with the outer surface of the rolling gear, the upper surface of the bottom plate is fixedly connected with a force block, the upper surface of the force block is fixedly connected with a support frame, the front side of the support frame is fixedly connected with two second return springs, and the end of each second return spring away from the support frame is jointly fixedly connected to the back side of the movable plate, and the bottom surface of the toothed plate is in contact with the upper surface of the force block.

[0008] Preferably, the upper surface of the force-bearing block is fixedly connected to a carrier plate, the inner wall of the carrier plate is rotatably connected to the outer surface of the second transmission shaft, the back side of the inclined plate is fixedly connected to two second connecting plates, the inner walls of the two second connecting plates are jointly rotatably connected to a second rotating cylinder, and the outer surface of the second rotating cylinder is in contact with the front side of the movable plate.

[0009] Preferably, a transfer box is fixedly connected to the back side of the other rectangular plate, the upper surface of the transfer box is fixedly connected to the bottom surface of the testing device, and a filter is clamped inside the transfer box.

[0010] Preferably, the inner wall of the transfer box is rotatably connected to two limit shafts, and one end of each limit shaft away from the first transmission gear is fixedly connected to a limit plate, and the front side of each limit plate is in contact with the back side of the transfer box and the back side of the filter.

[0011] Preferably, a first vacuum pump is fixedly connected to the front of the testing device, an input end of the first vacuum pump is fixedly connected to a first vacuum pipe, and an end of the first vacuum pipe away from the first transmission gear passes through the interior of the transfer box.

[0012] Preferably, the output end of the first vacuum pump is fixedly connected to a first exhaust pipe, the front side of the test device is fixedly connected to a mounting frame, and the inner wall of the mounting frame is fixedly connected to the outer surface of the first exhaust pipe.

[0013] Preferably, the capping unit comprises two long plates, the bottom surface of each of the long plates is fixedly connected to the upper surface of the bottom plate, the inner walls of the two long plates are rotatably connected to two second rotating shafts, the outer surface of each of the second rotating shafts is fixedly connected to a second gear shaft, the outer surfaces of the two second gear shafts are jointly meshed with a second toothed belt, the outer surface of one of the second rotating shafts is fixedly connected to a second transmission gear, the outer surface of the second transmission gear and the outer surface of the first transmission gear are jointly meshed with a second transmission toothed belt, the two side surfaces of the two long plates are jointly fixedly connected to a fixing frame, and the The inner wall of the fixed frame is fixedly connected to a feeding frame, and two telescopic rods are fixedly connected to the inner wall of the fixed frame, and the telescopic end of each telescopic rod is fixedly connected to a moving block, and the side surfaces of the two moving blocks close to each other are respectively fixedly connected to a first intercepting plate and a second intercepting plate, and the outer surface of the second intercepting plate is in contact with the inner wall of the feeding frame, and the upper surface of the first intercepting plate is in contact with the bottom surface of the feeding frame, and a cover plate is arranged inside the feeding frame, and the outer surface of the cover plate is in contact with the inner wall of the feeding frame, and the bottom surface of the cover plate is respectively fixedly connected to a protective pad and four circular shafts.

[0014] Preferably, the replacement mechanism includes a storage box, a left side surface of the storage box is fixedly connected to the right side surface of one of the long boards, the upper surface of the storage box is fixedly connected to an air intake pipe, the outer surface of the air intake pipe is threadedly connected to a threaded cap, the upper surface of the storage box is fixedly connected to a second air pump, the input end of the second air pump is fixedly connected to a second air exhaust pipe, the bottom end of the second air exhaust pipe passes through the interior of the storage box, the output end of the second air pump is fixedly connected to a second exhaust pipe, the upper surface of the storage box is fixedly connected to a placing table, the interior of the placing table is clamped on the outer surface of the second exhaust pipe, and the upper surfaces of the two long boards are commonly fixedly connected to a placing platform.

[0015] A method for testing a probe card test device comprises the following steps: S1: When this device is needed, first place the probe card to be tested on the surface of the first toothed belt, then control the stepper motor to run, and use the rotational power generated by the stepper motor to drive the first toothed belt to rotate. When the first toothed belt passes under the test device, the test device can be used to test the probe card. During the test, the test device will record the test results of each probe and diagnose abnormal conditions. If an open circuit, short circuit or other defects are found, the test device will mark the corresponding probe, thereby completing the purpose of the test. When the test is completed, the probe card continues to move along with the first toothed belt. When the probe card moves to the end of the first toothed belt, the probe card will be pushed onto the surface of the fixed frame, and there are ten rollers rotating on the inner wall of the fixed frame. Under the action of the rollers and the gravitational potential energy, the probe card will move to the back of the flexible pad, and the meshing relationship between the rolling gear and the tooth plate can push the moving plate and the inclined frame to move until the probe card falls into the inside of the placement box; S2: Control the operation of the stepper motor, and the operation of the stepper motor generates power again. The second rotating shaft is driven by the common transmission of the second transmission gear, the first transmission gear and the second transmission toothed belt, thereby driving the second toothed belt to move. When the placement box moves to the bottom of the unloading frame, the telescopic rod is controlled to extend. The extension of the telescopic rod will drive the first interception plate and the second interception plate to move horizontally. At this time, the first interception plate will extend into the interior of the unloading frame, and the second interception plate will go deep into the interior of the unloading frame. Therefore, the second interception plate can prevent the upper cover plate from falling downwards. When the first interception plate is fully extended, the lowest cover plate will fall into the interior of the placement box, thereby achieving the purpose of automatically covering the placement box. S3: As the second toothed belt moves, the covered placement box will move to the left side of the second exhaust pipe, and then the second exhaust pipe will be manually guided to the opening on the right side of the placement box, and the second vacuum pump will be controlled to operate. Under the joint action of the second vacuum pump and the second vacuum pipe, the inert gas inside the storage box can be extracted until it is sucked into the placement box. When the gas enters the placement box, the gas will blow the rubber plate inside the placement box to move to the left side of the placement box, but under the action of the fixed block, the rubber plate will not completely detach from one side of the placement box, but will allow the inert gas to enter the interior of the placement box while the rubber plate on one side is swinging.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides a placement unit, which can be used to place the tested probe card inside the placement box, thereby avoiding the problem that when workers come into direct contact with the probe card, the workers' hands are not flexible enough when wearing gloves, and the probe card is easily damaged by collision.

[0017] The present invention provides a capping unit, which can be used to cap the probe card that has been placed in the placement box to prevent external pressure from acting on the probe card. The capping unit is used in conjunction with the placement unit to ensure that when the tested probe card is packaged, the staff's hands will not directly contact the probe card, thereby reducing the problem of collision damage to the probe card due to the staff's low hand flexibility.

[0018] The present invention provides a replacement mechanism, which can be used to fill inert gas around the packaged probe card. By providing a placement unit, a capping unit and a replacement mechanism, the problem of the probe card being damaged by collision due to external reasons such as staff after the test is completed can be effectively avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2 It is a schematic diagram of the rear view structure of the first rotating shaft of the present invention.

[0021] Figure 3 For the present invention Figure 2 A partial enlarged view of point A in the middle.

[0022] Figure 4 It is a structural schematic diagram of the stepping motor of the present invention.

[0023] Figure 5 It is a schematic structural diagram of the first air pump of the present invention.

[0024] Figure 6 It is a structural schematic diagram of the tooth plate of the present invention.

[0025] Figure 7 It is a schematic structural diagram of the first transmission toothed belt of the present invention.

[0026] Figure 8 It is a structural schematic diagram of the oblique frame of the present invention.

[0027] Fig. 9 It is a schematic structural diagram of the first return spring of the present invention.

[0028] Fig.10 It is a schematic structural diagram of the second return spring of the present invention.

[0029] Fig.11 It is a schematic structural diagram of the first transmission shaft of the present invention.

[0030] Fig.12 It is a structural schematic diagram of the telescopic rod of the present invention.

[0031] Fig.13 It is a bottom view structural schematic diagram of the cover plate of the present invention.

[0032] Fig.14 It is a schematic structural diagram of the second rotating shaft of the present invention.

[0033] Fig.15 It is a structural schematic diagram of the blanking frame of the present invention.

[0034] In the figure: 1, bottom plate; 11, rectangular plate; 12, test device; 2, packaging mechanism; 21, placement unit; 2101, support block; 2102, first rotating shaft; 2103, first transmission gear; 2104, stepping motor; 2105, first toothed belt; 2106, first gear shaft; 2107, installation frame; 2108, first exhaust pipe; 2109, force bearing block; 2110, toothed plate; 2111, first air pump; 2112, first air pump; 2113, transfer box; 2114, limit shaft; 21 15. Limiting plate; 2116. Filter; 2117. First gear; 2118. Second gear; 2119. First transmission shaft; 2120. First transmission toothed belt; 2121. Fixed frame; 2122. Roller; 2123. First rotating cylinder; 2124. Roller; 2125. Oblique frame; 2126. Placement box; 2127. Baffle; 2128. Fixed block; 2129. Rubber sheet; 2130. Breathable ring; 2131. Breathable cotton; 2132. Flexible pad; 2133. Block; 2134. Pressure plate; 2135, first connecting plate; 2136, connecting block; 2137, moving plate; 2138, first return spring; 2139, supporting frame; 2140, second return spring; 2141, second connecting plate; 2142, second rotating cylinder; 2143, magnetic coupling; 2144, rolling gear; 2145, second transmission shaft; 2146, carrier plate; 22, capping unit; 2201, second transmission gear; 2202, second rotating shaft; 2203, second transmission toothed belt; 2204, blanking frame; 22 05. Cover plate; 2206. First intercepting plate; 2207. Moving block; 2208. Telescopic rod; 2209. Second intercepting plate; 2210. Long plate; 2211. Second toothed belt; 2212. Circular shaft; 2213. Protective pad; 2214. Second gear shaft; 2215. Fixed frame; 3. Replacement mechanism; 301. Storage box; 302. Placement platform; 303. Placement table; 304. Inlet pipe; 305. Threaded cap; 306. Second exhaust pipe; 307. Second exhaust pump; 308. Second exhaust pipe. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Example 1

[0037] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 and Fig.12 The present invention provides a technical solution: a test device for a probe card. The present invention makes corresponding improvements to the technical problems mentioned in the background technology, including a bottom plate 1, two rectangular plates 11 are fixedly connected to the upper surface of the bottom plate 1, a test device 12 is fixedly connected to the right side of one of the rectangular plates 11, a packaging mechanism 2 is arranged above the bottom plate 1, and a replacement mechanism 3 is arranged above the bottom plate 1; The packaging mechanism 2 includes a placement unit 21 , which is disposed above the bottom plate 1 . The placement unit 21 can place the tested probe card into the box.

[0038] As a further limitation of the packaging mechanism 2 of the present invention, the placement unit 21 includes two first rotating shafts 2102, the outer surfaces of the two first rotating shafts 2102 are rotatably connected to the inner walls of the two rectangular plates 11, the outer surface of each first rotating shaft 2102 is fixedly connected to a first gear shaft 2106, the outer surfaces of the two first gear shafts 2106 are jointly meshed with a first toothed belt 2105, a stepper motor 2104 is arranged on the left side of the first toothed belt 2105, the output end of the stepper motor 2104 is fixedly connected to the left end of one of the first rotating shafts 2102, the bottom surface of the stepper motor 2104 is fixedly connected to a support block 2101, the right side surface of the support block 2101 is fixedly connected to the left side surface of one of the rectangular plates 11, and the two rectangular plates 11 are close to each other. The side surfaces are fixedly connected with a fixing frame 2121, and the inner wall of the fixing frame 2121 is rotatably connected with ten rollers 2122. A moving plate 2137 is arranged below the fixing frame 2121, and the bottom surface of the moving plate 2137 is fixedly connected with four first connecting plates 2135, and the inner walls of every two first connecting plates 2135 are rotatably connected with a first rotating cylinder 2123, and the outer surface of each first rotating cylinder 2123 is in contact with the upper surface of the bottom plate 1, and the upper surface of the moving plate 2137 is fixedly connected with two first return springs 2138, and the top ends of the two first return springs 2138 are fixedly connected with an inclined frame 2125, and a block 2133 is clamped inside the inclined frame 2125, and a baffle 2127 is fixedly connected to the top end of the block 2133. A flexible pad 2132 is fixedly connected to the back of 2127, a placement box 2126 is arranged above the inclined frame 2125, the bottom surface of the placement box 2126 contacts the upper surface of the inclined frame 2125, the front surface of the placement box 2126 contacts the back of the flexible pad 2132, the left side and the inner wall of the placement box 2126 are fixedly connected to two fixed blocks 2128, the outer surface of each fixed block 2128 is fixedly connected to a rubber plate 2129, the right sides of the two rubber plates 2129 are respectively in contact with the left side and the inner wall of the placement box 2126, the inner wall of the placement box 2126 is fixedly connected to a breathable ring 2130, the inner wall of the breathable ring 2130 is fixedly connected to a breathable cotton 2131, and the front side of each rectangular plate 11 is fixedly connected to a pressure plate 21 34, both sides of the inclined frame 2125 are fixedly connected with connecting blocks 2136, the inner wall of each connecting block 2136 is rotatably connected with a roller 2124, the outer surface of each roller 2124 is in contact with the bottom surface of the pressure plate 2134, the outer surface of another first rotating shaft 2102 is respectively fixedly connected with a first gear 2117 and a first transmission gear 2103, the inner wall of one rectangular plate 11 is rotatably connected with a first transmission shaft 2119, the inner wall of another rectangular plate 11 is rotatably connected with a second transmission shaft 2145, the outer surface of the first transmission shaft 2119 and the outer surface of the second transmission shaft 2145 are fixedly connected with a magnetic coupling 2143, and the outer surface of the first transmission shaft 2119 is fixedly connected with a second gear 2118,The outer surface of the second gear 2118 and the outer surface of the first gear 2117 are jointly meshed with a first transmission toothed belt 2120, the outer surface of the second transmission shaft 2145 is fixedly connected to a rolling gear 2144, the back of the movable plate 2137 is fixedly connected to a toothed plate 2110, the teeth of the toothed plate 2110 are meshed with the outer surface of the rolling gear 2144, the upper surface of the bottom plate 1 is fixedly connected to a force block 2109, the upper surface of the force block 2109 is fixedly connected to a support frame 2139, and the front surface of the support frame 2139 is fixedly connected to two second gears. Two return springs 2140, one end of each second return spring 2140 away from the support frame 2139 is fixedly connected to the back of the movable plate 2137, the bottom surface of the tooth plate 2110 is in contact with the upper surface of the force block 2109, and the placement unit 21 is provided to place the tested probe card into the placement box 2126, thereby avoiding the problem that when the worker directly contacts the probe card, the worker's hand flexibility is not strong due to the worker wearing gloves, and the probe card is easily damaged by collision; See also Fig.10 and Fig.11 The upper surface of the force block 2109 is fixedly connected with a carrier plate 2146, the inner wall of the carrier plate 2146 is rotatably connected to the outer surface of the second transmission shaft 2145, and the back of the inclined frame 2125 is fixedly connected with two second connecting plates 2141, and the inner walls of the two second connecting plates 2141 are rotatably connected with the second rotating cylinder 2142, and the outer surface of the second rotating cylinder 2142 is in contact with the front of the movable plate 2137. By providing the carrier plate 2146, the carrier plate 2146 can provide a stable supporting force for the second transmission shaft 2145 to prevent the second transmission shaft 2145 from tilting, and the second connecting plate 2141 and the second rotating cylinder 2142 can ensure that the movable plate 2137 can directly transmit the thrust to the inclined frame 2125, and when the inclined frame 2125 moves downward, the friction between the inclined frame 2125 and the movable plate 2137 can be reduced.

[0039] See also Figure 2 and Figure 3 Another rectangular plate 11 has a transfer box 2113 fixedly connected to the back thereof, the upper surface of the transfer box 2113 fixedly connected to the bottom surface of the testing device 12, the interior of the transfer box 2113 is connected with a filter 2116, and by providing the transfer box 2113 and the filter 2116, the filter 2116 can be used to filter the outside air, so that dust-free air can enter the interior of the transfer box 2113, thereby ensuring that when the dust on the surface of the probe card is cleaned, the blown gas will not carry dust.

[0040] See also Figure 3The inner wall of the transfer box 2113 is rotatably connected to two limit shafts 2114, and one end of each limit shaft 2114 away from the first transmission gear 2103 is fixedly connected to a limit plate 2115, and the front of each limit plate 2115 is in contact with the back of the transfer box 2113 and the back of the filter 2116. By setting the limit shaft 2114 and the limit plate 2115, the limit shaft 2114 can be used to control the rotation of the limit plate 2115, thereby determining whether the limit plate 2115 can limit the filter 2116.

[0041] See also Figure 5 The front of the testing device 12 is fixedly connected to a first air pump 2111, and the input end of the first air pump 2111 is fixedly connected to a first air pipe 2112. The end of the first air pipe 2112 away from the first transmission gear 2103 passes through the interior of the transfer box 2113. By providing the first air pump 2111 and the first air pipe 2112, the first air pump 2111 can be used to provide power, and the first air pipe 2112 can be used to extract the gas inside the transfer box 2113.

[0042] See also Figure 4 and Figure 5 The output end of the first vacuum pump 2111 is fixedly connected to the first exhaust pipe 2108, and the front of the test device 12 is fixedly connected to the mounting frame 2107. The inner wall of the mounting frame 2107 is fixedly connected to the outer surface of the first exhaust pipe 2108. The mounting frame 2107 can provide a fixed position for the first exhaust pipe 2108, and the first exhaust pipe 2108 can guide the dust-free gas to the top of the probe card, so that the surface dust of the tested probe card can be treated.

[0043] The specific implementation of this embodiment is as follows: when the device is needed, first place the probe card to be tested on the surface of the first toothed belt 2105, then control the stepper motor 2104 to run, and use the rotational power generated by the stepper motor 2104 to drive the first toothed belt 2105 to rotate. When the first toothed belt 2105 passes under the test device 12, the test device 12 can be used to test the probe card. During the test, the test device 12 will record the test results of each probe and diagnose abnormal conditions. If an open circuit, short circuit or other defects are found, the test device 12 will mark the corresponding probe, thereby completing the purpose of the test. When the test is completed, the probe card continues to move along with the first toothed belt 2105. When the probe When the probe card moves to the end of the first toothed belt 2105, the probe card will be pushed onto the surface of the fixed frame 2121, and the inner wall of the fixed frame 2121 rotates with ten rollers 2122. Under the action of the rollers 2122 and the gravitational potential energy, the probe card will move to the back of the flexible pad 2132. The flexible pad 2132 can limit the probe card from continuing to move, and then the magnetic coupling 2143 is controlled to operate. When the magnetic coupling 2143 is in operation, it can connect the first transmission shaft 2119 and the second transmission shaft 2145, so that the rotating power on the first transmission shaft 2119 will be transmitted to the second transmission shaft 2145, and the rotational power received by the first transmission shaft 2119 comes from the first gear 2117 and the second gear 2145. Under the common transmission of a transmission toothed belt 2120 and a second gear 2118, the power generated by the stepper motor 2104 during operation is finally transmitted to the first transmission shaft 2119. At this time, the second transmission shaft 2145 will rotate, and the rolling gear 2144 fixed on the outer surface of the second transmission shaft 2145 will also rotate accordingly, thereby driving the toothed plate 2110 meshing with the rolling gear 2144 to move. The toothed plate 2110 will push the moving plate 2137 to move synchronously under the action of the rolling gear 2144. When the moving plate 2137 moves, the moving plate 2137 will also push the inclined frame 2125 to move on the basis of the second rotating cylinder 2142. When the inclined frame 2125 moves, the connecting blocks fixed on its two sides 2136, and the roller 2124 rotating on the inner wall of the connecting block 2136 will move together, and the roller 2124 will gradually compress the first return spring 2138 under the squeezing of the pressure plate 2134 and the push of the tooth plate 2110, causing the first return spring 2138 to shrink, thereby driving the placement box 2126 to move horizontally and downward. It should be understood here that the pressure plate 2134 and the fixing frame 2121 are in a parallel state, so the placement box 2126 will move closely against the fixing frame 2121, and when the probe card follows the flexible pad 2132 to move out of the range of the fixing frame 2121, the probe card will fall into the interior of the placement box 2126, thereby completing the purpose of placing the probe card in the placement box 2126.

[0044] Example 2

[0045] See also Figure 1 , Figure 2 , Fig.12 , Fig.13 , Fig.14 and Fig.15 The present invention provides a technical solution: a test device for a probe card. The present invention makes corresponding improvements to the technical problems mentioned in the background technology. The packaging mechanism 2 also includes a capping unit 22, which is arranged above the base plate 1. The capping unit 22 is used in conjunction with the placement unit 21. The capping unit 22 can cap the box containing the probe card.

[0046] As a further limitation of the packaging mechanism 2 of the present invention, the capping unit 22 includes two long plates 2210, the bottom surface of each long plate 2210 is fixedly connected to the upper surface of the bottom plate 1, the inner walls of the two long plates 2210 are rotatably connected to two second rotating shafts 2202, the outer surface of each second rotating shaft 2202 is fixedly connected to a second gear shaft 2214, the outer surfaces of the two second gear shafts 2214 are jointly meshed with a second toothed belt 2211, the outer surface of one of the second rotating shafts 2202 is fixedly connected to a second transmission gear 2201, the outer surface of the second transmission gear 2201 and the outer surface of the first transmission gear 2103 are jointly meshed with a second transmission toothed belt 2203, the two side surfaces of the two long plates 2210 are jointly fixedly connected to a fixed frame 2215, the inner wall of the fixed frame 2215 is fixedly connected to a blanking frame 2204, the inner wall of the fixed frame 2215 is fixedly connected to two telescopic rods 2208, the telescopic end of each telescopic rod 2208 is fixedly connected to a moving block 2207, and the two The side surfaces of the movable blocks 2207 that are close to each other are respectively fixedly connected with the first intercepting plate 2206 and the second intercepting plate 2209, the outer surface of the second intercepting plate 2209 contacts the inner wall of the blanking frame 2204, the upper surface of the first intercepting plate 2206 contacts the bottom surface of the blanking frame 2204, and a cover plate 2205 is arranged inside the blanking frame 2204, the outer surface of the cover plate 2205 contacts the inner wall of the blanking frame 2204, and the bottom surface of the cover plate 2205 is respectively fixedly connected with a protective pad 2213 and four circular shafts 2212, by setting up a capping unit 22, the capping unit 22 can be used to cap the probe card that has been placed in the placement box 2126 to avoid external pressure from acting on the probe card, and the capping unit 22 is used in conjunction with the placement unit 21 to ensure that when the tested probe card is packaged, the hands of the staff will not directly contact the probe card, thereby reducing the problem of collision damage to the probe card due to the low flexibility of the staff's hands.

[0047] The specific implementation of this embodiment is as follows: after the probe card is placed in the placement box 2126, the stepper motor 2104 is controlled to stop running, and the baffle 2127 is pulled at this time to make the block 2133 fixed on the bottom surface of the baffle 2127 be pulled out from the inside of the inclined frame 2125. At this time, the placement box 2126 loses its supporting force and will continue to move downward under the action of gravity potential energy until it moves to the surface of the second toothed belt 2211. At this time, the magnetic coupling 2143 is disconnected. After the magnetic coupling 2143 is disconnected, the first transmission shaft 2119 and the second transmission shaft 2145 will be disconnected, and the toothed plate 2110 will be reset under the action of the second reset spring 2140, and then the stepper motor 2104 is controlled to run again, and the stepper motor 2104 runs to generate power again, and the second transmission gear 2201 and the first transmission gear 2201 are used to drive the stepper motor 2104 to generate power. 103 and the second transmission toothed belt 2203 are jointly driven, which will drive the second rotating shaft 2202 to rotate, thereby driving the second toothed belt 2211 to move. When the placement box 2126 moves to the bottom of the unloading frame 2204, the telescopic rod 2208 is controlled to extend. The extension of the telescopic rod 2208 will drive the first intercepting plate 2206 and the second intercepting plate 2209 to move horizontally. At this time, the first intercepting plate 2206 will extend to the inside of the unloading frame 2204, and the second intercepting plate 2209 will go deep into the inside of the unloading frame 2204. Therefore, the second intercepting plate 2209 can prevent the upper cover plate 2205 from falling downward. When the first intercepting plate 2206 is fully extended, the lowest cover plate 2205 will fall into the placement box 2126, thereby completing the purpose of automatically covering the placement box 2126.

[0048] Example 3

[0049] See also Fig.12 The present invention provides a technical solution: a test device for a probe card. The present invention makes corresponding improvements to the technical problems mentioned in the background technology. A replacement mechanism 3 is arranged above a base plate 1. The replacement mechanism 3 is used in conjunction with a packaging mechanism 2. The replacement mechanism 3 can discharge the air around the probe card and fill its vicinity with inert gas.

[0050] As a further limitation of the replacement mechanism 3 of the present invention, the replacement mechanism 3 includes a storage box 301, the left side of the storage box 301 is fixedly connected to the right side of one of the long plates 2210, the upper surface of the storage box 301 is fixedly connected to an air inlet pipe 304, the outer surface of the air inlet pipe 304 is threadedly connected to a threaded cap 305, the upper surface of the storage box 301 is fixedly connected to a second air pump 307, the input end of the second air pump 307 is fixedly connected to a second air pump 306, the bottom end of the second air pump 306 passes through the interior of the storage box 301, and the output of the second air pump 307 is fixedly connected to the second air pump 307. The end is fixedly connected to a second exhaust pipe 308, the upper surface of the storage box 301 is fixedly connected to a placement table 303, the inner part of the placement table 303 is clamped on the outer surface of the second exhaust pipe 308, and the upper surfaces of the two long plates 2210 are commonly fixedly connected to a placement platform 302. By setting up a replacement mechanism 3, the replacement mechanism 3 can be used to fill inert gas around the packaged probe card. By setting up a placement unit 21, a capping unit 22 and a replacement mechanism 3, the problem of collision damage of the probe card due to external reasons such as staff after the test is completed can be effectively avoided.

[0051] The specific implementation of this embodiment is as follows: after the placement box 2126 is covered, as the second toothed belt 2211 moves, the covered placement box 2126 will move to the left side of the second exhaust pipe 308, and then the second exhaust pipe 308 will be manually guided to the right side opening of the placement box 2126, and the second air pump 307 will be controlled to operate. Under the joint action of the second air pump 307 and the second air pipe 306, the inert gas inside the storage box 301 can be extracted until it is sucked into the placement box 2126. When the gas is inside the placement box 2126, the gas will blow the rubber plate 2129 inside the placement box 2126 to move to the left side of the placement box 2126, but under the action of the fixing block 2128, the rubber plate 2129 will not Completely detach from one side of the placement box 2126, and allow the inert gas to enter the interior of the placement box 2126 while swinging the rubber plate 2129 on one side. Similarly, the rubber plate 2129 on the left side of the placement box 2126 will also expel the air inside the placement box 2126. When the inert gas is filled for a period of time, the second vacuum pump 307 is stopped. At this time, the two rubber plates 2129 will tightly stick to one side and the inner wall of the placement box 2126 in the absence of wind, and the air pressure inside the placement box 2126 is the same as that of the outside world. Therefore, the inert gas will be stored in the interior of the placement box 2126, thereby effectively avoiding the problem of probe card collision caused by workers wearing gloves due to poor hand flexibility when the device is in use.

[0052] A method for testing a probe card test device comprises the following steps: S1: When the device is needed, first place the probe card to be tested on the surface of the first toothed belt 2105, then control the stepper motor 2104 to run, and use the rotational power generated by the stepper motor 2104 to drive the first toothed belt 2105 to rotate. When the first toothed belt 2105 passes under the test device 12, the test device 12 can be used to test the probe card. During the test, the test device 12 will record the test results of each probe and diagnose abnormal conditions. If an open circuit, short circuit or other defects are found, the test device 12 will mark the corresponding probe, thereby completing the purpose of the test. When the test is completed, the probe card continues to move along with the first toothed belt 2105. When the probe card moves to the first When the toothed belt 2105 reaches the end, the probe card will be pushed onto the surface of the fixed frame 2121, and the inner wall of the fixed frame 2121 rotates with ten rollers 2122. Under the action of the rollers 2122 and the gravitational potential energy, the probe card will move to the back of the flexible pad 2132. The flexible pad 2132 can limit the probe card from continuing to move, and then the magnetic coupling 2143 is controlled to operate. When the magnetic coupling 2143 is in operation, it can connect the first transmission shaft 2119 and the second transmission shaft 2145, so that the rotating power on the first transmission shaft 2119 is transmitted to the second transmission shaft 2145, and the rotating power received by the first transmission shaft 2119 comes from the first gear 2117 and the first transmission toothed belt. Under the common transmission of the stepper motor 2104 and the second gear 2118, the power generated by the stepper motor 2104 during operation is finally transmitted to the first transmission shaft 2119. At this time, the second transmission shaft 2145 will rotate, and the rolling gear 2144 fixed on the outer surface of the second transmission shaft 2145 will also rotate accordingly, thereby driving the toothed plate 2110 meshing with the rolling gear 2144 to move. The toothed plate 2110 will push the moving plate 2137 to move synchronously under the action of the rolling gear 2144. When the moving plate 2137 moves, the moving plate 2137 will also push the inclined frame 2125 to move on the basis of the second rotating cylinder 2142. When the inclined frame 2125 moves, the connecting blocks 2144 fixed on its two sides are engaged. 36, and the roller 2124 rotating on the inner wall of the connecting block 2136 will move together, and the roller 2124 will gradually compress the first return spring 2138 under the squeezing of the pressure plate 2134 and the push of the tooth plate 2110, so as to cause the first return spring 2138 to contract, thereby driving the placement box 2126 to move horizontally and downward. It should be understood here that the pressure plate 2134 and the fixing frame 2121 are in a parallel state, so the placement box 2126 will move closely against the fixing frame 2121. When the probe card follows the flexible pad 2132 and moves out of the range of the fixing frame 2121, the probe card will fall into the inside of the placement box 2126, thereby completing the purpose of placing the probe card in the placement box 2126. S2: After the probe card is placed in the placement box 2126, the stepper motor 2104 is controlled to stop running. At this time, the baffle 2127 is pulled to pull the block 2133 fixed on the bottom surface of the baffle 2127 out from the inside of the inclined frame 2125. At this time, the placement box 2126 loses its supporting force and will continue to move downward under the action of gravity potential energy until it moves to the surface of the second toothed belt 2211. At this time, the magnetic coupling 2143 is disconnected. After the magnetic coupling 2143 is disconnected, the first transmission shaft 2119 and the second transmission shaft 2145 will be disconnected, and the toothed plate 2110 will be reset under the action of the second reset spring 2140, and then the stepper motor 2104 is controlled to run again, and the stepper motor 2104 generates power again, and the second transmission gear 2201, the first transmission gear 2103 and the second transmission belt 2211 are used. Under the common drive of the two transmission toothed belts 2203, the second rotating shaft 2202 will be driven to rotate, thereby driving the second toothed belt 2211 to move. When the placement box 2126 moves to the bottom of the blanking frame 2204, the telescopic rod 2208 is controlled to extend. The extension of the telescopic rod 2208 will drive the first intercepting plate 2206 and the second intercepting plate 2209 to move horizontally. At this time, the first intercepting plate 2206 will extend to the inside of the blanking frame 2204, and the second intercepting plate 2209 will go deep into the inside of the blanking frame 2204. Therefore, the second intercepting plate 2209 can prevent the upper cover plate 2205 from falling downwards. When the first intercepting plate 2206 is fully extended, the lowermost cover plate 2205 will fall into the placement box 2126, thereby achieving the purpose of automatically covering the placement box 2126. S3: After the placement box 2126 is covered, as the second toothed belt 2211 moves, the covered placement box 2126 will move to the left side of the second exhaust pipe 308, and then the second exhaust pipe 308 will be manually guided to the right side opening of the placement box 2126, and the second air pump 307 will be controlled to operate. Under the joint action of the second air pump 307 and the second air pipe 306, the inert gas inside the storage box 301 can be extracted until it is sucked into the placement box 2126. When the gas is inside the placement box 2126, the gas will blow the rubber plate 2129 inside the placement box 2126 to move to the left side of the placement box 2126, but under the action of the fixing block 2128, the rubber plate 2129 will not completely detach from the placement box 2126. Instead of moving one side of the placement box 2126, the rubber sheet 2129 on one side is swung to allow the inert gas to enter the interior of the placement box 2126. Similarly, the rubber sheet 2129 on the left side of the placement box 2126 will also expel the air inside the placement box 2126. When the inert gas is filled for a period of time, the second vacuum pump 307 is stopped. At this time, the two rubber sheets 2129 will tightly stick to one side and the inner wall of the placement box 2126 in the absence of wind, and the air pressure inside the placement box 2126 is the same as that of the outside. Therefore, the inert gas will be stored in the placement box 2126, thereby effectively avoiding the problem of probe card collision caused by the worker wearing gloves due to poor hand flexibility when the device is in use.

[0053] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A probe card testing device, comprising a base plate (1), characterized in that: Two rectangular plates (11) are fixedly connected to the upper surface of the bottom plate (1), a testing device (12) is fixedly connected to the right side of one of the rectangular plates (11), a packaging mechanism (2) is arranged above the bottom plate (1), and a replacement mechanism (3) is arranged above the bottom plate (1); The packaging mechanism (2) comprises a placement unit (21), wherein the placement unit (21) is arranged above the base plate (1), and the placement unit (21) is capable of placing a tested probe card into the interior of the box; The packaging mechanism (2) further comprises a capping unit (22), the capping unit (22) being arranged above the base plate (1), the capping unit (22) being used in conjunction with the placement unit (21), and the capping unit (22) being capable of performing a capping process on a box containing a probe card; The replacement mechanism (3) is arranged above the base plate (1), and is used in conjunction with the packaging mechanism (2). The replacement mechanism (3) can discharge the air around the probe card and fill the vicinity thereof with inert gas.

2. A probe card testing device according to claim 1, characterized in that: The placement unit (21) comprises two first rotating shafts (2102), the outer surfaces of the two first rotating shafts (2102) are rotatably connected to the inner walls of the two rectangular plates (11), the outer surface of each first rotating shaft (2102) is fixedly connected to a first gear shaft (2106), the outer surfaces of the two first gear shafts (2106) are meshed with a first toothed belt (2105), a stepping motor (2104) is arranged on the left side of the first toothed belt (2105), the output end of the stepping motor (2104) is fixedly connected to the left end of one of the first rotating shafts (2102), the bottom surface of the stepping motor (2104) is fixedly connected to a support block (2101), and the right side surface of the support block (2101) is fixedly connected to the support block (2101). A fixing frame (2121) is fixedly connected to the left side of one of the rectangular plates (11), and the side surfaces of the two rectangular plates (11) close to each other are fixedly connected together. Ten rollers (2122) are rotatably connected to the inner wall of the fixing frame (2121). A movable plate (2137) is arranged below the fixing frame (2121). Four first connecting plates (2135) are fixedly connected to the bottom surface of the movable plate (2137). The inner walls of every two of the first connecting plates (2135) are rotatably connected to a first rotating cylinder (2123). The outer surface of each of the first rotating cylinders (2123) contacts the upper surface of the bottom plate (1). Two first return springs (2138) are fixedly connected to the upper surface of the movable plate (2137). ), the top ends of the two first return springs (2138) are commonly fixedly connected to an inclined frame (2125), a card block (2133) is clamped inside the inclined frame (2125), a baffle (2127) is fixedly connected to the top end of the card block (2133), a flexible pad (2132) is fixedly connected to the back end of the baffle (2127), a placement box (2126) is arranged above the inclined frame (2125), the bottom surface of the placement box (2126) is in contact with the upper surface of the inclined frame (2125), the front surface of the placement box (2126) is in contact with the back end of the flexible pad (2132), the left side surface and the inner wall of the placement box (2126) are fixedly connected to two fixed blocks (2128), each of the fixed blocks The outer surfaces of the (2128) are fixedly connected to rubber plates (2129), the right sides of the two rubber plates (2129) are in contact with the left side and the inner wall of the placement box (2126) respectively, the inner wall of the placement box (2126) is fixedly connected to a breathable ring (2130), the inner wall of the breathable ring (2130) is fixedly connected to a breathable cotton (2131), the front of each rectangular plate (11) is fixedly connected to a pressure plate (2134), the two side surfaces of the inclined frame (2125) are fixedly connected to connecting blocks (2136), the inner wall of each connecting block (2136) is rotatably connected to a roller (2124), the outer surface of each roller (2124) is in contact with the bottom surface of the pressure plate (2134),The outer surface of the other first rotating shaft (2102) is respectively fixedly connected to the first gear (2117) and the first transmission gear (2103); the inner wall of one of the rectangular plates (11) is rotatably connected to the first transmission shaft (2119); the inner wall of the other rectangular plate (11) is rotatably connected to the second transmission shaft (2145); the outer surface of the first transmission shaft (2119) and the outer surface of the second transmission shaft (2145) are jointly fixedly connected to a magnetic coupling (2143); the outer surface of the first transmission shaft (2119) is fixedly connected to the second gear (2118); the outer surface of the second gear (2118) and the outer surface of the first gear (2117) are jointly meshed with a first transmission toothed belt (2120); the second transmission The outer surface of the shaft (2145) is fixedly connected to a rolling gear (2144), the back of the moving plate (2137) is fixedly connected to a toothed plate (2110), the teeth of the toothed plate (2110) mesh with the outer surface of the rolling gear (2144), the upper surface of the bottom plate (1) is fixedly connected to a force block (2109), the upper surface of the force block (2109) is fixedly connected to a support frame (2139), the front surface of the support frame (2139) is fixedly connected to two second return springs (2140), the end of each second return spring (2140) away from the support frame (2139) is fixedly connected to the back of the moving plate (2137), and the bottom surface of the toothed plate (2110) is in contact with the upper surface of the force block (2109).

3. A probe card testing device according to claim 2, characterized in that: The upper surface of the force-bearing block (2109) is fixedly connected to a carrier plate (2146), the inner wall of the carrier plate (2146) is rotatably connected to the outer surface of the second transmission shaft (2145), the back surface of the inclined plate (2125) is fixedly connected to two second connecting plates (2141), the inner walls of the two second connecting plates (2141) are rotatably connected to a second rotating cylinder (2142), and the outer surface of the second rotating cylinder (2142) is in contact with the front surface of the movable plate (2137).

4. A probe card testing device according to claim 3, characterized in that: A transfer box (2113) is fixedly connected to the back surface of the other rectangular plate (11), the upper surface of the transfer box (2113) is fixedly connected to the bottom surface of the testing device (12), and a filter screen (2116) is clamped inside the transfer box (2113).

5. The probe card testing device according to claim 4, characterized in that: The inner wall of the transfer box (2113) is rotatably connected to two limit shafts (2114), and one end of each limit shaft (2114) away from the first transmission gear (2103) is fixedly connected to a limit plate (2115), and the front side of each limit plate (2115) is in contact with the back side of the transfer box (2113) and the back side of the filter screen (2116).

6. The probe card testing device according to claim 4, characterized in that: The front side of the testing device (12) is fixedly connected to a first air pump (2111), the input end of the first air pump (2111) is fixedly connected to a first air pumping pipe (2112), and the end of the first air pumping pipe (2112) away from the first transmission gear (2103) passes through the interior of the transfer box (2113).

7. The probe card testing device according to claim 6, characterized in that: The output end of the first vacuum pump (2111) is fixedly connected to the first exhaust pipe (2108), the front of the test device (12) is fixedly connected to a mounting frame (2107), and the inner wall of the mounting frame (2107) is fixedly connected to the outer surface of the first exhaust pipe (2108).

8. The probe card testing device according to claim 2, characterized in that: The capping unit (22) comprises two long plates (2210), the bottom surface of each of the long plates (2210) being fixedly connected to the upper surface of the bottom plate (1), the inner walls of the two long plates (2210) being rotatably connected to two second rotating shafts (2202), the outer surface of each of the second rotating shafts (2202) being fixedly connected to a second gear shaft (2214), the outer surfaces of the two second gear shafts (2214) being jointly meshed with a second toothed belt (2211), the outer surface of one of the second rotating shafts (2202) being fixedly connected to a second transmission gear (2201), the outer surface of the second transmission gear (2201) and the outer surface of the first transmission gear (2103) being jointly meshed with a second transmission toothed belt (2203), the two side surfaces of the two long plates (2210) being jointly fixedly connected to a fixing frame (2215), the inner wall of the fixing frame (2215) being fixedly connected to the fixing frame (2215), and the fixing frame (2215) being fixedly connected to the fixing frame (2215). A material discharging frame (2204) is connected, and two telescopic rods (2208) are fixedly connected to the inner wall of the fixed frame (2215), and the telescopic end of each telescopic rod (2208) is fixedly connected to a moving block (2207), and the side surfaces of the two moving blocks (2207) close to each other are respectively fixedly connected to a first intercepting plate (2206) and a second intercepting plate (2209), and the outer surface of the second intercepting plate (2209) is in contact with the inner wall of the material discharging frame (2204), and the upper surface of the first intercepting plate (2206) is in contact with the bottom surface of the material discharging frame (2204), and a cover plate (2205) is arranged inside the material discharging frame (2204), and the outer surface of the cover plate (2205) is in contact with the inner wall of the material discharging frame (2204), and the bottom surface of the cover plate (2205) is respectively fixedly connected to a protective pad (2213) and four circular shafts (2212).

9. The probe card testing device according to claim 1, characterized in that: The replacement mechanism (3) comprises a storage box (301), the left side surface of the storage box (301) is fixedly connected to the right side surface of one of the long plates (2210), the upper surface of the storage box (301) is fixedly connected to an air intake pipe (304), the outer surface of the air intake pipe (304) is threadedly connected to a threaded cap (305), the upper surface of the storage box (301) is fixedly connected to a second air pump (307), the input end of the second air pump (307) is fixedly connected to a second air exhaust pipe (306), the bottom end of the second air exhaust pipe (306) passes through the interior of the storage box (301), the output end of the second air pump (307) is fixedly connected to a second exhaust pipe (308), the upper surface of the storage box (301) is fixedly connected to a placement table (303), the interior of the placement table (303) is clamped to the outer surface of the second exhaust pipe (308), and the upper surfaces of the two long plates (2210) are commonly fixedly connected to a placement platform (302).

10. A testing method for a probe card testing device according to any one of claims 1 to 9, characterized in that: The specific steps include: S1: When the device is needed, the probe card to be tested is first placed on the surface of the first toothed belt (2105), and then the stepper motor (2104) is controlled to operate, and the first toothed belt (2105) is driven to rotate by the rotational power generated by the operation of the stepper motor (2104). When the first toothed belt (2105) passes under the test device (12), the probe card can be tested by the test device (12). During the test, the test device (12) will record the test results of each probe and diagnose abnormal conditions. If an open circuit, short circuit or other defects are found, the test device (12) will mark the corresponding probe, thereby completing the test. Purpose: After the test is completed, the probe card continues to move along the first toothed belt (2105). When the probe card moves to the end of the first toothed belt (2105), the probe card is pushed onto the surface of the fixed frame (2121), and the inner wall of the fixed frame (2121) rotates with ten rollers (2122). Under the action of the rollers (2122) and the gravitational potential energy, the probe card moves to the back of the flexible pad (2132), and the meshing relationship between the rolling gear (2144) and the toothed plate (2110) can push the moving plate (2137) and the inclined frame (2125) to move until the probe card falls into the inside of the placement box (2126); S2: Control the stepper motor (2104) to run. The stepper motor (2104) generates power again. The second rotating shaft (2202) is driven by the second transmission gear (2201), the first transmission gear (2103) and the second transmission toothed belt (2203). This drives the second toothed belt (2211) to move. When the placement box (2126) moves to the bottom of the unloading frame (2204), the telescopic rod (2208) is controlled to extend. The extension of the telescopic rod (2208) drives the first intercepting plate (2206). and the second intercepting plate (2209) move horizontally, at which time the first intercepting plate (2206) will extend into the interior of the material discharging frame (2204), and the second intercepting plate (2209) will penetrate into the interior of the material discharging frame (2204), so that the second intercepting plate (2209) can prevent the upper cover plate (2205) from falling downward, and when the first intercepting plate (2206) is fully extended, the lowermost cover plate (2205) will fall into the interior of the placement box (2126), thereby achieving the purpose of automatically covering the placement box (2126); S3: As the second toothed belt (2211) moves, the covered placement box (2126) moves to the left side of the second exhaust pipe (308), and then the second exhaust pipe (308) is manually guided to the right side opening of the placement box (2126), and the second air pump (307) is controlled to operate. Under the joint action of the second air pump (307) and the second air pipe (306), the inert gas inside the storage box (301) can be extracted until it is sucked into the placement box ( 2126), when the gas is inside the placement box (2126), the gas will blow the rubber plate (2129) inside the placement box (2126) to move to the left side of the placement box (2126), but under the action of the fixing block (2128), the rubber plate (2129) will not completely separate from one side of the placement box (2126), but will allow the inert gas to enter the interior of the placement box (2126) while the rubber plate (2129) on one side is swaying.

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