Robot and substrate transfer apparatus

Abstract

The invention relates to a robot and a substrate conveying apparatus. A robot (2) is provided with a multi-joint arm (3) and a flange (30), the multi-joint arm having: a hand (20) that supports a substrate (W); a base (10); an arm (4) that connects the hand and the base; and a plurality of joints (J10) that are arranged along the arm and each operate around a vertical axis to change the position and orientation of the hand with respect to the base, the flange (30) expands so as to separate the base from the arm and the hand and closes an opening (OP1) of a chamber (90) that houses at least a portion of the articulated arm (3), the flange (30) has a longitudinal direction, and in the longitudinal direction of the flange (30), the longitudinal direction of the flange (30) is substantially perpendicular to the longitudinal direction of the arm (3), and the longitudinal direction of the flange (30) is substantially perpendicular to the longitudinal direction of the arm (3). The axis of the joint (J10) closest to the base (10) among the plurality of joints (J10) is located between one end (31) of the flange (30) and the center (32) of the flange (30) at a position close to the one end (31).

Description

Technical Field

[0001] The present disclosure relates to a robot and a substrate conveying device. Background Art

[0002] International Publication No. 2019 / 189883 discloses a chamber structure in which a conveying robot is mounted in an opening at the bottom of a conveying chamber, which serves as the interior space of the conveying chamber. The chamber structure includes a robot base member disposed below the opening and a conveying robot. The conveying robot includes a base unit and an arm unit disposed above the base unit. A robot flange member having the same shape as the opening of the robot base member is disposed above the base unit. The arm unit can be inserted through the opening, and the robot flange member is detachably connected to the periphery of the opening. Summary of the Invention

[0003] Problems to be solved by the invention

[0004] The present disclosure provides a robot and a substrate transport device that effectively achieve both reduction in size of an opening for assembling a robot into a chamber and workability of assembling the robot into the chamber.

[0005] Means for solving problems

[0006] One aspect of the present disclosure relates to a robot comprising a multi-jointed arm and a flange. The multi-jointed arm comprises a hand supporting a base plate, a base, an arm connecting the hand to the base, and a plurality of joints arranged along the arm, each of which moves about a vertical axis to change the position and posture of the hand relative to the base. The flange extends to separate the base from the arm and the hand, and blocks an opening of a chamber that houses at least a portion of the multi-jointed arm. The flange has a longitudinal direction, and along the longitudinal direction of the flange, the axis of the joint closest to the base among the plurality of joints is located between one end of the flange and the center of the flange, closer to the one end.

[0007] Effects of the Invention

[0008] According to the present disclosure, it is possible to provide a robot and a substrate transport device that effectively achieve both reduction in size of an opening for assembling a robot into a chamber and workability of assembling the robot into the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a plan view illustrating the interior of the substrate transfer device.

[0010] Figure 2 It is along Figure 1 Cross-sectional view along line II-II.

[0011] Figure 3 yes Figure 2Bottom view of the robot in .

[0012] Figure 4 It is along Figure 1 Cross-sectional view along line IV-IV.

[0013] Figure 5 yes Figure 4 A magnified view of the first arm motor in Figure 1.

[0014] Figure 6 yes Figure 4 A magnified view of the second arm motor in Figure 2.

[0015] Figure 7 yes Figure 4 A magnified image of the hand motors in Figure 2.

[0016] Figure 8 It is a diagram showing a modified example of the hand motor.

[0017] Figure 9 It is a diagram showing a modified example of the second arm motor.

[0018] Figure 10 It is a diagram showing another modified example of the hand motor.

[0019] Figure 11 This is a diagram showing still another modified example of the hand motor.

[0020] Figure 12 This is a diagram illustrating tubes and air-cooling flow paths.

[0021] Figure 13 This is a diagram illustrating cable routing. DETAILED DESCRIPTION

[0022] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and repeated descriptions are omitted.

[0023] [Substrate conveyor device]

[0024] Figure 1 and Figure 2 The substrate transport apparatus 1 shown is a device that transports substrates W between one or more stations ST10 storing substrates W and multiple processing modules PU10. Examples of substrates W include semiconductor substrates, glass substrates, mask substrates, and FPD (Flat Panel Display) substrates. The substrate transport apparatus 1 includes a chamber 90 and a robot 2. The chamber 90 has a longitudinal direction D11 and a transverse direction D12 perpendicular to the longitudinal direction D11. The longitudinal direction D11 and the transverse direction D12 are arranged along a horizontal plane.

[0025] The chamber 90 includes a top plate 91 and a bottom plate 92 arranged vertically, and a peripheral wall 93 surrounding a space between the top plate 91 and the bottom plate 92. Hereinafter, the space surrounded by the peripheral wall 93 is referred to as a transfer space S01.

[0026] Peripheral wall 93 includes end walls 94 and 95 that face each other in longitudinal direction D11 and extend along transverse direction D12, and side walls 96 and 97 that face each other in transverse direction D12 and extend along longitudinal direction D11. A distance L11 between end wall 94 and end wall 95 represents the length of chamber 90 in longitudinal direction D11, while a distance W11 between side wall 96 and side wall 97 represents the width of chamber 90 in transverse direction D12. Distance L11 is greater than distance W11.

[0027] The one or more stations ST10 and the plurality of process modules PU10 are arranged around the chamber 90. In the illustrated example, two stations ST10 are arranged along the end wall 95, three process modules PU10 are arranged along the side wall 96, and three process modules PU10 are arranged along the side wall 97. However, the number and arrangement of the stations ST10 and the number and arrangement of the process modules PU10 are not limited thereto.

[0028] The robot 2 transports substrates W between one or more stations ST10 and multiple processing modules PU10 within the transport space S01. For example, the robot 2 carries a substrate W out of any one of the one or more stations ST10 and carries it into any one of the multiple processing modules PU10. Alternatively, the robot 2 carries a substrate W out of any one of the multiple processing modules PU10 and carries it into any one of the one or more stations ST10.

[0029] like Figure 2 As shown, the robot 2 has a multi-joint arm 3 and a plurality of actuators 40. The multi-joint arm 3 has a plurality of links connected by a plurality of joints J10. The plurality of links include a hand 20, a base 10, and one or more arm links 50, 60 connecting the hand 20 to the base 10. For example, the multi-joint arm 3 has a hand 20, a base 10, an arm 4, and a plurality of joints J10. The base 10 is fixed to an environment in which the multi-joint arm 3 is installed. The hand 20 supports the substrate W horizontally. The arm 4 connects the base 10 to the hand 20. The plurality of joints J10 are arranged along the arm 4 and move around a vertical axis to change the position and posture of the hand 20 relative to the base 10. The plurality of actuators 40 drive the plurality of joints J10 around a plurality of vertical axes.

[0030] For example, the arm 4 has a first link 50 and a second link 60. The multiple joints J10 include a first joint J11, a second joint J12, and a third joint J13. The first joint J11 connects the first link 50 to the base 10 in a manner that rotates around a vertical first axis Ax1. The second joint J12 connects the second link 60 to the end of the first link 50 in a manner that rotates around a vertical second axis Ax2. The third joint J13 connects the hand 20 to the end of the second link 60 in a manner that rotates around a vertical third axis Ax3. The base 10, the first link 50, the second link 60, and the hand 20 connected by the joints J11, J12, and J13 are all "links of the multi-joint arm 3."

[0031] The actuator 40 includes arm actuators 41 and 42 and a hand actuator 43. The arm actuator 41 (base actuator) drives the first joint J11 so as to rotate the first link 50 relative to the base 10 about the first axis Ax1. The arm actuator 42 drives the second joint J12 so as to rotate the second link 60 relative to the first link 50 about the second axis Ax2 independently of the rotation of the first link 50 by means of the arm actuator 41. The hand actuator 43 drives the third joint J13 so as to rotate the hand 20 relative to the second link 60 about the third axis Ax3 independently of the rotation of the first link 50 by means of the arm actuator 41 and the rotation of the second link 60 by means of the arm actuator 42.

[0032] Along arm 4, arm actuator 41 is located closest to base 10, arm actuator 42 is located second closest to base 10, and hand actuator 43 is located farthest from base 10. Located closest to base 10 includes being located within base 10.

[0033] At least a portion of the multi-jointed arm 3 is positioned within the conveying space S01 to enable conveying of substrates W. For example, at least a portion of the multi-jointed arm 3 is positioned within the conveying space S01 via an opening OP1 provided in the bottom plate 92. This can suppress the entry of dust into the chamber compared to providing an opening OP1 in the top plate 91 for transporting the multi-jointed arm 3 into the conveying space S01. The robot 2 may further include a flange 30. The flange 30 supports the base 10 and seals the opening OP1.

[0034] When the flange 30 closes the opening OP1, at least the arm 4 and hand 20 are located within the transport space S01. The base 10 can be located either within or outside the transport space S01. For example, the base 10 can be located outside the transport space S01. By locating the base 10 outside the transport space S01, the transport space S01 can be reduced in size, thereby reducing the energy required to create a vacuum in the transport space S01.

[0035] The flange 30 extends to separate the base 10 from the arm 4 and hand 20, thereby closing the opening OP1. The flange 30 has a longitudinal direction D1. For example, the flange 30 extends along a plane including the longitudinal direction D1 and a transverse direction D2 perpendicular to the longitudinal direction D1. The length L1 of the flange 30 in the longitudinal direction D1 is greater than the width W1 of the flange 30 in the transverse direction D2.

[0036] Among the multiple joints J10, the first axis Ax1 of the first joint J11 closest to the base 10 is located between one end 31 of the flange 30 and the center 32 of the flange 30 in the longitudinal direction D1 of the flange 30, close to the one end 31. For example, the first axis Ax1 is located between the one end 31 and the center 32 of the flange 30, and the distance from the first axis Ax1 to the one end 31 is smaller than the distance from the first axis Ax1 to the center 32.

[0037] The shape and layout of the flange 30 can be matched to the opening OP1 required to ensure sufficient workability for assembling the robot 2 into the chamber 90. Therefore, this is effective in achieving a balance between reducing the size of the opening OP1 for assembling the robot 2 into the chamber 90 and ensuring workability for assembling the robot 2 into the chamber 90.

[0038] The chamber 90 may further include a second opening OP2, smaller than the opening OP1, provided in the top plate 91, and a cover member 98 that blocks the second opening OP2. This prevents dust from entering the chamber 90 while also allowing access from above to the multi-jointed arm 3 within the conveying space S01, thereby improving the maintainability of the robot 2. When viewed from above, at least a portion of the second opening OP2 may overlap with the multi-jointed arm 3. This further improves the maintainability of the robot 2.

[0039] like Figure 1 As shown, the length L1 of the flange 30 in the longitudinal direction D1 may be greater than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be further matched to the opening OP1 of a desired sufficient size / shape. The width W1 of the flange 30 may also be smaller than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be further matched to the opening OP1 of a desired sufficient size / shape.

[0040] The longitudinal direction D11 of the cavity 90 may coincide with the longitudinal direction D1 of the flange 30. This prevents the cavity 90 from expanding to provide the opening OP1. Coincidence includes, for example, being parallel to each other.

[0041] The first axis Ax1 may be located between the sidewall 96 (first sidewall) and the sidewall 97 (second sidewall), close to the sidewall 96 (first sidewall). For example, the distance from the first axis Ax1 to the sidewall 96 may be smaller than the distance from the first axis Ax1 to the sidewall 97. The first axis Ax1 may be located between the sidewall 97 (first sidewall) and the sidewall 96 (second sidewall), close to the sidewall 97 (first sidewall). For example, the distance from the first axis Ax1 to the sidewall 97 may be smaller than the distance from the first axis Ax1 to the sidewall 96. This allows for both the reduction in size of the chamber 90 and the movable range of the robot 2 to be achieved.

[0042] The length L2 of the first link 50 may be smaller than the distance W11 between the side walls 96 and 97 and larger than half the distance W11. This allows for a better balance between reducing the size of the chamber 90 and increasing the movable range of the robot 2.

[0043] like Figure 2 as well as Figure 3 As shown, the robot 2 may further include multiple legs 5. The multiple legs 5 protrude downward from the base 10 at multiple locations on the flange 30 surrounding the base 10. For example, the height of each of the multiple legs 5 from the flange 30 may be greater than the height of the base 10 from the flange 30. In the illustrated example, the robot 2 includes four legs 5, but the number of legs 5 is not limited to this. The number and layout of the legs 5 can be modified as appropriate, as long as the multiple legs 5 can stand on the ground and support the flange 30.

[0044] The robot 2 before being assembled into the chamber 90 can be supported by the legs 5 without the base 10 contacting the ground. Therefore, the maintainability of the robot 2 can be improved.

[0045] like Figure 4 As shown, each of the multiple actuators 40 can be positioned at the joint J10 to be driven. Positioning at a joint J10 means positioning the actuators at a location where the axis serving as the center of motion of the joint J10 passes. For example, the arm actuator 41 is positioned at a location where the first axis Ax1 of the first joint J11 passes, the arm actuator 42 is positioned at a location where the second axis Ax2 of the second joint J12 passes, and the hand actuator 43 is positioned at a location where the third axis Ax3 of the third joint J13 passes.

[0046] Each of the plurality of actuators 40 may include a motor such as an electric servo motor, for example. The motor included in each of the plurality of actuators 40 may also be a direct drive motor.

[0047] A "direct-drive motor" in robot 2 refers to a motor in which a rotor, which rotates directly in response to a rotating magnetic field, is fixed to the connecting rod of the multi-jointed arm 3, which is the object of its drive. The rotor isn't limited to direct fixation to the connecting rod; fixation via other components is also possible. It's sufficient that at least the connecting rod and rotor are fixed to each other in a manner that prevents relative movement.

[0048] Since the motors included in the plurality of actuators 40 are direct drive motors, each joint J10 is driven without intervening mobility transmission elements such as gears and belts. This is effective in improving the positioning accuracy of the substrate W.

[0049] For example, the arm actuator 41 includes the arm motor 101 (base motor, first arm motor) as a direct drive motor, the arm actuator 42 includes the arm motor 201 (second arm motor) as a direct drive motor, and the hand actuator 43 includes the hand motor 301 as a direct drive motor.

[0050] The robot 2 may also include a wiring space S10 and a cable C10. The wiring space S10 is formed inside the multi-joint arm 3 in a manner that is sealed inside the chamber 90 (inside the conveying space S01) and communicates with the outside of the chamber 90. For example, the wiring space S10 may be airtightly separated from the conveying space S01 (the internal space of the chamber 90). The cable C10 is wired from outside the conveying space S01 to the actuator 40 located in the conveying space S01 among the multiple actuators 40 via the wiring space S10. Even when the conveying space S01 is set to a vacuum, since the wiring space S10 is maintained at the air pressure outside the conveying space S01, the generation of gas from the cable C10 into the conveying space S01 is suppressed.

[0051] The wiring space S10 being sealed within the conveying space S01 means that, within the conveying space S01, the interior of the wiring space S10 is airtightly isolated from the exterior of the wiring space S10. For example, the wiring space S10 includes the interior space 11 of the base 10, the interior space 52 of the first link 50, and the interior space 62 of the second link 60. The interior spaces 11, 52, and 62 are interconnected, and the interior space 11 is connected to the exterior of the conveying space S01. The robot 2 may also include multiple cables C10 that are routed from a controller outside the conveying space S01 to the multiple actuators 40 via the wiring space S10.

[0052] The multi-jointed arm 3 connects a base-side link connected to the end of the base 10 and a hand-side link connected to the end of the hand 20 via multiple joints J10. Connecting to the end of the base 10 includes connecting to the end of the base 10 via other links. Connecting to the end of the hand 20 includes connecting to the end of the hand 20 via other links. The base-side link connected to the end of the base 10 includes the base 10 itself. The hand-side link connected to the end of the hand 20 includes the hand 20 itself.

[0053] For example, the first joint J11 connects the base 10 (base-side link) to the first link 50 (hand-side link). The second joint J12 connects the first link 50 (base-side link) to the second link 60 (hand-side link). The third joint J13 connects the second link 60 (base-side link) to the hand 20 (hand-side link).

[0054] Each of the plurality of actuators 40 includes a motor having a stator fixed to the base-side link and an output shaft fixed to the hand-side link, and is rotated about the axis of the joint J10 by a rotating magnetic field generated by the stator.

[0055] For example, the arm motor 101 includes a stator 115 fixed to the base 10 and an output shaft 120 fixed to the first link 50, which rotates about the first axis Ax1 of the first joint J11 due to the rotating magnetic field generated by the stator 115. The arm motor 201 includes a stator 215 fixed to the first link 50 and an output shaft 220 fixed to the second link 60, which rotates about the second axis Ax2 of the second joint J12 due to the rotating magnetic field generated by the stator 215. The hand motor 301 includes a stator 342 fixed to the second link 60 and an output shaft 350 fixed to the hand 20, which rotates about the third axis Ax3 of the third joint J13 due to the rotating magnetic field generated by the stator 342. By fixing the stators of each motor to the base-side link, the wiring paths to each motor can be shortened. This shortened wiring path to each motor also helps to further suppress the generation of gas from each cable C10.

[0056] The arm motor 101 may further include a through-hole 123 that passes through the output shaft 120 and forms part of the wiring space S10. The arm motor 201 may further include a through-hole 223 that passes through the output shaft 220 and forms part of the wiring space S10. By using the through-holes 123 and 223 as part of the wiring space S10, the wiring space S10 can be formed while suppressing the increase in size of the multi-jointed arm 3.

[0057] The multi-jointed arm 3 may further include a second hand 70 that rotates about a third axis Ax3 (hand axis) common to the hand 20. The second hand 70 supports the substrate W horizontally, similarly to the hand 20.

[0058] The hand motor 301 may be a two-axis direct drive motor that independently rotates the hand 20 and the second hand 70. This allows for both high positioning accuracy and miniaturization.

[0059] The following further illustrates the configurations of the arm motor 101 (first arm motor) and its periphery, the arm motor 201 (second arm motor) and its periphery, and the hand motor 301 and its periphery.

[0060] 〔First arm motor〕

[0061] like Figure 5 As shown, the base 10 has a base shell 12 including an internal space 11 that opens upward. The flange 30 is mounted on the base shell 12 in a manner that blocks the upward opening of the internal space 11 and extends outward from the base shell 12 throughout the entire circumference. The arm motor 101 is arranged in the internal space 11 of the base 10 below the flange 30. The arm motor 101 is a radial clearance motor and has a main body 110, an output shaft 120, bearings 124, 125, a motor cover 116 and a rotation sensor 150. The output shaft 120 protrudes upward from the internal space 11, passes through the flange 30 and is fixed to the first connecting rod 50. For example, the flange 30 includes an opening 33 that opens upward and downward, and the output shaft 120 protrudes out of the internal space 11 through the opening 33 and is fixed to the first connecting rod 50. The main body 110 is fixed to the base 10 in the internal space 11 , and the output shaft 120 is rotated about the first axis Ax1 by a rotating magnetic field about the first axis Ax1 .

[0062] The main body 110 includes a motor housing 111, a fixed shaft 112, a through-hole 114, and a stator 115. The motor housing 111 is open upward and downward, houses the other components of the main body 110, and is fixed to the base 10. The fixed shaft 112 is disposed within the motor housing 111 and fixed to the motor housing 111 so as to extend along the first axis Ax1. For example, the fixed shaft 112 includes a flange 113 that extends along the entire circumference of the lower portion of the motor housing 111 to a position outside the inner circumference of the motor housing 111. The flange 113 is fixed to the motor housing 111 by bolts or the like.

[0063] The fixed shaft 112 may also include a through-hole 114 that opens upward and downward along the first axis Ax1. The stator 115 is cylindrical and housed within the motor housing 111, surrounding the fixed shaft 112. The stator 115 includes a yoke secured to the inner circumference of the motor housing 111, for example, by shrink fit, and a plurality of coils mounted on the yoke to surround the fixed shaft 112. These coils generate a rotating magnetic field in response to the supply of power.

[0064] The output shaft 120 includes a rotor 121 and a protruding shaft 122. The rotor 121 is cylindrical and is housed within the motor housing 111, further inward than the stator 115, surrounding the fixed shaft 112. The rotor 121 comprises, for example, an iron core and a plurality of permanent magnets disposed on the iron core to surround the fixed shaft 112. The rotor 121 and the stator 115 face each other in a radial direction perpendicular to the first axis Ax1 and are directly affected by the rotating magnetic field generated by the stator 115.

[0065] The protruding shaft 122 is fixed to the upper end of the rotor 121, protruding upward, and passing through the flange 30 to be fixed to the first link 50. The arm motor 101 may also have a through hole 123 that passes through the protruding shaft 122 along the first axis Ax1 and connects the internal space 11 of the base 10 with the internal space 52 of the first link 50.

[0066] For example, the first link 50 includes an opening 53 that connects the through-hole 123 with the internal space 52. Furthermore, the through-hole 123 communicates with the internal space 11 of the base 10 via the through-hole 114. Thus, the through-hole 123 and the through-hole 114 form part of the wiring space S10, and the internal space 52 of the first link 50 communicates with the internal space 11 of the base 10.

[0067] The bearings 124 and 125 are, for example, ball-type radial bearings and are arranged vertically between the outer circumference of the fixed shaft 112 and the inner circumference of the rotor 121. The bearings 124 and 125 are respectively held by the fixed shaft 112 and hold the rotor 121 for rotation about the first axis Ax1.

[0068] The motor cover 116 closes the upward opening of the motor housing 111 on the outer periphery of the protruding shaft 122. The motor cover 116 extends from the protruding shaft 122 over the entire circumference of the motor housing 111 to a position outside the inner periphery of the motor housing 111 and is fixed to the motor housing 111 from above by bolts or the like.

[0069] The rotation sensor 150 detects the rotation of the output shaft 120. For example, the rotation sensor 150 is a rotary encoder and has a disk 151 and a sensor head 152 provided in the motor housing 111. The disk 151 holds a pulse pattern arranged in a circumferential direction around the first axis Ax1 and is mounted below the rotor 121. The sensor head 152 is an optical sensor that reads the pulse pattern of the disk 151 at a fixed position in the motor housing 111. The sensor head 152 generates a pulse signal corresponding to the read pulse pattern. The sensor head 152 is mounted on the flange 113 of the fixed shaft 112, for example. For example, based on the counting result of the pulse signal generated by the sensor head 152, the rotation sensor 150 outputs detection data indicating the rotation position (rotation angle) of the output shaft 120 as the detection result of the rotation of the output shaft 120.

[0070] The robot 2 may further include a hand-side sealing member 130 that seals between the first link 50 (hand-side link) and the protruding shaft 122, and a base-side sealing member 140 that seals between the base 10 (base-side link) and the protruding shaft 122, corresponding to the arm motor 101. This facilitates sealing of the wiring space S10.

[0071] Sealing the space between the first link 50 and the protruding shaft 122 means substantially preventing communication between the transport space S01 and the wiring space S10 via the first link 50 and the protruding shaft 122. Sealing the space between the base 10 and the protruding shaft 122 means substantially preventing communication between the transport space S01 and the wiring space S10 via the base 10 and the protruding shaft 122. Communication between the transport space S01 and the wiring space S10 includes communication between the transport space S01 and the wiring space S10 via the outside of the transport space S01.

[0072] The hand-side seal member 130 includes a flange 131, an inner seal 132, and an outer seal 133. The flange 131 is attached to the end of the protruding shaft 122 by bolting, etc., extending over the entire circumference to a position outside the inner circumference of the opening 53 of the first link 50, and is fixed to the first link 50 by bolting, etc. The flange 131 includes a through-hole 134 that connects the opening 53 of the first link 50 with the through-hole 123 of the protruding shaft 122.

[0073] The inner seal 132 seals between the protruding shaft 122 and the flange 131. The inner seal 132 is, for example, an O-ring and is disposed between the protruding shaft 122 and the flange 131 to surround the through-holes 123 and 134 and is in close contact with the protruding shaft 122 and the flange 131 over the entire circumference.

[0074] The outer seal 133 seals between the first link 50 and the flange 131. The outer seal 133 is, for example, an O-ring and is disposed between the flange 131 and the first link 50 to surround the opening 53 and the through-hole 134 and is in close contact with the flange 131 and the first link 50 over the entire circumference.

[0075] The base-side sealing member 140 seals between the flange 30 and the protruding shaft 122. Sealing between the flange 30 and the protruding shaft 122 means substantially preventing communication between the conveying space S01 and the wiring space S10 via the flange 30 and the protruding shaft 122.

[0076] The base-side sealing member 140 may also include a mechanical seal that allows the protruding shaft 122 to rotate relative to the base 10 and is in close contact with the protruding shaft 122. A mechanical seal seals between two components that rotate relative to each other. The mechanical seal comprises a stationary ring fixed to one component and a rotating ring fixed to the other component. The contact surface between the stationary ring and the rotating ring allows the other component to rotate relative to the one component, while also sealing the one component against the other.

[0077] By using a mechanical seal, the wiring space S10 can be sealed with a small driving resistance. Therefore, both high positioning accuracy and sealing of the wiring space S10 can be achieved.

[0078] The base-side seal member 140 can also be attached to the base 10 in a removable state from the main body 110. While the base-side seal member 140 may wear out due to friction with the protruding shaft 122, the worn base-side seal member 140 can be easily replaced by being removed from the main body 110. Therefore, the robot 2 is effective in both suppressing gas generation within the chamber 90 and ensuring maintainability. The removable state means that it can be removed non-destructively by, for example, releasing bolts.

[0079] For example, the base side sealing member 140 includes a cover 141, an outer seal 147, and an inner seal 148. The cover 141 is mounted on the base 10 from the outside. For example, the cover 141 is mounted on the flange 30. The outer seal 147 seals between the cover 141 and the base 10. The outer seal 147 seals between the cover 141 and the flange 30. The inner seal 148 allows the protruding shaft 122 to rotate relative to the cover 141 and seals between the cover 141 and the protruding shaft 122. The inner seal 148 may also be the above-mentioned mechanical seal. According to the structure of the base side sealing member 140 including the cover 141, the outer seal 147, and the inner seal 148, it is possible to take into account both the reliability of the seal and the maintainability of the base side sealing member 140.

[0080] Sealing the cover 141 and the flange 30 using the outer seal 147 is not necessarily limited to the outer seal 147 being in close contact with both the cover 141 and the flange 30. For example, sealing the cover 141 and the flange 30 may include the outer seal 147 being in close contact with other components airtightly connected to the cover 141 and the flange 30. Sealing the cover 141 and the protruding shaft 122 using the inner seal 148 is not necessarily limited to the inner seal 148 being in close contact with both the cover 141 and the protruding shaft 122. For example, sealing the cover 141 and the protruding shaft 122 may include the inner seal 148 being in close contact with other components airtightly connected to the cover 141 and the protruding shaft 122.

[0081] For example, the cover 141 may be airtightly connected to the motor cover 116, and the inner seal 148 may be in close contact with the motor cover 116 and the protruding shaft 122, thereby sealing the gap between the cover 141 and the protruding shaft 122. For example, if the inner seal 148 is a mechanical seal as described above, the stationary ring of the inner seal 148 may be held in close contact with the inner circumference of the motor cover 116, and the rotating ring of the inner seal 148 may be held in close contact with the outer circumference of the protruding shaft 122.

[0082] The base 10 may also include a motor bracket 13 and a lifting actuator 14. The main body 110 is fixed to the motor bracket 13. For example, a motor housing 111 is fixed to the motor bracket 13. The lifting actuator 14 is fixed to the flange 30 in the internal space 11 and raises and lowers the motor bracket 13. This causes the main body 110, including the stator 115, to rise and fall. An example of the lifting actuator 14 is a ball screw linear actuator.

[0083] The main body 110 is raised and lowered by the lifting actuator 14, and the arm 4 and the hand 20 are raised and lowered in the transfer space S01. This allows the substrate W to be transferred between a transfer source and a transfer destination having different heights.

[0084] When the base 10 has the lifting actuator 14, the cover 141 may be configured to expand and contract as the body 110 is raised and lowered by the lifting actuator 14. This allows for both the mobility of the protruding shaft 122 in the lifting and rotational directions and the sealing of the transport space S01 to be achieved.

[0085] If inner seal 148 is a mechanical seal, cover 141 functions as a telescopic seal, sealing the mechanical seal against flange 30 and extending and contracting as body 110 and the mechanical seal are raised or lowered. As described above, the mechanical seal comprises a stationary ring and a rotating ring. The stationary ring is fixed to cover 141, and the rotating ring is fixed to protruding shaft 122. Because the stationary ring and the rotating ring must remain in contact with each other, the rotating ring, which is in close contact with protruding shaft 122, cannot be raised or lowered relative to the stationary ring, which is in close contact with cover 141. If cover 141 functions as a telescopic seal, the expansion and contraction of cover 141 allows the stationary ring, which is in close contact with cover 141, and the rotating ring, which is in close contact with protruding shaft 122, to be raised or lowered together.

[0086] By combining the mechanical seal and the telescopic seal, the wiring space S10 can be sealed while minimizing the driving resistance in both the lifting and rotational directions.

[0087] For example, the cover 141 includes a first cover 142, a second cover 144, an intermediate seal 149, and an expansion and contraction portion 146. The first cover 142 surrounds the protruding shaft 122, extends from the protruding shaft 122 to a position outside the inner periphery of the opening 33, and is attached to the flange 30 from above by bolt fastening or the like. Attachment to the flange 30 from above includes attachment to the base 10 from outside the base 10 (base-side link).

[0088] Second cover 144 surrounds protruding shaft 122 below first cover 142, extending from protruding shaft 122 to a position outside the inner periphery of motor cover 116 along its entire circumference. It is attached to motor cover 116 from above by bolting, etc. The outer diameter of second cover 144 may be smaller than the inner diameter of opening 33. This allows the entire cover 141 to be attached from above flange 30 through opening 33.

[0089] The outer seal 147 seals the space between the first cover 142 and the flange 30. For example, the outer seal 147 is an O-ring, which is positioned between the first cover 142 and the flange 30 to surround the protruding shaft 122 and maintains close contact with the first cover 142 over its entire circumference. The intermediate seal 149 seals the space between the second cover 144 and the motor cover 116. For example, the intermediate seal 149 is an O-ring, which is positioned between the second cover 144 and the motor cover 116 to surround the protruding shaft 122 and maintains close contact with the second cover 144 and the motor cover 116 over their entire circumference.

[0090] The telescopic portion 146 is a bellows-shaped hose that surrounds the protruding shaft 122 between the first cover 142 and the second cover 144. It expands and contracts as the main body 110 is raised or lowered by the lifting actuator. The upper end of the telescopic portion 146 is airtightly connected to the first cover 142 throughout its entire circumference, while the lower end of the telescopic portion 146 is airtightly connected to the second cover 144 throughout its entire circumference.

[0091] The flange 30 may also include a first flange 35, a second flange 36, an adjustment plate 37, and a plurality of fastening members 38. The first flange 35 faces the interior of the chamber 90 (the conveying space S01). For example, the first flange 35 faces upward. The second flange 36 overlaps below the first flange 35 and faces outward from the chamber 90. For example, the second flange 36 faces downward. The adjustment plate 37 is inserted between the first and second flanges 35, 36, and adjusts the inclination of the second flange 36 relative to the first flange 35. The plurality of fastening members 38 fasten the second flange 36 to the first flange 35.

[0092] The lifting actuator 14 may be fixed to the second flange 36 . The opening 33 may be formed to pass through both the first flange 35 and the second flange 36 , and the protruding shaft 122 may pass through the second flange 36 and the first flange 35 and be fixed to the first link 50 .

[0093] The second flange 36 is secured to the first flange 35 via an adjustment plate 37. By locally disposing the adjustment plate 37 between the second and first flanges 36 and modifying the position, shape, and dimensions of the adjustment plate 37, the inclination of the second flange 36 relative to the first flange 35 can be adjusted. Because the lift actuator 14 is fixed to the second flange 36, the inclination of the second flange 36 relative to the first flange 35 can be adjusted to adjust the position of the robot 2 in the conveying space S01. In this way, the flange 30 can be used to adjust the position of the robot 2.

[0094] The base-side sealing member 140 can also seal between the inner seal 148 and the first flange 35. For example, the first cover 142 is attached to the first flange 35 from above. The outer seal 147 is disposed between the first cover 142 and the first flange 35 so as to surround the protruding shaft 122 and is in close contact with the first cover 142 and the first flange 35 over the entire circumference.

[0095] The telescopic seal can easily absorb changes in the inclination of the second flange 36 relative to the first flange 35 , and can maintain sealing performance between the inside of the transport space S01 and the outside of the transport space S01 .

[0096] Alternatively, the first flange 35 and the second flange 36 may separate the base 10 from the arm 4 and the hand 20, respectively, with the first flange 35 extending from the entire periphery of the second flange 36. By providing the first flange 35 and the second flange 36 with sufficient extension to separate the base 10 from the arm 4 and the hand 20, sufficient space for the adjustment plate 37 can be provided. Furthermore, by preventing the second flange 36 from entering the transport space S01, the seal between the interior of the transport space S01 and the exterior of the transport space S01 can be easily maintained.

[0097] Second arm motor

[0098] like Figure 6 As shown, the second link 60 is located above the first link 50. The first link 50 includes an opening 54 that opens upward. At least a portion of the arm motor 201 is housed in the internal space 52 through the opening 54 from above.

[0099] The arm motor 201 is a radial clearance motor having a main body 210, an output shaft 220, bearings 224 and 225, and a rotation sensor 260. The output shaft 220 protrudes upward from the interior space 52 and is fixed to the second link 60. The main body 210 is fixed to the first link 50, and the output shaft 220 rotates about the second axis Ax2 by a rotating magnetic field around the second axis Ax2.

[0100] The main body 210 includes a motor housing 211, a fixed shaft 212, a through-hole 214, a stator 215, and a motor seal 216. The motor housing 211 is open upward and downward, houses the other components of the main body 210, and is fixed to the first connecting rod 50. For example, the motor housing 211 is mounted on the first connecting rod 50 from above around the opening 54 by bolting. The fixed shaft 212 is arranged in the motor housing 211 and is fixed to the motor housing 211 in a manner extending along the second axis Ax2. For example, the fixed shaft 212 includes a flange 213 that extends below the motor housing 211 around the entire circumference to a position outside the inner circumference of the motor housing 211, and the flange 213 is fixed to the motor housing 211 by bolting. The fixed shaft 212 may also include a through-hole 214 that is open upward and downward along the second axis Ax2.

[0101] Stator 215 is cylindrical and housed within motor housing 211, surrounding fixed shaft 212. Stator 215 includes a yoke secured to the inner circumference of motor housing 211, for example, by shrink fit, and a plurality of coils mounted on the yoke, surrounding fixed shaft 212. These coils generate a rotating magnetic field in response to the supply of power.

[0102] The motor seal 216 seals the motor housing 211 and the first connecting rod 50. For example, the motor seal 216 is an O-ring, which is disposed between the outer circumference of the motor housing 211 and the inner circumference of the opening 54 and is in close contact with the outer circumference of the motor housing 211 and the inner circumference of the opening 54 over the entire circumference.

[0103] The output shaft 220 includes a rotor 221 and a protruding shaft 222. The rotor 221 is cylindrical and is housed within the motor housing 211, further inward than the stator 215, surrounding the fixed shaft 212. The rotor 221 includes, for example, an iron core and a plurality of permanent magnets disposed on the iron core to surround the fixed shaft 212. The rotor 221 faces the stator 215 in a radial direction perpendicular to the second axis Ax2 and is directly affected by the rotating magnetic field generated by the stator 215.

[0104] The protruding shaft 222 is fixed to the upper end of the rotor 221, protrudes upward, and is fixed to the second link 60. The arm motor 201 may also have a through hole 223 that passes through the protruding shaft 222 along the second axis Ax2 and connects the internal space 52 of the first link 50 and the internal space 62 of the second link 60.

[0105] For example, the second link 60 has an opening 63 formed therein, which allows the through-hole 223 to communicate with the internal space 62. Furthermore, the through-hole 223 communicates with the internal space 52 of the first link 50 via the through-hole 214. Thus, the through-hole 223 and the through-hole 214 form part of the wiring space S10, and the internal space 62 of the second link 60 communicates with the internal space 52 of the first link 50.

[0106] The bearings 224 and 225 are, for example, ball-type radial bearings and are arranged vertically between the outer circumference of the fixed shaft 212 and the inner circumference of the rotor 221. The bearings 224 and 225 are respectively held by the fixed shaft 212 and hold the rotor 221 for rotation about the second axis Ax2.

[0107] The rotation sensor 260 detects the rotation of the output shaft 220. For example, the rotation sensor 260 has a disk 261 and a sensor head 262 provided in the motor housing 211. The disk 261 holds a pulse pattern arranged in the circumferential direction around the second axis Ax2 and is installed below the rotor 221. The sensor head 262 is an optical sensor that reads the pulse pattern of the disk 261 at a fixed position in the motor housing 211. The sensor head 262 generates a pulse signal corresponding to the read pulse pattern. The sensor head 262 is mounted on the flange 213 of the fixed shaft 212, for example. For example, the rotation sensor 260 outputs detection data indicating the rotation position (rotation angle) of the output shaft 220 as a detection result of the rotation of the output shaft 220 based on the counting result of the pulse signal generated by the sensor head 262.

[0108] The robot 2 may further include a hand-side sealing member 230 that seals between the second link 60 (hand-side link) and the protruding shaft 222, and a base-side sealing member 240 that seals between the first link 50 (base-side link) and the protruding shaft 222, corresponding to the arm motor 201. This facilitates sealing of the wiring space S10.

[0109] Sealing the space between the second link 60 and the protruding shaft 222 means substantially preventing communication between the transport space S01 and the wiring space S10 via the second link 60 and the protruding shaft 222. Sealing the space between the first link 50 and the protruding shaft 222 means substantially preventing communication between the transport space S01 and the wiring space S10 via the first link 50 and the protruding shaft 222.

[0110] The hand-side seal member 230 includes an edge seal 231. The edge seal 231 is, for example, an O-ring and is disposed between the protruding shaft 222 and the second link 60 to surround the through-hole 223 and the opening 63 and is in close contact with the protruding shaft 222 and the second link 60 over its entire circumference.

[0111] The base-side sealing member 240 seals between the first link 50 and the protruding shaft 222. Sealing between the first link 50 and the protruding shaft 222 means substantially preventing communication between the conveying space S01 and the wiring space S10 via the first link 50 and the protruding shaft 222.

[0112] The base side sealing member 240 may also include a mechanical seal that allows the protruding shaft 222 to rotate relative to the first connecting rod 50 and is in close contact with the protruding shaft 222. By adopting a mechanical seal, the wiring space S10 can be sealed with a small driving resistance. Therefore, it is possible to achieve both high positioning accuracy and sealing of the wiring space S10. Sealing between the first connecting rod 50 and the protruding shaft 222 is not necessarily limited to making the base side sealing member 240 in close contact with both the first connecting rod 50 and the protruding shaft 222. For example, sealing between the first connecting rod 50 and the protruding shaft 222 includes making the base side sealing member 240 in close contact with other components connected to the first connecting rod 50 in an airtight state and the protruding shaft 222.

[0113] As described above, the motor housing 211 is airtightly connected to the first link 50 via the motor seal 216. Therefore, the base-side seal member 240 can also seal between the first link 50 and the protruding shaft 222 by being in close contact with the motor housing 211 and the protruding shaft 222.

[0114] The base-side seal member 240 can also be attached to the first link 50 in a state that is detachable from the main body 210. While the base-side seal member 240 may wear out due to friction with the protruding shaft 222, the worn base-side seal member 240 can be easily replaced by being detached from the main body 210. Therefore, the robot 2 is effective in achieving both suppression of gas generation within the chamber 90 and ease of maintenance.

[0115] For example, the base-side sealing member 240 includes a cover 241, an outer seal 243, and an inner seal 244. The cover 241 is attached to the first link 50 from the outside.

[0116] The outer seal 243 seals between the cover 241 and the first link 50. The inner seal 244 allows the protruding shaft 222 to rotate relative to the cover 241 and seals between the cover 241 and the protruding shaft 222. The structure of the base-side sealing member 240 including the cover 241, the outer seal 243, and the inner seal 244 allows for both sealing reliability and ease of maintenance of the base-side sealing member 240.

[0117] Attaching the cover 241 to the first link 50 is not necessarily limited to attaching the cover 241 directly to the first link 50. For example, attaching the cover 241 to the first link 50 may include attaching the cover 241 to another member fixed to the first link 50. For example, the cover 241 surrounds the protruding shaft 222, extends over the entire circumference to a position outside the inner circumference of the motor housing 211, and is attached to the motor housing 211 from above by bolt fastening or the like.

[0118] Sealing the cover 241 and the first connecting rod 50 with the outer seal 243 is not necessarily limited to ensuring close contact between the outer seal 243 and both the cover 241 and the first connecting rod 50. For example, sealing the cover 241 and the first connecting rod 50 may include ensuring close contact between the outer seal 243 and other components airtightly connected to the first connecting rod 50 and the cover 241. For example, the outer seal 243 is an O-ring, which is disposed between the motor housing 211 and the cover 241 to surround the protruding shaft 222 and maintains close contact with the motor housing 211 and the cover 241 over its entire circumference.

[0119] The inner seal 244 is disposed between the outer circumferential surface of the protruding shaft 222 and the inner circumferential surface of the cover 241, and is in close contact with the cover 241 and the protruding shaft 222 over its entire circumference. For example, the inner seal 244 is the aforementioned mechanical seal, and the stationary ring of the inner seal 244 is held in close contact with the inner circumferential surface of the cover 241, while the rotating ring of the inner seal 244 is held in close contact with the outer circumferential surface of the protruding shaft 222.

[0120] Sealing between the cover 241 and the protruding shaft 222 by the inner seal 244 is not necessarily limited to bringing the inner seal 244 into close contact with both the cover 241 and the protruding shaft 222. For example, sealing between the cover 241 and the protruding shaft 222 may include bringing the inner seal 244 into close contact with other components airtightly connected to the cover 241 and the protruding shaft 222.

[0121] Alternatively, the cover 241 may bulge out from the first link 50 (first link) toward the second link 60 (second link), so that the inner seal 244 is positioned farther from the first link 50 than the outer seal 243 in the direction along the second axis Ax2. This allows the sealing capacity of the outer seal 243 and the sealing capacity of the inner seal 244 to be independently ensured. Consequently, both sealing reliability and maintainability of the base-side sealing member 240 can be further balanced.

[0122] The second link 60 may further include a recessed portion 65. The recessed portion 65 opens toward the first link 50 and receives the cover 241 bulging out from the first link 50. This can suppress an increase in size of the robot 2 due to the sealing member.

[0123] The first connecting rod 50 may also have an opening 56. The opening 56 exposes the through hole 223 to the outside toward the side opposite to the side where the second connecting rod 60 is located (below). For example, the opening 56 exposes the through hole 223 in a direction away from the second connecting rod 60. The multi-jointed arm 3 may also have a back cover 251 that blocks the opening 56. The multi-jointed arm 3 may also have a back sealing member 250 that blocks the opening 56 in a manner that seals the through hole 223 within the internal space 52. By removing the back sealing member 250, cables and the like can be easily routed from the through hole 223 to the inside of the first connecting rod 50.

[0124] The back seal member 250 includes a back cover 251 and a cover seal 253. The back cover 251 extends all the way outward from the inner periphery of the opening 56, thereby sealing the opening 56 from below. The back cover 251 is attached to the first link 50 by bolting or the like. The cover seal 253 seals the gap between the back cover 251 and the first link 50. The cover seal 253 is, for example, an O-ring and is positioned between the first link 50 and the back cover 251 to surround the opening 56, maintaining close contact with both the first link 50 and the back cover 251 over the entire circumference.

[0125] The back cover 251 may have a recessed portion 252 facing the interior of the first link 50. The recessed portion 252 may also be open toward the output shaft 220. The recessed portion 252 connects the through-hole 223 with the internal space 52 of the first link 50. By making the back cover 251 also constitute a part of the wiring space S10, further space saving of the arm 4 can be achieved.

[0126] 〔Hand Motor〕

[0127] like Figure 7 As shown, the hand 20 is positioned above the second link 60, and the second hand 70 is positioned above the hand 20. The hand motor 301 may also include: an output shaft 350 (first output shaft); a stator 342 (first stator) that rotates the hand 20 about the third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 350; an output shaft 320 (second output shaft) that passes through the output shaft 350 along the third axis Ax3; and a stator 315 (second stator) that rotates the second hand 70 about the third axis Ax3 by applying a rotating magnetic field to the output shaft 320.

[0128] By utilizing the interior of the output shaft 350 as a space for arranging the output shaft 320 , it is possible to further reduce the size of the hand motor 301 .

[0129] Alternatively, the stator 342 and the stator 315 may be fixed to the second link 60 (base-side link), the output shaft 350 may be fixed to the hand 20, the output shaft 320 may pass through the output shaft 350 and the hand 20 and be fixed to the second hand 70, and the stator 342 may be located between the hand 20 and the stator 315. This allows for further miniaturization of the hand motor 301.

[0130] The hand motor 301 may also have: a first bearing, which is retained on the second connecting rod 60, and keeps the output shaft 320 or the output shaft 350 rotating around the third axis Ax3; and a second bearing, which is retained on the output shaft 320 between the outer periphery of the output shaft 320 and the inner periphery of the output shaft 350, and keeps the output shaft 350 rotating around the third axis Ax3.

[0131] For example, the hand motor 301 has: bearings 323, 324 (first bearings), which are retained on the second connecting rod 60 to retain the output shaft 320 for rotation around the third axis Ax3; and bearings 355, 356 (second bearings), which are retained on the output shaft 320 to retain the output shaft 350 for rotation around the third axis Ax3.

[0132] By utilizing the space between the output shaft 350 and the output shaft 320 as a bearing arrangement space, the output shaft 350 and the output shaft 320 are held together, thereby achieving both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70 .

[0133] Alternatively, the stator 342 may be mounted on the second link 60 from the side (e.g., the top) where the hand 20 and the second hand 70 are arranged, and the stator 315 may be mounted on the second link 60 from the side opposite to the side (e.g., the bottom) where the hand 20 and the second hand 70 are arranged. By being able to mount the stator 315 and the stator 342 from different directions, the assemblability of the robot 2 can be improved.

[0134] Alternatively, the hand motor 301 further includes a fixed shaft 312 fixed to the second link 60 and inserted into the output shaft 320 along the third axis Ax3, and the bearings 323 and 324 are held on the fixed shaft 312 between the outer periphery of the fixed shaft 312 and the inner periphery of the output shaft 320 to hold the output shaft 320.

[0135] The hand motor 301 may also be a radial gap motor. For example, the output shaft 320 may be positioned opposite the stator 315 in a radial direction perpendicular to the third axis Ax3, receiving the rotating magnetic field from the stator 315. The output shaft 350 may also be positioned opposite the stator 342 in the aforementioned radial direction, receiving the rotating magnetic field from the stator 342.

[0136] As an example, hand motor 301 includes a main body 310, an output shaft 320, bearings 323 and 324, a rotation sensor 330, a main body 340, an output shaft 350, bearings 355 and 356, and a rotation sensor 360. Second link 60 includes a downwardly open opening 68. At least a portion of main body 310 is housed in internal space 62 from below through opening 68.

[0137] The main body 310 includes a motor housing 311, a fixed shaft 312, a stator 315, a motor seal 316, and a motor seal 317. The motor housing 311 is open upward and downward, houses the other components of the main body 310, and is fixed to the second connecting rod 60. For example, the motor housing 311 is attached to the second connecting rod 60 from below around the opening 68 by bolting. The fixed shaft 312 is arranged in the motor housing 311 and is fixed to the motor housing 311 so as to extend along the third axis Ax3. For example, the fixed shaft 312 includes a flange 313 that extends below the motor housing 311 and extends to a position outside the inner circumference of the motor housing 311. The flange 313 is fixed to the motor housing 311 by bolting.

[0138] Stator 315 is cylindrical and housed within motor housing 311, surrounding fixed shaft 312. Stator 315 includes a yoke secured to the inner circumference of motor housing 311, for example, by shrink fit, and a plurality of coils mounted on the yoke, surrounding fixed shaft 312. These coils generate a rotating magnetic field in response to the supply of power.

[0139] The motor seal 316 seals the motor housing 311 and the second connecting rod 60. For example, the motor seal 316 is an O-ring and is disposed between the second connecting rod 60 and the motor housing 311 to surround the opening 68, maintaining tight contact with the second connecting rod 60 and the motor housing 311 throughout its entire circumference. The motor seal 317 seals the motor housing 311 and the flange 313. For example, the motor seal 317 is an O-ring and is disposed between the motor housing 311 and the flange 313 to surround the fixed shaft 312, maintaining tight contact with the motor housing 311 and the flange 313 throughout its entire circumference.

[0140] The output shaft 320 includes a rotor 321 and a protruding shaft 322. The rotor 321 is cylindrical and is housed within the motor housing 311, further inward from the stator 315, surrounding the fixed shaft 312. The rotor 321 comprises, for example, an iron core and a plurality of permanent magnets disposed on the iron core, surrounding the fixed shaft 312. The rotor 321 faces the stator 315 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 315. The protruding shaft 322 is fixed to the upper end of the rotor 321, protruding upward, and is secured to the second hand 70.

[0141] The bearings 323 and 324 are, for example, ball-type radial bearings and are arranged vertically between the outer circumference of the fixed shaft 312 and the inner circumference of the rotor 321. The bearings 323 and 324 are respectively held by the fixed shaft 312 and hold the rotor 321 for rotation about the third axis Ax3.

[0142] The rotation sensor 330 detects the rotation of the output shaft 320. For example, the rotation sensor 330 is a rotary encoder and has a disk 331 and a sensor head 332 provided in the motor housing 311. The disk 331 holds a pulse pattern arranged in a circumferential direction around the third axis Ax3 and is mounted below the rotor 321. The sensor head 332 is an optical sensor that reads the pulse pattern of the disk 331 at a fixed position in the motor housing 311. The sensor head 332 generates a pulse signal corresponding to the read pulse pattern. The sensor head 332 is mounted on the flange 313 of the fixed shaft 312, for example. For example, based on the counting result of the pulse signal generated by the sensor head 332, the rotation sensor 330 outputs detection data indicating the rotation position (rotation angle) of the output shaft 320 as the detection result of the rotation of the output shaft 320.

[0143] The second link 60 further includes an opening 69 that opens upward. At least a portion of the main body 340 is received in the internal space 62 from above through the opening 69.

[0144] The main body 340 includes a motor housing 341, a stator 342, and a motor seal 343. The motor housing 341 is open upward and downward, houses the other components of the main body 340 and the protruding shaft 322 of the output shaft 320, and is fixed to the second connecting rod 60. For example, the motor housing 341 is attached to the second connecting rod 60 from above around the opening 69 by bolting or the like.

[0145] Stator 342 is cylindrical and housed within motor housing 341, surrounding protruding shaft 322. Stator 342 includes a yoke secured to the inner circumference of motor housing 341, for example, by shrink fit, and a plurality of coils mounted on the yoke, surrounding protruding shaft 322. These coils generate a rotating magnetic field in response to the supply of power.

[0146] The motor seal 343 seals between the motor housing 341 and the second link 60. For example, the motor seal 343 is an O-ring and is disposed between the second link 60 and the motor housing 341 to surround the opening 69 and is in close contact with the second link 60 and the motor housing 341 over the entire circumference.

[0147] The output shaft 350 includes a rotor 351 and a protruding shaft 352. The rotor 351 is cylindrical and is housed within the motor housing 341, further inward from the stator 342, surrounding the protruding shaft 322. The rotor 351 includes, for example, an iron core and a plurality of permanent magnets disposed on the iron core to surround the protruding shaft 322. The rotor 351 faces the stator 342 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 342.

[0148] The protruding shaft 352 is cylindrical and surrounds the protruding shaft 322 between the hand 20 and the rotor 351. The protruding shaft 352 is fixed to the upper end of the rotor 351, protrudes upward, and is fixed to the hand 20.

[0149] Bearings 355 and 356 are, for example, ball-type radial bearings and are arranged vertically between the inner circumference of protruding shaft 352 and the outer circumference of protruding shaft 322. Bearings 355 and 356 are respectively held by protruding shaft 322 to hold rotor 351 rotatable about third axis Ax3.

[0150] The rotation sensor 360 detects the rotation of the output shaft 350. For example, the rotation sensor 360 is a rotary encoder having a disk 361 and a sensor head 362. The disk 361 holds a pulse pattern arranged in a circumferential direction around the third axis Ax3 and is mounted below the rotor 351. The sensor head 362 is an optical sensor that reads the pulse pattern of the disk 361 at a fixed position in the main body 340. The sensor head 362 generates a pulse signal corresponding to the read pulse pattern. The sensor head 362 is mounted on the motor housing 311 of the main body 310, for example. For example, based on the counting result of the pulse signal generated by the sensor head 362, the rotation sensor 360 outputs detection data indicating the rotation position (rotation angle) of the output shaft 350 as the detection result of the rotation of the output shaft 350.

[0151] The robot 2 may further include a first hand seal member 370 and a second hand seal member 380 corresponding to the hand motor 301 .

[0152] The first hand sealing member 370 seals the second connecting rod 60 and the protruding shaft 352 in a manner that seals the wiring space S10 in the conveying space S01. For example, the first hand sealing member 370 seals the second connecting rod 60 and the protruding shaft 352 in a manner that airtightly separates the wiring space S10 from the conveying space S01. The first hand sealing member 370 can also be installed on the second connecting rod 60 in a state that can be separated from the main body 340. The first hand sealing member 370 may be worn out due to friction between the first hand sealing member 370 and the protruding shaft 352, but the worn first hand sealing member 370 can be easily replaced by being separated from the main body 340. Therefore, the robot 2 is effective in taking into account both the suppression of gas generation in the chamber 90 and maintainability. Installing the first hand sealing member 370 on the second connecting rod 60 is not necessarily limited to directly installing the first hand sealing member 370 on the second connecting rod 60. For example, attaching the first hand seal member 370 to the second link 60 includes attaching the first hand seal member 370 to another member fixed to the second link 60. For example, the first hand seal member 370 is attached to the motor housing 341 from above.

[0153] For example, the first hand seal member 370 includes an inner seal 371 and a seal cover 372. The inner seal 371 seals the space between the second connecting rod 60 and the protruding shaft 352. Sealing the space between the second connecting rod 60 and the protruding shaft 352 by the inner seal 371 is not necessarily limited to ensuring that the inner seal 371 is in close contact with both the second connecting rod 60 and the protruding shaft 352. For example, sealing the space between the second connecting rod 60 and the protruding shaft 352 may include ensuring that the inner seal 371 is in close contact with other components connected to the second connecting rod 60 in an airtight manner and the protruding shaft 352.

[0154] For example, the inner seal 371 is a mechanical seal. The fixed ring of the inner seal 371 is in close contact with the inner circumference of the motor housing 341, which is airtightly connected to the second connecting rod 60. The rotating ring of the inner seal 371 is in close contact with the outer circumference of the protruding shaft 352. The sealing cover 372 covers the inner seal 371 from above around the protruding shaft 352 and is attached to the motor housing 341 by bolts or the like.

[0155] The second hand seal member 380 seals the space between the protruding shaft 352 and the protruding shaft 322, thereby sealing the wiring space S10 in the conveying space S01. The second hand seal member 380 can also be attached to the protruding shaft 352 in a state that is detachable from the main body 310 and the main body 340. This allows for both sealing reliability and maintainability of the second hand seal member 380.

[0156] For example, the second hand seal member 380 may include a second cover 381, a second outer seal 386, and a second inner seal 387. The second cover 381 surrounds the protruding shaft 322 and is attached to the protruding shaft 352. The second outer seal 386 seals the second cover 381 against the protruding shaft 352. The second inner seal 387 allows the protruding shaft 322 to rotate relative to the second cover 381 and seals the second cover 381 against the protruding shaft 322. This allows for a better balance between sealing reliability and maintainability of the second hand seal member 380.

[0157] The second cover 381 can also hold the hand 20. By using the second cover 381 as a hand holding member, the number of components can be reduced.

[0158] For example, the second cover 381 includes a fitting portion 382, ​​a flange 383, and a fitting portion 384. The fitting portion 382 fits into the protruding shaft 352 from above. The flange 383 extends outward from the outer circumference of the fitting portion 382 over the entire circumference above the fitting portion 382. The fitting portion 384 protrudes further upward from the flange 383 with a smaller outer diameter than the flange 383.

[0159] The flange 383 is attached to the protruding shaft 352 by bolt fastening or the like at a position inside the outer periphery of the fitting portion 384. The hand 20 has an opening 21 corresponding to the fitting portion 384. The fitting portion 384 fits into the opening 21 from below. The flange 383 is attached to the hand 20 by bolt fastening or the like at a position outside the outer periphery of the fitting portion 384.

[0160] The second outer seal 386 seals between the fitting portion 382 and the protruding shaft 352. The second outer seal 386 is, for example, an O-ring, and is disposed between the outer peripheral surface of the fitting portion 382 and the inner peripheral surface of the protruding shaft 352 over the entire circumference.

[0161] The second inner seal 387 is, for example, a mechanical seal. The fixed ring of the second inner seal 387 is held in close contact with the inner circumference of the second cover 381 , and the rotating ring of the second inner seal 387 is held in close contact with the outer circumference of the protruding shaft 322 .

[0162] As exemplified above, by combining the first hand sealing member 370 that seals between the second link 60 and the protruding shaft 352 and the second hand sealing member 380 that seals between the protruding shaft 352 and the protruding shaft 322, it is possible to achieve both miniaturization of the drive system of the hand 20 and the second hand 70 and sealing of the wiring space S10.

[0163] [Variation]

[0164] exist Figure 7, an example is shown in which the motor housing 341 of the main body 340 and the stator 342 are mounted on the second link 60 from above, and the motor housing 311 of the main body 310 and the stator 315 are mounted on the second link 60 from below. However, the main body 310 and the main body 340 may be integrated and mounted on the second link 60 from the same direction. For example, Figure 8 The illustrated hand motor 301 has a motor housing 302 and a motor seal 306 instead of the motor housings 341 , 311 and the motor seal 343 .

[0165] The motor housing 302 houses the stators 342 and 315, the output shafts 350 and 320, and the fixed shaft 312, forming a unit. The motor housing 302 is attached to the second connecting rod 60 from the side where the hand 20 and the second hand 70 are arranged. The motor housing 302 allows the drive systems of the hand 20 and the second hand 70 to be integrally assembled with the second connecting rod 60, thereby improving assembly efficiency.

[0166] The motor seal 306 seals the space between the motor housing 302 and the second connecting rod 60. For example, the motor seal 306 is an O-ring and is disposed between the second connecting rod 60 and the motor housing 302 to surround the opening 69 and is in close contact with the second connecting rod 60 and the motor housing 302 over the entire circumference.

[0167] The motor housing 302 may also include a first housing 303, a second housing 305, and a plurality of fastening members 304. The first housing 303 houses the stator 342. The second housing 305 houses the stator 315. The plurality of fastening members 304, such as bolts, fasten the second housing 305 to the first housing 303. Since the second housing 305 can be mounted to the first housing 303 after the stator 342 and other components are separately assembled with the first housing 303 and the stator 315 and other components are separately assembled with the second housing 305, the ease of assembly is further improved.

[0168] In at least any one of the plurality of actuators 40 that are direct drive motors, the stator may be directly embedded in the base-side link or the hand-side link. Figure 9 In the arm motor 201 , a structure in which the stator 215 is directly embedded in the first link 50 is illustrated.

[0169] The first link 50 is provided with a housing hole 57 that opens upward and downward instead of the opening 54. Also, an opening 58 is formed next to the housing hole 57 so as to communicate the internal space 52 with the downward direction.

[0170] The stator 215 is received in the receiving hole 57 from above and fixed to the inner peripheral surface of the receiving hole 57 by shrink fit, etc. The flange 213 of the fixed shaft 212 is attached to the first link 50 around the receiving hole 57 by bolt fastening, etc.

[0171] The cover 241 of the base-side sealing member 240 is attached to the motor housing 211 around the storage hole 57 by bolt fastening or the like. The outer seal 243 is in close contact with the first link 50 and the cover 241 over the entire circumference of the storage hole 57 .

[0172] The back sealing member 250 seals the entire circumference of the housing hole 57 and the opening 58. When the back sealing member 250 is attached to the first link 50, the recess 252 of the back cover 251 allows the protruding shaft 222 to communicate with the internal space 52.

[0173] When the stator is directly embedded in the connecting rod, it is difficult to replace the motor itself. Therefore, it is more advantageous to be able to remove the base-side sealing member 240 separately from the main body 210 and replace it.

[0174] exist Figure 9 In the embodiment, the fixed shaft 212 is detachably attached to the first link 50. By stabilizing the posture of the protruding shaft 222 using the fixed shaft 212, the sealing reliability of the base-side sealing member 240 can be improved. Furthermore, since the fixed shaft 212 is detachable, the maintainability of the arm motor 201 is improved.

[0175] The fixed shaft 212 is attached to the first link 50 from the side opposite to the side where the second link 60 is located, and the back seal member 250 is attached to the first link 50 so as to seal the space between the fixed shaft 212 and the protruding shaft 222 within the first link 50. This ensures both ease of attachment and detachment of the fixed shaft 212 and a good seal between the fixed shaft 212 and the protruding shaft 222.

[0176] Figure 10 The structure in which the stator 315 and the stator 342 are directly embedded in the second connecting rod 60 in the hand motor 301 is illustrated. The second connecting rod 60 has a first receiving hole 611 and a second receiving hole 612 instead of the opening 68 and the opening 69. The first receiving hole 611 is open on the side (above) where the hand 20 and the second hand 70 are arranged, and receives the stator 342. For example, the first receiving hole 611 is open toward both the hand 20 and the second hand 70. The second receiving hole 612 is open on the opposite side (below) to the side where the hand 20 and the second hand 70 are arranged, and receives the stator 315. For example, the second receiving hole 612 is open in a direction away from both the hand 20 and the second hand 70. The second connecting rod 60 may also have an inward flange 613 that separates the first receiving hole 611 and the second receiving hole 612 and surrounds the protruding shaft 322.

[0177] An opening 614 is formed next to the second receiving hole 612 to allow the internal space 62 to communicate with the bottom. The opening 614 and the second receiving hole 612 may also be connected.

[0178] Stator 342 is received in first receiving hole 611 from above and is directly fixed to the inner surface of first receiving hole 611, for example, by shrink fit. Stator 315 is received in second receiving hole 612 from below and is directly fixed to the inner surface of second receiving hole 612, for example, by shrink fit. By omitting motor housing 311 and motor housing 341, the periphery of hand motor 301 can be further miniaturized.

[0179] The flange 313 of the fixed shaft 312 is attached to the second link 60 around the second receiving hole 612 by bolt fastening or the like.

[0180] The first hand seal member 370 further includes a cover 373 and an outer seal 374. The cover 373 is attached to the second link 60 from the outside. The cover 373 surrounds the protruding shaft 322, extends over the entire circumference to a position outside the inner circumference of the first receiving hole 611, and is attached to the second link 60 from above by bolt fastening or the like.

[0181] The outer seal 374 seals the space between the cover 373 and the second connecting rod 60. For example, the outer seal 374 is an O-ring and is disposed between the cover 373 and the second connecting rod 60 to surround the protruding shaft 352, maintaining close contact with the cover 373 and the second connecting rod 60 over its entire circumference. The inner seal 371 allows the protruding shaft 352 to rotate relative to the cover 373 and seals the space between the cover 373 and the protruding shaft 352. The sealing cover 372 is attached to the cover 373 by bolts or the like.

[0182] The multi-jointed arm 3 may further include a back seal member 390 that seals the second housing hole 612 and the opening 614. The back seal member 390 facilitates sealing the drive system of the hand 20 and the second hand 70, which do not include the motor housings 311 and 341. Removing the back seal member 390 facilitates attachment and detachment of the fixed shaft 312, wiring to the stators 315 and 342, and wiring to the rotation sensors 330 and 360.

[0183] The back sealing member 390 includes a back cover 391 and a cover seal 393. The back cover 391 extends all the way around the second receiving hole 612 and the opening 614 to a position outside the inner periphery, thereby blocking the second receiving hole 612 and the opening 614 from below. The back cover 391 is then attached to the second connecting rod 60 by bolts or the like. The cover seal 393 seals the back cover 391 and the second connecting rod 60. The cover seal 393 is, for example, an O-ring and is positioned between the second connecting rod 60 and the back cover 391 around the second receiving hole 612 and the opening 614, maintaining close contact with the second connecting rod 60 and the back cover 391 all the way around the back receiving hole 612 and the opening 614.

[0184] The back cover 391 may have a recess 392 facing the inside of the second link 60. The recess 392 allows the bearing 323 to communicate with the internal space 62 of the second link 60. By making the back cover 391 also constitute a part of the wiring space S10, further space saving of the arm 4 can be achieved.

[0185] Stator 342 (first stator) and stator 315 (second stator) can also be positioned between rotation sensor 360 (first rotation sensor) and rotation sensor 330 (second rotation sensor). For example, rotation sensor 330 can be positioned below stator 315, while rotation sensor 360 can be positioned above stator 342. With stator 342 secured to the inner surface of first receiving hole 611 and stator 315 secured to the inner surface of second receiving hole 612, rotation sensor 360 and rotation sensor 330 can be easily assembled. This improves assembly efficiency.

[0186] For example, disk 361 of rotation sensor 360 is attached to protruding shaft 352 above rotor 351 and positioned within cover 373. Sensor head 362 is attached to cover 373. Disk 331 of rotation sensor 330 is attached below rotor 321. Sensor head 332 is attached to flange 313. This further improves assemblability.

[0187] Alternatively, a first recess 621 partially separated from the stator 342 may be formed on the inner surface of the first receiving hole 611, and a second recess 622 partially separated from the stator 315 may be formed on the inner surface of the second receiving hole 612. In the rotation sensor 360, the first sensor cable C21 may be routed through the first recess 621. In the rotation sensor 330, the second sensor cable C22 may be routed through the second recess 622. This can prevent the second link 60 from becoming larger while ensuring a secure routing path for the first and second sensor cables C21 and C22.

[0188] like Figure 11 As shown, the robot 2 may also include an axial gap type hand motor 701 instead of the radial gap type hand motor 301. By using radial gap types for the arm motors 101 and 201, which exert a greater torque than the hand motor 701, and using an axial gap type for the hand motor 701, which does not exert a greater torque than the arm motors 101 and 201, it is possible to achieve both high positioning accuracy and miniaturization.

[0189] The hand motor 701 has: an output shaft 740 (first output shaft); a stator 731 (first stator), which rotates the hand 20 around the third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 740; an output shaft 720 (second output shaft), which passes through the output shaft 740 along the third axis Ax3; and a stator 711 (second stator), which rotates the second hand 70 around the third axis Ax3 by applying a rotating magnetic field to the output shaft 720.

[0190] The output shaft 740 includes a rotor 742 (first rotor) that faces the stator 731 along the third axis Ax3 (axial direction) and receives the rotating magnetic field from the stator 731. The output shaft 720 includes a rotor 722 (second rotor) that faces the stator 711 along the third axis Ax3 (axial direction) and receives the rotating magnetic field from the stator 711. This allows the drive system for the multi-stage hand 20 and the second hand 70 to be further reduced in height.

[0191] Alternatively, the stator 731 and the stator 711 are fixed to the second connecting rod 60 (base side connecting rod), the output shaft 740 is fixed to the hand 20, the output shaft 720 passes through the output shaft 740 and the hand 20 and is fixed to the second hand 70, and the stator 731 is located between the hand 20 and the stator 711.

[0192] The hand motor 701 may also have: a first bearing, which is retained on the second connecting rod 60, and keeps the output shaft 720 or the output shaft 740 rotating around the third axis Ax3; and a second bearing, which is retained on the output shaft 720 between the outer periphery of the output shaft 720 and the inner periphery of the output shaft 740, and keeps the output shaft 740 rotating around the third axis Ax3.

[0193] For example, the hand motor 701 has: a bearing 723 (first bearing) which is retained on the second link 60 and keeps the output shaft 720 rotating around the third axis Ax3; and bearings 743, 744 (second bearings) which are retained on the output shaft 720 and keep the output shaft 740 rotating around the third axis Ax3.

[0194] By utilizing the space between the output shaft 740 and the output shaft 720 as a bearing arrangement space, the output shaft 740 and the output shaft 720 are held together, thereby achieving both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70.

[0195] The hand motor 701 may further include a bearing 745 (third bearing) held by the second link 60 and holding the output shaft 740 so as to rotate about the third axis Ax3. This can further improve the rigidity.

[0196] Alternatively, along the third axis Ax3, the stator 731 may be located between the stator 711 and the hand 20, the rotors 742 and 722 may be located between the bearings 723 and 745, and the bearing 745 may be located between the bearings 723 and 743 and 744. This further achieves a balance between miniaturization and rigidity.

[0197] Alternatively, the multi-jointed arm 3 may further include a frame 750 located between the second link 60 and the hand 20 and the second hand 70 and detachably attached to the second link 60, with the stator 731 being fixed to the second link 60 via the frame 750 and the stator 711 being directly fixed to the second link 60. This allows for a better balance between miniaturization and ease of assembly.

[0198] Alternatively, the bearings 723 and 745 may be cross roller bearings, and the bearings 743 and 744 may be radial bearings, thereby achieving a better balance between miniaturization and rigidity.

[0199] As an example, the hand motor 701 includes a main body 710, an output shaft 720, a bearing 723, a main body 730, an output shaft 740, bearings 743 and 744, and a bearing 745. The main body 710 includes a stator 711. The stator 711 includes a yoke 712 and a plurality of coils 713. The yoke 712 is disk-shaped with an open center and is directly fixed to the second connecting rod 60, for example, by shrink fit, so as to surround the third axis Ax3. The plurality of coils 713 are arranged so as to surround the third axis Ax3 and are fixed above the yoke 712.

[0200] The output shaft 720 includes a main shaft 721 and a rotor 722. The main shaft 721 projects upward along the third axis Ax3 and is secured to the second hand 70 via the frame 750 and the hand 20. The rotor 722 includes an iron core 724 and a plurality of permanent magnets 725. The iron core 724 extends from the main shaft 721 in a flange-like manner over the entire circumference of the stator 711. The plurality of permanent magnets 725 are arranged to surround the third axis Ax3 and are secured below the iron core 724. The plurality of permanent magnets 725 face the plurality of coils 713 from above.

[0201] Bearing 723 is held by the second connecting rod 60, allowing the main shaft 721 to rotate about the third axis Ax3. Bearing 723 is, for example, a crossed roller bearing. A crossed roller bearing contains rollers that support radial loads perpendicular to the third axis Ax3 and rollers that support axial loads along the third axis Ax3. Bearing 723 can also be positioned at a height encompassed by the rotor 722.

[0202] The main body 730 includes a stator 731. The stator 731 has a yoke 732 and a plurality of coils 733. The yoke 732 is disk-shaped with an open center and is fixed to the second connecting rod 60, for example, by shrink fit, so as to surround the third axis Ax3. The plurality of coils 733 are arranged so as to surround the third axis Ax3 and are fixed below the yoke 732. The stator 731 is located above the stator 711 and the rotor 722 and surrounds the main shaft 721.

[0203] The output shaft 740 includes a main shaft 741 and a rotor 742. The main shaft 741 surrounds the main shaft 721 above the rotor 742. The rotor 742 includes an iron core 746 and a plurality of permanent magnets 747. The iron core 746 extends from the main shaft 741 in a flange-like manner throughout the entire circumference between the stator 731 and the rotor 722. The plurality of permanent magnets 747 are arranged to surround the third axis Ax3 and are fixed above the iron core 746. The plurality of permanent magnets 747 face the plurality of coils 733 from below.

[0204] Bearings 743 and 744 are, for example, ball-type radial bearings and are arranged vertically between the inner circumference of main shaft 741 and the outer circumference of main shaft 721. Bearings 743 and 744 are respectively held by main shaft 721 to hold main shaft 741 rotatable about third axis Ax3.

[0205] The bearing 745 is held by the frame 750 and holds the main shaft 741 so as to rotate about the third axis Ax3. Holding the main shaft 741 by the frame 750 includes holding the second link 60. The bearing 745 is, for example, a crossed roller bearing.

[0206] Alternatively, the rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This allows for a better balance between miniaturization and rigidity.

[0207] exist Figure 11 , an example is shown of an axial gap hand motor 701 having a third bearing in addition to the first and second bearings. A radial gap hand motor 301 may also include a third bearing that is retained by the second link 60 and holds the main shaft 741 for rotation about the third axis Ax3.

[0208] like Figure 12As shown, the multi-joint arm 3 may also have a pipe T10 and an air-cooling flow path CR10 corresponding to the motor located inside the chamber 90 (for example, at least one of the arm motor 201 and the hand motor 301). The pipe T10 is arranged inside the wiring space S10 and guides the air cooling gas from the outside of the chamber 90. The air cooling flow path CR10 receives the gas guided by the pipe T10 and sends it to the inside of the wiring space S10 through the surrounding of the motor. For example, the air cooling flow path CR10 for the arm motor 201 is formed on the first connecting rod 50, and the air cooling flow path CR10 for the hand motor 301 is formed on the second connecting rod 60. By effectively utilizing the wiring space S10 as an exhaust path for the air cooling gas, the motor can be cooled with a smaller number of pipes T10.

[0209] like Figure 13 As shown, the robot 2 may further include environmental sensors 810 and 820 for detecting the environment within the wiring space S10. The environmental sensor 810 detects the environment of the internal space 52. The environmental sensor 820 detects the environment of the internal space 62. Examples of the environmental sensors 810 and 820 include temperature sensors and humidity sensors.

[0210] Alternatively, the plurality of sensors, including rotation sensors 150, 260, 330, 360 and environmental sensors 810, 820, may each have an upper port UP and a lower port LP, with the upper port UP transmitting the sensor's own detection results and information received at the lower port LP. With this configuration, rotation sensors 150, 260, 330, 360 and environmental sensors 810, 820 may be daisy-chained via a series of cables C10 and connected to a robot controller 900, etc., located outside of chamber 90.

[0211] For example, cable C10 includes cable C11, cable C12, cable C13, cable C14, cable C15, and cable C16. Cable C11 connects the upper port UP of environmental sensor 820 to the lower port LP of rotation sensor 360. Cable C12 connects the upper port UP of rotation sensor 360 to the lower port LP of rotation sensor 330. Cable C13 connects the upper port UP of rotation sensor 330 to the lower port LP of environmental sensor 810. Cable C14 connects the upper port UP of environmental sensor 810 to the lower port LP of rotation sensor 260. Cable C15 connects the upper port UP of rotation sensor 260 to the lower port LP of rotation sensor 150. Cable C16 connects the upper port UP of rotation sensor 150 to robot controller 900. The above connection order is merely an example and may be modified.

[0212] Environmental sensor 820 transmits detection results of the environment of internal space 62 from upper port UP. Rotation sensor 360 receives environmental detection results from environmental sensor 820 at lower port LP via cable C11 and transmits detection results of the rotation of output shaft 350 and the information received at lower port LP from upper port UP. Rotation sensor 330 receives information transmitted from rotation sensor 360 at lower port LP via cable C12 and transmits detection results of the rotation of output shaft 320 and the information received at lower port LP from upper port UP. Environmental sensor 810 receives information transmitted from rotation sensor 330 at lower port LP via cable C13 and transmits detection results of the environment of internal space 52 and the information received at lower port LP from upper port UP. Rotation sensor 260 receives information transmitted from environmental sensor 810 at lower port LP via cable C14 and transmits detection results of the rotation of output shaft 220 and the information received at lower port LP from upper port UP. The rotation sensor 150 receives information transmitted from the rotation sensor 260 at the lower port LP via the cable C15, and transmits the detection result of the rotation of the output shaft 120 and the information received at the lower port LP from the upper port UP. The robot controller 900 receives the information transmitted from the rotation sensor 150 via the cable C16.

[0213] In the above configuration, environmental sensor 820 is connected to rotation sensor 360 via cable C11 (sensor cable). Rotation sensor 360 receives environmental detection results via cable C11 and transmits both the rotation detection results and the environmental detection results to the outside of chamber 90 via cables C12, C13, C14, C15, and C16. Environmental sensor 810 is connected to rotation sensor 260 via cable C14 (sensor cable). Rotation sensor 260 receives environmental detection results via cable C14 and transmits both the rotation detection results and the environmental detection results to the outside of chamber 90 via cables C15 and C16. This reduces the number of cables and further suppresses gas generation from the cables.

[0214] 〔Summarize〕

[0215] The above disclosure includes the following structures.

[0216] (1) A robot 2 having a multi-joint arm 3 and a flange 30, wherein the multi-joint arm 3 has: a hand 20 that supports a substrate W; a base 10; an arm 4 that connects the hand 20 to the base 10; and a plurality of joints J10 that are arranged along the arm 4 and move around a vertical axis to change the position and posture of the hand 20 relative to the base 10, the flange 30 is extended in a manner to separate the base 10 from the arm 4 and the hand 20, and closes an opening OP1 of a chamber 90 that accommodates at least a portion of the multi-joint arm 3, the flange 30 having a long side direction, and in the long side direction of the flange 30, the axis of the joint J10 closest to the base 10 among the plurality of joints J10 is located between one end 31 of the flange 30 and the center 32 of the flange 30, close to the one end 31.

[0217] The shape and layout of the flange 30 can be matched to the opening OP1 required to ensure sufficient workability for assembling the robot 2 into the chamber 90. Therefore, this is effective in achieving a balance between reducing the size of the opening OP1 for assembling the robot 2 into the chamber 90 and ensuring workability for assembling the robot 2 into the chamber 90.

[0218] (2) The robot 2 according to (1), wherein the plurality of joints J10 include: a first joint J11, which connects the first link 50 to the base 10 in a manner that rotates around a vertical first axis Ax1; a second joint J12, which connects the second link 60 to the end of the first link 50 in a manner that rotates around a vertical second axis Ax2; and a third joint J13, which connects the hand 20 to the end of the second link 60 in a manner that rotates around a vertical third axis Ax3, and in the long side direction of the flange 30, the first axis Ax1 is located between one end 31 of the flange 30 and the center 32 of the flange 30, close to the one end 31.

[0219] The position and posture of the hand 20 in the horizontal plane can be freely adjusted while reducing the number of links.

[0220] (3) The robot 2 according to (2), wherein the length of the flange 30 in the longitudinal direction is greater than the length of the first link 50 .

[0221] The shape and layout of the flange 30 can be further matched to the required sufficient opening OP1 .

[0222] (4) The robot 2 according to (3), wherein a width of the flange 30 in a direction perpendicular to the longitudinal direction is smaller than a length of the first link 50 .

[0223] The shape and layout of the flange 30 can be further matched to the required sufficient opening OP1 .

[0224] (5) A robot 2 according to any one of (2) to (4), further comprising: a base actuator 41 having a main body 110 and an output shaft 120, wherein the main body 110 is fixed to the base 10, the output shaft 120 protrudes from the main body 110, passes through the flange 30 and is fixed to the first link 50, and rotates around the axis; and a sealing member 140, which seals between the flange 30 and the output shaft 120.

[0225] The interior of the chamber 90 can be easily sealed.

[0226] (6) The robot 2 according to (5), wherein the base 10 has: a motor bracket 13, the main body 110 is fixed to the motor bracket 13; and a lifting actuator 14 for lifting and lowering the motor bracket 13, the sealing member 140 includes: a mechanical seal 148, which allows the output shaft 120 to rotate relative to the flange 30 and is tightly attached to the output shaft 120; and a telescopic seal 141, which seals between the mechanical seal 148 and the flange 30 and telescopes as the motor bracket 13 is raised and lowered.

[0227] The mobility of the output shaft 120 in both the lifting direction and the rotational direction and the sealing performance in the chamber 90 can be achieved at the same time.

[0228] (7) The robot 2 according to (6), wherein the flange 30 includes: a first flange 35, which faces the inside of the chamber 90; a second flange 36, which overlaps with the first flange 35 and faces the outside of the chamber 90; an adjustment plate 37, which is inserted between the first flange 35 and the second flange 36 to adjust the inclination of the second flange 36 relative to the first flange 35; and a fastening member 38, which fastens the second flange 36 to the first flange 35, the lifting actuator 14 is fixed to the second flange 36, and the output shaft 120 passes through the second flange 36 and the first flange 35 and is fixed to the first connecting rod 50.

[0229] The flange 30 can be used to adjust the installation posture of the robot 2 .

[0230] (8) The robot 2 according to (7), wherein the telescopic seal 141 seals between the mechanical seal 148 and the first flange 35 .

[0231] The telescopic seal 141 can easily absorb changes in the inclination of the second flange 36 relative to the first flange 35 , thereby maintaining the sealing performance in the chamber 90 .

[0232] (9) The robot 2 according to (7) or (8), wherein the first flange 35 and the second flange 36 separate the base 10 from the arm 4 and the hand 20, respectively, and the first flange 35 extends from the periphery of the second flange 36 throughout the entire circumference.

[0233] By providing the first flange 35 and the second flange 36 with an extension sufficient to separate the base 10 from the arm 4 and the hand 20, it is possible to ensure sufficient space for the adjustment plate 37. In addition, by not placing the second flange 36 in the chamber 90, the sealing of the chamber 90 can be easily maintained.

[0234] (10) The robot 2 according to any one of (1) to (9), further comprising a plurality of legs 5 that protrude from the flange 30 beyond the base 10 and surround the base 10 .

[0235] The robot 2 before being assembled into the chamber 90 can be supported by the legs 5 . Therefore, the maintainability of the robot 2 can be improved.

[0236] (11) A substrate conveying device (1), comprising: a robot 2 according to any one of (2) to (10); and a chamber 90 having a long side direction, the long side direction of the chamber 90 being consistent with the long side direction of the flange 30.

[0237] The cavity 90 for providing the opening OP1 can be prevented from expanding.

[0238] (12) A substrate conveying device 1 according to (11), wherein the robot 2 comprises: a base actuator 41 which rotates the first link 50 around the first axis Ax1; an arm actuator 42 which rotates the second link 60 around the second axis Ax2 independently of the rotation of the first link 50 by means of the base actuator 41; and a hand actuator 43 which rotates the hand 20 around the third axis Ax3 independently of the rotation of the first link 50 by means of the base actuator 41 and the rotation of the second link 60 by means of the arm actuator 42, the chamber 90 having a first side wall 96 and a second side wall 97 which are opposite to each other in a direction perpendicular to the vertical direction and the long side direction of the chamber 90, and the first axis Ax1 is located between the first side wall 96 and the second side wall 97 at a position close to the first side wall 96.

[0239] It is possible to achieve both reduction in size of the chamber 90 and the movable range of the robot 2 .

[0240] (13) The substrate transfer device 1 according to (12), wherein the length of the first link 50 is smaller than the interval between the first side wall 96 and the second side wall 97 and is larger than half the interval.

[0241] It is possible to further achieve a balance between the reduction in size of the chamber 90 and the movable range of the robot 2 .

[0242] (14) The substrate transfer apparatus 1 according to any one of (11) to (13), wherein the chamber 90 includes a top plate 91 and a bottom plate 92 arranged vertically, and the flange 30 closes the opening OP1 provided in the bottom plate 92 .

[0243] Compared with providing the opening OP1 in the top plate 91 , it is possible to suppress the entry of dust into the chamber 90 .

[0244] (15) The substrate transfer apparatus 1 according to (14), wherein the chamber 90 further includes a second opening OP2 provided in the top plate 91 with a smaller size than the opening OP1.

[0245] It is possible to suppress dust from entering the chamber 90 and improve the maintainability of the robot 2 .

[0246] (16) The substrate transfer apparatus 1 according to (15), wherein at least a portion of the second opening OP2 overlaps with the flange 30 when viewed from vertically above.

[0247] The maintainability of the robot 2 can be further improved.

[0248] As mentioned above, although embodiment was demonstrated, this disclosure is not necessarily limited to the said embodiment, Various changes are possible within the range which does not deviate from the summary.

Claims

1. A robot for conveying a substrate, wherein: The robot has a multi-jointed arm and a flange, The multi-jointed arm has: a hand that supports the base plate; base; an arm connecting the hand to the base; as well as A plurality of joints are arranged along the arm and move around a vertical axis to change the position and posture of the hand relative to the base. The flange is extended in a manner to separate the base from the arm and the hand, and to block the opening of the chamber that accommodates at least a portion of the multi-jointed arm. The flange has a long side direction, A distance from an axis of a joint among the plurality of joints that is closest to the base to one end of the flange is smaller than a distance from the axis to a center of the flange.

2. The robot according to claim 1, wherein: The arm includes a first link and a second link, The plurality of joints include: A first joint, which connects the first link to the base in a manner of rotating around a vertical first axis; a second joint connecting the second link to an end of the first link in a manner of rotating about a vertical second axis; and a third joint, which connects the hand to the end of the second link in a manner of rotation about a third vertical axis, In the longitudinal direction of the flange, a distance from the first axis to one end of the flange is smaller than a distance from the first axis to the center of the flange.

3. The robot according to claim 2, wherein: The length of the flange in the long side direction is greater than the length of the first link.

4. The robot according to claim 3, wherein: The width of the flange in a direction perpendicular to the long side direction of the flange is smaller than the length of the first link.

5. The robot according to any one of claims 2 to 4, wherein: The robot also has: a base actuator having a body and an output shaft, wherein the body is fixed to the base, the output shaft protrudes from the body, passes through the flange and is fixed to the first connecting rod, and rotates around the first axis; and A sealing member seals between the flange and the output shaft.

6. The robot according to claim 5, wherein: The base has: a motor bracket, the main body being fixed to the motor bracket; as well as a lifting actuator that causes the motor bracket to rise and fall, The sealing member comprises: a mechanical seal, which allows the output shaft to rotate relative to the flange and is tightly attached to the output shaft; as well as A telescopic seal seals between the mechanical seal and the flange and telescopes as the motor bracket rises and falls.

7. The robot according to claim 6, wherein: The flange comprises: a first flange facing into the chamber; a second flange overlapping the first flange and facing outside the chamber; an adjusting plate inserted between the first flange and the second flange to adjust the inclination of the second flange relative to the first flange; and a fastening member that fastens the second flange to the first flange, The lifting actuator is fixed to the second flange, The output shaft protrudes from the main body, passes through the second flange and the first flange, and is fixed to the first connecting rod.

8. The robot according to claim 7, wherein: The telescopic seal seals between the mechanical seal and the first flange.

9. The robot according to claim 7, wherein: The first flange and the second flange extend between the base and the arm and the hand, respectively. The first flange extends from the periphery of the second flange over the entire circumference.

10. The robot according to any one of claims 1 to 4, wherein: The robot further includes a plurality of legs protruding from the flange and surrounding the base. A height of the plurality of legs from the flange is greater than a height of the base from the flange.

11. A substrate conveying device, wherein: The substrate conveying device comprises: The robot according to any one of claims 2 to 4; and the chamber, The chamber has a long side direction, The long side direction of the chamber coincides with the long side direction of the flange.

12. The substrate conveying device according to claim 11, wherein: The robot has: a base actuator that rotates the first link about the first axis; an arm actuator that rotates the second link about the second axis independently of rotation of the first link by the base actuator; and a hand actuator that rotates the hand about the third axis independently of the rotation of the first link by the base actuator and the rotation of the second link by the arm actuator, The chamber has a first side wall and a second side wall facing each other in a direction perpendicular to the vertical direction and the longitudinal direction of the chamber. A distance from the first axis to the first sidewall is less than a distance from the first axis to the second sidewall.

13. The substrate conveying device according to claim 12, wherein: The length of the first connecting rod is smaller than the interval between the first side wall and the second side wall, and is larger than half of the interval.

14. The substrate conveying device according to claim 11, wherein: The chamber has a top plate and a bottom plate arranged up and down, The flange blocks the opening provided on the bottom plate.

15. The substrate conveying device according to claim 14, wherein: The chamber further includes a second opening provided on the top plate with a smaller size than the first opening.

16. The substrate conveying device according to claim 15, wherein: At least a portion of the second opening overlaps with the flange when viewed from vertically above.

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