Fluid dilution device, fluid dilution system and fluid dilution method

Abstract

The invention provides a fluid dilution device, a fluid dilution system and a fluid dilution method.The fluid dilution device comprises a carrier fluid supply unit, a process fluid supply unit, a fluid mixing pipeline and a diluted fluid output unit; the current carrier supply unit comprises M current carrier supply pipelines; the process fluid supply unit comprises N paths of process fluid supply pipelines; the output end of the carrier fluid supply pipeline and the output end of the process fluid supply pipeline are respectively connected with the input end of the fluid mixing pipeline; and the input end and the output end of the diluted fluid output unit are respectively connected with the output end of the fluid mixing pipeline and the process pipeline. According to the fluid dilution device, at least one current carrying fluid supply pipeline and at least one process fluid supply pipeline are integrated in one device, so that multi-proportion, high-precision and multi-flow-interval dilution adjustment of the process fluid can be realized, and the fluid dilution capacity of the fluid dilution device can be improved; therefore, the adaptability of the fluid diluting device is improved.

Description

Technical Field

[0001] The present application relates to the technical field of fluid dilution. Specifically, it relates to a fluid dilution device, a fluid dilution system, and a fluid dilution method. Background Art

[0002] In scenarios where equipment involving fluids is used, there is generally a need for fluid dilution. Currently, most related technologies adopt a design scheme of one carrier fluid supply pipeline and one process fluid supply pipeline. The process fluid is diluted by the carrier fluid, and flow controllers are provided in the supply pipelines to control the flow rates of the carrier fluid and the process fluid.

[0003] However, due to the limited range of the flow controller, the fluid concentration dilution range of the above fluid dilution scheme is limited by the range and accuracy of the flow controller. The fluid concentration dilution ability is limited and it is difficult to meet the requirements of wide-range dilution concentration adjustment and wide-range flow rate adjustment. Summary of the Invention

[0004] The purpose of the embodiments of the present application is to provide a fluid dilution device, a fluid dilution system, and a fluid dilution method to improve the fluid dilution ability of the fluid concentration dilution device.

[0005] In a first aspect, the embodiments of the present application provide a fluid dilution device, which includes: a carrier fluid supply unit, a process fluid supply unit, a fluid mixing pipeline, and a diluted fluid output unit;

[0006] The carrier fluid supply unit includes M carrier fluid supply pipelines; the process fluid supply unit includes N process fluid supply pipelines; the output ends of the carrier fluid supply pipelines and the output ends of the process fluid supply pipelines are respectively connected to the input end of the fluid mixing pipeline; the input end and the output end of the diluted fluid output unit are respectively connected to the output end of the fluid mixing pipeline and the process pipeline;

[0007] m (m < M) of the M carrier fluid supply pipelines and n (n < N) of the N process fluid supply pipelines work together to mix m carrier fluids and n (n < N) process fluids in the fluid mixing pipeline into a diluted fluid with a target concentration;

[0008] Wherein, M, m, N, and n are non-zero natural numbers, and M and N are not both 1 at the same time.

[0009] In the process of implementing the above scheme, at least one carrier fluid supply pipeline and at least one process fluid supply pipeline work together to mix the process fluid into a dilution fluid of a target concentration. On the one hand, the above fluid dilution device integrates at least one carrier fluid supply pipeline and at least one process fluid supply pipeline into a set of devices, which can realize multi-proportional dilution adjustment of the process fluid, which is beneficial to improve the fluid dilution capacity of the above fluid dilution device, and further improve the adaptability of the above fluid dilution device; on the other hand, compared with the dilution device using multiple sets of one carrier fluid and one process fluid, the fluid dilution device in the above scheme uses a set of M carrier fluid supply pipelines and N process fluid supply pipelines, which can achieve low cost and space occupancy, and the fluid response is also faster, and it can meet the fluid dilution requirements of multiple proportions, high precision and multiple flow ranges.

[0010] In an implementation of the first aspect, the device further includes: a purge pipeline; an input end of the purge pipeline is connected to the carrier fluid, and an output end of the purge pipeline is connected to an input end of the process fluid supply pipeline.

[0011] In the process of implementing the above scheme, by setting up a cleaning pipeline, the above fluid dilution device can effectively remove the process fluid remaining in the process pipeline of the process fluid. On the one hand, it reduces the impact of the residual process fluid on the next fluid dilution process, which is beneficial to improving the fluid dilution accuracy; on the other hand, it enables the above fluid dilution device to adapt to different process requirements, which is beneficial to improving the adaptability of the above fluid dilution device.

[0012] In an implementation of the first aspect, the process fluid supply unit further includes: a one-way valve installed at an input end of the process fluid supply pipeline, configured to allow the process fluid to flow into the process fluid supply pipeline.

[0013] In the process of implementing the above scheme, a one-way valve is provided at the input end of the process fluid supply pipeline to control the fluid flow direction. On the one hand, it is beneficial for the carrier fluid and the process fluid to flow in a predetermined direction to avoid reverse flow, thereby improving the reliability and stability of the above fluid dilution device; on the other hand, it is beneficial to reduce the contamination of the diluted fluid to the untreated fluid, thereby improving the fluid dilution accuracy.

[0014] In an implementation of the first aspect, the dilution fluid output unit includes: at least one dilution fluid output pipeline; the input end of the dilution fluid output pipeline is connected to the output end of the fluid mixing pipeline, and the output end is connected to the process pipeline.

[0015] In the process of implementing the above scheme, by setting up multiple dilution fluid output pipelines, on the one hand, the above-mentioned fluid dilution device can be adapted to various process requirements, which is beneficial to improving the production efficiency and flexibility of the above-mentioned fluid dilution device; on the other hand, the above-mentioned fluid dilution device can be adapted to more application scenarios, which is beneficial to improving the scalability and adaptability of the above-mentioned fluid dilution device.

[0016] In an implementation of the first aspect, the dilution fluid output unit further includes: at least one redundant fluid output pipeline; an input end of the redundant fluid output pipeline is connected to an output end of the fluid mixing pipeline.

[0017] In the process of implementing the above scheme, by setting at least one excess fluid output pipeline, on the one hand, the excess fluid can be discharged quickly, which is beneficial to improving the fluid dilution accuracy of the above fluid dilution device; on the other hand, by at least one excess fluid output pipeline, the excess fluid can be discharged flexibly, so that the above fluid dilution device can be suitable for more application scenarios, which is beneficial to improving the flexibility and adaptability of the above fluid dilution device.

[0018] In an implementation of the first aspect, the carrier fluid supply unit further includes: a first flow controller and a first on-off valve installed on the carrier fluid supply pipeline, wherein the first flow controller is used to control the carrier fluid supply flow rate of the carrier fluid supply pipeline, and the first on-off valve is used to control the on-off state of the carrier fluid supply pipeline;

[0019] The process fluid supply unit also includes: a second flow controller and a second on-off valve installed on the process fluid supply pipeline, wherein the second flow controller is used to control the process fluid supply flow of the process fluid supply pipeline, and the second on-off valve is used to control the on-off state of the process fluid supply pipeline.

[0020] The above scheme arranges a flow controller FC and an on-off valve on the carrier fluid supply pipeline and the process fluid supply pipeline. On the one hand, the flow rate can be accurately controlled, which is beneficial to improving the dilution accuracy of the above fluid dilution device; on the other hand, the on-off valve can flexibly choose to open or close the corresponding supply pipeline, which is beneficial to improving the flexibility and adaptability of the above fluid dilution device.

[0021] In a second aspect, an embodiment of the present application provides a fluid dilution system, the system comprising:

[0022] At least two fluid dilution devices provided by the first aspect or any possible implementation of the first aspect;

[0023] At least two of the fluid dilution devices are used to: deliver dilution fluids of the same target concentration to the same process pipeline; or, deliver dilution fluids of different target concentrations to the same process pipeline; or, deliver dilution fluids of the same target concentration to different process pipelines; or, deliver dilution fluids of different target concentrations to different process pipelines.

[0024] In a third aspect, an embodiment of the present application provides a fluid dilution method, the method comprising:

[0025] Obtaining a process fluid target flow rate and a process fluid target concentration of a fluid dilution task;

[0026] In the carrier fluid supply pipeline and the process fluid process pipeline of the fluid dilution device, all pipeline combinations are traversed to determine a target pipeline combination whose working interval satisfies the target flow rate of the process fluid and the target concentration of the process fluid; wherein the fluid dilution device is the fluid dilution device provided by the first aspect or any possible implementation of the first aspect;

[0027] The process fluid is diluted using the target pipeline combination.

[0028] In an implementation of the third aspect, diluting the process fluid using the target pipeline combination includes:

[0029] If there are multiple groups of the target pipeline combinations, the pipeline combination with the smallest dilution concentration error is selected to dilute the process fluid.

[0030] In an implementation of the third aspect, the method further includes:

[0031] If the target pipeline combination is not traversed, an alarm is issued.

[0032] Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or be understood by practicing the embodiments of the present application. The purpose and other advantages of the present application can be realized and obtained by the structures specifically pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 It is a structural schematic diagram of a gas dilution device of an MOCVD device in the related art;

[0035] Figure 2 A schematic diagram of the theoretical relationship between the flow rate and dilution concentration of a gas dilution device of an MOCVD device in the related art provided in an embodiment of the present application;

[0036] Figure 3 A schematic diagram of the actual use range of fluid flow and dilution concentration of a gas dilution device of an MOCVD device in the related art provided in an embodiment of the present application;

[0037] Figure 4 A schematic diagram of the structure of a fluid dilution device provided in an embodiment of the present application;

[0038] Figure 5 A schematic diagram of the structure of a fluid dilution device in a certain scenario provided by an embodiment of the present application;

[0039] Figure 6 A schematic diagram of a theoretical use range of fluid flow and dilution concentration of a fluid dilution device when the carrier fluid supply pipeline 211 - 1 provided in an embodiment of the present application cooperates with the process fluid supply pipeline 221 - 1;

[0040] Figure 7 A schematic diagram of a theoretical use range of fluid flow and dilution concentration of a fluid dilution device when the carrier fluid supply pipeline 211 - 1 and the process fluid supply pipeline 221 - 2 provided in an embodiment of the present application cooperate;

[0041] Figure 8 A schematic diagram of a theoretical use range of fluid flow and dilution concentration of a fluid dilution device when the carrier fluid supply pipeline 211 - 2 provided in an embodiment of the present application cooperates with the process fluid supply pipeline 221 - 1;

[0042] Fig. 9 A schematic diagram of a theoretical use range of fluid flow and dilution concentration of a fluid dilution device when the carrier fluid supply pipeline 211 - 2 provided in an embodiment of the present application cooperates with the process fluid supply pipeline 221 - 2;

[0043] Fig.10 A schematic diagram of a theoretical use range of fluid flow and dilution concentration of a fluid dilution device when the carrier fluid supply pipeline 211-1, the carrier fluid supply pipeline 211-2 and the process fluid supply pipeline 221-1, the process fluid supply pipeline 221-2 provided in an embodiment of the present application cooperate;

[0044] Fig.11 A schematic diagram of the actual use range of the fluid flow rate and dilution concentration of the fluid dilution device provided in an embodiment of the present application;

[0045] Fig.12 A schematic diagram of the structure of a fluid dilution system in a certain scenario provided by an embodiment of the present application;

[0046] Fig.13 A schematic diagram of a flow chart of a fluid dilution method provided in an embodiment of the present application;

[0047] Fig.14 A schematic diagram of a flow chart of a fluid dilution method in a certain scenario provided in an embodiment of the present application;

[0048] Fig.15 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0049] The following will describe the technical solutions in the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0050] Taking the gas dilution scheme of MOCVD (Metal-Organic Chemical Vapor Deposition) equipment as an example, the fluid mixing scheme using one carrier fluid supply pipeline and one process fluid supply pipeline in the related technology is introduced:

[0051] See also Figure 1 , the MOCVD equipment gas dilution device 100 comprises:

[0052] A carrier fluid flow controller 110 is disposed on the carrier fluid supply pipeline and is used to control the flow of the carrier fluid CARRIERFLUID;

[0053] A process fluid flow controller 120 is disposed on the process fluid supply pipeline and is used to control the flow of the process fluid PROCESS FLUID;

[0054] A dilution fluid flow controller 130 is disposed on the dilution pipeline and is used to control the flow of the dilution fluid DILUTED FLUID;

[0055] The excess fluid pressure controller 140 is disposed on the excess fluid discharge pipeline and is used to control the discharge pressure of the excess fluid except the dilution fluid;

[0056] The first valve 150 and the second valve 160 are hardware interlocked, and only one valve can be opened at the same time.

[0057] When the second valve 160 is opened, the first valve 150 is closed, and the gas dilution device 100 of the MOCVD equipment is in a normal working state. In this state, the carrier fluid flow rate is controlled by the carrier fluid flow rate controller 110, and the process fluid flow rate is controlled by the process fluid flow rate controller 120. When the first valve 150 is opened, the second valve 160 is closed, and the gas dilution device 100 of the MOCVD equipment is in a process pipeline cleaning state.

[0058] The fluid dilution range of the gas dilution device 100 of the MOCVD equipment described above is analyzed from the perspective of the flow controller range:

[0059] Assume that the range of the carrier fluid flow controller 110 is 300sccm (Standard Cubic Centimeters perMinute), and the range of the process fluid flow controller 120 is 100sccm. The effective control range of the flow controller MFC currently on the market is usually 20% to 90% of the full scale (FS). Therefore, the effective control flow range of the carrier fluid flow controller 110 is 60 to 270sccm, and the effective control flow range of the process fluid flow controller 120 is 20 to 90sccm. The minimum dilution ratio is calculated as: 20 / (270+20)≈6.90%, and the maximum dilution ratio is: 90 / (60+90)=60.00%. The theoretical relationship between the flow rate and dilution concentration of the flow controller MFC is as follows: Figure 2 shown.

[0060] However, since the flow controller MFC itself has certain accuracy, linearity, and repeatability errors, these errors accumulate to about ±1% FS. Substituting these errors into the above-mentioned digital model, it can be determined that when the range of the carrier fluid flow controller 110 is 60sccm+1%FS, and the range of the process fluid flow controller 120 is 20sccm-1%FS, the deviation of the dilution concentration is the largest, and at this time there is a dilution concentration deviation of about 1.83%. It can be seen that although the flow controller MFC is controllable at low flow rates, the slight error of the flow controller will cause a large fluctuation in the dilution concentration value. Therefore, in actual usage scenarios, the actual use range of the flow controller MFC is generally set at a large range. The actual use range is such as Figure 3 shown.

[0061] In summary, the design scheme of using one carrier fluid supply pipeline and one process fluid supply pipeline in the related art has a limited concentration dilution range of only about half an order of magnitude, and the adjustable range of flow rate is small. The dilution capacity of the fluid is limited, and it is difficult to meet the adjustment requirements of a wide range of dilution concentrations.

[0062] Based on this, an embodiment of the present application provides a fluid dilution device, which includes at least one carrier fluid supply pipeline and at least one process fluid supply pipeline. During use, the at least one carrier fluid supply pipeline and the at least one process fluid supply pipeline work together to mix the process fluid into a diluted fluid with a target concentration. On the one hand, the above fluid dilution device integrates at least one carrier fluid supply pipeline and at least one process fluid supply pipeline into one device, which can achieve multi-ratio dilution adjustment of the process fluid, is beneficial to improving the fluid dilution ability of the above fluid dilution device, and further improves the adaptability of the above fluid dilution device; on the other hand, compared with a dilution device that uses multiple sets of one carrier fluid cooperating with one process fluid, the fluid dilution device in the above solution uses one set of M carrier fluid supply pipelines and N process fluid supply pipelines in cooperation, which can achieve low cost and low space occupancy, the fluid response is also faster, and it can meet the fluid dilution requirements of multiple ratios, high precision, and multiple flow ranges.

[0063] The above fluid dilution device will be introduced below. Please refer to Figure 4 , an embodiment of the present application provides a fluid dilution device 200, which includes: a carrier fluid supply unit 210, a process fluid supply unit 220, a fluid mixing pipeline 230, and a diluted fluid output unit 240.

[0064] The carrier fluid supply unit 210 includes M carrier fluid supply pipelines 211, and the process fluid supply unit 220 includes N process fluid supply pipelines 221; the output ends of the carrier fluid supply pipelines 211 and the output ends of the process fluid supply pipelines 221 are respectively connected to the input end of the fluid mixing pipeline 230; the input end and the output end of the diluted fluid output unit 240 are respectively connected to the output end of the fluid mixing pipeline 230 and the process pipeline.

[0065] m (m < M) carrier fluid supply pipelines 211 in the M carrier fluid supply pipelines 211 work together with n (n < N) process fluid supply pipelines 221 in the N process fluid supply pipelines 221 to mix the m carrier fluids and the n (n < N) process fluids into a diluted fluid with a target concentration in the fluid mixing pipeline 230.

[0066] The above M, m, N, and n are non-zero natural numbers respectively, and M and N are not both 1 at the same time.

[0067] It can be understood that the above fluid refers to a substance that can flow, including liquids and gases. The process fluid refers to the fluid to be diluted, and the carrier fluid refers to the fluid used to dilute the process fluid. Common gas carrier fluids such as nitrogen, argon, helium, etc., and common liquid carrier fluids such as water, etc.

[0068] As an optional implementation of the above-mentioned fluid dilution device, the above-mentioned fluid dilution device 200 further includes:

[0069] The cleaning pipeline 251 has an input end connected to the carrier fluid, and an output end connected to the input end of the process fluid supply pipeline 221 .

[0070] It is understandable that the fluid dilution device 200 may further be provided with at least one purge valve 252 on the purge pipeline 251 , and the opening and closing of the purge function may be controlled by controlling the opening and closing of the purge valve 252 .

[0071] In addition, it can be understood that when the cleaning function is turned on, the above-mentioned cleaning valve 252 is opened, the carrier fluid supply pipeline 211 is closed, and the process fluid supply pipeline 221 is opened. The carrier fluid flows into the cleaning pipeline 251 from the input end, flows into the process fluid supply pipeline 221 from the output end of the cleaning pipeline 251, flows into the fluid mixing pipeline 230 after flowing through the process fluid supply pipeline 221, and is finally discharged from the dilution fluid output unit 240, thereby achieving the cleaning of the process fluid supply pipeline 221.

[0072] The above scheme sets a cleaning pipeline 251, so that the above fluid dilution device 200 can effectively remove the process fluid remaining in the process fluid process pipeline 221. On the one hand, it reduces the impact of the process fluid residue on the next fluid dilution process, which is beneficial to improving the fluid dilution accuracy; on the other hand, it enables the above fluid dilution device 200 to adapt to different process requirements, which is beneficial to improving the adaptability of the above fluid dilution device 200.

[0073] As an optional implementation of the above-mentioned fluid dilution device, the process fluid supply unit 220 further includes: a one-way valve 222 installed at the input end of the process fluid supply pipeline 221 , which is used to allow the process fluid to flow into the process fluid supply pipeline 221 .

[0074] It is understandable that the one-way valve 222 allows the process fluid to flow into the process fluid supply pipeline 221, while preventing the process fluid from flowing in the opposite direction. Of course, when the fluid dilution device 200 opens the purge pipeline 251, the one-way valve 222 can also prevent the carrier fluid from flowing into the process pipeline.

[0075] The above scheme controls the fluid flow direction by setting a one-way valve 222 at the input end of the process fluid supply pipeline 221. On the one hand, it is beneficial for the carrier fluid and the process fluid to flow in a predetermined direction to avoid reverse backflow, thereby improving the reliability and stability of the above fluid dilution device 200; on the other hand, it is beneficial to reduce the contamination of the diluted fluid to the untreated fluid, thereby improving the fluid dilution accuracy.

[0076] As an optional embodiment of the fluid dilution device, the dilution fluid output unit 240 includes: at least one dilution fluid output pipeline 241. The input end of the dilution fluid output pipeline 241 is connected to the output end of the fluid mixing pipeline 230, and the output end is connected to the process pipeline.

[0077] It is understandable that when the dilution fluid output unit 240 is provided with a plurality of dilution fluid output pipelines 241, the output ends of the plurality of dilution fluid output pipelines 241 may be connected to the same process pipeline or to different process pipelines. Of course, some of the dilution fluid output pipelines 241 in the plurality of pipelines may be connected to the same process pipeline, and the rest may be connected to other process pipelines.

[0078] The above scheme sets up multiple dilution fluid output pipelines 241. On the one hand, the above-mentioned fluid dilution device 200 can be adapted to various process requirements, which is beneficial to improving the production efficiency and flexibility of the above-mentioned fluid dilution device 200; on the other hand, the above-mentioned fluid dilution device 200 can be adapted to more application scenarios, which is beneficial to improving the scalability and adaptability of the above-mentioned fluid dilution device 200.

[0079] It is understandable that, in the fluid dilution process, in order to ensure that the concentration of the diluted fluid can meet the dilution concentration requirement, the process fluid is generally set to a flow rate greater than the actual demand, so that in the actual mixing process, a portion of the fluid may not be fully mixed, thereby forming excess fluid. Of course, the process fluid and the carrier fluid may also form excess fluid due to reasons such as setting flow redundancy. If the excess fluid is not discharged in time, it will have a certain impact on the fluid dilution device 200.

[0080] Based on this, the present application provides the following solutions:

[0081] As an optional implementation of the fluid dilution device, the dilution fluid output unit 240 further includes: at least one redundant fluid output pipeline 242 . The input end of the redundant fluid output pipeline 242 is connected to the output end of the fluid mixing pipeline 230 .

[0082] The above scheme, by providing at least one excess fluid output pipeline 242, on the one hand, enables the excess fluid to be discharged quickly, which is beneficial to improving the fluid dilution accuracy of the above fluid dilution device 200; on the other hand, through at least one excess fluid output pipeline 242, the excess fluid can be flexibly discharged, so that the above fluid dilution device 200 can be suitable for more application scenarios, which is beneficial to improving the flexibility and adaptability of the above fluid dilution device 200.

[0083] As an optional embodiment of the above-mentioned fluid dilution device, the above-mentioned carrier fluid supply unit 210 also includes: a first flow controller 212 and a first on-off valve 213 installed on the carrier fluid supply pipeline 211, wherein the first flow controller 212 is used to control the carrier fluid supply flow rate of the carrier fluid supply pipeline 211, and the first on-off valve 213 is used to control the on-off state of the carrier fluid supply pipeline 211.

[0084] The process fluid supply unit 220 also includes: a second flow controller 223 and a second on-off valve 224 installed on the process fluid supply pipeline 221, wherein the second flow controller 223 is used to control the process fluid supply flow of the process fluid supply pipeline 221, and the second on-off valve 224 is used to control the on-off state of the process fluid supply pipeline 221.

[0085] It is understandable that the above-mentioned flow controller FC (Flow Controller) is a device for controlling the flow of fluid. The common principle of flow controller is to detect the fluid flow, and then compare it with the pre-set flow, and then determine the valve to automatically adjust to achieve the purpose of flow control. Common flow controllers include float flowmeters, differential pressure flowmeters, electromagnetic flowmeters, etc.

[0086] It is understandable that a flow controller FC may also be arranged on the dilution fluid output pipeline 241 in the dilution fluid output unit 240 to control the output flow rate of the dilution fluid.

[0087] It can be understood that the "first" in the first flow controller 212 and the "second" in the second flow controller 223 do not specifically refer to the number of flow controllers, but distinguish the installation positions of the flow controllers. The first flow controller 212 is a flow controller installed on the carrier fluid supply pipeline 211, and the second flow controller 223 is a flow controller installed on the process fluid supply pipeline 221.

[0088] In the process of implementing the above scheme, by setting a flow controller FC and an on-off valve on the carrier fluid supply pipeline 211 and the process fluid supply pipeline 221, on the one hand, the flow rate can be accurately controlled, which is beneficial to improving the dilution accuracy of the above-mentioned fluid dilution device 200; on the other hand, the on-off valve can flexibly choose to open or close the corresponding supply pipeline, which is beneficial to improving the flexibility and adaptability of the above-mentioned fluid dilution device 200.

[0089] It is understandable that, in addition to using the flow controller FC and the on-off valve to control the fluid flow through the supply pipeline, the supply unit may also use devices such as a speed regulating pump and a pressure valve to control the fluid flow through the pipeline.

[0090] Taking M=N=2, that is, the carrier fluid supply unit 210 is provided with two carrier fluid supply pipelines 211, and the process fluid supply unit 220 is provided with two process fluid supply pipelines 221 as an example, the working principle of the above-mentioned fluid dilution device 200 and the fluid dilution concentration range are introduced:

[0091] First, the structure of the fluid dilution device 200 including two carrier fluid supply pipelines 211 and two process fluid supply pipelines 221 is introduced:

[0092] See also Figure 5 , the fluid dilution device 200 comprises:

[0093] The carrier fluid supply unit 210 includes: a carrier fluid supply pipeline 211-1, a carrier fluid supply pipeline 211-2, a first flow controller 212-1 and a first on-off valve 213-1 arranged on the carrier fluid supply pipeline 211-1, and a first flow controller 212-2 and a first on-off valve 213-2 arranged on the carrier fluid supply pipeline 211-2;

[0094] The process fluid supply unit 220 includes: a process fluid supply pipeline 221-1, a process fluid supply pipeline 221-2, a one-way valve 222 arranged at the input ends of the process fluid supply pipeline 221-1 and the process fluid supply pipeline 221-2, a second flow controller 223-1 and a second on-off valve 224-1 arranged on the process fluid supply pipeline 221-1, and a second flow controller 223-2 and a second on-off valve 224-2 arranged on the process fluid supply pipeline 221-2;

[0095] Fluid mixing pipeline 230;

[0096] The dilution fluid output unit 240 includes: a dilution fluid output pipeline 241, a surplus fluid output pipeline 242, a flow controller FC disposed on the dilution fluid output pipeline 241, and a pressure controller PC disposed on the surplus fluid output pipeline 242;

[0097] Purge line 251 and purge valve 252.

[0098] Still taking the MOVCD fluid dilution scenario as an example, the fluid dilution concentration range of the above-mentioned fluid dilution device 200 is introduced:

[0099] Assuming that the range of the first flow controller 212-1 is 300sccm, the range of the first flow controller 212-2 is 1000sccm, the range of the second flow controller 223-1 is 100sccm, and the range of the second flow controller 223-2 is 300sccm, the effective precision control range commonly used when the flow controller is used is still 20% to 90% of the full scale (FS). According to different matching methods between the carrier fluid supply pipeline and the process fluid supply pipeline, the dilution concentration range of the above-mentioned fluid dilution device 200 may include:

[0100] (1) The carrier fluid supply pipeline 211-1 cooperates with the process fluid supply pipeline 221-1;

[0101] See also Figure 6 The calculated dilution concentration range is 6.90% to 60.00%, and the maximum process fluid flow rate can reach 90 sccm.

[0102] (2) The carrier fluid supply pipeline 211 - 1 cooperates with the process fluid supply pipeline 221 - 2;

[0103] See also Figure 7 The calculated dilution concentration range is 18.18% to 81.82%, and the maximum process fluid flow rate can reach 270 sccm.

[0104] (3) The carrier fluid supply pipeline 211 - 2 cooperates with the process fluid supply pipeline 221 - 1;

[0105] See also Figure 8 The calculated dilution concentration range is 2.17% to 31.03%, and the maximum process fluid flow rate can reach 90 sccm.

[0106] (4) The carrier fluid supply pipeline 211-2 cooperates with the process fluid supply pipeline 221-2;

[0107] See also Fig. 9 The calculated dilution concentration range is 6.25% to 57.45%, and the maximum process fluid flow rate can reach 270 sccm.

[0108] (5) The carrier fluid supply pipeline 211 - 1 and the carrier fluid supply pipeline 211 - 2 cooperate with the process fluid supply pipeline 221 - 1 and the process fluid supply pipeline 221 - 2;

[0109] See also Fig.10 The calculated dilution concentration range is 1.71% to 85.71%, and the maximum process fluid flow rate can reach 360 sccm.

[0110] It is understandable that in addition to the above-mentioned combinations, one carrier fluid supply pipeline can be used to match two process fluid supply pipelines, or two carrier fluid supply pipelines can be used to match one process fluid supply pipeline to perform fluid mixing, which will not be described in detail in the embodiments of the present application.

[0111] See also Fig.11 The total dilution concentration range after summarizing the dilution concentration ranges of the five formulations (1) to (5) is 1.71% to 85.71%, and the maximum process fluid flow rate can reach 360 sccm. It can be understood that Fig.11 What is shown is the actual usage interval after the actual usage interval of the flow controller FC is set at the large range. In addition, it can be understood that Fig.11 The horizontal axis of the middle coordinate system indicates the carrier fluid supply flow rate at the carrier fluid supply side, and the vertical axis indicates the process fluid supply flow rate at the process fluid side.

[0112] It is understandable that the above-mentioned various matching methods partially overlap in the actual use range. If the corresponding pipeline matching method is selected according to the target dilution concentration and target flow rate of the process fluid, the pipeline with a smaller range can be preferred. Since the error of the flow controller is calculated as a percentage of the range, selecting a pipeline with a smaller range can obtain a smaller dilution concentration error.

[0113] Based on the same inventive concept, an embodiment of the present application further provides a fluid dilution system 300 , which includes at least two of any of the above-mentioned fluid dilution devices 200 .

[0114] At least two fluid dilution devices are used to:

[0115] Deliver dilution fluid of the same target concentration to the same process pipeline;

[0116] Alternatively, dilution fluids of different target concentrations are delivered to the same process line;

[0117] Alternatively, dilution fluids of the same target concentration may be delivered to different process lines;

[0118] Alternatively, dilution fluids of different target concentrations are delivered to different process lines.

[0119] See also Fig.12 Taking the above-mentioned fluid dilution system 300 including two above-mentioned fluid dilution devices 200 as an example, the two fluid dilution devices 200 can deliver dilution fluids of the same / different target concentrations to the same process pipeline, or deliver dilution fluids of the same / different target concentrations to different process pipelines.

[0120] An input switching function may be added to the process fluid supply portion to control the fluid dilution device 200 into which the process fluid flows.

[0121] In addition, it can be understood that a plurality of fluid dilution devices 200 can share a set of purge pipelines 251 and purge valves 252 .

[0122] See also Fig.13 Based on the same inventive concept, the present application also provides a fluid dilution method, which includes:

[0123] Step S410: obtaining a target flow rate and a target concentration of the process fluid for the fluid dilution task;

[0124] Step S420: traverse all pipeline combinations in the carrier fluid supply pipeline and the process fluid process pipeline of the fluid dilution device to determine a target pipeline combination that satisfies the target flow rate and target concentration of the process fluid in the working interval; wherein the fluid dilution device is any of the above-mentioned fluid dilution devices 200;

[0125] Step S430: diluting the process fluid using the target pipeline combination.

[0126] As an optional implementation of the fluid dilution method, the step S430 includes: if there are multiple groups of target pipeline combinations, selecting the pipeline combination with the smallest dilution concentration error to dilute the process fluid.

[0127] It can be understood that the above introduction to the fluid dilution device 200 has described that the error of the flow controller is positively correlated with its range size. Therefore, when selecting the pipeline combination with the smallest dilution concentration error, the range of the flow controller involved in the pipeline combination can be considered. Generally speaking, the smaller the range, the smaller the dilution concentration error.

[0128] As an optional implementation of the above fluid dilution method, the above fluid dilution method further includes: if the target pipeline combination is not traversed, an alarm is issued.

[0129] It can be understood that if the target pipeline combination is not traversed, the user may be prompted to change the target flow rate and target concentration of the process fluid.

[0130] See also Fig.14 , below Figure 5 Taking the fluid dilution device shown as an example, the overall steps of the above fluid dilution method are introduced:

[0131] Step 1: Obtain the process fluid target flow rate and process fluid target concentration of the fluid dilution task;

[0132] Step 2: determine whether the effective range of the second flow controller 223-1 meets the target flow rate of the process fluid;

[0133] If satisfied, determine which combination of the second flow controller 223-1 and the first flow controller 212-1; the second flow controller 223-1 and the first flow controller 212-2; and the second flow controller 223-1 and the first flow controller 212-1 and the first flow controller 212-2 has a dilution concentration range that can meet the target concentration of the process fluid; if the target pipeline combination is found, open the corresponding on-off valve; if the target pipeline combination is not found, execute step three;

[0134] If not satisfied, proceed to step 3;

[0135] Step 3: determine whether the effective range of the second flow controller 223-2 meets the target flow rate of the process fluid;

[0136] If satisfied, determine which of the three combinations of the second flow controller 223-2 and the first flow controller 212-1, the second flow controller 223-2 and the first flow controller 212-2, and the second flow controller 223-2 and the first flow controller 212-1 and the first flow controller 212-2 has a dilution concentration range that can meet the target concentration of the process fluid; if the target pipeline combination is found, open the corresponding on-off valve; if the target pipeline combination is not found, execute step 4;

[0137] If not satisfied, proceed to step 4;

[0138] Step 4: determine whether the effective range of the combination of the second flow controller 223-1 and the second flow controller 223-2 meets the target flow rate of the process fluid;

[0139] If satisfied, determine which combination of the second flow controller 223-1, the second flow controller 223-2 and the first flow controller 212-1; the second flow controller 223-1, the second flow controller 223-2 and the first flow controller 212-2; and the second flow controller 223-1, the second flow controller 223-2, the first flow controller 212-1 and the first flow controller 212-2 has a dilution concentration range that can meet the target concentration of the process fluid; if the target pipeline combination is found, open the corresponding on-off valve, if the target pipeline combination is not found, execute step five;

[0140] If not satisfied, proceed to step 5;

[0141] Step 5: Issue an alarm.

[0142] Fig.15 A schematic diagram of an electronic device provided in an embodiment of the present application. Fig.15The electronic device 500 includes: a processor 510, a memory 520 and a communication interface 530. These components are interconnected and communicate with each other through a communication bus 540 and / or other forms of connection mechanisms (not shown).

[0143] The memory 520 includes one or more (only one is shown in the figure), which may be, but not limited to, a random access memory (RAM), a read only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), etc. The processor 510 and other possible components may access the memory 520 and read and / or write data therein.

[0144] The processor 510 includes one or more (only one is shown in the figure), which can be an integrated circuit chip with signal processing capabilities. The above-mentioned processor 510 can be a general-purpose processor, including a central processing unit (CPU), a micro controller unit (MCU), a network processor (NP) or other conventional processors; it can also be a special-purpose processor, including a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components.

[0145] The communication interface 530 includes one or more (only one is shown in the figure), which can be used to communicate directly or indirectly with other devices to exchange data. For example, the communication interface 530 can be an Ethernet interface; it can be a mobile communication network interface, such as an interface of a 3G, 4G, or 5G network; or it can be other types of interfaces with data transceiving functions.

[0146] One or more computer program instructions may be stored in the memory 520 , and the processor 510 may read and execute these computer program instructions to implement the fluid dilution method and other desired functions provided in the embodiments of the present application.

[0147] Understandably, Fig.15 The structure shown is for illustration only. The electronic device 500 may also include Fig.15 More or fewer components as shown, or with Fig.15 Different configurations are shown. Fig.15 Each component shown in the figure can be implemented by hardware, software or a combination thereof. For example, the electronic device 500 can be a single server (or other device with computing processing capabilities), a combination of multiple servers, a cluster of a large number of servers, etc., and can be both a physical device and a virtual device.

[0148] The present application also provides a computer-readable storage medium, which stores computer program instructions. When the computer program instructions are read and executed by a computer processor, the fluid dilution method provided by the present application is executed. For example, the computer-readable storage medium can be implemented as Fig.15 The memory 520 in the electronic device 500.

[0149] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0150] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0151] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0152] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0153] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A fluid dilution device, characterized in that: The device comprises: a carrier fluid supply unit, a process fluid supply unit, a fluid mixing pipeline and a dilution fluid output unit; The carrier fluid supply unit includes M carrier fluid supply pipelines; the process fluid supply unit includes N process fluid supply pipelines; the output end of the carrier fluid supply pipeline and the output end of the process fluid supply pipeline are respectively connected to the input end of the fluid mixing pipeline; the input end and the output end of the dilution fluid output unit are respectively connected to the output end of the fluid mixing pipeline and the process pipeline; m of the M carrier fluid supply lines (where m < M) work together with n of the N process fluid supply lines to m mix m carrier fluids with n process fluids (where n < N) into a dilution fluid of a target concentration in the fluid mixing line; Wherein, M, m, N and n are non-zero natural numbers respectively, and M and N are not 1 at the same time.

2. The fluid dilution device according to claim 1, characterized in that: The device further comprises: a cleaning pipeline; the input end of the cleaning pipeline is connected to the carrier fluid, and the output end is connected to the input end of the process fluid supply pipeline.

3. The fluid dilution device according to claim 1, characterized in that: The process fluid supply unit further comprises: a one-way valve installed at an input end of the process fluid supply pipeline, for allowing the process fluid to flow into the process fluid supply pipeline.

4. The fluid dilution device according to claim 1, characterized in that: The dilution fluid output unit comprises: at least one dilution fluid output pipeline; the input end of the dilution fluid output pipeline is connected to the output end of the fluid mixing pipeline, and the output end is connected to the process pipeline.

5. The fluid dilution device according to claim 4, characterized in that: The dilution fluid output unit further includes: at least one redundant fluid output pipeline; the input end of the redundant fluid output pipeline is connected to the output end of the fluid mixing pipeline.

6. The fluid dilution device according to any one of claims 1 to 5, characterized in that: The carrier fluid supply unit further includes: a first flow controller and a first on-off valve installed on the carrier fluid supply pipeline, wherein the first flow controller is used to control the carrier fluid supply flow of the carrier fluid supply pipeline, and the first on-off valve is used to control the on-off state of the carrier fluid supply pipeline; The process fluid supply unit also includes: a second flow controller and a second on-off valve installed on the process fluid supply pipeline, wherein the second flow controller is used to control the process fluid supply flow of the process fluid supply pipeline, and the second on-off valve is used to control the on-off state of the process fluid supply pipeline.

7. A fluid dilution system, characterized in that: The system comprises: At least two fluid dilution devices according to any one of claims 1 to 6; At least two of the fluid dilution devices are used to: deliver dilution fluids of the same target concentration to the same process pipeline; or, deliver dilution fluids of different target concentrations to the same process pipeline; or, deliver dilution fluids of the same target concentration to different process pipelines; or, deliver dilution fluids of different target concentrations to different process pipelines.

8. A fluid dilution method, characterized in that: The method comprises: Obtaining a process fluid target flow rate and a process fluid target concentration of a fluid dilution task; In the carrier fluid supply pipeline and the process fluid process pipeline of the fluid dilution device, all pipeline combinations are traversed to determine the target pipeline combination whose working interval satisfies the target flow rate of the process fluid and the target concentration of the process fluid; wherein the fluid dilution device is the fluid dilution device according to any one of claims 1 to 6; The process fluid is diluted using the target pipeline combination.

9. The fluid dilution method according to claim 8, characterized in that: Diluting the process fluid using the target pipeline combination includes: If there are multiple groups of the target pipeline combinations, the pipeline combination with the smallest dilution concentration error is selected to dilute the process fluid.

10. The fluid dilution method according to claim 8, characterized in that: The method further comprises: If the target pipeline combination is not traversed, an alarm is issued.

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