Visualizing apparatus and method for electrochemical machining of electrostatically induced surface waves by a mask

Abstract

The application relates to a visual device and method for electrochemical machining of a body wave induced surface wave electrostatic mask, belonging to the field of electrochemical machining. A workpiece in the device is fixed on one side of an insulating baffle with a square through hole by an insulating tape and is inserted into a clamping groove in an electrolytic tank. The plane where a piezoelectric ceramic sheet is located and the plane where the workpiece is located form a 45-degree angle, and a water outlet hole of the electrolytic tank sprays electrolyte flow at a 45-degree angle with the plane where the workpiece is located. A high-speed camera, the piezoelectric ceramic sheet, the water outlet hole and the workpiece are located at the same horizontal position. Based on the device, wireless machining of the workpiece can be realized. The body wave excited by the piezoelectric ceramic sheet induces surface waves on the surface of the workpiece, so that the electrolytic products such as bubbles are timely removed, and the electrolyte flow sprayed by the water outlet hole timely updates the electrolyte. The bubble derivation process in the machining process is directly observed by the high-speed camera. The application is simple in operation, can effectively remove the bubbles in the blind hole and improves the mask electrochemical machining precision.

Description

Technical Field

[0001] The present invention relates to a mask electrolytic machining device and method, in particular to a visualization device and method for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves, belonging to the field of electrolytic machining. Background Art

[0002] Masked electrochemical machining (MEM) utilizes the principle of anodic dissolution to selectively remove areas unprotected by photoresist. It is a key technology for mass-producing metal microstructures, offering advantages such as burr-free, stress-free processing, high-volume production, and low cost. However, due to the semi-enclosed microblind vias formed between the photoresist and the workpiece during the process, the removal of electrolysis products during MEM is difficult. This results in slower processing speeds in areas covered by the products and faster processing speeds in uncovered areas, leading to poor process uniformity. This non-uniformity severely impacts product consistency and reliability.

[0003] To address the mass transfer problem within micro blind holes, Chinese invention patent CN107116274A proposes a cavitation jet-assisted mask electrolytic machining method. This method utilizes a micro-water jet formed by the collapse of the cavitation jet electrolyte to expel electrolytic products, thereby improving the quality of the machined surface. Chinese invention patent CN106312206A proposes a movable mask electrolytic machining device and method. This method places a metal porous medium close to the anode workpiece, pumps electrolyte above the porous medium, and then flows out from all sides of the porous medium, allowing for smooth inter-electrode mass transfer and improving machining accuracy. Chinese invention patent CN117139754A proposes a surface acoustic wave-assisted mask electrolysis device and method. This method utilizes surface acoustic wave acoustic flow to remove electrolytic products, thereby improving machining uniformity.

[0004] The above-mentioned methods have significantly advanced the development of mask electrochemical processing technology. However, the problem of removing bubbles from the electrolysis products remains unresolved. Bubbles adhere strongly to microblind vias, making them difficult to effectively remove using conventional methods. Currently, there are few methods for removing bubbles from the electrolysis process. Therefore, it is necessary to develop a device and method that effectively removes bubble products and monitors the evolution of bubbles during processing to identify and remove them promptly, thereby improving processing uniformity. Summary of the Invention

[0005] To address these issues, the present invention proposes a visualization device and method for electrostatic induction mask electrochemical machining (EMM) using bulk wave-induced surface waves (BW-induced surface waves). This method utilizes the high acoustic pressure gradients in BW-induced surface waves to promptly remove electrolysis products, including bubbles. Furthermore, visualization technology is used to monitor electrolysis products in real time, enabling their timely detection and removal, thereby improving the uniformity of MEM machining of metal microstructures.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0007] A visualization device for electrostatic induction mask electrolytic machining of bulk wave-induced surface waves, the visualization device mainly comprising a power supply 1, a power amplifier board 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic cell 7, two pumps 8, four hoses 9, a spotlight 10, a camera bracket 11, a high-speed camera 12, a cathode 13, and two transducers 14. The sensing electrode 6 is installed in the slot 710 in the middle of the electrolytic cell 7; the anode 5 and the cathode 13 are respectively installed in the two electrode brackets 702 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; the two transducers 14 are respectively installed in the transducer brackets 707 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; one end of the four hoses 9 are fastened to the four hose interfaces 703 on the outer sides of the front and rear side walls 701 of the electrolytic cell 7, among which the other end of the first (or third) hose 9 connected to the hose interface 703 above the front (or rear) side wall 701 is connected to the water outlet of the first (or second) pump 8, and the other end of the second (or fourth) hose 9 connected to the hose interface 703 below the front (or rear) side wall 701 is connected to the water inlet of the first (or second) pump 8. The power supply 1 supplies power to the anode 5 and cathode 13 via a power line 3. The power amplifier board 2 drives two transducers 14 via a signal line 4 to remove the electrolysis products 17. The pump 8 circulates the electrolyte within the electrolytic cell 7 via a hose 9. The electrolysis products 17 are generated during the machining process on the machined and unmachined surfaces of the workpiece 601 located on the sensing electrode 6. The high-speed camera 12 is fixed to a camera bracket 11 and illuminated by a spotlight 10. It observes the machining process of the workpiece 601 in real time through the front (or rear) sidewall 701 of the electrolytic cell 7.

[0008] Furthermore, the electrolytic cell 7 primarily comprises sidewalls 701, two electrode holders 702, four hose connectors 703, four transducer holders 707, two nozzles 708, two stoppers 709, and a slot 710. The two electrode holders 702, four transducer holders 707, and two nozzles 708 are located on the inner sides of the front and rear sidewalls 701 of the electrolytic cell 7, while the four hose connectors 703 are located on the outer sides of the front and rear sidewalls 701 of the electrolytic cell 7. The two stoppers 709 are concave-shaped plates, parallel to the two sidewalls 701, and located in the middle of the electrolytic cell 7. A slot 710 is formed between the two stoppers 709. The slot 710 is used to insert the sensing electrode 6, dividing the electrolytic cell 7 into two symmetrical sections. The front and rear side walls 701 are plate structures with two positioning holes 705 and two side wall holes 706. The two positioning holes 705 are located on the left side of the side wall 701 and are used to fix the transducer bracket 707. The two side wall holes 706 are located on the right side of the side wall 701 and are used to position the hose interface 703 and the nozzle 708. The hose interface 703 is a hollow cube structure with one end open. A connector 704 is opened on the side to fasten the hose 9. The open end covers the outside of the side wall hole 706. The transducer bracket 707 is a convex plate structure with a protruding clip 714 fastened to the inside of the positioning hole 705 on the side wall 701. The center of the plate has a diagonally arranged rectangular ceramic fixing hole 713 for fixing the transducer 14. The electrode bracket 702 is a U-shaped structure, located to the left of the transducer bracket 707, and together with the inner side of the side wall 701, forms a through hole for fixing the cathode 13 and the anode 5. The nozzle 708 is a hollow right triangular prism structure, with the lower surface being an isosceles right triangle. A circular hole 711 identical to the side wall hole 706 is opened on one side corresponding to the right angle side. The circular hole 711 and the side wall hole 706 above the side wall 701 are completely aligned on the inner side of the side wall 701. A vertical rectangular water outlet 712 is opened on the side corresponding to the hypotenuse.

[0009] Furthermore, the anode 5, cathode 13, transducer 14, and sensing electrode 6 are all fixed to the electrolytic cell 7 by riveting, making them easy to replace and remove at any time. The sensing electrode 6 is inserted into the middle of the electrolytic cell 7, dividing the electrolytic cell 7 into two parts, front and back. The anode 5 and cathode 13 installed in the electrolytic cell 7 are arranged symmetrically with respect to the sensing electrode 6. The two transducers 14 are arranged symmetrically with respect to the sensing electrode 6. The two nozzles 708 in the electrolytic cell 7 are arranged symmetrically with respect to the sensing electrode 6. The transducer 14 is inserted into the ceramic fixing hole 713 in the transducer bracket 707, and the transducer 14 is located between the anode 5 or cathode 13 and the nozzle 708. The anode 5 and cathode 13 are inserted into the electrode bracket 702. The centers of the workpiece 601 on the sensing electrode 6, the water outlet 712 on the nozzle 708, and the piezoelectric ceramic plate 141 on the transducer 14 are at the same horizontal position. A normal line passing through the center of the water outlet 712 on the nozzle 708 and perpendicular to the side of the water outlet 712 passes through the center of the workpiece 601 on the sensing electrode 6. The water outlet 712 ejects an electrolyte flow 15 at a 45-degree angle to the plane of the workpiece 601. A normal line passing through the center of the piezoelectric ceramic 141 on the transducer 14 and perpendicular to the piezoelectric ceramic 141 passes through the center of the workpiece 601 on the sensing electrode 6. The direction of the acoustic wave 16 excited by the piezoelectric ceramic 141 is 45 degrees to the plane of the workpiece 601.

[0010] Furthermore, the sensing electrode 6 primarily comprises a workpiece 601, an insulating baffle 602, insulating tape 603, and a slider 605. The insulating baffle 602 has a square through-hole 604 in the center. The workpiece 601 is made of a metal plate 606 coated on one side with a photoresist 607. The photoresist 607 is an insulating material with a hollowed-out pattern. The side of the metal plate 606 coated with the photoresist 607 is the processed surface, while the side not coated with the photoresist is the non-processed surface. The non-processed surface of the workpiece 601 is covered over the square through-hole 604 of the insulating baffle 602. The insulating tape 603 adheres the non-processed areas around the processed surface of the workpiece 601 to either side of the insulating baffle 602. The slider 605 is mounted above the insulating baffle 602. In particular, the sensing electrode 6 is not connected to any wires. When the sensing electrode 6 is inserted into the slot 710, the machined surface of the workpiece 601 and the cathode 13 are located on the same side, and the unmachined surface of the workpiece 601 and the anode 5 are located on the same side. The slider 605 can slide along the limit plate 709 in the electrolytic cell 7 to ensure that the center of the machined surface of the workpiece 601 in the sensing electrode 6 is located at the exact center of the electrolytic cell 7.

[0011] Furthermore, the transducer 14 mainly includes a piezoelectric ceramic piece 141, a rubber ring 142, and a fixed plate 143. The piezoelectric ceramic piece 141 is a disc with a frequency of 1.7MHz, and the front side is completely covered with a positive electrode and an insulating film, wherein the insulating film acts as an insulator outside the positive electrode; there is a negative electrode at the center of the back side of the piezoelectric ceramic piece 141, and the positive electrode is flanged to the edge of the back side, and the positive and negative electrodes are respectively connected to the positive and negative electrodes of the signal line 4. The rubber ring 142 is a circular ring with an inner groove, and the piezoelectric ceramic piece 141 is embedded in the inner groove of the rubber ring 142. The fixed plate 143 is a convex plate structure, and the boss of the fixed plate 143 is inserted into the ceramic fixing hole 713 on the transducer bracket 707; the fixed plate 143 is flatly attached to the rubber ring on the back side of the piezoelectric ceramic piece 141 and insulated and sealed with epoxy resin. Only the insulating film on the front side of the piezoelectric ceramic piece 141 is exposed in the transducer 14. When the transducer 14 is inserted into the transducer bracket 707, the outer normal passing through the center of the insulating film is directed toward the center of the workpiece 601 to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45° to the plane where the workpiece 601 is located.

[0012] A method for electrostatic induction mask electrolytic machining of surface waves induced by bulk waves is implemented based on the above device and includes the following steps:

[0013] S1. Fabricate workpiece 601. Coat photoresist 607 on the processed surface of metal plate 606, and pattern the film through coating, photoresist exposure and development processes.

[0014] S2. Fabricate the sensing electrode 6. Cover the square through hole 604 of the insulating baffle 602 with the non-machined surface of the workpiece 601, and use insulating tape 603 to stick the non-machined area around the machined surface of the workpiece 601 to either side of the insulating baffle 602.

[0015] S3. Electrostatic induction mask electrolytic machining of surface waves induced by bulk waves. Insert the induction electrode 6 into the slot 710 of the electrolytic cell 7 so that the machined surface of the workpiece 601 is on the same side as the cathode 13, and the non-machined surface of the workpiece 601 is on the same side as the anode 5. At the same time, slightly move the induction electrode 6 to ensure that the surface to be machined is in the center of the electrolytic cell 7. Turn on the spotlight 10, high-speed camera 12, two pumps 8, power amplifier board 2, and power supply 1 in sequence, and perform electrostatic induction mask electrolytic machining and monitoring of surface waves induced by bulk waves at the same time. Among them, the order of turning on the spotlight 10, high-speed camera 12, two pumps 8 and power amplifier board 2 can be adjusted arbitrarily. Power supply 1 is turned on last. In this process:

[0016] The power supply drives the anode 5 and the cathode 13 to undergo oxidation and reduction reactions, and generates an electric field in the electrolyte; under the action of the electric field, the machined surface of the workpiece 601 induces positive charge, undergoes oxidation reaction and produces electrolytic product 17, and the non-machined surface induces negative charge, undergoes reduction reaction and produces electrolytic product 17.

[0017] The insulating film on the front of the exposed piezoelectric ceramic sheet 141 in transducer 14 contacts the electrolyte. Under the influence of the 1.7 MHz alternating current output by amplifier board 2, the two piezoelectric ceramic sheets 141, symmetrical about sensing electrode 6, generate high-frequency vibrating acoustic waves 16 due to the inverse piezoelectric effect. These acoustic waves 16 propagate through the insulating film as bulk waves in the electrolyte, propagating at a 45° angle to the plane of workpiece 601 to the machined and unmachined surfaces of workpiece 601. Upon encountering workpiece 601, the bulk waves propagate through the electrolyte in the form of surface waves at the interface between workpiece 601 and the electrolyte, while the remaining portion is reflected back into the electrolyte as reflected waves. Because the bulk waves induce surface waves, the incident and reflected waves form a large pressure gradient in the electrolyte surrounding the machined and unmachined surfaces of workpiece 601, generating acoustic streaming and promoting the timely removal of electrolysis products 17 from the machined and unmachined surfaces of workpiece 601. In particular, since the body wave-induced surface wave only generates a large pressure gradient near the machined surface and non-machined surface of the workpiece 601, there is a strong acoustic flow effect near the machined surface and non-machined surface of the workpiece 601, and the acoustic flow away from the machined surface and non-machined surface of the workpiece 601 is weak.

[0018] The water inlets of the two pumps 8 draw electrolyte from the electrolytic cell 7 through hose connections 703 located below the outer sides of the front and rear side walls 701 of the electrolytic cell 7. The water outlets of the two pumps 8 deliver the electrolyte to the hose 9, hose connections 703 located above the front and rear side walls 701 of the electrolytic cell 7, and nozzle 708, causing the water outlet 712 to eject electrolyte stream 15 at a 45-degree angle to the plane of the workpiece 601. Due to its laminar flow, electrolyte stream 15 has a higher velocity away from the machined surface, thus promptly flushing away the electrolysis products 17 that have been displaced from the machined and non-machined surfaces of the workpiece 601 by the surface waves induced by the body waves.

[0019] The high-speed camera 12 can directly observe the bubble evolution process during the processing. When bubble accumulation is observed, the bubble removal rate can be increased by increasing the power of the power amplifier board 2.

[0020] S4. Post-processing: Remove the sensing electrode 6, tear off the insulating tape 603, and remove the photoresist 607 in a debonding solution to obtain a completed metal microstructure.

[0021] The beneficial effects of the present invention are:

[0022] (1) The present invention improves mass transfer efficiency. The pump promotes macroscopic circulation of the electrolyte, and the body waves induce surface waves to achieve efficient mass transfer within the microscopic confined space, eliminating the negative effects of electrolysis products such as bubbles during the electrolysis process.

[0023] (2) The present invention improves the mass transfer environment during the through-hole structure processing. By utilizing the principle of electrostatic induction to achieve mask electrolytic processing, the back mask process in the traditional mask electrolytic processing process is eliminated, and the original blind hole structure (formed by the back mask and the through hole) is transformed into a through hole structure, reducing the mass transfer resistance.

[0024] (3) The present invention can realize wireless processing of workpieces, which is more manufacturable. The workpiece does not require back masking or electrical processing, which simplifies the operation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Overall view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves;

[0026] Figure 2 A top view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave-induced surface waves;

[0027] Figure 3 The main view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves;

[0028] Figure 4 This is the axonometric drawing of the electrolytic cell;

[0029] Figure 5 This is the axonometric drawing of the hose interface;

[0030] Figure 6 This is the axonometric drawing of the electrode holder;

[0031] Figure 7 Axonometric view of the electrolyzer with the hose connections and electrode holder hidden;

[0032] Figure 8 Axonometric view of the electrolyzer with the hose connections, electrode holder and one side wall hidden;

[0033] Figure 9 This is the axonometric drawing of the nozzle;

[0034] Figure 10 This is the axonometric drawing of the transducer bracket;

[0035] Figure 11 is the axonometric diagram of the sensing electrode;

[0036] Figure 12 This is the axonometric drawing of the insulating baffle;

[0037] Figure 13 is the axonometric drawing of the transducer;

[0038] Figure 14 The schematic diagram of the electrostatic induction mask electrolytic machining method for body wave induced surface waves;

[0039] Figure 15 A comparison chart of the micro-gripper used for electrostatic induction mask electrochemical machining of bulk wave-induced surface waves and traditional mask electrochemical machining.

[0040] In the figure: 1 power supply, 2 amplifier board, 3 power line, 4 signal line, 5 anode, 6 sensing electrode, 7 electrolytic cell, 8 pump, 9 hose, 10 spotlight, 11 camera bracket, 12 high-speed camera, 13 cathode, 14 transducer, 15 electrolyte flow, 16 sound wave, 17 electrolysis product;

[0041] 601 workpiece, 602 insulating baffle, 603 insulating tape, 604 square through hole, 605 slider, 606 metal plate, 607 photoresist;

[0042] 701 side wall, 702 electrode bracket, 703 hose interface, 704 connector, 705 positioning hole, 706 side wall hole, 707 transducer bracket, 708 nozzle, 709 limit plate, 710 slot, 711 round hole, 712 water outlet hole, 713 ceramic fixing hole, 714 buckle;

[0043] 141 piezoelectric ceramic sheet, 142 rubber ring, 143 fixing plate. DETAILED DESCRIPTION

[0044] The core idea of ​​the present invention is to provide a visualization device and method for electrostatic induction mask electrolytic machining of surface waves induced by body waves. The device uses the principle of electrostatic induction to perform machining, break the semi-enclosed structure formed by the photoresist and the workpiece, and reduce the mass transfer resistance. The device also uses the high sound pressure gradient of surface acoustic waves induced by body waves to achieve the timely discharge of electrolytic products including bubbles. At the same time, visualization technology is used to achieve the timely detection and discharge of electrolytic products, thereby improving the uniformity of mask electrolytic machining of metal microstructures.

[0045] The present invention will be further described below in conjunction with the embodiments shown in the accompanying drawings. It should be understood that the embodiments described herein are merely some examples, not all, of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are intended to fall within the scope of protection of the present invention.

[0046] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0047] The invention discloses a visualization device for electrostatic induction mask electrochemical machining of surface waves induced by bulk waves. Figure 1 The overall view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves. Figure 2 A top view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave-induced surface waves. Figure 3 This is a front view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave-induced surface waves. Figure 3In the figure, the spotlight 10, the camera support 11, the high-speed camera 12 and the side wall 701 are not shown. Figure 3 The partially enlarged image in FIG. 1 is the portion presented in the field of view of the high-speed camera 12 .

[0048] like Figures 1 to 3 As shown, a visualization device for electrostatic induction mask electrolytic machining of bulk wave induced surface waves according to an embodiment of the present invention mainly includes a power supply 1, a power amplifier board 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic cell 7, a pump 8, a hose 9, a spotlight 10, a camera bracket 11, a high-speed camera 12, a cathode 13, and a transducer 14. The sensing electrode 6 involved in one embodiment of the present invention is installed in the slot 710 in the middle of the electrolytic cell 7; the anode 5 and the cathode 13 are respectively installed in the two electrode brackets 702 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; the two transducers 14 are respectively installed in the transducer brackets 707 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; one end of the four hoses 9 is fastened to the four hose interfaces 703 on the outer sides of the front and rear side walls 701 of the electrolytic cell 7, among which the other end of the first (or third) hose 9 connected to the hose interface 703 above the front (or rear) side wall 701 is connected to the water outlet of the first (or second) pump 8, and the other end of the second (or fourth) hose 9 connected to the hose interface 703 below the front (or rear) side wall 701 is connected to the water inlet of the first (or second) pump 8. Power supply 1 supplies power to anode 5 and cathode 13 via power line 3. A power amplifier board 2 drives two transducers 14 via signal line 4 to remove electrolysis products 17. Pump 8 circulates the electrolyte within electrolytic cell 7 via hose 9. The electrolysis products 17 involved in one embodiment of the present invention are generated during the machining process of the workpiece 601 located on the induction electrode 6 and the unmachined surfaces. A high-speed camera 12 is mounted on a camera bracket 11 and illuminated by a spotlight 10. It observes the machining process of the workpiece 601 in real time through the front (or rear) sidewall 701 of the electrolytic cell 7.

[0049] Figure 4 This is the axonometric drawing of the electrolytic cell. Figure 5 This is the axonometric drawing of the hose interface. Figure 6 This is the axonometric drawing of the electrode bracket. Figure 7 Axonometric view of the electrolyzer with the hose connections and electrode holder hidden. Figure 8 Axonometric view of the electrolyzer with the hose connections, electrode holder and one side wall hidden. Figure 9 This is the nozzle axonometric drawing. Figure 10 This is the axonometric drawing of the transducer bracket. Figures 4-10 The structure of each component of the electrolytic cell 7 and the relative position relationship between them are described. The electrolytic cell 7 is made of transparent acrylic plates spliced ​​together by gluing, and all its components are tightly connected.

[0050] like Figures 4-10As shown, the electrolytic cell 7 according to one embodiment of the present invention mainly includes a side wall 701, two electrode holders 702, four hose interfaces 703, four transducer holders 707, two nozzles 708, two limit plates 709, and a slot 710. The two electrode holders 702, four transducer holders 707, and two nozzles 708 are located on the inner sides of the front and rear side walls 701 of the electrolytic cell 7, while the four hose interfaces 703 are located on the outer sides of the front and rear side walls 701 of the electrolytic cell 7.

[0051] like Figure 7 、 8 As shown, the two limiting plates 709 involved in one embodiment of the present invention are concave plate structures, parallel to the two side walls 701, and located in the middle of the electrolytic cell 7. A slot 710 is formed between the two limiting plates 709. The slot 710 is used to insert the sensing electrode 6, dividing the electrolytic cell 7 into two symmetrical front and back parts. The front and rear side walls 701 involved in one embodiment of the present invention are plate structures with two positioning holes 705 and two side wall holes 706. The two positioning holes 705 are located on the left side of the side wall 701 for fixing the transducer bracket 707; the two side wall holes 706 are located on the right side of the side wall 701 for positioning the hose interface 703 and the nozzle 708.

[0052] like Figure 4 、 5 As shown in FIG. 7 , a hose interface 703 according to an embodiment of the present invention is a hollow cube structure with one end open, a connector 704 for being securely connected to the hose 9 is provided on the side, and the open end covers the outside of the side wall hole 706 .

[0053] like Figure 7 、 8 As shown in FIG10 , the transducer bracket 707 involved in one embodiment of the present invention is a convex-shaped plate structure, and the protruding clip 714 is fastened to the inner side of the positioning hole 705 on the side wall 701, and there are diagonally arranged rectangular ceramic fixing holes 713 in the middle of the plate for fixing the transducer 14.

[0054] like Figure 4 、 6 As shown, the electrode bracket 702 involved in one embodiment of the present invention is a U-shaped structure, located on the left side of the transducer bracket 707, and together with the inner side of the side wall 701 forms a through hole for fixing the cathode 13 and the anode 5.

[0055] like Figure 7 、 8As shown in Figures 9 and 9, the nozzle 708 involved in one embodiment of the present invention is a hollow right triangular prism structure, the lower surface of which is an isosceles right triangle, and a circular hole 711 identical to the side wall hole 706 is opened on a side surface corresponding to the right angle side, and the circular hole 711 is completely fitted with the side wall hole 706 above the side wall 701 on the inner side of the side wall 701, and a vertical rectangular water outlet hole 712 is opened on the side surface corresponding to the hypotenuse.

[0056] Figure 11 is the axonometric diagram of the sensing electrode, Figure 12 This is the axonometric drawing of the insulating baffle. Figure 14 Schematic diagram of the electrostatic induction mask electrochemical machining method of surface waves induced by body waves. Figure 11 、 12 The induction electrode 6 according to one embodiment of the present invention mainly comprises a workpiece 601, an insulating baffle 602, an insulating tape 603, and a slider 605. A square through hole 604 is provided in the middle of the insulating baffle 602. Figure 14 As shown, the workpiece 601 is made of a metal plate 606 coated with a photoresist 607 on one side, wherein the photoresist 607 is an insulating material with a hollow pattern, the side of the metal plate 606 coated with the photoresist 607 is the processing surface, and the side not coated with the photoresist is the non-processing surface. Figure 11 As shown, the non-machined surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the insulating tape 603 is used to stick the non-machined position around the machined surface of the workpiece 601 to any side of the insulating baffle 602. The slider 605 is installed above the insulating baffle 602. In particular, Figure 1 、 2 As shown in , 3 , the sensing electrode 6 is not connected to any wires. When the sensing electrode 6 is inserted into the slot 710 , the machined surface of the workpiece 601 and the cathode 13 are located on the same side, and the non-machined surface of the workpiece 601 and the anode 5 are located on the same side. The slider 605 can slide along the limit plate 709 in the electrolytic cell 7 to ensure that the center of the machined surface of the workpiece 601 in the sensing electrode 6 is located at the exact center of the electrolytic cell 7.

[0057] Figure 13It is an axonometric view of the transducer. The transducer 14 involved in one embodiment of the present invention mainly includes a piezoelectric ceramic piece 141, a rubber ring 142, and a fixed plate 143. The piezoelectric ceramic piece 141 is a disc with a frequency of 1.7MHz, and the front side is completely covered with a positive electrode and an insulating film, wherein the insulating film plays an insulating role outside the positive electrode; there is a negative electrode at the center position of the back side of the piezoelectric ceramic piece 141, and the positive electrode is flanged to the edge of the back side, and the positive and negative electrodes are respectively connected to the positive and negative electrodes of the signal line 4. The rubber ring 142 is an inner groove ring, and the piezoelectric ceramic piece 141 is embedded in the inner groove of the rubber ring 142. The fixed plate 143 is a convex plate structure, and the boss of the fixed plate 143 is inserted into the ceramic fixing hole 713 on the transducer bracket 707; the fixed plate 143 is flatly attached to the rubber ring on the back side of the piezoelectric ceramic piece 141 and insulated and sealed with epoxy resin. As shown Figure 2 As shown, only the insulating film on the front side of the piezoelectric ceramic piece 141 is exposed in the transducer 14. When the transducer 14 is inserted into the transducer bracket 707, the outer normal through the center of the insulating film is directed toward the center of the workpiece 601 to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45 degrees to the plane where the workpiece 601 is located.

[0058] The electrolyte involved in one embodiment of the present invention flows out from the side wall hole 706 on the lower side of the front or rear side wall 701 of the electrolytic cell 7, passes through the hose interface 703, the hose 9, the pump 8, and then flows back to the electrolytic cell 7 through the hose 9, the hose interface 703 on the upper side of the side wall 701, the side wall hole 706, and the nozzle 708.

[0059] The anode 5, cathode 13, transducer 14, and sensing electrode 6 involved in one embodiment of the present invention are all fixed to the electrolytic cell 7 by riveting, making them easy to replace and remove at any time. The sensing electrode 6 is inserted into the middle of the electrolytic cell 7, dividing the electrolytic cell 7 into a front and rear portion. The anode 5 and cathode 13 installed in the electrolytic cell 7 are arranged symmetrically with respect to the sensing electrode 6. The two transducers 14 are arranged symmetrically with respect to the sensing electrode 6. The two nozzles 708 in the electrolytic cell 7 are arranged symmetrically with respect to the sensing electrode 6. The transducer 14 is inserted into the ceramic fixing hole 713 in the transducer bracket 707, and the transducer 14 is located between the anode 5 or cathode 13 and the nozzle 708. The anode 5 and cathode 13 are inserted into the electrode bracket 702.

[0060] Specifically, the centers of the workpiece 601 on the sensing electrode 6, the water outlet 712 on the nozzle 708, and the piezoelectric ceramic disc 141 on the transducer 14 are located at the same horizontal position. A normal line passing through the center of the water outlet 712 on the nozzle 708 and perpendicular to the side of the water outlet 712 passes through the center of the workpiece 601 on the sensing electrode 6, causing the water outlet 712 to eject an electrolyte stream 15 at a 45-degree angle to the plane of the workpiece 601. A normal line passing through the center of the piezoelectric ceramic disc 141 on the transducer 14 and perpendicular to the piezoelectric ceramic disc 141 passes through the center of the workpiece 601 on the sensing electrode 6, causing the direction of the acoustic wave 16 excited by the piezoelectric ceramic disc 141 to be at a 45-degree angle to the plane of the workpiece 601.

[0061] The anode 5 and cathode 13 involved in one embodiment of the present invention are replaced and cleaned only when they are worn, damaged, or contaminated. Otherwise, they are installed in the electrode holder 702 in the electrolytic cell 7. The transducer 14 is replaced when the piezoelectric ceramic is damaged or the insulation fails. Otherwise, it is installed in the transducer holder 707 in the electrolytic cell 7.

[0062] An electrostatic induction mask electrochemical machining method for bulk wave induced surface waves according to an embodiment of the present invention is implemented based on the above-mentioned device and includes the following steps:

[0063] S1. Processing workpiece 601. Coating photoresist 607 on the surface of metal plate 606, and patterning the film through coating, photoresist exposure and development. The pattern of photoresist 607 on the surface of workpiece 601 is a micro-gripper.

[0064] In particular, the pattern of photoresist 607 on the processed surface of workpiece 601 according to one embodiment of the present invention is not limited to micro-grippers and can be any desired pattern. The non-processed surface of workpiece 601 is not subjected to insulation treatment, eliminating the back masking process used in conventional masked electrochemical machining. The blind via structure (formed by the back mask and through-holes) in conventional masked electrochemical machining is replaced with a through-hole structure, reducing mass transfer resistance.

[0065] S2. Fabricate the sensing electrode. Cover the square through-hole 604 of the insulating baffle 602 with the non-machined surface of the workpiece 601 , and use insulating tape 603 to stick the non-machined area around the machined surface of the workpiece 601 to either side of the insulating baffle 602 .

[0066] S3. Electrostatic Induction Mask Electrochemical Machining (EIM) with Bulk Wave Induced Surface Waves. Insert the induction electrode 6 into the slot 710 of the electrolytic cell 7, aligning the workpiece 601's machining surface with the cathode 13 and the workpiece 601's non-machining surface with the anode 5. Slightly move the induction electrode 6 to ensure the machining surface is centered in the electrolytic cell 7. Turn on the spotlight 10, high-speed camera 12, two pumps 8, amplifier board 2, and power supply 1, and simultaneously perform EIM with Bulk Wave Induced Surface Waves (BW-ISM) and monitor the machining process. The electrolyte is 25% wt sodium chloride, the power supply current is 0.5 A, the machining time is 10 s, and the amplifier board power is 10 W.

[0067] In particular, the order in which the spotlight 10, the high-speed camera 12, the two pumps 8 and the amplifier board 2 are turned on can be adjusted arbitrarily. The power supply 1 is turned on last.

[0068] Figure 14 This schematic diagram illustrates a bulk-wave-induced surface-wave electrostatic induction mask electrochemical machining method according to one embodiment of the present invention. A power source drives the anode 5 and cathode 13 to undergo oxidation and reduction reactions, generating an electric field in the electrolyte. Under the influence of this electric field, the machined surface of the workpiece 601 is positively charged, undergoing an oxidation reaction and producing electrolytic products 17. The non-machined surface is negatively charged, undergoing a reduction reaction and producing electrolytic products 17.

[0069] At the same time, the exposed piezoelectric ceramic sheet 141 in transducer 14 contacts the electrolyte from its front side. Under the influence of the 1.7 MHz alternating current output by amplifier board 2, the two piezoelectric ceramic sheets 141, symmetrical about sensing electrode 6, generate high-frequency vibration acoustic waves 16 due to the inverse piezoelectric effect. These acoustic waves 16 propagate in the electrolyte as bulk waves, propagating at a 45° angle to the plane of workpiece 601 to the machined and unmachined surfaces of workpiece 601. Upon encountering workpiece 601, the bulk waves in the electrolyte partially propagate as surface waves at the interface between workpiece 601 and the electrolyte, while the remaining portion is reflected back into the electrolyte as reflected waves. Because the bulk waves induce surface waves, the incident and reflected waves form a large pressure gradient in the electrolyte surrounding the machined and unmachined surfaces of workpiece 601, thereby generating acoustic streaming and promoting the timely removal of electrolysis products 17 from the machined and unmachined surfaces of the workpiece. In particular, the acoustic streaming force involved in one embodiment of the present invention is only highly effective near the machined and unmachined surfaces of the workpiece.

[0070] Meanwhile, the water inlets of the two pumps 8 draw electrolyte from the electrolytic tank 7 through the hose interfaces 703 below the two side walls 701 of the electrolytic tank 7, and the water outlets of the two pumps 8 successively deliver the electrolyte to the hose 9, the hose interfaces 703 below the two side walls 701 of the electrolytic tank 7, and the nozzles 708, so that the outlet holes 712 spray the electrolyte flow 15 at an angle of 45° with the plane where the workpiece 601 is located. Since the electrolyte flow 15 is in a laminar flow state, the electrolyte flow 15 has a high flow rate at a position far from the machining surface, so that the electrolytic products 17 generated by the body wave-induced surface wave are timely washed away from the machining surface and the non-machining surface of the workpiece 601.

[0071] Meanwhile, the high-speed camera 12 can directly observe the bubble evolution process during the machining process, and when the bubble accumulation is observed, the bubble removal rate can be increased by increasing the power of the power amplifier plate 2.

[0072] S4. Post-processing. The induction electrode 6 is taken out, the insulating tape 603 is torn off, the photoresist 607 is removed in a degreasing solution, and a machined metal microstructure is obtained.

[0073] The conventional mask electrochemical machining method involved in the pair of ratios of the present application includes the following steps:

[0074] S11. Processing the workpiece 601. The photoresist 607 is coated on the machining surface of the metal plate 606, and the photoresist is patterned through the processes of uniform coating, photoresist exposure, and development. The pattern of the photoresist 607 on the machining surface of the workpiece 601 is a micro clamp. Meanwhile, the non-machining surface of the workpiece 601 is completely coated with insulating photoresist without patterning.

[0075] S12. Making an anode. A hole is drilled at a non-machining position on the machining surface of the workpiece 601, and a positive electrode of the power supply line 3 is connected, and an epoxy resin adhesive is used for insulation treatment at the connection. The square through hole 604 of the insulating baffle 602 covers the non-machining surface of the workpiece 601, and the non-machining position around the machining surface of the workpiece 601 is pasted to any side of the insulating baffle 602 by using the insulating tape 603.

[0076] S13. Conventional mask electrochemical machining. The insulating baffle 602 is inserted into the clamping groove 710 of the electrolytic tank 7, so that the machining surface of the workpiece 601 is located on the same side as the cathode 13, and the workpiece 601 serves as an anode, and the power supply 1 supplies power to the workpiece 601 and the cathode 13. Meanwhile, the insulating baffle 602 is slightly moved to ensure that the machining surface is located at the center of the electrolytic tank 7. The spotlight 10, the high-speed camera 12, the two pumps 8, and the power supply 1 are turned on in sequence, and the conventional mask electrochemical machining and monitoring are simultaneously performed. The electrolyte is 25%wt sodium chloride, the power supply current is 0.5A, and the machining time is 10s.

[0077] S14. Post-processing. The insulating baffle 602 is taken out, the insulating tape 603 is torn off, and the photoresist 607 is removed in a stripping solution to obtain the finished metal microstructure.

[0078] Data analysis of the examples and comparative examples:

[0079] Figure 15 A comparison diagram of the micro gripper of the electrochemical machining with the electrostatic induction mask of the body wave induced surface wave and the traditional mask electrochemical machining, wherein Figure 15 The left side is the micro gripper of the traditional mask electrochemical machining, and the right side is the micro gripper of the electrochemical machining with the electrostatic induction mask of the body wave induced surface wave. The electrochemical machining method with the electrostatic induction mask of the body wave induced surface wave provided by the present application overcomes the problems of bubble interference and poor uniformity that have existed in the traditional mask electrochemical machining technology. In the machining process, the bubble coverage rate Br is 3%, and the non-uniformity Nu of the finally prepared micro gripper is 12.5%. Compared with the traditional mask electrochemical machining method (Br=95%, Nu=100%), the method provided by the present application reduces Br by 96.8% and Nu by 87.5%, and greatly improves the bubble coverage rate and uniformity. It can be seen that the present application can effectively improve the mass transfer efficiency, reduce the surface coverage rate of bubbles, and ensure the use performance of the microstructure device.

[0080] The above examples only express the embodiments of the present application, but cannot be understood as the limitation of the scope of the present patent. It should be pointed out that, for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A visualization device for electrostatic induction mask electrochemical machining of bulk wave-induced surface waves, characterized in that: The visualization device comprises a power supply (1), a power amplifier board (2), a power line (3), a signal line (4), an anode (5), an induction electrode (6), an electrolytic cell (7), two pumps (8), four hoses (9), a cathode (13), and two transducers (14); the details are as follows: The power supply (1) supplies power to the anode (5) and the cathode (13) via a power line (3), and the anode (5) and the cathode (13) are respectively installed on the inner sides of the front and rear side walls (701) of the electrolytic cell (7); the induction electrode (6) is installed in the middle of the electrolytic cell (7); the two transducers (14) are respectively installed on the inner sides of the front and rear side walls (701) of the electrolytic cell (7), and the power amplifier board (2) drives the two transducers (14) via a signal line (4) to complete the removal of the electrolysis product (17). Four hoses (9) are arranged in pairs, and the two groups are respectively arranged on the outside of the front and rear side walls (701) of the electrolytic cell (7), wherein one end of the first group of hoses is connected to the hose interface (703) on the outside of the front side wall (701), and the other end is connected to the first pump (8); one end of the second group of hoses is connected to the hose interface (703) on the outside of the rear side wall (701), and the other end is connected to the second pump (8), and the pump (8) realizes the circulation of electrolyte in the electrolytic cell (7) through the hoses (9); The electrolysis product (17) is generated during the machining process on the machined surface and the non-machined surface of the workpiece (601) on the sensing electrode (6); when the sensing electrode (6) is installed in the middle of the electrolytic cell (7), the machined surface of the workpiece (601) and the cathode (13) are located on the same side, and the non-machined surface of the workpiece (601) and the anode (5) are located on the same side; The induction electrode (6) divides the electrolytic cell (7) into two parts, a front part and a back part; the anode (5) and the cathode (13) installed in the electrolytic cell (7) are symmetrically arranged with respect to the induction electrode (6); the two transducers (14) are symmetrically arranged with respect to the induction electrode (6); and the two nozzles (708) in the electrolytic cell (7) are symmetrically arranged with respect to the induction electrode (6); The transducer (14) is inserted into the ceramic fixing hole (713) in the transducer bracket (707), one of the transducers (14) is located between the anode (5) and the nozzle (708) and the other is located between the cathode (13) and the nozzle (708); The centers of the workpiece (601) located on the sensing electrode (6), the water outlet hole (712) located on the nozzle (708), and the piezoelectric ceramic piece (141) located on the transducer (14) are at the same horizontal position; The electrolyte flow (15) ejected from the water outlet (712) on the nozzle (708) is at an angle of 45° to the plane where the workpiece (601) is located; the direction of the sound wave (16) excited by the piezoelectric ceramic piece (141) of the transducer (14) is at an angle of 45° to the plane where the workpiece (601) is located; The sensing electrode (6) comprises a workpiece (601), an insulating baffle (602), an insulating tape (603), and a slider (605); specifically: A through hole (604) is formed in the middle of the insulating baffle (602); The workpiece (601) is made of a metal plate (606) coated with a photoresist (607) on one side, wherein the photoresist (607) is an insulating material with a hollow pattern, the side of the metal plate (606) coated with the photoresist (607) is a processing surface, and the side not coated with the photoresist is a non-processing surface; the non-processing surface of the workpiece (601) is covered on the through hole (604) of the insulating baffle (602), and the insulating tape (603) is used to adhere the non-processing positions around the processing surface of the workpiece (601) to any side of the insulating baffle (602); The slider (605) is installed above the insulating baffle (602); the slider (605) can slide on the limit plate (709) in the electrolytic cell (7) so that the center of the machined surface of the workpiece (601) is located in the center of the electrolytic cell (7).

2. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 1, characterized in that: The visualization device further comprises a high-speed camera (12), which is fixed on a camera support (11) and observes the processing process of the workpiece (601) in real time through the front or rear side wall (701) of the electrolytic cell (7).

3. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 2, characterized in that: The electrolytic cell (7) comprises a side wall (701), an electrode support (702), a hose interface (703), a transducer support (707), a nozzle (708), a limiting plate (709), and a slot (710); specifically: Two electrode supports (702), four transducer supports (707), and two nozzles (708) are located on the inner sides of the front and rear side walls (701) of the electrolytic cell (7); four hose interfaces (703) are located on the outer sides of the front and rear side walls (701) of the electrolytic cell (7); the front and rear side walls (701) are plate structures; two limiting plates (709) are concave plate structures, both parallel to the two side walls (701), and located in the middle of the electrolytic cell (7); a slot (710) is formed in the middle of the two limiting plates (709), and the slot (710) is used to insert the sensing electrode (6).

4. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 1, characterized in that: The anode (5), cathode (13), transducer (14), and induction electrode (6) are all fixed to the electrolytic cell (7) by riveting.

5. A method for electrostatic induction mask electrochemical machining of surface waves induced by bulk waves using the visualization device according to any one of claims 1 to 4, characterized in that: The following steps are involved: S1. Making workpiece (601); Coating a photoresist (607) on the processed surface of the metal plate (606), and implementing a film patterning process through coating, photoresist exposure and development; S2. Making a sensing electrode (6); Cover the through hole (604) of the insulating baffle (602) with the non-machined surface of the workpiece (601), and use insulating tape (603) to stick the non-machined position around the machined surface of the workpiece (601) to any side of the insulating baffle (602); S3. Electrostatic Induction Mask Electrochemical Machining of Surface Waves Induced by Bulk Waves; Inserting the induction electrode (6) into the slot (710) of the electrolytic cell (7) such that the machining surface of the workpiece (601) and the cathode (13) are located on the same side, and the non-machining surface of the workpiece (601) and the anode (5) are located on the same side, while moving the induction electrode (6) to ensure that the surface to be machined is located in the exact center of the electrolytic cell (7); turning on all equipment, and performing electrostatic induction mask electrolytic machining and monitoring of body wave induced surface waves; Under the action of the electric field, electrolysis products (17) are generated on the machined surface and the non-machined surface of the workpiece (601); the transducer (14) generates an acoustic wave (16), which propagates in the electrolyte in a body wave mode through the insulating film and propagates to the machined surface and the non-machined surface of the workpiece (601) in a direction of 45 degrees to the plane where the workpiece (601) is located, generating an acoustic flow, thereby promoting the timely discharge of the electrolysis products (17) from the machined surface and the non-machined surface of the workpiece (601); The water inlets of the two pumps (8) draw electrolyte from the electrolytic tank (7) through a hose, and the water outlets deliver the electrolyte to the nozzle (708) through the hose, so that the water outlet (712) sprays out an electrolyte flow (15) at an angle of 45 degrees to the plane where the workpiece (601) is located. The electrolyte flow (15) flushes away the electrolysis products (17) discharged from the machined surface and non-machined surface of the workpiece (601) by the surface waves induced by the body waves; S4. Post-processing to obtain the processed metal microstructure.

6. The electrostatic induction mask electrochemical machining method of bulk wave induced surface waves implemented by a visualization device according to claim 5, characterized in that: The bubble evolution process during the processing is observed by a high-speed camera (12), and when bubble accumulation is observed, the bubble removal rate is increased by increasing the power of the power amplifier board (2).

7. The electrostatic induction mask electrochemical machining method of bulk wave induced surface waves implemented by a visualization device according to claim 5, characterized in that: The post-processing process is as follows: taking out the sensing electrode (6), tearing off the insulating tape (603), removing the photoresist (607) in a degumming solution, and obtaining a processed metal microstructure.

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