A kind of automatic storage and retrieval vertical warehouse for precious metal targets

Abstract

The present application relates to the field of target material storage and retrieval, and specifically discloses a vertical warehouse for automatic storage and retrieval of precious metal targets, including: a vertical warehouse body, a manipulator component, a parameter acquisition component, a component analysis component, a material replenishment component and an information processing component; the vertical warehouse body includes a vertical frame; a plurality of storage stations are arranged on the vertical frame; the parameter acquisition component is used to obtain the target material characteristic parameters of each target material in the vertical warehouse body; the component analysis component is used to analyze the composition of each target material in the vertical warehouse body to obtain the target material composition parameters; the information processing component is arranged on the vertical warehouse body, and is electrically connected to the manipulator component, the parameter acquisition component, the component analysis component and the material replenishment component; the material replenishment component is used to perform material replenishment operations on the target material. When storing target materials, the vertical warehouse body provided in this scheme can obtain and record the position information parameters of each target material, and then can realize automatic storage and retrieval through the manipulator component, thereby improving the storage and retrieval efficiency of the target material.

Description

Technical Field

[0001] The present application relates to the field of target material storage and retrieval, and in particular to a vertical warehouse for automatic storage and retrieval of precious metal targets. Background Art

[0002] Target materials are the target materials bombarded by high-speed energetic particles and can be used in semiconductor manufacturing, diode technology, optical thin film manufacturing and other fields. For example, in the semiconductor manufacturing process, target materials can be used in processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) to prepare conductive layers, barrier layers, contact layers, etc.

[0003] In practical applications, there are many types of targets, such as metal targets, ceramic targets, etc. Among them, in some specific fields, metal targets use gold (Au), silver (Ag), palladium (Pd), platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), cobalt-chromium-platinum (CoCrPt) alloy, cobalt-platinum (CoPt) alloy, cobalt-palladium (CoPd) alloy and other expensive metals or alloys, which are also called precious metal targets.

[0004] When storing and retrieving precious metal targets, the existing storage method is generally to place the targets on special shelves; the retrieval method is generally for staff to find the corresponding targets on the shelves according to the target identification or storage records, and then take out the targets by manual transportation or using simple tools (such as forklifts, carts, etc.). This method has low storage and retrieval efficiency. Summary of the invention

[0005] In view of this, the purpose of the present application is to provide an automatic storage and retrieval warehouse for precious metal targets, so as to improve the storage and retrieval efficiency of precious metal targets.

[0006] In order to achieve the above technical objectives, the present application provides a vertical warehouse for automatic storage and retrieval of precious metal targets, including: a vertical warehouse body, a manipulator component, a parameter acquisition component, a component analysis component, a material replenishment component and an information processing component;

[0007] The main body of the vertical library includes a vertical frame;

[0008] The stand is provided with a plurality of storage stations;

[0009] The manipulator assembly is arranged on the main body of the vertical library, and is used to place the target material on the storage station and obtain the position information parameters of the target material, and is used to take the target material out of the storage station;

[0010] The parameter acquisition component is arranged on the vertical library main body, and is used to acquire the target material characteristic parameters of each target material in the vertical library main body;

[0011] The component analysis component is arranged on the vertical library body, and is used to analyze the components of each target material in the vertical library body to obtain target material component parameters;

[0012] The information processing component is arranged on the main body of the vertical warehouse, and is electrically connected to the manipulator component, the parameter acquisition component, the component analysis component and the feeding component;

[0013] The information processing component is used to record the position information parameters, the target material characteristic parameters and the target material composition parameters of each target material;

[0014] The information processing component is used to determine whether the corresponding target material needs to be replenished according to the target material characteristic parameters. If so, the replenishing component is controlled according to the target material composition parameters to perform a replenishing operation on the target material.

[0015] Further, the parameter acquisition component includes: a visual recognition device;

[0016] The target material characteristic parameters include: target material type and volume value;

[0017] The visual recognition device is used to identify the target type of the target material and to obtain the volume value of the target material;

[0018] The information processing component is preset with standard volume values ​​corresponding to various target material types;

[0019] The information processing component is used to compare the volume value with the corresponding standard volume value. When the difference between the standard volume value and the volume value exceeds a preset volume difference, it is determined that the corresponding target material needs to be replenished.

[0020] Furthermore, the parameter acquisition component further includes: a weighing device;

[0021] The target material characteristic parameters include: weight value;

[0022] The weighing device is used to obtain the weight value of the target material;

[0023] The information processing component is preset with standard weight values ​​corresponding to various target material types;

[0024] The information processing component is used to compare the weight value with the corresponding standard weight value. When the difference between the standard weight value and the weight value exceeds a preset weight difference, it is determined that the corresponding target material needs to be replenished.

[0025] Furthermore, each of the target materials is placed in a material box;

[0026] The visual recognition device is used to identify the material box number of the material box;

[0027] Each of the storage stations is provided with a corresponding station number;

[0028] The location information parameters include the material box number of the material box and the station number of the storage station where the material box is placed.

[0029] Further, the robot assembly is used to place the material box storing the target material on the storage station, and to take the target material out of the storage station;

[0030] The visual recognition device is used to obtain the removal appearance parameters of the target material when it is taken out from the vertical warehouse main body, and is used to obtain the storage appearance parameters of the target material when it is stored in the vertical warehouse main body;

[0031] The information processing component is also used to compare the removed appearance parameters and the stored appearance parameters of the target material in the same material box.

[0032] Furthermore, the weighing device is used to obtain a weight parameter of the target material when it is taken out from the vertical warehouse body, and is used to obtain a weight parameter of the target material when it is stored in the vertical warehouse body;

[0033] The information processing component is also used to compare the removal weight parameter and the storage weight parameter of the target material in the same material box.

[0034] Furthermore, a lifting groove is provided on the material box.

[0035] Furthermore, a customized pallet is provided in the material box;

[0036] The customized tray is used for the target material to be clamped therein.

[0037] Furthermore, a container is provided on the storage station;

[0038] The target material includes a granular target material;

[0039] The granular target material is placed in the container;

[0040] The volume value includes: the volume value of the target material in the container;

[0041] The information processing component is also used to determine whether the target material is a granular target material according to the target material type, and if so, and when the difference between the standard volume value and the target material volume value in the container exceeds a preset volume difference, it is determined that the corresponding target material needs to be replenished;

[0042] The replenishing operation is: the replenishing component replenishes particles of the same material into the container until the volume value of the target material in the container reaches the standard volume value.

[0043] Furthermore, a container is provided on the storage station;

[0044] The target material includes a granular target material;

[0045] The target material is placed in the container;

[0046] The weight value includes: the weight value of the target material in the container;

[0047] The information processing component is also used to determine whether the target material is a granular target material according to the target material type, and if so, and when the difference between the standard weight value and the target material weight value in the container exceeds a preset weight difference, it is determined that the corresponding target material needs to be replenished;

[0048] The replenishing operation is: the replenishing component replenishes particles of the same material into the container until the weight value of the target material in the container reaches the standard weight value.

[0049] Further, the target material includes a block target material;

[0050] The weight values ​​include: block target weight value;

[0051] The information processing component is also used to determine whether the target material is a bulk target material based on the target material type. If so, and when the difference between the standard weight value and the bulk target material weight value exceeds a preset weight difference, it is determined that the corresponding target material needs to be replaced.

[0052] Furthermore, the container is a crucible.

[0053] Furthermore, the vertical storage body includes a plurality of the vertical frames, and the plurality of the vertical frames are arranged in parallel and at intervals.

[0054] Further, the manipulator assembly includes: an X-axis module, a Z-axis module and a transplanting mechanism;

[0055] The arrangement direction of the plurality of stands is the X-axis direction;

[0056] The X-axis module is movably arranged on the vertical library body along the X-axis direction;

[0057] The Z-axis module is movably disposed on the X-axis module along the Z-axis direction;

[0058] The transplanting mechanism is movably arranged on the Z-axis module along the Y-axis direction;

[0059] The transplanting mechanism is used to extract the target material.

[0060] Furthermore, the robot assembly further includes: an X-axis accompanying module;

[0061] The X-axis accompanying module is movably arranged on the vertical library body along the X-axis direction;

[0062] The two ends of the Z-axis module are slidably connected to the X-axis module and the X-axis accompanying module respectively.

[0063] Furthermore, the side of the vertical warehouse body is provided with: a parameter acquisition station, a material interaction station and a component identification station;

[0064] The parameter acquisition component is arranged at the parameter acquisition station;

[0065] The feeding component is arranged at the parameter acquisition station;

[0066] The material interaction station is used for allowing the target material to enter and exit the vertical warehouse body;

[0067] The component analysis component is arranged at the component identification station.

[0068] Furthermore, a translation slide rail is provided on the material interaction station.

[0069] Furthermore, a recording camera is installed in and out of the material interaction station.

[0070] Furthermore, the component analysis component is a hyperspectral component analyzer or an X-ray diffractometer.

[0071] It can be seen from the above technical scheme that the present application provides a vertical warehouse for automatic storage and retrieval of precious metal targets, including: a vertical warehouse main body, a manipulator component, a parameter acquisition component, a component analysis component, a replenishing component and an information processing component; the vertical warehouse main body includes a vertical frame; a plurality of storage stations are arranged on the vertical frame; the manipulator component is arranged on the vertical warehouse main body, and is used to place the target material on the storage station and obtain the position information parameters of the target material, and is used to take the target material out of the storage station; the parameter acquisition component is arranged on the vertical warehouse main body, and is used to obtain the target material characteristic parameters of each target material in the vertical warehouse main body; the component analysis component is arranged on the vertical warehouse main body, and is used to analyze the composition of each target material in the vertical warehouse main body and obtain the target material composition parameters; the information processing component is arranged on the vertical warehouse main body, and is electrically connected to the manipulator component, the parameter acquisition component, the component analysis component and the replenishing component; the information processing component is used to record the position information parameters, target material characteristic parameters and target material composition parameters of each target material; the information processing component is used to judge whether the corresponding target material needs replenishment according to the target material characteristic parameters, and if so, the replenishing component is controlled to perform replenishment operation on the target material according to the target material composition parameters.

[0072] The vertical warehouse body provided in this solution can obtain and record the position information parameters of each target material when storing the target material, and then realize automatic access through the robot assembly, thereby improving the access efficiency of the target material; at the same time, this solution can obtain the target material characteristic parameters and target material composition parameters of each target material, and realize rapid deployment according to different needs, which can further improve the access efficiency of the target material and enable the target material to be managed more accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0073] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0074] Figure 1 A schematic diagram of the overall structure of an automatic storage and retrieval vertical warehouse for precious metal targets provided in an embodiment of the present application;

[0075] Figure 2 A schematic diagram of the partial structure of a vertical warehouse for automatic storage and retrieval of precious metal targets provided in an embodiment of the present application;

[0076] Figure 3 A schematic diagram of the overall structure of an automatic storage and retrieval vertical library for precious metal targets provided in an embodiment of the present application from another perspective;

[0077] Figure 4 An internal schematic diagram of an automatic storage and retrieval vertical warehouse for precious metal targets provided in an embodiment of the present application;

[0078] Figure 5 A schematic diagram of a material box and granular target material for automatic storage and retrieval of a noble metal target material provided in an embodiment of the present application;

[0079] Figure 6 A schematic diagram of a material box and block-shaped target material for automatic storage and retrieval of a noble metal target material provided in an embodiment of the present application;

[0080] Figure 7 A disassembled diagram of a material box for automatic storage and retrieval of precious metal targets provided in an embodiment of the present application;

[0081] Figure 8 A schematic diagram of a manipulator assembly for automatically storing and retrieving precious metal targets provided in an embodiment of the present application;

[0082] In the figure:

[0083] 100, main body of the vertical warehouse; 110, vertical rack; 111, storage station; 112, container; 120, entry and exit recording camera; 130, material interaction station; 140, second pick-and-place station; 150, outer shell; 160, parameter acquisition station; 170, component identification station; 180, translation slide rail;

[0084] 200, robot assembly; 210, X-axis module; 220, Z-axis module; 230, transplanting mechanism; 240, X-axis accompanying module;

[0085] 300, parameter acquisition component; 310, visual recognition device; 320, weighing device;

[0086] 400, target material; 410, material box; 411, lifting slot; 420, customized tray;

[0087] 500, information processing component;

[0088] 600, component analysis component;

[0089] 700. Feeding component. DETAILED DESCRIPTION

[0090] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0091] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0092] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0093] See also Figures 1 to 5 An automatic storage and retrieval vertical warehouse for precious metal targets provided in an embodiment of the present application includes: a vertical warehouse body 100, a manipulator component 200, a parameter acquisition component 300, a component analysis component, a material replenishment component and an information processing component 500.

[0094] The main body 100 of the vertical warehouse is a storage structure for a plurality of target materials 400, and may include an outer shell 150; a vertical frame 110 is arranged inside the outer shell 150. The vertical frame 110 is provided with a plurality of storage stations 111, and the storage stations 111 can be used to place the target materials 400.

[0095] The robot assembly 200 is disposed on the main body of the vertical library 100, and is used to place the target material 400 on the storage station 111 and obtain the position information parameters of the target material 400, and is used to take the target material 400 out of the storage station 111. Figure 1 As shown, the vertical warehouse body 100 may be provided with an automatically opened and closed material exchange station 130. When storing, the target material 400 may be placed into the vertical warehouse body 100 through the material exchange station 130, and then the manipulator assembly 200 extracts the target material 400 on the material exchange station 130 and places it on the storage station 111 and records the position information parameters of the target material 400.

[0096] As an implementation mode, the target material 400 may be provided with a number, and the storage station 111 may be provided with a station number; by recording the number of the target material 400 and the station number, the location of the target material 400 may be obtained, that is, the location information parameters of the target material 400 may be obtained.

[0097] Similarly, during removal, the robot assembly 200 can extract the target material 400 to the material exchange station 130, and then the target material 400 is taken out by a worker or other transport tools.

[0098] The information processing component 500 is disposed on the main body of the vertical warehouse 100 and is electrically connected to the manipulator component 200, the parameter acquisition component 300, the component analysis component 600 and the feeding component 700. The information processing component 500 may be provided with an external display screen; the display screen is a human-computer interaction device for the staff to operate and view relevant parameters.

[0099] The parameter acquisition component 300 is disposed on the vertical library body 100, and is used to acquire the target material characteristic parameters of each target material 400 in the vertical library body 100. The target material characteristic parameters may include object characteristic parameters of the target material 400, such as weight value, height value, density value, volume value, etc.

[0100] The component analysis component 600 is disposed on the vertical warehouse body 100 and is used to analyze the components of each target material 400 in the vertical warehouse body 100 to obtain target material component parameters.

[0101] The information processing component 500 is used to record the position information parameters, target characteristic parameters and target composition parameters of each target material 400. Among them, the storage position of each target material 400 can be more accurately grasped through the position information parameters, which is convenient for the manipulator component 200 to quickly take out the required target material 400 and place the target material 400 on the classified storage station 111, thereby improving the access efficiency. The target material characteristic parameters and target composition parameters can be more accurately classified and stored. In addition to being convenient for staff to manage and search, it is also convenient for staff to check parameters such as quantity and weight, reduce access errors, and help to more reasonably arrange the storage station planning of the stand 110, ensuring efficient use of the warehouse space.

[0102] At the same time, in this embodiment, the information processing component 500 can be used to determine whether the corresponding target material 400 needs to be replenished according to the target material characteristic parameters. If so, the replenishment component 700 is controlled according to the target material composition parameters to perform a replenishment operation on the target material 400.

[0103] Specifically, in practical applications, the target material 400 will inevitably be worn out during use; for precious metal targets, since the consumption rates of different areas during the sputtering process may be different, different areas of the target material may suffer different degrees of wear. Continuing to use a target material that has been worn out to a certain extent will affect the sputtering effect, and directly replacing it will cause a waste of raw materials. In this embodiment, replenishing the target material 400 through the replenishing assembly 700 can extend the service life of the target material 400 and reduce the decrease in sputtering efficiency and film quality problems caused by target size deviation. At the same time, the frequency of replacing the target material 400 can also be reduced, saving costs.

[0104] In practical applications, such as Figure 5 and Figure 6 As shown, the target material 400 can be divided into multiple types such as block target material (ingot target material), granular target material, etc. In this embodiment, the vertical warehouse body 100 can be used to store multiple different types of target materials 400, and can also be used to store the same type of target materials.

[0105] As an implementation manner, the feeding operation in this embodiment is specifically that the feeding component 700 replenishes particles of the same material into the container 112.

[0106] Specifically, a container 112 is provided on the storage station 111. The granular target material is placed in the container 112. In the following embodiment in which a customized tray 420 and a material box 410 are provided, the container 112 can be placed on the customized tray 420; and multiple containers 112 can be placed on each customized tray 420, for example, two containers 112 can be placed.

[0107] The volume value included in the target material characteristic parameters includes the volume value of the target material in the container. The visual recognition device can estimate the volume value of the target material in the container by the height of the target material 400 in the container 112. The information processing component is used to compare the volume value of the target material in the container with the standard volume value. When the difference between the standard volume value and the volume value of the target material in the container exceeds the preset volume difference, and the information processing component determines that the target material 400 is a granular target material according to the target material type, it is determined that the corresponding target material 400 needs to be replenished.

[0108] When replenishing, the replenishing assembly 700 replenishes the target particles of the same material and size into the container 112. The replenishing assembly 700 can be, for example, a discharge pipe, a manipulator, etc., specifically, the replenishing assembly 700 can transfer the target particles into the container 112.

[0109] In one embodiment provided in the present application, Figure 2 As shown, the bottom of the feeding assembly 700 is funnel-shaped, and the feeding assembly 700 can be raised and lowered on the vertical warehouse body 100, so that the feeding assembly 700 can extend into the container 112 during feeding, and lower the target material 400 into the container 112 through the funnel-shaped discharge port.

[0110] In other embodiments, multiple targets 400 of different materials may be placed simultaneously in the vertical magazine body 100. Therefore, the particles may include particles of multiple different materials.

[0111] Correspondingly, the particles used to replenish the target material can be stored in a plurality of particle cavities in the vertical warehouse body 100. A stock monitoring component for monitoring the stock of particles is arranged in the particle cavity; the stock monitoring component can be a visual recognition device, an infrared sensor, etc., which can monitor the stock of particles and the usage of particles in real time, and send out a warning signal when the stock of particles is lower than the warning value.

[0112] In the above embodiment, the information processing component 500 determines whether the target material needs to be replenished by volume. In other embodiments, the information processing component 500 can also determine whether the target material needs to be replenished by weight.

[0113] Specifically, the above-mentioned weight value may include: the weight value of the target material in the container;

[0114] The information processing component 500 is used to determine that the corresponding target material 400 needs to be replenished when the difference between the standard weight value and the target material weight value in the container exceeds the preset weight difference value and the target material 400 is judged to be a granular target material according to the target material type. The replenishment operation is: the replenishment component 700 replenishes particles of the same material into the container 112 until the target material weight value in the container reaches the standard weight value.

[0115] In actual applications, the granular target material is stacked in the container 112, resulting in gaps, so the method of judging by volume has a large error. Therefore, in this embodiment, by obtaining the weight value of the target material in the container, it is possible to more accurately judge whether the granular target material needs to be replenished.

[0116] In one embodiment, the information processing component 500 may also determine that the target material 400 needs to be replaced when the target material 400 is a block target material and the volume value or weight value of the target material 400 does not meet the requirements.

[0117] Specifically, the weight value includes: the weight value of the bulk target material; the information processing component 500 is used to determine that the corresponding target material 400 needs to be replaced when the difference between the standard weight value and the bulk target material weight value exceeds a preset weight difference, and when the target material type determines that the target material 400 belongs to a bulk target material.

[0118] After determining that the target material 400 needs to be replaced, the information processing component 500 can send a replacement signal to remind the staff to replace it.

[0119] As an implementation mode, each storage station 111 in the vertical warehouse body 100 may be provided with a parameter acquisition component 300, a component analysis component 600 and a material replenishment component 700, so that the target material 400 on each storage station 111 can independently perform parameter identification, component analysis and material replenishment operations.

[0120] As an implementation mode, a parameter acquisition station 160, a material interaction station 130 and a component identification station 170 are provided on the vertical warehouse body 100; the parameter acquisition component 300 is provided at the parameter acquisition station 160; the material interaction station 130 is used for providing the target material 400 to enter and exit the vertical warehouse body 100; and the component analysis component 600 is provided at the component identification station 170.

[0121] Among them, the parameter acquisition station 160, the material interaction station 130 and the component identification station 170 can be distributed in sequence from top to bottom on the side of the vertical warehouse body 100.

[0122] In this embodiment, after each target material 400 is stored in the material interaction station 130, before the robot arm assembly 200 places it in the storage station 111, it can first drive the target material 400 through the parameter acquisition component 300 on the parameter acquisition station 160 to acquire parameters, and then move it to the component identification station 170 to perform component analysis through the component analysis component 600, and finally the robot arm assembly 200 sends the target material 400 to the storage station 111.

[0123] Correspondingly, when the target material 400 is taken out, the robot assembly 200 can also transfer the target material 400 to the parameter acquisition station 160 and the component identification station 170, and after the parameter acquisition assembly 300 and the component analysis assembly 600 have been tested again, the material interaction station 130 can be opened to allow the target material 400 to be taken out. In this way, the storage and access of the target material 400 can be managed more accurately, and the detection during the removal and storage process of the target material 400 can provide a basis for the quality traceability of the target material 400, which helps to more accurately understand the storage, quality and loss of the target material 400.

[0124] In one embodiment, an openable and closable automatic door is provided on the material interaction station 130. A translation slide 180 is provided at the bottom of the material interaction station 130; the bottom of the translation slide 180 is hollowed out, so that the material picking end of the manipulator assembly 200 (such as the transplanting mechanism 230 described below) can extend under the translation slide 180 to pick up the material, or place the material on the translation slide 180 and push the material to slide on the translation slide 180.

[0125] In one embodiment, an in-and-out recording camera 120 is provided on the material interaction station 130. The in-and-out recording camera 120 is electrically connected to the information processing component 500, and can take photos or videos of the in-and-out process of the target material 400 for storage.

[0126] In one embodiment, the feeding component 700 is arranged at the parameter acquisition station 160; the target material 400 that needs to be fed can be transferred by the robot arm component 200 to the parameter acquisition station 160 for feeding operation; after the feeding is completed, it is transferred by the robot arm component 200 to the storage station 111 or other stations.

[0127] As an implementation, the component analysis component 600 is a hyperspectral component analyzer or an X-ray diffractometer.

[0128] In actual applications, the component analysis component 600 can be used to detect the composition of other metals or wafers in addition to analyzing the composition of the target material 400 in the vertical warehouse body 100. Specifically, the component analysis component 600 can be set at the material interaction station 130 mentioned above. In addition to detecting the target material 400 entering and leaving the material interaction station 130, it can also detect and analyze other objects placed by the staff after the material interaction station 130 is opened. At this time, the vertical warehouse can be used as an item composition analysis device, and the analysis results are output to the information processing component 500 to generate a report.

[0129] In a more specific embodiment, the parameter acquisition component 300 includes: a visual recognition device 310; the target material characteristic parameters include: target material type and volume value; the visual recognition device 310 is used to identify the target material type of the target material 400 and to obtain the volume value of the target material 400; the information processing component 500 is preset with standard volume values ​​corresponding to various target material types; the information processing component 500 is used to compare the volume value with the corresponding standard volume value, and when the difference between the standard volume value and the volume value exceeds the preset volume difference, it is determined that the corresponding target material 400 needs to be replenished.

[0130] As mentioned above, the target material type may include block target material (ingot target material), granular target material, etc.; the visual recognition device 310 can identify the target material type of the target material 400 by identifying the appearance of the target material 400. At the same time, the visual recognition device 310 can identify the height and width of the target material, and then calculate the volume of the target material 400. Among them, the target material 400 is generally a regular shape, and the algorithm for calculating the volume after visual recognition by the visual recognition device 310 belongs to the prior art and will not be repeated in this embodiment.

[0131] In a further improved embodiment, the parameter acquisition component 300 also includes: a weighing device 320; the target material characteristic parameters include: a weight value; the weighing device 320 is used to obtain the weight value of the target material 400; the information processing component 500 is preset with standard weight values ​​corresponding to various target material types; the information processing component 500 is used to compare the weight value with the corresponding standard weight value, and when the difference between the standard weight value and the weight value exceeds the preset weight difference, it is judged that the corresponding target material 400 needs to be replenished.

[0132] In this embodiment, in addition to visually identifying the target material 400 , the parameter acquisition component 300 also measures the weight of the target material 400 through the weighing device 320 , which can improve the accuracy of the judgment on the replenishment of the target material 400 .

[0133] Specifically, the information processing component 500 may store standard volume values ​​and standard weight values ​​of various materials and various types of target materials in advance. When the information processing component 500 determines that one of the weight value and volume value of the target material 400 meets the requirements but the other does not meet the requirements, it means that the target material 400 may have been replaced, for example, the granular target material in the container 112 is mixed with different materials. At this time, the information processing component 500 may send an alarm signal to remind the staff.

[0134] As an implementation manner, the preset volume difference may be 1 / 3 of the standard volume value; and the preset weight difference may be 1 / 3 of the standard weight value.

[0135] In one embodiment, see Figure 5 and Figure 6 , each target material 400 is placed in a material box 410; the visual recognition device 310 is used to identify the material box number of the material box 410; each storage station 111 is provided with a corresponding station number; the position information parameters include the material box number of the material box 410 and the station number of the storage station 111 where the material box 410 is placed.

[0136] The material box number on the material box 410 can be used as an information anchor for the target material 400 in the material box 410 ; the information processing component 500 can record the position of each stored target material 400 by combining the material box number and the workstation number.

[0137] As an implementation method, the storage and access process of the target material 400 can be: when storing, the material interaction station 130 is opened, and the target material 400 enters the vertical warehouse body 100 through the material interaction station 130; after detection and analysis by the parameter acquisition component 300 and the component analysis component 600, the robot component 200 transfers the target material 400 to the material box 410, and then transfers the material box 410 to the storage station 111. When taking out, the robot component 200 transfers the material box 410 to the side of the material interaction station 130, and then takes the target material 400 in the material box 410 out to the material interaction station 130.

[0138] It should be noted that, in the present embodiment, the material box 410 storing the target materials 400 and the material box 410 not storing the target materials 400 can be placed in different areas within the vertical warehouse body 100 .

[0139] In another embodiment, the storage and retrieval process of the target material 400 can be: when storing, the material interaction station 130 is opened, and the robot arm assembly 200 transfers the material box 410 to the material interaction station 130, and then the target material 400 entering from the material interaction station 130 is manually placed by the staff and transferred to the material box 410, and then the robot arm assembly 200 transfers the material box 410 to other stations, and the parameter acquisition assembly 300 inspects and weighs both the material box 410 and the target material 400; after the inspection, the robot arm assembly 200 transfers the material box 410 as a whole to the storage station 111.

[0140] In one embodiment, the robot assembly 200 is used to place a material box 410 storing the target material 400 on the storage station 111, and to take the target material 400 out of the storage station 111. That is, the transfer line of the robot assembly 200 is the material box 410. In this embodiment, when the target material 400 is taken out, the target material 400 is taken out together with the material box 410 in which the target material 400 is placed.

[0141] At the same time, the visual recognition device in this embodiment is used to obtain the removal appearance parameters of the target material 400 when it is taken out from the vertical warehouse main body 100, and to obtain the storage appearance parameters of the target material 400 when it is stored in the vertical warehouse main body 100; the information processing component 500 is also used to compare the removal appearance parameters and the storage appearance parameters of the target material 400 in the same material box 410.

[0142] As mentioned above, the material box number on the material box 410 can serve as an information anchor for the target material 400 in the material box 410, so that when the target material 400 is taken out and stored again, the target material 400 can be compared with the information when it was last taken out, that is, the last taken-out appearance parameters of the target material 400 and the current stored appearance parameters are compared to obtain the appearance changes of the target material 400 during the taking-out process.

[0143] Furthermore, the weighing device 320 is used to obtain the removal weight parameter of the target material 400 when it is taken out from the vertical warehouse body 100, and to obtain the storage weight parameter of the target material 400 when it is stored in the vertical warehouse body 100; the information processing component 500 is also used to compare the removal weight parameter and the storage weight parameter of the target material 400 in the same material box 410. That is, in this embodiment, when the target material 400 is taken out and stored again, in addition to the above-mentioned appearance comparison, the last removal weight parameter of the target material 400 and the current storage weight parameter are also compared, so that the weight change of the target material 400 during the removal process can be obtained, which helps the staff to understand the use of the target material 400, and understand the performance change law caused by the change of volume and weight, etc., and provides a reference for optimizing the process of using the target material, the storage conditions and the use method of the target material.

[0144] At the same time, by comparing the appearance parameters and the weight parameters, it is also possible to determine whether the material of the target 400 has been replaced, thereby reducing the possibility of management confusion caused by misplacing the target 400 after it is taken out.

[0145] Optionally, the component analysis component 600 can also be used to detect the components of the target 400 when it is stored and taken out, so as to obtain the taken out component parameters and the stored component parameters of the target 400. The information processing component 500 compares the last taken out component parameters with the current stored component parameters, and can further confirm whether the target 400 has been replaced or misplaced.

[0146] Optionally, in order to facilitate the robot assembly 200 to extract the material box 410, a lifting groove 411 is provided on the material box 410. The lifting groove 411 can be provided on both sides of the material box 410 and penetrate the material box 410. The robot assembly 200 can lift the material box 410 through the lifting grooves 411 on both sides of the material box 410.

[0147] In one embodiment, see Figure 7 , a customized tray 420 is arranged in the material box 410; the customized tray 420 is used for the target material 400 to be inserted. Specifically, the container 112 for placing the target material can be of various types, so the customized tray 420 can also be divided into various different types of structures.

[0148] It should be noted that, in actual applications, a vertical warehouse body 100 can be used only to store the same type of target materials 400 and containers 112 , and therefore only one type of adapted material box 410 and customized tray 420 can be provided.

[0149] In one embodiment, Figure 4 As shown, the vertical storage body 100 includes a plurality of vertical frames 110, and the plurality of vertical frames 110 are arranged in parallel and at intervals.

[0150] On the stand 110, the storage station 111 can penetrate the entire stand 110 along the X-axis direction, so that the robot assembly 200 can put in and take out the material box 410. The X-axis direction is the direction in which the multiple stands 110 are arranged at intervals.

[0151] In application, the Z-axis direction is the vertical direction. The Y-axis direction is the horizontal direction perpendicular to the X-axis direction. The second pick-and-place station 140 and the above-mentioned material interaction station 130 can be respectively arranged at both ends of the vertical warehouse body 100 along the Y-axis direction; the material interaction station 130 is an automatically opened and closed pick-and-place port, which can realize automatic target material storage and retrieval; the second pick-and-place station 140 can be a manually opened and closed pick-and-place port, which can be manually opened and closed by a staff member.

[0152] In one embodiment, see Figure 8The robot assembly 200 includes: an X-axis module 210, a Z-axis module 220 and a transplanting mechanism 230; the X-axis module 210 is movably arranged on the vertical warehouse main body 100 along the X-axis direction; the Z-axis module 220 is movably arranged on the X-axis module 210 along the Z-axis direction; the transplanting mechanism 230 is movably arranged on the Z-axis module 220 along the Y-axis direction; the transplanting mechanism 230 is used to extract the target material 400.

[0153] Specifically, the transfer mechanism 230 is used to extract the target material 400 or the material box 410. Taking the extraction of the material box 410 as an example, during the extraction, the operating claw of the transfer mechanism 230 can pick up the material box 410 by clamping, or lift the material box 410 by passing through the lifting groove 411.

[0154] Furthermore, the robot assembly 200 also includes: an X-axis accompanying module 240; the X-axis accompanying module 240 is movably arranged on the vertical warehouse body 100 along the X-axis direction; the two ends of the Z-axis module 220 are respectively slidably connected to the X-axis module 210 and the X-axis accompanying module 240.

[0155] The X-axis accompanying module 240 is used to provide the Z-axis module 220 with tracking movement and stability when moving along the Z-axis.

[0156] The automatic storage and retrieval vertical warehouse for precious metal targets provided in the embodiment of the present application can realize automatic storage and retrieval through the manipulator component 200, improve the storage and retrieval efficiency, and can record and detect the storage and retrieval process of the targets. In application, a target reservation system can be set in the information processing component 500; in conjunction with the target reservation system, the entire process of the amount of targets used by different personnel, the parameters of the targets, etc. can be recorded, so that data can be extracted and traced, thereby realizing the full process management of the targets.

[0157] Furthermore, the automatic storage and retrieval vertical warehouse of precious metal targets provided in the embodiment of the present application can be linked with the reservation system of the coating equipment using the targets, so that personnel can make a reservation once, thereby completing the whole process record of borrowing targets-using targets for coating-returning targets, so that the information processing component 500 can not only save target parameter information and target access information, but also facilitate the staff to trace the use and borrowing of targets. Optionally, the operating claw of the transplanting mechanism 230 can be connected to the transplanting mechanism 230 through a rotating shaft, so that the operating claw can rotate in the horizontal direction.

[0158] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A vertical warehouse for automatic storage and retrieval of precious metal targets, characterized in that: include: A vertical warehouse body (100), a manipulator component (200), a parameter acquisition component (300), a component analysis component (600), a material replenishment component (700), and an information processing component (500); The vertical library main body (100) comprises a vertical frame (110); The stand (110) is provided with a plurality of storage stations (111); The robot arm assembly (200) is arranged on the vertical library body (100), and is used to place the target material (400) on the storage station (111) and obtain position information parameters of the target material (400), and is used to take the target material (400) out of the storage station (111); The parameter acquisition component (300) is arranged on the vertical library main body (100) and is used to acquire target material characteristic parameters of each target material (400) in the vertical library main body (100); The component analysis component (600) is arranged on the vertical library main body (100) and is used to analyze the components of each target material (400) in the vertical library main body (100) to obtain target material component parameters; The information processing component (500) is arranged on the vertical warehouse body (100), and is electrically connected to the manipulator component (200), the parameter acquisition component (300), the component analysis component (600), and the material replenishment component (700); The information processing component (500) is used to record the position information parameters, the target material characteristic parameters and the target material composition parameters of each target material (400); The information processing component (500) is used to determine whether the corresponding target material (400) needs to be replenished according to the target material characteristic parameters, and if so, to control the replenishment component (700) to perform a replenishment operation on the target material (400) according to the target material composition parameters; The parameter acquisition component (300) comprises: a visual recognition device (310); The target material characteristic parameters include: target material type and volume value; The visual recognition device (310) is used to identify the target material type of the target material (400) and to obtain the volume value of the target material (400); The information processing component (500) is preset with standard volume values ​​corresponding to various target material types; The information processing component (500) is used to compare the volume value with the corresponding standard volume value, and when the difference between the standard volume value and the volume value exceeds a preset volume difference, it is determined that the corresponding target material (400) needs to be replenished.

2. The automatic storage and retrieval system for precious metal targets according to claim 1 is characterized in that: The parameter acquisition component (300) further includes: a weighing device (320); The target material characteristic parameters include: weight value; The weighing device (320) is used to obtain the weight value of the target material (400); The information processing component (500) is preset with standard weight values ​​corresponding to various target material types; The information processing component (500) is used to compare the weight value with the corresponding standard weight value, and when the difference between the standard weight value and the weight value exceeds a preset weight difference, it is determined that the corresponding target material (400) needs to be replenished.

3. The automatic storage and retrieval system for precious metal targets according to claim 2 is characterized in that: Each of the target materials (400) is placed in a material box (410); The visual recognition device (310) is used to recognize the material box number of the material box (410); Each of the storage stations (111) is provided with a corresponding station number; The position information parameters include the material box number of the material box (410) and the station number of the storage station (111) where the material box (410) is placed.

4. The automatic storage and retrieval system for precious metal targets according to claim 3 is characterized in that: The robot assembly (200) is used to place the material box (410) storing the target material (400) on the storage station (111), and to take the target material (400) out of the storage station (111); The visual recognition device is used to obtain the appearance parameters of the target material (400) when it is taken out from the vertical warehouse main body (100), and is used to obtain the appearance parameters of the target material (400) when it is stored in the vertical warehouse main body (100); The information processing component (500) is also used to compare the removed appearance parameters and the stored appearance parameters of the target material (400) in the same material box (410).

5. The automatic storage and retrieval system for precious metal targets according to claim 4 is characterized in that: The weighing device (320) is used to obtain a removal weight parameter of the target material (400) when it is taken out of the vertical warehouse main body (100), and is used to obtain a storage weight parameter of the target material (400) when it is stored in the vertical warehouse main body (100); The information processing component (500) is also used to compare the removed weight parameter and the stored weight parameter of the target material (400) in the same material box (410).

6. The automatic storage and retrieval system for precious metal targets according to claim 3 is characterized in that: The material box (410) is provided with a lifting groove (411).

7. The automatic storage and retrieval system for precious metal targets according to claim 3 is characterized in that: A customized tray (420) is arranged in the material box (410); The customized tray (420) is used for the target material (400) to be inserted into.

8. The automatic storage and retrieval system for precious metal targets according to claim 1 is characterized in that: The storage station (111) is provided with a container (112); The target material (400) comprises a granular target material; The granular target material is placed in the container (112); The volume value includes: the volume value of the target material in the container; The information processing component (500) is also used for determining that the corresponding target material (400) needs to be replenished when the difference between the standard volume value and the target material volume value in the container exceeds a preset volume difference and the target material (400) is judged to be a granular target material according to the target material type; The replenishing operation is as follows: the replenishing component (700) replenishes particles of the same material into the container (112) until the volume value of the target material in the container reaches the standard volume value.

9. The automatic storage and retrieval system for precious metal targets according to claim 2 is characterized in that: The storage station (111) is provided with a container (112); The target material (400) comprises a granular target material; The target material (400) is placed in the container (112); The weight value includes: the weight value of the target material in the container; The information processing component (500) is used to determine that the corresponding target material (400) needs to be replenished when the difference between the standard weight value and the target material weight value in the container exceeds a preset weight difference and, based on the target material type, it is determined that the target material (400) is a granular target material; The replenishing operation is as follows: the replenishing component (700) replenishes particles of the same material into the container (112) until the weight value of the target material in the container reaches the standard weight value.

10. The automatic storage and retrieval vertical warehouse for precious metal targets according to claim 2, characterized in that: The target material (400) comprises a block target material; The weight values ​​include: block target weight value; The information processing component (500) is used to determine that the corresponding target material (400) needs to be replaced when the difference between the standard weight value and the block target material weight value exceeds a preset weight difference and when the target material type determines that the target material (400) belongs to a block target material.

11. The automatic storage and retrieval vertical warehouse for precious metal targets according to claim 8 or 9, characterized in that: The container (112) is a crucible.

12. The automatic storage and retrieval vertical warehouse for precious metal targets according to any one of claims 1 to 10, characterized in that: The vertical storage body (100) comprises a plurality of vertical frames (110), and the plurality of vertical frames (110) are arranged in parallel and at intervals.

13. The automatic storage and retrieval vertical warehouse for precious metal targets according to claim 12, characterized in that: The robot assembly (200) comprises: an X-axis module (210), a Z-axis module (220) and a transplanting mechanism (230); The arrangement direction of the plurality of stands (110) is the X-axis direction; The X-axis module (210) is movably arranged on the vertical library body (100) along the X-axis direction; The Z-axis module (220) is movably arranged on the X-axis module (210) along the Z-axis direction; The transplanting mechanism (230) is movably arranged on the Z-axis module (220) along the Y-axis direction; The transplanting mechanism (230) is used to extract the target material (400).

14. The automatic storage and retrieval system for precious metal targets according to claim 13, characterized in that: The robot assembly (200) further comprises: an X-axis accompanying module (240); The X-axis accompanying module (240) is movably arranged on the vertical library main body (100) along the X-axis direction; Two ends of the Z-axis module (220) are slidably connected to the X-axis module (210) and the X-axis accompanying module (240) respectively.

15. The automatic storage and retrieval vertical warehouse for precious metal targets according to claim 13, characterized in that: The side of the vertical warehouse body (100) is provided with: a parameter acquisition station (160), a material interaction station (130) and a component identification station (170); The parameter acquisition component (300) is arranged at the parameter acquisition station (160); The material exchange station (130) is used to allow the target material (400) to enter and exit the vertical warehouse body (100); The component analysis component (600) is arranged at the component identification station (170).

16. The automatic storage and retrieval system for precious metal targets according to claim 15, characterized in that: The material interaction station (130) is provided with a translation slide rail (180).

17. The automatic storage and retrieval system for precious metal targets according to claim 15, characterized in that: The material interaction station (130) has an in-and-out recording camera (120).

18. The automatic storage and retrieval system for precious metal targets according to claim 1, characterized in that: The component analysis component (600) is a hyperspectral component analyzer or an X-ray diffractometer.

Images