Flying dust particle buffer system

Abstract

The invention provides a flying dust particle buffer system which is arranged in a buffer area, the buffer area is communicated with an evaporation process area, the buffer system is arranged on the side wall of the side, away from the evaporation process area, of the buffer area, the buffer system comprises a flow guide base, the outer side wall of the buffer area is connected with a closing plate, and the closing plate is connected with the flow guide base. The outer side of the closing plate is connected with the electromagnetic valve, the inner side of the closing plate is connected with the flow guide seat, the flow guide seat is of a hollow structure defined by a flow guide seat shell, an airflow main channel is formed in the hollow structure of the flow guide seat, and a plurality of airflow dissipation holes are evenly formed in the side wall of the flow guide seat shell at intervals. The main airflow channel is communicated with the airflow dissipation holes, and when vacuum needs to be broken, the electromagnetic valve is opened, so that a strong airflow enters from the main airflow channel and is uniformly divided into a plurality of scattered small airflows through the airflow dissipation holes to be jetted into the buffer area, the strong airflow is not directly jetted to an evaporation process area, and the amount and density of raised dust are effectively reduced.

Description

Technical Field

[0001] The present invention relates to the field of film coating technology, and more specifically, to a dust particle buffer system. Background Art

[0002] During the evaporation process, the film material will be vaporized and exist in the form of atoms. In the vacuum, it will adhere to the product to be filmed due to the saturated vapor pressure. The area above the entire evaporation source is the area where the film material can adhere. The film material will condense into some tiny particles such as particles and dust and exist in the vacuum. It will adhere to places other than the surface of the product, and there is a certain connection strength, resulting in the film layer being unable to be effectively and highly adhered to the product. It is possible to settle to the bottom of the cavity due to the use, vibration, and contact during manual disassembly of the equipment.

[0003] After the equipment completes the coating process, the vacuum chamber needs to be opened to take out the product so that the chamber returns to atmospheric pressure, that is, to break the vacuum. To break the vacuum, inert gas needs to be filled into the chamber. After the chamber is opened, the air pressure in the compressed gas bottle at the factory end is higher than the atmospheric pressure, which is a high-pressure state. There is no atmospheric pressure in the vacuum chamber, which is a negative pressure state. Therefore, a large pressure difference will be formed, generating a strong airflow. The speed and intensity of the airflow that breaks the vacuum are very high, which will cause the particles and dust that originally settled at the bottom of the chamber to be lifted up and dusted in the chamber, causing the particles and dust to be scattered disorderly in the chamber.

[0004] When the next process is carried out, it is necessary to vacuum the product and put it in. However, it takes a certain amount of time for the particles and dust raised by the last vacuum to settle again, so that when the vacuum is drawn, some particles and dust that have not been completely settled will remain in the space from the evaporation source to the product. These particles and dust may block the flight path of molecules during normal evaporation, that is, the molecules collide with the particles and dust during the flight and cannot reach the product, or the molecules attach to the product together with the particles and dust, resulting in a certain amount of particle contamination on the product when the film is finally formed, resulting in a decrease in the electrical and conductive properties of the product.

[0005] The prior art sets up a buffer system for the airflow channel to prevent concentrated strong airflow from rushing into the vacuum chamber. The buffer system is usually set directly on the side wall of the evaporation process area. Then the buffer system is very close to the evaporation source and the settled particles and dust, and there is no air resistance in the vacuum, so the effect on reducing dust is very small. Therefore, it is necessary to set up a buffer space so that the airflow buffered by the buffer system is first buffered in the buffer space instead of blowing directly into the evaporation process area, and the buffer system blocks the airflow in the direct direction and avoids the airflow in the lateral direction. Summary of the invention

[0006] In view of this, in order to solve the above-mentioned problem, the present invention proposes a dust particle buffer system, which divides an airflow into multiple small airflows by setting a porous structure discharge on the side wall of the buffer system 5, and converts the direct impact into side buffering, thereby reducing the energy of the dust impact air and greatly reducing the amount and density of the dust.

[0007] A dust particle buffer system, the buffer system 5 is arranged in the buffer zone 2, the buffer zone 2 is connected with the evaporation process zone 1, and is characterized in that: the buffer system 5 is arranged on the side wall of the buffer zone 2 away from the evaporation process zone 1, the buffer system 5 includes a guide seat 51, the outer wall of the buffer zone 2 is connected with a stuffy plate 4, the outer side of the stuffy plate 4 is connected with an electromagnetic valve 3, and the inner side of the stuffy plate 4 is connected with the guide seat 51, the guide seat 51 is a hollow structure formed by the outer shell of the guide seat, a main airflow channel 7 is arranged in the hollow structure of the guide seat 51, a plurality of airflow dissipation holes 9 are evenly spaced on the side wall of the guide seat shell, the main airflow channel 7 is connected with the plurality of airflow dissipation holes 9, when it is necessary to break the vacuum, the electromagnetic valve 3 is opened, so that a strong airflow enters from the main airflow channel 7, and is evenly divided into a plurality of scattered small airflows through the plurality of airflow dissipation holes 9 and sprayed into the buffer zone 2, so that the strong airflow is not directly sprayed to the evaporation process zone 1, effectively reducing the amount and density of dust.

[0008] Furthermore, an input hole 6 is provided at the input end of the main airflow channel 7 , and a plurality of connecting tubes 8 are provided at the output end of the main airflow channel 7 . Each of the airflow dissipation holes 9 corresponds to a connecting tube 8 one by one and is connected to the main airflow channel 7 through the connecting tube 8 .

[0009] In some embodiments, the guide seat 51 is cylindrical or block-shaped.

[0010] Furthermore, the guide seat 51 is a cylinder, the input hole 6 is located at the center of the input end of the main airflow channel 7, and the input hole 6 is connected to the stuffy plate 4, and a plurality of circles of airflow dissipation holes 9 are provided on the side wall along the length direction of the cylinder. A strong airflow enters the main airflow channel 7 from the input hole 6, is sprayed to the end surface at the other end of the main airflow channel 7, rebounds, and is converted into a plurality of small airflows that are sprayed to a plurality of connecting tubes 8 corresponding to the airflow dissipation holes 9, and then dissipates and is discharged from the side wall through the plurality of circles of airflow dissipation holes 9.

[0011] Furthermore, each circle of the airflow dissipation holes 9 is arranged radially around the center of the cylinder.

[0012] Furthermore, the guide seat 51 is block-shaped, the input hole 6 is located at the center of the input end of the main airflow channel 7, and the input hole 6 is connected to the stuffy plate 4, and a plurality of airflow dissipation holes 9 are evenly spaced on the side adjacent to the main airflow channel 7. The strong airflow enters the main airflow channel 7 from the input hole 6, and is converted into multiple small airflows after being sprayed onto the inner wall of the main airflow channel 7, and is sprayed onto a plurality of connecting tubes 8 corresponding to the airflow dissipation holes 9, and then is evenly divided into multiple dispersed small airflows through the airflow dissipation holes 9 for dissipation and discharge.

[0013] Furthermore, the cross-sectional area of ​​the main airflow channel 7 is smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9, so that the total cross-sectional area for the airflow to enter will not be reduced, resulting in a decrease in the airflow intensity.

[0014] Furthermore, the cross-sectional area of ​​the main airflow channel 7 is at least 1.5 times smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9 .

[0015] Furthermore, the smaller the airflow dissipation holes 9 are, the better the buffering effect is, which facilitates the formation of a thin and small airflow without causing a large amount of dust.

[0016] Furthermore, the outer side wall of the buffer zone 2 is protruding outwardly to be provided with a connection port 22 , and the outer side of the connection port 22 is detachably connected to the blocking plate 4 .

[0017] Furthermore, the strong airflow rushing in when breaking the vacuum is an inert gas, and more preferably, the inert gas is nitrogen.

[0018] Beneficial effects of the present invention: a dust particle buffer system, the buffer system 5 is arranged in the buffer zone 2, the buffer zone 2 is connected with the evaporation process zone 1, the buffer system 5 is arranged on the side wall of the buffer zone 2 away from the evaporation process zone 1, the buffer system 5 includes a guide seat 51, the outer wall of the buffer zone 2 is connected with a stuffy plate 4, the outer side of the stuffy plate 4 is connected with the solenoid valve 3, the inner side of the stuffy plate 4 is connected with the guide seat 51, the guide seat 51 is a hollow structure formed by the outer shell of the guide seat, a main airflow channel 7 is arranged in the hollow structure of the guide seat 51, a plurality of airflow dissipation holes 9 are evenly spaced on the side wall of the guide seat shell, the main airflow channel 7 is connected with the plurality of airflow dissipation holes 9, when it is necessary to break the vacuum, the solenoid valve 3 is opened, so that a strong airflow enters from the main airflow channel 7, and is evenly divided into a plurality of scattered small airflows through the plurality of airflow dissipation holes 9 and sprayed into the buffer zone 2, so that the strong airflow is not directly sprayed to the evaporation process zone 1, effectively reducing the amount and density of dust. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is an overall schematic diagram of the installation position of the dust particle buffer system of the present invention.

[0020] Figure 2It is an overall schematic diagram of the installation position of the dust particle buffer system of the present invention.

[0021] Figure 3 It is a partial schematic diagram of the installation position of the dust particle buffer system of the present invention.

[0022] Figure 4 It is a schematic diagram of the overall structure of Example 1 of the dust particle buffer system of the present invention.

[0023] Figure 5 It is a cross-sectional view of Example 1 of the dust particle buffer system of the present invention.

[0024] Figure 6 It is a schematic diagram of the overall structure of Example 2 of the dust particle buffer system of the present invention.

[0025] Figure 7 The cross section of the embodiment 2 of the dust particle buffer system of the present invention is Figure 1 .

[0026] Figure 8 The cross section of the embodiment 2 of the dust particle buffer system of the present invention is Figure 2 .

[0027] Main component symbols

[0028] Evaporation process area 1, buffer zone 2, connection port 22, solenoid valve 3, blocking plate 4, buffer system 5, flow guide seat 51, input hole 6, main air flow channel 7, connection tube 8, air flow dissipation hole 9.

[0029] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0030] like Figure 1 As shown, it is an overall schematic diagram of the installation position of the dust particle buffer system of the present invention; Figure 2 As shown, it is an overall schematic diagram of the installation position of the dust particle buffer system of the present invention; Figure 3 As shown, it is a partial schematic diagram of the installation position of the dust particle buffer system of the present invention; Figure 4 As shown, it is a schematic diagram of the overall structure of the embodiment 1 of the dust particle buffer system of the present invention; Figure 5 , which is a cross-sectional view of the embodiment 1 of the dust particle buffer system of the present invention; Figure 6 As shown, it is a schematic diagram of the overall structure of the embodiment 2 of the dust particle buffer system of the present invention; Figure 7 FIG. 2 is a cross-section of the dust particle buffer system of the present invention. Figure 1 ;like Figure 8 FIG. 2 is a cross-section of the dust particle buffer system of the present invention. Figure 2. Embodiment 1:

[0031] A dust particle buffer system, the buffer system 5 is arranged in a buffer zone 2, the buffer zone 2 is connected to a vapor deposition process zone 1, the buffer system 5 is arranged on the side wall of the buffer zone 2 away from the vapor deposition process zone 1, the buffer system 5 includes a guide seat 51, the outer wall of the buffer zone 2 is connected to a stuffy plate 4, the outer side of the stuffy plate 4 is connected to an electromagnetic valve 3, the inner side of the stuffy plate 4 is connected to the guide seat 51, the guide seat 51 is a hollow structure formed by a guide seat shell, a main airflow channel 7 is arranged in the hollow structure of the guide seat 51, a plurality of airflow dissipation holes 9 are evenly spaced on the side wall of the guide seat shell, the main airflow channel 7 is connected to the plurality of airflow dissipation holes 9, when it is necessary to break the vacuum, the electromagnetic valve 3 is opened to allow a strong airflow to enter from the main airflow channel 7, the strong airflow rushing in when breaking the vacuum is an inert gas, which is evenly divided into a plurality of scattered small airflows through a plurality of airflow dissipation holes 9 and sprayed into the buffer zone 2, so that the strong airflow is not directly sprayed to the vapor deposition process zone 1, effectively reducing the amount and density of dust.

[0032] An input hole 6 is provided at the input end of the main airflow channel 7 , and a plurality of connecting tubes 8 are provided at the output end of the main airflow channel 7 . Each of the airflow dissipation holes 9 corresponds to a connecting tube 8 one by one and is connected to the main airflow channel 7 through the connecting tube 8 .

[0033] The guide seat 51 is a cylinder, and the input hole 6 is located at the center of the input end of the main airflow channel 7, and the input hole 6 is connected to the blocking plate 4. A plurality of circles of airflow dissipation holes 9 are provided on the side wall along the length direction of the cylinder. A strong airflow enters the main airflow channel 7 from the input hole 6, is sprayed to the end surface at the other end of the main airflow channel 7, rebounds, and is converted into a plurality of small airflows that are sprayed to a plurality of connecting tubes 8 corresponding to the airflow dissipation holes 9, and then is dissipated and discharged from the side wall through the plurality of circles of airflow dissipation holes 9.

[0034] Each circle of the airflow dissipation holes 9 is arranged radially around the center of the cylinder.

[0035] The cross-sectional area of ​​the main airflow channel 7 is smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9, so that the total cross-sectional area for the airflow to enter will not be reduced, resulting in a decrease in the airflow intensity.

[0036] The cross-sectional area of ​​the main airflow channel 7 is at least 1.5 times smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9 .

[0037] The outer wall of the buffer zone 2 is protruded outwardly to form a connection port 22 , and the outer side of the connection port 22 is detachably connected to the blocking plate 4 . Embodiment 2:

[0038] A dust particle buffer system, the buffer system 5 is arranged in the buffer zone 2, the buffer zone 2 is connected with the evaporation process zone 1, and is characterized in that: the buffer system 5 is arranged on the side wall of the buffer zone 2 away from the evaporation process zone 1, the buffer system 5 includes a guide seat 51, the outer wall of the buffer zone 2 is connected with a stuffy plate 4, the outer side of the stuffy plate 4 is connected with an electromagnetic valve 3, and the inner side of the stuffy plate 4 is connected with the guide seat 51, the guide seat 51 is a hollow structure formed by the outer shell of the guide seat, a main airflow channel 7 is arranged in the hollow structure of the guide seat 51, a plurality of airflow dissipation holes 9 are evenly spaced on the side wall of the guide seat shell, the main airflow channel 7 is connected with the plurality of airflow dissipation holes 9, when it is necessary to break the vacuum, the electromagnetic valve 3 is opened, so that a strong airflow enters from the main airflow channel 7, the strong airflow rushing in when breaking the vacuum is an inert gas, which is evenly divided into a plurality of scattered small airflows through the plurality of airflow dissipation holes 9 and sprayed into the buffer zone 2, so that the strong airflow is not directly sprayed to the evaporation process zone 1, effectively reducing the amount and density of dust.

[0039] An input hole 6 is provided at the input end of the main airflow channel 7 , and a plurality of connecting tubes 8 are provided at the output end of the main airflow channel 7 . Each of the airflow dissipation holes 9 corresponds to a connecting tube 8 one by one and is connected to the main airflow channel 7 through the connecting tube 8 .

[0040] The guide seat 51 is block-shaped, the input hole 6 is located at the center of the input end of the main airflow channel 7, and the input hole 6 is connected to the stuffy plate 4. A plurality of airflow dissipation holes 9 are evenly spaced apart on the side adjacent to the main airflow channel 7. A strong airflow enters the main airflow channel 7 from the input hole 6, and is converted into a plurality of small airflows after being sprayed onto the inner wall of the main airflow channel 7, and is sprayed onto a plurality of connecting tubes 8 corresponding to the airflow dissipation holes 9, and then is evenly divided into a plurality of dispersed small airflows through the airflow dissipation holes 9 for dissipation and discharge.

[0041] The cross-sectional area of ​​the main airflow channel 7 is smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9, so that the total cross-sectional area for the airflow to enter will not be reduced, resulting in a decrease in the airflow intensity.

[0042] The cross-sectional area of ​​the main airflow channel 7 is at least 1.5 times smaller than the sum of the cross-sectional areas of the other airflow dissipation holes 9 .

[0043] The outer wall of the buffer zone 2 is protruded outwardly to form a connection port 22 , and the outer side of the connection port 22 is detachably connected to the blocking plate 4 .

[0044] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A dust particle buffer system, the buffer system (5) being arranged in a buffer zone (2), the buffer zone (2) being connected to a vapor deposition process zone (1), characterized in that: The buffer system (5) is arranged on the side wall of the buffer zone (2) away from the evaporation process zone (1), and the buffer system (5) comprises a guide seat (51). The outer wall of the buffer zone (2) is connected to a blocking plate (4), the outer side of the blocking plate (4) is connected to the solenoid valve (3), and the inner side of the blocking plate (4) is connected to the guide seat (51). The guide seat (51) is a hollow structure formed by the outer shell of the guide seat. A main airflow channel (7) is arranged in the hollow structure of the guide seat (51). A plurality of airflow dissipation holes (9) are evenly spaced on the side wall of the outer shell of the guide seat. The main airflow channel (7) is connected to the plurality of airflow dissipation holes (9). When it is necessary to break the vacuum, the solenoid valve (3) is opened, so that a strong airflow enters from the main airflow channel (7), is evenly divided into a plurality of dispersed small airflows through the plurality of airflow dissipation holes (9), and is sprayed into the buffer zone (2), so that the strong airflow is not directly sprayed toward the evaporation process zone (1), thereby effectively reducing the amount and density of dust.

2. The dust particle buffer system according to claim 1, characterized in that: An input hole (6) is provided at the input end of the main airflow channel (7), and a plurality of connecting tubes (8) are provided at the output end of the main airflow channel (7). Each of the airflow dissipation holes (9) corresponds to a connecting tube (8) one by one, and is connected to the main airflow channel (7) via the connecting tube (8).

3. The dust particle buffer system according to claim 1, characterized in that: The flow guide seat (51) is cylindrical or block-shaped.

4. The dust particle buffer system according to claim 1, characterized in that: The guide seat (51) is a cylinder, the input hole (6) is located at the center of the input end of the main airflow channel (7), and the input hole (6) is connected to the suffocating plate (4). A plurality of circles of airflow dissipation holes (9) are provided on the side wall along the length direction of the cylinder. A strong airflow enters the main airflow channel (7) from the input hole (6), is sprayed onto the end surface at the other end of the main airflow channel (7), rebounds, and is converted into a plurality of small airflows that are sprayed onto a plurality of connecting tubes (8) corresponding to the airflow dissipation holes (9), and then is dissipated and discharged from the side wall through the plurality of circles of airflow dissipation holes (9).

5. The dust particle buffer system according to claim 1, characterized in that: Each circle of air flow dissipation holes (9) is arranged radially around the center of the cylinder.

6. The dust particle buffer system according to claim 1, characterized in that: The guide seat (51) is block-shaped, the input hole (6) is located at the center of the input end of the main airflow channel (7), and the input hole (6) is connected to the choke plate (4). A plurality of airflow dissipation holes (9) are evenly spaced on a side adjacent to the main airflow channel (7). A strong airflow enters the main airflow channel (7) from the input hole (6), is sprayed onto the inner wall of the main airflow channel (7), and is converted into a plurality of small airflows, which are sprayed onto a plurality of connecting tubes (8) corresponding to the airflow dissipation holes (9), and are then evenly divided into a plurality of dispersed small airflows through the airflow dissipation holes (9) and are dissipated out.

7. The dust particle buffer system according to claim 1, characterized in that: The cross-sectional area of ​​the main airflow channel (7) is smaller than the sum of the cross-sectional areas of the other airflow dissipation holes (9), so that the total cross-sectional area for airflow to enter does not decrease, thereby causing the airflow intensity to decrease.

8. The dust particle buffer system according to claim 1, characterized in that: The cross-sectional area of ​​the main airflow channel (7) is at least 1.5 times smaller than the sum of the cross-sectional areas of the other airflow dissipation holes (9).

9. The dust particle buffer system according to claim 1, characterized in that: The outer side wall of the buffer zone (2) is provided with a connection opening (22) protruding outwards, and the outer side of the connection opening (22) is detachably connected to the blocking plate (4).

10. The dust particle buffer system according to claim 1, characterized in that: The strong airflow that rushes in when the vacuum is broken is inert gas.

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