Anti-interference performance detection system and method for film vacuum gauge

Abstract

The invention discloses an anti-interference performance detection system and method for a thin film vacuum gauge, relates to the technical field of vacuum metering, and mainly aims to solve the problem of low accuracy of anti-interference performance detection of the thin film vacuum gauge. The system mainly comprises an electromagnetic interference signal transmitting device, a film vacuum gauge measuring device and a detection result generating device, the electromagnetic interference signal transmitting device is used for transmitting a target interference signal to a test environment of the to-be-tested film vacuum gauge according to a target frequency, and the target frequency is any frequency set based on a user; the thin film vacuum gauge measuring device is used for collecting thin film vacuum gauge electric signal data of the thin film vacuum gauge to be measured under the influence of the electromagnetic interference signals, and the electric signal data comprise thin film vacuum gauge electric signals corresponding to the electromagnetic interference signals of different frequencies respectively; and the detection result generation device is used for generating an anti-interference performance detection result of the to-be-detected film vacuum gauge according to the electric signal data of the film vacuum gauge. The method is mainly used for detecting the anti-interference performance of the film vacuum gauge.

Description

Technical Field

[0001] The present invention relates to the field of vacuum measurement technology, and in particular to a system and method for detecting the anti-interference performance of a thin film vacuum gauge. Background Art

[0002] Capacitive thin film vacuum gauge is a vacuum pressure measuring device with high precision, high sensitivity and high stability. It measures the vacuum degree by measuring the change in capacitance between the diaphragm and the electrode. Since the capacitance change of the capacitive thin film vacuum gauge is small when measuring air pressure, it requires several dozen times of voltage amplification to achieve effective information collection. During the use of the vacuum gauge, it is easy to be interfered by power frequency signals, electromagnetic signals and other signals, resulting in inaccurate measurement results or unstable readings. Therefore, it is necessary to accurately evaluate the anti-interference performance of the vacuum gauge in the design and production of the capacitive thin film vacuum gauge.

[0003] With the rapid development of semiconductor devices, the actual working environment of capacitive thin-film vacuum gauges has more and more different types of semiconductor devices, and the electromagnetic interference signals generated are more complex. However, in the traditional vacuum gauge anti-interference performance test process, it is impossible to simulate the complex electromagnetic interference signals in the actual working environment, and thus it is impossible to conduct a comprehensive test of the anti-interference performance of the thin-film vacuum gauge in different interference environments, resulting in low accuracy in the test of the anti-interference performance of the thin-film vacuum gauge. Summary of the invention

[0004] In view of this, the present invention provides a system and method for detecting the anti-interference performance of a thin film vacuum gauge, the main purpose of which is to solve the problem of low accuracy in the existing anti-interference performance detection of the thin film vacuum gauge.

[0005] According to one aspect of the present invention, a system for detecting anti-interference performance of a thin film vacuum gauge is provided, comprising:

[0006] Electromagnetic interference signal transmitting device, thin film vacuum gauge measuring device and detection result generating device;

[0007] The electromagnetic interference signal transmitting device is used to transmit a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, and the target frequency is an arbitrary frequency set by a user;

[0008] The thin film vacuum gauge measuring device is used to collect thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be measured under the influence of the electromagnetic interference signal, wherein the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies respectively;

[0009] The detection result generating device is used to generate the anti-interference performance detection result of the thin film vacuum gauge to be tested according to the electrical signal data of the thin film vacuum gauge.

[0010] Furthermore, the electromagnetic interference signal transmitting device comprises: a signal generating module, a power amplifying module, an automatic impedance matching control module and a signal transmitting module;

[0011] The signal generating module is connected to the power amplifying module and is used to output an initial interference signal to the power amplifying module according to the received target frequency;

[0012] The power amplification module is connected to the signal transmission module through the automatic impedance matching control module, and is used to power amplify the initial interference signal, and transmit the power-amplified initial interference signal to the signal transmission module through the automatic impedance matching control module, so that the signal transmission module transmits a target interference signal matching the target frequency to the detection environment where the thin film vacuum gauge to be tested is located;

[0013] The automatic impedance matching control module is used to adjust the impedance value matching according to the initial interference signal after power amplification and the load resistance of the signal transmission module, so that the initial interference signal after power amplification is transmitted to the signal transmission module without reflection.

[0014] Further, the automatic impedance matching control module includes: a motor control submodule, an automatic impedance matching execution submodule and a first automatic impedance matching network;

[0015] The motor control submodule is connected to the automatic impedance matching execution submodule, and is used to generate a voltage signal that matches the initial interference signal after power amplification, and output the voltage signal to the automatic impedance matching execution submodule;

[0016] The automatic impedance matching execution submodule is connected to the signal transmission module through the first automatic impedance matching network, and is used to adjust the first automatic impedance matching network according to the voltage signal so that the first automatic impedance matching network adjusts the impedance to a target impedance value, and the target impedance value is used to transmit the initial interference signal after power amplification to the signal transmission module without reflection.

[0017] Furthermore, the motor control submodule includes: a control unit, a phase detection unit, a DC motor drive unit and a capacitor position monitoring unit;

[0018] The input end of the phase detection unit is connected to the power amplification module, and the output end is connected to the control unit and the automatic impedance matching execution submodule respectively, for detecting the amplitude and phase of the initial interference signal after power amplification, and outputting the amplitude and phase after A / D conversion to the control unit and the automatic impedance matching execution submodule;

[0019] The input end of the capacitance position monitoring unit is connected to the first automatic impedance matching network, and the output end is connected to the control unit, for real-time monitoring of the capacitance value of the first automatic impedance matching network, and feeding back the capacitance value after A / D conversion to the control unit;

[0020] The output end of the control unit is connected to the DC motor drive unit, and is used to generate a motor control signal according to the capacitance value after A / D conversion, the amplitude after A / D conversion, and the phase after A / D conversion, and send the motor control signal to the DC motor drive unit;

[0021] The DC motor driving unit is used to generate a voltage signal according to the motor control signal, and send the voltage signal to the automatic impedance matching execution submodule.

[0022] Furthermore, the power amplification module includes a front-stage signal amplification unit and a rear-stage power amplification unit;

[0023] The input end of the front-stage signal amplifying unit is connected to the output end of the signal generating module, and the output end is connected to the input end of the rear-stage power amplifying unit, and is used to power amplify and filter the initial interference signal to obtain a primary power amplification result of the initial interference signal;

[0024] The output end of the post-stage power amplification unit is connected to the automatic impedance matching control module, and is used to perform secondary power amplification on the primary power amplification result of the initial interference signal, and output the power-amplified initial interference signal to the automatic impedance matching control module.

[0025] Furthermore, the power amplification module also includes a second automatic impedance matching network;

[0026] The second automatic impedance matching network is used to filter and shape the power-amplified initial interference signal output by the subsequent power amplifier unit to output a high-power initial interference signal after filtering and shaping;

[0027] The automatic impedance matching control module is also used to adjust the impedance value matching based on the high-power initial interference signal after filtering and shaping and the load resistance of the signal transmission module, so that the initial interference signal after power amplification is transmitted to the signal transmission module without reflection.

[0028] Furthermore, the detection result generating device is specifically used for:

[0029] Calculating the electrical signal fluctuation amplitude according to the electrical signal data;

[0030] When the fluctuation amplitude of the electric signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is greater than a preset fluctuation threshold, a test report is generated indicating that the test result of the thin film vacuum gauge to be tested is abnormal;

[0031] When the fluctuation amplitude of the electrical signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is less than or equal to the preset fluctuation threshold, a test report is generated indicating that the test result of the thin film vacuum gauge to be tested is qualified.

[0032] According to another aspect of the present invention, a method for detecting the anti-interference performance of a thin film vacuum gauge is provided, comprising:

[0033] Transmitting a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, wherein the target frequency is an arbitrary frequency set by a user;

[0034] Collecting thin film vacuum gauge electrical signal data of the thin film vacuum gauge under the influence of the electromagnetic interference signal, wherein the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies respectively;

[0035] The anti-interference performance test result of the thin film vacuum gauge to be tested is generated according to the electrical signal data of the thin film vacuum gauge.

[0036] According to another aspect of the present invention, a storage medium is provided, wherein at least one executable instruction is stored in the storage medium, and the executable instruction enables a processor to execute operations corresponding to the anti-interference performance detection system of the thin film vacuum gauge as described above.

[0037] According to another aspect of the present invention, there is provided a terminal, comprising: a processor, a memory, a communication interface and a communication bus, wherein the processor, the memory and the communication interface communicate with each other via the communication bus;

[0038] The memory is used to store at least one executable instruction, and the executable instruction enables the processor to execute operations corresponding to the anti-interference performance detection system of the above-mentioned thin film vacuum gauge.

[0039] By means of the above technical solution, the technical solution provided by the embodiment of the present invention has at least the following advantages:

[0040] The present invention provides a system and method for detecting the anti-interference performance of a thin film vacuum gauge. In the embodiment of the present invention, an electromagnetic interference signal transmitting device transmits a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, and the target frequency is an arbitrary frequency set by the user; a thin film vacuum gauge measuring device collects the thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be tested under the influence of the electromagnetic interference signal, and the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies; a detection result generating device generates the anti-interference performance detection result of the thin film vacuum gauge to be tested according to the thin film vacuum gauge electrical signal data. Multi-frequency coverage of electromagnetic interference signals is achieved, so that the anti-interference performance detection result of the thin film vacuum gauge to be tested includes a variety of complex electromagnetic signal interference situations, which greatly improves the comprehensiveness of the anti-interference performance detection of the thin film vacuum gauge, and makes the detection environment closer to the actual use environment, thereby greatly improving the accuracy of the anti-interference performance detection of the thin film vacuum gauge.

[0041] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0043] Figure 1 A structural block diagram of an anti-interference performance detection system for a thin film vacuum gauge provided by an embodiment of the present invention is shown;

[0044] Figure 2 A structural block diagram of an electromagnetic interference signal transmitting device provided by an embodiment of the present invention is shown;

[0045] Figure 3 A flow chart of a method for detecting the anti-interference performance of a thin film vacuum gauge provided in an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0046] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0047] Aiming at the problem that the accuracy of the existing anti-interference performance detection of thin film vacuum gauges is low. The embodiment of the present invention provides an anti-interference performance detection system for thin film vacuum gauges, such as Figure 1 As shown, the system includes:

[0048] Electromagnetic interference signal transmitting device 100, thin film vacuum gauge measuring device 200 and detection result generating device 300;

[0049] The electromagnetic interference signal transmitting device 100 is used to transmit a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency; the thin film vacuum gauge measuring device 200 is used to collect the thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be tested under the influence of the electromagnetic interference signal; the detection result generating device 300 is used to generate the anti-interference performance detection result of the thin film vacuum gauge to be tested based on the thin film vacuum gauge electrical signal data.

[0050] In an embodiment of the present invention, the thin film vacuum gauge to be tested is a capacitive thin film vacuum gauge that needs to be tested for anti-interference performance. The scenarios for anti-interference performance testing can be development testing of thin film vacuum gauges, factory testing of products, or calibration of thin film vacuum gauges on the customer side. During the detection process, the thin film vacuum gauge to be tested is placed in a space environment covered by the interference signal of the electromagnetic interference signal transmitting device 100. The electromagnetic interference signal transmitting device 100 transmits an electromagnetic interference signal at a target frequency so that the thin film vacuum gauge to be tested is under the influence of the electromagnetic interference signal of the target frequency. Among them, the target frequency is an arbitrary frequency set by the user. For example, 2MHz, 13.56MHz, 27.12MHz, etc. The target frequency can be any frequency manually set by the user through an input device, or it can be a set of pre-set frequencies for sequential execution. The thin film vacuum gauge measuring device 200 collects the electrical signals of the thin film vacuum gauge to be tested under electromagnetic interference signals of different frequencies, and sends the collected electrical signals to the detection result generating device 300. The detection result generating device 300 judges the anti-interference capability under electromagnetic interference signals of different frequencies according to a preset detection result judging strategy, so as to generate an anti-interference performance detection result of the thin film vacuum gauge to be tested.

[0051] It should be noted that the frequency band of the electromagnetic interference signal generated by the existing electromagnetic interference signal generating device is narrow or point frequency signal, while in the actual use of the thin film vacuum gauge, the electromagnetic interference comes from various radio frequency power supplies, electronic equipment, motors, power grid fluctuations, etc. The frequency of the interference signal is relatively complex and often covers a wider frequency range. By transmitting the electromagnetic interference signal through the electromagnetic interference signal transmitting device in this application, it is possible to transmit electromagnetic interference signals of any frequency according to the needs of the user, so that the anti-interference ability detection environment is as close as possible to the actual electromagnetic interference environment of the thin film vacuum gauge, thereby ensuring the accuracy of the anti-interference ability detection of the thin film vacuum gauge.

[0052] In an embodiment of the present invention, for further explanation and limitation, as Figure 2 As shown, the electromagnetic interference signal transmitting device includes: a signal generating module, a power amplifying module, an automatic impedance matching control module and a signal transmitting module;

[0053] The signal generating module is connected to the power amplifying module, and is used to output an initial interference signal to the power amplifying module according to the received target frequency; the power amplifying module is connected to the signal transmitting module through the automatic impedance matching control module, and is used to power amplify the initial interference signal, and transmit the power-amplified initial interference signal to the signal transmitting module through the automatic impedance matching control module, so that the signal transmitting module transmits a target interference signal matching the target frequency to the detection environment where the thin film vacuum gauge to be tested is located; the automatic impedance matching control module is used to perform impedance value matching and adjustment based on the power-amplified initial interference signal and the load resistance of the signal transmitting module, so that the power-amplified initial interference signal is transmitted to the signal transmitting module without reflection.

[0054] In an embodiment of the present invention, the signal generating module is a signal source that can generate an electromagnetic signal of any frequency according to the setting, and can be a signal generator, a signal generating module, etc. The signal generating module sends an initial interference signal to the power amplifier module according to the user's setting. At this time, the signal is a low-power signal with a power unit of watts. After the power amplifier module amplifies and filters the initial interference signal, a high-power interference signal with a power unit of kilowatts is output (the initial interference signal after power amplification). The automatic impedance matching control module performs impedance self-matching adjustment according to the initial interference signal after power amplification, so that the impedance value shown in the circuit can achieve reflection-free output of the interference signal, and the signal waveform is in a traveling wave state, thereby ensuring that the interference signal is output at maximum power through the signal transmitting module.

[0055] It should be noted that since the working environment of the thin film vacuum gauge to be tested is mostly semiconductor equipment, and the semiconductor equipment will generate volt-level electromagnetic interference signals during operation, that is, high-power interference signals with a power of kilowatts. By configuring a power amplifier module in the electromagnetic interference signal transmitting device, the power of the interference signal can be effectively amplified. This makes the power of the interference signal consistent with the actual power of the electromagnetic interference signal in the working environment of the thin film vacuum gauge to be tested, thereby further improving the accuracy of the anti-interference ability detection of the thin film vacuum gauge.

[0056] In an embodiment of the present invention, for further explanation and limitation, as Figure 2 As shown, the automatic impedance matching control module includes: a motor control submodule, an automatic impedance matching execution submodule and a first automatic impedance matching network;

[0057] The motor control submodule is connected to the automatic impedance matching execution submodule, and is used to generate a voltage signal that matches the initial interference signal after power amplification, and output the voltage signal to the automatic impedance matching execution submodule; the automatic impedance matching execution submodule is connected to the signal transmission module through the first automatic impedance matching network, and is used to adjust the first automatic impedance matching network according to the voltage signal, so that the first automatic impedance matching network adjusts the impedance to the target impedance value.

[0058] In an embodiment of the present invention, the target impedance value is used to transmit the initial interference signal after power amplification to the signal transmission module without reflection. The motor control submodule can match the corresponding voltage signal according to different interference signal frequencies. After receiving the voltage signal output by the motor control submodule, the automatic impedance matching execution submodule determines the network parameters of the first automatic impedance matching network according to the voltage signal. The first automatic impedance matching network performs automatic impedance matching adjustment according to the network parameters indicated by the automatic impedance matching execution submodule, so that the impedance value adjusted by it can balance the load resistance of the signal transmission module, so that the interference signal does not generate a reflected signal during the signal transmission and transmission process, that is, the signal power is zero loss, thereby achieving the maximum power output of the interference signal.

[0059] In an embodiment of the present invention, for further explanation and limitation, as Figure 2 As shown, the motor control submodule includes: a control unit, a phase detection unit, a DC motor drive unit and a capacitor position monitoring unit;

[0060] The input end of the phase detection unit is connected to the power amplifier module, and the output end is respectively connected to the control unit and the automatic impedance matching execution submodule, for detecting the amplitude and phase of the initial interference signal after power amplification, and outputting the amplitude and phase after A / D conversion to the control unit and the automatic impedance matching execution submodule; the input end of the capacitor position monitoring unit is connected to the first automatic impedance matching network, and the output end is connected to the control unit, for real-time monitoring of the capacitance value of the first automatic impedance matching network, and feeding back the capacitance value after A / D conversion to the control unit; the output end of the control unit is connected to the DC motor drive unit, for generating a motor control signal according to the capacitance value after A / D conversion, the amplitude after A / D conversion and the phase after A / D conversion, and sending the motor control signal to the DC motor drive unit; the DC motor drive unit is used to generate a voltage signal according to the motor control signal, and send the voltage signal to the automatic impedance matching execution submodule.

[0061] In an embodiment of the present invention, the circuit structure of the first automatic impedance matching network includes at least one adjustable capacitor and a motor matching the number of adjustable capacitors. The rotating shaft of the motor is connected to the adjusting device of the adjustable capacitor. By adjusting the speed and direction of the motor, the position of the capacitor can be adjusted, and the adjustment of the capacitor position can achieve the adjustment of the impedance. The phase detection unit collects the phase and amplitude of the output signal of the power amplifier module, and converts the collected analog quantity into a digital quantity, and outputs it to the control unit and the automatic impedance matching execution submodule respectively, as a basis for the control unit to generate a motor control signal. The capacitor position monitoring unit collects the capacitor position in the circuit structure of the first automatic impedance matching network to determine the capacitance value, and feeds back the analog-to-digital conversion result of the capacitance value to the control unit, as a basis for the feedback adjustment of the control unit. The motor control signal generates a voltage signal and outputs it to the motor in the first automatic impedance matching network to drive the motor to rotate forward or reverse at a certain speed, thereby adjusting the impedance value.

[0062] In an embodiment of the present invention, for further explanation and limitation, as Figure 2 As shown, the power amplifier module includes a front-stage signal amplifier unit and a rear-stage power amplifier unit;

[0063] The input end of the front-stage signal amplifying unit is connected to the output end of the signal generating module, and the output end is connected to the input end of the rear-stage power amplifying unit, and is used to power amplify and filter the initial interference signal to obtain a primary power amplification result of the initial interference signal;

[0064] The output end of the post-stage power amplification unit is connected to the automatic impedance matching control module, and is used to perform secondary power amplification on the primary power amplification result of the initial interference signal, and output the power-amplified initial interference signal to the automatic impedance matching control module.

[0065] In the embodiment of the present invention, the initial interference signal generated by the signal generation module is input into the front-stage signal amplification unit for filtering and primary amplification to generate a signal voltage suitable for the required signal of the rear-stage power amplification unit, and then the rear-stage power amplification unit performs secondary power amplification to output the initial interference signal after power amplification. After two-stage signal amplification of the front-stage amplification and the rear-stage amplification, the high-power output of the interference signal can be achieved.

[0066] In one embodiment of the present invention, for further illustration and limitation, the power amplification module further includes a second automatic impedance matching network;

[0067] The second automatic impedance matching network is used to filter and shape the power-amplified initial interference signal output by the post-stage power amplifier unit to output a high-power initial interference signal after filtering and shaping; the automatic impedance matching control module is also used to adjust the impedance value matching based on the high-power initial interference signal after filtering and shaping and the load resistance of the signal transmission module, so that the power-amplified initial interference signal can be transmitted to the signal transmission module without reflection.

[0068] In the embodiment of the present invention, by configuring an automatic impedance matching network in the power amplifier module, the frequency and waveform of the signal can be made more accurate, the matching degree between the target interference signal and the interference signal frequency set by the user can be improved, the transmission error of the interference signal can be reduced, and the detection accuracy of the thin film vacuum gauge to be detected can be further improved.

[0069] In one embodiment of the present invention, for further explanation and limitation, the detection result generating device is specifically used to: calculate the electrical signal fluctuation amplitude based on the electrical signal data; when the electrical signal fluctuation amplitude of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is greater than a preset fluctuation threshold, generate a detection report indicating that the detection result of the thin film vacuum gauge to be tested is abnormal; when the electrical signal fluctuation amplitude of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is less than or equal to the preset fluctuation threshold, generate a detection report indicating that the detection result of the thin film vacuum gauge to be tested is qualified.

[0070] In the embodiment of the present invention, the larger the fluctuation range of the voltage signal output by the thin film vacuum gauge, the larger the error of its measurement result. Therefore, by judging the voltage signal fluctuation of the thin film vacuum gauge under different frequency interference signals, the measurement error of the thin film vacuum gauge under different frequency interference signals can be judged. The detection result generating device is pre-configured with a preset fluctuation threshold value to judge the error of the thin film vacuum gauge electrical signal currently detected under the current frequency electromagnetic interference signal. If the voltage signal fluctuation exceeds the preset fluctuation threshold value, it indicates that the measurement error at this time has exceeded the measurement error standard, that is, the anti-interference performance of the thin film vacuum gauge under the current frequency interference signal does not meet the requirements. If the voltage signal fluctuation is less than or equal to the preset fluctuation threshold value, it indicates that the measurement error at this time has exceeded the measurement error standard, that is, the anti-interference performance of the thin film vacuum gauge under the current frequency interference signal can still meet the requirements. Among them, according to actual experience, the preset fluctuation threshold value can be customized within the range of 0 to 10V, and the embodiment of the present invention does not make specific limitations.

[0071] The present invention provides a system for detecting the anti-interference performance of a thin film vacuum gauge. In the embodiment of the present invention, an electromagnetic interference signal transmitting device transmits a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, and the target frequency is an arbitrary frequency set by the user; a thin film vacuum gauge measuring device collects the thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be tested under the influence of the electromagnetic interference signal, and the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies; a detection result generating device generates the anti-interference performance detection result of the thin film vacuum gauge to be tested according to the thin film vacuum gauge electrical signal data. Multi-frequency coverage of electromagnetic interference signals is achieved, so that the anti-interference performance detection result of the thin film vacuum gauge to be tested includes a variety of complex electromagnetic signal interference situations, which greatly improves the comprehensiveness of the anti-interference performance detection of the thin film vacuum gauge, and makes the detection environment closer to the actual use environment, thereby greatly improving the accuracy of the anti-interference performance detection of the thin film vacuum gauge.

[0072] Furthermore, as a response to the above Figure 1 The embodiment of the present invention provides a method for detecting the anti-interference performance of a thin film vacuum gauge, such as Figure 3 As shown, the method includes:

[0073] 201. Transmit a target interference signal to a test environment of the thin film vacuum gauge to be tested according to a target frequency.

[0074] 202. Collect electrical signal data of the thin film vacuum gauge under the influence of the electromagnetic interference signal.

[0075] 203. Generate an anti-interference performance test result of the thin film vacuum gauge to be tested according to the electrical signal data of the thin film vacuum gauge.

[0076] Further, the step of transmitting a target interference signal to a test environment of the thin film vacuum gauge to be tested according to a target frequency includes:

[0077] Outputting an initial interference signal to the power amplification module according to the received target frequency;

[0078] Amplifying the power of the initial interference signal, and transmitting the power-amplified initial interference signal to the signal transmitting module through the automatic impedance matching control module, so that the signal transmitting module transmits a target interference signal matching the target frequency to the detection environment where the thin film vacuum gauge to be tested is located;

[0079] The impedance matching adjustment is performed based on the power-amplified initial interference signal and the load resistance of the signal transmission module, so that the power-amplified initial interference signal is transmitted to the signal transmission module without reflection.

[0080] Further, the impedance matching adjustment is performed based on the initial interference signal after power amplification and the load resistance of the signal transmission module, including:

[0081] generating a voltage signal matching the power-amplified initial interference signal, and outputting the voltage signal to the automatic impedance matching execution submodule;

[0082] The first automatic impedance matching network is adjusted according to the voltage signal so that the first automatic impedance matching network adjusts the impedance to a target impedance value, and the target impedance value is used to transmit the power-amplified initial interference signal to the signal transmission module without reflection.

[0083] Further, generating a voltage signal matching the power-amplified initial interference signal includes:

[0084] Detecting the amplitude and phase of the initial interference signal after power amplification, and outputting the amplitude and phase after A / D conversion to the control unit and the automatic impedance matching execution submodule;

[0085] monitoring the capacitance value of the first automatic impedance matching network in real time, and feeding back the capacitance value after A / D conversion to the control unit;

[0086] Generate a motor control signal according to the capacitance value after A / D conversion, the amplitude after A / D conversion and the phase after A / D conversion, and send the motor control signal to the DC motor drive unit;

[0087] A voltage signal is generated according to the motor control signal, and the voltage signal is sent to the automatic impedance matching execution submodule.

[0088] Further, the power amplifying the initial interference signal includes:

[0089] The initial interference signal is power amplified and filtered to obtain a primary power amplification result of the initial interference signal;

[0090] A secondary power amplification is performed on the primary power amplification result of the initial interference signal, and the power-amplified initial interference signal is output to the automatic impedance matching control module.

[0091] Furthermore, the power amplifying the initial interference signal further includes:

[0092] Performing filtering and shaping processing on the power-amplified initial interference signal output by the post-stage power amplifier unit to output a high-power initial interference signal after filtering and shaping;

[0093] The impedance matching adjustment is performed based on the high-power initial interference signal after filtering and shaping and the load resistance of the signal transmission module, so that the initial interference signal after power amplification is transmitted to the signal transmission module without reflection.

[0094] Furthermore, the generating of the anti-interference performance test result of the thin film vacuum gauge to be tested according to the thin film vacuum gauge electrical signal data specifically includes:

[0095] Calculating the fluctuation amplitude of the electric signal according to the electric signal data; generating a test report indicating that the test result of the thin film vacuum gauge to be tested is abnormal when the fluctuation amplitude of the electric signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is greater than a preset fluctuation threshold;

[0096] When the fluctuation amplitude of the electrical signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is less than or equal to the preset fluctuation threshold, a test report is generated indicating that the test result of the thin film vacuum gauge to be tested is qualified.

[0097] The present invention provides a method for detecting the anti-interference performance of a thin film vacuum gauge. In an embodiment of the present invention, an electromagnetic interference signal transmitting device transmits a target interference signal to a test environment of a thin film vacuum gauge to be tested according to a target frequency, wherein the target frequency is an arbitrary frequency set by a user; a thin film vacuum gauge measuring device collects thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be tested under the influence of the electromagnetic interference signal, wherein the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies; and a detection result generating device generates the anti-interference performance detection result of the thin film vacuum gauge to be tested according to the thin film vacuum gauge electrical signal data. Multi-frequency coverage of electromagnetic interference signals is achieved, so that the anti-interference performance detection result of the thin film vacuum gauge to be tested includes a variety of complex electromagnetic signal interference situations, which greatly improves the comprehensiveness of the anti-interference performance detection of the thin film vacuum gauge, and makes the detection environment closer to the actual use environment, thereby greatly improving the accuracy of the anti-interference performance detection of the thin film vacuum gauge.

[0098] Obviously, those skilled in the art should understand that the above modules or steps of the present invention can be implemented by a general computing device, they can be concentrated on a single computing device, or distributed on a network composed of multiple computing devices, and optionally, they can be implemented by a program code executable by a computing device, so that they can be stored in a storage device and executed by the computing device, and in some cases, the steps shown or described can be executed in a different order than here, or they can be made into individual integrated circuit modules, or multiple modules or steps therein can be made into a single integrated circuit module for implementation. Thus, the present invention is not limited to any specific combination of hardware and software.

[0099] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A thin film vacuum gauge anti-interference performance detection system, characterized in that: include: Electromagnetic interference signal transmitting device, thin film vacuum gauge measuring device and detection result generating device; The electromagnetic interference signal transmitting device is used to transmit a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, and the target frequency is an arbitrary frequency set by a user; The thin film vacuum gauge measuring device is used to collect thin film vacuum gauge electrical signal data of the thin film vacuum gauge to be measured under the influence of the electromagnetic interference signal, wherein the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies respectively; The detection result generating device is used to generate the anti-interference performance detection result of the thin film vacuum gauge to be tested according to the electrical signal data of the thin film vacuum gauge.

2. The system according to claim 1, characterized in that The electromagnetic interference signal transmitting device comprises: a signal generating module, a power amplifying module, an automatic impedance matching control module and a signal transmitting module; The signal generating module is connected to the power amplifying module and is used to output an initial interference signal to the power amplifying module according to the received target frequency; The power amplification module is connected to the signal transmission module through the automatic impedance matching control module, and is used to power amplify the initial interference signal, and transmit the power-amplified initial interference signal to the signal transmission module through the automatic impedance matching control module, so that the signal transmission module transmits a target interference signal matching the target frequency to the detection environment where the thin film vacuum gauge to be tested is located; The automatic impedance matching control module is used to adjust the impedance value matching according to the initial interference signal after power amplification and the load resistance of the signal transmission module, so that the initial interference signal after power amplification is transmitted to the signal transmission module without reflection.

3. The system according to claim 2, characterized in that The automatic impedance matching control module comprises: a motor control submodule, an automatic impedance matching execution submodule and a first automatic impedance matching network; The motor control submodule is connected to the automatic impedance matching execution submodule, and is used to generate a voltage signal that matches the initial interference signal after power amplification, and output the voltage signal to the automatic impedance matching execution submodule; The automatic impedance matching execution submodule is connected to the signal transmission module through the first automatic impedance matching network, and is used to adjust the first automatic impedance matching network according to the voltage signal so that the first automatic impedance matching network adjusts the impedance to a target impedance value, and the target impedance value is used to transmit the initial interference signal after power amplification to the signal transmission module without reflection.

4. The system according to claim 3, characterized in that The circuit structure of the first automatic impedance matching network includes at least one adjustable capacitor and a motor matching the number of the adjustable capacitors, and the motor control submodule includes: a control unit, a phase detection unit, a DC motor drive unit and a capacitor position monitoring unit; The input end of the phase detection unit is connected to the power amplification module, and the output end is connected to the control unit and the automatic impedance matching execution submodule respectively, for detecting the amplitude and phase of the initial interference signal after power amplification, and outputting the amplitude and phase after A / D conversion to the control unit and the automatic impedance matching execution submodule; The input end of the capacitance position monitoring unit is connected to the first automatic impedance matching network, and the output end is connected to the control unit, for real-time monitoring of the capacitance value of the first automatic impedance matching network, and feeding back the capacitance value after A / D conversion to the control unit; The output end of the control unit is connected to the DC motor drive unit, and is used to generate a motor control signal according to the capacitance value after A / D conversion, the amplitude after A / D conversion, and the phase after A / D conversion, and send the motor control signal to the DC motor drive unit; The DC motor driving unit is used to generate a voltage signal according to the motor control signal, and send the voltage signal to the automatic impedance matching execution submodule.

5. The system according to claim 2, characterized in that The power amplification module includes a front-stage signal amplification unit and a rear-stage power amplification unit; The input end of the front-stage signal amplifying unit is connected to the output end of the signal generating module, and the output end is connected to the input end of the rear-stage power amplifying unit, and is used to power amplify and filter the initial interference signal to obtain a primary power amplification result of the initial interference signal; The output end of the post-stage power amplification unit is connected to the automatic impedance matching control module, and is used to perform secondary power amplification on the primary power amplification result of the initial interference signal, and output the power-amplified initial interference signal to the automatic impedance matching control module.

6. The system according to claim 5, characterized in that The power amplification module also includes a second automatic impedance matching network; The second automatic impedance matching network is used to filter and shape the power-amplified initial interference signal output by the subsequent power amplifier unit to output a high-power initial interference signal after filtering and shaping; The automatic impedance matching control module is also used to adjust the impedance value matching based on the high-power initial interference signal after filtering and shaping and the load resistance of the signal transmission module, so that the initial interference signal after power amplification is transmitted to the signal transmission module without reflection.

7. The system according to any one of claims 1 to 6, characterized in that: The detection result generating device is specifically used for: Calculating the electrical signal fluctuation amplitude according to the electrical signal data; When the fluctuation amplitude of the electric signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is greater than a preset fluctuation threshold, a test report is generated indicating that the test result of the thin film vacuum gauge to be tested is abnormal; When the fluctuation amplitude of the electrical signal of the thin film vacuum gauge under the electromagnetic interference signal at any frequency is less than or equal to the preset fluctuation threshold, a test report is generated indicating that the test result of the thin film vacuum gauge to be tested is qualified.

8. A method for detecting the anti-interference performance of a thin film vacuum gauge, characterized in that: include: Transmitting a target interference signal to the test environment of the thin film vacuum gauge to be tested according to a target frequency, wherein the target frequency is an arbitrary frequency set by a user; Collecting thin film vacuum gauge electrical signal data of the thin film vacuum gauge under the influence of the electromagnetic interference signal, wherein the electrical signal data includes thin film vacuum gauge electrical signals corresponding to electromagnetic interference signals of different frequencies respectively; The anti-interference performance test result of the thin film vacuum gauge to be tested is generated according to the electrical signal data of the thin film vacuum gauge.

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