A reconfigurable unit control method, reconfigurable unit, device and storage medium

Abstract

The present invention discloses a reconfigurable unit manipulation method, a reconfigurable unit, a device and a storage medium, and relates to the field of reconfigurable electronic technology. The method comprises: preparing a reconfigurable unit, wherein the reconfigurable unit comprises a super atom, a magnetic response material and a reconfigurable unit main material; manipulating the reconfigurable unit to move within a set fluid environment range by a magnetic field and / or an electric field. By preparing a reconfigurable unit comprising a super atom, a magnetic response material and a main material, a metasurface is created that can change its physical and optical properties under the control of an external magnetic field and / or an electric field. The reconfigurable unit is manipulated by a magnetic field and / or an electric field to achieve precise motion control of the super atom within a set fluid environment range.

Description

Technical Field

[0001] The present invention relates to the field of reconfigurable electronic technology, and in particular to a reconfigurable unit control method, a reconfigurable unit, a device and a storage medium. Background Art

[0002] Metasurface is a special case of metamaterials, specifically referring to the arrangement of subwavelength devices in two-dimensional space to achieve specific electromagnetic properties. Traditional metamaterials are three-dimensional periodic artificial materials, but their application in the optical wave band is very limited. Therefore, metasurfaces have attracted much attention due to their low processing difficulty and full compatibility with existing binary optical processes (CMOS). Metasurfaces are mainly composed of high-freedom, non-periodic, densely arranged subwavelength unit structures on a two-dimensional plane. These structures can freely control the light field in multiple dimensions within the optical band (from ultraviolet, visible light to infrared light band). However, traditional metasurface devices usually only have a single super-atom arrangement, which leads to limitations in the functions of metasurface devices and makes it difficult to meet the needs of consumer electronics for multiple modulation functions when facing multi-scenario interactions.

[0003] In recent years, MEMS (micro-electromechanical system) microactuators have played an important role in the construction of tunable metasurface devices. However, the existing MEMS microactuators used in the construction of metasurfaces still have a series of problems in design and driving: (1) they require complex system layout and design, and have poor versatility; (2) they usually rely only on the mechanical deformation of the microstructure or mechanical movement to adjust the performance of the metasurface, and the low degree of freedom of movement limits the adjustable range of the metasurface; (3) the functions are limited to the pre-designed structure, making it difficult to further change or extend the functions. Summary of the invention

[0004] The main purpose of the present invention is to provide a reconfigurable unit manipulation method, a reconfigurable unit, a device and a storage medium, by preparing a reconfigurable unit comprising a super atom, a magnetic response material and a main material, to create a metasurface that can change its physical and optical properties under the control of an external magnetic field and / or electric field. The reconfigurable unit is manipulated by a magnetic field and / or an electric field to achieve precise motion control of the super atom within a set fluid environment.

[0005] In order to achieve the above objectives, the embodiments of the present application provide the following technical solutions:

[0006] According to a first aspect of an embodiment of the present application, a method for controlling a reconfigurable unit is provided, the method comprising:

[0007] preparing a reconfigurable unit, wherein the reconfigurable unit includes a super atom, a magnetic response material, and a reconfigurable unit main material;

[0008] The reconfigurable unit is controlled to move within a set fluid environment by a magnetic field and / or an electric field.

[0009] Optionally, controlling the reconfigurable unit to move within a set fluid environment range by using a magnetic field and / or an electric field comprises:

[0010] Applying an external magnetic field to the reconfigurable unit to manipulate the superatom to perform magnetic field movement within a set fluid environment, wherein the magnetic field movement includes rotation and / or tilt;

[0011] Applying an electric field to the reconfigurable unit to manipulate the superatom to perform electric field movement within a set fluid environment, wherein the electric field movement includes position adjustment and / or posture adjustment;

[0012] Applying external magnetic field and electric field to the reconfigurable unit, the super-atom is controlled to perform fusion movement within a set fluid environment, wherein the fusion movement includes rotation, tilt, position adjustment and / or posture adjustment.

[0013] Optionally, applying an external magnetic field to the reconfigurable unit to manipulate the superatom to move in the magnetic field within a set fluid environment includes:

[0014] By applying an external magnetic field, the directions of several super atoms in the reconfigurable unit are aligned to achieve an overall magnetic field response;

[0015] The hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the applied magnetic field to drive the rotation and tilt of the superatom;

[0016] Independent control of a single superatom or small unit can be achieved through the design of confined structures and protrusion structures in reconfigurable units.

[0017] Optionally, applying an electric field to the reconfigurable unit to manipulate the superatom to move in the electric field within a set fluid environment includes:

[0018] By applying a voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and different components of the electric field force are used to manipulate the superatom;

[0019] The electric dipole moment in the electric field forces the meta-atoms to align with the direction of the electric field, thus achieving addressing and independent control of the meta-atoms.

[0020] The super-atom is controlled to achieve the desired super-atom arrangement and posture through the friction of the electric field force and the upper cover plate.

[0021] Optionally, applying an external magnetic field and an electric field to the reconfigurable unit to manipulate the super-atom to fuse and move within a set fluid environment range includes:

[0022] The hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the applied magnetic field to drive the rotation and tilt of the superatom;

[0023] By applying a voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and different components of the electric field force are used to manipulate the superatom;

[0024] The electric dipole moment in the electric field force aligns the meta-atoms with the direction of the electric field, thus achieving addressing and independent control of the meta-atoms.

[0025] Optionally, the preparing the reconfigurable unit comprises:

[0026] Selecting a material that is insensitive to the target regulated electromagnetic wave band as the main material of the reconfigurable unit;

[0027] Selecting a magnetic metal or a magnetic material as the magnetic response material;

[0028] Select materials that are sensitive to the target regulation band as the materials of the meta-atom;

[0029] A micro-confinement structure designed to confine a super-atom within a specific region, wherein the micro-confinement structure provides space for super-atom movement;

[0030] The confined structure is prepared by micro-nano processing technology, and the confined structure determines the spatial arrangement of super atoms;

[0031] For the groove structure, a top cover is added on top of the device to prevent superatoms from escaping;

[0032] Pre-processing a sacrificial layer structure at the bottom of the reconfigurable unit so that the reconfigurable unit can be released from the substrate after the preparation is completed;

[0033] Superatoms, magnetically responsive materials, and reconfigurable unit host materials are assembled into reconfigurable units.

[0034] Optionally, after preparing the reconfigurable unit, the method further comprises:

[0035] removing the sacrificial layer using chemical methods to release the reconfigurable cell;

[0036] A top cover is used to cover the reconfigurable unit device to fix the position of the meta-atom.

[0037] According to a second aspect of an embodiment of the present application, a reconfigurable unit is provided, which is applied to the reconfigurable unit control method according to the first aspect, and the reconfigurable unit includes:

[0038] Superatoms, for reconfiguration and arrangement as needed;

[0039] Magnetic responsive materials, used to respond to external magnetic fields and achieve motion control of meta-atoms;

[0040] A reconfigurable unit main body material, constituting the main structure of the reconfigurable unit;

[0041] A confined structure is used to confine superatoms within a specific area and provide space for superatoms to move; the confined structure includes a groove structure and a microcavity structure, and a top cover plate is added to the top of the groove structure to prevent superatoms from escaping;

[0042] A sacrificial layer structure for releasing the reconfigurable unit from the substrate after device processing is completed;

[0043] Microelectrode patterns are used to apply voltage to the electrodes to generate electric field forces and achieve motion control of superatoms.

[0044] According to a third aspect of an embodiment of the present application, an electronic device is provided, comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method described in the first aspect above.

[0045] According to a fourth aspect of an embodiment of the present application, a computer-readable storage medium is provided, on which computer-readable instructions are stored. The computer-readable instructions can be executed by a processor to implement the method described in the first aspect above.

[0046] In summary, the embodiments of the present application provide a method for manipulating a reconfigurable unit, a reconfigurable unit, a device, and a storage medium, by preparing a reconfigurable unit, wherein the reconfigurable unit includes a super atom, a magnetic response material, and a reconfigurable unit main material; the reconfigurable unit is manipulated to move within a set fluid environment by a magnetic field and / or an electric field. By preparing a reconfigurable unit comprising a super atom, a magnetic response material, and a main material, a metasurface is created that can change its physical and optical properties under the control of an external magnetic field and / or an electric field. The reconfigurable unit is manipulated by a magnetic field and / or an electric field to achieve precise motion control of the super atom within a set fluid environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0048] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantial technical significance. Any structural modification, change in proportion or adjustment of size shall still fall within the scope of the technical contents disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0049] Figure 1 A schematic diagram of a reconfigurable unit control method provided in an embodiment of the present application;

[0050] Figure 2a , Figure 2b , Figure 2c A schematic diagram of a reconfigurable unit provided in an embodiment of the present application;

[0051] Figure 3 Schematic diagram of the electric / magnetic microfluidic actuator and the control method and mode provided in the embodiments of the present application;

[0052] Figure 4 Schematic diagram of the groove structure and microcavity structure provided in the embodiments of the present application;

[0053] Figure 5 A structural diagram of an electronic device provided in an embodiment of the present application is shown;

[0054] Figure 6 A diagram showing a computer-readable storage medium provided by an embodiment of the present application.

[0055] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0056] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0058] In addition, in the present invention, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0059] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0060] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0061] The novel microactuator design involved in the embodiment of the present application adopts an untethered design, which enables it to have flexible rotation and tilt capabilities in a microfluidic environment, providing a new way to realize multi-mode flexibly reconfigurable metasurfaces.

[0062] Figure 1 A reconfigurable unit control method provided in an embodiment of the present application is shown, the method comprising:

[0063] Step 101: preparing a reconfigurable unit, wherein the reconfigurable unit includes a super atom, a magnetic response material, and a reconfigurable unit main material;

[0064] Step 102: Manipulate the reconfigurable unit to move within a set fluid environment range through a magnetic field and / or an electric field.

[0065] In a possible implementation, in step 101, preparing a reconfigurable unit includes:

[0066] Select a material that is insensitive to the target electromagnetic band as the main material of the reconfigurable unit; select a magnetic metal or a magnetic material as the magnetic response material; select a material that is sensitive to the target regulation band as the material of the superatom; design a micro-confinement structure for confining the superatom within a specific area, and the micro-confinement structure provides space for the movement of the superatom; prepare the confined structure through micro-nano processing technology, and the confined structure determines the spatial arrangement of the superatom; for the groove structure, add an upper cover plate design on the top of the device to prevent the superatom from escaping; pre-process a sacrificial layer structure at the bottom of the reconfigurable unit so that the reconfigurable unit can be released from the substrate after the preparation is completed; assemble the superatom, the magnetic response material and the main material of the reconfigurable unit into a reconfigurable unit.

[0067] In a possible implementation, after preparing the reconfigurable unit in step 101, the method further includes:

[0068] The sacrificial layer is removed using a chemical method to release the reconfigurable unit; a top cover is used to cover the reconfigurable unit device to fix the position of the superatom.

[0069] By carefully selecting and designing the main materials, magnetic response materials and meta-atom materials, as well as designing and preparing micro-confined structures, the goal is to create a metasurface that can change its physical and optical properties under external control. By designing micro-confined structures and using micro-nano processing technology, the goal is to accurately control the spatial arrangement and movement of meta-atoms within a specific area to achieve precise regulation of electromagnetic waves. By adding a cover plate design and pre-processing a sacrificial layer structure on the top of the device, the goal is to improve the stability and reliability of the metasurface and prevent the escape or dislocation of meta-atoms during operation. By using chemical methods to remove the sacrificial layer, the goal is to quickly release the reconfigurable unit after preparation is completed, facilitating subsequent deployment and use.

[0070] In a possible implementation, in step 102, controlling the reconfigurable unit to move within a set fluid environment range by using a magnetic field and / or an electric field includes:

[0071] Applying an external magnetic field to the reconfigurable unit to manipulate the superatom to perform magnetic field movement within a set fluid environment, wherein the magnetic field movement includes rotation and / or tilt;

[0072] Applying an electric field to the reconfigurable unit to manipulate the superatom to perform electric field movement within a set fluid environment, wherein the electric field movement includes position adjustment and / or posture adjustment;

[0073] Applying external magnetic field and electric field to the reconfigurable unit, the super-atom is controlled to perform fusion movement within a set fluid environment, wherein the fusion movement includes rotation, tilt, position adjustment and / or posture adjustment.

[0074] In the field of optical imaging, this metasurface can be used as a dynamic optical filter, which can dynamically adjust the transmission characteristics of the filter by controlling the magnetic and electric fields to adapt to different imaging requirements. For example, the aperture size of the camera lens can be adjusted in real time according to the changes in ambient light to obtain the best imaging effect.

[0075] In the field of wireless communications, this metasurface can be used to design tunable antennas, which can dynamically adjust the resonant frequency and radiation pattern of the antenna by changing the arrangement and posture of the metaatoms. For example, it can quickly switch between different communication frequency bands to improve communication efficiency and spectrum utilization.

[0076] In the biomedical field, this metasurface can be used to design highly sensitive biomedical sensors, which can accurately detect biological molecules by precisely controlling the movement of metaatoms. For example, it can be used to detect specific markers in the blood for disease diagnosis.

[0077] In the field of display technology, this metasurface can be used in smart display devices to dynamically adjust the color and brightness of display pixels through the control of magnetic and electric fields. For example, it can be used to develop new types of electronic paper or flexible displays to provide more flexible and energy-saving display solutions.

[0078] In the field of data storage, this metasurface can be used for optical data storage, achieving high-density data storage by precisely controlling the position and posture of meta-atoms. For example, it can be used to develop new high-capacity optical discs or holographic storage devices, providing higher data storage density and faster read and write speeds.

[0079] In a possible implementation, in step 102, applying an external magnetic field to the reconfigurable unit to manipulate the superatom to move in a magnetic field within a set fluid environment includes:

[0080] By applying an external magnetic field, the directions of several superatoms in the reconfigurable unit are aligned to achieve an overall magnetic field response; the hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the external magnetic field to drive the rotation and tilt of the superatoms; and independent control of a single superatom or small unit is achieved through the design of the confined structure and protrusion structure in the reconfigurable unit.

[0081] The directional alignment and overall magnetic field response of meta-atoms are achieved through an external magnetic field, with the goal of precisely controlling the magnetic field movement of meta-atoms in a fluid environment, including rotation and tilt. The external magnetic field is aligned using hard magnetic and paramagnetic materials, with the goal of achieving the collective response of meta-atoms while achieving independent control of individual meta-atoms or small units through the design of confined and protruding structures. In optical communication systems, this metasurface can be used as an optical switch. By controlling the rotation and tilt of meta-atoms through an external magnetic field, the refraction and reflection of the light path can be changed, thereby achieving rapid switching of optical signals.

[0082] In summary, the purpose of this technical solution is to precisely control the magnetic field movement of superatoms in a fluid environment through an external magnetic field, while achieving collective and individual control to improve the flexibility and adaptability of the metasurface. This technology has broad application prospects in many fields, especially in situations where precise control of electromagnetic waves is required.

[0083] In a possible implementation, in step 102, applying an electric field to the reconfigurable unit to manipulate the superatom to perform electric field motion within a set fluid environment range includes:

[0084] By applying voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and the different components of the electric field force are used to manipulate the super-atoms; the electric dipole moment in the electric field force aligns the super-atoms with the direction of the electric field, thereby achieving addressing and independent control of the super-atoms; through the friction between the electric field force and the upper cover plate, the super-atoms are controlled to achieve the desired super-atomic arrangement and posture.

[0085] By applying voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and the different components of the electric field force are used to manipulate the meta-atoms, with the goal of achieving precise electric field movement of the meta-atoms within the set fluid environment, including position adjustment and posture adjustment. The electric dipole moment in the electric field force is used to align the meta-atoms with the direction of the electric field, enabling addressing and independent control of the meta-atoms, which allows precise manipulation of single meta-atoms or small units to meet different application requirements. The friction between the electric field force and the upper cover plate is used to control the meta-atoms to achieve the desired arrangement and posture, with the goal of improving the control accuracy and stability of the metasurface and ensuring that the meta-atoms can achieve the expected position and posture under electric field manipulation.

[0086] In a possible implementation, in step 102, applying an external magnetic field and an electric field to the reconfigurable unit to manipulate the super-atom to fuse and move within a set fluid environment range includes:

[0087] The hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the external magnetic field to drive the rotation and tilt of the super-atom; by applying voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and the different components of the electric field force are used to manipulate the super-atom; the electric dipole moment in the electric field force causes the super-atom to align with the direction of the electric field, thereby achieving addressing and independent control of the super-atom.

[0088] By applying external magnetic and electric fields simultaneously, the goal is to achieve precise fusion motion control of meta-atoms in a fluid environment, including rotation, tilt, position adjustment, and attitude adjustment. By utilizing the synergistic effect of magnetic and electric fields, the goal is to improve the dynamic response capability of the metasurface to changes in external electromagnetic fields to adapt to different application requirements. By precisely manipulating the motion of meta-atoms, the goal is to enhance the functional diversity and adaptability of the metasurface, enabling it to work in different electromagnetic environments.

[0089] Precise control of meta-atoms is achieved through coordinated or separate manipulation of magnetic and electric fields. The arrangement and orientation of meta-atoms have a significant impact on the performance of the metasurface. Through the design of confined structures and protrusion structures, the range of motion of each reconfigurable unit can be customized to achieve independent regulation of the unit orientation. In addition, electric field manipulation provides an addressable method so that each reconfigurable unit can be independently controlled without the need for additional micro-protrusion structures.

[0090] Applications of this technology may include tunable optics, antennas, sensors, etc., where the electromagnetic properties of the metasurface can be dynamically adjusted as needed.

[0091] The embodiments of the present application provide a reconfigurable metasurface technology, which involves the manipulation of meta-atoms and the design of unit architecture.

[0092] Aspect 1: Composition of reconfigurable units

[0093] 1. Superatoms: They are composed of materials that are sensitive to the target control band, such as gold, aluminum, vanadium dioxide, silicon, titanium dioxide, etc., and are used to achieve specific responses to electromagnetic waves. The electric field coordinated manipulation of superatoms can be manipulated by generating electric field forces in local areas. The electric field forces include dielectrophoretic force, electrophoretic force, electrothermal flow force, etc., which can be generated by processing microelectrode patterns on the substrate and applying voltage to the electrodes. The spatial arrangement of superatoms is determined by the confined structure.

[0094] 2. Magnetic response materials: including but not limited to magnetic metals such as Ni, Fe, Co, and one or more magnetic materials such as ferroferric oxide, iron-cobalt-nickel alloy, and neodymium-iron-boron, which are used to respond to an external magnetic field.

[0095] 3. Main materials: such as SU-8, Parylene, SiO2, etc. These materials are insensitive to the target regulated electromagnetic band and are used to constitute the main structure of the reconfigurable unit.

[0096] The reconfigurable unit needs to be controlled through the coordinated use of magnetic and electric fields, or by magnetic field alone.

[0097] The reconfigurable unit is placed in a fluid environment, and under the action of the double electric layer (Coulomb force), the problem of friction dominance caused by microscopic scale effects and difficult control is avoided. The fluid can be composed of fluid media such as dodecane, silicone oil, castor oil, etc. that are insensitive to the target electromagnetic wave band.

[0098] Figure 2a , Figure 2b , Figure 2c shows a schematic diagram of a reconfigurable unit, Figure 2a The hierarchical structure of the reconfigurable unit, including the superatom pattern, magnetic material, and the host material of the reconfigurable unit, is demonstrated. This structure allows the superatom to be manipulated by magnetic or electric fields.

[0099] Figure 2b The motion of superatoms in a confined structure is demonstrated, as well as how the electric field generated by the electrode pair affects the motion of superatoms. Electric field forces, including dielectrophoretic and electrophoretic forces, can be used to regulate the translation and tilt of superatoms.

[0100] Figure 2c An alternative perspective of metaatoms in confined structures is presented, emphasizing the interaction between metaatoms and electrodes.

[0101] The second aspect: control method

[0102] Magnetic field manipulation: Use the magnetic materials in the reconfigurable unit to align the external magnetic field to achieve the rotation and tilt of the super-atom. Alternatively, you can add a graphical paramagnetic material, such as a long strip of graphics, to the reconfigurable unit to provide alignment with the direction of the magnetic field. By utilizing the characteristics of the magnetic material in the reconfigurable unit that can respond to the external magnetic field, the magnetic field can be used to manipulate the rotation and tilt directions of the reconfigurable unit. The magnetic field can align the directions of multiple super-atoms with the magnetic field, but it cannot independently control the unit orientation. Adding a protrusion structure to the confined structure can customize the range of motion of each reconfigurable unit. For example, in a cylindrical confined microcavity, adding a micron protrusion structure with a side length smaller than the bottom radius can allow the super-atom to be stuck in the protrusion structure when it rotates to a specific angle, making it impossible to change the direction of the magnetic field, reflecting the effect of independently regulating the unit orientation.

[0103] Electric field manipulation: Superatoms are manipulated by generating electric field forces in local areas. Electric field forces include dielectrophoretic force, electrophoretic force, and electrothermal flow force. This is achieved by processing microelectrode patterns on a substrate and applying voltage to the electrodes. Electric field manipulation of reconfigurable units is achieved by generating an electric field through electrode patterns. The electrodes can be designed on a substrate, and the substrate can be made of materials such as metal (for reflective supersurfaces) or glass (transmissive supersurfaces); the electrode materials can be prepared using ITO, Au, Cu, etc. By applying voltage to the electrode pairs, an electric field is generated between the electrode pairs, thereby generating an electric field force. Among them, since the conductivity and dielectric constant of the superatoms and magnetic materials in the reconfigurable unit are different from those of the main material and the fluid medium, it provides the possibility of aligning the direction of the electric field for the reconfigurable unit under an external electric field. Among them, the electric dipole moment is used to align the superatoms with the direction of the electric field; the dielectrophoretic force is used to adjust the translation, tilt, and other movements of the superatoms. Electric field manipulation can manipulate each reconfigurable unit in an addressable manner, so the micro-protrusion structure can be eliminated in conjunction with magnetic field manipulation.

[0104] Figure 3 A schematic diagram of an electric / magnetic microfluidic actuator and a control method and mode is shown.

[0105] The left side shows the working principle of the electric / magnetic microfluidic actuator, in which the metal coating, microactuator and groove array and transparent substrate together constitute the basic structure of the actuator. The right side shows different control methods and modes, including:

[0106] 1. Magnetic field synchronous alignment, rotation, and tilt: The magnetic field is used to achieve synchronous movement of super atoms. Rotating magnetic field (coercive force): The coercive force characteristics of the magnetic field are used for manipulation.

[0107] 2. Electric field asynchronous control: The electric field is used to achieve independent control of each superatom, including dielectrophoretic force and electrothermal flow force. Addressing electric field (dielectrophoretic force): The electric field is used to achieve precise addressing and control of superatoms.

[0108] The third aspect: fluid environment

[0109] Use fluid media that are insensitive to the target control electromagnetic wave band, such as dodecane, silicone oil, castor oil, etc., to reduce the friction caused by micro-scale effects, thereby reducing the difficulty of control.

[0110] The fourth aspect: limited domain structure

[0111] The spatial arrangement of superatoms is determined by the confinement structure. Micro-confinement structure refers to a structure that can confine superatoms to a specific area and needs to provide space for superatoms to move (rotate, tilt, etc.). Confinement structure can be achieved by preparing grooves, microcavities and other structures through micro-nano processing.

[0112] Groove structure: prepared through micro-nano processing, used to confine super-atoms to a specific area and provide space for movement. A top cover is added on the top to prevent super-atoms from escaping. Since the groove structure cannot completely block the reconfigurable unit, it is necessary to add a top cover design on the top of the device to ensure that the super-atoms do not escape from the groove structure. A sacrificial layer structure is pre-processed at the bottom of the reconfigurable unit to facilitate the release of the reconfigurable unit from the base after the device processing is completed.

[0113] Microcavity structure: Also prepared by micro-nano processing, it is used to confine super-atoms and provide space for movement. Micron-protrusion structures can be added to customize the range of motion of each reconfigurable unit.

[0114] Figure 4 Schematic diagrams of groove structures and microcavity structures are shown. The left side (groove structure) shows a confined structure in which superatoms are confined within the grooves. Superatoms are allowed to rotate or tilt within the grooves while preventing them from escaping the confined area. The top cover is designed to ensure that the superatoms remain within the grooves during manipulation. Right side (microcavity structure): Another confined structure, the microcavity structure, is shown. In this structure, superatoms are confined within a cavity, the design of the cavity can provide space for superatoms to move, and the range of motion of superatoms can be customized by adding micron-protrusion structures.

[0115] Fifth aspect: embodiment

[0116] Device preparation: The substrate material of the reconfigurable metasurface device is made of quartz or borosilicate glass material, and metal electrodes are prepared on the substrate by a stripping process. The reconfigurable unit is made of SU-8 photoresist material and prepared by a photolithography process. A sacrificial layer such as an Al sacrificial layer is prepared in advance at the bottom of the reconfigurable unit. The confined structure is prepared by SU-8 photolithography; the circuit is prepared by patterning the electrode Au under the confined structure; the superatomic magnetic material selects a long strip of Ni pattern, which can be patterned by PVD and wet etching process; the functional layer in the superatomic unit uses a patterned Au metal long rod pattern.

[0117] After the device is prepared, the following operation process is also included:

[0118] Step 1: Remove the sacrificial layer and fix the upper cover plate;

[0119] After the device is fabricated, the sacrificial layer is removed using an alkali or acid to dissolve the temporary material, thereby releasing the reconfigurable unit below. After removing the sacrificial layer, the superatoms may move or misplace due to surface tension or other external forces. To prevent this, a top cover is used to cover the device to fix the position of the superatoms and ensure that they remain in the designed position.

[0120] Step 2: Apply an external magnetic field to manipulate the superatom rotation;

[0121] By applying a magnetic field outside the device, the superatoms containing magnetic materials can be manipulated. Since magnetic materials respond to external magnetic fields, the superatoms will rotate according to the direction of the magnetic field. If the magnetic field is uniform and stable, all superatoms can rotate synchronously to form a unified rotating array.

[0122] Step 3: Applying an electric field to achieve addressable control;

[0123] In an electric field, due to the difference in electrical properties (such as conductivity and dielectric constant) between superatoms and the surrounding medium, various electric field forces will be generated, such as dielectrophoretic force (causing superatoms to move to areas with weaker electric fields), electroosmotic flow (liquid flows under the action of an electric field), and electrothermal flow (fluid flows due to thermal effects caused by electric fields). By precisely controlling the voltage on the electrodes, an electric field can be generated in a specific area, thereby precisely controlling the movement of a single or a group of superatoms. This type of control is called "addressable control", which means that each superatom can be controlled individually without affecting other superatoms. Each superatom can be controlled by the electric field in an addressable manner. Under the action of the dielectrophoretic force, the superatom can be repelled away from the electrode, thereby rubbing against the upper cover plate, which has an obstructive effect on the rotational motion of the superatom;

[0124] Step 4: Apply magnetic field and electric field simultaneously;

[0125] The magnetic field not only rotates the superatom, but also controls the tilt angle of the superatom by changing the direction and strength of the magnetic field. The electric field force can hinder or change the movement of the superatom, for example, by repelling the superatom away from the electrode, or by using the dielectrophoretic force to move the superatom in a specific direction. This hindering effect of the electric field force can be combined with the rotation and tilt effects of the magnetic field to achieve more complex control of the superatom's motion.

[0126] By precisely controlling the magnetic and electric fields, the meta-atoms can be precisely manipulated, including rotation, tilting, and position adjustment. This manipulation capability enables metasurface devices to dynamically change their optical properties to suit different application requirements.

[0127] In summary, the embodiments of the present application provide a method for manipulating a reconfigurable unit, by preparing a reconfigurable unit, wherein the reconfigurable unit includes a superatom, a magnetic response material, and a reconfigurable unit main material; and the reconfigurable unit is manipulated to move within a set fluid environment by a magnetic field and / or an electric field. By preparing a reconfigurable unit comprising a superatom, a magnetic response material, and a main material, a metasurface is created that can change its physical and optical properties under the control of an external magnetic field and / or an electric field. The reconfigurable unit is manipulated by a magnetic field and / or an electric field to achieve precise motion control of the superatom within a set fluid environment.

[0128] Based on the same technical concept, the embodiment of the present application also provides a reconfigurable unit, which includes:

[0129] Super-atoms are used to be reconfigured and arranged as needed; magnetic response materials are used to respond to external magnetic fields to achieve motion control of super-atoms; reconfigurable unit main material constitutes the main structure of the reconfigurable unit; confinement structure is used to confine super-atoms within a specific area and provide space for super-atoms to move; the confinement structure includes a groove structure and a microcavity structure, and an upper cover plate design is added to the top of the groove structure to prevent super-atoms from escaping; a sacrificial layer structure is used to release the reconfigurable unit from the substrate after the device processing is completed; a microelectrode pattern is used to apply voltage to the electrode to generate an electric field force to achieve motion control of the super-atom.

[0130] The present application also provides an electronic device corresponding to the method provided in the above embodiment. Figure 5 , which shows an electronic device diagram provided by some embodiments of the present application. The electronic device 20 may include: a processor 200, a memory 201, a bus 202 and a communication interface 203, wherein the processor 200, the communication interface 203 and the memory 201 are connected via the bus 202; the memory 201 stores a computer program that can be run on the processor 200, and the processor 200 executes the method provided by any of the aforementioned embodiments of the present application when running the computer program.

[0131] The memory 201 may include a high-speed random access memory (RAM), and may also include a non-volatile memory, such as at least one disk memory. The communication connection between the system network element and at least one other network element is realized through at least one physical port (which may be wired or wireless), and the Internet, wide area network, local area network, metropolitan area network, etc. may be used.

[0132] The bus 202 may be an ISA bus, a PCI bus, or an EISA bus, etc. The bus may be divided into an address bus, a data bus, a control bus, etc. The memory 201 is used to store programs, and the processor 200 executes the programs after receiving execution instructions. The method disclosed in any implementation of the aforementioned embodiment of the present application may be applied to the processor 200, or implemented by the processor 200.

[0133] The processor 200 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the hardware integrated logic circuit or software instructions in the processor 200. The above processor 200 can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a readily available programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in the embodiments of the present application can be directly embodied as a hardware decoding processor to be executed, or the hardware and software modules in the decoding processor can be executed. The software module can be located in a mature storage medium in the field such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory 201, and the processor 200 reads the information in the memory 201 and completes the steps of the above method in combination with its hardware.

[0134] The electronic device provided in the embodiment of the present application and the method provided in the embodiment of the present application are based on the same inventive concept and have the same beneficial effects as the method adopted, operated or implemented by them.

[0135] The present application also provides a computer-readable storage medium corresponding to the method provided in the above embodiment. Figure 6 The computer-readable storage medium shown is a CD 30 on which a computer program (ie, a program product) is stored. When the computer program is run by a processor, the method provided in any of the aforementioned embodiments is executed.

[0136] It should be noted that examples of the computer-readable storage medium may also include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other optical or magnetic storage media, which are not listed here one by one.

[0137] The computer-readable storage medium provided in the above-mentioned embodiments of the present application and the method provided in the embodiments of the present application are based on the same inventive concept and have the same beneficial effects as the method adopted, run or implemented by the application program stored therein.

[0138] It should be noted that the above embodiments illustrate the present application rather than limit the present application, and that those skilled in the art may design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets should not be constructed as a limitation to the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "one" or "an" preceding an element does not exclude the presence of multiple such elements. The present application may be implemented by means of hardware including several different elements and by means of a suitably programmed computer. In a unit claim that lists several devices, several of these devices may be embodied by the same hardware item. The use of the words first, second, and third, etc. does not indicate any order. These words may be interpreted as names.

[0139] The above is only a preferred specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

[0140] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A reconfigurable unit control method, characterized in that: The method comprises: preparing a reconfigurable unit, wherein the reconfigurable unit includes a super atom, a magnetic response material, and a reconfigurable unit main material; Manipulating the reconfigurable unit to move within a set fluid environment by means of a magnetic field and / or an electric field; Wherein, the controlling the reconfigurable unit to move within the set fluid environment range by means of a magnetic field and / or an electric field comprises: applying an external magnetic field to the reconfigurable unit to control the superatom to perform magnetic field movement within the set fluid environment range, wherein the magnetic field movement comprises rotation and / or tilting; applying an electric field to the reconfigurable unit to control the superatom to perform electric field movement within the set fluid environment range, wherein the electric field movement comprises position adjustment and / or attitude adjustment; applying an external magnetic field and an electric field to the reconfigurable unit to control the superatom to perform fusion movement within the set fluid environment range, wherein the fusion movement comprises rotation, tilting, position adjustment and / or attitude adjustment; The method for preparing a reconfigurable unit includes: selecting a material insensitive to a target regulated electromagnetic band as a main material of the reconfigurable unit; selecting a magnetic metal or a magnetic material as a magnetic response material; selecting a material sensitive to a target regulated band as a material for a superatom; designing a micro-confinement structure for confining superatoms within a specific area, wherein the micro-confinement structure provides space for superatoms to move; preparing a confined structure by micro-nano processing technology, wherein the confined structure determines the spatial arrangement of superatoms; for a groove structure, adding an upper cover plate design to the top of the device to prevent superatoms from escaping; pre-processing a sacrificial layer structure at the bottom of the reconfigurable unit so that the reconfigurable unit can be released from the substrate after the preparation is completed; and assembling superatoms, magnetic response materials and main materials of the reconfigurable unit into a reconfigurable unit.

2. The method according to claim 1, characterized in that The step of applying an external magnetic field to the reconfigurable unit to manipulate the superatom to move in the magnetic field within a set fluid environment includes: By applying an external magnetic field, the directions of several super atoms in the reconfigurable unit are aligned to achieve an overall magnetic field response; The hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the applied magnetic field to drive the rotation and tilt of the superatom; Independent control of a single superatom or small unit can be achieved through the design of confined structures and protrusion structures in reconfigurable units.

3. The method according to claim 1, characterized in that Applying an electric field to the reconfigurable unit to manipulate the superatom to move in the electric field within a set fluid environment, comprising: By applying a voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and different components of the electric field force are used to manipulate the superatom; The electric dipole moment in the electric field forces the meta-atoms to align with the direction of the electric field, thus achieving addressing and independent control of the meta-atoms. The super-atom is controlled to achieve the desired super-atom arrangement and posture through the friction of the electric field force and the upper cover plate.

4. The method according to claim 1, characterized in that Applying an external magnetic field and an electric field to the reconfigurable unit to manipulate the super-atom to fuse and move within a set fluid environment, including: The hard magnetic material and paramagnetic material in the reconfigurable unit are used to align the applied magnetic field to drive the rotation and tilt of the superatom; By applying a voltage to the reconfigurable unit, an electric field is generated between the microelectrodes, and different components of the electric field force are used to manipulate the superatom; The electric dipole moment in the electric field force aligns the meta-atoms with the direction of the electric field, thus achieving addressing and independent control of the meta-atoms.

5. The method according to claim 1, characterized in that After preparing the reconfigurable unit, the method further comprises: removing the sacrificial layer using chemical methods to release the reconfigurable cell; A top cover is used to cover the reconfigurable unit device to fix the position of the meta-atom.

6. A reconfigurable unit, characterized in that: The reconfigurable unit control method according to any one of claims 1 to 5, wherein the reconfigurable unit comprises: Superatoms, for reconfiguration and arrangement as needed; Magnetic responsive materials, used to respond to external magnetic fields and achieve motion control of meta-atoms; A reconfigurable unit main body material, constituting the main structure of the reconfigurable unit; A confined structure is used to confine superatoms within a specific area and provide space for superatoms to move; the confined structure includes a groove structure and a microcavity structure, and a top cover plate is added to the top of the groove structure to prevent superatoms from escaping; A sacrificial layer structure for releasing the reconfigurable unit from the substrate after device processing is completed; Microelectrode patterns are used to apply voltage to the electrodes to generate electric field forces and achieve motion control of superatoms.

7. An electronic device comprising: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method according to any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that: Computer-readable instructions are stored thereon, and the computer-readable instructions can be executed by a processor to implement the method according to any one of claims 1-5.

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