Cross-scale multi-mode piezoelectric nanomotion platform and control method

Abstract

This invention discloses a multi-scale, multi-mode piezoelectric nanomotion platform and its control method, relating to the field of micro-nano manipulation. The platform includes a stepping mechanism composed of lever-type and triangular-type moving legs, and an integrated direct-drive mechanism. The triangular-type moving legs achieve a stick-slip motion mode through a slow-advance, fast-retreat voltage sequence; the lever-type and triangular-type moving legs cooperate to achieve an inchworm motion mode; and the direct-drive motion mode is directly driven by the driving ceramic of the direct-drive mechanism. This invention integrates the advantages of direct-drive and stepping piezoelectric motion platforms, enabling stick-slip, inchworm, and direct-drive motion modes, and meeting the motion requirements under extreme conditions such as large stroke, high speed, large load, and high precision.

Description

Technical Field

[0001] This invention relates to the field of micro-nano manipulation, and more particularly to a multi-scale, multi-mode piezoelectric nanomotion platform and its control method. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] In recent years, with the continuous improvement of science and technology and industrial levels, fields such as integrated circuit equipment manufacturing, lithography machine preparation, microelectronics manufacturing, microrobot operation, precision optical instruments, and biomedical operation have developed rapidly. The operating environment of high-precision motion platforms is becoming increasingly extreme, urgently requiring motion platforms with large stroke, high speed, large load, and high precision to meet these extreme working conditions. Traditional piezoelectric motion platforms are divided into two main types: direct-drive and stepper-drive. Direct-drive platforms mainly have the advantages of high precision and no backlash, but their stroke is limited, with a maximum stroke in the centimeter range. Stepper-drive platforms mainly have the advantages of large stroke, high speed, and large load, but their motion accuracy is far lower than that of direct-drive platforms.

[0004] Currently, Chinese invention patent CN114204841A, entitled "Multi-mode Piezoelectric Drive Device and its Working Method Based on Sequential Control Strategy," achieves three motion modes—stick-slip, slip-slip, and stick-slip—through two drive mechanisms. This device boasts high precision, high speed, and high load capacity, but it can only move in one direction, exhibits significant backlash, and its precision does not reach the nanometer level, making it difficult to meet current application requirements. Chinese invention patent CN114584001A, entitled "Multi-mode Actuator and Linear Smooth Motion Implementation Method Based on Composite Stick-Slip and Impact," achieves three working modes—inertial stick-slip mode, inertial impact mode, and composite drive mode—through a motion unit. It has significant application value in bio-cell engineering, integrated circuit packaging, and precision optics, but it struggles to achieve high load capacity, and the preload is manually adjustable, making it difficult to meet the development needs of industrial automation. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a multi-scale, multi-mode piezoelectric nanomotion platform and control method. This platform integrates the advantages of direct-push and step-piezoelectric motion platforms, and features compact structure, long stroke, high speed, large load, nanometer-level precision, and bidirectional non-backtracking, making it widely applicable in the fields of precision positioning and tracking.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0007] The first aspect of this invention provides a multi-scale, multi-mode piezoelectric nanomotion platform, comprising:

[0008] The walking mechanism includes a walking mechanism mounting frame, a triangular moving foot, and a lever moving foot. The triangular moving foot and the lever moving foot are mounted on the walking mechanism mounting frame. The walking mechanism performs stick-slip motion through the triangular moving foot and performs inchworm motion through the cooperation of the triangular moving foot and the lever moving foot.

[0009] The direct drive mechanism is used to perform direct push motion and is driven by the step drive mechanism to perform stick-slip motion and inchworm motion. The direct drive mechanism includes a direct drive mechanism fixing frame and a micro positioning stage. The micro positioning stage is installed at the top of the direct drive mechanism fixing frame as the output end.

[0010] A step drive pre-tensioning mechanism is used to drive the step drive mechanism to pre-tension. The step drive pre-tensioning mechanism includes a step drive pre-tensioning adapter frame. The step drive mechanism is installed on the step drive pre-tensioning adapter frame. The step drive pre-tensioning mechanism is used to drive the step drive mechanism to pre-tension the direct drive mechanism, so that the triangular motion foot and the lever motion foot contact the direct drive mechanism, and further drive the direct drive mechanism to move.

[0011] Furthermore, it also includes a cover plate mechanism, which includes a step drive mechanism cover plate and a direct drive mechanism cover plate. The step drive mechanism cover plate is used to enclose the step drive mechanism, and the direct drive mechanism cover plate is used to enclose the direct drive mechanism.

[0012] Furthermore, the step drive pre-tightening adapter is frame-shaped, with a step drive pre-tightening mechanism ceramic fixing frame in the middle for installing the step drive pre-tightening mechanism drive ceramic. The top of the step drive pre-tightening mechanism ceramic fixing frame is connected to the step drive pre-tightening mechanism fixing frame, and sliding grooves are provided on both sides of the lower surface of the step drive pre-tightening adapter.

[0013] Furthermore, it also includes a base mechanism, which includes a base plate. The base plate is provided with a step drive pre-tensioning mechanism guide rail, a direct drive mechanism fixing platform, and a fixing through hole. The step drive pre-tensioning adapter is installed on the step drive pre-tensioning mechanism guide rail through a sliding groove. The direct drive mechanism fixing platform is used to fix the direct drive mechanism. The motion platform is fixed as a whole by bolts through the fixing through hole. The direct drive mechanism fixing platform is a protrusion perpendicular to the base plate. After the direct drive mechanism is installed on the direct drive mechanism fixing platform, it maintains the same height as the step drive mechanism.

[0014] Furthermore, it also includes a driving ceramic mechanism, which comprises multiple driving ceramics used to provide driving force for each mechanism. The driving ceramics include a lever motion foot driving ceramic for a step-drive mechanism, a triangular motion foot driving ceramic for a step-drive mechanism, a pre-tensioning mechanism driving ceramic for a step-drive mechanism, and a direct-drive mechanism driving ceramic.

[0015] Furthermore, the direct drive mechanism mounting bracket is also provided with a direct drive mechanism slide groove, a drive ceramic fixing groove, and a guide leaf spring. The direct drive mechanism slide groove is located at the middle position of the lower surface of the direct drive mechanism mounting bracket and is used to connect with the direct drive mechanism mounting platform. The drive ceramic fixing groove is used to fix the direct drive mechanism drive ceramic. One end of the guide leaf spring is connected to the direct drive mechanism slide groove, and the other end is connected to the micro positioning platform, which is used to guide and fix the micro positioning platform.

[0016] Furthermore, the step drive mechanism mounting bracket is also provided with a triangular motion foot ceramic mounting bracket and a lever motion foot ceramic mounting bracket. The triangular motion foot ceramic mounting bracket is used to fix the triangular motion foot drive ceramic of the step drive mechanism, and the lever motion foot ceramic mounting bracket is used to fix the lever motion foot drive ceramic of the step drive mechanism.

[0017] A second aspect of the present invention provides a control method for the multi-scale, multi-mode piezoelectric nanomotion platform described in the first aspect, comprising the following steps:

[0018] The piezoelectric nano motion platform is fixed as a whole;

[0019] Depending on the task requirements, the direct drive mechanism is controlled to perform different motion modes, including: direct push motion, stick-slip motion, and inchworm motion.

[0020] After the motion is completed, the micro-positioning stage records and outputs the motion results.

[0021] Furthermore, the direct push motion is the direct drive mechanism in the direct drive mechanism driving the ceramic direct drive control of the direct drive mechanism's movement; the stick-slip motion is the triangular moving foot driving the direct drive mechanism forward, and after the movement is completed, the triangular moving foot directly resets; the inchworm motion is the triangular moving foot driving the direct drive mechanism forward, and after the movement is completed, the lever moving foot presses against the direct drive mechanism, and then the triangular moving foot resets.

[0022] Furthermore, both the inchworm movement and the stick-slip movement require the use of a pre-tensioning mechanism to move the stepping drive mechanism closer to the direct drive mechanism for pre-tensioning.

[0023] The above one or more technical solutions have the following beneficial effects:

[0024] This invention discloses a multi-scale, multi-mode piezoelectric nanomotion platform and its control method. To address the shortcomings of traditional piezoelectric motion platforms, it combines direct drive and step drive to effectively highlight their respective advantages and design a multi-scale, multi-mode motion platform.

[0025] This invention achieves flexible switching between stick-slip, inchworm, and direct-push motion modes through the cooperation of a step-drive mechanism and a direct-drive mechanism, taking advantage of the advantages of each motion mode, so that the motion platform has the advantages of unlimited stroke, high speed, large load, high precision, and bidirectional non-backward motion, meeting the needs of extreme working conditions.

[0026] The piezoelectric nano-motion platform proposed in this invention can achieve automatic pre-tensioning through a step-driven pre-tensioning mechanism, resulting in a high degree of automation.

[0027] The piezoelectric nano motion platform proposed in this invention can be converted between three working modes, and each mode can compensate for its shortcomings. For example, the stick-slip mode compensates for the slow movement speed of the inchworm mode, the inchworm mode compensates for the low load capacity of the stick-slip mode, the direct push mode compensates for the low positioning accuracy of the step-drive mode, and the step-drive mode compensates for the short stroke of the direct push mode.

[0028] Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0029] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0030] Figure 1 This is a schematic diagram of the motion platform according to Embodiment 1 of the present invention;

[0031] Figure 2 This is an exploded view of the overall structure of the motion platform according to Embodiment 1 of the present invention;

[0032] Figure 3 This is a schematic diagram of the motion platform step drive mechanism according to Embodiment 1 of the present invention;

[0033] Figure 4 This is a schematic diagram of the direct drive mechanism of the motion platform in Embodiment 1 of the present invention;

[0034] Figure 5 This is a schematic diagram of the motion platform step drive pretensioning mechanism according to Embodiment 1 of the present invention;

[0035] Figure 6 This is a schematic diagram of the motion platform base mechanism according to Embodiment 1 of the present invention;

[0036] Figure 7 This is a schematic diagram of the stick-slip motion working mode of the motion platform in Embodiment 1 of the present invention;

[0037] Figure 8 This is a schematic diagram of the inchworm's movement working mode on the motion platform according to Embodiment 1 of the present invention;

[0038] In the diagram, 1. Step drive mechanism cover plate; 2. Step drive mechanism lever movement foot drive ceramic; 3. Step drive mechanism triangular movement foot drive ceramic; 4. Step drive mechanism; 5. Step drive pre-tensioning mechanism drive ceramic; 6. Step drive pre-tensioning mechanism; 7. Base mechanism; 8. Direct drive mechanism; 9. Direct drive mechanism drive ceramic; 10. Direct drive mechanism cover plate; 11. Lever movement foot; 12. Lever movement foot ceramic fixing bracket; 13. Step drive mechanism fixing bracket; 14. Triangular movement foot ceramic fixing bracket; 15. Triangular movement foot; 16. Direct drive mechanism fixing bracket; 17. Drive ceramic fixing groove; 18. Guide leaf spring; 19. Micro positioning stage; 20. Direct drive mechanism slide groove; 21. Step drive pre-tensioning adapter frame; 22. Step drive pre-tensioning mechanism ceramic fixing bracket; 23. Step drive pre-tensioning mechanism fixing bracket; 24. Step drive pre-tensioning mechanism guide rail; 25. Direct drive mechanism fixing stage; 26. Base plate. Detailed Implementation

[0039] It should be noted that the following detailed descriptions are exemplary and intended to provide further illustration of the invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0040] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0041] Example 1:

[0042] Embodiment 1 of the present invention provides a multi-scale, multi-mode piezoelectric nanomotion platform, such as Figure 1 As shown, the present invention adopts a parallel structure. The step drive mechanism 4 drives the direct drive mechanism 8 to move macroscopically, and the direct drive mechanism 8 drives the micro-motion stage 19 to move microscopically, thereby realizing three motion modes: stick-slip, inchworm, and direct push. This enables the motion platform to have unlimited stroke, high speed, large load, high precision, and bidirectional non-backward motion functions, meeting the needs of extreme working conditions.

[0043] The specific structure of the piezoelectric nanomotion platform is as follows: Figure 2 As shown, it includes: step drive mechanism 4, direct drive mechanism 8, step drive pre-tensioning mechanism 6, cover plate mechanism, base mechanism 7 and drive ceramic mechanism.

[0044] Stepping mechanism 4, such as Figure 3As shown, it includes a step drive mechanism mounting frame 13, a triangular motion foot 15, and a lever motion foot 11. The triangular motion foot 15 and the lever motion foot 11 are mounted on the step drive mechanism mounting frame 13. The step drive mechanism 4 performs stick-slip motion through the triangular motion foot 15. The step drive mechanism 4 performs inchworm motion through the cooperation of the triangular motion foot 15 and the lever motion foot 11.

[0045] Specifically, the triangular motion foot 15 achieves the stick-slip motion working mode through a voltage timing sequence of slow advance and fast return, i.e., slow sticking and fast sliding. The lever motion foot 11 and the triangular motion foot 15 cooperate to achieve the inchworm motion working mode. Specifically, the triangular motion foot 15 drives the direct drive mechanism 8 to move forward, then the lever motion foot 11 presses against the direct drive mechanism 8, and the triangular motion foot 15 returns to its initial state, completing one motion cycle. This mode does not produce a retraction displacement. The direct push motion working mode is achieved by the direct drive mechanism 8 driving the ceramic 9 directly.

[0046] In this embodiment, the step drive mechanism fixing frame 13 is rectangular, with four through holes at the four corners, which can be used to fix the step drive mechanism to the step drive pre-tightening mechanism 6 by bolts.

[0047] The step-drive mechanism mounting frame 13 is also equipped with a triangular motion foot ceramic mounting frame 14 and a lever motion foot ceramic mounting frame 12. The triangular motion foot ceramic mounting frame 14 is used to fix the triangular motion foot drive ceramic 3 of the step-drive mechanism, which provides power to the triangular motion foot 15. The lever motion foot ceramic mounting frame 12 is used to fix the lever motion foot drive ceramic 2 of the step-drive mechanism, which provides power to the lever motion foot 11. In this embodiment, the lever motion foot ceramic mounting frame 12 is vertically fixedly connected to the middle part of the lever motion foot, and the other end of the lever motion foot ceramic mounting frame 12 is fixedly connected to the step-drive mechanism mounting frame 13. One end of the lever motion foot has an arc-shaped head for contacting the direct drive mechanism, and the other end is connected to the step-drive mechanism mounting frame 13 through an arc-shaped flexible hinge. One end of the triangular motion foot ceramic mounting bracket 14 is vertically fixedly connected to the lever motion foot ceramic mounting bracket 12, and the other end is connected to one base corner of the triangular motion foot 15 via a leaf spring-shaped flexible hinge. The other base corner of the triangular motion foot 15 is connected to the step drive mechanism mounting bracket 13 via a leaf spring-shaped flexible hinge. The flexible hinge enables separate movement of the lever motion foot and the triangular motion foot. Furthermore, all the aforementioned components on the step drive mechanism mounting bracket 13 are on the same plane, while the step drive pre-tensioning mechanism is divided into upper and lower layers. The upper layer is fixedly connected to the step drive mechanism mounting bracket 13, and the lower layer is slidably connected to the base mechanism, thereby achieving the overall pre-tensioning movement of the step drive mechanism.

[0048] Lever-driven foot 11 and triangular-driven foot 15 work together to drive the direct drive mechanism 8, achieving... Figure 7 The stick-slip motion working mode shown and Figure 8 The diagram shows the working mode of the inchworm's movement.

[0049] The direct drive mechanism 8 is used to directly drive the ceramic element 9 to perform a direct pushing motion, and is also driven by the stepping drive mechanism 4 to perform stick-slip motion and inchworm motion. For example... Figure 4 As shown, the direct drive mechanism 8 is an integral structure in the shape of a cuboid, including a direct drive mechanism mounting frame 16 and a micro-positioning stage 19. The micro-positioning stage 19 is mounted on the top of the direct drive mechanism 8 mounting frame as the output end. The final output result of the platform is determined by measuring the data of the micro-positioning stage.

[0050] The direct drive mechanism mounting bracket 16 is also equipped with a direct drive mechanism slide groove 20, a drive ceramic fixing groove 17, and a guide leaf spring 18. The direct drive mechanism slide groove 20 is located at the middle of the lower surface of the direct drive mechanism mounting bracket 16 and is used to connect with the direct drive mechanism mounting platform 25. The drive ceramic fixing groove 17 is used to fix the direct drive mechanism drive ceramic 9, which provides a pushing force to the micro-positioning stage 19. One end of the guide leaf spring 18 is connected to the direct drive mechanism slide groove 20, and the other end is connected to the micro-positioning stage 19. It is used to guide and fix the micro-positioning stage 19 in the middle, together realizing the direct push motion working mode. The direct drive mechanism slide groove 20 is connected to the base mechanism, allowing the step drive mechanism to drive the direct drive mechanism to achieve overall movement.

[0051] The step drive pre-tensioning mechanism 6 includes a step drive pre-tensioning adapter 21. The step drive mechanism 4 is mounted on the step drive pre-tensioning adapter 21. The step drive pre-tensioning mechanism 6 is used to drive the step drive mechanism 4 to pre-tension the direct drive mechanism 8, so that the triangular motion foot 15 and the lever motion foot 11 contact the direct drive mechanism 8, and further drive the direct drive mechanism 8 to move.

[0052] The pre-tightening process involves pre-tightening the triangular motion foot 15 and the lever motion foot 11 as a whole through the step-drive pre-tightening mechanism 6. The step-drive mechanism is fixed to the step-drive pre-tightening adapter frame 21. The step-drive pre-tightening mechanism drives the ceramic 5 to push the step-drive pre-tightening adapter frame 21 forward, thereby moving the triangular motion foot and the lever motion foot forward as a whole until the required pre-tightening degree is reached. This forward movement process is the pre-tightening process. The pre-tightening degree is determined according to requirements. In this embodiment, a small pre-tightening force, such as approximately 3N, is used when in stick-slip mode. A large pre-tightening force, such as approximately 100N, is used when in inchworm mode. The pre-tightening force can be customized as needed.

[0053] In this embodiment, as Figure 5As shown, the step drive pre-tensioning adapter frame 21 is a rectangular frame with through holes at its four corners. The step drive mechanism fixing frame 13 is fixedly mounted on the step drive pre-tensioning adapter frame 21 using bolts through the four through holes. A step drive pre-tensioning mechanism ceramic fixing frame 22 is located in the middle of the step drive pre-tensioning adapter frame 21, used to install the step drive pre-tensioning mechanism drive ceramic 5. The step drive pre-tensioning mechanism drive ceramic 5 provides driving force for the step drive pre-tensioning mechanism 6. A step drive pre-tensioning mechanism fixing frame 23 is connected to the top of the step drive pre-tensioning mechanism ceramic fixing frame 22. The step drive pre-tensioning mechanism fixing frame 23 has two bolt holes, through which bolts are fixedly connected to the step drive mechanism fixing frame 13, further enhancing the strength of both. In this embodiment, the step drive pre-tensioning adapter frame 21 is divided into upper and lower layers: the step drive pre-tensioning mechanism fixing frame 23 is the upper layer, and the two sides of the frame of the step drive pre-tensioning adapter frame 21 are the lower layer. The side of the step drive pretensioning adapter 21 that connects to the step drive pretensioning mechanism fixing frame 23 is thicker than the other two sides. This allows the step drive pretensioning mechanism fixing frame 23 to be connected higher, while the sides of the frame of the step drive pretensioning adapter 21 are positioned lower, thus distinguishing the upper and lower layers. Sliding grooves are provided on both sides of the lower surface of the step drive pretensioning adapter 21 to connect to the base mechanism 7, enabling a sliding connection between the step drive pretensioning mechanism 6 and the base mechanism 7. A through hole is provided at the rear end of the step drive pretensioning mechanism fixing frame 23, which cooperates with the drive ceramic fixing groove 17 to fix the step drive pretensioning mechanism drive ceramic 5. The step drive pretensioning adapter 21 connects to the base mechanism 7 at the bottom and to the step drive mechanism 4 at the top, enabling the step drive mechanism 4 to achieve pretensioning movement closer to the direct drive mechanism 8.

[0054] The cover plate mechanism includes a step drive mechanism cover plate 1 and a direct drive mechanism cover plate 10. The step drive mechanism cover plate 1 is used to enclose the step drive mechanism 4, and the direct drive mechanism cover plate 10 is used to enclose the direct drive mechanism 8. Both the step drive mechanism cover plate 1 and the direct drive mechanism cover plate 10 are fixed to the top of the step drive mechanism 4 and the direct drive mechanism 8 respectively by bolts.

[0055] Base mechanism 7, such as Figure 6 As shown, the system includes a base plate 26, on which a step drive pre-tensioning mechanism guide rail 24, a direct drive mechanism fixing platform 25, and a fixing through hole are provided. The step drive pre-tensioning adapter 21 is mounted on the step drive pre-tensioning mechanism guide rail 24 via a sliding groove. The front end of the base plate 26 has a fixing through hole, through which the motion platform is fixed as a whole using bolts. The direct drive mechanism fixing platform 25 is used to fix the direct drive mechanism 8. The direct drive mechanism fixing platform 25 is a protrusion perpendicular to the base plate 26. After the direct drive mechanism 8 is mounted on the direct drive mechanism fixing platform 25, it maintains the same height as the step drive mechanism 4, and is used for the overall stepping movement of the direct drive mechanism 8.

[0056] The driving ceramic mechanism includes multiple driving ceramics, which are used to provide driving force for each mechanism. In this embodiment, the driving ceramics include a lever motion foot driving ceramic 2 for the step-drive mechanism, a triangular motion foot driving ceramic 3 for the step-drive mechanism, a pre-tensioning mechanism driving ceramic 5 for the step-drive mechanism, and a direct drive mechanism driving ceramic 9.

[0057] In one specific implementation, the direct-drive motion is where the direct-drive mechanism drives the ceramic direct-drive mechanism to move; the stick-slip motion is where the triangular moving foot drives the direct-drive mechanism forward, and after the motion is completed, the triangular moving foot directly resets; the inchworm motion is where the triangular moving foot drives the direct-drive mechanism forward, and after the motion is completed, the lever moving foot presses against the direct-drive mechanism, after which the triangular moving foot resets. Both the inchworm motion and the stick-slip motion require a pre-tensioning mechanism to move the stepping drive mechanism closer to the direct-drive mechanism for pre-tensioning.

[0058] Sticky motion specifically as follows Figure 7 As shown, short squares represent lever motion legs, triangles represent triangular motion legs, and long squares represent direct drive mechanisms. Figure 7 The graph shows the change of voltage U over time t. The period from t0 to t2 represents one cycle of the stick-slip mode. Specifically, from t0 to t1, the triangular foot drives the direct drive mechanism to move slowly forward a distance x1. Here, t0 is the initial moment of one cycle, and t1 is the moment when the triangular foot reaches the maximum displacement required for the task. From t1 to t2, the triangular foot quickly returns to its original position. t2 represents the moment the triangular foot returns to its original state. Due to friction, it drives the direct drive mechanism to move backward a distance x2, thus completing one cycle of the stick-slip motion mode. The actual forward distance is Δx = x1 - x2.

[0059] The specific movement of the inchworm is as follows: Figure 8 As shown, short squares represent lever motion legs, triangles represent triangular motion legs, and long squares represent direct drive mechanisms. Figure 8The graph shows the voltage U versus time t. The period from 0 to T represents one cycle of the inchworm pattern. Specifically, 0 represents the initial moment of a cycle, t0 represents the moment the triangular leg reaches its maximum required displacement, t1 represents the moment the lever leg begins to move, t2 represents the moment the lever leg reaches its maximum required displacement, t3 represents the moment the triangular leg begins to reset, t4 represents the moment the triangular leg completes its reset, t5 represents the moment the lever leg begins to reset, t6 represents the moment the lever leg completes its reset, and T represents the end of one cycle of the inchworm pattern. From 0 to t0, the triangular leg drives the direct drive mechanism forward a distance of x3, then remains stationary until t3. During this time, from t1 to t2, the lever leg holds the direct drive mechanism in place until t5. From t3 to t4, the triangular leg resets. Because the lever leg is constantly holding the direct drive mechanism in place during this time, the reset of the triangular leg does not cause the direct drive mechanism to move backward. At t4, the triangular leg is fully reset, and from t5 to t6, the lever leg resets again. Therefore, the actual distance traveled by the inchworm in its movement pattern is Δx = x3. This pattern enables forward and backward movement without regression through the coordination of its triangular and lever-like legs.

[0060] Example 2:

[0061] Embodiment 2 of the present invention provides a control method for the cross-scale multi-mode piezoelectric nanomotion platform described in Embodiment 1, comprising the following steps:

[0062] S1: Fix the piezoelectric nano-motion platform as a whole.

[0063] S2: Control the direct drive mechanism to perform different motion modes according to the task requirements. The motion modes include: direct push motion, stick-slip motion and inchworm motion.

[0064] S3: After the motion is completed, the micro-positioning stage records and outputs the motion results.

[0065] In S2, the direct-drive motion is the direct-drive mechanism driving the ceramic direct-drive mechanism to move; the stick-slip motion is the triangular moving foot driving the direct-drive mechanism forward, and the triangular moving foot returns to its original position after the motion is completed; the inchworm motion is the triangular moving foot driving the direct-drive mechanism forward, and after the motion is completed, the lever moving foot presses against the direct-drive mechanism, and then the triangular moving foot returns to its original position. Both the inchworm motion and the stick-slip motion require a pre-tensioning mechanism to move the stepping drive mechanism closer to the direct-drive mechanism for pre-tensioning.

[0066] The steps involved in the above embodiment two correspond to those in embodiment one. For specific implementation details, please refer to the relevant description section of embodiment one.

[0067] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A multi-scale, multi-mode piezoelectric nanomotion platform, characterized in that, include: The walking mechanism includes a walking mechanism mounting frame, a triangular moving foot, and a lever moving foot. The triangular moving foot and the lever moving foot are mounted on the walking mechanism mounting frame. The walking mechanism performs stick-slip motion through the triangular moving foot and performs inchworm motion through the cooperation of the triangular moving foot and the lever moving foot. The direct drive mechanism is used for direct pushing motion, and is driven by the step drive mechanism to perform stick-slip and inchworm movements. The direct drive mechanism includes a direct drive mechanism mounting frame and a micro-positioning stage, with the micro-positioning stage serving as the output end and mounted on the top of the direct drive mechanism mounting frame. The direct pushing motion is achieved by the direct drive mechanism driving the ceramic actuator to directly control the movement of the direct drive mechanism. The stick-slip motion is achieved by the triangular moving legs driving the direct drive mechanism forward, after which the triangular moving legs return to their original position. The inchworm movement is achieved by the triangular moving legs driving the direct drive mechanism forward, after which the lever moving legs press against the direct drive mechanism, and then the triangular moving legs return to their original position. Both the inchworm movement and the stick-slip motion require pre-tensioning by the step drive pre-tensioning mechanism, which moves the step drive mechanism closer to the direct drive mechanism. A step drive pre-tensioning mechanism is used to drive the step drive mechanism to pre-tension. The step drive pre-tensioning mechanism includes a step drive pre-tensioning adapter frame. The step drive mechanism is mounted on the step drive pre-tensioning adapter frame. The step drive pre-tensioning mechanism is used to drive the step drive mechanism to pre-tension the direct drive mechanism, so that the triangular motion foot and the lever motion foot contact the direct drive mechanism, and further drive the direct drive mechanism to move. It also includes a driving ceramic mechanism, which comprises multiple driving ceramics. The driving ceramics are used to provide driving force for each mechanism. The driving ceramics include a lever motion foot driving ceramic for the step-drive mechanism, a triangular motion foot driving ceramic for the step-drive mechanism, a step-drive pre-tightening mechanism driving ceramic, and a direct drive mechanism driving ceramic. The step-drive pre-tightening mechanism driving ceramic pushes the step-drive pre-tightening adapter frame forward, thereby driving the triangular motion foot and the lever motion foot to move forward as a whole until the required pre-tightening degree is reached. When performing the stick-slip mode, a small pre-tightening force is used, and when performing the inchworm mode, a large pre-tightening force is used.

2. The multi-scale, multi-mode piezoelectric nanomotion platform as described in claim 1, characterized in that, It also includes a cover plate mechanism, which includes a step drive mechanism cover plate and a direct drive mechanism cover plate. The step drive mechanism cover plate is used to enclose the step drive mechanism, and the direct drive mechanism cover plate is used to enclose the direct drive mechanism.

3. The multi-scale, multi-mode piezoelectric nanomotion platform as described in claim 1, characterized in that, The step drive pretensioning adapter is frame-shaped, with a step drive pretensioning mechanism ceramic fixing frame in the middle for installing the step drive pretensioning mechanism drive ceramic. The top of the step drive pretensioning mechanism ceramic fixing frame is connected to the step drive pretensioning mechanism fixing frame, and sliding grooves are provided on both sides of the lower surface of the step drive pretensioning adapter.

4. The multi-scale, multi-mode piezoelectric nanomotion platform as described in claim 3, characterized in that, It also includes a base mechanism, which includes a base plate. The base plate is provided with a step drive pre-tensioning mechanism guide rail, a direct drive mechanism fixing platform and a fixing through hole. The step drive pre-tensioning adapter is installed on the step drive pre-tensioning mechanism guide rail through a slide groove. The direct drive mechanism fixing platform is used to fix the direct drive mechanism. The motion platform is fixed as a whole by bolts through the fixing through hole. The direct drive mechanism fixing platform is a protrusion perpendicular to the base plate. After the direct drive mechanism is installed on the direct drive mechanism fixing platform, it maintains the same height as the step drive mechanism.

5. The multi-scale, multi-mode piezoelectric nanomotion platform as described in claim 4, characterized in that, The direct drive mechanism mounting bracket is also provided with a direct drive mechanism slide groove, a drive ceramic mounting groove, and a guide leaf spring. The direct drive mechanism slide groove is located in the middle of the lower surface of the direct drive mechanism mounting bracket and is used to connect with the direct drive mechanism mounting platform. The drive ceramic mounting groove is used to fix the drive ceramic of the direct drive mechanism. One end of the guide leaf spring is connected to the direct drive mechanism slide groove, and the other end is connected to the micro positioning platform, which is used to guide and fix the micro positioning platform.

6. The multi-scale, multi-mode piezoelectric nanomotion platform as described in claim 5, characterized in that, The step drive mechanism mounting frame is also equipped with a triangular motion foot ceramic mounting frame and a lever motion foot ceramic mounting frame. The triangular motion foot ceramic mounting frame is used to fix the triangular motion foot driving ceramic of the step drive mechanism, and the lever motion foot ceramic mounting frame is used to fix the lever motion foot driving ceramic of the step drive mechanism.

7. A control method for a multi-scale, multi-mode piezoelectric nanomotion platform based on any one of claims 1-6, characterized in that, Includes the following steps: The piezoelectric nano motion platform is fixed as a whole; Depending on the task requirements, the direct drive mechanism is controlled to perform different motion modes, including: direct push motion, stick-slip motion, and inchworm motion. After the motion is completed, the micro-positioning stage records and outputs the motion results.

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