Edge sealing device for polishing pad

Abstract

The invention relates to a polishing pad edge sealing device which comprises a cutter, a supporting piece, a driving mechanism and a heating mechanism, the cutting edge of the cutter is annular, the supporting piece is used for installing the cutter, and the driving mechanism is arranged on the supporting piece, connected with the cutter and used for driving the cutter to move between a first position and a second position. The heating mechanism is used for heating the tool at the first position. Compared with the prior art, the heating mechanism is used for conducting heating and heat preservation on the tool before punching, the temperature of the tool is close to the temperature of the polishing pad material during punching, local cooling and curing caused by instant cooling of the polishing pad material due to contact with the tool are avoided, and the material uniformity of the edge of the polishing pad can be improved; and the counter-acting force of stamping can be reduced, and stress deformation of the edge of the polishing pad is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of chemical mechanical grinding and polishing, in particular to a polishing pad edge sealing device. Background Art

[0002] Polishing pad is one of the key materials in the chemical mechanical polishing (CMP) process, and its performance directly affects the polishing effect of chemical mechanical polishing.

[0003] Polishing pads are usually made of polyurethane or polyester with saturated polyurethane added. Polyurethane polishing pads are one of the most commonly used polishing pad materials due to their high tear strength, strong wear resistance, and excellent acid and alkali corrosion resistance. According to the material structure, polishing pads are mainly divided into polymer polishing pads, non-woven polishing pads, non-woven polishing pads with fluff structure, and composite polishing pads.

[0004] In the related art, the production process of the polishing pad includes casting, vulcanization, slicing, post-processing, etc. Among them, after cutting into sheets of different thicknesses according to different usage requirements, the edges of the polishing pad need to be stamped and sealed, but stamping will make the edge material of the polishing pad uneven, which may cause problems such as warping.

[0005] Therefore, it is necessary to develop a new polishing pad edge sealing device to improve some of the above-mentioned problems existing in the relevant technology. Summary of the invention

[0006] The object of the present invention is to provide a polishing pad edge sealing device, which can reduce the local unevenness of the stamping position during the edge sealing process.

[0007] The purpose of the present invention can be achieved by the following technical solutions:

[0008] The present invention provides a polishing pad edge sealing device, which comprises: a tool, a support, a driving mechanism and a heating mechanism; the support is used to install the tool; the driving mechanism is connected to the tool and is used to drive the tool to move; the heating mechanism is used to heat the tool.

[0009] Optionally, the driving mechanism includes a movable part and a fixed part connected to each other, the tool and the fixed part are respectively arranged on both sides of the supporting part, and the movable part passes through the supporting part to connect to the tool.

[0010] Optionally, a receiving groove is provided on the surface of the supporting member, and the fixing member is arranged in the receiving groove.

[0011] Optionally, a moving channel penetrating the supporting member is provided at the bottom of the accommodating groove, and the movable member can be movably arranged in the moving channel.

[0012] Optionally, the movable part is connected to the tool by a pin.

[0013] Optionally, the heating mechanism and the tool are arranged on the same side of the support member.

[0014] Optionally, the moving path of the tool includes a first position and a second position, and the heating mechanism heats the tool at the first position.

[0015] Optionally, the support member includes a heat preservation groove, and the tool is at least partially accommodated in the heat preservation groove when in the first position.

[0016] Optionally, the heating mechanism is arranged on a side of the insulation tank.

[0017] Optionally, the heating mechanism includes at least two heating units, and the tool is arranged between the heating units.

[0018] Optionally, the cutter is ring-shaped, and the heating unit is located on the inner and outer sides of the cutter.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The present invention uses a driving mechanism to move the tool for stamping, and uses a heating mechanism to heat and keep the tool warm before stamping, so that the tool temperature is close to the temperature of the polishing pad material during stamping, avoiding local cooling and solidification of the polishing pad material due to instantaneous cooling when contacting the tool. This is not only beneficial to improving the material uniformity of the edge of the polishing pad, but also can reduce the reaction force of stamping and reduce the stress deformation of the edge of the polishing pad.

[0021] 2. The present invention arranges the fixing portion of the driving mechanism in the receiving groove of the support member, so that the surface of the support member is flat, which is convenient for connection with external stamping equipment.

[0022] 3. The present invention sets a movable channel at the bottom of the accommodating groove, so that the fixed part on the driving mechanism is installed in the accommodating groove, and the movable part can pass through the supporting part through the movable channel. A stepped structure is formed at the bottom, which is beneficial to improve the installation stability of the fixed part, and then improve the stability of the tool during stamping.

[0023] 4. The present invention heats the tool by arranging heating units on both sides of the tool, which can improve the overall temperature uniformity of the tool and is beneficial to further improve the stamping effect of the polishing pad.

[0024] 5. The present invention provides a heat preservation groove on the support member and places the tool that is not performing stamping work in the heat preservation groove, which can reduce the heat dissipation of the tool, shorten the working time of the heating mechanism, and save power resources.

[0025] 6. The drive mechanism of the present invention is pin-connected to the tool, which facilitates disassembly and installation when the tool is replaced, and is also beneficial to improving the movement accuracy of the tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the structure of the polishing pad edge sealing device in an embodiment of the present invention;

[0027] Figure 2 for Figure 1 A three-dimensional cross-sectional view of the edge sealing device shown at A;

[0028] Figure 3 for Figure 1 A cross-sectional view of the edge sealing device at point A shown;

[0029] Figure 4 for Figure 3 A schematic diagram of the structure in which a heat preservation tank is arranged on the support member shown.

[0030] Reference numerals:

[0031] 1. Cutter; 2. Support member; 201. First surface; 202. Second surface; 203. Accommodating groove; 204. Moving channel; 205. Insulating groove; 3. Driving mechanism; 301. Fixing member; 302. Movable member; 4. Heating mechanism; 5. Fixing pin. DETAILED DESCRIPTION

[0032] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

[0033] Figure 1 Schematic diagram of the structure of the polishing pad edge sealing device in an embodiment of the present invention; Figure 3 for Figure 1 The edge sealing device is shown in a cross-sectional view at A.

[0034] The embodiment of the present invention provides a polishing pad edge sealing device, referring to Figure 1 and Figure 3 The edge banding device includes a tool 1, a support member 2, a driving mechanism 3 and a heating mechanism 4; the support member 2 is used to install the tool 1; the driving mechanism 3 is connected to the tool 1 and is used to drive the tool 1 to move; the heating mechanism 4 is used to heat the tool 1.

[0035] In some specific embodiments, the blade shape of the knife 1 can be linear, including a straight line, an arc line or a broken line.

[0036] In other specific embodiments, the shape of the tool 1 matches the shape of the required polishing pad, and the blade shape of the tool 1 can be a closed curve, specifically a ring, rectangle or other polygon, which is not limited by the present invention.

[0037] In some specific embodiments, referring to Figure 1 The support member 2 is a plate-shaped part, and the shape of the support member 2 matches the shape of the blade of the tool 1.

[0038] In some specific embodiments, the support member 2 may be in the shape of a rectangular plate-shaped part to match the knife 1 having a linear blade.

[0039] In some other specific embodiments, the shape of the support member 2 may be circular to match the knife 1 having an annular blade.

[0040] In some specific embodiments, the support member 2 is made of 45 steel.

[0041] In some specific embodiments, the tool 1 is made of copper.

[0042] In some specific embodiments, referring to Figure 3 The support member 2 includes a first surface 201, and the first surface 201 faces the polishing pad material to be punched on the carrier.

[0043] In some specific embodiments, referring to Figure 3 The heating mechanism 4 is arranged on the first surface 201 of the support member 2 , and the tool 1 is arranged adjacent to the heating mechanism 4 before being driven by the driving mechanism 3 .

[0044] Figure 2 for Figure 1 The edge sealing device is shown in a three-dimensional cross-sectional view at A.

[0045] In some embodiments of the present invention, referring to Figure 2 The driving mechanism 3 includes a movable member 302 and a fixed member 301 connected to each other. The tool 1 and the fixed member 301 are respectively arranged on both sides of the support member 2. The movable member 302 passes through the support member 2 to connect to the tool 1.

[0046] In some specific embodiments, referring to Figure 2 and Figure 3 The movable part 302 can be movably arranged on the fixed part 301, and the movable part 302 performs a linear reciprocating motion along the direction pointing to the position of the polishing pad material on the carrier.

[0047] In some specific embodiments, referring to Figure 2 and Figure 3The driving mechanism 3 can be an electric cylinder, an air cylinder or a hydraulic cylinder, and the movable part 302 is an electrically driven screw or a pneumatic and hydraulically driven piston. The movable part 302 is connected to the tool 1 to drive the tool 1 to move and punch the polishing pad material on the carrier, that is, to punch along the V direction shown in the figure.

[0048] In some specific embodiments, the fixing member 301 may be a cylinder supporting the lead screw and the piston respectively.

[0049] In some specific embodiments, the driving mechanism 3 may also be other mechanical mechanisms capable of realizing linear motion, such as a connecting rod mechanism, a gear rack mechanism or a cam mechanism, etc., and the present invention does not impose any limitation on this.

[0050] In some specific embodiments, the support member 2 includes a second surface 202 , the second surface 202 and the first surface 201 are facing away from each other, and the fixing member 301 is disposed on the second surface 202 .

[0051] In some specific embodiments, the movable part 302 passes through the support part 2 , and the end of the movable part 302 extends to the side of the first surface 201 . The tool 1 is arranged at the end of the movable part 302 , and the tool 1 is located on the side of the first surface 201 on the support part 2 .

[0052] In some specific embodiments, referring to Figure 2 and Figure 3 The movable member 302 partially passes through the support member 2 and is partially accommodated in the moving channel 204 on the support member 2. The tool 1 is arranged at the end of the movable member 302, and the tool 1 is located on the side of the first surface 201 on the support member 2.

[0053] In some specific embodiments, the movable member 302 is accommodated in the moving channel 204 of the support member 2 , the tool 1 is disposed at an end of the movable member 302 , and the tool 1 is partially accommodated in the moving channel 204 .

[0054] In some embodiments of the present invention, a mounting portion is provided on the support member 2, and the driving mechanism 3 is disposed on the mounting portion.

[0055] In other embodiments, the driving mechanism 3 is directly disposed on a surface of the support member 2 on the same side as the tool 1 , or on a surface on the other side opposite to the tool 1 .

[0056] In some specific embodiments, the mounting portion may be a receiving groove 203 .

[0057] In some embodiments of the present invention, referring to Figure 1 and Figure 3The surface of the support member 2 is provided with a receiving groove 203 , and the fixing member 301 is arranged in the receiving groove 203 .

[0058] In some specific embodiments, referring to Figure 2 The receiving groove 203 is located on the second surface 202 of the support member 2 , and the fixing member 301 is disposed in the receiving groove 203 so that the end of the fixing member 301 does not protrude from the second surface 202 .

[0059] In some embodiments of the present invention, referring to Figure 2 The bottom of the accommodating groove 203 is provided with the moving channel 204 penetrating the supporting member 2 , and the movable member 302 can be movably arranged in the moving channel 204 .

[0060] In some specific embodiments, referring to Figure 1 and Figure 2 , a plurality of the accommodating grooves 203 are arranged on the second surface 202 , and a plurality of the moving channels 204 are arranged one by one on the bottom surface of the accommodating grooves 203 .

[0061] In some specific embodiments, referring to Figure 1 The support member 2 is a circular plate-shaped part, and the number of the accommodating grooves 203 and the moving channels 204 is four, which are arranged at equal angles in the edge area of ​​the support member 2 along the circumference of the support member 2.

[0062] In some specific embodiments, the number of the driving mechanisms 3 is the same as the number of the receiving slots 203 and the moving channels 204 , and the driving mechanisms 3 are disposed in the receiving slots 203 and the moving channels 204 in a one-to-one correspondence.

[0063] In some specific embodiments, referring to Figure 1 , a plurality of movable members 302 extend to one side of the first surface 201 on the driving member and are connected to the same tool 1 .

[0064] In some specific embodiments, referring to Figure 1 The tool 1 is annular, and a plurality of movable parts 302 are connected to a plurality of positions of the tool 1 at equal angular intervals in the circumferential direction.

[0065] In some specific embodiments, a plurality of the moving channels 204 are interconnected to form an annular overall channel, and a plurality of the movable members 302 are movably disposed in the annular overall channel.

[0066] In some embodiments of the present invention, referring to Figure 2 The movable part 302 is connected to the tool 1 by a pin.

[0067] In some specific embodiments, referring to Figure 1 and Figure 2 The tool 1 is annular, and a plurality of pin holes penetrating the tool 1 are provided on the side surface of the tool 1 , and corresponding pin holes are provided on a plurality of the movable parts 302 , and the movable parts 302 are connected to the tool 1 via a fixing pin 5 .

[0068] In some other specific embodiments, the tool 1 and the movable part 302 may be connected by bolts, rivets, clamps or flanges, which is not limited in the present invention.

[0069] In some specific embodiments, the fixing pin 5 is provided with a plurality of connecting keys.

[0070] In some embodiments of the present invention, referring to Figure 3 The heating mechanism 4 and the tool 1 are arranged on the same side of the support member 2.

[0071] In some specific implementations, the heating mechanism 4 and the tool 1 are at an equal distance from the first surface 201 on the support 2 .

[0072] In some embodiments of the present invention, the moving path of the tool 1 includes a first position and a second position, and the heating mechanism 4 heats the tool 1 at the first position.

[0073] In some specific embodiments, the first position is the position of the tool 1 when the movable member 302 is at an initial position, and the second position is the position of the tool 1 when the movable member 302 is at an end of a stroke.

[0074] In some specific embodiments, the tool 1 completes punching of the polishing pad material when it is in the second position.

[0075] In some specific embodiments, one end of the heating mechanism 4 is disposed on the first surface 201 on the support member 2 and extends along the moving path of the tool 1, so that the tool 1 can be heated when it is stationary in the first position, and can still be heated when the tool 1 is between the first position and the second position when it moves.

[0076] In some embodiments of the present invention, the support member 2 includes a heat preservation groove 205, and the tool 1 is at least partially accommodated in the heat preservation groove 205 when it is in the first position.

[0077] In some specific embodiments, the heat preservation tank 205 is disposed on the first surface 201 , and when the movable member 302 is in an initial position, the tool 1 is partially or completely accommodated in the heat preservation tank 205 .

[0078] In some specific embodiments, a heat-insulating material may be disposed inside the heat-insulating tank 205 to prevent heat loss.

[0079] In some embodiments of the present invention, the heating mechanism 4 is disposed on a side of the heat preservation tank 205 .

[0080] In some embodiments of the present invention, the heating mechanism 4 includes at least two heating units, and the tool 1 is disposed between the heating units.

[0081] In some specific embodiments, the heating unit is a heating belt, and two heating belts are disposed on the first surface 201 of the support member 2 at intervals.

[0082] In some specific embodiments, the setting direction of the heating belt is parallel to the setting direction of the blade of the tool 1.

[0083] In some specific embodiments, the heating unit may be an infrared unit, a hot air unit or an electric heating wire unit, which is not limited in the present invention.

[0084] In some specific embodiments, the heat preservation tank 205 is annular, the annular cutter 1 is embedded in the heat preservation tank 205 , and the heating belts are respectively arranged on two sides of the heat preservation tank 205 .

[0085] In some embodiments of the present invention, the cutter 1 is ring-shaped, and the heating unit is located on the inner and outer sides of the cutter 1 .

[0086] In some specific embodiments, the heating belts form concentric circles, and the tool 1 is located between the contour lines of the concentric circles.

[0087] In some specific embodiments, the heating belt adopts a temperature-controlled integrated mainboard.

[0088] In some specific embodiments, a plurality of wiring grooves are provided inside the support member 2 to control the connection between the driving mechanism 3 and the heating mechanism 4 .

[0089] In some specific embodiments, a retaining ring is further provided on the outer side of the tool 1 to achieve heat preservation of the tool 1 .

[0090] The polishing pad edge sealing device provided by an embodiment of the present invention is used by first connecting the second surface 202 of the support member 2 to an external stamping device, and then powering on the device. The movable part 302 of the drive mechanism 3 returns to the initial position of its stroke, so that the tool 1 is in the first position, and the heating mechanism 4 heats the tool 1. When the temperature of the tool 1 is maintained at a set value, the movable part 302 of the drive mechanism 3 moves to the end of its stroke, so that the tool 1 extends to the second position, and the external stamping device starts stamping, and the tool 1 presses onto the edge of the polishing pad material on the carrier, so that an indentation is formed on the edge of the polishing pad material, and then the external stamping device ends stamping, and the tool 1 leaves the polishing pad material, thereby obtaining a polishing pad with a sealed edge on the carrier.

[0091] In other feasible embodiments, during use of the polishing pad edge sealing device, the drive mechanism 3 directly drives the tool 2 to move to the second position, so that the tool 1 is pressed against the edge of the polishing pad material on the carrier, and the drive mechanism 3 drives the tool 2 back to the first position, thereby obtaining a polishing pad with sealed edges on the carrier.

[0092] In some specific embodiments, different types of indentation edge sealing are obtained according to different blade shapes of the knife 1 .

[0093] For example, if the blade of the tool 1 is in the shape of a ring, a ring-shaped indentation seal can be obtained on the edge of the circular polishing pad material.

[0094] For example, if the blade shape of the tool 1 is linear, an indentation sealing edge in a straight line, arc line, or broken line shape can be obtained on one side of the polishing pad material.

[0095] In some specific embodiments, the polishing pad material punched by the tool 1 is polyurethane.

[0096] The preferred specific embodiments of the present invention are described in detail above. It should be understood that a person skilled in the art can make many modifications and changes based on the concept of the present invention without creative work. Therefore, any technical solution that can be obtained by a person skilled in the art through logical analysis, reasoning or limited experiments based on the concept of the present invention on the basis of the prior art should be within the scope of protection determined by the claims.

Claims

1. A polishing pad edge sealing device, characterized in that: include: A tool (1), wherein the blade of the tool (1) is in the shape of a ring; A support member (2) for mounting the tool (1); A driving mechanism (3), arranged on the support member (2) and connected to the tool (1), and used for driving the tool (1) to move between a first position and a second position; A heating mechanism (4) is used to heat the tool (1) in the first position.

2. The edge sealing device according to claim 1, characterized in that: The support member (2) is provided with a mounting portion, and the driving mechanism (3) is arranged on the mounting portion.

3. The edge sealing device according to claim 2, characterized in that: The mounting portion and the tool (1) are respectively located on two sides of the support member (2), and the driving mechanism (3) passes through the support member (2) to connect with the tool (1).

4. The edge sealing device according to claim 2, characterized in that: The mounting portion and the tool (1) are located on the same side of the support member (2).

5. The edge sealing device according to claim 2, characterized in that: The mounting portion is a receiving groove (203).

6. The edge sealing device according to claim 5, characterized in that: A moving channel (204) penetrating the supporting member (2) is provided at the bottom of the receiving groove (203); the driving mechanism (3) comprises a movable member (302) and a fixed member (301) connected to each other; the fixed member (301) is arranged in the receiving groove (203); and the movable member (302) is movably arranged in the moving channel (204).

7. The edge sealing device according to claim 1, characterized in that: The driving mechanism (3) and the tool (1) are pin-connected.

8. The edge sealing device according to claim 1, characterized in that: The heating mechanism (4) comprises at least two heating units, which are located on the inner and outer sides of the tool (1).

9. The edge sealing device according to claim 1, characterized in that: The support member (2) comprises a heat preservation groove (205), and the knife (1) is at least partially accommodated in the heat preservation groove (205) when it is in the first position.

10. The edge sealing device according to claim 9, characterized in that: The heating mechanism (4) is arranged on the side of the heat preservation tank (205).

11. The edge sealing device according to claim 1, characterized in that: The number of the driving mechanisms (3) is at least four, and they are arranged on the edge of the support member (2) along the circumference of the support member (2).

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