A wire EDM machine, a method and device for adjusting the wire pulley of the wire EDM machine.
By using an image acquisition unit and a servo motor to automatically adjust the position of the wire pulley in a multi-wire cutting machine, the problem of damage to the wire groove and wire pulley is solved, and the adjustment efficiency and accuracy are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2026-03-13
Smart Images

Figure CN119305041B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor processing technology, and in particular to a wire cutting machine, a method and apparatus for adjusting the wire pulleys of the wire cutting machine. Background Technology
[0002] Currently, the damage condition of the Shell grooves on multi-wire cutting machines is identified by experienced technicians. Based on the identification results, the steel wire is transferred from the severely damaged V-groove to a healthy one, while the corresponding pulley positions are adjusted to ensure that the steel wire does not deviate excessively during movement. This operation requires a high level of technical expertise and is prone to damage to the V-groove and pulleys due to misjudgments, ultimately affecting the quality of the cut product. Furthermore, adjusting the pulley positions involves limited working space, is complex, and inefficient. Summary of the Invention
[0003] This invention provides a wire cutting machine, a method and apparatus for adjusting the wire pulley of the wire cutting machine, to solve the problem that the adjustment of the position of the wire pulley in the prior art multi-wire cutting machine requires manual operation, which easily leads to damage to the wire groove and the wire pulley.
[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:
[0005] In a first aspect, embodiments of the present invention provide a wire cutting machine, comprising:
[0006] Rotating shaft, linear pulley, servo motor, and image acquisition unit;
[0007] The wire pulley is positioned close to the rotating shaft. The cutting wire is introduced into the wire groove of the rotating shaft through the wire pulley, and after winding around the rotating shaft, it is led out from the wire groove through the wire pulley.
[0008] The servo motor is connected to the linear pulley and is used to adjust the position of the linear pulley;
[0009] The image acquisition unit is disposed at one end of the rotating shaft. The image acquisition unit can move along the axial direction of the rotating shaft and can rotate around the rotating shaft. The image acquisition unit is used to acquire image information of the surface of the groove at the lead-in position and lead-out position of the cutting line on the rotating shaft.
[0010] Furthermore, the line pulley includes:
[0011] A first wire pulley and a second wire pulley, wherein the cutting wire is introduced into the wire groove through the first wire pulley and led out of the wire groove through the second wire pulley;
[0012] The servo motor includes: a first servo motor and a second servo motor;
[0013] The first servo motor is connected to the first linear pulley and is used to drive the first linear pulley to move along the axial direction of the rotating shaft; the second servo motor is connected to the second linear pulley and is used to drive the second linear pulley to move along the axial direction of the rotating shaft.
[0014] Furthermore, the rotating shaft includes:
[0015] First rotating shaft and second rotating shaft;
[0016] The first wire pulley is positioned close to the first rotating shaft to guide the cutting wire into the wire groove of the first rotating shaft and to make the cutting wire wrap around the first rotating shaft and the second rotating shaft;
[0017] The second line pulley is positioned close to the second rotating shaft and is used to lead the cutting line out from the second rotating shaft.
[0018] Furthermore, the wire cutting machine also includes:
[0019] Drive unit and connecting rod;
[0020] The image acquisition unit is connected to the driving unit via the connecting rod;
[0021] The drive unit is used to drive the connecting rod to move along the axis of the rotating shaft and to rotate around the rotating shaft.
[0022] Furthermore, the image acquisition unit is a charge-coupled camera.
[0023] Secondly, embodiments of the present invention provide a wire pulley adjustment method for a wire EDM machine, applied to the wire EDM machine as described above, comprising:
[0024] Acquire image information of the surface of the groove at the lead-in and lead-out positions of the cutting line on the rotating shaft;
[0025] The degree of damage to the surface of the groove is determined based on the image information;
[0026] Based on the degree of damage to the surface of the groove, the servo motor is controlled to drive the pulley to move axially along the shaft.
[0027] Furthermore, acquiring image information of the groove surface at the lead-in and lead-out positions of the cutting line on the rotating shaft includes:
[0028] Multiple images were captured on the surface of the groove at the entry and exit points of the cutting line on the rotating shaft.
[0029] The multiple images are overlaid to obtain the image information.
[0030] Further, determining the degree of damage to the surface of the groove based on the image information includes:
[0031] The image information described above is processed using image binarization, edge detection, and grayscale stretching to obtain the target data;
[0032] The damage result of the groove surface is calculated using a deep learning algorithm based on the target data.
[0033] Further, the step of controlling the servo motor to drive the pulley to move axially along the rotating shaft according to the degree of damage to the surface of the wire groove includes:
[0034] If the damage to the surface of the groove exceeds a preset threshold, the first servo motor and / or the second servo motor are controlled to drive the pulley to move from the end face of the shaft to the center along the axial direction of the shaft.
[0035] Thirdly, embodiments of the present invention provide a wire pulley adjustment device for a wire cutting machine, comprising:
[0036] The acquisition module is used to acquire image information of the surface of the groove at the entry and exit points of the cutting line on the rotating shaft;
[0037] A determination module is used to determine the degree of damage to the surface of the groove based on the image information;
[0038] The control module is used to control the servo motor to drive the pulley to move axially along the shaft according to the degree of damage to the surface of the wire groove.
[0039] The beneficial effects of this invention are:
[0040] The wire cutting machine of this application embodiment uses image information of the wire groove surface at the wire introduction and exit positions acquired by the image acquisition unit to determine whether the wire groove at the wire introduction and exit positions is damaged. If the wire groove is damaged, the position of the wire pulley is adjusted by a servo motor, changing the wire introduction and / or exit position to introduce and / or exit at an undamaged wire groove, thus reducing the probability of damage to the wire groove or wire pulley during wire movement. This solves the problem in existing multi-wire cutting machines where adjusting the wire pulley position requires manual operation, easily leading to damage to the wire groove and wire pulley. Attached Figure Description
[0041] Figure 1 One of the structural schematic diagrams of the wire cutting machine according to an embodiment of the present invention;
[0042] Figure 2 A second schematic diagram illustrating the structure of a wire cutting machine according to an embodiment of the present invention;
[0043] Figure 3 A schematic diagram illustrating the steps of a wire pulley adjustment method for a wire cutting machine according to an embodiment of the present invention;
[0044] Figure 4 This is a schematic diagram of the wire pulley adjustment device of a wire cutting machine according to an embodiment of the present invention. Detailed Implementation
[0045] To make the technical problems, technical solutions, and advantages of this invention clearer, a detailed description will be provided below in conjunction with the accompanying drawings and specific embodiments. In the following description, specific details such as particular configurations and components are provided merely to aid in a comprehensive understanding of the embodiments of this invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.
[0046] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.
[0047] This invention addresses the problem that adjusting the position of the wire pulley in existing multi-wire cutting machines requires manual operation, which can easily lead to damage to the wire groove and the wire pulley. It provides a wire cutting machine in this way.
[0048] like Figure 1 As shown in the figure, this application provides a wire cutting machine, including:
[0049] 1. Rotary shaft; 2. Linear pulley; 3. Servo motor; and 4. Image acquisition unit;
[0050] The line pulley 2 is positioned close to the rotating shaft 1. The cutting line 5 is introduced into the line groove 11 of the rotating shaft 1 through the line pulley 2, and after passing around the rotating shaft 1, it is led out from the line groove 11 through the line pulley 2.
[0051] The servo motor 3 is connected to the linear pulley 2 and is used to adjust the position of the linear pulley 2;
[0052] The image acquisition unit 4 is disposed at one end of the rotating shaft 1. The image acquisition unit 4 can move along the axial direction of the rotating shaft 1 and can rotate around the rotating shaft 1. The image acquisition unit 4 is used to acquire image information of the surface of the groove 11 at the lead-in position and lead-out position of the cutting line 5 on the rotating shaft 1.
[0053] It should be noted that multiple grooves are evenly arranged on the rotating shaft; when the wire cutting machine is used for the first time, the wire is introduced and led out through the grooves located at the end of the rotating shaft; each time the wire pulley is adjusted, the position of the wire introduction and / or lead out moves one or a preset number of grooves towards the center of the rotating shaft; after a preset number of wire pulley adjustments, the rotating shaft is scrapped.
[0054] Optionally, the groove is a V-shaped groove, and the cutting line is a steel wire.
[0055] Optionally, the image information of the groove surface at the introduction and exit positions includes: damage information of the groove surface at the introduction and exit positions.
[0056] The wire cutting machine of this application embodiment uses image information of the wire groove surface at the wire introduction and exit positions acquired by the image acquisition unit to determine whether the wire groove at the wire introduction and exit positions is damaged. If the wire groove is damaged, the position of the wire pulley is adjusted by a servo motor, changing the wire introduction and / or exit position to introduce and / or exit at an undamaged wire groove, thus reducing the probability of damage to the wire groove or wire pulley during wire movement. This solves the problem in existing multi-wire cutting machines where adjusting the wire pulley position requires manual operation, easily leading to damage to the wire groove and wire pulley.
[0057] like Figure 2 As shown, the line pulley includes:
[0058] First line pulley 21 and second line pulley 22, the cutting line 5 is introduced into the line groove 11 through the first line pulley 21, and the cutting line 5 is led out of the line groove 11 through the second line pulley 22;
[0059] The servo motor 3 includes: a first servo motor 31 and a second servo motor 32;
[0060] The first servo motor 31 is connected to the first linear pulley 21 and is used to drive the first linear pulley 21 to move along the axial direction of the rotating shaft 1; the second servo motor 32 is connected to the second linear pulley 22 and is used to drive the second linear pulley 22 to move along the axial direction of the rotating shaft 1.
[0061] Optionally, the rotating shaft includes:
[0062] First rotating shaft 12 and second rotating shaft 13;
[0063] The first wire pulley 21 is disposed close to the first rotating shaft 12 and is used to guide the cutting wire 5 into the wire groove of the first rotating shaft 12 and to make the cutting wire 5 wrap around the first rotating shaft 12 and the second rotating shaft 13;
[0064] The second line pulley 22 is positioned close to the second rotating shaft 13 and is used to lead the cutting line 5 out from the second rotating shaft 13.
[0065] Optionally, the first rotating shaft is an auxiliary rotating shaft, and the second rotating shaft is a main rotating shaft;
[0066] The first line pulley is the lead-in line pulley, and the second line pulley is the lead-out line pulley.
[0067] The cutting line is introduced from the first rotating shaft through the first line pulley and led out from the second rotating shaft through the second line pulley.
[0068] In this embodiment of the application, the cutting wire is introduced from the first groove corresponding to the first wire groove near the first end of the first rotating shaft through the first wire pulley, and after winding around the first rotating shaft and the second rotating shaft a preset number of times, it is led out from the lead-out position near the first end of the second rotating shaft and through the second wire pulley; the first end of the first rotating shaft and the first end of the second rotating shaft are ends in opposite directions.
[0069] like Figure 2 As shown in this embodiment, the first servo motor drives the first wire pulley to move towards the center of the first rotating shaft and away from the axis of the first rotating shaft, thereby moving the lead wire groove of the cutting wire towards the center of the first rotating shaft by a preset number of wire grooves (e.g., moving one or two wire grooves at a time).
[0070] The second servo motor drives the second wire pulley to move towards the center of the second rotating shaft and away from the axis of the second rotating shaft, thereby moving the lead wire groove of the cutting wire toward the center of the second rotating shaft by a preset number of wire grooves (for example, moving one or two wire grooves at a time).
[0071] The wire cutting machine of this application embodiment uses image information of the wire groove surface at the wire introduction and exit positions acquired by the image acquisition unit to determine whether the wire groove at the wire introduction and exit positions is damaged. If the wire groove is damaged, the position of the wire pulley is adjusted by a servo motor, changing the wire introduction and / or exit position to introduce and / or exit at an undamaged wire groove, thus reducing the probability of damage to the wire groove or wire pulley during wire movement. This solves the problem in existing multi-wire cutting machines where adjusting the wire pulley position requires manual operation, easily leading to damage to the wire groove and wire pulley.
[0072] Optionally, the wire cutting machine further includes:
[0073] Drive unit 6 and connecting rod 7;
[0074] The image acquisition unit 4 is connected to the driving unit 6 via the connecting rod 7;
[0075] The drive unit 6 is used to drive the connecting rod 7 to move along the axis of the rotating shaft 1 and to rotate around the rotating shaft 1.
[0076] In this embodiment of the application, during the use of the cutting machine, the image acquisition unit is driven to move along the axial direction of the rotating shaft by the driving unit and the connecting rod, which can acquire the damage status of multiple grooves around the groove corresponding to the cutting line introduction position and / or lead-out position, thereby determining the target groove to be switched; by driving the image acquisition unit to rotate around the rotating shaft by the driving unit, the damage status of the groove around one revolution can be acquired, thereby making the judgment of the damage status of the groove more accurate.
[0077] The cutting machine of this application embodiment, by setting the drive unit and the connecting rod connected to the drive unit and the image acquisition unit, can acquire the surface damage state of each groove on the rotating shaft around one revolution.
[0078] Optionally, the image acquisition unit is a charge-coupled camera.
[0079] The cutting machine of this application uses a charge-coupled device (CCD) to acquire the damage status of the surfaces of the first wire groove corresponding to the introduction position on the rotating shaft and the second wire groove corresponding to the lead-out position on the rotating shaft. Then, a servo motor controls the movement of the wire pulley, thereby allowing the cutting wire to be introduced and / or led out at an undamaged wire groove, reducing the probability of damage to the wire groove or wire pulley during the movement of the cutting wire. This solves the problem in existing multi-wire cutting machines where the adjustment of the wire pulley position requires manual operation, which easily leads to damage to the wire groove and wire pulley.
[0080] like Figure 3 As shown in the figure, this application embodiment also provides a method for adjusting the wire pulley of a wire EDM machine, applied to the wire EDM machine described above, including the following steps:
[0081] Step 301: Obtain image information of the surface of the groove at the lead-in and lead-out positions of the cutting line on the rotating shaft;
[0082] Step 302: Determine the degree of damage to the surface of the groove based on the image information;
[0083] Step 303: Based on the degree of damage to the surface of the wire groove, control the servo motor to drive the wire pulley to move axially along the rotating shaft.
[0084] In this embodiment of the application, the cutting wire is introduced from the first groove corresponding to the first wire groove near the first end of the first rotating shaft through the first wire pulley, and after winding around the first rotating shaft and the second rotating shaft a preset number of times, it is led out from the lead-out position near the first end of the second rotating shaft and through the second wire pulley; the first end of the first rotating shaft and the first end of the second rotating shaft are ends in opposite directions.
[0085] In this embodiment of the application, the first servo motor drives the first line pulley to move towards the center of the first rotating shaft and away from the axis of the first rotating shaft, thereby moving the lead-in groove of the cutting line towards the center of the first rotating shaft by a preset number of grooves (for example, moving one or two grooves at a time).
[0086] The second servo motor drives the second wire pulley to move towards the center of the second rotating shaft and away from the axis of the second rotating shaft, thereby moving the lead wire groove of the cutting wire toward the center of the second rotating shaft by a preset number of wire grooves (for example, moving one or two wire grooves at a time).
[0087] The wire pulley adjustment method for a wire EDM machine according to this application embodiment uses image information of the wire groove surface at the wire introduction and exit positions acquired by the image acquisition unit to determine whether the wire groove at the wire introduction and exit positions is damaged. If the wire groove is damaged, the position of the wire pulley is adjusted by a servo motor, changing the wire introduction and / or exit position to introduce and / or exit at an undamaged wire groove, thus reducing the probability of damage to the wire groove or wire pulley during wire movement. This solves the problem in the prior art where adjusting the position of the wire pulley in a multi-wire EDM machine requires manual operation, which easily leads to damage to the wire groove and wire pulley.
[0088] Optionally, acquiring image information of the groove surface at the lead-in and lead-out positions of the cutting line on the rotating shaft includes:
[0089] Multiple images were captured on the surface of the groove at the entry and exit points of the cutting line on the rotating shaft.
[0090] The multiple images are overlaid to obtain the image information.
[0091] The wire pulley adjustment method of the wire EDM machine in this application embodiment can obtain a more accurate degree of damage to the surface of the wire groove at the lead-in and lead-out positions by superimposing the obtained images, thereby improving the accuracy of the basis for adjusting the wire pulley.
[0092] Optionally, determining the degree of damage to the surface of the groove based on the image information includes:
[0093] The image information described above is processed using image binarization, edge detection, and grayscale stretching to obtain the target data;
[0094] The damage result of the groove surface is calculated using a deep learning algorithm based on the target data.
[0095] The wire pulley adjustment method of the wire cutting machine in this application embodiment processes the image to make the image closer to the actual damage state of the wire groove surface, thereby making it easier to determine the accurate timing of the wire pulley adjustment.
[0096] Optionally, controlling the servo motor to drive the pulley to move axially along the rotating shaft according to the degree of damage to the surface of the wire groove includes:
[0097] If the damage to the surface of the groove exceeds a preset threshold, the first servo motor and / or the second servo motor are controlled to drive the pulley to move from the end face of the shaft to the center along the axial direction of the shaft.
[0098] In embodiments of this application, by acquiring image information of the wire groove surface at the wire introduction and exit positions, it is determined whether the wire groove at these positions is damaged. If the wire groove is damaged, a servo motor adjusts the position of the wire pulley, changing the wire introduction and / or exit position to allow it to be introduced and / or exited at an undamaged location within the wire groove. This reduces the probability of damage to the wire groove or pulley during wire movement. This solves the problem in existing multi-wire cutting machines where adjusting the wire pulley position requires manual operation, easily leading to damage to the wire groove and pulley.
[0099] like Figure 4 As shown in the illustration, this application also provides a wire pulley adjustment device 400 for a wire EDM machine, comprising:
[0100] The acquisition module 401 is used to acquire image information of the surface of the groove at the lead-in and lead-out positions of the cutting line on the rotating shaft;
[0101] The determination module 402 is used to determine the degree of damage to the surface of the groove based on the image information;
[0102] The control module 403 is used to control the servo motor to drive the pulley to move axially along the shaft according to the degree of damage to the surface of the wire groove.
[0103] The wire pulley adjustment device for a wire EDM machine according to this application embodiment uses image information of the wire groove surface at the wire introduction and exit positions acquired by the image acquisition unit to determine whether the wire groove at the wire introduction and exit positions is damaged. If the wire groove is damaged, the position of the wire pulley is adjusted by a servo motor, changing the wire introduction and / or exit position to introduce and / or exit at an undamaged wire groove, thus reducing the probability of damage to the wire groove or wire pulley during wire movement. This solves the problem in the prior art where adjusting the position of the wire pulley in a multi-wire EDM machine requires manual operation, which easily leads to damage to the wire groove and wire pulley.
[0104] In addition, specific embodiments of the present invention also provide a computer-readable storage medium storing a computer program thereon, which, when executed by a processor, implements the steps of the above-described method. This achieves the same technical effect, and to avoid repetition, will not be described further here.
[0105] This application also provides a computer program product, including computer instructions. When these computer instructions are executed by a processor, they implement the various processes of the above method embodiments and achieve the same technical effects. To avoid repetition, they will not be described again here.
[0106] The above describes the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also within the scope of protection of the present invention.
Claims
1. A wire saw, characterized in that, The application relates to a wire cutting machine. The application comprises: a rotating shaft, a wire pulley, a servo motor and an image acquisition unit; the wire pulley is arranged close to the rotating shaft, the cutting wire is introduced into the wire slot of the rotating shaft through the wire pulley, and the cutting wire is introduced out of the wire slot through the wire pulley after winding around the rotating shaft; the servo motor is connected with the wire pulley and used for adjusting the position of the wire pulley; the image acquisition unit is arranged at one end of the rotating shaft, the image acquisition unit can move along the axial direction of the rotating shaft, and the image acquisition unit can rotate around the rotating shaft; the image acquisition unit is used for acquiring image information of the wire slot surface at the introduction position and the exit position of the cutting wire on the rotating shaft; wherein the wire pulley comprises: a first wire pulley and a second wire pulley, the cutting wire is introduced into the wire slot through the first wire pulley, and the cutting wire is introduced out of the wire slot through the second wire pulley; the servo motor comprises a first servo motor and a second servo motor; the rotating shaft comprises a first rotating shaft and a second rotating shaft; wherein the first servo motor is connected with the first wire pulley and used for driving the first wire pulley to move along the axial direction of the rotating shaft; the second servo motor is connected with the second wire pulley and used for driving the second wire pulley to move along the axial direction of the rotating shaft; the first servo motor drives the first wire pulley to move towards the center of the first rotating shaft and away from the axial direction of the first rotating shaft, and the introduction wire slot of the cutting wire is moved towards the center of the first rotating shaft by a preset number of wire slots; the second servo motor drives the second wire pulley to move towards the center of the second rotating shaft and away from the axial direction of the second rotating shaft, and the exit wire slot of the cutting wire is moved towards the center of the second rotating shaft by a preset number of wire slots.
2. The wire cutting machine according to claim 1, wherein the first wire pulley is arranged close to the first rotating shaft and used for introducing the cutting wire into the wire slot of the first rotating shaft and making the cutting wire wind around the first rotating shaft and the second rotating shaft; 3. The wire saw as claimed in claim 1, characterized in that the second wire pulley is arranged close to the second rotating shaft and used for introducing the cutting wire out of the second rotating shaft. Further comprising: a driving unit and a connecting rod; the image acquisition unit is connected with the driving unit through the connecting rod; 4. The wire saw as claimed in claim 1, characterized in that the driving unit is used for driving the connecting rod to move along the axial direction of the rotating shaft and rotate around the rotating shaft.
5. A wire pulley adjustment method of a wire saw, applied to the wire saw according to any one of claims 1 to 4, characterized in that, The image acquisition unit is a charge-coupled camera. The application relates to a wire cutting machine. acquiring image information of the wire slot surface at the introduction position and the exit position of the cutting wire on the rotating shaft; determining the damage degree of the wire slot surface according to the image information; 6. The wire saw's wire pulley adjustment method according to claim 5, wherein, controlling the servo motor to drive the wire pulley to move along the axial direction of the rotating shaft according to the damage degree of the wire slot surface. The acquisition of the image information of the wire slot surface at the introduction position and the exit position of the cutting wire on the rotating shaft comprises: collecting the images of the wire slot surface at the introduction position and the exit position of the cutting wire on the rotating shaft for multiple times to obtain multiple images; 7. The wire saw's wire pulley adjustment method according to claim 5, wherein, superimposing the multiple images to obtain the image information. The determination of the damage degree of the wire slot surface according to the image information comprises: The image information is processed by image binarization, edge detection and gray scale stretching to obtain target data; According to the target data, a deep learning algorithm is used to calculate the damage result of the wire slot surface.
8. The wire saw's wire pulley adjustment method according to claim 5, wherein, According to the damage degree of the wire slot surface, the servo motor drives the wire pulley to move along the axial direction of the rotating shaft, including: If the damage degree of the wire slot surface is greater than a preset threshold, the first servo motor and / or the second servo motor drives the wire pulley to move from the end surface to the middle of the rotating shaft along the axial direction of the rotating shaft.
9. A wire pulley adjustment device for a wire saw, characterized in that The application is applied to the wire cutting machine of any one of claims 1-4, comprising: An acquisition module is configured to acquire image information of a wire slot surface at an introduction position and an exit position of a cutting wire on a rotating shaft; A determination module is configured to determine a damage degree of the wire slot surface according to the image information; A control module is configured to control a servo motor to drive the wire pulley to move along the axial direction of the rotating shaft according to the damage degree of the wire slot surface.
Citation Information
Patent Citations
Damage determination of v-shaped groove guide on roller v-shaped
US20160209202A1