Efficient R-shaped cathode vacuum arc magnetic filtering elbow device capable of enlarging coating area

Abstract

Aiming at pain points existing in the prior art, the small-caliber elbow pipe which is simple in structure, high in coating cleanliness and high in deposition rate is designed, and meanwhile, in order to solve the problem of the coating area, the small-caliber elbow pipe is provided with a flaring solenoid and an amplification flaring; in order to solve the problems of uniformity and deposition efficiency, a bias electric field is arranged to further improve the uniformity and deposition efficiency of a coating film. According to the set of complete solution, the coating efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to a high-efficiency R-shaped cathode vacuum arc magnetic filtering bending pipe device capable of expanding the coating area, which adopts magnetic deflection cathode arc coating technology. In particular, this patent relates to a brand-new R-shaped filtering pipe, flaring solenoid, enlarged flaring, bias electric field and coating bracket, which greatly improves the coating efficiency. Background Art

[0002] Magnetic filtration arc coating technology is developed and improved from the multi-arc ion coating technology in vacuum ion coating technology. There are two main principles: first, the DC arc can continue to exist in a high vacuum environment, and a large amount of target plasma is generated under the high-energy bombardment of the current; second, the target ions in the arc plasma will move forward and turn in a spiral along the direction of the magnetic field lines due to the electromagnetic field until they reach the surface of the coated workpiece to form a coating.

[0003] Magnetic filtration cathode arc vacuum coating technology refers to the process in which large and small electrically neutral particles, i.e. droplets, are impurities in the coating process. In the coating process, it is hoped that they will be reduced as much as possible or even completely removed. Users will design magnetic filtration elbows with different torsion angles. When the plasma and droplet mixture is running in the filter elbow, according to the effect of the magnetic field, the plasma can deviate from the inertial orbit and twist and turn along with the magnetic lines of force, while the electrically neutral droplets cannot turn and change the trajectory of motion due to inertia and are deposited on the inner wall of the elbow, thereby filtering the droplets. The torsion angle of the magnetic filtration elbow and the output of plasma are mutually exclusive, that is, if the torsion angle is too large, the cleanliness of the film layer is high, but the filter elbow structure is complex, the cost is high, and the maintenance is time-consuming and labor-intensive. The plasma loss will also be more, the deposition rate will be slower, and the coating uniformity will be more difficult to control. On the contrary, if the deflection angle is small, although the filter elbow structure is simple, there will be more large particle droplets, the coating cleanliness is low, and the coating quality is reduced.

[0004] Therefore, for those skilled in the art, how to design a magnetic filtration elbow with a simple structure, high deposition efficiency and good coating uniformity while ensuring high coating cleanliness has always been a difficult problem in the industry.

[0005] For applications with high coating cleanliness requirements, a single coating source is usually used, equipped with a small-diameter magnetic filter elbow. The small-diameter filter elbow has a better filtering effect and fewer large particle droplets. However, due to the small diameter of the filter elbow, the coating range is inevitably smaller, and uniformity will also be sacrificed to a certain extent.

[0006] In the existing vacuum cathode arc magnetic filtration coating technology, coating equipment manufacturers will improve the coating uniformity by coordinating multiple sets of arc sources, but the effect is not obvious, the cost is high, and the waste is large. Even if magnetic deflection technology is used to improve the coating uniformity, the effective coating range of a single arc source is still smaller than the inner diameter of the filter tube, and the coating efficiency is low.

[0007] Therefore, for those skilled in the art, another difficult problem is how to improve the coating uniformity and coating range of coating equipment equipped with small-diameter filter elbows. Summary of the invention

[0008] The present invention aims at the pain points existing in the prior art and designs a small-diameter curved tube with a simple structure, high coating cleanliness and high deposition rate. At the same time, in order to solve the problem of coating area, the present invention is equipped with a flaring solenoid and an enlarged flaring; in order to solve the problems of uniformity and deposition efficiency, the present invention is provided with a bias electric field to further improve the uniformity and deposition efficiency of the coating. The present invention provides a complete solution, which greatly improves the coating efficiency.

[0009] The filter elbow structure of the present invention adopts a three-stage structure, and the ion beam undergoes two transformations in the clockwise and counterclockwise directions, and twists at a relatively small angle in the same plane. At the same time, there is no skew twisting between the exit surface and the incident surface, which greatly reduces the manufacturing and later maintenance costs while ensuring the cleanliness of the coating. In order to further enlarge the coating area, the magnetic filter elbow is equipped with an expansion solenoid and an enlarged expansion design before entering the vacuum box. When the plasma runs to the interface between the filter elbow and the vacuum box, the original small-diameter filter elbow is expanded to a large-diameter, and the magnetic field distribution of the solenoid electromagnetic coil in the large-diameter expansion area is adjusted, and combined with the enlarged expansion design, the coating range can be greatly increased.

[0010] Preferably, the curved pipe portion of the present invention is composed of three standard circular arcs, the three curved pipes have the same curvature, and are uniformly twisted at an arc angle in the same plane, so that more particles can enter the vacuum box without sacrificing cleanliness.

[0011] A coating bracket is provided inside the coating vacuum box, and a bias power supply is provided outside the coating vacuum box. The coating bracket includes a coating turntable and a turntable frame, and the coating workpiece is placed on the coating turntable. The positive pole of the bias power supply is connected to the filter elbow, and the negative pole is connected to the turntable frame through the magnetic fluid and the vacuum power through-hole. The coating bracket is insulated from the vacuum box, the filter elbow is insulated from the vacuum box, and the vacuum box is grounded. When the coating bracket is energized, a bias electric field is generated to attract plasma to adhere to the surface of the coated workpiece faster, thereby further improving the deposition rate of the coating.

[0012] The present invention simply and efficiently solves the problems of coating cleanliness and deposition efficiency in the magnetic filtration vacuum arc coating process, and also greatly improves the coating range and uniformity.

[0013] The beneficial effects of the present invention are: A filter elbow device with uniformly twisted arc angle, a flaring solenoid, an amplified flaring and a bias electric field are used to improve the filtration performance of the magnetic filtration elbow, while increasing the uniform coating range of a single magnetic filtration cathode arc source and improving the coating range and uniformity of the cathode arc vacuum coating machine, achieving a win-win situation of improving coating cleanliness, ensuring deposition efficiency, increasing the coating range and improving coating uniformity. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Attached Figure 1 It is the basic structure of R-shaped elbow Attached Figure 2 This is a schematic diagram of the structure of the preferred R-shaped elbow joint Attached Figure 3 This is a schematic diagram of a 6-inch R-shaped elbow connected to a flared solenoid. Attached Figure 4 This is the front view of a 6-inch R-shaped elbow connected to a flared solenoid. Attached Figure 5 This is a diagram of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch circular flared port. Attached Figure 6 This is the front view of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch circular flare. Attached Figure 7 This is a diagram of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch elliptical flare. Attached Figure 8 This is the front view of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch elliptical flare. Attached Fig. 9 This is a schematic diagram of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch trumpet-shaped flare. Attached Fig.10 This is the front view of a 6-inch R-shaped filter elbow connected to a flared solenoid and then to a 10-inch trumpet-shaped flare. Attached Fig.11 This is a schematic diagram of the structure of multiple trumpet-shaped large particle collection baffles. Attached Fig.12 This is the main view of the structure of the large particle barrier ring Attached Fig.13 This is a side view of the structure of the large particle barrier ring. Attached Fig.14 This is a schematic diagram of the structure of the coating vacuum box and coating bracket Attached Fig.15 Schematic diagram of the location of the coating support and bias power supply DETAILED DESCRIPTION See attached Figure 1-15The filter pipe 10 of the present invention is divided into four parts, including an inlet straight pipe 101, a first filter elbow 102, a second filter elbow 103 and a third filter elbow 104, and the four parts are connected to form the basic structure of the present invention. The inner walls of the first filter elbow 102, the second filter elbow 103 and the third filter elbow 104 are provided with multiple trumpet-shaped large particle collection baffle rings 70, and the outer walls are wound with electromagnetic coils.

[0015] After the arc source below generates plasma, it enters the filter pipe 10 along the inlet direction and finally enters the coating vacuum box 40. Under the action of the magnetic field Lorentz force of the electromagnetic coil, the plasma moves along the centerline direction of the pipe inside the filter pipe 10. Because the pipe is arc-shaped, the large particle droplets generated by the arc source are not affected by the magnetic field Lorentz force during operation due to electrical neutrality, and only move by inertia. Therefore, they still run in a straight line in the curved part of the curved pipe, thereby colliding and adhering to the inner wall of the curved pipe. As a result, the large particle droplets can be filtered out during the operation path of the curved pipe track, so that a higher purity plasma can be collected in the end. Compared with the sudden large angle twisting exceeding 90 degrees, the small angle relatively uniform twisting method also changes the magnetic field line distribution evenly, which can reduce the possibility of recombination into electrically neutral large particle droplets due to mutual collision due to sudden magnetic field changes during the operation of the plasma; secondly, the R-shaped track makes the straight-line distance of the ion beam in the entire running track very short, and can continuously filter the large particle droplets that are not charged and can only go straight, so the filtering effect is better.

[0016] The plasma beam is shot straightly along the center line of the inlet straight pipe 101, deflected by the Lorentz force of the first filter elbow 102, and moves forward in an arc counterclockwise along the center line of the first filter elbow 102. Some large particles with electrical neutrality will continue to move in a straight line and deposit on the inner wall of the pipe because they are not affected by the Lorentz force. The remaining ions continue to move in the tangential direction. At the same time, due to the effect of inertia, large particles will continue to move in a straight line along the tangent direction of the circle based on electrical neutrality and thus deposit on the inner wall of the bend. After entering the second filter elbow 103, the plasma beam will twist its direction and move forward in a clockwise arc. Although the clockwise and counterclockwise directions are switched, the twisting angle has hardly changed. Under the action of the Lorentz force, the plasma beam will move forward in a clockwise arc along the center line of the second filter elbow 103, and the large particles will move forward in the tangent direction of the circle due to inertia or centrifugal force and deposit on the inner wall of the second filter elbow 103. Then the ion beam moves forward to the third filter elbow 104 , and its twisting direction changes again. The ion beam moves forward in the third filter elbow 104 in a counterclockwise direction until it is finally ejected from the third filter elbow 104 .

[0017] The arc-shaped small-angle clockwise and counterclockwise twisting transformation can reduce the possibility of collision and recombination into electrically neutral large particle droplets due to sudden changes in the magnetic field during plasma operation, and evenly filter out large particles.

[0018] Furthermore, the inlet direction of the ion beam entering the filtering pipe 10 and the outlet direction of the ion beam exiting the filtering pipe 10 form an angle of 90°.

[0019] Furthermore, the first filter elbow 102, the second filter elbow 103, and the third filter elbow 104 are all arcs formed by standard circles. The first filter elbow has P as the center, the second filter elbow has O as the center, and the third filter elbow has N as the center.

[0020] Furthermore, ∠A1PE1=∠A2PE2=60°.

[0021] Furthermore, ∠A1OD1=∠A2OD2=210°, that is, the ion beam will move forward along an arc of 7 / 12 with O as the center.

[0022] Furthermore, ∠D1NF1=∠D2NF2.

[0023] The filter elbow 10 is generally a small-diameter elbow, which ensures the cleanliness of the coating while making the coating range smaller. Therefore, the present invention is provided with an expansion solenoid 20 to increase the coating range.

[0024] The expansion solenoid is divided into a small-diameter end 201 and a large-diameter end 202. The small-diameter end 201 is connected to the filter elbow 10, and the large-diameter end 202 is connected to the coating vacuum box 40, that is, the size of the small-diameter end 201 is the same as the size of the third filter elbow 104. The small-diameter transition to the large-diameter is achieved by lathe and welding, and the two ends are welded together, and the cross-section is similar to a "convex" shape. The inner wall of the expansion solenoid 20 is provided with multiple trumpet-shaped large particle collection baffles 70, and the outer wall is wound with an electromagnetic coil.

[0025] Furthermore, a large particle blocking ring 203 is provided at the place where the small-diameter end of the expanding solenoid transitions to the large-diameter end. The large particle blocking ring is provided on one side of the large-diameter end, close to the small-diameter end, in a disc shape, with a hole in the middle. The diameter of the hole is smaller than the diameter of the small-diameter pipe, and is used to block large particle droplets moving close to the inner wall of the pipe.

[0026] Furthermore, the large-diameter end 202 of the expansion solenoid can be connected to the enlarged expansion 30 to further expand the coating range. Figure 5-10 One end of the enlarged expansion is connected to the large-diameter end of the expansion solenoid, and the other end is connected to the coating vacuum box 40.

[0027] For further information, see Appendix Figure 14-15The present invention is provided with a coating support 50 and a bias power supply 60. The coating support includes a coating turntable 501 and a turntable frame 502. The coating turntable 501 is a vertical disk facing the incident direction of the plasma and is located in the coating vacuum box 40. The coating device is placed on the disk. During coating, it will rotate around the center of the disk as the axis to improve the uniformity of the coating.

[0028] At the same time, a bias power supply 60 is provided outside the coating vacuum box. The negative pole of the bias power supply is connected to the turntable frame 502 through the bias through-hole 601 and the bias line 602, and the positive pole of the bias power supply is connected to the filter elbow 10, so as to ensure that the electric field of the coating bracket can be controlled. The coating bracket 50 is insulated from the coating vacuum box 40, the filter elbow 10 and the enlarged expansion 30 are insulated from the coating vacuum box 40, and the coating vacuum box 40 is grounded. The ion beam conducts the positive and negative poles of the bias power supply, so that the circuit is closed.

[0029] Due to the principle of like repels like and opposites attract, one end of the positive output of the bias power supply is connected to the outer wall of the filter elbow, attracting electrons in the plasma to the tube wall, while driving the positive ions in the plasma to gather toward the center of the elbow, reducing the collision between the ion beam and the tube wall, and increasing the deposition rate. When the ion beam runs into the vacuum box, the positive ions are attracted by the negative voltage electric field of the coating workpiece and the coating support to accelerate forward movement, and rush to the surface of the substrate to be plated at a faster speed, making the film layer more dense and more adhesive.

[0030] Because like charges repel each other, positively charged ions in the plasma beam tend to move toward the center of the curved tube. Neutral droplets are not affected and will hit the tube wall and be filtered during their movement. Negatively charged electrons in the plasma beam will be filtered by the tube wall because of opposite charges. Positively charged oversized particles are affected by the Lorentz force of the coil and the electric field force of like charges repelling each other. However, due to the huge inertia of the oversized particles, it is not enough to make them move forward stably, and they will eventually be filtered by the tube wall.

[0031] Furthermore, the density and adhesion of the film layer can be controlled by controlling the voltage, frequency, and pulse width of the bias power supply output, thereby controlling the speed at which the film layer ions rush toward the coating workpiece and the film forming energy.

[0032] The addition of bias power increases the deposition rate by 20-30%, optimizes the uniformity to a certain extent, and significantly improves the film adhesion and density.

[0033] Example The present invention will be described in the following examples.

[0034] like Figure 2-4As shown, Example 1 is a technical solution of connecting a 6-inch R-shaped filter elbow to a 6- or 8-inch flared solenoid. Specifically, the arc starting current of the coating source is 20-25A, and the arc starting current is 20-200A. A plasma beam is emitted to enter from the inlet pipe 101 and move along the center line of the pipe. The inner walls of all filter elbows are provided with multiple trumpet-shaped large particle collection baffles 70, and the outer walls are evenly provided with coils. In this embodiment, the winding length of the filter elbow is set to 1200 mm, and the number of turns is 3623 turns. Under the action of the Lorentz force of the first filter elbow 102, the plasma beam enters the first filter elbow 102 from the inlet straight pipe 101, and moves counterclockwise along the center line of the first filter elbow 102.

[0035] The first filter elbow 102 is a standard arc with P as the center, and the arc angle of the first filter elbow is 60°, i.e., one sixth of an arc, wherein PA2=PE2, PA1=PE1, ∠A1PE1=∠A2PE2=60°, and the plasma beam twists counterclockwise at the same smaller angle in the first filter elbow 102 until the ion beam enters the second filter elbow 103. The second filter elbow 103 is a standard arc with 0 as the center, wherein OA1=OB1=OC1=OD1, OA2=OB2=OC2=OD2, ∠A1OD1=∠A2OD2, and the plasma beam moves clockwise for 210°, i.e., seven twelfths of an arc, in the second elbow, and then the ion beam enters the third filter elbow 104. The third curved tube 104 is an arc with point N as the center, wherein ND1=NF1, ND2=NF2, ∠D1NF1=∠D2NF2, and the plasma beam moves counterclockwise by 60°, i.e., one sixth of an arc, in the third curved tube, and then is ejected and enters the flaring solenoid 20.

[0036] During the entire process of the elbow moving forward, large particles will be deposited on the inner wall of the elbow due to inertia and not affected by the Lorentz force, thereby ensuring the cleanliness of the coating. At the same time, since the curved track can continuously filter large particle droplets that are not charged and can only move straight, the filtering effect is better. In this embodiment, the plasma injection direction and the injection direction are at an angle of 90°. ∠A1PE1=∠A2PE2=60°, ∠A1OD1=∠A2OD2=210°, ∠D1NF1=∠D2NF2. The three filter elbows have the same caliber of 6 inches and the same curvature, and the ion beam is in the same plane in the entire filter elbow 10.

[0037] After being emitted from the third filter bend 104, the ion beam enters the expanding solenoid 20. The expanding solenoid 20 is divided into a large-diameter end 202 and a small-diameter end 201. The small-diameter end 201 is connected to the third filter bend 104. Because the vacuum equipment has very high requirements for airtightness, the docking point can only be connected with a 6-inch pipe mouth of the same size. Therefore, the small-diameter end of the expanding solenoid is 6 inches. The transition from 6 inches to 8 inches of the expanding solenoid is achieved by lathe and welding, and the two ends are welded together. The cross-section is similar to a "convex" shape, with the small-diameter end being 6 inches and the large-diameter end being 8 inches.

[0038] The outer side of the expanded solenoid 20 is wound with a coil, wherein the 6-inch section is 120 mm long and the number of winding turns is set to 362 turns, and the 8-inch section is 103 mm long and the number of winding turns is set to 311 turns. The inner wall is also provided with multiple trumpet-shaped large particle collection baffles 70, reference Fig.11 A large particle blocking ring 203 is provided at the interface where the 6-inch jump changes to the 8-inch jump of the expansion solenoid 20, and its structure is shown in FIG. Figure 12-13 As shown. The large particle blocking ring is placed on one side of the 8-inch large-diameter end, close to the 6-inch small-diameter end, in a disc-like state, with a hole in the middle. The diameter of the hole is smaller than the diameter of the 6-inch small-diameter pipe, which is used to pass the filtered plasma. The disc-shaped large particle blocking ring is used to block large particles moving close to the inner wall of the pipe. The size of the hole can be adjusted according to actual needs.

[0039] In this embodiment, the number of particles with a diameter greater than 0.2 μm per square inch is less than or equal to 10, which has a high cleanliness level and a coating area of ​​up to 300 cm 2 , reaching a deposition rate of 0.14nm / s and a coating uniformity of ±5%, achieving a win-win situation of improving coating cleanliness, ensuring coating efficiency, increasing coating range, and improving coating uniformity.

[0040] Example 2 Figure 5-6 As shown, an enlarged expansion port 30 is added on the basis of Example 1. In Example 2, the enlarged expansion port is a 10-inch circular enlarged expansion port 301. The diameter of the circular enlarged expansion port 301 is 10 inches, forming a 6-8-10 stepped expansion. One end of the circular enlarged expansion port 301 is connected to the large-diameter end 202 of the expansion solenoid, and the other end is connected to the coating vacuum box, so as to further expand the coating area. In this embodiment, an electromagnetic coil is wound around the outer wall of the 10-inch circular enlarged expansion port, the coil length is 88 mm, and the number of winding turns is 266 turns. In this embodiment, there are less than or equal to 10 particles with a diameter greater than 0.2 um per square inch, which has a high cleanliness level, and the coating area can reach 480 cm 2 , reaching a deposition rate of 0.11nm / s and a coating uniformity of ±5%, achieving a win-win situation of improving coating cleanliness, ensuring coating efficiency, increasing coating range, and improving coating uniformity.

[0041] Example 3 Figure 7-8 As shown, it is a technical solution to add an elliptical enlarged expansion 302 on the basis of Example 1. The major axis of the elliptical enlarged expansion 302 is 10 inches, forming a 6-8-ellipse technical solution. One end of the elliptical enlarged expansion 302 is connected to the large-diameter end 202 of the expansion solenoid, and the other end is connected to the coating vacuum box 40, further expanding the coating area. In this embodiment, the outer wall of the 10-inch elliptical enlarged expansion is wrapped with an electromagnetic coil, the coil length is 88 mm, and the number of winding turns is 266 turns. In this embodiment, the number of particles with a diameter greater than 0.2um per square inch is less than or equal to 10, and it has a high cleanliness level. At the same time, the coating area can reach 700 cm 2 , reaching a deposition rate of 0.09nm / s and a coating uniformity of ±5%, achieving a win-win situation of improving coating cleanliness, ensuring coating efficiency, increasing coating range, and improving coating uniformity.

[0042] Example 4 Figure 9-10 As shown, a technical solution is provided in which a trumpet-shaped enlarged expansion is added on the basis of Example 1. One end of the trumpet-shaped enlarged expansion 303 is an ellipse with a long axis of 8 inches, and the other end is an ellipse with a long axis of 10 inches, and the whole is in the shape of a trumpet. One end of the elliptical trumpet-shaped enlarged expansion is connected to the large-diameter end 202 of the expansion solenoid, and the other end is connected to the coating vacuum box 40, so as to further expand the coating area while maintaining the smoothness of the magnetic lines of force. In this embodiment, more electromagnetic coils are wrapped around the outer wall of the elliptical enlarged expansion, the coil length is 118 mm, and the number of turns is 356. In this embodiment, there are less than or equal to 10 particles with a diameter greater than 0.2 um per square inch, and it has a high cleanliness level. At the same time, the coating area can reach 960 cm 2 , reaching a deposition rate of 0.06nm / s and a coating uniformity of ±5%, achieving a win-win situation of improving coating cleanliness, ensuring coating efficiency, increasing coating range, and improving coating uniformity.

[0043] Embodiment 5 is based on Embodiment 1, and adds a coating support 50 and a bias power supply 60. After the ion beam enters the vacuum box, it needs to adhere to the surface of the coating workpiece to form a coating layer. This embodiment is provided with a coating support 50, which includes a vertical circular turntable 501 facing the incident direction of the plasma and a turntable frame 502 supporting the coating turntable 501, which is located in the coating vacuum box. The coating workpiece is placed on the coating turntable 501, and during coating, it will rotate with the center of the disk as the axis to improve the uniformity of the coating.

[0044] At the same time, a bias power supply 60 is provided outside the coating vacuum box, the negative pole of the bias power supply is connected to the turntable frame 502 through the bias through-hole 601 and the bias line 602, and the positive pole of the bias power supply is connected to the filter elbow 10, so as to ensure that the electric field of the coating bracket can be controlled. The coating bracket 50 is insulated from the coating vacuum box 40, the filter elbow 10 and the enlarged expansion 30 are insulated from the coating vacuum box 40, the coating vacuum box 40 is grounded, and an insulating plate 80 is provided at the bottom of the turntable frame, and an insulating plate 80 is also provided at the connection between the expansion solenoid 20 and the enlarged expansion.

[0045] After the ion beam runs onto the coating turntable, the positive and negative electrodes of the bias power supply are connected, so that the circuit is closed.

[0046] The coating process actually uses positively charged ions in the ion beam. Because the filter elbow 10 is connected to the positive pole of the bias power supply 60, its electric field squeezes the positively charged ions to the middle of the elbow because like charges repel each other, while the electrically neutral droplet particles are not affected and hit the tube wall to be filtered. Opposite electrons are filtered by the tube wall because of opposite charges attract each other. Although positively charged super-large particles are affected by the Lorentz force of the tube wall coil and the electric field force of like charges repelling each other at the same time, they cannot completely overcome the inertia force of the super-large particles and will also touch the tube wall and be filtered out. After the positive ions enter the vacuum box, the coating support is set in front of the ion ejection direction. Because the bottom of the coating support is connected to the negative pole of the bias power supply, opposite charges attract each other, and the positive ions will accelerate to the coating turntable 501 and attach to the coating workpiece.

[0047] The setting of bias electric field and coating support improves the uniformity and density of coating. The use of bias electric field increases the total coating efficiency by 20-30%, optimizes the uniformity to a certain extent, and significantly improves the adhesion and density of the film layer.

[0048] This embodiment adds a bias power supply and a coating bracket on the basis of Example 1. Similarly, Examples 2-4 can also use the same technical solution to add a coating bracket and a bias power supply. These simple changes and combinations all fall within the scope of protection of the present invention.

[0049] The above description is only a specific implementation of the present invention. Any technician in this technical field can easily think of changes or substitutions within the technical scope of the present invention, which should be included in the protection scope of the present invention.

[0050] The first, second and third aspects of the present invention are for the convenience of technical personnel to understand the structure, and do not mean that the pipeline must be divided into three sections from the actual manufacturing process. No matter how the pipeline is divided, as long as the technical solution of the present invention is adopted, it should fall within the protection scope of the present invention.

Claims

1. A high-efficiency R-shaped cathode vacuum arc magnetic filtration bending device capable of expanding the coating area, characterized in that A filter pipe, an expansion solenoid, an amplifying expansion, a coating vacuum box, a coating bracket and a bias power supply are provided. The filter pipe is divided into an inlet pipe, a first filter elbow, a second filter elbow and a third filter elbow. The expansion solenoid is divided into a small-diameter end and a large-diameter end. The third filter elbow is connected to the small-diameter end of the expansion solenoid, the large-diameter end of the expansion solenoid is connected to one end of the amplifying expansion, and the other end of the amplifying expansion is connected to the coating vacuum box. After entering from the inlet pipe, the plasma beam moves counterclockwise after the first filter elbow, moves clockwise in the second filter elbow, moves counterclockwise in the third filter elbow, and then enters the expansion solenoid, and finally enters the vacuum box through the amplifying expansion.

2. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device according to claim 1, characterized in that The coating bracket is arranged inside the vacuum box, the bias power supply is arranged outside the coating vacuum box, the coating bracket includes a coating turntable and a turntable frame, the positive pole of the bias power supply is connected to the filter pipe, and the negative pole is connected to the turntable frame through the bias line and the vacuum power through-fit, the coating bracket is insulated from the coating vacuum box, the filter pipe is insulated from the coating vacuum box, and the coating vacuum box is grounded.

3. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 2, characterized in that The plasma beam is in the same plane in the filtering pipe, the expanding solenoid and the enlarged expanding port, and no folding or twisting of different planes occurs.

4. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 3, characterized in that The first filter elbow, the second filter elbow and the third filter elbow are all standard arcs with the same curvature.

5. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 4, characterized in that The arc angle of the first filter elbow is 60°, the arc angle of the second filter elbow is 210°, and the arc angle of the third filter elbow is 60°.

6. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 5, characterized in that The angle of the ion beam entering the filter duct is 90° to the angle of the ion beam exiting the filter duct.

7. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 6, characterized in that The enlarged flare is a circular flare.

8. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device as claimed in claim 6, characterized in that The enlarged flare is an elliptical flare.

9. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device according to claim 6, characterized in that The enlarged flare is a trumpet-shaped flare.

10. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device according to claim 6, characterized in that A large particle blocking ring is arranged at the place where the small-diameter end of the expanding solenoid transitions to the large-diameter end. The large particle blocking ring is arranged on one side of the large-diameter end, close to the small-diameter end, in a disc shape, with a hole in the middle. The diameter of the hole is smaller than the diameter of the small-diameter pipe, and is used to block large particle droplets moving close to the inner wall of the pipe.

11. The high-efficiency R-shaped cathode vacuum arc magnetic filtering pipe bending device according to claims 1-10, characterized in that The filter pipe and the inner wall of the expanded solenoid are provided with multiple trumpet-shaped large particle collecting baffle rings.

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