Spatial light modulation unit and spatial light modulation device

Abstract

The invention relates to a spatial light modulation unit which comprises a first electrode, a second electrode and a super-aligned carbon nanotube-paraffin composite structure, the first electrode and the second electrode are arranged in an insulated and spaced mode, and the super-aligned carbon nanotube-paraffin composite structure is electrically connected with the first electrode and the second electrode; the super-aligned carbon nanotube-paraffin composite structure comprises a super-aligned carbon nanotube structure and a paraffin layer, and the paraffin layer covers the super-aligned carbon nanotube structure and is soaked in the super-aligned carbon nanotube structure. The invention further relates to a spatial light modulation device comprising the spatial light modulation unit.

Description

Technical Field

[0001] The invention relates to a spatial light modulation unit and a spatial light modulation device. Background Art

[0002] Based on the ultra-small heat capacity per unit area and fast thermal response properties of super aligned carbon nanotube (SACNT) films, SACNT films can be quickly electrically modulated for heating and used as infrared light sources for NDIR greenhouse gas monitoring. SACNT films also have outstanding properties such as ultra-thinness, conductivity, transparency, flexibility, stretchability, uniformity, high emissivity and large-area preparation. These excellent properties have aroused people's interest in its research in optics and thermal management.

[0003] However, the application of super-ordered carbon nanotube films in active optical control needs further development. A typical application is spatial light modulation, which can be realized based on photonic crystals, liquid crystals, surface plasmas and phase change materials. Due to the advantages of super-ordered carbon nanotube films such as fast thermal response, ultra-small HCPUA, and easy large-area preparation and cutting, they have successfully realized functions such as fast controllable incandescent light source arrays, fast thermal actuators, and fast adaptive thermal camouflage. In the prior art, there is no application of super-ordered carbon nanotube films in the field of spatial light modulation. Summary of the invention

[0004] In view of this, it is indeed necessary to provide a spatial light modulation unit and a spatial light modulation device using a super-aligned carbon nanotube film.

[0005] A spatial light modulation unit comprises a first electrode, a second electrode and a super-ordered carbon nanotube-paraffin composite structure, wherein the first electrode and the second electrode are insulated and spaced apart, and the super-ordered carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode; the super-ordered carbon nanotube-paraffin composite structure comprises a super-ordered carbon nanotube structure and a paraffin layer, the super-ordered carbon nanotube structure comprises a plurality of micropores, the paraffin layer covers the carbon nanotube structure, and the paraffin layer penetrates into the micropores of the super-ordered carbon nanotube structure.

[0006] A spatial light modulation device comprises: an insulating substrate having a surface; a plurality of row electrodes and a plurality of column electrodes arranged on the surface of the insulating substrate, the plurality of row electrodes and the plurality of column electrodes intersecting each other and being insulated, and every two adjacent row electrodes and the two adjacent column electrodes intersecting therewith forming a grid; and a plurality of light modulation units, each spatial light modulation unit corresponding to a grid arrangement, each light modulation unit comprising a first electrode, a second electrode and a super-ordered carbon nanotube-paraffin composite structure, the first electrode and the second electrode being insulated and spaced apart, the first electrode and the second electrode being electrically connected to the row electrode and the column electrode respectively, and the heating element being electrically connected to the first electrode and the second electrode; the super-ordered carbon nanotube-paraffin composite structure comprising a carbon nanotube structure and a paraffin layer, the super-ordered carbon nanotube structure comprising a plurality of micropores, the paraffin layer covering the super-ordered carbon nanotube structure, and the paraffin layer penetrating into the micropores of the super-ordered carbon nanotube structure.

[0007] Compared with the prior art, the spatial light modulation unit and spatial light modulation device provided by the present invention include a super-ordered carbon nanotube-paraffin composite structure, which includes a super-ordered carbon nanotube structure and a paraffin layer. Since the super-ordered carbon nanotube structure has the characteristic of rapid thermal response, when the super-ordered carbon nanotube structure is electrically heated and modulated, the temperature of the paraffin covering the super-ordered carbon nanotube structure also changes rapidly, causing the paraffin to undergo a rapid phase change, so that the super-ordered carbon nanotube structure plays the role of a heater. Under the control of the addressing circuit, as the super-ordered carbon nanotube structure is heated, the paraffin melts, and the paraffin layer in the solidified state in the original super-ordered carbon nanotube-paraffin composite structure is heated and melted, so that the low light transmittance of the ordered carbon nanotube-paraffin composite structure is converted into high light transmittance, so that the transmitted light intensity has a significant difference, and spatial light modulation is achieved. Since the super-ordered carbon nanotube structure can quickly increase or decrease temperature within hundreds of milliseconds, the intensity of the transmitted light can respond and recover quickly within hundreds of milliseconds, achieving a fast spatial light modulation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 A schematic diagram of the structure of a spatial light modulation device provided in an embodiment of the present invention.

[0009] Figure 2 Schematic diagram of the structure of the super-ordered carbon nanotube film-paraffin composite structure in the embodiment.

[0010] Figure 3 This is a scanning electron microscope image of a single-layer super-aligned carbon nanotube film.

[0011] Figure 4 These are comparison photos of the transparency of the super-ordered carbon nanotube-paraffin composite structure before and after the paraffin layer in the super-ordered carbon nanotube composite structure melts.

[0012] Figure 5 These are the light transmittance spectra of super-aligned carbon nanotube-paraffin composite structures with different surface densities when the paraffin layer is in a solidified state.

[0013] Figure 6 The surface density of the paraffin layer is 2.81x10 -4 g / mm 2 The transmittance of the super-ordered carbon nanotube-paraffin composite structure when the power is repeatedly turned on and off.

[0014] Figure 7 The surface density of the paraffin layer is 2.81x10 -4 g / mm 2 The difference in transmittance of the super-ordered carbon nanotube-paraffin composite structure when the power is repeatedly turned on and off.

[0015] Figure 8 Comparison of the modulated pulse signal and the transmission signal obtained by the silicon (Si) detector (effective band: 350nm-1100nm) during modulated heating.

[0016] Fig. 9 A photo taken of the back of the spatial light modulation device showing the word "THU" modulated by the addressable circuit.

[0017] Main component symbols

[0018] Spatial light modulation device 20

[0019] Insulation base 202

[0020] Row electrode 204

[0021] Column electrode 206

[0022] Super ordered carbon nanotube-paraffin composite structure 208

[0023] First electrode 210

[0024] Second electrode 224

[0025] Grid 214

[0026] Dielectric insulation layer 216

[0027] Spatial light modulation unit 220

[0028] Super ordered carbon nanotubes 2082

[0029] Paraffin layer 2084

[0030] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0031] The spatial light modulation device provided by the present invention will be further described in detail below with reference to the accompanying drawings.

[0032] See also Figure 1 and Figure 2 The present invention provides a spatial light modulation device 20, comprising an insulating substrate 202, a plurality of row electrodes 204, a plurality of column electrodes 206, and a plurality of spatial light modulation units 220. The plurality of row electrodes 204 and the plurality of column electrodes 206 are cross-arranged on the insulating substrate 202. The plurality of row electrodes 204 or the plurality of column electrodes 206 are separated by an insulating medium 216. Every two adjacent row electrodes 204 and two adjacent column electrodes 206 form a grid 214, and each grid 214 locates a spatial light modulation unit 220, that is, the spatial light modulation unit 220 corresponds to the grid 214 one by one.

[0033] The insulating substrate 202 is an insulating transparent substrate or a substrate with the highest possible transmittance in the visible light platinum band, such as one or more of a glass substrate, a resin substrate, and a quartz substrate, etc., and may also be a flexible substrate, such as PI. The size and thickness of the insulating substrate 202 are not limited, and those skilled in the art may set the size of the insulating substrate 202 according to actual needs, such as according to the predetermined size of the heating device 20. In this embodiment, the insulating substrate 202 is preferably a square soda-lime glass substrate with a thickness of about 0.33 mm and a side length of about 80 mm.

[0034] The plurality of row electrodes 204 and the plurality of column electrodes 206 are arranged crosswise, and a dielectric insulating layer 216 is arranged at the intersection of the row electrodes 204 and the column electrodes 206, and the dielectric insulating layer 216 can ensure electrical insulation between the row electrodes 204 and the column electrodes 206 to prevent short circuit. The plurality of row electrodes 204 or column electrodes 206 can be arranged at equal intervals or at unequal intervals. Preferably, the plurality of row electrodes 204 or column electrodes 206 are arranged at equal intervals. The row electrodes 204 and the column electrodes 206 are conductive materials or insulating materials coated with a conductive material layer. In this embodiment, the plurality of row electrodes 204 and the plurality of column electrodes 206 are preferably planar conductors printed with conductive silver paste, and the row spacing of the plurality of row electrodes 204 is 3 mm, and the column spacing of the plurality of column electrodes 206 is 3 mm, or the spacing size can be set as required. Since the precision of the super-aligned carbon nanotube film cut by laser is tens of microns or even smaller, the spacing can be completely determined by the processing precision of screen printing and super-aligned carbon nanotube film. The width of the row electrode 204 and the column electrode 206 is 200 microns to 1000 microns, and the thickness is 30 microns to 100 microns, which can be set according to actual needs and manufacturing processes, and may not be within the range here. In this embodiment, the intersection angle of the row electrode 204 and the column electrode 206 is 10 degrees to 90 degrees, preferably 90 degrees. In this embodiment, the row electrode 204 and the column electrode 206 can be prepared by printing a conductive paste on the insulating substrate 202 by screen printing. The components of the conductive paste include metal powder, low-melting point glass powder and a binder. Among them, the metal powder is preferably silver powder, and the binder is preferably pine alcohol or ethyl cellulose. The specific physical properties of the metal powder and the binder can be adjusted according to actual needs.

[0035] The multiple spatial light modulation units 220 are respectively arranged in the above-mentioned multiple grids 214 in a one-to-one correspondence. It can be understood that the spatial light modulation units 220 are arranged in a matrix to form a heating point array. Each spatial light modulation unit corresponds to an independent heating point. Each spatial light modulation unit 220 includes a first electrode 210, a second electrode 224, and a super-ordered carbon nanotube-paraffin composite structure 208. The first electrode 210 corresponds to the second electrode 224 and is arranged at an insulating interval. The distance between the first electrode 210 and the second electrode 224 in each grid 214 is the thickness of the insulating dielectric layer. The super-ordered carbon nanotube film composite structure 208 is arranged between the first electrode 210 and the second electrode 224, and is electrically connected to the first electrode 210 and the second electrode 224 respectively. The preparation order of screen printing and super-ordered carbon nanotube-paraffin composite structure array is:

[0036] 1) Printing column electrode layer;

[0037] 2) Printing insulating dielectric layer;

[0038] 3) Printing row electrode layer;

[0039] 4) Printing the first electrode and the second electrode layer and the electrode, both of which can be made on one printing screen;

[0040] 5) Laying a single layer of super aligned carbon nanotube film having a width greater than the width of the entire printed array on the entire printed array;

[0041] 6) cutting the super ordered carbon nanotube film by a laser cutting machine through a specified ablation procedure, so that only the portion where the first electrode and the second electrode are in contact is left, and only the portion inside the grid is left in the entire spatial light modulation unit;

[0042] 7) Place the entire substrate after the above steps on a hot plate with a temperature higher than the melting point of paraffin wax. The paraffin wax used in this embodiment is No. 58 paraffin wax, which has a melting point of 58° C. Pour the melted paraffin wax on the four corners of the entire printed array, and when the paraffin wax is evenly spread on the array, turn off the power of the hot plate and wait for the paraffin wax to solidify naturally to form the final spatial light modulation array.

[0043] Based on the above steps, it can be known that in a grid 214, except for the electrode part, the insulating medium part and the super-ordered carbon nanotube-paraffin composite structure formed at 208, other areas are also covered by paraffin. When the paraffin thickness is large enough to cover the electrode, the paraffin will also cover the electrode. However, the working area is limited to the area at 208. In this embodiment, the first electrode 210 in the spatial light modulation unit 220 in the same row is electrically connected to the electrode 204 in the same row, and the second electrode 224 in the spatial light modulation unit 220 in the same column is electrically connected to the electrode 206 in the same column.

[0044] The second electrode 224 and the first electrode 224 are conductors, such as metal layers. The first electrode 210 may be an extension of the row electrode 204, and the second electrode 224 may be an extension of the column electrode 206. The first electrode 210 and the row electrode 204 may be integrally formed, and the second electrode 224 and the column electrode 206 may also be integrally formed. In this embodiment, the first electrode 210 and the second electrode 224 are both planar conductors, and their materials may be the same as the printed materials of the row electrode or the column electrode, as long as they are conductive electrodes. The first electrode 210 is directly electrically connected to the row electrode 204, and the second electrode 224 is directly electrically connected to the column electrode 206. The length of the first electrode 210 and the second electrode 224 is 100 microns to 1 millimeter, the width is 100 microns to 1 millimeter, and the thickness is 10 microns to 500 microns. As required, the relevant size parameters may not be limited to these ranges. Preferably, the length of the second electrode 224 and the first electrode 210 is 100 micrometers to 1 millimeter, the width is 10 micrometers to 500 micrometers, and the thickness is 10 micrometers to 500 micrometers. The relevant size parameters may not be limited to these ranges as required. In this embodiment, the material of the first electrode 210 and the second electrode 224 is a conductive paste, which is printed on the insulating substrate 202 by screen printing. The composition of the conductive paste is the same as that of the conductive paste used for the above-mentioned electrodes.

[0045] Before laying the super-aligned carbon nanotube film, the heating unit 220 can print a bonding layer with the same shape as the first electrode and the second electrode, and the material of the bonding layer is the bonding agent in the slurry in the electrode 204, which is used to fix and adhere the super-aligned carbon nanotube film to ensure that the super-aligned carbon nanotube film is more firmly fixed on the first electrode 210 and the second electrode 224. It can be understood that the bonding layer is an optional structure, and the spatial light modulation unit 220 may not include a bonding layer. In addition, for convenience, the bonding layer can also be directly an electrode slurry, as long as it does not affect the connection between the first electrode 210 and the second electrode 224 and the super-aligned carbon nanotube film. In the embodiment, the silver paste used for printing electrodes is used.

[0046] See also Figure 2 The super-ordered carbon nanotube-paraffin composite structure 208 includes a super-ordered carbon nanotube structure 2082 and a paraffin layer 2084. The paraffin layer 2084 is a thin layer of paraffin material. The paraffin layer 2084 is infiltrated on the super-ordered carbon nanotube structure 2082, and at least a portion of the paraffin layer 2084 penetrates into the micropores of the super-ordered carbon nanotube structure 2082. The thickness of the super-ordered carbon nanotube structure 2082 is 30 microns to 100 microns, and the thickness of the paraffin layer is 300 microns to 1 mm.

[0047] The super-ordered carbon nanotube structure is a self-supporting structure. The so-called "self-supporting structure" means that the super-ordered carbon nanotube structure does not need to be supported by a support body and can maintain its own specific shape. The super-ordered carbon nanotube structure of the self-supporting structure includes a plurality of carbon nanotubes, and the plurality of carbon nanotubes attract each other through van der Waals forces, so that the carbon nanotube structure has a specific shape. The carbon nanotubes in the super-ordered carbon nanotube structure include one or more of single-walled carbon nanotubes, double-walled carbon nanotubes and multi-walled carbon nanotubes. The diameter of the single-walled carbon nanotube is 0.5 nanometers to 50 nanometers, the diameter of the double-walled carbon nanotube is 1.0 nanometers to 50 nanometers, and the diameter of the multi-walled carbon nanotube is 1.5 nanometers to 50 nanometers. There are a large number of gaps between the carbon nanotubes in the super-ordered carbon nanotube structure, so that the carbon nanotube structure has a large number of micropores. The heat capacity per unit area of ​​the carbon nanotube structure is 7.7×10 -3 Joule per square meter Kelvin. Since the heat capacity of carbon nanotubes is small, the super ordered carbon nanotube structure has a faster thermal response speed and can be used to quickly heat objects.

[0048] The super-aligned carbon nanotube structure includes at least one layer of super-aligned carbon nanotube film. Figure 3 Specifically, the super-aligned carbon nanotube film comprises a plurality of continuous and directional carbon nanotube segments. The plurality of carbon nanotube segments are connected end to end by van der Waals forces. Each carbon nanotube segment comprises a plurality of mutually parallel carbon nanotubes, and the plurality of mutually parallel carbon nanotubes are tightly bound by van der Waals forces. The carbon nanotube segments have arbitrary width, thickness, uniformity and shape. The carbon nanotubes in the super-aligned carbon nanotube film are preferentially oriented and arranged in the same direction. The super-aligned carbon nanotube film can be directly obtained by pulling a carbon nanotube array.

[0049] The spatial light modulation device 20 provided in this embodiment can be obtained by the following method: printing row electrodes (lateral electrodes) at the bottom of an insulating substrate, printing an insulating dielectric layer, printing column electrodes (longitudinal electrodes), printing electrodes (first electrodes and second electrodes) carrying super-aligned carbon nanotube films, bonding electrodes (adhesive layers) of super-aligned carbon nanotube films, laying a single layer of super-aligned carbon nanotube films, laser cutting super-aligned carbon nanotube films, and infiltrating the super-aligned carbon nanotube film array with molten paraffin. The first electrode and the second electrode together constitute a CNT electrode, i.e., an electrode for carrying a super-aligned carbon nanotube film. Since the transverse and longitudinal silver electrodes, the CNT electrodes, and the adhesive layer are all printed with the same silver paste. In addition, considering that the entire array will be subsequently subjected to circuit control, the ends of the transverse and longitudinal silver electrodes are designed to be thick and long for easy connection with the control circuit. After printing, each layer needs to be cured. The horizontal and vertical silver electrodes, the insulating dielectric layer, and the CNT electrode need to be sintered and cured at 570°C. The adhesive layer used to adhere the super-aligned carbon nanotube film is only required to place the entire array on a hot plate with a surface temperature of 150°C and heat for 5 minutes after laying a single layer of super-aligned carbon nanotube film. Finally, the super-aligned carbon nanotube film is cut with a laser and the super-aligned carbon nanotube film between the CNT electrodes is retained to obtain a complete super-aligned carbon nanotube film array. Subsequently, the glass substrate and the culture dish containing paraffin are placed on a hot plate at a temperature of 100°C. When the paraffin is melted, droplets of paraffin are dropped on the four corners other than the cross mark on the edge of the super-aligned carbon nanotube film array. When it is evenly spread on the super-aligned carbon nanotube film array, a uniform composite structure of super-aligned carbon nanotube film and paraffin layer can be formed, that is, a super-aligned carbon nanotube-paraffin composite structure. Finally, turn off the power of the hot plate and wait for the paraffin to solidify naturally to obtain the final sample.

[0050] The spatial light modulation device provided by the present invention can realize periodic changes in light intensity. When used, by energizing the super-ordered carbon nanotube structure in the spatial light modulator, the super-ordered carbon nanotube structure generates Joule heat, causing the temperature to rise, thereby heating the paraffin layer covering the super-ordered carbon nanotube structure to melt the paraffin layer. After the paraffin layer melts, the light transmittance of the super-ordered carbon nanotube-paraffin composite structure increases. Under the control of the circuit, as the super-ordered carbon nanotube film at the corresponding point of the array is heated, the paraffin melts, converting the low light rate in the original solidified state into high light transmittance, thereby realizing effective spatial light modulation on the addressable array.

[0051] In the present invention, a super-ordered carbon nanotube-paraffin composite structure is made into an addressable array by screen printing technology, and the temperature of the corresponding pixel points on the super-ordered carbon nanotube film composite structure array is controlled by a circuit, so that the temperature of the paraffin layer compounded with the super-ordered carbon nanotube structure in the super-ordered carbon nanotube-paraffin composite structure can also be quickly modulated. Due to the rapid thermal response of the super-ordered carbon nanotube structure, the temperature of the paraffin covering the super-ordered carbon nanotube structure also changes rapidly, thereby causing rapid phase change modulation. Under the control of the circuit, as the super-ordered carbon nanotube structure at the corresponding point of the array is heated, the paraffin layer melts, converting the low light transmittance in the original solidified state into high light transmittance, achieving a significant difference in the transmitted light intensity, thereby achieving effective spatial light modulation on the addressable array.

[0052] In this embodiment, the super-aligned carbon nanotube structure includes a layer of super-aligned carbon nanotube film. Figure 4 , paste a piece of white paper with the letter "C" printed on it on the back of the dot matrix, and heat the dot with electricity. Figure 4 The display contrast of the letter "C" before and after the paraffin on the dot matrix is ​​shown. Before the paraffin layer melts, although the transmittance of the single-layer super-ordered carbon nanotube film and the glass substrate is high, the letter on the back of the glass substrate is almost not displayed due to the presence of solidified paraffin; after the paraffin melts, not only the carbon nanotubes in the super-ordered carbon nanotube film become clear, but the letter "C" behind the glass substrate is also displayed, and the carbon powder around the inkjet-printed letter can also be observed. This shows that the paraffin causes a large difference in optical transmittance of the heated dot matrix before and after melting. This is because after the paraffin melts, the refractive index decreases. The refractive index of liquid paraffin is about 1.43, while the refractive index of water is 1.33. Therefore, the refractive index of the melted paraffin is close to that of water. Therefore, the melting of paraffin reduces the reflectivity of the composite structure and increases the transmittance.

[0053] Figure 5 It is also proved that after the wax layer is melted, the transmittance of the super-aligned carbon nanotube composite structure increases significantly. The surface density in the figure refers to the mass surface density of the wax. In order to test the change of the transmittance of the super-aligned carbon nanotube composite structure before and after the wax phase change, the transmittance of the composite structure after the wax is melted is tested, and the super-aligned carbon nanotube film on the array is repeatedly turned on and off. -4 g / mm 2 The transmittance of the samples was tested repeatedly, and the results are shown in Figure 6 Furthermore, the difference in light transmittance caused by the paraffin wax switching between the solidification and melting states due to the power on and off was calculated. Figure 7 It can be seen that the surface density of paraffin is 2.81x10 -4g / mm 2 The difference in transmittance of the composite structure array can reach more than 48%. According to calculations, in the 400-900nm band, the average value of the transmittance difference reaches 57.57%, which will cause a large difference in the transmitted light intensity.

[0054] In another test experiment, a lamp was set up directly above the entire spatial light modulation device to illuminate the entire spatial light modulation device, and a piece of white paper was placed at a certain distance behind the spatial light modulation device to observe the changes in light and shadow on the white paper after the super-ordered carbon nanotube composite structure on the dot matrix in the array was periodically heated by the pulse voltage signal. The Si detector was used to test the change in light intensity after repeated power on and off. The results showed that Figure 8 Based on all the above results, a piece of frosted glass is placed on the back of the glass substrate. Combined with the characteristics of the addressable array obtained by screen printing, the control circuit is used to obtain the effect of spatial light modulation, which is the pattern of the three letters "THU". Fig. 9 It can be seen that the constructed array achieves a very clear and distinct "THU" character.

[0055] Compared with the prior art, the spatial light modulation device provided by the present invention includes a super-ordered carbon nanotube composite structure, and the super-ordered carbon nanotube-paraffin composite structure includes a carbon nanotube structure and a paraffin layer. Due to the rapid thermal response of the super-ordered carbon nanotube film, the temperature of the paraffin covering the super-ordered carbon nanotube structure also changes rapidly, thereby causing a rapid phase change. Under the control of the circuit, as the electrode heats the super-ordered carbon nanotube structure, the paraffin melts, converting the low light transmittance in the original solidified state into a high light transmittance, thereby realizing spatial light modulation. The present invention composites the super-ordered carbon nanotube film array with paraffin, and based on the rapid electrical modulation performance of the super-ordered carbon nanotube film, it can realize rapid phase change and spatial light modulation in a short time. In the present invention, the super-ordered carbon nanotube film is made into an addressable heater array by screen printing technology, and the super-ordered carbon nanotube film corresponding to the pixel points on the super-ordered carbon nanotube film array is modulated and heated by the circuit, so that the temperature of the paraffin covering the pixel points on the super-ordered carbon nanotube film can also be quickly modulated, and the spatial light modulation effect of the entire array can also be controlled.

[0056] In addition, those skilled in the art may also make other changes within the spirit of the present invention. Of course, these changes made according to the spirit of the present invention should be included in the scope of protection required by the present invention.

Claims

1. A spatial light modulation unit, characterized in that: The invention comprises a first electrode, a second electrode and a super-ordered carbon nanotube-paraffin composite structure, wherein the first electrode and the second electrode are insulated and spaced apart, and the super-ordered carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode; the super-ordered carbon nanotube-paraffin composite structure comprises a super-ordered carbon nanotube structure and a paraffin layer, wherein the paraffin layer covers the super-ordered carbon nanotube structure and is infiltrated into the super-ordered carbon nanotube structure.

2. The spatial light modulation unit according to claim 1, wherein: The paraffin layer is laid on the super-ordered carbon nanotube structure, and at least a portion of the paraffin layer is infiltrated into the super-ordered carbon nanotube structure.

3. The spatial light modulation unit according to claim 1, wherein: A part of the paraffin layer permeates into the super-ordered carbon nanotube structure, and another part covers the surface of the super-ordered carbon nanotube structure.

4. The spatial light modulation unit according to claim 1, wherein: The paraffin layer completely covers the super ordered carbon nanotube structure.

5. A spatial light modulation device, comprising: An insulating substrate has a surface; a plurality of row electrodes and a plurality of column electrodes are arranged on the surface of the insulating substrate, the plurality of row electrodes and the plurality of column electrodes are intersected and insulated, and every two adjacent row electrodes and the two adjacent column electrodes intersecting therewith form a grid; and a plurality of light modulation units, each light modulation unit is arranged corresponding to a grid, each light modulation unit includes a first electrode, a second electrode and a super-ordered carbon nanotube-paraffin composite structure, the first electrode and the second electrode are electrically connected to the row electrode and the column electrode respectively, and the heating element is electrically connected to the first electrode and the second electrode; the super-ordered carbon nanotube-paraffin composite structure includes a carbon nanotube structure and a paraffin layer, the paraffin layer covers the carbon nanotube structure, and the paraffin layer at least partially penetrates into the carbon nanotube structure.

6. The spatial light modulation device according to claim 5, characterized in that: The insulating base is an insulating transparent substrate, including one or more of a glass substrate, a resin substrate and a quartz substrate.

7. The spatial light modulation device according to claim 5, characterized in that: The super ordered carbon nanotube-paraffin composite structure is suspended above the insulating substrate and carried on the first electrode and the second electrode, thus being suspended.

8. The spatial light modulation device according to claim 5, characterized in that: A part of the paraffin layer penetrates into the gaps of the super-ordered carbon nanotube structure, and another part covers the surface of the super-ordered carbon nanotube structure.

9. The spatial light modulation device according to claim 5, characterized in that: The paraffin layer completely covers the super ordered carbon nanotube structure.

10. The spatial light modulation device according to claim 5, characterized in that: The thickness of the paraffin layer is 300 micrometers to 1 millimeter, and the thickness of the super-ordered carbon nanotube structure is 30 micrometers to 100 micrometers.

Images