Vibration detection alarm circuit, vibration detection alarm method and semiconductor device

Abstract

The invention provides a vibration detection alarm circuit, a vibration detection alarm method and semiconductor equipment, and aims to solve the problem that abnormal vibration of a cold pump cannot be detected. The vibration detection alarm circuit comprises a vibration collection circuit, a main control circuit and an alarm generation circuit. The vibration collection circuit is configured to detect mechanical vibration of a to-be-detected component and generate a detection signal according to the mechanical vibration. And the main control circuit is electrically connected with the vibration collection circuit, and is configured to receive the detection signal, obtain the vibration amplitude of the to-be-detected component and the vibration frequency in a set time according to the detection signal, and output an alarm trigger signal under the condition that the vibration amplitude is greater than a vibration amplitude threshold value and the vibration frequency in the set time reaches a vibration frequency threshold value. The alarm generation circuit is configured to trigger alarm when receiving the alarm trigger signal. The vibration detection alarm circuit can realize real-time monitoring of the operation state of the equipment, timely early warning when abnormity is found, and reasonable arrangement of the maintenance period of the equipment.

Description

Technical Field

[0001] The present application relates to the field of electronic technology, and in particular to a vibration detection alarm circuit, a vibration detection alarm method and a semiconductor device. Background Art

[0002] Cold pumps are often used in the research and production of semiconductors and integrated circuits. The working principle of the cold pump is to use the physical adsorption of gas on the ultra-low temperature surface to achieve a high vacuum effect. The low-temperature medium of the cold pump comes from the liquid helium of the compressor, and the liquid helium is transported through the reciprocating motion of the piston. The reciprocating motion of the piston will cause the vibration of the cold pump, and abnormal vibration of the cold pump may cause unexpected downtime. Summary of the invention

[0003] The embodiments of the present application provide a vibration detection alarm circuit, a vibration detection alarm method and a semiconductor device, which aim to solve the problem of unexpected downtime of a cold pump due to failure to detect abnormal vibration of the cold pump.

[0004] To achieve the above objectives, the embodiments of the present application adopt the following technical solutions:

[0005] In a first aspect, a vibration detection alarm circuit is provided. The vibration detection alarm circuit includes: a vibration collection circuit, a main control circuit, and an alarm generating circuit. The vibration collection circuit is configured to detect the mechanical vibration of the component to be detected, and generate a detection signal according to the mechanical vibration. The main control circuit is electrically connected to the vibration collection circuit, and the main control circuit is configured to receive the detection signal, and obtain the vibration amplitude of the component to be detected and the number of vibrations within a set time according to the detection signal. When the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, and the number of vibrations of the component to be detected within the set time is greater than the vibration number threshold, an alarm trigger signal is output. The alarm generating circuit is configured to trigger an alarm when the alarm trigger signal is received.

[0006] The component to be detected will generate mechanical vibration when working. For example, the component to be detected is a cold pump. The vibration collection circuit collects the mechanical vibration of the cold pump, converts the mechanical vibration into a detection signal and outputs it to the main control circuit. The preset vibration amplitude threshold and the vibration number threshold within the set time in the main control circuit are the standards for judging abnormal vibration of the cold pump. When the vibration amplitude collected by the vibration collection circuit is greater than the vibration amplitude threshold, and the vibration number within the set time is greater than the vibration number threshold, it means that the cold pump may be in an abnormal state. At this time, the alarm trigger signal is triggered and an alarm occurs. By detecting the vibration amplitude and number of the cold pump, it is judged whether the operation status of the cold pump is normal, and then maintenance personnel intervene to inspect and repair, thereby ensuring the safe and efficient operation of the cold pump.

[0007] As a possible implementation, the vibration collection circuit includes a vibration sensor and an analog-to-digital converter. The vibration sensor is connected to the component to be detected, the first end of the vibration sensor is electrically connected to the first input end of the analog-to-digital converter, and the second end of the vibration sensor is also electrically connected to the second voltage end. The first output end of the analog-to-digital converter is electrically connected to the main control circuit. The vibration sensor is configured to detect the mechanical vibration of the component to be detected and generate an analog detection signal according to the mechanical vibration. The analog-to-digital converter is configured to receive the analog detection signal and generate a detection signal according to the analog detection signal.

[0008] The vibration sensor detects mechanical vibration and converts it into an analog signal. The analog-to-digital converter converts the analog signal into a detection signal and outputs it to the main control circuit. The main control circuit can obtain the vibration amplitude and the number of vibrations within a set time based on the detection signal, and judge whether the component to be detected has abnormal vibration by comparing it with the vibration amplitude threshold and the vibration number threshold.

[0009] As a possible implementation, the vibration collection circuit also includes: a sliding rheostat and a first resistor. The first terminal of the sliding rheostat is electrically connected to the first voltage terminal, the second terminal of the sliding rheostat is electrically connected to the third terminal, and the third terminal of the sliding rheostat is electrically connected to one end of the first resistor. The other end of the first resistor is electrically connected to the second voltage terminal. The third terminal of the sliding rheostat is also electrically connected to the second input terminal of the analog-to-digital converter. The second output terminal and the third output terminal of the analog-to-digital converter are electrically connected and electrically connected to the main control circuit. The analog-to-digital converter is also configured to convert the analog voltage signal received at the second input terminal into a digital voltage signal and transmit it to the main control circuit. The main control circuit is also configured to receive the digital voltage signal and obtain the vibration amplitude threshold according to the size of the digital voltage signal. The vibration amplitude threshold is set by adjusting the size of the voltage value of the sliding rheostat connected to the analog-to-digital converter, so that the management and maintenance personnel can adjust the size of the threshold more conveniently.

[0010] As a possible implementation, the alarm generating circuit includes a switch tube and a relay. The first end of the switch tube is electrically connected to the main control circuit. The second end of the switch tube is electrically connected to the first voltage end. The switch tube is configured to be turned on under the control of the alarm trigger signal output by the main control circuit. The relay includes a coil and a contact switch, and the coil is electrically connected between the third end of the switch tube and the second voltage end. The contact switch is connected to the host station, and the contact switch is normally closed. The relay is configured to disconnect the contact switch when the coil is energized.

[0011] As a possible implementation, the vibration detection alarm circuit also includes an operation circuit. The operation circuit is electrically connected to the main control circuit, and the operation circuit is configured to reset the vibration detection alarm circuit and set a threshold value of the number of vibrations of the main control circuit within a set time. The vibration detection alarm circuit is reset by setting the operation circuit, and the number of vibrations within the set time is recalculated when the vibration amplitude threshold is reached, thereby ensuring the accuracy of the vibration detection alarm circuit.

[0012] As a possible implementation, the operation circuit includes a reset subcircuit and a setting subcircuit. The reset subcircuit includes a first button, a first capacitor and a second resistor. The first end of the first button is electrically connected to the first voltage terminal, and the second end of the first button is electrically connected to the main control circuit. One end of the first capacitor is electrically connected to the first voltage terminal, the other end of the first capacitor is electrically connected to one end of the second resistor, and the other end of the second resistor is electrically connected to the second voltage terminal. The node where the second resistor is connected to the first capacitor is also electrically connected to the main control circuit. The reset subcircuit is configured to reset the vibration detection alarm circuit when power is turned on. And, when the first button is pressed, the vibration detection alarm circuit is reset. The setting subcircuit includes a second button. The first end of the second button is electrically connected to the second voltage terminal, and the second end of the second button is electrically connected to the main control circuit. The setting subcircuit is configured to transmit the signal of the second voltage terminal to the main control circuit when the second button is pressed. The main control circuit is also configured to record the number of signals received from the second voltage terminal within a set time as a vibration number threshold. The vibration detection alarm circuit is reset by pressing the first button, and the vibration number threshold is set by pressing the second button, thereby reducing the maintenance difficulty for management personnel.

[0013] As a possible implementation, the vibration detection alarm circuit also includes a display circuit. The display circuit is electrically connected to the main control circuit, and the display circuit is configured to display the number of vibrations of the component to be detected within a set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time. The display circuit includes a display and a third resistor, the display is electrically connected to the main control circuit, and the display is also electrically connected to one end of the third resistor. The other end of the third resistor is electrically connected to the first voltage terminal. The display can display the number of vibrations of the component to be detected within a set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time, which is convenient for management and maintenance personnel to monitor the number of vibrations.

[0014] As a possible implementation, the vibration detection circuit further includes a power supply circuit. The power supply circuit includes a voltage stabilizing chip. The input end of the voltage stabilizing chip is electrically connected to the third voltage end, and the output end of the voltage stabilizing chip is electrically connected to the first voltage end. The ground end of the voltage stabilizing chip is electrically connected to the second voltage end. The power supply circuit is configured to convert the third voltage from the third voltage end into the first voltage and output it to the first voltage end.

[0015] As a possible implementation, the main control circuit also includes a main control chip, a crystal resonator, a sixth capacitor and a seventh capacitor. The first end of the crystal resonator is electrically connected to the first pin of the main control chip, and the second end of the crystal resonator is electrically connected to the second pin of the main control chip. The first end of the crystal resonator is also electrically connected to one end of the sixth capacitor, and the other end of the sixth capacitor is electrically connected to the second voltage terminal. The second end of the crystal resonator is also electrically connected to one end of the seventh capacitor, and the other end of the seventh capacitor is electrically connected to the second voltage terminal.

[0016] In a second aspect, a semiconductor device is provided. The semiconductor device includes a cold pump, a host station connected to the cold pump, and a vibration detection alarm circuit provided in any implementation of the first aspect. The vibration collection circuit includes a vibration sensor connected to the cold pump.

[0017] As a possible implementation, the vibration sensor is arranged at the cylinder of the cold pump or at a location where the cold pump is close to the mainframe. Since the vibration of the cold pump is mainly concentrated near the cylinder, the vibration sensor is arranged near the cylinder of the cold pump, and the vibration sensor is more sensitive to the vibration of the cold pump. The vibration sensor is arranged at a location where the cold pump is close to the mainframe, so that the negative impact of the vibration of the cold pump on the mainframe can be detected.

[0018] As a possible implementation, the host station includes an isolation valve and a signal interlock communication board. The alarm generating circuit includes a relay, one end of a contact switch of the relay is electrically connected to the isolation valve, and the other end of the contact switch is electrically connected to the signal interlock communication board.

[0019] It can be understood that the beneficial effects that can be achieved by the semiconductor device provided by the above embodiments of the present disclosure can refer to the beneficial effects of the vibration detection alarm circuit mentioned above, which will not be repeated here.

[0020] In a third aspect, a vibration detection alarm method is provided, which includes: detecting the mechanical vibration of the component to be detected, and generating a detection signal according to the mechanical vibration. According to the detection signal, the vibration amplitude and the number of vibrations of the component to be detected are obtained, and it is determined whether the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold. In the case where the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, it is determined whether the number of vibrations of the component to be detected reaches the vibration number threshold within a set time from the moment when the vibration amplitude is greater than the vibration amplitude threshold for the first time. If so, an alarm is triggered.

[0021] As a possible implementation method, after the alarm is triggered, the method further includes: obtaining the number of times the alarm is triggered. When the alarm is triggered for the first time and the component to be detected is normal, the vibration amplitude threshold and / or the vibration number threshold are increased, and the operation of detecting the vibration of the component to be detected is performed again. The technical effects brought about by the third aspect can refer to the technical effects brought about by different implementation methods in the first aspect, and will not be repeated here.

[0022] It can be understood that the beneficial effects that can be achieved by the vibration detection alarm method provided by the above embodiments of the present disclosure can refer to the beneficial effects of the vibration detection alarm circuit described above, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present application, the following briefly introduces the drawings required to be used in some embodiments of the present application. Obviously, the drawings described below are only drawings of some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the products involved in the embodiments of the present application, the actual process of the method, the actual timing of the signal, etc.

[0024] Figure 1 A semiconductor device structure diagram provided for some embodiments of the present application;

[0025] Figure 2 A structural diagram of a vibration detection alarm circuit provided for some embodiments of the present application;

[0026] Figure 3 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0027] Figure 4 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0028] Figure 5 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0029] Figure 6 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0030] Figure 7 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0031] Figure 8 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0032] Fig. 9 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0033] Fig.10 A structural diagram of a power supply circuit in a vibration detection alarm circuit provided in some embodiments of the present application;

[0034] Fig.11 A structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0035] Fig.12 A specific structural diagram of another vibration detection alarm circuit provided for some embodiments of the present application;

[0036] Fig.13 A semiconductor device structure diagram provided for some embodiments of the present application;

[0037] Fig.14 Another semiconductor device structure diagram provided for some embodiments of the present application;

[0038] Fig.15 Another semiconductor device structure diagram provided for some embodiments of the present application;

[0039] Fig.16 A structural diagram of a host station provided for some embodiments of the present application;

[0040] Fig.17 A flow chart of a vibration detection alarm method provided for some embodiments of the present application;

[0041] Fig.18 A flow chart of another vibration detection alarm method provided for some embodiments of the present application;

[0042] Fig.19 A flowchart of another vibration detection alarm method provided for some embodiments of the present application. DETAILED DESCRIPTION

[0043] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in some embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments provided by the present application, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present application.

[0044] In the description of the present application, it should be understood that, unless the context otherwise requires, the term "including" is interpreted as an open, inclusive meaning throughout the specification and claims, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "exemplarily" or "some examples" and the like are intended to indicate that specific features, structures, materials or characteristics associated with the embodiment or example are included in at least one embodiment or example of the present application. The schematic representation of the above terms does not necessarily refer to the same embodiment or example. In addition, the specific features, structures, materials or characteristics described may be included in any one or more embodiments or examples in any appropriate manner.

[0045] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present disclosure, unless otherwise specified, "plurality" means two or more.

[0046] “A and / or B” includes the following three combinations: A only, B only, and a combination of A and B.

[0047] The use of "adapted to" or "configured to" herein is meant to be open and inclusive language that does not exclude devices adapted or configured to perform additional tasks or steps.

[0048] Additionally, the use of “based on” is meant to be open and inclusive, as a process, step, calculation, or other action “based on” one or more stated conditions or values ​​may, in practice, be based on additional conditions or values ​​beyond those stated.

[0049] As described in the background technology, cold pumps are usually used in the research and production of semiconductors and integrated circuits. For example, semiconductor equipment includes cold pumps. When the cold pump is working, its compressor compresses helium into liquid form. During the gasification process of liquid helium on the cold head, it absorbs heat to form a low-temperature zone to adsorb and condense molecules in the air to achieve a high vacuum. The reciprocating motion of the piston to transport liquid helium will cause the vibration of the cold pump. As the service life of the cold pump increases, the aging of the piston structure will intensify the vibration. After long-term operation, the cold pump may experience abnormal vibration. Abnormal vibration of the cold pump can cause the position of wafer processing to shift or small data to exceed the standard, and may even cause the cold pump to unexpectedly shut down, affecting the subsequent operation process. Therefore, being able to accurately detect when the cold pump has abnormal vibration has become an urgent problem to be solved.

[0050] Some embodiments of the present application provide a semiconductor device, such as Figure 1As shown, the semiconductor device 400 includes a cold pump 300 and a host platform 200 connected to the cold pump 300, wherein the cold pump can make the reaction chamber of the host platform reach high vacuum when in operation, so that the semiconductor process can proceed smoothly and ensure the purity of the reaction chamber. In some examples, the semiconductor device 400 is, for example, a deposition process device, a sputtering process device, an evaporation process device, etc. These semiconductor devices all require a high vacuum environment to ensure the smooth progress of the process, and the semiconductor device requires a cold pump 300 to achieve a high vacuum environment.

[0051] The cold pump is a core and vulnerable component in semiconductor equipment. In order to better maintain and monitor the status of the host machine, it is necessary to monitor the operating status of the cold pump in real time so that abnormalities can be captured before the cold pump completely breaks down and maintenance plans can be arranged in advance.

[0052] Based on this, some embodiments of the present application also provide a vibration detection alarm circuit. The vibration detection alarm circuit 100 is connected to the cold pump and is used to detect the vibration of the cold pump. When abnormal vibration occurs, timely warning is issued so that management personnel can handle it in time and arrange maintenance.

[0053] Reference Figure 2 , Figure 2 The vibration detection alarm circuit 100 comprises a vibration collection circuit 1, a main control circuit 2 and an alarm generation circuit 3. The main control circuit 2 is electrically connected to the vibration collection circuit 1, and the alarm generation circuit 3 is electrically connected to the main control circuit 2.

[0054] The vibration collection circuit 1 is arranged on the cold pump, and the vibration collection circuit 1 is configured to detect the mechanical vibration of the component to be detected and generate a detection signal according to the mechanical vibration.

[0055] The main control circuit 2 is configured to receive the detection signal and obtain the vibration amplitude of the component to be detected and the number of vibrations within a set time according to the detection signal. When the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, and the number of vibrations of the component to be detected within the set time is greater than the vibration number threshold, an alarm trigger signal is output. The alarm generating circuit 3 is configured to trigger an alarm when receiving the alarm trigger signal.

[0056] Whether the component to be detected has abnormal vibration requires two judgments. The first is to compare the vibration amplitude of the component to be detected with the vibration amplitude threshold. When the vibration amplitude of the component to be detected is less than or equal to the vibration amplitude threshold, it is normal vibration. When the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, it is determined whether the number of vibrations of the component to be detected within the set time is greater than the vibration number threshold. If the number of vibrations of the component to be detected is greater than the vibration number threshold within the set time, it means that the component to be detected has abnormal vibration. At this time, the main control circuit 2 outputs an alarm trigger signal, and the alarm generating circuit 3 triggers an alarm when receiving the alarm trigger signal. If the number of vibrations is less than or equal to the vibration number threshold within the set time, it means that it is normal vibration.

[0057] Exemplarily, the cold pump is taken as an example of the component to be detected. Assuming that the vibration amplitude of the cold pump reaches 10 for the first time, when the number of vibrations exceeds 8 times within 5s, the cold pump is identified as having abnormal vibration. Then the vibration amplitude threshold is 10, the set time is 5s, and the vibration number threshold is 8 times. The vibration collection circuit 1 continuously collects the mechanical vibrations generated when the cold pump is working, and converts the mechanical vibrations into detection signals and outputs them to the main control circuit 2. The main control circuit 2 obtains the vibration amplitude through the detection signal. For example, the vibration amplitudes obtained are 3, 5, 5, 7, 12, etc.

[0058] When the vibration amplitude acquired by the main control circuit 2 is less than the vibration amplitude threshold, that is, when the vibration amplitude detection values ​​are 3, 5, 5, and 7 respectively, the main control circuit 2 continues to acquire the vibration amplitude value of the cold pump through the detection signal.

[0059] The main control circuit 2 continuously detects the vibration amplitude. When the vibration amplitude obtained by the main control circuit 2 is greater than the vibration amplitude threshold, that is, when the vibration amplitude detection value is 12, the main control circuit 2 obtains the vibration times of the cold pump within 5s through the detection signal. If the vibration times exceed the vibration times threshold by 8 times, and the vibration amplitude exceeds the vibration amplitude threshold each time, it is considered that the abnormal vibration of the cold pump triggers an alarm; if the vibration times do not exceed 8 times, it is considered that the vibration of the cold pump is normal, and the main control circuit 2 continues to obtain the vibration amplitude of the cold pump through the detection signal.

[0060] The vibration amplitude threshold and the vibration number threshold within the set time are the standards for judging abnormal vibration of the cold pump. When the vibration amplitude collected by the vibration collection circuit 1 is greater than the vibration amplitude threshold, and the vibration number within the set time is greater than the vibration number threshold, it means that the cold pump may be in an abnormal state. At this time, the alarm trigger signal is triggered and an alarm occurs. The detection of abnormal vibration adopts two standards, vibration amplitude and frequency, to consider, avoiding false alarm phenomena such as only one vibration amplitude greater than the vibration amplitude threshold, but the subsequent vibration returns to normal, making the vibration detection more accurate. By setting a vibration detection alarm circuit to detect the operating status of the cold pump in real time, and detecting the vibration amplitude and number of the cold pump to make a judgment on whether the operating status of the cold pump is normal, the abnormality of the cold pump can be discovered in time and accurately, so that maintenance personnel can intervene to check and repair, thereby ensuring the safe and efficient operation of the cold pump, avoiding the influence of abnormal vibration of the cold pump on the process operation accuracy of the main machine, and avoiding the influence of complete shutdown of the cold pump on subsequent operation processes.

[0061] As a possible implementation, refer to Figure 3 , Figure 3 The internal connection of the vibration detection alarm circuit is shown. The vibration collection circuit 1 includes a vibration sensor 11 and an analog-to-digital converter 12. The vibration sensor 11 is connected to the component to be detected, the first end of the vibration sensor 11 is electrically connected to the first input end 12b of the analog-to-digital converter 12, the first end of the vibration sensor 11 is also electrically connected to the first voltage end VCC, and the second end of the vibration sensor 11 is electrically connected to the second voltage end GND. The first output end 12f of the analog-to-digital converter 12 is electrically connected to the main control circuit 2, and the first input end 12a of the analog-to-digital converter 12 is electrically connected to the second voltage end GND.

[0062] The vibration sensor 11 is configured to detect the mechanical vibration of the component to be detected and generate an analog detection signal according to the mechanical vibration. The analog-to-digital converter 12 is configured to receive the analog detection signal and generate a detection signal according to the analog detection signal. The main control circuit 2 is configured to receive the detection signal and obtain the vibration amplitude of the component to be detected according to the magnitude of the detection signal. The vibration times of the component to be detected are obtained according to the number of valid levels of the detection signal within a set time.

[0063] Exemplarily, the cold pump is taken as an example of the component to be detected. The vibration sensor 11 converts the mechanical vibration generated when the cold pump is working into an analog detection signal and inputs it into the analog-to-digital converter 12. The analog detection signal is an analog signal, which is converted into a detection signal by the analog-to-digital converter 12 and output to the main control circuit 2. The detection signal is a digital signal. The main control circuit 2 can know the number of vibrations of the cold pump within the set time according to the number of valid levels of the detection signal within the set time. The voltage of the analog detection signal can be converted into a binary number, and the size of the binary number reflects the vibration amplitude of the cold pump.

[0064] For example, the analog detection signal output by the vibration sensor is an analog signal with a continuous waveform. The analog detection signal is converted into a digital signal through an analog-to-digital converter. The digital signal is used as a detection signal. The waveform of the detection signal is, for example, alternating between level "1" (valid level) and level "0" (invalid level). When level "1" appears, it indicates that the cold pump is vibrating. The main control circuit can obtain the number of vibrations of the cold pump within the set time based on the number of occurrences of level "1" in the detection signal within the set time. The voltage of the analog detection signal can represent the vibration amplitude. The main control circuit obtains the vibration amplitude of the cold pump based on the size of the binary number converted from the voltage of the analog detection signal. For example, the analog detection signals "3" and "7" are converted into detection signals and become "11" and "111" expressed in binary form, which represents the vibration amplitude of the component to be detected represented by the detection signal.

[0065] In some examples, the vibration sensor is a ceramic piezoelectric vibration sensor, and the analog-to-digital converter 12 is an AD0832 dual-channel A / D converter.

[0066] As a possible implementation, Figure 4 As shown, the vibration collection circuit 1 also includes a sliding rheostat 13 and a first resistor 14. The first terminal 131 of the sliding rheostat 13 is electrically connected to the first voltage terminal VCC, the second terminal 132 of the sliding rheostat 13 is electrically connected to the third terminal 133, and the third terminal 133 of the sliding rheostat 13 is electrically connected to one end of the first resistor 14. The other end of the first resistor 14 is electrically connected to the second voltage terminal GND. The third terminal 133 of the sliding rheostat 13 is also electrically connected to the second input terminal 12c of the analog-to-digital converter 12. The second output terminal 12g and the third output terminal 12h of the analog-to-digital converter 12 are electrically connected, and are electrically connected to the main control circuit 2. The first input terminal 12a of the analog-to-digital converter 12 and the fourth input terminal 12d of the analog-to-digital converter are both electrically connected to the second voltage terminal GND.

[0067] The analog-to-digital converter 12 is further configured to convert the analog voltage signal received by the second input terminal 12c into a digital voltage signal and transmit it to the main control circuit 2. The main control circuit 2 is further configured to receive the digital voltage signal and obtain the vibration amplitude threshold according to the magnitude of the digital voltage signal.

[0068] The third terminal 133 of the sliding rheostat 13 can slide to change the effective resistance value of the sliding rheostat 13 connected to the circuit (the resistance between the third terminal 133 and the first terminal 131). The analog voltage signal after the sliding rheostat 13 and the first resistor 14 are divided is input to the analog-to-digital converter 12. After being processed by the analog-to-digital converter 12, the analog voltage signal is converted into a digital voltage signal, and the size of the digital voltage signal determines the size of the vibration amplitude threshold. By adjusting the size of the effective resistance of the sliding rheostat 13 connected to the circuit, the size of the voltage signal connected to the analog-to-digital converter 12 can be adjusted, and then the size of the vibration amplitude threshold can be adjusted, thereby realizing the adjustment of the vibration sensitivity of the vibration collection circuit. The adjustable range of the resistance of the sliding rheostat 13 is 100kΩ-200kΩ, for example, 120kΩ, 150kΩ, 180kΩ. The resistance value of the first resistor 14 is 5kΩ-15kΩ, for example, 10kΩ. The main control circuit receives the digital voltage signal and the detection signal output by the analog-to-digital converter, and determines whether the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold by comparing the magnitudes of the digital voltage signal and the detection signal in conjunction with the programming logic.

[0069] By setting the sliding rheostat 13, before performing vibration detection on the component to be detected, during the debugging stage, the management personnel can set the vibration amplitude threshold by adjusting the sliding rheostat 13, or when it is found that the vibration amplitude threshold is not appropriate during the vibration detection process, the vibration amplitude threshold can be modified by adjusting the sliding rheostat, so that the management personnel can adjust the size of the vibration amplitude threshold more conveniently.

[0070] Combination Fig.12 , the vibration collection circuit 1 also includes a fourth resistor 15 and an eighth capacitor 16. The first end 12b of the vibration sensor 12 is also electrically connected to one end of the fourth resistor 15, and the other end of the fourth resistor 15 is electrically connected to the first voltage terminal VCC. The eighth capacitor 16 is electrically connected between the first end and the second end of the vibration sensor 11. Among them, the resistance value of the fourth resistor 15 is 5kΩ-15kΩ, for example, 10kΩ, which is used for voltage division to reduce the voltage output to the vibration sensor 11 to prevent the voltage output to the vibration sensor 11 from being too large and damaging the vibration sensor 11. The capacitance value of the eighth capacitor 16 is 8μF-12μF, for example, 10μF, which is used to filter clutter and improve the accuracy of detection.

[0071] As a possible implementation, refer to Figure 5 , Figure 5 The figure shows the internal connection structure of another vibration detection alarm circuit provided by an embodiment of the present application. Figure 5The alarm generating circuit 3 is electrically connected to the main control circuit 2 and is also electrically connected to an alarm device, such as the host station 200, or the alarm device is a component in the host station, or the alarm device is a device that is independent of the host station 200 and can generate an alarm. Specifically, Figure 5 The alarm generating circuit 3 shown includes a switch tube 31 and a relay 32. The first end of the switch tube 31 is electrically connected to the main control circuit 2. The second end of the switch tube 31 is electrically connected to the first voltage terminal VCC. The relay 32 includes a coil 321 and a contact switch 322, and the coil 321 is electrically connected between the third end of the switch tube 31 and the second voltage terminal GND. The contact switch 322 is connected to the alarm device (such as the host station) 200, and the contact switch 322 is normally closed. The switch tube 31 is configured to be turned on under the control of the alarm trigger signal output by the main control circuit 2. The relay 32 is configured so that when the coil 321 is energized, the contact switch 322 is disconnected.

[0072] When the component to be detected is in normal vibration, the main control circuit 2 does not output an alarm trigger signal, the switch tube 31 is turned off, and the contact switch 322 of the relay 32 is normally closed, maintaining the connection with the host station 200. When the main control circuit 2 determines that the component to be detected is in abnormal vibration and outputs an alarm trigger signal, the switch tube 31 is turned on, so that the voltage signal of the first voltage terminal VCC is transmitted to the relay 32. At this time, the coil 321 of the relay 32 is energized, so that the connection between the contact switch 322 and the host station 200 is disconnected, and the host station 200 alarms.

[0073] For example, the cold pump is used as an example for explanation. When the vibration detection alarm circuit detects that the cold pump is in normal vibration, the main control circuit 2 does not output an alarm trigger signal, the switch tube 31 does not reach the conduction voltage, which is equivalent to an open circuit, and no current passes through the coil 321 of the relay 32. Since the contact switch 322 of the relay 32 is normally closed, the contact switch 322 of the relay 32 is normally connected to the main station 200. When the vibration detection alarm circuit detects that the cold pump is in abnormal vibration, the main control circuit 2 sends a trigger alarm signal, the switch tube 31 is turned on, the coil 321 of the relay 32 is energized, and the contact switch 322 of the relay 32 is disconnected from the main station 200 due to the influence of electromagnetic induction, and the main station 200 alarms.

[0074] Exemplarily, the switch tube may be a triode or a field effect tube. When the switch tube is a triode, the first end of the switch tube is the base of the triode, the second end of the switch tube is one of the emitter and the collector of the triode, and the third end of the switch tube is the other of the emitter and the collector of the triode. When the switch tube is a field effect tube, the first end of the switch tube is the gate of the field effect tube, the second end of the switch tube is one of the source and the drain of the field effect tube, and the third end of the switch tube is the other of the source and the drain of the field effect tube.

[0075] Exemplarily, the switch may be a P-type switch tube or an N-type switch tube, and when the switch tube is a P-type switch tube, the alarm trigger signal is a low level signal, and when the switch tube is an N-type switch tube, the alarm trigger signal is a high level signal.

[0076] In some examples, such as Fig.12 As shown, the alarm generating circuit 3 also includes a diode 34 and a fifth resistor 33. The fifth resistor 33 is electrically connected between the main control circuit 2 and the first end of the switch tube 31. The anode of the diode 34 is electrically connected to the second voltage terminal GND, and the cathode of the diode 34 is electrically connected to the third end of the switch tube 31.

[0077] The fifth resistor 33 is arranged between the main control circuit 2 and the first end of the switch tube 31, wherein the resistance value of the fifth resistor is 2kΩ-5kΩ, for example, 3kΩ. It plays a voltage dividing role to prevent the switch tube from being directly connected to the main control circuit, and can prevent the abnormal voltage output by the main control circuit from damaging the switch tube. The diode 34 has unidirectional conductivity to prevent the third end of the switch tube from being directly connected to the second voltage terminal GND, and is used to protect the switch tube 31.

[0078] As a possible implementation, the present application also provides another vibration detection alarm circuit, which is composed of Figure 6 See Figure 6 The vibration detection alarm circuit 100 includes a vibration collection circuit 1, a main control circuit 2, an alarm generating circuit 3 and an operation circuit 4. The main control circuit 2 is electrically connected to the vibration collection circuit 1, the alarm generating circuit 3 is electrically connected to the main control circuit 2, and the alarm generating circuit 3 is also connected to the host station 200. The operation circuit 4 is electrically connected to the main control circuit 2.

[0079] The operation circuit 4 is configured to reset the main control circuit 2 and set the vibration number threshold of the main control circuit 2 within the set time. The vibration detection alarm circuit 100 is reset by setting the operation circuit 4, for example, the data received by the main control circuit is reset to receive the detection signal and the digital signal again, and the data stored in the main control circuit is reset to reset the vibration amplitude threshold and the vibration number threshold within the set time, and recalculate the vibration number within the set time when the vibration amplitude threshold is reached, thereby ensuring the accuracy of the vibration detection alarm circuit 100. By setting the vibration number threshold within the set time through the operation circuit 4, the management personnel can set or adjust the vibration number threshold as needed, so that the judgment of abnormal vibration is more accurate, avoiding the false alarm phenomenon that the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold once or several times and then returns to normal, and reducing the contingency.

[0080] Specifically, Figure 7The operation circuit 4 includes a reset subcircuit 41 and a setting subcircuit 42. The reset subcircuit 41 is used to reset the vibration detection alarm circuit, and the setting subcircuit 42 is used to set the vibration number threshold within a set time.

[0081] Reference Figure 7 , the reset subcircuit 41 includes a first button 411, a first capacitor 412 and a second resistor 413. The first end of the first button 411 is electrically connected to the first voltage terminal VCC, and the second end of the first button 411 is electrically connected to the main control circuit 2. One end of the first capacitor 412 is electrically connected to the first voltage terminal VCC, the other end of the first capacitor 412 is electrically connected to one end of the second resistor 413, and the other end of the second resistor 413 is electrically connected to the second voltage terminal GND. The node where the second resistor 413 is connected to the first capacitor 412 is also electrically connected to the main control circuit 2. The reset subcircuit 41 is configured to reset the vibration detection alarm circuit when power is on. And, when the first button 411 is pressed, the vibration detection alarm circuit is reset. The capacitance value of the first capacitor 412 is 5μF-15μF, for example, 10μF; the resistance value of the second resistor 413 is 5kΩ-15kΩ, for example, 10kΩ.

[0082] When the vibration detection alarm circuit is powered on, for the first capacitor 412, the voltage of the two plates of the first capacitor 412 increases from zero to one, and the change of the voltage of the two plates generates a charging current in the circuit, and the voltage of the first voltage terminal VCC can be transmitted to the main control circuit through the first capacitor 412, and the main control circuit 2 receives a high-level signal, and the entire vibration detection alarm circuit is reset. When the vibration detection alarm circuit has been stably powered on, due to the nature of the capacitor's AC and DC isolation, the first capacitor 412 is equivalent to a disconnected switch, and the voltage of the first voltage terminal VCC cannot be transmitted through the first capacitor, and the main control circuit 2 cannot receive a high-level signal. The vibration detection alarm circuit ends the reset and officially starts working, that is, the vibration collection circuit 1 starts to collect mechanical vibrations. When the vibration collection circuit 1 is in operation, after the manager presses the first button 411, the two ends of the first button 411 are connected, and the voltage of the first voltage terminal VCC is transmitted to the main control circuit 2 through the first button 411, and the main control circuit 2 receives a high-level signal, and the vibration detection alarm circuit is reset, and the number of vibrations within the set time is considered by recalculating the first detection signal that reaches the vibration amplitude threshold.

[0083] Still take the cold pump as an example for explanation. For example, assuming that the vibration amplitude of the cold pump reaches 10 for the first time, when the number of vibrations exceeds 8 times within 5s, the cold pump is identified as having abnormal vibration. Then the vibration amplitude threshold is 10, the set time is 5s, and the vibration number threshold is 8 times. When the main control chip 2 learns through the detection signal that the vibration amplitude of the cold pump is 13, the vibration amplitude has exceeded the vibration amplitude threshold of 10 at this time, and the number of vibrations of the cold pump within the set time should be compared with the vibration number threshold, but the manager presses the first button 411 at this time. The vibration detection alarm circuit is reset, and the number of vibrations of the cold pump within the set time from the cold pump vibration amplitude of 13 is no longer considered, but the cold pump vibration amplitude is restarted. It is not until the new vibration amplitude is detected that it exceeds the vibration amplitude threshold that the number of vibrations of the cold pump within the set time is considered again. Or when the host station 200 issues an alarm, the manager presses the first button 411, the vibration detection alarm circuit is reset, and the host station 200 ends the alarm.

[0084] Reference Figure 7 The setting subcircuit 42 includes a second button 421. The first end of the second button 421 is electrically connected to the second voltage terminal GND, and the second end of the second button 421 is electrically connected to the main control circuit 2. The setting subcircuit 42 is configured to transmit the signal of the second voltage terminal GND to the main control circuit 2 when the second button 421 is pressed. The main control circuit 2 is also configured to record the number of signals received from the second voltage terminal GND within a set time as a vibration number threshold.

[0085] When setting the vibration number threshold, each time the manager presses the second button 421, a second voltage terminal GND signal is transmitted to the main control circuit 2. The main control circuit 2 records the number of received second voltage terminal GND signals, and sets the number finally recorded as the vibration number threshold. For example, if the second button 421 is pressed 8 times, the vibration number threshold is set to 8 times. By setting the second button 421, the manager can perform the counting operation by pressing the second button 421, and the setting of the vibration number threshold is realized in combination with the control logic in the main control circuit. The manager can set or modify the vibration number threshold in real time as needed, and the operation is convenient and operability is strong.

[0086] In order to more intuitively view the vibration frequency of the component to be detected, some embodiments of the present application provide a vibration detection alarm circuit including a display circuit. Figure 8 As shown, Figure 8 The vibration detection circuit is shown in FIG. Figure 8The vibration detection alarm circuit 100 includes a vibration collection circuit 1, a main control circuit 2, an alarm generating circuit 3, an operation circuit 4 and a display circuit 5. The main control circuit 2 is electrically connected to the vibration collection circuit 1, the alarm generating circuit 3 is electrically connected to the main control circuit 2, and the alarm generating circuit 3 is also connected to the host station 200. The operation circuit 4 is electrically connected to the main control circuit 2. The display circuit 5 is electrically connected to the main control circuit 2.

[0087] Reference Fig. 9 The display circuit 5 includes a display 51 and a third resistor 52. The display 51 is electrically connected to the main control circuit 2, and the display 51 is also electrically connected to one end of the third resistor 52. The other end of the third resistor 52 is electrically connected to the first voltage terminal. The resistance value of the third resistor 52 is 200Ω-500Ω, for example, 300Ω. The display circuit 5 is configured to display the number of vibrations of the component to be detected within a set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time. The display 51 can display the number of vibrations of the component to be detected within a set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time, so that the management and maintenance personnel can intuitively view the number of vibrations of the component to be detected and monitor the number of vibrations.

[0088] In some embodiments, the vibration detection alarm circuit further includes a power supply circuit, which is electrically connected to the third voltage terminal and the first voltage terminal, and is configured to convert the third voltage from the third voltage terminal into the first voltage and transmit it to the first voltage terminal. Other circuits in the vibration detection alarm circuit, such as the vibration collection circuit 1, the main control circuit 2, the alarm generation circuit 3, the operation circuit 4, and the display circuit 5, are all electrically connected to the first voltage terminal, that is, the power supply of the entire vibration detection alarm circuit comes from the power supply circuit. Fig.10 , Fig.10 The composition and connection of the power supply circuit 6 are shown. Fig.10 The power supply circuit 6 in the figure includes a voltage stabilizing chip 61, a second capacitor 62, a third capacitor 63, a fourth capacitor 64 and a fifth capacitor 65.

[0089] The input terminal 61a of the voltage stabilizing chip 61 is electrically connected to the third voltage terminal VSS, the output terminal 61b of the voltage stabilizing chip 61 is electrically connected to the first voltage terminal VCC, and the ground terminal 61c of the voltage stabilizing chip 61 is electrically connected to the second voltage terminal GND. One end of the second capacitor 62 is electrically connected to the input terminal of the voltage stabilizing chip 61, and the other end of the second capacitor 62 is electrically connected to the second voltage terminal GND. One end of the third capacitor 63 is electrically connected to the input terminal of the voltage stabilizing chip 61, and the other end of the third capacitor 63 is electrically connected to the second voltage terminal GND. One end of the fourth capacitor 64 is electrically connected to the output terminal of the voltage stabilizing chip 61, and the other end of the fourth capacitor 64 is electrically connected to the second voltage terminal GND. One end of the fifth capacitor 65 is electrically connected to the output terminal of the voltage stabilizing chip 61, and the other end of the fifth capacitor 65 is electrically connected to the second voltage terminal GND. The power supply circuit 6 is configured to convert the third voltage from the third voltage terminal VSS into a first voltage and output it to the first voltage terminal.

[0090] The power supply circuit 6 converts the power supply voltage that cannot be directly used into a power supply voltage that can be used by the vibration detection alarm circuit, thereby enhancing the applicability of the vibration detection alarm circuit. For example, most semiconductor equipment machines are equipped with a 12V voltage power supply, but the power supply voltage of the vibration detection alarm circuit only needs 5V. The power supply circuit 6 can convert the 12V voltage at the third voltage terminal into a 5V voltage output at the first voltage terminal to power the vibration detection alarm circuit.

[0091] In the power supply circuit 6, the capacitance value of the second capacitor 62 is greater than the capacitance value of the third capacitor 63. The second capacitor 62 is a large capacitor, and the capacitance value of the second capacitor 62 is 450μF-500μF, for example, 470μF, which is used to filter the low-frequency interference of the input end. The third capacitor 63 is a small capacitor, and the capacitance value of the third capacitor 63 is 80nF-120nF, for example, 100nF, which is used to filter the high-frequency interference of the input end. The fourth capacitor 64 and the fifth capacitor 65 are used to filter the output end to ensure the stability of the power supply of the power supply circuit 6. The capacitance value of the fourth capacitor 64 is 80μF-120μF, for example, 100μF, and the fifth capacitor value is 80nF-120nF, for example, 100nF.

[0092] As a possible implementation, Fig.11As shown, the main control circuit 2 includes a main control chip 21, a crystal resonator 22, a sixth capacitor 23 and a seventh capacitor 24. The first end of the crystal resonator 22 is electrically connected to the first pin 21a of the main control chip 21, and the second end of the crystal resonator 22 is electrically connected to the second pin 21b of the main control chip 21. The first end of the crystal resonator 22 is also electrically connected to one end of the sixth capacitor 23, and the other end of the sixth capacitor 23 is electrically connected to the second voltage terminal GND. The second end of the crystal resonator 22 is also electrically connected to one end of the seventh capacitor 24, and the other end of the seventh capacitor 24 is electrically connected to the second voltage terminal GND. The crystal resonator 22 is used to generate a frequency to provide necessary pulses for the operation of the main control chip 21. The starting frequency of the crystal resonator 22 is 10Mhz-15Mhz, for example, 12Mhz. The capacitance value of the sixth capacitor 23 is 25pF-25pF, for example, 30pF, and the capacitance value of the seventh capacitor 24 is 25pF-25pF, for example, 30pF. The sixth capacitor 23 and the seventh capacitor 24 enable the crystal resonator 22 to oscillate more efficiently.

[0093] As a possible implementation, Fig.12 As shown, Fig.12 The specific structure of a vibration detection alarm circuit provided by an embodiment of the present application is shown. Fig.12 The vibration detection alarm circuit includes a vibration collection circuit 1, a main control circuit 2, an alarm generation circuit 3, an operation circuit 4, a display circuit 5 and a power supply circuit 6.

[0094] The main control circuit 2 includes a main control chip 21, a crystal resonator 22, a sixth capacitor 23 and a seventh capacitor 24. The first end of the crystal resonator 22 is electrically connected to the first pin 21a of the main control chip 21. The second end of the crystal resonator 22 is electrically connected to the second pin 21b of the main control chip 21. The first end of the crystal resonator 22 is also electrically connected to one end of the sixth capacitor 23, and the other end of the sixth capacitor 23 is electrically connected to the second voltage terminal GND. The second end of the crystal resonator 22 is also electrically connected to one end of the seventh capacitor 24, and the other end of the seventh capacitor 24 is electrically connected to the second voltage terminal GND.

[0095] The vibration collection circuit 1 includes a vibration sensor 11, an analog-to-digital converter 12, a sliding rheostat 13, an eighth capacitor 16, a first resistor 14 and a fourth resistor 15. The vibration sensor 11 is connected to the component to be detected, and the first end of the vibration sensor 11 is electrically connected to the first input end 12b of the analog-to-digital converter 12. The first output end 12f of the analog-to-digital converter 12 is electrically connected to the fifth pin 21e of the main control chip 21. The first end of the vibration sensor 11 is also electrically connected to one end of the fourth resistor 15, and the other end of the fourth resistor 15 is electrically connected to the first voltage end VCC. The second end of the vibration sensor 11 is electrically connected to the second voltage end GND, and the fourth capacitor 15 is electrically connected between the first end and the second end of the vibration sensor 11. The first terminal of the sliding rheostat 13 is electrically connected to the first voltage end VCC, the second terminal of the sliding rheostat 13 is electrically connected to the third terminal, and the third terminal of the sliding rheostat 13 is electrically connected to one end of the first resistor 14. The other end of the first resistor 14 is electrically connected to the second voltage end GND. The third terminal of the sliding resistor 13 is also electrically connected to the second input terminal 12c of the analog-to-digital converter 12. The second output terminal 12g of the analog-to-digital converter 12 is electrically connected to the third output terminal 12h and is also electrically connected to the sixth pin 21f of the main control chip 21.

[0096] The alarm generating circuit 3 includes a switch tube 31, a relay 32, a fifth resistor 33 and a diode 34. The first end of the switch tube 31 is electrically connected to the seventh pin 21g of the main control chip 21. The second end of the switch tube 31 is electrically connected to the first voltage terminal VCC. The relay 32 includes a coil 321 and a contact switch 322, and the coil 321 is electrically connected between the third end of the switch tube 31 and the second voltage terminal GND. The contact switch 322 is connected to the host station 200, and the contact switch 322 is normally closed. The fifth resistor 33 is electrically connected between the seventh pin 21g of the main control chip 21 and the first end of the switch tube 31. The positive electrode of the diode 34 is electrically connected to the second voltage terminal GND, and the negative electrode of the diode 34 is electrically connected to the third end of the switch tube 31.

[0097] The operation circuit 4 includes a reset subcircuit 41 and a setting subcircuit 42. The reset subcircuit 41 includes a first button 411, a first capacitor 412, and a second resistor 413. The first end of the first button 411 is electrically connected to the first voltage terminal VCC. The second end of the first button 411 is electrically connected to the third pin 21c of the main control chip 421. One end of the first capacitor 412 is electrically connected to the first voltage terminal VCC, and the other end of the first capacitor 412 is electrically connected to one end of the second resistor 413. The other end of the second resistor 413 is electrically connected to the second voltage terminal GND, and the node where the second resistor 413 is connected to the first capacitor 412 is also electrically connected to the third pin 21c of the main control chip 21. The setting subcircuit 42 includes a second button 421, the first end of the second button 421 is electrically connected to the second voltage terminal GND, and the second end of the second button 421 is electrically connected to the fourth pin 21d of the main control chip 21.

[0098] The display circuit 5 includes a display 51 and a third resistor 52. The display 51 includes a plurality of display ports and a power port. The main control chip 21 includes a plurality of display pins 21h. The plurality of display ports of the display 21 are electrically connected to the plurality of display pins of the main control chip 21 in a one-to-one correspondence. One end of the third resistor 52 is electrically connected to the power port, and the other end of the third resistor 52 is electrically connected to the first voltage terminal VCC.

[0099] The power supply circuit 6 includes a voltage stabilizing chip 61, a second capacitor 62, a third capacitor 63, a fourth capacitor 64 and a fifth capacitor 65. The input terminal 61a of the voltage stabilizing chip 61 is electrically connected to the third voltage terminal VSS, the output terminal 61b of the voltage stabilizing chip 61 is electrically connected to the first voltage terminal VCC, and the ground terminal 61c of the voltage stabilizing chip 61 is electrically connected to the second voltage terminal GND. One end of the second capacitor 62 is electrically connected to the input terminal of the voltage stabilizing chip 61, and the other end of the second capacitor 62 is electrically connected to the second voltage terminal GND. One end of the third capacitor 63 is electrically connected to the input terminal of the voltage stabilizing chip 61, and the other end of the third capacitor 63 is electrically connected to the second voltage terminal GND. One end of the fourth capacitor 64 is electrically connected to the output terminal of the voltage stabilizing chip 61, and the other end of the fourth capacitor 64 is electrically connected to the second voltage terminal GND. One end of the fifth capacitor 65 is electrically connected to the output terminal of the voltage stabilizing chip 61, and the other end of the fifth capacitor 65 is electrically connected to the second voltage terminal GND.

[0100] It should be noted that the contact switch 322 of the relay 32 in this embodiment and the accompanying drawings is a single-pole double-throw switch, one of which is set in the circuit connected to the host station 200 and is a normally closed switch. Only when the coil 321 of the relay 32 is energized, the switch will be disconnected and attracted to the other switch.

[0101] The following will be combined Fig.12, taking the cold pump as the component to be detected as an example, the entire working process of the vibration detection circuit is explained.

[0102] First, the system is powered on, the power supply circuit 6 converts the third voltage from the third voltage terminal VSS into the first voltage and outputs it to the first voltage terminal VCC, each sub-circuit receives the voltage signal from the first voltage terminal VCC, and the reset sub-circuit 41 realizes automatic resetting of the vibration detection alarm circuit.

[0103] Next, the administrator sets the vibration amplitude threshold and the vibration number threshold. The administrator sets the appropriate vibration amplitude threshold by adjusting the sliding rheostat 13 and sets the appropriate vibration number threshold by pressing the second button 421. At this time, the main control chip 21 stores the set vibration amplitude threshold and the vibration number threshold within the set time.

[0104] When the detection starts, the vibration sensor 11 collects the mechanical vibration of the cold pump and generates an analog detection signal according to the mechanical vibration. The analog-to-digital converter 12 generates a detection signal from the analog detection signal. When the vibration amplitude of the cold pump is greater than the vibration amplitude threshold for the first time, and the number of vibrations within the set time is greater than the vibration number threshold, the main control chip 21 sends an alarm trigger signal, and the switch tube 31 is turned on under the control of the alarm trigger signal, and the signal of the first voltage terminal VCC is transmitted to the relay 32, the coil 321 of the relay 32 is energized, and the contact switch 322 of the relay 32 is disconnected from the main station 200, and the main station 200 alarms.

[0105] The manager receives the alarm signal, checks the cold pump, and after handling the abnormal situation, presses the first button 411 to reset the vibration detection alarm circuit, the main control chip 21 stops sending the alarm trigger signal, the switch tube 31 is turned off, and the contact switch 322 of the relay 32 is restored to be connected with the main station 200, the alarm is released, and the vibration detection alarm circuit restarts detection.

[0106] In some embodiments, Fig.13 As shown, the vibration alarm detection circuit 100 is connected to the host station 200, and the vibration alarm detection circuit includes a cold pump 300 and other circuits, wherein the vibration sensor 11 is arranged on the cold pump 300. Specifically, the setting position of the vibration sensor in the vibration detection alarm circuit is as follows: Fig.14 and Fig.15 shown.

[0107] Reference Fig.14 , exemplarily, the vibration sensor 11 is disposed near the cylinder 410 of the cold pump 400. Since the main part of the vibration of the cold pump 400 is concentrated near the cylinder 410, the vibration sensor is disposed near the cylinder 410 of the cold pump 400, and the vibration sensor 11 is more sensitive to the vibration detection of the cold pump 400. Fig.15For example, the vibration sensor 11 is arranged at a position where the cold pump 400 is close to the main unit 200. The vibration sensor 11 is arranged at this position, which can not only ensure the detection of the vibration state of the cold pump, but also take into account the detection of the negative impact of the vibration of the cold pump 400 on the main unit 200.

[0108] As a possible implementation, Fig.16 As shown, Fig.16 The components and internal connections of the host station 200 are shown. Fig.16 The host station 200 includes an isolation valve 201 and a signal interlock communication board 202. One end of the contact switch 322 of the relay 32 of the alarm generating circuit 3 is electrically connected to the isolation valve 201, and the other end of the contact switch 322 of the alarm generating circuit 3 is electrically connected to the signal interlock communication board 202. A large number of chambers are arranged inside the host station 200, and each chamber is independent and used to be connected to different electrical equipment. Each chamber is provided with an isolation valve 201 and a signal interlock communication board 202. The existence of the isolation valve 201 and the signal interlock communication board 202 means that when the contact switch 322 of the relay 32 is disconnected from the host station 200, only the chamber originally connected to the relay 32 is affected, and the chamber sends out an alarm. During the alarm process, the process of other chambers will not be interrupted, thereby ensuring the smooth process operation of the semiconductor equipment.

[0109] Some embodiments of the present application also provide a vibration detection alarm method, such as Fig.17 The vibration detection alarm method includes:

[0110] S-100: Detect mechanical vibration of the component to be detected, and generate a detection signal according to the mechanical vibration.

[0111] Reference Fig.12 The vibration sensor is fixed at a suitable position of the cold pump. The vibration sensor 11 collects the mechanical vibration of the component to be detected and generates an analog detection signal according to the mechanical vibration. The analog-to-digital converter 12 receives the analog detection signal and generates a detection signal according to the analog detection signal.

[0112] S-110: receiving a detection signal, and obtaining the vibration amplitude and vibration frequency of the component to be detected according to the detection signal, and determining whether the vibration amplitude of the component to be detected is greater than a vibration amplitude threshold.

[0113] Reference Fig.12 The main control chip 21 in the main control circuit receives the detection signal and obtains the vibration times of the cold pump within the set time according to the number of valid levels of the detection signal within the set time. The voltage of the analog detection signal can be converted into a binary number, and the size of the binary number reflects the vibration amplitude of the cold pump.

[0114] If yes, that is, if the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, then step S-120 is executed. If no, that is, if the vibration amplitude of the component to be detected does not exceed the vibration amplitude threshold, then the process returns to step S-100.

[0115] S-120: Determine whether the vibration times of the component to be detected reaches the vibration times threshold within the set time starting from the moment when the vibration amplitude is greater than the vibration amplitude threshold for the first time.

[0116] The main control chip 21 determines whether the vibration times of the component to be detected have reached the vibration times threshold within the set time starting from the moment when the vibration amplitude is greater than the vibration amplitude threshold for the first time. If so, that is, the vibration times of the component to be detected have reached the vibration times threshold within the set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time, and step S-130 is executed. If not, that is, the vibration times of the component to be detected have not reached the vibration times threshold within the set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time, then the process returns to step S-100.

[0117] S-130: Alarm triggered.

[0118] Reference Fig.12 , the main control chip 21 outputs an alarm trigger signal, and the alarm generating circuit 3 is disconnected from the host station 200 under the action of the alarm trigger signal, and the host station 200 alarms. The manager presses the first button 411 to reset, end the alarm, and check the component to be detected.

[0119] The vibration emitted by the component to be detected is converted into a detection signal that can be recognized by the machine. Since the detection signal is a digital signal, the main control chip can obtain the vibration amplitude and vibration frequency of the component to be detected according to the detection signal. There are two conditions that need to be met to trigger the alarm of the vibration detection alarm method provided in the present application, namely, the vibration amplitude obtained by the detection signal must be greater than the vibration amplitude threshold and when the vibration amplitude of the detection signal is greater than the vibration amplitude threshold, the number of vibrations obtained by the detection signal within the set time must be greater than the vibration frequency threshold. The number of effective level times of the detection signal within a certain range can reflect the number of vibrations of the component to be detected within the set time. That is, when both S-110 and S-120 are met, the alarm is triggered.

[0120] In some embodiments, before S-100, the vibration detection alarm method further includes: steps S-101 and S-102 of setting a vibration amplitude threshold and a vibration number threshold within a set time.

[0121] S-101. Set the vibration amplitude threshold.

[0122] Exemplarily, before formally conducting vibration detection, the manager adjusts the sliding rheostat to adjust the sensitivity of the vibration collection circuit and sets the vibration amplitude threshold, as follows: fix the vibration sensor on the cold pump, enter the debugging mode, set the vibration number threshold to 1, adjust the position of the third terminal of the sliding rheostat, and when the cold pump is in severe vibration, find the critical position of the third terminal triggering the alarm, and adjust the position of the third terminal to a position that just does not trigger the alarm. At this time, after the sliding rheostat and the first resistor divide the voltage, the voltage of the second terminal is transmitted to the analog-to-digital converter as an analog voltage signal, and the analog-to-digital converter converts the analog voltage signal into a digital voltage signal. The main control chip obtains the vibration amplitude threshold according to the size of the signal.

[0123] S-102. Set the threshold of the number of vibrations within a set time.

[0124] Exemplarily, before formally conducting vibration detection, the administrator sets a vibration count threshold within a set time by pressing a second button. Specifically, the administrator presses the second button a preset number of times, and the main control chip records the number of signals received from the second voltage terminal as the vibration count threshold.

[0125] The above S-101 and S-102 are in no particular order.

[0126] As a possible implementation, Fig.18 As shown, after the S-130 triggers the alarm, it also includes:

[0127] S-140: Get the number of times the alarm is triggered and determine whether it is the first alarm.

[0128] If so, that is, when the alarm is triggered for the first time, execute steps S-151 and / or S-152: increase the vibration amplitude threshold and / or the vibration number threshold, and perform the operation of detecting the vibration of the component to be detected again.

[0129] If not, that is, it is not the first time that the alarm is triggered, then execute step S-150: plan replacement maintenance.

[0130] In actual production applications, there may be certain deviations in the setting of the vibration amplitude threshold or the vibration number threshold. Take the cold pump as an example. For example, if the vibration amplitude threshold is set too low or the vibration number threshold is set too low, this will cause the cold pump to still work normally. When the vibration is normal, the host station will alarm. In the face of such a false alarm, the embodiment of the present application provides two solutions.

[0131] Combination Fig.14 and Fig.15When the vibration sensor is set near the cylinder of the cold pump, it is preferred to increase the vibration number threshold value, and eliminate the false alarm by increasing the number of vibration times within the set time. When the vibration sensor is set near the cold pump near the main station, it is preferred to increase the vibration amplitude threshold value, and eliminate the false alarm by increasing the vibration amplitude threshold value.

[0132] Taking the cold pump as an example, the specific process of the vibration detection alarm method can be as follows: Fig.19 As shown. Combined Fig.16 and Fig.18 In addition to the vibration detection alarm method Fig.18 In addition to S-100, S-110, S-120, and S-130, after step S-130, it also includes:

[0133] S-131: Manually check whether it is a false alarm.

[0134] If yes, execute S-132, if no, execute S-150.

[0135] Due to the lack of experience or misoperation of maintenance personnel, the vibration amplitude threshold or the vibration number threshold may be set incorrectly. When the host station issues an alarm, manual review can improve the fault tolerance rate. For example, the maintenance personnel check the pumping speed of the cold pump, the primary temperature and the secondary temperature of the cold head through the host station to determine whether they are normal. When it is found that the cold pump is indeed abnormal, the abnormal vibration of the cold pump is confirmed, and step S-150 is executed.

[0136] S-150: Planned replacement maintenance.

[0137] After manual inspection, it is found that it is a false alarm and the cold pump is still in normal working condition, which means that there is a deviation in the setting of the vibration amplitude threshold or the vibration number threshold. Therefore, corresponding corrections need to be made, first stop the alarm, and then execute steps S-132 and S-140.

[0138] S-132: Eliminate the alarm and record the number of alarms.

[0139] The administrator presses the first button 411 to reset and end the alarm.

[0140] S-140: Get the number of times the alarm is triggered and determine whether it is the first alarm.

[0141] In the case of the first alarm triggering, the vibration amplitude threshold or the vibration number threshold is corrected, and steps S-151 and / or S-152 are executed: the vibration amplitude threshold and / or the vibration number threshold is increased, and the vibration detection operation of the component to be detected is performed again. If the number of alarm triggering times is obtained and it is found that it is the second time, that is, the alarm is triggered again when the threshold is increased, it means that the cold pump does need to be replaced and maintained.

[0142] The beneficial effects that can be achieved by the vibration detection alarm method provided by the above embodiments of the present disclosure can be referred to the beneficial effects of the vibration detection alarm circuit described above, which will not be described in detail here.

[0143] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A vibration detection alarm circuit, characterized in that: The vibration detection alarm circuit comprises: A vibration collection circuit, wherein the vibration collection circuit is configured to detect mechanical vibration of the component to be detected and generate a detection signal according to the mechanical vibration; A main control circuit is electrically connected to the vibration collection circuit, and the main control circuit is configured to receive the detection signal, and obtain the vibration amplitude of the component to be detected and the number of vibrations within a set time according to the detection signal, and output an alarm trigger signal when the vibration amplitude of the component to be detected is greater than a vibration amplitude threshold, and the number of vibrations of the component to be detected within the set time is greater than a vibration number threshold; The alarm generating circuit is electrically connected to the main control circuit, and the alarm generating circuit is configured to trigger an alarm when receiving the alarm trigger signal.

2. The vibration detection alarm circuit according to claim 1, characterized in that: The vibration collection circuit includes a vibration sensor and an analog-to-digital converter; The vibration sensor is connected to the component to be detected, the first end of the vibration sensor is electrically connected to the first input end of the analog-to-digital converter, the first end of the vibration sensor is also electrically connected to the first voltage end, the second end of the vibration sensor is electrically connected to the second voltage end, and the first output end of the analog-to-digital converter is electrically connected to the main control circuit; The vibration sensor is configured to detect the mechanical vibration of the component to be detected and generate an analog detection signal according to the mechanical vibration; The analog-to-digital converter is configured to receive the analog detection signal and generate a detection signal according to the analog detection signal.

3. The vibration detection alarm circuit according to claim 2, characterized in that: The vibration collection circuit also includes: a sliding rheostat and a first resistor; The first terminal of the sliding rheostat is electrically connected to the first voltage terminal, the second terminal of the sliding rheostat is electrically connected to the third terminal, the third terminal of the sliding rheostat is electrically connected to one end of the first resistor, and the other end of the first resistor is electrically connected to the second voltage terminal; the third terminal of the sliding rheostat is also electrically connected to the second input terminal of the analog-to-digital converter; the second output terminal of the analog-to-digital converter is electrically connected to the third output terminal, and is also electrically connected to the main control circuit; The analog-to-digital converter is further configured to convert the analog voltage signal received by the second input terminal into a digital voltage signal, and transmit the digital voltage signal to the main control circuit; The main control circuit is further configured to receive the digital voltage signal and obtain the vibration amplitude threshold according to the magnitude of the digital voltage signal.

4. The vibration detection alarm circuit according to any one of claims 1 to 3, characterized in that: The alarm generating circuit includes a switch tube and a relay; The first end of the switch tube is electrically connected to the main control circuit, and the second end of the switch tube is electrically connected to the first voltage end; the switch tube is configured to be turned on under the control of the alarm trigger signal output by the main control circuit; The relay includes a coil and a contact switch, the coil is electrically connected between the third end of the switch tube and the second voltage end, the contact switch is connected to an alarm device, and the contact switch is normally closed; the relay is configured such that when the coil is energized, the contact switch is disconnected.

5. The vibration detection alarm circuit according to any one of claims 1 to 3, characterized in that: The vibration detection alarm circuit also includes an operation circuit, which is electrically connected to the main control circuit. The operation circuit is configured to reset the vibration detection alarm circuit and set a vibration number threshold within a set time.

6. The vibration detection alarm circuit according to claim 5, characterized in that: The operation circuit includes a reset subcircuit and a setting subcircuit; The reset subcircuit includes a first button, a first capacitor and a second resistor; A first end of the first button is electrically connected to a first voltage end, a second end of the first button is electrically connected to the main control circuit, one end of the first capacitor is electrically connected to the first voltage end, the other end of the first capacitor is electrically connected to one end of the second resistor, the other end of the second resistor is electrically connected to the second voltage end, and a node where the second resistor and the first capacitor are connected is also electrically connected to the main control circuit; The reset subcircuit is configured to reset the vibration detection alarm circuit when powered on; and reset the vibration detection alarm circuit when the first button is pressed; The setting subcircuit includes a second button; a first end of the second button is electrically connected to the second voltage end, and a second end of the second button is electrically connected to the main control circuit; The setting subcircuit is configured to transmit the signal of the second voltage terminal to the main control circuit when the second button is pressed; The main control circuit is further configured to record the number of times the signal is received from the second voltage terminal as the vibration number threshold.

7. The vibration detection alarm circuit according to any one of claims 1 to 3, characterized in that: The vibration detection alarm circuit further includes a display circuit, the display circuit is electrically connected to the main control circuit, and the display circuit is configured to display the number of vibrations of the component to be detected within a set time when the vibration amplitude is greater than the vibration amplitude threshold for the first time; The display circuit includes a display and a third resistor; The display is electrically connected to the main control circuit, and the display is also electrically connected to one end of the third resistor, and the other end of the third resistor is electrically connected to the first voltage end.

8. The vibration detection alarm circuit according to any one of claims 1 to 3, characterized in that: The vibration detection circuit also includes a power supply circuit, and the power supply circuit includes a voltage stabilizing chip; The input end of the voltage stabilizing chip is electrically connected to the third voltage end, the output end of the voltage stabilizing chip is electrically connected to the first voltage end, and the ground end of the voltage stabilizing chip is electrically connected to the second voltage end; The power supply circuit is configured to convert the third voltage from the third voltage terminal into a first voltage and output the first voltage to the first voltage terminal.

9. The vibration detection alarm circuit according to any one of claims 1 to 3, characterized in that: The main control circuit includes a main control chip, a crystal resonator, a sixth capacitor and a seventh capacitor; The first end of the crystal resonator is electrically connected to the first pin of the main control chip, the second end of the crystal resonator is electrically connected to the second pin of the main control chip, the first end of the crystal resonator is also electrically connected to one end of the sixth capacitor, the other end of the sixth capacitor is electrically connected to the second voltage end, the second end of the crystal resonator is also electrically connected to one end of the seventh capacitor, and the other end of the seventh capacitor is electrically connected to the second voltage end.

10. A semiconductor device, characterized in that: The semiconductor device comprises: Cold pump; A host computer connected to the cold pump; The vibration detection alarm circuit according to any one of claims 1 to 9, wherein the vibration collection circuit comprises a vibration sensor, and the vibration sensor is connected to the cold pump.

11. The semiconductor device according to claim 10, wherein: The vibration sensor is arranged at the cylinder of the cold pump or at a position where the cold pump is close to the main machine platform.

12. The semiconductor device according to claim 10, wherein: The host station includes an isolation valve and a signal interlock communication board; The alarm generating circuit of the vibration collection circuit comprises a relay, one end of a contact switch of the relay is electrically connected to the isolation valve, and the other end of the contact switch is electrically connected to the signal interlock communication board.

13. A vibration detection alarm method, characterized in that: The vibration detection alarm method comprises: Detecting mechanical vibration of the component to be detected, and generating a detection signal according to the mechanical vibration; Acquire the vibration amplitude and vibration frequency of the component to be detected according to the detection signal, and determine whether the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold; In the case where the vibration amplitude of the component to be detected is greater than the vibration amplitude threshold, determining whether the number of vibrations of the component to be detected reaches the vibration number threshold within a set time from the moment when the vibration amplitude is first greater than the vibration amplitude threshold; If so, an alarm is triggered.

14. The vibration detection alarm method according to claim 13, characterized in that: After the alarm is triggered, the method further includes: obtaining the number of times the alarm is triggered, and when the alarm is triggered for the first time and the component to be detected is normal, increasing the vibration amplitude threshold and / or the vibration number threshold, and performing the operation of detecting the vibration of the component to be detected again.

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