A bracket for cathode of ion source and use method thereof

Abstract

The present invention discloses a bracket for an ion source cathode and a method for using the bracket, and the present invention relates to the field of ion implantation technology. Specifically, it comprises: an ion source shell, the top of which is fixedly connected with a support plate, the top of which is fixedly connected with a cathode box, the cathode box is provided with a cathode inside, and the outside of the ion source shell is provided with an insulator fixing plate; the bracket for the ion source cathode also comprises: a locking mechanism for connecting the cathode box with the cathode, the locking mechanism is fixedly connected to the outside of the ion source shell, the locking mechanism comprises an insulator and a first screw, the insulator fixing plate is fixedly connected to the ion source shell by the first screw, the insulator is fixedly connected to the insulator fixing plate by the second screw, and a groove is provided inside the insulator; a fixing mechanism is used to fix the position of the cathode, and the bracket for the ion source cathode and the method for using the bracket achieve the purpose of improving the use efficiency of the equipment.

Description

Technical Field

[0001] The invention relates to the technical field of ion implantation, in particular to a bracket for an ion source cathode and a use method thereof. Background Art

[0002] Ion implantation is a method of introducing a controlled amount of impurities into a silicon substrate to change its electrical properties. It is an important process in the semiconductor manufacturing process. The ion implantation process is carried out in an ion implanter, and the ion source is the key device of the ion implanter. Usually, the ion source of the ion implanter adopts an indirect heating cathode ion source. A shaft extends from the middle of the cathode and is clamped by other components. In this way, the cathode can be fixed at one end of the ion source chamber. The filament close to the cathode is energized, and the filament heats the cathode. At the same time, a voltage is applied to the shaft in the middle of the cathode, so that the cathode will emit electrons into the ion source chamber, which will collide with gas atoms to generate ions.

[0003] The current ion source cathode bracket and its use method, after long-term heating and power-on, the middle axis of the cathode is consumed, a gap is generated between the cathode and the clamping parts, and the cathode shakes, requiring shutdown and replacement of a new one, affecting production capacity. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides an ion source cathode bracket, which specifically comprises:

[0005] An ion source shell, wherein a support plate is fixedly connected to the top of the ion source shell, a cathode box is fixedly connected to the top of the support plate, a cathode is arranged inside the cathode box, and an insulator fixing plate is arranged outside the ion source shell;

[0006] The ion source cathode support also includes:

[0007] A locking mechanism, used to connect the cathode box and the cathode, the locking mechanism is fixedly connected to the outside of the ion source shell, the locking mechanism comprises an insulator and a first screw, the insulator fixing plate is fixedly connected to the ion source shell by the first screw, the insulator is fixedly connected to the insulator fixing plate by the second screw, and a groove is provided inside the insulator;

[0008] A fixing mechanism is used to fix the position of the cathode, the fixing mechanism is fixedly connected to the inside of the slot, the fixing mechanism includes a head and a graphite nut, the bottom of the head is fixedly connected to a cathode bracket, the head is sleeved on the outside of the cathode, the graphite nut is arranged on the outside of the cathode, and the cathode bracket is fixedly connected to the slot by a third screw.

[0009] Preferably, a positioning ring is fixedly connected to the outside of the ion source shell, an air intake mechanism is fixedly connected to the top of the ion source shell, a spring and a fixing column are fixedly connected to the top of the ion source shell, a hook is snap-connected to the top of the spring to fix the position of the cathode box, and the hook is snap-connected to the cathode box.

[0010] Preferably, a fixing column is fixedly connected to the top of the ion source shell, a connecting piece is fixedly connected to the outside of the fixing column, and a plurality of the fixing columns are provided.

[0011] Preferably, the fixing mechanism further comprises a filament clamp and an adjustment assembly, the interior of the filament clamp is snap-connected with a filament, the adjustment assembly is fixedly connected to the exterior of the graphite nut, and the filament clamp is fixedly connected to the groove via a fourth screw.

[0012] Preferably, the outside of the filament clamp is fixedly connected to a base, the top of the base is fixedly connected to a first adjustment rod, the outside of the first adjustment rod is fixedly connected to a half ring, and two of each of the first adjustment rod and the half ring are provided.

[0013] Preferably, a cooling block is fixedly connected to the inside of the semi-ring, a buckle plate is fixedly connected to the outside of the semi-ring, and a heat-conducting rod is fixedly connected to the outside of the cooling block, so as to transfer the temperature of the cooling block to the filament and accelerate the cooling of the filament.

[0014] Preferably, the adjustment assembly includes a movable column and a fixed rod, the outside of the movable column is fixedly connected to a connecting frame, the outside of the fixed rod is fixedly connected to an annular plate, the movable column is slidably connected to the inside of the graphite nut, and the movable column passes through the inside of the graphite nut, and the fixed rod is fixedly connected to the top of the graphite nut.

[0015] Preferably, a threaded through hole is provided inside the graphite nut, a locking column is fixedly connected to the inside of the connecting frame, a fixing ring is fixedly connected to the outside of the locking column, a plurality of fixing rings are provided, a press plate is fixedly connected to the top of the locking column, and the locking column is slidably connected to the inside of the graphite nut.

[0016] Preferably, the air intake mechanism includes an air pipe, the top of the air pipe is fixedly connected to a gas sleeve, the outside of the gas sleeve is fixedly connected to a connecting pipe, the top of the connecting pipe extends to the interior of the cathode box, and the outside of the air pipe is fixedly connected to a cooling plate for transferring heat to the air pipe, reducing the gas temperature in the air pipe, and further supplying air to the cathode box, promoting the cooling of the cathode and filament inside the cathode box, the cooling plate is fixedly connected to the bottom of the positioning ring, and the air pipe is fixedly connected to the top of the ion source shell.

[0017] A method for using an ion source cathode bracket comprises the following steps:

[0018] S1. Install the cathode, cathode bracket, filament, filament clamp and insulator, open the adjustment assembly, and position the cathode;

[0019] S2, open the air intake mechanism, filament and energize the cathode, and ions are gradually generated by collision in the cathode box;

[0020] S3. After the work is completed, the fixing mechanism is opened, and the position of the cooling block is adjusted to cool the filament by heat transfer;

[0021] S4. After the work is completed, open the cooling plate and the air intake mechanism, adjust the air intake temperature, and supply air to the inside of the cathode box to promote the cooling of the filament and the cathode.

[0022] The present invention provides a bracket for an ion source cathode and a method for using the bracket. The bracket has the following beneficial effects:

[0023] 1. The cathode bracket of the ion source and its use method, by setting a fixing mechanism, the axis in the middle of the cathode is consumed after long-term heating and power-on, and a gap is generated with the clamping component, the cathode shakes, and it is necessary to stop the machine and replace it with a new one, which affects the production capacity. Therefore, a fixing mechanism and an adjustment component are set to fix the cathode in the cathode bracket and the cathode box, position and fix the cathode to prevent the cathode from shaking, and double the cathode use time, which greatly improves the service life and stability of the ion source, reduces downtime, and improves production efficiency.

[0024] 2. The ion source cathode bracket and its use method are used to cool down the filament after use by setting a fixing mechanism. After the filament is heated, it takes a long time for the filament to return to a low temperature. After long-term use, the filament tends to become thinner and needs to be replaced. Therefore, a movable cooling block and a heat conducting rod are provided to cool down the filament after use by heat transfer, assist the filament to cool down quickly, protect the filament, and extend the use time.

[0025] 3. The ion source cathode bracket and its use method, by setting up an air intake mechanism, send the gas into the cathode box through the air pipe, gas sleeve and connecting pipe to provide gas atoms for the cathode box. After using the equipment, the temperature inside the cathode box is high. In order to promote the cooling of the filament and the cathode, the heat can be transferred to the air pipe by controlling the cooling plate, thereby controlling the temperature of the gas entering the cathode box, supplying air to the interior of the cathode box, and promoting the cooling of the filament and the cathode.

[0026] 4. The ion source cathode bracket and the use method thereof, by providing a locking mechanism, a fixing mechanism and an air intake mechanism, fix the cathode and the filament position, adjust and position the cathode, and cool the filament and the inside of the cathode box, thereby protecting the filament and the cathode and extending the service life of the filament and the cathode. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 It is a flowchart of the present invention;

[0029] Figure 3 It is a side structural schematic diagram of the present invention;

[0030] Figure 4 It is a schematic diagram of the locking mechanism structure of the present invention;

[0031] Figure 5 It is a schematic diagram of the fixing mechanism structure of the present invention;

[0032] Figure 6 For the present invention Figure 4 The structural diagram at A in the middle;

[0033] Figure 7 It is a schematic diagram of the structure of the adjustment components of the present invention;

[0034] Figure 8 This is a schematic diagram of the structure of the connecting frame of the present invention;

[0035] Fig. 9 It is a schematic diagram of the structure of the air intake mechanism of the present invention.

[0036] In the figure: 1, ion source shell; 2, insulator fixing plate; 3, locking mechanism; 301, first screw; 302, insulator; 303, slot; 4, cathode box; 5, cathode; 6, fixing mechanism; 601, head; 602, cathode bracket; 603, graphite nut; 604, adjustment assembly; 6041, moving column; 6042, connecting frame; 6043, threaded through hole; 6044, positioning column; 6045, fixing rod; 6046, annular plate ; 6047, fixing ring; 6048, pressing plate; 605, filament; 606, filament clamp; 607, base; 608, first adjusting rod; 609, half ring; 610, buckle plate; 611, cooling block; 612, heat conducting rod; 7, positioning ring; 8, air intake mechanism; 801, air pipe; 802, gas sleeve; 803, connecting pipe; 804, cooling plate; 9, spring; 10, hook; 11, fixing column; 12, connecting piece; 13, support plate. DETAILED DESCRIPTION

[0037] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0038] like Figure 1-Figure 9 As shown, the present invention provides a technical solution: specifically comprising:

[0039] An ion source shell 1, the top of the ion source shell 1 is fixedly connected with a support plate 13, two support plates 13 are provided, and are symmetrically arranged. When installed, the two support plates 13 are installed on the top of the ion source shell 1, and the top of the support plate 13 is fixedly connected with a cathode box 4, a hole is opened on the side of the cathode box 4, and a cathode 5 is arranged inside the cathode box 4. The cathode 5 is installed in the hole on the side of the cathode box 4. The cathode 5 is made of tungsten and has a cylindrical structure. The outer periphery is provided with a first step and a first thread, and the interior is provided with a blind hole countersunk. The outside of the ion source shell 1 is provided with an insulator fixing plate 2;

[0040] The ion source cathode 5 support also includes:

[0041] A locking mechanism 3 is used to connect the cathode box 4 and the cathode 5. The locking mechanism 3 is fixedly connected to the outside of the ion source shell 1. The locking mechanism 3 includes an insulator 302 and a first screw 301. The insulator fixing plate 2 is fixedly connected to the ion source shell 1 by the first screw 301. The insulator 302 is fixedly connected to the insulator fixing plate 2 by the second screw. A groove 303 is provided inside the insulator 302.

[0042] The fixing mechanism 6 is used to fix the position of the cathode 5. The fixing mechanism 6 is fixedly connected to the inside of the groove 303. The fixing mechanism 6 includes a head 601 and a graphite nut 603. The bottom of the head 601 is fixedly connected to the cathode bracket 602. The outside of the cathode bracket 602 is fixedly connected to the cathode 5 support plate 13 by a fourth screw. The cathode 5 support plate 13 is fixedly connected to the inside of the groove 303 by a fifth screw. The cathode bracket 602 is made of graphite. The head 601 is sleeved on the outside of the cathode 5. The head 601 is provided with a second step and a through hole. The graphite nut 603 is arranged on the outside of the cathode 5. The cathode 5 exposes the head thread. The graphite nut 603 is locked on the exposed thread head of the cathode 5. The cathode bracket 602 is fixedly connected to the groove 303 by a third screw. The central axes of the cathode 5, the head 601 and the graphite nut 603 are all in the same straight line. The graphite nut 603 locks the cathode 5 to prevent it from shaking.

[0043] The outside of the ion source shell 1 is fixedly connected with a positioning ring 7, the top of the ion source shell 1 is fixedly connected with an air intake mechanism 8, the top of the ion source shell 1 is fixedly connected with a spring 9 and a fixing column 11, the top of the spring 9 is snap-connected with a hook 10, the hook 10 is snap-connected with the cathode box 4, and the top plate of the cathode box 4 has a hole connected to the hook 10.

[0044] A fixing column 11 is fixedly connected to the top of the ion source shell 1 , a connecting piece 12 is fixedly connected to the outside of the fixing column 11 , and a plurality of fixing columns 11 are provided.

[0045] Before using the equipment, install the cathode 5 and the insulator 302, open the adjustment assembly 604, and position the cathode 5. Open the air intake mechanism 8 and the fixing mechanism 6, and energize the cathode 5, so that ions are gradually generated by collision in the cathode box 4. After the work is completed, open the fixing mechanism 6 to cool the inside of the fixing mechanism 6 by heat transfer. Open the air intake mechanism 8, adjust the air intake temperature, and supply air to the inside of the cathode box 4.

[0046] The fixing mechanism 6 also includes a filament clamp 606 and an adjustment assembly 604. The filament clamp 606 is internally snap-connected with a filament 605. The adjustment assembly 604 is fixedly connected to the outside of the graphite nut 603. The filament clamp 606 is fixedly connected to the groove 303 by a fourth screw. The connecting piece 12 is locked to the bottom of the cathode 5 support plate 13 and the fixing column 11 by screws and nuts respectively.

[0047] The outside of the filament clamp 606 is fixedly connected to a base 607 , the top of the base 607 is fixedly connected to a first adjustment rod 608 , the outside of the first adjustment rod 608 is fixedly connected to a half ring 609 , and two first adjustment rods 608 and two half rings 609 are provided.

[0048] The interior of the semi-ring 609 is fixedly connected with a cooling block 611 , the exterior of the semi-ring 609 is fixedly connected with a buckle plate 610 , and the exterior of the cooling block 611 is fixedly connected with a heat conducting rod 612 .

[0049] After using the device, manually adjust the stroke of the first adjustment rod 608, and the first adjustment rod 608 drives the cooling block 611, the buckle plate 610 and the heat-conducting rod 612 to move along the filament clamp 606 toward the filament 605. The temperature of the cooling block 611 is transferred to the filament 605 through the heat-conducting rod 612, thereby cooling the filament 605 and promoting the cooling work of the filament 605.

[0050] When the device needs to be used, the first adjusting rod 608 is adjusted to the initial state, and the first adjusting rod 608 drives the cooling block 611 away from the filament 605 and the cathode 5 to avoid affecting the heating work of the cathode 5.

[0051] The adjustment assembly 604 includes a movable column 6041 and a fixed rod 6045. The bottom of the movable column 6041 is fixedly connected with a gasket, and the gasket is in contact with the first thread. The outside of the movable column 6041 is fixedly connected with a connecting frame 6042. The outside of the fixed rod 6045 is fixedly connected with an annular plate 6046. The annular plate 6046 is set to a magnetic material. The movable column 6041 is slidably connected to the inside of the graphite nut 603, and the movable column 6041 passes through the inside of the graphite nut 603. The fixed rod 6045 is fixedly connected to the top of the graphite nut 603.

[0052] A threaded through hole 6043 is provided inside the graphite nut 603, a locking column 6044 is fixedly connected to the inside of the connecting frame 6042, a fixing ring 6047 is fixedly connected to the outside of the locking column 6044, the fixing ring 6047 is set to a magnetic material, and there are multiple fixing rings 6047, a pressing plate 6048 is fixedly connected to the top of the locking column 6044, and the locking column 6044 is slidably connected to the inside of the graphite nut 603.

[0053] During installation, the cathode 5 moves toward the cathode bracket 602, the first step contacts the second step and the second step limits the first step, the first thread passes through the through hole and the first thread is exposed, the graphite nut 603 is close to the surface of the head 601, and the threaded through hole 6043 is matched and locked with the first thread to fix the position of the cathode 5.

[0054] As the cathode 5 is used, the pressing plate 6048 is manually pressed at the same time, and the pressing plate 6048 drives the locking column 6044 to move downward, and the locking column 6044 moves downward inside the graphite nut 603, thereby driving the connecting frame 6042 outside the locking column 6044 and the movable column 6041 to move downward, and the gasket at the bottom of the movable column 6041 contacts and squeezes the cathode 5, and the fixing ring 6047 is gradually attracted and fixed to the annular plate 6046, thereby strengthening the position of the cathode 5.

[0055] The air intake mechanism 8 includes an air pipe 801, the top of the air pipe 801 is fixedly connected to a gas sleeve 802, the outside of the gas sleeve 802 is fixedly connected to a connecting pipe 803, the top of the connecting pipe 803 extends to the inside of the cathode box 4, the bottom of the cathode box 4 is open, and the connecting pipe 803 enters the cathode box 4 from the opening, the outside of the air pipe 801 is fixedly connected to a cooling plate 804, the cooling plate 804 is fixedly connected to the bottom of the positioning ring 7, and the air pipe 801 is fixedly connected to the top of the ion source shell 1.

[0056] The gas enters the gas pipe 801 through the ion source shell 1 , enters the gas sleeve 802 through the gas pipe 801 , enters the connecting pipe 803 through the gas sleeve 802 , and enters the cathode box 4 through the connecting pipe 803 to provide gas atoms for the cathode 5 .

[0057] After the work is completed, the cooling plate 804 is turned on, and the cooling plate 804 transfers the temperature to the gas pipe 801, reducing the temperature of the gas in the gas pipe 801, and the gas enters the cathode box 4, reducing the temperature in the cathode box 4, and promoting the filament 605 and the cathode 5 to return to the initial temperature.

[0058] Working principle: before using the device, install the cathode 5 and the insulator 302, use the second screw to connect the insulator 302 and the insulator fixing plate 2, the cathode 5 moves toward the cathode bracket 602, the first step contacts the second step and the second step limits the first step, the first thread passes through the through hole and the first thread is exposed, the graphite nut 603 is close to the surface of the head 601, the threaded through hole 6043 is matched and locked with the first thread, and then the position of the cathode 5 is fixed. Open the adjustment component 604 and position the cathode 5.

[0059] As the cathode 5 is used, the pressing plate 6048 is manually pressed at the same time, and the pressing plate 6048 drives the locking column 6044 to move downward, and the locking column 6044 moves downward inside the graphite nut 603, thereby driving the connecting frame 6042 outside the locking column 6044 and the movable column 6041 to move downward, and the gasket at the bottom of the movable column 6041 contacts and squeezes the cathode 5, and the fixing ring 6047 is gradually attracted and fixed to the annular plate 6046, thereby strengthening the position of the cathode 5.

[0060] The gas inlet mechanism 8 and the filament 605 are turned on, and the cathode 5 is powered on, and ions are gradually generated by collision in the cathode box 4. The gas enters the gas pipe 801 through the ion source shell 1, enters the gas sleeve 802 through the gas pipe 801, enters the connecting pipe 803 through the gas sleeve 802, and enters the cathode box 4 through the connecting pipe 803, providing gas atoms for the cathode 5.

[0061] After the work is finished, the fixing mechanism 6 is opened to cool the inside of the fixing mechanism 6 by heat transfer. After using the device, the stroke of the first adjusting rod 608 is manually adjusted, and the first adjusting rod 608 drives the cooling block 611, the buckle plate 610 and the heat conducting rod 612 to move along the filament clamp 606 toward the filament 605. The temperature of the cooling block 611 is transferred to the filament 605 through the heat conducting rod 612, thereby cooling the filament 605 and promoting the cooling work of the filament 605.

[0062] When the device needs to be used, the first adjusting rod 608 is adjusted to the initial state, and the first adjusting rod 608 drives the cooling block 611 away from the filament 605 and the cathode 5 to avoid affecting the heating work of the cathode 5.

[0063] The air intake mechanism 8 is turned on, and the air intake temperature is adjusted to supply air to the interior of the cathode box 4. The cooling plate 804 is turned on, and the cooling plate 804 transmits the temperature to the air pipe 801, lowering the temperature of the gas in the air pipe 801, and the gas enters the cathode box 4, lowering the temperature in the cathode box 4, and promoting the filament 605 and the cathode 5 to return to the initial temperature.

[0064] The present invention provides a method for using a bracket for an ion source cathode, comprising the following steps:

[0065] S1, install the cathode 5, cathode bracket 602, filament 605, filament clamp 606 and insulator 302, open the adjustment component 604, and position the cathode 5;

[0066] S2, the air intake mechanism 8 and the filament 605 are turned on and the cathode 5 is energized, and ions are gradually generated by collision in the cathode box 4;

[0067] S3, after the work is completed, the fixing mechanism 6 is opened, and the position of the cooling block 611 is adjusted to cool the filament 605 by heat transfer;

[0068] S4. After the work is completed, the cooling plate 804 and the air intake mechanism 8 are turned on, and the air intake temperature is adjusted to supply air to the interior of the cathode box 4 to promote the cooling of the filament 605 and the cathode 5.

[0069] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A bracket for an ion source cathode, comprising: An ion source shell (1), characterized in that: a support plate (13) is fixedly connected to the top of the ion source shell (1), a cathode box (4) is fixedly connected to the top of the support plate (13), a cathode (5) is arranged inside the cathode box (4), and an insulator fixing plate (2) is arranged outside the ion source shell (1); The ion source cathode support also includes: A locking mechanism (3) for connecting the cathode box (4) and the cathode (5), the locking mechanism (3) being fixedly connected to the outside of the ion source shell (1), the locking mechanism (3) comprising an insulator (302) and a first screw (301), the insulator fixing plate (2) being fixedly connected to the ion source shell (1) via the first screw (301), the insulator (302) being fixedly connected to the insulator fixing plate (2) via a second screw, and a groove (303) being provided inside the insulator (302); A fixing mechanism (6) for fixing the position of the cathode (5), the fixing mechanism (6) being fixedly connected to the inside of the slot (303), the fixing mechanism (6) comprising a head (601) and a graphite nut (603), the bottom of the head (601) being fixedly connected to a cathode support (602), the head (601) being sleeved on the outside of the cathode (5), the graphite nut (603) being arranged on the outside of the cathode (5), and the cathode support (602) being fixedly connected to the slot (303) by a third screw; The fixing mechanism (6) further comprises a filament clamp (606) and an adjustment assembly (604); the filament clamp (606) is internally snap-connected with a filament (605); the adjustment assembly (604) is fixedly connected to the outside of the graphite nut (603); and the filament clamp (606) is fixedly connected to the groove (303) via a fourth screw.

2. The ion source cathode bracket according to claim 1, characterized in that: The outside of the ion source shell (1) is fixedly connected to a positioning ring (7), the top of the ion source shell (1) is fixedly connected to an air intake mechanism (8), the top of the ion source shell (1) is fixedly connected to a spring (9) and a fixing column (11), the top of the spring (9) is snap-connected to a hook (10), and the hook (10) is snap-connected to a cathode box (4).

3. The ion source cathode bracket according to claim 1, characterized in that: A fixing column (11) is fixedly connected to the top of the ion source shell (1), a connecting piece (12) is fixedly connected to the outside of the fixing column (11), and a plurality of the fixing columns (11) are provided.

4. The ion source cathode bracket according to claim 2, characterized in that: The outside of the filament clamp (606) is fixedly connected to a base (607), the top of the base (607) is fixedly connected to a first adjustment rod (608), the outside of the first adjustment rod (608) is fixedly connected to a half ring (609), and two of each of the first adjustment rod (608) and the half ring (609) are provided.

5. The ion source cathode bracket according to claim 4, characterized in that: The interior of the semi-ring (609) is fixedly connected to a cooling block (611), the exterior of the semi-ring (609) is fixedly connected to a buckle plate (610), and the exterior of the cooling block (611) is fixedly connected to a heat-conducting rod (612).

6. The ion source cathode support according to claim 1, characterized in that: The adjustment assembly (604) comprises a movable column (6041) and a fixed rod (6045); the outside of the movable column (6041) is fixedly connected to a connecting frame (6042); the outside of the fixed rod (6045) is fixedly connected to an annular plate (6046); the movable column (6041) is slidably connected to the inside of the graphite nut (603), and the movable column (6041) passes through the inside of the graphite nut (603); and the fixed rod (6045) is fixedly connected to the top of the graphite nut (603).

7. The ion source cathode bracket according to claim 6, characterized in that: The graphite nut (603) is provided with a threaded through hole (6043) inside, the connecting frame (6042) is fixedly connected to a retaining column (6044) inside, the retaining column (6044) is fixedly connected to a fixing ring (6047) outside, and a plurality of fixing rings (6047) are provided, the top of the retaining column (6044) is fixedly connected to a pressing plate (6048), and the retaining column (6044) is slidably connected to the inside of the graphite nut (603).

8. The ion source cathode bracket according to claim 5, characterized in that: The air intake mechanism (8) comprises an air pipe (801), the top of the air pipe (801) is fixedly connected to a gas sleeve (802), the outside of the gas sleeve (802) is fixedly connected to a connecting pipe (803), the top of the connecting pipe (803) extends to the inside of the cathode box (4), the outside of the air pipe (801) is fixedly connected to a cooling plate (804), the cooling plate (804) is fixedly connected to the bottom of the positioning ring (7), and the air pipe (801) is fixedly connected to the top of the ion source shell (1).

9. A method for using the ion source cathode support as claimed in claim 8, characterized in that: The following steps are involved: S1, installing the cathode (5), the cathode support (602), the filament (605), the filament clamp (606), and the insulator (302), opening the adjustment component (604), and positioning the cathode (5); S2, opening the air intake mechanism (8), the filament (605) and energizing the cathode (5), and gradually generating ions by collision in the cathode box (4); S3, after the work is completed, the fixing mechanism (6) is opened, and the position of the cooling block (611) is adjusted to cool the filament (605) by heat transfer; S4. After the work is completed, the cooling plate (804) and the air intake mechanism (8) are turned on, the air intake temperature is adjusted, and air is supplied to the interior of the cathode box (4) to promote cooling of the filament (605) and the cathode (5).

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