A nozzle assembly for atomic layer deposition

Abstract

The present invention relates to the field of atomic layer deposition technology, and in particular to a nozzle assembly for atomic layer deposition, comprising an integrated board, a mounting cover fixedly mounted on the upper side of the integrated board, drainage mechanisms equidistantly and staggeredly arranged on the side of the integrated board, a driving mechanism equidistantly and staggeredly arranged on the side of the mounting cover, and the drainage mechanism comprises a first channel, a second channel and a third channel. The present invention can realize spraying operations according to substrates of different shapes by setting a drainage mechanism and a driving mechanism, so that the gas sprayed from the nozzle is in different array states to adapt to substrates of different shapes, and when spraying, different gas channels corresponding to different deposition methods can be switched to guide the flow to produce different deposition operations, and the driving control operation is relatively simple and can be controlled and used without complex program logic, so that the adaptability and functionality of the nozzle assembly are strong, and multi-state use operations can be performed without replacement, thereby improving the deposition work efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of atomic layer deposition, and in particular to a nozzle assembly for atomic layer deposition. Background Art

[0002] Atomic layer deposition is a method that can deposit materials on the surface of a substrate layer by layer in the form of a single atomic film. The nozzle assembly is a key part of the atomic layer deposition equipment. Generally, there are finely designed gas channels inside the nozzle assembly, which are used to transport reaction gases and carrier gases.

[0003] The existing deposition method generally involves first spraying the reaction gas onto the substrate for a chemical reaction, and then spraying the carrier gas to flush the reaction gas after the reaction. Due to the deposition operations of different materials, the organic precursors and oxidants in the reaction gas can be transported through a single channel or dual channels. In this way, when different states are required, each group of channels needs to be used together with the control components, which makes the structure of the nozzle assembly too complicated and requires complex programs for control and use. In addition, due to the large number of control components, the failure rate and energy consumption are relatively increased. For this reason, we propose a nozzle assembly for atomic layer deposition. Summary of the invention

[0004] In order to overcome the technical problems existing in the above-mentioned prior art, the present invention provides a nozzle assembly for atomic layer deposition.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: comprising an integrated board, a mounting cover is fixedly mounted on the upper side of the integrated board, drainage mechanisms are equidistantly and staggeredly arranged on the side of the integrated board, and driving mechanisms are equidistantly and staggeredly arranged on the side of the mounting cover;

[0006] The drainage mechanism comprises a first channel, a second channel and a third channel, a linkage block is arranged on the upper side of the first channel, the second channel and the third channel, a first flow guiding cavity and a second flow guiding cavity are arranged inside the linkage block, a bottom core block and a middle core block are arranged on the lower side of the linkage block, a top core block is arranged on the upper side of the linkage block, constraint blocks are arranged on the sides of the bottom core block, the middle core block and the top core block, and a first connecting pipe, a second connecting pipe and a third connecting pipe are arranged on the upper side of the top core block;

[0007] The driving mechanism comprises a micro motor, a mounting block is arranged on the side of the micro motor, a micro electric push rod is arranged on the lower side of the micro motor, and a driving block is arranged on the side of the micro electric push rod.

[0008] Furthermore, the drainage mechanism includes four groups of first channels opened on the bottom side of the integrated board, a second channel opened on the bottom side of the integrated board, and a third channel opened on the bottom side of the integrated board.

[0009] Furthermore, the drainage mechanism also includes a working chamber opened inside the integrated board, the linkage block is fixedly installed on the inner wall of the working chamber, the first guide chamber is opened at the upper position inside the linkage block, the second guide chamber is opened at the lower position inside the linkage block, the bottom wall of the first guide chamber is provided with a first air outlet groove, and the bottom wall of the second guide chamber is provided with a second air outlet groove.

[0010] Furthermore, the drainage mechanism also includes a bottom core block movably installed on the bottom wall of the working chamber, a first matching groove is opened on the side of the bottom core block, a second matching groove is opened on the side of the bottom core block, a middle core block is movably installed inside the working chamber, a third matching groove is opened on the side of the middle core block, and a fourth matching groove is opened on the side of the middle core block.

[0011] Furthermore, the drainage mechanism also includes a top core block arranged on the upper side of the linkage block, two groups of avoidance grooves are opened on the side of the top core block, a movable block is fixedly installed on the inner side of the top core block, a fixed block is fixedly installed on the inner side of the linkage block, a constraint groove is opened on the inner wall of the working chamber, the constraint block is movably installed inside the constraint groove, the first connecting pipe is arranged on the inner side of the top core block, the second connecting pipe is fixedly installed on the top wall of the first guide cavity, and the third connecting pipe is fixedly installed on the top wall of the second guide cavity.

[0012] Furthermore, the size ratio of the first channel, the second channel and the third channel is three to two to one, the working chamber covers the first channel and the second channel and the third channel at its peripheral positions, the number of the fourth matching grooves is half the number of the third matching grooves, and the constraint blocks are fixedly sleeved on the side positions of the bottom core block, the middle core block and the top core block respectively.

[0013] Furthermore, the driving mechanism includes a connecting cavity opened on the upper side of the integrated board, a slot is opened on the upper side of the mounting cover, the micro motor is movably mounted inside the slot, the mounting block is fixedly sleeved on the side of the micro motor, the micro electric push rod is fixedly mounted on the output end of the micro motor, and the driving block is fixedly mounted on the output end of the micro electric push rod.

[0014] Furthermore, the connecting cavity corresponds to the center position between the four groups of first channels, the micro motor is attached to the upper side of the integrated board, the mounting block is fixed to the side position of the mounting cover by screws, and the micro electric push rod is movably arranged inside the connecting cavity.

[0015] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0016] 1. The present invention can realize spraying operation according to substrates of different shapes by setting a drainage mechanism and a driving mechanism, so that the gas sprayed from the nozzle can be in different array states to adapt to substrates of different shapes. During spraying, different gas channels corresponding to different deposition methods can be switched to guide the flow, resulting in different deposition operations. The driving control operation is relatively simple and can be controlled without complex program logic, so that the nozzle assembly has strong adaptability and functionality, and can be used in multiple states without replacement, thereby improving the deposition work efficiency.

[0017] 2. The present invention sets a driving mechanism, and a single mounting block can be threadedly disassembled to replace and maintain the micro motor, micro electric push rod and driving block at the corresponding position, which is convenient for subsequent inspection and maintenance. In addition, the single driving block can correspond to the control switching of four groups of first channels and their surrounding second channels and third channels, reducing the number of control parts such as control valves and control motors, reducing energy consumption and reducing failure rate.

[0018] 3. The present invention arranges the bottom core block and the middle core block and their peripheral components. When the middle core block is rotated at a certain angle, the fourth matching groove corresponds to any position of the first matching groove or the second matching groove, and the middle core block closes the other second matching groove or the first matching groove, thereby ensuring that only the first matching groove or the second matching groove is connected, and the second channel and the third channel can be switched and connected separately;

[0019] When the top core block is rotated at a certain angle, the first matching groove and the second matching groove are staggered with the corresponding first air outlet groove and the second air outlet groove. The middle core block is cooperated to make the first matching groove and the second matching groove fully closed, which can realize the full closure and connection operation of the second channel and the third channel, and ensure the switching efficiency.

[0020] 4. The present invention sets a top core block and its peripheral components. When the top core block rotates a certain angle, the positions of the fan-shaped grooves on the sides of the movable block and the fixed block are staggered so that they are closed to the center position of the linkage block together, and vice versa, the inside of the linkage block can be connected, so that the first channel can be closed and connected separately, and the connection of the first channel, the second channel and the third channel at the corresponding positions can be modularized to achieve the connection of the corresponding airflow paths, and the corresponding substrates of different shapes can be used in combination. In addition, the closure and connection of the first channel, the second channel and the third channel can be switched by a single group, so that the airflow can be switched and guided to adapt to different deposition methods.

[0021] 5. The present invention sets a constraint block and its peripheral components. When the constraint block rotates inside the constraint groove, it can cooperate with the driving block to drive the bottom core block, the middle core block and the top core block to rotate. In addition, the constraint block is set inside the constraint groove to constrain and stabilize the bottom core block, the middle core block and the top core block, thereby ensuring the airtightness between the components and the stability during switching. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the cross-sectional structure of the mounting cover of the present invention;

[0024] Figure 3 It is a schematic diagram of the arrangement structure of the drainage mechanism of the present invention;

[0025] Figure 4 It is a schematic diagram of a partial cross-sectional structure of the integrated board of the present invention;

[0026] Figure 5 For the present invention Figure 2 A schematic diagram of the enlarged structure at point A;

[0027] Figure 6 It is a partial structural schematic diagram of the present invention;

[0028] Figure 7 It is a schematic diagram of the partial explosion structure of the drainage mechanism of the present invention;

[0029] Figure 8 It is a schematic diagram of the arrangement structure of the driving mechanism of the present invention;

[0030] Fig. 9 It is a partial structural schematic diagram of the driving mechanism of the present invention;

[0031] Fig.10 A schematic diagram of the states of the communication paths of the connecting pipes of the present invention;

[0032] Fig.11 Schematic diagram of the second state of the communication paths of the connecting pipes of the present invention.

[0033] Wherein: 1. integrated board; 2. mounting cover; 3. drainage mechanism; 31. first channel; 32. second channel; 33. third channel; 34. working chamber; 341. linkage block; 342. first flow guide chamber; 343. second flow guide chamber; 344. first air outlet groove; 345. second air outlet groove; 35. bottom core block; 351. first matching groove; 352. second matching groove; 36. middle core block; 361. third matching groove; 362. fourth matching groove; 37. top core block; 371. avoidance groove; 372. movable block; 373. fixed block; 38. constraint groove; 381. constraint block; 39. first connecting pipe; 391. second connecting pipe; 392. third connecting pipe; 4. driving mechanism; 41. connecting chamber; 42. slotting; 43. micro motor; 44. mounting block; 45. micro electric push rod; 46. driving block. DETAILED DESCRIPTION

[0034] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work all belong to the protection scope of the present invention. The experimental methods in the following embodiments, unless otherwise specified, are conventional methods, and the materials, reagents, etc. used in the following embodiments, unless otherwise specified, can all be obtained from commercial channels.

[0035] Example: Figure 1 As shown, a nozzle assembly for atomic layer deposition includes an integrated board 1, the integrated board 1 is a rectangular board with a tapered side, a mounting cover 2 is fixedly mounted on the upper side of the integrated board 1, and a temperature control device is connected to the side of the mounting cover 2, the mounting cover 2 is a rectangular cover with a hollowed-out lower side, a drainage mechanism 3 capable of combining multiple states of airflow is equidistantly arranged on the side of the integrated board 1, and a driving mechanism 4 capable of driving the drainage mechanism 3 to switch multiple states is equidistantly arranged on the side of the mounting cover 2;

[0036] The drainage mechanism 3 can guide the reaction gas and carrier gas in multiple states and can be adapted to irregular-shaped substrates.

[0037] like Figures 2 to 7As shown, the drainage mechanism 3 includes four groups of first channels 31 equidistantly arranged in a circular array on the bottom side of the integrated board 1, second channels 32 are equidistantly arranged in a circular array on the bottom side of the integrated board 1 corresponding to the positions of the first channels 31, third channels 33 are equidistantly arranged in a circular array on the bottom side of the integrated board 1 corresponding to the positions of the second channels 32, and the positions of the third channels 33 and the second channels 32 are equidistantly staggered, the first channels 31, the second channels 32 and the third channels 33 are cylindrical channels, and the size ratio is three to two to one, a working chamber 34 is opened in the interior of the integrated board 1 corresponding to the position of the first channel 31, and the working chamber 34 covers the first channel 31 and the second channels 32 and the third channels 33 at the peripheral positions thereof, the working chamber 34 is a cylindrical chamber, a linkage block 341 is fixedly installed on the inner wall of the working chamber 34, the linkage block 341 is a circular ring block, a first guide chamber 342 is opened at the upper position inside the linkage block 341, the first guide chamber 342 is a circular ring chamber, and the first guide chamber 342 is a circular ring chamber. A second guide cavity 343 is provided at the lower position inside, and the second guide cavity 343 is a left wheel-shaped annular cavity, so that an equidistant cylinder is left inside the linkage block 341 inside the second guide cavity 343, and a first air outlet groove 344 penetrating the linkage block 341 is equidistantly provided on the bottom wall of the first guide cavity 342 corresponding to the position of the third channel 33, and the first air outlet groove 344 is arranged at a cylindrical position formed inside the second guide cavity 343, and the first air outlet groove 344 is a cylindrical groove, and a second air outlet groove 345 penetrating the linkage block 341 is equidistantly provided on the bottom wall of the second guide cavity 343 corresponding to the position of the second channel 32, and the second air outlet groove 345 is a circular groove; specifically, the airflow inside the first guide cavity 342 can flow to the first air outlet groove 344 to be discharged into the third channel 33, and the airflow inside the second guide cavity 343 can flow to the second air outlet groove 345 to be discharged into the second channel 32, and the airflow at the center position of the linkage block 341 can flow into the first channel 31;

[0038] A bottom core block 35 is movably installed at the bottom wall of the working chamber 34. The bottom core block 35 is a circular ring block. A first matching groove 351 penetrating therethrough is equidistantly opened on the side of the bottom core block 35 corresponding to the position of the second channel 32. The first matching groove 351 is a circular groove. A second matching groove 352 penetrating therethrough is equidistantly opened on the side of the bottom core block 35 corresponding to the position of the third channel 33. The second matching groove 352 is a circular groove. A central core block 36 is movably installed inside the working chamber 34 corresponding to the upper side of the bottom core block 35. The central core block 36 is attached to the lower side of the linkage block 341 and the upper side of the bottom core block 35. The central core block 36 is a circular ring block. A third matching groove 361 penetrating therethrough is equidistantly opened on the side of the central core block 36 corresponding to the positions of the second channel 32 and the third channel 33. The third matching groove 361 is a fan-shaped groove. A fourth matching groove 362 penetrating therethrough is equidistantly opened on the side of the central core block 36. The fourth matching groove 362 is arranged between the third matching grooves 361. The number of the fourth matching grooves 362 is half the number of the third matching grooves 361; specifically, the third matching grooves 361 can guide the airflow at the corresponding position to be discharged into the first matching grooves 351 and the second matching grooves 352, and the airflow flows into the second channel 32 and the third channel 33 through the first matching grooves 351 and the second matching grooves 352. When the central core block 36 is rotated at a certain angle, the fourth matching grooves 362 correspond to the position of the first matching grooves 351 or the second matching grooves 352. At this time, the central core block 36 closes the second matching grooves 352 or the first matching grooves 351, so that only the first matching grooves 351 or the second matching grooves 352 are connected. When the top core block 37 is rotated at a certain angle, the first matching grooves 351 and the second matching grooves 352 are staggered with the corresponding first outlet grooves 344 and the second outlet grooves 345, and the central core block 36 is used to close the first matching grooves 351 and the second matching grooves 352.

[0039] A top core block 37 is arranged on the upper side of the linkage block 341 and the top core block 37 is fitted on the top wall of the working chamber 34. The top core block 37 is a circular ring block with an "L"-shaped cross section. Two sets of avoidance grooves 371 are mirror-imaged on the side of the top core block 37. The avoidance grooves 371 are fan-shaped grooves. A movable block 372 is fixedly installed on the inner side of the top core block 37. The movable block 372 is a round block with fan-shaped grooves equidistantly opened on the side. A fixed block 373 is fixedly installed on the inner side of the linkage block 341 and the fixed block 373 is fitted on the top wall of the working chamber 34. The fixed block 373 is a round block with fan-shaped grooves equidistantly provided on the side of the movable block 372. A constraint groove 38 is provided on the inner wall of the working chamber 34 corresponding to the bottom core block 35, the middle core block 36 and the top core block 37. The constraint groove 38 is a circular ring groove. A constraint block 381 is movably installed inside the constraint groove 38 and the constraint block 381 is fixedly sleeved on the side of the bottom core block 35, the middle core block 36 and the top core block 37 respectively. The constraint block 381 is a circular ring block made of rubber. A first connecting pipe 39 is provided on the inner side of the integrated board 1 and the mounting cover 2 and extends out. The first connecting pipe 39 is rotatably mounted on the inner side of the top core block 37 through a sealing ring. A second connecting pipe 391 is fixedly mounted on the top wall of the first guide cavity 342 and the second connecting pipe 391 passes through the inside of the avoidance groove 371 and extends out of the integrated board 1 and the mounting cover 2. A third connecting pipe 392 is fixedly mounted on the top wall of the second guide cavity 343 and the third connecting pipe 392 passes through the avoidance groove 371 and extends out of the integrated board 1 and the mounting cover 2. The groove 371 is extended through the linkage block 341, the integrated board 1 and the mounting cover 2, and the first connecting tube 39, the second connecting tube 391 and the third connecting tube 392 are circular tubes; specifically, when the top core block 37 rotates a certain angle, the positions of the fan-shaped grooves on the side of the movable block 372 and the fixed block 373 are staggered so that they are closed together to the center position of the linkage block 341, and the constraint block 381 set in the constraint groove 38 can constrain the bottom core block 35, the middle core block 36 and the top core block 37;

[0040] The above is the entire structure of a set of drainage mechanism 3. Figure 3 As shown, multiple groups of drainage mechanisms 3 are equidistantly and staggeredly arranged at the side of the integrated board 1 to form a spray module of the nozzle assembly, which can be modularly arranged, connected and closed through the drainage mechanism 3 to be suitable for deposition on substrates of different shapes, such as Fig.10 As shown, each first connecting pipe 39, second connecting pipe 391 and third connecting pipe 392 of the nozzle module are connected to a main valve position, and the side of the main valve feed is connected to the corresponding feed position. The difference is that the side of the main valve connected to the third connecting pipe 392 is also connected to a group of sub-valves, and the feed of the sub-valves is respectively connected to the exhaust fan and the oxidizing gas, and the oxidizing gas is connected to the temperature controller;

[0041] like Figures 4 to 9As shown, the driving mechanism 4 includes a connecting cavity 41 opened on the upper side of the integrated board 1, and the connecting cavity 41 corresponds to the center position between the four groups of first channels 31. The connecting cavity 41 is a cylindrical cavity. A slot 42 penetrating therethrough is opened on the upper side of the mounting cover 2 corresponding to the connecting cavity 41. The slot 42 is a circular slot. A micro motor 43 is movably installed inside the slot 42, and the micro motor 43 is attached to the upper side of the integrated board 1. The output end of the micro motor 43 extends to the inner position of the connecting cavity 41. A mounting block 44 is fixedly sleeved on the side of the micro motor 43, and the mounting block 44 is fixedly installed on the side of the mounting cover 2 by screws. A micro electric push rod 45 is fixedly installed at the output end of the micro motor 43, and the micro electric push rod 45 is movably arranged inside the connecting cavity 41. The micro electric push rod 45 The micro-motor 43 is fixed to the output end side of the micro-electric push rod 45 by a connecting piece, and a driving block 46 is fixedly installed at the output end of the micro-electric push rod 45, and the driving block 46 is fixed to the output end side of the micro-electric push rod 45 by a connecting piece, and the driving block 46 is a circular block made of elastic rubber; specifically, the micro-electric push rod 45 can push the driving block 46 to move inside the connecting cavity 41, so that the driving block 46 can be respectively attached to the side of the constraint block 381 at different positions, and when the micro-motor 43 drives the micro-electric push rod 45 to rotate, the driving block 46 can drive the constraint block 381 to rotate inside the constraint groove 38, and the micro-motor 43 can be disassembled from the side of the mounting cover 2 by the provided mounting block 44, so that the corresponding micro-motor 43, the micro-electric push rod 45 and the driving block 46 can be taken out for maintenance and replacement;

[0042] The above is a complete structure of a set of driving mechanism 4. Figure 8 As shown, a plurality of drive mechanisms 4 are equidistantly and staggeredly arranged on the side of the mounting cover 2 to form a control module for the nozzle assembly. The drive mechanisms 4 can be modularly arranged to adapt to different states of the drainage mechanism 3 for control, and one set of drives can control four sets of corresponding airflow flow adjustments, thereby improving control efficiency and reducing energy consumption.

[0043] Working principle:

[0044] Before use: select the corresponding control program according to the different shapes of the substrate, and then determine the different deposition methods used to refine the internal program of the control program for selection and use;

[0045] When in use: corresponding to different shapes of bases, the driving mechanism 4 is operated corresponding to the airflow position of the drainage mechanism 3 that needs to be completely closed, the micro electric push rod 45 can push and pull the driving block 46 to move up and down, so that the driving block 46 is respectively attached to the side of the constraint block 381 corresponding to the position of the bottom core block 35 and the top core block 37, the micro motor 43 drives the micro electric push rod 45 to rotate the driving block 46 to drive the constraint block 381 to rotate, the constraint block 381 makes the bottom core block 35 rotate a certain angle to stagger the first matching groove 351 and the second matching groove 352 with the corresponding first air outlet groove 344 and the second air outlet groove 345 to close, the top core block 37 rotates a certain angle to stagger the side fan-shaped groove positions of the movable block 372 and the fixed block 373 to be closed, at this time, the first channel 31, the second channel 32 and the third channel 33 at the corresponding positions are closed;

[0046] Corresponding to different deposition methods, such as Fig.10 As shown, at this time, the reaction gas is transported in a single channel, and the reaction gas is a combination of an organic precursor and an oxidant. Except for the gas flow position of the drainage mechanism 3 that needs to be closed, the first channel 31 inside the other drainage mechanisms 3 is first connected in a single manner, and the reaction gas is guided to the first channel 31 through the first connecting pipe 39 to be discharged to the substrate for deposition chemical reaction, and then the second channel 32 and the third channel 33 are switched to be connected, and the carrier gas is guided to the third channel 33 through the second connecting pipe 391 to be discharged for flushing. At this time, the sub-valve is connected to the exhaust fan to close the external oxidizing gas, and the exhaust fan is guided through the third connecting pipe 392 to make the flushed gas and by-products be pumped out from the second channel 32, so that the deposition operation is completed layer by layer;

[0047] like Fig.11 As shown, at this time, the reaction gas is transported through two channels, and the reaction gas is a single organic precursor. As above, the first channel 31 is first connected in a single channel, and the reaction gas is discharged through the first channel 31, and then the second channel 32 is switched to be connected in a single channel. At this time, the sub-valve is closed and the air pump is connected to the external oxidizing gas, and the oxidizing gas is discharged through the second channel 32 as an oxidant to cooperate with the deposition operation, and finally the third channel 33 is switched to be connected in a single channel, and the carrier gas is discharged through the third channel 33 for flushing, and then the sub-valve is switched to the feed position, and the second channel 32 discharges the flushed gas and by-products through the air pump, thereby completing another mode of layer-by-layer deposition operation;

[0048] The temperature control device is connected to the installation cover 2, and the interior of the installation cover 2 can be operated at a constant temperature. The first connecting pipe 39, the second connecting pipe 391 and part of the third connecting pipe 392 are arranged on the side of the installation cover 2, and the airflow passing through the interior can be controlled by the side of the first connecting pipe 39, the second connecting pipe 391 and the third connecting pipe 392. The connecting cavity 41 can also be operated by temperature control inside the installation cover 2.

[0049] The difference is that when the deposition effect is not good during the deposition operation, Fig.11As shown, the oxidizing gas whose temperature is adjusted by the temperature control device is guided to the inside of the second channel 32 through the third connecting pipe 392 to flush the substrate, so that the reaction gas deposited on the side thereof can adjust the temperature to accelerate the deposition reaction.

[0050] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge scope of technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A nozzle assembly for atomic layer deposition, comprising an integrated board (1), a mounting cover (2) fixedly mounted on the upper side of the integrated board (1), drainage mechanisms (3) equidistantly arranged on the side of the integrated board (1), and driving mechanisms (4) equidistantly arranged on the side of the mounting cover (2); Features: The drainage mechanism (3) comprises a first channel (31), a second channel (32) and a third channel (33); linkage blocks (341) are arranged on the upper sides of the first channel (31), the second channel (32) and the third channel (33); a first flow guiding cavity (342) and a second flow guiding cavity (343) are arranged inside the linkage block (341); a bottom core block (35) and a middle core block (36) are arranged on the lower side of the linkage block (341); a top core block (37) is arranged on the upper side of the linkage block (341); two groups of avoidance grooves (371) are provided on the side of the top core block (37); a movable block (372) is fixedly installed on the inner side of the top core block (37); a fixed block (373) is fixedly installed on the inner side of the linkage block (341); and the side of the bottom core block (35) corresponds to the second channel (32). A first matching groove (351) is equidistantly provided through the core block (36), and a second matching groove (352) is equidistantly provided through the core block (36) at a position corresponding to the third channel (33). A third matching groove (361) is equidistantly provided through the core block (36) at a position corresponding to the second channel (32) and the third channel (33). A fourth matching groove (362) is equidistantly provided through the core block (36). The fourth matching groove (362) is arranged between the third matching grooves (361). Constraint blocks (381) are arranged on the sides of the bottom core block (35), the core block (36) and the top core block (37). The constraint blocks (381) are circular blocks made of rubber. A first connecting tube (39), a second connecting tube (391) and a third connecting tube (392) are arranged on the upper side of the top core block (37). The driving mechanism (4) comprises a micro motor (43), a mounting block (44) is arranged on the side of the micro motor (43), a micro electric push rod (45) is arranged on the lower side of the micro motor (43), a driving block (46) is arranged on the side of the micro electric push rod (45), and the driving block (46) is a circular block made of elastic rubber material; The micro electric push rod (45) can push and pull the driving block (46) to move up and down, so that the driving block (46) is respectively attached to the side of the constraint block (381) corresponding to the position of the bottom core block (35), the middle core block (36) and the top core block (37), and the micro motor (43) drives the micro electric push rod (45) to rotate the driving block (46) and drive the constraint block (381) to rotate.

2. A showerhead assembly for atomic layer deposition according to claim 1, characterized in that: The drainage mechanism (3) comprises four groups of first channels (31) opened on the bottom side of the integrated board (1), a second channel (32) opened on the bottom side of the integrated board (1), and a third channel (33) opened on the bottom side of the integrated board (1).

3. A showerhead assembly for atomic layer deposition according to claim 2, characterized in that: The drainage mechanism (3) further comprises a working chamber (34) provided inside the integrated board (1); a linkage block (341) is fixedly mounted on the inner wall of the working chamber (34); a first drainage chamber (342) is provided inside the linkage block (341) at an upper position; a second drainage chamber (343) is provided inside the linkage block (341) at a lower position; a first air outlet groove (344) is provided on the bottom wall of the first drainage chamber (342); and a second air outlet groove (345) is provided on the bottom wall of the second drainage chamber (343).

4. A showerhead assembly for atomic layer deposition according to claim 3, characterized in that: The drainage mechanism (3) further comprises a bottom core block (35) movably mounted on the bottom wall of the working chamber (34), and a middle core block (36) movably mounted inside the working chamber (34).

5. A showerhead assembly for atomic layer deposition according to claim 4, characterized in that: The inner wall of the working chamber (34) is provided with a restraining groove (38), the restraining block (381) is movably mounted inside the restraining groove (38), the first connecting tube (39) is arranged on the inner side of the top core block (37), the second connecting tube (391) is fixedly mounted on the top wall of the first flow guiding chamber (342), and the third connecting tube (392) is fixedly mounted on the top wall of the second flow guiding chamber (343).

6. A showerhead assembly for atomic layer deposition according to claim 5, characterized in that: The cross-sectional diameter ratio of the first channel (31), the second channel (32) and the third channel (33) is three to two to one; the working chamber (34) covers the first channel (31) and the second channel (32) and the third channel (33) at the peripheral position thereof; the number of the fourth matching grooves (362) is half the number of the third matching grooves (361); and the restraining blocks (381) are respectively fixedly sleeved on the side positions of the bottom core block (35), the middle core block (36) and the top core block (37).

7. A showerhead assembly for atomic layer deposition according to claim 6, characterized in that: The driving mechanism (4) comprises a connecting cavity (41) provided on the upper side of the integrated board (1); a slot (42) provided on the upper side of the mounting cover (2); a micro motor (43) movably mounted inside the slot (42); a mounting block (44) fixedly sleeved on the side of the micro motor (43); a micro electric push rod (45) fixedly mounted on the output end of the micro motor (43); and a driving block (46) fixedly mounted on the output end of the micro electric push rod (45).

8. A showerhead assembly for atomic layer deposition according to claim 7, characterized in that: The connecting cavity (41) corresponds to the center position between the four groups of first channels (31), the micro motor (43) is attached to the upper side of the integrated board (1), the mounting block (44) is fixedly mounted on the side of the mounting cover (2) by means of screws, and the micro electric push rod (45) is movably arranged inside the connecting cavity (41).

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