Impurity detection system for high-purity gas and detection control method thereof

Abstract

The invention relates to an impurity detection system for high-purity gas and a detection control method thereof, and the impurity detection system for the high-purity gas comprises a detection path selection module, a busbar sample introduction module, a chromatography pretreatment module and a moisture detection pretreatment module, the detection path selection module is connected with confluence path units contained in the busbar sample introduction module, the chromatography pretreatment module comprises a plurality of chromatography pretreatment units, the confluence path units are respectively connected with the corresponding chromatography pretreatment units, each confluence path unit is connected with the moisture detection pretreatment module, and the moisture detection pretreatment module is connected with the detection path selection module. The detection path selection module is used for acquiring storage information in a high-purity gas storage tank, and performing corresponding chromatographic analysis steps and / or moisture detection analysis steps on the high-purity gas according to the storage information; the opportunity and parameters of gas entering the detection equipment are automatically adjusted according to the storage states of different steel cylinders, so that the accuracy of a detection result is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of impurity detection of high-purity gas, and in particular to a high-purity gas impurity detection system and a detection control method thereof. Background Art

[0002] At present, high-purity bulk gases are widely used in various fields as the core components of industrial gases. Krypton and xenon in high-purity bulk gases are a kind of natural rare inert gases. In recent years, with the continuous development of the electronics industry, krypton and xenon have gradually been used in many high-end products. Therefore, the industry has very strict requirements on the purity of krypton and xenon. Water is one of the key impurities that affect the purity of krypton and xenon. The presence of water causes the failure of electrical equipment or reduces the physical and chemical properties of the gas. Therefore, the impurity detection system of traditional high-purity gas needs to rely on water detection, and also needs to take into account the detection of other impurities. However, the water analysis detection of the impurity detection system of traditional high-purity gas has great uncertainty. For example, in the daily analysis of water content in gas, it is found that the trace water content fluctuates and the stabilization time is very long. The stabilization time of water content in different cylinders is inconsistent, which brings great uncertainty to the quality analysis results of the product. Summary of the invention

[0003] In order to solve the problem that the traditional high-purity gas impurity detection system cannot guarantee the accuracy of moisture analysis detection while taking into account other impurity detection, the present application provides a high-purity gas impurity detection system and a detection control method thereof.

[0004] A high-purity gas impurity detection system, the high-purity gas impurity detection system comprising a detection path selection module, a bus sampling module, a chromatographic pretreatment module, an argon carrier gas chromatographic analysis module, a nitrogen carrier gas chromatographic analysis module, a moisture detection pretreatment module, a moisture detection analysis module and a tail gas recovery module, the detection path selection module is connected to a bus path unit included in the bus sampling module, the chromatographic pretreatment module comprises a plurality of chromatographic pretreatment units, at least three bus path units are provided, and at least two bus path units are respectively connected to corresponding chromatographic pretreatment units, the other end of the chromatographic pretreatment unit is connected to one end of the argon carrier gas chromatographic analysis module, or is connected to one end of the nitrogen carrier gas chromatographic analysis module, each of the bus path units is connected to one end of the moisture detection pretreatment module, and the other end of the argon carrier gas chromatographic analysis module, the other end of the nitrogen carrier gas chromatographic analysis module and the other end of the moisture detection pretreatment module are all connected to the tail gas recovery module; The detection path selection module is used, on the one hand, to obtain storage information in the high-purity gas storage tank, and on the other hand, to transport the high-purity gas in the high-purity gas storage tank to the corresponding one or more of the convergence path units according to the storage information, so that the high-purity gas undergoes corresponding chromatographic analysis steps and / or moisture detection analysis steps, and the tail gas recovery module is used to recover the high-purity gas after analysis.

[0005] By adopting the above technical solution, by setting up independent chromatographic preprocessing modules, moisture detection preprocessing modules and moisture detection analysis modules, and combining the detection path selection module to intelligently process the storage information of the gas (such as storage time, temperature, etc.), the uncertainty problem of moisture detection in the traditional system is solved. By reasonably selecting the detection path and module, the system can automatically adjust the timing and parameters of the gas entering the detection equipment according to the storage status of different cylinders, reducing the impact of moisture content fluctuations. In addition, the moisture detection preprocessing module ensures that the gas entering the detection equipment has been fully processed before analysis, reducing errors caused by system instability and sample inconsistency, thereby shortening the moisture stabilization time and improving the consistency and accuracy of the test results.

[0006] Preferably, the confluence path unit includes two intermediate storage tanks, two confluence gas source isolation valves, a confluence pressure reducing valve and a confluence particle filter element, one end of each of the intermediate storage tanks is connected to the detection path selection module, and the other end is connected to one end of a confluence gas source isolation valve, the other end of each of the confluence gas source isolation valves is connected to one end of the confluence pressure reducing valve, the other end of the confluence pressure reducing valve is connected to one end of the confluence particle filter element, the other end of the confluence particle filter element is connected to the chromatographic pretreatment module or the moisture detection pretreatment module, a first confluence pressure gauge and a first confluence vent pipeline are respectively provided between the other end of the confluence gas source isolation valve and one end of the confluence pressure reducing valve, and a second confluence pressure gauge and a second confluence vent pipeline are respectively provided between the other end of the confluence pressure reducing valve and the confluence particle filter element.

[0007] By adopting the above technical solution, the gas samples of multiple storage tanks are reasonably distributed to the detection path through the design of the confluence path unit, and the gas pressure is accurately controlled through the confluence gas source isolation valve and the confluence pressure reducing valve, avoiding the influence of pressure fluctuations on the detection results. At the same time, the particulate matter in the gas is filtered by the particle filter to ensure the purity of the gas sample, thereby improving the accuracy of the detection and reducing the detection error caused by impurity interference.

[0008] Preferably, the chromatographic pretreatment unit includes a chromatographic gas source isolating valve, a chromatographic pressure reducing valve and a chromatographic particle filter element, one end of the chromatographic gas source isolating valve is connected to the confluence path unit, the other end of the chromatographic gas source isolating valve is connected to one end of the chromatographic pressure reducing valve, the other end of the chromatographic pressure reducing valve is connected to one end of the chromatographic particle filter element, the other end of the chromatographic particle filter element is connected to one end of the argon carrier gas chromatography analysis module, or is connected to one end of the nitrogen carrier gas chromatography analysis module, a first chromatographic pretreatment pressure gauge is provided between the other end of the chromatographic gas source isolating valve and one end of the chromatographic pressure reducing valve, and a second chromatographic pretreatment pressure gauge is provided between the other end of the chromatographic pressure reducing valve and one end of the chromatographic particle filter element.

[0009] By adopting the above technical solution, the gas entering the chromatographic analysis module can be fully pretreated through the combination of the isolation valve, the pressure reducing valve and the filter element in the chromatographic pretreatment unit, thereby ensuring the stability and accuracy of the chromatographic analysis process. By adjusting the pressure of the gas source and filtering impurities in the gas, the purity and stability of the gas entering the chromatographic analysis module can be improved, thereby improving the accuracy of the chromatographic analysis results.

[0010] Preferably, the impurity detection system for high-purity gas also includes an argon gas supply module and a nitrogen gas supply module, the first gas output end of the argon gas supply module is connected to the gas input end of the argon carrier gas chromatography analysis module, the second gas output end of the argon gas supply module is connected to the first gas input end of the moisture detection and analysis module, the first gas output end of the nitrogen gas supply module is connected to the gas input end of the nitrogen carrier gas chromatography analysis module, and the second gas output end of the nitrogen gas supply module is connected to the second gas input end of the moisture detection and analysis module.

[0011] By adopting the above technical solution, the argon supply module and the nitrogen supply module can provide suitable carrier gas for the argon carrier gas chromatography analysis module, the nitrogen carrier gas chromatography analysis module and the moisture detection analysis module respectively, ensuring that different analysis modules get corresponding carrier gas support according to needs, thereby ensuring the stability of the detection process and the accuracy of the detection results. At the same time, through the reasonable design of different gas output ends, the flexibility of the system can be improved to meet different detection needs.

[0012] Preferably, the moisture pretreatment module includes a manual isolation main valve, a moisture pressure reducing valve and a moisture particle filter element, a confluence manual isolation sub-valve is provided between one end of the manual isolation main valve and each of the confluence path units, the other end of the manual isolation main valve is connected to one end of the moisture pressure reducing valve, the other end of the moisture pressure reducing valve is connected to one end of the moisture particle filter element, and the other end of the moisture particle filter element is connected to the moisture detection and analysis module.

[0013] By adopting the above technical solution, the manual control of the gas flow path can be achieved through the cooperation of the manual isolation main valve and multiple converging manual isolation sub-valves, ensuring that the gas flow path adjustment during the moisture detection process is more flexible. The combination of the moisture pressure reducing valve and the moisture particle filter can effectively control the pressure and purity of the gas before it enters the moisture detection and analysis module, reduce the fluctuation of the moisture content in the gas, and thus improve the accuracy and stability of the moisture detection results.

[0014] Preferably, the moisture pretreatment module also includes an argon supply manual isolation valve and a nitrogen supply manual isolation valve, one end of the argon supply manual isolation valve is connected to the second gas output end of the argon supply module, and the other end of the argon supply manual isolation valve is connected between the manual isolation main valve and the moisture pressure reducing valve, one end of the nitrogen supply manual isolation valve is connected to the second gas output end of the nitrogen supply module, and the other end of the nitrogen supply manual isolation valve is connected between the manual isolation main valve and the moisture pressure reducing valve.

[0015] By adopting the above technical solution, the argon supply manual isolation valve and the nitrogen supply manual isolation valve can be set to achieve independent supply of argon and nitrogen, ensuring that the moisture detection preprocessing module can select the appropriate gas source for moisture detection according to demand under different conditions. The flexible switching of argon and nitrogen can improve the flexibility and adaptability of moisture detection, thereby improving the efficiency and accuracy of detection.

[0016] Preferably, the moisture pretreatment module further comprises a moisture pretreatment drain pipeline connected between the moisture pressure reducing valve and the moisture particle filter element, and a manual drain isolation valve is provided on the moisture pretreatment drain pipeline.

[0017] By adopting the above technical solution, the excess gas generated during the moisture detection pretreatment process can be emptied in time through the setting of the moisture pretreatment emptying pipeline, avoiding detection errors caused by gas accumulation. At the same time, through the control of the emptying manual isolation valve, the emptying process can be flexibly adjusted to ensure the smooth progress of the detection process, thereby improving the accuracy and stability of moisture detection.

[0018] Preferably, the tail gas recovery module includes a chromatographic analysis recovery pipeline, a moisture detection and analysis recovery pipeline, a booster pump, a check valve and a buffer tank, one end of the chromatographic analysis recovery pipeline is connected to the argon carrier gas chromatography analysis module or the nitrogen carrier gas chromatography analysis module, one end of the moisture detection and analysis recovery pipeline is connected to the moisture detection and analysis module, the other end of the moisture detection and analysis recovery pipeline is merged into the other end of the chromatographic analysis recovery pipeline to be connected to one end of the booster pump, the other end of the booster pump is connected to one end of the check valve, and the other end of the check valve is connected to the buffer tank for recovering the high-purity gas after analysis.

[0019] By adopting the above technical solution, the design of the tail gas recovery module can realize the recovery of high-purity gas after chromatographic analysis and moisture detection, avoiding gas waste. Through the combination of booster pump and buffer tank, high-purity gas can be effectively recovered, and the pressure and flow of the recovered gas can be ensured to meet the subsequent use requirements, thereby improving the economy and sustainability of the system.

[0020] Preferably, the chromatography analysis recovery pipeline includes a first recovery filter element and a first recovery isolation valve, one end of the first recovery filter element is connected to the argon carrier gas chromatography analysis module or the nitrogen carrier gas chromatography analysis module, the other end of the first recovery filter element is connected to one end of the first recovery isolation valve, the other end of the first recovery isolation valve is connected to the boosting pump, and a first recovery discharge pipeline is provided between the first recovery filter element and the first recovery isolation valve; The moisture detection and analysis recovery pipeline includes a second recovery filter element and a second recovery isolation valve. One end of the second recovery filter element is connected to the argon carrier gas chromatography analysis module or the nitrogen carrier gas chromatography analysis module, and the other end of the second recovery filter element is connected to one end of the second recovery isolation valve. The other end of the second recovery isolation valve is connected to the boosting pump. A second recovery discharge pipeline is provided between the second recovery filter element and the second recovery isolation valve.

[0021] By adopting the above technical solution, the gas after chromatographic analysis can be filtered and controlled through the recovery filter and recovery isolation valve in the chromatographic analysis recovery pipeline to ensure the purity and pressure stability of the recovered gas. By setting up a recovery discharge pipeline, unqualified gas can be discharged in time to ensure the quality of the recovered gas, thereby improving the efficiency and reliability of the recovery process.

[0022] A detection control method for an impurity detection system based on high-purity gas is applied to an impurity detection system based on high-purity gas, and the detection control method comprises: Obtaining storage information of a high-purity gas storage tank, wherein the storage information includes storage time, periodic storage temperature range, and stored gas type; Based on the mapping relationship in the local database, determine a first parameter setting value corresponding to the storage duration, and determine a second parameter setting value corresponding to the periodic storage temperature range, determine a first weight value of the first parameter setting value according to the storage gas type; and determine a second weight value of the second parameter setting value, add the product of the first parameter setting value and the first weight value and the product of the second parameter setting value and the second weight value to generate a corresponding preset control parameter group; Acquire a path control parameter group of each detection path to be confirmed, and match the path control parameter group with the preset control parameter group to generate a corresponding matching result; According to the matching result, a corresponding target detection path is determined in each detection path to be confirmed, and according to the preset control parameters of the preset control parameter group, the path control parameters of the path control parameter group in the target detection path are adjusted, wherein the path control parameters include module operation parameters, carrier gas flow parameters and carrier gas flow rate parameters; When the adjustment of the path control parameters is completed after detection, the high-purity gas analysis and detection process is executed.

[0023] By adopting the above technical solution, the control parameters of the detection path can be dynamically adjusted by acquiring the storage information of the high-purity gas tank, and the detection process can be optimized according to information such as gas storage time and temperature change. Through intelligent adjustment of the path control parameters, it is ensured that gas detection under different conditions can be carried out under the optimal parameters, thereby improving the accuracy and efficiency of the detection results and reducing detection errors.

[0024] In summary, the present application includes at least one of the following beneficial technical effects: 1. The detection system solves the uncertainty problem of moisture detection in traditional systems by setting up independent chromatography preprocessing modules, moisture detection preprocessing modules and moisture detection analysis modules, and combining the detection path selection module to intelligently process the gas storage information (such as storage time, temperature, etc.). By reasonably selecting the detection path and modules, the system can automatically adjust the timing and parameters of the gas entering the detection equipment according to the storage status of different cylinders, reducing the impact of moisture content fluctuations. In addition, the moisture detection preprocessing module ensures that the gas entering the detection equipment has been fully processed before analysis, reducing errors caused by system instability and sample inconsistency, thereby shortening the moisture stabilization time and improving the consistency and accuracy of the test results; 2. The purity of the high-purity gas sample before it enters the detection equipment is ensured by rationally arranging the chromatographic pretreatment module and the moisture detection pretreatment module. The chromatographic pretreatment system can efficiently separate other impurities in the gas sample, while the moisture pretreatment system can remove trace moisture that may exist in the gas. This design ensures that the impurities and moisture in the sample are fully processed before entering the chromatographic analysis module and the moisture detection module, avoiding interference with the test results due to residual impurities or moisture. Through the parallel operation of multiple pretreatment systems, the instability of the system in different analysis steps is further reduced, and the consistency of detection is improved, thereby effectively reducing the detection errors caused by system fluctuations or incomplete sample processing, and ultimately improving the detection accuracy and reliability of high-purity gases such as krypton and xenon; 3. Determine the corresponding parameter setting values ​​by obtaining information such as the storage time, periodic storage temperature range, and stored gas type of the high-purity gas storage tank. This approach can dynamically adjust the detection parameters according to the historical storage conditions and characteristics of the gas, so that the detection path and process can adapt to different gas conditions and reduce the detection errors caused by different gas states. For example, if a gas cylinder has been stored for a long time and the temperature fluctuates greatly, the system can automatically adjust the control parameters of the detection to make the detection process more accurate and reduce the impact of moisture fluctuations on the detection results. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a flowchart of an impurity detection system for high-purity gas in one embodiment of the present application.

[0026] Figure 2 It is a structural schematic diagram of a converging path unit of a high-purity gas impurity detection system in one embodiment of the present application; Figure 3 It is a structural schematic diagram of a chromatographic pretreatment unit of a high-purity gas impurity detection system in one embodiment of the present application; Figure 4 It is a structural schematic diagram of a moisture detection preprocessing module and a moisture detection analysis module of an impurity detection system for high-purity gas in one embodiment of the present application; Figure 5 It is a structural schematic diagram of a tail gas recovery module, an argon carrier gas chromatography analysis module and a moisture detection and analysis module of an impurity detection system for high-purity gas in one embodiment of the present application; Figure 6 It is a flow chart of a method for detecting and controlling impurities in a high-purity gas in one embodiment of the present application.

[0027] Description of reference numerals: 1. Detection path selection module; 2. Confluence sampling module; 21. Intermediate storage tank; 22. Confluence gas source isolation valve; 23. Confluence pressure reducing valve; 24. Confluence particle filter; 25. First confluence pressure gauge; 26. First confluence vent pipeline; 27. Second confluence pressure gauge; 28. Second confluence vent pipeline; 3. Chromatographic pretreatment module; 31. Chromatographic gas source isolation valve; 32. Chromatographic pressure reducing valve; 33. Chromatographic particle filter; 34. First chromatographic pretreatment pressure gauge; 35. Second chromatographic pretreatment pressure gauge; 4. Argon carrier gas chromatography analysis module; 5. Nitrogen carrier gas chromatography analysis module; 6. Moisture detection pretreatment module; 7. Moisture detection analysis module; 71. Manual isolation main valve; 72. Moisture pressure reducing valve; 73. Moisture particle filter element; 74. Converging manual isolation sub-valve; 75. Argon supply manual isolation sub-valve; 76. Nitrogen supply manual isolation sub-valve; 77. Emptying manual isolation sub-valve; 8. Tail gas recovery module; 81. Chromatographic analysis recovery pipeline; 811. First recovery filter element; 812. First recovery isolation valve; 813. First recovery discharge pipeline; 82. Moisture detection and analysis recovery pipeline; 821. Second recovery filter element; 822. Second recovery isolation valve; 823. Second recovery discharge pipeline; 83. Booster pump; 84. Check valve; 85. Buffer tank; 9. Argon supply module; 10. Nitrogen supply module. DETAILED DESCRIPTION

[0028] The present application is further described in detail below in conjunction with the accompanying drawings.

[0029] like Figure 1 As shown, a high-purity gas impurity detection system, the high-purity gas impurity detection system includes a detection path selection module 1, a bus sampling module 2, a chromatographic pretreatment module 3, an argon carrier gas chromatographic analysis module 4, a nitrogen carrier gas chromatographic analysis module 5, a moisture detection pretreatment module 6, a moisture detection analysis module 7 and a tail gas recovery module 8, the detection path selection module 1 is connected to the bus path unit included in the bus sampling module 2, the chromatographic pretreatment module 3 includes a plurality of chromatographic pretreatment units, the bus path units are at least three, and at least two of the bus path units are respectively connected to the corresponding chromatographic pretreatment units, the other end of the chromatographic pretreatment unit is connected to one end of the argon carrier gas chromatographic analysis module 4, or is connected to one end of the nitrogen carrier gas chromatographic analysis module 5, each of the bus path units is connected to one end of the moisture detection pretreatment module 6, the other end of the argon carrier gas chromatographic analysis module 4, the other end of the nitrogen carrier gas chromatographic analysis module 5 and the other end of the moisture detection pretreatment module 6 are all connected to the tail gas recovery module 8; The detection path selection module 1 is used, on the one hand, to obtain the storage information in the high-purity gas storage tank, and on the other hand, to transport the high-purity gas in the high-purity gas storage tank to the corresponding one or more of the convergence path units according to the storage information, so that the high-purity gas undergoes corresponding chromatographic analysis steps and / or moisture detection analysis steps, and the tail gas recovery module 8 is used to recover the high-purity gas after analysis.

[0030] Specifically, the impurity detection system of the high-purity gas determines the initial flow path of the gas by connecting the detection path selection module 1 and the bus sampling module 2. Specifically, the detection path selection module 1 obtains the storage state of the gas according to the storage information and distributes the gas to the appropriate bus path unit. Each bus path unit is connected to a plurality of chromatographic pretreatment units, wherein at least two bus path units are respectively connected to corresponding chromatographic pretreatment units to ensure that different gas flow paths can be processed with corresponding impurities according to requirements. The unit in the chromatographic pretreatment module 3 further realizes the separation and analysis of specific impurities through the argon carrier gas chromatography analysis module 4 or the nitrogen carrier gas chromatography analysis module 5. The logic of this process is that the accurate analysis of impurity components in different gas samples can be improved by the reasonable selection of carrier gas. At the same time, the moisture detection pretreatment module 6 is also connected to each bus path unit to ensure that the gas can effectively remove interference factors before entering the moisture detection module so as to perform accurate moisture content detection. After the detection is completed, the tail ends of the argon carrier gas chromatography analysis module 4, the nitrogen carrier gas chromatography analysis module 5 and the moisture detection pretreatment module 6 are connected to the tail gas recovery module 8 for recovering the high-purity gas used in the detection process. This connection relationship and control logic between the modules ensures the coordinated operation between different detection steps. At the same time, through the analysis of the stored information, the linkage between the gas flow path and the detection module is dynamically adjusted to maximize the detection accuracy and reduce the detection error.

[0031] In summary, by setting up independent chromatographic preprocessing module 3, moisture detection preprocessing module 6 and moisture detection analysis module 7, and combining detection path selection module 1 to intelligently process gas storage information (such as storage time, temperature, etc.), the uncertainty problem of moisture detection in traditional systems is solved. By reasonably selecting detection paths and modules, the system can automatically adjust the timing and parameters of gas entering the detection equipment according to the storage status of different cylinders, reducing the impact of moisture content fluctuations. In addition, the moisture detection preprocessing module 6 ensures that the gas entering the detection equipment has been fully processed before analysis, reducing errors caused by system instability and sample inconsistency, thereby shortening the moisture stabilization time and improving the consistency and accuracy of the detection results.

[0032] Furthermore, three sets of bus sampling systems are built, each of which can be connected to two cylinders. The bus sampling system includes gas source isolation, venting, particle filtration, pressure display and pressure reduction. Each set of bus main pipeline enters the room and is divided into chromatographic pretreatment and moisture meter pretreatment. There are 2 chromatographs and 2 moisture meters. Row 1 is connected to argon carrier gas chromatograph and moisture meter, row 2 is connected to nitrogen carrier gas chromatograph, row 3 is connected to moisture meter, and row 3 cylinder connectors are reserved with G5 / 8 and W21.8 for replacement. There are 2 sets of chromatographic pretreatment, including gas source isolation and pressure display. , pressure reducing valve and particle filter. All pipelines from the cylinder to the pretreatment are of SS-316L-BA level. A 1 / 4 or 1 / 8 ferrule adapter is reserved at the pretreatment outlet. The chromatograph analyzer is connected and installed by the user. One set of moisture meter pretreatment, including gas source isolation, pressure display, pressure reducing valve and particle filter. The pipeline from the cylinder to the pretreatment is of SS-316L-BA level. The pipeline from the pretreatment and the outlet to the moisture meter is of SS-316L-EP level. It is equipped with 4 sets of carrier gas panels, 2 for backup and 2 for use, 2 sets of nitrogen carrier gas, and 2 sets of argon carrier gas. Connect to the corresponding chromatograph, the pipeline is of SS-316L-BA level, the original nitrogen and argon pipelines are rearranged and connected to the moisture meter, and the pipeline is of SS-316L-BA level. For Kr and Xe tail gas recovery module 8: For tail gas of all equipment, common inert gas (such as nitrogen, argon, helium, hydrogen, oxygen, etc.) can be directly connected to the atmospheric pressure exhaust pipe, and Kr and Xe products enter the buffer tank 85 through the first-level booster pump 83. When the pressure of the buffer tank 85 reaches the set upper limit (less than 0.8MPa), the inlet valve of the buffer tank 85 is closed, the outlet valve is opened, and the production device or process end is connected through the second-level booster pump 83. The process requires a pressure greater than 0.5MPa. Each node of the whole system includes gas source isolation, one-way valve, pressure display, particle filtration, etc., and the research on moisture detection in different gas media under different conditions. After the analysis system is built, it is strictly executed in accordance with the task requirements: experimental research determines the change law of water content of high-purity gas products at different storage times; experimentally determine the change of water content of high-purity gas products at different temperatures and the analysis process and optimal analysis time of existing products.

[0033] Further, such as Figure 2As shown, the confluence path unit includes two intermediate storage tanks 21, two confluence gas source isolation valves 22, a confluence pressure reducing valve 23 and a confluence particle filter 24, one end of each of the intermediate storage tanks 21 is connected to the detection path selection module 1, and the other end is connected to one end of a confluence gas source isolation valve 22, the other end of each confluence gas source isolation valve 22 is connected to one end of the confluence pressure reducing valve 23, the other end of the confluence pressure reducing valve 23 is connected to one end of the confluence particle filter 24, the other end of the confluence particle filter 24 is connected to the chromatographic pretreatment module 3 or the moisture detection pretreatment module 6, a first confluence pressure gauge 25 and a first confluence vent pipeline 26 are respectively provided between the other end of the confluence gas source isolation valve 22 and one end of the confluence pressure reducing valve 23, and a second confluence pressure gauge 27 and a second confluence vent pipeline 28 are respectively provided between the other end of the confluence pressure reducing valve 23 and the confluence particle filter 24.

[0034] Specifically, in this system, the chromatographic pretreatment module 3 includes an argon carrier gas chromatographic pretreatment unit and a nitrogen carrier gas chromatographic pretreatment unit, and the connection logic of the confluence path unit is based on the precise management of the steps and paths of different gas flow control. First, one end of the two intermediate storage tanks 21 is connected to the detection path selection module 1, which determines the optimal path of gas flow by analyzing the stored information. The other end of the intermediate storage tank 21 is connected to the corresponding confluence gas source isolation valve 22, which is used to control the on and off of the gas to ensure the precise control of the gas flow. Next, the other end of the confluence gas source isolation valve 22 is connected to the confluence pressure reducing valve 23, which is used to reduce the pressure of the gas before it flows into the detection module to protect the downstream equipment and ensure that the gas flows within a reasonable pressure range. The decompressed gas will flow to the confluence particle filter 24, which is used to remove particulate impurities in the gas to ensure the purity of the gas and the accuracy of the detection results. The other end of the filter is connected to the argon carrier gas chromatographic pretreatment module 3, the nitrogen carrier gas chromatographic pretreatment module 3 or the moisture detection pretreatment module 6, and the gas is guided to the corresponding module for processing according to the detection requirements. In order to ensure that the gas can maintain stable pressure and flow control before entering these modules, a first confluence pressure gauge 25 and a first confluence venting pipeline 26 are provided between the confluence gas source isolation valve 22 and the confluence pressure reducing valve 23 to facilitate real-time monitoring and pressure adjustment; at the same time, a second confluence pressure gauge 27 and a second confluence venting pipeline 28 are also provided between the confluence pressure reducing valve 23 and the confluence particle filter 24 to further ensure pressure regulation and system stability. This control logic uses precise pressure and airflow management to perform multi-layer filtration and pressure regulation on the gas before it enters the analysis module, ensuring the stability and accuracy of the detection process, thereby improving detection efficiency and reducing errors caused by impurities or pressure fluctuations; In summary, the gas samples of multiple storage tanks are reasonably distributed to the detection path through the design of the confluence path unit, and the gas pressure is accurately controlled through the confluence gas source isolation valve 22 and the confluence pressure reducing valve 23, thereby avoiding the influence of pressure fluctuations on the detection results. At the same time, the particulate matter in the gas is filtered by the particle filter to ensure the purity of the gas sample, thereby improving the accuracy of the detection and reducing the detection error caused by impurity interference.

[0035] Further, such as Figure 3 As shown, the chromatographic pretreatment unit includes a chromatographic gas source isolating valve 31, a chromatographic pressure reducing valve 32 and a chromatographic particle filter element 33, one end of the chromatographic gas source isolating valve 31 is connected to the confluence path unit, the other end of the chromatographic gas source isolating valve 31 is connected to one end of the chromatographic pressure reducing valve 32, the other end of the chromatographic pressure reducing valve 32 is connected to one end of the chromatographic particle filter element 33, the other end of the chromatographic particle filter element 33 is connected to one end of the argon carrier gas chromatographic analysis module 4, or is connected to one end of the nitrogen carrier gas chromatographic analysis module 5, a first chromatographic pretreatment pressure gauge 34 is provided between the other end of the chromatographic gas source isolating valve 31 and one end of the chromatographic pressure reducing valve 32, and a second chromatographic pretreatment pressure gauge 35 is provided between the other end of the chromatographic pressure reducing valve 32 and one end of the chromatographic particle filter element 33.

[0036] Specifically, in the chromatographic pretreatment unit, the flow and control of the gas are achieved through a combination of a series of valves and filter elements. First, one end of the chromatographic gas source isolation valve 31 is connected to the confluence path unit, and the connection is used to control the timing and flow rate of the gas entering the chromatographic pretreatment module 3 from the confluence path. The other end of the chromatographic gas source isolation valve 31 is connected to the chromatographic pressure reducing valve 32. The function of the pressure reducing valve is to reduce the pressure of the gas to a level suitable for analysis, thereby ensuring that the downstream chromatographic analysis module operates under a stable pressure. Next, the gas flows to the chromatographic particle filter element 33 through the chromatographic pressure reducing valve 32. The function of the filter element is to remove particulate impurities in the gas to ensure the purity of the gas and avoid any impurities interfering with the detection process. The other end of the filter element is connected to the argon carrier gas chromatographic analysis module 4 or the nitrogen carrier gas chromatographic analysis module 5. The specific connection depends on the type of carrier gas required during the detection process. In order to ensure that the gas pressure remains at an optimal state before flowing into the chromatographic analysis module, a first chromatographic pretreatment pressure gauge 34 is provided between the chromatographic gas source isolation valve 31 and the chromatographic pressure reducing valve 32 to monitor the gas pressure in real time; in addition, a second chromatographic pretreatment pressure gauge 35 is also provided between the chromatographic pressure reducing valve 32 and the chromatographic particle filter 33 to further monitor and adjust the gas pressure. This series of valve and pressure gauge combinations ensures that the gas can undergo multiple layers of pressure regulation and filtration before entering the chromatographic analysis module, ensuring the stability and purity of the gas flow during the detection process, thereby improving the accuracy and reliability of the detection results. This strict control logic ensures that each link in the detection process is accurately executed, avoiding the influence of pressure fluctuations or impurity contamination on the detection results.

[0037] In summary, the combination of the isolation valve, pressure reducing valve and filter element in the chromatographic pretreatment unit can fully pretreat the gas entering the chromatographic analysis module to ensure the stability and accuracy of the chromatographic analysis process. By adjusting the pressure of the gas source and filtering impurities in the gas, the purity and stability of the gas entering the chromatographic analysis module can be improved, thereby improving the accuracy of the chromatographic analysis results.

[0038] Further, such as Figure 1 and 4 As shown, the impurity detection system for high-purity gas also includes an argon gas supply module 9 and a nitrogen gas supply module 10. The first gas output end of the argon gas supply module 9 is connected to the gas input end of the argon carrier gas chromatography analysis module 4, the second gas output end of the argon gas supply module 9 is connected to the first gas input end of the moisture detection and analysis module 7, the first gas output end of the nitrogen gas supply module 10 is connected to the gas input end of the nitrogen carrier gas chromatography analysis module 5, and the second gas output end of the nitrogen gas supply module 10 is connected to the second gas input end of the moisture detection and analysis module 7.

[0039] Specifically, in the system, the argon supply module 9 and the nitrogen supply module 10 provide carrier gas supply for the chromatographic analysis module and the moisture detection module, respectively, to ensure that the gas flow during the entire detection process remains stable and accurate. Specifically, the first gas output end of the argon supply module 9 is connected to the gas input end of the argon carrier gas chromatographic analysis module 4, which means that argon is used as a carrier gas to drive the gas sample into the chromatographic analysis module and maintain a stable flow of gas during the analysis process. Similarly, the first gas output end of the nitrogen supply module 10 is connected to the gas input end of the nitrogen carrier gas chromatographic analysis module 5, providing nitrogen as a carrier gas to support chromatographic analysis under another carrier gas condition. At the same time, the second gas output end of the argon supply module 9 is also connected to the first gas input end of the moisture detection analysis module 7. This design ensures that during the moisture detection process, argon can be used as a carrier gas to support the analysis process of moisture detection. Similarly, the second gas output end of the nitrogen supply module 10 is also connected to the second gas input end of the moisture detection analysis module 7, so that nitrogen can be used as another optional carrier gas during the moisture detection process to adapt to different analysis needs. Through the connection between these modules, the system can flexibly switch between argon or nitrogen as carrier gas between chromatography and moisture detection according to different analysis requirements. This logical design ensures the flexibility and adaptability of the entire system in handling different detection tasks, while ensuring the stability of gas flow, reducing the uncertainty of gas supply, and thus improving the accuracy and reliability of the detection results.

[0040] In summary, the argon supply module 9 and the nitrogen supply module 10 can provide suitable carrier gas for the argon carrier gas chromatography analysis module 4, the nitrogen carrier gas chromatography analysis module 5 and the moisture detection analysis module 7, respectively, to ensure that different analysis modules get corresponding carrier gas support according to demand, thereby ensuring the stability of the detection process and the accuracy of the detection results. At the same time, through the reasonable design of different gas output ends, the flexibility of the system can be improved to meet different detection needs.

[0041] Further, such as Figure 4 As shown, the moisture pretreatment module includes a manual isolation main valve 71, a moisture pressure reducing valve 72 and a moisture particle filter 73, a confluence manual isolation sub-valve 74 is provided between one end of the manual isolation main valve 71 and each of the confluence path units, the other end of the manual isolation main valve 71 is connected to one end of the moisture pressure reducing valve 72, the other end of the moisture pressure reducing valve 72 is connected to one end of the moisture particle filter 73, and the other end of the moisture particle filter 73 is connected to the moisture detection and analysis module 7.

[0042] Specifically, in the moisture pretreatment module, the connection relationship and control logic between the various components cooperate with each other to ensure that the gas is fully processed before entering the moisture detection and analysis module 7. First, one end of the manual isolation main valve 71 is connected to each confluence path unit through the confluence manual isolation sub-valve 74, and each confluence path unit can independently control the flow direction of the gas, and select whether the gas enters the moisture pretreatment module by manually adjusting the sub-valve. The other end of the manual isolation main valve 71 is connected to the moisture pressure reducing valve 72, and the function of the moisture pressure reducing valve 72 is to reduce the gas pressure to ensure that the gas is in a suitable pressure range before entering the moisture detection and analysis module 7, so as to avoid the influence of excessive pressure on the accuracy of detection or damage to the equipment. Next, the decompressed gas flows into the moisture particle filter 73, which is used to remove particulate matter in the gas to ensure the purity of the gas, so as to avoid particulate impurities interfering with the accuracy of moisture detection. The other end of the moisture particle filter 73 is connected to the moisture detection and analysis module 7, which means that the gas after decompression and filtration will directly enter the moisture detection and analysis module 7 for final analysis. The entire connection logic ensures that the gas can undergo strict pretreatment steps before entering the detection module, avoiding the impact of untreated gas on the test results. Through the flexible configuration of the manual control valve, the operator can adjust the gas flow and pretreatment process according to different gas characteristics and detection requirements, thereby ensuring the flexibility and efficiency of the entire detection process.

[0043] In summary, the manual isolation main valve 71 can be used in conjunction with a plurality of converging manual isolation sub-valves 74 to achieve manual control of the gas flow path, ensuring that the gas flow path adjustment during the moisture detection process is more flexible. The combination of the moisture pressure reducing valve 72 and the moisture particle filter 73 can effectively control the pressure and purity of the gas before it enters the moisture detection and analysis module 7, reduce the fluctuation of the moisture content in the gas, and thus improve the accuracy and stability of the moisture detection results.

[0044] Further, such as Figure 4 As shown, the moisture pretreatment module also includes an argon supply manual isolation valve 75 and a nitrogen supply manual isolation valve 76, one end of the argon supply manual isolation valve 75 is connected to the second gas output end of the argon supply module 9, and the other end of the argon supply manual isolation valve 75 is connected between the manual isolation main valve 71 and the moisture pressure reducing valve 72, one end of the nitrogen supply manual isolation valve 76 is connected to the second gas output end of the nitrogen supply module 10, and the other end of the nitrogen supply manual isolation valve 76 is connected between the manual isolation main valve 71 and the moisture pressure reducing valve 72.

[0045] Specifically, in the moisture pretreatment module, the connection relationship and control logic of the argon supply manual isolation valve 75 and the nitrogen supply manual isolation valve 76 are intended to flexibly control the supply of argon or nitrogen to ensure that the pretreatment requirements under different detection conditions are met. One end of the argon supply manual isolation valve 75 is connected to the second gas output end of the argon supply module 9, and the other end is connected between the manual isolation main valve 71 and the moisture pressure reducing valve 72, which means that by adjusting the argon supply manual isolation valve 75, the flow path of argon before entering the moisture pretreatment module can be controlled. When argon is needed as a carrier gas, the operator can manually open the valve to introduce argon into the moisture pretreatment system. Similarly, one end of the nitrogen supply manual isolation valve 76 is connected to the second gas output end of the nitrogen supply module 10, and the other end is connected to the pipeline between the manual isolation main valve 71 and the moisture pressure reducing valve 72. By controlling the nitrogen supply manual isolation valve 76, nitrogen can enter the moisture pretreatment module as an alternative carrier gas. The design logic of this dual valve gives the system great flexibility, and can select the appropriate carrier gas type according to the actual needs of the detection, ensuring that the moisture detection and analysis module 7 can work in the most suitable gas environment. Through the cooperation of the manual isolation main valve 71 and the moisture pressure reducing valve 72, the control of these sub-valves ensures that the gas can undergo appropriate pressure reduction before entering the moisture detection and analysis module 7, avoiding deviations in the detection results due to pressure fluctuations or incompatibility of gas types, thereby improving the accuracy and stability of the detection.

[0046] In summary, the argon supply manual isolation valve 75 and the nitrogen supply manual isolation valve 76 can be set to achieve independent supply of argon and nitrogen, ensuring that the moisture detection preprocessing module 6 can select a suitable gas source for moisture detection according to demand under different conditions. By flexibly switching between argon and nitrogen, the flexibility and adaptability of moisture detection can be improved, thereby improving the efficiency and accuracy of detection.

[0047] Further, such as Figure 4 As shown, the moisture pretreatment module also includes a moisture pretreatment drain pipeline connected between the moisture pressure reducing valve 72 and the moisture particle filter 73 , and a manual drain isolation valve 77 is provided on the moisture pretreatment drain pipeline.

[0048] Specifically, in the moisture pretreatment module, the design logic of the moisture pretreatment emptying pipeline is to timely remove unnecessary gas or impurities during the moisture pretreatment process to ensure the smooth operation and detection accuracy of the system. Specifically, the moisture pretreatment emptying pipeline is connected between the moisture pressure reducing valve 72 and the moisture particle filter 73, and the emptying pipeline is used to guide the gas that has not been filtered or contains excess impurities to be discharged from the system after the gas flows through the pressure reducing valve. This design ensures the stability of the gas before entering the moisture particle filter 73 and prevents the untreated gas from affecting the filtering effect of the filter. The emptying manual isolation valve 77 is arranged on the emptying pipeline for manually controlling the emptying operation of the gas. When the gas needs to be discharged, the operator can discharge the excess gas by opening the valve to ensure the stability of the system pressure and airflow and reduce the detection error caused by gas accumulation. Through the flexible operation of the manual control valve, the excess gas in the processing process can be discharged at any time as needed, thereby ensuring that the gas in the system is always kept in the best state before each detection operation. In addition, the presence of the drain line also improves the safety of the system, preventing excessive accumulation of gas in the system from affecting the overall detection process. This logical design ensures efficient operation during moisture pretreatment, reduces detection uncertainty through an effective drain mechanism, and further improves the accuracy of moisture detection.

[0049] In summary, by setting up the moisture pretreatment emptying pipeline, the excess gas generated during the moisture detection pretreatment process can be emptied in time to avoid detection errors caused by gas accumulation. At the same time, by controlling the emptying manual isolation valve 77, the emptying process can be flexibly adjusted to ensure the smooth progress of the detection process, thereby improving the accuracy and stability of moisture detection.

[0050] Further, such as Figure 5 As shown, this is only a schematic diagram of the structure of the argon carrier gas chromatography analysis module 4 and the tail gas recovery module 8, because the schematic diagram of the structure of the nitrogen carrier gas chromatography analysis module 5 and the tail gas recovery module 8 is the same as Figure 5 Basically the same, so it is not shown in detail. The tail gas recovery module 8 includes a chromatographic analysis recovery pipeline 81, a moisture detection and analysis recovery pipeline 82, a booster pump 83, a check valve 84 and a buffer tank 85. One end of the chromatographic analysis recovery pipeline 81 is connected to the argon carrier gas chromatographic analysis module 4 or the nitrogen carrier gas chromatographic analysis module 5, one end of the moisture detection and analysis recovery pipeline 82 is connected to the moisture detection and analysis module 7, the other end of the moisture detection and analysis recovery pipeline 82 is merged into the other end of the chromatographic analysis recovery pipeline 81 to be connected to one end of the booster pump 83, the other end of the booster pump 83 is connected to one end of the check valve 84, and the other end of the check valve 84 is connected to the buffer tank 85 for recovering the high-purity gas after analysis.

[0051] Specifically, in the tail gas recovery module 8, the system ensures that the high-purity gas after detection can be efficiently recovered and reused through the combination of the chromatographic analysis recovery pipeline 81 and the moisture detection analysis recovery pipeline 82. First, one end of the chromatographic analysis recovery pipeline 81 is connected to the argon carrier gas chromatographic analysis module 4 or the nitrogen carrier gas chromatographic analysis module 5 to ensure that after the chromatographic analysis is completed, the gas used in the detection process can be discharged through the pipeline and enter the recovery module. At the same time, one end of the moisture detection analysis recovery pipeline 82 is connected to the moisture detection analysis module 7 to discharge the used gas into the recovery module after the moisture detection is completed. The two pipelines merge into the same main recovery pipeline at the other end and are connected to the booster pump 83. The function of the booster pump 83 is to ensure that the gas can smoothly flow back into the recovery part of the system by pressurization. The booster pump 83 sends the recovered gas to the check valve 84, which is used to prevent the gas from flowing back and ensure the safety and stability of the recovery process. Finally, the gas enters the buffer tank 85 through the check valve 84. The function of the buffer tank 85 is to temporarily store the recovered gas and adjust the pressure and flow of the gas according to the needs of the system for further use or processing. This series of connection and control logic designs not only ensures the recycling of high-purity gas during the detection process, but also effectively reduces gas waste and reduces detection costs, while ensuring the safety and efficiency of the entire recovery process. Through the coordinated action of the booster pump 83, the check valve 84 and the buffer tank 85, the system can ensure the stability of gas recovery under different working conditions and maximize the use efficiency of high-purity gas.

[0052] In summary, the design of the tail gas recovery module 8 can realize the recovery of high-purity gas after chromatographic analysis and moisture detection, avoiding gas waste. The combination of the booster pump 83 and the buffer tank 85 can effectively recover high-purity gas, and ensure that the pressure and flow rate of the recovered gas meet the subsequent use requirements, thereby improving the economy and sustainability of the system.

[0053] Further, such as Figure 5 As shown, the chromatography analysis recovery pipeline 81 includes a first recovery filter element 811 and a first recovery isolation valve 812, one end of the first recovery filter element 811 is connected to the argon carrier gas chromatography analysis module 4 or the nitrogen carrier gas chromatography analysis module 5, the other end of the first recovery filter element 811 is connected to one end of the first recovery isolation valve 812, the other end of the first recovery isolation valve 812 is connected to the booster pump 83, and a first recovery discharge pipeline 813 is provided between the first recovery filter element 811 and the first recovery isolation valve 812; The moisture detection and analysis recovery pipeline 82 includes a second recovery filter element 821 and a second recovery isolation valve 822. One end of the second recovery filter element 821 is connected to the argon carrier gas chromatography analysis module 4 or the nitrogen carrier gas chromatography analysis module 5, and the other end of the second recovery filter element 821 is connected to one end of the second recovery isolation valve 822. The other end of the second recovery isolation valve 822 is connected to the boosting pump 83. A second recovery discharge pipeline 823 is provided between the second recovery filter element 821 and the second recovery isolation valve 822.

[0054] Specifically, in the chromatographic analysis recovery module, the chromatographic analysis recovery pipeline 81 and the moisture detection analysis recovery pipeline 82 realize efficient processing of the recovered gas through a series of filtering and isolating devices. First, the first recovery filter element 811 in the chromatographic analysis recovery pipeline 81 is connected to the argon carrier gas chromatographic analysis module 4 or the nitrogen carrier gas chromatographic analysis module 5. Its main function is to filter the impurities in the gas discharged after analysis to ensure that the recovered gas is pure and does not contain interfering particles. The filtered gas flows to the first recovery isolation valve 812, which is used to control the flow of the recovered gas. Through manual or automatic operation, it can be determined whether the gas enters the recovery module. A first recovery discharge pipeline 813 is also provided between the first recovery filter element 811 and the first recovery isolation valve 812, which is used to discharge unqualified or unrecoverable gas when necessary to ensure that the gas flow in the system remains stable and meets the requirements. Similarly, the moisture detection and analysis recovery pipeline 82 is connected to the argon carrier gas chromatography module 4 or the nitrogen carrier gas chromatography module 5 through the second recovery filter 821, and the second recovery filter 821 is used to filter the gas after moisture detection to ensure that the moisture and impurities therein are effectively removed. The filtered gas is flow-controlled by the second recovery isolation valve 822. Similar to the first recovery pipeline, a second recovery discharge pipeline 823 is also provided between the second recovery filter 821 and the second recovery isolation valve 822, which is convenient for discharging useless or unqualified gases under special circumstances. This double-layer filtration and isolation design ensures the safety, stability and reliability of gas quality during the gas recovery process. Through multiple discharge pipelines, the system can flexibly handle different types of gas flows and pressure fluctuations, further enhancing the efficiency of the tail gas recovery module 8 and the accuracy of the detection results.

[0055] In summary, the gas after chromatographic analysis can be filtered and controlled by the recovery filter element and the recovery isolation valve in the chromatographic analysis recovery pipeline 81 to ensure the purity and pressure stability of the recovered gas. By setting up a recovery discharge pipeline, unqualified gas can be discharged in time to ensure the quality of the recovered gas, thereby improving the efficiency and reliability of the recovery process.

[0056] like Figure 6As shown, a detection control method of an impurity detection system based on high-purity gas is applied to an impurity detection system based on high-purity gas, and the detection control method includes: S10, obtaining storage information of a high-purity gas storage tank, wherein the storage information includes storage duration, periodic storage temperature range, and stored gas type; In this embodiment, the storage information of the high-purity gas storage tank is obtained in order to evaluate the current state of the gas to ensure that the corresponding detection parameters can be adjusted according to the storage conditions of the gas during the detection process. Storage time, periodic storage temperature range and storage gas type are key indicators in the storage information. The storage time affects the deposition of impurities in the gas, especially in gases stored for a long time, trace impurities or moisture may accumulate. The periodic storage temperature range refers to the temperature changes that the gas experiences during the storage process, which directly affects the moisture content and stability of other impurities in the gas. The solubility and volatility of impurities are different under different temperature conditions, which affects the accuracy of the detection. The storage gas type determines the chemical properties of the gas. For example, different inert gases such as argon and nitrogen have different sensitivities to impurities under storage conditions. Therefore, by collecting this storage information, the system can accurately adjust the detection parameters according to the current state of the storage tank; Preferably, in order to accurately obtain the storage time and the periodic storage temperature range, the following technical means can be used: Acquisition of storage time: A time recorder or an electronic timer integrated with the tank management system can be installed on the storage tank. When the gas enters the tank, the timer starts to record the storage time of the gas. The timer will continue to run and accumulate the storage time of the gas until it stops automatically when the detection starts. Through communication with the tank management system, the detection system can obtain the total storage time of the current gas in real time to ensure that the data is accurate. Acquisition of periodic storage temperature range: A high-precision temperature sensor can be installed on the tank to monitor the temperature changes inside the tank or the surrounding environment. The temperature sensor can record the highest temperature, lowest temperature, and frequency and fluctuation amplitude of the temperature change experienced by the tank during storage in real time. The data of the sensor can be transmitted to the monitoring system via wireless or wired communication, and the system will summarize and analyze the temperature data to generate parameter information of the periodic storage temperature range. In this way, the real-time and accuracy of the temperature data can be guaranteed.

[0057] S20, based on the mapping relationship in the local database, determining a first parameter setting value corresponding to the storage duration, and determining a second parameter setting value corresponding to the periodic storage temperature range, determining a first weight value of the first parameter setting value according to the storage gas type; and determining a second weight value of the second parameter setting value, adding a product of the first parameter setting value and the first weight value and a product of the second parameter setting value and the second weight value to generate a corresponding preset control parameter group; In this embodiment, based on the mapping relationship in the local database, the system uses historical data and preset standards to determine the relevant parameter values. For the storage time, the system sets the parameters according to the behavior of different gases in different time periods to determine the first parameter setting value. For example, gases stored for a long time may require higher detection accuracy. The periodic storage temperature range affects the physical and chemical properties of the gas, so the system sets a second parameter setting value for it. In order to further optimize the detection process, the system also assigns weights to these parameters according to the type of different gases. For example, for gases that are easy to adsorb impurities, the first weight value may be higher, while for gases that are not easily affected by temperature, the second weight value is lower. Finally, the product of these parameter values ​​and the weight value is added to generate a preset control parameter group to ensure that the detection conditions can flexibly adapt to the characteristics of the gas.

[0058] Preferably, to explain in detail the calculation of the first weight value and the second weight value, the process of obtaining and adjusting the first weight value and the second weight value may be described through the following steps: Analysis of physicochemical properties: First, the calculation of weight values ​​should be based on the physicochemical properties of the gas, such as gas reactivity, molecular structure, and polarity. By experimentally analyzing the chemical properties of different gases, their sensitivity to impurities or temperature changes under different storage conditions can be determined. For example, inert gases such as argon and xenon are generally insensitive to chemical reactions, but their physical properties can have a significant effect on temperature changes. Therefore, the second weight value (temperature-related weight) of such gases should be set higher, while the first weight value (storage time-related weight) should be relatively low.

[0059] Factors of storage environment changes: The weight value should also take into account changes in the storage environment, such as temperature fluctuations, humidity changes, and external pressure during storage. By using environmental sensors and long-term monitoring data, the stability and impurity accumulation of gases under different environmental conditions can be evaluated. If a gas is easily affected by large temperature changes or high humidity environments, its second weight value should be appropriately increased according to environmental conditions to reflect the impact of the environment on gas purity. For gases that are relatively stable to the storage environment, the weight value can be appropriately reduced.

[0060] Statistical analysis of historical test data: By performing statistical analysis on a large amount of past test data, the system can evaluate the fluctuations in test results for different types of gases under various conditions. By performing regression and trend analysis on these historical data, it is possible to determine the performance changes of a gas under different storage times and temperature conditions. For example, if the impurity content of a gas rises faster when it is stored for a longer time, the first weight value should be higher, and vice versa. Similarly, if the gas is very sensitive to temperature fluctuations, the second weight value should be adjusted based on historical test data to ensure that the parameter settings during the test process can reasonably cope with such changes.

[0061] Experimental verification and weight adjustment: After the preliminary weight values ​​are determined, experimental verification is necessary. Experiments are conducted by simulating different storage conditions (such as long-term storage, rapid temperature fluctuations, etc.), and observing whether the gas detection results are in line with expectations. The first and second weight values ​​are further optimized based on the experimental results to ensure that their calculations are consistent with the gas behavior in actual detection. If a gas is found to be more sensitive to temperature changes during storage than expected, the system can increase its second weight value in a timely manner, and vice versa. Experimental verification and optimization are key steps to ensure the rationality of weight calculation.

[0062] Adjustment of the weight value calculation formula: In practical applications, the calculation formulas for the first weight value and the second weight value should be dynamically adjusted according to the gas type and experimental data. For example, the first weight value can be expressed as "W1 = f(T1, H1)", where T1 represents the storage time, and H1 represents the impurity change trend in the historical data; and the second weight value can be expressed as "W2= f(T2, E2)", where T2 represents the periodic storage temperature range, and E2 represents the impact of environmental changes. Through this dynamic adjustment of the calculation formula, the system can generate suitable preset control parameter groups for different gases to ensure the flexibility and accuracy of the detection process.

[0063] Through these steps, the system can accurately determine the weight values ​​of different gases under different storage conditions, thereby optimizing the control parameter group of the detection process and ensuring the accuracy and stability of the detection results.

[0064] S30, obtaining a path control parameter group of each to-be-confirmed detection path, and matching the path control parameter group with the preset control parameter group to generate a corresponding matching result; In this embodiment, the system obtains the path control parameter group of each detection path to be confirmed in order to determine the parameters involved in different detection paths, such as the operation status of the module, carrier gas flow rate and flow rate, etc. The path control parameter group is generated by the system after analyzing the detection conditions and environmental parameters of each path, reflecting the current working status of each path. The process of matching the path control parameter group and the preset control parameter group is actually to compare the current detection conditions with the preset optimal detection conditions in order to find the detection path that best suits the current gas state. Through this matching, the system can select the most suitable detection path in a complex multi-path detection environment, thereby maximizing the accuracy and efficiency of the detection.

[0065] Preferably, the generation process of the path control parameter group is to obtain important parameters such as the current gas flow, equipment load, temperature and pressure in real time through the sensors of the detection equipment, and conduct a comprehensive analysis in combination with the historical usage data of the equipment and the changes in the current environment. First, flow sensors, pressure sensors, temperature sensors, etc. monitor the performance of the gas in the detection path in real time. At the same time, the equipment monitoring system will refer to historical detection records, including gas type, equipment load and error correction in past detections, in order to adjust the current detection path settings. In addition, the temperature, humidity and air pressure of the current environment will also affect the detection effect of the gas, so the system will evaluate the environmental parameters in real time and make corresponding adjustments. Through the aggregation of these data, the system uses an internal algorithm to automatically generate a path control parameter group to ensure that the load balance, gas flow rate and pressure of the equipment are within the optimal range. If the parameters are found to deviate from expectations during the detection process, the system can also make dynamic adjustments to ensure the accuracy and stability of the detection process. Finally, the generated parameter group will be stored in the database for reference for similar detection tasks in the future; To give a specific example, suppose we are testing a long-term argon sample that has been stored for more than six months and has experienced multiple temperature fluctuations during storage. In this case, the system first obtains the current gas flow rate, the operating load of the equipment, and the temperature and pressure data in the tank through sensors. For example, the flow sensor monitors that the argon flow rate is 100 ml per minute, the temperature sensor shows that the current ambient temperature is 20°C, and the gas pressure in the tank is 5 bar.

[0066] At the same time, the system will retrieve the records of similar gases (argon gas stored for a long time) previously handled by the detection equipment from historical data, and find that in the past detection process, when the pressure exceeded 4 bar, the detection accuracy decreased, so the system will adjust the pressure parameters to an appropriate range. After combining the external conditions such as the temperature and humidity (for example, the humidity is 50%) of the current detection environment, the system decides to make appropriate adjustments to the gas flow and pressure, reducing the flow rate to 80 ml / min to avoid inaccurate impurity detection due to the gas passing through the detection module too quickly.

[0067] Next, the system used the error correction records in the historical data to find that this type of argon gas is prone to errors in impurity detection at low temperatures, so the system will increase the load tolerance of the equipment to ensure that the detection equipment can cope with possible error fluctuations. Finally, the system generates a path control parameter group based on sensor data and historical records, including parameters such as adjusting flow, reducing pressure, and optimizing equipment load, and dynamically monitors these parameters during the detection process to ensure the accuracy of the test results. After the entire detection process is completed, the system saves the parameter group detected this time into the database as a reference for future processing of similar long-term storage of argon gas.

[0068] S40, according to the matching result, determining the corresponding target detection path in each to-be-confirmed detection path, and adjusting the path control parameters of the path control parameter group in the target detection path according to the preset control parameters of the preset control parameter group, wherein the path control parameters include module operation parameters, carrier gas flow parameters and carrier gas flow rate parameters; In this embodiment, after the matching results come out, the system will determine the target detection path based on the results and adjust the parameters. The path control parameters include module operation parameters, carrier gas flow parameters and carrier gas flow rate parameters, which are important factors affecting the detection process. Module operation parameters include the working status and configuration of the equipment, while the carrier gas flow rate and flow rate determine the speed and stability of the gas passing through the analysis equipment during the detection process. For example, too high a flow rate may cause the gas to stay in the detection module for insufficient time, affecting the accuracy of the detection results; too low a flow rate may cause the detection time to be too long, reducing the detection efficiency. By accurately adjusting these parameters, the system can ensure that all conditions in the detection path are in the best state, thereby improving the accuracy and stability of the detection; When matching the target detection path, you can set the criteria for successful matching, such as comparing the difference between the preset control parameter group and the path control parameter group, and select the path with the smallest difference as the optimal path. If multiple paths meet the conditions, the system can select according to priority rules such as path load and equipment availability to ensure that the utilization rate of the equipment and the detection efficiency are maximized. In addition, if the match fails, the system can automatically select an alternative path or issue a reminder to prompt the operator to intervene; After the parameter adjustment is completed, an automatic verification step should be added to ensure that the adjusted parameters are operating within the range allowed by the system. The built-in monitoring system of the detection equipment can monitor in real time whether the adjusted parameters meet the safety and operation standards of the equipment. If the adjusted parameters are out of range, the system can automatically trigger an alarm or correction mechanism to ensure that the equipment operates within a reasonable range and prevent detection errors caused by abnormal parameters.

[0069] S50, when the adjustment of the path control parameters is completed after detection, executing the high-purity gas analysis and detection process.

[0070] In this embodiment, when all path control parameters are adjusted, the system will execute the analysis and detection process of high-purity gas. This means that after preliminary preparation and parameter adjustment, the gas will officially enter the detection module for impurity analysis. The entire analysis process will be carried out according to the adjusted control parameters to ensure that the gas can be detected under optimal conditions. The detection module may include a chromatographic analysis module, a moisture detection module, etc., which will perform detailed impurity analysis on the gas according to its characteristics. For example, the chromatographic analysis module detects the purity of the gas by separating the different components in the gas; the moisture detection module uses precision instruments to measure the trace moisture content in the gas; The high-purity gas analysis and detection process can be designed as an automatic trigger mechanism. When the system completes all parameter adjustments and is verified to be correct, the system will automatically execute the detection process. This ensures the consistency and efficiency of the detection. However, the system can also set up manual confirmation steps for operators to conduct a final check before the test to ensure that all adjustments meet actual needs, further improving the accuracy and safety of the test results.

[0071] In summary, by acquiring the storage information of high-purity gas tanks, the control parameters of the detection path can be dynamically adjusted, and the detection process can be optimized according to information such as gas storage time and temperature changes. Through intelligent adjustment of path control parameters, it is ensured that gas detection under different conditions can be carried out under the optimal parameters, thereby improving the accuracy and efficiency of the detection results and reducing detection errors.

[0072] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0073] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A high-purity gas impurity detection system, characterized in that: The impurity detection system for high-purity gas comprises a detection path selection module (1), a busbar injection module (2), a chromatographic pretreatment module (3), an argon carrier gas chromatographic analysis module (4), a nitrogen carrier gas chromatographic analysis module (5), a moisture detection pretreatment module (6), a moisture detection analysis module (7) and a tail gas recovery module (8), wherein the detection path selection module (1) is connected to a busbar injection module (2) and a busbar injection module, wherein the chromatographic pretreatment module (3) comprises a plurality of chromatographic pretreatment units, wherein at least three busbar injection units are provided, and At least two of the confluence path units are respectively connected to the corresponding chromatographic pretreatment units, the other end of the chromatographic pretreatment unit is connected to one end of the argon carrier gas chromatographic analysis module (4), or is connected to one end of the nitrogen carrier gas chromatographic analysis module (5), each of the confluence path units is connected to one end of the moisture detection pretreatment module (6), and the other end of the argon carrier gas chromatographic analysis module (4), the other end of the nitrogen carrier gas chromatographic analysis module (5) and the other end of the moisture detection pretreatment module (6) are all connected to the tail gas recovery module (8); The detection path selection module (1) is used, on the one hand, to obtain storage information in the high-purity gas storage tank, and, on the other hand, to transport the high-purity gas in the high-purity gas storage tank to the corresponding one or more of the converging path units according to the storage information, so that the high-purity gas undergoes corresponding chromatographic analysis steps and / or moisture detection analysis steps, and the tail gas recovery module (8) is used to recover the analyzed high-purity gas.

2. The impurity detection system for high-purity gas according to claim 1, characterized in that: The confluence path unit comprises two intermediate storage tanks (21), two confluence gas source isolation valves (22), a confluence pressure reducing valve (23) and a confluence particle filter (24), one end of each of the intermediate storage tanks (21) being connected to the detection path selection module (1), and the other end being connected to one end of one of the confluence gas source isolation valves (22), the other end of each of the confluence gas source isolation valves (22) being connected to one end of the confluence pressure reducing valve (23), and the other end of the confluence pressure reducing valve (23) being connected to the confluence particle filter (24). 4), the other end of the confluence particle filter (24) is connected to the chromatographic pretreatment module (3) or the moisture detection pretreatment module (6), a first confluence pressure gauge (25) and a first confluence vent pipeline (26) are respectively provided between the other end of the confluence gas source isolation valve (22) and one end of the confluence pressure reducing valve (23), and a second confluence pressure gauge (27) and a second confluence vent pipeline (28) are respectively provided between the other end of the confluence pressure reducing valve (23) and the confluence particle filter (24).

3. The impurity detection system for high-purity gas according to claim 1, characterized in that: The chromatographic pretreatment unit comprises a chromatographic gas source isolating valve (31), a chromatographic pressure reducing valve (32) and a chromatographic particle filter (33); one end of the chromatographic gas source isolating valve (31) is connected to the confluence path unit; the other end of the chromatographic gas source isolating valve (31) is connected to one end of the chromatographic pressure reducing valve (32); the other end of the chromatographic pressure reducing valve (32) is connected to one end of the chromatographic particle filter (33); the other end of the chromatographic particle filter (33) is connected to one end of the argon carrier gas chromatographic analysis module (4) or to one end of the nitrogen carrier gas chromatographic analysis module (5); a first chromatographic pretreatment pressure gauge (34) is provided between the other end of the chromatographic gas source isolating valve (31) and one end of the chromatographic pressure reducing valve (32); and a second chromatographic pretreatment pressure gauge (35) is provided between the other end of the chromatographic pressure reducing valve (32) and one end of the chromatographic particle filter (33).

4. The impurity detection system for high-purity gas according to claim 1, characterized in that: The impurity detection system for high-purity gas further comprises an argon gas supply module (9) and a nitrogen gas supply module (10); the first gas output end of the argon gas supply module (9) is connected to the gas input end of the argon carrier gas chromatography analysis module (4); the second gas output end of the argon gas supply module (9) is connected to the first gas input end of the moisture detection and analysis module (7); the first gas output end of the nitrogen gas supply module (10) is connected to the gas input end of the nitrogen carrier gas chromatography analysis module (5); and the second gas output end of the nitrogen gas supply module (10) is connected to the second gas input end of the moisture detection and analysis module (7).

5. A high-purity gas impurity detection system according to claim 4, characterized in that: The moisture pretreatment module comprises a manual isolation main valve (71), a moisture pressure reducing valve (72) and a moisture particle filter (73); a confluence manual isolation sub-valve (74) is provided between one end of the manual isolation main valve (71) and each of the confluence path units; the other end of the manual isolation main valve (71) is connected to one end of the moisture pressure reducing valve (72); the other end of the moisture pressure reducing valve (72) is connected to one end of the moisture particle filter (73); and the other end of the moisture particle filter (73) is connected to the moisture detection and analysis module (7).

6. A high-purity gas impurity detection system according to claim 5, characterized in that: The moisture pretreatment module also includes an argon supply manual isolation valve (75) and a nitrogen supply manual isolation valve (76), one end of the argon supply manual isolation valve (75) is connected to the second gas output end of the argon supply module (9), and the other end of the argon supply manual isolation valve (75) is connected between the manual isolation main valve (71) and the moisture pressure reducing valve (72), one end of the nitrogen supply manual isolation valve (76) is connected to the second gas output end of the nitrogen supply module (10), and the other end of the nitrogen supply manual isolation valve (76) is connected between the manual isolation main valve (71) and the moisture pressure reducing valve (72).

7. The impurity detection system for high-purity gas according to claim 5, characterized in that: The moisture pretreatment module further comprises a moisture pretreatment drain pipeline connected between the moisture pressure reducing valve (72) and the moisture particle filter (73), and a manual drain isolation valve (77) is provided on the moisture pretreatment drain pipeline.

8. The impurity detection system for high-purity gas according to claim 1, characterized in that: The tail gas recovery module (8) comprises a chromatographic analysis recovery pipeline (81), a moisture detection and analysis recovery pipeline (82), a booster pump (83), a check valve (84) and a buffer tank (85). One end of the chromatographic analysis recovery pipeline (81) is connected to the argon carrier gas chromatographic analysis module (4) or the nitrogen carrier gas chromatographic analysis module (5). One end of the moisture detection and analysis recovery pipeline (82) is connected to the moisture detection and analysis module (7). The other end of the moisture detection and analysis recovery pipeline (82) is merged into the other end of the chromatographic analysis recovery pipeline (81) to be connected to one end of the booster pump (83). The other end of the booster pump (83) is connected to one end of the check valve (84). The other end of the check valve (84) is connected to the buffer tank (85) to recover the high-purity gas after analysis.

9. A high-purity gas impurity detection system according to claim 8, characterized in that: The chromatography analysis recovery pipeline (81) comprises a first recovery filter element (811) and a first recovery isolation valve (812); one end of the first recovery filter element (811) is connected to the argon carrier gas chromatography analysis module (4) or the nitrogen carrier gas chromatography analysis module (5); the other end of the first recovery filter element (811) is connected to one end of the first recovery isolation valve (812); the other end of the first recovery isolation valve (812) is connected to the booster pump (83); and a first recovery discharge pipeline (813) is provided between the first recovery filter element (811) and the first recovery isolation valve (812); The moisture detection and analysis recovery pipeline (82) includes a second recovery filter element (821) and a second recovery isolation valve (822), one end of the second recovery filter element (821) is connected to the argon carrier gas chromatography analysis module (4) or the nitrogen carrier gas chromatography analysis module (5), the other end of the second recovery filter element (821) is connected to one end of the second recovery isolation valve (822), the other end of the second recovery isolation valve (822) is connected to the boosting pump (83), and a second recovery discharge pipeline (823) is provided between the second recovery filter element (821) and the second recovery isolation valve (822).

10. A detection control method for an impurity detection system based on high-purity gas, applied to an impurity detection system based on high-purity gas as claimed in any one of claims 1 to 9, characterized in that: The detection control method comprises: Obtaining storage information of a high-purity gas storage tank, wherein the storage information includes storage time, periodic storage temperature range, and stored gas type; Based on the mapping relationship in the local database, determine a first parameter setting value corresponding to the storage duration, and determine a second parameter setting value corresponding to the periodic storage temperature range, determine a first weight value of the first parameter setting value according to the storage gas type; and determine a second weight value of the second parameter setting value, add the product of the first parameter setting value and the first weight value and the product of the second parameter setting value and the second weight value to generate a corresponding preset control parameter group; Acquire a path control parameter group of each detection path to be confirmed, and match the path control parameter group with the preset control parameter group to generate a corresponding matching result; According to the matching result, a corresponding target detection path is determined in each detection path to be confirmed, and according to the preset control parameters of the preset control parameter group, the path control parameters of the path control parameter group in the target detection path are adjusted, wherein the path control parameters include module operation parameters, carrier gas flow parameters and carrier gas flow rate parameters; When the adjustment of the path control parameters is completed after detection, the high-purity gas analysis and detection process is executed.

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