Ultrasonic vibration joining device

Abstract

Provided is an ultrasonic vibration joining device with which it is possible to satisfactorily join a member to be joined by means of an ultrasonic vibration operation by an ultrasonic vibration horn even if there is a variation in frictional resistance relating to the member to be joined. The control unit (1) outputs an oscillation signal (S12) including the output information (CS) as a control signal to the converter (10). The converter (10) applies ultrasonic vibration to the ultrasonic vibration amplitude transformer on the basis of the oscillation signal (S12). The ultrasonic vibration horn (10) executes an ultrasonic vibration operation in which ultrasonic vibration is applied to the joined member (13) from the bottom surface of the contact tip section (10t). The control operation performed by the control unit (1) using the oscillation signal (S12) includes an operation continuation process in which the ultrasonic vibration operation is continued until the output information (SC) included in the oscillation signal (S12) becomes equal to or greater than an output threshold (WX).

Description

Technical Field

[0001] The present disclosure relates to an ultrasonic vibration bonding device having an ultrasonic vibration horn for performing ultrasonic vibration action. Background Art

[0002] Conventional ultrasonic vibration bonding devices pressurize the bonded parts arranged on the surface of a substrate from above and apply ultrasonic vibrations from an ultrasonic vibration horn to bond the bonded parts on the surface of the substrate. Examples of such ultrasonic vibration bonding devices include an ultrasonic bonding device disclosed in Patent Document 1 and an ultrasonic vibration bonding device disclosed in Patent Document 2.

[0003] Conventional ultrasonic vibration bonding devices use an ultrasonic vibration transformer to perform an ultrasonic vibration action of applying ultrasonic vibration to the bonded parts. To perform the ultrasonic vibration action, an oscillation signal as an electrical signal is sent from the ultrasonic oscillator to the converter, the electrical signal is converted into ultrasonic vibration by the converter, and the obtained ultrasonic vibration is imparted to the ultrasonic vibration transformer.

[0004] The ultrasonic oscillator outputs an oscillation signal that oscillates at a set oscillation frequency to the converter. The oscillation signal is an electrical signal such as voltage or current.

[0005] When a conventional ultrasonic vibration bonding device bonds multiple bonding locations at a certain interval on a bonding surface extending in a predetermined direction, a first defective location where bonding fails and a second defective location where bonding parts break may occur. The cause of the defective location was investigated and it was found that the main cause of the first defective location and the second defective location is the friction resistance associated with the bonded parts.

[0006] Patent Document 1: Japanese Patent Application Publication No. 2022-61631

[0007] Patent Document 2: International Publication No. 2018 / 025362

[0008] Conventional ultrasonic vibration bonding devices have adopted an energy control method as an ultrasonic control method. That is, in conventional ultrasonic control methods, the following action continuation processing is adopted: the ultrasonic vibration action is continued until the consumed energy calculated based on the oscillation signal from the ultrasonic oscillator reaches a preset energy (threshold energy). The above-mentioned consumed energy (W·s) is defined by the product of the electrical output value (W(att)) and the time (s(econd)).

[0009] Figure 7 This is a graph showing the control content of the conventional ultrasonic control method. In this graph, the horizontal axis represents time (ms) and the vertical axis represents the electrical output value (Power (W)). Figure 72 shows the temporal changes of the output information SC11 and SC12 in two engagement cases (case 11 and case 12).

[0010] Here, the output information SC11 is an electrical output value (W) for causing the ultrasonic vibration horn to perform ultrasonic vibration operation in case 11, and the output information SC12 is an electrical output value (W) for causing the ultrasonic vibration horn to perform ultrasonic vibration operation in case 12.

[0011] Case 11 shows the temporal change of output information SC11 when the friction resistance associated with the joined parts is relatively small, and case 12 shows the temporal change of output information SC12 when the above-mentioned friction resistance is relatively large. "Friction resistance associated with the joined parts" is the combined friction resistance at the contact surface between the joined parts and the ultrasonic vibration transducer (hereinafter sometimes simply indicated as "contact surface") and the joining surface between the joined parts and the substrate (hereinafter sometimes simply indicated as "joining surface"). The above-mentioned friction resistance is determined by the smaller friction resistance of the first friction resistance at the above-mentioned contact surface and the second friction resistance at the above-mentioned joining surface.

[0012] In case 11, the frictional resistance is relatively small, so the output information SC11 rises gently. At time t12 when the output information SC11 reaches the output value W1, the consumed energy ΣE1 reaches the energy threshold EX, and the ultrasonic vibration operation ends.

[0013] In case 12, the frictional resistance is relatively large, and therefore the output information SC12 rises steeply. At time t11 when the output value W9 is reached, the consumed energy ΣE2 reaches the energy threshold EX, and the ultrasonic vibration operation ends.

[0014] Thus, in the previous ultrasonic control method, if there is a deviation in the friction resistance related to the joined parts, the processing time of the ultrasonic vibration action (time t11, t12) and the final electrical output value (output value W1, W9) shown in the output information SC (SC1, SC2) will deviate.

[0015] As a result, in conventional ultrasonic vibration bonding devices, when there is a variation in frictional resistance between the bonded materials at a plurality of bonding locations, there is a problem that the ultrasonic vibration operation by the ultrasonic vibration horn cannot bond the bonded materials well. Summary of the invention

[0016] The ultrasonic vibration bonding device disclosed in the present invention is completed to solve the above-mentioned problems, and its purpose is to obtain an ultrasonic vibration bonding device that can well bond the workpieces through the ultrasonic vibration action performed by the ultrasonic vibration transformer even if there is a deviation in the friction resistance related to the workpieces.

[0017] The ultrasonic vibration bonding device disclosed in the present invention comprises: an ultrasonic vibration transformer, which performs an ultrasonic vibration action of applying ultrasonic vibration to the bonded parts from the abutting front end portion; a converter, which imparts the ultrasonic vibration to the ultrasonic vibration transformer; and a control unit, which performs a control action of controlling the ultrasonic vibration action of the ultrasonic vibration transformer, wherein the control unit outputs a control signal including output information to the converter as the control action, and the converter imparts the ultrasonic vibration to the ultrasonic vibration transformer based on the control signal, wherein the output information is an electrical output value required for the ultrasonic vibration to vibrate at a specified frequency, and the control action includes an action continuation process of continuing the ultrasonic vibration action until the output information becomes above an output threshold value.

[0018] Effects of the Invention

[0019] The control operation executed by the control unit of the ultrasonic vibration bonding device of the present disclosure includes an operation continuation process of continuing the ultrasonic vibration operation until the output information becomes equal to or greater than the output threshold value.

[0020] Therefore, the converter can surely provide the ultrasonic vibration based on the control signal including the output information equal to or greater than the output threshold value to the ultrasonic vibration horn during the execution period of the ultrasonic vibration operation.

[0021] As a result, the ultrasonic vibration bonding device of the present disclosure can bond the bonding portion well even when there is a variation in the frictional resistance with respect to the bonded materials by appropriately setting the output threshold. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is an explanatory diagram schematically showing the structure of the ultrasonic vibration bonding device according to the first embodiment.

[0023] Figure 2 It is schematically indicated Figure 1 An explanatory diagram of the ultrasonic oscillator and its surroundings shown.

[0024] Figure 3 This is a flowchart showing the processing procedure of the control operation of the ultrasonic vibration bonding device according to the first embodiment.

[0025] Figure 4 This is a graph showing the control contents of the ultrasonic control method of the ultrasonic vibration bonding device according to the first embodiment.

[0026] Figure 5 This is an explanatory diagram schematically showing an ultrasonic oscillator and its periphery according to the second embodiment.

[0027] Figure 6This is a flowchart showing a control procedure of an ultrasonic control method of a conventional ultrasonic vibration bonding device.

[0028] Figure 7 This is a graph showing the control contents of the conventional ultrasonic control method.

[0029] Explanation of symbols

[0030] 1, 1B: control unit; 2: timer; 6: pressurizing cylinder; 10: ultrasonic vibration amplitude transformer; 11: converter; 12, 12B: ultrasonic oscillator; 13: workpiece; 14: substrate; 20: workbench; 101, 102: ultrasonic vibration bonding device. DETAILED DESCRIPTION

[0031] <Principles of the Present Disclosure>

[0032] Conventional ultrasonic vibration bonding devices have adopted an energy control method as an ultrasonic control method. Figure 7 As shown, when a plurality of joining locations are joined, the operation time (t12>>t11) of the ultrasonic vibration operation and the final electrical output value (W9>>W1) may vary.

[0033] The present inventors focused on the electrical output value included in the oscillation signal, compared with the energy calculated from the oscillation signal, and assumed that there is an ideal output value WR suitable for joining the joined members.

[0034] like Figure 7 As shown in case 11, when the friction resistance related to the workpiece is lower than normal, the output value W1 is significantly lower than the ideal output value WR. As a result, it is believed that even if the ultrasonic vibration action is performed for a relatively long time, the workpiece cannot be well bonded.

[0035] On the other hand, Figure 7 As shown in case 12, when the friction resistance is greater than usual, the output value W9 is significantly higher than the ideal output value WR, and it is considered that the possibility of damage to the joined member is high. For example, when the joined member is a metal foil, it is considered that the possibility of the metal foil being damaged becomes high.

[0036] Thus, in the energy control method using the energy threshold EX as the termination condition, when the friction resistance becomes too large or too small compared to normal, the joined parts cannot be joined well by the ultrasonic vibration action. That is, when the friction resistance at multiple joints deviates, the energy control method cannot cope with it.

[0037] Therefore, the inventors of the present invention have found that an output control method that pre-sets an output threshold WX that is consistent with an ideal output value WR and continuously performs ultrasonic vibration until the electrical output value of the oscillation signal reaches the output threshold WX is an effective control method. The ultrasonic vibration bonding device that adopts the output control method as the ultrasonic control method is the following embodiments 1 and 2.

[0038] <Implementation Method 1>

[0039] Figure 1 This is an explanatory diagram schematically showing the configuration of an ultrasonic vibration bonding device 101 according to Embodiment 1, which is an ultrasonic vibration bonding device of the present disclosure.

[0040] As shown in the figure, the ultrasonic vibration bonding device 101 includes an ultrasonic vibration horn 10, a converter 11, and an ultrasonic oscillator 12 as main components.

[0041] On the other hand, the substrate 14 is placed on the workbench 20, and the bonded material 13 is placed on the surface of the substrate 14. As the bonded material 13, for example, a metal foil is considered. The interface BF is the interface when the bonded material 13 is bonded to the substrate 14. In this way, the bonded material 13 is placed on the workbench 20 via the substrate 14.

[0042] The ultrasonic vibration horn 10 has a contact front end portion 10t at the front end, and performs an ultrasonic vibration operation to apply ultrasonic vibration to the workpiece 13 from the bottom surface of the contact front end portion 10t. In parallel with the ultrasonic vibration operation, a pressurizing operation is performed. Figure 1 The pressurizing cylinder 6 (see Figure 2 ) Pressurize the ultrasonic vibration horn 10 toward the workbench 20. Figure 1 In the figure, only the pressurizing force F6 when the pressurizing cylinder 6 performs the pressurizing operation is shown.

[0043] The converter 11, which functions as an ultrasonic vibrator, applies ultrasonic vibration to the ultrasonic vibration horn 10. The ultrasonic oscillator 12 includes a control unit 1 as a main component, and the control unit 1 performs a control operation for controlling the ultrasonic vibration operation of the ultrasonic vibration horn 10.

[0044] Figure 21 is an explanatory diagram schematically showing an ultrasonic oscillator 12 and its surroundings. As shown in the figure, the control unit 1 in the ultrasonic oscillator 12 outputs an oscillation signal 12 including output information SC to the converter 11 as a control operation. The output information SC included in the oscillation signal 12 is an electrical output value for causing the ultrasonic vibration given from the converter 11 to the ultrasonic vibration horn 10 to vibrate at a predetermined frequency. For example, when the oscillation signal S12 is a voltage signal, the amplitude (size) of the oscillation signal S12 is considered as the output information SC.

[0045] The control unit 1 outputs the oscillation signal S12 as a control signal to the transducer 11. The transducer 11, which functions as an ultrasonic vibrator, applies ultrasonic vibration to the ultrasonic vibration horn 10 based on the oscillation signal S12.

[0046] As a result, the ultrasonic vibration horn 10 can perform an ultrasonic vibration operation of applying ultrasonic vibration to the joined material 13 from the bottom surface (contact surface) of the abutment tip end portion 10 t.

[0047] The output information SC included in the oscillation signal S12 is an electrical output value required for the ultrasonic vibration to vibrate at a predetermined frequency in the ultrasonic vibration operation of the ultrasonic vibration horn 10. The amount of motion in the ultrasonic vibration given to the ultrasonic vibration horn 10 by the converter 11 is positively correlated with the output information SC, and the larger the output information SC, the larger the amount of motion in the ultrasonic vibration.

[0048] In this way, the control unit 1 outputs the oscillation signal S12 as a control signal to the converter 11 as a control operation, thereby controlling the ultrasonic vibration operation of the ultrasonic vibration horn 10 .

[0049] The control operation performed by the control unit 1 in the ultrasonic vibration bonding apparatus 101 of the first embodiment is characterized in that it includes an operation continuation process of continuing the ultrasonic vibration operation until the output information SC (the electrical output value shown) becomes equal to or greater than the output threshold value WX.

[0050] The ultrasonic vibration horn 10 and the converter 11 have a friction resistance identification function for identifying the friction resistance associated with the joined member 13. In addition, as described above, the "friction resistance associated with the joined member 13" is the combined friction resistance at the contact surface between the joined member 13 and the ultrasonic vibration horn 10 and the joining surface between the joined member 13 and the substrate 14. That is, the friction resistance is determined by the smaller friction resistance of the first friction resistance at the contact surface and the second friction resistance at the joining surface. The friction resistance identification function can be realized, for example, by using existing technologies such as piezoelectric principles. The detection component for the friction resistance identification function is, for example, arranged in the ultrasonic vibration horn 10, and the feedback signal SF containing the friction resistance information detected by the ultrasonic vibration horn 10 is output to the control unit 1 in the ultrasonic vibration horn 10 via the converter 11.

[0051] The feedback signal SF is output at a predetermined time interval, and the predetermined time may be, for example, 1 ms.

[0052] In response to receiving the feedback signal SF, the control unit 1 obtains output information SC based on the frictional resistance information included in the feedback signal SF, and outputs the oscillation signal S12 including the newly obtained output information SC to the converter 11 as a control signal.

[0053] Then, the converter 11 applies the ultrasonic vibration based on the oscillation signal S12 including the newly obtained output information SC to the ultrasonic vibration horn 10 .

[0054] During the period of executing the ultrasonic vibration action, the friction resistance information (the friction resistance value shown) increases, and therefore, the output information SC (the electrical output value shown) also increases. This is because the friction resistance information and the output information SC have a positive correlation. The control unit 1 in the ultrasonic oscillator 12 continuously outputs the oscillation signal S12 including the output information SC to the converter 11 until the output information SC becomes above the output threshold value WX, thereby continuously executing the ultrasonic vibration action.

[0055] like Figure 2 As shown, the ultrasonic vibration bonding apparatus 101 of the first embodiment includes a pressurizing cylinder 6 as a pressurizing mechanism. The pressurizing cylinder 6 performs a pressurizing operation of pressurizing the ultrasonic vibration horn 10 toward the table 20 with a pressurizing force F6 under the control of the control unit 1 .

[0056] The control unit 1 outputs a pressurizing control signal SP to the pressurizing air cylinder 6 , thereby controlling the pressurizing operation of the pressurizing air cylinder 6 .

[0057] Figure 31 is a flowchart showing the processing sequence of the control operation of the ultrasonic vibration bonding device 101 according to Embodiment 1. As described above, the control operation is performed by the control unit 1, and the ultrasonic vibration bonding device 101 adopts the output control method as the ultrasonic control method. Figure 3 The processing contents of the control operation of the control unit 1 will be described.

[0058] In step ST1, an output threshold WX, which is a termination condition parameter in the output control mode, is set. The output threshold WX is set, for example, to Figure 7 The ideal output value WR is shown.

[0059] Next, in step ST2, the pressurizing operation by the pressurizing cylinder 6 as the pressurizing mechanism is started. Specifically, the control unit 1 outputs a pressurizing control signal SP instructing the start of the pressurizing operation to the pressurizing cylinder 6, whereby the pressurizing operation by the pressurizing cylinder 6 is started.

[0060] Then, in step ST3, the contact between the abutting front end portion 10t of the ultrasonic vibration horn 10 and the workpiece 13 is identified. For example, the pressurizing cylinder 6 is provided with an existing detection function for detecting the presence or absence of the contact between the abutting front end portion 10t and the workpiece 13, and when the detection function detects the contact, a contact detection signal S6 indicating the contact state is output to the control unit 1, thereby enabling the control unit 1 to identify the contact state.

[0061] Next, in step ST4, the control unit 1 of the ultrasonic oscillator 12 outputs an oscillation signal S12 including output information SC and oscillating at a predetermined frequency to the converter 11, thereby starting ultrasonic vibration operation through the ultrasonic vibration horn 10. In addition, the output information SC at the start of the operation is set to a relatively small value.

[0062] Thus, steps ST3 and ST4 are steps in which the ultrasonic vibration operation is started by the contact between the abutting tip portion 10 t and the workpiece 13 as a trigger.

[0063] Then, in step ST5, when the ultrasonic vibration operation starts, the feedback signal SF is output from the converter 11 to the control unit 1 of the ultrasonic oscillator 12. As described above, the feedback signal SF includes friction resistance information indicating the friction resistance value at the contact point between the bottom surface of the abutting tip portion 10t and the joined material 13.

[0064] The control unit 1 recalculates the output information SC required to apply ultrasonic vibration of a predetermined frequency to the contact part based on the friction resistance information included in the feedback signal SF. The friction resistance information of the contact part (friction resistance value shown) and the output information SC (electrical output value shown) have a positive correlation.

[0065] Then, in step ST6, the control unit 1 outputs the oscillation signal S12 including the output information SC to the converter 11. Then, the converter 11 applies the ultrasonic vibration to the ultrasonic vibration horn 10 based on the oscillation signal S12 including the output information SC.

[0066] The frictional resistance at the contact portion increases during the period of the ultrasonic vibration operation, and therefore the output information SC (the electrical output value shown) also increases. For example, when the output information SC indicates a voltage value (V), since the current value (A) flowing through the converter 11 is usually constant, the power value (W) of the converter 11 also increases together with the voltage value.

[0067] Next, in step ST7, the output information SC (the electrical output value shown) is compared with the output threshold WX. When the output information SC is a voltage value, the output threshold WX is the voltage value, and when the output information SC is a power value, the output threshold WX is the power value. As described above, since the current value flowing through the converter 11 is constant, the voltage value and the power value become substantially equivalent electrical output values.

[0068] In step ST7, when {SC≥WX} is satisfied, the process proceeds to the next step ST8, and when {SC≥WX} is not satisfied, the process returns to step ST5.

[0069] If {SC<WX} is satisfied in step ST7, steps ST5 to ST7 are repeatedly executed until {SC≥WX} is satisfied. Thus, step ST7 is a step in which steps ST5 and ST6 are repeatedly executed until the output information SC becomes equal to or greater than the output threshold value WX.

[0070] Therefore, the effective oscillation signal S12 is continuously output as the control signal until the output information SC reaches the output threshold value WX, so that the ultrasonic vibration operation can be continuously performed by the ultrasonic vibration horn 10 .

[0071] In step ST8, which is executed when {SC≥WX} is satisfied in step ST7, the pressurizing operation of the pressurizing cylinder 6 as the pressurizing mechanism is terminated. Specifically, the control unit 1 outputs a pressurizing control signal SP instructing the end of the pressurizing operation to the pressurizing cylinder 6, thereby terminating the pressurizing operation of the pressurizing cylinder 6.

[0072] Thereafter, in step ST9, the ultrasonic vibration operation of the ultrasonic vibration horn 10 is terminated. For example, the ultrasonic vibration operation can be terminated by stopping the output of the oscillation signal S12 to the converter 11.

[0073] Thus, steps ST8 and ST9 are steps executed after the output information SC becomes equal to or larger than the output threshold value WX, and are steps for terminating the pressurizing operation of the pressurizing air cylinder 6 and the ultrasonic vibration operation of the ultrasonic vibration horn 10 .

[0074] Figure 4 1 is a graph showing the control contents of the ultrasonic control method of the ultrasonic vibration bonding device 101 according to Embodiment 1. In this graph, the horizontal axis represents time (ms) and the vertical axis represents the electrical output value (Power (W)). Figure 4 In FIG. 1 , the output information SC shows the power value (W) as the electrical output value.

[0075] Case 1 shows the temporal change of the output information SC1 when the friction resistance associated with the joined part 13 is relatively small when the ultrasonic vibration action is performed by the ultrasonic vibration horn 10. That is, Case 1 shows, for example, the control content when the sliding degree at the interface BF between the joined part 13 and the substrate 14 is relatively large, that is, when the second friction resistance at the interface BF that becomes the joining surface is small.

[0076] On the other hand, case 2 shows the temporal change of the output information SC2 when the frictional resistance is relatively large. For example, case 2 shows the control content when there is almost no slip at the interface BF between the bonded member 13 and the substrate 14.

[0077] Since the frictional resistance is relatively small in case 1, the output information SC1 rises gradually and reaches the output threshold value WX at time t2, thereby terminating the ultrasonic vibration operation.

[0078] In case 2, since the friction resistance is relatively large, the output information SC2 rises steeply and reaches the output threshold WX at time t1, and the ultrasonic vibration operation ends. There is a relatively large time difference dt12 between time t1 and time t2.

[0079] In the case where there is almost no sliding at the interface BF (joining surface) between the joined member 13 and the substrate 14 and the friction resistance associated with the joined member 13 is relatively large, such as Figure 4 As shown in Case 2, at time t1, the output information SC1 reaches the output threshold WX.

[0080] On the other hand, when the sliding degree of the interface BF (joining surface) between the joined member 13 and the substrate 14 is relatively large and the friction resistance associated with the joined member 13 is relatively small, as shown in FIG. Figure 4 As shown in case 1, at time t2 which is delayed by a time difference dt12 from time t1, the output information SC2 reaches the output threshold value WX.

[0081] In this way, the control unit 1 of the ultrasonic vibration bonding device 101 of embodiment 1 performs a control action regardless of the level of friction resistance related to the bonded parts 13 at the above-mentioned contact position, and the control action includes continuous ultrasonic vibration action until the output information SC (SC1, SC2) reaches the output threshold value WX.

[0082] (Conventional ultrasonic control method)

[0083] Figure 6 1 is a flow chart showing the control sequence of the ultrasonic control method of the conventional ultrasonic vibration bonding device. As mentioned above, the energy control method has been adopted as the ultrasonic control method in the past. Here, the processing sequence of the conventional ultrasonic control method is described with reference to this figure. Here, for the sake of convenience, it is assumed that the conventional ultrasonic vibration bonding device has Figure 1 and Figure 2 The structure shown is the same as that of the control unit 1, and the control operation is performed by the control unit.

[0084] In step ST51, an energy threshold value EX serving as a termination condition parameter in the energy control method is set.

[0085] Next, in step ST52, Figure 3 The same as step ST2 shown, the pressurizing operation by the pressurizing air cylinder 6 as the pressurizing means is started.

[0086] Then, in step ST53, Figure 3 The same as step ST3 shown, the contact between the abutting tip portion 10 t of the ultrasonic vibration horn 10 and the joined material 13 is recognized.

[0087] Next, in step ST54, Figure 3 The same as step ST4 shown, the ultrasonic vibration operation by the ultrasonic vibration horn 10 is started.

[0088] Then, in step ST55, Figure 3 The same as step ST5 shown in the figure is used to recalculate the output information SC required for applying ultrasonic vibration of a predetermined frequency to the contact portion generating the frictional resistance shown in the frictional resistance information.

[0089] Then, in step ST56, Figure 3 The same as step ST6 shown, the oscillation signal S12 including the output information SC is output to the converter 11.

[0090] Next, in step ST57, the energy consumption ΣE is calculated based on the output information SC of the oscillation signal S12. When the output information SC indicates a power value, the energy consumption ΣE is an integrated value of the temporal change of the output information SC.

[0091] Next, in step ST58 , the consumed energy ΣE is compared with the energy threshold value EX.

[0092] In step ST58 , when {ΣE≥EX} is satisfied, the process proceeds to the next step ST59 , and when {ΣE≥EX} is not satisfied, the process returns to step ST55 .

[0093] When {ΣE<EX} is satisfied in step ST58 , steps ST55 to ST58 are repeatedly executed until {ΣE≥EX} is satisfied.

[0094] Therefore, the effective oscillation signal S12 is continuously outputted until the consumed energy ΣE reaches the energy threshold value EX, and thus the ultrasonic vibration horn 10 continuously performs the ultrasonic vibration operation.

[0095] In step ST59, which is executed when {ΣE≥EX} is satisfied in step ST58, Figure 3 The same as step ST8 shown in the figure is performed, and the pressurizing operation of the pressurizing air cylinder 6 is completed.

[0096] Then, in step ST60, Figure 3 The same as step ST9 shown in the figure, the ultrasonic vibration operation of the ultrasonic vibration horn 10 is terminated.

[0097] Thus, the conventional ultrasonic control method adopts the energy control method. Therefore, the following situations will inevitably occur: Figure 7 As in the case 11 shown in FIG. 11 , the ultrasonic vibration action is terminated at the time t12 when the output information SC11 is significantly lower than the ideal output value WR (≈WX), or as in the case Figure 7 As in the case 12 shown in the figure, the ultrasonic vibration operation is terminated at the time t11 when the output information SC12 greatly exceeds the ideal output value WR.

[0098] (Effect)

[0099] The control operation executed by the control unit 1 in the ultrasonic oscillator 12 in the ultrasonic vibration bonding apparatus 101 according to the first embodiment includes an operation continuation process of continuing the ultrasonic vibration operation until the output information SC becomes equal to or greater than the output threshold value WX.

[0100] Therefore, while the transducer 11 is performing the ultrasonic vibration operation, it is possible to surely provide the ultrasonic vibration based on the oscillation signal S12 including the output information SC equal to or greater than the output threshold value WX to the ultrasonic vibration horn 10 .

[0101] For example, in Figure 4 In the case of the second example shown in FIG. 1 , at time t1, the output information SC2 reaches the output threshold WX. Figure 4 In the case of the case 1 shown in FIG. 1 , at the time t2 delayed by the time difference dt12 from the time t1, the output information SC1 reaches the output threshold value WX. That is, the ultrasonic vibration bonding device of the embodiment 1 does not Figure 7 As in the case 11 shown in the figure, the ultrasonic vibration operation is terminated when the output value W1 of the output information SC11 is significantly lower than the ideal output value WR corresponding to the output threshold value WX.

[0102] As a result, the ultrasonic vibration bonding apparatus 101 according to the first embodiment can favorably bond the bonded materials 13 to the surface of the substrate 14 by the ultrasonic vibration operation of the ultrasonic vibration horn 10 by appropriately setting the output threshold value WX.

[0103] Therefore, when joining a plurality of joining locations of the joined material 13 , even if the frictional resistance with the joined material 13 varies between the plurality of joining locations, the ultrasonic vibration joining device 101 of the first embodiment can join the plurality of joining locations satisfactorily.

[0104] For example, by conducting an experiment in which a plurality of joint locations are joined using the ultrasonic vibration joining device 101 to join a test joining member that is equivalent to the joined member 13, it is possible to obtain an output threshold value WX of an output value that enables good joining regardless of the level of frictional resistance at the joining location with respect to the joined member 13. As the output threshold value WX, for example, Figure 7 The ideal output value WR is shown.

[0105] In response to receiving the feedback signal SF, the control unit 1 of the ultrasonic vibration bonding device 101 of the first embodiment obtains output information SC based on the frictional resistance information included in the feedback signal SF, and outputs the oscillation signal S12 including the newly obtained output information SC as a control signal.

[0106] Therefore, the control unit 1 of the ultrasonic vibration bonding device 101 according to the first embodiment can always output the oscillation signal S12 including the output information SC reflecting the friction resistance information included in the feedback signal SF to the converter 11 .

[0107] As a result, the ultrasonic vibration bonding apparatus 101 according to the first embodiment can always apply ultrasonic vibrations at a predetermined frequency to the bonded materials 13 through the ultrasonic vibration horn 10 by causing the ultrasonic vibration horn 10 to perform ultrasonic vibrations via the converter 11 .

[0108] The control unit 1 of the ultrasonic vibration bonding device 101 of the first embodiment executes the Figure 3The control operation of steps ST1 to ST9 shown can quickly end the pressurizing operation of the pressurizing air cylinder 6 and the ultrasonic vibration operation of the ultrasonic vibration horn 10 when the output information SC reaches or exceeds the output threshold value WX.

[0109] The ultrasonic vibration bonding device 101 according to the first embodiment can cause the ultrasonic vibration horn 10 to perform ultrasonic vibration operation by outputting the oscillation signal S12 as a control signal from the control unit 1 included in the ultrasonic oscillator 12 to the converter.

[0110] <Implementation Method 2>

[0111] Figure 5 1 is an explanatory diagram schematically showing an ultrasonic oscillator 12B and its surroundings included in an ultrasonic vibration bonding device 102 according to Embodiment 2. Figure 1 The ultrasonic vibration bonding device 101 of the first embodiment shown is the same as that of the first embodiment, but is different in that the ultrasonic oscillator 12 is replaced with an ultrasonic oscillator 12B.

[0112] Hereinafter, the same reference numerals are given to the same parts as those of the ultrasonic oscillator 12B of the first embodiment, and the description thereof will be appropriately omitted, and the description will be mainly focused on the characteristic parts of the ultrasonic oscillator 12B of the second embodiment.

[0113] like Figure 5 As shown, the control unit 1B in the ultrasonic oscillator 12B is the same as the control unit 1 of the first embodiment, and outputs an oscillation signal S12 indicating the output information SC to the converter 11 .

[0114] The ultrasonic oscillator 12B includes a timer 2 as a main component in addition to the control unit 1B. The control unit 1B receives time information S2 indicating the passage of time from the timer 2, recognizes the processing time of the ultrasonic vibration action, and outputs processing time information SP indicating the processing time of the ultrasonic vibration action, i.e., the bonding processing time, to the outside.

[0115] The control unit 1B can recognize the time information S2 received from the timer 2 at all times, for example. Figure 3 The elapsed time from the execution start time of the ultrasonic vibration operation in step ST4 to the execution end time of the ultrasonic vibration operation in step ST9 is regarded as the processing time of the ultrasonic vibration operation.

[0116] Then, the control unit 1B outputs processing time information TP indicating the processing time of the ultrasonic vibration operation, that is, the bonding processing time, to the outside of the ultrasonic vibration bonding device 102 .

[0117] The control unit 1B in the ultrasonic oscillator 12B in the ultrasonic vibration bonding apparatus 102 of the second embodiment receives the time information S2 from the timer 2, and can therefore easily recognize the bonding process time, which is the process time of the ultrasonic vibration operation performed by the ultrasonic oscillation horn 10, from the time information S2.

[0118] Therefore, the ultrasonic vibration bonding apparatus 102 of the second embodiment outputs the processing time information TP indicating the bonding processing time to the outside, thereby allowing the user of the ultrasonic vibration bonding apparatus 102 to use the processing time information TP as a material for determining whether the bonding is good or bad.

[0119] <Others>

[0120] In addition, the present disclosure can freely combine the various embodiments, or appropriately modify or omit the various embodiments within the scope of the disclosure.

[0121] For example, in Embodiment 1 and Embodiment 2, the control unit 1 (1B) may be disposed outside the ultrasonic oscillator 12 (12B). Hereinafter, the control unit 1 disposed outside is referred to as an "externally disposed control unit". It may also be configured so that the output form of the oscillation signal S12 of the ultrasonic oscillator 12 and the pressurizing operation of the pressurizing cylinder 6 are controlled by the externally disposed control unit. In this case, the externally disposed control unit outputs the oscillation signal S12 including the output information SC to the converter 11 via the ultrasonic oscillator 12.

Claims

1. An ultrasonic vibration bonding device comprising: An ultrasonic vibration horn that performs an ultrasonic vibration action of applying ultrasonic vibration to the joined member from the abutting front end portion; a converter for imparting the ultrasonic vibration to the ultrasonic vibration horn; and a control unit for executing a control operation for controlling the ultrasonic vibration operation of the ultrasonic vibration horn; The control unit outputs a control signal including output information to the converter as the control action, and the converter imparts the ultrasonic vibration to the ultrasonic vibration horn based on the control signal, wherein the output information is an electrical output value required for the ultrasonic vibration to vibrate at a predetermined frequency. The control operation includes an operation continuation process of continuing the ultrasonic vibration operation until the output information becomes equal to or greater than an output threshold value.

2. The ultrasonic vibration bonding device according to claim 1, wherein: When the converter performs the ultrasonic vibration operation through the ultrasonic vibration horn, the converter outputs a feedback signal including friction resistance information indicating the friction resistance associated with the joined member to the control unit, and the feedback signal is output at a predetermined time interval. In response to receiving the feedback signal, the control unit obtains the output information based on the frictional resistance information included in the feedback signal, and outputs the control signal including the newly obtained output information.

3. The ultrasonic vibration bonding device according to claim 2, wherein: The ultrasonic vibration bonding device further comprises: A workbench for placing the above-mentioned joined parts; and The pressurizing mechanism performs a pressurizing action of pressurizing the ultrasonic vibration horn toward the workbench side, The above control action has the following steps: (a) starting the above-mentioned pressurization step; (b) a step of starting the ultrasonic vibration operation by triggering the contact between the abutting front end portion and the joined member; (c) a step of calculating the output information based on the friction resistance information indicated by the feedback signal; (d) a step of outputting the control signal including the output information calculated in the step (c) to the converter; (e) repeatedly performing the above steps (c) and (d) until the above output information becomes greater than the above output threshold; and (f) a step of terminating the pressurizing operation and the ultrasonic vibration operation after the output information becomes equal to or greater than the output threshold.

4. The ultrasonic vibration bonding device according to any one of claims 1 to 3, wherein: The ultrasonic vibration bonding device further comprises an ultrasonic oscillator, which outputs an oscillation signal to the converter. The ultrasonic oscillator comprises the control unit. The oscillation signal is output as the control signal.

5. The ultrasonic vibration bonding device according to claim 4, wherein: The ultrasonic oscillator also has a timer. The control unit receives time information from the timer, recognizes the processing time of the ultrasonic vibration operation as bonding processing time, and outputs processing time information indicating the bonding processing time to the outside.

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