Lifting mechanism of crystal gasket

Abstract

The invention discloses a lifting mechanism of a crystal gasket, and relates to the technical field of crystal gaskets, the lifting mechanism comprises a base, a movement mechanism is arranged at the top of the base, a placement box is arranged at the top of the movement mechanism, and sliding grooves are formed in the two sides of the inner wall of the placement box. According to the lifting mechanism of the crystal gasket, the rotating sleeve can rotate through the vertical rod, so that the height of the top end of the rotating sleeve is larger than that of a seed crystal, subsequent operation is facilitated, the substrate table can move upwards and move in the annular plate through the use of the stepping motor, the periphery of the seed crystal is shielded through the annular plate, and the seed crystal can be lifted conveniently. And the rotary sleeve can move upwards along with the substrate table, the rotary sleeve firstly makes contact with the limiting plate and pushes the limiting plate and the annular plate to move upwards, so that when the substrate table moves upwards, the annular plate moves upwards, and the seed crystal can be protected all the time and prevented from falling off.

Description

Technical Field

[0001] The invention relates to the technical field of crystal gaskets, and in particular to a lifting mechanism of a crystal gasket. Background Art

[0002] Crystal growth temperature is the most important control parameter in the MPCVD process for preparing diamond single crystals. Appropriate growth temperature is a necessary condition for the growth of diamond single crystals. In the prior art, when the seed crystal moves upward, although it can get close to the external microwave plasma sphere, if the seed crystal falls during the lifting process, it will come into contact with other objects, making the seed crystal vulnerable to damage. The seed crystal cannot be protected during the lifting process, which is inconvenient to use.

[0003] For example, patent application number CN201220667829.3, the lifting mechanism of the silicon wafer splitter, this invention has the advantages of improving work efficiency, product quality and reducing costs, but in the process of lifting, if the seed crystal falls, it will come into contact with other objects, making the seed crystal vulnerable to damage, and the seed crystal cannot be protected during the lifting process.

[0004] For example, patent application number CN202022371560.1 discloses a lifting mechanism for sheets. During the transportation of pallets and the stacking of sheets, the invention does not require a lot of manpower, saves time and effort, and is convenient for the sheet grabbing device to stack the sheets, which can improve the overall stacking efficiency of the sheets and thus ensure the subsequent operation process. However, during the lifting process, if the seed crystal falls, it will come into contact with other objects, making the seed crystal vulnerable to damage and unable to be protected during the lifting process. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a lifting mechanism for a crystal gasket, which solves the problem that during the lifting process, the seed crystal may come into contact with other objects when it falls, thus causing the seed crystal to be easily damaged.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a lifting mechanism for a crystal gasket, including a base, a moving mechanism is arranged on the top of the base, a placement box is arranged on the top of the moving mechanism, and slide grooves are arranged on both sides of the inner wall of the placement box. The number of the slide grooves is two, and the two slide grooves are symmetrically arranged about the central axis in the vertical direction of the base.

[0007] The motion mechanism includes a stepper motor, the output shaft of the stepper motor is provided with a reducer, a substrate stage is provided above the stepper motor, a center rod is fixedly provided at the bottom of the substrate stage, and an infrared thermometer is provided inside the top of the center rod, an annular plate is provided inside the placement box, and the annular plate is respectively in contact with the substrate stage and the placement box, vertical rods are provided at the top of both ends of the substrate stage, a rotating sleeve is provided on the outside of the vertical rod, and the rotating sleeve is connected to the vertical rod through a thread, and a limiting plate is provided above the rotating sleeve, and the limiting plate is fixedly connected to the inner wall of the annular plate, and the rotating The rotating sleeve rotates so that the top height of the rotating sleeve is greater than the height of the seed crystal, which is convenient for subsequent operations. The substrate stage can be moved upward by using a stepper motor, and the substrate stage can be moved in the annular plate. The annular plate is used to shield the area around the seed crystal to prevent the seed crystal from falling. The rotating sleeve can move upward with the substrate stage, and the rotating sleeve is first contacted with the limiting plate, and promotes the upward movement of the limiting plate and the annular plate, so that the substrate stage moves upward for a certain distance, and the annular plate can be moved upward together, so that the seed crystal can always be protected to prevent it from falling.

[0008] A support rod is arranged on the top of the base, and the base is fixedly connected to the placement box through the support rod.

[0009] The tops of both ends of the base are provided with connecting springs, the tops of the connecting springs are provided with lifting rods, and the tops of the lifting rods are provided with cross bars.

[0010] The top end and the bottom end of the lifting rod are fixedly connected to the cross bar and the connecting spring respectively, and the cross bar is in contact with the placement box.

[0011] A threaded rod is arranged at the bottom of the placing box, and a pushing rod is arranged above the reducer.

[0012] The push rod is fixedly connected to the center rod, and the threaded rod is threadedly connected to the push rod.

[0013] Sliding blocks are arranged on both sides of the annular plate, the sliding blocks are movably connected with the sliding grooves, and a PLC controller is arranged on the top of the base.

[0014] Beneficial Effects The lifting mechanism of a crystal gasket of the present invention has the following beneficial effects compared with the prior art: 1. The lifting mechanism of the crystal gasket can rotate the rotating sleeve through the vertical rod, so that the top height of the rotating sleeve is greater than the height of the crystal seed, which is convenient for subsequent operations. The substrate stage can be moved upward by using a stepper motor, and the substrate stage can be moved in the annular plate. The annular plate is used to shield the crystal seed to prevent the crystal seed from falling. The rotating sleeve can move upward with the substrate stage, and the rotating sleeve is first contacted with the limiting plate, and the limiting plate and the annular plate are pushed to move upward, so that when the substrate stage moves upward, the annular plate moves upward together, which can always protect the crystal seed and prevent it from falling.

[0015] 2. The lifting mechanism of the crystal gasket starts working through the PLC controller, and the stepper motor controls the rotation of the threaded rod through the reducer, which can make the crystal seed move upward and make the substrate stage close to the plasma source. In this way, the microwave plasma sphere and the crystal seed can be kept at a fixed distance by controlling the lifting and lowering of the substrate stage, thereby ensuring the rapid growth of the crystal seed under high power. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of a lifting mechanism of a crystal gasket of the present invention; Figure 2 It is a schematic diagram of the motion mechanism of a lifting mechanism of a crystal gasket of the present invention; Figure 3 It is a schematic diagram of a placement box and a center rod of a lifting mechanism of a crystal gasket of the present invention; Figure 4 The present invention provides a top view of the annular plate and substrate table of a crystal gasket lifting mechanism.

[0017] In the figure: 1. base; 2. motion mechanism; 201. stepper motor; 202. reducer; 203. substrate stage; 204. center rod; 205. infrared thermometer; 206. annular plate; 207. vertical rod; 208. rotating sleeve; 209. limiting plate; 210. connecting spring; 211. lifting rod; 212. cross rod; 213. threaded rod; 214. pushing rod; 215. sliding block; 216. PLC controller; 3. placement box; 4. slide groove; 5. support rod. DETAILED DESCRIPTION

[0018] like Figure 1-2 The present invention provides a technical solution: a lifting mechanism for a crystal gasket, including a base 1, a moving mechanism 2 is arranged on the top of the base 1, a placement box 3 is arranged on the top of the moving mechanism 2, and slide grooves 4 are arranged on both sides of the inner wall of the placement box 3. The number of the slide grooves 4 is two, and the two slide grooves 4 are symmetrically arranged about the central axis of the vertical direction of the base 1.

[0019] The motion mechanism 2 includes a stepper motor 201, the output shaft of the stepper motor 201 is provided with a reducer 202, a substrate stage 203 is provided above the stepper motor 201, a center rod 204 is fixedly provided at the bottom of the substrate stage 203, and an infrared thermometer 205 is provided inside the top of the center rod 204, an annular plate 206 is provided inside the placement box 3, and the annular plate 206 is respectively in contact with the substrate stage 203 and the placement box 3, vertical rods 207 are provided at the top of both ends of the substrate stage 203, and a rotating sleeve 208 is provided on the outside of the vertical rod 207, and the rotating sleeve 208 is connected to the vertical rod 207 through a thread, and a limiting plate 209 is provided above the rotating sleeve 208, and the limiting plate 209 is fixedly connected to the inner wall of the annular plate 206.

[0020] A support rod 5 is provided on the top of the base 1, and the base 1 is fixedly connected to the placement box 3 through the support rod 5. Connecting springs 210 are provided on the tops of both ends of the base 1, and a lifting rod 211 is provided on the top of the connecting spring 210. A cross bar 212 is provided on the top of the lifting rod 211. The top and bottom ends of the lifting rod 211 are fixedly connected to the cross bar 212 and the connecting spring 210 respectively. The cross bar 212 is in contact with the placement box 3. A threaded rod 213 is provided at the bottom of the placement box 3, and a push rod 214 is provided above the reducer 202.

[0021] like Figure 1 and 3 -4, the push rod 214 is fixedly connected to the center rod 204, the threaded rod 213 is threadedly connected to the push rod 214, sliding blocks 215 are provided on both sides of the annular plate 206, the sliding blocks 215 are movably connected to the slide groove 4, and a PLC controller 216 is provided on the top of the base 1.

[0022] During operation, the seed crystal is located on the substrate stage 203. Since the rotating sleeve 208 is connected to the vertical rod 207 through a thread, the rotating sleeve 208 can be rotated through the vertical rod 207, so that the top height of the rotating sleeve 208 is greater than the height of the seed crystal, which is convenient for subsequent operations. Because there is an external microwave plasma sphere on the placement box 3, the ion source transfers heat to the seed crystal placed in the center of the substrate stage 203 in the form of thermal radiation, and there is an infrared thermometer 205 under the substrate stage 203. The external infrared thermometer 205 transmits the real-time temperature of the seed crystal to the PLC controller 216, and the stepping motor 201 is turned on through the PLC controller 216. The stepper motor 201 starts to work, and controls the threaded rod 213 to rotate through the reducer, so that the threaded rod 213 rotates under the placement box 3. During the rotation of the threaded rod 213, since the threaded rod 213 is threadedly connected with the push rod 214, the rotation of the threaded rod 213 can make the push rod 214 move upward, and the center rod 204 fixedly connected to the push rod 214 moves upward at the same time, and pushes the substrate stage 203 above, so that the substrate stage 203 is close to the plasma source. In this way, the microwave plasma sphere and the seed crystal can be kept at a fixed distance by controlling the lifting and lowering of the substrate stage 203, thereby ensuring that the seed crystal grows rapidly under high power. When the substrate stage 203 moves upward, it can only move inside the annular plate 206 to prevent the crystal seed from falling, and the rotating sleeve 208 can move upward at the same time. Because the top height of the rotating sleeve 208 is greater than the height of the crystal seed, the rotating sleeve 208 and the limiting plate 209 can move upward first. When the substrate stage 203 continues to move upward, the limiting plate 209 can be pushed to move upward, and the annular plate 206 fixedly connected to the limiting plate 209 moves upward at the same time, so that when the substrate stage 203 moves upward, it is always located in the annular plate 206 to prevent the crystal seed from falling. The annular plate 206 is fixedly connected to the cross bar 212, so that the cross bar 212 and the lifting rod 211 can move upward at the same time, which can squeeze the connecting spring 210 under the lifting rod 211, so that the crystal seed can be protected by the annular plate 206 to prevent it from falling.

Claims

1. A lifting mechanism for a crystal gasket, characterized in that: The invention comprises a base (1), a moving mechanism (2) is arranged on the top of the base (1), a placement box (3) is arranged on the top of the moving mechanism (2), and slide grooves (4) are arranged on both sides of the inner wall of the placement box (3), the number of the slide grooves (4) is two, and the two slide grooves (4) are symmetrically arranged with respect to the central axis in the vertical direction of the base (1); The motion mechanism (2) comprises a stepper motor (201), the output shaft of the stepper motor (201) is provided with a reducer (202), a substrate stage (203) is provided above the stepper motor (201), a center rod (204) is fixedly provided at the bottom of the substrate stage (203), and an infrared thermometer (205) is provided inside the top end of the center rod (204), and an annular plate (206) is provided inside the placement box (3), and the annular plate (206) is provided on the substrate stage (203). 06) are in contact with the substrate stage (203) and the placement box (3) respectively, and vertical rods (207) are provided at the tops of both ends of the substrate stage (203), and a rotating sleeve (208) is provided on the outside of the vertical rod (207), and the rotating sleeve (208) is connected to the vertical rod (207) through a thread, and a limiting plate (209) is provided above the rotating sleeve (208), and the limiting plate (209) is fixedly connected to the inner wall of the annular plate (206).

2. The lifting mechanism of the crystal gasket according to claim 1, characterized in that: A support rod (5) is provided on the top of the base (1), and the base (1) is fixedly connected to the placement box (3) via the support rod (5).

3. The lifting mechanism of the crystal gasket according to claim 1, characterized in that: Connecting springs (210) are provided at the tops of both ends of the base (1), and a lifting rod (211) is provided at the top of the connecting spring (210), and a crossbar (212) is provided at the top of the lifting rod (211).

4. The lifting mechanism of the crystal gasket according to claim 3, characterized in that: The top end and the bottom end of the lifting rod (211) are respectively fixedly connected to the cross bar (212) and the connecting spring (210), and the cross bar (212) is in contact with the placement box (3).

5. The crystal pad lifting mechanism according to claim 1, characterized in that: A threaded rod (213) is provided at the bottom of the placement box (3), and a pushing rod (214) is provided above the reducer (202).

6. The lifting mechanism of the crystal gasket according to claim 5, characterized in that: The pushing rod (214) is fixedly connected to the central rod (204), and the threaded rod (213) is threadedly connected to the pushing rod (214).

7. The lifting mechanism of the crystal gasket according to claim 1, characterized in that: Sliding blocks (215) are provided on both sides of the annular plate (206), the sliding blocks (215) are movably connected to the slide groove (4), and a PLC controller (216) is provided on the top of the base (1).

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