Water injection machine

By designing the delivery mechanism, water injection module and vibration module of the water injection machine, the problem of water remaining in the liquid injection pipe during the water injection process of the ultra-thin vapor chamber was solved, and the production yield rate was improved.

CN119334172APending Publication Date: 2025-01-21WORLD PRECISION MANUFACTURING (DONGGUAN) CO LTD
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Patent Information

Application Number
CN202411399808.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-09
Publication Date
2025-01-21

AI Technical Summary

Technical Problem

During the water injection process of the ultra-thin heat-smoothing plate, the liquid injection tube is small and it is difficult to discharge air, resulting in the injected water remaining in the liquid injection tube, affecting the yield rate of production.

Method used

A water injection machine is designed, including a conveying mechanism, a water injection module and a vibration module. A water injection station and a vibration station are set up sequentially through the conveyor line. The water injection module injects water at the water injection station. The vibration module drives the vapor chamber to vibrate at the vibration station, so that the water remaining in the liquid injection pipe flows in quickly under the action of vibration and gravity. The main body of the vapor chamber.

Benefits of technology

It effectively solves the problem of water remaining in the liquid injection pipe after water injection, and improves the yield rate of ultra-thin vapor chamber production.

✦ Generated by Eureka AI based on patent content.

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Abstract

The water injection machine comprises a conveying mechanism, a water injection module and a vibration module, the conveying mechanism comprises a conveying line and a bearing jig, the bearing jig is used for bearing and positioning a vapor chamber, the conveying line is used for conveying the bearing jig, and a water injection station and a vibration station are sequentially arranged in the conveying direction; the water injection module is arranged on one side of the conveying line and comprises a water injection assembly located above a water injection station, and the water injection assembly is used for injecting water into the vapor chamber flowing through the water injection station; the vibration module is arranged at the vibration station and used for driving the bearing jig flowing through the vibration station to vibrate. According to the water injection machine provided by the invention, water remained in the liquid injection pipe after water injection can enter the main body of the vapor chamber, so that the yield of ultrathin vapor chamber production is improved.
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Description

Technical Field

[0001] The invention relates to the technical field of vapor chamber manufacturing equipment, and in particular to a water injection machine. Background Art

[0002] The heat transfer principle of the vapor chamber is to transfer heat through the phase change of water or other working fluids at the evaporation end and the condensation end in the vapor chamber. Therefore, during the processing of the vapor chamber, water or other working fluids need to be injected into the main body of the vapor chamber through the injection tube on the vapor chamber. And for the ultra-thin vapor chamber, since its injection tube is relatively small, the air in the main body of the vapor chamber is not easy to be discharged when injecting water, which may cause the injected water to be partially retained in the injection tube and unable to completely enter the main body of the vapor chamber, and ultimately affect the yield rate of the ultra-thin vapor chamber production. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a water injection machine, which can allow the water remaining in the injection pipe after water injection to quickly enter the main body of the heat spreader, thereby improving the yield rate of ultra-thin heat spreader production.

[0004] According to an embodiment of the present invention, the water injection machine includes a conveying mechanism, a water injection module and a vibration module. The conveying mechanism includes a conveying line and a carrying jig. The carrying jig is used to carry and position the heat spreader. The conveying line is used to convey the carrying jig, and water injection stations and vibration stations are sequentially arranged along the conveying direction; the water injection module is arranged on one side of the conveying line, and includes a water injection assembly located above the water injection station, and the water injection assembly is used to inject water into the heat spreader passing through the water injection station; the vibration module is arranged at the vibration station, and is used to drive the carrying jig passing through the vibration station to vibrate, so that the water in the injection pipe of the heat spreader on the carrying jig flows into the main body of the heat spreader.

[0005] The water injection machine according to the embodiment of the present invention has at least the following beneficial effects: Since the heat spreader carried on the carrying fixture can flow through the water injection station and the vibration station in sequence under the conveyance of the conveyor line, after the heat spreader is filled with water at the water injection station, the water-filled heat spreader can also go to the vibration station and vibrate under the drive of the vibration module at the vibration station, so that the water retained in the injection pipe of the heat spreader can quickly flow into the main body of the heat spreader under the action of vibration and gravity. Therefore, the water injection machine of this embodiment can make the water remaining in the injection pipe of the heat spreader after water injection enter the main body of the heat spreader, which is conducive to improving the yield rate of the ultra-thin heat spreader production process.

[0006] According to some embodiments of the water injection machine of the present invention, the vibration module includes a vibration motor, a pressure plate and a clamping driver, the vibration motor is arranged on the pressure plate, the clamping driver is connected to the pressure plate, and is used to drive the pressure plate to clamp the supporting fixture to the conveyor line.

[0007] According to some embodiments of the water injection machine of the present invention, the supporting jig includes a base plate and a fixed frame, the fixed frame is arranged on the base plate, and is used to support and position the heat spreader, the supporting jig is placed on the conveyor line through the base plate, the pressing plate is at least partially located above the conveyor line, and can move vertically under the drive of the clamping driver to press the base plate onto the conveyor line.

[0008] According to some embodiments of the water injection machine of the present invention, the water injection module also includes an injection drive mechanism, the water injection assembly includes an injection valve, an injection needle and a protective sleeve, the injection needle and the protective sleeve are vertically arranged, and the upper ends are both connected to the injection end at the bottom of the injection valve, and the protective sleeve is sleeved on the outside of the injection needle; the injection drive mechanism is connected to the water injection assembly, and is used to drive the water injection assembly to move in a vertical direction so that the lower ends of the injection needle and the protective sleeve pass through or exit the injection tube of the heat spreader.

[0009] According to some embodiments of the water injection machine of the present invention, the water injection module also includes a guide assembly, the guide assembly is arranged on the lower side of the water injection assembly, and includes a guide tube, the guide tube is sequentially provided with an upper guide hole and a lower guide hole along the vertical direction, the upper guide hole and the lower guide hole are both coaxially arranged with the injection needle, the upper guide hole can allow the protective sleeve and the injection needle to penetrate, the diameter of the lower guide hole is larger than the diameter of the upper guide hole, and is adapted to the injection tube on the heat spreader.

[0010] According to some embodiments of the water injection machine of the present invention, the guide assembly also includes a guide sleeve connected to the lower end of the guide pipe, and the lower end of the guide sleeve is provided with a trumpet-shaped guide port which is small at the top and large at the bottom, and the guide port is connected to the lower guide hole.

[0011] According to some embodiments of the water injection machine of the present invention, the liquid injection drive mechanism includes a primary lifting plate, a secondary lifting plate and a lifting driver, the driving end of the lifting driver is connected to the primary lifting plate and is used to drive the primary lifting plate to move in a vertical direction, the water injection assembly is arranged on the primary lifting plate, the secondary lifting plate is slidably connected to the primary lifting plate in a vertical direction, and the guide assembly is arranged on the secondary lifting plate.

[0012] According to some embodiments of the water injection machine of the present invention, a counterweight block is arranged on the secondary lifting plate.

[0013] According to some embodiments of the present invention, the water injection machine includes a water supply system, which includes an ultrapure water machine and a water storage tank. The ultrapure water machine is connected to the water storage tank through a pipeline to supply ultrapure water to the water storage tank. The water storage tank is connected to a water injection component through a pipeline to supply water to the water injection component.

[0014] According to some embodiments of the water injection machine of the present invention, a water inlet valve, a normal pressure valve and a vacuum valve are arranged on the top of the water storage tank. The water inlet valve is connected to the ultrapure water machine through a water inlet pipe and is used to control the on-off of the water inlet pipe. The vacuum valve is connected to the vacuum generating device through a vacuum pipe and is used to control the on-off of the vacuum pipe. One end of the normal pressure valve is connected to the external environment and is used to control the on-off between the water storage tank and the external environment.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 It is a structural schematic diagram of a water injection machine according to an embodiment of the present invention; Figure 2 for Figure 1 Schematic diagram of the connection structure between the vibration module and the conveying line (part of the conveying section of the conveying line) shown in ; Figure 3 for Figure 1 A partial enlarged view of the area shown in middle A; Figure 4 for Figure 1 The structural schematic diagram of the water injection module shown in; Figure 5 for Figure 4 A schematic diagram of the connection structure between the water injection assembly, the guide assembly and the liquid injection drive mechanism shown in FIG; Figure 6 for Figure 5 A schematic diagram of the structure shown in another viewing angle; Figure 7 for Figure 5 A schematic diagram of the structure of the water injection assembly shown in; Figure 8 for Figure 5 A cross-sectional view of the guide assembly shown in ; Fig. 9 for Figure 4 A schematic diagram of the structure of the clamping assembly shown in; Fig.10 for Figure 1 Schematic diagram of the structure of the water storage tank shown in.

[0017] Reference numerals: Conveying mechanism 10; conveying line 11; carrying fixture 12; bottom plate 121; fixing frame 122; water injection module 20; water injection assembly 200; injection valve 210; injection needle 220; protective sleeve 230; injection drive mechanism 300; primary lifting plate 310; sliding detection member 311; secondary lifting plate 320; counterweight block 321; lifting drive 330; guide assembly 400; guide tube 410; upper guide hole 411; lower guide hole 412; detection hole 413; guide sleeve 420; guide port 421; in-place detection member 430; bending detection member 440; connecting frame 450; clamping assembly 500; transverse movement driver 510; clamping mechanism 520; thumb cylinder 521; clamping block 522; first horizontal position adjustment mechanism 610; second horizontal position adjustment mechanism 620; vibration module 80; vibration motor 810; pressure plate 820; clamping driver 830; ultrapure water machine 910; water storage tank 920; water inlet valve 921; vacuum valve 922; normal pressure valve 923; liquid level sensor 924. DETAILED DESCRIPTION

[0018] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, left, right, front, back, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0020] In the description of the present invention, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0021] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0022] The following is the attached Figure 1 To Attachment Fig.10 , describing the water injection machine of an embodiment of the present invention.

[0023] Reference Figure 1According to some embodiments of the present invention, the water injection machine includes a conveying mechanism 10, a water injection module 20 and a vibration module 80; wherein the conveying mechanism 10 is used to convey the heat spreader to the water injection module 20 and the vibration module 80 in sequence, and the water injection module 20 is used to inject water into the heat spreader conveyed by the conveying mechanism 10, and the vibration module 80 is used to vibrate the heat spreader that has been completed with water and is conveyed by the conveying mechanism 10.

[0024] Reference Figures 1 to 3 Specifically, the conveying mechanism 10 includes a conveying line 11 and a supporting fixture 12; wherein the supporting fixture 12 is used to carry and position the heat spreader so that the heat spreader can maintain a vertical state, that is, the state in which the liquid injection tube in the heat spreader is erected above the main body; and the conveying line 11 is used to convey the supporting fixture 12, and a water injection station and a vibration station are sequentially arranged along the conveying direction, so that the supporting fixture 12 carrying the heat spreader can pass through the water injection station and the vibration station in sequence. The water injection module 20 is arranged on one side of the conveying line 11, and includes a water injection component 200 located above the water injection station, and the water injection component 200 can be connected to the upper end of the liquid injection tube of the heat spreader to inject water into the heat spreader, so that the heat spreader flowing through the water injection station can be injected with water through the water injection component 200. The vibration module 80 is disposed at the vibration station and is used to drive the carrier fixture 12 passing through the vibration station to vibrate, so that the water in the injection pipe of the heat spreader on the carrier fixture 12 flows into the body of the heat spreader.

[0025] It should be understood that since the heat spreader carried on the carrying fixture 12 can flow through the water filling station and the vibration station in sequence under the transportation of the conveyor line 11, after the heat spreader is filled with water at the water filling station, the water-filled heat spreader can also go to the vibration station and vibrate under the drive of the vibration module 80 at the vibration station, so that the water maintained in the liquid injection tube of the heat spreader can quickly flow into the main body of the heat spreader under the action of vibration and gravity.

[0026] It is understood that in some of these embodiments, reference Figure 2Specifically, the vibration module 80 includes a vibration motor 810, a pressure plate 820 and a clamping driver 830, wherein the vibration motor 810 is arranged on the pressure plate 820, and the clamping driver 830 is connected to the pressure plate 820 and is used to drive the pressure plate 820 to clamp the supporting jig 12 onto the conveyor line 11, so that after the supporting jig 12 carrying the heat soaking plate after water injection is transported to the vibration station, the pressure plate 820 can be driven by the clamping driver 830 to clamp and fix the supporting jig 12, and then the vibration motor 810 is started again, so that the vibration motor 810 drives the pressure plate 820 and the supporting jig 12 and the heat soaking plate to vibrate together, and after completing the vibration for the set time, the pressure plate 820 is driven away from the conveyor line 11 by the clamping driver 830 to release the supporting jig 12, so that the supporting jig 12 carrying the heat soaking plate after vibration can continue to be transported backward.

[0027] It is understood that in some of these embodiments, reference Figure 2 and Figure 3 Specifically, the supporting fixture 12 includes a base plate 121 and a fixing frame 122, wherein the fixing frame 122 is used to support and position the heat spreader and is arranged on the base plate 121, and the supporting fixture 12 is placed on the conveyor line 11 through the base plate 121; and the pressing plate 820 is at least partially located above the conveyor line 11, and the pressing plate 820 can move vertically under the drive of the clamping driver 830; so that when the clamping driver 830 drives the pressing plate 820 to move downward, it can approach the base plate 121 and press the base plate 121 on the conveyor line 11 to complete the clamping and locking of the supporting fixture 12; and when the clamping driver 830 drives the pressing plate 820 to move upward, it can move away from the base plate 121, thereby releasing the clamping of the base plate 121 and releasing the lock of the supporting fixture 12, so that the supporting fixture 12 can continue to be transported backward along the conveyor line 11.

[0028] In one embodiment, the clamping driver 830 is a lifting cylinder. It should be understood that in some embodiments, the clamping driver 830 can also be other types of linear drive components such as a linear motor module.

[0029] Reference Figure 4 According to some embodiments of the present invention, the water injection module 20 also includes a liquid injection drive mechanism 300, which is connected to the water injection component 200 and is used to drive the water injection component 200 to move in a vertical direction, so that the water injection component 200 can descend and dock with the heat sink located therebelow to complete the water injection, and after the water injection is completed, the water injection component 200 can rise and be separated from the heat sink.

[0030] Reference Figures 4 to 7Specifically, the water injection assembly 200 includes an injection valve 210, an injection needle 220 and a protective sleeve 230; wherein the injection valve 210 contains a liquid medium such as ultrapure water, and can eject the liquid medium through the injection hole at the bottom of the injection valve 210 according to the set injection amount; the injection needle 220 and the protective sleeve 230 are vertically arranged at the bottom of the injection valve 210, and the upper ends of the injection needle 220 and the protective sleeve 230 are connected to the injection end at the bottom of the injection valve 210, and the diameter of the protective sleeve 230 is It is larger than the diameter of the injection needle 220 and is sleeved on the outside of the injection needle 220 to protect the injection needle 220; the upper end of the injection needle 220 is connected to the injection hole of the injection valve 210, so that the liquid working medium sprayed through the injection hole will flow into the injection needle 220; the diameter of the protective sleeve 230 is smaller than the inner diameter of the injection tube on the heat spreader, so that when the injection drive mechanism 300 drives the water injection assembly 200 to rise and fall, the lower ends of the injection needle 220 and the protective sleeve 230 can penetrate into or exit the injection tube of the heat spreader together.

[0031] It should be understood that by providing a protective sleeve 230 on the outside of the injection needle 220, during the injection process, the protective sleeve 230 can follow the injection needle 220 and penetrate into the injection tube of the heat spreader under the drive of the injection drive mechanism 300, so that the injection needle 220 can be protected by the protective sleeve 230, so that the diameter of the injection needle 220 can be made thin enough to ensure the water injection accuracy, and it is not easy to bend and deform due to obstructions (such as blockage or bending of the injection tube of the heat spreader), which is beneficial to increase the service life of the injection needle 220 and improve the injection efficiency.

[0032] It should be understood that the heat spreader includes a main body and an injection tube, wherein the injection tube is arranged at the top of the main body, and a tapered channel with a larger top and a smaller bottom is arranged on the top of the main body to connect the injection tube and the chamber for accommodating the working medium arranged inside the main body; in order to make the protective sleeve 230 have sufficient rigidity and strength, and at the same time enable the injection needle 220 to enter the chamber inside the main body through the tapered channel to directly inject water, thereby avoiding the accumulation of a large amount of working medium such as ultrapure water in the injection tube and affecting the water injection effect, in some embodiments, reference is made to Figure 7The lower end of the injection needle 220 extends to the outside of the protective sleeve 230, so that the lower end of the injection needle 220 can penetrate into the position below the protective sleeve 230, that is, when the lower end of the protective sleeve 230 is inserted into the injection tube, the injection needle 220 can continue to pass through the tapered channel in the heat spreader body into the chamber in the body to directly inject water into the chamber. Since the protective sleeve 230 does not need to follow the injection needle 220 to pass through the tapered channel in the heat spreader body, the outer diameter of the protective sleeve 230 can be set to be larger than the inner diameter of the tapered channel and close to the inner diameter of the injection tube, that is, the protective sleeve 230 can be made relatively thicker and have better strength and rigidity, thereby improving the protection effect of the injection needle 220.

[0033] It is understandable that in order to better align the water injection assembly 200 with the liquid injection pipe of the heat plate when it descends, in some embodiments, reference is made to Figure 5 and Figure 8 The water injection module 20 further includes a guide assembly 400, which is arranged at the lower side of the water injection assembly 200 and includes a guide tube 410, and the guide tube 410 is sequentially provided with an upper guide hole 411 and a lower guide hole 412 in the vertical direction, and the upper guide hole 411 and the lower guide hole 412 are both coaxially arranged with the injection needle 220, and the upper guide hole 411 can allow the protective sleeve 230 and the injection needle 220 to penetrate, and the diameter of the lower guide hole 412 is larger than the diameter of the upper guide hole 411, and is parallel to the heat balancing hole 220. The injection tube on the plate is adapted; through the above structure, when the heat spreader comes under the guide assembly 400, the upper end of the injection tube of the heat spreader can be inserted into the lower guide hole 412 first, and then the water injection assembly 200 can be accurately inserted into the injection tube inserted in the lower guide hole 412 when it descends, guided by the upper guide hole 411, thereby avoiding the problem that when the injection tube is not accurately aligned with the injection needle 220, the injection needle 220 will pierce the heat spreader body and damage the heat spreader or the injection needle 220.

[0034] It is understandable that, since the injection tube of some vapor chambers may be slightly bent, the upper end of the injection tube may be deflected to a certain extent, so that the upper end of the injection tube can smoothly and quickly penetrate into the lower guide hole 412, in one embodiment, referring to Figure 8 The guide assembly 400 also includes a guide sleeve 420 connected to the lower end of the guide tube 410. The lower end of the guide sleeve 420 is provided with a trumpet-shaped guide opening 421 which is small at the top and large at the bottom. The guide opening 421 is connected to the lower guide hole 412. Therefore, when the upper end of the injection tube is slightly deflected, under the guidance of the guide opening 421, the upper end of the injection tube will be able to automatically correct and smoothly penetrate into the lower guide hole 412.

[0035] It should be understood that in order to guide the deflected injection tube to pass through the lower guide hole 412, in some other embodiments, the lower end of the lower guide hole 412 can also be directly set to a trumpet shape that is small at the top and large at the bottom.

[0036] It can be understood that when the upper end of the injection tube is offset to a large extent, or when the heat spreader is not accurately positioned below the guide tube 410, it will be difficult to guide the upper end of the injection tube into the lower guide hole 412 through the guide port 421, and it will be impossible to subsequently inject ultrapure water or other working fluids into the heat spreader through the water injection assembly 200, and it is easy to cause defective products that are not injected with water to flow to the downstream process of the heat spreader production; therefore, in order to accurately identify whether the injection tube of the heat spreader is correctly inserted into the lower guide tube 410, in one embodiment, reference is made to Figure 8 The guide assembly 400 also includes an in-place detection member 430 arranged on the side of the guide tube 410, and the tube wall of the guide tube 410 is provided with a detection hole 413, the detection hole 413 is connected to the upper end of the lower guide hole 412, the in-place detection member 430 is opposite to the detection hole 413, and is used to detect whether the upper end of the liquid injection pipe of the heat spreader reaches the upper end of the lower guide hole 412; and it should be understood that the in-place detection member 430 and the injection valve 210 are both electrically connected to the control system of the water injection machine. When the in-place detection member 430 detects that the upper end of the liquid injection pipe of the heat spreader has not reached the upper end of the lower guide hole 412, the control system will control the injection valve 210 to suspend the injection of ultrapure water and other working fluids this time, and can also control the relevant alarm device to sound an alarm to remind the staff that there is a water injection problem with the heat spreader.

[0037] It is understandable that in order to further reduce the risk of bending and deformation of the injection needle 220 during the water injection process, in some embodiments, reference is made to Figure 5 and Figure 8The guide assembly 400 further includes a bending detection member 440 disposed on the upper side of the guide tube 410 , and the bending detection member 440 is used to detect whether the protection sleeve 230 is bent. It should be understood that, similarly, the bending detection member 440 and the injection drive mechanism 300 are both electrically connected to the control system of the water injection machine, and when the bending detection member 440 detects that the protective sleeve 230 begins to bend, the control system can control the injection drive mechanism 300 to stop driving the water injection assembly 200 to descend; when the bending detection member 440 detects that the portion of the protective sleeve 230 located on the upper side of the guide tube 410 begins to bend, it means that there is a serious obstruction such as blockage inside the injection tube of the heat spreader, and thus the injection needle 220 may not be able to penetrate the injection tube. At this time, if the water injection assembly 200 continues to forcibly descend, not only is it easy to damage the lower end of the injection needle 220, but the protective sleeve 230 and the injection needle 220 also have the risk of bending and deforming due to pressure. Therefore, immediately stopping driving the water injection assembly 200 to descend when it is detected that the protective sleeve 230 begins to bend can effectively reduce the above risks.

[0038] It should be understood that in one embodiment, both the in-place detection member 430 and the bending detection member 440 are selected to adopt photoelectric sensors, and the photoelectric sensors include a transmitter and a receiver; wherein, the transmitter and the receiver in the in-place detection member 430 are respectively arranged on both sides of the guide tube 410, and the detection hole 413 simultaneously penetrates the tube wall of the guide tube 410 close to the transmitter and the tube wall close to the receiver, and when the injection tube is inserted into the upper end position of the lower guide hole 412, the receiver in the in-place detection member 430 will not be able to receive the detection light emitted by the transmitter, otherwise it will be able to receive it; similarly, the transmitter and the receiver in the bending detection member 440 are respectively arranged on both sides of the protective sleeve 230, and when the protective sleeve 230 is bent, the receiver in the bending detection member 440 will be able to receive the detection light emitted by the transmitter, otherwise it will not be able to receive it.

[0039] It can be understood that, in order to drive the guide assembly 400 to be sleeved on the upper end of the liquid injection tube of the heat soaking plate through a single driver, and drive the liquid injection needle 220 and the protective sleeve 230 to penetrate into the liquid injection tube of the heat soaking plate, thereby simplifying the structure and reducing the cost, in some embodiments, refer to Figure 5 and Figure 6The liquid injection drive mechanism 300 includes a primary lifting plate 310, a secondary lifting plate 320 and a lifting driver 330. The driving end of the lifting driver 330 is connected to the primary lifting plate 310 and is used to drive the primary lifting plate 310 to move in a vertical direction. The water injection component 200 is arranged on the primary lifting plate 310. The secondary lifting plate 320 is slidably connected to the primary lifting plate 310 in a vertical direction. The guide component 400 is arranged on the secondary lifting plate 320. Through the above structure, when the heat spreader comes under the guide tube 410, in the process of driving the first lifting plate 310 to descend by the lifting driver 330, the guide tube 410 in the guide assembly 400 can first be docked with the upper end of the injection tube, and after the upper end of the injection tube is inserted into the upper end of the lower guide hole 412, due to the obstruction of the injection tube, the guide assembly 400 and the secondary lifting plate 320 will not be able to continue to descend with the first lifting plate 310, so the secondary lifting plate 320 will slide upward equivalent to the first lifting plate 310, so that the secondary lifting plate 320 and the guide assembly 400 can remain in the position where they are socketed with the upper end of the injection tube, and the water injection assembly 200 that continues to descend with the first lifting plate 310 can continue to approach the heat spreader, and allow the protective sleeve 230 and the injection needle 220 to accurately penetrate into the injection tube of the heat spreader under the guidance of the upper guide hole 411.

[0040] It is understood that in some of these embodiments, reference Figure 5 and Figure 6 , a counterweight block 321 is provided on the secondary lifting plate 320; during the descending process of the guide assembly 400, friction may be generated between the upper end of the injection tube and the hole wall of the lower guide hole 412, so that before the upper end of the injection tube is plugged into the position of the upper end of the lower guide hole 412, the guide assembly 400 and the secondary lifting plate 320 cannot continue to descend due to the action of the above-mentioned friction force, and the upper end of the injection tube cannot be normally plugged into the position of the upper end of the lower guide hole 412. Through the counterweight block 321, the weight of the counterweight block can be used to overcome the influence of the above-mentioned friction force, so that in the process of the lifting drive 330 driving the first-stage lifting plate 310 to move downward, the upper end of the injection tube can be ensured to be plugged into the position of the upper end of the lower guide hole 412.

[0041] In some of these embodiments, reference Figure 5 and Figure 6, the water injection assembly 200 can be connected to the primary lifting plate 310 in a sliding manner in the vertical direction, and the primary lifting plate 310 is provided with a sliding detection member 311, which is located on one side of the water injection assembly 200 and is used to detect whether the water injection assembly 200 slides relative to the primary lifting plate 310. It should be understood that since the water injection assembly 200 is connected to the primary lifting plate 310 in a sliding manner in the vertical direction, when the water injection assembly 200 is obstructed in the process of following the primary lifting plate 310 to move downward, the water injection assembly 200 will slide upward relative to the primary lifting plate 310, thereby further reducing the risk of bending and deformation of the injection needle 220 and the protective sleeve 230; and by providing the sliding detection member 311 on the primary lifting plate 310 to detect the sliding of the water injection assembly 200 on the primary lifting plate 310, it is possible to judge whether the descending process of the water injection assembly 200 is obstructed by the detection result of the sliding detection member 311, that is, when relative sliding is detected, it indicates that the water injection assembly 200 is obstructed. When the descending process of 200 is hindered and no relative sliding is detected, it means that the descending process of the water injection component 200 is normal. Therefore, the detection result of the sliding detection part 311 can also be used to determine whether the injection needle 220 and the protective sleeve 230 have finally penetrated into the injection tube of the heat spreader normally; similarly, the sliding detection part 311 is electrically connected to the control system of the water injection machine, and when the sliding detection part 311 detects relative sliding, the control system will control the injection drive mechanism 300 to stop driving the water injection component 200 to descend, that is, control the lifting drive 330 to stop driving the first-level lifting plate 310 to move downward, so as to further reduce the risk of damaging the injection needle 220 and the protective sleeve 230.

[0042] It should be understood that referring to Figure 5 and Figure 6 In one embodiment, in order to realize the sliding of the water injection assembly 200 on the first-level lifting plate 310, a first slide rail extending in the vertical direction is provided on the front of the first-level lifting plate 310, and a first slider slidably matched with the first slide rail is provided on the back of the injection valve 210; and in order to realize the sliding of the secondary lifting plate 320 on the first-level lifting plate 310, and at the same time, the secondary lifting plate 320 and the water injection assembly 200 can overlap in the height direction, so that the water injection module 20 is more compact, a second slide rail extending in the vertical direction is provided on the back of the first-level lifting plate 310, and a second slider slidably matched with the second slide rail is provided on the side of the secondary lifting plate 320 facing the first-level lifting plate 310, and the guide assembly 400 includes a connecting frame 450, and is connected to the bottom of the secondary lifting plate 320 through the connecting frame 450, and a part of the connecting frame 450 extends to the bottom of the water injection assembly 200, and the guide pipe 410, the in-place detection member 430 and the bending detection member 440 are all arranged on the connecting frame 450.

[0043] It can be understood that in one embodiment, the sliding detection member 311 is a contact switch, which is arranged on the upper side of the injection valve 210, and when the injection valve 210 slides upward relative to the first-level lifting plate 310, the injection valve 210 will abut against the proximity switch and be able to generate a corresponding detection signal.

[0044] It should be understood that, as mentioned above, the injection pipe of the vapor chamber may be skewed, and when the degree of deflection of the injection pipe is large, it will be difficult to make the upper end of the injection pipe pass through the lower guide hole 412; for this reason, in some embodiments, reference is made to Figure 4 The water injection module 20 includes a clamping assembly 500, which is arranged at the lower side of the guide tube 410 and is used to fix the injection tube of the heat spreader. When the heat spreader comes to the bottom of the guide tube 410 and waits for injection, the injection tube of the heat spreader can be clamped and fixed by the clamping assembly 500 to preliminarily position the injection tube. Even if the degree of deflection of the injection tube is large, the clamping assembly 500 can be used to correct the injection tube to reduce the difficulty of the injection tube passing into the lower guide hole 412.

[0045] It should be understood that in order to prevent the clamping assembly 500 from affecting the transportation of the vapor chamber, in some embodiments, reference is made to Fig. 9 The clamping assembly 500 includes a transverse drive 510 and a clamping mechanism 520, wherein the clamping mechanism 520 is used to clamp the injection tube of the fixed heat spreader, the transverse drive 510 is connected to the clamping mechanism 520, and can drive the clamping mechanism 520 to move horizontally between the conveyor line 11 and the guide assembly 400, or drive the clamping mechanism 520 to move out from above the conveyor line 11; so that when the heat spreader is transported to the water injection station to wait for water injection, the transverse drive 510 will drive the clamping mechanism 520 to move between the conveyor line 11 and the guide assembly 400, so as to clamp the injection tube of the heat spreader to position the injection tube, and after the water injection is completed, the clamping mechanism 520 will release the clamping of the injection tube, and the transverse drive 510 will drive the clamping mechanism 520 to move out from above the conveyor line 11, so that the heat spreader can continue to be transported along the conveyor line 11 following the supporting fixture 12.

[0046] In one embodiment, referring to Fig. 9 , the transverse drive 510 is a transverse cylinder; it should be understood that, in some other embodiments, the transverse drive 510 can also be other types of linear drive devices such as a linear motor.

[0047] It is understood that in some of these embodiments, reference Fig. 9The clamping mechanism 520 includes a thumb cylinder 521 and two clamping blocks 522. The two clamping blocks 522 are respectively connected to the two thumbs of the thumb cylinder 521 and can move closer to each other under the drive of the thumb cylinder 521 to clamp or release the injection tube of the heat soaking plate. In addition, when the two clamping blocks 522 move closer to each other, a positioning hole for accommodating and positioning the injection tube is formed between the two clamping blocks 522, and the positioning hole is coaxial with the injection needle 220.

[0048] It is understood that in some of these embodiments, reference Figure 4 The water injection module 20 also includes a horizontal position adjustment mechanism, wherein the horizontal position adjustment mechanism includes a first horizontal position adjustment mechanism 610 and a second horizontal position adjustment mechanism 620 that are connected to each other, and the driving part at the end of the horizontal position adjustment mechanism is connected to the lifting driver 330, so that the positions of the water injection assembly 200 and the guide assembly 400 in the first horizontal direction and the second horizontal direction can be adjusted respectively by the first horizontal position adjustment mechanism 610 and the second horizontal position adjustment mechanism 620, so that the injection needle 220 and the lower guide hole 412 can be aligned with the heat spreader transported to the bottom thereof.

[0049] It should be understood that, in one embodiment, the first horizontal direction and the second horizontal direction are perpendicular to each other, and the first horizontal direction is parallel to the conveying direction of the conveying line.

[0050] It should be understood that, in one embodiment, the first horizontal position adjustment mechanism 610 , the second horizontal position adjustment mechanism 620 , and the lifting driver 330 may all adopt linear motor modules.

[0051] It can be understood that in some embodiments, the water injection machine further includes a water supply system, and the water supply system is used to supply water to the water injection assembly 200; Figure 1 Specifically, the water supply system includes an ultrapure water machine 910 and a water storage tank 920, wherein the ultrapure water machine 910 can produce ultrapure water and is connected to the water storage tank 920 through a pipeline to supply ultrapure water to the water storage tank 920; and the water storage tank 920 can store the ultrapure water produced by the ultrapure water machine 910, and the water storage tank 920 is connected to the water injection component 200 through a pipeline, so that ultrapure water can be stably supplied to the water injection component 200 through the water storage tank 920.

[0052] It is understood that in some of these embodiments, reference Fig.10A water inlet valve 921 is provided on the top of the water storage tank 920. The water inlet valve 921 is connected to the ultrapure water machine 910 through an inlet pipe and is used to control the on-off of the water inlet pipe. Through the above structure, when the liquid level of the ultrapure water inside the water storage tank 920 is lower than a certain height, the water inlet valve 921 can be opened to connect the water storage tank 920 to the ultrapure water machine 910, and then the ultrapure water in the ultrapure water machine 910 can be introduced into the water storage tank 920.

[0053] In some of these embodiments, reference Fig.10 A vacuum valve 922 is provided on the top of the water tank 920. The vacuum valve 922 is connected to the vacuum generating device through a vacuum pipe and is used to control the on-off of the vacuum pipe. It should be understood that by opening the vacuum valve 922, the water tank 920 can be connected to the vacuum generating device, thereby extracting the air in the water tank 920.

[0054] In some of these embodiments, reference Fig.10 A normal pressure valve 923 is also provided on the top of the water storage tank 920. One end of the normal pressure valve 923 is connected to the external environment and is used to control the connection and disconnection between the water storage tank 920 and the external environment. Through the above structure, when the water storage tank 920 needs to be opened, the water storage tank 920 can be depressurized through the normal pressure valve 923 first, that is, the high-pressure nitrogen in the water storage tank 920 is released in advance to reduce safety hazards.

[0055] It should be understood that, in one embodiment, the water tank 920 is also provided with a liquid level sensor 924, and the liquid level sensor 924 and the water inlet valve 921 are electrically connected to the control system of the water injection machine, so that when the liquid level in the water tank 920 is lower than the set minimum water level, the control system will control the water inlet valve 921 to open to inject ultrapure water into the water tank 920, and when the liquid level in the water tank 920 reaches the highest water level set by the high pressure, the control system will control the water inlet valve 921 to close and stop water injection.

[0056] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A water injection machine, characterized in that: include: The conveying mechanism includes a conveying line and a carrying jig, wherein the carrying jig is used to carry and position the soaking plate, the conveying line is used to convey the carrying jig, and a water injection station and a vibration station are sequentially arranged along the conveying direction; A water injection module is arranged at one side of the conveying line and comprises a water injection assembly located above the water injection station, wherein the water injection assembly is used to inject water into the soaking plate flowing through the water injection station; The vibration module is arranged at the vibration station and is used to drive the support fixture passing through the vibration station to vibrate, so that the water in the injection pipe of the heat spreader on the support fixture flows into the main body of the heat spreader.

2. A water injection machine according to claim 1, characterized in that: The vibration module includes a vibration motor, a pressing plate and a pressing driver. The vibration motor is arranged on the pressing plate. The pressing driver is connected to the pressing plate and can drive the pressing plate to press the supporting fixture onto the conveying line.

3. A water injection machine according to claim 2, characterized in that: The supporting jig includes a base plate and a fixing frame, wherein the fixing frame is arranged on the base plate and is used for supporting and positioning the heat spreader. The supporting jig is placed on the conveyor line through the base plate, and the pressing plate is at least partially located above the conveyor line and can move vertically under the drive of the pressing driver to press the base plate onto the conveyor line.

4. A water injection machine according to any one of claims 1 to 3, characterized in that: The water injection module also includes an injection drive mechanism, and the water injection component includes an injection valve, an injection needle and a protective sleeve. The injection needle and the protective sleeve are vertically arranged, and the upper ends are both connected to the injection end at the bottom of the injection valve, and the protective sleeve is sleeved on the outside of the injection needle; the injection drive mechanism is connected to the water injection component and is used to drive the water injection component to move in a vertical direction so that the lower ends of the injection needle and the protective sleeve pass through or exit the injection tube of the heat spreader.

5. A water injection machine according to claim 4, characterized in that: The water injection module also includes a guide component, which is arranged at the lower side of the water injection component and includes a guide tube, and the guide tube is sequentially provided with an upper guide hole and a lower guide hole along the vertical direction, and the upper guide hole and the lower guide hole are both coaxially arranged with the injection needle, and the upper guide hole can allow the protective sleeve and the injection needle to penetrate, and the diameter of the lower guide hole is larger than the diameter of the upper guide hole, and is adapted to the injection tube on the heat spreader.

6. A water injection machine according to claim 5, characterized in that: The guide assembly also includes a guide sleeve connected to the lower end of the guide tube, and the lower end of the guide sleeve is provided with a trumpet-shaped guide opening which is smaller at the top and larger at the bottom, and the guide opening is connected to the lower guide hole.

7. A water injection machine according to claim 5, characterized in that: The liquid injection drive mechanism includes a primary lifting plate, a secondary lifting plate and a lifting driver, the driving end of the lifting driver is connected to the primary lifting plate and is used to drive the primary lifting plate to move in a vertical direction, the water injection component is arranged on the primary lifting plate, the secondary lifting plate is slidably connected to the primary lifting plate in a vertical direction, and the guide component is arranged on the secondary lifting plate.

8. A water injection machine according to claim 7, characterized in that: A counterweight block is arranged on the secondary lifting plate.

9. A water injection machine according to any one of claims 1 to 3, characterized in that: The water injection machine includes a water supply system, which includes an ultrapure water machine and a water storage tank. The ultrapure water machine is connected to the water storage tank via a pipeline and is used to supply ultrapure water to the water storage tank. The water storage tank is connected to the water injection component via a pipeline to supply water to the water injection component.

10. A water injection machine according to claim 9, characterized in that: A water inlet valve, a normal pressure valve and a vacuum valve are arranged on the top of the water storage tank. The water inlet valve is connected to the ultrapure water machine through a water inlet pipe and is used to control the on-off of the water inlet pipe. The vacuum valve is connected to a vacuum generating device through a vacuum pipe and is used to control the on-off of the vacuum pipe. One end of the normal pressure valve is connected to the external environment and is used to control the on-off between the water storage tank and the external environment.