Gas monitoring equipment

Abstract

The invention relates to gas monitoring equipment. The gas monitoring equipment comprises a body; the plurality of sampling assemblies are detachably assembled on the body, each sampling assembly comprises a plurality of sampling inlets, an electromagnetic valve assembly and a sampling outlet, the plurality of sampling inlets are respectively communicated with a plurality of to-be-detected gas sources, the electromagnetic valve assembly is communicated between the plurality of sampling inlets and the sampling outlet, and the sampling outlets are communicated with the plurality of to-be-detected gas sources. The electromagnetic valve assembly can selectively control the communication between the plurality of sampling inlets and the sampling outlet; therefore, maintenance and replacement of each sampling assembly are facilitated.

Description

Technical Field

[0001] The present invention relates to a gas monitoring device, and in particular to an improved technical structure of a gas monitoring device for detecting multiple environments. Background Art

[0002] In the semiconductor manufacturing process, the air quality of the clean room environment has a significant impact on the semiconductor yield rate. However, the factory area is very large, and it takes a lot of manpower and time to inspect only by using multiple machines or moving machines to various areas of the factory. In addition, the conventional fixed-point gas monitoring equipment has a detection module fixed on it. Once the detection module fails and needs maintenance, the entire device must interrupt the detection of environmental gases until the maintenance is completed before continuing the detection operation, resulting in low detection efficiency.

[0003] Therefore, it is necessary to provide a novel and advanced gas monitoring device to solve the above problems. Summary of the invention

[0004] The main purpose of the present invention is to provide a gas monitoring device, which is convenient for the maintenance and replacement of each sampling component and can provide multi-environment point detection.

[0005] To achieve the above-mentioned objectives, the present invention provides a gas monitoring device, comprising: a main body; and a plurality of sampling components, which are detachably assembled to the main body, each of the sampling components comprising a plurality of sampling inlets, a solenoid valve component and a sampling outlet, the plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlet, and the solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlet.

[0006] Preferably, the plurality of sampling inlets are exposed from the main body, and the sampling outlet is hidden in the main body.

[0007] Preferably, each of the sampling components further comprises a purge inlet, the purge inlet is connected to the solenoid valve component, and the purge inlet is connected to a purge gas source.

[0008] Preferably, each sampling assembly is detachably slidably mounted on the main body.

[0009] Preferably, each sampling component further includes a diverter unit, the solenoid valve component is arranged between the multiple sampling inlets and the diverter unit, the diverter unit is provided with multiple diverter inlets, the sampling outlet and a purge inlet, the multiple diverter inlets are connected between the solenoid valve component and the sampling outlet, and between the solenoid valve component and the purge inlet, and the purge inlet is connected to a purge gas source.

[0010] Preferably, each of the sampling components further includes a base, and the solenoid valve component and the diversion unit are respectively arranged on a first side of the base; wherein, when each of the sampling components is located in an open position and the first side is located outside the main body, the solenoid valve component and the diversion unit of each of the sampling components are exposed; wherein, when each of the sampling components is located in the open position, each of the sampling components is located outside the main body.

[0011] Preferably, it further includes at least one slide rail assembly, which is arranged between the main body and at least one sampling assembly, and each slide rail assembly includes a first slide rail and a second slide rail. The main body is provided with the first slide rail, and at least one sampling assembly is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail.

[0012] Preferably, the first slide rail is provided with a first limit unit, and the second slide rail is provided with a second limit unit, and each sampling component can be moved from a folded position to an open position outside the main body in a first direction relative to the main body; wherein, when at least one of the sampling components is located in the open position, the second limit unit can be clamped against the first limit unit in the first direction.

[0013] Preferably, the second limiting unit can move between a locking position and a releasing position; wherein, when the second limiting unit is located at the locking position, the second limiting unit can be locked against the first limiting unit in the first direction; when the second limiting unit is located at the releasing position, the second limiting unit can be not locked against the first limiting unit in the first direction.

[0014] Preferably, each of the sampling components can move in a first direction relative to the body; each of the sampling components further comprises a plurality of communication outlets, the plurality of communication outlets are connected between the plurality of sampling inlets and the solenoid valve component, and the plurality of communication outlets, the solenoid valve component and the flow dividing unit are respectively arranged in the first direction at intervals; the plurality of sampling inlets are exposed to the body, and the sampling outlets are hidden in the body; each of the sampling components can be detachably slidably arranged on the body; when the first side surface of each of the sampling components is located in the body, the The solenoid valve assembly and the shunt unit are hidden in the body; the gas monitoring device further includes at least one slide rail assembly, which is arranged between the body and at least one sampling assembly, each of which includes a first slide rail and a second slide rail, the body is provided with the first slide rail, at least one of the sampling assemblies is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail; the first slide rail is provided with a first limiting unit, the second slide rail is provided with a second limiting unit, and each of the sampling assemblies can be relative to the body from a collecting unit to a collecting unit in the first direction. The invention relates to a method for controlling the sampling component of the present invention to a method for controlling the sampling component of the present invention to move from a closed position to an open position outside the body; wherein, when at least one of the sampling components is located at the open position, the second limit unit can be clamped against the first limit unit in the first direction; the second limit unit can move between a locking position and a releasing position; wherein, when the second limit unit is located at the locking position, the second limit unit can be clamped against the first limit unit in the first direction; when the second limit unit is located at the releasing position, the second limit unit can be not clamped against the first limit unit in the first direction; it also includes a detection unit, a processing unit and a warning device, the detection unit and the processing unit are respectively arranged on the body, the warning device is arranged on the outside of the body and is communicatively connected with the processing unit, the detection unit is connected to the sampling outlet for detecting the gas of each gas source to be detected, the processing unit transmits the value detected by the detection unit to the processing unit for calculation and analysis, and the warning device issues a warning reminder when an abnormal value appears; each sampling component can move in the first direction relative to the processing unit and the detection unit.

[0015] The advantages of the present invention are:

[0016] The gas monitoring equipment provided by the present invention is conducive to the maintenance and replacement of each sampling component and can provide multi-environment point detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of a preferred embodiment of the present invention.

[0018] Figure 2 for Figure 1 A magnified stereoscopic image of .

[0019] Figure 3It is a schematic diagram of a second limiting unit located at a locking position according to a preferred embodiment of the present invention.

[0020] Figure 4 It is a schematic diagram of a second limiting unit located at a release position according to a preferred embodiment of the present invention.

[0021] Figure 5 This is a schematic diagram of a sampling assembly detached from its main body according to a preferred embodiment of the present invention.

[0022] Figure 6 Another stereoscopic view of a preferred embodiment of the present invention.

[0023] Figure 7 It is a perspective view of a preferred embodiment of the present invention.

[0024] Figure 8 The figure is an exploded view of a sampling assembly and a slide rail assembly according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0025] The following examples are merely used to illustrate possible implementations of the present invention, but are not intended to limit the scope of the present invention. The "one" or "at least one" preceding the nouns mentioned in the text does not limit the quantity, and the number can also be "plural" according to needs. This change in quantity is also within the scope of protection, which is described first.

[0026] Please refer to Figures 1 to 8 , which shows a preferred embodiment of the present invention. The gas monitoring device 1 of the present invention includes a main body 10 and a plurality of sampling components 20.

[0027] The plurality of sampling components 20 are detachably assembled to the body 10. Each of the sampling components 20 includes a plurality of sampling inlets 21, a solenoid valve component 22 and a sampling outlet 23. The plurality of sampling inlets 21 are respectively connected to a plurality of gas sources to be detected. In this embodiment, the plurality of gas sources to be detected are environmental gases in different working areas. The solenoid valve component 22 is connected between the plurality of sampling inlets 21 and the sampling outlet 23. The solenoid valve component 22 can selectively control the connection between the plurality of sampling inlets 21 and the sampling outlet 23. In this way, the plurality of sampling components 20 can be independently maintained and replaced, which improves the maintainability and high efficiency of the overall equipment; and performs multi-area and multi-point environmental detection with high detection efficiency. In addition, the solenoid valve component 22 can quickly rotate the gases to be detected in different working areas into the sampling outlet 23 for subsequent detection.

[0028] Each sampling assembly 20 is detachably slidably mounted on the body 10. Specifically, the gas monitoring device 1 further includes at least one slide rail assembly 30, which is disposed between the body 10 and at least one sampling assembly 20, and each slide rail assembly 30 includes a first slide rail 31 and a second slide rail 32. The body 10 is provided with the first slide rail 31, and at least one sampling assembly 20 is provided with the second slide rail 32 and is slidably mounted on the first slide rail 31 with the second slide rail 32. In this embodiment, the body 10 is provided with a plurality of the slide rail assemblies 30, and each of the slide rail assemblies 30 is disposed between each sampling assembly 20 and the body 10. Therefore, the plurality of sampling assemblies 20 can be conveniently disassembled and assembled to save time, and can slide smoothly relative to the body 10. In addition, a ball structure can be disposed between the first slide rail and the second slide rail for smooth relative sliding.

[0029] The first slide rail 31 is provided with a first limiting unit 33, and the second slide rail 32 is provided with a second limiting unit 34. Each of the sampling components 20 can move relative to the body 10 in a first direction L1 from a folded position to an open position outside the body 10 (such as Figure 2 ); wherein, when at least one of the sampling components 20 is located at the open position, the second limiting unit 34 can be clamped against the first limiting unit 33 in the first direction L1. wherein, when each of the sampling components 20 is located at the retracted position, each of the sampling components 20 is retracted into the body 10. specifically, the second limiting unit 34 can move between a locking position and a releasing position; wherein, when the second limiting unit 34 is located at the locking position, the second limiting unit 34 can be clamped against the first limiting unit 33 in the first direction L1; when the second limiting unit 34 is located at the releasing position, the second limiting unit 34 can be not clamped against the first limiting unit 33 in the first direction L1. in the present embodiment, the second limiting unit 34 is an elastic member. Therefore, when each sampling component 20 is pulled out relative to the main body 10, it will be first limited by the first limiting unit 33 and the second limiting unit 34 to prevent the sampling component 20 from falling out, and the plurality of sampling components 20 can be detached when the second limiting unit 34 is adjusted to the release position, so as to achieve quick installation, detachment and anti-falling.

[0030] The plurality of sampling inlets 21 are exposed from the main body 10 , and the sampling outlets 23 are hidden in the main body 10 , so that the connection of the plurality of gas sources to be detected becomes simpler and more convenient, and the sampling outlets 23 are protected from damage or contamination.

[0031] Each of the sampling components 20 further includes a purge inlet 24, which is connected to the solenoid valve component 22, and the purge inlet 24 is connected to a purge gas source (such as clean air or inert gas such as nitrogen). Specifically, each of the sampling components 20 further includes a diversion unit 25, the solenoid valve component 22 is arranged between the plurality of sampling inlets 21 and the diversion unit 25, the diversion unit 25 is provided with a plurality of diversion inlets 26, the sampling outlet 23 and the purge inlet 24, the plurality of diversion inlets 26 are connected between the solenoid valve component 22 and the sampling outlet 23, and between the solenoid valve component 22 and the purge inlet 24, and the purge inlet 24 is connected to the purge gas source. The plurality of sampling components 20 can be cleaned to avoid detection distortion caused by mixing of different detection gases, and the structure is simple and easy to install.

[0032] Each sampling assembly 20 can move relative to the body 10 in the first direction L1; each sampling assembly 20 further includes a plurality of communication outlets 28, the plurality of communication outlets 28 are connected between the plurality of sampling inlets 21 and the solenoid valve assembly 22, and the plurality of communication outlets 28, the solenoid valve assembly 22 and the flow dividing unit 25 are respectively arranged at intervals in the first direction L1. Accordingly, it is convenient to connect a plurality of pipelines between the plurality of communication outlets 28 and the solenoid valve assembly 22, and between the solenoid valve assembly 22 and the plurality of sampling outlets 23, so that the plurality of pipelines are neatly arranged and do not interfere with each other, so that the gas can flow smoothly therein.

[0033] Each of the sampling components 20 further includes a base 27, and the solenoid valve assembly 22 and the sampling outlet 23 are respectively arranged on a first side surface 271 of the base 27; wherein, when each of the sampling components 20 is located at the open position and the first side surface 271 is located outside the body 10, the solenoid valve assembly 22 and the diversion unit 25 of each of the sampling components 20 are exposed; wherein, when each of the sampling components 20 is located at the open position, each of the sampling components 20 is located outside the body 10. In addition, when the first side surface 271 of each of the sampling components 20 is located inside the body 10, the solenoid valve assembly 22 and the diversion unit 25 of each of the sampling components 20 are hidden inside the body 10. Therefore, when each of the sampling components 20 is pulled out and each of the sampling components 20 is not separated from the body 10, the state of the solenoid valve assembly 22 and the diversion unit 25 can be directly observed, and the pipelines between them can be directly disassembled and assembled, which is convenient for maintenance.

[0034] The gas monitoring device 1 further includes a detection unit 40, a processing unit 50 and a warning device 60. The detection unit 40 and the processing unit 50 are respectively arranged on the body 10. The warning device 60 is arranged outside the body 10 and is connected to the processing unit 50 for communication. The detection unit 40 is connected to the sampling outlet 23 to detect the gas of each gas source to be detected. The processing unit 50 transmits the value detected by the detection unit 40 to the processing unit 50 for calculation and analysis. When an abnormal value appears, the warning device 60 issues a warning reminder; each sampling component 20 can move relative to the processing unit 50 and the detection unit 40 in the first direction L1. In this embodiment, the warning device 60 is a light-emitting device to achieve a striking reminder effect.

[0035] When in use, after one of the sampling components 20 is detached (such as for maintenance or replacement), another sampling component 20 can be quickly replaced immediately to reduce the interruption time of gas detection, thereby improving detection efficiency and facilitating maintenance and replacement.

[0036] The above are preferred embodiments of the present invention and the technical principles used therein. For those skilled in the art, any obvious changes such as equivalent transformations, simple replacements, etc. based on the technical solution of the present invention, without departing from the spirit and scope of the present invention, are within the scope of protection of the present invention.

Claims

1. A gas monitoring device, characterized in that: include: a body; and A plurality of sampling components are detachably assembled to the main body, each of the sampling components includes a plurality of sampling inlets, a solenoid valve component and a sampling outlet, the plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlet, and the solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlet.

2. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling inlets are exposed from the main body, and the sampling outlet is hidden in the main body.

3. The gas monitoring device according to claim 1, characterized in that: Each of the sampling components further comprises a cleaning inlet, which is connected to the solenoid valve component and is connected to a cleaning gas source.

4. The gas monitoring device according to claim 1, characterized in that: Each sampling assembly is detachably and slidably mounted on the main body.

5. The gas monitoring device according to claim 1, characterized in that: Each of the sampling components further includes a shunt unit. The solenoid valve component is arranged between the multiple sampling inlets and the shunt unit. The shunt unit is provided with multiple shunt inlets, the sampling outlet and a purge inlet. The multiple shunt inlets are connected between the solenoid valve component and the sampling outlet, and between the solenoid valve component and the purge inlet. The purge inlet is connected to a purge gas source.

6. The gas monitoring device according to claim 5, characterized in that: Each of the sampling components further includes a base, and the solenoid valve component and the diversion unit are respectively arranged on a first side of the base; wherein, when each of the sampling components is located in an open position and the first side is located outside the body, the solenoid valve component and the diversion unit of each of the sampling components are exposed; wherein, when each of the sampling components is located in the open position, each of the sampling components is located outside the body.

7. The gas monitoring device according to any one of claims 1 to 6, characterized in that: It also includes at least one slide rail assembly, which is arranged between the main body and at least one sampling assembly. Each slide rail assembly includes a first slide rail and a second slide rail. The main body is provided with the first slide rail, and at least one sampling assembly is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail.

8. The gas monitoring device according to claim 7, characterized in that: The first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit. Each sampling component can be moved from a folded position to an open position outside the body in a first direction relative to the body; wherein, when at least one of the sampling components is located in the open position, the second limiting unit can be clamped against the first limiting unit in the first direction.

9. The gas monitoring device according to claim 8, characterized in that: The second limiting unit can move between a locking position and a releasing position; wherein, when the second limiting unit is located at the locking position, the second limiting unit can be clamped against the first limiting unit in the first direction; when the second limiting unit is located at the releasing position, the second limiting unit can be free from being clamped against the first limiting unit in the first direction.

10. The gas monitoring device according to claim 6, characterized in that: Each of the sampling components can move in a first direction relative to the body; each of the sampling components further includes a plurality of communication outlets, the plurality of communication outlets are connected between the plurality of sampling inlets and the solenoid valve component, and the plurality of communication outlets, the solenoid valve component and the diversion unit are respectively arranged in the first direction at intervals; the plurality of sampling inlets are exposed to the body, and the sampling outlets are hidden in the body; each of the sampling components can be detachably slidably arranged on the body; when the first side surface of each of the sampling components is located in the body, the solenoid valve of each of the sampling components The valve assembly and the diversion unit are hidden in the body; the gas monitoring device further includes at least one slide rail assembly, which is arranged between the body and at least one sampling assembly, each of which includes a first slide rail and a second slide rail, the body is provided with the first slide rail, at least one of the sampling assemblies is provided with the second slide rail and is slidably arranged on the first slide rail by the second slide rail; the first slide rail is provided with a first limiting unit, and the second slide rail is provided with a second limiting unit, and each of the sampling assemblies can be moved from a retracted position to a closed position relative to the body in the first direction. The device is configured to move to the open position outside the body; wherein, when at least one of the sampling components is located at the open position, the second limiting unit can be clamped against the first limiting unit in the first direction; the second limiting unit can move between a locking position and a releasing position; wherein, when the second limiting unit is located at the locking position, the second limiting unit can be clamped against the first limiting unit in the first direction; when the second limiting unit is located at the releasing position, the second limiting unit can be not clamped against the first limiting unit in the first direction; it also includes a detection unit, a processing unit and a warning device, the detection unit and the processing unit are respectively arranged on the body, the warning device is arranged on the outside of the body and is communicatively connected with the processing unit, the detection unit is connected to the sampling outlet for detecting the gas of each gas source to be detected, the processing unit transmits the value detected by the detection unit to the processing unit for calculation and analysis, and the warning device issues a warning reminder when an abnormal value appears; each of the sampling components can move in the first direction relative to the processing unit and the detection unit.

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