Gas monitoring equipment
By designing a gas monitoring equipment that includes multiple sampling components, shunt devices, detection devices and industrial computers, the problem of the traditional system being unable to provide instant detection and multi-area monitoring and management is solved, and high-efficiency continuous multi-point detection is achieved to ensure Air quality detection efficiency in semiconductor manufacturing processes.
Patent Information
- Application Number
- CN202410919945.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-07-20
- Filing Date
- 2024-07-10
- Publication Date
- 2025-01-21
AI Technical Summary
Traditional gas monitoring systems cannot provide immediate detection and are difficult to implement multi-region monitoring management, resulting in low detection efficiency of air molecular pollution during semiconductor manufacturing.
A gas monitoring equipment is designed, including a plurality of sampling components, a splitting device, a detection device and an industrial computer. Through the selective control of the solenoid valve components and the splitting device of the plurality of sampling components, the gas to be detected can be quickly rotated into different working areas. The detection device performs detection.
It achieves high-efficiency continuous multi-point detection, which can quickly detect whether the gas to be detected in different working areas is abnormal, ensuring the safety of the working environment and the yield of product quality.
Smart Images
Figure CN119335127A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a gas monitoring device, and in particular to an improved technical structure of a gas monitoring device for detecting multiple environments. Background Art
[0002] In the semiconductor manufacturing process, the air quality of the clean room environment, especially air molecular contamination (AMC), has a great impact on the yield of semiconductors. Specifically, AMC may damage processing equipment, resulting in high costs, low yields, and poor manufacturing quality; AMC may also contaminate processed products and may change the electrical, optical, and physical properties of processed products, which also leads to problems such as reduced yield and poor manufacturing quality. Therefore, monitoring AMC, such as acids (MA), bases (MB), condensables (MC), and dopants (MD), helps to reduce the above problems. However, due to the large size of the plant area, it takes a lot of time and manpower to move the detector to multiple target areas for sampling, making it impossible for traditional monitoring systems to provide instant detection, or it is necessary to prepare multiple detectors for multiple target areas, which is not easy to monitor and manage multiple areas, and there are shortcomings that need to be improved.
[0003] Therefore, it is necessary to provide a novel and advanced gas monitoring device to solve the above problems. Summary of the invention
[0004] The main purpose of the present invention is to provide a gas monitoring device that can provide efficient continuous multi-point detection.
[0005] To achieve the above-mentioned purpose, the present invention provides a gas monitoring device, including a main body, a plurality of sampling components, a flow dividing device, a detection device and an industrial computer. The plurality of sampling components are detachably assembled to the main body, and each of the sampling components includes a plurality of sampling inlets, a solenoid valve component and a sampling outlet. The plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, and the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlets. The solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlets. The flow dividing device is arranged on the main body and connected to the sampling outlets of the plurality of sampling components. The detection device is arranged on the main body and connected to the flow dividing device. The flow dividing device can selectively control the connection between the sampling outlets of the plurality of sampling components and the detection device to detect the gas of each gas source to be detected. The industrial computer is arranged on the main body and is communicatively connected to the detection device to transmit the values detected by the detection device to the industrial computer for calculation and analysis.
[0006] As a preferred embodiment of the above technical solution, preferably, the plurality of sampling components are detachably slidably mounted on the main body.
[0007] As a preferred embodiment of the above technical solution, preferably, the main body is provided with a plurality of slide rail assemblies, and each of the sampling assemblies is detachably slidably mounted on one of the slide rail assemblies.
[0008] As a preferred embodiment of the above technical solution, preferably, the plurality of sampling inlets of each sampling component are exposed from the main body, and the sampling outlets are hidden in the main body.
[0009] As a preferred embodiment of the above technical solution, it is preferable to further include a first pump device, which is connected to the diversion device to transport the gas of the gas source to be detected to the diversion device through the sampling component.
[0010] As a preferred embodiment of the above technical solution, preferably, the diversion device includes a plurality of diversion inlets, and the plurality of diversion inlets are respectively connected to the plurality of sampling outlets.
[0011] As a preferred embodiment of the above technical solution, preferably, each sampling component further includes a first purge inlet, which is connected to the solenoid valve component, and the diverter device further includes a plurality of second purge inlets, and the plurality of first purge inlets and the plurality of second purge inlets are further connected to a purge gas source.
[0012] As a preferred embodiment of the above technical solution, preferably, a second pump device is further included, and the second pump device is used to transport the cleaning gas source to the plurality of first cleaning inlets and the plurality of second cleaning inlets.
[0013] As a preferred embodiment of the above technical solution, it is preferable to further include a display screen, which is arranged on the outside of the main body and is communicatively connected with the industrial computer to display the results of the industrial computer's calculation and analysis.
[0014] As a preferred embodiment of the above technical solution, preferably, the plurality of sampling inlets of each sampling component are exposed to the body, and the sampling outlet is hidden in the body; a first pump device is also included, and the first pump device is connected to the diverter device to transport the gas of the gas source to be detected to the diverter device via the sampling component; the diverter device includes a plurality of diverter inlets, and the plurality of diverter inlets are respectively connected to the plurality of sampling outlets; each sampling component also includes a first purge inlet, and the first purge inlet is connected to the solenoid valve component, and the diverter device also includes a plurality of second purge inlets, and the plurality of second purge inlets are respectively connected to the plurality of sampling outlets; A purge inlet and the plurality of second purge inlets are further connected to a purge gas source; a second pump device is further included, and the second pump device is used to transport the purge gas source to the plurality of first purge inlets and the plurality of second purge inlets; a display screen is further included, and the display screen is arranged on the outside of the body and is connected to the industrial computer for communication to display the results of the industrial computer's calculation and analysis; a warning device is further included, and the warning device is arranged on the outside of the body and is connected to the industrial computer for communication, and when an abnormal value appears, the warning device issues a warning reminder; the warning device is a light-emitting device. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0016] Figure 1 It is a three-dimensional diagram of a preferred embodiment of the present invention.
[0017] Figure 2 It is a perspective view of a preferred embodiment of the present invention.
[0018] Figure 3 for Figure 2 A partial enlarged view of .
[0019] Figure 4 for Figure 2 Another partial enlargement of .
[0020] Figure 5 Another perspective view of a preferred embodiment of the present invention.
[0021] Among them, 1: main body; 11: slide rail assembly; 2: sampling assembly; 21: sampling inlet; 22: solenoid valve assembly; 23: sampling outlet; 24: first cleaning inlet; 3: diversion device; 31: diversion inlet; 32: second cleaning inlet; 4: detection device; 5: industrial computer; 61: first pump device; 62: second pump device; 71: display screen; 72: warning device. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0023] Please refer to Figures 1 to 5 , which shows a preferred embodiment of the present invention. The gas monitoring device of the present invention includes a main body 1, a plurality of sampling components 2, a diversion device 3, a detection device 4 and an industrial computer 5.
[0024] The plurality of sampling components 2 are detachably assembled to the main body 1. Each of the sampling components 2 includes a plurality of sampling inlets 21, a solenoid valve component 22 and a sampling outlet 23. The plurality of sampling inlets 21 are respectively connected to a plurality of gas sources to be detected. In this embodiment, the plurality of gas sources to be detected are environmental gases in different working areas. The solenoid valve component 22 is connected between the plurality of sampling inlets 21 and the sampling outlet 23. The solenoid valve component 22 can selectively control the connection between the plurality of sampling inlets 21 and the sampling outlet 23.
[0025] The flow dividing device 3 is disposed on the main body 1 and is connected to the sampling outlets 23 of the plurality of sampling components 2 .
[0026] The detection device 4 is disposed on the body 1 and connected to the flow dividing device 3. The flow dividing device 3 can selectively control the connection between the sampling outlets 23 of the plurality of sampling components 2 and the detection device 4 to detect the gas of each gas source to be detected.
[0027] The industrial computer 5 is arranged on the main body 1 and is communicatively connected to the detection device 4 so as to transmit the value detected by the detection device 4 to the industrial computer 5 for calculation and analysis. By means of the actuation of the electromagnetic valve assembly 22 of the plurality of sampling components 2 and the diversion device 3, the gases to be detected in different working areas can be quickly rotated to enter the detection device 4 for detection. The present invention can achieve the function of quickly detecting whether the gases to be detected in different working areas are abnormal, so as to maintain the safety of the working environment and ensure the product yield. And because the plurality of sampling components 2 can be detachably assembled on the main body 1, the number of the plurality of sampling components 2 can be increased or decreased according to the actual use environment, and the plurality of sampling components 2 can be conveniently replaced and maintained.
[0028] Specifically, the plurality of sampling components 2 are detachably slidably mounted on the body 1. In this embodiment, the body 1 is provided with a plurality of slide rail components 11, and each of the sampling components 2 is detachably slidably mounted on one of the slide rail components 11 to facilitate assembly and disassembly.
[0029] The plurality of sampling inlets 21 of each sampling assembly 2 are exposed on the main body 1 , and the sampling outlets 23 are hidden in the main body 1 . The plurality of sampling inlets 21 exposed on the main body 1 can be distinguishably connected to the plurality of gas sources to be detected through pipelines.
[0030] Preferably, the present invention further comprises a first pump device 61, which is connected to the diverter device 3 to transport the gas of the gas source to be detected to the diverter device 3 via the sampling assembly 2 to improve the gas flow efficiency.
[0031] In this embodiment, the flow splitting device 3 includes a plurality of flow splitting inlets 31, and the plurality of flow splitting inlets 31 are respectively connected to the plurality of sampling outlets 23, and the flow splitting device 3 can respectively control the connection between the plurality of sampling outlets 23 and the detection device 4. The flow splitting device 3 can also perform pre-sampling operations. When the detection of the gas to be detected in one of the flow splitting inlets 31 is completed, the flow splitting device 3 can be quickly switched to allow the gas to be detected in another flow splitting inlet 31 to flow into the detection device 4 for detection; or in other embodiments, the detection device 4 has a plurality of detection modules, and the flow splitting device 3 can quickly introduce a plurality of the gases to be detected into the plurality of detection modules to provide continuous multi-point detection and high efficiency, but the present invention is not limited thereto.
[0032] Each sampling assembly 2 further includes a first purge inlet 24 connected to the solenoid valve assembly 22 . The flow dividing device 3 further includes a plurality of second purge inlets 32 . The plurality of first purge inlets 24 and the plurality of second purge inlets 32 are further connected to a purge gas source.
[0033] It is worth mentioning that the present invention further includes a second pump device 62, which is used to transport the cleaning gas source (such as clean air or inert gas such as nitrogen) to the plurality of first cleaning inlets 24 and the plurality of second cleaning inlets 32 to clean the plurality of sampling components 2 and the diversion device 3 to avoid mixing of different gas sources to be detected and causing inaccurate detection effects.
[0034] Furthermore, the present invention further comprises a display screen 71, which is disposed outside the body 1 and is in communication connection with the industrial computer 5 to display the results of the calculation and analysis performed by the industrial computer 5 for the monitoring personnel to review.
[0035] Preferably, the present invention further includes a warning device 72, which is arranged outside the body 1 and is connected to the industrial computer 5. When an abnormal value appears, the warning device 72 issues a warning reminder. In this embodiment, the warning device 72 is a light-emitting device to achieve a striking reminder effect.
[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A gas monitoring device, characterized in that: include: one body; A plurality of sampling components are detachably assembled to the body, each of the sampling components comprises a plurality of sampling inlets, a solenoid valve component and a sampling outlet, the plurality of sampling inlets are respectively connected to a plurality of gas sources to be detected, the solenoid valve component is connected between the plurality of sampling inlets and the sampling outlet, and the solenoid valve component can selectively control the connection between the plurality of sampling inlets and the sampling outlet; A flow dividing device, disposed on the body and connected to the sampling outlets of the plurality of sampling components; A detection device, disposed on the body and connected to the flow dividing device, the flow dividing device can selectively control the connection between the sampling outlets of the plurality of sampling components and the detection device, so as to detect the gas of each of the gas sources to be detected; An industrial computer is arranged on the main body and is communicatively connected to the detection device so as to transmit the value detected by the detection device to the industrial computer for calculation and analysis.
2. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling components are detachably and slidably arranged on the main body.
3. The gas monitoring device according to claim 2, characterized in that: The main body is provided with a plurality of slide rail components, and each sampling component is detachably slidably arranged on one of the slide rail components.
4. The gas monitoring device according to claim 1, characterized in that: The plurality of sampling inlets of each sampling component are exposed from the main body, and the sampling outlets are hidden in the main body.
5. The gas monitoring device according to claim 1, characterized in that: A first pump device is also included, and the first pump device is connected to the flow dividing device to transport the gas of the gas source to be detected to the flow dividing device through the sampling component.
6. The gas monitoring device according to claim 1, characterized in that: The flow splitting device comprises a plurality of flow splitting inlets, and the plurality of flow splitting inlets are respectively connected to the plurality of sampling outlets.
7. The gas monitoring device according to claim 1, characterized in that: Each sampling assembly further comprises a first cleaning inlet, which is connected to the electromagnetic valve assembly. The flow dividing device further comprises a plurality of second cleaning inlets, which are connected to a cleaning gas source.
8. The gas monitoring device according to claim 7, characterized in that: A second pump device is also included, and the second pump device is used to deliver the cleaning gas source to the plurality of first cleaning inlets and the plurality of second cleaning inlets.
9. The gas monitoring device according to claim 1, characterized in that: The device further comprises a display screen, which is arranged outside the body and is connected to the industrial computer for communication so as to display the result of the industrial computer's calculation and analysis.
10. The gas monitoring device according to claim 3, characterized in that: The plurality of sampling inlets of each sampling assembly are exposed on the body, and the sampling outlet is hidden in the body; a first pump device is further included, and the first pump device is connected to the flow dividing device to transport the gas of the gas source to be detected to the flow dividing device through the sampling assembly; the flow dividing device includes a plurality of flow dividing inlets, and the plurality of flow dividing inlets are respectively connected to the plurality of sampling outlets; each sampling assembly further includes a first cleaning inlet, and the first cleaning inlet is connected to the solenoid valve assembly, and the flow dividing device further includes a plurality of second cleaning inlets, and the plurality of first cleaning inlets are connected to the plurality of The second cleaning inlet is further connected to a cleaning gas source; a second pump device is further included, and the second pump device is used to transport the cleaning gas source to the plurality of first cleaning inlets and the plurality of second cleaning inlets; a display screen is further included, and the display screen is arranged on the outside of the body and is connected to the industrial computer for communication to display the results of the industrial computer calculation and analysis; an alarm device is further included, and the alarm device is arranged on the outside of the body and is connected to the industrial computer for communication. When an abnormal value appears, the alarm device issues a warning reminder; the alarm device is a light-emitting device.