High-precision air curtain device

Abstract

The invention belongs to the technical field of air curtain devices, and relates to a high-precision air curtain device which comprises a main body, an air outlet and an air inlet connecting pipe, and the air outlet and the air inlet connecting pipe are arranged on the main body. The microplate assembly comprises a microplate pressing plate, a microplate pressing rod, a microplate and a microplate supporting plate which are connected in sequence; a long conical air outlet channel is arranged between the microporous plate supporting plate and the air outlet; a plurality of nozzles are arranged on the gas distribution pipe; the gas distribution pipe is connected with the gas inlet connecting pipe; gas enters the gas distribution pipe through the gas inlet connecting pipe, is sprayed out through the multiple nozzles, then is mixed in the microwell plate assembly, is filtered through the microwell plate assembly and then flows to the gas outlet through the long conical gas outlet channel, and a trapezoidal cubic gas curtain is formed at the gas outlet. Compared with the prior art, the size of the trapezoidal cubic gas curtain is ensured, stable gas flow and uniform gas distribution are also realized, and meanwhile, high-precision flow velocity control is realized.

Description

Technical Field

[0001] The invention belongs to the technical field of air curtain devices, and in particular relates to a high-precision air curtain device. Background Art

[0002] Air curtain devices play a very important role in chip production. In various links of chip manufacturing, such as process flow, chip etching and storage, air curtain devices can effectively prevent chips from being oxidized or corroded by harmful gases, thereby protecting the micron-level circuits on the chip from damage. In the process of each process flow, nitrogen protection must be provided, and the transfer space between processes is mainly achieved through pure nitrogen air curtains to achieve this gas protection function.

[0003] In order to ensure the stability of airflow, uniformity of gas distribution and high-precision control of flow rate, the gas curtain device is technically very difficult.

[0004] Patent application TW202343614A provides an air curtain device and a ventilation assembly, the air curtain device comprising a main body and a ventilation assembly. The main body is provided with at least one air inlet, the ventilation assembly is located in the main body, and comprises a first ventilation plate and a second ventilation plate; the first ventilation plate is provided with a plurality of through holes, and the second ventilation plate is made of a material containing a large number of micropores. The air enters the main body through the air inlet, passes through the through holes of the first ventilation plate, and is finally released through the second ventilation plate, which solves the problem that the space between the air inlet and the air permeable plate in the air curtain device is insufficient, resulting in uneven flow rate of clean gas blown out by the air curtain device. However, the air curtain device and the ventilation assembly have some limitations. First, they cannot ensure uniform distribution of airflow, nor can they ensure effective filtration of microparticles in the gas. In addition, although thin film holes are used to balance the airflow, once these small holes are blocked, the entire air curtain device will be unusable. Due to its non-detachable design, once the film is damaged, the user can only replace the entire device, but cannot perform local repairs or replace the film for reuse. In addition, the texture of the film material used is similar to sponge-like foam, which is not strong enough and easy to damage. Since multi-stage airflow pressure stabilization technology is not used to even out the airflow pressure, different airflow velocities may be measured on the cross-section at the same height, resulting in unstable airflow velocity. Summary of the invention

[0005] The purpose of the present invention is to provide a high-precision air curtain device in order to overcome the defects of the above-mentioned prior art, achieve stable airflow and uniform gas distribution, and have high-precision flow rate control.

[0006] The purpose of the present invention can be achieved by the following technical solutions:

[0007] The present invention provides a high-precision air curtain device, comprising a main body and an air outlet and an air inlet connecting pipe arranged thereon, wherein a microporous plate assembly and a gas distribution pipe are arranged in the main body, wherein the microporous plate assembly comprises a microporous plate pressing plate, a microporous plate pressing rod, a microporous plate and a microporous plate supporting plate connected in sequence; a long conical air outlet channel is arranged between the microporous plate supporting plate and the air outlet; a plurality of nozzles are arranged on the gas distribution pipe; the gas distribution pipe is connected to the air inlet connecting pipe;

[0008] The gas enters the gas distribution pipe through the air inlet connecting pipe, is sprayed out through multiple nozzles, mixed in the microporous plate assembly, filtered by the microporous plate assembly, and flows to the air outlet through the long cone outlet channel, forming a trapezoidal cubic air curtain at the air outlet.

[0009] Furthermore, the main body is also provided with an upper cover plate, which seals the microporous plate assembly and the gas distribution pipe in the main body, and the air inlet connecting pipe passes through the upper cover plate and is sealed and connected thereto. There is a sealing ring along the upper cover plate on the side surface to ensure the sealing effect of the upper cover plate on the entire air curtain device.

[0010] Furthermore, the upper part of the air intake connecting pipe passes through the upper cover plate and is sealed therewith, and the lower part passes through the gas distribution pipe and is sealed therewith, thereby ensuring the distance between the upper cover plate and the gas distribution pipe; the air intake connecting pipe introduces gas into the gas distribution pipe, and the sealed connection between the air intake connecting pipe and the gas distribution pipe also serves to fix the gas distribution pipe.

[0011] Furthermore, a plurality of microporous plate pressure rods are arranged between the microporous plate and the microporous plate pressure plate to form a cavity for accommodating the gas distribution tube, and the upper surface of the microporous plate pressure plate is sealed and connected to the upper cover plate; the microporous plate support plate is used to support the microporous plate, and the microporous plate support plate ensures that the gas flow through the microporous plate is not hindered while maintaining the structural stability of the microporous plate; due to the effect of air pressure, the microporous plate is tightly attached to the microporous plate support plate and will not move or deform.

[0012] Furthermore, before the gas in the main body reaches the microporous plate, due to the very complex form of gas flow and the interference of the device structure and other factors, the gas flow velocity in multiple cross sections in the length direction of the device must be measured, so as to adjust the nozzle diameter to achieve uniform gas flow velocity, thereby adjusting the uniformity of the gas and the gas flow velocity;

[0013] The nozzle has a diameter of 0.72 mm to 1.12 mm, and the nozzle diameter varies with the measured instantaneous gas flow rate value, and is used to adjust the gas uniformity and gas flow rate on the cross section along the length direction of the main body after the gas flows out of the nozzle.

[0014] Furthermore, the taper angle of the long tapered outlet channel is 90° to 105°, the channel length is 380mm to 395mm, the width of the large end is 32mm to 35mm, the diameter of the small end is 18mm to 21mm, and the air flow velocity of the gas in the outlet channel is 0.1m / s to 0.45m / s. The long tapered outlet channel is a microporous plate that expands the air permeability area of ​​the micropores, increases the air flow, and makes the air flow at the end of the trapezoidal cube air curtain meet the technical parameters of the air curtain, ensuring the size of the trapezoidal cube of the air curtain.

[0015] Furthermore, the gas distribution pipe is made of stainless steel, aluminum or any one of metals that meets ROSH standards and does not contain any metal that is harmful to the human body and the environment.

[0016] Furthermore, the microporous plate is made of any one of ultra-high molecular weight polyethylene, stainless steel or ROSH-compliant materials that are not harmful to the human body and the environment, and the pore size of the micropores on the microporous plate is 25 μm to 100 μm. Since the density of the pores on the microporous plate is very high and the pore size reaches the micron level, the microporous plate has good air permeability, which can reduce the resistance of the airflow; and the airflow slows down before reaching the microporous plate, changing from dynamic pressure to static pressure, so that the density of the gas flowing out of the microporous plate is evenly distributed. In addition, the microporous plate filters the tiny particles in the gas through the microporous effect, avoiding the contamination of the chip by the tiny particles.

[0017] Furthermore, the microplate support plate is made of stainless steel or any metal that meets the ROSH standard and does not contain any metal that is harmful to the human body and the environment, and a plurality of rectangular holes are evenly opened on the surface, and the area of ​​each rectangular hole is 9800mm 2 ~12000mm 2 .

[0018] Furthermore, the air outlet adopts an asymmetric conical air outlet, so that the trapezoidal cube air curtain fully covers the chip turnover box.

[0019] In summary, after the gas enters the device through the air inlet connecting pipe, it first enters the gas distribution pipe, where the gas changes from dynamic pressure to static pressure and is ejected through the nozzle into the cavity in the microporous plate assembly. Since the speed of the airflow ejected from the nozzle is extremely fast, the airflow changes direction after being reflected by the upper cover plate and flows toward the air outlet of the device. In this process, due to the alternating effects of fluid flow states such as laminar flow and turbulent flow, the airflow speed of the gas slows down and the gas density tends to be uniform.

[0020] The airflow toward the outlet gathers in front of the microporous plate and changes from dynamic pressure to static pressure again;

[0021] Since the pores of the microporous plate are extremely small (micrometer level), the airflow filtered by the microporous plate flows out evenly through the microporous plate support plate, and forms a trapezoidal cube air curtain at the outlet of the device through the long cone outlet channel, fully covering the chip turnover box.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] (1) The present invention provides a high-precision air curtain device, including an upper cover plate, an air inlet connecting pipe, a gas distribution pipe, a nozzle, a microporous plate, a microporous plate pressure plate, a microporous plate pressure rod, a microporous plate support plate, a body, a long conical air outlet channel, a wind curtain profile, an air outlet and a sealing ring. After pure nitrogen enters the device through two air inlet connecting pipes installed on the upper cover plate, it first enters the gas distribution pipe, where the gas changes from dynamic pressure to static pressure and is ejected into the inner cavity of the device through the nozzle; since the air flow velocity ejected from the nozzle is extremely fast, the air flow is reflected on the upper cover plate and changes direction, and flows toward the air outlet of the device. In this process, the gas flow velocity slows down due to the alternating effects of fluid flow states such as laminar flow and turbulent flow, and the gas density in the device tends to be uniform; the air flow flowing to the air outlet of the device gathers in front of the microporous plate and transitions from dynamic pressure to static pressure for the second time. Since the microporous plate has extremely small holes (micrometer level), the air flow flows out evenly through the microporous plate and forms a trapezoidal cubic air curtain at the air outlet of the air curtain device. The gas flow rate of the trapezoidal cube gas curtain decreases along the outlet flow direction, and the minimum gas flow rate can reach 0.1m / min. Too large a gas flow rate will cause the chip to shift in the fixed tray, thereby causing etching errors; while too small a gas flow rate will not provide the required gas protection range. Therefore, the gas curtain device of the present invention not only ensures the size of the trapezoidal cube gas curtain, but also achieves stable airflow and uniform gas distribution, while having high-precision flow rate control.

[0024] (2) The present invention uses a nozzle for air intake, and the nozzle diameter can be adjusted according to the air flow outlet speed so that the speed of each section of the air curtain along the length direction has a consistent error of less than ±0.03m / s. Due to the use of secondary dynamic and static pressure stabilization, the outlet air flow velocity of the air curtain is stabilized within the technical requirements; a conical outlet is used at the air flow outlet to increase the microporous air permeability and ensure the air flow requirements. After using the microporous plate, the microporous plate can be replaced regularly to reduce waste and ensure the gas quality of the air curtain; after using the microporous plate filtration technology, the gas purity is high, which improves the quality of the air curtain gas.

[0025] (3) The high-precision air curtain device provided by the present invention meets the following technical requirements: gas type: nitrogen, nitrogen flow rate: 300LPM, pressure: 0.5Mpa, noise: less than 75db, nitrogen minimum flow rate: 0.1m / s, nitrogen maximum flow rate: 0.45m / s. The high-precision air curtain device provided by the present invention not only meets the relevant technical requirements of imported air curtain devices, but also achieves significant improvement in cost-effectiveness through design optimization. Compared with the prior art, once the components of traditional imported air curtain devices reach the end of their service life, they need to be replaced as a whole, and it is impossible to update a certain part of them separately. This maintenance method is not only costly, but also may cause waste of resources. However, the air curtain device of the present invention adopts a modular design, allowing the user to only replace the expired microporous plate components, thereby restoring the performance of the air curtain device. This method not only reduces maintenance costs, but also improves the sustainability of the equipment. By regularly replacing the microporous plate, the user can ensure that the air curtain device continues to provide high-precision gas distribution while avoiding performance degradation due to component aging. Therefore, the present invention not only meets the requirements of high precision, but also provides users with an economical and efficient maintenance solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the components of the air curtain device of the present invention;

[0027] Figure 2 It is an overall schematic diagram of the air curtain device of the present invention.

[0028] Description of the markings in the figure:

[0029] 1-upper cover plate, 2-air inlet connecting pipe, 3-gas distribution pipe, 4-nozzle, 5-microporous plate, 6-microporous plate pressure plate, 7-microporous plate pressure rod, 8-microporous plate support plate, 9-main body, 10-sealing ring, 11-wind curtain profile, 12-long cone-shaped air outlet channel, 13-air outlet. DETAILED DESCRIPTION

[0030] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

[0031] In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In addition, the terms "first", "second", "third", etc. are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the use of such data can be interchangeable where appropriate, so that the embodiments of the present invention can be implemented in an order other than that illustrated or described herein, and the objects distinguished by "first", "second", "third", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects; the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the following implementation manners or examples, unless otherwise specified, functional components or structures are conventional components or conventional structures used in the art to achieve corresponding functions.

[0034] Example 1

[0035] This embodiment provides a high-precision air curtain device, such as Figure 1 , Figure 2 As shown, the device includes an air curtain profile 11, a main body 9 in the air curtain profile 11, and an air outlet 13 and an air inlet connecting pipe 2 arranged on the main body 9, a microporous plate assembly and a gas distribution pipe 3 are arranged in the main body 9, and the microporous plate assembly includes a microporous plate pressing plate 6, a microporous plate pressing rod 7, a microporous plate 5 and a microporous plate supporting plate 8 connected in sequence; a long conical air outlet channel 12 is arranged between the microporous plate supporting plate 8 and the air outlet 13; a plurality of nozzles 4 are arranged on the gas distribution pipe 3; the gas distribution pipe 3 is connected to the air inlet connecting pipe 2;

[0036] The gas enters the gas distribution pipe 3 through the air inlet connecting pipe 2, is sprayed out through multiple nozzles 4, mixed in the microporous plate assembly, filtered by the microporous plate assembly, and flows to the outlet 13 through the long tapered outlet channel 12, forming a trapezoidal cubic air curtain at the outlet 13.

[0037] In this embodiment, the main body 9 is further provided with an upper cover plate 1, which seals the microporous plate assembly and the gas distribution pipe 3 in the main body 9, and the air inlet connecting pipe 2 passes through the upper cover plate 1 and is sealed and connected thereto. A sealing ring 10 is provided along the sides of the upper cover plate 1 to ensure the sealing effect of the upper cover plate 1 on the entire air curtain device.

[0038] In this embodiment, the upper part of the air intake connecting pipe 2 passes through the upper cover plate 1 and is sealed therewith, and the lower part passes through the gas distribution pipe 3 and is sealed therewith, thereby ensuring the distance between the upper cover plate 1 and the gas distribution pipe 3; the air intake connecting pipe 2 introduces the gas into the gas distribution pipe 3, and the sealed connection between the air intake connecting pipe 2 and the gas distribution pipe 3 also serves to fix the gas distribution pipe 3.

[0039] In this embodiment, a plurality of microporous plate pressure rods 7 are arranged between the microporous plate 5 and the microporous plate pressure plate 6 to form a cavity for accommodating the gas distribution tube 3, and the upper surface of the microporous plate pressure plate 6 is sealed and connected to the upper cover plate 1; the microporous plate support plate 8 supports the microporous plate 5, and the microporous plate support plate 8 not only maintains the structural stability of the microporous plate 5, but also ensures that the gas flow through the microporous plate 5 is not hindered; due to the effect of air pressure, the microporous plate 5 is tightly attached to the microporous plate support plate 8 and will not move or deform.

[0040] In this embodiment, before the gas in the main body 9 reaches the microporous plate 5, due to the very complex gas flow form and the interference of the device structure and other factors, it is necessary to measure the gas flow velocity of multiple cross sections in the length direction of the device, so as to adjust the diameter of the nozzle 4 to achieve uniform gas flow velocity, thereby adjusting the uniformity of the gas and the gas flow velocity;

[0041] In this embodiment, the nozzle 4 includes an adjustable Laval nozzle (also called a convergent-divergent nozzle), which utilizes its unique geometric shape to increase the air flow velocity in the nozzle from subsonic to supersonic through a structure that first converges and then expands, thereby generating thrust, achieving regulation and control of the thrust size and direction, and allowing the air flow velocity to be adjusted by changing the internal structure of the nozzle, such as changing the nozzle diameter, to improve the speed and uniformity of gas ejection; in this embodiment, the diameter of the nozzle 4 can be adjusted between 0.72 mm and 1.12 mm, and the diameter of the nozzle 4 changes with the measured instantaneous gas flow rate value, and is used to adjust the gas uniformity and airflow velocity of the gas flowing through the cross section along the length direction of the main body 9 after the gas flows out of the nozzle 4.

[0042] In some specific embodiments, the cone angle of the long cone outlet channel 12 is 90° to 105°, the channel length is 380mm to 395mm, the width at the large end is 32mm to 35mm, the width at the small end is 18mm to 20mm, and the air flow velocity of the gas in the long cone outlet channel 12 is 0.1m / s to 0.45m / s.

[0043] In this embodiment, the taper angle of the long tapered outlet channel 12 is 92°, the channel length is 390 mm, the width of the large end is 33 mm, the width of the small end is 18 mm, and the air flow velocity of the gas in the long tapered outlet channel 12 is 0.1 m / s to 0.45 m / s. The long tapered outlet channel 12 expands the air permeability area of ​​the micropores of the microporous plate 5, increases the air flow, makes the air flow at the end of the trapezoidal cube air curtain meet the technical parameters of the air curtain, and ensures the size of the trapezoidal cube of the air curtain.

[0044] In some specific implementations, the gas distribution pipe 3 is made of stainless steel, aluminum, or any metal that meets the ROSH standard and does not contain any metal that is harmful to the human body and the environment.

[0045] In this embodiment, the gas distribution pipe 3 is a square pipe made of stainless steel, both ends of which are sealed by welding with homogeneous plugs, and 24 nozzles 4 are distributed on the gas distribution pipe 3.

[0046] In some specific implementations, the microporous plate 5 is made of ultra-high molecular weight polyethylene, stainless steel, or any material that meets the ROSH standard and is not harmful to the human body and the environment, and the pore size of the micropores on the microporous plate is 25 μm to 100 μm.

[0047] In this embodiment, the microporous plate 5 is a microporous plate made of ultra-high molecular weight polyethylene, and the pore size of the micropores thereon is 85 μm. Since the density of the pores on the microporous plate 5 is very high and the pore size reaches the micron level, the microporous plate 5 has good air permeability, which can reduce the resistance of the airflow; and the airflow slows down before reaching the microporous plate 5, and the dynamic pressure is changed into static pressure, so that the density of the gas flowing out of the microporous plate 5 is evenly distributed. In addition, the microporous plate 5 filters the tiny particles in the gas through the microporous effect, avoiding the contamination of the chip by the tiny particles.

[0048] In some specific embodiments, the microplate support plate 8 is made of stainless steel or any metal that meets the ROSH standard and does not contain any metal that is harmful to the human body and the environment. A plurality of rectangular holes are evenly arranged on the surface, and the area of ​​each rectangular hole is 9800 mm 2 ~12000mm 2 .

[0049] In this embodiment, the microplate support plate 8 is a stainless steel plate with 20 rectangular holes evenly opened on the surface, and the area of ​​each rectangular hole is 11900mm 2 .

[0050] In this embodiment, if Figure 2 As shown, an air outlet 13 is provided at the end of the long tapered air outlet channel 12. Based on the specific shape of the long tapered air outlet channel 12 of this embodiment, the air outlet 13 is an asymmetric tapered air outlet, so that the trapezoidal cube air curtain fully covers the chip turnover box.

[0051] In summary, in this embodiment, after the gas enters the device through the air inlet connecting pipe 2, it first enters the gas distribution pipe 3, in which the gas changes from dynamic pressure to static pressure, and is ejected into the cavity in the microporous plate assembly through the nozzle 4. Since the speed of the airflow ejected from the nozzle 4 is extremely fast, the airflow is reflected by the upper cover plate 1 and changes direction, and flows toward the air outlet 13 of the device. In this process, due to the alternating effects of fluid flow states such as laminar flow and turbulent flow, the airflow speed of the gas slows down, and the gas density tends to be uniform.

[0052] The airflow flowing to the air outlet 13 gathers in front of the microporous plate 5 and changes from dynamic pressure to static pressure again;

[0053] Since the pores of the microporous plate 5 are extremely small at the micron level, the airflow filtered by the microporous plate 5 flows out evenly through the microporous plate support plate 8 and forms a trapezoidal cubic air curtain at the air outlet 13 of the device through the long conical air outlet channel 12.

[0054] The above description of the embodiments is to facilitate the understanding and use of the invention by those skilled in the art. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without creative work. Therefore, the present invention is not limited to the above embodiments, and improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the present invention should be within the scope of protection of the present invention.

Claims

1. A high-precision air curtain device, comprising a main body (9) and an air outlet (13) and an air inlet connecting pipe (2) arranged thereon, characterized in that: The main body (9) is provided with a microporous plate assembly and a gas distribution pipe (3), wherein the microporous plate assembly comprises a microporous plate pressing plate (6), a microporous plate pressing rod (7), a microporous plate (5) and a microporous plate supporting plate (8) which are connected in sequence; a long conical gas outlet channel (12) is provided between the microporous plate supporting plate (8) and the gas outlet (13); The gas distribution pipe (3) is provided with a plurality of nozzles (4); the gas distribution pipe (3) is connected to the air intake connection pipe (2); The gas enters the gas distribution pipe (3) through the gas inlet connecting pipe (2), is sprayed out through a plurality of nozzles (4), mixed in the microporous plate assembly, filtered through the microporous plate assembly, and flows to the gas outlet (13) through the long conical gas outlet channel (12), forming a trapezoidal cubic gas curtain at the gas outlet (13).

2. A high-precision air curtain device according to claim 1, characterized in that: The main body (9) is also provided with an upper cover plate (1) to seal the microporous plate assembly and the gas distribution pipe (3) in the main body (9); the air intake connecting pipe (2) passes through the upper cover plate (1) and is sealed and connected thereto.

3. A high-precision air curtain device according to claim 1, characterized in that: A plurality of microporous plate pressing rods (7) are arranged between the microporous plate (5) and the microporous plate pressing plate (6) to form a cavity between the gas distribution pipe (3) and the microporous plate (5); The microplate support plate (8) supports the microplate (5).

4. A high-precision air curtain device according to claim 1, characterized in that: The cone angle of the long cone-shaped air outlet channel (12) is 90° to 105°, the channel length is 380 mm to 395 mm, the width at the large end is 32 mm to 35 mm, the width at the small end is 18 mm to 21 mm, and the air flow velocity of the gas in the long cone-shaped air outlet channel (12) is 0.1 m / s to 0.45 m / s.

5. The high-precision air curtain device according to claim 1, characterized in that: The material of the gas distribution pipe (3) is stainless steel, aluminum or any metal that meets the ROSH standard and does not contain any metal that is harmful to the human body and the environment.

6. A high-precision air curtain device according to claim 1, characterized in that: The pore diameter of the micropores on the micropore plate (5) is between 25 μm and 100 μm.

7. The high-precision air curtain device according to claim 1, characterized in that: The surface of the microporous plate support plate (8) is evenly perforated.

8. The high-precision air curtain device according to claim 1, characterized in that: The diameter of the nozzle (4) is 0.72 mm to 1.12 mm, and the diameter of the nozzle (4) varies with the measured instantaneous gas flow rate value, thereby adjusting the uniformity and gas flow speed of the gas.

9. The high-precision air curtain device according to claim 1, characterized in that: The air outlet (13) is an asymmetric air outlet, so that the trapezoidal cubic air curtain completely covers the chip turnover box.

10. A high-precision air curtain device according to any one of claims 1 to 9, characterized in that: After the gas enters the device through the air inlet connecting pipe (2), it first enters the gas distribution pipe (3), where the gas changes from dynamic pressure to static pressure and is ejected into the cavity in the microporous plate assembly through the nozzle (4). The gas flow is reflected by the upper cover plate (1) and changes direction, flowing toward the gas outlet (13) of the device. During this process, the gas flow speed slows down and the gas density tends to be uniform. The airflow flowing toward the air outlet (13) gathers in front of the microporous plate (5), and changes from dynamic pressure to static pressure again; The airflow filtered by the microporous plate (5) flows out evenly through the microporous plate support plate (8), and forms a trapezoidal cubic air curtain at the air outlet (13) of the device through the long conical air outlet channel (12).

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