Inductive water-guided laser generating device

Abstract

The present invention discloses an induction-type water-guided laser generating device. A high-pressure water chamber is formed within the housing of a water-optical coupler. A light-transmitting window is formed in the middle of the housing's top plate for incident laser light. A water inlet is formed on the housing's sidewall for injecting water into the high-pressure water chamber. An induction channel is formed on the housing's bottom plate, coaxial with the light-transmitting window. The induction channel is shaped like a frustum that tapers from top to bottom. The inner wall of the induction channel is coated with a mirror-reflective film. High-pressure water within the high-pressure water chamber is ejected from the lower end of the induction channel to form a microjet, which is surrounded by gas to form a water-gas interface. The induction-type water-guided laser generating device of the present invention can produce water-guided laser microjets with an outer diameter smaller than the laser spot diameter, significantly reducing the alignment requirements between the laser spot and the induction channel and improving the efficiency of water-guided laser coupling.

Description

Technical Field

[0001] The present invention relates to laser processing technology, in particular to an induction type water-conducting laser generating device. Background Art

[0002] Water-guided laser processing combines a laser with a hair-thin microjet. Similar to fiber optics, the laser beam is precisely guided to the processing location through total internal reflection of pulses within the microjet. The water-guided laser microjet continuously cools the cutting area and effectively removes machining debris. As a uniquely cool, clean, and controllable laser processing technology, it avoids the significant challenges of conventional dry laser processing, such as thermal damage, contamination, processing speed, deformation, debris deposition, oxidation, microcracks, and taper.

[0003] Because traditional lasers are divergent beams, the working distance of a focused laser beam is limited to only a few millimeters to a fraction of a millimeter. This not only requires precise focusing and distance control, but also limits the ratio of incision width to depth. Water-guided lasers use a laser beam that is completely reflected at the air-water interface. The laser beam can be guided over a length of up to 100mm, achieving high aspect ratio incisions with parallel cutting edges, eliminating the need for focusing or distance control during the process.

[0004] Thanks to the cooling power of the micro-jet, water-guided laser processing produces virtually no thermal damage (no heat-affected zone) and microstructural changes in the processed material. Ablated material debris is removed by the water flow, leaving a clean surface free of deposits and burrs. Water-guided laser technology effectively cuts materials of varying thicknesses, including diamond and silicon carbide up to 30 mm thick and high-temperature alloys up to 15 mm thick with an 800 µm aperture. The cylindrical beam of a water-guided laser produces tight, parallel cuts (>25 µm) with parallel, tapered cut surfaces and a machining accuracy as low as + / -1.5 µm, significantly reducing material loss. The use of high-power lasers enables significantly higher cutting speeds while maintaining superior quality. For example, cutting speeds of 45 mm / min are possible for 7 mm thick silicon and 5 mm / min for 4 mm thick chemical vapor deposition (CVD)-grown diamond. Water-guided lasers can process different types of materials (conductive or non-conductive). The processing is a warm process, so water-guided laser technology is particularly suitable for processing brittle and hard materials or various composite materials that are easily damaged by traditional cutting processes, such as: ceramics, composite materials, metals, metal alloys, diamonds, hard materials, semiconductor materials, etc.

[0005] In the 1990s, Dr. Richerzhagen of the Swiss Federal Institute of Technology in Lausanne successfully coupled a laser with a microjet as thin as a hair, allowing the laser beam to be transmitted to the processing point through total internal reflection within the microjet, similar to an optical fiber. He became the first person to accomplish this feat and founded SYNOVA and developed the world's first laser microjet processing system, a milestone in the history of laser microjet processing technology. The advantages of this unique processing technology are significant: it enables ultra-precise, fast, clean, and efficient processing, achieving narrower incisions with virtually no thermal damage, contamination, or taper caused by beam divergence. This new "wet" laser processing method is superior in many respects to existing conventional processing technologies, such as traditional "dry" lasers, electrical discharge machining (EDM), diamond saws, chemical machining, high-pressure water jet machining, milling, and grinding.

[0006] It's well known that combining lasers with hair-thin microjets is extremely difficult. The diameter of a microjet outlet is typically 25 to 100 μm, while the minimum diameter of the laser spot at the jet outlet of a water-based optical coupler achieved in real-world applications is typically 10 to 20 μm. This places extremely high demands on the alignment of the laser and jet outlets. Furthermore, factors such as errors and vibrations during equipment operation can easily cause the laser to strike the inner wall of the coupler, damaging it. Dr. Richerzhagen's fundamental principle for coupling lasers with hair-thin microjets is that the minimum diameter of the laser spot must be smaller than the diameter of the microjets. This means that the diameter of the microjets outlet is limited by the minimum diameter of the laser spot achieved in existing projects. It's impossible to produce a laser microjets smaller than this minimum diameter, significantly limiting the potential for further reductions in the diameter of water-guided laser microjets.

[0007] Currently, water-guided laser equipment is basically designed according to the water-light coupling model of Dr. Richerzhagen of the Swiss Federal Institute of Technology in Lausanne. That is, how to align the laser spot with the smallest diameter to the jet outlet with a diameter very close to its diameter. This is a very difficult task, and the technical cost of engineering implementation is also very high.

[0008] Chinese invention patent publication number CN107662046B discloses an off-axis water-guided laser machining coupling device. The device comprises a charge coupled imaging device (CCD), a Z-axis lens, a nozzle integrated into a coupling cavity and capable of XY motion, and a focusing lens. The CCD aligns the laser and jet outlet. Closed-loop adjustment of the Z-axis lens adjusts the Z-axis position of the laser spot focal plane. Simultaneously, the XY displacement of the coupling cavity is adjusted to align the jet outlet and laser spot in the XY plane. This solution is similar to the vision alignment solution currently used in SYNOVA products, founded by Dr. Richerzhagen. It utilizes costly computer vision combined with closed-loop mechanical motion adjustment technology to align the minimum diameter laser spot to a diameter very close to the jet outlet. However, it fails to achieve low-cost, robust, and fault-tolerant water-guided laser coupling based on the fundamental coupling principle, and it also fails to address the problem of achieving a water-guided laser microjet smaller than the minimum spot size in the laser focal plane.

[0009] Chinese utility model patent publication number CN216502987U discloses a machine vision-based water-guided laser water jet calibration device. While this patent also provides a vision-based laser water jet calibration device, it differs from Chinese invention patent publication number CN107662046B in that it incorporates a laser illumination lamp, which is integrated into the laser processing optical circuit via a beam splitter prism. Furthermore, a camera is added above the processing platform near the coupler at a certain viewing angle to observe the processing light spot. This solution does not utilize the off-axis optical path of Chinese invention patent publication number CN107662046B, but instead uses the shape of the processing light spot to inversely assess the laser-water jet coupling and calibrate it. In practice, the camera's observation angle causes light spot image distortion, and the laser spot shape is randomly scattered during workpiece processing, making this solution difficult to evaluate in real time and achieve real-time calibration of the laser-water jet coupling during workpiece processing. This solution is basically similar to the visual alignment solution currently used in the SYNOVA product series founded by Dr. Richerzhagen. It uses expensive computer vision combined with closed-loop mechanical motion adjustment to align the minimum diameter laser spot to a diameter very close to the jet outlet. It also fails to achieve low-cost, high-robustness and high-tolerance water-light coupling based on the basic coupling principle, and cannot break through how to achieve a water-guided laser microjet smaller than the minimum spot size in the laser focusing plane. Summary of the Invention

[0010] The technical problem to be solved by the present invention is to provide an induced water-guided laser generating device that can produce a water-guided laser microjet with an outer diameter smaller than the laser spot diameter, which can greatly reduce the alignment requirements between the laser spot and the jet channel and improve the water-guided laser coupling efficiency.

[0011] In order to solve the above technical problems, the present invention provides an induction-type water-guided laser generating device, which includes a water-optical coupler;

[0012] A high-pressure water chamber is formed in the housing of the water optical coupler;

[0013] A light-transmitting window is formed in the middle of the top plate of the housing for incident laser light;

[0014] The side wall of the shell is formed with a water inlet for injecting water into the high-pressure water chamber;

[0015] The bottom plate of the housing is formed with an induction channel coaxial with the light-transmitting window;

[0016] The induction channel is in the shape of a cone that gradually shrinks from top to bottom;

[0017] The inner wall of the induction channel is plated with a mirror reflection film;

[0018] The high-pressure water in the high-pressure water chamber is ejected from the lower end of the induction channel to form a micro-jet, and the micro-jet is surrounded by gas to form a water-gas interface.

[0019] Preferably, the bottom plate of the shell is further formed with a coaxial jet hole below the induction channel;

[0020] The inner diameter of the jet hole is larger than the inner diameter of the lower end of the induction channel;

[0021] High-pressure gas is injected into the jet hole to form a high-pressure gas cavity;

[0022] High-pressure water is injected from the lower end of the induction channel into the micro-jet in the jet hole, and the micro-jet is surrounded by high-pressure gas to form a water-gas interface;

[0023] The micro jet passes through the high-pressure air cavity in the jet hole and then shoots toward the bottom of the base plate.

[0024] Preferably, the inner diameter of the jet hole first increases and then decreases from the upper end to the lower end;

[0025] The inner diameter of the upper end of the jet hole is smaller than the inner diameter of the lower end of the jet hole;

[0026] The bottom plate of the shell is formed with an air inlet which is laterally connected to the middle of the side wall of the jet hole and is used for injecting high-pressure gas into the jet hole to form a high-pressure gas cavity in the jet hole.

[0027] Preferably, the induction type water-guided laser generating device further includes a focusing lens;

[0028] The focusing lens is coaxially arranged just above the light-transmitting window;

[0029] The collimated laser is irradiated coaxially downward from above the focusing lens.

[0030] Preferably, the angle between the sidewall generatrix of the frustum-shaped induction channel and the axis is less than ;

[0031] is the optically dense medium refractive index of water, is the refractive index of the optically thinning medium of the gas.

[0032] Preferably, the angle between the side wall generatrix of the frustum-shaped induction channel and the axis is greater than 3°.

[0033] Preferably, the gas is air, and the angle between the side wall generatrix of the frustum-shaped induction channel and the axis is less than 20.6°.

[0034] Preferably, the axial length of the induction channel is greater than the inner diameter of the upper end of the induction channel;

[0035] The inner diameter of the upper end of the induction channel is 100um to 500um;

[0036] The inner diameter of the lower end of the induction channel is 20um to 100um.

[0037] Preferably, the water pressure in the high-pressure water chamber is greater than the air pressure in the high-pressure air chamber;

[0038] The water pressure in the high-pressure water chamber is greater than 2 MPa;

[0039] The air pressure in the high-pressure air cavity is greater than 2KPa.

[0040] Preferably, the air pressure in the high-pressure air chamber is 1 / 8 to 1 / 12 of the water pressure in the high-pressure water chamber;

[0041] The light-transmitting window is sealed and assembled with anti-reflection glass.

[0042] The induction-type water-guided laser generating device of the present invention has a frustum-shaped induction channel. This makes it easier for water in the high-pressure water chamber to be introduced into the laser induction channel, and it is less likely to cause sudden changes in fluid pressure and turbulence at the entrance. The high-pressure water in the high-pressure water chamber can form a more stable microjet after being ejected from the lower end of the induction channel. The frustum-shaped induction channel can introduce a laser with a larger spot into the microjet, breaking through the current limitation that the minimum laser spot diameter must be smaller than the outer diameter of the microjet, and can obtain a water-guided laser microjets with a smaller diameter than the laser spot. The frustum-shaped induction channel greatly reduces the alignment accuracy requirements between the laser and the induction channel, thereby reducing the accuracy requirements and alignment difficulty during water-guided laser coupling. This induced water-guided laser generating device not only improves the alignment tolerance of the laser and the induction channel during equipment operation and greatly reduces the alignment accuracy requirements of the laser and the induction channel, but also breaks through the basic principle that the laser spot must be smaller than the outer diameter of the microjet during water-light coupling. It can produce a water-guided laser microjet with an outer diameter smaller than the laser spot diameter. It can introduce more energy from the outer circle of the laser spot into the water-guided laser microjet, improve the water-guided laser coupling efficiency, reduce multiple reflections and absorption of the outer circle energy in the water-light coupler, and maintain a lower water temperature and better water-light coupling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings required for use in the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0044] Figure 1 1. It is a structural schematic diagram of an embodiment of an induction-type water-guided laser generating device of the present invention;

[0045] Figure 2 yes Figure 1 Schematic diagram of the local structure related to the laser-induced channel;

[0046] Figure 3 This is a schematic diagram and a partial close-up diagram of the induction effect of the axis-parallel incident laser of one embodiment of the induction-type water-guided laser generating device of the present invention;

[0047] Figure 4 This is a schematic diagram and a partial close-up diagram of the induction effect of the non-parallel-axis incident laser in an embodiment of the induction-type water-guided laser generating device of the present invention;

[0048] Figure 5 This is a schematic diagram of the analysis of the critical angle of total reflection between water and air media;

[0049] Figure 6 It is a schematic diagram of the analysis of the laser-induced critical angle with parallel and non-parallel axes.

[0050] Description of reference numerals:

[0051] 1. Water-optical coupler; 2. High-pressure water chamber; 3. Focusing lens; 4. Collimated laser; 5. Microjet; 10. Housing; 11. Light-transmitting window; 12. Water inlet; 13. Air inlet; 15. Jet hole; 16. Induction channel; 17. High-pressure air chamber. DETAILED DESCRIPTION

[0052] The following is a clear and complete description of the technical solutions of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0053] Example 1: An induction water-guided laser generating device Figure 1 As shown, it includes a water optical coupler 1;

[0054] A high-pressure water chamber 2 is formed in the housing 10 of the water optical coupler 1;

[0055] A light-transmitting window 11 is formed in the middle of the top plate of the housing 10 for incident laser light;

[0056] The side wall of the housing 10 is formed with a water inlet 12 for injecting water into the high-pressure water chamber 2;

[0057] The bottom plate of the housing 10 is formed with an induction channel 16 coaxial with the light-transmitting window 11;

[0058] The induction channel 16 is in the shape of a cone that gradually shrinks from top to bottom;

[0059] The inner wall of the induction channel 16 is coated with a mirror reflection film;

[0060] The high-pressure water in the high-pressure water chamber 2 is ejected from the lower end of the induction channel 16 to form a micro jet 5 , and the micro jet 5 is surrounded by gas to form a water-gas interface.

[0061] like Figure 3 As shown, the angle between the axis parallel to the incident laser and the axis is The angle between the side wall generatrix of the frustum-shaped induction channel 16 and the axis is The angle between the axis-parallel incident laser and the side wall generatrix of the frustum-shaped induction channel 16 is After being reflected by the mirror on the side wall of the induction channel 16, the laser enters the microjet 5. The laser enters the microjet 5 and forms a total reflection at the interface between the water and the gas in the microjet 5. The angle between the laser entering the microjet 5 and the generatrix of the microjet 5 is .

[0062] like Figure 4 As shown, the angle between the side wall generatrix of the frustum-shaped induction channel 16 and the axis is After the mirror reflection of the side wall of the induction channel 16, the laser forms a total reflection at the water-air interface of the microjet 5. The angle between the laser and the microjet generatrix is .

[0063] like Figure 5 As shown, according to Snell's law, we can know that:

[0064] ;

[0065] but ;

[0066] but ;

[0067] Since the refractive index of water is 1.33, .

[0068] like Figure 6 As shown, the geometric relationship of the left half of the axis parallel to the incident laser is:

[0069] ;

[0070] .

[0071] The geometric relationship of the non-parallel incident laser on the right half is:

[0072] ;

[0073] ;

[0074] .

[0075] Depend on Figure 6 It can be seen that:

[0076] ;

[0077] .

[0078] According to the above derivation process, assuming that the refractive index of the optically dense medium of water is The refractive index of the light-scarce medium of the gas is , with the axis of the frustum-shaped induction channel 16 as a reference, the angle between the side wall generatrix of the frustum-shaped induction channel 16 and the axis should be less than .

[0079] like Figure 6As shown, taking water and air as specific media, the angle between the side wall generatrix of the frustum-shaped induction channel 16 and the axis should be less than 20.6°. Under this angle condition, the frustum-shaped induction channel 16 not only meets the induction conditions of axis-parallel laser, but also meets the induction conditions of axis-non-parallel laser, and the axis-parallel light is the induction boundary condition, that is, the axis-non-parallel incident laser is easier to induce, and it is easier to achieve total reflection of the laser in the microjet formed by the jet outlet 15.

[0080] Preferably, the angle between the side wall generatrix of the frustum-shaped induction channel 16 and the axis is greater than 3°.

[0081] In the induction-type water-guided laser generating device of Example 1, the induction channel 16 is frustum-shaped. This makes it easier for water in the high-pressure water chamber 2 to be introduced into the laser induction channel 16, and it is less likely to cause sudden changes in fluid pressure and turbulence at the entrance. The high-pressure water in the high-pressure water chamber 2 is ejected from the lower end of the induction channel 16 to form a more stable microjet 5. The frustum-shaped induction channel 16 can introduce a larger laser spot into the microjet 5, breaking the current limitation that the minimum laser spot diameter must be smaller than the outer diameter of the microjet 5. It can obtain a water-guided laser microjet 5 with a smaller diameter than the laser spot. The frustum-shaped induction channel 16 greatly reduces the alignment accuracy requirements between the laser and the induction channel 16, thereby reducing the precision requirements and alignment difficulty during water-guided laser coupling.

[0082] The induced water-guided laser generating device of Example 1 not only improves the alignment tolerance of the laser and the induction channel 16 during device operation, greatly reducing the alignment accuracy requirements for the laser and the induction channel 16, but also breaks through the basic principle that the laser spot must be smaller than the outer diameter of the microjet 5 during water-light coupling. It can produce a water-guided laser microjet 5 with an outer diameter smaller than the laser spot diameter. More energy from the outer circle of the laser spot can be introduced into the water-guided laser microjet 5, improving the water-guided laser coupling efficiency, reducing multiple reflections and absorption of the outer circle energy in the water-light coupler 1, and maintaining a lower water temperature and a better water-light coupling effect.

[0083] Example 2: Based on the induction type water-conducting laser generating device of Example 1, Figure 2 As shown, the bottom plate of the housing 10 is further formed with a coaxial jet hole 15 below the induction channel 16;

[0084] The inner diameter of the jet hole 15 is larger than the inner diameter of the lower end of the induction channel 16;

[0085] High-pressure gas is injected into the jet hole 15 to form a high-pressure gas cavity 17;

[0086] High-pressure water is injected from the lower end of the induction channel 16 into the micro jet 5 in the jet hole 15 and is surrounded by high-pressure gas to form a water-gas interface.

[0087] The micro jet 5 passes through the high-pressure air cavity 17 in the jet hole 15 and is ejected toward the bottom of the bottom plate.

[0088] Preferably, the inner diameter of the jet hole 15 first increases and then decreases from the upper end to the lower end;

[0089] The inner diameter of the upper end of the jet hole 15 is smaller than the inner diameter of the lower end of the jet hole 15;

[0090] The bottom plate of the housing 10 is formed with an air inlet 13 that is laterally connected to the middle of the side wall of the jet hole 15 for injecting high-pressure gas into the jet hole 15 to form a high-pressure gas cavity 17 in the jet hole 15 .

[0091] In the induction-type water-guided laser generating device of the second embodiment, the bottom plate of the water-optical coupler 1 housing 10 is further formed with a coaxial jet hole 15 below the induction channel 16 , and the jet hole 15 is used to inject high-pressure gas to form a high-pressure gas cavity 17 .

[0092] Example 3: Based on the induction type water-guided laser generating device of Example 2, the induction type water-guided laser generating device further includes a focusing lens 3;

[0093] The focusing lens 3 is coaxially arranged just above the light-transmitting window 11;

[0094] The collimated laser 4 is irradiated coaxially downward from above the focusing lens 3 .

[0095] Example 4: Based on the induction type water-guided laser generating device of Example 2, the axial length of the induction channel 16 is greater than the inner diameter of the upper end of the induction channel 16.

[0096] Preferably, the inner diameter of the upper end of the induction channel 16 is 100um to 500um.

[0097] Preferably, the inner diameter of the lower end of the induction channel 16 is 20um to 100um.

[0098] Preferably, the water pressure in the high-pressure water chamber 2 is greater than the air pressure in the high-pressure air chamber 17 .

[0099] Preferably, the water pressure in the high-pressure water chamber 2 is greater than 2 MPa.

[0100] The air pressure in the high-pressure air chamber 17 is greater than 2 KPa.

[0101] Preferably, the air pressure in the high-pressure air chamber 17 is 1 / 8 to 1 / 12 of the water pressure in the high-pressure water chamber 2 .

[0102] Preferably, the light-transmitting window 11 is sealed with anti-reflection glass.

[0103] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An induction water-guided laser generating device, characterized in that: including a water optical coupler (1); A high-pressure water chamber (2) is formed in the housing (10) of the water optical coupler (1); A light-transmitting window (11) is formed in the middle of the top plate of the housing (10) for incident laser light; The side wall of the housing (10) is formed with a water inlet (12) for injecting water into the high-pressure water chamber (2); The bottom plate of the housing (10) is formed with an induction channel (16) coaxial with the light-transmitting window (11); The induction channel (16) is in the shape of a cone that gradually shrinks from top to bottom; The inner wall of the induction channel (16) is plated with a mirror reflection film; The high-pressure water in the high-pressure water chamber (2) is ejected from the lower end of the induction channel (16) to form a micro jet (5), and the micro jet (5) is surrounded by gas to form a water-gas interface; The angle between the side wall generatrix of the cone-shaped induction channel (16) and the axis is less than n1 is the refractive index of water as a denser medium, and n2 is the refractive index of the gas as a rarer medium; The frustum-shaped induction channel (16) is used to introduce laser light with a spot diameter larger than the outer diameter of the microjet (5) into the microjet (5).

2. The inductive water-guided laser generating device according to claim 1, characterized in that: The bottom plate of the housing (10) is further formed with a coaxial jet hole (15) below the induction channel (16); The inner diameter of the jet hole (15) is larger than the inner diameter of the lower end of the induction channel (16); High-pressure gas is injected into the jet hole (15) to form a high-pressure gas cavity (17); High-pressure water is injected from the lower end of the induction channel (16) into the micro jet (5) in the jet hole (15), and the micro jet (5) is surrounded by high-pressure gas to form a water-gas interface; The micro jet (5) passes through the high-pressure air cavity (17) in the jet hole (15) and is ejected toward the bottom of the bottom plate.

3. The induction water-guided laser generating device according to claim 2, characterized in that: The inner diameter of the jet hole (15) first increases and then decreases from the upper end to the lower end; The inner diameter of the upper end of the jet hole (15) is smaller than the inner diameter of the lower end of the jet hole (15); The bottom plate of the housing (10) is formed with an air inlet (13) which is laterally connected to the middle of the side wall of the jet hole (15) and is used to inject high-pressure gas into the jet hole (15) to form a high-pressure gas cavity (17) in the jet hole (15).

4. The inductive water-guided laser generating device according to claim 1, characterized in that: The induction-type water-conducting laser generating device further comprises a focusing lens (3); The focusing lens (3) is coaxially arranged directly above the light-transmitting window (11); The collimated laser (4) is coaxially irradiated downward from above the focusing lens (3).

5. The inductive water-guided laser generating device according to claim 1, characterized in that: The axial length of the induction channel (16) is greater than the inner diameter of the upper end of the induction channel (16).

6. The inductive water-guided laser generating device according to claim 1, characterized in that: The angle between the side wall generatrix of the frustum-shaped induction channel (16) and the axis is greater than 3°.

7. The inductive water-guided laser generating device according to claim 1, characterized in that: The gas is air, and the angle between the side wall generatrix of the frustum-shaped induction channel (16) and the axis is less than 20.6°.

8. The inductive water-guided laser generating device according to claim 1, characterized in that: The inner diameter of the upper end of the induction channel (16) is 100um to 500um; The inner diameter of the lower end of the induction channel (16) is 20um to 100um.

9. The inductive water-guided laser generating device according to claim 2, characterized in that: The water pressure in the high-pressure water chamber (2) is greater than the air pressure in the high-pressure air chamber (17); The water pressure in the high-pressure water chamber (2) is greater than 2 MPa; The air pressure in the high-pressure air cavity (17) is greater than 2KPa.

10. The inductive water-guided laser generating device according to claim 2, characterized in that: The air pressure in the high-pressure air chamber (17) is 1 / 8 to 1 / 12 of the water pressure in the high-pressure water chamber (2); and the light-transmitting window (11) is sealed with anti-reflection glass.

Images