Multi-axis motion platform based on motor drive

Abstract

The present invention relates to the field of machine tool technology, and specifically discloses a multi-axis motion platform based on motor drive, which includes: a machine base; a first motion component, slidably connected to the machine base, including a main beam frame with a receiving slot in the middle and a support plate fixed to one end of the main beam frame; a first linear motor, used to drive the first motion component to perform linear motion in the X-axis direction relative to the machine base; a second motion component, integrated in the receiving slot, including a mobile bracket and a rotary component embedded in the mobile bracket; a second linear motor, used to drive the second motion component to perform linear motion in the Y-axis direction based on the sliding fit between the mobile bracket and the receiving slot; and the driving force generated by the second linear motor is arranged to be on the same straight line as the center of mass of the rotary component. The present invention has the advantages of compact structure and high motion accuracy.

Description

Technical Field

[0001] The invention relates to the field of machine tool equipment, and in particular to a multi-axis motion platform driven by a motor. Background Art

[0002] The motion platform is part of the machine tool equipment and is used to drive the workpiece to move to the specified position during processing, testing and other operations. The direction of motion usually includes linear motion of the X-axis, Y-axis, and Z-axis, as well as rotational motion around the X-axis, Y-axis, and Z-axis, and even rotational motion around the X-axis and Y-axis.

[0003] With the widespread application of high-precision positioning multi-axis motion platforms in precision processing fields such as semiconductor manufacturing, such as silicon wafer stages, mask stages, and wafer inspection stages in photolithography machines, multi-axis motion platforms are required to be able to be used in working environments with narrow vertical space. However, existing multi-axis motion platforms usually adopt a multi-axis stacking structure, with the rotating platform stacked on the X-axis or Y-axis. Not only is the structure complex and not conducive to improving the motion response performance of the platform, but it also leads to a larger overall vertical dimension space of the platform, resulting in lower platform motion accuracy, making it difficult to meet the actual application requirements of the semiconductor manufacturing field for high-precision motion platforms. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a multi-axis motion platform based on motor drive, which has a compact and reasonable structure and is conducive to improving the motion accuracy of the platform.

[0005] The present invention proposes a multi-axis motion platform based on motor drive, which comprises:

[0006] Machine base;

[0007] The first motion assembly is slidably connected to the mounting platform of the machine base, and comprises a main beam frame with a receiving through slot in the middle and a support plate fixed to one end of the main beam frame;

[0008] A first linear motor is used to drive the first motion component to perform linear reciprocating motion in the X-axis direction relative to the machine base;

[0009] A second motion assembly is integrated in the receiving slot, the second motion assembly includes a moving bracket and a rotating assembly embedded in the moving bracket, the rotating assembly includes an annular rotating motor that performs rotational motion in the Z-axis direction and a turntable driven by the annular rotating motor;

[0010] The second linear motor is used to drive the second motion component to perform linear reciprocating motion in the Y-axis direction based on the sliding fit between the movable bracket and the accommodating through slot;

[0011] The relative position of the second linear motor and the Y-axis direction is set so that the driving force generated by the second linear motor and the center of mass of the rotary component are on the same straight line, thereby eliminating the twisting torque generated by the driving force of the second linear motor on the rotary component.

[0012] In some preferred embodiments, a set of X-axis guide rails are provided on the mounting table of the machine base, and an X-axis slide seat connected in a sliding fit is provided on each X-axis guide rail, and the X-axis slide seat is fixedly connected to the first motion component.

[0013] In some preferred embodiments, the number of first linear motors is two, each of the first linear motors includes a first motor mover arranged in the X-axis direction and a first motor stator for driving the first motor mover, the two first motor stators are respectively fixed on two opposite sides of the mounting table, and the two first motor movers are correspondingly fixed on two opposite sides of the main beam frame.

[0014] In some preferred embodiments, the main beam frame includes two Y-axis oriented and spaced-apart Y-axis main beams and a first connecting beam connected to one end of the two Y-axis main beams, and the support plate is fixed to the other end of the two Y-axis main beams.

[0015] In some preferred embodiments, a second connecting beam is further provided at the other end of the two Y-direction main beams, the support plate is centrally arranged between the two Y-direction main beams through the second connecting beam, and one end of the support plate extends into the accommodating through groove.

[0016] In some preferred embodiments, a Y-axis guide rail and a Y-axis slide seat slidably connected to the Y-axis guide rail are respectively provided between the two opposite sides of the main beam frame and the movable bracket. The Y-axis guide rail is fixed to the inner wall of the accommodating groove, and the Y-axis slide seat is fixed to the outer side of the movable bracket.

[0017] In some preferred embodiments, a bracket wing is fixed at one end of the movable bracket, and the bracket wing is located above the support plate; the second linear motor includes a second motor mover and a second motor stator for driving the second motor mover, the second motor stator is fixed on the support plate, and the second motor mover is fixed on the bracket wing.

[0018] In some preferred embodiments, the orthographic projections of the support plate and the second motor stator in the Z-axial plane do not coincide with the orthographic projections of the rotary assembly or the rotary assembly in the Z-axial plane.

[0019] In some preferred embodiments, an end plate is provided on the bottom side of the bracket wing plate extending downward relative to the support plate, and the second motor mover is fixed on the vertical side of the end plate.

[0020] In some preferred embodiments, the second motor mover and the end plate as a whole have a preset angle between the geometric midline in the linear motion direction of the second motor mover and the Y-axis direction, so that the geometric midline is on the same straight line as the center of mass determined by the geometric center of the rotating assembly.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The present invention provides a second motion component of a Y-axis linear motion and a rotary component, which is integrated in the receiving groove of the first motion component, and the rotary component is embedded in the mobile bracket. Compared with directly stacking the rotary component on the main beam of the second motion component, the rotary component and the second motion component are in the same motion plane, and the height of the turntable in the Z-axis direction relative to this motion plane is relatively small, which can reduce the twisting torque generated by the linear motion of the second motion component on the rotary component, which is beneficial to improve the rotational motion accuracy of the rotary component. At the same time, the present invention can completely eliminate the twisting torque generated by the driving force of the second linear motor on the rotary component by further arranging the driving force generated by the second linear motor to be in the same straight line as the center of mass of the rotary component, avoid the rotary component from being distorted and deformed due to the twisting torque to generate errors, and further improve the motion accuracy of the platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a three-dimensional structural schematic diagram of the multi-axis motion platform of the present invention.

[0024] Figure 2 It is a side structural schematic diagram of the multi-axis motion platform of the present invention.

[0025] Figure 3 It is a structural schematic diagram of a machine base in a multi-axis motion platform of the present invention.

[0026] Figure 4 It is a three-dimensional structural schematic diagram of the multi-axis motion device in the multi-axis motion platform of the present invention.

[0027] Figure 5 It is another three-dimensional structural schematic diagram of the multi-axis motion device in the multi-axis motion platform of the present invention.

[0028] Figure 6 It is a schematic diagram of the three-dimensional structure of the main beam frame in the motion device.

[0029] Figure 7 It is a three-dimensional structural diagram of the rotating component in the motion device.

[0030] Figure 8 It is a schematic diagram of the half-section structure of the rotating component in the motion device.

[0031] The meanings of the numbers in the figure are as follows: 1-machine base, 11-mounting table, 12-X-axis guide rail, 13-X-axis slide, 2-first motion component, 21-Y-axis main beam, 22-first connecting beam, 23-second connecting beam, 24-support plate, 241-reinforcement rib, 25-Y-axis guide rail, 26-Y-axis slide, 31-first motor mover, 32-first motor stator, 4-second motion component, 41-movable bracket, 411-slide mounting position, 42-bracket wing plate, 43-end plate, 44-motor housing, 45-core shaft, 46-bearing, 47-third motor mover, 48-third motor stator, 49-turntable, 51-second motor mover, 52-second motor stator. DETAILED DESCRIPTION

[0032] In order to further explain the technical means and effects adopted by the present application to achieve the predetermined purpose, the specific implementation methods, structures, features and effects of the present application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0033] The present invention proposes a multi-axis motion platform based on motor drive, which forms a multi-axis motion device by arranging a rotary component providing rotational motion and a main beam frame providing Y-axis linear motion in the same plane. The multi-axis motion device has a compact structure, a small overall longitudinal size, and a high motion accuracy.

[0034] Combination Figure 1-Figure 8 As shown, the multi-axis motion platform mainly includes: a machine base 1; a first motion component 2 slidably connected to the machine base 1, the first motion component 2 includes a main beam frame with a receiving slot in the middle and a support plate 24 fixed to one end of the main beam frame; a first linear motor for driving the first motion component 2 to perform linear reciprocating motion in the X-axis direction relative to the machine base 1; a second motion component 4 integrated in the receiving slot of the first motion component 2, the second motion component 4 includes a mobile bracket 41 and a rotating component embedded in the mobile bracket 41, the rotating component includes an annular rotating motor that rotates in the Z-axis direction and a turntable 49 driven by the annular rotating motor, and the second motion component 4 is slidably connected to the mobile bracket 41; a second linear motor for driving the second motion component 4 to perform linear reciprocating motion in the Y-axis direction relative to the first motion component 2.

[0035] In actual applications, the workpiece to be processed is fixed on the turntable 49 of the rotating component, the first linear motor drives the first motion component 2 to move linearly in the X-axis to produce a preset X-axis displacement, the second linear motor drives the second motion component 4 to move linearly in the Y-axis to produce a preset Y-axis displacement, and the turntable 49 driven by the annular rotating motor of the rotating component rotates a preset azimuth angle to accurately deliver the workpiece to the preset processing station through the multi-axis motion platform.

[0036] Since the second motion component 4 moves as a whole relative to the first motion component 2 in the process of linear motion in the X-axis direction when the first motion component 2 moves linearly in the X-axis direction, for the second motion component 4, the linear motions of the second motion component 4 in the X-axis direction and the Y-axis direction are respectively located in the same motion plane, and no displacement in the Z-axis direction will cause errors.

[0037] The present invention provides a second motion component 4 for Y-axis linear motion and a rotary component, which is integrated in the receiving slot of the first motion component 2, and the rotary component is embedded in the mobile bracket 41. Compared with directly stacking the rotary component on the main beam of the second motion component 4, the rotary component and the second motion component 4 are in the same motion plane, and the height of the turntable 49 in the Z-axis direction relative to the motion plane is small, which can reduce the twisting torque generated by the second motion component 4 on the rotary component during linear motion, which is beneficial to improve the rotational motion accuracy of the rotary component.

[0038] The first motion assembly 2 includes a main beam frame with a receiving slot in the middle and a support plate 24 fixed to one end of the main beam frame. In addition, the main beam frame can be slidably connected to the mounting platform 11 of the machine base 1 by any existing sliding matching structure such as a slide rail matching structure and a static pressure support structure.

[0039] For example, as shown in the drawings, a slide rail matching structure is adopted, specifically, a set of X-axis guide rails 12 are provided on the mounting table 11 of the machine base 1, and each X-axis guide rail 12 is provided with an X-axis slide seat 13 connected in a sliding match, and the X-axis slide seat 13 is fixedly connected to the first motion component 2. Therefore, the main beam frame of the first motion component 2 can perform high-speed reciprocating linear motion relative to the X-axis guide rail 12 fixed on the machine base 1 by using the X-axis slide seat 13, and the motion process is stable.

[0040] There are two first linear motors, each of which includes a first motor mover 31 arranged in the X-axis direction and a first motor stator 32 for driving the first motor mover 31. The two first motor stators 32 are respectively fixed on two opposite sides of the mounting platform 11, and the two first motor movers 31 are correspondingly fixed on two opposite sides of the main beam. In this embodiment, two first linear motors are used to drive from two opposite sides of the main beam, so that the driving force on both sides of the main beam can be kept consistent and the operation accuracy is higher.

[0041] See Figure 4-Figure 6 As shown, the main beam frame of the first motion component 2 includes two Y-axis main beams 21 running in the Y-axis direction and spaced apart and a first connecting beam 22 connected to one end of the two Y-axis main beams 21, and a receiving groove is formed between the two Y-axis main beams 21 and the first connecting beam 22; a support plate 24 is fixed to the other end of the two Y-axis main beams 21.

[0042] In addition, a second connecting beam 23 is provided at the other end of the two Y-axis main beams 21, and the support plate 24 is centrally arranged between the two Y-axis main beams 21 through the second connecting beam 23, so that the structure of the support plate 24 fixed between the two Y-axis main beams 21 is more solid.

[0043] A reinforcing rib 241 is provided between the support plate 24 and the second connecting beam 23 to improve the structural strength of the support plate 24 and prevent the support plate 24 from bending or tilting due to stress, which may affect the motion accuracy of the second motion assembly 4.

[0044] Among them, a Y-axis guide rail 25 and a Y-axis slide 26 slidably connected to the Y-axis guide rail 25 are respectively provided between the two opposite sides of the main beam frame and the mobile bracket 41, the Y-axis guide rail 25 is fixed to the inner side wall of the receiving through groove, and a slide mounting position 411 is respectively provided on the two opposite sides of the mobile bracket 41, and the Y-axis slide 26 is fixed to the slide mounting position 411. That is, the two Y-axis guide rails 25 are respectively fixed to the inner side walls of the two Y-axis main beams 21; the Y-axis slide 26 is fixed to the outer side of the mobile bracket 41.

[0045] In addition, combined Figure 5 and Figure 8 As shown, the annular rotary motor of the rotary assembly specifically includes a motor housing 44 fixedly connected to the movable bracket 41, a core shaft 45 rotatably arranged in the motor housing 44 through a bearing 46, a third motor mover 47 fixed to the outer peripheral side of the core shaft 45, and a third motor stator 48 fixed to the motor housing 44 for driving the third motor mover 47. Among them, a turntable 49 is fixed to one end of the core shaft 45. The third motor stator 48 drives the third motor mover 47 to rotate around the Z-axis direction, driving the core shaft 45 to rotate relative to the motor housing 44 according to the bearing 46, thereby driving the workpiece fixed on the turntable 49 to rotate to the required azimuth angle.

[0046] Combination Figure 5-Figure 7 As shown, a bracket wing 42 is fixed at one end of the movable bracket 41, and the bracket wing 42 is located above the support plate 24; the second linear motor includes a second motor mover 51 and a second motor stator 52 for driving the second motor mover 51, the second motor stator 52 is fixed on the support plate 24, and the second motor mover 51 is fixed on the bracket wing 42.

[0047] Considering that the maximum stroke or maximum displacement of the second motion component 4 in the Y-axis direction is relatively large, in order to allow the multi-axis motion platform to have a better scope of application, the orthographic projection of the support plate 24 and the second motor stator 52 in the Z-axis plane is set not to overlap with the orthographic projection of the rotary component or the rotary component in the Z-axis plane. That is, the support plate 24 and the second motor stator 52 are offset relative to the rotary component as a whole, specifically, the position of the support plate 24 and the second motor stator 52 as a whole is lower or closer to the base 1 than the position of the bottom side of the rotary component. In this way, during the linear motion of the second motion component 4 in the Y-axis direction, the rotary component can move in the Y-axis direction to a position partially overlapping with the support plate 24, so that the second motion component 4 has a larger maximum stroke or maximum displacement in the Y-axis direction.

[0048] The position of the second motor stator 52 determines the position of the second linear motor. Since the second motor stator 52 is offset relative to the rotary assembly, if the second linear motor is set parallel to the Y axis, the second linear motor outputs a driving force F in the Y axis, which will form a height difference H with the center of mass of the rotary assembly in the Z axis, causing the driving force F to generate a twisting moment T on the rotary assembly, and the twisting moment T is equal to the driving force F multiplied by the height difference H. This twisting moment T may cause the rotary assembly to twist and deform, thereby causing a large error in the workpiece fixed on the turntable 49, thereby reducing the motion accuracy of the multi-axis motion platform.

[0049] In order to reduce or eliminate the twisting torque T generated by the second motion component 4 on the rotary component during the Y-axis linear motion process, and to prevent the rotary component from being twisted and deformed due to the twisting torque T, thereby affecting the rotation accuracy of the rotary component, the present invention sets the relative position of the second linear motor and the Y-axis so that the driving force F generated by the second linear motor and the center of mass of the rotary component are on the same straight line, thereby achieving the purpose of eliminating the twisting torque generated by the driving force of the second linear motor on the rotary component. At this time, the height difference H between the driving force F and the center of mass of the rotary component is 0, thereby eliminating the twisting torque generated by the driving force F on the rotary component.

[0050] The attached figure takes the U-shaped slotted linear motor as an example. The I-shaped second motor mover 51 is located between the U-shaped second motor stators 52. The second linear motor has a small inertia and can provide a linear reciprocating motion with a high acceleration.

[0051] In order to more firmly fix the second motor mover 51 , an end plate 43 is provided extending downwardly from the bottom side of the bracket wing plate 42 relative to the support plate 24 , and the second motor mover 51 is fixed to the vertical side surface of the end plate 43 .

[0052] In order to make the center of mass of the rotary assembly and the driving force F generated by the second linear motor to be in the same straight line for more objective implementation, in a preferred embodiment, this can be achieved by adjusting the relative fixed position of the second linear motor and the Y-axis direction:

[0053] The overall shape of the rotating component is a circular ring, and the shape is relatively regular. The center of mass of the rotating component can be considered to be the geometric center of the rotating component.

[0054] The direction of the driving force F generated by the second linear motor can be approximately considered to be determined by the geometric center line of the second motor mover 51 and the end plate 43 as a whole in the linear motion direction of the second motor mover 51. It can be understood that the geometric center line refers to a straight line determined by the intersection of the center lines of the second motor mover 51 and the end plate 43 as a whole in the X-axis direction and the Z-axis direction in the linear motion direction of the second motor mover 51.

[0055] Therefore, it is only necessary to fix the position of the second linear motor as a whole with the second motor mover 51 and the end plate 43 at a preset angle between the geometric center line of the linear motion direction of the second motor mover 51 and the Y-axis direction, so that the center of mass (geometric center) of the rotating component and the geometric center line are on the same straight line, which is easy to implement objectively.

[0056] The support plate 24 can be set to have a preset angle relative to the Y-axis direction, that is, the connection line between the support plate 24 and the center of mass of the rotary assembly and the Y-axis passing through the center of mass of the rotary assembly can form a preset angle, and then the second motor stator 52 can be directly fixed on the support plate 24; or, the support plate 24 is set parallel to the Y-axis, and the position of one end of the second motor stator 52 close to the rotary assembly is slightly higher than the other end so that the second motor stator 52 has a preset angle with the Y-axis direction. The position of the second motor mover 51 fixed to the end plate 43 is adjusted accordingly with the second motor stator 52, so as to ensure that the second motor stator 52 has a preset angle with the relative Y-axis direction.

[0057] Since the height difference H between the second linear motor and the rotary assembly as a whole is not very large, the preset angle is usually between 0.05-2° and can be set or adjusted as needed.

[0058] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A multi-axis motion platform based on motor drive, characterized in that: include: Machine base (1); A first motion assembly (2) is slidably connected to a mounting platform (11) of the machine base (1), comprising a main beam frame having a receiving slot in the middle and a support plate (24) fixed to one end of the main beam frame; A first linear motor, used for driving the first motion component (2) to perform linear reciprocating motion in the X-axis direction relative to the machine base (1); A second motion component (4) is integrated and arranged in the receiving groove, the second motion component (4) comprises a moving bracket (41) and a swivel component embedded in the moving bracket (41), the swivel component comprises an annular rotary motor that performs rotational motion in the Z-axis direction and a turntable (49) driven by the annular rotary motor, a bracket wing plate (42) is fixed to one end of the moving bracket (41), the bracket wing plate (42) is located above the support plate (24), and an end plate (43) is provided on the bottom side surface of the bracket wing plate (42) relative to the support plate (24) and extends downward; A second linear motor is fixed on the support plate (24) and is used to drive the second motion component (4) to perform linear reciprocating motion in the Y-axis direction based on the sliding fit between the movable bracket (41) and the accommodating through slot, the second linear motor comprising a second motor mover (51) and a second motor stator (52) used to drive the second motor mover (51), the second motor stator (52) being fixed on the support plate (24), and the second motor mover (51) being fixed on the vertical side surface of the end plate (43); The support plate (24) and the second motor stator (52) are arranged in a staggered manner relative to the rotary assembly, and are located lower than the bottom side surface of the rotary assembly; The second motor mover (51) and the end plate (43) as a whole have a preset angle between the geometric center line of the second motor mover (51) in the linear motion direction and the Y-axis direction, so as to set the driving force generated by the second linear motor and the center of mass of the rotary component to be on the same straight line to eliminate the twisting torque generated by the driving force of the second linear motor on the rotary component.

2. The multi-axis motion platform according to claim 1, characterized in that: A group of X-axis guide rails (12) are provided on the mounting platform (11) of the machine base (1), and each X-axis guide rail (12) is provided with an X-axis slide seat (13) which is slidably connected thereto, and the X-axis slide seat (13) is fixedly connected to the first motion component (2).

3. The multi-axis motion platform according to claim 1, characterized in that: The number of the first linear motors is two, each of the first linear motors comprises a first motor mover (31) arranged in the X-axis direction and a first motor stator (32) for driving the first motor mover (31), the two first motor stators (32) are respectively fixed on two opposite sides of the mounting platform (11), and the two first motor movers (31) are correspondingly fixed on two opposite sides of the main beam frame.

4. The multi-axis motion platform according to claim 1, characterized in that: The main beam frame comprises two Y-axis oriented main beams (21) spaced apart and a first connecting beam (22) connected to one end of the two Y-axis main beams (21); and a supporting plate (24) is fixed to the other end of the two Y-axis main beams (21).

5. The multi-axis motion platform according to claim 4, characterized in that: A second connecting beam (23) is further provided at the other end of the two Y-direction main beams (21); the support plate (24) is centrally arranged between the two Y-direction main beams (21) via the second connecting beam (23); and one end of the support plate (24) extends into the accommodating through groove.

6. The multi-axis motion platform according to claim 1, characterized in that: A Y-axis guide rail (25) and a Y-axis slide seat (26) slidably connected to the Y-axis guide rail (25) are respectively provided between the two opposite sides of the main beam frame and the movable bracket (41); the Y-axis guide rail (25) is fixed to the inner side wall of the accommodating through groove, and the Y-axis slide seat (26) is fixed to the outer side of the movable bracket (41).

7. The multi-axis motion platform according to claim 1, characterized in that: The orthographic projections of the support plate (24) and the second motor stator (52) in the Z-axial plane do not coincide with the orthographic projection of the rotary component in the Z-axial plane.

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