Ultrasonic vibration cutting tool

Abstract

The invention discloses an ultrasonic vibration cutting tool, and belongs to the technical field of ultrasonic vibration machining. The cutter assembly comprises a first clamping flange, a second clamping flange, a cutter and an ultrasonic vibrator, and the two clamping flanges and the cutter are fixedly connected and form an ultrasonic vibrator mounting part for accommodating the ultrasonic vibrator; a conducting layer and an insulating layer are arranged between the ultrasonic vibrator and the two clamping flanges, after the cutter is tightly fixed on the cutter holder by the fixing nut, the cutter is matched with the conducting layer to form an ultrasonic vibrator grounding end circuit, and the other side of the ultrasonic vibrator abuts against the power supply ejector pin; a cylindrical mounting part is arranged on the first clamping flange and provided with a conical matching hole matched with the conical mounting part of the tool apron, a plurality of Z-shaped elastic connecting sets are formed between the cylindrical mounting part and the conical matching hole, the design of through holes in special shapes has obvious buffering and vibration isolation effects, and the tool is divided into a mounting part and a vibration part during working. During assembly, the fixing nut is only in contact with the mounting part, so that the inhibition effect of mounting factors on the amplitude of the ultrasonic cutting knife is greatly weakened, and the cutting efficiency and quality are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic vibration machining, and in particular to an ultrasonic vibration cutting tool, and in particular to an ultrasonic vibration cutting tool for cutting a workpiece such as a semiconductor wafer or an optical device wafer. Background Art

[0002] In recent years, with the vigorous development of new energy vehicles, consumer electronics, high-speed trains, the Internet and other industries, the market demand for high-performance, high-power and high-efficiency chips has been increasing day by day. As a result, the requirements for miniaturization and low cost of core equipment for semiconductor packaging such as dicing machines have also been increasing simultaneously.

[0003] As the core process of chip packaging, the processing efficiency and quality of the dicing process directly determine the manufacturing cost and chip production capacity of the chip. In recent years, with the development of chip stacking technology, in order to obtain more stacking layers within a limited volume, the thickness of a single chip has become thinner and thinner. The thinning of wafer thickness brings many challenges to the cutting work. Traditional grinding wheel cutting is based on the high-speed grinding mechanism to cut wafers. Its processing process has defects such as large edge collapse, wide cutting path, poor cutting surface quality, low processing efficiency, and reduced mechanical strength of materials after dicing. In addition, with the innovative development of engineering material technology, third-generation semiconductor materials represented by silicon carbide and gallium arsenide have been widely used in the field of chip manufacturing. However, the Mohs hardness of materials such as silicon carbide is relatively high, which undoubtedly further increases the difficulty of cutting with cutting tools.

[0004] In order to solve the above problems, ultrasonic vibration cutting tools have been proposed in the art, specifically, an ultrasonic transducer is combined with a cutting tool, a vibration signal is generated by applying an AC voltage to the ultrasonic transducer, and then ultrasonic vibration is imparted to the cutting tool while cutting. For example, Chinese patent CN 101318359 B discloses a cutting device, including a tool clamping flange, a tool seat and a cutting tool, the tool seat is mounted on the main shaft and is equipped with a first ultrasonic vibrator that imparts ultrasonic vibration to the cutting tool, the tool clamping flange is arranged on the tool seat and clamps the cutting tool together with it, and a second ultrasonic vibrator that imparts ultrasonic vibration to the cutting tool is arranged on the tool clamping flange. In order to solve the problem that it is difficult for traditional ultrasonic vibration cutting tools to transmit the ultrasonic vibration generated by the ultrasonic vibrator to the cutting tool with sufficient amplitude, the patent forms a plurality of through holes on the flange portion of the tool seat, and a plurality of through holes are formed on the tool clamping flange, so that the radial rigidity of the tool seat and the tool clamping flange is reduced, so that the ultrasonic vibration generated by the ultrasonic vibrator can be efficiently transmitted without suppressing its amplitude. Although the cutting tool disclosed in the patent has ultrasonic vibration with large amplitude in the radial direction, when it is assembled on the rotating spindle and the end is locked with a fastening nut, the relatively configured tool clamping flange and the center of the tool seat will still produce considerable vibration in the working state, so the part where the fastening nut used for assembly contacts the tool will also vibrate, which will have a significant inhibitory effect on the amplitude of the ultrasonic cutting knife, thereby weakening the amplitude of the tool and affecting the cutting effect. This may be because although through holes are designed on the flange part of the tool seat and the tool clamping flange to reduce the radial rigidity, such relatively simple through holes cannot provide very good buffering and vibration isolation effects.

[0005] Therefore, it is necessary to make a more detailed design of the buffer and vibration isolation structure on the clamping structure of the cutting tool to solve the problem of the installation factors suppressing the amplitude of the ultrasonic cutting tool. Summary of the invention

[0006] The purpose of the present invention is to solve the problems existing in the prior art and to provide an ultrasonic vibration cutting tool, which combines an ultrasonic transducer with a cutting tool. By designing a Z-shaped elastic connection group with vibration reduction and buffering effects, the tool can obtain sufficient ultrasonic amplitude, greatly weakening the inhibitory effect of installation factors on the amplitude of the ultrasonic vibration cutting tool, thereby ensuring cutting quality and efficiency.

[0007] In order to achieve the above technical objectives, the present invention is implemented through the following technical solutions: an ultrasonic vibration cutting tool, which is installed on a tool holder through a fixing nut and is equipped with an ultrasonic vibrator that imparts ultrasonic vibration to the cutting tool, the tool holder is installed on the end of a rotating spindle, and the rotating spindle is rotatably supported on a spindle housing; it is characterized in that the ultrasonic vibration cutting tool includes a first clamping flange, a second clamping flange, a cutting tool and an ultrasonic vibrator, the first and second clamping flanges are relatively arranged and form a cutting tool fixing mounting portion for accommodating the cutting tool at the outer periphery, and an ultrasonic vibrator mounting portion for accommodating the ultrasonic vibrator is reserved in the center; the first clamping flange is installed in cooperation with the tool holder, and the first clamping flange is mounted on the tool holder. A flange portion is provided, and a conical boss and a cylindrical mounting portion are formed by protruding from the center of the flange portion to both sides; a conical matching hole is opened at the center of the cylindrical mounting portion, and a plurality of Z-shaped elastic connection groups are formed between the cylindrical mounting portion and the conical matching hole through the openings; a group of Z-shaped elastic connection groups is composed of two relatively arranged Z-shaped elastic connecting parts; a second clamping flange has a cylindrical matching hole opened at the center, and the cylindrical matching hole and the cylindrical mounting portion are enclosed to form an ultrasonic vibrator mounting portion; the ultrasonic vibrator has an axial polarization direction, electrodes are provided on its first and second polarization planes, insulators are provided on its first and second matching surfaces, and the second polarization plane is connected to the first clamping flange through a conductive layer.

[0008] Furthermore, the first clamping flange, the second clamping flange and the cutting blade are fixed together as one body.

[0009] Furthermore, after the ultrasonic vibration cutting tool is assembled on the tool holder, the first polarization surface is in close contact with the side surface of the tool holder, and the power supply ejector pin is against the electrode of the first polarization surface.

[0010] Preferably, the number of the Z-shaped elastic connection groups is six, and the Z-shaped elastic connection groups divide the ultrasonic vibration cutting tool into a vibration part and a mounting part.

[0011] Furthermore, the tapered matching hole is adapted to the shape of the tapered mounting portion on the surface of the tool holder, and the first clamping flange is mounted in cooperation with the tool holder through the tapered matching hole.

[0012] Furthermore, after the ultrasonic vibration cutting tool is assembled on the tool holder, the side surface of the mounting portion of the cylindrical mounting portion is tightly fitted with the side surface of the tool holder.

[0013] Furthermore, the outer peripheral portion of the flange portion is recessed inward to form a first tool mounting portion and a first clamping surface in contact with the clamped cutting tool; the second clamping flange is fixed to the flange portion of the first clamping flange through its flange surface arranged opposite to the first clamping flange, and a second tool mounting portion and a second clamping surface for clamping the cutting tool are formed on the side of the outer peripheral portion of the flange surface.

[0014] Furthermore, the non-contact coupler transmits the high-frequency electrical excitation signal generated by the ultrasonic power supply to the ultrasonic vibrator of the ultrasonic vibration cutting tool. The power supply wire led out from the power supply coil of the non-contact coupler is connected to the power supply pin, and the led-out grounding wire is connected to the tool holder. The conductive layer, the first clamping flange and the tool holder together constitute the ultrasonic vibrator grounding terminal circuit.

[0015] The beneficial effects of the present invention are: 1. The ultrasonic cutting tool disclosed in the present application is composed of a first and a second clamping flange, a grinding wheel cutter and an ultrasonic vibrator. A plurality of Z-shaped elastic connection groups are formed between the cylindrical mounting portion of the first clamping flange and the conical matching hole through openings. The through-hole design with a special morphology has obvious buffering and vibration isolation effects, so that when the ultrasonic cutting tool is working, the tool is clearly divided into a mounting portion located in the center and a vibration portion located in the periphery. The vibration of the mounting portion is very small. Therefore, when the ultrasonic vibration cutting tool is assembled to the tool seat by using a fixing nut, since the fixing nut is only in contact with the mounting portion, the fixing nut will not vibrate significantly. This can greatly weaken the inhibitory effect of the ultrasonic cutting tool amplitude caused by the installation factor, ensure that the cutting tool can obtain a sufficiently large amplitude as much as possible, reduce the cutting resistance generated by the cutting tool during operation, and use the ultrasonic cutting tool to easily cut some high-hardness and difficult-to-cut thin materials; 2. In the present application, the first and second clamping flanges and the grinding wheel cutter constituting the ultrasonic cutting tool are fixedly connected as a whole. Compared with the traditional tool that uses the clamping force of the clamping member to clamp and limit the position of the grinding wheel cutter, this fixed connection form can avoid the relative sliding between the grinding wheel cutter and the clamping member due to the large amplitude during the working process, thereby ensuring that the ultrasonic vibration acting on the first / second clamping flange can be effectively transmitted to the grinding wheel cutter; 3. The ultrasonic vibration cutting tool and the tool holder are installed in combination using a conical matching surface, that is, the conical matching hole of the first clamping flange is installed in combination with the conical mounting portion of the tool holder, so that the tool has good coaxiality with the rotating spindle and is easy to disassemble. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an exploded structural diagram of an ultrasonic vibration cutting tool; Figure 2 is an axonometric view of the first clamping flange; Figure 3 It is a structural cross-sectional view showing the state of separating some parts of the ultrasonic vibration cutting tool mounting mechanism; Figure 4 The structure sectional view of the ultrasonic vibration cutting tool mounting mechanism is shown in the assembled state; Figure 5 is the radial vibration mode diagram of the ultrasonic vibration cutting tool; Figure 6 1 is a modal vibration diagram of a conventional ultrasonic knife (left) and an ultrasonic vibration cutting knife disclosed in Example 1 (right); Figure 7 The deformation of the Z-shaped elastic connection group on the ultrasonic vibration cutting tool prepared in Example 1 at different times in a single cycle under electrical excitation; Figure 8 The deformation of the Z-shaped elastic connection group on the ultrasonic vibration cutting tool prepared in Example 1 at different times in a single cycle under electrical excitation; Fig. 9 is a radial vibration modal diagram of the ultrasonic vibration cutting tool prepared in Comparative Example 1; Among them, 1-fixing nut, 2-ultrasonic vibration cutting tool, 3-tool holder, 6-ultrasonic power supply, 7-non-contact coupler, 8-bolt, 9-spindle housing, 10-rotating spindle, 12-grinding wheel cutter, 13-first clamping flange, 14-conductive layer, 16-second clamping flange, 17-outer insulator, 18-ultrasonic vibrator, 19-inner insulator, 21-threaded part, 23-conical mounting part, 24-first iron core, 25-power supply ejector, 26-second induction coil, 27 first wire, 28-second iron core, 29-wire one, 30-first induction coil, 31-wire two, 34-side of tool holder, 35-second wire; 121-matching hole; 131-conical boss, 132-flange portion, 133-first clamping surface, 134-first tool mounting portion, 135-conical matching hole, 136-cylindrical mounting portion, 137-Z-shaped elastic connection group, 137a-Z-shaped elastic connection member 1, 137b-Z-shaped elastic connection member 2, 138-side surface of mounting portion; 161 - flange surface, 162 - second tool mounting portion, 163 - second clamping surface, 164 - cylindrical matching hole; 181 - first polarization plane, 182 - first mating surface, 183 - second polarization plane, 184 - second mating surface. DETAILED DESCRIPTION

[0017] The following examples further illustrate the content of the present invention, but should not be construed as limiting the present invention. Without departing from the essence of the present invention, modifications and substitutions made to the methods, steps or conditions of the present invention all fall within the scope of the present invention. Example

[0018] The present embodiment provides an ultrasonic vibration cutting tool 2, comprising a first clamping flange 13, a second clamping flange 16, a grinding wheel cutter 12 and an ultrasonic vibrator 18. The first clamping flange 13, the second clamping flange 16 and the grinding wheel cutter 12 are fixed as a whole. The first clamping flange 13 and the second clamping flange 16 are arranged opposite to each other and enclosed at the outer periphery to form an annular grinding wheel cutter fixing and mounting portion. The grinding wheel cutter 12 is fixed in the grinding wheel cutter fixing and mounting portion between the first / second clamping flanges 13 and 16. After the first / second clamping flanges 13 and 16 are fixed, an ultrasonic vibrator mounting portion is left in the center of the first / second clamping flanges 13 and 16, and the ultrasonic vibrator 18 is adapted to be installed in the ultrasonic vibrator mounting portion. The ultrasonic vibrator 18 imparts ultrasonic vibration to the grinding wheel cutter 12.

[0019] The first clamping flange 13 cooperates with the tool holder 3, and the tool holder 3 is installed at the end of the rotating spindle 10, and the rotating spindle 10 is rotatably supported by the spindle housing 9. The first clamping flange 13 is composed of the following parts: a circular flange portion 132 is provided thereon, and a conical boss 131 and a cylindrical mounting portion 136 are formed from the center of the flange portion 132 along the axial direction of the flange portion 132 to protrude to both sides; the outer peripheral portion of the flange portion 132 is recessed inward to form a first tool mounting portion 134 and an annular first clamping surface 133 that contacts the clamped grinding wheel cutter 12; a conical matching hole 135 is opened in the center of the cylindrical mounting portion 136, and the conical matching hole 135 is adapted to the shape of the conical mounting portion 23 on the surface of the tool holder 3, and the first clamping flange 13 is matched and mounted with the tool holder 3 through the conical matching hole 135.

[0020] Several Z-shaped elastic connection groups 137 are formed by opening holes between the cylindrical mounting portion 136 and the tapered matching hole 135. Specifically, 12 T-shaped special-shaped holes are drilled at equal intervals around the cylindrical mounting portion 136 and penetrate the two sides thereof. From the figure, it is equivalent to that a group of Z-shaped elastic connection groups 137 is formed by the Z-shaped elastic connection member 1 137a and the Z-shaped elastic connection member 2 137b. Therefore, a total of 6 groups of Z-shaped elastic connection groups 137 are formed on the cylindrical mounting portion 136 disclosed in this embodiment. The purpose of providing the Z-shaped elastic connection group 137 on the cylindrical mounting portion 136 is to divide the ultrasonic cutting tool into two parts, the vibration part located at the periphery and the mounting part located at the center, so that the mounting part can only contact with the mounting part without affecting the vibration of the vibration part, thereby minimizing the inhibitory effect of the mounting factor on the ultrasonic vibration cutting tool, ensuring that the ultrasonic cutting tool can obtain the maximum amplitude, and can easily complete the cutting work of difficult-to-cut materials under the same power supply.

[0021] In addition, when the ultrasonic cutting tool is mounted on the tool holder 3 , the mounting portion side surface 138 of the cylindrical mounting portion 136 is tightly fitted with the tool holder side surface 34 .

[0022] The second clamping flange 16 is matched and fixed with the first clamping flange 13. The second clamping flange 16 is in the shape of an annulus and has a cylindrical matching hole 164 in the center. After the first / second clamping flanges 13 and 16 are matched and fixed, the cylindrical matching hole 164 and the cylindrical mounting portion 136 enclose an ultrasonic vibrator mounting portion for accommodating the ultrasonic vibrator 18. The second clamping flange 16 is fixed with the flange portion 132 of the first clamping flange 13 through its flange surface 161 arranged opposite to the first clamping flange 13. A second tool mounting portion 162 and a second clamping surface 163 for clamping the grinding wheel cutter 12 are formed on the side surface of the outer peripheral portion of the flange surface 161.

[0023] After the first / second clamping flanges 13 and 16 are fixed, the opposing first clamping surface 133, the first tool mounting portion 134, the second clamping surface 163 and the second tool mounting portion 162 cooperate to form an ultrasonic vibrator mounting portion for fixing the ultrasonic vibrator to the first / second clamping flanges 13 and 16.

[0024] The grinding wheel cutter 12 is in the shape of a ring, and is a ring-shaped structure formed by mixing abrasive grains made of materials such as diamond into a binder and sintering them. According to the different binders and process differences, the abrasive grains can be mixed into the resin binder material to form a ring-shaped resin binder tool under high temperature and high pressure; or the abrasive grains can be mixed into the metal binder and fired at high temperature to form a ring-shaped metal binder tool; or the abrasive grains can be electroplated onto the side of the base formed of materials such as aluminum by means of metal plating such as nickel to form an electroformed tool. The diameter of the matching hole 121 of the grinding wheel cutter 12 is adapted to the diameter of the first tool mounting portion 134 of the first clamping flange 13 and the diameter of the second tool mounting portion 162 of the second clamping flange 16 so as to achieve consolidation of the three.

[0025] In this embodiment, it is very important that since the first / second clamping flanges 13, 16 and the grinding wheel cutter 12 are solidified as a whole, no relative sliding will occur between the grinding wheel cutter 12 and the clamping flanges during the cutting process, which can ensure that the ultrasonic vibration acting on the first / second clamping flanges 13, 16 can be effectively transmitted to the grinding wheel cutter 12.

[0026] The ultrasonic vibrator 18 is a circular ring structure, and its polarization direction is axial. It is formed by piezoelectric ceramics such as barium titanate, lead zirconate titanate, and lithium tantalate. The polarization surfaces on both sides of the ultrasonic vibrator 18, namely the first polarization surface 181 and the second polarization surface 183, are electroplated with circular ring electrodes. The outer and inner cylindrical mating surfaces of the ultrasonic vibrator 18, namely the first mating surface 182 and the second mating surface 184, are covered with an outer insulator 17 and an inner insulator 19. The second polarization surface 184 is connected to the flange portion 132 of the first clamping flange 13 by means of the conductive layer 14. After the ultrasonic cutting tool is assembled on the tool holder 3, the first polarization surface 181 is in close contact with the side surface 34 of the tool holder, and the power supply pin 25 is against the electrode of the first polarization surface 181, forming the power supply end of the ultrasonic vibrator.

[0027] In this embodiment, the high-frequency electrical excitation signal generated by the ultrasonic power supply 6 is transmitted to the ultrasonic vibrator 18 of the ultrasonic vibration cutting tool by means of the non-contact coupler 7. Specifically, the structure of the non-contact coupler 7 is as follows: it includes a first iron core 24, a second iron core 28, and a second induction coil 26, the second induction coil 26 is wound on the second iron core 28, the second iron core 28 is fixed to the spindle housing 9 by bolts 8, and two wires of the ultrasonic power supply 6, namely the first wire 27 and the second wire 35, are connected to the second induction coil 26; the first induction coil 30 is wound on the first iron core 24 and installed at the rear end of the tool holder 3, and two wires are led out from both ends of the first induction coil 30, namely, wire one 29 and wire two 31, wire one 29 is connected to the power supply pin 25 as a voltage end, and wire two 31 is connected to the tool holder 3 as a ground end.

[0028] When the ultrasonic cutting tool is installed on the tool holder 3, the conical matching hole 135 of the first clamping flange 13 is matched with the conical mounting portion 23 of the tool holder 3, and then the fixing nut 1 is matched with the threaded portion 21 at the end of the tool holder 3 and threadedly connected, and the fixing nut 1 is tightened so that the ultrasonic cutting tool is tightly fixed on the tool holder 3. At this time, the first polarization plane 181 of the ultrasonic vibrator is pressed against the power supply pin 25, and the conductive layer 14, the first clamping flange 13 and the tool holder 3 together constitute the ultrasonic vibrator grounding terminal circuit. The ultrasonic power supply 6 generates an AC signal of a predetermined frequency, which is transmitted to the second induction coil 26 through the non-contact electromagnetic coupler 7. The predetermined frequency AC voltage is applied to the ultrasonic vibrator 18 through the rotating first induction coil 30, the wire 1 29, and the power supply pin 25 to perform ultrasonic vibration. The ultrasonic vibrator 18 generates a radial vibration signal and transmits it to the grinding wheel cutter 12, so that the grinding wheel cutter 12 performs ultrasonic vibration in the radial direction, and finally achieves effective cutting of the object to be cut.

[0029] The radial vibration characteristics of the ultrasonic vibration cutting tool were analyzed using the finite element analysis software COMSOL Multiphysics. The ultrasonic vibrator 18 was made of lead zirconate titanate. The first clamping flange 13 and the second clamping flange 16 were made of aluminum alloy with an outer diameter of 52 mm. Six groups of Z-shaped elastic connection groups 137 were set on the cylindrical mounting portion 136 of the first clamping flange 13. The modal analysis was performed to obtain the vibration mode of the ultrasonic vibration cutting tool (see Figure 5 ), it can be seen from the vibration modal diagram of the ultrasonic vibration cutting tool that due to the existence of the Z-shaped elastic connection group 137, the ultrasonic vibration cutting tool is divided into two parts: a peripheral vibration part and a central mounting part. During installation, since the fixing nut 1 can only contact the mounting part in the center of the tool, the inhibitory effect of the installation factors on the ultrasonic vibration cutting tool can be minimized, and the cutting tool can therefore obtain a sufficiently large amplitude.

[0030] Comparing the modal vibration diagrams of the conventional ultrasonic knife (which is not provided with a through hole structure for buffering and vibration isolation) and the ultrasonic vibration cutting knife disclosed in this embodiment ( Figure 6 ) It can be found that for the ordinary ultrasonic knife structure, when it vibrates, because there is no vibration isolation buffer structure to play a buffering and vibration isolation role, when it is electrically excited, the entire tool vibrates, and the maximum vibration displacement is located at the center matching hole. Therefore, when it is installed on a shaft component for use, the contact between the fixed component (such as the fixing nut mentioned in this embodiment) and the ultrasonic knife will produce serious mechanical coupling, thereby suppressing the amplitude response of the tool. After setting a Z-shaped elastic connection group on it, with the help of the decoupling ability of the Z-shaped elastic connection structure, the ultrasonic vibration cutting knife is clearly divided into two parts: the vibration part and the installation part. When electrically excited, only the vibration part vibrates, and the installation part has no vibration signal. At this time, when the ultrasonic knife is clamped and fixed on the shaft component, the mechanical coupling between the fixing nut and the ultrasonic knife is greatly reduced, so that the ultrasonic knife can obtain a better amplitude response.

[0031] Comparative Example 1 The only difference between this comparative example and Example 1 is that the hole opened between the cylindrical mounting portion 136 and the tapered matching hole 135 is a conventional arc-shaped hole, specifically, 6 arc through holes are drilled on the cylindrical mounting portion 136 at equal intervals around the circumference.

[0032] Figure 7 The deformation of the Z-shaped elastic connection group on the ultrasonic vibration cutting tool disclosed in Example 1 at different moments in a single cycle of electrical excitation is shown. From the figure, when the ultrasonic vibration cutting tool is electrically excited, the vibration part contracts and expands in the radial direction, causing the Z-shaped elastic connection group to undergo elastic bending deformation, and the mechanical vibration transmitted inward is converted into elastic potential energy of the elastic connection beam by the Z-shaped elastic connection structure. Therefore, when the ultrasonic knife is electrically excited, only the vibration part vibrates, and the mounting part is in a static state.

[0033] The connection deformation of the arc-shaped through hole of the ultrasonic knife disclosed in the comparative example at different moments in a single cycle of electrical excitation is as follows: Figure 8 As shown, combined Figure 7 and Figure 8 It can be seen that although the arc-shaped through-hole structure effectively reduces the radial stiffness of the ultrasonic vibration cutting tool, the ultrasonic knife still has a vibration signal transmitted to the installation position when it is excited. When the ultrasonic knife is clamped and fixed on the shaft component, the ultrasonic knife vibration will still produce mechanical coupling with the outside world, thereby losing ultrasonic energy. Fig. 9 ) It can be seen that when the ultrasonic vibration cutting tool with an arc-shaped through-hole structure vibrates, its radial direction does not expand and contract uniformly. When the tool vibrates, shearing will occur inside it. The appearance of shear stress may cause the tool blade to break. The vibration isolation and buffering capacity given by the Z-shaped elastic connection structure perfectly solves this problem, minimizes the mechanical coupling between the ultrasonic knife vibration and the shell, enhances the ultrasonic energy transmitted to the tool, and can effectively improve the amplitude response of the ultrasonic knife.

[0034] The above shows and describes the basic principles, main features and advantages of the present invention. However, the above is only a specific embodiment of the present invention, and the technical features of the present invention are not limited thereto. Any other implementation methods derived by any technician in the field without departing from the technical solution of the present invention should be included in the patent scope of the present invention.

Claims

1. An ultrasonic vibration cutting tool, which is mounted on a tool holder through a fixing nut and is provided with an ultrasonic vibrator for imparting ultrasonic vibration to the cutting tool, the tool holder being mounted on the end of a rotating spindle, and the rotating spindle being rotatably supported on a spindle housing; characterized in that: The ultrasonic vibration cutting tool comprises a first clamping flange, a second clamping flange, a cutting blade and an ultrasonic vibrator. The first and second clamping flanges are arranged opposite to each other and form a cutting blade fixing installation part for accommodating the cutting blade at the outer periphery, and an ultrasonic vibrator installation part for accommodating the ultrasonic vibrator is reserved at the center. The first clamping flange is mounted in cooperation with the knife seat, and is provided with a flange portion, from the center of the flange portion to both sides protruding to form a conical boss and a cylindrical mounting portion; a conical matching hole is opened in the center of the cylindrical mounting portion, and a plurality of Z-shaped elastic connection groups are formed between the cylindrical mounting portion and the conical matching hole through the opening; A set of Z-shaped elastic connection groups is composed of two Z-shaped elastic connection members arranged opposite to each other; The second clamping flange has a cylindrical matching hole at its center, and the cylindrical matching hole and the cylindrical mounting portion enclose an ultrasonic vibrator mounting portion; The ultrasonic vibrator has an axial polarization direction, electrodes are arranged on its first and second polarization planes, insulators are arranged on its first and second matching surfaces, and the second polarization plane is connected to the first clamping flange through a conductive layer.

2. An ultrasonic vibration cutting tool as claimed in claim 1, characterized in that: The first clamping flange, the second clamping flange and the cutting blade are fixed together as one body.

3. An ultrasonic vibration cutting tool as claimed in claim 1, characterized in that: After the ultrasonic vibration cutting tool is assembled on the tool holder, the first polarization surface is in close contact with the side surface of the tool holder, and the power supply ejector pin is against the electrode of the first polarization surface.

4. An ultrasonic vibration cutting tool as claimed in claim 1, characterized in that: The number of Z-shaped elastic connection groups is six, and the Z-shaped elastic connection groups divide the ultrasonic vibration cutting tool into a vibration part and a mounting part.

5. An ultrasonic vibration cutting tool as claimed in claim 1, characterized in that: The tapered matching hole is matched with the tapered mounting portion on the surface of the tool holder, and the first clamping flange is mounted in matching with the tool holder through the tapered matching hole.

6. An ultrasonic vibration cutting tool as claimed in claim 1, characterized in that: After the ultrasonic vibration cutting tool is assembled on the tool holder, the side surface of the mounting portion of the cylindrical mounting portion is tightly fitted with the side surface of the tool holder.

7. An ultrasonic vibration cutting tool as claimed in claim 2, characterized in that: The outer periphery of the flange portion is recessed inward to form a first tool mounting portion and a first clamping surface in contact with the clamped cutting tool; the second clamping flange is fixed to the flange portion of the first clamping flange through its flange surface arranged opposite to the first clamping flange, and a second tool mounting portion and a second clamping surface for clamping the cutting tool are formed on the side of the outer periphery of the flange surface.

8. An ultrasonic vibration cutting tool as claimed in claim 3, characterized in that: The non-contact coupler transmits the high-frequency electrical excitation signal generated by the ultrasonic power supply to the ultrasonic vibrator of the ultrasonic vibration cutting tool. The power supply wire led out from the power supply coil of the non-contact coupler is connected to the power supply ejector pin, and the led-out grounding wire is connected to the tool holder. The conductive layer, the first clamping flange and the tool holder together constitute the ultrasonic vibrator grounding terminal circuit.

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