Airflow-assisted shear rheological polishing device and method using wedge-shaped polishing wheel

Abstract

The present invention discloses an airflow-assisted shear rheological polishing device and method using a wedge-shaped polishing wheel. The polishing device includes a base, which is provided with a polishing groove, a polishing wheel, a spindle, and a lifting mechanism. The lifting mechanism is used to drive the polishing wheel to move up and down. A group of wedge-shaped structures are circumferentially spaced apart on the outer surface of the polishing wheel, and a wheel vent is provided between two adjacent wedge-shaped structures. One end of the spindle is connected to the polishing wheel and the other end is connected to a servo motor. The polishing wheel and the spindle are both hollow structures, and the interiors of the two are interconnected. The spindle is provided with a shaft vent, which is connected to an air pump via an air pipe. The polishing groove is provided with a fixture for clamping a workpiece and a blade stirring wheel for stirring the polishing liquid. The present invention improves the fit between the polishing liquid and the curved surface by utilizing the gas pressure output by the air pump, the fluid dynamic pressure of the polishing liquid, and the wedge pressure generated by the wedge structure, thereby achieving a uniform and efficient polishing effect.

Description

Technical Field

[0001] The invention relates to the technical field of complex surface polishing, and in particular to an airflow-assisted shear rheological polishing device and method using a wedge-shaped polishing wheel. Background Art

[0002] In the field of optics, microstructured surfaces are widely used in optical components such as diffusers, lens arrays, and gratings. As the performance requirements of optical components continue to break through technological limits, the demand for high-precision microstructured optical components is rapidly increasing. Currently, ultra-precision polishing technology is the preferred method for manufacturing microstructured surfaces of optical components. However, the variability of the curvature of the complex surfaces of optical components makes it difficult for the curvature of the polishing tool face to match the curvature of the polished surface. Conventional ultra-precision polishing technology has difficulty in deterministically polishing workpieces with complex surface contours.

[0003] Deterministic polishing technology achieves quantitative and targeted material removal from workpiece surfaces by controlling the polishing tool's material removal function, dwell time, and polishing trajectory. It has been widely used in the ultra-precision machining of large, complex curved parts. Achieving high-quality, efficient, and cost-effective deterministic polishing has been a research hotspot in the field of polishing technology. In recent years, researchers in the ultra-precision machining field have developed a series of typical deterministic polishing methods to meet the precision requirements of modern parts, including airbag polishing, magnetorheological polishing, ion beam polishing, jet polishing, and shear rheological polishing. However, each of these polishing methods has limitations: airbag polishing is difficult to maintain precise relative positioning between the airbag and the workpiece; magnetorheological polishing requires expensive equipment to apply the magnetic field; ion beam polishing requires a very demanding vacuum environment; and jet polishing can cause abrasive agglomeration. Shear rheological polishing utilizes the "shear thickening" phenomenon of non-Newtonian fluids under shear stress to polish complex curved surfaces. The fluidity of the polishing fluid allows it to conform to complex surfaces, achieving a uniform and highly consistent polish. For example, in his dissertation "Research on the Material Removal Function Characteristics of Deterministic Mechanorheological Polishing," Duan Shixiang used a mixed abrasive of SiO2 and diamond to polish K9 glass. After 55 minutes of polishing, the surface roughness of the workpiece decreased from Sa 233.1 nm to Sa 0.9 nm. However, when using conventional shear rheological polishing equipment to polish workpiece surfaces with complex contours, if there are structural areas such as grooves and slits on the workpiece surface, the abrasive and solid particles in the polishing liquid easily accumulate and clog them, making it impossible to effectively polish these areas, which is a limitation. In addition, the polishing wheel with a smooth wall cannot effectively constrain the polishing liquid, causing slippage between the polishing wheel wall and the polishing liquid. The polishing pressure and relative speed generated during the polishing process are low, and the polishing efficiency is poor. Summary of the Invention

[0004] In order to overcome the above-mentioned problems existing in the prior art, the present application provides an airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel. The polishing device designs the polishing wheel into a wedge-shaped structure, which enhances the driving force and adhesion of the polishing wheel to the polishing liquid. At the same time, the polishing wheel is designed to have a hollow structure, so that gas can be delivered to the polishing wheel through an air pump during polishing and then ejected from the vent holes on its surface. On the one hand, the gas is blown into the polishing liquid to generate bubbles, and the bursting of the bubbles can form an impact on the surface of the workpiece, thereby increasing the normal pressure of the "particle clusters" in the polishing liquid on the surface of the polished workpiece. On the other hand, when the gas is blown onto the surface of the workpiece, it will blow away the solid phase particles and abrasive particles deposited in the grooves and slits, so that the solid phase particles and the abrasive particles are recombined, thereby more effectively polishing the surface of the workpiece with a complex contour, and achieving a good polishing effect. Correspondingly, the present application also provides an airflow-assisted shear rheological polishing method using a wedge-shaped polishing wheel.

[0005] For the polishing device, the technical solution of this application is:

[0006] An airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel comprises a base; the base is provided with a polishing groove, a polishing wheel, a main shaft and a lifting mechanism; the polishing groove is used to hold polishing liquid; the polishing wheel is located above the polishing groove, and a group of wedge-shaped structures are provided on the outer surface of the polishing wheel at circumferential intervals; one end of the main shaft is connected to the polishing wheel, and the other end is connected to the servo motor; the polishing wheel and the main shaft are both hollow structures, and the interiors of the two are interconnected; a wheel air vent is provided on the polishing wheel, located between two adjacent wedge-shaped structures; an axis air vent is provided on the main shaft; the axis air vent is connected to an air pump through an air pipe; the lifting mechanism is connected to the polishing wheel, and is used to drive the polishing wheel to move up and down, so that a polishing gap is formed between the polishing wheel and the polishing groove; a fixture for clamping the workpiece and a blade stirring wheel for stirring the polishing liquid are provided in the polishing groove.

[0007] Compared with the prior art, the airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel in the present application designs the polishing wheel into a wedge-shaped structure, which enhances the driving force and adhesion of the polishing wheel on the polishing liquid, and can generate a relatively stable velocity field and pressure field while effectively driving and constraining the polishing liquid; the polishing device also designs the polishing wheel into a hollow structure, which can be used to deliver gas to the polishing wheel through an air pump during polishing, and then ejected from the air vents on its surface. On the one hand, the gas is blown into the polishing liquid to generate bubbles, and the bursting of the bubbles can impact the surface of the workpiece, thereby increasing the normal pressure of the "particle clusters" in the polishing liquid on the surface of the polished workpiece. At this time, under the combined action of gas pressure, fluid dynamic pressure of the polishing liquid and wedge pressure brought by the wedge structure, the fit between the polishing liquid and the workpiece surface can be improved, and uniform polishing of different positions on the workpiece surface can be achieved, achieving a good mirror effect, and also improving the fluidity of the polishing liquid and improving the polishing efficiency; on the other hand, when the gas is blown towards the concave and slits on the surface of the workpiece, the solid particles and abrasive particles deposited in the cavities will be blown away, so that the solid particles and abrasive particles can be recombined, so that the surface of the workpiece with complex contours can be polished more effectively, the roughness of the workpiece surface can be reduced, and the polishing effect is good.

[0008] As an optimization, in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, the spindle is externally sheathed with a sealing sleeve, which allows the spindle to rotate relative to the sealing sleeve. A cavity is formed between the sealing sleeve and the spindle. The sealing sleeve is provided with a sleeve through-hole, to which the end of the air pipe is connected. Thus, during polishing, the spindle rotates without the air pipe rotating synchronously, making implementation easier. Furthermore, the sealing sleeve is provided with flanges at both ends. Rolling bearings are located inside the flanges, into which the spindle is inserted. A sealing ring is located outside the flanges, which fits over the spindle. The rolling bearings reduce the friction coefficient during spindle rotation, ensuring rotational accuracy. The sealing ring seals the connection between the sealing sleeve and the spindle, preventing gas from leaking through the gap. Furthermore, the internal flanges of the sealing sleeve serve as a positioning mechanism during installation of the rolling bearings and also help the sealing ring better seal the sealing sleeve.

[0009] As an optimization, in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, the base is also equipped with a polishing liquid circulation device; this polishing liquid circulation device is connected to the polishing tank via a liquid infusion pipeline to form a closed loop circuit. This allows for the recycling of the polishing liquid, reducing costs. Furthermore, the base is also equipped with a dripping device for adding water to the polishing tank. After prolonged use, the polishing liquid evaporates, leaving a solid precipitate. Adding water to this solid precipitate generates new polishing liquid for continued use, thus achieving long-term, high-quality circulation of the polishing liquid.

[0010] As an optimization, in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, an X-axis screw slide and a Y-axis screw slide are provided on the base for adjusting the position of the polishing wheel; the X-axis screw slide is fixed to the base, and the Y-axis screw slide is slidably connected to the X-axis screw slide via a gantry; and the lifting mechanism is slidably connected to the Y-axis screw slide. In this case, the X- and Y-axis screw slides can be used to control the movement of the polishing wheel in the front-to-back and left-to-right directions, and adjust the position of the polishing wheel, thereby adapting to different models of workpieces to be processed, with good versatility; and using the screw slide to change the position of the polishing wheel allows for high adjustment accuracy.

[0011] As an optimization, in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, the lifting mechanism is provided with an L-shaped connecting plate, to which the sealing sleeve and servo motor are fixed. This facilitates assembly and is easy to implement. The lifting mechanism can employ a screw slide.

[0012] As an optimization, in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, an arc-shaped protective cover is provided above the polishing wheel to prevent the polishing liquid from splashing during the polishing process and causing pollution to the surrounding environment.

[0013] As an optimization, the polishing grooves in the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel are hexagonal in shape. This can better improve the flow distribution of the polishing liquid within the polishing grooves, thereby improving the cutting force of the polishing liquid on the complex curved surfaces of the workpiece, achieving a uniform and consistent polishing effect.

[0014] As for the polishing method, the technical solution of this application is:

[0015] An airflow-assisted shear rheological polishing method using a wedge-shaped polishing wheel is implemented using the aforementioned airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel of the present application; specifically, the following steps are included: S1, mounting the workpiece to be processed on the fixture of the polishing tank, and starting the lifting mechanism to adjust the position of the polishing wheel so that the gap between its bottom and the polishing tank is 1 to 3 mm; S2, adding non-Newtonian fluid polishing liquid into the polishing liquid tank so that the polishing liquid submerges the wedge-shaped structure at the bottom of the polishing wheel; S3, starting the blade stirring wheel to stir the polishing liquid, and starting the servo motor to drive the polishing wheel to rotate, so that relative motion is formed between the polishing wheel and the polishing liquid, and the polishing liquid undergoes shear thickening to polish the surface of the workpiece; at the same time, starting the air pump to output the airflow, and the airflow is input into the main shaft through the air pipe and ejected from the wheel vent on the polishing wheel.

[0016] Compared with the prior art, the airflow-assisted shear rheological polishing method of the present application adopts a wedge-shaped structure polishing wheel. During polishing, gas is delivered to the polishing wheel through an air pump and then ejected from the air vents on its surface. On the one hand, the gas is blown into the polishing liquid to generate bubbles, and the bursting of the bubbles can impact the surface of the workpiece, thereby increasing the normal pressure of the "particle clusters" in the polishing liquid on the surface of the polished workpiece. At this time, under the combined action of the gas pressure, the fluid dynamic pressure of the polishing liquid and the wedge pressure brought by the wedge structure, the polishing efficiency is improved, and the fit between the polishing liquid and the workpiece surface is improved, thereby achieving uniform polishing of different positions on the workpiece surface and achieving a good mirror effect; on the other hand, the gas can blow away the solid phase particles and abrasives deposited in the grooves and slits on the workpiece surface, so that the solid phase particles and the abrasives can be recombined, so that the surface of the workpiece with a complex contour can be polished more effectively, the roughness of the workpiece surface can be reduced, and the polishing effect is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of the structure of the airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel in the present application;

[0018] Figure 2 Schematic diagram of the structure of the polishing tank in the embodiment of the present application;

[0019] Figure 3 Schematic diagram of the structure of the polishing ventilation mechanism in the embodiment of the present application;

[0020] Figure 4 yes Figure 2 A cross-sectional view of the polished ventilation mechanism in FIG.

[0021] Figure 5 This is a schematic structural diagram of the main shaft in an embodiment of the present application;

[0022] Figure 6 1 is a schematic diagram of the assembly of the polishing wheel, the sealing sleeve and the L-shaped connecting plate in an embodiment of the present application;

[0023] Figure 7 This is a polishing principle diagram of the airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel in the present application;

[0024] Figure 8 This is a schematic diagram of the airflow blowing away the solid phase particles and abrasive particles blocked in the concave and slits on the surface of the workpiece during polishing by the airflow-assisted shear rheological polishing device of the present application.

[0025] The marks in the accompanying drawings are: 1-base; 2-polishing groove, 21-clamp, 22-blade stirring wheel, 23-base; 3-polishing wheel, 31-wedge structure, 32-wheel body, 33-wheel cover, 301-wheel vent; 4-spindle, 401-shaft vent; 5-lifting mechanism; 6-servo motor; 7-air pump, 71-trachea; 8-sealing sleeve, 81-flange, 82-sealing cover, 801-cavity, 802-sleeve through hole; 9-rolling bearing; 10-sealing ring; 11-polishing liquid circulation device; 12-infusion pipeline; 13-drip device; 14-X-axis screw slide; 15-Y-axis screw slide; 16-gantry; 17-L-shaped connecting plate; 18-arc-shaped protective cover; 19-U-shaped connecting plate; 20-workpiece; 24-solid phase particles; 25-abrasive particles; 26-airflow. DETAILED DESCRIPTION

[0026] The present invention will be further described below with reference to the accompanying drawings and examples; any details not described in detail in the following examples are common technical knowledge in the art.

[0027] In the description of the present invention, it should be understood that the terms: "one end", "the other end", "surface", "axial", "inside", "outside", "bottom", "lower", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] See also Figures 1 to 5The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel of the present application comprises a base 1; the base 1 is provided with a polishing groove 2, a polishing wheel 3, a spindle 4 and a lifting mechanism 5; the polishing groove 2 is used to hold the polishing liquid; the polishing wheel 3 is located above the polishing groove 2, and a group of wedge-shaped structures 31 are provided on the outer surface of the polishing wheel 3 at intervals in the circumferential direction (when the polishing wheel 3 rotates, the wedge-shaped structures 31 can apply a wedge-shaped pressure downward to the polishing liquid); one end of the spindle 4 is connected to the polishing wheel 3, and the other end is connected to the servo motor 6 (can be connected by a key), and is driven to rotate by the servo motor 6; the polishing wheel 3 and the spindle 4 are both It is a hollow structure, and the interiors of the two are interconnected; a wheel air vent 301 is provided on the polishing wheel 3, located between two adjacent wedge-shaped structures 31 (the gas delivered by the air pump 7 will be ejected from the wheel air vent 301, giving the polishing liquid a gas pressure); an axis air vent 401 is provided on the main shaft 4; the axis air vent 401 is connected to the air pump 7 through the air pipe 71; the lifting mechanism 5 is connected to the polishing wheel 3, and is used to drive the polishing wheel 3 to move up and down, so that a polishing gap is formed between the polishing wheel 3 and the polishing tank 2; a fixture 21 for clamping the workpiece and a blade stirring wheel 22 for stirring the polishing liquid are provided in the polishing tank 2. Example

[0029] See also Figure 3 and Figure 4 In this embodiment, the spindle 4 is externally sheathed with a sealing sleeve 8, allowing the spindle 4 to rotate relative to the sealing sleeve 8. A cavity 801 is formed between the sealing sleeve 8 and the spindle 4. The sealing sleeve 8 is provided with a sleeve through-hole 802, with the end of the air tube 71 connected to the sleeve through-hole 802. Thus, during polishing, the spindle 4 rotates without requiring synchronous rotation of the air tube 71, making the polishing process relatively easy. The polishing wheel 3, spindle 4, sealing sleeve 8, and servo motor 6 constitute the polishing ventilation mechanism.

[0030] Furthermore, flanges 81 are provided at both ends of the interior of the sealing sleeve 8; a rolling bearing 9 is provided on the inner side of the flange 81, and the main shaft 4 is inserted into the rolling bearing 9; a sealing ring 10 is provided on the outer side of the flange 81, and the sealing ring 10 is sleeved on the main shaft 4. The provision of the rolling bearing 9 can reduce the friction coefficient during the rotation of the main shaft 4 and ensure its rotation accuracy; the provision of the sealing ring 10 can seal the connection between the sealing sleeve 8 and the main shaft 4 to prevent the gas in the sealing sleeve 8 from leaking through the connection gap. In addition, the provision of the flange 81 inside the sealing sleeve 8 can play a positioning role when installing the rolling bearing 9, and can also assist the sealing ring 10 in better sealing the sealing sleeve 8. The sealing sleeve 8 is a rectangular structure, and sealing cover plates 82 are fixed at both ends.

[0031] Furthermore, the polishing wheel 3 includes a wheel body 32; the wheel body 32 has a cavity therein and is open at one end, and a wheel cover 33 is provided at the opening for sealing the polishing wheel body 32; the main shaft 4 passes through the other end of the wheel body 32 and is fixed to the wheel body 32 by a threaded connection; 8 wedge-shaped structures 31 are evenly spaced along the circumferential direction on the outer peripheral surface of the wheel body 31, and 3 wheel air vents 301 are spaced between two adjacent wedge-shaped structures 31 (that is, a total of 24 wheel air vents 301 are provided on the polishing wheel 3; at this time, the gas pressure can be evenly distributed on the workpiece to achieve a uniform and consistent polishing effect); wherein, the wheel cover 33 is circular and has a diameter smaller than the diameter of the wheel body 32, thereby ensuring that during the polishing operation, the wheel cover 33 does not contact the polishing liquid, and only the wedge-shaped structures 31 on the circumferential surface of the wheel body 32 are in contact with the polishing liquid.

[0032] In this embodiment, the base 1 is further provided with a polishing liquid circulation device 11, which includes a polishing liquid tank and a flow pump. The polishing liquid circulation device 11 is connected to the polishing tank 2 via a liquid delivery pipe 12 to form a closed loop circuit. This allows for the recycling of the polishing liquid, reducing costs. Furthermore, the base 1 is further provided with a dripping device 13 for adding water to the polishing tank 2. After prolonged use, the polishing liquid evaporates, leaving behind solid precipitates. By adding water to these solid precipitates, new polishing liquid can be generated and put back into use, thereby enabling long-term, high-quality recycling of the polishing liquid.

[0033] In this embodiment, the base 1 is provided with an X-axis screw slide 14 and a Y-axis screw slide 15 for adjusting the position of the polishing wheel 3. The X-axis screw slide 14 is fixed to the base 1, and the Y-axis screw slide 15 is slidably connected to the X-axis screw slide 14 via a gantry 16 (the Y-axis screw slide 15 is fixed to the top of the crossbeam of the gantry 16, and the bottom of the gantry 16 is slidably connected to the X-axis screw slide 14). The lifting mechanism 5 is slidably connected to the Y-axis screw slide 15. In this case, the X- and Y-axis screw slides can be used to control the movement of the polishing wheel in the front-to-back and left-to-right directions, and the position of the polishing wheel 3 can be adjusted, thereby adapting to different models of workpieces to be processed, with good versatility. Moreover, using the screw slide to change the position of the polishing wheel 3 can achieve high adjustment accuracy.

[0034] See also Figure 6 In this embodiment, the lifting mechanism 5 is a screw slide, and an L-shaped connecting plate 17 is provided on the slider of the lifting mechanism 5; the sealing sleeve 8 and the servo motor 6 are fixed on the L-shaped connecting plate 17. In this case, assembly is convenient and easy to implement.

[0035] Furthermore, the lifting mechanism 5 is slidably connected to the Y-axis screw slide 15 through a U-shaped connecting plate 19 , and the U-shaped connecting plate 19 is sleeved on the crossbeam of the gantry 16 .

[0036] In this embodiment, an arc-shaped protective cover 18 is provided above the polishing wheel 3 to prevent the polishing liquid from splashing during the polishing process and polluting the surrounding environment. The arc-shaped protective cover 18 is connected to the sealing sleeve 8 through an L-shaped connecting rod.

[0037] In this embodiment, the polishing tank 2 is hexagonal. This improves the flow distribution of the polishing liquid within the polishing tank 2, thereby improving the cutting force of the polishing liquid on the complex curved surface of the workpiece, achieving a uniform and consistent polishing effect. A base 23 is provided at the bottom of the polishing tank 2, and the base 23 is fixed to the base 1.

[0038] See also Figure 7 and Figure 8 The method of airflow-assisted shear rheological polishing using a wedge-shaped polishing wheel is implemented by using the airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel in the embodiment described above; specifically, the method comprises the following steps:

[0039] S1, the workpiece 20 to be processed is mounted on the fixture 21 of the polishing tank 2, and the lifting mechanism 5 is started to adjust the position of the polishing wheel 3 so that the gap between its bottom and the polishing tank 2 is 1 to 3 mm.

[0040] S2, add non-Newtonian fluid polishing liquid into the polishing liquid tank 2, so that the polishing liquid immerses the wedge-shaped structure 31 at the bottom of the polishing wheel 3; the non-Newtonian fluid polishing liquid includes abrasive particles, solid phase particles, additives and deionized water; the abrasive particles are a mixture of one or more of silicon dioxide, aluminum oxide, cerium oxide, and diamond, with a concentration of 2wt.%-20wt.%.

[0041] S3, start the blade stirring wheel 22 to stir the polishing liquid, and start the servo motor 6 to drive the polishing wheel 3 to rotate. The speed of the polishing wheel 3 is 70-80 rpm, so that a relative motion is formed between the polishing wheel 3 and the polishing liquid. At a certain shear rate, the polishing liquid undergoes shear thickening, and the solid phase particles therein entrain the abrasive particles to form "particle clusters". The fluid dynamic pressure generated by the polishing liquid and the wedge pressure generated by the wedge structure 31 of the polishing wheel squeeze the "particle clusters" toward the surface of the workpiece 20, causing a cutting action to be performed, thereby achieving a surface roughness of the workpiece 20. At the same time, the air pump 7 is started to output air flow, and the air flow 26 enters the cavity 802 from the sleeve through hole 802 on the sealing sleeve 8 through the air pipe 71, flows through the inside of the main shaft 4 and the polishing wheel 3, and finally is ejected from the wheel vent 301 on the polishing wheel 3, applying a gas pressure to the "particle clusters" in the polishing liquid in the working area, and blowing towards the grooves and slits on the surface of the workpiece, blowing away the solid phase particles 24 and the abrasive particles 25 deposited in the cavities, so that the solid phase particles 24 and the abrasive particles 25 are recombined, thereby improving the polishing efficiency.

[0042] Implementation Cases:

[0043] This case uses the above-mentioned airflow-assisted shear rheological polishing method with a wedge-shaped polishing wheel to polish a BK7 glass sheet. The specific experimental conditions are shown in the table below:

[0044] Workpiece BK7 glass Abrasive type <![CDATA[CeO2]]> Abrasive concentration 15wt.% Polishing wheel speed 75rpm Distance between workpiece and polishing wheel 1mm Polishing time 30min

[0045] Experiments show that during the processing, the performance of the polishing liquid remains almost stable. After polishing, all surface scratches on the glass sheet are removed, and the glass sheet becomes transparent and shiny; the roughness Sa is reduced from the original 230.1nm±15nm to below 0.8nm±0.1nm.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel, characterized by: The invention comprises a base (1); the base (1) is provided with a polishing groove (2), a polishing wheel (3), a main shaft (4) and a lifting mechanism (5); the polishing groove (2) is used to contain polishing liquid; the polishing wheel (3) is located above the polishing groove (2), and a group of wedge-shaped structures (31) are provided on the outer surface of the polishing wheel (3) at intervals along the circumferential direction; one end of the main shaft (4) is connected to the polishing wheel (3), and the other end is connected to the servo motor (6); the polishing wheel (3) and the main shaft (4) are both hollow structures, and the interiors of the two are interconnected; the polishing wheel (3), located between two adjacent wedge-shaped structures (31), a wheel vent (301) is provided; a shaft vent (401) is provided on the main shaft (4); the shaft vent (401) is connected to the air pump (7) through the air pipe (71); the lifting mechanism (5) is connected to the polishing wheel (3), and is used to drive the polishing wheel (3) to move up and down, so that a polishing gap is formed between the polishing wheel (3) and the polishing groove (2); a fixture (21) for clamping a workpiece and a blade stirring wheel (22) for stirring the polishing liquid are provided in the polishing groove (2).

2. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 1, characterized in that: The main shaft (4) is provided with a sealing sleeve (8) on its outer sleeve, and the main shaft (4) can rotate relative to the sealing sleeve (8); a cavity (801) is formed between the sealing sleeve (8) and the main shaft (4); a sleeve through hole (802) is provided on the sealing sleeve (8), and the end of the air pipe (71) is connected to the sleeve through hole (802).

3. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 2, characterized in that: Flanges (81) are provided at both ends of the interior of the sealing sleeve (8); a rolling bearing (9) is provided on the inner side of the flange (81), and the main shaft (4) is inserted into the rolling bearing (9); a sealing ring (10) is provided on the outer side of the flange (81), and the sealing ring (10) is sleeved on the main shaft (4).

4. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 2, characterized in that: A polishing liquid circulation device (11) is also provided on the base (1); the polishing liquid circulation device (11) and the polishing tank (2) are connected to form a closed loop circuit via a liquid delivery pipe (12).

5. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 4, characterized in that: The base (1) is also provided with a water dripping device (13) for adding water into the polishing tank (2).

6. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 2, characterized in that: The base (1) is provided with an X-axis screw slide (14) and a Y-axis screw slide (15) for adjusting the position of the polishing wheel (3); the X-axis screw slide (14) is fixed on the base (1), and the Y-axis screw slide (15) is slidably connected to the X-axis screw slide (14) through a gantry (16); the lifting mechanism (5) is slidably connected to the Y-axis screw slide (15).

7. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 6, characterized in that: An L-shaped connecting plate (17) is provided on the lifting mechanism (5), and the sealing sleeve (8) and the servo motor (6) are fixed on the L-shaped connecting plate (17).

8. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 7, characterized in that: An arc-shaped protective cover (18) is provided above the polishing wheel (3).

9. The airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel according to claim 1, characterized in that: The polishing groove (2) is hexagonal.

10. An airflow-assisted shear rheological polishing method using a wedge-shaped polishing wheel, characterized in that: The method is implemented using the airflow-assisted shear rheological polishing device using a wedge-shaped polishing wheel as described in claim 1; specifically comprising the following steps: S1, the workpiece to be processed is mounted on the fixture (21) of the polishing tank (2), and the lifting mechanism (5) is activated to adjust the position of the polishing wheel (3) so that the gap between the bottom thereof and the polishing tank (2) is 1 to 3 mm; S2, adding non-Newtonian fluid polishing liquid into the polishing liquid tank (2) so that the polishing liquid submerges the wedge-shaped structure (31) at the bottom of the polishing wheel (3); S3, starts the blade stirring wheel (22) to stir the polishing liquid, and starts the servo motor (6) to drive the polishing wheel (3) to rotate, so that the polishing wheel (3) and the polishing liquid form a relative motion, the polishing liquid undergoes shear thickening, and the surface of the workpiece is polished; at the same time, starts the air pump (7) to output air flow, and the air flow is input into the main shaft (4) through the air pipe (71) and ejected from the wheel vent (301) on the polishing wheel (3).

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