Grinding machine quicksand pipe connecting method

Abstract

The invention provides a connecting method for a quicksand pipe of a grinding machine, the quicksand pipe is in inclined connection, one end of the quicksand pipe is connected with an upper disc quicksand groove, the other end of the quicksand pipe is connected with an upper grinding disc, and the connecting end of the quicksand pipe and the upper disc quicksand groove is inclined towards the rotating direction of the upper disc quicksand groove. The device has the beneficial effects that the problem that mortar is unevenly distributed in the disc in the grinding process due to unreasonable connection of the quicksand pipe is solved, dark cracks and surface scratching of silicon wafers are reduced, TTV parameters of silicon wafer grinding are improved, the grinding effect of the silicon wafers is improved, and the product quality is guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of grinders, and in particular relates to a grinding machine flowing sand pipe connection method. Background Art

[0002] like Figure 1 and Figure 2 As shown, during the grinding machine processing, the mortar in the mortar barrel 1 enters the upper sand pot 3 through the circulation pump via the flow meter 2 to control the flow rate, and the mortar in the sand pot 3 enters the upper plate sand trough 4. The bottom of the upper plate sand trough 4 is provided with a plurality of sand holes 5 along the circumferential direction, and the sand holes above the upper grinding disc 6 are connected by a sand pipe 8. In the prior art, the sand pipe between the upper plate sand trough 4 and the upper grinding disc 6 is arbitrarily connected, resulting in uneven distribution of mortar during the grinding process, dark cracks and scratches on the silicon wafer, and affecting the TTV parameters of the silicon wafer. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a grinding machine sand flow pipe connection method, which effectively solves the technical problem of uneven mortar distribution during the grinding process and overcomes the shortcomings of the prior art.

[0004] The technical solution adopted by the present invention is: a method for connecting a sand flowing pipe of a grinding machine, wherein the sand flowing pipe is connected in an inclined manner, one end of which is connected to an upper plate sand flowing trough, and the other end is connected to an upper grinding plate, and the connection end of the sand flowing pipe and the upper plate sand flowing trough is inclined toward the rotation direction of the upper plate sand flowing trough.

[0005] Furthermore, the inclination angle of the quicksand pipe is set to 50-70°.

[0006] Further, the following steps are included:

[0007] Dividing the sand flow holes of the upper grinding disc into a plurality of groups of sand flow holes;

[0008] Dividing the quicksand tubes into a plurality of groups of quicksand tubes;

[0009] According to the grouping of the plurality of quicksand holes, the plurality of quicksand pipes are connected in sequence, so that the quicksand pipes are connected in the inclined manner.

[0010] Furthermore, in the step, the sand flow holes of the upper grinding disc are divided into a plurality of groups of sand flow holes, and the sand flow holes of the upper grinding disc are divided into the plurality of groups of sand flow holes according to the radial arrangement of the sand flow holes.

[0011] Further, in the step of dividing the quicksand tubes into a plurality of groups of quicksand tubes, the quicksand tubes are divided into the plurality of groups according to their lengths.

[0012] Further, in the step, the plurality of groups of quicksand holes are grouped and the plurality of groups of quicksand pipes are connected in sequence, including:

[0013] Connecting each group of the quicksand pipes in sequence according to the grouping of the multiple groups of quicksand holes;

[0014] The plurality of groups of quicksand pipes are connected in sequence along the radial direction of the upper grinding disc.

[0015] Further, each group of quicksand pipes are connected in sequence in a clockwise direction.

[0016] Further, each group of quicksand tubes is connected in sequence in a counterclockwise direction.

[0017] Furthermore, the plurality of groups of quicksand pipes are connected in sequence from outside to inside along the radial direction of the upper grinding disc.

[0018] Furthermore, the plurality of groups of quicksand pipes are connected in sequence from the inside to the outside along the radial direction of the upper grinding disc.

[0019] The advantages and positive effects of the present invention are as follows: by adopting the above technical solution, the problem of uneven distribution of slurry in the disk during grinding due to unreasonable connection of the sand flow pipe is solved, the dark cracks and surface scratches of the silicon wafer are reduced, the TTV parameters of silicon wafer grinding are improved, the grinding effect of the silicon wafer is improved, and the quality of the product is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The invention is a connection diagram of a method for connecting a grinding machine flowing sand pipe according to an embodiment of the present invention.

[0021] Figure 2 The present invention is a top view of an upper plate sand flow trough of a grinding machine sand flow pipe connection method according to an embodiment of the present invention.

[0022] Figure 3 The present invention is a flow chart of a method for connecting a grinding machine flowing sand pipe according to an embodiment of the present invention.

[0023] Figure 4 This is a diagram showing the grouping of the flowing sand holes on the grinding disc in a method for connecting a flowing sand pipe of a grinding machine according to an embodiment of the present invention.

[0024] Figure 5 It is a box-line diagram comparing the grinding TTV of a grinding machine flowing sand pipe connection method in the prior art and the present embodiment.

[0025] Figure 6 It is a grinding TTV comparison histogram of the prior art and a grinding machine flowing sand pipe connection method of the embodiment of the present invention.

[0026] Figure 7 It is a box-and-whisker diagram comparing the grinding thickness dispersion of a grinding machine flowing sand pipe connection method in the prior art and an embodiment of the present invention.

[0027] Figure 8 It is a comparison histogram of grinding thickness dispersion between the prior art and a grinding machine flowing sand pipe connection method of the embodiment of the present invention.

[0028] Fig. 9 It is a comparison chart of the grinding dark crack trend of a grinding machine flowing sand pipe connection method in the prior art and an embodiment of the present invention.

[0029] In the figure:

[0030] 1. Mortar bucket 2. Flow meter 3. Quicksand pot

[0031] 4. Upper plate sand flow slot 5. Sand flow hole 6. Upper grinding plate

[0032] 7. Lower grinding disc 8. Flowing sand pipe DETAILED DESCRIPTION

[0033] An embodiment of the present invention provides a method for connecting a sand flowing pipe of a grinding machine. The embodiment of the present invention is described below with reference to the accompanying drawings.

[0034] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0035] The present invention provides a method for connecting a grinding machine sand pipe, such as Figure 1 and Figure 2 As shown, the sand flowing pipe 8 is connected in an inclined manner, one end is connected to the upper plate sand flowing trough 4, and the other end is connected to the upper grinding disc 6. The connection end of the sand flowing pipe 8 and the upper plate sand flowing trough 4 is inclined toward the rotation direction of the upper plate sand flowing trough 4. In the prior art, the sand flowing pipe 8 is arbitrarily connected and crosses each other. The centrifugal force generated by the simultaneous rotation of the upper plate sand flowing trough 4 and the upper grinding disc 6 will cause the sand flowing pipe 8 to bend to varying degrees, which will affect the flow of the mortar to varying degrees, causing the mortar to be unevenly distributed on the upper grinding disc 6. When the connection end of the sand flowing pipe 8 and the upper plate sand flowing trough 4 is inclined toward the rotation direction of the upper plate sand flowing trough 4, so that the sand flowing pipe 8 is all connected in an inclined manner at a certain inclination angle α, under the action of centrifugal force, the sand flowing pipe 8 will be transformed from uniform inclination to vertical, ensuring that the mortar can flow out smoothly along the sand flowing pipe 8, so that the mortar is more evenly distributed on the upper grinding disc 6. Preferably, the inclination angle α of the sand flowing pipe 8 is set to 50-70°.

[0036] like Figure 3 As shown, a method for connecting a grinding machine flowing sand pipe comprises the following steps:

[0037] Divide the sand flow holes of the upper grinding disc 6 into multiple groups of sand flow holes;

[0038] Divide the quicksand tube 8 into multiple groups of quicksand tubes;

[0039] According to the grouping of the plurality of quicksand holes, the plurality of quicksand pipes are connected in sequence, so that the quicksand pipes 8 are connected in an inclined manner.

[0040] Specifically, Figure 4 As shown, the sand flow holes of the upper grinding disc 6 are divided into multiple groups of sand flow holes, and the sand flow holes of the upper grinding disc 6 are divided into multiple groups according to the radial arrangement. A plurality of sand flow holes are provided on the upper grinding disc 6, and the plurality of sand flow holes are divided into multiple groups according to the radial arrangement, and the sand flow holes in the same radial direction are set as one group.

[0041] Specifically, the quicksand tubes 8 are divided into multiple groups of quicksand tubes, and the quicksand tubes 8 are divided into multiple groups according to their lengths. For the convenience of connection and placement, the quicksand tubes 8 of the same length are grouped together. Each group of quicksand holes is distributed radially, and the quicksand tubes 8 connected to the quicksand holes at the same position in the multiple groups of quicksand holes are of the same length. Quicksand tubes 8 of different lengths correspond to different positions of each group of quicksand holes. For example, the quicksand tubes 8 connected to the quicksand holes in the outermost circle of the multiple groups of quicksand holes are divided into the same group, and the quicksand tubes 8 connected to the quicksand holes in the innermost circle of the multiple groups of quicksand holes are divided into the same group.

[0042] Specifically, according to the grouping of the multiple groups of quicksand holes, the multiple groups of quicksand pipes 8 are connected in sequence, including the steps of:

[0043] According to the grouping of multiple groups of sand flow holes, connect each group of sand flow tubes 8 in sequence; take a group of sand flow tubes 8 of equal length, connect one end of a sand flow tube 8 to the sand flow hole of the corresponding upper grinding disc 6, and the other end of the sand flow tube 8 to the sand flow hole of the upper plate sand flow trough 4, and the connecting end of the sand flow tube 8 and the upper plate sand flow trough 4 is tilted toward the rotation direction of the upper plate sand flow trough 4, so that the sand flow tube 8 is tilted, and the tilt angle α is 50-70°. After connecting one sand flow tube 8, take another sand flow tube 8 of the same group, connect one end of the sand flow tube 8 to the sand flow hole of the adjacent group at the same position, and connect the other end of the sand flow tube 8 to the sand flow hole in the upper plate sand flow trough 4. The connection position of the two sand flow tubes 8 in the upper plate sand flow trough 4 is separated by N-1 sand flow holes, and N is the number of sand flow holes in each group on the upper grinding disc 6. When connecting each group of quicksand pipes 8, they can be connected in sequence clockwise or counterclockwise according to the grouping of multiple groups of quicksand holes. When connected clockwise on the upper grinding disc 6, the quicksand trough 4 on the upper plate needs to be connected clockwise, and when connected counterclockwise on the upper grinding disc 6, the quicksand trough 4 on the upper plate needs to be connected counterclockwise, ensuring that the quicksand pipes 8 are inclined at approximately the same inclination angle.

[0044] The plurality of groups of quicksand pipes 8 are connected in sequence along the radial direction of the upper grinding disc 6. After a group of quicksand pipes 8 of the same length are connected, another group of quicksand pipes 8 of the same length are connected along the radial direction of the upper grinding disc 6. For example, after a group of quicksand pipes 8 are connected, the quicksand holes in the outermost circle of each group of quicksand holes are connected, and then another group of quicksand pipes 8 is connected, and the quicksand holes in the second outer circle of each group of quicksand holes are connected. The plurality of groups of quicksand pipes 8 can be connected in sequence from outside to inside, or from inside to outside.

[0045] Embodiment: A method for connecting a grinding machine flowing sand pipe comprises the following steps:

[0046] S1, dividing the sand flow holes of the upper grinding disc 6 into multiple groups of sand flow holes;

[0047] like Figure 4 As shown, the grinding disc 6 on the grinding machine is provided with 128 flow sand holes, and the hole positions are distributed in an axisymmetric manner. Take 1 / 4 of the disc surface for example, and the remaining 3 / 4 of the disc surface can be used as a reference. The flow sand holes on the disc surface are grouped according to the radial arrangement, and four flow sand holes on the same radial direction are set as a group. The flow sand holes on the disc surface are set to 8 groups.

[0048] S2, dividing the quicksand tube 8 into multiple groups of quicksand tubes;

[0049] According to the length of the quicksand tubes 8, the quicksand tubes 8 are divided into a plurality of groups of quicksand tubes 8, and the length of each group of quicksand tubes 8 is the same. In this embodiment, the quicksand tubes 8 are divided into four groups. The quicksand tubes 8 connected to the outermost circle quicksand holes are set as one group, the quicksand tubes 8 connected to the second outer circle quicksand holes are set as one group, the quicksand tubes 8 connected to the innermost circle quicksand holes are set as one group, and the quicksand tubes 8 connected to the second inner circle quicksand holes are set as one group.

[0050] S3. Connecting the multiple groups of quicksand pipes in sequence according to the grouping of the multiple groups of quicksand holes, so that the quicksand pipes 8 are connected in an inclined manner.

[0051] According to the grouping of multiple groups of sand flow holes, each group of sand flow tubes 8 is connected in sequence; take a group of sand flow tubes connected to the outermost circle of sand flow holes, connect one end of a sand flow tube 8 to the sand flow hole in the outermost circle of the first group of sand flow holes, and connect the other end of the sand flow tube 8 to the sand flow hole 5 of the upper plate sand flow trough 4, and the connection end of the sand flow tube 8 and the upper plate sand flow trough 4 is tilted toward the rotation direction of the upper plate sand flow trough 4. In this embodiment, the upper grinding disc 6 and the upper plate sand flow trough 4 rotate counterclockwise when viewed from above, and the connection end of the sand flow tube 8 and the upper plate sand flow trough 4 is tilted to the right, so that the sand flow tube 8 is tilted, and the tilt angle α is 60°. After connecting one sand flow tube 8, take another sand flow tube 8 of the same group, connect one end of the sand flow tube 8 to the sand flow hole in the outermost circle of the second group of sand flow holes, and connect the other end of the sand flow tube 8 to the sand flow hole in the upper plate sand flow trough 4. The connection positions of the two sand flowing pipes 8 in the upper plate sand flowing groove 4 are separated by three sand flowing holes. The two sand flowing pipes 8 are sequentially connected in a counterclockwise direction on the upper grinding plate 6 and are also connected in a counterclockwise direction in the upper plate sand flowing groove 4 to ensure that the two sand flowing pipes 8 are inclined at approximately the same inclination angle.

[0052] Along the radial direction of the upper grinding disc 6, multiple groups of quicksand pipes 8 are connected in sequence from outside to inside. After connecting a group of quicksand pipes for connecting the outermost circle quicksand holes, a group of quicksand pipes for connecting the second outer circle quicksand holes are connected, and then a group of quicksand pipes for connecting the second inner circle quicksand holes are connected, and finally a group of quicksand pipes for connecting the innermost circle quicksand holes are connected.

[0053] like Figure 5-Figure 8 As shown, a comparison is made between silicon wafers ground by an existing grinder and a grinder connected by the connection method in this embodiment:

[0054] TTV mean TTV standard deviation Thickness dispersion mean Thickness dispersion standard deviation Prior art 0.9013 0.1399 1.21 0.8623 This embodiment 0.8688 0.1319 0.9198 0.6868

[0055] It can be seen that the mortar is evenly distributed by the connection method in this embodiment, so that the grinding TTV parameter and the grinding thickness dispersion parameter of the silicon wafer are improved.

[0056] like Fig. 9 As shown, the dark crack rate of silicon wafers ground by the existing grinder and the grinder connected by the connection method in this embodiment is compared. From January to March, the existing grinder was used, while from April to May, the grinder was connected by the connection method in this embodiment. It can be seen that the dark crack rate of silicon wafers is on a downward trend.

[0057] The advantages and positive effects of the present invention are:

[0058] It solves the problem of uneven distribution of slurry in the disk during grinding due to unreasonable connection of the sand flow pipe, reduces dark cracks and surface scratches on silicon wafers, improves the TTV parameters of silicon wafer grinding, enhances the grinding effect of silicon wafers, and ensures product quality.

[0059] The embodiments of the present invention are described in detail above, but the contents described are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A method for connecting a grinding machine sand pipe, characterized in that: The sand flowing pipe is connected in an inclined manner, with one end connected to the upper plate sand flowing trough and the other end connected to the upper grinding plate. The connecting end of the sand flowing pipe and the upper plate sand flowing trough is inclined toward the rotation direction of the upper plate sand flowing trough.

2. A grinding machine flowing sand pipe connection method according to claim 1, characterized in that: The inclination angle of the quicksand pipe is set to 50-70°.

3. A grinding machine flowing sand pipe connection method according to claim 1 or 2, characterized in that: The following steps are involved: Dividing the sand flow holes of the upper grinding disc into a plurality of groups of sand flow holes; Dividing the quicksand tubes into a plurality of groups of quicksand tubes; According to the grouping of the plurality of quicksand holes, the plurality of quicksand pipes are connected in sequence, so that the quicksand pipes are connected in the inclined manner.

4. A grinding machine flowing sand pipe connection method according to claim 3, characterized in that: In the step of dividing the sand flow holes of the upper grinding disc into a plurality of groups of sand flow holes, the sand flow holes of the upper grinding disc are divided into the plurality of groups of sand flow holes according to a radial arrangement.

5. A grinding machine flowing sand pipe connection method according to claim 4, characterized in that: In the step of dividing the quicksand tubes into a plurality of groups of quicksand tubes, the quicksand tubes are divided into the plurality of groups according to their lengths.

6. A grinding machine flowing sand pipe connection method according to claim 5, characterized in that: In the step of grouping the plurality of quicksand holes, sequentially connecting the plurality of quicksand pipes comprises: Connecting each group of the quicksand pipes in sequence according to the grouping of the multiple groups of quicksand holes; The plurality of groups of quicksand pipes are connected in sequence along the radial direction of the upper grinding disc.

7. A grinding machine flowing sand pipe connection method according to claim 6, characterized in that: Connect each group of quicksand tubes in sequence in a clockwise direction.

8. A grinding machine flowing sand pipe connection method according to claim 6, characterized in that: Connect each group of quicksand tubes in sequence in a counterclockwise direction.

9. A method for connecting a grinding machine flowing sand pipe according to any one of claims 6 to 8, characterized in that: The plurality of groups of quicksand pipes are connected in sequence from outside to inside along the radial direction of the upper grinding disc.

10. A method for connecting a grinding machine flowing sand pipe according to any one of claims 6 to 8, characterized in that: The plurality of groups of quicksand pipes are connected in sequence from inside to outside along the radial direction of the upper grinding disc.

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