A method for connecting sand pipe of grinding machine

Abstract

This invention provides a method for connecting a sanding pipe in a grinding machine. The sanding pipe is connected at an angle, with one end connected to the upper sanding trough and the other end connected to the upper grinding disc. The connection end of the sanding pipe to the upper sanding trough is inclined towards the rotation direction of the upper sanding trough. The beneficial effects of this invention are that it solves the problem of uneven slurry distribution within the disc during grinding caused by improper sanding pipe connection, reduces dark cracks and surface scratches on silicon wafers, improves the TTV parameters of silicon wafer grinding, enhances the grinding effect of silicon wafers, and ensures product quality.

Description

Technical Field

[0001] This invention belongs to the field of grinding machine technology, and in particular relates to a method for connecting the sand pipe of a grinding machine. Background Technology

[0002] like Figure 1 and Figure 2 As shown, during grinding, the slurry in the slurry tank 1 is circulated by a pump and its flow rate is controlled by a flow meter 2 before entering the upper sand-flowing pot 3. The slurry in the sand-flowing pot 3 then enters the upper sand-flowing trough 4. The bottom of the upper sand-flowing trough 4 has multiple sand-flowing holes 5 arranged circumferentially, which are connected to the sand-flowing holes above the upper grinding disc 6 by sand-flowing pipes 8. In the prior art, the sand-flowing pipes between the upper sand-flowing trough 4 and the upper grinding disc 6 are arbitrarily connected, resulting in uneven slurry distribution during grinding, causing dark cracks and scratches on the silicon wafers, thus affecting the TTV parameters of the silicon wafers. Summary of the Invention

[0003] To solve the above-mentioned technical problems, the present invention provides a method for connecting the sand pipe of a grinding machine, which effectively solves the technical problem of uneven slurry distribution during the grinding process and overcomes the shortcomings of the prior art.

[0004] The technical solution adopted in this invention is: a method for connecting a sand pipe in a grinding machine, wherein the sand pipe is connected at an inclination, one end is connected to the sand trough of the upper plate, and the other end is connected to the upper grinding disc, and the connection end of the sand pipe to the sand trough of the upper plate is inclined toward the rotation direction of the sand trough of the upper plate.

[0005] Furthermore, the inclination angle of the sand pipe is set to 50–70°.

[0006] Furthermore, the following steps are included:

[0007] The sand flow holes of the upper grinding disc are divided into multiple groups of sand flow holes;

[0008] The sand-flowing pipe is divided into multiple groups of sand-flowing pipes;

[0009] According to the grouping of the multiple sets of sand-flowing holes, the multiple sets of sand-flowing pipes are connected in sequence, so that the sand-flowing pipes are connected in the inclined manner.

[0010] Furthermore, in the step of dividing the sand flow holes of the upper grinding disc into multiple groups of sand flow holes, the multiple groups of sand flow holes are divided according to the radial arrangement of the sand flow holes of the upper grinding disc.

[0011] Furthermore, in the step of dividing the sand tube into multiple groups of sand tubes, the multiple groups of sand tubes are divided according to the length of the sand tube.

[0012] Furthermore, in the step of sequentially connecting the multiple sets of sand-flowing pipes according to the grouping of the multiple sets of sand-flowing holes, the following is included:

[0013] According to the grouping of the multiple groups of sand-flowing holes, connect each group of sand-flowing pipes in sequence;

[0014] The multiple sets of sand-flowing pipes are connected sequentially along the radial direction of the upper grinding disc.

[0015] Furthermore, each group of sand tubes is connected sequentially in a clockwise direction.

[0016] Furthermore, each group of sand tubes is connected sequentially in a counter-clockwise direction.

[0017] Furthermore, the multiple sets of sand-flowing pipes are connected sequentially from the outside to the inside along the radial direction of the upper grinding disc.

[0018] Furthermore, the multiple sets of sand-flowing pipes are connected sequentially from the inside to the outside along the radial direction of the upper grinding disc.

[0019] The advantages and positive effects of this invention are as follows: by adopting the above technical solution, the problem of uneven distribution of slurry in the disc during the grinding process caused by unreasonable connection of the sand pipe is solved, the dark cracks and surface scratches of silicon wafers are reduced, the TTV parameters of silicon wafer grinding are improved, the grinding effect of silicon wafers is enhanced, and the quality of products is guaranteed. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a method for connecting a sand pipe in a grinding machine according to an embodiment of the present invention.

[0021] Figure 2 This is a top view of the upper sand flow channel of a sand flow pipe connection method for a grinding machine according to an embodiment of the present invention.

[0022] Figure 3 This is a flowchart of a method for connecting a sand pipe in a grinding machine according to an embodiment of the present invention.

[0023] Figure 4 This is a grouping diagram of the sand flow holes on the grinding disc in a sand flow pipe connection method for a grinding machine according to an embodiment of the present invention.

[0024] Figure 5 This is a box plot comparing the grinding TTV of the prior art with that of the grinding mill flow tube connection method of this embodiment.

[0025] Figure 6 This is a histogram comparing the grinding TTV of existing technology and a grinding mill flow tube connection method according to an embodiment of the present invention.

[0026] Figure 7 This is a box plot comparing the grinding thickness variation between existing technology and a grinding mill flow pipe connection method according to an embodiment of the present invention.

[0027] Figure 8 This is a histogram comparing the grinding thickness dispersion of existing technologies and a grinding mill flow pipe connection method according to an embodiment of the present invention.

[0028] Figure 9 This is a comparison diagram of the grinding crack trend between existing technology and a grinding mill flow pipe connection method according to an embodiment of the present invention.

[0029] In the picture:

[0030] 1. Mortar bucket 2. Flow meter 3. Sand-flowing pot

[0031] 4. Upper sand-flowing groove; 5. Sand-flowing hole; 6. Upper grinding disc.

[0032] 7. Lower grinding disc 8. Flowing sand pipe Detailed Implementation

[0033] This invention provides a method for connecting a sand pipe in a grinding machine. The embodiments of this invention will be described below with reference to the accompanying drawings.

[0034] In the description of the embodiments of this invention, it should be understood that the terms "top," "bottom," etc., indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, it should be noted that unless otherwise explicitly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this invention through specific circumstances.

[0035] An embodiment of the present invention provides a method for connecting a sand pipe in a grinding machine, such as... Figure 1 and Figure 2 As shown, the sand-flowing pipes 8 are connected at an angle, with one end connected to the upper sand-flowing trough 4 and the other end connected to the upper grinding disc 6. The connection end of the sand-flowing pipe 8 to the upper sand-flowing trough 4 is inclined towards the rotation direction of the upper sand-flowing trough 4. In the prior art, the sand-flowing pipes 8 are arbitrarily connected and intersecting each other. The centrifugal force generated by the simultaneous rotation of the upper sand-flowing trough 4 and the upper grinding disc 6 will cause the sand-flowing pipes 8 to bend to varying degrees, which will affect the flow of mortar to varying degrees, resulting in uneven distribution of mortar on the upper grinding disc 6. When the connection end of the sand-flowing pipe 8 to the upper sand-flowing trough 4 is inclined towards the rotation direction of the upper sand-flowing trough 4, so that all the sand-flowing pipes 8 are connected at an angle α, the centrifugal force will cause the sand-flowing pipes 8 to change from uniformly inclined to vertical, ensuring that the mortar can flow smoothly out along the sand-flowing pipes 8 and making the distribution of mortar on the upper grinding disc 6 more uniform. Preferably, the angle α of the sand-flowing pipe 8 is set to 50-70°.

[0036] like Figure 3 As shown, a method for connecting a sand pipe in a grinding machine includes the following steps:

[0037] The sand-flowing holes of the upper grinding disc 6 are divided into multiple groups of sand-flowing holes;

[0038] Divide the sand flow tube into multiple groups of sand flow tubes;

[0039] According to the grouping of multiple sets of sand flow holes, multiple sets of sand flow pipes are connected in sequence, so that the sand flow pipes 8 are connected at an angle.

[0040] Specifically, such as Figure 4 As shown, the sand-flowing holes of the upper grinding disc 6 are divided into multiple groups of sand-flowing holes according to their radial arrangement. Multiple sand-flowing holes are provided on the upper grinding disc 6, and these holes are arranged radially into multiple groups, with sand-flowing holes on the same radial direction forming one group.

[0041] Specifically, the sand-forming tubes 8 are divided into multiple groups according to their length. For ease of connection and placement, sand-forming tubes 8 of the same length are grouped together. The sand-forming holes in each group are radially distributed, and sand-forming tubes 8 connected to sand-forming holes at the same position in multiple groups are of the same length. Sand-forming tubes 8 of different lengths correspond to different positions within each group of sand-forming holes. For example, the sand-forming tubes 8 connected to the outermost sand-forming holes in multiple groups are grouped together, and the sand-forming tubes 8 connected to the innermost sand-forming holes in multiple groups are grouped together.

[0042] Specifically, according to the grouping of multiple sets of sand-flowing holes, multiple sets of sand-flowing pipes 8 are connected sequentially, including the following steps:

[0043] According to the grouping of multiple sets of sand-flowing holes, connect each set of sand-flowing tubes 8 sequentially. Take a set of sand-flowing tubes 8 of equal length, connect one end of one sand-flowing tube 8 to the corresponding sand-flowing hole of the upper grinding disc 6, and connect the other end of the sand-flowing tube 8 to the sand-flowing hole of the upper grinding disc sand-flowing groove 4. The connection end of the sand-flowing tube 8 and the upper grinding disc sand-flowing groove 4 is tilted towards the rotation direction of the upper grinding disc sand-flowing groove 4, so that the sand-flowing tube 8 is tilted, with an tilt angle α of 50-70°. After connecting one sand-flowing tube 8, take another sand-flowing tube 8 from the same group, connect one end of the sand-flowing tube 8 to the sand-flowing hole in the same position of the adjacent group of sand-flowing holes, and connect the other end of the sand-flowing tube 8 to the sand-flowing hole in the upper grinding disc sand-flowing groove 4. The connection positions of the two sand-flowing tubes 8 in the upper grinding disc sand-flowing groove 4 are spaced N-1 sand-flowing holes apart, where N is the number of sand-flowing holes in each set on the upper grinding disc 6. When connecting each group of sand-flowing pipes 8, they can be connected sequentially in a clockwise or counterclockwise direction according to the grouping of multiple groups of sand-flowing holes. When connecting clockwise on the upper grinding disc 6, the connection in the upper sand-flowing groove 4 must also be clockwise; when connecting counterclockwise on the upper grinding disc 6, the connection in the upper sand-flowing groove 4 must also be counterclockwise, to ensure that the sand-flowing pipes 8 are tilted at approximately the same angle.

[0044] Along the radial direction of the upper grinding disc 6, the multiple sets of sand-flowing tubes 8 are connected sequentially. After connecting one set of sand-flowing tubes 8 of the same length, another set of sand-flowing tubes 8 of the same length is connected along the radial direction of the upper grinding disc 6. For example, after connecting one set of sand-flowing tubes 8, which connects to the outermost sand-flowing hole in each group of sand-flowing holes, another set of sand-flowing tubes 8 is then connected, which connects to the sand-flowing hole in the second outermost group of sand-flowing holes in each group of sand-flowing holes. Multiple sets of sand-flowing tubes 8 can be connected sequentially from the outside to the inside, or sequentially from the inside to the outside.

[0045] Example: A method for connecting a sand pipe in a grinding machine, comprising the following steps:

[0046] S1. Divide the sand flow holes of the upper grinding disc 6 into multiple groups of sand flow holes;

[0047] like Figure 4 As shown, the grinding disc 6 on the grinding machine has 128 sand-flowing holes, and the hole positions are axially symmetrical. One-quarter of the disc surface is used as an example; the remaining three-quarters can be referenced accordingly. The sand-flowing holes on the disc surface are grouped radially, with four sand-flowing holes on the same radial direction forming one group. Eight groups of sand-flowing holes are formed on the disc surface.

[0048] S2. Divide the sand flow tube into multiple groups of sand flow tubes;

[0049] Based on the length of the sand-flowing pipe 8, the sand-flowing pipe 8 is divided into multiple groups of sand-flowing pipes 8, with each group of sand-flowing pipes 8 having the same length. In this embodiment, the sand-flowing pipes 8 are divided into four groups. The sand-flowing pipes 8 connected to the outermost ring of sand-flowing holes are set as one group, the sand-flowing pipes 8 connected to the next outermost ring of sand-flowing holes are set as one group, the sand-flowing pipes 8 connected to the innermost ring of sand-flowing holes are set as one group, and the sand-flowing pipes 8 connected to the next innermost ring of sand-flowing holes are set as one group.

[0050] S3. According to the grouping of multiple sets of sand flow holes, connect multiple sets of sand flow pipes in sequence so that the sand flow pipes 8 are connected at an angle.

[0051] According to the grouping of multiple sets of sand-flowing holes, connect each set of sand-flowing pipes 8 in sequence; take a set of sand-flowing pipes connected to the outermost ring of sand-flowing holes, connect one end of one sand-flowing pipe 8 to the outermost sand-flowing hole in the first set of sand-flowing holes, and connect the other end of the sand-flowing pipe 8 to the sand-flowing hole 5 of the upper sand-flowing groove 4. The connection end of the sand-flowing pipe 8 and the upper sand-flowing groove 4 is tilted towards the rotation direction of the upper sand-flowing groove 4. In this embodiment, the upper grinding disc 6 and the upper sand-flowing groove 4 rotate counterclockwise when viewed from above, and the connection end of the sand-flowing pipe 8 and the upper sand-flowing groove 4 is tilted to the right, so that the sand-flowing pipe 8 is tilted, and the tilt angle α is 60°. After connecting one sand-flowing pipe 8, take another sand-flowing pipe 8 in the same group, connect one end of the sand-flowing pipe 8 to the outermost sand-flowing hole in the second set of sand-flowing holes, and connect the other end of the sand-flowing pipe 8 to the sand-flowing hole in the upper sand-flowing groove 4. The two sand-flowing pipes 8 are connected at intervals of 3 sand-flowing holes in the upper sand-flowing trough 4. The two sand-flowing pipes 8 are connected in a counterclockwise direction on the upper grinding disc 6, and also in a counterclockwise direction in the upper sand-flowing trough 4, to ensure that the two sand-flowing pipes 8 are tilted at approximately the same angle.

[0052] Along the radial direction of the upper grinding disc 6, multiple sets of sand-flowing pipes 8 are connected sequentially from the outside to the inside. After connecting the set of sand-flowing pipes used to connect the outermost ring of sand-flowing holes, a set of sand-flowing pipes used to connect the next outermost ring of sand-flowing holes is connected, then a set of sand-flowing pipes used to connect the next innermost ring of sand-flowing holes is connected, and finally a set of sand-flowing pipes used to connect the innermost ring of sand-flowing holes is connected.

[0053] like Figures 5-8 As shown, a comparison is made between silicon wafers ground by an existing grinding machine and those ground by a grinding machine connected using the connection method of this embodiment:

[0054] TTV Mean TTV standard deviation Mean of thickness dispersion Thickness dispersion standard deviation Existing technology 0.9013 0.1399 1.21 0.8623 This embodiment 0.8688 0.1319 0.9198 0.6868

[0055] Therefore, it can be seen that the uniform distribution of mortar using the connection method in this embodiment improves both the grinding TTV parameter and the grinding thickness variation parameter of the silicon wafer.

[0056] like Figure 9 As shown, the dark crack rate of silicon wafers polished by existing polishing machines and polishing machines connected by the connection method in this embodiment is compared. From January to March, existing polishing machines were used, while from April to May, polishing machines connected by the connection method in this embodiment were used. It can be clearly seen that the dark crack rate of silicon wafers is decreasing.

[0057] The advantages and positive effects of this invention are:

[0058] This invention solves the problem of uneven slurry distribution in the grinding pan caused by improper connection of the sand pipe, reduces dark cracks and surface scratches on silicon wafers, improves the TTV parameters of silicon wafer grinding, enhances the grinding effect of silicon wafers, and ensures product quality.

[0059] The embodiments of the present invention have been described in detail above, but the content described is only a preferred embodiment of the present invention and should not be considered as limiting the scope of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A method for connecting a sand pipe in a grinding machine, characterized in that: The sand-flowing pipe is connected at an incline, with one end connected to the upper sand-flowing trough and the other end connected to the upper grinding disc. The connection end of the sand-flowing pipe to the upper sand-flowing trough is inclined towards the rotation direction of the upper sand-flowing trough, and the inclination angle of the sand-flowing pipe is set to 50-70°. The process includes the following steps: The sand flow holes of the upper grinding disc are divided into multiple groups of sand flow holes; The sand-flowing pipe is divided into multiple groups of sand-flowing pipes; According to the grouping of the multiple sets of sand-flowing holes, the multiple sets of sand-flowing pipes are connected in sequence, so that the sand-flowing pipes are connected in the inclined manner.

2. The method for connecting a sand pipe in a grinding machine according to claim 1, characterized in that: In the step of dividing the sand flow holes of the upper grinding disc into multiple groups of sand flow holes, the multiple groups of sand flow holes are divided according to the radial arrangement of the sand flow holes of the upper grinding disc.

3. The method for connecting a sand pipe in a grinding machine according to claim 2, characterized in that: In the step of dividing the sand tube into multiple groups of sand tubes, the multiple groups of sand tubes are divided according to the length of the sand tube.

4. The method for connecting a sand pipe in a grinding machine according to claim 3, characterized in that: The step of sequentially connecting the multiple sets of sand-flowing pipes according to the grouping of the multiple sets of sand-flowing holes includes: According to the grouping of the multiple groups of sand-flowing holes, connect each group of sand-flowing pipes in sequence; The multiple sets of sand-flowing pipes are connected sequentially along the radial direction of the upper grinding disc.

5. The method for connecting a sand pipe in a grinding machine according to claim 4, characterized in that: Connect each group of sand tubes in a clockwise direction.

6. The method for connecting a sand pipe in a grinding machine according to claim 4, characterized in that: Connect each group of sand tubes in a counter-clockwise direction.

7. A method for connecting a sand-flowing pipe in a grinding machine according to any one of claims 4-6, characterized in that: Along the radial direction of the upper grinding disc, the multiple sets of sand-flowing pipes are connected sequentially from the outside to the inside.

8. A method for connecting a sand pipe in a grinding machine according to any one of claims 4-6, characterized in that: The multiple sets of sand-flowing pipes are connected sequentially from the inside to the outside along the radial direction of the upper grinding disc.

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