Glass slide position normalizing mechanism

Abstract

The invention provides a glass slide position normalizing mechanism, which relates to the technical field of semiconductor processing equipment, and is characterized in that the glass slide position normalizing mechanism comprises a substrate, an active push block is arranged in the middle of the upper side of the substrate, and a plurality of groups of linear guide rail assemblies are uniformly and symmetrically arranged on the upper side of the substrate and located on the periphery of the active push block; driven blocks are slidably arranged on the upper sides of the linear guide rail assemblies respectively, profiling edge pushing grooves are formed in the upper portions of the outer sides of the driven blocks, fixing plates are fixedly arranged on the upper side of the base plate and correspond to the positions of the outer sides of the driven blocks respectively, glass slide grooves are formed in the upper sides of the fixing plates, and the sides, facing the directions of the driven blocks, of the glass slide grooves are open. According to the invention, the automation degree of the equipment is improved, the accuracy of loading and unloading is improved, a plurality of glass slides can be simultaneously arranged and positioned, the production efficiency is improved, the problems of adhesion and water accumulation are solved, and the production efficiency and stability are improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing equipment, in particular to a glass slide position regularization mechanism. Background Art

[0002] In the existing technical field, MIP LED dicing machines, as a precision semiconductor processing equipment, play a vital role in the manufacturing process. However, traditional MIP LED dicing machines mostly rely on manual loading and unloading operations, which is not only inefficient, but also requires a lot of manpower, increasing production costs and the risk of human error. With the continuous development of automation technology, the market has put forward higher requirements for the automation level of MIP LED dicing machines to achieve a more efficient and stable production process.

[0003] Specifically, the existing MIP LED dicing machine has the following main problems during the loading and unloading process:

[0004] Strong dependence on manual operation: Traditional MIP LED dicing machines require operators to frequently load and unload manually, which is not only time-consuming and labor-intensive, but also easily affected by human factors, resulting in low production efficiency and unstable product quality. With the development of industrial automation technology, the disadvantages of manual operation have become increasingly prominent, and there is an urgent need to realize automatic loading and unloading functions to reduce dependence on personnel.

[0005] Inconsistent position of glass slides: During the automatic loading and unloading process, the original incoming position of the glass slides is often inconsistent, which poses a great challenge to automatic positioning and adjustment. In order to achieve accurate loading and unloading, it is necessary to ensure that the glass slides can quickly and stably reach the predetermined fixed position. However, existing technologies often find it difficult to effectively solve this problem, resulting in the stability and reliability of the automatic loading and unloading system being affected.

[0006] Difficulty in loading and unloading multiple glass slides at the same time: In order to improve production efficiency, the MIP LED dicing machine needs to process multiple glass slides at the same time. However, the existing automatic loading and unloading system often has difficulty in accurately positioning and arranging multiple glass slides at the same time, resulting in low production efficiency and unstable product quality. Therefore, how to achieve loading and unloading of multiple glass slides at the same time has become one of the key issues in improving the production efficiency of the MIP LED dicing machine.

[0007] In response to the above problems, although there are some automatic loading and unloading mechanisms in the prior art, they often have problems such as complex structure, inaccurate positioning, and poor stability, which makes it difficult to meet the high requirements of MIP LED dicing machines for automation and production efficiency. Summary of the invention

[0008] In view of the deficiencies in the prior art, the present invention provides a glass carrier position regularization mechanism, which aims to solve the problems existing in the automatic loading and unloading process of the existing MIP LED dicing machine and realize a more efficient and stable automated production process.

[0009] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0010] A glass slide position regularization mechanism, characterized in that it includes a substrate, an active push block is arranged at the middle position of the upper side of the substrate, a plurality of groups of linear guide rail assemblies are evenly and symmetrically arranged on the upper side of the substrate and located at the periphery of the active push block, driven blocks are slidably arranged on the upper side of the linear guide rail assemblies, and contoured side push grooves are arranged on the upper outer side of the driven blocks, fixed plates are fixedly arranged on the upper side of the substrate and at positions corresponding to the outer sides of the driven blocks, a glass slide groove is arranged on the upper side of the fixed plate, and the glass slide groove is open on the side facing the direction of the driven block.

[0011] A preferred technical solution is that the active push block is in the shape of a boss, the active push block is slidably arranged on the upper side of the base plate, a spring is fixedly arranged on the outer side of the driven block, a cutout plane is arranged on the outer side of the fixed plate facing the direction of the driven block, the cutout plane cooperates with the outer end side of the spring, and the outer side surface of the active push block cooperates with the inner side surface of the driven block.

[0012] According to a preferred technical solution, a hydraulic cylinder or a motor is fixedly provided at the lower part of the base plate, a hydraulic rod of the hydraulic cylinder is fixedly connected to the bottom of the active push block through the base plate, and the motor drives the active push block to move up and down through a transmission member.

[0013] A preferred technical solution is that a groove is provided at the lower portion of the fixing plate, an in-position sensor is fixedly provided on the upper side of the substrate and at a position corresponding to the groove, an in-position sensor detection hole is provided on the fixing plate and at an inner middle position of the glass slide groove, and the in-position sensor detects the upper side of the fixing plate through the in-position sensor detection hole.

[0014] According to a preferred technical solution, a waterproof structure is provided on the detection hole of the in-situ sensor, and the in-situ sensor is a photoelectric sensor.

[0015] According to a preferred technical solution, a protrusion is arranged on the upper side of the fixing plate and in the glass slide groove, and the upper side surface of the protrusion, the upper side surface of the open side of the glass slide groove and the upper side surface of the contoured side push groove are located on the same horizontal plane.

[0016] According to a preferred technical solution, the protrusions are in strip shape and are arranged along and close to the inner side of the glass slide groove.

[0017] According to a preferred technical solution, the inner side edge of the glass slide groove is a contoured edge.

[0018] According to a preferred technical solution, four fixing plates are provided and arranged in a rectangular shape on the upper side of the base plate.

[0019] According to a preferred technical solution, a drainage hole communicating with the glass slide groove is provided on the side of the fixing plate.

[0020] The present invention provides a glass slide position regularization mechanism, which has the following beneficial effects:

[0021] Improve the degree of automation: Through the up and down movement of the active push block, combined with the synergistic effect of the driven block and the linear guide assembly, the automatic regularization and positioning of the glass slide is realized, reducing the dependence on manual operation and improving the degree of automation of the equipment.

[0022] Ensure position accuracy: The coordinated design of the active push block and the driven block, as well as the close fit between the contoured edge push groove and the glass slide groove on the fixed plate, ensure that the glass slide can quickly and stably reach the predetermined fixed position, improving the accuracy of loading and unloading.

[0023] Supports simultaneous processing of multiple wafers: The mechanism can simultaneously organize and position multiple glass carriers, improving production efficiency and meeting the needs of MIP LED dicing machines for efficient production.

[0024] Solve the problems of adhesion and water accumulation: By setting bumps and drainage holes on the fixed plate, the problem of glass slides sticking to the fixed plate due to water on the surface, causing loading and unloading failures, is effectively solved. At the same time, it ensures that condensed water can be drained away in time, avoiding adverse effects on glass slides and equipment.

[0025] Improve production efficiency and stability: The regular mechanism of the present invention not only simplifies the operation process and reduces labor costs, but also improves the production efficiency and stability of the MIP LED dicing machine, bringing significant economic benefits to the LED manufacturing industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure after partial disassembly of the present invention;

[0028] Figure 3 It is a schematic diagram of the bottom structure of the present invention;

[0029] Figure 4 This is a schematic diagram of the fixing plate structure of the present invention;

[0030] Figure 5 This is a schematic diagram of the structure of the present invention after removing the fixing plate;

[0031] In the figure: 1-base plate, 2-active push block, 3-linear guide assembly, 4-driven block, 5-fixed plate, 6-spring, 7-hydraulic cylinder, 8-in-place sensor, 9-waterproof structure, 10-glass slide, 41-fixed horizontal plate, 51-glass slide groove, 52-cut plane, 53-groove, 54-in-place sensor detection hole, 55-bump, 56-drainage hole. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] like Figure 1 As shown, a glass slide position regularization mechanism comprises a substrate 1, an active push block 2 is arranged at the middle position of the upper side of the substrate 1, a plurality of linear guide rail assemblies 3 are evenly and symmetrically arranged on the upper side of the substrate 1 and located at the periphery of the active push block 2, driven blocks 4 are slidably arranged on the upper side of the linear guide rail assemblies 3, and contoured side push grooves 41 are arranged on the upper part of the outer side of the driven blocks 4, and fixed plates 5 are fixedly arranged on the upper side of the substrate 1 and corresponding to the outer sides of the driven blocks 4, and glass slide grooves 51 are arranged on the upper side of the fixed plates 5, and the glass slide grooves 51 are open on the side facing the direction of the driven blocks 4. Four fixed plates 5 are arranged and arranged in a rectangular shape on the upper side of the substrate 1.

[0034] like Figure 1 , Figure 2 and Figure 3 As shown, the active push block 2 is in the shape of a boss, and the active push block 2 is slidably arranged on the upper side of the base plate 1, and a spring 6 is fixedly arranged on the outer side of the driven block 4. A cut plane 52 is arranged on the outer side of the fixed plate 5 facing the direction of the driven block 4, and the cut plane 52 cooperates with the outer end side of the spring 6, and the outer side surface of the active push block 2 cooperates with the inner side surface of the driven block 4. A hydraulic cylinder 7 is fixedly arranged at the lower part of the base plate 1, and the hydraulic rod of the hydraulic cylinder 7 is fixedly connected to the bottom of the active push block 2 through the base plate 1.

[0035] like Figure 2 and Figure 4 As shown, a groove 53 is provided at the lower portion of the fixed plate 5, an in-position sensor 8 is fixedly provided on the upper side of the substrate 1 and at a position corresponding to the groove 53, an in-position sensor detection hole 54 is provided on the fixed plate 5 and at an inner middle position of the glass carrier groove 51, and the in-position sensor 8 detects the upper side of the fixed plate 5 through the in-position sensor detection hole 54.

[0036] like Figure 2 and Figure 4 As shown, a waterproof structure 9 is provided on the in-position sensor detection hole 54, and the in-position sensor 8 is a photoelectric sensor. The waterproof structure of the carrier in-position sensor solves the problem of false induction of the sensor by water droplets. The waterproof structure used here can adopt a solution in which the sensor detection hole 54 is covered with a transparent material and sealed with a rubber sealing ring. The in-position sensor 8 detects whether there is a carrier on the fixing plate 5, and the waterproof structure 9 protects the in-position sensor 8 from dripping onto the carrier sensor.

[0037] like Figure 1-Figure 5 As shown, a protrusion 55 is provided on the upper side of the fixed plate 5 and located in the glass slide groove 51, and the upper side of the protrusion 55, the upper side of the open side of the glass slide groove 51 and the upper side of the contoured side push groove 41 are located on the same horizontal plane. The protrusion 55 is in a strip shape and is arranged along and close to the inner side of the glass slide groove 51. The glass slide is actually placed on the upper side of the protrusion 55 and the upper side of the open side of the glass slide groove 51. The glass slide groove 51 is in a hollow state, and the contact area between the fixed plate 5 and the glass slide 10 is small, which solves the problem of failure of loading and unloading caused by the glass slide 10 sticking to the fixed plate 5 after water on the surface of the fixed plate 5. In addition, the setting of the protrusion 55 has the effect of backflow of accumulated water, so that the accumulated water on the side of the glass slide groove 51 flows through the gap between the protrusion 55 and the side of the glass slide groove 51 and then drains through the drainage hole 56.

[0038] The inner side edge of the glass slide groove 51 is a contoured edge. Contour means that the inner side edge edge of the glass slide 10 has the same outer shape as the inner side edge edge of the glass slide 10, so that the inner side edge of the glass slide groove 51 can fit closely and achieve the purpose of accurate positioning.

[0039] like Figure 4 As shown, the side of the fixing plate 5 is provided with a drainage hole 56 communicating with the glass slide groove 51. The condensed water inside the glass slide groove 51 is drained away along the inner wall and through the drainage hole 56. The condensed water outside is drained away along the outer wall, and the accumulated water outside cannot flow into the inner side of the glass slide groove 51.

[0040] The present invention drives the active push block 2 to move up and down through the hydraulic cylinder 7, and the outer side surface of the boss of the active push block 2 changes in inclination to squeeze the driven block 4, so that the driven block 4 moves linearly along the linear guide assembly 3, and pushes the glass carrier 10 to be close to the fixed plate 5 to achieve the purpose of position regularization. Under the action of the spring 6, when the active push block 2 returns, the driven block 4 can automatically reset, and the space included between the driven block 4 and the fixed plate 5 will be in an expanded state to facilitate the placement of the glass carrier 10 product. The glass carrier 10 is placed in the space included between the driven block 4 and the fixed block 5, and the size and shape of this space are determined by the size, shape (profiling) and shape and position deviation of the carrier. The present invention will be widely used in the automatic loading and unloading mechanism of the MIP LED dicing machine. It can not only ensure the accurate and stable loading and unloading position of the dicing machine, but also can regularize multiple carriers at one time, improve the stability and production efficiency of the automatic loading mechanism of the MIP LED dicing machine, and is an important guarantee for the MIP LED dicing machine to realize automatic loading and unloading.

[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A glass slide position regularization mechanism, characterized in that: The invention comprises a base plate (1), an active push block (2) is arranged at the middle position of the upper side of the base plate (1), a plurality of groups of linear guide rail assemblies (3) are evenly and symmetrically arranged on the upper side of the base plate (1) and located at the periphery of the active push block (2), driven blocks (4) are slidably arranged on the upper side of the linear guide rail assemblies (3), and a contoured edge push groove (41) is arranged on the upper part of the outer side of the driven block (4), a fixed plate (5) is fixedly arranged on the upper side of the base plate (1) and at the position corresponding to the outer side of the driven block (4), and a glass slide groove (51) is arranged on the upper side of the fixed plate (5), and the glass slide groove (51) is open on the side facing the direction of the driven block (4).

2. A glass slide position regularization mechanism according to claim 1, characterized in that: The active push block (2) is in the shape of a boss. The active push block (2) is slidably arranged on the upper side of the base plate (1) up and down. A spring (6) is fixedly arranged on the outer side of the driven block (4). A cutout plane (52) is arranged on the outer side of the fixed plate (5) facing the direction of the driven block (4). The cutout plane (52) cooperates with the outer end side of the spring (6). The outer side surface of the active push block (2) cooperates with the inner side surface of the driven block (4).

3. The glass slide position regularization mechanism according to claim 1, characterized in that: A hydraulic cylinder (7) or a motor is fixedly arranged at the bottom of the base plate (1); a hydraulic rod of the hydraulic cylinder (7) is fixedly connected to the bottom of the active push block (2) through the base plate (1); and the motor drives the active push block (2) to move up and down through a transmission member.

4. The glass slide position regularization mechanism according to claim 1, characterized in that: A groove (53) is provided at the lower part of the fixing plate (5), an in-position sensor (8) is fixedly provided on the upper side of the substrate (1) and at a position corresponding to the groove (53), an in-position sensor detection hole (54) is provided on the fixing plate (5) and at an inner middle position of the glass slide groove (51), and the in-position sensor (8) detects the upper side of the fixing plate (5) through the in-position sensor detection hole (54).

5. A glass slide position regularization mechanism according to claim 4, characterized in that: A waterproof structure (9) is provided on the in-situ sensor detection hole (54), and the in-situ sensor (8) is a photoelectric sensor.

6. The glass slide position regularization mechanism according to claim 1, characterized in that: A protrusion (55) is provided on the upper side of the fixing plate (5) and located in the glass slide groove (51); the upper side surface of the protrusion (55), the upper side surface of the open side of the glass slide groove (51) and the upper side surface of the contoured side push groove (41) are located on the same horizontal plane.

7. A glass slide position regularization mechanism according to claim 6, characterized in that: The protrusions (55) are strip-shaped and are arranged along and close to the inner side of the glass slide groove (51).

8. The glass slide position regularization mechanism according to claim 1, characterized in that: The inner side edge of the glass slide groove (51) is a contoured edge.

9. The glass slide position regularization mechanism according to claim 1, characterized in that: Four fixing plates (5) are provided and arranged in a rectangular shape on the upper side of the base plate (1).

10. The glass slide position regularization mechanism according to claim 1, characterized in that: The side of the fixing plate (5) is provided with a drainage hole (56) which is in communication with the glass slide groove (51).

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