Solid felt as well as preparation method and application thereof

Abstract

The invention relates to the field of semiconductor crystal manufacturing, in particular to a solid felt and a preparation method and application thereof. The solid felt comprises a base body and a plurality of annular cavities formed in the base body. And a curing coating is arranged on the surface of the annular cavity. The solid felt has good thermal insulation performance, conductivity, stability and durability, the service life of a photovoltaic material can be prolonged, and the production cost can be reduced.

Description

Technical Field

[0001] The invention relates to the field of semiconductor crystal manufacturing, and in particular to a solid felt and a preparation method and application thereof. Background Art

[0002] The method for making the curing felt used for pulling single crystals includes the steps of cutting felt, preparing glue, brushing glue, forming, high temperature oven, machining, coating, high temperature calcination and testing. In the existing curing process of curing felt, after curing, the thermal insulation effect of the thermal insulation felt will be worse than that of the soft felt.

[0003] Compared with soft felt, solid felt has better stability and durability, but soft felt performs better in heat conduction and thermal insulation. Both solid felt and soft felt are a kind of graphite felt, and they differ in manufacturing process, performance and application. Solid felt is made by recycling waste soft felt. Its preparation method includes breaking the waste soft felt into small pieces, adding graphite adhesive and anhydrous ethanol solvent to stir, then filling it into a mold for pressing and finally demolding to obtain solid felt.

[0004] This preparation method improves the stability of the solid felt and can be widely used in various occasions that require stable support. However, since the solid felt is made by recycling waste soft felt, its original softness and thermal conductivity may be reduced, resulting in a decrease in its thermal insulation performance.

[0005] In view of this, the present invention is proposed. Summary of the invention

[0006] The purpose of the present invention is to provide a solid felt and a preparation method and application thereof, wherein the solid felt has the advantages of good thermal insulation, electrical conductivity, stability and durability.

[0007] In order to achieve the above-mentioned purpose of the present invention, the following technical solutions are particularly adopted:

[0008] One aspect of the present invention relates to a solid felt, comprising: a base body and a plurality of annular cavities arranged inside the base body;

[0009] The surface of the annular cavity is provided with a cured coating.

[0010] The solid felt has good thermal insulation performance, good electrical conductivity, stability and durability, can increase the service life of photovoltaic materials and reduce production costs.

[0011] Another aspect of the present invention also relates to a method for preparing the solid felt, comprising the following steps:

[0012] (a) filling a container with a liquid coating to obtain a filling body; and stacking annular soft felts to obtain a soft felt precursor;

[0013] (b) machining a space in the soft felt precursor for accommodating the filling body, and filling the filling body into the soft felt precursor to obtain a cured felt embryo;

[0014] (c) subjecting the cured felt body to a heating and rotating treatment and a first cooling process.

[0015] The method for preparing the solid felt is simple and does not require complicated processes and equipment. The prepared solid felt has good thermal insulation performance while also having the advantages of stability, conductivity, durability, etc.

[0016] Another aspect of the present invention also relates to a semiconductor crystal manufacturing device, including the solid felt described above or the solid felt prepared by the method for preparing the solid felt described above.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] (1) The solid felt provided by the present invention has a plurality of annular cavities arranged inside the solid felt, and the air in the annular cavities is used to transfer heat inside. The speed at which the air transfers heat is lower than the speed at which the solid felt matrix transfers heat, thereby improving the thermal insulation performance of the solid felt. A curing coating is arranged on the surface of the annular cavity, which is beneficial to improving the conductivity and durability of the solid felt.

[0019] (2) The method for preparing the solid felt provided by the present invention is simple and does not require reliance on complex processes and equipment. A filler is placed in a soft felt precursor, and a plurality of annular cavities are formed inside the solid felt by heating, rotating and cooling. The solid felt prepared by this method has good thermal insulation performance while also having the advantages of stability, conductivity and durability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A cross-sectional view of a solid felt provided in an embodiment of the present invention;

[0022] Figure 2 An overall diagram of the solid felt provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0023] The technical scheme of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but it will be understood by those skilled in the art that the following described embodiments are part of embodiments of the present invention, rather than all embodiments, and are only used to illustrate the present invention, and should not be considered as limiting the scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention. If specific conditions are not specified in the embodiments, they are carried out according to normal conditions or conditions recommended by the manufacturer. If the manufacturer is not specified in the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0024] One aspect of the present invention relates to a solid felt, such as Figure 1 and Figure 2 As shown, it comprises: a base body and a plurality of annular cavities arranged inside the base body;

[0025] The surface of the annular cavity is provided with a cured coating.

[0026] The solid felt is provided with a plurality of annular cavities inside the solid felt, and the air in the annular cavities is used to transfer heat inside. The speed at which the air transfers heat is lower than the speed at which the solid felt matrix transfers heat, thereby improving the thermal insulation performance of the solid felt. A curing coating is provided on the surface of the annular cavity, which is beneficial to improving the conductivity and durability of the solid felt.

[0027] Further, the diameter of the annular cavity is 20-30 mm, including but not limited to any point value of 20 mm, 22 mm, 24 mm, 26 mm, 28 mm or 30 mm or any range value between two of them. The diameter of the annular cavity refers to the diameter of the cavity.

[0028] Furthermore, taking the cross-sectional area of ​​the solid felt per square meter as the unit area, the number of the annular cavities arranged per unit area is 350 to 790, including but not limited to any point value of 350, 380, 400, 430, 450, 480, 500, 530, 550, 580, 600, 630, 650, 680, 700, 730, 750 or 790 or the range value between any two of them.

[0029] Under the condition of ensuring the strength of the solid felt, the smaller the diameter of the annular cavity, the more annular cavities can be designed and the better the thermal insulation. As the diameter of the annular cavity is smaller, the manufacturing process is more complicated, and the larger the diameter of the annular cavity, the fewer the number.

[0030] Furthermore, the spacing between two adjacent annular cavities is 30-60 mm, including but not limited to any point value of 30 mm, 40 mm, 50 mm or 60 mm or a range value between any two. A certain spacing must be ensured between the annular cavities. If the spacing is too small, the structural strength of the felt will be affected.

[0031] Furthermore, the thickness of the cured coating is 2-4 mm, including but not limited to any point value of 2 mm, 2.5 mm, 3 mm, 3.5 mm or 4 mm or a range value between any two of them. Limiting the thickness of the cured coating within a certain range can ensure that the annular cavity has sufficient cavity space and improve the thermal insulation performance of the cured felt.

[0032] Furthermore, the cured coating comprises the following components in parts by mass:

[0033] 5-6 parts of adhesive, 4-5 parts of graphite, 21-23 parts of silicon carbide, 1-2 parts of carbon fiber powder, 0.5-2 parts of fumed silica powder, 9-11 parts of triethanolamine borate and 7-9 parts of additives.

[0034] In some specific embodiments, in the cured coating, the binder may be, for example, but not limited to, 5, 5.2, 5.4, 5.6, 5.8 or 6 parts, or any range between two parts, in terms of weight percentage; graphite may be, for example, but not limited to, 4, 4.2, 4.4, 4.6, 4.8 or 5 parts, or any range between two parts; silicon carbide may be, for example, but not limited to, 21, 21.2, 21.4, 21.6, 21.8, 22, 22.2, 22.4, 22.6, 22.8 or 23 parts, or any range between two parts; carbon fiber may be, for example, but not limited to, 1, 1.2, 1.4, 1.6, 1.8 or 2 any one of parts or a range between any two of them; fumed silica, for example, may be, but is not limited to, any one of 0.5 parts, 0.7 parts, 0.9 parts, 1.1 parts, 1.3 parts, 1.5 parts, 1.7 parts or 2 parts or a range between any two of them; triethanolamine borate, for example, may be, but is not limited to, any one of 9 parts, 9.2 parts, 9.4 parts, 9.6 parts, 9.8 parts, 10.0 parts, 10.2 parts, 10.4 parts, 10.6 parts, 10.8 parts or 11 parts or a range between any two of them; additives, for example, may be, but is not limited to, any one of 7 parts, 7.2 parts, 7.4 parts, 7.6 parts, 7.8 parts, 8 parts, 8.2 parts, 8.4 parts, 8.6 parts, 8.8 parts or 9 parts or a range between any two of them.

[0035] Furthermore, the adhesive includes but is not limited to: furan resin.

[0036] Furthermore, the additive includes: yttrium silicate and aluminum tantalate in a mass ratio of 1:1 to 3 (for example, but not limited to 1:1, 1:2 or 1:3). The additive plays a catalytic role in the curing process, accelerates the curing reaction of the furan resin, and improves the hardness of the solid felt coating.

[0037] Another aspect of the present invention also relates to a method for preparing the solid felt, comprising the following steps:

[0038] (a) filling a container with a liquid coating to obtain a filling body; and stacking annular soft felts to obtain a soft felt precursor;

[0039] (b) processing a space for accommodating the filling body in the soft felt precursor, and filling the filling body into the interior of the soft felt precursor to obtain a cured felt embryo;

[0040] (c) subjecting the cured felt body to a heating and rotating treatment and a first cooling process.

[0041] The method for preparing the solid felt is simple and does not require reliance on complex processes and equipment. A filler is placed in a soft felt precursor, and a plurality of annular cavities are formed inside the solid felt through heating, rotation and cooling. The solid felt prepared by this method has good thermal insulation performance while also having the advantages of stability, conductivity and durability.

[0042] Since the solid felt is processed in a stacking manner, during the embryo making process, the soft felt is cut into annular soft felt and stacked. When stacked to the annular cavity, it is filled with a filling body filled with a liquid coating. According to the number and position of the annular cavities, when the soft felt is stacked to the position of the annular cavity, the filling body can be placed. After a solidified felt embryo is made, it is heated and cured by a high-temperature furnace. A rotating device needs to be installed in the high-temperature furnace to rotate the solidified felt embryo. The rotating device includes but is not limited to: a roller, and other devices that can rotate and roll the solidified felt embryo. When the temperature reaches the melting point of the container of the liquid coating, the liquid coating flows out, and the roller equipment is started to roll so that the liquid coating can be evenly adsorbed on the surface of the annular cavity. The moisture in the coating will evaporate and solidify at high temperature. When the high-temperature curing process is completed, the liquid coating is cooled and solidified to form an annular cavity inside the solidified felt embryo, and then the subsequent process flow is carried out.

[0043] In order to prevent the liquid coating from being squeezed during the embryo making process, the liquid coating is filled in a container, and a space for accommodating the filling body is processed in the soft felt precursor.

[0044] The size, shape and position of the container for filling the liquid coating are determined by the annular cavity. The container will melt when exposed to high temperature, and the liquid coating can be filled into the container.

[0045] Furthermore, the temperature of the heating and rotating treatment is ≥230°C, including but not limited to any point value of 230°C, 250°C, 280°C, 300°C, 330°C, 350°C, 380°C or 400°C, or a range value between any two of them.

[0046] Furthermore, the heating time of the heating and rotation treatment is 2 to 4 hours (for example, it can be but not limited to any one of 2 hours, 2.5 hours, 3 hours, 3.5 hours or 4 hours, or a range between any two of them), and the time of the constant temperature heat treatment is 0.5 to 2 hours (for example, it can be but not limited to any one of 0.5 hours, 1 hour, 1.5 hours or 2 hours, or a range between any two of them).

[0047] Furthermore, the rotation speed of the heating rotation treatment is 0.05 to 0.2 rpm, including but not limited to any one of 0.05 rpm, 0.1 rpm, 0.15 rpm or 0.2 rpm or a range between any two of them.

[0048] By regulating the temperature, time and rotation speed of the heating and rotating treatment, the liquid coating can be evenly distributed on the surface of the annular cavity, and the coating of the cured coating can be controlled within a reasonable range. Heating can vaporize the water in the liquid coating, so that the liquid coating can be solidified. Rotation allows the liquid coating to evenly cover the cavity surface, achieving a cavity effect.

[0049] Further, the melting point of the container is 100-500°C, including but not limited to 100°C, 150°C, 200°C, 250°C, 300°C, 350°C, 400°C, 450°C or 500°C.

[0050] Furthermore, the annular soft felt is treated with resin dipping, and the resin dipping process can be a conventional resin dipping process in the art.

[0051] Furthermore, the liquid coating comprises the following components in parts by mass:

[0052] 5-6 parts of adhesive, 4-5 parts of graphite, 21-23 parts of silicon carbide, 1-2 parts of carbon fiber powder, 0.5-2 parts of fumed silica powder, 9-11 parts of triethanolamine borate, 7-9 parts of additives, 33-37 parts of water and 10-15 parts of anhydrous ethanol.

[0053] Furthermore, the first cooling further includes: a first carbonization treatment, a heating treatment, machining, a hardening treatment, a second carbonization treatment and a surface treatment.

[0054] Further, the temperature of the first carbonization treatment is 700-1000°C, including but not limited to any point value of 700°C, 750°C, 800°C, 850°C, 900°C, 950°C or 1000°C or a range value between any two of them.

[0055] Furthermore, the time of the first carbonization treatment is 20 to 26 hours, including but not limited to any one of 20 hours, 21 hours, 22 hours, 23 hours, 24 hours, 25 hours or 26 hours, or a range between any two of them.

[0056] The first carbonization treatment is the process of decomposing the material into carbon-based compounds in a high temperature environment. This process mainly increases the carbon content in the material by evaporating or dissolving the non-carbon elements in the material under high temperature, thereby increasing its conductivity. The higher the temperature, the smaller the graphite layer spacing of the carbonized sample, and the higher the structural order of the sample. This process is crucial to improving the conductivity and stability of the material, especially in the photovoltaic field, which can improve the performance and life of photovoltaic materials.

[0057] Furthermore, the temperature of the heat treatment is 1800-2000°C, including but not limited to any point value of 1800°C, 1830°C, 1850°C, 1880°C, 1900°C, 1930°C, 1950°C, 1980°C or 2000°C or a range value between any two of them.

[0058] Furthermore, the heating treatment time is 20 to 26 hours, including but not limited to any one of 20 hours, 21 hours, 22 hours, 23 hours, 24 hours, 25 hours or 26 hours, or a range between any two of them.

[0059] In the photovoltaic field, materials are subjected to high temperature heating treatment to achieve specific physical or chemical properties. The present invention is carried out at a certain heating treatment temperature and time to obtain good thermal shock resistance, high strength, high toughness and other properties. This treatment can not only improve the durability and stability of the material, but also effectively reduce production energy consumption and increase the service life of equipment, thereby reducing the cost of the entire production.

[0060] Furthermore, the hardening treatment specifically includes: coating AB glue on the surface of the cured felt blank and then hardening it.

[0061] Furthermore, the temperature of the second carbonization treatment is 2195-2205°C, including but not limited to any point value of 2195°C, 2196°C, 2197°C, 2198°C, 2199°C, 2200°C, 2201°C, 2202°C, 2203°C, 2204°C or 2205°C or the range value between any two of them.

[0062] Furthermore, the time of the second carbonization treatment is 25 to 30 hours, including but not limited to any one of 25 hours, 26 hours, 27 hours, 28 hours, 29 hours or 30 hours, or a range between any two of them.

[0063] The second carbonization treatment can improve the electrical conductivity, heat resistance, etc. of the solid felt, thereby enhancing its efficiency and life in the photovoltaic system.

[0064] Furthermore, the surface treatment specifically includes:

[0065] The surface treatment coating is coated on the surface of the cured felt body after the second carbonization treatment, and then dried, cooled and calcined.

[0066] Furthermore, the temperature of the drying process is 145-155°C, including but not limited to any point value of 145°C, 147°C, 149°C, 151°C, 153°C or 155°C, or a range value between any two of them.

[0067] Furthermore, the drying treatment time is 1 to 2 hours, including but not limited to any one of 1 hour, 1.2 hours, 1.4 hours, 1.6 hours, 1.8 hours or 2 hours or a range between any two of them.

[0068] Furthermore, the calcination temperature is 1750-1850°C, including but not limited to any point value of 1750°C, 1760°C, 1770°C, 1780°C, 1790°C, 1800°C, 1810°C, 1820°C, 1830°C, 1840°C or 1850°C or a range value between any two of them.

[0069] Furthermore, the calcination time is 0.8 to 1.2 h, including but not limited to any one of 0.8 h, 0.9 h, 1.0 h, 1.1 h or 1.2 h or a range between any two of them.

[0070] Furthermore, the coating thickness of the surface treatment coating is 1 to 3 mm, including but not limited to any point value of 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm or a range value between any two of them.

[0071] Furthermore, the surface treatment coating comprises the following components in parts by mass:

[0072] 5-6 parts of adhesive, 4-5 parts of graphite, 21-23 parts of silicon carbide, 1-2 parts of carbon fiber, 0.5-2 parts of fumed silica, 9-11 parts of triethanolamine borate, 7-9 parts of additives and 46-49 parts of solvent.

[0073] In some specific embodiments, in the surface treatment coating, the binder may be, for example, but not limited to, any one of 5, 5.2, 5.4, 5.6, 5.8 or 6 parts, or a range between any two parts, in terms of mass fractions; graphite may be, for example, but not limited to, any one of 4, 4.2, 4.4, 4.6, 4.8 or 5 parts, or a range between any two parts; silicon carbide may be, for example, but not limited to, any one of 21, 21.2, 21.4, 21.6, 21.8, 22, 22.2, 22.4, 22.6, 22.8 or 23 parts, or a range between any two parts; carbon fiber may be, for example, but not limited to, any one of 1, 1.2, 1.4, 1.6, 1.8 or 2 parts, or a range between any two parts; fumed silica may be, for example, The amount of triethanolamine borate can be, but is not limited to, any one of 0.5, 0.7, 0.9, 1.1, 1.3, 1.5, 1.7 or 2 parts, or a range between any two of them; the amount of triethanolamine borate can be, for example, but not limited to, any one of 9, 9.2, 9.4, 9.6, 9.8, 10.0, 10.2, 10.4, 10.6, 10.8 or 11 parts, or a range between any two of them. the additive may be, for example, but not limited to, any one of 7 parts, 7.2 parts, 7.4 parts, 7.6 parts, 7.8 parts, 8 parts, 8.2 parts, 8.4 parts, 8.6 parts, 8.8 parts or 9 parts, or a range between any two of them; the solvent may be, for example, but not limited to, any one of 46 parts, 46.5 parts, 47 parts, 47.5 parts, 48 ​​parts, 48.5 parts or 49 parts, or a range between any two of them.

[0074] In surface treatment coatings and cured coatings, carbon fiber powder provides strength and rigidity, enhancing the mechanical properties of the coating; graphite powder provides lubricity and conductivity, helping to improve the physical properties of the solid felt coating; the binder firmly binds the other ingredients together to form a stable coating structure; the curing agent acts as a catalyst during the curing process, accelerating the curing reaction of the binder and improving the hardness of the solid felt coating.

[0075] Furthermore, the solvent includes, by weight, 34-35 parts of water and 12-14 parts of ethanol. Ethanol is used as a solvent to help adjust the viscosity and fluidity of the mixture, so as to facilitate coating and uniform distribution.

[0076] Furthermore, the annular soft felt includes but is not limited to: at least one of P polyacrylonitrile-based carbon felt, polyacrylonitrile-based graphite felt, viscose-based carbon felt, viscose-based graphite felt, pre-oxidized fiber carbon felt or pre-oxidized fiber graphite felt.

[0077] Another aspect of the present invention also relates to a semiconductor crystal manufacturing device, including the solid felt described above or the solid felt prepared by the method for preparing the solid felt described above.

[0078] The embodiments of the present invention will be described in detail below in conjunction with the examples, but it will be appreciated by those skilled in the art that the following examples are only used to illustrate the present invention and should not be considered as limiting the scope of the present invention. If no specific conditions are specified in the examples, the conditions are carried out according to normal conditions or the conditions recommended by the manufacturer. If the manufacturer of the reagents or instruments used is not specified, they are all conventional products that can be obtained commercially.

[0079] Example 1

[0080] The solid felt provided in this embodiment includes: a base and a plurality of annular cavities arranged inside the base; a solidified coating is arranged on the surface of the annular cavity; the diameter of the annular cavity is 30 mm; the number of annular cavities per unit area is 550; and the distance between two adjacent annular cavities is 30 mm.

[0081] The method for preparing the solid felt provided in this embodiment comprises the following steps:

[0082] 1. Take out the soft felt raw materials, put them into the equipment for dipping, mix the glue and the soft felt raw materials fully, take out the soft felt raw materials and dry them for later use;

[0083] 2. Fill the liquid coating into a container to obtain a filling body; the melting point of the container is 100°C;

[0084] The liquid coating comprises the following components in parts by mass:

[0085] 5.5 parts of furan resin, 4.5 parts of graphite, 22 parts of silicon carbide, 1.5 parts of carbon fiber powder, 1 part of fumed silica powder, 10 parts of triethanolamine borate, 8 parts of additives, 35 parts of water and 13 parts of anhydrous ethanol; the additives include yttrium silicate and aluminum tantalate in a mass ratio of 1:2;

[0086] 3. Cut the raw material of the soft felt into annular soft felt, stack them, process the annular soft felt at the position where the annular cavity is formed to form a space that can accommodate the filling body, fill the filling body in the processed space, and continue to stack the annular soft felt to obtain a cured felt embryo;

[0087] 4. The cured felt embryo body is subjected to heating and rotating treatment and the first cooling; the temperature of the heating and rotating treatment is 230° C., the heating time is 3 hours, the constant temperature heat treatment time is 1 hour, and the rotation speed is 0.1 rpm;

[0088] 5. After the first cooling, the first carbonization treatment, heating treatment, machining, hardening treatment and second carbonization treatment are also carried out; the temperature of the first carbonization treatment is 700°C and the time is 23h; the temperature of the heating treatment is 1800°C and the time is 23h; the temperature of the second carbonization treatment is 2200°C and the time is 27h;

[0089] 6. After coating the surface of the cured felt body with a surface treatment coating having a thickness of 95 μm, drying treatment, second cooling and calcination are performed; the drying temperature is 145° C. for 1 hour; the calcination temperature is 1750° C. for 0.8 hour;

[0090] The surface treatment coating includes the following components in parts by mass:

[0091] 5.5 parts of furan resin, 4.5 parts of graphite, 22 parts of silicon carbide, 1.5 parts of carbon fiber, 1 part of fumed silica, 10 parts of triethanolamine borate, 8 parts of additives, 34.5 parts of water and 13 parts of ethanol; the additives include: yttrium silicate and aluminum tantalate in a mass ratio of 1:2.

[0092] Example 2

[0093] The solid felt provided in this embodiment includes: a base and a plurality of annular cavities arranged inside the base; a solidified coating is arranged on the surface of the annular cavity; the diameter of the annular cavity is 20 mm; the number of annular cavities per unit area is 350; and the distance between two adjacent annular cavities is 40 mm.

[0094] The method for preparing the solid felt provided in this embodiment comprises the following steps:

[0095] 1. Same as Example 1;

[0096] 2. Fill the liquid coating into a container to obtain a filling body; the melting point of the container is 100°C;

[0097] The liquid coating comprises the following components in parts by mass:

[0098] 5 parts of furan resin, 4 parts of graphite, 21 parts of silicon carbide, 1 part of carbon fiber powder, 0.5 parts of fumed silica powder, 9 parts of triethanolamine borate, 7 parts of additives, 33 parts of water and 10 parts of anhydrous ethanol; the additives include yttrium silicate and aluminum tantalate in a mass ratio of 1:1;

[0099] 3. Same as Example 1;

[0100] 4. The cured felt embryo is subjected to heating and rotating treatment and the first cooling; the temperature of the heating and rotating treatment is 250° C., the heating time is 4 hours, the constant temperature heat treatment time is 0.5 hours, and the rotation speed is 0.05 revolutions per second;

[0101] 5. After the first cooling, the first carbonization treatment, heating treatment, machining, hardening treatment and second carbonization treatment are also carried out; the temperature of the first carbonization treatment is 800°C and the time is 23h; the temperature of the heating treatment is 1850°C and the time is 20h; the temperature of the second carbonization treatment is 2200°C and the time is 27h;

[0102] 6. After coating the surface of the cured felt body with a surface treatment coating having a thickness of 100 μm, drying treatment, second cooling and calcination are performed; the drying temperature is 147° C. for 1.5 h; the calcination temperature is 1780° C. for 0.9 h;

[0103] The surface treatment coating includes the following components in parts by mass:

[0104] 5 parts of furan resin, 4 parts of graphite, 21 parts of silicon carbide, 1 part of carbon fiber, 0.5 parts of fumed silica, 9 parts of triethanolamine borate, 7 parts of additives, 34 parts of water and 12 parts of ethanol; the additives include: yttrium silicate and aluminum tantalate in a mass ratio of 1:1.

[0105] Example 3

[0106] The solid felt provided in this embodiment includes: a base and a plurality of annular cavities arranged inside the base; a solidified coating is arranged on the surface of the annular cavity; the diameter of the annular cavity is 25 mm; the number of annular cavities per unit area is 790; and the distance between two adjacent annular cavities is 50 mm.

[0107] The method for preparing the solid felt provided in this embodiment comprises the following steps:

[0108] 1. Same as Example 1;

[0109] 2. Fill the liquid coating into a container to obtain a filling body; the melting point of the container is 100°C;

[0110] The liquid coating comprises the following components in parts by mass:

[0111] 6 parts of furan resin, 5 parts of graphite, 23 parts of silicon carbide, 2 parts of carbon fiber powder, 2 parts of fumed silica powder, 11 parts of triethanolamine borate, 9 parts of additives, 37 parts of water and 15 parts of anhydrous ethanol; the additives include yttrium silicate and aluminum tantalate in a mass ratio of 1:3;

[0112] 3. Same as Example 1;

[0113] 4. The cured felt embryo is subjected to heating and rotating treatment and the first cooling; the temperature of the heating and rotating treatment is 280° C., the heating time is 2 hours, the constant temperature heat treatment time is 2 hours, and the rotation speed is 0.2 revolutions per second;

[0114] 5. After the first cooling, the first carbonization treatment, heating treatment, machining, hardening treatment and second carbonization treatment are also carried out; the temperature of the first carbonization treatment is 900°C and the time is 23h; the temperature of the heating treatment is 1950°C and the time is 26h; the temperature of the second carbonization treatment is 2205°C and the time is 25h;

[0115] 6. After coating the surface of the cured felt body with a surface treatment coating having a thickness of 105 μm, drying treatment, second cooling and calcination are performed; the drying temperature is 150° C. for 1.8 h; the calcination temperature is 1830° C. for 1.1 h;

[0116] The surface treatment coating includes the following components in parts by mass:

[0117] 6 parts of furan resin, 5 parts of graphite, 23 parts of silicon carbide, 2 parts of carbon fiber, 2 parts of fumed silica, 11 parts of triethanolamine borate, 9 parts of additives, 35 parts of water and 14 parts of ethanol; the additives include: yttrium silicate and aluminum tantalate in a mass ratio of 1:3.

[0118] Example 4

[0119] The solid felt provided in this embodiment includes: a base and a plurality of annular cavities arranged inside the base; a solidified coating is arranged on the surface of the annular cavity; the diameter of the annular cavity is 30 mm; the number of annular cavities per unit area is 610; and the distance between two adjacent annular cavities is 60 mm.

[0120] The method for preparing the solid felt provided in this embodiment comprises the following steps:

[0121] 1. Same as Example 1;

[0122] 2. Fill the liquid coating into a container to obtain a filling body; the melting point of the container is 100°C;

[0123] The liquid coating comprises the following components in parts by mass:

[0124] 5 parts of furan resin, 5 parts of graphite, 23 parts of silicon carbide, 2 parts of carbon fiber powder, 0.5 parts of fumed silica powder, 9 parts of triethanolamine borate, 7 parts of additives, 33 parts of water and 15 parts of anhydrous ethanol; the additives include yttrium silicate and aluminum tantalate in a mass ratio of 1:2;

[0125] 3. Same as Example 1;

[0126] 4. The cured felt body is subjected to heating and rotating treatment and the first cooling; the temperature of the heating and rotating treatment is 300° C., the heating time is 2.5 hours, the constant temperature heat treatment time is 1.5 hours, and the rotation speed is 0.1 rpm;

[0127] 5. After the first cooling, the first carbonization treatment, heating treatment, machining, hardening treatment and second carbonization treatment are also carried out; the temperature of the first carbonization treatment is 1000°C and the time is 23h; the temperature of the heating treatment is 2000°C and the time is 23h; the temperature of the second carbonization treatment is 2195°C and the time is 30h;

[0128] 6. After coating the surface of the cured felt body with a surface treatment coating having a thickness of 98 μm, drying, second cooling and calcination are performed; the drying temperature is 155° C. for 2 hours; the calcination temperature is 1850° C. for 1.2 hours;

[0129] The surface treatment coating includes the following components in parts by mass:

[0130] 5.4 parts of furan resin, 4.7 parts of graphite, 21.3 parts of silicon carbide, 1.9 parts of carbon fiber, 0.8 parts of fumed silica, 9.5 parts of triethanolamine borate, 7.7 parts of additives, 34.6 parts of water and 12.5 parts of ethanol; the additives include: yttrium silicate and aluminum tantalate in a mass ratio of 1:2.

[0131] Comparative Example 1

[0132] The only difference between this comparative example and Example 1 is that no annular cavity is provided in the base body.

[0133] Comparative Example 2

[0134] The only difference between this comparative example and Example 1 is that the number of annular cavities per unit area is 100.

[0135] Comparative Example 3

[0136] The only difference between this comparative example and Example 1 is that the number of annular cavities per unit area is 850.

[0137] Experimental example

[0138] The thermal insulation, stability and conductivity of the solid felt of each embodiment and comparative example were tested. The thermal insulation was judged by the output heater power. When the power was reduced, the thermal insulation was good. The results are shown in Table 1.

[0139] Table 1

[0140]

[0141]

[0142] It can be seen from Table 1 that the more cavities there are, the higher the thermal insulation performance is. However, if there are too many cavities, the distance between them is too close, which leads to a decrease in the strength of the solid felt.

[0143] Although the present invention has been illustrated and described with specific embodiments, it should be appreciated that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Those skilled in the art should understand that the technical solutions described in the above embodiments may be modified, or some or all of the technical features thereof may be replaced by equivalents without departing from the spirit and scope of the present invention. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention. Therefore, this means that all such replacements and modifications within the scope of the present invention are included in the appended claims.

Claims

1. A solid felt, characterized in that: include: A base body and a plurality of annular cavities arranged inside the base body; The surface of the annular cavity is provided with a cured coating.

2. The solid felt according to claim 1, characterized in that: Includes at least one of the following technical features: (1) The diameter of the annular cavity is 20 to 30 mm; (2) Taking the cross-sectional area of ​​the solid felt per square meter as the unit area, the number of the annular cavities provided in the unit area is 350 to 790; (3) The distance between two adjacent annular cavities is 30 to 60 mm.

3. The solid felt according to claim 1, characterized in that: The thickness of the cured coating is 2 to 4 mm; Preferably, the cured coating comprises the following components in parts by mass: 5-6 parts of adhesive, 4-5 parts of graphite, 21-23 parts of silicon carbide, 1-2 parts of carbon fiber powder, 0.5-2 parts of fumed silica powder, 9-11 parts of triethanolamine borate and 7-9 parts of additives.

4. The solid felt according to claim 3, characterized in that: The adhesive comprises: furan resin; And / or, the additive includes yttrium silicate and aluminum tantalate in a mass ratio of 1:1 to 3.

5. The method for preparing a solid felt according to any one of claims 1 to 4, characterized in that: The following steps are involved: (a) filling a container with a liquid coating to obtain a filled body; The annular soft felt is stacked to obtain a soft felt precursor; (b) machining a space in the soft felt precursor for accommodating the filling body, and filling the filling body into the soft felt precursor to obtain a cured felt embryo; (c) subjecting the cured felt body to a heating and rotating treatment and a first cooling process.

6. The method for preparing a solid felt according to claim 5, characterized in that: Includes at least one of the following technical features: (1) The temperature of the heating and rotating treatment is ≥ 230°C; (2) The heating and rotating treatment has a heating time of 2 to 4 hours, and a constant temperature heat treatment time of 0.5 to 2 hours; (2) The rotation speed of the heating and rotating treatment is 0.05 to 0.2 rpm.

7. The method for preparing a solid felt according to claim 5, characterized in that: The annular soft felt is treated with glue dipping.

8. The method for preparing a solid felt according to claim 5, characterized in that: The liquid coating comprises the following components in parts by mass: 5-6 parts of adhesive, 4-5 parts of graphite, 21-23 parts of silicon carbide, 1-2 parts of carbon fiber powder, 0.5-2 parts of fumed silica powder, 9-11 parts of triethanolamine borate, 7-9 parts of additives, 33-37 parts of water and 10-15 parts of anhydrous ethanol.

9. The method for preparing a solid felt according to claim 5, characterized in that: The first cooling process further includes: a first carbonization treatment, a heating treatment, a machining process, a hardening treatment, a second carbonization treatment and a surface treatment.

10. A semiconductor crystal manufacturing device, characterized in that: The invention relates to a solid felt prepared by the solid felt described in any one of claims 1 to 4 or the method for preparing the solid felt described in any one of claims 5 to 9.

Images