Plasma cleaning apparatus

Abstract

The application discloses a kind of plasma cleaning equipment, it is related to plasma technical field, the plasma cleaning equipment includes base, circulating feeding device, automatic loading and unloading device and transition conveying device, circulating feeding device includes the feeding frame of sliding in base and the supporting plate of being movably arranged in feeding frame, supporting plate is equipped with the material box of containing material piece, circulating feeding device can be circulated feeding and cooperate in automatic loading and unloading device with push feeding mechanism Material piece is pushed to conveyor belt, then conveyor belt cooperates with push material mechanism and pushes material piece to the load plate in transition conveying device, load plate drives material piece to enter the cleaning cavity of cleaning device and is cleaned;In the technical scheme provided in the application, while improving the feeding efficiency, it also has automatic efficient unloading so that the feeding and discharging rate can match the cleaning rate of cleaning device, thereby improving the overall working efficiency of equipment.

Description

Technical Field

[0001] This invention relates to the field of plasma technology, and in particular to a plasma cleaning device. Background Technology

[0002] Plasma cleaning equipment works on the principle that the active particles of plasma react physically or chemically with the material surface, thereby removing surface contaminants. Plasma is the fourth state of matter, composed of electrons, ions, free radicals, etc. These active particles interact with the material surface under the influence of an electric field, achieving a cleaning effect. During operation, the plasma cleaning equipment first generates plasma in a vacuum chamber, then utilizes the active particles in the plasma to interact with the material surface, removing surface dirt and oxides through physical bombardment or chemical reaction. Physical bombardment mainly involves ion collisions with the surface, causing contaminants to detach; chemical reactions involve the active particles reacting with the contaminants to generate volatile substances, thus achieving cleaning.

[0003] Plasma cleaning equipment generally includes a cleaning device and a conveying device. The material to be cleaned is transported to the cleaning device by an automated conveying device for plasma cleaning. In related technologies, the automated conveying device generally uses a conveyor belt for transport. However, since the cleaning device can clean several material pieces at a time, the feeding efficiency of the conveyor belt cannot match the cleaning rate. Summary of the Invention

[0004] The main objective of this invention is to provide a plasma cleaning device with high feeding efficiency.

[0005] To achieve the above objectives, the plasma cleaning equipment proposed in this invention includes:

[0006] The base is provided with two parallel and spaced first slide rails and a conveyor belt arranged parallel to the first slide rails. A cleaning device is provided at the end of the conveyor belt facing away from the first slide rails, and the cleaning device is provided with a cleaning chamber.

[0007] A circulating feeding device includes two feeding racks and two trays. Each feeding rack is slidably mounted on a first slide rail. Each feeding rack is provided with a first guide rail extending in a direction perpendicular to the base. Each tray is slidably mounted on a first guide rail. Each tray is provided with a material box for holding material sheets.

[0008] An automated loading and unloading device includes a loading assembly and an unloading assembly. The loading assembly includes a first track, a first crossbeam, and a feeding mechanism. The first track is disposed on a base and arranged along the extension direction of a conveyor belt. The first crossbeam is slidably disposed on the first track and has a first drive mechanism facing the base. The feeding mechanism is located at the drive end of the first drive mechanism. The unloading assembly includes a second track, a second crossbeam, and a discharging mechanism. The second track is disposed on the base and parallel to the first track. The second crossbeam is slidably disposed on the second track and has a second drive mechanism facing the base. The discharging mechanism is located at the drive end of the second drive mechanism.

[0009] A transition conveying device includes a support plate movably mounted on the base. The support plate has a trough for accommodating the material sheet. The support plate is located at the end of the conveyor belt away from the circulating feeding device. The support plate can rotate between the conveyor belt and the cleaning chamber.

[0010] In one embodiment, the base is provided with a platform, the conveyor belt is disposed on the platform, and the platform is provided with a pressing mechanism, the pressing mechanism comprising:

[0011] A material pressing drive unit is disposed on the base platform, and a transmission plate is provided at the driving end of the material pressing drive unit, the transmission plate being arranged along the extension direction of the conveyor belt; and

[0012] Two rockers are rotatably connected to the base and are respectively located on both sides of the pressing drive along the direction of the conveyor belt. Each rocker has a connecting end and a free end. The connecting end is connected to the transmission plate, and the free end is provided with a pressure roller that can be close to or away from the conveyor belt.

[0013] In one embodiment, the pressing mechanism further includes a fine-tuning bolt, the free end of which has a through hole facing the base, the fine-tuning bolt being screwed into the through hole and able to extend out of the through hole to abut against the base.

[0014] In one embodiment, the base is provided with a placement rack located at one end of the conveyor belt away from the circulating feeding device, and the placement rack forms a buffer slot that communicates with the conveyor belt.

[0015] In one embodiment, the plasma cleaning equipment includes multiple conveyor belts, one of each pair of adjacent conveyor belts being disposed on the base, and the other being slidably disposed on a second guide rail on the base;

[0016] The base is provided with a width adjustment drive, the drive end of the width adjustment drive is provided with a fourth lead screw, the fourth lead screw is provided with a fifth slider, and the fifth slider is connected to the conveyor belt provided on the second guide rail so that the spacing between every two adjacent conveyor belts is adjustable.

[0017] In one embodiment, the base is provided with a longitudinal adjustment mechanism, the longitudinal adjustment mechanism comprising:

[0018] A longitudinal adjustment drive is provided on the base. The drive end of the longitudinal adjustment drive has a fifth lead screw extending along the line connecting the material box and the cleaning device. The fifth lead screw has a sliding seat, and multiple conveyor belts are disposed on the sliding seat.

[0019] The displacement detection mechanism includes a detection end disposed on the base and a sensing end disposed on the sliding seat, wherein the detection end is electrically connected to the longitudinal adjustment drive component.

[0020] In one embodiment, the automated loading and unloading device further includes a pressure detection component, which includes a loading pressure sensor disposed on the first crossbeam and a unloading pressure sensor disposed on the second crossbeam.

[0021] The first track and the second track are respectively equipped with a first motor for driving the first crossbeam to move and a second motor for driving the second crossbeam to move. The feeding pressure sensor is electrically connected to the feeding mechanism and the first motor, and the discharging pressure sensor is electrically connected to the discharging mechanism and the second motor.

[0022] In one embodiment, the feeding mechanism includes a mounting plate and a plurality of push rods disposed on the mounting plate. The mounting plate is movably disposed on the first crossbeam, and the plurality of push rods are evenly spaced on the mounting plate.

[0023] The mounting plate is provided with a first guide rail on the side facing the base, and the push rod is slidably disposed on the first guide rail;

[0024] The push rod has a first abutment block facing the mounting plate, and the mounting plate has a second abutment block facing the push rod. The first abutment block and the second abutment block are spaced apart by an elastic element, and the deformation direction of the elastic element is along the extension direction of the push rod.

[0025] In one embodiment, the transition conveying device includes:

[0026] A conveyor belt, which is arranged parallel to the transmission belt, includes an upper belt body and a lower belt body. Each of the upper belt body and the lower belt body is provided with a bearing plate. The bearing plate is provided with a mounting frame opening, and the mounting frame opening is provided with a movable plate.

[0027] Multiple support sections are disposed on the movable plate, each support section corresponding to one conveyor belt. Each support section includes two spaced-apart support members, each support member having a corresponding placement groove.

[0028] A lifting mechanism is provided on the base, and the movable end of the lifting mechanism is connected to the movable plate and is used to drive the lifting and lowering of the movable plate.

[0029] In one embodiment, the movable plate has a plurality of support portions stacked vertically, and a bracket is provided between every two adjacent support portions to support the support portions.

[0030] The present invention provides a plasma cleaning device, comprising a base, a circulating feeding device, an automated loading and unloading device, and a transition conveying device. The base is provided with two parallel and spaced first slide rails and a conveyor belt parallel to the first slide rails. The circulating feeding device includes two feeding racks and trays respectively provided on the two feeding racks. The two feeding racks are slidably mounted on the first slide rails. The trays are liftably mounted on the feeding racks and are provided with multiple material boxes. Each material box can store multiple pieces to be cleaned. The extension direction of the first slide rails is the feeding direction. During feeding, one feeding rack moves towards one end of the cleaning machine and other automated equipment pushes the pieces in the material boxes into the cleaning machine until all the pieces leave the material boxes. At this time, the tray on the feeding rack descends along the guide rail until the highest position of the material box on the tray is lower than the other tray. The feeding rack moves away from the cleaning machine, and the other feeding rack, fully loaded with pieces to be cleaned, moves towards the cleaning machine. Since the trays on the two feeding racks are vertically staggered, no interference or collision will occur.

[0031] The sheets to be cleaned, fed by the aforementioned circulating feeding device, are pushed into the conveyor belt by the feeding mechanism in the loading assembly. The conveyor belt then transports them to the end furthest from the material box, where the unloading assembly pushes them onto the carrier plate of the transition conveyor. They then enter the corresponding trough for fixed positioning and are finally transported by the moving carrier plate to the cleaning chamber of the cleaning device for cleaning. Furthermore, the cleaned sheets can continue to be transported by the carrier plate to one end of the conveyor belt, where the reverse-moving feeding mechanism pushes the cleaned sheets back into the material box, thus unloading them. This solution improves feeding efficiency while also providing automated and efficient unloading, ensuring that the feeding and unloading rates match the cleaning rate of the cleaning device, thereby improving the overall working efficiency of the equipment. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of an embodiment of the plasma cleaning equipment provided by the present invention;

[0034] Figure 2 This is a schematic diagram of the exploded structure of a plasma cleaning equipment.

[0035] Figure 3 This is a schematic diagram of the internal structure of a plasma cleaning equipment.

[0036] Figure 4 This is a schematic diagram of the circulating feeding device in a plasma cleaning equipment.

[0037] Figure 5 This is a schematic diagram of the circulating feeding device in a plasma cleaning equipment from another angle.

[0038] Figure 6 This is a schematic diagram of the base structure in the circulating feeding device;

[0039] Figure 7 This is a schematic diagram of the sliding seat in the circulating feeding device;

[0040] Figure 8 This is a schematic diagram of the spacing adjustment component;

[0041] Figure 9 This is a schematic diagram of the material box structure;

[0042] Figure 10 This is a structural diagram of the sheet product;

[0043] Figure 11 This is a schematic diagram of the structure of an embodiment of the automated loading and unloading device provided by the present invention;

[0044] Figure 12 for Figure 11 A magnified view of a section at point A in the middle;

[0045] Figure 13 A top view of an automated loading and unloading device;

[0046] Figure 14 for Figure 1 A schematic diagram of the loading and unloading components in the middle;

[0047] Figure 15 This is a schematic diagram of the structure of the loading component provided by the present invention;

[0048] Figure 16 This is a schematic diagram of the internal structure of the loading component;

[0049] Figure 17 This is a schematic diagram of the feeding mechanism;

[0050] Figure 18 This is a structural diagram of the unloading component;

[0051] Figure 19 This is a schematic diagram of the structure of the transmission device provided by the present invention;

[0052] Figure 20 A schematic diagram of the transmission device from another angle;

[0053] Figure 21 This is a schematic diagram of the base in the transmission device;

[0054] Figure 22 This is a schematic diagram of the structure of the fine-tuning bolt in the conveying device;

[0055] Figure 23 This is a schematic diagram of the material pressing mechanism in the conveying device;

[0056] Figure 24 This is a schematic diagram of the structure of the transition conveying device provided by the present invention;

[0057] Figure 25 This is a structural schematic diagram of the load-bearing component;

[0058] Figure 26 This is a schematic diagram of the lifting mechanism.

[0059] Explanation of icon numbers:

[0060] 1000. Plasma cleaning equipment; 1. Base; 1a. Loading and unloading station; 1b. Preparation station; 1c. Cleaning station; 2. Shell; 21. Upper frame; 22. Lower frame; 5-100. Cleaning device; 2000. Material sheet.

[0061] 1-100, Circulating feeding device; 1-11, First track; 1-12, First drive assembly; 1-121, First motor; 1-122, First lead screw; 1-123, First slider; 1-2, Feeding rack; 1-21, Guide rail; 1-22, Second drive assembly; 1-221, Second motor; 1-222, Second lead screw; 1-223, Second slider; 1-3, Pallet; 1-4, Material box; 1-41, Receiving cavity; 1-42, Limiting groove; 1-5, Sliding seat; 1-51, Second track; 1-511, Fourth slider; 1-52, Third drive assembly; 1-521, Third motor; 1-522, Third lead screw; 1-523, Third slider; 1-6, Spacing adjustment assembly; 1-61, First cylinder; 1-62, Fourth slider; 1-63, Third track; 1-64, Mounting block.

[0062] 2-100. Automated loading and unloading device; 2-1. Base; 2-2. Feeding assembly; 2-21. Third track; 2-211. Limiting assembly; 2-212. Fifth motor; 2-22. First crossbeam; 2-221. Sleeve; 2-23. Pushing feeding mechanism; 2-231. Mounting plate; 2-232. Push rod; 2-233. Contouring surface; 2-234. Guide rod; 2-235. First guide rail; 2-236. Second abutment 2-237, Elastic element; 2-238, First abutting block; 2-24, First drive mechanism; 2-25, Feeding pressure sensor; 2-3, Unloading assembly; 2-31, Fourth track; 2-311, Sixth motor; 2-32, Second crossbeam; 2-33, Push-out mechanism; 2-331, Dual-purpose push head; 2-34, Second drive mechanism; 2-35, Unloading pressure sensor; 2-4, Placement rack; 2-41, Buffer slot.

[0063] 3-100 Conveying device; 3-1 Conveyor belt; 3-11 Pressing mechanism; 3-111 Pressure drive component; 3-112 Transmission plate; 3-113 Rocker; 3-114 Pressure roller; 3-115 Fine-tuning bolt; 3-2 Fourth motor; 3-3 Width adjustment drive component; 3-31 Width adjustment slider; 3-4 Longitudinal adjustment drive component; 3-5 Position detection component; 3-6 Sliding seat; 3-61 Base.

[0064] 4-100 Transition Conveying Device; 4-1 Workbench; 4-11 Position Monitoring Component; 4-12 Third Guide Rail; 4-121 Bearing Plate; 4-2 Movable Plate; 4-21 Bearing Component; 4-211 Placement Slot; 4-3 Lifting Mechanism; 4-31 Lifting Cylinder; 4-32 Guide Column; 4-33 Horizontal Movement Motor; 4-34 Lifting Plate.

[0065] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0066] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0067] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0068] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0069] This invention proposes a plasma cleaning device 1000, aiming to provide a plasma cleaning device 1000 with high feeding efficiency. Figures 1 to 26 This is a schematic diagram of an embodiment of the plasma cleaning equipment 1000 of the present invention.

[0070] Please refer to Figures 1 to 26This invention proposes a plasma cleaning device 1000, including a base 1, a circulating feeding device 1-100, an automated loading and unloading device 2-100, and a transition conveying device 4-100. The base 1 is provided with two parallel and spaced-apart first slide rails and a conveyor belt 3-1 arranged parallel to the first slide rails. A cleaning device 5-100 is provided at the end of the conveyor belt 3-1 facing away from the first slide rails, and the cleaning device 5-100 is provided with a cleaning chamber. The circulating feeding device 1-100 includes two feeding racks 1-2 and two pallets 1. -3, each feeding rack 1-2 is slidably mounted on a first guide rail, the feeding rack 1-2 is provided with a first guide rail 2-235 extending in the direction perpendicular to the base 1, each pallet 1-3 is slidably mounted on a first guide rail 2-235, the pallet 1-3 is provided with a material box 1-4 for holding material pieces 2000; the automatic loading and unloading device 2-100 has a loading component and an unloading component, the loading component includes a third track 2-21, a first crossbeam 2-22 and a pushing mechanism 2-23, the first track 1-11 is mounted on the base 1 and Along the extension direction of conveyor belt 3-1, a first crossbeam 2-22 is slidably mounted on a first track 1-11. The first crossbeam 2-22 is provided with a first drive mechanism 2-24 facing the base 1. A feeding mechanism 2-23 is located at the drive end of the first drive mechanism 2-24. The unloading assembly includes a second track 1-51, a second crossbeam 2-32, and a unloading mechanism 2-33. The second track 1-51 is located on the base 1 and is parallel to the first track 1-11. The second crossbeam 2-32 is slidably mounted on the second track 1-51. -51, the second crossbeam 2-32 is provided with a second drive mechanism 2-34 facing the base 1, and the push-down mechanism 2-33 is provided at the drive end of the second drive mechanism 2-34; the transition conveying device 4-100 includes a support plate 4-121 movably provided on the base 1, the support plate 4-121 is provided with a trough for accommodating the material sheet 2000, the support plate 4-121 is provided at one end of the conveyor belt 3-1 away from the circulating feeding device 1-100, and the support plate 4-121 can rotate between the conveyor belt 3-1 and the cleaning chamber.

[0071] Accordingly, the present invention also proposes a method for cleaning sheet 2000 using the aforementioned plasma cleaning equipment 1000. This cleaning process sequentially requires the use of a circulating feeding device 1-100, an automated loading and unloading device 2-100, a conveying device 3-100, a transition conveying device 4-100, and a cleaning device 5-100. First, the sheet 2000 to be cleaned is loaded into a tray manually or mechanically. Several boxes 1-4 containing sheet 2000 are then sequentially fixed in the circulating feeding device 1-100 for feeding the sheet 2000. The tray 1-3 is equipped with boxes 1-4 for holding the sheet 2000. The extension direction of the first slide rail is the feeding direction. During feeding, one of the feeding racks 1-2 moves towards one end of the cleaning machine, and other automated equipment pushes the sheet 2000 in the box 1-4 into the cleaning machine until all sheet 2000 leaves the box 1-4. The pallet 1-3 on the feeding rack 1-2 is lowered along the second guide rail 1-21 until the highest position of the feeding box 1-4 on the pallet 1-3 is lower than the other pallet 1-3. The feeding rack 1-2 moves away from the washing machine, and the other feeding rack 1-2, which is fully loaded with the material sheets 2000 to be cleaned, moves towards the washing machine. Since the pallets 1-3 on the two feeding racks 1-2 are staggered in the vertical direction, there will be no interference or collision. The two pallets 1-3 on the two feeding racks 1-2 alternate between the feeding position and the unloading position, thereby improving the feeding efficiency and matching the cleaning rate of the washing device 5-100. Next, the first drive mechanism 2-24 drives the feeding mechanism 2-23 to descend, and the first crossbeam 2-22 moves towards one end of the conveyor belt 3-1, causing the feeding mechanism 2-23 to push the material sheet 2000 to be cleaned from the material box 1-4 to the conveyor belt 3-1, and then the conveyor belt 3-1 transports it to the placement rack 2-4. The material sheet 2000 to be cleaned is temporarily stored in the placement rack 2-4, and then the feeding mechanism 2-33 pushes the material sheet 2000 from the buffer slot 2-41 of the placement rack 2-4 to the carrier plate 4-121 in the transition conveying device 4-100, controlling the carrier plate. 4-121 rises so that the trough on the support plate 4-121 aligns with the buffer trough 2-41. Under the push of the feeding mechanism 2-33, the material piece 2000 to be cleaned enters the trough. The movable support plate 4-121 drives the material piece 2000 to be cleaned into the cleaning chamber of the cleaning device 5-100 for cleaning. After cleaning, the support plate 4-121 moves in the opposite direction with the cleaned material piece 2000 until it reaches one end of the conveyor belt 3-1. The feeding device moves in the opposite direction to push the material piece 2000 into the material box 1-4, thus achieving unloading.

[0072] The present invention provides a plasma cleaning device 1000, comprising a base 1, a circulating feeding device 1-100, an automated loading and unloading device 2-100, and a transition conveying device 4-100. The base 1 is provided with two parallel, spaced-apart first slide rails and a conveyor belt 3-1 parallel to the first slide rails. The circulating feeding device 1-100 includes two feeding racks 1-2 and trays 1-3 respectively disposed on the two feeding racks 1-2. The two feeding racks 1-2 are slidably disposed on the first slide rails. The trays 1-3 are liftably disposed on the feeding racks 1-2. Multiple material boxes 1-4 are provided on the trays 1-3, each material box 1-4 capable of storing multiple pieces of material 2000 to be cleaned. The first slide rails... The direction of extension is the feeding direction. During feeding, one of the feeding racks 1-2 moves towards one end of the cleaning machine and other automated equipment pushes the material pieces 2000 in the material box 1-4 into the cleaning machine until all the material pieces 2000 leave the material box 1-4. At this time, the pallet 1-3 on the feeding rack 1-2 is lowered along the second guide rail 1-21 until the highest position of the material box 1-4 on the pallet 1-3 is lower than the other pallet 1-3. The feeding rack 1-2 moves away from the cleaning machine, and the other feeding rack 1-2, which is fully loaded with material pieces 2000 to be cleaned, moves towards one end of the cleaning machine. Since the pallets 1-3 on the two feeding racks 1-2 are staggered in the vertical direction, there will be no interference or collision.

[0073] The sheet material 2000 to be cleaned, fed by the aforementioned circulating feeding device 1-100, enters the conveyor belt 3-1 under the push of the feeding mechanism 2-23 in the loading assembly. It is then transported by the conveyor belt 3-1 to the end away from the material box 1-4, where it is pushed by the unloading component 2-3 to the upper support plate 4-121 of the transition conveyor 4-100 and enters the corresponding receiving slot for fixed positioning. Finally, the moving support plate 4-121 transports it to the cleaning chamber of the cleaning device 5-100 for cleaning. Furthermore, the cleaned sheet material 2000 can continue to be transported by the support plate 4-121 to one end of the conveyor belt 3-1, where the reverse-moving unloading mechanism 2-33 pushes the cleaned sheet material 2000 back into the material box 1-4, thus unloading it. This solution improves feeding efficiency while also achieving automated and efficient unloading, ensuring that the feeding and unloading rates match the cleaning rate of the cleaning device 5-100, thereby improving the overall working efficiency of the equipment.

[0074] This plasma cleaning equipment 1000 discloses a conveying device 3-100. In related technologies, when conveying sheet 2000, the track of the conveying device 3-100 cannot accommodate sheet 2000 of different thicknesses. When the user needs to clean sheet 2000 of different thicknesses, it is necessary to adjust the track thickness to achieve the conveying of sheet 2000 of different thicknesses. Therefore, this conveying device 3-100 is equipped with a pressing mechanism 3-11. For details, please refer to further reference. Figures 21 to 23 The base 1 has a platform 3-61, on which the pressing mechanism 3-11 and the conveyor belt 3-1 are both located. The pressing mechanism 3-11 includes a pressing drive component, and the driving end of the pressing drive component has a transmission plate 3-112. The transmission plate is arranged along the extension direction of the conveyor belt 3-1. Two rocker plates 3-113 are movably connected to both ends of the transmission plate 3-112. The two rocker plates 3-113 are rotatably connected to the platform 3-61 and are respectively located on both sides of the pressing drive component along the direction of the conveyor belt 3-1. The rocker plates 3-113 have a connecting end and a free end. The end of the conveyor belt 2000 is connected to the mounting plate 2-231. The free end is equipped with a pressure roller 3-114. The pressure roller 3-114 can move closer to or further away from the conveyor belt 3-1. The lifting drive of the pressing component drives the transmission plate 3-112 to rotate the rocker arm 3-113, further reducing the distance between the pressure roller 3-114 and the conveyor belt 3-1, thus adapting to the conveying of thinner sheet 2000. Conversely, when the pressing drive retracts, the distance between the pressure roller 3-114 and the conveyor belt 3-1 increases, thus matching thicker sheet 2000. This ensures the stability of the sheet 2000 during conveying. By adjusting the action of the pressing drive, the clamping force of the sheet 2000 can be easily controlled, preventing the sheet 2000 from slipping or falling off during conveying.

[0075] Furthermore, a rubber tire is fitted around the outer periphery of the pressure roller 3-114 to prevent deformation and scratches on the surface of the material sheet 2000 during the pressing process. It should be noted that the pressing drive can be a cylinder or a low-speed motor. A pressure rod is installed at the drive end of the low-speed motor, and the pressure roller 3-114 is installed at the end of the pressure rod. In one embodiment of the invention, the cylinder drives the rocker arm 3-113, which in turn drives the pressure roller 3-114 to rise or fall. This rocker arm 3-113 acts like a lever, further reducing the thrust required by the pressing cylinder, thus allowing for the selection of a pressing cylinder with smaller dimensions.

[0076] In one embodiment, the conveyor belt 3-1 can be driven by a motor, hydraulic pump, cylinder, or other type of drive device. In this case, the conveyor belt 3-1 is driven by a fourth motor 3-2. For details, please refer to further description. Figure 19 and Figure 22The fourth motor 3-2 in the conveying device 3-100 drives the conveyor belt 3-1 to transfer the material sheet 2000. Specifically, the fourth motor 3-2 is directly connected to the drive wheel, and the rotation of the motor drives the drive wheel, thereby driving the conveyor belt 3-1. A frequency converter or reducer can be used to control the speed of the fourth motor 3-2 to adjust the conveying speed of the conveyor belt 3-1. The transmission assembly is a key part of the material conveying device; its function is to transmit power from the fourth motor 3-2 to the conveyor belt 3-1 to achieve continuous material transport. The transmission assembly typically includes a drive wheel and the conveyor belt 3-1. The drive wheel is directly connected to the fourth motor 3-2, and its rotation is the direct source of the movement of the conveyor belt 3-1. The drive wheel can be a single wheel or multiple wheels (such as double or triple wheels), depending on the required torque and stability. The conveyor belt 3-1 is a flexible strip material that contacts and is driven by the drive wheel, and is typically made of rubber, plastic, metal, or other synthetic materials. The conveyor belt 3-1 wraps around the drive pulley and other possible redirecting pulleys, transmitting power through friction or meshing. To ensure effective contact of the conveyor belt 3-1 with the drive pulley and reduce slippage, the conveyor belt 3-1 needs to maintain appropriate tension. The tensioning device can be a weight, spring, hydraulic pressure, etc., used to adjust the tension of the conveyor belt 3-1.

[0077] Furthermore, the pressure mechanism 3-11 also includes a fine-tuning bolt 3-115; for details, please refer to further documentation. Figure 22 The free end of the rocker 3-113 has a through hole facing the base 3-61. The fine-tuning bolt 3-115 is inserted into the through hole and its extension can be adjusted by turning it. This allows the end of the fine-tuning bolt 3-115 near the base 3-61 to abut against the base 3-61, thereby fine-tuning the distance between the pressure roller 3-114 and the conveyor belt 3-1.

[0078] Furthermore, this plasma cleaning equipment 1000 is suitable not only for cleaning sheet metal 2000 of different thicknesses, but also for cleaning sheet metal 2000 of different outer diameters. To match sheet metal 2000 of different outer diameters, the base 1 is equipped with a width adjustment drive component 3-3. For details, please refer to further documentation. Figure 20 and Figure 21The driving end of the width adjustment drive component 3-3 is provided with a fourth lead screw, and a fifth slider is sleeved on the fourth lead screw. The fifth slider is slidably mounted on the fourth lead screw and connected to the sliding seat 3-6 mounted on the second guide rail 1-21. In this embodiment, the plasma cleaning equipment 1000 is provided with eight parallel conveyor belts 3-1. Each pair of adjacent conveyor belts 3-1 forms a conveying unit. Each conveying unit can convey one piece of material 2000 at a time. That is, the bottom of the material 2000 contacts two conveyor belts 3-1 respectively to achieve conveying. The eight conveyor belts 3-1 are arranged from left to right (that is, perpendicular to the conveying direction of the conveyor belts 3-1) as the first conveyor belt 3-1 to the eighth conveyor belt 3-1. Among the eight conveyor belts 3-1, the odd-numbered conveyor belts 3-1 (four in total) are configured as movable conveyor belts 3-1. That is, all odd-numbered conveyor belts 3-1 are installed on the sliding seat 3-6. The spacing between them and the adjacent even-numbered conveyor belts 3-1 can be adjusted by the width adjustment drive 3-3 to match the conveying of material pieces 2000 with different diameters.

[0079] Furthermore, since conveyor belt 3-1 is designed to receive and transport sheet 2000 from material box 1-4, and due to its continuous operation, there is no tight contact between conveyor belt 3-1 and material box 1-4, the gap between conveyor belt 3-1 and material box 1-4 may cause some sheet 2000 to jam when used with sheet 2000 of different diameters. To solve this problem, this solution movably mounts conveying device 3-100 on base 1 and provides a longitudinal adjustment mechanism at the bottom of conveying device 3-100. For details, please refer to further documentation. Figure 19 The longitudinal adjustment mechanism includes a longitudinal adjustment drive 3-4 and a displacement detection mechanism. The longitudinal adjustment drive 3-4 is located on the base 1. The drive end of the longitudinal adjustment drive 3-4 is provided with a fifth lead screw extending along the line connecting the material box 1-4 and the cleaning device 5-100. The fifth lead screw is provided with a sliding seat 1-5. Multiple conveyor belts 3-1 are all located on the sliding seat 1-5. In order to accurately control the adjustment distance, the base 1 is provided with a detection end, and the sliding seat 1-5 is provided with a sensing end. When the sliding seat 1-5 moves and drives the sensing end to move in front of the detection end, the detection end can generate an electrical signal based on its movement position and feed it back to the longitudinal adjustment drive 3-4 to accurately adjust the distance.

[0080] In one embodiment, the cleaning equipment can achieve unilateral loading and unloading, mainly through the automated loading and unloading device 2-100. This unilateral loading and unloading method utilizes the aforementioned automated loading and unloading device 2-100 to load and unload the material pieces 2000. The unilateral loading and unloading method includes the following steps: S1: Obtain several material pieces 2000 and load them into the material box 1-4; S2: Obtain the loading and unloading station 1a and move the material box 1-4 containing the material pieces 2000 to the loading and unloading station 1a; S3: Control the pushing mechanism 2-23 to push the material pieces 2000 from the material box 1-4 to the conveyor belt 3-1; S4: Obtain the preparatory station 1b at one end of the conveyor belt 3-1 and control the conveyor belt 3-1 to move and drive the material pieces 2000 into the preparatory station 1b; S5: Control the pushing mechanism 2-33 to run forward and move the material pieces 2000 from the preparatory station 1b. S6: Push the cleaned material sheet 2000 into the cleaning device 5-100; S7: Control the pushing mechanism 2-33 to run in reverse to push the cleaned material sheet 2000 from the cleaning device 5-100 to the conveyor belt 3-1; S8: Control the conveyor belt 3-1 to move and drive the material sheet 2000 into the loading and unloading station 1a. Through this single-sided loading and unloading method, single-sided loading and unloading can be achieved while ensuring the production efficiency of the equipment. That is, the material sheet 2000 to be cleaned enters from the left side and the cleaned material sheet 2000 also leaves from the left side. Compared with the traditional "left in, right out" production method, it reduces the production floor space required by the equipment and improves the integration level of the equipment.

[0081] The present invention provides an automated loading and unloading device 2-100 and a one-sided loading and unloading method using the automated loading and unloading device 2-100. The automated loading and unloading device 2-100 includes a base 1, a material box 1-4 disposed on the base 1, a conveyor belt 3-1, a loading component, and an unloading component. The material box 1-4 is used to hold material pieces 2000. The conveyor belt 3-1 is used to transport the material pieces 2000 in the material box 1-4 to the cleaning device 5-100. A placement rack 2-4 is provided at the end of the conveyor belt 3-1 away from the material box 1-4. The automated loading and unloading device 2-100 has a loading state and a unloading state. In the loading state, the first drive mechanism 2-24 drives the pushing mechanism 2-23 to descend, and the first crossbeam 2-22 moves towards one end of the conveyor belt 3-1, driving the pushing mechanism 2-23 to push the material piece 2000 to be cleaned from the material box 1-4 to the conveyor belt 3-1, and then the conveyor belt 3-1 transports it to the placement rack 2-4. The material piece 2000 to be cleaned is temporarily stored in the placement rack 2-4. The material piece 2000 in the cleaning device 5-100 is cleaned and then... After the end, the control pusher mechanism 2-33 pushes the material sheet 2000 on the placement rack 2-4 into the cleaning device 5-100 for cleaning. During this process, the conveyor belt 3-1 will continue to run without affecting the production efficiency of the equipment. In the unloading state, the second drive mechanism 2-34 drives the pusher mechanism 2-33 to descend, and the second crossbeam 2-32 moves towards one end of the material box 1-4, driving the pusher mechanism 2-33 to push the cleaned material sheet 2000 from the placement rack 2-4 through the conveyor belt 3-1 into the material box 1-4 to complete the unloading.

[0082] In this case, the proposed automated loading and unloading device 2-100 is mainly applicable to plasma cleaning machines. Of course, it is not limited to being used in other equipment that requires automated loading and unloading of materials. The plasma cleaning machine uses this automated loading and unloading device 2-100 to load the to-be-cleaned wafers 2000 and unload the wafers 2000 after cleaning, greatly improving the cleaning efficiency of the wafers 2000. It should be noted that the plasma cleaning machine配套 with this automated loading and unloading device 2-100 can adjust its cleaning rate according to actual production needs, providing deep cleaning and surface cleaning modes similar to those of washing machines. The time for each mode is different. The advantage of this design is that it provides flexibility and efficiency. By adjusting the power of the plasma, the processing time, and the gas flow rate, the cleaning process can be optimized to adapt to different materials and contaminants, thereby improving production efficiency, reducing resource waste, and protecting the materials from damage caused by over-cleaning. This flexibility ensures that the equipment can adapt to various cleaning tasks, improve product quality, and provide a quick response to changes in the production process. This automated loading and unloading device 2-100 can also match the placement rack 2-4 with a corresponding storage space according to the cleaning efficiency of the plasma cleaning machine. If the rate of the cleaning machine is high, the wafers 2000 that need to be buffered at the preparation station 1b are few, and the distance of the placement rack 2-4 can be correspondingly shortened; when the cleaning machine is running at a slow rate in the deep cleaning mode, a longer area position can be reserved at the preparation station 1b, and the placement rack 2-4 can be appropriately extended to improve its buffering capacity. The wafers 2000 will first be transported from the conveyor belt 3-1 to the placement rack 2-4, wait for synchronization on the placement rack 2-4, and then be pushed by the pushing-down structure to the cleaning device 5-100. In this way, there is no need for the conveyor belt 3-1 and the cleaning device 5-100 to maintain a high degree of consistency, allowing the operating rates of the two to be different. Each link can independently optimize the operating rate, improve the overall production efficiency, and reduce the downtime caused by mismatches between equipment.

[0083] To prevent the pusher mechanism from damaging the wafers 2000 or causing the wafers 2000 to fly out due to excessive thrust or the wafers 2000 not being pushed out due to too small thrust when pushing the wafers 2000, the automated loading and unloading device 2-100 further includes a pressure detection component. The pressure detection component includes a loading pressure sensor 2-25 provided on the first crossbeam 2-22 and an unloading pressure sensor 2-35 provided on the second crossbeam 2-32. Specifically, please refer further to Figure 7 and Figure 8A fifth motor 2-212 is installed on the third track 2-21. The drive end of the fifth motor 2-212 can be connected to a transmission device such as a lead screw or pulley to drive the first crossbeam 2-22 to move along the third track 2-21. Correspondingly, a sixth motor 2-311 is installed on the second track 1-51 to drive the second crossbeam 2-32 to move. The drive end of the sixth motor 2-311 is externally connected to a transmission device. The feeding pressure sensor 2-25 is electrically connected to the fifth motor 2-212. By controlling the motor speed, the moving speed of the first crossbeam 2-22 can be adjusted, thereby adjusting the thrust of the feeding mechanism 2-23. The discharging pressure sensor 2-35 is electrically connected to the sixth motor 2-311. By controlling the speed of the sixth motor 2-311, the thrust of the discharging mechanism 2-33 can be adjusted. The pressure detection components integrated into the automated loading and unloading device 2-100 include pressure sensors for both loading and unloading. These sensors monitor in real time the thrust of the pusher rod 2-232 of the pusher plate 2000 during loading and the thrust of the dual-purpose pusher head 2-331 of the pusher plate 2000 during unloading, ensuring the thrust remains within the optimal range. This intelligent design helps prevent damage to the material plate 2000 during loading and unloading and ensures that the thrust is not too low, thus affecting efficiency. Precise control of the thrust enhances the stability and safety of the device while reducing the possibility of human error. This system can also accommodate material plates 2000 of different sizes and weights, providing flexible loading and unloading solutions and improving automation levels and overall loading and unloading efficiency.

[0084] In actual production practice, the circulating feeding device 1-100 feeds four material boxes 1-4 each time. To further improve the pushing speed, the feeding mechanism 2-23 includes a mounting plate 2-231 and multiple pushing rods 2-232 mounted on the mounting plate 2-231. For details, please refer to further documentation. Figures 5 to 7 In this embodiment, there are four push rods 2-232, which are evenly spaced along the extension direction of the mounting plate 2-231. During the feeding process, the four push rods 2-232 are inserted into the four material boxes 1-4 respectively, pushing the four material pieces 2000 in the four receiving slots from the material boxes 1-4 to the conveyor belt 3-1. Correspondingly, there are four conveyor belts 3-1, each corresponding to one of the four material boxes 1-4, for carrying the material pieces 2000 to be cleaned from the material boxes 1-4. Since the contact area between the end of the push rod 2-232 and the material piece 2000 is small, in order to prevent the thinner material piece 2000 from warping and deforming during the conveying process, which would cause the push position of the push rod 2-232 to deviate and damage the material piece 2000, the push end of each push rod 2-232 is formed with a contoured surface 2-233. For details, please refer to further... Figure 6The contoured surface 2-233 is designed based on the sidewall of the sheet 2000, featuring a concave V-shaped structure. This allows it to match the shape of the sheet 2000, thus positioning it and preventing it from shifting to its intended position under thrust. Furthermore, a buffer layer can be provided at the contact end of the push rod 2-232, using flexible materials such as silicone or rubber to create the buffer contact end. This allows the flexible material to directly contact the sheet 2000, preventing scratches and damage to its surface.

[0085] When the pusher rod 2-232 contacts the sheet 2000, since the sheet 2000 is stationary while the pusher rod 2-232 is in motion, the pusher rod 2-232 will transfer impulse to the sheet 2000, generating an impact force. The impact force generated by the movement of the pusher rod 2-232 is instantaneous, causing stress concentration on the surface and inside of the sheet 2000, which may exceed the material's yield strength, leading to deformation or breakage. To mitigate this problem, install... A second guide rail 1-21 is provided on the side of plate 2-231 facing the base 1. A push rod 2-232 is slidably mounted on the second guide rail 1-21. Further, a first abutment block 2-238 is provided on the push rod 2-232 facing the mounting plate 2-231, and a second abutment block 2-236 is provided on the mounting plate 2-231 facing the push rod 2-232. An elastic element 2-237 is spaced between the first abutment block 2-238 and the second abutment block 2-236. For more details, please refer to further reference. Figure 7 The deformation direction of the elastic element 2-237 is along the extension direction of the push rod. A fixing post (not shown in the figure) is provided on the section of the second abutment block 2-236 facing the first abutment block 2-238. The elastic element 2-237 is preferably a spring, which is sleeved on the fixing post for fixation. When one end of the push rod 2-232 contacts the material sheet 2000, the push rod 2-232 itself will retract on the second guide rail 1-21 due to the reaction force, further compressing the spring and thus providing cushioning. This design effectively absorbs the impact force, reduces damage to the material sheet 2000, and improves production efficiency and safety. This cushioning mechanism not only protects the material from deformation and scratches but also reduces wear on the equipment, extends the equipment's service life, and improves the overall operational stability.

[0086] To improve the movement accuracy of the feeding mechanism 2-23 relative to the first crossbeam 2-22, the first crossbeam 2-22 is equipped with two sleeves 2-221. For details, please refer to further documentation. Figure 6Correspondingly, the feeding mechanism 2-23 is provided with two guide rods 2-234, each guide rod 2-234 being movably inserted through a sleeve 2-221. The two sleeves 2-221 are respectively located on both sides of the first drive mechanism 2-24. The first drive mechanism 2-24 is preferably a cylinder, but it can also be a hydraulic cylinder or other drive components. This invention does not impose any restrictions on this. The drive end of the cylinder is connected to the mounting plate 2-231 of the feeding mechanism 2-23. When the feeding mechanism 2-23 is driven to rise and fall, the guide rod 2-234 will be limited within the sleeve 2-221, thereby ensuring that the feeding mechanism 2-23 will not deviate during movement. Furthermore, through precise guidance and limiting, the working efficiency and reliability of the entire mechanism are improved, and it is also convenient for maintenance and adjustment.

[0087] The automated loading and unloading device 2-100 proposed in this solution can simultaneously load the sheet material 2000 to be cleaned and unload the cleaned sheet material 2000. For specific loading and unloading positions, please refer to [reference needed]. Figure 3 First, the circulating feeding device 1-100 moves the material box 1-4 to the loading / unloading station 1a. The material box 1-4 contains the material pieces 2000 to be cleaned. Then, the pushing feeding mechanism 2-23 pushes the material pieces 2000 to the conveyor belt 3-1, which transports them to the preparation station 1b. Next, the pushing unloading mechanism 2-33 pushes them to the cleaning device 5-100 at the cleaning station 1c. After cleaning, the pushing unloading mechanism 2-33 can also reverse to push the cleaned material pieces 2000 back into the material box 1-4, i.e., the loading / unloading station 1a, to complete the unloading. Therefore, the pushing unloading mechanism 2-33 is equipped with multiple dual-purpose push heads 2-331. For details, please refer to further documentation. Figure 8 The dual-purpose pusher head 2-331 is L-shaped in general, with both ends of its lower part being pusher ends. One end is used to push the material piece 2000 to be cleaned into the cleaning station 1c, and the other end is used to push the cleaned material piece 2000 to the loading and unloading station 1aa, so that the structure can achieve multiple functions.

[0088] To limit the movement of the first crossbeam 2-22 and the second crossbeam 2-32, both the third track 2-21 and the second track 1-51 are equipped with limiting components 2-211. The limiting components 2-211 engage with the mating parts on the first crossbeam 2-22 and the second crossbeam 2-32 to prevent the movement of the first crossbeam 2-22 and the second crossbeam 2-32 from exceeding their travel range. Alternatively, mechanical limiting components 2-211 can be used to limit the movement of the first crossbeam 2-22 and the second crossbeam 2-32. This case does not impose any restrictions on this approach.

[0089] In the technical solution of the present invention, the feeding rack 1-2 can be driven by a motor, a cylinder, or a magnetic force. The present invention does not limit this. In one embodiment of the present invention, the base 1 is provided with a first driving assembly 1-12, including a fifth motor 2-212, a first lead screw 1-122, and a first slider 1-123. The first lead screw 1-122 is arranged along the extension direction of the first slide rail and is located at the driving end of the fifth motor 2-212. The fifth motor 2-212 drives the first lead screw 1-122 to rotate. The first slider 1-123 sleeved on the first lead screw 1-122 is screwed to the first lead screw 1-122. When the first lead screw 1-122 rotates, the first slider 1-123 will move along the extension direction of the first lead screw 1-122. The first slider 1-123 is connected to the feeding rack 1-2 above, thereby driving the feeding rack 1-2 to slide on the first slide rail. Furthermore, the feeding rack 1-2 is provided with a second driving assembly 1-22, including a sixth motor 2-311, a second lead screw 1-222 and a second slider 1-223. The sixth motor 2-311 drives the second lead screw 1-222 to rotate, thereby causing the second slider 1-223 to move vertically and thus drive the pallet 1-3 to rise or fall, so that the two pallets 1-3 are misaligned to avoid collision interference.

[0090] To adjust the distance between the two loading racks 1-2, a third drive assembly 1-52 is provided on the pallet 1-3. The third drive assembly 1-52 includes two third drive components disposed on the two pallets 1-3. Each third drive component includes a third motor 1-521, a third lead screw 1-522, and a third slider 1-523. The third motor 1-521 drives the third lead screw 1-522 to rotate, thereby causing the third slider 1-523 to move along the extension direction of the third lead screw 1-522 so that the two loading racks 1-2 can move closer or further apart, thereby achieving fine adjustment of the distance between the two loading racks 1-2.

[0091] In the present invention, each pallet 1-3 is provided with a plurality of material boxes 1-4. The number of material boxes 1-4 is not limited in this invention. In one embodiment, four material boxes 1-4 are provided on each pallet 1-3, and a spacing adjustment component 1-6 is provided on the pallet 1-3 to adjust the spacing between each material box 1-4. The driving principle is that the first cylinder 1-61 installed at the bottom of the pallet 1-3 pushes the fourth slider 1-621-511, which is inverted on the third track 1-63, to slide along the third track 1-63. Four mounting blocks 1-64 are correspondingly installed on the fourth slider 1-621-511. Each mounting block 1-64 is correspondingly connected to a material box 1-4, thereby driving each material box 1-4 to move and adjust its spacing.

[0092] It should be noted that this invention does not limit the specific shape or structure of the material boxes 1-4. In one embodiment of the invention, the material box 1-4 has a receiving cavity 1-41 with openings at both ends. For details, please refer to further reference. Figure 6 The two side walls of the receiving cavity 1-41 are provided with multiple limiting grooves 1-42. Each pair of corresponding limiting grooves 1-42 together form a receiving layer. The material sheet 2000 is inserted into the receiving layer to achieve reception. The two ends of the material sheet 2000 are respectively limited in the limiting grooves 1-42. During material feeding, the material sheet 2000 is pushed into the washing machine from top to bottom by the pushing device.

[0093] In this case, the transition conveyor device 4-100 can also achieve alternating loading and unloading. The system can move the material piece 2000 to be cleaned into the cleaning chamber and also transport the cleaned material piece 2000 out of the cleaning chamber in a continuous cycle. The transition conveyor device 4-100 includes a conveyor belt, multiple bearing parts, and a lifting mechanism 4-3. The conveyor belt is arranged parallel to the transmission belt 3-1. The conveyor belt includes an upper belt body and a lower belt body. Each of the upper and lower belt bodies is provided with a bearing plate 4-121. The bearing plate 4-121 is provided with a mounting frame. The mounting frame is provided with a movable plate 4-2. First, the lifting mechanism 4-3 lifts the movable plate 4-2 so that it is separated from the bearing plate 4-121 until it is flush with the transmission belt 3-1. The pushing mechanism 2-33 pushes the material piece 2000 to be cleaned into the trough on the movable plate 4-2. The lifting mechanism 4-3 then drives the movable plate 4-2 to descend so that the movable plate 4-2 falls on the bearing plate 4-121. The conveyor belt drives the bearing plate 4-121 to move into the cleaning chamber. To fix the material sheet 2000, the movable plate 4-2 is equipped with multiple support parts. For details, please refer to further information. Figure 25 Each carrier unit is set with a corresponding conveyor belt 3-1. The carrier unit includes two carrier members 4-21 that are spaced apart. The two carrier members 4-21 are respectively provided with opposite placement slots 4-211. The material sheet 2000 is inserted into the two placement slots 4-211 to achieve positioning.

[0094] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A plasma cleaning device, characterized in that, include: The base is provided with two parallel and spaced first slide rails and a conveyor belt arranged parallel to the first slide rails. A cleaning device is provided at the end of the conveyor belt facing away from the first slide rails, and the cleaning device is provided with a cleaning chamber. A circulating feeding device includes two feeding racks and two trays. Each feeding rack is slidably mounted on a first slide rail. Each feeding rack is provided with a first guide rail extending in a direction perpendicular to the base. Each tray is slidably mounted on a first guide rail. Each tray is provided with a material box for holding material sheets. An automated loading and unloading device includes a loading assembly and an unloading assembly. The loading assembly includes a first track, a first crossbeam, and a feeding mechanism. The first track is disposed on a base and arranged along the extension direction of a conveyor belt. The first crossbeam is slidably disposed on the first track and has a first drive mechanism facing the base. The feeding mechanism is located at the drive end of the first drive mechanism. The unloading assembly includes a second track, a second crossbeam, and a discharging mechanism. The second track is disposed on the base and parallel to the first track. The second crossbeam is slidably disposed on the second track and has a second drive mechanism facing the base. The discharging mechanism is located at the drive end of the second drive mechanism. A transition conveying device includes a support plate movably mounted on the base, the support plate having a trough for accommodating the material sheet, the support plate being located at the end of the conveyor belt away from the circulating feeding device, and the support plate being able to rotate between the conveyor belt and the cleaning chamber; The base is provided with a platform, the conveyor belt is disposed on the platform, and the platform is provided with a pressing mechanism, the pressing mechanism comprising: A material pressing drive unit is disposed on the base platform, and a transmission plate is provided at the driving end of the material pressing drive unit, the transmission plate being arranged along the extension direction of the conveyor belt; and Two rocker arms are rotatably connected to the base and are respectively disposed on both sides of the pressing drive along the direction of the conveyor belt. Each rocker arm has a connecting end and a free end. The connecting end is connected to the transmission plate, and the free end is provided with a pressure roller. The pressure roller can be close to or away from the conveyor belt. The pressing mechanism also includes a fine-tuning bolt, the free end of which has a through hole facing the base, the fine-tuning bolt being screwed into the through hole and able to extend out of the through hole to abut against the base; The base is provided with a longitudinal adjustment mechanism, which includes: A longitudinal adjustment drive is provided on the base. The drive end of the longitudinal adjustment drive has a fifth lead screw extending along the line connecting the material box and the cleaning device. The fifth lead screw has a sliding seat, and multiple conveyor belts are disposed on the sliding seat. The displacement detection mechanism includes a detection end disposed on the base and a sensing end disposed on the sliding seat, wherein the detection end is electrically connected to the longitudinal adjustment drive component.

2. The plasma cleaning equipment as described in claim 1, characterized in that, The base is provided with a placement rack, which is located at the end of the conveyor belt away from the circulating feeding device. The placement rack forms a buffer slot, which is connected to the conveyor belt.

3. The plasma cleaning equipment as described in claim 1, characterized in that, The plasma cleaning equipment includes multiple conveyor belts, one of each pair of adjacent conveyor belts is located on the base, and the other is slidably located on a second guide rail on the base. The base is provided with a width adjustment drive, the drive end of the width adjustment drive is provided with a fourth lead screw, the fourth lead screw is provided with a fifth slider, and the fifth slider is connected to the conveyor belt provided on the second guide rail so that the spacing between every two adjacent conveyor belts is adjustable.

4. The plasma cleaning equipment as described in any one of claims 1 to 3, characterized in that, The automated loading and unloading device also includes a pressure detection component, which includes a loading pressure sensor located on the first crossbeam and a unloading pressure sensor located on the second crossbeam. The first track and the second track are respectively equipped with a first motor for driving the first crossbeam to move and a second motor for driving the second crossbeam to move. The feeding pressure sensor is electrically connected to the feeding mechanism and the first motor, and the discharging pressure sensor is electrically connected to the discharging mechanism and the second motor.

5. The plasma cleaning equipment as described in claim 4, characterized in that, The feeding mechanism includes a mounting plate and a plurality of feeding rods disposed on the mounting plate. The mounting plate is movably disposed on the first crossbeam, and the plurality of feeding rods are evenly spaced on the mounting plate. The mounting plate is provided with a first guide rail on the side facing the base, and the push rod is slidably disposed on the first guide rail; The push rod has a first abutment block facing the mounting plate, and the mounting plate has a second abutment block facing the push rod. The first abutment block and the second abutment block are spaced apart by an elastic element, and the deformation direction of the elastic element is along the extension direction of the push rod.

6. The plasma cleaning equipment as described in any one of claims 1 to 3, characterized in that, The transition conveying device includes: A conveyor belt, which is arranged parallel to the transmission belt, includes an upper belt body and a lower belt body. Each of the upper belt body and the lower belt body is provided with a bearing plate. The bearing plate is provided with a mounting frame opening, and the mounting frame opening is provided with a movable plate. Multiple support sections are disposed on the movable plate, each support section corresponding to one conveyor belt. Each support section includes two spaced-apart support members, each support member having a corresponding placement groove. A lifting mechanism is provided on the base, and the movable end of the lifting mechanism is connected to the movable plate and is used to drive the lifting and lowering of the movable plate.

7. The plasma cleaning equipment as described in claim 6, characterized in that, The movable plate has multiple support parts stacked vertically, and a bracket is provided between every two adjacent support parts to support the support parts.

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