Glass substrate vacuum liquid circulation system

Abstract

The invention discloses a glass substrate vacuum liquid circulation system which comprises a circulation water tank, a liquid level meter is installed at the bottom of the circulation water tank, an exhaust port is formed in the bottom of the front face of the circulation water tank, meanwhile, two sets of pipelines are installed at the top of the circulation water tank, and a liquid supplementing valve and a rapid liquid supplementing valve are installed on the two sets of pipelines respectively. Pipelines on the liquid supplementing valve and the rapid liquid supplementing valve are communicated with the liquid discharging tank and the liquid supply pipe respectively, a bypass pipe is installed on the upper side of the front face of the circulating water tank, a bypass valve is installed on the bypass pipe, and meanwhile an air suction port gate valve and a liquid ring pump are installed on one side of the bypass valve. According to the vacuum liquid circulation system for the glass substrate, the whole system is convenient to operate and low in failure rate, and the situation that the production requirement cannot be met and the production is affected due to insufficient vacuum degree is avoided; and the liquid level of the working liquid is automatically adjusted, multiple sets of units can be connected in parallel for use or used independently, the operation is convenient, and the failure rate is low.

Description

Technical Field

[0001] The invention relates to the field of glass substrate processing, in particular to a glass substrate vacuum liquid circulation system. Background Art

[0002] In the production process of liquid crystal substrates, the working principle of the vacuum system is mainly to use vacuum pumps and other equipment to reduce the air pressure in the system to form a certain vacuum degree. Specifically, the vacuum pump extracts the gas in the system through the suction port to reduce the air pressure in the system; the extracted gas is discharged out of the system through the exhaust port; the vacuum degree in the system is maintained within a certain range by continuous suction and exhaust; the vacuum system is usually equipped with a control system to monitor and control parameters such as vacuum degree, pressure, and temperature to ensure the stable operation of the system.

[0003] In the production process of liquid crystal substrates, the vacuum system is mainly used to adsorb the substrates and has strict vacuum requirements. The vacuum degree generated by the vacuum system in the existing technology is insufficient and cannot meet the production requirements, which affects the production. Summary of the invention

[0004] The object of the present invention is to provide a glass substrate vacuum liquid circulation system to solve the defects mentioned in the above background technology.

[0005] To achieve the above-mentioned purpose, a glass substrate vacuum liquid circulation system is provided, comprising a circulating water tank, a liquid level gauge is installed at the bottom of the circulating water tank, an exhaust port is installed at the bottom of the front of the circulating water tank, two groups of pipes are installed at the top of the circulating water tank, and a liquid replenishment valve and a quick liquid replenishment valve are installed on the two groups of pipes respectively, the pipes on the liquid replenishment valve and the quick liquid replenishment valve are connected with the drain tank and the liquid supply pipe respectively, a bypass pipe is installed at the upper side of the front of the circulating water tank, and a bypass valve is installed on the bypass pipe, and an air intake gate valve and a liquid ring pump are installed on one side of the bypass valve, butterfly valves are installed on the top water pipe of the circulating water tank and the water pipe of the liquid ring pump, and the top water pipe of the circulating water tank is connected with the inside of a plate heat exchanger, and the water pipe on the liquid ring pump is connected with the inside of the plate heat exchanger, and a temperature gauge is installed in the water pipe on the liquid ring pump.

[0006] Furthermore, the plate heat exchanger is respectively equipped with a coolant inlet pipe, a coolant outlet pipe and a front side plate, and the front side plate covers the surface of the heat exchange substrate. At the same time, the coolant inlet pipe is connected to the water pipe of the liquid ring pump, and the top water pipe of the circulating water tank is connected to the coolant outlet pipe.

[0007] Furthermore, the front side panels and the rear side panels are arranged in parallel, and the areas of the front side panels and the rear side panels are consistent, and the front side panels and the rear side panels are fixedly connected by four groups of fixed tie rods.

[0008] Furthermore, a plurality of groups of heat exchange substrates are evenly arranged between the front side plate and the rear side plate, and four groups of holders are evenly and fixedly arranged on the surfaces of the front side plate and the rear side plate, and the holders are "L"-shaped structures made of metal material.

[0009] Furthermore, four groups of clamps are respectively clamped at four corners of the multiple groups of heat exchange substrates, and the multiple groups of heat exchange substrates are limited and fixed between the front side plate and the rear side plate through the four groups of clamps.

[0010] Furthermore, four groups of medium holes are evenly opened on the heat exchange substrate, and a sealing strip is fixedly arranged on the surface of the heat exchange substrate.

[0011] Furthermore, the cross section of the sealing rubber strip is circular, and a middle rubber strip is fixedly arranged inside the sealing rubber strip, and an inner rubber strip is fixedly arranged inside the middle rubber strip.

[0012] Furthermore, the axial cross-sections of the sealing strip, the middle strip and the inner strip are concentric circle structures, and the cross-section of the sealing strip is circular, while the cross-sections of the middle strip and the inner strip are "C" shaped.

[0013] Furthermore, the sealing strip, the middle strip and the inner strip are arranged in layers from the outside to the inside, and the thickness of the sealing strip is smaller than the thickness of the middle strip, while the thickness of the middle strip is smaller than the thickness of the inner strip.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. In the present invention, there is a rotating gear parallel to the pump chamber wall in the liquid ring pump. The liquid is driven by the rotation of the gear to rotate together, generating centrifugal force, and the liquid ring and the pump chamber wall form a closed space: the liquid is acted upon by the centrifugal force and rotates along the pump chamber wall to form a closed space with the wall; negative pressure is generated in the space, and during the rotation of the liquid ring, a certain pressure difference will be generated due to the height of the liquid level, so that negative pressure is formed in the space above the liquid level, and then air is sucked in and discharged: the whole system is easy to operate and has a low failure rate, avoiding the situation where insufficient vacuum degree cannot meet production requirements and affects production; the working closed cycle automatically adjusts the working liquid level, and multiple units can be used in parallel or individually, which is easy to operate and has a low failure rate.

[0016] 2. The present invention achieves this by: when the sealing strip is worn and broken due to external pressure during long-term use and becomes unusable, the compressed C-shaped middle strip inside it expands to fill the damaged sealing strip, and the volume of the released middle strip increases to replace the damaged sealing strip, thereby extending the service life of the sealing device, effectively ensuring the normal use of the plate heat exchanger, improving the sealing performance of the heat exchange process, and avoiding leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated herein and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, further serve to explain the principles of the invention and to enable those skilled in the relevant art to make and use the invention.

[0018] Figure 1 It is a front view schematic diagram of the structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the structural plate heat exchanger of the present invention;

[0020] Figure 3 It is a rear view of the structural plate heat exchanger of the present invention;

[0021] Figure 4 This is a schematic diagram of the heat exchange substrate structure of the present invention;

[0022] Figure 5 It is a schematic diagram of the cross-sectional structure of the sealing strip.

[0023] [reference numerals]

[0024] 1. Circulating water tank; 2. Exhaust port; 3. Liquid level gauge; 4. Bypass valve; 5. Liquid replenishing valve; 6. Quick liquid replenishing valve; 7. Drain tank; 8. Liquid supply pipe; 9. Butterfly valve; 10. Thermometer; 11. Inlet gate valve; 12. Liquid ring pump; 13. Plate heat exchanger; 131. Front side plate; 132. Coolant inlet pipe; 133. Coolant outlet pipe; 134. Fixed tie rod; 135. Holder; 136. Rear side plate; 137. Heat exchange substrate; 1371. Medium hole; 1372. Sealing strip; 13721. Middle strip; 13722. Inner strip. DETAILED DESCRIPTION

[0025] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. At the same time, it is explained here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and those skilled in the art may also adopt other alternatives to implement some known technologies; and the accompanying drawings are only for more specific description of the embodiments, and are not intended to specifically limit the present invention.

[0026] Specific implementation method 1: Please refer to Figure 1-5The present invention provides a technical solution: a glass substrate vacuum liquid circulation system, comprising a circulating water tank 1, a liquid level gauge 3 is installed at the bottom of the circulating water tank 1, and an exhaust port 2 is installed at the bottom of the front of the circulating water tank 1, and two groups of pipes are installed on the top of the circulating water tank 1, and a liquid replenishment valve 5 and a quick liquid replenishment valve 6 are installed on the two groups of pipes, and the pipes on the liquid replenishment valve 5 and the quick liquid replenishment valve 6 are connected with a drain tank 7 and a liquid supply pipe 8 respectively, a bypass pipe is installed on the upper side of the front of the circulating water tank 1, and a bypass valve 4 is installed on the bypass pipe, and an air intake gate valve 11 and a liquid ring pump 12 are installed on one side of the bypass valve 4, a butterfly valve 9 is installed on the top water pipe of the circulating water tank 1 and the water pipe of the liquid ring pump 12, and the top water pipe of the circulating water tank 1 is connected with the inside of a plate heat exchanger 13, and the water pipe on the liquid ring pump 12 is connected with the inside of the plate heat exchanger 13, and a thermometer 10 is installed in the water pipe on the liquid ring pump 12.

[0027] The device is mainly composed of a liquid ring pump 12, a circulating water tank 1, a plate heat exchanger 13, several high and low position sensors, a flip plate liquid level gauge 3 at the remote output port, an automatic liquid replenishment electromagnetic control system, an automatic drainage electromagnetic control system and an insert-type working liquid temperature gauge 10, a pump suction port check valve and a pipeline electrical control box; connect the main pump liquid supply pipe, the discharge pipe and the supply and drainage pipes of the plate heat exchanger 13, the liquid ring pump 12 suction port is connected to the vacuum system, the upper exhaust port 2 of the circulating water tank 1 is connected to the exhaust pipe, and the power supply bus is connected; this is a set of vacuum circulation units, referred to as units, multiple units can be combined into a large unit, and an electric control box is controlled, the unit is installed on the original reserved foundation, and the level is adjusted and fixed; the valves on the suction pipe and the exhaust pipe are opened, and the bypass valve 4 is closed; the quick liquid inlet valve is closed, the liquid replenishment valve 5 is opened, and the cooling water of the plate heat exchanger 13 is opened, and multiple units are operated one by one according to the above five items, and observe whether the vacuum system has been met. If it has exceeded the system requirements, the remaining units should be stopped and started. And close all valves of the unstarted units; liquid enters the liquid ring pump 12: the liquid ring pump 12 is filled with liquid, usually water or oil, and the liquid enters the pump from the inlet pipe. The liquid ring rotates to generate centrifugal force: there is a rotating gear parallel to the pump chamber wall in the liquid ring pump 12, and the liquid is driven by the rotation of the gear to rotate together, generating centrifugal force, and the liquid ring and the pump chamber wall form a closed space: the liquid is acted upon by the centrifugal force and rotates along the pump chamber wall to form a closed space with the wall; negative pressure is generated in the space, and during the rotation of the liquid ring, a certain pressure difference will be generated due to the height of the liquid level, so that negative pressure is formed in the space above the liquid level, and then air is sucked in, and gas is sucked in and discharged: the gas is sucked into the pump and is finally discharged with the rotating liquid ring to complete the exhaust operation. The entire system is easy to operate and has a low failure rate, avoiding the situation where insufficient vacuum cannot meet production requirements and affects production; closed working cycle, automatic adjustment of the working liquid level, multiple units can be used in parallel or alone, easy to operate and low failure rate.

[0028] The four groups of clamps 135 are respectively clamped at the four corners of the multiple groups of heat exchange substrates 137, and the four groups of clamps 135 are used to limit and fix the multiple groups of heat exchange substrates 137 between the front side plate 131 and the rear side plate 136; the heat exchange substrates 137 are usually thin, and are prone to deformation during operation, especially under complex working conditions such as high temperature, high pressure or fluid impact; the clamps 135 can constrain a large number of heat exchange substrates 137 from the outside, so that the heat exchange substrates 137 are kept in the designed geometric shape, ensuring the heat exchange efficiency and the normal operation of the equipment When a large number of heat exchange discs are combined together, the four sets of holders 135 can ensure that the relative positions between the discs are accurate and neatly arranged, so that the fluid can flow evenly through each heat exchange channel, avoiding local overheating or uneven heat exchange caused by disc misalignment; during the operation of the equipment, vibration may occur; the four sets of holders 135 can enhance the integrity of the entire heat exchange assembly, reduce the friction and vibration between the heat exchange substrates 137 and the heat exchange substrates 137, reduce the risk of fatigue damage caused by vibration, and improve the reliability of equipment operation. and stability; the heat exchange substrates 137 and 137 are sealed and connected by the sealing strips 1372; the axial sections of the sealing strips 1372, the middle strips 13721 and the inner strips 13722 are concentric circle structures, the section of the sealing strips 1372 is circular, and the sections of the middle strips 13721 and the inner strips 13722 are "C" shaped; when the sealing strips 1372 are used for a long time, due to the external pressure, the sealing strips 1372 are worn and broken and cannot be used. At the same time, the C-shaped middle rubber strip 13721 compressed inside expands to fill the damaged sealing strip 1372, and the volume of the released middle rubber strip 13721 increases to replace the damaged sealing strip 1372. An inner rubber strip 13722 is arranged on the inner side of the middle rubber strip 13721. The inner rubber strip 13722 replaces and fills the middle rubber strip 13721 in the same way, thereby extending the service life of the sealing device, effectively ensuring the normal use of the plate heat exchanger 13, improving the sealing of the heat exchange process, and avoiding leakage.

[0029] Specific embodiment 2: This embodiment is a further limitation of specific embodiment 1. A coolant inlet pipe 132, a coolant outlet pipe 133 and a front side plate 131 are respectively installed on the plate heat exchanger 13, and the front side plate 131 covers the surface of the heat exchange substrate 137. At the same time, the coolant inlet pipe 132 is connected to the water pipe of the liquid ring pump 12, and the top water pipe of the circulating water tank 1 is connected to the coolant outlet pipe 133.

[0030] Specific implementation method three: This implementation method is a further limitation of specific implementation method two. The front side plate 131 and the rear side plate 136 are arranged in parallel, and the areas of the front side plate 131 and the rear side plate 136 are consistent. At the same time, the front side plate 131 and the rear side plate 136 are fixedly connected by four groups of fixed tie rods 134.

[0031] Specific implementation method four: This implementation method is a further limitation of specific implementation method three. Multiple groups of heat exchange substrates 137 are evenly arranged between the front side plate 131 and the rear side plate 136, and four groups of holders 135 are evenly fixed on the surface of the front side plate 131 and the rear side plate 136. At the same time, the holder 135 is an "L"-shaped structure made of metal material.

[0032] Specific implementation mode five: This implementation mode is a further limitation of specific implementation mode four, and four groups of holders 135 are respectively mounted at four corners of multiple groups of heat exchange substrates 137, and the multiple groups of heat exchange substrates 137 are limited and fixed by four groups of holders 135 between the front side plate 131 and the rear side plate 136.

[0033] Specific embodiment six: This embodiment is a further limitation of specific embodiment five. Four groups of medium holes 1371 are evenly opened on the heat exchange substrate 137 , and a sealing strip 1372 is fixedly provided on the surface of the heat exchange substrate 137 .

[0034] Specific implementation method seven: This implementation method is a further limitation of specific implementation method six. The cross section of the sealing strip 1372 is circular, and a middle strip 13721 is fixedly disposed inside the sealing strip 1372 . Meanwhile, an inner strip 13722 is fixedly disposed inside the middle strip 13721 .

[0035] Specific implementation eight: This implementation is a further limitation of specific implementation seven. The axial sections of the sealing strip 1372, the middle strip 13721 and the inner strip 13722 are concentric circle structures, and the section of the sealing strip 1372 is circular. At the same time, the sections of the middle strip 13721 and the inner strip 13722 are "C" shaped.

[0036] Specific implementation nine: This implementation is a further limitation of specific implementation eight. The sealing strip 1372 , the middle strip 13721 and the inner strip 13722 are arranged in layers from the outside to the inside, and the thickness of the sealing strip 1372 is smaller than the thickness of the middle strip 13721 , and the thickness of the middle strip 13721 is smaller than the thickness of the inner strip 13722 .

[0037] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, and those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail. The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A glass substrate vacuum liquid circulation system, comprising a circulating water tank (1), characterized in that: A liquid level meter (3) is installed at the bottom of the circulating water tank (1), and an exhaust port (2) is installed at the bottom of the front of the circulating water tank (1). Two groups of pipes are installed at the top of the circulating water tank (1), and a liquid replenishment valve (5) and a quick liquid replenishment valve (6) are installed on the two groups of pipes, respectively. The pipes on the liquid replenishment valve (5) and the quick liquid replenishment valve (6) are connected to the drain tank (7) and the liquid supply pipe (8) respectively. A bypass pipe is installed on the upper side of the front of the circulating water tank (1), and a bypass pipe is installed on the bypass pipe. A bypass valve (4) is installed, and an air intake gate valve (11) and a liquid ring pump (12) are installed on one side of the bypass valve (4). A butterfly valve (9) is installed on the top water pipe of the circulating water tank (1) and the water pipe of the liquid ring pump (12). The top water pipe of the circulating water tank (1) is connected to the inside of the plate heat exchanger (13). The water pipe on the liquid ring pump (12) is connected to the inside of the plate heat exchanger (13). A temperature gauge (10) is installed in the water pipe on the liquid ring pump (12).

2. A glass substrate vacuum liquid circulation system according to claim 1, characterized in that: The plate heat exchanger (13) is respectively provided with a cooling liquid inlet pipe (132), a cooling liquid outlet pipe (133) and a front side plate (131), and the front side plate (131) covers the surface of the heat exchange substrate (137). The cooling liquid inlet pipe (132) is connected to the water pipe of the liquid ring pump (12), and the top water pipe of the circulating water tank (1) is connected to the cooling liquid outlet pipe (133).

3. A glass substrate vacuum liquid circulation system according to claim 2, characterized in that: The front side plate (131) and the rear side plate (136) are arranged in parallel, and the areas of the front side plate (131) and the rear side plate (136) are consistent. At the same time, the front side plate (131) and the rear side plate (136) are fixedly connected by four groups of fixed tie rods (134).

4. A glass substrate vacuum liquid circulation system according to claim 3, characterized in that: A plurality of groups of heat exchange substrates (137) are evenly arranged between the front side plate (131) and the rear side plate (136), and four groups of card seats (135) are evenly and fixedly arranged on the surfaces of the front side plate (131) and the rear side plate (136), and the card seats (135) are "L"-shaped structures made of metal material.

5. A glass substrate vacuum liquid circulation system according to claim 4, characterized in that: The four groups of clamping seats (135) are respectively clamped at the four corners of the multiple groups of heat exchange substrates (137), and the multiple groups of heat exchange substrates (137) are limited and fixed by the four groups of clamping seats (135) between the front side plate (131) and the rear side plate (136).

6. A glass substrate vacuum liquid circulation system according to claim 5, characterized in that: Four groups of medium holes (1371) are evenly arranged on the heat exchange substrate (137), and a sealing strip (1372) is fixedly arranged on the surface of the heat exchange substrate (137).

7. A glass substrate vacuum liquid circulation system according to claim 6, characterized in that: The cross section of the sealing rubber strip (1372) is circular, and a middle rubber strip (13721) is fixedly arranged inside the sealing rubber strip (1372), and an inner rubber strip (13722) is fixedly arranged inside the middle rubber strip (13721).

8. The glass substrate vacuum liquid circulation system according to claim 7, characterized in that: The axial cross-sections of the sealing strip (1372), the middle strip (13721) and the inner strip (13722) are concentric circle structures, and the cross-section of the sealing strip (1372) is circular, while the cross-sections of the middle strip (13721) and the inner strip (13722) are "C" shaped.

9. A glass substrate vacuum liquid circulation system according to claim 8, characterized in that: The sealing strip (1372), the middle strip (13721) and the inner strip (13722) are arranged in layers from the outside to the inside, and the thickness of the sealing strip (1372) is smaller than the thickness of the middle strip (13721), and the thickness of the middle strip (13721) is smaller than the thickness of the inner strip (13722).

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