Spraying surface shape variable measuring device and method

Abstract

The invention discloses a spraying surface shape variable measuring device and method, and the device comprises a detection module which is provided with a plurality of probes which are arranged in parallel, the probes are used for detecting the relative height of a spraying surface, and the detection module quantifies the detection results of the probes, so that the relative height of the spraying surface can be measured; the height variation of the spraying surface relative to the reference surface is reflected and is used for representing the deformation degree of the spraying surface. The method is simple and easy to implement, the deformation condition of the spraying face can be comprehensively reflected, large errors and misjudgment caused by visual inspection can be avoided, the measurement accuracy and reliability are improved, and therefore the problem that the film deposition uniformity becomes poor due to deformation of the spraying face can be effectively solved by controlling the deformation degree of the spraying face, and the film deposition quality is improved. Damage to the processed object caused by excessive deformation of the spraying surface can be prevented, and the yield is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment maintenance, and in particular to a device and method for measuring the deformation variable of a shower head spray surface. Background Art

[0002] TEOS (tetraethoxysilane) plasma-enhanced chemical vapor deposition (PECVD) is widely used in the deposition of insulating layers. The deposition thickness of TEOS is a very important parameter. Uneven thickness will directly affect the critical dimensions of photolithography, and in severe cases will even cause yield problems. The deformation of the shower head spray surface is a direct factor affecting the TEOS deposition thickness. When the deformation of the spray surface is large, it may even directly scratch the wafer surface and cause it to be scrapped.

[0003] At present, the deformation degree of the spray surface is measured by a simple combination of a ruler and a feeler gauge or caliper. However, since it needs to be measured by visual inspection and lacks a quantitative standard, it is easy to produce large errors and misjudgments, making it difficult to obtain accurate measurement results, and thus the reliability is low. In addition, it is difficult to detect and measure all positions on the spray surface using the above method, and it cannot fully reflect the deformation status of the spray surface. Therefore, how to quantify the standard for measuring the deformation of the spray head spray surface is an urgent problem that needs to be solved. Summary of the invention

[0004] The purpose of the present invention is to overcome the above-mentioned defects in the prior art and to provide a device and method for measuring the deformation of a spray surface.

[0005] To achieve the above object, the technical solution of the present invention is as follows:

[0006] The present invention provides a spray surface deformation measurement device, comprising:

[0007] A detection module is provided with a plurality of probes arranged in parallel, and the probes are used to detect the relative height of the spray surface. The detection module quantifies the detection results of the probes to reflect the height change of the spray surface relative to the reference plane, so as to characterize the deformation degree of the spray surface.

[0008] Furthermore, the detection module is provided with a parallel first reference plane and a second reference plane, the first reference plane is used for placing a spray head having the spray surface, and the spray surface faces the second reference plane, and the relative height of the corresponding position of the spray surface is contact-detected by making each of the probes move vertically relative to the second reference plane, and the vertical relative movement of each of the probes is measured as a detection result through the second reference plane to reflect the height change of different measuring point positions on the spray surface relative to the second reference plane, which is converted into the height deformation amount of the spray surface relative to the first reference plane, so as to characterize the deformation degree of the spray surface.

[0009] Furthermore, the detection module is provided with a base and a bracket located on the base, the first reference plane is provided on the bottom surface of the base, the bottom surface is used to place the sprinkler head, the bracket is provided with a cross bar, the second reference plane is provided on the cross bar and maintains a fixed distance from the bottom surface, and the probe is movable on the cross bar and is perpendicular to the second reference plane.

[0010] Further, the sum of the length of the probe and the thickness of the shower head is greater than the distance between the crossbar and the bottom surface.

[0011] Furthermore, an indicator mark is provided on the probe, and a scale is correspondingly provided on the crossbar, and a zero position scale provided on the scale forms the second reference plane; when detecting, the relative offset between the indicated indicator mark and the zero position scale is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

[0012] Furthermore, each of the probes is passed through the cross bar and arranged in a row along the radial direction of the spray surface when the spray head is placed. The bracket is configured to be able to rotate on the base to drive each of the probes to rotate around the center of the spray surface for scanning detection.

[0013] Furthermore, each of the probes is passed through the crossbar and arranged along the entire surface of the spraying surface when the spray head is placed, so as to perform a one-time detection on the spraying surface by forming a probe array conforming to the spraying surface.

[0014] Furthermore, the detection module is provided with a data processing unit, and the probe is provided with a conductor needle body; when performing detection, the data processing unit calculates the corresponding length of the needle body of the portion located between the second reference plane and the spray surface based on the resistance value corresponding to the detected portion of the needle body, and compares it with the reference length to calculate the length difference, and the length difference is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

[0015] Furthermore, a conductive contact is provided on one end of the needle body for detection, and a conductive contact that maintains contact with the needle body of each probe is correspondingly provided on the cross bar, each of the contacts is connected to a corresponding contact via a wire, each of the contacts forms the second reference plane on the cross bar, and a resistance detection unit is connected to the wire; when detecting, the data processing unit calculates the length of the needle body between a pair of contacts and the contact based on the resistance value of the needle body between a pair of contacts and the contact detected by the resistance detection unit, thereby reflecting the height change of the measuring point position on the spray surface relative to the second reference plane through the obtained length difference.

[0016] Furthermore, an insulating pad is provided on one end of the needle body used for detection.

[0017] The present invention also provides a method for measuring the shape variable of a spray surface, comprising:

[0018] The relative height of the spray surface is detected, and the detection result is quantified to reflect the height change of the spray surface relative to the reference surface, so as to characterize the deformation degree of the spray surface.

[0019] Furthermore, it also includes:

[0020] Setting a first reference plane and a second reference plane in parallel, placing a shower head having the shower surface on the first reference plane, and making the shower surface face the second reference plane;

[0021] Using a probe to move vertically relative to the second reference plane, contact-type detection is performed on the relative height of a corresponding position on the spray surface;

[0022] The vertical relative movement of the probe is taken as the detection result and measured with the second reference plane to reflect the height changes of different measuring points on the spray surface relative to the second reference plane, and is converted into the height deformation of the spray surface relative to the first reference plane, so as to characterize the deformation degree of the spray surface.

[0023] Furthermore, it also includes: arranging multiple probes in rows along the radial direction of the spray surface so that each probe rotates synchronously around the center of the spray surface for scanning detection; or arranging multiple probes along the entire surface of the spray surface to form a probe array that is contoured to the spray surface to perform a one-time detection of the spray surface.

[0024] Furthermore, it also includes: setting an indicator mark on the probe, and setting a scale corresponding to the second reference plane as the zero position scale. When detecting, the relative offset between the indicated indicator mark and the zero position scale is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

[0025] Furthermore, it also includes: when the probe uses a conductor needle body for detection, the resistance value corresponding to the part of the needle body located between the second reference plane and the spray surface is detected, the corresponding length of the needle body of this part is calculated, and compared with the reference length, the length difference is calculated, and the length difference is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

[0026] Furthermore, it also includes: setting a conductive contact on one end of the needle body used for detection, and correspondingly setting a conductive contact that keeps in contact with the needle body of each probe at the second reference plane; when detecting, the resistance value of the needle body between a pair of the contacts and the contact is measured, and the length of the needle body between a pair of the contacts and the contact is calculated, so that the height change of the measuring point position on the spray surface relative to the second reference plane is reflected by the obtained length difference.

[0027] Furthermore, the method further includes: converting the obtained height variation into a height deformation curve of the spray surface relative to the first reference surface, and setting control limits to perform statistical process control on the deformation degree of the spray surface.

[0028] Furthermore, it also includes: establishing a relationship model between the height deformation amount of the spray surface and the thickness of the treatment object, so as to improve the thickness uniformity of the deposited film on the treatment object.

[0029] It can be seen from the above technical scheme that the present invention detects the relative height of the spray surface on the spray head by using multiple probes arranged in parallel. The detection results of the probes can be quantified to reflect the height change of the spray surface relative to the reference surface, so as to characterize the deformation degree of the spray surface. In addition, direct reading or resistance value detection conversion can be used to quantify the overall deformation condition of the spray surface. Not only is the method simple and easy to implement, and can fully reflect the deformation condition of the spray surface, but it can also avoid large errors and misjudgments caused by visual inspection, improve the accuracy and reliability of the measurement, and thus effectively improve the problem of poor uniformity of thin film deposition caused by deformation of the spray surface by controlling the deformation degree of the spray surface, and prevent the occurrence of damage to the processing object (wafer) caused by excessive deformation of the spray surface, thereby improving the yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1-Figure 2 The figure is a schematic structural diagram of a device for measuring the deformation of a spray surface according to a preferred embodiment of the present invention.

[0031] Figure 3 The figure is a schematic diagram of the principle of probe detection according to a preferred embodiment of the present invention.

[0032] Figure 4 The figure is a schematic diagram of the arrangement structure of an indicator mark and a scale according to a preferred embodiment of the present invention.

[0033] Figure 5 The figure is a schematic diagram of the principle of performing probe rotation detection according to a preferred embodiment of the present invention.

[0034] Figure 6 The figure is a top view of the arrangement structure of a contoured probe array according to a preferred embodiment of the present invention.

[0035] Figure 7 This is a schematic diagram of a preferred embodiment of the present invention for measuring the height change of the spray surface by using a resistance detection method.

[0036] Figure 8 The present invention is a flowchart of a method for measuring a spray surface deformation according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] In view of the shortcomings of the existing method for detecting the deformation degree of the spray surface, which lacks quantitative standards, is prone to large errors and misjudgments, and is difficult to obtain accurate measurement results, thus having low reliability and difficulty in detecting and measuring all positions on the spray surface, and cannot fully reflect the deformation condition of the spray surface, the present invention provides a spray surface deformation measurement device and method.

[0039] A spray surface deformation measurement device of the present invention comprises:

[0040] A detection module is provided with a plurality of probes arranged in parallel, and the probes are used to detect the relative height of the spray surface. The detection module quantifies the detection results of the probes to reflect the height change of the spray surface relative to the reference plane, so as to characterize the deformation degree of the spray surface.

[0041] A method for measuring a spray surface deformation amount of the present invention comprises:

[0042] The relative height of the spray surface is detected, and the detection result is quantified to reflect the height change of the spray surface relative to the reference surface, so as to characterize the deformation degree of the spray surface.

[0043] The present invention detects the relative height of the spray surface on the spray head by using multiple probes arranged in parallel. The detection results of the probes can be quantified to reflect the height change of the spray surface relative to the reference surface, so as to characterize the deformation degree of the spray surface. In addition, direct reading or resistance value detection conversion can be used to quantify the overall deformation condition of the spray surface. Not only is the method simple and easy to implement, and can fully reflect the deformation condition of the spray surface, but it can also avoid large errors and misjudgments caused by visual inspection, improve the accuracy and reliability of the measurement, and thus effectively improve the problem of poor uniformity of thin film deposition caused by deformation of the spray surface by controlling the deformation degree of the spray surface, and prevent the occurrence of damage to the processing object (wafer) caused by excessive deformation of the spray surface, thereby improving the yield rate.

[0044] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0045] refer to Figure 1 The spray surface deformation measurement device of the present invention is provided with a detection module 10 , which is provided with a base 11 and a bracket 12 located on the base 11 , and a plurality of columnar probes 14 arranged in parallel and matched with the bracket 12 .

[0046] The bottom surface of the base 11 is used to horizontally place the spray head 18 to be tested, and the spray surface 17 of the spray head 18 is placed upward. The base 11 is provided with a first reference plane 20 in the horizontal direction of the bottom surface 19. When the spray head 18 is placed on the bottom surface 19 of the base 11 (i.e., the first reference plane 20), since the spray surface 17 maintains a fixed distance from the first reference plane 20, a mapping relationship is formed between the first reference plane 20 and the spray surface 17 (i.e., the first reference plane 20 represents the reference height of the spray surface 17 that has not been deformed).

[0047] The bracket 12 is provided with a crosspiece 13 which is horizontal to the bottom surface 19 of the base 11. A second reference surface 16 is provided in the horizontal direction of the crosspiece 13, and the second reference surface 16 is parallel to and keeps a fixed distance from the first reference surface 20 on the bottom surface 19. The probe 14 is provided on the crosspiece 13 in a coordinated manner for upward and downward movement, and is perpendicular to the second reference surface 16.

[0048] During measurement, each probe 14 is first moved and raised on the crosspiece 13, and then the spray head 18 is horizontally placed on the bottom surface 19 of the base 11 with the spray surface 17 facing upward, and then each probe 14 is moved and dropped on the crosspiece 13, so that the lower end (detection end) of each probe 14 contacts the spray surface 17. By making each probe 14 move vertically relative to the second reference plane 16 on the crosspiece 13, the relative height of the corresponding position of the spray surface 17 is contact-detected. The vertical relative movement amount of each probe 14 after movement is used as the detection result and quantitatively measured with the second reference plane 16 to reflect the height change amount of different measuring points on the spray surface 17 relative to the second reference plane 16, which is converted into the height deformation amount of the spray surface 17 relative to the first reference plane 20, so as to characterize the deformation degree of the spray surface 17.

[0049] refer to Figure 3-Figure 5 Combined with reference Figure 1 In some embodiments, an indicator mark 21 is provided on the side (needle body) of each probe 14, and a scale 22 is provided on the horizontal bar 13 in the vertical direction, and a scale including a zero position is provided on the scale 22, thereby forming a measuring ruler structure. The second reference plane 16 is formed by connecting the zero position scales on each scale 22.

[0050] The state where the indicator mark 21 is aligned with the zero scale when the lower end of the probe 14 is at a standard shower head 18 height from the first reference surface 20 (the bottom surface 19 of the base 11) is used as a reference, and the indicator mark 21 is formed on the probe 14 to indicate the standard state when the spray surface 17 is not deformed. In this way, when the spray surface 17 of the spray head 18 to be tested is detected, the relative offset between the indicated indicator mark 21 and the zero scale can be used to reflect the height change of the measuring point position on the spray surface 17 relative to the second reference surface 16, thereby measuring the height deformation of the spray surface 17 relative to the first reference surface 20.

[0051] In some embodiments, a window 15 is provided on the side of the crosspiece 13, and a scale 22 is provided in the window 15. Figure 1 When the probe 14 moves up and down, the deviation of the indicator mark 21 on the probe 14 relative to the zero scale can be observed through the window 15. Figure 3It can be seen that the relative height of the indicator marks 21 on each probe 14 relative to the zero scale is completely consistent with the height variation of the corresponding measuring point position on the spray surface 17 relative to the second reference plane 16 (or converted into the height deformation of the spray surface 17 relative to the first reference plane 20). Thus, the deformation degree of the spray surface 17 is quantitatively characterized.

[0052] In some embodiments, the sum of the length of the probe 14 and the thickness of the shower head 18 is greater than the distance between the crosspiece 13 and the bottom surface 19, and sufficient margin is left to ensure that the probe 14 is always in an effective cooperation state with the crosspiece 13 when moving up and down. Figure 3 shown.

[0053] refer to Figure 1 and Figure 5 . In some embodiments, each probe 14 is inserted into the crosspiece 13 and arranged in a row along the radial direction of the spray surface 17 when the spray head 18 is placed (i.e., along the radial direction of the circular bottom surface 19 of the base 11). In addition, the bracket 12 is configured to be rotatable on the base 11 to drive each probe 14 to rotate around the center of the spray surface 17 for scanning detection. The rotation of the bracket 12 on the base 11 can be achieved by providing a conventional turntable mechanism between the lower end of the bracket 12 and the circumferential surface of the base 11. After the bracket 12 is measured once at a certain rotation angle, the bracket 12 is rotated to repeat the measurement, and the height change at different radial positions on the entire spray surface 17 can be measured according to different clock positions on the base 11, thereby obtaining the deformation data of the entire spray head 18, and achieving the purpose of finely measuring the deformation condition of the spray surface 17.

[0054] refer to Figure 2 and Figure 6 In some embodiments, the bracket 12 is fixedly mounted on the base 11. In addition, the crosspiece 13 is circular in shape corresponding to the bottom surface 19 (spraying surface 17) of the base 11. The probes 14 are arranged on the crosspiece 13 and arranged along the entire surface of the spraying surface 17 when the spray head 18 is placed (i.e., along the circular bottom surface 19 of the base 11) to form an array of probes 14 that conform to the spraying surface 17. All the probes 14 in the array detect the spraying surface 17 at one time ( Figure 2 Only part of the probes 14 arranged circumferentially along the crosspiece 13 are shown. Figure 6 to be understood).

[0055] In some embodiments, since the probes 14 are distributed over the entire horizontal rail 13 , in order to prevent the numerous probes 14 from blocking the line of sight during reading, a resistance conversion method can be used to indirectly measure the height change of the spray surface 17 .

[0056] refer to Figure 7 and Figure 2In some embodiments, the detection module 10 is further provided with a data processing unit, and the probe 14 is provided with a conductor needle body. During detection, the data processing unit calculates the corresponding length of the needle body of the portion of the probe 14 located between the second reference plane 16 and the spray surface 17 according to the resistance value corresponding to the portion of the needle body of the probe 14 detected, and compares it with the reference length to calculate the length difference, so that the length difference can reflect the height change of the measuring point position on the spray surface 17 relative to the second reference plane 16.

[0057] In some embodiments, the needle body of the probe 14 is made of a conductor with a certain resistance, and a conductive contact 26 is provided on the lower end of each needle body for detection. A via hole is provided on the crossbar 13, and each probe 14 is inserted into a corresponding via hole to cooperate with the crossbar 13. A conductive contact 23 that keeps contact with the needle body of the corresponding probe 14 is provided on the side wall of the via hole. The contact 26 on each probe 14 and a corresponding contact 23 on the crossbar 13 form a pair of resistance measurement ends, and are connected by a wire 24, and a resistance detection unit 25 is connected to the wire 24, thereby forming a resistance detection loop. The connection line of the contacts 23 at each level corresponding to each probe 14 forms a second reference plane 16 on the crossbar 13.

[0058] During detection, when the lower end of each probe 14 contacts the spray surface 17, the needle body between the contact 26 on each probe 14 and the corresponding contact 23 has a corresponding height, and the needle body at different heights has different resistance values, which can be detected by the resistance detection unit 25 set in the corresponding circuit. Therefore, the data processing unit can calculate the length of the needle body between a pair of contacts 26 and the contact 23 according to the resistance value of the needle body between the pair of contacts 26 and the contact 23 detected by the resistance detection unit 25 according to the resistance equation.

[0059] The above resistance equation is expressed as:

[0060] R=k·(L / A)

[0061] In the equation, k is the conductivity of the conductor material of the probe 14; L is the length of the needle body between the contact point 26 and the contact point 23, which is a variable; and A is the cross-sectional area of ​​the needle body.

[0062] The data processing unit compares the needle length converted from the resistance measurement with the reference length (i.e., the needle length between the contact point 26 and the contact point 23 calculated by the resistance detection when the distance between the lower end of the probe 14 and the first reference plane 20 is one standard spray head 18 height) to calculate the length difference. The length difference can be used to reflect the height change of the measuring point position on the spray surface 17 relative to the second reference plane 16. Therefore, according to the calculated relationship between the resistance and the height, the surface deformation degree of the entire spray surface 17 can be inferred.

[0063] In some embodiments, the base 11 and the bracket 12 are made of insulating materials. In addition, an insulating pad 27 is provided on the lower end of the needle body (probe 14). The insulating pad 27 is used to insulate the probe 14 from the shower head 18 during measurement.

[0064] In some embodiments, the resistance detection unit 25 may be a multimeter.

[0065] It should be noted that the above Figure 2 In the embodiment of the present invention, the method of quantitatively detecting the overall deformation of the spray surface 17 by means of resistance value detection conversion is also applicable to Figure 1 Please refer to the above for Figure 2 The description of the embodiments has been understood and will not be repeated here.

[0066] A method for measuring the deformation amount of a spray surface of the present invention is further described in detail below through specific implementation modes and in conjunction with the accompanying drawings.

[0067] refer to Figure 8 Combined with reference Figure 1-Figure 7 A method for measuring the shape of a spray surface according to the present invention comprises the following steps:

[0068] Step S1: setting a first reference plane 20 and a second reference plane 16 in parallel, placing a spray head 18 having a spray surface 17 on the first reference plane 20, and making the spray surface 17 face the second reference plane 16;

[0069] Step S2: using the probe 14 to move vertically relative to the second reference plane 16 to perform contact detection on the relative height of the corresponding position of the spray surface 17;

[0070] Step S3: The vertical relative movement of the probe 14 is used as the detection result and measured with the second reference plane 16 to reflect the height change of different measuring points on the spray surface 17 relative to the second reference plane 16, and is converted into the height deformation of the spray surface 17 relative to the first reference plane 20, so as to characterize the deformation degree of the spray surface 17.

[0071] In some embodiments, the Figure 1 and Figure 3-Figure 5 The spray surface deformation measurement device shown implements the spray surface deformation measurement method of the present invention.

[0072] The first reference plane 20 is disposed on the bottom surface 19 of the base 11 , and the second reference plane 16 is disposed on the crosspiece 13 of the bracket 12 , so as to form the first reference plane 20 and the second reference plane 16 which are parallel to each other.

[0073] During measurement, the probes 14 arranged in a row along the radial direction of the spray surface 17 are first moved and raised on the crosspiece 13. Then, the spray head 18 to be measured is horizontally placed on the bottom surface 19 of the base 11 with the spray surface 17 facing upward, so that the spray surface 17 faces the second reference surface 16 on the upper crosspiece 13, that is, the spray head 18 is located on the first reference surface 20. Next, the probes 14 are moved and dropped on the crosspiece 13 so that the lower ends of the probes 14 contact the spray surface 17. In this way, by moving the probes 14, they are vertically moved relative to the second reference surface 16, so that the relative height at the corresponding position of the spray surface 17 can be contact-type detected.

[0074] After all the probes 14 fall on the corresponding measuring point positions of the spray surface 17, the vertical relative movement amount corresponding to each probe 14 is generated as the detection result, which is measured with the zero scale on the corresponding scale 22 as the second reference surface 16. By observing the relative offset between the indicator mark 21 on each probe 14 and the zero scale on the corresponding scale 22, the height change amount of different measuring point positions on the spray surface 17 relative to the second reference surface 16 can be reflected, which can be converted into the height deformation amount of the spray surface 17 relative to the first reference surface 20, so as to characterize the deformation degree of the spray surface 17.

[0075] When the support 12 is at a certain rotation angle (for example Figure 5 After measuring once at the azimuth of the line connecting 3 o'clock and 9 o'clock shown in the figure, by rotating the bracket 12, each probe 14 is rotated with the cross bar 13 (the second reference surface 16) at a certain angle relative to the center of the spray surface 17 (for example, by Figure 5 The position of the line connecting 3 o'clock and 9 o'clock shown in the figure rotates clockwise toward the position of the line connecting 4 o'clock and 10 o'clock, or rotates counterclockwise toward the position of the line connecting 2 o'clock and 8 o'clock, and measures again, so that each probe 14 rotates synchronously around the center of the spray surface 17 for scanning detection. The height change at different radial positions on the entire spray surface 17 can be measured according to different clock positions on the base 11, thereby obtaining the deformation data of the entire sprinkler head 18, thereby achieving the purpose of finely measuring and reflecting the deformation condition of the spray surface 17.

[0076] In some embodiments, the Figure 2 and Figure 6-Figure 7 The spray surface deformation measurement device shown implements the spray surface deformation measurement method of the present invention.

[0077] The first reference plane 20 is set on the bottom surface 19 of the base 11, and each probe 14 is inserted into the corresponding through hole distributed on the crosspiece 13, and arranged along the entire surface of the circular crosspiece 13 (that is, arranged along the entire surface of the spray surface 17), forming an array of probes 14 that follow the shape of the spray surface 17, so as to perform a one-time detection of the spray surface 17. In addition, the probe 14 can be a conductor needle body, and when performing detection, the resistance value corresponding to the part of the needle body located between the second reference plane 16 and the spray surface 17 is detected, and the corresponding length of the needle body of the part is calculated, and compared with the reference length, the length difference is calculated, and the length difference is used to reflect the height change of the measuring point position on the spray surface 17 relative to the second reference plane 16.

[0078] In some embodiments, the conductive contacts 23 corresponding to the via holes are connected to form the second reference plane 16 on the crossbar 13, thereby forming the first reference plane 20 and the second reference plane 16 which are parallel to each other. When performing detection, after the shower head 18 is placed and all the probes 14 fall on the corresponding measuring point positions on the spray surface 17, the resistance value corresponding to the needle height section between a pair of contacts 26 and contacts 23 is measured by the resistance detection unit, and then the length of the needle between a pair of contacts 26 and contacts 23 is calculated by the data processing unit, and compared with the reference length, the length difference can be calculated. The obtained length difference can reflect the height change of the measuring point position on the spray surface 17 relative to the second reference plane 16. Therefore, the spray surface 17 can be detected once by all the probes 14 in the array. According to the calculated relationship between the resistance and the height, it can be converted into the height deformation amount of the spray surface 17 relative to the first reference plane 20, so that the surface deformation degree of the entire spray surface 17 can be calculated.

[0079] Likewise, the above uses e.g. Figure 2 and Figure 6-Figure 7 The spray surface deformation measurement device shown in the figure implements a spray surface deformation measurement method of the present invention, which uses the resistance value detection conversion method to quantitatively detect the overall deformation condition of the spray surface 17, and is also applicable to the use of, for example, Figure 1 and Figure 3-Figure 5 The spray surface deformation measurement device shown in the figure realizes the application of the spray surface deformation measurement method of the present invention. Please refer to the description of the above embodiment for understanding, and no further description will be given.

[0080] Furthermore, the obtained height variation can be converted into a height deformation curve of the spray surface 17 relative to the first reference surface 20 , and control limits can be set to perform statistical process control on the deformation degree of the spray surface 17 .

[0081] Furthermore, a relationship model between the height deformation of the spray surface 17 and the thickness of the treatment object can be established to improve the thickness uniformity of the deposited film on the treatment object. By comparing the measured height deformation distribution of the spray surface 17 with the thickness distribution of the treatment object after film deposition, the influence of different deformation degrees and different deformation distribution conditions on the spray surface 17 on the film thickness can be analyzed, and accordingly, the spray surface deformation control limit that can fully meet the film thickness uniformity requirements can be formulated, thereby achieving effective control of improving the thickness uniformity of the deposited film on the treatment object.

[0082] Therefore, the measurement data obtained through the above-mentioned method of the present invention can effectively understand the deformation condition of the spray surface 17, and use it for management and control, so as to avoid the deterioration of the thickness uniformity of the spray head 18 or the occurrence of scratches on the product, thereby shortening the troubleshooting time, grasping the root cause of the risk, and eliminating the adverse effects caused by excessive deformation of the spray surface 17.

[0083] In summary, the present invention detects the relative height of the spray surface 17 on the shower head 18 by using a plurality of probes 14 arranged in parallel, and can quantify the detection results of the probes 14 to reflect the height change of the spray surface 17 relative to the reference surface, so as to characterize the deformation degree of the spray surface 17. In addition, the overall deformation condition of the spray surface 17 can be quantitatively detected by direct reading or by means of resistance value detection conversion. Not only is the method simple and easy to implement, and can fully reflect the deformation condition of the spray surface 17, but it can also avoid large errors and misjudgments caused by visual inspection, improve the accuracy and reliability of the measurement, so that the problem of poor uniformity of thin film deposition caused by the deformation of the spray surface 17 can be effectively improved by controlling the deformation degree of the spray surface, and the damage to the processing object (wafer) caused by excessive deformation of the spray surface 17 can be prevented, thereby improving the yield.

[0084] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A spray surface deformation measurement device, characterized in that: include: A detection module is provided with a plurality of probes arranged in parallel, and the probes are used to detect the relative height of the spray surface. The detection module quantifies the detection results of the probes to reflect the height change of the spray surface relative to the reference plane, so as to characterize the deformation degree of the spray surface.

2. The spray surface deformation measurement device according to claim 1, characterized in that: The detection module is provided with a parallel first reference plane and a second reference plane, wherein the first reference plane is used for placing a spray head having the spray surface, and the spray surface faces the second reference plane, and each of the probes is moved vertically relative to the second reference plane to perform contact detection on the relative height of the corresponding position of the spray surface, and the vertical relative movement amount of each of the probes is measured as a detection result through the second reference plane to reflect the height change amount of different measuring point positions on the spray surface relative to the second reference plane, which is converted into the height deformation amount of the spray surface relative to the first reference plane, so as to characterize the deformation degree of the spray surface.

3. The spray surface deformation measurement device according to claim 2, characterized in that: The detection module is provided with a base and a bracket located on the base, the first reference plane is provided on the bottom surface of the base, the bottom surface is used to place the sprinkler head, the bracket is provided with a cross bar, the second reference plane is provided on the cross bar and keeps a fixed distance from the bottom surface, the probe is movable on the cross bar and is perpendicular to the second reference plane.

4. The spray surface deformation measurement device according to claim 3, characterized in that: The sum of the length of the probe and the thickness of the shower head is greater than the distance between the cross piece and the bottom surface.

5. The spray surface deformation measurement device according to claim 3, characterized in that: An indicator mark is provided on the probe, and a scale is correspondingly provided on the crossbar, and a zero position scale provided on the scale forms the second reference plane; when detecting, the relative offset between the indicated indicator mark and the zero position scale is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

6. The device for measuring the spray surface deformation according to claim 3, characterized in that: The probes are inserted into the horizontal bar and arranged in a row along the radial direction of the spray surface when the spray head is placed. The bracket is configured to be rotatable on the base to drive the probes to rotate around the center of the spray surface for scanning detection.

7. The spray surface deformation measurement device according to claim 3, characterized in that: Each of the probes is inserted into the crossbar and arranged along the entire surface of the spraying surface when the spray head is placed, so as to perform a one-time detection on the spraying surface by forming a probe array conforming to the spraying surface.

8. The spray surface deformation measurement device according to claim 3, characterized in that: The detection module is provided with a data processing unit, and the probe is provided with a conductor needle body; when performing detection, the data processing unit calculates the corresponding length of the needle body of the portion located between the second reference plane and the spray surface according to the resistance value corresponding to the detected portion of the needle body, and compares it with the reference length to calculate the length difference, and the length difference is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

9. The spray surface deformation measurement device according to claim 8, characterized in that: A conductive contact is provided on one end of the needle body used for detection, and a conductive contact that keeps in contact with the needle body of each probe is correspondingly provided on the crossbar, each of the contact points is connected to a corresponding one of the contacts through a wire, each of the contacts forms the second reference plane on the crossbar, and a resistance detection unit is connected to the wire; During detection, the data processing unit calculates the length of the needle body between a pair of contacts and the contact based on the resistance value of the needle body between a pair of contacts and the contact detected by the resistance detection unit, thereby reflecting the height change of the measuring point position on the spray surface relative to the second reference plane through the obtained length difference.

10. The spray surface deformation measurement device according to claim 9, characterized in that: An insulating pad is arranged on one end of the needle body used for detection.

11. A method for measuring the deformation of a spray surface, characterized in that: include: The relative height of the spray surface is detected, and the detection result is quantified to reflect the height change of the spray surface relative to the reference surface, so as to characterize the deformation degree of the spray surface.

12. The method for measuring the spray surface deformation according to claim 11, characterized in that: Also includes: Setting a first reference plane and a second reference plane in parallel, placing a shower head having the shower surface on the first reference plane, and making the shower surface face the second reference plane; Using a probe to move vertically relative to the second reference plane, contact-type detection is performed on the relative height of a corresponding position on the spray surface; The vertical relative movement of the probe is taken as the detection result and measured with the second reference plane to reflect the height changes of different measuring points on the spray surface relative to the second reference plane, and is converted into the height deformation of the spray surface relative to the first reference plane, so as to characterize the deformation degree of the spray surface.

13. The method for measuring the spray surface deformation according to claim 12, characterized in that: Also includes: Arrange the plurality of probes in a row along the radial direction of the spray surface so that each of the probes rotates synchronously around the center of the spray surface for scanning detection; or, arrange the plurality of probes along the entire surface of the spray surface so as to form a probe array that conforms to the spray surface and perform a one-time detection on the spray surface.

14. The method for measuring the spray surface deformation according to claim 12, characterized in that: Also includes: An indicator mark is set on the probe, and a scale is set corresponding to the second reference plane as the zero position scale. During detection, the relative offset between the indicated indicator mark and the zero position scale is used to reflect the height change of the measuring point position on the spray surface relative to the second reference plane.

15. The method for measuring the spray surface deformation according to claim 12, characterized in that: Also includes: When the probe uses a conductive needle body for detection, the resistance value corresponding to the portion of the needle body located between the second reference plane and the spray surface is detected, and the corresponding length of the needle body of this portion is calculated and compared with the reference length to calculate the length difference, which reflects the height change of the measuring point position on the spray surface relative to the second reference plane.

16. The method for measuring the spray surface deformation according to claim 15, characterized in that: Also includes: A conductive contact is provided on one end of the needle body used for detection, and a conductive contact that keeps in contact with the needle body of each probe is correspondingly provided at the second reference plane. When detecting, the resistance value of the needle body between a pair of the contacts and the contact is measured, and the length of the needle body between a pair of the contacts and the contact is calculated, so that the height change of the measuring point position on the spray surface relative to the second reference plane is reflected by the obtained length difference.

17. The method for measuring the spray surface deformation according to claim 12, characterized in that: Also includes: The obtained height variation is converted into a height deformation curve of the spray surface relative to the first reference surface, and control limits are set to perform statistical process control on the deformation degree of the spray surface.

18. The method for measuring the spray surface deformation according to claim 12, characterized in that: Also includes: A relationship model between the height deformation amount of the spray surface and the thickness of the processed object is established to improve the thickness uniformity of the deposited film on the processed object.

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