Detection device and detection method

Abstract

The invention provides a detection device and a detection method, and relates to the technical field of semiconductors. The detection device comprises a laser sensor and a liquid pendulum. The laser sensor is provided with a transmitting end and a receiving end which are located on the two opposite sides of the mechanical arm, and the transmitting end and the receiving end are configured to slide in the vertical direction and rotate along the horizontal axis so that light emitted by the transmitting end can be received by the receiving end. The liquid pendulum is fixedly connected with the receiving end and is configured to slide and rotate synchronously with the receiving end. The heights of the transmitting end and the receiving end in the vertical direction are adjusted from the first position, the transmitting end and the receiving end are synchronously rotated to the second position, the levelness of the bearing face of the mechanical arm is judged according to the display angle of the liquid pendulum at the second position, and the liquid pendulum is in an absolute balance state at the first position and is in a non-absolute balance state at the second position. Light emitted by the emitting end is parallel to the bearing face of the mechanical arm. According to the detection device provided by the invention, the levelness detection accuracy of the bearing surface of the mechanical arm relative to the surface of the heating device is improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular to a detection device and a detection method. Background Art

[0002] In the manufacturing process of semiconductor devices, a robotic arm is required to place a wafer into a semiconductor device (e.g., a photolithography device, a deposition device), and before processing the wafer, the levelness of the robotic arm needs to be measured and adjusted to ensure the levelness of the wafer relative to the surface of the device in the semiconductor device (e.g., an optical device of the photolithography device, a heating device of the deposition device). However, the measurement method for measuring the levelness of the robotic arm in the related art has poor measurement accuracy, which affects the manufacturing accuracy of the wafer and thus affects the quality of the wafer. Summary of the invention

[0003] The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of the claims.

[0004] The present disclosure provides a detection device and a detection method.

[0005] According to some embodiments, a first aspect of the present disclosure provides a detection device for detecting the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to a surface of a heating device, the detection device comprising:

[0006] a laser sensor having a transmitting end and a receiving end located on opposite sides of the mechanical arm, the transmitting end and the receiving end being configured to slide in a vertical direction and rotate along a horizontal axis so that light emitted by the transmitting end is received by the receiving end;

[0007] A liquid pendulum, fixedly connected to the receiving end, and configured to synchronously slide and rotate with the receiving end in a vertical direction;

[0008] Among them, the heights of the transmitting end and the receiving end in the vertical direction are adjusted from the first position, and the transmitting end and the receiving end are synchronously rotated to the second position, and the horizontality of the bearing surface of the robotic arm is judged according to the display angle of the liquid pendulum at the second position. In the first position, the liquid pendulum is in an absolute equilibrium state, and in the second position, the light emitted by the transmitting end is parallel to the bearing surface of the robotic arm.

[0009] According to some embodiments of the present disclosure, the detection device further includes a first height measurement axis and a second height measurement axis extending in the vertical direction;

[0010] The transmitting end is slidably mounted on the first height measurement axis, and the transmitting end is configured to rotate relative to the bearing surface of the mechanical arm; the receiving end is slidably mounted on the second height measurement axis.

[0011] According to some embodiments of the present disclosure, both the first height measurement axis and the second height measurement axis are provided with a slide rail;

[0012] The transmitting end is slidably mounted on the slide rail of the first height measurement axis, and the transmitting end is provided with a first fixing knob for relatively fixing the transmitting end on the slide rail of the first height measurement axis;

[0013] The receiving end is slidably mounted on the slide rail of the second height measuring axis, and the receiving end is provided with a second fixing knob which fixes the receiving end relatively on the slide rail of the second height measuring axis.

[0014] According to some embodiments of the present disclosure, the transmitting end is further provided with a first rotating knob, and the receiving end is further provided with a second rotating knob, and the first rotating knob and the second rotating knob are configured to rotate the receiving end and the transmitting end.

[0015] According to some embodiments of the present disclosure, the detection device further includes a first height measurement module and a second height measurement module;

[0016] The first height measurement module includes a first conductive rod, a first open-circuit resistance circuit, a first processor and a first distance measuring sensor. The first conductive rod, the first open-circuit resistance circuit and the first distance measuring sensor are respectively arranged on the first height measurement axis; two ends of the first conductive rod are respectively connected to the first open-circuit resistance circuit, the first conductive rod is arranged at the transmitting end, and as the transmitting end slides, the current of the first open-circuit resistance circuit changes; the first processor converts the current of the first open-circuit resistance circuit into a length; the first distance measuring sensor is arranged at the end of the first height measurement axis facing one end of the heating device;

[0017] The second height measurement module includes a second conductive rod, a second open-circuit resistance circuit, a second processor and a second distance measuring sensor, wherein the second conductive rod, the second open-circuit resistance circuit and the second distance measuring sensor are respectively arranged on the second height measurement axis; both ends of the second conductive rod are respectively connected to the second open-circuit resistance circuit, the second conductive rod is arranged at the receiving end, and as the receiving end slides, the current of the second open-circuit resistance circuit changes; the second processor converts the current of the second open-circuit resistance circuit into length; and the second distance measuring sensor is arranged at the end of the second height measurement axis facing one end of the heating device.

[0018] According to some embodiments of the present disclosure, the first height measurement module also includes a first counterweight block, which is arranged between the first height measurement axis and the first ranging sensor; the first height measurement module also includes a second counterweight block, which is arranged between the second height measurement axis and the second ranging sensor.

[0019] According to some embodiments of the present disclosure, the detection device further includes a bracket, the bracket includes a beam extending in a horizontal direction, and one end of the first height measurement axis and one end of the second height measurement axis are respectively suspended on the beam.

[0020] According to some embodiments of the present disclosure, two ends of the beam are connected to opposite side walls of the reaction chamber.

[0021] According to some embodiments of the present disclosure, the detection device also includes a bracket, which includes a beam extending in a horizontal direction, and one end of the first height measurement axis and the second height measurement axis are respectively suspended on the beam; both ends of the beam are connected to opposite side walls of the reaction chamber.

[0022] According to some embodiments of the present disclosure, the support further includes a first vertical beam and a second vertical beam that connect the cross beam to opposite side walls of the reaction chamber.

[0023] According to some embodiments of the present disclosure, the detection device further includes a feedback device, which is used to feed back the detection result of the horizontality of the carrying surface of the robotic arm to the controller of the robotic arm.

[0024] According to some embodiments, a second aspect of the present disclosure provides a detection method, using the detection device described in any one of the first aspects to detect the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to a surface of a heating device, the detection method comprising:

[0025] The laser sensor and the liquid pendulum are adjusted to a first position, in which the light emitted by the transmitting end of the laser sensor is received by the receiving end, and the liquid pendulum moving synchronously with the receiving end is in an absolutely balanced state;

[0026] Adjusting the heights of the transmitting end and the receiving end in the vertical direction from the first position, and synchronously rotating the transmitting end and the receiving end to a second position, in which the light emitted by the transmitting end is parallel to the bearing surface of the robot arm and is not blocked;

[0027] The horizontality of the carrying surface of the robotic arm is determined according to the display angle of the liquid placed at the second position.

[0028] According to some embodiments of the present disclosure, the step of adjusting the laser sensor and the liquid pendulum to a first position includes:

[0029] Slidingly adjust the position of the transmitting end on the first height measurement axis, and slidingly adjust the position of the receiving end on the second height measurement axis, so that the light emitted by the transmitting end is received by the receiving end, and the liquid pendulum is in an absolute equilibrium state, wherein the first height measurement axis and the second height measurement axis extend in the vertical direction respectively.

[0030] According to some embodiments of the present disclosure, the steps of adjusting the heights of the transmitting end and the receiving end in the vertical direction from the first position, and synchronously rotating the transmitting end and the receiving end to a second position, where the light emitted by the transmitting end is parallel to the bearing surface of the robotic arm and is not blocked, include:

[0031] Slidingly adjusting the position of the transmitting end on the first height measurement axis, and slidingly adjusting the position of the receiving end on the second height measurement axis;

[0032] The first rotating knob of the transmitting end and the second rotating knob of the receiving end are rotated synchronously so that the light emitted by the transmitting end is parallel to the bearing surface of the mechanical arm and is not blocked.

[0033] According to some embodiments of the present disclosure, the detection method also includes placing a replacement wafer on the carrying surface of the robotic arm, and when the light emitted by the emitting end is parallel to the end surface of the replacement wafer facing away from the carrying surface of the robotic arm, the light emitted by the emitting end is parallel to the carrying surface of the robotic arm.

[0034] According to some embodiments of the present disclosure, the detection method further includes:

[0035] Acquire a first height, where the first height is a distance from a position of the transmitting end after sliding on the first height measurement axis to an end of the first height measurement axis facing one end of the heating device;

[0036] Acquire a second height, where the second height is a distance from an end of the first height measurement axis facing one end of the heating device to one end of the heating device;

[0037] Obtaining a third height, wherein the third height is a distance from a position of the liquid pendulum after sliding on the second height measuring axis to an end of the second height measuring axis facing one end of the heating device;

[0038] Acquire a fourth height, where the fourth height is a distance from an end of the second height measurement axis toward one end of the heating device to one end of the heating device;

[0039] Whether the bearing surface of the robot arm is relatively parallel to the surface of the heating device is determined according to the first height, the second height, the third height and the fourth height.

[0040] According to some embodiments of the present disclosure, the detection method further includes:

[0041] The inclination angle of the surface of the heating device relative to the horizontal plane is obtained according to the display angle of the liquid placed at the second position and the height difference between the second height and the fourth height.

[0042] According to some embodiments of the present disclosure, the detection method further includes:

[0043] Obtaining a display angle of the liquid when it is placed at the second position;

[0044] Obtaining an inclination angle of the heating device, where the inclination angle of the heating device is an inclination angle of the surface of the heating device relative to a horizontal plane;

[0045] The relative horizontality is adjusted according to the display angle of the liquid pendulum and the tilt angle of the heating device, and the relative horizontality is the horizontality of the bearing surface of the robot arm relative to the surface of the heating device.

[0046] The present invention provides a detection device for detecting the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to the surface of a heating device. By setting a working relationship between a laser sensor and a liquid pendulum and utilizing changes in the display angle of the liquid pendulum, the horizontality of the carrying surface of the robot arm relative to the surface of the heating device is determined, thereby improving the measurement accuracy of the detection.

[0047] Other aspects will be apparent upon reading and understanding the drawings and detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The accompanying drawings, which are incorporated herein and constitute a part of the specification, illustrate embodiments of the present disclosure and are used together with the description to explain the principles of the embodiments of the present disclosure. In these drawings, similar reference numerals are used to represent similar elements. The drawings described below are some embodiments of the present disclosure, rather than all embodiments. For those skilled in the art, other drawings can be obtained based on these drawings without paying creative work.

[0049] Figure 1a is a schematic structural diagram of a detection device according to an exemplary embodiment.

[0050] Figure 1b is a schematic structural diagram of a detection device according to an exemplary embodiment.

[0051] Figure 1cis a schematic structural diagram of a detection device according to an exemplary embodiment.

[0052] Figure 1d is a schematic structural diagram of a detection device according to an exemplary embodiment.

[0053] Figure 1e is a schematic structural diagram of a detection device according to an exemplary embodiment.

[0054] Figure 2 is a schematic structural diagram of a detection device according to an exemplary embodiment.

[0055] Figure 3 A schematic diagram showing the working relationship between a laser sensor and a liquid pendulum of a detection device according to an exemplary embodiment.

[0056] Figure 4 is a working state diagram of a laser sensor of a detection device according to an exemplary embodiment.

[0057] Figure 5 is a working state diagram of a first height measurement module and a second height measurement module of a detection device according to an exemplary embodiment.

[0058] Figure 6 is a schematic diagram of a first height measurement module of a detection device according to an exemplary embodiment.

[0059] Figure 7 is a schematic diagram of a second height measurement module of a detection device according to an exemplary embodiment.

[0060] Figure 8 is a schematic diagram showing the working relationship between a robot arm and a controller according to an exemplary embodiment.

[0061] Fig. 9 is a flow chart showing a detection method according to an exemplary embodiment.

[0062] Fig.10 is a schematic diagram of a detection result analysis principle of a detection device according to an exemplary embodiment.

[0063] Description of reference numerals:

[0064] 1-detection device; 11-laser sensor; 111-transmitter; 112-receiver; 12-liquid pendulum; 13-first height measurement axis; 14-second height measurement axis; 15-slide rail; 16-first height measurement module; 161-first conductive rod; 162-first open circuit with resistance circuit; 163-first processor; 164-first distance measuring sensor; 165-first counterweight; 17-second height measurement module; 171-second conductive rod; 172-second open circuit with resistance circuit; 173-second processor device; 174-second distance measuring sensor; 175-second counterweight; 18-bracket; 181-crossbeam; 182-first vertical beam; 183-second vertical beam; 2-reaction chamber; 3-mechanical arm; 4-heating device; 5-controller; 51-driving unit; 52-driving arm; 6-bubble level; 7-scale; 8-alternative wafer; α-first angle; β-second angle; H1-first height; H2-second height; H3-third height; H4-fourth height; L-the distance from the transmitting end to the receiving end of the laser sensor. DETAILED DESCRIPTION

[0065] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present disclosure. It should be noted that the embodiments in the present disclosure and the features in the embodiments can be arbitrarily combined with each other without conflict.

[0066] In the semiconductor preparation process, some processes (such as photolithography process and deposition process) will place the wafer at a designated position in the reaction chamber of the semiconductor equipment (such as photolithography equipment and deposition equipment) by a robot arm before processing the wafer. Therefore, the horizontality of the surface of the robot arm relative to the surface of the device in the semiconductor equipment (such as the optical device of the photolithography equipment and the heating device of the deposition equipment) also represents the horizontality of the surface of the wafer relative to the surface of the heating device of the semiconductor equipment such as the deposition equipment. Therefore, the horizontality of the surface of the robot arm relative to the surface of the heating device becomes an important parameter, which affects the quality of the wafer. Taking the deposition equipment as an example, the door of its reaction chamber is a slit, and the heating device at the bottom of the reaction chamber is an integral level with the slit. If the relative levelness of the robot arm and the heating device is poor, not only may the robot arm be scratched with the reaction chamber when passing through the slit to enter the reaction chamber, which may scratch the wafer and affect the quality of the wafer, but also the position of the wafer placed in the reaction chamber by the robot arm may not be accurate, thereby affecting the process and further affecting the quality of the wafer.

[0067] In the related art, the method for measuring the horizontality of the robot arm relative to the surface of the heating device is usually as follows: Figure 1a and Figure 1b As shown, a bubble level 6 and a scale 7 are used to measure the level of the surface of the robot arm 3' relative to the surface of the heating device 4' of the lithography equipment. However, there are many problems in the above method, which will directly affect the accuracy of the detection result. When the level of the surface of the robot arm 3' relative to the surface of the heating device 4' of the lithography equipment is low, the wafer position and / or the lithography equipment cannot be accurately adjusted, thereby affecting the lithography effect of the wafer.

[0068] For example, when the bubble level 6 is placed on the surface of the robot arm 3' to measure the level, Figure 1c As shown, the bottom of the bubble level 6 may be worn, causing the contact surface between the bubble level 6 and the robot arm 3' to be unable to be parallel to the bubble groove of the bubble level 6, which may cause measurement errors; Figure 1d As shown, the bubble level 6 may be heavy and unevenly distributed on the robot arm 3', which may cause the robot arm 3' to change its state, which may also cause inaccurate detection results. Figure 1e As shown, in the process of measuring the height from the robot arm 3' to the surface of the heating device 4' using the scale 7, the scale 7 may not be perpendicular to the robot arm 3' due to human operation, which may also cause a large error and make the detection result unpredictable. In addition, in the above measurement process, the measuring tools bubble level 6 and scale 7 used may contact the surface of the heating device 4' and / or the robot arm 3' of the lithography equipment, causing damage to these parts.

[0069] In view of this, an embodiment of the present disclosure provides a detection device, which is used to detect the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to the surface of a heating device, and the detection device includes a laser sensor and a liquid pendulum. The laser sensor has a transmitting end and a receiving end located on opposite sides of the robot arm, and the transmitting end and the receiving end are configured to slide in the vertical direction and rotate along the horizontal axis so that the light emitted by the transmitting end is received by the receiving end. The liquid pendulum is fixedly connected to the receiving end, and the liquid pendulum is configured to slide and rotate synchronously with the receiving end in the vertical direction. The height of the transmitting end and the receiving end in the vertical direction is adjusted from the first position, and the transmitting end and the receiving end are synchronously rotated to the second position. According to the display angle of the liquid pendulum at the second position, the horizontality of the carrying surface of the robot arm is judged. In the first position, the liquid pendulum is in an absolute equilibrium state, and in the second position, the light emitted by the transmitting end is parallel to the carrying surface of the robot arm.

[0070] In this way, based on the premise that the display angle of the liquid pendulum is zero when the light from the transmitting end and the receiving end of the laser sensor is absolutely horizontal, after adjusting the transmitting end and the receiving end so that the light is parallel to the bearing surface of the robot and is not blocked, it is determined whether the bearing surface of the robot is absolutely horizontal by judging whether the display angle of the liquid pendulum changes. In some cases, the position of the heating device of the lithography equipment can be considered to be horizontal, that is, according to the display angle of the liquid pendulum when the light emitted by the laser sensor is parallel to the bearing surface of the robot, it can be used to judge the horizontality of the bearing surface of the robot relative to the horizontal plane (that is, the surface of the heating device). In the above-mentioned detection process of the horizontality of the bearing surface of the robot relative to the surface of the heating device, not only the accuracy of the detection result is improved by minimizing the errors caused by human operation, but also the risk of the problem of affecting the accuracy of the detection result due to the detection device damaging the robot and / or the heating device is reduced by avoiding direct contact between the parts of the detection device and the parts in the robot and / or the lithography equipment, such as the surface of the heating device.

[0071] The following is a description of the embodiments of the present disclosure in conjunction with the accompanying drawings and specific embodiments. The exemplary embodiment of the present disclosure provides a structural diagram of a detection device, such as Figure 2 and Figure 3 As shown, Figure 2 is a schematic structural diagram of a detection device according to an exemplary embodiment. Figure 3 The schematic diagram of the working relationship between the laser sensor and the liquid pendulum of the detection device according to an exemplary embodiment. The detection device 1 includes a laser sensor 11 and a liquid pendulum 12, which are used to detect the horizontality of the mechanical arm 3 carrying the wafer entering the reaction chamber 2 relative to the surface of the heating device 4.

[0072] The laser sensor 11 includes a transmitting end 111 and a receiving end 112. The transmitting end 111 is disposed at a position relatively to one side of the bearing surface of the robot arm 3 (i.e. Figure 2 The receiving end 112 is disposed at the other side of the bearing surface of the robot 3 (i.e. Figure 2 The transmitting end 111 and the receiving end 112 are configured to be able to transmit and receive the signals in the vertical direction (i.e. Figure 2 The liquid pendulum 12 can slide in the vertical direction of the bearing surface of the robot arm 3 in the vertical direction, and can also rotate in the direction of the horizontal axis so that the light emitted by the transmitting end 111 is received by the receiving end 112. The liquid pendulum 12 is arranged on the receiving end 112, or the receiving end 112 is arranged on the liquid pendulum 12, and the two are fixedly connected, and the liquid pendulum 12 is configured to slide and rotate synchronously with the receiving end 112 in the vertical direction.

[0073] The liquid pendulum 12 is in an absolute equilibrium state (i.e., a state in which the display angle of the liquid pendulum 12 is zero) as the first position. While adjusting the height of the transmitting end 111 and the receiving end 112 in the vertical direction from the first position, the transmitting end 111 and the receiving end 112 are synchronously rotated so that the transmitting end 111 and the receiving end 112 rotate in the direction of the horizontal axis. At this time, the liquid pendulum 12 will also rotate synchronously with the rotation of the receiving end 112. When the transmitting end 111 and the receiving end 112 are adjusted to the second position, the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot 3 and is not blocked. For example, when the light emitted by the transmitting end 111 just passes through the bearing surface of the robot 3 and is partially blocked by the receiving end 112, the transmitting end 111 and the receiving end 112 are stopped from rotating and moving up and down. At this time, the liquid pendulum 12 will also stop rotating and moving. According to the display angle of the liquid pendulum 12 in the second position at this time, the horizontality of the bearing surface of the robot 3 relative to the horizontal plane (i.e., the surface of the heating device 4) is judged.

[0074] It should be understood that the structure of the detection device 1 is not limited to the exemplary structure in the above-mentioned embodiment. For example, the setting positions of the transmitting end 111 and the receiving end 112 relative to the bearing surface of the robot 3 can adopt a design opposite to the above-mentioned embodiment, that is, the transmitting end 111 is set on the right side of the bearing surface of the robot 3, and the receiving end 112 is set on the left side of the bearing surface of the robot 3. In addition, this embodiment does not limit the laser sensor 11 in the detection device 1, as long as the above-mentioned requirements are met. For example, the laser sensor 11 can be a laser ranging sensor with a receiving end 112 and a transmitting end 111. This embodiment also does not limit the type of the liquid pendulum 12. As long as the liquid pendulum 12 is a device that can convert angular displacement into resistance, the display angle of the liquid pendulum 12 can be displayed by the liquid pendulum 12 itself, or it can be displayed by a display window external to the liquid pendulum 12. In addition, the method for determining whether the transmitter 111 and the receiver 112 are adjusted to a suitable height, and determining whether the light emitted by the transmitter 111 and received by the receiver 112 is parallel to the bearing surface of the robot 3 and is not blocked can be direct observation or by setting a sensor such as a photosensitive sensor. All of the above can be designed according to needs and will not be described in detail here.

[0075] There are many implementation schemes for configuring the transmitting end 111 and the receiving end 112 of the detection device 1 to slide in the vertical direction and rotate along the horizontal axis. The following will introduce some possible implementation schemes based on the above implementation schemes, such as Figure 2 and Figure 5 As shown, the detection device 1 also includes a first height measurement axis 13 and a second height measurement axis 14. Figure 2It can be seen that the first height measurement axis 13 is located on the left side of the bearing surface of the robot 3 and extends in the vertical direction; the second height measurement axis 14 is located on the right side of the bearing surface of the robot 3 and extends in the vertical direction. The transmitting end 111 is slidably mounted on the first height measurement axis 13, that is, the transmitting end 111 can slide in the vertical direction of the first height measurement axis 13, and the transmitting end 111 is configured to rotate relative to the bearing surface of the robot 3. The receiving end 112 is slidably mounted on the second height measurement axis 14, that is, the liquid pendulum 12 fixedly connected to the receiving end 112 can slide synchronously with the receiving end 112 in the vertical direction of the second height measurement axis 14, and the receiving end 112 is configured to rotate synchronously with the transmitting end 111, and similarly, the liquid pendulum 12 fixedly connected to the receiving end 112 will also rotate synchronously with the transmitting end 111. In this way, the design of slidingly installing the transmitting end 111 on the first height measuring axis 13 and slidingly installing the receiving end 112 and the liquid pendulum 12 on the second height measuring axis 14 is conducive to adjusting the vertical height and rotation of the transmitting end 111 and the receiving end 112 during the detection process, thereby improving the efficiency of detection using the detection device 1.

[0076] As an example, the first position is a position where the transmitting end 111 and the receiving end 112 are at the same level, for example, the transmitting end 111 is located at the top end of the first height measurement axis 13 (the end away from the heating device 4), the receiving end 112 is located at the top end of the second height measurement axis 14 (the end away from the heating device 4), and the line connecting the transmitting end 111 and the receiving end 112 is a horizontal line; or the transmitting end 111 is located at the bottom end of the first height measurement axis 13 (the end close to the heating device 4), and the receiving end 112 is located at the bottom end of the second height measurement axis 14 (the end close to the heating device 4). The end portion near one end of the heating device 4), and the line between the transmitting end 111 and the receiving end 112 is a horizontal line; or the transmitting end 111 is at a position on the first height measurement axis 13 at a first distance from the bottom or top of the first height measurement axis 13, and the corresponding receiving end 112 is at a position on the second height measurement axis 14 at a second distance from the bottom or top of the second height measurement axis 14, and the line between the transmitting end 111 and the receiving end 112 is a horizontal line. Generally speaking, the first distance and the second distance can be equal, for example, 0.1m, 0.2m, 0.3m, etc.

[0077] As an example, the second position is when the light emitted by the transmitting end 111 is parallel to the carrying surface of the robot arm 3 and is not blocked, the transmitting end 111 is at a position on the first height measurement axis 13 at a third distance from the bottom or top of the first height measurement axis 13, and the receiving end 112 is at a position on the second height measurement axis 14 at a fourth distance from the bottom or top of the second height measurement axis 14. Among them, the numerical value of the third distance and the numerical value of the fourth distance may be equal or different. For example, when the bearing surface of the robot arm is parallel to the horizontal plane, the numerical value of the third distance and the numerical value of the fourth distance are equal, and can be a value of 0.5m, 0.6m, 0.7m, etc.; for example, when the bearing surface of the robot arm is not parallel to the horizontal plane, the numerical value of the third distance and the numerical value of the fourth distance are not equal. Specifically, the numerical value of the third distance may be greater than the numerical value of the fourth distance. For example, the numerical values ​​of the third distance are 0.5m, 0.6m, 0.7m, etc., and the numerical values ​​of the fourth distance are 0.3m, 0.4m, 0.5m, etc. The numerical value of the third distance may be smaller than the numerical value of the fourth distance. For example, the numerical values ​​of the third distance are 0.3m, 0.4m, 0.5m, etc., and the numerical values ​​of the fourth distance are 0.5m, 0.6m, 0.7m, etc.

[0078] It should be understood that the arrangement of the transmitting end 111 and the receiving end 112 is not limited to the scheme in the above-mentioned embodiment, and other design schemes can be adopted according to actual conditions. For example, in combination with the cavity structure of the reaction chamber 2 of the lithography equipment, the transmitting end 111 and the receiving end 112 are arranged on the cavity of the reaction chamber 2, so that the transmitting end 111 and the receiving end 112 can slide in the vertical direction and rotate along the horizontal axis. In addition, the specific distance values ​​involved in the first position and the second position are not limited to the values ​​in the above-mentioned examples, and can be determined according to actual conditions, which will not be elaborated here.

[0079] On the basis of the above-mentioned embodiment, based on the design scheme that the transmitting end 111 and the receiving end 112 are respectively slidably mounted on the first height measurement axis 13 and the second height measurement axis 14 extending in the vertical direction, as shown in FIG. Figure 2As shown, in some possible embodiments, the first height measuring axis 13 and the second height measuring axis 14 are both provided with a slide rail 15, and the slide rail 15 may be a groove or a protrusion formed integrally with the first height measuring axis 13 and the second height measuring axis 14, or may be a slide rail 15 (groove or protrusion) respectively fixed on the first height measuring axis 13 and the second height measuring axis 14. The transmitting end 111 is slidably mounted on the slide rail 15 of the first height measuring axis 13, and the corresponding transmitting end 111 is provided with a protrusion or a groove that matches the slide rail 15 on the first height measuring axis 13; the transmitting end 111 is provided with a first fixing knob (not shown in the figure) that fixes the transmitting end 111 relatively to the slide rail 15 of the first height measuring axis 13. After the transmitting end 111 is adjusted to the second position, the transmitting end 111 is fixed to the second position on the slide rail 15 of the first height measuring axis 13 by using the first fixing knob (not shown in the figure). The receiving end 112 is slidably installed on the slide rail 15 of the second height measuring axis 14, and the corresponding receiving end 112 is provided with a protrusion or groove that cooperates with the slide rail 15 on the second height measuring axis 14; the receiving end 112 is provided with a second fixing knob (not shown in the figure) that relatively fixes the receiving end 112 on the slide rail 15 of the second height measuring axis 14. After the receiving end 112 is adjusted to the second position, the second fixing knob (not shown in the figure) is used to fix the receiving end 112 to the second position on the slide rail 15 of the second height measuring axis 14.

[0080] It should be understood that the first fixed knob (not shown in the figure) and the second fixed knob (not shown in the figure) can be parts belonging to the transmitting end 111 or the receiving end 112 respectively, or can be separate fasteners. In addition, the selection requirements of the first fixed knob (not shown in the figure) and the second fixed knob (not shown in the figure) are not only to fix the transmitting end 111 relatively to the slide rail 15 of the first height measurement axis 13, and to fix the receiving end 112 relatively to the slide rail 15 of the second height measurement axis 14, but also to fix the transmitting end 111 relatively to the first height measurement axis 13, and to fix the receiving end 112 relatively to the second height measurement axis 14. The specific design scheme of the first fixed knob (not shown in the figure) and the second fixed knob (not shown in the figure) can be selected and designed according to the actual needs of the detection device 1, and will not be elaborated here.

[0081] Next, in some possible implementations, a design scheme for how the transmitting end 111 and the receiving end 112 can achieve synchronous rotation is also introduced. As an example, the transmitting end 111 is also provided with a first rotating knob (not shown in the figure), which can rotatably fix the transmitting end 111 on the first height measurement axis 13 or the slide rail 15 of the first height measurement axis 13. The receiving end 112 is also provided with a second rotating knob (not shown in the figure), which can rotatably fix the receiving end 112 on the second height measurement axis 14 or the slide rail 15 of the second height measurement axis 14. The first rotating knob (not shown in the figure) and the second rotating knob (not shown in the figure) are configured to make the receiving end 112 and the transmitting end 111 rotate synchronously. The synchronous rotation can be achieved by setting a connection relationship between the first rotating knob (not shown in the figure) and the second rotating knob (not shown in the figure), so that rotating a certain knob drives another rotating knob, or it can be achieved by manual control, that is, controlling the rotation direction and rotation angle of the two rotating knobs at the same time. In addition, the first rotating knob (not shown in the figure) and the second rotating knob (not shown in the figure) may be parts belonging to the transmitting end 111 or the receiving end 112 respectively, or may be separate fasteners.

[0082] The heating device 4 located in the reaction chamber of the lithography equipment can also be moved in actual applications. Therefore, in some cases (for example, the heating device 4 is not level relative to the absolute horizontal plane after movement), on the basis of measuring the levelness of the carrying surface of the robot arm 3 relative to the absolute horizontal plane, the levelness of the carrying surface of the robot arm 3 relative to the surface of the heating device 4 can be further measured, so that the detection result of the levelness of the carrying surface of the robot arm 3 relative to the surface of the heating device 4 is more accurate, and then the relative levelness of the carrying surface of the robot arm 3 to the surface of the heating device 4 is accurately adjusted, thereby improving the accuracy of lithography and improving the quality of the wafer.

[0083] like Figure 2 and Figure 5 As shown, in some possible implementations, the detection device 1 further includes a first height measurement module 16 and a second height measurement module 17. The first height measurement module 16 and the second height measurement module 17 can not only be used to measure whether the height of the bearing surface of the robot arm 3 from the surface of the heating device 4 meets a preset distance, but can also directly measure the absolute levelness of the surface of the heating device 4, and then combined with the absolute levelness of the bearing surface of the robot arm 3, to determine the levelness of the bearing surface of the robot arm 3 relative to the surface of the heating device 4.

[0084] like Figure 5 and Figure 6As shown, on the basis of the above embodiment, the first height measurement module 16 includes a first conductive rod 161, a first open-circuit resistance circuit 162, a first processor 163 and a first distance sensor 164, and the first conductive rod 161, the first open-circuit resistance circuit 162 and the first distance sensor 164 are respectively arranged on the first height measurement axis 13. The two ends of the first conductive rod 161 are respectively connected to the first open-circuit resistance circuit 162, and the first conductive rod 161 is arranged at the transmitting end 111, and as the transmitting end 111 slides in the vertical direction on the first height measurement axis 13, the current of the first open-circuit resistance circuit 162 changes. The first processor 163 converts the current of the first open-circuit resistance circuit 162 into a length. The first distance sensor 164 is arranged at the end of the first height measurement axis 13 facing the heating device 4 at the bottom of the reaction chamber 2.

[0085] like Figure 5 and Figure 7 On the basis of the above-mentioned embodiment, the second height measurement module 17 includes a second conductive rod 171, a second open-circuit resistance circuit 172, a second processor 173 and a second distance sensor 174. The second conductive rod 171, the second open-circuit resistance circuit 172 and the second distance sensor 174 are respectively arranged on the second height measurement shaft 14. The two ends of the second conductive rod 171 are respectively connected to the second open-circuit resistance circuit 172. The second conductive rod 171 is arranged at the receiving end 112, and as the receiving end 112 slides in the vertical direction on the second height measurement shaft 14, the current of the second open-circuit resistance circuit 172 changes. The second processor 173 converts the current of the second open-circuit resistance circuit 172 into a length. The second distance sensor 174 is arranged at the end of the second height measurement shaft 14 facing the heating device 4 at the bottom of the reaction chamber 2.

[0086] like Figure 2 , Figure 5 , Figure 6 and Figure 7As shown, only as an example, the transmitting end 111 is slidably arranged on the slide rail 15 of the first height measurement axis 13. The first conductive rod 161 is arranged on the transmitting end 111, and the two ends of the first conductive rod 161 are respectively connected to the positive and negative electrodes of the first open-circuit resistance circuit 162 through wires, and in the process of sliding of the transmitting end 111, the first conductive rod 161 is also driven to slide in the vertical direction of the first height measurement axis 13, so that the current in the first open-circuit resistance circuit 162 formed in the vertical direction of the first height measurement axis 13 changes, and the first processor 163 obtains the length (i.e., height) of the transmitting end 111 at the corresponding position from the end face of the first height measurement axis 13 toward the heating device 4 according to the current in the first open-circuit resistance circuit 162. Similarly, the receiving end 112 is slidably arranged on the slide rail 15 of the second height measurement axis 14. The second conductive rod 171 is arranged on the receiving end 112, and the two ends of the second conductive rod 171 are respectively connected to the positive and negative electrodes of the second open-circuit resistance circuit 172 through wires, and in the process of sliding of the receiving end 112, the second conductive rod 171 will also be driven to slide in the vertical direction of the second height measurement axis 14, so that the current in the second open-circuit resistance circuit 172 formed in the vertical direction of the second height measurement axis 14 changes, and the second processor 173 obtains the length (i.e., height) of the end face of the receiving end 112 at the corresponding position from the second height measurement axis 14 toward the heating device 4 according to the current in the second open-circuit resistance circuit 172.

[0087] The first distance measuring sensor 164 and the second distance measuring sensor 174 directly measure the distance between the end of the corresponding first height measuring axis 13 close to one end of the heating device 4 and one end of the heating device 4, and the distance between the end of the second height measuring axis 14 close to one end of the heating device 4 and one end of the heating device 4. Specifically, the light (i.e., laser) emitted by the first distance measuring sensor 164 and the second distance measuring sensor 174 will pass through the surface of one end of the heating device 4 respectively, and be reflected into the corresponding first distance measuring sensor 164 and the second distance measuring sensor 174, so that half of the distance moved by the corresponding laser is the distance from the corresponding height measuring axis to one end of the heating device 4.

[0088] Thus, during the measurement process of the above-mentioned detection device 1, the first height measurement module 16 and the second height measurement module 17 of the detection device 1 only slide on the corresponding first height measurement axis 13 and the second height measurement axis 14, and do not make direct contact with the mechanical arm 3 and the heating device 4, so that there will be no detection errors and / or damage to the mechanical arm 3 and the heating device 4 caused by contact with the parts of the detection device 1, thereby improving the accuracy of the detection results. In addition, the results obtained in the detection process can be obtained directly or indirectly by the machine, reducing the influence of human factors on the accuracy of the detection results, and further increasing the accuracy of the detection results.

[0089] It should be understood that the first processor 163 and the second processor 173 can be respectively arranged on the corresponding first height measurement axis 13 and the second height measurement axis 14, or other design schemes can be adopted. For example, the first processor 163 and / or the second processor 173 can be externally connected and connected to the corresponding first open circuit with resistance circuit 162 and / or the corresponding second open circuit with resistance circuit 172 when in use. In addition, the length of the transmitter 111 and / or the receiver 112 to the end of the corresponding first height measurement axis 13 and / or the end of the corresponding second height measurement axis 14 is not limited to the scheme in the above example, and can also be implemented by using a laser ranging sensor, for example, by calculating the displacement difference of the transmitter 111 and / or the receiver 112 from the corresponding position to the end of the corresponding first height measurement axis 13 and / or the end of the corresponding second height measurement axis 14. The design of the first height measurement module 16 and the second height measurement module 17 can be selected and designed according to actual needs, and will not be elaborated here.

[0090] like Figure 2 and Figure 5 As shown, in some possible implementations, the first height measurement module 16 further includes a first counterweight 165, which is disposed between the first height measurement axis 13 and the first distance measuring sensor 164. The first height measurement module 16 further includes a second counterweight 175, which is disposed between the second height measurement axis 14 and the second distance measuring sensor 174. In this way, by utilizing the weight of the first counterweight 165 and the second counterweight 175, the stability of the first height measurement axis 13 and the second height measurement axis 14 in the numerical direction is further increased, and the risk of the first height measurement axis 13 and / or the second height measurement axis 14 shaking or deflecting during the movement of the transmitting end 111 and / or the receiving end 112 is reduced, thereby improving the accuracy of the detection result of the detection device 1.

[0091] like Figure 2As shown, on the basis of the above embodiment, the detection device 1 also includes a bracket 18, and the bracket 18 includes a beam 181 extending in the horizontal direction, and one end of the first height measurement axis 13 and the second height measurement axis 14 are respectively suspended on the beam 181. The beam 181 can be fixed in the cavity of the reaction chamber 2 of the lithography equipment, and can also be detachably connected in the cavity of the reaction chamber 2. In addition, the beam 181 is configured to extend in the horizontal direction, which can further ensure the stability of the first height measurement axis 13 and the second height measurement axis 14 suspended on the beam 181 extending in the vertical direction by using their own gravity. In addition, the design of the bracket is simple, which is convenient for the installation and disassembly of the detection device, thereby improving the convenience of the detection device 1 when used.

[0092] It should be understood that the arrangement of the first height measurement axis 13 and the second height measurement axis 14 is not limited to being implemented using the bracket 18 in the above embodiment, but can also be suspended on the top of the reaction chamber 2 using some structures such as a hook structure or a snap structure (ensuring that the first height measurement axis 13 and the second height measurement axis 14 extend in the vertical direction).

[0093] like Figure 2 As shown, in some possible implementations, two ends of the crossbeam 181 are connected to opposite side walls of the reaction chamber 2. In this way, the crossbeam 181 is detachably arranged in the reaction chamber 2, thereby avoiding the influence of the detection equipment on the operation of the lithography equipment.

[0094] like Figure 2 As shown, in some possible embodiments, the bracket 18 further includes a first vertical beam 182 and a second vertical beam 183 that connect the cross beam 181 to the opposite side walls of the reaction chamber 2. The first vertical beam 182 and the second vertical beam 183 support the cross beam 181 in the vertical direction, which, on the one hand, ensures that the cross beam 181 extends in an absolute horizontal direction, thereby improving the stability of the first height measurement axis 13 and the second height measurement axis 14 in the vertical direction, and on the other hand, facilitates the installation of the cross beam 181 on the cavity of the reaction chamber 2, thereby improving the convenience of the detection device 1 when in use.

[0095] On the basis of the above-mentioned embodiment, the detection device 1 further includes a feedback device (not shown in the figure), which is used to feed back the detection result of the horizontality of the bearing surface of the robot arm 3 relative to the surface of the heating device 4 to the controller 5 of the robot arm 3. In this way, the controller 5 of the robot arm 3 adjusts the robot arm 3 according to the detection result of the horizontality sent by the feedback device. The controller 5 makes the robot arm 3 move not only in the vertical direction but also in the horizontal axis relative to the heating device 4, so that the horizontality of the bearing end surface of the robot arm 3 relative to the surface of the heating device 4 meets the preset requirements. The above-mentioned preset requirements can be that the angle between the bearing end surface of the robot arm 3 and the surface of the heating device 4 is 0°, or that the angle between the bearing end surface of the robot arm 3 and the surface of the heating device 4 has an allowable error relative to 0°, and the effect of the allowable error on the photolithography of the wafer can be basically ignored.

[0096] like Figure 8 As shown, exemplarily, the controller 5 of the robot 3 includes a driving unit 51 and a driving arm 52, one end of the driving arm 52 is connected to the driving unit 51, and the other end of the driving arm 52 is connected to the robot 3. When the driving arm 52 moves in the vertical direction and / or horizontal direction under the drive of the driving unit 51, the robot 3 is driven to move in the vertical direction and / or horizontal direction. Specifically, when the controller 5 of the robot 3 receives the detection result of the horizontality of the bearing surface of the robot 3 relative to the surface of the heating device 4 sent by the feedback device (not shown in the figure), the controller 5 will control the driving unit 51 to drive the driving arm 52 to move in the vertical direction and / or horizontal direction according to the detection result, and the robot 3 moves in the vertical direction and / or horizontal direction under the drive of the driving arm 52 until the height of the bearing surface of the robot 3 from the surface of the heating device 4 and the horizontality of the bearing surface of the robot 3 relative to the surface of the heating device 4 meet the preset requirements, the controller 5 stops working, that is, the movement of the robot 3 in the vertical direction and / or horizontal direction stops.

[0097] like Figure 2 , Figure 3 and Figure 4 The present disclosure provides a detection method, using any detection device 1 in the above embodiments to detect the level of a robot arm 3 carrying a wafer entering a reaction chamber 2 relative to a surface of a heating device 4, the detection method comprising:

[0098] The laser sensor 11 and the liquid pendulum 12 are adjusted to a first position, in which the light emitted by the transmitting end 111 of the laser sensor 11 is received by the receiving end 112, and the liquid pendulum 12 moving synchronously with the receiving end 112 is in an absolutely balanced state;

[0099] Adjust the height of the transmitting end 111 and the receiving end 112 in the vertical direction from the first position, and synchronously rotate the transmitting end 111 and the receiving end 112 to the second position, in which the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot arm 3 and is not blocked;

[0100] The horizontality of the bearing surface of the robot arm 3 is determined based on the display angle of the liquid pendulum 12 at the second position.

[0101] The detection method in the above embodiment uses the laser sensor 11 and the liquid pendulum 12 to measure the horizontality of the bearing surface of the robot arm 3 relative to the surface of the heating device 4, which reduces the influence of human operation on the detection result and improves the accuracy of the detection result.

[0102] The following is an explanation of the embodiments of the present disclosure in conjunction with the accompanying drawings and specific embodiments. The exemplary embodiments of the present disclosure provide a detection method, such as Fig. 9 As shown, Fig. 9 is a flow chart of a detection method according to an exemplary embodiment, the detection method comprising the following steps:

[0103] Step S100: adjusting the laser sensor 11 and the liquid pendulum 12 to a first position, in which the light emitted by the transmitting end 111 of the laser sensor 11 is received by the receiving end 112, and the liquid pendulum 12 moving synchronously with the receiving end 112 is in an absolutely balanced state; as an example, when the laser sensor 11 and the liquid pendulum 12 are in the first position, the line connecting the laser sensor 11 and the liquid pendulum 12 is a horizontal line, which is also used as a horizontal reference line in the detection process;

[0104] Step S200: adjusting the height of the transmitting end 111 and the receiving end 112 in the vertical direction from the first position, and synchronously rotating the transmitting end 111 and the receiving end 112 to the second position, in which the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot 3 and is just not blocked; while adjusting the height of the transmitting end 111 and the receiving end 112 in the vertical direction, it is also necessary to synchronously rotate the transmitting end 111 and the receiving end 112 so that the light (i.e., laser) emitted by the transmitting end 111 is always received by the receiving end 112, so that after the transmitting end 111 and the receiving end 112 reach the second position, stop adjusting and rotating the transmitting end 111 and the receiving end 112, wherein it can be confirmed by observation whether the transmitting end 111 and the receiving end 112 have reached the second position, or it can be achieved by setting a plurality of sensors such as photosensors on the bearing surface of the robot 3, which will not be elaborated here;

[0105] Step S300: According to the display angle of the liquid pendulum 12 in the second position, that is, the display angle of the liquid pendulum 12 corresponding to when the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot 3, the horizontality of the bearing surface of the robot 3 is judged; when the transmitting end 111 and the receiving end 112 are at the second position, that is, when the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot 3 and is just not blocked, the display angle of the liquid pendulum 12 at this time, that is, the first angle α, is obtained, and the horizontality of the bearing surface of the robot 3 relative to the surface of the heating device 4 is judged according to the first angle α; when the first angle α is equal to 0°, the bearing surface of the robot 3 is parallel to the surface of the heating device 4, and when the first angle α is not equal to 0°, the bearing surface of the robot 3 is not parallel to the surface of the heating device 4. The above detection results are obtained when the surface of the heating device 4 is a horizontal plane or approximately a horizontal plane.

[0106] like Figure 2 and Figure 5 As shown, in some possible implementations, the step of adjusting the laser sensor 11 and the liquid pendulum 12 to the first position in step S100 includes:

[0107] Step S110: Slidingly adjust the position of the transmitting end 111 on the first height measurement axis 13, and slidingly adjust the position of the receiving end 112 on the second height measurement axis 14, so that the light emitted by the transmitting end 111 is received by the receiving end 112, and the liquid pendulum 12 is in an absolute equilibrium state, wherein the first height measurement 13 and the second height measurement axis 14 extend in the vertical direction respectively.

[0108] like Figure 2 and Figure 5 As shown, in some possible implementations, the step of adjusting the height of the transmitting end 111 and the liquid pendulum 12 in the vertical direction from the first position in step S200, and synchronously rotating the transmitting end 111 and the liquid pendulum 12 to the second position, where the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot arm 3 and is not blocked, includes:

[0109] Step S210: slidingly adjusting the position of the transmitting end 111 on the first height measurement axis 13, and slidingly adjusting the position of the receiving end 112 on the second height measurement axis 14;

[0110] Step S220: synchronously rotate the first rotating knob (not shown in the figure) of the transmitting end 111 and the second rotating knob (not shown in the figure) of the receiving end 112 so that the light emitted by the transmitting end 111 is parallel to the bearing surface of the robot arm 3 and is not blocked.

[0111] like Figure 2 and Figure 3 As shown, based on the above embodiments, in some embodiments, the detection method further includes:

[0112] Step S101: Place a replacement wafer on the carrying surface of the robot 3, and when the light emitted by the transmitting end 111 is parallel to the end face of the replacement wafer away from the carrying surface of the robot 3, the light emitted by the transmitting end 111 is parallel to the carrying surface of the robot 3. The replacement wafer may have the same or similar parameters as the wafer to be photolithographically processed, wherein the parameters include but are not limited to at least one of material, size, weight or density).

[0113] In this way, the design of arranging a substitute wafer on the carrying surface of the robot arm 3 not only reduces the risk of the robot arm 3 warping up during the detection process by utilizing the weight of the substitute wafer itself, thereby improving the accuracy of the detection result, but also selects the parameters of the substitute wafer to make the substitute wafer infinitely close to the wafer to be photolithography, and can more accurately detect the horizontality between the surface of the wafer to be photolithography and the surface of the heating device 4 during photolithography, thereby improving the accuracy of photolithography.

[0114] As an example, step S101 can be performed after step S100 and before step S200, that is, after adjusting the transmitting end 111 and the receiving end 112 to the first position, before adjusting the vertical height of the transmitting end 111 and the receiving end 112 from the first position, and before synchronously rotating the transmitting end 111 and the receiving end 112 to the second position, the replacement wafer is placed on the carrying surface of the robot arm 3; as another example, step S101 can be placed before step S100, that is, before adjusting the transmitting end 111 and the receiving end 112 to the first position, the replacement wafer is placed on the carrying surface of the robot arm 3.

[0115] In some possible implementations, the detection method further includes: determining whether the bearing surface of the robot arm 3 is relatively parallel to the surface of the heating device 4;

[0116] Step S400 determines whether the bearing surface of the robot arm 3 is relatively parallel to the surface of the heating device 4, including:

[0117] Step S410: Obtain the first height H1, which is the distance from the position of the transmitting end 111 after sliding on the first height measurement axis 13 to the end of the first height measurement axis 13 facing the heating device 4; as an example, the first height H1 can be obtained by subtracting the distance that the transmitting end 111 slides on the first height measurement axis 13 from the length of the first height measurement axis 13. Specifically, the length of the first height measurement axis 13 is fixed, and the distance that the transmitting end 111 slides on the first height measurement axis 13 can be obtained by the first height measurement module 16 composed of the transmitting end 111, the first conductive rod 161 disposed together with the transmitting end 111, the first open-circuit resistance circuit 162 connected to the first conductive rod 161, and the first processor 163 connected to the first open-circuit resistance circuit 162 in the above embodiment, or can be obtained by other methods, such as by setting a laser ranging sensor.

[0118] Step S420: Obtain a second height H2, where the second height H2 is the distance from the end of the first height measuring axis 13 facing one end of the heating device 4 to one end of the heating device 4; as an example, the second height H2 can be obtained by a first ranging sensor 164 located at the end of the first height measuring axis 13 facing one end of the heating device 4.

[0119] Step S430: Obtain the third height H3, which is the distance from the position of the liquid pendulum 12 after sliding on the second height measuring axis 14 to the end of the second height measuring axis 14 facing the heating device 4; as an example, the third height H3 can be obtained by subtracting the distance that the receiving end 112 slides on the second height measuring axis 14 from the length of the second height measuring axis 14. Specifically, the length of the second height measuring axis 14 is fixed, and the distance that the receiving end 112 slides on the second height measuring axis 14 can be obtained by the second height measuring module 17 composed of the receiving end 112, the second conductive rod 171 arranged together with the receiving end 112, the second open-circuit resistance circuit 172 connected to the second conductive rod 171, and the second processor 173 connected to the second open-circuit resistance circuit 172 in the above-mentioned embodiment, or can be obtained by other methods, such as by setting a laser ranging sensor.

[0120] Step S440: Obtain a fourth height H4, which is the distance from the end of the second height measuring axis 14 facing one end of the heating device 4 to one end of the heating device 4; the fourth height H4 can be obtained by setting a second ranging sensor 174 facing one end of the heating device 4 on the end of the second height measuring axis 14 facing one end of the heating device 4.

[0121] Step S450: Determine whether the bearing surface of the robot arm 3 is parallel to the surface of the heating device 4 according to the first height H1, the second height H2, the third height H3 and the fourth height H4; as an example, if H1+H2=H3+H4, wherein H1 is the first height, H2 is the second height, H3 is the third height, and H4 is the fourth height, then it is determined that the bearing surface of the robot arm 3 is parallel to the surface of the heating device 4; if H1+H2≠H3+H4, wherein H1 is the first height, H2 is the second height, H3 is the third height, and H4 is the fourth height, then it is determined that the bearing surface of the robot arm 3 is not parallel to the surface of the heating device 4.

[0122] In addition to the above-mentioned determination of whether the bearing surface of the robot 3 is parallel to the surface of the heating device 4 by determining whether the sum of the first height H1 and the second height H2 is equal to the sum of the third height H3 and the fourth height H4, other parameters may also be used for determination. For example, the following will specifically describe how to determine whether the bearing surface of the robot 3 is parallel to the heating device 4 based on the display angle of the liquid pendulum 12 in the second position (i.e., the first angle α), the first height H1, the second height H2, the third height H3 and the fourth height H4.

[0123] like Figure 4 and Fig.10 As shown, first obtain the distance difference A between the two ends of the end face of a robot arm 3 and the surface of the heating device 4, that is, A=first height H1+second height H2-third height H3-fourth height H4; determine whether the bearing surface of the robot arm 3 is parallel to the heating device 4 according to the relative size of the values ​​of A and sin(α)L, where L is the distance from the transmitting end 111 to the receiving end 112 of the laser sensor 11; if A=sin(α)L, it is determined that the bearing surface of the robot arm 3 is relatively horizontal to the heating device 4; if A>sin(α)L, it is determined that the bearing surface of the robot arm 3 is relatively not horizontal to the heating device 4, and the end point of the first height H1 corresponding to the bearing surface of the robot arm 3 is inclined toward the heating device 4; if A<sin(α)L, it is determined that the bearing surface of the robot arm 3 is relatively not horizontal to the heating device 4, and the end point of the third height H3 corresponding to the bearing surface of the robot arm 3 is inclined toward the heating device 4.

[0124] like Figure 2 , Figure 5 and Fig.10 In some possible embodiments, the detection method further comprises:

[0125] Step S500: Obtain the inclination angle of the surface of the heating device 4 relative to the horizontal plane according to the display angle of the liquid pendulum 12 in the second position and the height difference between the second height H2 and the fourth height H4. As an example, the display angle of the liquid pendulum 12 in the second position is the first angle α, and the first angle α can be displayed in a display window on the liquid pendulum 12 or in a display window external to the liquid pendulum 12; as an example, obtaining the inclination angle of the surface of the heating device 4 relative to the horizontal plane, that is, the second angle β, can be achieved by manual calculation or machine processing. The following will specifically introduce how to obtain the inclination angle of the end face of the heating device 4 relative to the horizontal plane based on the display angle (that is, the first angle α) and the height difference between the second height H2 and the fourth height H4. Fig.10 As shown, tanβ=[A-sin(α)L] / cos(α)L. As an example, when tanβ=1, the surface of the heating device 4 is inclined 45° relative to the horizontal plane. It should be understood that the value of tanβ is not limited to 1, and can be any other value such as 0.0875 (β=5°), 0.1763 (β=10°), 0.2679 (β=15°), 0.3640 (β=20°), 0.4663 (β=25°), etc.

[0126] like Figure 2 , Figure 5 and Fig.10 As shown, in some possible embodiments, the detection method further comprises:

[0127] Step S600: Obtain the display angle of the liquid pendulum 12 in the second position, i.e., the first angle α; there is no specific limitation on the method of obtaining the angle, which can be obtained by a machine or read manually, and can be selected according to needs, which will not be elaborated here.

[0128] Step S700: Obtain the inclination angle of the heating device 4, that is, the second angle β. The inclination angle of the heating device 4 is the angle at which the surface of the heating device 4 is inclined relative to the horizontal plane. There is no specific limitation on the method of obtaining the angle. It can be obtained by a machine or read manually. It can be selected according to needs and will not be elaborated here.

[0129] Step S800: adjusting the relative horizontality according to the display angle of the liquid pendulum 12 and the tilt angle of the heating device 4 , the relative horizontality being the horizontality of the bearing surface of the robot arm 3 relative to the surface of the heating device 4 .

[0130] As an example, according to the values ​​of the first angle α and the second angle β, one of the angles is adjusted so that the values ​​of the two angles are equal, or the two angles are adjusted at the same time so that the values ​​of the two angles are equal or both are zero. The adjustment of the first angle α and the second angle β can be achieved by adjusting the movement of the robot arm 3 and the heating device 4, and the specific content is not repeated here.

[0131] In the present disclosure, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of more restrictions, an element defined by the sentence "comprising..." does not exclude the presence of additional identical elements in the article or device comprising the element.

[0132] Although the preferred embodiments of the present disclosure have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present disclosure.

[0133] Obviously, those skilled in the art can make various changes and modifications to the present disclosure without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalents, the intent of the present disclosure also includes these modifications and variations.

Claims

1. A detection device for detecting the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to the surface of a heating device, characterized in that: The detection device comprises: a laser sensor having a transmitting end and a receiving end located on opposite sides of the mechanical arm, the transmitting end and the receiving end being configured to slide in a vertical direction and rotate along a horizontal axis so that light emitted by the transmitting end is received by the receiving end; A liquid pendulum, fixedly connected to the receiving end, and configured to synchronously slide and rotate with the receiving end in a vertical direction; Among them, the heights of the transmitting end and the receiving end in the vertical direction are adjusted from the first position, and the transmitting end and the receiving end are synchronously rotated to the second position, and the horizontality of the bearing surface of the robotic arm is judged according to the display angle of the liquid pendulum at the second position. In the first position, the liquid pendulum is in an absolute equilibrium state, and in the second position, the light emitted by the transmitting end is parallel to the bearing surface of the robotic arm.

2. The detection device according to claim 1, characterized in that: The detection device further includes a first height measurement axis and a second height measurement axis extending in the vertical direction; The transmitting end is slidably mounted on the first height measurement axis, and the transmitting end is configured to rotate relative to the bearing surface of the mechanical arm; the receiving end is slidably mounted on the second height measurement axis.

3. The detection device according to claim 2, characterized in that: The first height measurement axis and the second height measurement axis are both provided with slide rails; The transmitting end is slidably mounted on the slide rail of the first height measurement axis, and the transmitting end is provided with a first fixing knob for fixing the transmitting end relatively to the slide rail of the first height measurement axis; The receiving end is slidably mounted on the slide rail of the second height measuring axis, and the receiving end is provided with a second fixing knob which fixes the receiving end relatively on the slide rail of the second height measuring axis.

4. The detection device according to claim 3, characterized in that: The transmitting end is further provided with a first rotating knob, and the receiving end is further provided with a second rotating knob, and the first rotating knob and the second rotating knob are configured to rotate the receiving end and the transmitting end.

5. The detection device according to claim 3, characterized in that: The detection device also includes a first height measurement module and a second height measurement module; The first height measurement module includes a first conductive rod, a first open-circuit resistance circuit, a first processor and a first distance measuring sensor, wherein the first conductive rod, the first open-circuit resistance circuit and the first distance measuring sensor are respectively arranged on the first height measurement axis; two ends of the first conductive rod are respectively connected to the first open-circuit resistance circuit, the first conductive rod is arranged at the transmitting end, and as the transmitting end slides, the current of the first open-circuit resistance circuit changes; the first processor converts the current of the first open-circuit resistance circuit into a length; the first distance measuring sensor is arranged at the end of the first height measurement axis facing the heating device; The second height measurement module includes a second conductive rod, a second open-circuit resistance circuit, a second processor and a second distance measuring sensor, wherein the second conductive rod, the second open-circuit resistance circuit and the second distance measuring sensor are respectively arranged on the second height measurement axis; both ends of the second conductive rod are respectively connected to the second open-circuit resistance circuit, the second conductive rod is arranged at the receiving end, and as the receiving end slides, the current of the second open-circuit resistance circuit changes; the second processor converts the current of the second open-circuit resistance circuit into length; and the second distance measuring sensor is arranged at the end of the second height measurement axis facing one end of the heating device.

6. The detection device according to claim 5, characterized in that: The first height measurement module further includes a first counterweight block, which is arranged between the first height measurement axis and the first distance measuring sensor; the first height measurement module further includes a second counterweight block, which is arranged between the second height measurement axis and the second distance measuring sensor.

7. The detection device according to any one of claims 2 to 6, characterized in that: The detection device further comprises a bracket, wherein the bracket comprises a beam extending in a horizontal direction, and one end of the first height measurement axis and one end of the second height measurement axis are respectively suspended on the beam; and / or Two ends of the crossbeam are connected to opposite side walls of the reaction chamber.

8. The detection device according to claim 1, characterized in that: The detection device also includes a feedback device, which is used to feed back the detection result of the horizontality of the bearing surface of the robot arm to the controller of the robot arm.

9. A detection method, using the detection device as described in any one of claims 1 to 8 to detect the horizontality of a robot arm carrying a wafer entering a reaction chamber relative to the surface of a heating device, characterized in that: The detection method comprises: The laser sensor and the liquid pendulum are adjusted to a first position, in which the light emitted by the transmitting end of the laser sensor is received by the receiving end, and the liquid pendulum moving synchronously with the receiving end is in an absolutely balanced state; Adjusting the heights of the transmitting end and the receiving end in the vertical direction from the first position, and synchronously rotating the transmitting end and the receiving end to a second position, in which the light emitted by the transmitting end is parallel to the bearing surface of the robot arm and is not blocked; The horizontality of the carrying surface of the robotic arm is determined according to the display angle of the liquid placed at the second position.

10. The detection method according to claim 9, wherein the step of adjusting the laser sensor and the liquid pendulum to the first position comprises: Slidingly adjust the position of the transmitting end on the first height measurement axis, and slidingly adjust the position of the receiving end on the second height measurement axis, so that the light emitted by the transmitting end is received by the receiving end, and the liquid pendulum is in an absolute equilibrium state, wherein the first height measurement axis and the second height measurement axis extend in the vertical direction respectively.

11. The detection method according to claim 10, characterized in that: The steps of adjusting the heights of the transmitting end and the receiving end in the vertical direction from the first position, and synchronously rotating the transmitting end and the receiving end to a second position, where the light emitted by the transmitting end is parallel to the bearing surface of the robot arm and is not blocked, include: Slidingly adjusting the position of the transmitting end on the first height measurement axis, and slidingly adjusting the position of the receiving end on the second height measurement axis; The first rotating knob of the transmitting end and the second rotating knob of the receiving end are rotated synchronously so that the light emitted by the transmitting end is parallel to the bearing surface of the mechanical arm and is not blocked.

12. The detection method according to claim 11, characterized in that: The detection method further comprises: A replacement wafer is placed on the carrying surface of the robot arm. When the light emitted by the emitting end is parallel to the end surface of the replacement wafer away from the carrying surface of the robot arm, the light emitted by the emitting end is parallel to the carrying surface of the robot arm.

13. The detection method according to claim 10, characterized in that: The detection method further comprises: Acquire a first height, where the first height is a distance from a position of the transmitting end after sliding on the first height measurement axis to an end of the first height measurement axis facing one end of the heating device; Acquire a second height, where the second height is a distance from an end of the first height measurement axis facing one end of the heating device to one end of the heating device; Obtaining a third height, wherein the third height is a distance from a position of the liquid pendulum after sliding on the second height measuring axis to an end of the second height measuring axis facing one end of the heating device; Acquire a fourth height, where the fourth height is a distance from an end of the second height measurement axis toward one end of the heating device to one end of the heating device; Whether the bearing surface of the robot arm is relatively parallel to the surface of the heating device is determined according to the first height, the second height, the third height and the fourth height.

14. The detection method according to claim 13, characterized in that: The detection method further comprises: The inclination angle of the surface of the heating device relative to the horizontal plane is obtained according to the display angle of the liquid placed at the second position and the height difference between the second height and the fourth height.

15. The detection method according to claim 14, characterized in that: The detection method further comprises: Obtaining a display angle of the liquid when it is placed at the second position; Obtaining an inclination angle of the heating device, where the inclination angle of the heating device is an inclination angle of the surface of the heating device relative to a horizontal plane; The relative horizontality is adjusted according to the display angle of the liquid pendulum and the tilt angle of the heating device, and the relative horizontality is the horizontality of the bearing surface of the robot arm relative to the surface of the heating device.

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