Clamping device suitable for ultrahigh vacuum low-stress reflecting mirror

Abstract

The invention provides a clamping device suitable for an ultrahigh vacuum low-stress reflector, and relates to the technical field of precision optical machine equipment. The invention provides a clamping device suitable for an ultrahigh vacuum low-stress reflector. The clamping device comprises a reflector base, a top pressing assembly and a plurality of bottom supporting assemblies. A reflector groove is formed in the top of the reflector base, a reflector is suitable for being placed in the reflector groove, a plurality of supporting assembly grooves are formed in the bottom of the reflector base, and each supporting assembly groove is communicated with the reflector groove; a bottom supporting assembly is arranged in each supporting assembly open groove. According to the clamping mode, it can be guaranteed that the reflecting mirror is subjected to small clamping stress; on the other hand, the heat-conducting fin for conducting heat is arranged between the bottom of the reflector and the bottom of the reflector groove, the upper surface and the lower surface of the heat-conducting fin make contact with the bottom of the reflector and the bottom of the reflector groove respectively, the heat-conducting contact area of the bottom of the reflector can be increased, and therefore the heat-conducting capacity of the reflector is enhanced.

Description

Technical Field

[0001] The invention relates to the technical field of precision optical and mechanical equipment, and in particular to a clamping device suitable for an ultra-high vacuum low-stress reflecting mirror. Background Art

[0002] In the field of precision optical equipment technology, the frame is a very important type of optical component, which is used to load various optical lenses to ensure that the lenses are in the correct position in the entire optical system. 1) The installation and clamping of optical lenses is an important function of the optical frame. If the clamping force on the lens is too large during the installation and fixation of the lens, it will cause surface distortion of the lens, seriously affecting the light beam transmission. 2) For some special-purpose optical lenses, due to the large amount of energy transmitted by the light beam, thermal distortion occurs inside the lens, which affects the transmission of the light beam. Therefore, it is necessary to cool the high heat load lenses and take away the heat from the lenses in time to ensure that the lenses can work normally. How to improve the thermal conductivity of the lenses is another important issue in the design of frames.

[0003] Some of the currently used mirror frames reduce clamping distortion by low-stress clamping installation, and some reduce thermal distortion by optimizing thermal contact. However, there are relatively few methods that consider low-stress clamping and high thermal load at the same time. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a clamping device suitable for an ultra-high vacuum low-stress reflecting mirror, which can ensure that the reflecting mirror is subjected to a smaller clamping stress and enhance the thermal conductivity of the reflecting mirror.

[0005] The present invention provides a clamping device suitable for an ultra-high vacuum low-stress reflector, comprising a reflector base, a top clamping assembly and a plurality of bottom support assemblies; the top of the reflector base is provided with a reflector groove, the reflector groove is suitable for placing the reflector, the bottom of the reflector base is provided with a plurality of support assembly grooves, each of the support assembly grooves is connected to the reflector groove; a bottom support assembly is provided in each of the support assembly grooves; the bottom support assembly comprises a support base, a spring and a support ball arranged in sequence from bottom to top; the top of the support ball passes over the support assembly groove and is located in the reflector groove; the top clamping assembly comprises an annular clamping sheet detachably connected to the reflector base, the bottom of the annular clamping sheet is provided with a plurality of small clamping sheet grooves, and a small clamping sheet is provided in the small clamping sheet groove; the support ball abuts the lower surface of the reflector, and the small clamping sheet abuts the upper surface of the reflector; a heat conductive sheet is also provided between the bottom of the reflector groove and the bottom of the reflector.

[0006] In a feasible embodiment, the support component groove includes a straight section and a narrowed section connected in sequence from bottom to top, and the narrowed section is connected to the reflector groove; the inner diameter of the narrowed section gradually decreases in the direction approaching the reflector groove, and the inner diameter of the top of the narrowed section is smaller than the diameter of the support ball.

[0007] In a feasible implementation manner, the height of the supporting ball located in the groove of the reflector is 0.03-0.08 mm.

[0008] In a feasible implementation manner, the height of the supporting ball located in the groove of the reflector is 0.05 mm.

[0009] In a feasible implementation manner, the number of the bottom support components and the number of the small pressure plates are the same and correspond one to one, and the corresponding bottom support components and small pressure plates are located on the same straight line perpendicular to the mirror surface of the reflector.

[0010] In a feasible implementation manner, the number of the support components and the number of the small compression plates are both three, and the spacing angle between adjacent support components and the spacing angle between adjacent small compression plates are both 120°.

[0011] In a feasible implementation manner, the annular pressing plate includes a fixing portion and a supporting portion surrounded by the fixing portion; the fixing portion is detachably connected to the reflector base via a fixing screw.

[0012] In a feasible implementation manner, the upper surfaces of the fixing portion and the supporting portion are flush, and the lower surface of the fixing portion is lower than the lower surface of the supporting portion; the small pressing piece groove is located at the bottom of the supporting portion.

[0013] In a feasible implementation manner, the material of the heat conductive sheet is indium film; and / or the material of the reflector base is oxygen-free copper; and / or the material of the supporting ball is silicon nitride ceramic.

[0014] The present invention also provides a method for using a clamping device suitable for an ultra-high vacuum low-stress reflector, comprising at least the following steps:

[0015] 1) Install the bottom support assembly into the support assembly slot;

[0016] 2) Install the heat conducting sheet in the groove of the reflector;

[0017] 3) Install the reflector in the reflector slot, with the support ball supporting the lower surface of the reflector;

[0018] 4) Install the annular pressing piece on the reflector base, and the small pressing piece presses against the upper surface of the reflector.

[0019] The present invention provides a clamping device suitable for an ultra-high vacuum low-stress reflector, which has the following beneficial effects:

[0020] 1) The present invention clamps the reflector in the reflector groove by means of a top clamping assembly and a bottom supporting assembly. This clamping method can ensure that the reflector is subjected to a smaller clamping stress. On the other hand, a heat conductive sheet for heat conduction is provided between the bottom of the reflector and the bottom of the reflector groove. The upper and lower surfaces of the heat conductive sheet contact the bottom of the reflector and the bottom of the reflector groove respectively, which can increase the heat conductive contact area of ​​the bottom of the reflector, thereby enhancing the heat conductive capacity of the reflector.

[0021] 2) Furthermore, the top clamping assembly and the bottom supporting assembly of the present invention adopt a three-point clamping method, which can further reduce the clamping stress on the reflector while maintaining the stability of the reflector.

[0022] 3) Furthermore, the support assembly groove of the present invention includes a straight-through section and a narrowing section arranged in sequence from bottom to top, and the function of the narrowing section is to ensure that the top of each support ball is flush, ensure the stability of the reflector, and limit the maximum height of the support ball entering the reflector groove, thereby controlling the height of the heat-conducting space between the reflector and the bottom of the reflector groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0024] Figure 2 It is a cross-sectional view of the present invention.

[0025] Figure 3 It is a cross-sectional schematic diagram of the reflector base in the present invention.

[0026] Figure 4 It is a schematic diagram of the structure of the annular compression sheet in the present invention.

[0027] Figure 5 It is a bottom view of the present invention.

[0028] Figure 6 It is a partial enlarged view of the heat conducting plate and its adjacent structures in the present invention.

[0029] Figure 7 It is a schematic structural diagram of the bottom support assembly in the present invention.

[0030] Figure 8 It is a schematic structural diagram of the top clamping assembly in the present invention.

[0031] Fig. 9 It is a partial enlarged view of the straight-through section and the narrowed section in the present invention.

[0032] Reference numerals

[0033] Reflector base 1

[0034] Reflector slot 11

[0035] Support component slot 12

[0036] Direct section 12.1

[0037] Narrowing section 12.2

[0038] Light hole 13

[0039] Top clamp assembly 2

[0040] Ring-shaped pressing piece 21

[0041] Fixed part 21.1

[0042] Supporting part 21.2

[0043] Small clamping plate slot 22

[0044] Bottom support assembly 3

[0045] Support base 31

[0046] Spring 32

[0047] Support ball 33

[0048] Small compression piece 4

[0049] Fixing screw 5

[0050] Thermal Conductive Sheet 6

[0051] Reflector 7 DETAILED DESCRIPTION

[0052] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without creative work belong to the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0053] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] Furthermore, in the description of the present invention, unless otherwise specified, “plurality” means two or more.

[0055] The embodiment of the present invention provides a clamping device suitable for an ultra-high vacuum low-stress reflector. Figure 1 to Figure 5 , comprising a reflector base 1, a top clamping assembly 2 and a plurality of bottom support assemblies 3, wherein a reflector slot 11 is provided at the top of the reflector base 1, and a reflector 7 is placed in the reflector slot 11, and the shape of the reflector slot 11 is generally the same as that of the reflector 7, and the inner edge of the reflector slot 11 can fit with the outer edge of the reflector 7, thereby preventing the reflector 7 from tilting in the reflector slot 11, and a plurality of support assembly slots 12 are provided at the bottom of the reflector base 1, and each of the support assembly slots 12 is connected to the reflector slot 11. Continue reading Figure 2 and Figure 7 Each of the support component slots 12 is provided with a bottom support component 3, and the bottom support component 3 includes a support base 31, a spring 32 and a support ball 33 arranged in sequence from bottom to top, and the top of the support ball 33 passes over the support component slot 12 and is located in the reflector slot 11. Generally speaking, the spring 32 should ensure that the top of the support ball 33 can still be located in the reflector slot 11 after the reflector 7 is placed, ensuring that there is a heat conduction space between the reflector 7 and the bottom of the reflector slot 11 for heat conduction. Continue reading Figure 2 , Figure 4 and Figure 7The top clamping assembly 2 includes an annular clamping sheet 21 detachably connected to the reflector base 1, and a plurality of small clamping sheet grooves 22 are provided at the bottom of the annular clamping sheet 21, and a small clamping sheet 4 is provided in the small clamping sheet groove 22. Generally speaking, the inner diameter of the annular clamping sheet 21 is smaller than the inner diameter of the reflector groove 11, so as to ensure that part of the annular clamping sheet 21 can be located above the reflector groove 11, and the small clamping sheet groove 22 should be provided at the bottom of the part of the annular clamping sheet 21 above the reflector groove 11. When the annular clamping sheet 21 is installed on the reflector base 1, the coaxial assembly between the annular clamping sheet 21 and the reflector groove 11 should be maintained, and the small clamping sheet 4 can be directly inserted into the small clamping sheet groove 22 when installed. The support ball 33 supports the lower surface of the reflector 7, and the small clamping sheet 4 supports the upper surface of the reflector 7. In a feasible embodiment, the small compression plate slot 22 and the small compression plate 4 can also be integrally formed. Figure 2 and Figure 7 , a heat conducting sheet 6 is also provided between the bottom of the reflector slot 11 and the bottom of the reflector 7. The space between the bottom of the reflector slot 11 and the bottom of the reflector 7 is used as a heat conducting space. The heat conducting sheet 6 is provided in the heat conducting space, and the upper and lower surfaces of the heat conducting sheet 6 contact the bottom of the reflector 7 and the bottom of the reflector slot 11 respectively. The material of the heat conducting sheet 6 is preferably an indium film. In a specific embodiment, the height of the support ball 33 located in the reflector slot 11 is 0.03-0.08 mm, that is, the height of the heat conducting space is 0.03-0.08 mm, preferably, the height is 0.05 mm. In a supplementary embodiment, the top of each support ball 33 should be flush, so as to ensure that each support ball 33 can support the reflector 7. In a supplementary embodiment, the number of the bottom support components 3 is 3-8 groups, the number of the top clamping components 2 is 3-8 groups, and the number of the bottom support components 3 and the top clamping components 2 can be the same or different, which can be selected according to actual conditions. In another supplementary embodiment, the material of the reflector base 1 is preferably oxygen-free copper, and the material of the support ball 33 is preferably silicon nitride ceramic. The present invention clamps the reflector 7 in the reflector slot 11 through the top clamping component 2 and the bottom support component 3. This clamping method can ensure that the reflector 7 is subjected to a smaller clamping stress; on the other hand, a heat conductive sheet 6 for heat conduction is also provided between the bottom of the reflector 7 and the bottom of the reflector slot 11. The upper and lower surfaces of the heat conductive sheet 6 contact the bottom of the reflector 7 and the bottom of the reflector slot 11 respectively, which can increase the heat conductive contact area of ​​the bottom of the reflector 7, thereby enhancing the heat conductive capacity of the reflector 7.

[0056] In the clamping device for ultra-high vacuum low stress reflector provided in the embodiment of the present invention, refer to Fig. 9The support component slot 12 includes a straight section 12.1 and a narrowing section 12.2 which are connected in sequence from bottom to top. The narrowing section 12.2 is connected to the reflector slot 11. The inner diameter of the narrowing section 12.2 gradually decreases in the direction close to the reflector slot 11. The inner diameter of the top of the narrowing section 12.2 is smaller than the diameter of the support ball 33. Generally speaking, the straight section 12.1 and the narrowing section 12.2 are integrally formed. As an explanation, the function of the narrowing section 12.2 is to ensure that the top of each support ball 33 is flush, to ensure the stability of the reflector 7, and to limit the maximum height of the support ball 33 entering the reflector slot 11, thereby controlling the height of the heat conduction space between the reflector 7 and the bottom of the reflector slot 11.

[0057] In the clamping device for ultra-high vacuum low stress reflector provided in the embodiment of the present invention, refer to Figure 2 , the number of the bottom support components 3 and the number of the small pressing plates 4 are the same and correspond one to one, and the corresponding bottom support components 3 and the small pressing plates 4 are located on the same straight line perpendicular to the mirror surface of the reflector 7. In a specific embodiment, the number of the bottom support components 3 and the small pressing plates 4 are both three, and the three bottom support components 3 form an equilateral triangle, and the three bottom support components 3 are respectively the three vertices of the equilateral triangle; the three small pressing plates 4 form an equilateral triangle, and the three small pressing plates 4 are respectively the three vertices of the equilateral triangle. In other words, the spacing angles between the three bottom support components 3 and the three small pressing plates 4 are both 120°. As an illustration, the spacing angle of 120° in this embodiment means that from the perspective of looking down or looking up, this three-point clamping method can further reduce the clamping stress on the reflector 7 while keeping the reflector 7 stable.

[0058] In the clamping device for ultra-high vacuum low stress reflector provided in the embodiment of the present invention, refer to Figure 2 and Figure 4 The annular pressing sheet 21 includes a fixing portion 21.1 and a supporting portion 21.2 surrounded by the fixing portion 21.1; the fixing portion 21.1 is detachably connected to the reflector base 1 through a fixing screw 5. Generally speaking, a through hole matching the fixing screw 5 is provided on the fixing portion 21.1, and an opening matching the fixing screw 5 is also provided on the reflector base 1. During assembly, the fixing screw 5 is passed through the through hole and tightened in the opening. Preferably, a gasket can be added during assembly using the fixing screw 5 to strengthen the assembly strength between the fixing portion 21.1 and the reflector base 1. In a specific embodiment, six fixing screws 5 are included, and the spacing angles between the positions fixed by adjacent fixing screws 5 are the same.

[0059] In the clamping device for ultra-high vacuum low stress reflector provided in the embodiment of the present invention, refer to Figure 2 The upper surfaces of the fixing portion 21.1 and the abutting portion 21.2 are flush, and the lower surface of the fixing portion 21.1 is lower than the lower surface of the abutting portion 21.2; the small pressing plate slot 22 is located at the bottom of the abutting portion 21.2. Figure 2 After the reflector 7 is placed into the reflector groove 11, a portion of the top of the reflector 7 will extend beyond the reflector groove 11, and the outer side surface of the extending portion of the reflector 7 can fit with the inner side surface of the fixing portion 21.1, so that the supporting portion 21.2 can be located above the reflector 7, ensuring that the small pressing sheet 4 can press the upper surface of the reflector 7.

[0060] In the clamping device for ultra-high vacuum low stress reflector provided in the embodiment of the present invention, refer to Figure 2 In a feasible embodiment, the reflector base 1 is further provided with a light through hole 13 connected with the reflector groove 11 , and the light through hole 13 is used to pass part of the light acting on the reflector 7 .

[0061] The present invention also provides a method for using a clamping mechanism for an ultra-high vacuum low-stress reflecting mirror, which comprises at least the following steps:

[0062] 1) Install the bottom support assembly 3 in the support assembly slot 12;

[0063] 2) Install the heat conducting sheet 6 in the reflector groove 11;

[0064] 3) Install the reflector 7 in the reflector slot 11, with the support ball 33 holding the lower surface of the reflector 7; and tighten the annular clamping sheet 21 by means of fixing screws;

[0065] 4) The annular pressing piece 21 is installed on the reflector base 1 , and the small pressing piece 4 is pressed against the upper surface of the reflector 7 .

[0066] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A clamping device suitable for ultra-high vacuum low-stress mirrors, characterized in that: It comprises a reflector base (1), a top pressing assembly (2) and a plurality of bottom supporting assemblies (3); The top of the reflector base (1) is provided with a reflector slot (11), and the reflector slot (11) is suitable for placing a reflector (7); the bottom of the reflector base (1) is provided with a plurality of support component slots (12), and each of the support component slots (12) is connected to the reflector slot (11); each of the support component slots (12) is provided with a bottom support component (3); The bottom support assembly (3) comprises a support base (31), a spring (32) and a support ball (33) which are arranged in sequence from bottom to top; the top of the support ball (33) passes over the support assembly slot (12) and is located in the reflector slot (11); The top pressing assembly (2) comprises an annular pressing sheet (21) detachably connected to the reflector base (1), a plurality of small pressing sheet slots (22) are provided at the bottom of the annular pressing sheet (21), and a small pressing sheet (4) is provided in each of the small pressing sheet slots (22); The supporting ball (33) abuts against the lower surface of the reflector (7), and the small pressing sheet (4) abuts against the upper surface of the reflector (7); A heat conducting sheet (6) is also provided between the bottom of the reflector groove (11) and the bottom of the reflector (7).

2. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The support component slot (12) comprises a straight section (12.1) and a narrowing section (12.2) which are connected in sequence from bottom to top, and the narrowing section (12.2) is connected to the reflector slot (11); the inner diameter of the narrowing section (12.2) gradually decreases in a direction approaching the reflector slot (11), and the inner diameter of the top of the narrowing section (12.2) is smaller than the diameter of the support ball (33).

3. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The height of the supporting ball (33) located in the reflector groove (11) is 0.03-0.08 mm.

4. The clamping device for ultra-high vacuum low-stress mirror according to claim 3, characterized in that: The height of the supporting ball (33) located in the reflector groove (11) is 0.05 mm.

5. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The number of the bottom support components (3) and the number of the small pressing plates (4) are the same and correspond one to one, and the corresponding bottom support components (3) and small pressing plates (4) are located on the same straight line perpendicular to the mirror surface of the reflector (7).

6. The clamping device for ultra-high vacuum low-stress mirror according to claim 5, characterized in that: The number of the bottom support components (3) and the number of the small pressing plates (4) are both three; the three bottom support components (3) form an equilateral triangle, and the three bottom support components (3) are respectively the three vertices of the equilateral triangle; the three small pressing plates (4) form an equilateral triangle, and the three small pressing plates (4) are respectively the three vertices of the equilateral triangle.

7. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The annular pressing sheet (21) comprises a fixing portion (21.1) and a supporting portion (21.2) surrounded by the fixing portion (21.1); the fixing portion (21.1) is detachably connected to the reflector base (1) via a fixing screw (5).

8. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The upper surfaces of the fixing portion (21.1) and the abutting portion (21.2) are flush, and the lower surface of the fixing portion (21.1) is lower than the lower surface of the abutting portion (21.2); the small compression plate slot (22) is located at the bottom of the abutting portion (21.2).

9. The clamping device for ultra-high vacuum low-stress mirror according to claim 1, characterized in that: The material of the heat conducting plate (6) is an indium film; and / or the material of the reflector base (1) is oxygen-free copper; and / or the material of the supporting ball (33) is silicon nitride ceramic; and / or the reflector base (1) is further provided with a light-through hole (13) connected to the reflector slot (11).

10. A method for using the clamping device for an ultra-high vacuum low-stress mirror according to any one of claims 1 to 9, comprising at least the following steps: 1) Install the bottom support assembly (3) in the support assembly slot (12); 2) installing the heat conducting sheet (6) in the groove (11) of the reflector; 3) installing the reflector in the reflector slot (11), with the support ball (33) supporting the lower surface of the reflector; 4) The annular pressing piece (21) is mounted on the reflector base (1), and the small pressing piece (4) is pressed against the upper surface of the reflector.

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