High-efficiency wafer mounting mechanism

Abstract

The present invention provides a high-efficiency wafer mounting mechanism, comprising: a rotating base, the rotating base is rotatably connected to the base; two swing arms, the two swing arms are symmetrically arranged on the left and right sides of the rotating base, and the two swing arms are respectively connected to the rotating base in a vertically movable manner, and the free ends of the two swing arms both have clamping mouths for gripping wafers. By driving the two swing arms to rotate through the rotating base, and the two swing arms can move up and down relative to the rotating base, so that one swing arm can grip the wafer, and the other swing arm simultaneously mounts the wafer thereon onto the graphite plate, thereby improving the efficiency of picking up wafers by the swing arms.

Description

[0001] This application is a divisional application of the application with the application number 2019103751946, the application date of May 7, 2019, and the invention title of "Wafer Mounting Mechanism". Technical Field

[0002] The present invention relates to a high-efficiency wafer mounting mechanism. Background Art

[0003] Wafers are generally stored on an expansion ring. There are currently two methods to pick up the wafers on the expansion ring onto a graphite disk. The first method is for manual use of a suction cup, but the efficiency of this method is not high and it is not suitable for high-speed production use. The second method is to automatically grab through the form of a swing arm. By rotating the swing arm, the wafers on the expansion ring are picked up onto the graphite disk. However, this picking method can only grab and then place, and only one wafer can be installed in one process, and the efficiency cannot be substantially improved. Summary of the Invention

[0004] The purpose of the present invention is to provide a wafer mounting mechanism to solve the problem of low efficiency when picking up wafers through a swing arm.

[0005] The above object of the present invention can be achieved by the following technical solutions:

[0006] The present invention provides a wafer mounting mechanism, including:

[0007] A rotating seat, the rotating seat is rotatably connected to a fixed base;

[0008] Two swing arms, the two swing arms are symmetrically arranged on the left and right sides of the rotating seat, and the two swing arms are located on the same straight line in the horizontal direction. The rotating seat can drive the two swing arms to rotate;

[0009] And the two swing arms are respectively slidably connected to the rotating seat up and down, and the free ends of the two swing arms both have clamping mouths for grasping wafers.

[0010] Further, the two swing arms are respectively connected to two connecting seats. A pair of first guide rails arranged vertically are connected to the two side surfaces of the rotating seat. A first slider is slidably connected to each first guide rail, and the first slider is connected to the corresponding connecting seat.

[0011] Further, two supports are provided at the lower end of the base, and the rotating seat is located between the two supports;

[0012] Semicircular upper and lower rotating rings that can move up and down are respectively connected to the two supports. The two semicircular upper and lower rotating rings respectively surround the left and right sides of the rotating seat, and each semicircular upper and lower rotating ring has a semicircular slideway;

[0013] Support blocks are connected to both of the two connecting seats, rollers are rotatably connected to both of the two support blocks, and the two rollers roll in the corresponding semi-circular chutes respectively.

[0014] Furthermore, linear motors are respectively arranged on the two supports, the fixed ends of the linear motors are connected to the supports, and the moving ends of the linear motors are connected to the semi-circular upper and lower rotating rings through sliding seats.

[0015] Furthermore, two second guide rails arranged in the vertical direction are connected to the support, and the linear motors are located between the two second guide rails;

[0016] Second sliders are slidably connected to each of the second guide rails, and each of the second sliders is connected to the corresponding sliding seat.

[0017] Furthermore, two semi-circular wear-resistant plates are arranged in the semi-circular chute, the two semi-circular wear-resistant plates are arranged up and down to form the semi-circular chute, and the rollers are arranged to roll between the two semi-circular wear-resistant plates.

[0018] Furthermore, the two semi-circular upper and lower rotating rings are arranged at intervals in the vertical direction.

[0019] Furthermore, lens barrels are respectively connected to both sides of the base, and annular lamps are connected to the lower ends of the lens barrels.

[0020] Furthermore, a driving motor is installed on the base, the rotating shaft of the driving motor is arranged vertically downward, and the rotating seat is fixedly arranged on the rotating shaft of the driving motor.

[0021] The characteristics and advantages of the wafer mounting mechanism of the present invention are as follows: the rotating seat drives the two swing arms to rotate, and the two swing arms can move up and down relative to the rotating seat, so that one swing arm can grab the wafer, and the other swing arm simultaneously mounts the wafer thereon onto the graphite disk, thereby improving the efficiency of picking up the wafer by the swing arm. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 It is a schematic diagram of the wafer mounting mechanism of the present invention;

[0024] Figure 2Schematic diagram of the wafer mounting mechanism of the present invention;

[0025] Figure 3 Schematic diagram of the connection seat and the semi-circular upper and lower rotating ring in the wafer mounting mechanism of the present invention;

[0026] Figure 4 Schematic diagram of the semi-circular upper and lower rotating ring in the wafer mounting mechanism of the present invention;

[0027] Figure 5 Schematic diagram of the support block in the wafer mounting mechanism of the present invention;

[0028] Explanation of the reference numerals in the attached drawings:

[0029] 1. Rotating seat; 11. First guide rail; 2. Base; 21. Support; 211. Linear motor; 212. Second guide rail; 213. Inductive limiter; 214. Reading head; 3. Swing arm; 31. Clamping mouth; 4. Connection seat; 41. First slider; 42. Support block; 421. Roller; 5. Semi-circular upper and lower rotating ring; 51. Semi-circular slideway; 52. Slide seat; 521. Second slider; 522. Limit optoelectronic sheet; 53. Semi-circular wear-resistant plate; 6. Lens barrel; 61. Ring light; 7. Driving motor. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0031] Embodiment 1;

[0032] As Figures 1 to 5 shown, the present invention provides a wafer mounting mechanism, including: a rotating seat 1, the rotating seat 1 is rotatably connected to a fixed base 2; two swing arms 3, the two swing arms 3 are symmetrically arranged on the left and right sides of the rotating seat 1, and the two swing arms 3 are located on the same straight line in the horizontal direction. The rotating seat 1 can drive the two swing arms 3 to rotate; and the two swing arms 3 can be respectively connected to the rotating seat 1 in a vertically slidable manner, and the free ends of the two swing arms 3 both have clamping mouths 31 for grasping wafers.

[0033] In the present invention, the two swing arms 3 are respectively connected to two connecting seats 4. A pair of first guide rails 11 arranged vertically are connected to both sides of the rotating seat 1. A first slider 41 is slidably connected to each of the first guide rails 11, and the first slider 41 is connected to the corresponding connecting seat 4. Further, two supports 21 are provided at the lower end of the base 2, and the rotating seat 1 is located between the two supports 21; two semicircular upper and lower rotating rings 5 capable of moving up and down are respectively connected to the two supports 21. The two semicircular upper and lower rotating rings 5 respectively surround the left and right sides of the rotating seat 1. The two semicircular upper and lower rotating rings 5 are arranged at intervals in the vertical direction. Each of the semicircular upper and lower rotating rings 5 has a semicircular slideway 51; support blocks 42 are respectively connected to the two connecting seats 4, and rollers 421 are rotatably connected to the two support blocks 42. The two rollers 421 respectively roll in the corresponding semicircular slideways 51.

[0034] In the present invention, linear motors 211 are respectively provided on the two supports 21. The fixed ends of the linear motors 211 are connected to the supports 21, and the moving ends of the linear motors 211 are connected to the semicircular upper and lower rotating rings 5 through slide seats 52. Two second guide rails 212 arranged vertically are connected to the supports 21, and the linear motors 211 are located between the two second guide rails 212; a second slider 521 is slidably connected to each of the second guide rails 212, and each of the second sliders 521 is connected to the corresponding slide seat 52. Further, two semicircular wear-resistant plates 53 are provided in the semicircular slideway 51. The two semicircular wear-resistant plates 53 are arranged up and down to form the semicircular slideway 51, and the rollers 421 are rotatably arranged between the two semicircular wear-resistant plates 53.

[0035] In the present invention, lens barrels 6 are respectively connected to both sides of the base 2, and an annular lamp 61 is connected to the lower end of the lens barrel 6. Further, a driving motor is installed on the base 2, the rotating shaft of the driving motor is arranged vertically downward, and the rotating seat 1 is fixedly arranged on the rotating shaft of the driving motor.

[0036] Embodiment 2;

[0037] As Figures 1 to 5 shown, the present invention provides a wafer mounting mechanism, including: a rotating seat 1, the rotating seat 1 is rotatably connected to a base 2; two swing arms 3, the two swing arms 3 are symmetrically arranged on the left and right sides of the rotating seat 1, and the two swing arms 3 are located on the same straight line in the horizontal direction. The rotating seat 1 can drive the two swing arms 3 to rotate left and right; and the two swing arms 3 can be respectively connected to the rotating seat 1 so as to move up and down. The free ends of the two swing arms 3 both have clamping mouths 31 for gripping wafers.

[0038] The wafer mounting mechanism of the present invention drives two swing arms 3 to rotate through a rotating base 1, and the two swing arms 3 can move up and down relative to the rotating base 1, so that one swing arm 3 can grasp the wafer, and the other swing arm 3 simultaneously mounts the wafer thereon onto the graphite disk, thereby improving the efficiency of picking up the wafer by the swing arm 3.

[0039] Specifically, in the present invention, the two swing arms 3 are respectively connected to two connecting seats 4, and a pair of first guide rails 11 arranged in the vertical direction are connected to both side surfaces of the rotating base 1. A pair of first sliders 41 arranged in the vertical direction are connected to both of the two connecting seats 4. The two first guide rails 11 are located between the two first sliders 41, and the two first sliders 41 can be respectively slidably connected to the two corresponding first guide rails 11.

[0040] In this embodiment, two supports 21 are connected to the lower end of the base 2, and the rotating base 1 is located between the two supports 21; semi-circular upper and lower rotating rings 5 capable of moving up and down are respectively connected to the two supports 21. The two semi-circular upper and lower rotating rings 5 respectively surround the left and right sides of the rotating base 1, and each semi-circular upper and lower rotating ring 5 has a semi-circular slideway 51; support blocks 42 are respectively connected to both of the two connecting seats 4, and rollers 421 are rotatably connected to both of the two support blocks 42. The two rollers 421 are respectively rotatably connected in the semi-circular slideway 51.

[0041] In this embodiment, linear motors 211 are respectively connected to the two supports 21. The two semi-circular upper and lower rotating rings 5 are respectively connected to two sliding seats 52, and the two sliding seats 52 can be respectively connected to the two supports 21 through the two linear motors 211 and slide up and down.

[0042] In this embodiment, two second guide rails 212 arranged in the vertical direction are connected to the support 21. The linear motor 211 is located between the two second guide rails 212; two second sliders 521 are connected to the sliding seat 52, and the two second sliders 521 can be connected to the two second guide rails 212 and slide up and down. In this embodiment, two semi-circular wear-resistant plates 53 are connected in the semi-circular slideway 51, and the roller 421 is rotatably connected between the two semi-circular wear-resistant plates 53. The two semi-circular upper and lower rotating rings 5 are arranged at intervals in the vertical direction. By the roller 421 rotating in the semi-circular slideway 51, when the rotating base 1 drives the swing arm 3 to rotate through the connecting seat 4, a fulcrum is provided to improve the strength of the swing arm 3.

[0043] In the present invention, a limit optoelectronic piece 522 is connected to the slide base 52, and an induction limiter 213 is connected to the support 21. The limit optoelectronic piece 522 can limit the up-and-down movement of the slide base 52 through the induction limiter 213. In the present invention, a reading head 214 is connected to the support 21, and the slide base 52 can record the number of movements through the reading head. In the present invention, lens barrels 6 are respectively connected to both sides of the base 2, and an annular lamp 61 is connected to the lower end of the lens barrel 6.

[0044] When picking up a wafer through the swing arm 3, the linear motor 211 drives the two swing arms 3 to move up and down. One of the swing arms 3 grabs the wafer on the expansion ring through the clamping mouth 31, and the other swing arm 3 simultaneously mounts the wafer thereon onto the graphite disk, thereby improving the efficiency of picking up the wafer through the swing arm 3. After the end of one process, the rotating base 1 drives the swing arm 3 to rotate through the driving motor 7 installed on the base 2. At this time, when the rotating base 1 drives the swing arm 3 to rotate through the connecting seat 4, a fulcrum is provided to improve the strength of the swing arm 3 so as to ensure the movement accuracy of the swing arm 3 during rotation.

[0045] The above are only several embodiments of the present invention, and those skilled in the art can make various changes or modifications to the embodiments of the present invention without departing from the spirit and scope of the present invention according to the content disclosed in the application documents.

Claims

1. A high-efficiency wafer mounting mechanism, characterized in that, it includes; a rotating base, the rotating base is rotatably connected to a fixed base; two swing arms, the two swing arms are symmetrically arranged on the left and right sides of the rotating base, and the two swing arms are located on the same straight line in the horizontal direction, and the rotating base can drive the two swing arms to rotate; and the two swing arms can be respectively connected to the rotating base in a vertically sliding manner, and the free ends of the two swing arms both have clamping mouths for grasping wafers; the two swing arms are respectively connected to two connecting seats, and a pair of first guide rails arranged vertically are connected to both sides of the rotating base, and a first slider is slidably connected to each first guide rail, and the first slider is connected to the corresponding connecting seat; two supports are provided at the lower end of the base, and the rotating base is located between the two supports; semicircular upper and lower rotating rings that can move up and down are respectively connected to the two supports, and the two semicircular upper and lower rotating rings respectively surround the left and right sides of the rotating base, and each semicircular upper and lower rotating ring has a semicircular slideway; support blocks are respectively connected to the two connecting seats, rollers are rotatably connected to the two support blocks, and the two rollers respectively roll in the corresponding semicircular slideways; lens barrels are respectively connected to both sides of the base, a ring-shaped lamp is connected to the lower end of the lens barrel, a driving motor is installed on the base, the rotating shaft of the driving motor is arranged vertically downward, and the rotating base is fixedly arranged on the rotating shaft of the driving motor.

2. The high-efficiency wafer mounting mechanism according to claim 1, characterized in that, linear motors are respectively arranged on the two supports, the fixed ends of the linear motors are connected to the supports, and the moving ends of the linear motors are connected to the semicircular upper and lower rotating rings through sliding seats.

3. The high-efficiency wafer mounting mechanism according to claim 2, characterized in that, two second guide rails arranged vertically are connected to the supports, and the linear motors are located between the two second guide rails; second sliders are slidably connected to each of the second guide rails, and each second slider is connected to the corresponding sliding seat.

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