Equipment for preparing perovskite battery

Abstract

The invention provides equipment for preparing a perovskite battery. The equipment comprises a control module, and a rotary table assembly, a liquid injection assembly, an airtight chamber, an air inlet assembly, an exhaust assembly, a temperature sensor and an air pressure sensor which are respectively connected with the control module. Through the organic combination of the components, the integrated equipment for spin coating and annealing in the preparation process of the perovskite battery is realized. According to the equipment, the annealing time and conditions can be conveniently selected, and the influence on the perovskite thin film is small in the process of maintaining the annealing condition to be stable by virtue of the matching arrangement of the air inlet assembly and the exhaust assembly. In addition, the equipment provided by the invention is simple in operation, simple in structure and low in manufacturing cost, and is very suitable for teaching practice of preparation of perovskite cells and other solar cells.

Description

Technical Field

[0001] The present application relates to the field of equipment for the production and manufacture of solar cells, and specifically to equipment for perovskite cells. Background Art

[0002] Solar cells are photoelectric semiconductor sheets that use sunlight to generate electricity directly. They convert light energy into electrical energy directly through the photoelectric effect or photochemical effect. They have the advantages of high reliability, long life, and high conversion efficiency. As the third generation of new concept solar cells, perovskite solar cells have the advantages of high photoelectric conversion efficiency, low cost, and flexible processing. They have developed rapidly in recent years and are gradually comparable to silicon cells, approaching the level of commercial application.

[0003] Annealing is a key process in the manufacture of perovskite cells. It is used to improve the crystallinity and structural stability of perovskite films, thereby improving the photoelectric properties of perovskite films and the efficiency of perovskite cells. However, the timing of annealing also has an important impact on the structure and performance of the film. Too high an annealing temperature or too long an annealing time may cause cracking, shedding, and other phenomena in the film, thereby reducing the performance of the perovskite film. Therefore, it is usually necessary to select the appropriate annealing time according to the actual application requirements of the film. If the film requires higher crystallinity and stability, you can wait for a while after the perovskite solution is spin-coated before annealing. If the film has high requirements for morphology, you can choose to perform low-temperature pre-annealing during the spin coating process to avoid poor morphology.

[0004] As the country vigorously promotes the development of new energy technologies, there is a huge demand for talents in the R&D, design, production, packaging and testing of solar cells. At present, some domestic universities and vocational schools have opened courses related to the design and production of solar cells, but because the equipment related to the production of solar cells in the industry is relatively expensive and occupies a large area, many universities are unable to allow students to conduct experimental teaching close to the industrial production of solar cells. Summary of the invention

[0005] Aiming at the actual needs of teaching the perovskite preparation process, the present application provides a device for preparing perovskite cells. The device can complete the spin coating step and annealing step in the perovskite cell preparation process in the same device, and can independently select the annealing time and atmosphere temperature. The device is simple to operate, simple in structure and low in cost, and is suitable for the teaching practice of preparing perovskite cells and other solar cells.

[0006] The device for preparing perovskite batteries provided in the present application includes: a control module, and a rotating table assembly, a liquid injection assembly, an airtight chamber, an air intake assembly, an exhaust assembly, a temperature sensor and an air pressure sensor respectively connected to the control module.

[0007] The rotating platform assembly includes: a rotating platform driven by a motor, an electric heating component arranged under the rotating platform, and a temperature sensor for detecting the temperature of the rotating platform surface. Preferably, a notch for placing a substrate is arranged on the rotating platform.

[0008] The liquid injection assembly is fixedly arranged above the rotating bearing platform and is used to inject the spin coating liquid into the substrate on the rotating bearing platform. The liquid injection assembly, the rotating platform assembly, the temperature sensor and the air pressure sensor are housed in the airtight chamber.

[0009] The air intake assembly includes: an air intake pipeline, an air intake valve and an air uniforming mesh plate. The air intake pipeline is arranged outside the airtight chamber and is controlled by the air intake valve. The air uniforming mesh plate is arranged on the bottom surface of the upper cover of the airtight chamber and forms an air uniforming section with the upper cover of the airtight chamber. The air intake pipeline is used to introduce the atmosphere gas required for annealing into the air uniforming section so as to be filled into the space in the airtight chamber as quickly and uniformly as possible through the air uniforming mesh plate. In some embodiments, the air intake assembly also includes a detachable bubbling bottle.

[0010] The exhaust assembly includes an exhaust pipeline, an exhaust valve and a vacuum pump. The exhaust port of the exhaust pipeline is arranged below the rotating table and communicates with the airtight chamber, and the exhaust port is arranged outside the airtight chamber and is connected to the vacuum pump through the exhaust valve.

[0011] The control module controls the electric heating component, the exhaust assembly, and the air intake assembly based on the sensing data of the air pressure sensor and the temperature sensor to obtain the atmosphere required for spin coating, and controls the rotation of the rotating support platform based on a set rotation speed.

[0012] Furthermore, the device takes the substrate out of the rotating support table or puts the substrate into the rotating support table by opening and closing the upper cover of the airtight chamber.

[0013] Further, the liquid injection assembly has an injection amount setting component, and the injection amount setting component is used to set the amount of spin coating liquid injected during each spin coating. After the spin coating liquid is injected, the control module controls the rotation of the rotating table based on the set rotation speed and the corresponding rotation time to make the spin coating liquid evenly coated on the substrate on the rotating table to form a film layer of target thickness.

[0014] In some embodiments, the liquid injection assembly is installed on the side wall of the airtight chamber and has an adjustable height, and its liquid outlet is located above the center of the rotating support platform.

[0015] Furthermore, before the spin coating liquid is injected or after the spin coating completes the film formation, the control module closes the air intake valve, controls the vacuum pump to exhaust the gas in the airtight chamber, until the sensing data of the air pressure sensor reaches the set vacuum standard, and closes the vacuum pump and all exhaust valves. Then, the air intake assembly is controlled to pass the atmosphere gas required for annealing, and after reaching the preset pressure, the air intake valve is closed to complete the preparation of the annealing atmosphere.

[0016] When performing annealing treatment for preparing perovskite cells, the control module controls the electric heating component to work so that the table temperature of the rotating carrier reaches and maintains the temperature required for each stage of annealing in combination with the sensing data of the temperature sensor. At the same time, the exhaust component and the air intake component are controlled to maintain the pressure in the airtight chamber within a set target range in combination with the sensing data of the air pressure sensor.

[0017] Preferably, the exhaust pipeline includes a first exhaust pipe arranged below the center of the rotating table, and second exhaust pipes symmetrically arranged on both sides of the main exhaust pipe. In conjunction with the arrangement of the aforementioned air intake assembly, during the annealing process (especially low-temperature annealing during spin coating), the air intake assembly and the exhaust assembly are dynamically adjusted to maintain the pressure in the airtight chamber stable, so that the airflow flows from the center of the substrate to the surroundings as much as possible, thereby reducing the impact of the airflow in the airtight chamber on the surface of the perovskite film.

[0018] The device provided in this application can conveniently realize spin coating and annealing operations in the process of preparing perovskite batteries, and can conveniently and accurately set the timing and required conditions of annealing according to the needs of teaching experiments. Compared with the equipment used in the industrial production process of perovskite batteries, the device provided in this application is simple to operate, simple in structure, and controllable in volume. More importantly, it has little effect on the perovskite film during the process of dynamically maintaining the stable air pressure in the airtight chamber, and is very suitable for teaching experiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A schematic diagram of the structure of an apparatus for preparing a perovskite battery provided in the present application in one embodiment.

[0021] Figure 2 for Figure 1 Schematic diagram of airflow direction when maintaining stable air pressure inside the airtight container during annealing of the device in the corresponding embodiment. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] like Figure 1 As shown, the device for preparing perovskite batteries provided in the present application includes: a control module, and a rotating table assembly 3, a liquid injection assembly 2, an airtight chamber 5, an air intake assembly composed of an air intake pipeline 1, an air intake valve 12 and an air uniforming mesh plate 13, an exhaust assembly composed of an exhaust pipeline 40, an exhaust valve 41 and a vacuum pump 42, a temperature sensor and an air pressure sensor. Among them, the control module, the temperature sensor and the air pressure sensor are respectively connected to the control module. Figure 1 Not indicated.

[0024] The rotating table assembly 3 includes: a rotating bearing table driven by a motor, an electric heating component arranged under the rotating bearing table, and a temperature sensor for detecting the temperature of the rotating bearing table surface. In this embodiment, a notch for placing a substrate is arranged on the rotating bearing table. The notch is used to fix the position of the substrate to prevent the substrate from shifting or being thrown off the rotating bearing table when the rotating bearing table rotates.

[0025] The liquid injection assembly 2 is fixedly arranged above the rotating support table, and is used to inject the spin coating liquid into the substrate on the rotating support table. The liquid injection assembly 2 has an injection amount setting component, and the injection amount setting component is used to set the amount of spin coating liquid injected during each spin coating. After the spin coating liquid is injected, the control module controls the rotation of the rotating table based on the set rotation speed and the corresponding rotation time, and uses the centrifugal force generated by the rotation to evenly coat the spin coating liquid on the substrate to form a film layer with a target thickness.

[0026] In some embodiments, the injection assembly 2 is installed on the side wall of the airtight chamber 5 and has an adjustable height, and its liquid outlet is located above the center of the rotating support platform so that the injected spin coating liquid drops near the center of the substrate.

[0027] The airtight chamber 5 is used to provide a closed and stable environment for the annealing process of preparing the perovskite battery. The liquid injection assembly 2 , the rotating table assembly 3 , the temperature sensor and the air pressure sensor are all built inside the airtight chamber 5 .

[0028] The air intake pipeline 10 of the air intake assembly is arranged outside the airtight chamber and is controlled by the air intake valve 12; the air uniforming mesh plate 13 is arranged on the bottom surface of the upper cover of the airtight chamber 5, and forms an air uniforming part together with the upper cover of the airtight chamber 5. The air intake assembly 1 is used to introduce the atmosphere gas required for annealing from the gas source 11 (usually a gas cylinder or a bubbling bottle) into the air uniforming part, so as to be filled into the airtight chamber through the air uniforming mesh plate 13. In some embodiments, the air intake assembly also includes a detachable bubbling bottle.

[0029] exist Figure 1 In the illustrated embodiment, the device takes the substrate out of the rotating support table or puts the substrate into the rotating support table by opening and closing the upper cover of the airtight chamber 5 .

[0030] Accordingly, the exhaust assembly includes: an exhaust pipe 40, an exhaust valve 41 and a vacuum pump 42. The exhaust port of the exhaust pipe 40 is arranged below the center of the turntable assembly and connected to the airtight chamber 4, and the exhaust port is arranged outside the airtight chamber 4 and is connected to the vacuum pump 42 through the exhaust valve 41. Figure 1 As shown, the exhaust pipeline 40 includes a first exhaust pipe arranged below the center of the turntable, and second exhaust pipes symmetrically arranged on both sides of the main exhaust pipe.

[0031] like Figure 2 As shown, the exhaust assembly and the air inlet assembly are arranged in coordination, during the annealing process (especially during the low temperature annealing during the spin coating process), the air inlet assembly and the exhaust assembly are dynamically adjusted to maintain the pressure in the airtight chamber stable (i.e., due to temperature fluctuations or changes, gas is extracted or added in order to maintain the air pressure inside the airtight chamber 5 stable), so that the airflow flows from the center of the substrate to the surrounding as much as possible ( Figure 2 The direction indicated by the arrow in the figure is the direction of air flow), which reduces the impact of the airflow inside the airtight chamber on the surface of the perovskite film.

[0032] Furthermore, before the spin coating liquid is injected or after the spin coating completes the film formation, the control module closes the air intake valve 12, controls the vacuum pump 42 to exhaust the gas in the airtight chamber, until the sensing data of the air pressure sensor reaches the set vacuum standard, and closes the vacuum pump 42 and all exhaust valves 41. Then, the air intake assembly is controlled to pass the atmosphere gas (usually nitrogen) required for annealing, and the air intake valve is closed after reaching the preset pressure to complete the preparation of the annealing atmosphere.

[0033] When performing annealing treatment for preparing perovskite cells, the control module controls the electric heating component to work so that the table temperature of the rotating carrier reaches and maintains the temperature required for each stage of annealing in combination with the sensing data of the temperature sensor. At the same time, the exhaust component and the air intake component are controlled to maintain the pressure in the airtight chamber within a set target range in combination with the sensing data of the air pressure sensor.

[0034] Obviously, whether it is to wait for a period of time after the perovskite solution is spin-coated before annealing, or to perform low-temperature pre-annealing during the spin-coating process, it can be achieved by the equipment provided by this application. The temperature, duration, and atmosphere pressure required in the annealing process can be set in the control module of the device. The equipment provided by this application is simple to operate, simple in structure, and controllable in volume compared to the equipment used in the industrial production process of perovskite batteries. More importantly, it has little effect on the perovskite film during the dynamic maintenance of the air pressure stability in the airtight chamber, and is very suitable for teaching experiments.

Claims

1. A device for preparing a perovskite battery, characterized in that: The device comprises: a control module, and a rotating table assembly, a liquid injection assembly, an airtight chamber, an air intake assembly, an exhaust assembly, a temperature sensor and an air pressure sensor respectively connected to the control module; The rotating platform assembly comprises: a rotating bearing platform driven to rotate by a motor, and an electric heating component arranged under the rotating bearing platform; The liquid injection assembly is fixedly arranged above the rotating carrier platform and is used to inject the spin coating liquid into the substrate on the rotating carrier platform; The liquid injection assembly, the rotating table assembly, the temperature sensor and the air pressure sensor are housed in the airtight chamber; The air intake assembly includes: an air intake pipeline, an air intake valve and an air uniforming mesh plate; the air intake pipeline is arranged outside the airtight chamber and is controlled by the air intake valve; the air uniforming mesh plate is arranged on the bottom surface of the upper cover of the airtight chamber and forms an air uniforming part with the upper cover of the airtight chamber; the air intake pipeline is used to introduce the atmosphere gas required for annealing into the air uniforming part, so as to be filled into the airtight chamber through the air uniforming mesh plate; The exhaust assembly comprises: an exhaust pipe, an exhaust valve and a vacuum pump; the exhaust port of the exhaust pipe is arranged below the center of the rotating table and connected to the airtight chamber, and the exhaust port is arranged outside the airtight chamber and is connected to the vacuum pump through the exhaust valve; The temperature sensor is used to detect the temperature of the rotating bearing table surface, and the air pressure sensor is used to detect the air pressure in the airtight chamber; The control module controls the electric heating component, the exhaust assembly, and the air intake assembly based on the sensing data of the air pressure sensor and the temperature sensor to obtain the atmosphere required for spin coating, and controls the rotation of the rotating support platform based on a set rotation speed.

2. The device according to claim 1, characterized in that The rotating bearing platform is provided with a slot for placing the substrate.

3. The device according to claim 2, characterized in that The liquid injection assembly has an injection amount setting component, and the injection amount setting component is used to set the amount of spin coating liquid injected during each spin coating.

4. The device according to claim 3, characterized in that The liquid injection assembly is installed on the side wall of the airtight chamber and has an adjustable height, and its liquid outlet is located above the center of the rotating bearing platform.

5. The device according to any one of claims 1 to 3, characterized in that After the spin coating liquid is injected, the control module controls the rotating table to rotate based on the set rotation speed and the corresponding rotation time so that the spin coating liquid is evenly coated on the substrate on the rotating table to form a film layer of target thickness.

6. The device according to claim 5, characterized in that Before the spin coating liquid is injected or after the spin coating is completed to form a film layer, the control module closes the air intake valve, controls the vacuum pump to exhaust the gas in the airtight chamber until the sensing data of the air pressure sensor reaches the set vacuum standard, and closes the vacuum pump and all exhaust valves; controls the air intake assembly to allow the atmosphere gas required for annealing, and closes the air intake valve after reaching the preset pressure to complete the preparation of the annealing atmosphere.

7. The device according to claim 6, characterized in that During annealing, the control module combines the sensing data of the temperature sensor to control the electric heating component to make the table surface temperature of the rotating support table reach and maintain the temperature required for each stage of annealing; at the same time, combined with the sensing data of the air pressure sensor, the exhaust assembly and the air intake assembly are controlled to maintain the pressure of the airtight chamber within the set target range.

8. The device according to claim 5, characterized in that The exhaust assembly includes a first exhaust pipe arranged below the center of the rotating table, and second exhaust pipes symmetrically arranged on both sides of the main exhaust pipe.

9. The device according to claim 5, characterized in that The air inlet assembly also includes a detachable bubbling bottle.

10. The device according to claim 5, characterized in that The device is opened and closed by the upper cover of the airtight chamber to take out or put in the substrate.

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