Pressurizing device

Abstract

A piston axial force information detection unit (53) detects piston axial force information on an axial force applied to a piston body (21). The friction information storage unit (62) stores friction information on a friction force between the piston seal (23) and the pressure vessel (10) when the piston body (21) moves relative to the pressure vessel (10). The drive control unit (65) controls the drive device (40) on the basis of the piston axial force information and the friction information. The drive control unit (65) controls the drive device (40) so that the piston body (21) reciprocates with respect to the pressure vessel (10) during a holding stroke in which the pressure inside the pressure vessel (10) is controlled to be constant.

Description

Technical Field

[0001] The present invention relates to a pressurizing device for pressurizing the interior of a pressure container. Background Art

[0002] For example, Patent Document 1 describes a pressurizing device that pressurizes the interior of a pressure container with the aid of a piston. In the technology described in this document, the relationship between the pressure inside the pressure container (container internal pressure) and the deformation of the piston is measured in advance when the piston is pushed in and when it is retracted. The resistance of the sealing gasket is calculated based on the relationship between the container internal pressure and the deformation of the piston. When the piston is pushed in (during the pressurizing stroke), the resistance of the sealing gasket is subtracted from the deformation of the piston, and when the piston is retracted (during the decompression process), the resistance of the sealing gasket is added to the deformation of the piston to measure the container internal pressure (Claim 1 of this document). In addition, in the technology described in this document, the pressure inside the container is controlled to a target pressure (set pressure) (

[0016] to

[0021] of this document).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent document 1: Patent publication No. 3254256.

[0006] Patent Document 1 does not describe how to control the internal pressure of the container during the holding process for maintaining the internal pressure of the container. It is desirable to control the internal pressure of the pressure container with high accuracy during the holding process. Summary of the invention

[0007] An object of the present invention is to provide a pressurizing device capable of controlling the internal pressure of a pressure container during a holding stroke with high accuracy.

[0008] Solutions to Solve Problems

[0009] The present invention provides a pressurizing device. The pressurizing device includes a pressure container, a piston body, a piston seal, a piston axial force information detection unit, a drive device, a friction information storage unit, and a drive control unit. The piston body is embedded in the interior of the pressure container so as to be movable toward the insertion side and the extraction side relative to the pressure container. The piston seal is provided on the piston body to seal the gap between the piston body and the pressure container. The piston axial force information detection unit detects the piston axial force information related to the axial force in the moving direction of the piston body relative to the pressure container, that is, the axial force applied to the piston body. The drive device moves the piston body relative to the pressure container. The friction information storage unit stores the friction information related to the friction force between the piston seal and the pressure container when the piston body moves relative to the pressure container. The drive control unit controls the drive device based on the piston axial force information detected by the piston axial force information detection unit and the friction information stored in the friction information storage unit. The drive control unit controls the drive device to make the piston body reciprocate relative to the pressure container while controlling the pressure inside the pressure container to be maintained at a certain holding stroke. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a figure which shows the cross-sectional view etc. of the pressurizing device 1 which concerns on one Embodiment of this invention.

[0011] Figure 2 Yes means Figure 1 A block diagram of the controller 60 etc. recorded in FIG.

[0012] Figure 3 Yes means Figure 1 A line diagram of information obtained by pre-measurement in the pressurizing device 1 described in .

[0013] Figure 4 It means by Figure 2 A line diagram of the set pressure etc. set by the set pressure setting unit 63 described in FIG.

[0014] Figure 5 Yes means Figure 4 A line diagram of the internal pressure of a container during a holding stroke, etc., as described in .

[0015] Figure 6 is the pressure inside the container and Figure 5 The equivalent of the case where the example described in Figure 5 .

[0016] Figure 7 is Figure 5 The holding stroke shown is used before the start of Figure 1 The piston body 21 shown in the figure is equivalent to the reciprocating action Figure 5 . DETAILED DESCRIPTION

[0017] Reference Figure 1 to Figure 7 , a pressurizing device 1 according to one embodiment of the present invention will be described.

[0018] The pressurizing device 1 is a device for pressurizing an object O in a pressure container 10. The pressurizing device 1 is a piston type pressurizing device that performs pressurization by a pushing force of a piston 20.

[0019] The pressurizing device 1 is, for example, an isostatic pressing (IP) device. The pressurizing device 1 pressurizes the pressure medium O1 in the pressure vessel 10, thereby pressurizing the treated product O3 in the pressure vessel 10 in an isostatic manner to treat the treated product O3. For example, the pressurizing device 1 may be a hot isostatic pressing (HIP) device (e.g., a piston-type hot isostatic pressing device). In this case, the pressurizing device 1 may be an ultra-high pressure hot isostatic pressing device that pressurizes the pressure of the pressure medium O1 to about 1000 MPa, or an ultra-ultra-high pressure hot isostatic pressing device that further pressurizes the pressure of the pressure medium O1 to a high pressure. For example, the pressurizing device 1 may be a warm isostatic pressing (WIP) device, or a cold isostatic pressing (CIP) device. The pressure medium O1 may be a gas (e.g., a rare gas, etc.). The pressure medium O1 may be a liquid, or a liquid that solidifies at room temperature (such as molten salt).

[0020] The pressurizing device 1 may not be a device that pressurizes the processed product O3 by pressurizing the pressure medium O1. The pressurized object O does not need to include the pressure medium O1 and the processed product O3. The pressurizing device 1 may also be a device (a measuring device, an experimental device, etc.) that measures the state of the pressurized object O. Specifically, for example, the pressurizing device 1 may be a device that reproduces the state of underground magma, or may be a device that pressurizes and heats the same material as the magma that enters the pressure vessel 10. In addition, the pressurizing device 1 may also be a single crystal growth furnace. For example, the pressurizing device 1 may be a device for manufacturing a compound semiconductor single crystal of GaN (gallium nitride). Specifically, for example, the pressurizing device 1 may be a device for performing a high-temperature and high-pressure synthesis method in which nitrogen is dissolved in a gallium solution under an ultra-high-pressure nitrogen atmosphere to grow crystals in a supersaturated state. The following mainly describes the case where the pressurized object O includes the pressure medium O1 and the processed product O3.

[0021] <Definition of direction>

[0022] As described later, the piston 20 moves relative to the pressure container 10. The moving direction of the piston 20 relative to the pressure container 10 is referred to as the axial direction Z. In the axial direction Z, the direction (one side) in which the piston 20 is inserted into the pressure container 10 is referred to as the insertion direction Z1, and the opposite direction (the reverse side) is referred to as the withdrawal direction Z2. The withdrawal direction Z2 is the side on which the piston 20 is withdrawn from the pressure container 10. The axial direction Z can be, for example, the up-and-down direction (vertical direction), the horizontal direction, or a direction inclined relative to the up-and-down direction and the horizontal direction. When the axial direction Z is the up-and-down direction, the insertion direction Z1 can be upward or downward (the same applies to the withdrawal direction Z2). The axis passing through the center of the piston 20, that is, the axis extending along the axial direction Z, is referred to as the central axis A. The diameter direction of an imaginary circle (not shown) on a plane orthogonal to the central axis A, that is, the imaginary circle centered on the central axis A, is referred to as the "radial direction".

[0023] The pressurizing device 1 includes a frame 5, a pressure container 10, a piston 20, a pressure container internal member 30, a drive device 40, a piston position information detection unit 51, a piston axial force information detection unit 53, a controller 60, and a pressure notification unit 70. The pressurizing device 1 includes a pressure detection member 80 during the preliminary measurement described below.

[0024] The frame 5 is a structure that bears (supports) the force in the axial direction Z. The frame 5 supports the pressure vessel 10 and the drive device 40 (more specifically, the fluid pressure cylinder 41 (described later)). The frame 5 supports the pressure vessel 10 and the fluid pressure cylinder 41 from both sides (for example, top and bottom) outside the axial direction Z. For example, the frame 5 is elliptical (not shown). In this case, the frame 5 has two semicircular or approximately semicircular yokes and two straight columnar columns connecting the two yokes to each other. In this case, Figure 1 The frame 5 shown in FIG. 5 is a part of the yoke (yoke frame). In addition, the frame 5 does not need to be elliptical. Figure 1 The frame 5 shown in FIG. 5 need not be a yoke frame.

[0025] The pressure vessel 10 is a container for accommodating a pressurized object O. The pressure vessel 10 accommodates a pressure vessel internal member 30. The pressure vessel 10 is configured to form a space surrounded by the pressure vessel 10 and the piston 20. For example, the pressure vessel 10 includes a pressure vessel body 11 and a pressure vessel cover 13.

[0026] The pressure vessel body 11 is a tubular (eg, cylindrical) member extending in the axial direction Z.

[0027] The pressure vessel cover 13 blocks (seals) an opening in one direction (e.g., the upper side) of the pressure vessel body 11 in the axial direction Z. When the pressure vessel cover 13 is provided on the upper side of the pressure vessel 10, the pressure vessel cover 13 is an "upper cover". The pressure vessel cover 13 may also have a hole (e.g., a gas inlet not shown) for introducing the pressure medium O1.

[0028] The piston 20 is a member for pressurizing the interior of the pressure container 10. The piston 20 blocks (seals) the opening in the other direction of the axial direction Z of the pressure container body 11 (the side opposite to the side where the pressure container cover 13 is provided). When the piston 20 is provided at the lower part of the pressure container 10, the piston 20 is a "lower cover". The piston 20 includes a piston body 21 and a piston seal 23.

[0029] The piston body 21 is the main body of the piston 20. The piston body 21 is embedded (inserted) inside the pressure container 10. The piston body 21 is embedded inside the pressure container 10 via the piston seal 23. The piston body 21 can move in the insertion direction Z1 and the withdrawal direction Z2 relative to the pressure container 10. The piston body 21 can slide relative to the pressure container 10 via the piston seal 23. For example, the piston body 21 includes a piston body columnar portion 21a and a piston body base 21b. The piston body columnar portion 21a is the end side portion of the piston body 21 in the insertion direction Z1. At least a part of the piston body columnar portion 21a is inserted into the pressure container 10. The piston body columnar portion 21a is a columnar (e.g., cylindrical) provided in a manner extending along the axial direction Z. The piston body base 21b is the end side portion of the piston body 21 in the withdrawal direction Z2. The piston body base 21b is not inserted into the pressure container 10. The piston body base portion 21 b protrudes radially outward from the piston body columnar portion 21 a .

[0030] The piston seal 23 is a component (sealing gasket) that seals the gap between the piston body 21 and the pressure vessel 10. The piston seal 23 is arranged on the piston body 21, in particular, on the piston body columnar portion 21a. The piston seal 23 is arranged on the end side portion of the piston body columnar portion 21a in the insertion direction Z1. The piston seal 23 is arranged on the radially outer surface (for example, the outer peripheral surface) of the piston body columnar portion 21a. For example, the piston seal 23 is composed of an elastic component (for example, rubber, resin, etc.). The piston seal 23 is annular (for example, circular ring-shaped). The piston seal 23 moves in the axial direction Z integrally with the piston body 21. The piston seal 23 slides relative to the pressure vessel 10.

[0031] The piston seal 23 is in contact with the pressure vessel 10. More specifically, the piston seal 23 is in contact with the inner surface (e.g., inner circumferential surface) of the pressure vessel body 11. The piston seal 23 receives pressure from the pressurized object O (e.g., pressure medium O1), deforms, and pushes the inner surface of the pressure vessel 10 radially outward. The friction force between the piston seal 23 and the pressure vessel 10 is referred to as "piston seal friction force." The piston seal friction force becomes a size that cannot be ignored in the control of the pressure inside the pressure vessel 10 (referred to as "container internal pressure"). Therefore, the control of the container internal pressure is performed based on information about the piston seal friction force (friction information) (described later).

[0032] The pressure vessel internal member 30 is a member provided inside the pressure vessel 10. For example, when the pressurizing device 1 is a hot isostatic pressing device, the pressure vessel internal member 30 includes a support 31, a heat insulating layer 33, and a heating device 35.

[0033] The support 31 supports the workpiece O3 and the like relative to the piston body 21. The support 31 supports the workpiece O3 so that the workpiece O3 is disposed at the distal end of the piston body 21 in the insertion direction Z1. The support 31 supports the heat insulating layer 33 and the heating device 35 similarly to the workpiece O3.

[0034] The heat insulating layer 33 accommodates the processed product O3. The heat insulating layer 33 performs heat insulation between the space inside the heat insulating layer 33 and the space inside the pressure vessel 10 and outside the heat insulating layer 33. The heat insulating layer 33 is configured to transfer pressure between the space inside the heat insulating layer 33 and the space inside the pressure vessel 10 and outside the heat insulating layer 33. For example, a gap may be provided between the heat insulating layer 33 and the support member 31.

[0035] The heating device 35 (heater, heater element) heats the inside of the pressure vessel 10. For example, the heating device 35 heats the inside of the heat insulating layer 33 and heats the processed product O3. The heating device 35 is arranged inside the heat insulating layer 33 (radially inside). The heating device 35 is arranged around the processed product O3 (radially outside). In addition, when the pressurizing device 1 is a cold isostatic pressurizing device, the heat insulating layer 33 and the heating device 35 may not be provided, and for example, a component (rubber type, etc.) for accommodating the processed product O3 may be provided.

[0036] The driving device 40 is a device that moves (drives) the piston body 21 relative to the pressure vessel 10. The driving device 40 moves the piston body 21 in the axial direction Z. The driving device 40 can be a fluid pressure driving device that moves the piston body 21 with the help of the pressure of the working fluid (fluid pressure). For example, the driving device 40 can be an oil pressure driving device that moves the piston body 21 with the help of oil pressure. The driving device 40 can be a device that moves the piston body 21 with the help of power other than fluid pressure (such as electricity, etc.). The following mainly describes the case where the driving device 40 is a fluid pressure driving device. The driving device 40 includes a fluid pressure cylinder 41, a fluid pressure piping 43, a fluid pressure detection unit 45, and a fluid pressure control unit 47.

[0037] The fluid pressure cylinder 41 moves the piston body 21 by fluid pressure. The fluid pressure cylinder 41 is, for example, a hydraulic cylinder, etc. The fluid pressure cylinder 41 includes a cylinder body 41a, a cylinder seal 41b, a plunger 41c, and a plunger seal 41d.

[0038] The cylinder body 41a accommodates the end side portion of the plunger 41c in the withdrawal direction Z2. The cylinder body 41a includes a head side chamber 41a1 and a plunger side chamber 41a2. The head side chamber 41a1 is a space (e.g., an oil chamber) to which a working fluid is supplied when the plunger 41c (piston body 21) moves in the insertion direction Z1. The head side chamber 41a1 is a space inside the cylinder body 41a and closer to the end side in the withdrawal direction Z2 than the plunger base 41c1 (described later). The plunger side chamber 41a2 is a space (e.g., an oil chamber) to which a working fluid is supplied when the plunger 41c (piston body 21) moves in the withdrawal direction Z2. The plunger side chamber 41a2 is a space inside the cylinder body 41a and closer to the end side in the insertion direction Z1 than the plunger base 41c1. In addition, the movement of the plunger 41c (of the piston body 21) in the withdrawal direction Z2 can be performed without the aid of fluid pressure. For example, the plunger 41 c (the piston body 21 ) may be moved in the withdrawal direction Z2 by the elastic force of a spring (not shown) or by the own weight of the piston 20 .

[0039] The cylinder seal 41b is a member (sealing gasket) that seals the gap between the cylinder body 41a and the plunger 41c. The cylinder seal 41b is disposed on the cylinder body 41a, more specifically, on the radially inner portion (e.g., inner peripheral portion) of the end portion of the cylinder body 41a in the insertion direction Z1. The cylinder seal 41b contacts the plunger 41c, more specifically, contacts the radially outer surface (e.g., outer peripheral surface) of the plunger columnar portion 41c2 (described later). For example, the cylinder seal 41b is composed of an elastic member (e.g., rubber, resin, etc.). The cylinder seal 41b is annular (e.g., circular).

[0040] The plunger 41c moves the piston body 21 in the axial direction Z. For example, the plunger 41c may be separated from the piston body 21 and fixed to the piston body 21. In this case, the plunger 41c is connected to the piston body 21 in the axial direction Z. The plunger 41c is disposed at a terminal side portion closer to the withdrawal direction Z2 than the piston body 21. In addition, for example, the plunger 41c may also be formed integrally with the piston body 21. The plunger 41c moves integrally with the piston body 21. For example, the plunger 41c includes a plunger base 41c1 and a plunger columnar portion 41c2. The plunger base 41c1 is the terminal side portion of the plunger 41c in the withdrawal direction Z2. The plunger base 41c1 is disposed inside the cylinder body 41a. The plunger base 41c1 divides (partitions) the interior of the cylinder body 41a into a head side chamber 41a1 and a plunger side chamber 41a2. The plunger columnar portion 41c2 is provided so as to extend from the plunger base portion 41c1 in the insertion direction Z1. The plunger columnar portion 41c2 protrudes from the inside of the cylinder body 41a to the outside in the insertion direction Z1. The plunger columnar portion 41c2 is a columnar (eg, cylindrical) extending in the axial direction Z.

[0041] The plunger seal 41d is a member (sealing gasket) that seals the gap between the plunger 41c and the cylinder body 41a. The plunger seal 41d prevents the working fluid from flowing in and out between the head side chamber 41a1 and the plunger side chamber 41a2. The plunger seal 41d is arranged on the plunger 41c, more specifically, on the radially outer portion (e.g., outer peripheral surface) of the plunger base 41c1. The plunger seal 41d contacts the cylinder body 41a, more specifically, contacts the radially inner surface (e.g., inner peripheral surface) of the inside of the cylinder body 41a. For example, the plunger seal 41d is composed of an elastic member (e.g., rubber, resin, etc.). The plunger seal 41d is annular (e.g., circular ring-shaped). The plunger seal 41d moves in the axial direction Z integrally with the plunger 41c. The plunger seal 41d slides relative to the cylinder body 41a.

[0042] The fluid pressure piping 43 is a piping through which the working fluid passes. The fluid pressure piping 43 supplies and discharges the working fluid between the fluid pressure control unit 47 and the fluid pressure cylinder 41 (more specifically, the head side chamber 41a1). In addition, a piping (not shown) for supplying and discharging the working fluid between the fluid pressure control unit 47 and the plunger side chamber 41a2 may also be provided.

[0043] The fluid pressure detection unit 45 detects the fluid pressure of the fluid supplied to the fluid pressure cylinder 41. More specifically, the fluid pressure detection unit 45 detects the pressure (fluid pressure) of the working fluid supplied to the fluid pressure cylinder 41 when the piston body 21 moves in the insertion direction Z1. The fluid pressure detection unit 45 outputs (transmits) the detection value (e.g., an electrical signal) to the fluid pressure control unit 47. The fluid pressure detection unit 45 is, for example, a pressure transmitter. The fluid pressure detection unit 45 can detect the fluid pressure inside the cylinder body 41a (more specifically, inside the head side chamber 41a1), and can also detect the fluid pressure of a portion that shows the same or substantially the same value as the fluid pressure (e.g., the fluid pressure inside the fluid pressure piping 43).

[0044] The fluid pressure control unit 47 controls the operation of the fluid pressure cylinder 41. The fluid pressure control unit 47 controls the operation of the piston body 21 by controlling the operation of the fluid pressure cylinder 41. The fluid pressure control unit 47 controls the operation of the fluid pressure cylinder 41 based on the fluid pressure detected by the fluid pressure detection unit 45. For example, the fluid pressure control unit 47 is a device (fluid pressure unit) having a plurality of fluid devices. For example, the fluid pressure control unit 47 includes a pump, a valve (such as a pressure relief mechanism), and a control device that controls the pump and the valve based on a signal input to the fluid pressure control unit 47.

[0045] The piston position information detection unit 51 detects the position information of the piston body 21 relative to the pressure vessel 10 (details will be described later). The piston position information detection unit 51 detects the position information of the piston body 21 in the axial direction Z. As described later, the piston body 21 performs a small reciprocating motion (reciprocating movement) during the holding stroke. The piston position information detection unit 51 is configured to be able to grasp the small movement of the reciprocating motion of the piston body 21. For example, the piston position information detection unit 51 detects the position information in a non-contact manner. For example, the piston position information detection unit 51 detects the position information through electromagnetic waves. For example, the piston position information detection unit 51 can detect the position information through light (such as laser, etc.), or can detect the position information through radio waves. The piston position information detection unit 51 can also detect the position information of the piston body 21 by contacting the piston body 21 or the plunger 41c, etc. (it can also be a contact sensor).

[0046] When the piston position information detection unit 51 detects position information by electromagnetic waves (for example, light), the piston position information detection unit 51 includes a sensor main body 51 a and a reflection unit 51 b .

[0047] The sensor body 51a emits and receives (for example, receives light) electromagnetic waves. The sensor body 51a emits electromagnetic waves in the axial direction Z. The sensor body 51a is provided in the pressure container 10 or the piston body 21. Figure 1In the example shown, the sensor body 51a is provided (e.g., mounted) on the pressure vessel 10. For example, the sensor body 51a may be provided at a terminal side portion (e.g., an end portion) in the withdrawal direction Z2 of the pressure vessel body 11. For example, the sensor body 51a may also be provided at a radially outer portion of the pressure vessel body 11, etc. (not shown).

[0048] The reflector 51b has a surface (e.g., a plane) that reflects electromagnetic waves emitted from the sensor body 51a. The reflector 51b is disposed at a position opposite to the sensor body 51a in the axial direction Z. The reflector 51b is disposed on the side of the pressure container 10 and the piston body 21 opposite to the side where the sensor body 51a is disposed. Figure 1 In the example shown, the reflecting portion 51b is provided on the piston body 21 (for example, the piston body base 21b). For example, the reflecting portion 51b is separate from the piston body 21. For example, the reflecting portion 51b may be in the shape of a plate (reflecting plate) or may not be in the shape of a plate (for example, in the shape of a block, etc.). In addition, for example, the reflecting portion 51b may be provided integrally with the piston body 21. For example, the reflecting portion 51b may be a part of the piston body base 21b. The reflecting portion 51b may also be provided on the plunger 41c (may be provided on the piston body 21 via the plunger 41c). In addition, the sensor body 51a may be provided on the piston body 21, and the reflecting portion 51b may be provided on the pressure vessel 10. For example, the sensor body 51a detects the distance Dz in the axial direction Z from the sensor body 51a to the reflecting portion 51b.

[0049] The piston axial force information detection unit 53 detects the piston axial force information. The piston axial force information is information about the axial force in the axial direction Z (the force applied in the axial direction Z), that is, the axial force applied to the piston body 21 (referred to as "piston axial force"). The piston axial force is the sum of the force caused by the container internal pressure applied to the piston body 21 and the friction force of the piston seal. In addition, strictly speaking, the piston axial force is affected by forces other than the container internal pressure and the friction force of the piston seal, such as the deadweight of the piston body 21. However, the influence of forces other than the container internal pressure and the friction force of the piston seal on the piston axial force is so small that it can be ignored.

[0050] The reason why the piston axial force information detection unit 53 detects the piston axial force information is as follows. In the pressurizing device 1, it is important to control the internal pressure of the container in such a way that it is as close to the set pressure (target pressure) as possible. However, during the actual operation of the pressurizing device 1 (described later), it is impossible or difficult to directly detect the internal pressure of the container. An example of the reason is as follows.

[0051] [Detecting the internal pressure of a container from outside the container]

[0052] For example, a pressure lead-out member De (e.g., a pipe) is provided for leading a high-pressure (e.g., 1000 MPa level, etc.) pressure medium O1 from the inside of the pressure vessel 10 to the outside. Then, a pressure detection member 80 (described later) detects the pressure (or the pressure reduced by the pressure) led out by the pressure lead-out member De outside the pressure vessel 10. In this case, the life of the pressure lead-out member De becomes short, and there is a risk that it cannot withstand long-term actual operation.

[0053] [Detecting the internal pressure of a container]

[0054] For example, the pressure detection component 80 is arranged inside the pressure container 10 to detect the pressure of the pressure medium O1. Therefore, there is a risk that the pressure detection component 80 cannot withstand long-term actual operation. Therefore, during the actual operation of the pressurizing device 1 (described later), it is impossible or difficult to directly detect the internal pressure of the container. In view of this, during the actual operation of the pressurizing device 1, the piston axial force information detection unit 53 detects the piston axial force information that can be converted into the internal pressure of the container. Then, the internal pressure of the container is controlled based on the piston axial force information, etc. (the details of the control will be described later).

[0055] The piston axial force information detected by the piston axial force information detection unit 53 may be the value of the piston axial force itself. The piston axial force information may also be information related to (associated with) the piston axial force. For example, the piston axial force information may include information that can be converted to the piston axial force, or may include information that can be converted from the piston axial force. Specifically, for example, the piston axial force information may include the axial Z deformation of the piston body 21. In addition, the axial force of the piston body 21 can be calculated from the axial Z deformation of the piston body 21 with the aid of the formula of material mechanics. In addition, for example, the piston axial force information may include information related to the force of the drive device 40 pushing the piston body 21 in the insertion direction Z1 (refer to the modified example described later). The piston axial force information may include the pressure (converted pressure) of converting the piston axial force into the internal pressure of the container. For example, in the case where the piston axial force information includes the axial Z deformation of the piston body 21, the piston axial force information detection unit 53 has a strain gauge 53a.

[0056] The strain gauge 53a detects deformation of the piston body 21 in the axial direction Z. The strain gauge 53a is mounted (eg, attached) to the piston body 21. More specifically, the strain gauge 53a is mounted on a radially outer surface (eg, outer peripheral surface) of the piston body columnar portion 21a.

[0057] The controller 60 is a device (computer) that performs signal input and output, information storage, calculation (calculation, judgment, etc.), etc. For example, the controller 60 may be a personal computer or a programmable controller. For example, the functions of the controller 60 are realized by the calculation unit executing a program stored in the storage unit of the controller 60. Figure 2 As shown in FIG. 1 , the controller 60 includes a piston position information calculation unit 61, a friction information storage unit 62, a set pressure setting unit 63, a pressure calculation unit 64, and a drive control unit 65. Figure 1 , for the controller 60 and the components of the controller 60, refer to Figure 2 Provide explanation.

[0058] The piston position information calculation unit 61 calculates the position information about the piston body 21 from the detection value of the piston position information detection unit 51. For example, the position information is used for the selection of friction information described later. The position information may include information (value, coordinates, etc.) about the position of the piston body 21. The position information may also include information about the movement (change in position) of the piston body 21. The position information may also include information indicating whether the piston body 21 has moved. The position information may also include information about the direction of movement of the piston body 21 (insertion direction Z1 or withdrawal direction Z2). The position information may also include information about the moving speed of the piston body 21 (the magnitude of the moving speed).

[0059] The friction information storage unit 62 stores friction information. The friction information is information on the friction force of the piston seal (details will be described later).

[0060] The set pressure setting unit 63 sets the set pressure in the pressure container 10. The set pressure is a target pressure in the pressure container 10 (target container internal pressure) (details will be described later). For example, the set pressure setting unit 63 may set the set pressure in accordance with the operation of the controller 60, or may set the set pressure based on information input to the controller 60 from outside the controller 60.

[0061] The pressure calculation unit 64 (pressure computer) calculates (estimates) the internal pressure of the container based on the piston axial force information detected by the piston axial force information detection unit 53 and the friction information stored in the friction information storage unit 62 (details will be described later).

[0062] The drive control unit 65 controls the drive device 40. The drive control unit 65 controls the drive device 40 based on the piston axial force information detected by the piston axial force information detection unit 53 and the friction information stored in the friction information storage unit 62 (details will be described later).

[0063] The pressure notification unit 70 (see Figure 1) to notify information about the internal pressure of the container. For example, the pressure notification unit 70 notifies the value of the internal pressure of the container calculated by the pressure calculation unit 64. The notification by the pressure notification unit 70 may be a display (the pressure notification unit 70 may be, for example, a pressure display). The notification by the pressure notification unit 70 may also be a notification by sound, etc.

[0064] Pressure detection member 80 (pressure measuring element) (refer to Figure 1 ) detects the internal pressure of the container. The pressure detection member 80 is used to directly detect the internal pressure of the container during the preliminary measurement described later. The pressure detection member 80 is configured to be removable from the pressure container 10. The pressure detection member 80 can be arranged inside the pressure container 10 and installed on the pressure container 10 inside the pressure container 10 (details will be described later). The pressure detection member 80 can also be arranged outside the pressure container 10 and installed on the pressure container 10 via the pressure derivation member De.

[0065] The pressure detection member 80 is, for example, a member in which the relationship between the pressure around the pressure detection member 80 and the resistance value of the pressure detection member 80 is known in advance. The pressure detection member 80 may further know the relationship between the temperature and the resistance value in advance. For example, the pressure detection member 80 is a member in which the pressure around the pressure detection member 80 and the resistance value of the pressure detection member 80 are proportional or approximately proportional. Specifically, for example, the pressure detection member 80 may include a copper alloy containing 12 to 18% by mass of manganese and 1.5 to 4% by mass of nickel. The pressure detection member 80 does not necessarily have to be a member in which the pressure around the pressure detection member 80 and the resistance value of the pressure detection member 80 are proportional or approximately proportional. For example, the pressure detection member 80 may also be an alloy (constantan) containing 45 to 50% by mass of nickel and 50 to 55% by mass of copper (the total ratio of nickel and copper is less than 100% by mass). The pressure detection member 80 does not need to be set during the actual operation (described later) of the pressurizing device 1.

[0066] <Work>

[0067] The pressurizing device 1 is configured to operate as follows. In the pressurizing device 1, preliminary measurement and actual operation (normal operation) are performed. For components other than the controller 60 in the pressurizing device 1, refer to Figure 1 , for the controller 60 and the components of the controller 60, refer to Figure 2 Provide explanation.

[0068] <Preliminary measurement>

[0069] Preliminary measurement is a measurement for obtaining friction information stored in the friction information storage unit 62 (operation of the pressurizing device 1). The pressurizing device 1 when performing preliminary measurement is a friction information obtaining device for obtaining friction information. Preliminary measurement is performed before actual operation (in advance). In the preliminary measurement, the pressure detection component 80 is disposed inside or outside the pressure container 10. In the preliminary measurement, the relationship between the piston axial force information detected by the piston axial force information detection unit 53 and the internal pressure (referred to as "actual pressure inside the container") detected by the pressure detection component 80 is measured (preliminary measurement obtains the relationship R (refer to Figure 3 )).

[0070] <Preliminary measurement of the range of acquisition of the acquisition relationship R>

[0071] Obtained over the range of piston axial force information during actual operation (use axial force range) Figure 3 The pre-measured relationship R is shown. The pre-measured relationship R is obtained in a manner that includes the entire range of the axial force used. For example, when the piston axial force information is a converted pressure (described later) obtained by converting the axial force of the piston body 21 into the container internal pressure, the pre-measured relationship R is obtained over the range of the converted pressure during actual operation (the used converted pressure range). The pre-measured relationship R is obtained over the range of the actual pressure in the container during actual operation (the used container internal actual pressure range). The pre-measured relationship R is obtained in a manner that includes the entire range of the used container internal actual pressure.

[0072] <Preliminary measurement of the presence or absence of movement of the piston body 21 and the direction of movement>

[0073] In the preliminary measurement, the preliminary measurement relationship R is obtained when the piston body 21 moves relative to the pressure container 10 along the axial direction Z. It is preferable to obtain the preliminary measurement relationship R for each direction in which the piston body 21 moves relative to the pressure container 10. More specifically, it is preferable to obtain the "relationship Ra under movement in the insertion direction Z1" and the "relationship Rc under movement in the withdrawal direction Z2" described later. In the preliminary measurement, the preliminary measurement relationship R when the piston body 21 is stationary relative to the pressure container 10, that is, the "relationship Rb at rest", can also be obtained.

[0074] <Moving speed of piston body 21 measured in advance>

[0075] In the preliminary measurement, a pre-measured relationship R can be obtained at a certain mode 1 of the movement speed of the piston body 21. In this case, the movement speed of the above-mentioned "mode 1" is preferably the same or substantially the same as the movement speed of the piston body 21 during actual operation. In the preliminary measurement, a pre-measured relationship R can be obtained at each movement speed of the piston body 21 in multiple modes. In this case, Figure 3 The line graphs shown are obtained by multiple modes.

[0076] <Specific example of obtaining the relationship R by measuring in advance>

[0077] A specific example of pre-measurement to obtain the relationship R (the relationship between the piston axial force information and the actual pressure in the container) is described below. Figure 3 In the example shown, the piston axial force information is a converted pressure. The converted pressure is calculated, for example, as follows. Based on the deformation of the piston body 21 obtained from the strain gauge 53a, the axial force of the piston body 21 is calculated. In addition, as described above, the axial force of the piston body 21 is the sum of the force caused by the friction of the piston seal and the pressure exerted on the piston body 21. Then, the value obtained by dividing the axial force of the piston body 21 by the pressure-bearing area of ​​the piston body 21 is the converted pressure. The above-mentioned "pressure-bearing area" is the area of ​​the part of the piston body 21 that is subjected to pressure in the axial direction Z from the pressurized object O (pressure medium O1). Specifically, for example, the pressure-bearing area is the area of ​​the columnar portion 21a of the piston body when observed from the insertion direction Z1.

[0078] The pre-measured relationship R includes the relationship Ra when moving in the insertion direction Z1, the relationship Rb when stationary, and the relationship Rc when moving in the extraction direction Z2. Figure 3 In the example shown, the relationship R obtained by the pre-measurement is obtained in the order (process) of the relationship Ra under the movement in the insertion direction Z1, the relationship Rb at rest, and the relationship Rc under the movement in the withdrawal direction Z2. Alternatively, the pre-measurement may be started from the state where the pressure container 10 is pre-pressurized, and the pre-measurement relationship R may be obtained in the order of the relationship Rc under the movement in the withdrawal direction Z2 and the relationship Ra under the movement in the insertion direction Z1. The following mainly describes the case where the piston axial force information is the converted pressure.

[0079] A deviation occurs between the converted pressure and the actual pressure in the container. The amount of this deviation is referred to as the deviation α. ​​The deviation α is the amount of deviation of the converted pressure relative to the efficiency 100% line L. The efficiency 100% line L is a line graph showing the relationship between the actual pressure in the container and the converted pressure when the actual pressure in the container and the converted pressure are assumed to be the same. The deviation α is caused by the friction of the piston seal. Specifically, the deviation α is the value obtained by dividing the friction of the piston seal by the pressure-bearing area of ​​the piston body 21.

[0080] The relationship Ra under the movement in the insertion direction Z1 is the relationship R obtained by pre-measurement when the piston body 21 moves in the insertion direction Z1 relative to the pressure container 10 (pressurization stroke (the details of each process will be described later)). In the relationship Ra under the movement in the insertion direction Z1, the greater the actual pressure, the greater the converted pressure. The deviation α in the relationship Ra under the movement in the insertion direction Z1 is referred to as the deviation αa. The greater the converted pressure (the greater the actual pressure), the greater the deviation αa. The deviation αa is the value obtained by subtracting the actual pressure in the container from the converted pressure. In addition, when the movement of the piston body 21 in the insertion direction Z1 starts (when the pressurization stroke starts), the piston body 21 does not move in the insertion direction Z1 until it is pushed in the insertion direction Z1 with a force exceeding the friction force of the piston seal, and the actual pressure in the container does not rise (refer to the lower left part of the line graph).

[0081] The static relationship Rb is a pre-measured relationship R when the piston body 21 is static (maintaining the stroke) relative to the pressure container 10. In the static relationship Rb, the actual pressure is maintained at a constant (or substantially constant) pressure P2. In addition, the static relationship Rb may not be obtained in the pre-measurement.

[0082] The relationship Rc under the movement in the extraction direction Z2 is the relationship R obtained by pre-measurement when the piston body 21 moves in the extraction direction Z2 relative to the pressure container 10 (decompression process). In the relationship Rc under the movement in the extraction direction Z2, the smaller the actual pressure in the container becomes, the smaller the converted pressure becomes. The deviation α in the relationship Rc under the movement in the extraction direction Z2 is referred to as the deviation αc. The larger the converted pressure becomes (the larger the actual pressure becomes), the larger the deviation αc becomes. The deviation αc is the value obtained by subtracting the converted pressure from the actual pressure in the container. Figure 3 In the example shown, the deviation αc when the actual pressure in the container is a certain pressure P1 is larger than the deviation αa when the actual pressure in the container is the pressure P1. In addition, when the actual pressure in the container is a certain pressure P1, the deviation αc may be smaller than the deviation αa or equal to the deviation αa.

[0083] The relationship Ra when moving in the insertion direction Z1, the relationship Rb when stationary, and the relationship Rc when moving in the extraction direction Z2 are shown in the graphs. Figure 3 The example shown is a straight line, but it is not limited to a straight line, and may be a curved line. For example, at least one of the relationship Ra under movement in the insertion direction Z1 and the relationship Rc under movement in the extraction direction Z2 may be greatly curved in a portion close to the holding stroke.

[0084] <Specific example of preliminary measurement>

[0085] In the preliminary measurement, the actual pressure in the container is detected by the pressure detection member 80. The pressure detection member 80 may be arranged inside the pressure container 10 or outside the pressure container 10.

[0086] A specific example of the case where the pressure detection member 80 detects the actual pressure in the container outside the pressure container 10 (a case where the pressure detection member 80 obtains friction information in a state where it is arranged outside the pressure container 10) is as follows. A pressure derivation member De (e.g., a pipe) is provided for derivation of a high-pressure (e.g., 1000 MPa level, etc.) pressure medium O1 from the inside of the pressure container 10 to the outside. For example, the pressure derivation member De is provided in a hole of the pressure container 10 (more specifically, the pressure container cover 13). Then, the pressure detection member 80 detects the pressure derivation member De (or the pressure after the pressure is reduced) outside the pressure container 10. In this example, a high pressure (e.g., 1000 MPa level, etc.) is applied to the pressure derivation member De. There is a risk that the pressure derivation member De cannot withstand long-term actual operation. On the other hand, the pressure derivation member De can fully withstand (using a tolerant member) a pre-measurement (e.g., pressurization of about dozens of times) that is shorter than the actual operation. It is preferred that the pressure derivation member De is removed from the pressure container 10 during actual operation after being used in the pre-measurement.

[0087] A specific example of the case where the pressure detection member 80 detects the actual pressure in the pressure vessel 10 (the case where the pressure detection member 80 obtains friction information in a state of being arranged inside the pressure vessel 10) is described below. The pressure detection member 80 is arranged inside the pressure vessel 10 so as to be removable from the inside of the pressure vessel 10. A wiring (not shown) is connected to the pressure detection member 80. The wiring is, for example, a wiring for measuring the resistance of the pressure detection member 80. The wiring is connected to the pressure detection member 80, for example, via a lead wire to the outside of the pressure vessel 10. Then, the pressure detection member 80 detects the pressure inside the pressure vessel 10. It is preferred that the pressure detection member 80 be removed from the pressure vessel 10 during actual operation after being used in the preliminary measurement. During actual operation, there is a risk that the performance of the pressure detection performed by the pressure detection member 80 is affected due to the temperature inside the pressure vessel 10 exceeding the heat resistance of the pressure detection member 80, the accuracy of the detection of the actual pressure in the container is deteriorated, or it becomes impossible to detect.

[0088] <Other conditions to be measured in advance>

[0089] It is preferable to set the conditions that affect the friction information as the same as possible in the pre-measurement and in the actual operation. For example, it is preferable that the temperature of the piston seal 23 is as the same as possible in the pre-measurement and in the actual operation. Specifically, for example, in the actual operation, when the inside of the heat insulation layer 33 becomes 2000°C, there is a case where the inside of the pressure vessel 10 and the outside of the heat insulation layer 33 become about 100°C, and the piston seal 23 also becomes about 100°C. In this case, it is preferable to set the temperature of the piston seal 23 to 100°C or about 100°C in the pre-measurement. As long as the influence on the friction information is small, when the piston seal 23 becomes 100°C in the actual operation, the piston seal 23 can also be set to room temperature (about 20°C, etc.) in the pre-measurement. In addition, the above-mentioned temperature value is only an example, and the above-mentioned temperature can be set to various values. For conditions that have no or almost no influence on the friction information, it is not necessary to set the same conditions in the pre-measurement and in the actual operation. For example, in the pre-measurement, it is not necessary to set the pressure vessel internal component 30 and the processed product O3 inside the pressure vessel 10.

[0090] <Friction Information Stored in Friction Information Storage Unit 62>

[0091] The friction information stored in the friction information storage unit 62 includes information related to the friction force of the piston seal when the piston body 21 moves relative to the pressure container 10. The friction information is obtained (set) based on the pre-measurement relationship R obtained by pre-measurement. The friction information can be the pre-measurement relationship R, or it can be information calculated (derived) from the pre-measurement relationship R.

[0092] For example, the friction information is the relationship between the piston axial force information and the value related to the friction force of the piston seal (such as a line graph, an image, etc.). The friction information can also be the relationship between the piston axial force information and the deviation α. ​​The deviation α in this case is also called "pressure correction value data". The friction information can be the relationship between the piston axial force information and the value after adding or subtracting the deviation α from the converted pressure (the estimated value of the internal pressure of the container). The friction information can be the relationship between the piston axial force information and the friction force of the piston seal.

[0093] Preferably, the friction information storage unit 62 stores friction information for each moving direction of the piston body 21. In this case, the friction information storage unit 62 stores friction information when the piston body 21 moves in the insertion direction Z1 relative to the pressure vessel 10. The friction information is set based on the relationship Ra under the movement in the insertion direction Z1. In addition, the friction information storage unit 62 stores friction information when the piston body 21 moves in the withdrawal direction Z2 relative to the pressure vessel 10. The friction information is set based on the relationship Rc under the movement in the withdrawal direction Z2. In addition, the friction information storage unit 62 may not store (or may store) friction information based on the relationship Rb when stationary.

[0094] The friction information storage unit 62 preferably stores friction information for each of the plurality of modes of movement speed of the piston body 21. More specifically, the friction information storage unit 62 preferably stores friction information for each of the plurality of modes of movement speed of the piston body 21 relative to the pressure container 10.

[0095] <Correction of friction information>

[0096] The friction information can be corrected (corrected, updated) when necessary. For example, after the actual operation, the friction information can be corrected by performing a preliminary measurement again as needed. In this case, the pressurizing device 1 can maintain the control of the internal pressure of the container with high accuracy.

[0097] <Actual Operation>

[0098] The actual operation is the operation of the pressurizing device 1 that controls the internal pressure of the container based on the friction information. When the pressurizing device 1 is a device that processes the processed product O3, the actual operation is the operation for processing the processed product O3. When the pressurizing device 1 is a device that measures the state of the pressurized object O, the actual operation is the operation for measuring the state of the pressurized object O.

[0099] <Outline of actual operation>

[0100] The outline of the actual operation steps is as follows, for example. The set pressure (target pressure) is set in the set pressure setting unit 63, for example, a setting mode of the set pressure is set (see Figure 4 ). The setting mode is information about the relationship between the setting pressure and time. The piston 20 is inserted into the pressure container 10. The pressurized object O (for example, the pressure medium O1 and the processed product O3) enters the pressure container 10. The heating device 35 starts (turns on) heating in the pressure container 10 before or at the same time as the pressurization process starts. Then, the pressurizing device 1 is set according to the setting mode (refer to Figure 4 ), a pressurization process, a holding process, and a decompression process are performed. The pressurization process can be performed in one stage or in multiple stages (the same applies to the decompression process). Figure 4In the example shown, the pressurization process is performed in two stages, and the depressurization process is performed in one stage. Figure 4 In the illustrated example, the pressurizing device 1 performs each process in the order of a pressurizing process, a holding process, a pressurizing process, a holding process, and a depressurizing process.

[0101] <Overview of Controlling the Internal Pressure of a Container>

[0102] The drive control unit 65 controls the drive device 40 based on the piston axial force information and the friction information in each of the pressurization stroke, the holding stroke, and the decompression stroke. The drive control unit 65 controls the axial Z movement of the piston body 21 by controlling the drive device 40, thereby controlling the internal pressure of the container. Since the internal pressure of the container is controlled based on the piston axial force information and the friction information, it is not necessary to directly detect the internal pressure of the container (with the help of the pressure detection member 80). Therefore, the pressure inside the pressure container 10 does not need to be derived to the outside of the pressure container 10. In addition, the internal pressure of the container can be controlled with high precision without providing the pressure detection member 80 inside the pressure container 10.

[0103] <Pressing stroke>

[0104] The drive control unit 65 controls the drive device 40 during the pressurization stroke so that the piston body 21 moves in the insertion direction Z1. The movement direction of the piston body 21 during the pressurization stroke is limited to the insertion direction Z1 (limited to one direction). In addition, there are also cases where the piston body 21 reciprocates during the pressurization stroke (described later) (see Figure 7 ). During the pressurization stroke, the pressure inside the container increases with time. The change in the pressure inside the container during the pressurization stroke is almost limited to the change caused by the movement of the piston body 21 (the same applies to the decompression process). In addition, strictly speaking, during the pressurization stroke, the pressure inside the container changes due to changes in the temperature inside the pressure vessel 10, for example due to the heat of the heating device 35. However, the change in the pressure inside the container caused by factors other than the movement of the piston body 21 is so small that it can be ignored (even if ignored, it has no or almost no effect on the control of the pressure inside the container) (the same applies to the decompression process). The control of the drive device 40 performed by the drive control unit 65 during the pressurization stroke is the same as the control of the drive device 40 when the piston body 21 moves in the insertion direction Z1 during the reciprocating action of the piston body 21 in the holding stroke described later.

[0105] <Decompression process>

[0106] The drive control unit 65 controls the drive device 40 in the decompression stroke so that the piston body 21 moves in the extraction direction Z2. The moving direction of the piston body 21 in the decompression stroke is limited to the extraction direction Z2 (limited to one direction). In addition, there is also a situation where the piston body 21 reciprocates in the decompression stroke. In the decompression stroke, the pressure in the container decreases over time. The control of the drive device 40 by the drive control unit 65 in the decompression stroke is the same as the control of the drive device 40 when the piston body 21 moves in the extraction direction Z2 in the reciprocating action of the piston body 21 in the holding stroke described later.

[0107] <Keep the itinerary>

[0108] The drive control unit 65 controls the drive device 40 to keep the internal pressure of the container substantially constant during the holding stroke. The drive control unit 65 reciprocates the piston body 21 at a substantially constant position during the holding stroke (the details of the reciprocating motion will be described later).

[0109] For example, in the case where the pressurizing device 1 is a static pressurizing device for treating the treated product O3, the most important process among the pressurizing process, the holding process, and the decompression process is the holding process. In the holding process, it is important to keep the treated product O3 at the target temperature and to keep the pressure of the pressurized treated product O3 at the set pressure. In the holding process, the temperature distribution of the treated product O3 is targeted to be consistent with the target temperature (for example, 2000°C, etc.). Therefore, in the holding process, the temperature distribution inside the pressure vessel 10 is targeted to be in a stable state (for example, a state in which a certain amount of heat is continuously released from the inside of the insulation layer 33 to the outside). However, the temperature distribution inside the pressure vessel 10 does not become the target state immediately after the holding process begins. The holding process is performed for a long time (for example, several hours, etc.) so that the temperature distribution inside the pressure vessel 10 becomes the target state. In addition, even in the case where the pressurizing device 1 is not a device for treating the treated product O3, it is sometimes important to keep the inside of the pressure vessel 10 at the set pressure and the target temperature.

[0110] <Problems when the piston body 21 is stationary>

[0111] It is difficult to control the pressure inside the pressure container with high accuracy when the piston body 21 is stationary relative to the pressure container 10. The reason is that it is difficult to estimate the pressure inside the pressure container (the following [Example 1 of the problem]) and it is difficult to track the piston body 21 with respect to the change of the pressure inside the pressure container (the following [Example 2 of the problem]).

[0112] [Example 1 of the question]

[0113] like Figure 3As shown, in the static relationship Rb that can be obtained by pre-measurement, the piston body 21 stops at a certain position, and the actual pressure in the container becomes a certain pressure P2. However, during actual operation, even if the position of the piston body 21 is constant, the actual pressure in the container is not constant, but changes (fluctuates). For example, the temperature inside the pressure vessel 10 inevitably changes in time and distribution. For example, if the heating device 35 heats the pressurized object O, etc., the temperature distribution inside the pressure vessel 10 changes. In addition, at this time, the average temperature inside the pressure vessel 10 rises with time. If the temperature inside the pressure vessel 10 changes, the pressure inside the container also changes according to Boyle-Charles' law. Therefore, even if the position of the piston body 21 is constant, the actual pressure in the container is not constant.

[0114] As from Figure 3 As clearly stated, in the stationary relationship Rb, the converted pressure is not determined as a single value relative to the value of the actual pressure in a certain container (for example, pressure P2). Specifically, in the holding stroke, it is unclear in which direction the value of the piston axial force information (converted pressure) oscillates (high or low) or is the same relative to the efficiency 100% line L. This means that even if the converted pressure is determined as a single value, the actual pressure in the container is not determined as a single value. Therefore, it is difficult to calculate (infer) the pressure inside the container with high accuracy based on the converted pressure. As a result, when the piston body 21 is stationary relative to the pressure container 10, it is difficult to control the pressure inside the container with high accuracy.

[0115] [Example 2 of the question]

[0116] Generally speaking, static friction is greater than dynamic friction. Therefore, when the piston body 21 is stationary relative to the pressure vessel 10, even if the pressure inside the container changes, the piston body 21 is easy to remain stationary relative to the pressure vessel 10. More specifically, when the temperature inside the pressure vessel 10 rises, according to Boyle-Charles' law, the pressure inside the container will rise. At this time, if the friction force of the piston seal is smaller than the force generated by the pressure inside the container borne by the piston body 21, the piston body 21 moves in the withdrawal direction Z2, the pressure inside the container decreases, and the pressure inside the container approaches the set pressure. However, if the friction force of the piston seal is greater than the force generated by the pressure inside the container borne by the piston body 21, the piston body 21 does not move in the withdrawal direction Z2 even if the temperature inside the pressure vessel 10 rises. As a result, the pressure inside the container rises, and the pressure inside the container deviates from the set pressure. In addition, when the temperature inside the pressure vessel 10 drops, the pressure inside the container drops, and the pressure inside the container deviates from the set pressure. As a result, when the piston body 21 is stationary relative to the pressure vessel 10, it is difficult to control the pressure inside the container with high precision.

[0117] <Overview of reciprocating motion>

[0118] In view of this, the pressurizing device 1 of the present embodiment is configured to work as follows during the holding stroke. The drive control unit 65 controls the drive device 40 so that the piston body 21 reciprocates relative to the pressure container 10 (reciprocates in the axial direction Z). The drive device 40 reciprocates the piston body 21 relative to the pressure container 10. The piston body 21 reciprocates relative to the pressure container 10. The piston body 21 reciprocates slightly (finely) in the axial direction Z.

[0119] In the holding stroke, the piston body 21 reciprocates relative to the pressure container 10, so the container internal pressure can be controlled with high accuracy. The reason for this is, for example, as follows.

[0120] [Example 1 of reason]

[0121] The piston body 21 reciprocates relative to the pressure container 10, so it is possible to use the friction information when the piston body 21 moves in the axial direction Z. In the friction information when the piston body 21 moves in the axial direction Z, if the value of the piston axial force information is determined to be one, the container internal pressure is determined to be one value (refer to Figure 3 ). Therefore, the internal pressure of the container can be calculated (estimated) with high accuracy. As a result, the internal pressure of the container can be controlled with high accuracy.

[0122] [Example 2 of reason]

[0123] In addition, the piston body 21 reciprocates relative to the pressure vessel 10, so the friction force of the piston seal becomes a dynamic friction force that is smaller than the static friction force. Therefore, the position of the piston body 21 can be easily tracked relative to the change in the internal pressure of the container caused by the temperature change in the pressure vessel 10. For example, if the temperature inside the pressure vessel 10 rises, the internal pressure of the container will rise, and the piston body 21 (for example, the center position of the reciprocating movement of the piston body 21) will easily move in the withdrawal direction Z2. In addition, if the temperature inside the pressure vessel 10 drops, the internal pressure of the container will drop, and the piston body 21 (for example, the center position of the reciprocating movement of the piston body 21) will easily move in the insertion direction Z1. Therefore, the position of the piston body 21 is easy to track relative to the change in the internal pressure of the container, so that the internal pressure of the container can be close to the set pressure. As a result, the internal pressure of the container can be controlled with high precision.

[0124] <Details of reciprocating motion>

[0125] As described above, the drive control unit 65 controls the drive device 40 based on the piston axial force information and the friction information. The details of this control are as follows.

[0126] <About Inspection of Piston Body 21>

[0127] The piston position information detection unit 51 detects the piston axial force information (such as the deformation of the piston body 21), and outputs the detection value to the controller 60. For example, the controller 60 calculates the converted pressure (refer to Figure 3 )(An example of piston axial force information).

[0128] For example, the piston position information detection unit 51 can detect the position information of the piston body 21 and output the detection value to the controller 60. The piston position information calculation unit 61 can also determine whether the piston body 21 moves from the detection value of the piston position information detection unit 51. The piston position information detection unit 51 can also determine whether the moving direction of the piston body 21 is the insertion direction Z1 or the withdrawal direction Z2 from the detection value of the piston position information detection unit 51. The piston position information detection unit 51 can also calculate the moving speed of the piston body 21 (more specifically, the magnitude of the moving speed) from the detection value of the piston position information detection unit 51.

[0129] <Acquisition and selection of friction information>

[0130] The drive control unit 65 obtains the friction information from the friction information storage unit 62. In the preliminary measurement, the pressurizing device 1 performs the pressurizing stroke to obtain the relationship Ra (see Figure 3 ), the pressurizing device 1 performs a decompression stroke to obtain the relationship Rc under the movement of the extraction direction Z2 (refer to Figure 3 ). The reciprocating motion of the piston body 21 in the holding stroke in actual operation is the repetition of the movement of the piston body 21 in the insertion direction Z1 and the movement of the piston body 21 in the withdrawal direction Z2. Therefore, the reciprocating motion of the holding stroke is essentially the same as that of the pressurization stroke and the decompression stroke in terms of the movement of the piston body 21 in the insertion direction Z1 and the withdrawal direction Z2. Therefore, the reciprocating motion of the piston body 21 in the holding stroke in actual operation can be controlled using the friction information obtained from the pressurization stroke and the decompression stroke in advance. In addition, the friction information used in the holding stroke may be information that is exactly the same as the friction information used in the pressurization stroke (or the decompression process), or may be information that is a correction of the friction information used in the pressurization stroke (or the decompression process).

[0131] It is preferable that the drive control unit 65 selects friction information corresponding to the moving direction (insertion direction Z1 or withdrawal direction Z2) of the piston body 21 relative to the pressure container 10. The moving direction of the piston body 21 is acquired directly or indirectly.

[0132] [Example 1 of direction acquisition]

[0133] For example, it is preferable that the moving direction of the piston main body 21 is directly detected by the piston position information detection unit 51. In this case, the movement of the piston main body 21 in the axial direction Z can be detected reliably.

[0134] [Example 2 of direction acquisition]

[0135] The moving direction of the piston body 21 can also be obtained indirectly.

[0136] [Example 2a of direction acquisition]

[0137] The moving direction of the piston body 21 can be acquired based on information related to the driving of the driving device 40 (for example, the flow direction and pressure of the working fluid).

[0138] [Example 2b of direction acquisition]

[0139] The moving direction of the piston body 21 can be acquired based on a command from the controller 60 to the drive device 40 (for example, a signal indicating the driving direction of the piston body 21 ).

[0140] It is preferable that the drive control unit 65 selects friction information corresponding to the moving speed of the piston body 21 relative to the pressure container 10 (moving speed in the axial direction Z). The moving speed of the piston body 21 is acquired directly or indirectly.

[0141] [Example 1 of speed acquisition]

[0142] The moving speed of the piston body 21 can be directly detected by the piston position information detection unit 51. In this case, the moving speed of the piston body 21 in the axial direction Z can be reliably detected. For example, the moving speed of the piston body 21 is calculated based on the position of the piston body 21 detected by the piston position information detection unit 51.

[0143] [Example 2 of speed acquisition]

[0144] The moving speed of the piston body 21 can also be obtained indirectly.

[0145] [Example 2a of speed acquisition]

[0146] The moving speed of the piston body 21 can be acquired based on information related to the driving of the driving device 40 (for example, the flow rate of the working fluid, etc.).

[0147] [Example 2b of speed acquisition]

[0148] The moving speed of the piston body 21 can be acquired based on a command from the controller 60 to the drive device 40 (for example, a signal indicating the speed of driving the piston body 21 ).

[0149] When the moving speed of the reciprocating motion of the piston body 21 is constant (excluding the time when the moving direction is switched and the time near it), it is not necessary to select the friction information corresponding to the moving speed of the piston body 21. In addition, in the preliminary measurement, it is not necessary to obtain friction information for each of the multiple modes of moving speed of the piston body 21. Therefore, the number of preliminary measurements for obtaining friction information (necessary number) can be reduced.

[0150] <Instructions to the drive device 40>

[0151] The drive control unit 65 sets (calculates) the content of the instruction output to the drive device 40. The drive control unit 65 sets the content of the instruction to the drive device 40 based on the piston axial force information and the friction information so that the container internal pressure becomes the set pressure. The content of the instruction to the drive device 40 is as follows, for example.

[0152] [Example 1 of instruction]

[0153] The instruction to the drive device 40 may be information indicating the axial direction Z position of the piston body 21 .

[0154] [Example 2 of instruction]

[0155] The instruction to the driving device 40 may be information related to the force with which the driving device 40 pushes the piston body 21 .

[0156] [Example 2a of instruction]

[0157] The instruction to the drive device 40 may be an instruction of the pressure of the working fluid for the drive device 40 to press the piston body 21 (an instruction of the pressure of the head side chamber 41 a 1 ).

[0158] [Example 2b of instruction]

[0159] The indication to the drive device 40 may also be an "indicative pressure" (see Figure 4 ). The indicated pressure is the target value of the container internal pressure when there is no friction force of the piston seal. In fact, there is friction force of the piston seal. Therefore, when the piston body 21 moves in the insertion direction Z1, the indicated pressure is set to be greater than the set pressure. In addition, when the piston body 21 moves in the withdrawal direction Z2, the indicated pressure is set to be less than the set pressure. Specifically, for example, Figure 5 The relationship between indicated pressure, set pressure, and actual pressure in the container is shown in Figure 5 In the example shown, during the holding stroke, an indicated pressure greater than the set pressure and an indicated pressure less than the set pressure are indicated alternately (in a manner sandwiching the set pressure). Thus, the piston body 21 reciprocates, and the actual pressure in the container repeatedly rises (pressurizes) and falls (depressurizes).

[0160] The drive device 40 is driven in accordance with the instruction output from the drive control unit 65. Specifically, for example, the fluid pressure control unit 47 of the drive device 40 controls the pump and the pressure relief mechanism in accordance with the instruction output from the drive control unit 65. Then, the fluid pressure cylinder 41 drives the piston body 21 in accordance with the operation of the fluid pressure control unit 47. As a result, the pressure inside the container is controlled to be close to the set pressure. The control of the drive device 40 (control of the pressure inside the container) by the drive control unit 65 can be performed by various methods.

[0161] <Specific example 1 of controlling the internal pressure of a container>

[0162] For example, friction information can include Figure 3 The relationship between the converted pressure (an example of piston axial force information) and the pressure correction value data (deviation α) shown in . In this case, the controller 60 calculates the converted pressure from the detection value of the piston axial force information detection unit 53. In addition, the controller 60 selects the friction information corresponding to the moving direction of the piston 20. Based on the selected friction information, the controller 60 determines the pressure correction value data (deviation α) corresponding to the converted pressure. The pressure calculation unit 64 calculates (infers) the container internal pressure based on the converted pressure and the pressure correction value data (deviation α). Specifically, for example, when the piston body 21 moves in the insertion direction Z1, the pressure calculation unit 64 subtracts the deviation αa from the converted pressure as the container internal pressure. When the piston body 21 moves in the withdrawal direction Z2, the pressure calculation unit 64 adds the deviation αc to the converted pressure as the container internal pressure. Then, the drive control unit 65 controls the drive device 40 so that the inferred container internal pressure becomes the set pressure.

[0163] <Specific example 2 of controlling the internal pressure of a container>

[0164] The friction information may include information that can be converted to the pressure correction value data without including the pressure correction value data (deviation α) itself. For example, the friction information may include the relationship between the converted pressure and the container internal pressure. In this case, the pressure calculation unit 64 calculates (estimates) the container internal pressure corresponding to the converted pressure based on the friction information. Then, the drive control unit 65 controls the drive device 40 so that the estimated container internal pressure becomes the set pressure.

[0165] <Specific example 3 of controlling the internal pressure of a container>

[0166] The friction information does not need to include the converted pressure. For example, the friction information may also include the relationship between the deformation of the piston body 21 (an example of the piston axial force information) and the container internal pressure. In this case, the pressure calculation unit 64 calculates (infers) the container internal pressure corresponding to the deformation detected by the strain gauge 53a based on the friction information. Then, the drive control unit 65 controls the drive device 40 so that the inferred container internal pressure becomes the set pressure. In addition, the above-mentioned container internal pressure control method is only a specific example, and the container internal pressure can be controlled in various ways.

[0167] <Notification of container internal pressure>

[0168] When the pressure calculation unit 64 calculates (estimates) the internal pressure of the container, the pressure notification unit 70 may notify the calculated internal pressure of the container (the same applies to the pressurization process and the depressurization process).

[0169] <Continuation of reciprocating motion>

[0170] The drive control unit 65 controls the drive device 40 so that the piston body 21 continuously (multiple times) reciprocates. The drive control unit 65 can continue the reciprocating motion throughout the entire stroke (from the start to the end) (see Figure 4 ). The drive control unit 65 moves the piston body 21 continuously (without stopping) relative to the pressure vessel 10 except for the moment when the piston body 21 switches the moving direction. In addition, the drive control unit 65 may also temporarily stop the reciprocating motion of the piston body 21 during the holding stroke. For example, the drive control unit 65 may stop the reciprocating motion of the piston body 21 only for a short period of time when the pressure inside the container changes only slightly (for example, to a degree that does not affect the processing of the processed product O3).

[0171] <Gradual reduction of reciprocating motion>

[0172] It is preferred that the drive control unit 65 controls the drive device 40 so that the reciprocating distance (amplitude) of the piston body 21 during the reciprocating motion is gradually reduced. Figure 5 As shown, the drive control unit 65 gradually reduces the difference between the indicated pressure and the set pressure (gradually reduces the amplitude of the set pressure). As a result, the amplitude of the reciprocating motion of the piston body 21 gradually decreases, and the amplitude of the change (increase and decrease) of the actual pressure in the container gradually decreases.

[0173] The reason why it is preferred to gradually reduce the amplitude of the reciprocating motion of the piston body 21 is as follows. For example, immediately after the start of the holding stroke, the internal conditions of the pressure vessel 10 (specifically, the temperature distribution) change significantly. In addition, at the start of or immediately after the start of the holding stroke, the movement of the piston body 21 in one direction stops. At this time, the friction force of the piston seal changes from dynamic friction to static friction. Therefore, immediately after the start of the holding stroke, the accuracy of the friction information is sometimes insufficient. Specifically, for example, Figure 3 The difference between the converted pressure shown and the actual pressure in the container (actual deviation α) may be different from the pressure correction value data (deviation α) set as the friction information. For example, the actual deviation α may be larger than the pressure correction value data (deviation α) set as the friction information. In view of this, just after the holding stroke begins, the piston body 21 is reciprocated to a large extent, and the movement state of the piston body 21 is set to be the same as the pressurization stroke and the decompression process, thereby forming a state with a higher accuracy of the friction information. As a result, the difference between the actual deviation α and the pressure correction value data (deviation α) is easily reduced. Afterwards, by gradually reducing the amplitude of the reciprocating motion of the piston body 21, the pressure in the container can be smoothly approached to the set pressure. In addition, the drive control unit 65 can gradually reduce the amplitude of the reciprocating motion of the piston body 21 at a different time point from just after the holding stroke begins (such as in the middle of the holding stroke).

[0174] The gradual reduction of the amplitude of the reciprocating motion of the piston body 21 (for example, the gradual reduction of the amplitude of the indicated pressure) can be performed by various methods (schemes) (see Figure 5 ).

[0175] [Amplitude example 1]

[0176] The gradual reduction of the amplitude may be performed within a range from the beginning to the end of the holding stroke.

[0177] [Amplitude example 2]

[0178] The amplitude can be gradually reduced from the beginning of the holding stroke to the middle of the holding stroke. For example, the amplitude can be gradually reduced from the beginning of the holding stroke until the amplitude is reduced to a predetermined size. After that, the amplitude of the reciprocating motion of the piston body 21 can be constant.

[0179] [Amplitude example 3]

[0180] The amplitude may decrease proportionally with respect to time or may decrease in a non-proportional relationship.

[0181] [Amplitude example 4]

[0182] The amplitude can be set (changed) in accordance with any conditions (such as the internal pressure of the container). The amplitude can be set by feedback control. The amplitude can be set by, for example, PID (Proportional Integral Differential) control.

[0183] The cycle of the reciprocating motion of the piston body 21 (for example, the cycle of the indicated pressure) can be set in various ways.

[0184] [Example 1 of cycle]

[0185] The period may be constant or approximately constant.

[0186] [Example 2 of cycle]

[0187] The period can be changed in accordance with the amplitude. For example, the larger the amplitude, the longer the period can be set, and the smaller the amplitude, the shorter the period can be set. For example, the period can be gradually reduced in accordance with the gradual reduction of the amplitude.

[0188] [Example 3 of cycle]

[0189] This period can be set according to any conditions other than the amplitude (for example, the internal pressure of the container, etc.).

[0190] <Specific example of the relationship between the indicated pressure and the internal pressure of the container>

[0191] As an example of the control of the container internal pressure by the drive control unit 65, a case where the container internal pressure is controlled in accordance with the instruction pressure from the drive control unit 65 to the drive device 40 will be described. Figure 5 In the example shown in , the drive control unit 65 alternately indicates an indicated pressure greater than the set pressure and an indicated pressure less than the set pressure, so that the amplitude of the indicated pressure gradually decreases. As a result, the amplitude of the reciprocating action of the piston body 21 gradually decreases, and the amplitude of the container internal pressure gradually decreases.

[0192] exist Figure 5 In the example shown, at the start of the holding stroke (at the end of the pressurizing stroke), the internal pressure of the container is equal to or substantially equal to the set pressure. Then, during the holding stroke, the internal pressure of the container gradually approaches the set pressure while repeatedly pressurizing and depressurizing. In this example, the vibration center of the internal pressure of the container gradually approaches the set pressure from a value lower than the set pressure.

[0193] exist Figure 6 Another example of controlling the internal pressure of the container in accordance with the pressure indicated by the drive control unit 65 to the drive device 40 is shown in FIG. Figure 5 The examples shown in the example are different. Figure 6In the example shown, at the start of the holding stroke, the internal pressure of the container is higher than the set pressure. Then, during the holding stroke, the drive control unit 65 alternately indicates an indicated pressure greater than the set pressure and an indicated pressure less than the set pressure across the set pressure, so that the amplitude of the indicated pressure gradually decreases (in accordance with the Figure 5 In this case, the vibration center of the container internal pressure is the same as or substantially the same as the set pressure.

[0194] exist Figure 7 Another example of controlling the internal pressure of the container in accordance with the pressure indicated by the drive control unit 65 to the drive device 40 is shown in FIG. Figure 6 The examples shown in the example are different. Figure 7 In the example shown, the drive control unit 65 causes the piston body 21 to reciprocate within the range from the stroke before the holding stroke to the holding stroke. Specifically, for example, the drive control unit 65 alternately indicates an indicated pressure greater than the set pressure and an indicated pressure less than the set pressure from the stroke before the holding stroke. As a result, the piston body 21 reciprocates within the range from the stroke before the holding stroke to the holding stroke. The "stroke before the holding stroke" may be a pressurizing stroke or a decompressing process. The drive control unit 65 may or may not gradually reduce the amplitude of the reciprocating motion of the piston body 21 in the stroke before the holding stroke.

[0195] Depend on Figure 1 The effects produced by the pressurizing device 1 of the present embodiment shown in the figure are as follows. The pressurizing device 1 includes a pressure vessel 10, a piston body 21, a piston seal 23, a piston axial force information detection unit 53, a drive device 40, a friction information storage unit 62, and a drive control unit 65. The piston body 21 is embedded in the interior of the pressure vessel 10 so as to be movable in the insertion direction Z1 and the withdrawal direction Z2 relative to the pressure vessel 10. The piston seal 23 is provided on the piston body 21 to seal the gap between the piston body 21 and the pressure vessel 10. The piston axial force information detection unit 53 detects the piston axial force information related to the axial force in the moving direction (axial direction Z) of the piston body 21 relative to the pressure vessel 10, that is, the axial force applied to the piston body 21. The drive device 40 moves the piston body 21 relative to the pressure vessel 10.

[0196] [Structure 1-1] Friction information storage unit 62 (refer to Figure 2 ) stores friction information related to the friction force (piston seal friction force) between the piston seal 23 and the pressure container 10 when the piston body 21 moves relative to the pressure container 10. The drive control unit 65 (refer to Figure 2 ) based on the piston axial force information detected by the piston axial force information detection unit 53 and the friction information storage unit 62 (refer to Figure 2) stores friction information to control the drive device 40.

[0197] [Structure 1-2] Drive control unit 65 (refer to Figure 2 ) During the holding stroke in which the pressure inside the pressure container 10 is controlled to be maintained at a certain level, the driving device 40 is controlled to cause the piston body 21 to reciprocate relative to the pressure container 10.

[0198] In the above-mentioned [Structure 1-1], the drive control unit 65 (refer to Figure 2 ) based on the friction information storage unit 62 (refer to Figure 2 ) to control the drive device 40. The friction information is the friction information when the piston body 21 moves relative to the pressure container 10.

[0199] Then, in the above-mentioned [Structure 1-2], the drive control unit 65 causes the piston body 21 to reciprocate (i.e. move) relative to the pressure container 10 during the holding stroke (see Figure 5 ). Therefore, the friction information when the piston body 21 moves relative to the pressure container 10 can be applied to the control of the drive device 40 in the holding stroke. Therefore, the pressurizing device 1 can control the pressure (container internal pressure) inside the pressure container 10 in the holding stroke with high precision compared to the case where the piston body 21 is kept stationary relative to the pressure container 10 in the holding stroke.

[0200] In the above-mentioned [Structure 1-2], the piston body 21 is reciprocated (i.e. moved) relative to the pressure container 10, so that the friction force of the piston seal becomes a dynamic friction force that is smaller than the static friction force (except when the movement direction of the piston body 21 is switched). Therefore, the piston body 21 is easy to follow the movement relative to the temperature change inside the pressure container 10. Therefore, even if the temperature inside the pressure container 10 changes during the holding stroke, the container internal pressure is easy to be maintained. Therefore, the pressurizing device 1 can control the pressure inside the pressure container 10 (container internal pressure) during the holding stroke with high precision, compared to the case where the piston body 21 is stationary relative to the pressure container 10 during the holding stroke.

[0201] [Structure 2] Friction information storage unit 62 (refer to Figure 2 ) stores friction information when the piston body 21 moves in the insertion direction Z1 relative to the pressure container 10, and friction information when the piston body 21 moves in the withdrawal direction Z2 relative to the pressure container 10. The drive control unit 65 (refer to Figure 2 ) selects friction information corresponding to the moving direction of the piston body 21 relative to the pressure container 10, and controls the drive device 40 based on the selected friction information.

[0202] The piston seal friction force sometimes differs depending on the moving direction of the piston body 21 relative to the pressure container 10 (see Figure 3 ). In the above-mentioned [Structure 2], the driving device 40 is controlled based on the friction information corresponding to the moving direction of the piston body 21. Therefore, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0203] [Structure 3] Friction information storage unit 62 (refer to Figure 2 ) stores friction information of each of the plurality of modes of movement speed of the piston body 21 relative to the pressure container 10. The drive control unit 65 selects friction information corresponding to the movement speed of the piston body 21 relative to the pressure container 10, and controls the drive device 40 based on the selected friction information.

[0204] The above-mentioned [Structure 3] provides the following effects. The friction force of the piston seal sometimes varies depending on the moving speed of the piston body 21 relative to the pressure container 10. In the above-mentioned [Structure 3], the drive device 40 is controlled based on the friction information corresponding to the moving speed of the piston body 21. Therefore, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0205] [Structure 4] The pressurizing device 1 includes a piston position information detection unit 51 . The piston position information detection unit 51 detects position information of the piston body 21 relative to the pressure container 10 .

[0206] In the above-mentioned [Structure 4], the piston position information detection unit 51 detects the position information of the piston body 21 relative to the pressure container 10. Therefore, the piston position information detection unit 51 can reliably (directly) detect the movement of the piston body 21 relative to the pressure container 10. Therefore, the piston position information detection unit 51 can detect (confirm, guarantee) a state in which the drive device 40 can be controlled based on the friction information when the piston body 21 moves relative to the pressure container 10. As a result, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0207] When the pressurizing device 1 includes the above-mentioned [Structure 2] and the above-mentioned [Structure 4], the following effects can also be obtained. In the above-mentioned [Structure 2], the drive control unit 65 (refer to Figure 2 ) The driving device 40 is controlled based on the friction information corresponding to the moving direction of the piston body 21 relative to the pressure container 10. In the above-mentioned [Configuration 4], the piston position information detection unit 51 detects the position information of the piston body 21 relative to the pressure container 10, thereby being able to reliably (directly) detect the moving direction of the piston body 21 relative to the pressure container 10. As a result, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0208] When the pressurizing device 1 includes the above-mentioned [Structure 3] and the above-mentioned [Structure 4], the following effects can also be obtained. In the above-mentioned [Structure 3], the drive control unit 65 (refer to Figure 2 ) The driving device 40 is controlled based on the friction information corresponding to the moving speed of the piston body 21 relative to the pressure container 10. In the above-mentioned [Structure 4], the piston position information detection unit 51 can reliably (directly) detect the moving speed of the piston body 21 relative to the pressure container 10 by detecting the position information of the piston body 21 relative to the pressure container 10. As a result, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0209] [Structure 5] The piston axial force information detection unit 53 includes a strain gauge 53 a. The strain gauge 53 a is attached to the piston body 21 and detects deformation of the piston body 21.

[0210] The strain gauge 53a of the above-mentioned [Structure 5] can directly detect the piston axial force information. Therefore, the accuracy of the piston axial force information can be improved. Specifically, for example, in the case where the piston axial force information is the pressure of the working fluid of the drive device 40 that drives the piston body 21 (described later), the piston axial force information is affected by the friction force of the plunger seal 41d. On the other hand, in the above-mentioned [Structure 5], the piston axial force information obtained from the strain gauge 53a is not affected by the friction force of the plunger seal 41d. With the help of the strain gauge 53a, the piston axial force information can be directly detected, so the drive control unit 65 (refer to Figure 2 ) can control the drive device 40 more accurately based on the piston axial force information and the friction information (the above-mentioned [Structure 1-1]). As a result, the pressurizing device 1 can control the internal pressure of the container more accurately.

[0211] [Structure 7] Drive control unit 65 (refer to Figure 2 ) During the holding stroke, the drive device 40 is controlled so that the reciprocating distance of the piston body 21 relative to the pressure container 10 is gradually reduced.

[0212] According to the above-mentioned [Structure 7], the drive control unit 65 (refer to Figure 2 ) can gradually reduce the difference between the target container internal pressure (e.g., the above-mentioned "set pressure") and the actual pressure in the container. Figure 2 ) can be controlled in such a way that the internal pressure of the container is appropriately close to the target internal pressure of the container. As a result, the pressurizing device 1 can control the internal pressure of the container with higher accuracy.

[0213] [Structure 8] The pressurizing device 1 includes a pressure detection member 80. The pressure detection member 80 is configured to be removable from the pressure container 10. The pressure detection member 80 detects the pressure inside the pressure container 10 (container internal pressure). The friction information is obtained based on the piston axial force information detected by the piston axial force information detection unit 53 when the piston body 21 moves relative to the pressure container 10 and the pressure inside the pressure container 10 detected by the pressure detection member 80.

[0214] According to the above-mentioned [Structure 8], it is possible to reliably obtain friction information based on the actual value of the container internal pressure (actual container internal pressure) detected by the pressure detection member 80. As a result, the pressurizing device 1 can control the container internal pressure with higher accuracy.

[0215] In the above-mentioned [Structure 8], the pressure detection member 80 can be removed from the pressure container 10. Therefore, even in a case where, for example, the pressure detection member 80 or the pressure derivation member De cannot withstand a long period of actual operation, the pressure detection member 80 or the pressure derivation member De can be removed from the pressure container 10 before the actual operation after the friction information is obtained.

[0216] [Structure 9] The pressure detection member 80 is disposed inside the pressure container 10 so as to be removable from the inside of the pressure container 10. The friction information is acquired in a state where the pressure detection member 80 is disposed inside the pressure container 10.

[0217] By means of the above-mentioned [Structure 9], when the pressure detection member 80 is arranged inside the pressure container 10, the actual pressure inside the container can be detected more directly. As a result, the accuracy of the friction information can be improved. As a result, the pressurizing device 1 can control the pressure inside the container with higher accuracy.

[0218] In the above-mentioned [Configuration 9], the pressure detection member 80 can be removed from the pressure container 10. Therefore, even in a case where the pressure detection member 80 cannot withstand long-term actual operation, the pressure detection member 80 can be removed from the pressure container 10 before actual operation after the friction information is obtained.

[0219] <Modification>

[0220] In the above-mentioned embodiment, the piston axial force information detected by the piston axial force information detection unit 53 includes information for directly detecting the axial force of the piston body 21, or information that can be converted from the information. Specifically, for example, the piston axial force information includes information about the detection value of the strain gauge 53a. On the other hand, the piston axial force information detected by the piston axial force information detection unit 53 may include information related to the force of the drive device 40 pushing the piston body 21 in the insertion direction Z1. For example, in a case where the drive device 40 is a device that drives the piston body 21 by means of fluid pressure, the piston axial force information may include information related to the pressure of the working fluid used to push the piston body 21 in the insertion direction Z1.

[0221] The following describes a case where the piston axial force information detected by the piston axial force information detection unit 53 is information related to the pressure of the working fluid used to push the piston body 21 in the insertion direction Z1. For example, the piston axial force information may be information related to the pressure of the working fluid in the head side chamber 41a1. The piston axial force information may also be information related to the fluid pressure detected by the fluid pressure detection unit 45. The piston axial force information detection unit 53 that detects the piston axial force information and the fluid pressure detection unit 45 used to control the drive device 40 may be used in combination. In addition, the piston axial force information detection unit 53 may not be used in combination with the fluid pressure detection unit 45. More specifically, the piston axial force information detection unit 53 may be provided separately from the fluid pressure detection unit 45, and the piston axial force information detection unit 53 detects information related to the pressure of the working fluid used to push the piston body 21 in the insertion direction Z1 as the piston axial force information. The following mainly describes a case where the piston axial force information detection unit 53 and the fluid pressure detection unit 45 are used in combination.

[0222] When the piston axial force information is information related to the fluid pressure for pushing the piston body 21 in the insertion direction Z1, the piston axial force information includes the influence of the friction force between the plunger seal 41d and the cylinder body 41a (plunger seal friction force). More specifically, the piston axial force information includes the influence of the axial force of the piston body 21 generated by the container internal pressure, the axial force of the piston body 21 generated by the piston seal friction force, and the axial force of the piston body 21 generated by the plunger seal friction force.

[0223] In this modified example, in the preliminary measurement, friction information is obtained that takes into account the friction force of the plunger seal. More specifically, in the preliminary measurement, information related to the fluid pressure detected by the piston axial force information detection unit 53 (e.g., the fluid pressure detection unit 45) is obtained as piston axial force information that includes the influence of the friction force of the plunger seal. The relationship between the piston axial force information and the actual pressure in the container is obtained (the relationship R obtained in the preliminary measurement (refer to Figure 3 )). Based on the pre-measured relationship R, the friction information storage unit 62 (refer to Figure 2 )Stored friction information.

[0224] In this modified example, in actual operation, similar to the pre-measurement, information related to the fluid pressure detected by the piston axial force information detection unit 53 (for example, the fluid pressure detection unit 45) is obtained as the piston axial force information. Figure 2 ) Based on the piston axial force information including the influence of the friction force of the plunger seal and the friction information taking into account the friction force of the plunger seal, the drive device 40 is controlled. Thus, the drive control unit 65 can control the drive device 40 in the same manner as in the above-mentioned embodiment. As a result, the pressurizing device 1 can control the internal pressure of the container with high precision.

[0225] As in the above embodiment, in the pre-measurement and in the actual operation, it is preferable to make the conditions that affect the friction information as similar as possible. For example, in the pre-measurement and in the actual operation, it is preferable to make the temperature of the working fluid of the drive device 40 the same or substantially the same. In addition, for example, in the pre-measurement, the friction information can be obtained at various working fluid temperatures. Then, in the actual operation, the drive control unit 65 (see Figure 2 ) selects friction information corresponding to the temperature of the working fluid being detected, and controls the drive device 40 based on the selected friction information.

[0226] The effects produced by the pressurizing device 1 of this modified example are as follows. The driving device 40 includes a fluid pressure cylinder 41, a fluid pressure detection unit 45, and a fluid pressure control unit 47. The fluid pressure cylinder 41 moves the piston body 21 by means of fluid pressure. The fluid pressure detection unit 45 detects the fluid pressure supplied by the fluid pressure cylinder 41. The fluid pressure control unit 47 controls the operation of the fluid pressure cylinder 41 based on the fluid pressure detected by the fluid pressure detection unit 45.

[0227] [Structure 6] The piston axial force information detected by the piston axial force information detection unit 53 includes the fluid pressure detected by the fluid pressure detection unit 45.

[0228] In the above-mentioned [Structure 6], the piston axial force information includes the fluid pressure of the working oil detected by the fluid pressure detection unit 45 for controlling the operation of the fluid pressure cylinder 41. Therefore, the piston axial force information detection unit 53 and the fluid pressure detection unit 45 can be used together. Therefore, it is not necessary to provide a sensor (such as a strain gauge 53a, etc.) for obtaining the piston axial force information separately from the fluid pressure detection unit 45 for controlling the operation of the fluid pressure cylinder 41. Therefore, the pressurizing device 1 can be made into a simple structure.

[0229] In addition, when the piston axial force information detection unit 53 (for example, a strain gauge 53a) is provided separately from the fluid pressure detection unit 45, it is necessary to separately maintain the fluid pressure detection unit 45 and the piston axial force information detection unit 53. Specifically, for example, the strain gauge 53a deteriorates over time, so it is necessary to maintain the strain gauge 53a. On the other hand, when the piston axial force information detection unit 53 and the fluid pressure detection unit 45 are used together, the steps and time of maintenance work can be reduced.

[0230] <Other Modifications>

[0231] The above-mentioned embodiments and variations can be modified in various ways. For example, the number of components of the above-mentioned embodiments can be changed, and some of the components can be omitted. For example, the fixing and connection of the components to each other can be performed directly or indirectly. For example, Figure 2 The connection of each component shown in the figure can be changed. Figure 1 The configuration of each component shown in can be changed. For example, the inclusion relationship of the components can be changed in various ways. For example, the content described as a lower component included by a certain upper component may not be included by the upper component, but may be included by other components. For example, the content described as multiple components or parts that are different from each other may also be one component or part. For example, the content described as a component or part may also be set separately as multiple components or parts that are different from each other. For example, various parameters (specifically, the amplitude and period of the reciprocating motion of the piston body 21, etc.) can be pre-set by the controller 60, or directly set by manual operation of the operator. Various parameters can be calculated by the controller 60 based on information detected by sensors (such as the piston axial force information detection unit 53, etc.). For example, various parameters can remain unchanged, can be changed by manual operation, or can be automatically changed by the controller 60 in accordance with certain conditions. For example, each component may have only a part of each feature (function, configuration, shape, work, etc.).

[0232] The pressurizing device according to the first embodiment of the present invention comprises: a pressure container; a piston body that can move in an insertion direction and a withdrawal direction relative to the pressure container and is embedded in the interior of the pressure container; a piston seal that is provided on the piston body and seals the gap between the piston body and the pressure container; a piston axial force information detection unit that detects piston axial force information, the piston axial force information being about the axial force in the moving direction of the piston body relative to the pressure container, that is, the axial force applied to the piston body; a drive device that moves the piston body relative to the pressure container; a friction information storage unit that stores friction information about the friction force between the piston seal and the pressure container when the piston body moves relative to the pressure container; and a drive control unit that controls the drive device based on the piston axial force information detected by the piston axial force information detection unit and the friction information stored by the friction information storage unit. The drive control unit controls the drive device so that the piston body reciprocates relative to the pressure container while controlling the pressure inside the pressure container to be maintained at a certain holding stroke.

[0233] In the pressurizing device described in the above-mentioned first scheme, the friction information storage unit can store the friction information when the piston body moves in the insertion direction relative to the pressure container, and the friction information when the piston body moves in the withdrawal direction relative to the pressure container, and the drive control unit selects the friction information corresponding to the moving direction of the piston body relative to the pressure container, and controls the drive device based on the selected friction information.

[0234] In the pressurizing device described in the first or second scheme above, the friction information storage unit may store the friction information of each of the plurality of modes of movement speed of the piston body relative to the pressure vessel, and the drive control unit may select the friction information corresponding to the movement speed of the piston body relative to the pressure vessel, and control the drive device based on the selected friction information.

[0235] In the pressurizing device according to any one of the first to third aspects, a piston position information detection unit may be further provided to detect position information of the piston body relative to the pressure container.

[0236] In the pressurizing device according to any one of the first to fourth aspects, the piston axial force information detection unit may further include a strain gauge attached to the piston body and configured to detect deformation of the piston body.

[0237] In the pressurizing device described in any one of the first to fifth schemes mentioned above, the driving device may include a fluid pressure cylinder for moving the piston body by means of fluid pressure, a fluid pressure detecting unit for detecting the fluid pressure supplied by the fluid pressure cylinder, and a fluid pressure control unit for controlling the operation of the fluid pressure cylinder based on the fluid pressure detected by the fluid pressure detecting unit, and the piston axial force information detected by the piston axial force information detecting unit includes the fluid pressure detected by the fluid pressure detecting unit.

[0238] In the pressurizing device described in any one of the first to sixth aspects, the drive control unit may control the drive device during the holding stroke so that a reciprocating distance of the piston body in the reciprocating motion relative to the pressure container gradually decreases.

[0239] In the pressurizing device described in any one of the first to seventh schemes mentioned above, it can be that it is also equipped with a pressure detection component that is arranged in a manner that can be removed from the pressure container and detects the internal pressure of the pressure container, and the friction information is obtained based on the piston axial force information detected by the piston axial force information detection unit when the piston body moves relative to the pressure container and the internal pressure of the pressure container detected by the pressure detection component.

[0240] In the pressurizing device described in the eighth embodiment, the pressure detecting member may be arranged inside the pressure container in a manner that can be removed from the inside of the pressure container, and the friction information may be obtained in a state in which the pressure detecting member is arranged inside the pressure container.

Claims

1. A pressurizing device, characterized in that: have: Pressure vessels; A piston body, which is movable in an insertion direction and a withdrawal direction relative to the pressure container and is embedded in the interior of the pressure container; A piston seal, disposed on the piston body, sealing a gap between the piston body and the pressure container; A piston axial force information detection unit detects piston axial force information, wherein the piston axial force information is about the axial force of the piston body in the moving direction relative to the pressure vessel, that is, the axial force applied to the piston body; a driving device for moving the piston body relative to the pressure vessel; a friction information storage unit for storing friction information about a friction force between the piston seal and the pressure container when the piston body moves relative to the pressure container; a drive control unit that controls the drive device based on the piston axial force information detected by the piston axial force information detection unit and the friction information stored by the friction information storage unit, The drive control unit controls the drive device to reciprocate the piston body relative to the pressure container during a holding stroke in which the pressure inside the pressure container is controlled to be kept constant.

2. The pressurizing device according to claim 1, characterized in that: The friction information storage unit stores the friction information when the piston body moves in an insertion direction relative to the pressure container and the friction information when the piston body moves in a withdrawal direction relative to the pressure container. The drive control unit selects the friction information corresponding to the moving direction of the piston body relative to the pressure container, and controls the drive device based on the selected friction information.

3. The pressurizing device according to claim 1 or 2, characterized in that: The friction information storage unit stores the friction information of each of a plurality of modes of movement speed of the piston body relative to the pressure container. The drive control unit selects the friction information corresponding to the moving speed of the piston body relative to the pressure container, and controls the drive device based on the selected friction information.

4. The pressurizing device according to claim 1 or 2, characterized in that: The pressure vessel further includes a piston position information detection unit configured to detect position information of the piston body relative to the pressure vessel.

5. The pressurizing device according to claim 1 or 2, characterized in that: The piston axial force information detection unit further includes a strain gauge mounted on the piston body and configured to detect deformation of the piston body.

6. The pressurizing device according to claim 1 or 2, characterized in that: The driving device is not have: a fluid pressure cylinder for moving the piston body by means of fluid pressure, a fluid pressure detection unit for detecting the fluid pressure supplied by the fluid pressure cylinder, a fluid pressure control unit for controlling the operation of the fluid pressure cylinder based on the fluid pressure detected by the fluid pressure detection unit; The piston axial force information detected by the piston axial force information detection unit includes the fluid pressure detected by the fluid pressure detection unit.

7. The pressurizing device according to claim 1 or 2, characterized in that: The drive control unit controls the drive device during the holding stroke so that a reciprocating distance of the piston body in the reciprocating motion relative to the pressure container gradually decreases.

8. The pressurizing device according to claim 1 or 2, characterized in that: The pressure detecting member is further provided, the pressure detecting member being detachable from the pressure container and detecting the pressure inside the pressure container. The friction information is acquired based on the piston axial force information detected by the piston axial force information detection unit when the piston body moves relative to the pressure container and the pressure inside the pressure container detected by the pressure detection member.

9. The pressurizing device according to claim 8, characterized in that: The pressure detection member is disposed inside the pressure container so as to be removable from the inside of the pressure container. The friction information is acquired in a state where the pressure detection member is arranged inside the pressure container.

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