Continuous coating equipment

Abstract

The invention discloses continuous coating equipment. The continuous coating equipment comprises a bearing table, a coating assembly and a plurality of carrying assemblies. The bearing table comprises a feeding area, a coating area and a discharging area through which a substrate sequentially passes, and the coating assembly comprises a support and a coating head. The multiple carrying assemblies are sequentially arranged on one side or two sides of the bearing table in the coating direction, and the carrying assemblies are used for adsorbing the edges of the substrates and sequentially moving the substrates from the feeding area to the coating area and the discharging area. Wherein before the coating head finishes coating the A substrate which is located in the coating area and is driven by the at least one carrying assembly, the at least one carrying assembly drives the next B substrate to be coated to follow the A substrate which is being coated, and the moving speed of the B substrate to be coated is the same as that of the A substrate which is being coated. According to the continuous coating equipment, switching continuity between different substrates can be achieved, so that the production efficiency of the coating equipment is improved, and meanwhile coating of each substrate can be more uniform.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, in particular to a continuous coating equipment. Background Art

[0002] With the continuous development of perovskite solar cell technology, it has gradually entered the mass production stage, and the production efficiency of coating equipment has become an important indicator. In the prior art, it is necessary to first move the substrate to the coating area, and the coating area vacuums and adsorbs the substrate to fix it, and then the coating head starts coating. After coating, the coated substrate is moved out of the coating area, and the cycle is repeated. In particular, as the size of the substrate continues to increase, the vacuum time of the substrate is very long, and it takes time to move the substrate in or out of the coating area. During this process, the coating head is in a waiting state, that is, there is an interval when the coating head coats different substrates, and the coating head cannot achieve continuous coating, which reduces the coating efficiency of the coating head, not only prolongs the production cycle of the perovskite solar cell, thereby reducing the overall work efficiency of the coating equipment, and because there is an interval between each coating of the coating head, in order to ensure the coating quality, the coating head needs to be pre-coated by the pre-coating device before coating the substrate each time, so that the production cycle of the perovskite solar cell is extended, and the overall work efficiency of the coating equipment is further extended.

[0003] Therefore, how to improve the efficiency of coating equipment is a difficult problem that needs to be solved urgently. Summary of the invention

[0004] The purpose of the present invention is to provide a continuous coating device that can achieve continuity in switching between different substrates. The coating head can continuously coat the substrate, shortening the production cycle of perovskite solar cells, thereby improving the production efficiency of the coating device. At the same time, it can also make the coating of each substrate more uniform, thereby improving the quality of the perovskite solar cell.

[0005] The purpose of the present invention is achieved by the following technical solutions:

[0006] A continuous coating device, comprising:

[0007] A loading platform, the loading platform is used to load the substrate, and the loading platform includes a loading area, a coating area and a unloading area for the substrate to pass through in sequence;

[0008] A coating assembly, the coating assembly comprising a bracket and a coating head disposed on the bracket, the bracket being used to adjust the position of the coating head, and the coating head being used to coat the substrate located in the coating area;

[0009] A plurality of conveying components, wherein the plurality of conveying components are sequentially arranged on one side or both sides of the carrier along the coating direction, the conveying components can move back and forth along the coating direction, and the conveying components are used to absorb the edge of the substrate and sequentially move the substrate from the loading area to the coating area and the unloading area;

[0010] Among them, during the operation, the multiple conveying components operate independently of each other, and the multiple conveying components alternately adsorb the substrate and drive the substrate to move along the coating direction. Before the coating head completes coating the A substrate located in the coating area and driven by at least one of the conveying components, at least one of the conveying components drives the next B substrate to be coated to follow the A substrate being coated and move at the same speed as the A substrate being coated.

[0011] Preferably, the loading area is provided with a first air flotation component, and the first air flotation component is used to form a positive pressure under the substrate and to suspend the substrate in the loading area;

[0012] The coating area is provided with a second air flotation component, the second air flotation component is used to simultaneously form positive pressure and negative pressure under the substrate and to suspend the substrate in the coating area, the positive pressure and the negative pressure form an air film, and the air film is used to adjust the height of the substrate;

[0013] The unloading area is provided with a third air flotation component, and the third air flotation component is used to form a positive pressure below the substrate and make the substrate float in the unloading area.

[0014] Preferably, it further comprises a measuring component, which is arranged above the supporting platform and is used to measure the surface height of the substrate, and the coating head is located between the measuring component and the unloading area.

[0015] Preferably, when the number of the conveying assemblies is three, the three conveying assemblies include a first conveying assembly, a second conveying assembly and a third conveying assembly sequentially distributed along the coating direction;

[0016] The substrate is divided into a front area and a rear area in sequence in the opposite direction of the coating direction, the first transport assembly is used to absorb the rear area of ​​the substrate, and the second transport assembly and the third transport assembly are used to alternately absorb the front area of ​​the substrate.

[0017] Preferably, when the substrate A is located in the loading area, the second transport component absorbs the front area of ​​the substrate A and moves the substrate A to below the measuring component, the measuring component measures the surface height of the substrate A, and the coating head moves to a predetermined position according to the test data of the measuring component;

[0018] When the second transport component drives the substrate A to move below the coating head, the coating head coats the substrate A. After the first transport component absorbs the rear area of ​​the substrate A, the second transport component releases the front area of ​​the substrate A, and then the third transport component absorbs the front area of ​​the substrate A.

[0019] When the A substrate being coated completely enters the coating area, the next B substrate to be coated enters the loading area, the second transport assembly and the first transport assembly move to the loading area, the second transport assembly absorbs the front area of ​​the next B substrate and drives the B substrate to move under the measuring assembly, the measuring assembly measures the surface height of the B substrate, and then the second transport assembly drives the B substrate to follow the A substrate being coated and move at the same speed as the A substrate being coated.

[0020] Preferably, when the second transport assembly drives the B substrate to follow the A substrate being coated, the distance between the B substrate and the A substrate being coated is less than or equal to the thickness of the substrates.

[0021] Preferably, the coating assembly further comprises a first driving device, the first driving device is arranged on the bracket, and the first driving device is used to drive the coating head to move up and down; and / or,

[0022] The coating assembly further comprises a balancing device, which is arranged on the bracket and is used for applying a force in the direction opposite to the gravity to the coating head.

[0023] Preferably, it further comprises a first guide rail and a second driving device, wherein the second driving device is used to drive the transport assembly to move back and forth along the first guide rail in the coating direction; and / or,

[0024] It also includes a liquid supply system, which is connected to the coating head and provides coating liquid to the coating head; and / or,

[0025] The device also includes an air knife, which is used to blow air toward the coated substrate to evaporate the solvent in the liquid film on the surface of the substrate.

[0026] Preferably, it also includes a coating head cleaning component, wherein the coating head cleaning component is used to clean the coating head; and / or,

[0027] It also includes a pre-coating component, which is used for the coating head to perform pre-coating.

[0028] Preferably, the coating head cleaning assembly and the pre-coating assembly are arranged on a mobile platform, the mobile platform is arranged on a second guide rail, and the mobile platform is driven by a third driving device to drive the coating head cleaning assembly and the pre-coating assembly to move along the second guide rail;

[0029] When the coating head needs to be cleaned, the third driving device drives the movable platform to move along the second guide rail to a predetermined position so that the coating head cleaning assembly cleans the coating head;

[0030] When the coating head needs pre-coating, the third driving device drives the movable platform to move to a predetermined position along the second guide rail, so that the pre-coating assembly provides pre-coating for the coating head.

[0031] Compared with the prior art, the beneficial effects of the present invention include at least:

[0032] The continuous coating equipment of the present invention uses a conveying component to adsorb the substrate in the loading area and move the substrate from the loading area to the coating area and the unloading area in sequence. The substrate does not need to be vacuumed in the coating area, thereby eliminating the vacuuming waiting time. Then, multiple conveying components are used to move back and forth along the coating direction and switch back and forth between different substrates, so that the next substrate to be coated follows the substrate being coated and has the same moving speed as the substrate being coated, thereby achieving continuity in switching between different substrates. The coating head can continuously coat the substrate, shortening the production cycle of the perovskite solar cell, thereby improving the production efficiency of the coating equipment, and at the same time can make each substrate more evenly coated, thereby improving the quality of the perovskite solar cell. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a three-dimensional structural schematic diagram from one perspective of the continuous coating device of an embodiment of the present invention.

[0034] Figure 2 yes Figure 1 A partial enlarged view of point C in the middle.

[0035] Figure 3 It is a schematic diagram of the three-dimensional structure of the continuous coating device of an embodiment of the present invention from another perspective.

[0036] Figures 4 to 10 It is a three-dimensional structural schematic diagram of different stages in which the transport assembly in the embodiment of the present invention drives the substrate to move.

[0037] In the figure: 100, continuous coating equipment; 1, carrier; 11, loading area; 111, first air flotation component; 1111, first through hole; 12, coating area; 121, second air flotation component; 1211, second through hole; 13, unloading area; 131, third air flotation component; 1311, third through hole; 2, coating component; 21, bracket; 211, crossbeam; 212, first column; 213, second column; 22, coating head; 23, first driving device; 24, balancing device; 3 , transport assembly; 31, first transport assembly; 32, second transport assembly; 33, third transport assembly; 34, first guide rail; 35, second drive device; 4, measurement assembly; 5, liquid supply system; 6, air knife; 7, coating head cleaning assembly; 8, pre-coating assembly; 81, mobile platform; 82, second guide rail; 83, third drive device; 9, base; 91, support leg; 200, substrate; 210, front area; 220, middle area; 230, rear area; 240, A substrate; 250, B substrate. DETAILED DESCRIPTION

[0038] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0039] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0040] refer to Figures 1 to 10The present invention provides a continuous coating device 100, including: a carrier 1, a coating component 2 and a plurality of conveying components 3. The conveying component 3 can absorb the edge of a substrate 200 and move the substrate 200 from a loading area 11 to a coating area 12 and a unloading area 13 in sequence. When the substrate 200 is located in the coating area 12, the coating component 2 can coat the substrate 200. The continuous coating device 100 may also include a measuring component 4, a liquid supply system 5, an air knife 6, a coating head cleaning component 7, a pre-coating component 8 and a base 9. The measuring component 4 is used to measure the surface height of the substrate 200. The coating head 22 can be moved to a predetermined position according to the test data of the measuring component 4. The liquid supply system 5 provides a stable coating liquid for the coating head 22. The coating head cleaning component 7 is used to clean the coating head 22. The pre-coating component 8 is used to provide pre-coating for the coating head 22. The base 9 serves as a supporting platform for the continuous coating device 100. The supporting platform 1, the coating component 2, the plurality of conveying components 3, the measuring component 4, the liquid supply system 5, the air knife 6, the coating head cleaning component 7 and the pre-coating component 8 can all be arranged on the base 9. The bottom of the base 9 may be provided with a plurality of supporting legs 91, and the plurality of supporting legs 91 are evenly distributed at the bottom of the base 9. The height of the first supporting leg 91 is adjustable. By adjusting the first supporting leg 91, it can be ensured that the continuous coating device 100 can remain stable on different ground surfaces. The bottom of the base 9 may also be provided with a plurality of rollers (not shown), which are evenly distributed at the bottom of the base 9. When the rollers are in contact with the ground, the first support leg 91 is away from the ground, which facilitates the movement of the continuous coating device 100. When the first support leg 91 is in contact with the ground, it is ensured that the continuous coating device 100 will not move at will.

[0041] Specifically, refer to Figures 1 to 10The carrier 1 is used to carry the substrate 200. The substrate 200 can move along the carrier 1 in the coating direction under the drive of the conveying component 3. The carrier 1 may include a loading area 11, a coating area 12 and a unloading area 13 for the substrate 200 to pass through in sequence. The loading area 11 is used to carry the substrate 200 to be coated. The substrate 200 to be coated first enters the loading area 11, and the substrate 200 can be transferred to the loading area 11 by a robot, a conveyor belt, etc. The transport component 3 can adsorb the substrate 200 in the loading area 11, and then the transport component 3 moves the substrate 200 to be coated to the coating area 12. At this time, the substrate 200 does not need to be vacuumed, and the vacuum waiting time is eliminated. The coating area 12 is used to carry the substrate 200 being coated, and the coating head 22 can directly coat the substrate 200. The unloading area 13 is used to carry the substrate 200 that has been coated. The coated substrate 200 enters the unloading area 13, and the substrate 200 can be transferred away from the unloading area 13 by a robot, a conveyor belt, etc. The loading area 11, coating area 12 and unloading area 13 can be integrated, that is, the carrier platform 1 is a whole, or the loading area 11, coating area 12 and unloading area 13 can be split, that is, the carrier platform 1 can be composed of three small carriers.

[0042] As a preferred embodiment, the loading area 11 may be provided with a first air flotation component 111, which is used to form a positive pressure below the substrate 200 and to suspend the substrate 200 in the loading area 11. The first air flotation component 111 is provided with a plurality of first through holes 1111 on the side facing the substrate 200, and the first through holes 1111 can blow air toward the substrate 200 to form a positive pressure below the substrate 200 and to suspend the substrate 200 above the first air flotation component 111, and the substrate 200 is not in contact with the carrier 1 and the first air flotation component 111, so that static electricity generated by friction between the substrate 200, the carrier 1 and the first air flotation component 111 can be avoided, thereby improving the coating quality.

[0043] The coating area 12 may be provided with a second air flotation component 121 , which is used to simultaneously form positive and negative pressures under the substrate 200 and to suspend the substrate 200 in the coating area 12 . The positive and negative pressures form an air film, which is used to adjust the height of the substrate 200 . A plurality of second through holes 1211 are provided on the side of the second air flotation component 121 facing the substrate 200. Some of the second through holes 1211 can blow air toward the substrate 200 to form a positive pressure under the substrate 200, and some of the second through holes 1211 can draw air toward the substrate 200 to form a negative pressure under the substrate 200. By adjusting the distribution of positive and negative pressures and the loads of positive and negative pressures, a stable and evenly spaced air film can be formed to keep the substrate 200 in a horizontal state. This not only prevents the substrate 200 from contacting the carrier 1 and the third air flotation component 131, thus avoiding static electricity generated by mutual friction between the substrate 200, the carrier 1 and the third air flotation component 131, thereby improving the coating quality, but also ensures that the distances from each point on the substrate 200 to the coating head 22 are equal or approximately equal, so that the coating head 22 can evenly coat the coating liquid on the substrate 200, further improving the coating quality.

[0044] The unloading area 13 may be provided with a third air flotation component 131, which is used to form a positive pressure below the substrate 200 and to suspend the substrate 200 in the unloading area 13. The third air flotation component 131 is provided with a plurality of third through holes 1311 on the side facing the substrate 200, and the third through holes 1311 can blow air toward the substrate 200 to form a positive pressure below the substrate 200 and to suspend the substrate 200 above the third air flotation component 131, and the substrate 200 is not in contact with the carrier 1 and the third air flotation component 131, so that static electricity generated by friction between the substrate 200, the carrier 1 and the third air flotation component 131 can be avoided, thereby improving the coating quality.

[0045] The first air flotation component 111, the second air flotation component 121 and the third air flotation component 131 can adopt existing technology. As an example, the first air flotation component 111 and the third air flotation component 131 can be positive pressure bars or positive pressure plates, that is, the first air flotation component 111 and the third air flotation component 131 only generate positive pressure to suspend the substrate 200. The second air flotation component 121 can be a positive and negative pressure plate or a positive and negative pressure bar, that is, the second air flotation component 121 can generate positive pressure and negative pressure at the same time. The positive pressure and negative pressure form an air film. The air film can not only suspend the substrate 200, but also control the height of the substrate 200 so that the substrate 200 maintains a predetermined distance from the coating head 22, and can also keep the surface of the substrate 200 level. Compared with directly placing the substrate 200 on a marble platform, in the present application, by placing the first air flotation assembly 111, the second air flotation assembly 121 and the third air flotation assembly 131, the substrate 200 can always remain in a suspended state during the process from loading to coating and then to unloading, thereby avoiding or reducing static electricity generated by contact, thereby improving the coating quality.

[0046] refer to Figure 1 , Figure 2 , Figure 3 The coating assembly 2 may include a bracket 21 and a coating head 22 disposed on the bracket 21. The bracket 21 is used to adjust the position of the coating head 22 and keep the coating head 22 horizontal. The coating head 22 may be disposed above the coating area 12. The coating head 22 is used to coat the substrate 200 located in the coating area 12. The bracket 21 may drive the coating head 22 to move horizontally along the coating direction, and the bracket 21 may also drive the coating head 22 to move vertically. In this embodiment, in the coating direction, the position of the bracket 21 is preferably fixed, that is, the transport assembly 3 drives the substrate 200 to move from under the coating head 22, and the coating head 22 coats the substrate 200.

[0047] The support 21 of the coating assembly 2 is, for example, a gantry support 21, and the support 21 may include a crossbeam 211 and a first column 212 and a second column 213 respectively disposed at both ends of the crossbeam 211, the extension direction of the crossbeam 211 being perpendicular or substantially perpendicular to the coating direction, the crossbeam 211 may be disposed above the coating area 12, the coating head 22 may be disposed on the crossbeam 211, and the coating head 22 may coat the substrate 200 located outside the coating area 12. The first column 212 and the second column 213 may be disposed on the base 9, and the first column 212 and the second column 213 may be disposed on both sides of the carrier 1, respectively.

[0048] As a preferred method, refer to Figure 1 , Figure 3The coating assembly 2 may further include a first drive device 23, which may be disposed on the bracket 21. The first drive device 23 may drive the coating head 22 to rise and fall according to the measurement data of the measurement assembly 4. The number of the first drive devices 23 may be one or more. In the present embodiment, the number of the first drive devices 23 is two. The two first drive devices 23 are respectively disposed on the first column 212 and the second column 213. The two first drive devices 23 may drive both ends of the beam 211 to rise and fall, and the beam 211 drives the coating head 22 to rise and fall. The two first drive devices 23 are also preferably independent of each other. The first drive device 23 may be a servo module, or other types of drive components. As an example, the first drive device 23 includes a motor and a guide rail. The drive end of the motor rises and falls or retracts along the guide rail, and the beam 211 is connected to the drive end of the motor.

[0049] In the width direction of the substrate 200, the two first driving devices 23 can eliminate the problem that one end of the supporting platform 1 is higher than the other end or the other end of the substrate 200 is higher than the other end due to part processing errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 22 in the width direction of the substrate 200, the two first driving devices 23 can respectively drive the two ends of the coating head 22 to move in different directions, or one of the first driving devices 23 is stationary, and the other first driving device 23 drives one end of the coating head 22 to rise and fall, so that the surface of the substrate 200 is parallel to the coating head 22 in the width direction of the substrate 200, ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms to the coating head 22 is equal, not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be evenly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the solar cell.

[0050] In the length direction of the substrate 200, the two first driving devices 23 can also eliminate the problem that one end of the supporting platform 1 is higher than the other end or the other end of the substrate 200 is higher than the other end due to part processing errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 22 in the length direction of the substrate 200, the length direction of the substrate 200 is the coating direction, and the two first driving devices 23 can simultaneously drive the coating head 22 to move in the same direction, so that the distance between the surface of the substrate 200 and the coating head 22 in the length direction of the substrate 200 remains equal, ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms to the coating head 22 is equal, not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be evenly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the solar cell.

[0051] refer to Figure 1 , Figure 3The coating assembly 2 may further include a balancing device 24. The balancing device 24 may be disposed on the bracket 21. The balancing device 24 is used to apply a force to the coating head 22 in the direction opposite to the gravity. The number of the balancing devices 24 may be one or more. In the present embodiment, the number of the balancing devices 24 is two. The two balancing devices 24 are disposed on the first column 212 and the second column 213, respectively. The two balancing devices 24 are also preferably independent of each other. The balancing device 24 may be a cylinder module, or other types of balancing components. As an example, the balancing device 24 includes a cylinder and a push rod. The cylinder drives the push rod to rise or fall or extend. The cylinder can also keep the push rod stationary and maintain a certain pulling force or pushing force. The two balancing devices 24 may be connected to both ends of the beam 211, that is, the balancing device 24 may apply a certain pulling force or pushing force to the beam 211. The balancing device 24 can at least share part of the load of the first drive device 23, so that the load of the first drive device 23 can be reduced, thereby improving the repeatability of the first drive device 23 or making the first drive device 23 always maintain high repeatability, improving product quality, and extending the service life of the first drive device 23, reducing the replacement frequency of the first drive device 23, improving the equipment use efficiency, and reducing the equipment use cost and maintenance cost. The load mainly refers to the gravity of the beam 211 or the gravity of the coating head 22, and can also refer to the gravity of the beam 211 and the gravity of the coating head 22.

[0052] refer to Figure 1 , Figure 3 The liquid supply system 5 can also be arranged on the crossbeam 211, so that the structure of the continuous coating device 100 can be more compact, thereby reducing the space occupied by the continuous coating device 100. The liquid supply system 5 can be connected to the coating head 22 and provide the coating head 22 with coating liquid. The liquid supply system 5 can include two diaphragm pumps, and the two diaphragm pumps can switch the liquid supply and liquid replenishment to ensure that the coating head 22 can be provided with a stable and continuous coating liquid, thereby ensuring the continuity and coating quality of the coating.

[0053] The multiple conveying components 3 may be two conveying components 3 or more than two conveying components 3. The multiple conveying components 3 may be sequentially arranged on one side or both sides of the carrier 1 along the coating direction. The conveying components 3 may be capable of reciprocating along the coating direction. The conveying components 3 are used to adsorb the edge of the substrate 200 and sequentially move the substrate 200 from the loading area 11 to the coating area 12 and the unloading area 13. For example, a suction cup (not shown) may be arranged on the side of the conveying component 3 facing the substrate 200. The suction cup may adsorb the substrate 200. The suction cup is preferably connected to a vacuum pump (not shown), so that the suction cup may form vacuum adsorption with the substrate 200. Since the suction cup only adsorbs the edge of the substrate 200, not only the vacuuming time is short, which improves the working efficiency of the continuous coating device 100, but also there is no need to use a vacuum pump with a large flow rate and a high vacuum degree, thereby reducing the cost and volume of the vacuum pump, and further reducing the cost and volume of the continuous coating device 100.

[0054] The transport component 3 can be arranged only on one side of the carrier 1 perpendicular to the coating side, or the transport component 3 can be arranged on both sides of the carrier 1 perpendicular to the coating side. Figure 1 , Figure 3 In this embodiment, the transport components 3 are simultaneously arranged on both sides of the carrier 1 perpendicular to the coating side. One transport component 3 has two parts. The two parts of one transport component 3 can be respectively and simultaneously arranged on both sides of the carrier 1 perpendicular to the coating side and adsorb the substrate 200 at the same time, so that the transport component 3 adsorbs the substrate 200 more stably, so that the movement of the substrate 200 is more stable. In other words, the transport components 3 are arranged in pairs. The multiple transport components 3 mentioned in this application can be understood as multiple pairs of transport components 3, that is, two pairs of transport components 3 or more than two pairs of transport components 3. The paired transport components 3 can be respectively and simultaneously arranged on both sides of the carrier 1 perpendicular to the coating side and adsorb the substrate 200 at the same time.

[0055] As a preferred method, refer to Figure 2 , a first guide rail 34 and a second drive device 35 may be provided on both sides of the carrier 1, the first guide rail 34 and the second drive device 35 may extend in the coating direction, the transport assembly 3 is provided on the first guide rail 34 and can slide on the first guide rail 34, the second drive device 35 may be a linear motor, and the second drive device 35 is used to drive the transport assembly 3 to move back and forth along the first guide rail 34 in the coating direction. The first guide rail 34 and the second drive device 35 may be directly provided on both sides of the carrier 1, and the first guide rail 34 and the second drive device 35 may also be provided independently of the carrier 1. In this embodiment, the first guide rail 34 and the second drive device 35 may be directly provided on both sides of the carrier 1.

[0056] Among them, during the operation, the multiple conveying components 3 can operate independently of each other, that is, the multiple conveying components 3 will not interfere with each other, and the multiple conveying components 3 alternately adsorb the substrate 200 and drive the substrate 200 to move along the coating direction. Before the coating head 22 completes coating the A substrate 240 located in the coating area 12 and driven by at least one conveying component 3, at least one conveying component 3 can drive the next B substrate 250 to be coated to follow the A substrate 240 being coated and can move at the same speed as the A substrate 240 being coated. That is to say, there is almost no gap or a very small gap between the substrate 200 being coated and the next substrate 200 to be coated, which is equivalent to adjacent substrates 200 being spliced ​​together to form a continuous whole, so that the coating head 22 can achieve continuous coating. Compared with discontinuous coating, during discontinuous coating, adjacent substrates 200 are spaced apart, and there is a pause between the coating head 22 coating different substrates 200. When the coating head 22 starts coating and ends coating, it is easy to cause incomplete coating or even missing coating of the front and rear ends of the substrate 200 in the coating direction. Continuous coating can avoid the problems of incomplete coating and missing coating of the substrate 200.

[0057] In the present application, the transport component 3 adsorbs the substrate 200 in the loading area 11 and moves the substrate 200 from the loading area 11 to the coating area 12 and the unloading area 13 in sequence. The substrate 200 does not need to be vacuumed in the coating area 12, thereby eliminating the vacuum waiting time. Then, multiple transport components 3 move back and forth along the coating direction and switch back and forth between different substrates 200, so that the next substrate 200 to be coated follows the substrate 200 being coated and has the same moving speed as the substrate 200 being coated, thereby achieving continuity in switching between different substrates 200. The coating head 22 can continuously coat the substrate 200, shortening the production cycle of the perovskite solar cell, thereby improving the production efficiency of the coating equipment, and at the same time can make each substrate 200 coated more evenly, thereby improving the quality of the perovskite solar cell.

[0058] In one embodiment, reference Figure 1 The continuous coating device 100 may further include a measuring component 4, which is disposed above the carrier 1. The measuring component 4 is used to measure the surface height of the substrate 200 to be coated. The coating head 22 is located between the measuring component 4 and the unloading area 13. The coating head 22 can adjust the height of the coating head 22 according to the test data of the measuring component 4, so that the distance between the coating head 22 and the substrate 200 is within a preset value range, thereby improving the coating quality. In some embodiments, the second air flotation component 121 can also adjust the height of the substrate 200 according to the test data of the measuring component 4, so that the distance between the substrate 200 and the coating head 22 is within a preset value range, thereby improving the coating quality.

[0059] The measuring component 4 can be arranged on the crossbeam 211, or it can be arranged independently. In the present embodiment, the measuring component 4 is arranged on the crossbeam 211, and the measuring component 4 is, for example, a laser sensor, and the number of the laser sensors can be one or more, and the number of the laser sensors is preferably multiple. In the direction perpendicular to the coating direction, the multiple laser sensors are distributed along the extension direction of the crossbeam 211, and the multiple laser sensors can collect the height of multiple points on the surface of the substrate 200, so that the test data is more accurate.

[0060] As a preferred method, refer to Figures 4 to 10 When the number of conveying components 3 is three, the three conveying components 3 include a first conveying component 31, a second conveying component 32 and a third conveying component 33 distributed in sequence along the coating direction. In this embodiment, the first conveying component 31, the second conveying component 32 and the third conveying component 33 are all arranged in pairs on both sides of the supporting platform 1.

[0061] refer to Figure 6 , the substrate 200 is divided into a front area 210, a middle area 220 and a rear area 230 in the reverse direction of the coating direction, the first conveying assembly 31 is used to adsorb the rear area 230 of the substrate 200, and the second conveying assembly 32 and the third conveying assembly 33 are used to alternately adsorb the front area 210 of the substrate 200. When the substrate 200 is located in different areas or positions of the carrier 1, at least one of the first conveying assembly 31, the second conveying assembly 32 and the third conveying assembly 33 can adsorb the substrate 200 and drive the substrate 200 to move along the coating direction. In other words, the first conveying assembly 31, the second conveying assembly 32 and the third conveying assembly 33 do not always adsorb the substrate 200, or the first conveying assembly 31, the second conveying assembly 32 and the third conveying assembly 33 do not always adsorb the same substrate 200, but adsorb as needed.

[0062] In some embodiments, when the number of the conveying components 3 is two, the two conveying components 3 include two first conveying components 31 and second conveying components 32 sequentially distributed along the coating direction, and the first conveying components 31 and the second conveying components 32 are arranged in pairs on both sides of the carrier 1. The substrate 200 is divided into a front area 210 and a rear area 230 in the reverse direction of the coating direction, and the first conveying component 31 is used to adsorb the rear area 230 of the substrate 200, and the second conveying component 32 is used to adsorb the front area 210 of the substrate 200. When the substrate 200 is located in different areas or positions of the carrier 1, at least one of the first conveying component 31 and the second conveying component 32 can adsorb the substrate 200 and drive the substrate 200 to move along the coating direction. In other words, the first conveying component 31 and the second conveying component 32 do not always adsorb the substrate 200, or the first conveying component 31 and the second conveying component 32 do not always adsorb the same substrate 200, but adsorb as needed.

[0063] As an example, refer to Figure 4 When the A substrate 240 is located in the loading area 11, the second transport component 32 can move to the bottom of the front area 210 of the A substrate 240, the second transport component 32 can adsorb the front area 210 of the A substrate 240 and move the A substrate 240 to the bottom of the measuring component 4, the measuring component 4 can measure the surface height of the A substrate 240, the coating head 22 can move to a predetermined position according to the test data of the measuring component 4, or the second air flotation component 121 adjusts the height of the substrate 200 according to the test data of the measuring component 4.

[0064] refer to Figure 5 When the second transport component 32 drives the A substrate 240 to move below the coating head 22, the liquid supply system 5 can provide the coating liquid for the coating head 22, and the coating head 22 can coat the A substrate 240. After the first transport component 31 moves to below the rear area 230 of the A substrate 240 and reaches the same moving speed as the second transport component 32, the first transport component 31 absorbs the rear area 230 of the A substrate 240. After the first transport component 31 absorbs the rear area 230 of the A substrate 240, the second transport component 32 can release the front area 210 of the A substrate 240 and vacate the position of the front area 210 of the A substrate 240. Figure 6 , and then the third transport component 33 moves to the front area 210 of the A substrate 240 and reaches the same moving speed as the first transport component 31, the third transport component 33 absorbs the front area 210 of the A substrate 240. After the third transport component 33 absorbs the front area 210 of the A substrate 240, the first transport component 31 can continue to absorb the rear area 230 of the A substrate 240 or release the rear area 230 of the A substrate 240.

[0065] After releasing the front area 210 of the A substrate 240, the second transport assembly 32 can move to the first transport assembly 31 to a preset position and vacate the front area 210 of the A substrate 240, and then reverse to reach the same moving speed as the first transport assembly 31. Alternatively, after releasing the front area 210 of the A substrate 240, the second transport assembly 32 reduces the moving speed or stops moving to vacate the front area 210 of the A substrate 240, and then reaches the same moving speed as the first transport assembly 31. Figure 6 In some embodiments, the front area 210 of the substrate 200 and the rear area 230 of the substrate 200 may include a middle area 220. After the second transport component 32 releases the front area 210 of the A substrate 240, the second transport component 32 can reach the middle area 220 of the A substrate 240 and reach the same moving speed as the first transport component 31. Then, the second transport component 32 can absorb the middle area 220 of the A substrate 240 or release the middle area 220 of the A substrate 240.

[0066] refer to Figure 7 , when the A substrate 240 being coated completely enters the coating area 12, the next B substrate 250 to be coated can enter the loading area 11, the second transport assembly 32 and the first transport assembly 31 release the A substrate 240, the second transport assembly 32 and the first transport assembly 31 can move to the loading area 11, and the second transport assembly 32 can absorb the front area 210 of the next B substrate 250, refer to Figure 8 When the tail of the A substrate 240 moves past the measuring assembly 4, the second transport assembly 32 drives the B substrate 250 to move below the measuring assembly 4, and the measuring assembly 4 measures the surface height of the B substrate 250. Then the second transport assembly 32 drives the B substrate 250 to follow the A substrate 240 being coated and move at the same speed as the A substrate 240 being coated. In this cycle, the next substrate 200 to be coated follows the substrate 200 being coated and moves at the same speed as the substrate 200 being coated, achieving the continuity of switching between different substrates 200. The coating head 22 can continuously coat the substrate 200, shortening the production cycle of the perovskite solar cell, thereby improving the production efficiency of the coating equipment, and at the same time, each substrate 200 can be coated more evenly, improving the quality of the perovskite solar cell.

[0067] As a preferred method, when the second conveying assembly 32 drives the B substrate 250 to follow the A substrate 240 being coated, the distance between the B substrate 250 and the A substrate 240 being coated is less than or equal to the thickness of the substrate 200. In this way, on the one hand, the continuity of the transmission between the substrates 200 and 200 is achieved, and on the other hand, by controlling the size of the gap between the substrates 200 and 200, the coating liquid is prevented from hanging upside down, full coating is achieved, and the coating liquid is prevented from entering the gap due to the gap being too large, thereby causing uneven edges of the substrate 200.

[0068] As a preferred method, refer to Figure 3 The continuous coating device 100 may further include an air knife 6, which is used to blow air toward the coated substrate 200 to evaporate the solvent in the liquid film on the surface of the substrate 200, thereby drying the substrate 200. The gas may be nitrogen, air, or other protective gas, and the gas may be at room temperature or at a certain temperature. The type of gas and the temperature setting may be selected according to the specific process. Fig. 9 , Fig.10 When the tail end of the substrate 200 passes through the wind knife 6, the third transport assembly 33 can accelerate the movement to increase the distance between the dried substrate 200 and the substrate 200 to be dried, so that the adjacent substrates 200 are separated, which facilitates the transfer of the dried substrate 200.

[0069] In a specific embodiment, as the number of coating times increases, various impurities such as dust, particles, dried coating liquid, etc. may accumulate on the coating head 22. If these impurities are not removed in time, they will be mixed into the coating liquid in the subsequent coating process, resulting in uneven coating, spots, stripes and other quality problems, affecting the appearance and performance of the product. Therefore, when the number of coating times of the coating head 22 reaches a preset value, the coating head 22 can be cleaned by the coating head cleaning component 7. After the coating head 22 is cleaned, it can be pre-coated by the pre-coating component 8. The pre-coating component 8 can take away the uneven coating liquid at the front end of the coating head 22 to ensure the uniformity of the coating of the substrate 200.

[0070] As an example, the coating head cleaning component 7 and the pre-coating component 8 can be arranged on a mobile platform 81, and the mobile platform 81 can be arranged on a second guide rail 82. The mobile platform 81 can be driven by a third driving device 83 and the coating head cleaning component 7 and the pre-coating component 8 can be driven to move along the second guide rail 82. The third driving device 83 can be a linear motor. Specifically, when the coating head 22 needs to be cleaned, the third driving device 83 can drive the mobile platform 81 to move to a predetermined position along the second guide rail 82, and then the coating head 22 is lowered to the cleaning position, and the coating head cleaning component 7 cleans the coating head 22. When the coating head 22 needs to be pre-coated, for example, after the cleaning component cleans the coating head 22, the third driving device 83 drives the mobile platform 81 to move to a predetermined position along the second guide rail 82, and then the coating head 22 is lowered to the pre-coating position, and the coating head 22 is pre-coated by the pre-coating component 8.

[0071] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A continuous coating device, characterized in that: include: A loading platform, the loading platform is used to load the substrate, and the loading platform includes a loading area, a coating area and a unloading area for the substrate to pass through in sequence; A coating assembly, the coating assembly comprising a bracket and a coating head disposed on the bracket, the bracket being used to adjust the position of the coating head, and the coating head being used to coat the substrate located in the coating area; A plurality of conveying components, wherein the plurality of conveying components are sequentially arranged on one side or both sides of the carrier along the coating direction, the conveying components can move back and forth along the coating direction, and the conveying components are used to absorb the edge of the substrate and sequentially move the substrate from the loading area to the coating area and the unloading area; Among them, during the operation, the multiple conveying components operate independently of each other, and the multiple conveying components alternately adsorb the substrate and drive the substrate to move along the coating direction. Before the coating head completes coating the A substrate located in the coating area and driven by at least one of the conveying components, at least one of the conveying components drives the next B substrate to be coated to follow the A substrate being coated and move at the same speed as the A substrate being coated.

2. The continuous coating device according to claim 1, characterized in that: The loading area is provided with a first air flotation component, and the first air flotation component is used to form a positive pressure under the substrate and make the substrate float in the loading area; The coating area is provided with a second air flotation component, the second air flotation component is used to simultaneously form positive pressure and negative pressure under the substrate and to suspend the substrate in the coating area, the positive pressure and the negative pressure form an air film, and the air film is used to adjust the height of the substrate; The unloading area is provided with a third air flotation component, and the third air flotation component is used to form a positive pressure below the substrate and make the substrate float in the unloading area.

3. The continuous coating device according to claim 1, characterized in that: It also includes a measuring component, which is arranged above the supporting platform and is used to measure the surface height of the substrate. The coating head is located between the measuring component and the unloading area.

4. The continuous coating device according to claim 3, characterized in that: When the number of the conveying components is three, the three conveying components include a first conveying component, a second conveying component and a third conveying component sequentially distributed along the coating direction; The substrate is divided into a front area and a rear area in sequence in the opposite direction of the coating direction, the first transport assembly is used to absorb the rear area of ​​the substrate, and the second transport assembly and the third transport assembly are used to alternately absorb the front area of ​​the substrate.

5. The continuous coating device according to claim 4, characterized in that: When the substrate A is located in the loading area, the second transport component absorbs the front area of ​​the substrate A and moves the substrate A to the bottom of the measuring component, the measuring component measures the surface height of the substrate A, and the coating head moves to a predetermined position according to the test data of the measuring component; When the second transport component drives the substrate A to move below the coating head, the coating head coats the substrate A. After the first transport component absorbs the rear area of ​​the substrate A, the second transport component releases the front area of ​​the substrate A, and then the third transport component absorbs the front area of ​​the substrate A. When the A substrate being coated completely enters the coating area, the next B substrate to be coated enters the loading area, the second transport assembly and the first transport assembly move to the loading area, the second transport assembly absorbs the front area of ​​the next B substrate and drives the B substrate to move under the measuring assembly, the measuring assembly measures the surface height of the B substrate, and then the second transport assembly drives the B substrate to follow the A substrate being coated and move at the same speed as the A substrate being coated.

6. The continuous coating device according to claim 5, characterized in that: When the second transport assembly drives the B substrate to follow the A substrate being coated, the distance between the B substrate and the A substrate being coated is less than or equal to the thickness of the substrates.

7. The continuous coating device according to claim 1, characterized in that: The coating assembly further includes a first driving device, which is disposed on the bracket and is used to drive the coating head to move up and down; and / or, The coating assembly further comprises a balancing device, which is arranged on the bracket and is used for applying a force in the direction opposite to the gravity to the coating head.

8. The continuous coating device according to claim 1, characterized in that: It also includes a first guide rail and a second driving device, wherein the second driving device is used to drive the transport assembly to move back and forth along the first guide rail in the coating direction; and / or, it also includes a liquid supply system, wherein the liquid supply system is connected to the coating head and provides the coating head with coating liquid; and / or, The device also includes an air knife, which is used to blow air toward the coated substrate to evaporate the solvent in the liquid film on the surface of the substrate.

9. The continuous coating device according to claim 1, characterized in that: It also includes a coating head cleaning component, the coating head cleaning component is used to clean the coating head; and / or, It also includes a pre-coating component, which is used for the coating head to perform pre-coating.

10. The continuous coating device according to claim 9, characterized in that: The coating head cleaning component and the pre-coating component are arranged on a mobile platform, and the mobile platform is arranged on a second guide rail. The mobile platform is driven by a third driving device to drive the coating head cleaning component and the pre-coating component to move along the second guide rail; When the coating head needs to be cleaned, the third driving device drives the movable platform to move along the second guide rail to a predetermined position so that the coating head cleaning assembly cleans the coating head; When the coating head needs pre-coating, the third driving device drives the movable platform to move to a predetermined position along the second guide rail, so that the pre-coating assembly provides pre-coating for the coating head.

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