A negative pressure collecting device for silicon micro powder

Abstract

The present application relates to the technical field of silicon powder collection, in particular to a negative pressure collection device for silicon powder, which comprises a negative pressure tank and a collection box, and a negative pressure pumping device is arranged on the inner side of the negative pressure tank; the negative pressure pumping device comprises a ring cylinder fixed on the inner side of the negative pressure tank, and a plurality of negative pressure cavities are arranged on the side wall of the ring cylinder in an up-down opening mode. The anti-blocking spring arranged on the inner side of the conveying hose can be radially swung under the action of airflow impact when the high-speed airflow drives the silicon powder to flow through the inner side of the conveying hose at a high speed, the anti-blocking spring drives the plurality of spring sleeves on the outer side to be radially swung, and each spring sleeve drives the plurality of anti-blocking spikes on the outer side to be swung, so that the caked silicon powder can be crushed when each anti-blocking spike is swung, thereby further avoiding the caked silicon powder from being blocked in the inner side of the conveying hose, and the use reliability of the device is further improved.

Description

Technical Field

[0001] This invention relates to the field of silicon micropowder collection technology, and in particular to a negative pressure collection device for silicon micropowder. Background Technology

[0002] Silicon carbide micropowder is an engineering processing material used in the solar photovoltaic, semiconductor, and piezoelectric crystal industries. With technological advancements, the demands on new materials are increasing. Since silicon carbide micropowder can be recycled and reused, it is necessary to use recycling equipment to recover it.

[0003] A search revealed Chinese patent CN208732131U, which discloses a negative pressure collection device for silicon micropowder, comprising a collection tank. A cyclone dust collector, a bag dust collector, and a tank top dust collector are sequentially fixedly installed on the top of the collection tank. An installation block is fixedly installed on the top of the tank top dust collector, and a negative pressure fan is fixedly installed on the top of the installation block. A support plate is fixedly installed on one side of the collection tank, and an aeration fan, a support block, and a motor are sequentially fixedly installed on the top of the support plate. A feeding pipe is fixedly installed on the top of the support block.

[0004] Based on the above search and combined with the actual problems, it was found that: existing devices use airflow generated by negative pressure to transport and collect silicon micropowder. Since the negative pressure cannot change significantly instantaneously, the airflow velocity cannot fluctuate significantly. When the transport distance is long, it is easy to cause blockage in the transport pipeline. The aforementioned comparative document uses a feed rod with threaded protrusions to transport silicon micropowder. Although it can effectively avoid blockage in the transport pipeline, it significantly reduces the transport speed, thereby reducing the collection efficiency of silicon micropowder. Summary of the Invention

[0005] The purpose of this invention is to provide a negative pressure collection device for silicon micropowder to solve the problems mentioned in the background art.

[0006] The technical solution of the present invention is: a negative pressure collection device for silicon micropowder, comprising a negative pressure tank and a collection box, wherein a negative pressure pump is provided on the inner side of the negative pressure tank; the negative pressure pump includes an annular cylinder fixed on the inner side of the negative pressure tank, the side wall of the annular cylinder having multiple negative pressure chambers with upper and lower openings, each negative pressure chamber having an upper blocking block movably disposed at the upper opening on the inner side, and a triggering mechanism for driving each upper blocking block to move up and down sequentially between each upper blocking block and the annular cylinder, the outer side of the annular cylinder being connected to a suction mechanism, and the lower end of each negative pressure chamber being provided with a lower sealing mechanism; the suction mechanism includes a suction cylinder disposed on the outer side of the negative pressure tank, a sliding plate movably disposed on the inner side of the suction cylinder, and one end of the suction cylinder being connected to an exhaust pipe and a suction pipe, one end of the suction pipe being connected to a gas collecting shell located on the inner side of the annular cylinder, the gas collecting shell being connected to the inner side of each negative pressure chamber through multiple suction branch pipes respectively.

[0007] Preferably, the triggering mechanism includes a geared motor installed inside the ring cylinder, a fixing block fixed to the upper end of each upper block, and a support block fixed at the upper end of the ring cylinder corresponding to the position of each upper block. The drive end of the geared motor is fixed with a rotating shaft, and one end of the rotating shaft is fixed with a trigger rod. A guide groove is provided on the upper side of the trigger rod. Each fixing block has a positioning hole inside, and each support block has a fixing pin that is adapted to the inside of the positioning hole through which it is slidably connected. One end of each fixing pin is inserted with a sliding pin that is slidably connected to the inside of the guide groove.

[0008] Preferably, the guide groove includes a first arc-shaped groove, two second arc-shaped grooves, and two oblique arc-shaped grooves formed on the upper side of the trigger rod. The two ends of the first arc-shaped groove are respectively connected to one end of the two oblique arc-shaped grooves, and one end of the two second arc-shaped grooves are respectively connected to the other end of the two oblique arc-shaped grooves. The diameter of the first arc-shaped groove is smaller than the diameter of the second arc-shaped groove.

[0009] Preferably, a bracket is fixed to the inner side of each negative pressure chamber, a guide rod is fixed to the lower end of each upper block through which the guide rod is inserted, and the lower end of each upper block is elastically connected to the upper side of the bracket at the corresponding position by a spring.

[0010] Preferably, the suction mechanism further includes a negative pressure motor installed at one end of the suction cylinder and an internally threaded cylinder fixed to one side of the slide plate. The drive end of the negative pressure motor is fixed with a screw, which is connected to the inside of the internally threaded cylinder by a threaded connection. One-way valves are installed on the inside of the exhaust pipe and the multiple suction branch pipes.

[0011] Preferably, a plurality of sleeve rods are fixed on one side of the slide plate, and a slide rod is slidably inserted into one end of each sleeve rod, and one end of each slide rod is fixedly connected to one end of the inner side of the suction cylinder.

[0012] Preferably, the lower sealing mechanism includes multiple cylinders installed at the lower end of the inner side of the negative pressure tank. A bracket is fixed to the telescopic end of the multiple cylinders, and a matching lower sealing block is fixed on the upper side of the bracket at the position corresponding to the lower opening of each negative pressure chamber.

[0013] Preferably, the lower end of the negative pressure tank is connected to the inside of the collection box, and the upper end of the negative pressure tank is connected to a conveying hose, one end of which is connected to a feed hopper.

[0014] Preferably, multiple spring frames are fixed at equal intervals on the inner side of the delivery hose, and an anti-blocking spring is provided through the multiple spring frames. Multiple spring sleeves are provided at equal intervals on the outer side of the anti-blocking spring. Multiple anti-blocking spikes arranged in a circular pattern are fixed on the outer side of each of the multiple spring sleeves, and the multiple spring sleeves are staggered with the multiple spring frames.

[0015] Preferably, a discharge pipe is provided on the lower side of the collection box, and a pipe end cap is threadedly installed at the lower end of the discharge pipe.

[0016] The present invention provides an improved negative pressure collection device for silicon micropowder, which has the following improvements and advantages compared with the prior art:

[0017] Firstly, this invention uses an air extraction mechanism to extract air from multiple negative pressure chambers of the negative pressure pump, creating a negative pressure state inside. Then, a triggering mechanism drives multiple upper blocking blocks to move downwards sequentially, thereby connecting each negative pressure chamber to the inside of the negative pressure tank. The air pressure inside and outside the negative pressure tank is balanced, so outside air will flow rapidly from the feed hopper to the inside of the conveying hose under the action of the air pressure difference. Then, it will flow rapidly into the inside of each negative pressure chamber through one end of the conveying hose. The rapidly flowing air can have an impact effect, which can quickly transport the silicon micro powder put into the inside of the feed hopper to the inside of the negative pressure chamber. This not only greatly increases the collection speed of silicon micro powder and improves the collection efficiency, but also effectively avoids the silicon micro powder from clogging the inside of the conveying hose under the impact of the airflow, thus improving the reliability of the device.

[0018] Secondly, this invention utilizes an anti-clogging spring installed inside the conveying hose. When a high-speed airflow carries silicon micropowder rapidly through the inside of the conveying hose, the anti-clogging spring will oscillate radially under the impact of the airflow. The anti-clogging spring, in turn, causes multiple spring sleeves on the outside to oscillate radially. Each spring sleeve then causes multiple anti-clogging spikes on the outside to oscillate. Each anti-clogging spike can pulverize the agglomerated silicon micropowder, thereby further preventing the agglomerated silicon micropowder from clogging the inside of the conveying hose and further improving the reliability of the device. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a schematic diagram of the internal structure of the negative pressure tank and suction cylinder in this invention;

[0022] Figure 3 This is a cross-sectional view of the negative pressure pump suction device in this invention;

[0023] Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A;

[0024] Figure 5 This is a schematic diagram of the upper blockage in the negative pressure pump suction device of the present invention in the state of downward movement;

[0025] Figure 6 This is a schematic diagram of the disassembled structure of the trigger rod in this invention;

[0026] Figure 7 This is a cross-sectional view of the delivery hose in this invention;

[0027] Figure 8 For the present invention Figure 7 A magnified structural diagram at point B in the middle.

[0028] Figure label:

[0029] 1. Negative pressure tank; 2. Collection box; 3. Conveying hose; 4. Feed hopper; 5. Discharge pipe; 6. Pipe end cap; 101. Ring cylinder; 102. Negative pressure chamber; 103. Support; 104. Guide rod; 105. Spring; 106. Upper plug; 107. Gear motor; 108. Rotating shaft; 109. Trigger rod; 110. Guide groove; 111. Support block; 112. Fixing pin; 113. Sliding pin; 114. Fixing block; 115. Positioning hole; 201. Suction cylinder; 202. Negative pressure chamber 203. Pneumatic motor; 204. Screw; 205. Slide plate; 206. Internal threaded cylinder; 207. Slide rod; 208. Exhaust pipe; 209. Suction pipe; 210. Gas collecting shell; 211. Suction branch pipe; 301. Cylinder; 302. Bracket; 303. Lower block; 401. Spring frame; 402. Anti-blocking spring; 403. Spring sleeve; 404. Anti-blocking spike; 1101. First arc groove; 1102. Second arc groove; 1103. Oblique arc groove. Detailed Implementation

[0030] The present invention will now be described in detail, and the technical solutions in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] This invention provides an improved negative pressure collection device for silicon micropowder. The technical solution of this invention is as follows:

[0032] like Figures 1 to 8 As shown, this embodiment of the invention provides a negative pressure collection device for silicon micropowder, including a negative pressure tank 1 and a collection box 2. A negative pressure pump is provided inside the negative pressure tank 1. The lower end of the negative pressure tank 1 is connected to the inside of the collection box 2, and the upper end of the negative pressure tank 1 is connected to a conveying hose 3. One end of the conveying hose 3 is connected to a feed hopper 4. The negative pressure pump includes an annular cylinder 101 fixed inside the negative pressure tank 1. The side wall of the annular cylinder 101 has multiple negative pressure chambers 102 with upper and lower openings. Each negative pressure chamber 102 has an upper blocking block 106 movably disposed at the upper opening on the inner side. Each upper blocking block 106 and the annular cylinder 101 are connected to each other. A triggering mechanism is provided to drive each upper block 106 to move up and down sequentially. An air extraction mechanism is connected to the outside of the annular cylinder 101, and a lower sealing mechanism is provided at the lower end of each negative pressure chamber 102. The air extraction mechanism includes a suction cylinder 201 located outside the negative pressure tank 1. A sliding plate 204 is movably provided on the inside of the suction cylinder 201. One end of the suction cylinder 201 is connected to an exhaust pipe 208 and a suction pipe 209. One end of the suction pipe 209 is connected to a gas collecting shell 210 located inside the annular cylinder 101. The gas collecting shell 210 is connected to the inside of each negative pressure chamber 102 through multiple suction branch pipes 211.

[0033] Furthermore, the triggering mechanism includes a reduction motor 107 installed inside the ring cylinder 101, a fixing block 114 fixed to the upper end of each upper block 106, and a support block 111 fixed to the upper end of the ring cylinder 101 corresponding to the position of each upper block 106. The drive end of the reduction motor 107 is fixed with a rotating shaft 108, and one end of the rotating shaft 108 is fixed with a trigger rod 109. A guide groove 110 is provided on the upper side of the trigger rod 109. Each fixing block 114 has a positioning hole 115 inside, and each support block 111 has a sliding connection that is adapted to the inner side of the positioning hole 115. The fixing pins 112 are provided with a sliding pin 113 inserted at one end of each fixing pin 112 and slidably connected to the inner side of the guide groove 110. The guide groove 110 includes a first arc-shaped groove 1101, two second arc-shaped grooves 1102 and two oblique arc-shaped grooves 1103 opened on the upper side of the trigger rod 109. The two ends of the first arc-shaped groove 1101 are respectively connected to one end of the two oblique arc-shaped grooves 1103, and one end of the two second arc-shaped grooves 1102 are respectively connected to the other end of the two oblique arc-shaped grooves 1103. The diameter of the first arc-shaped groove 1101 is smaller than the diameter of the second arc-shaped groove 1102.

[0034] The triggering mechanism is used to drive each upper block 106 to move down and then move up again to reset, so that each negative pressure chamber 102 can be connected to the inside of the negative pressure tank 1 in sequence, so that the outside air can flow into the inside of the delivery hose 3 in segments, achieving a multi-segment jet impact effect, and further preventing the inside of the delivery hose 3 from becoming blocked.

[0035] Furthermore, a bracket 103 is fixed inside each negative pressure chamber 102, and a guide rod 104 that penetrates and is inserted into the bracket 103 is fixed at the lower end of each upper block 106. The lower end of each upper block 106 is elastically connected to the upper side of the bracket 103 at the corresponding position through a spring 105.

[0036] The upper block 106 can be moved upward and reset by the spring 105. After the air pressure inside and outside the negative pressure chamber 102 is balanced, the upper opening of the negative pressure chamber 102 can be sealed again to prevent the sucked-in silicon powder from drifting out again.

[0037] Furthermore, the suction mechanism also includes a negative pressure motor 202 installed on one side of the suction cylinder 201, and an internally threaded cylinder 205 fixed on one side of the slide plate 204. The drive end of the negative pressure motor 202 is fixed with a screw 203, which is connected to the inside of the internally threaded cylinder 205 by a threaded rotation. One-way valves are installed on the inside of the exhaust pipe 208 and multiple suction branch pipes 211. Multiple sleeve rods 207 are fixed on one side of the slide plate 204. A slide rod 206 is slidably inserted into one end of each sleeve rod 207, and one end of each slide rod 206 is fixedly connected to one end of the inner side of the suction cylinder 201.

[0038] The air extraction mechanism is used to extract the air from the multiple negative pressure chambers 102 in the negative pressure pump suction device, so that the multiple negative pressure chambers 102 form a negative pressure state, thereby facilitating the collection of silicon micro powder.

[0039] Furthermore, the lower sealing mechanism includes multiple cylinders 301 installed at the lower end of the inner side of the negative pressure tank 1. A bracket 302 is fixed at the telescopic end of the multiple cylinders 301. A lower blocking block 303 that is adapted to each lower opening of each negative pressure chamber 102 is fixed on the upper side of the bracket 302.

[0040] After each negative pressure chamber 102 returns to a state of equilibrium with the external air pressure from a negative pressure state, silicon micropowder is collected inside each negative pressure chamber 102. Then, the telescopic ends of multiple cylinders 301 of the lower sealing mechanism are retracted, causing the bracket 302 to move downward. The bracket 302 causes multiple lower blocking blocks 303 on the upper side to move downward and separate from the lower opening of the negative pressure chamber 102, so that the silicon micropowder collected inside each negative pressure chamber 102 falls into the inside of the collection box 2 under the action of gravity, thereby collecting the silicon micropowder inside the collection box 2.

[0041] Furthermore, multiple spring frames 401 are fixed at equal intervals on the inner side of the delivery hose 3, and an anti-blocking spring 402 is provided through the multiple spring frames 401. Multiple spring sleeves 403 are provided at equal intervals on the outer side of the anti-blocking spring 402, and multiple anti-blocking spikes 404 arranged in a circular pattern are fixed on the outer side of each of the multiple spring sleeves 403. The multiple spring sleeves 403 are staggered with the multiple spring frames 401 respectively.

[0042] When the high-speed airflow carries the silicon powder through the inside of the conveying hose 3, the anti-blocking spring 402 will oscillate radially under the impact of the airflow. The anti-blocking spring 402 will cause multiple spring sleeves 403 on the outside to oscillate radially. Each spring sleeve 403 will cause multiple anti-blocking spikes 404 on the outside to oscillate. When each anti-blocking spike 404 oscillates, it can crush the agglomerated silicon powder, thereby further preventing the agglomerated silicon powder from clogging the inside of the conveying hose 3 and further improving the reliability of the device.

[0043] Furthermore, a discharge pipe 5 is provided on the lower side of the collection box 2, and a pipe end cap 6 is installed at the lower end of the discharge pipe 5 by means of threads.

[0044] By rotating and removing the tube end cap 6, the silicon powder inside the collection box 2 can be unloaded through the discharge pipe 5.

[0045] Working principle: During use, the feed hopper 4 can be moved to any position through the flexible conveying hose 3. The residual silicon powder generated at different positions in the production line is put into the inner side of the feed hopper 4. Then, the device is started, and the telescopic ends of multiple cylinders 301 of the lower sealing mechanism are extended simultaneously, driving the bracket 302 to move upward. The bracket 302 drives multiple lower blocking blocks 303 on the upper side to move upward, so that each lower blocking block 303 is inserted into the lower opening of each negative pressure chamber 102 at the corresponding position, thereby sealing the lower opening of the negative pressure chamber 102. Each upper blocking block 106 is pushed upward by the elastic force of the spring 105 at the lower end, so that each upper blocking block 106 can be pressed against the upper opening of the negative pressure chamber 102, thereby sealing the upper opening of the negative pressure chamber 102.

[0046] Then, the negative pressure motor 202 of the suction mechanism drives the screw 203 to rotate. The screw 203 drives the internal threaded cylinder 205 to move through its thread. The internal threaded cylinder 205 first drives the slide plate 204 to move towards the end where the exhaust pipe 208 is located, discharging the air inside the suction cylinder 201 outward through the exhaust pipe 208. The one-way valve inside the exhaust pipe 208 is directed towards the outside of the suction cylinder 201. After the air inside the suction cylinder 201 is discharged, the negative pressure motor 202 drives the screw 203 to reverse, thereby driving the internal threaded cylinder 205 to reverse. The internal threaded cylinder 205 drives the slide plate 204 to move, causing the slide plate to... 204 moves towards the end of the suction cylinder 201 near the negative pressure motor 202, thereby increasing the space at the end of the suction cylinder 201 near the suction pipe 209, thus creating a negative pressure in the space near the suction pipe 209. Since the conduction direction of the one-way valve inside each suction branch pipe 211 is pointing towards the inside of the gas collecting shell 210, the air inside each negative pressure chamber 102 flows into the inside of the gas collecting shell 210 through multiple suction branch pipes 211, and then flows into the inside of the suction cylinder 201 of the suction mechanism through the suction pipe 209, thereby creating a high negative pressure state inside each negative pressure chamber 102.

[0047] Then, the reduction motor 107 controlling the trigger mechanism drives the rotating shaft 108 to rotate. The rotating shaft 108 drives the trigger rod 109 and guide groove 110 at its upper end to rotate at a low and uniform speed. The reduction motor 107 can drive the trigger rod 109 and guide groove 110 to rotate one revolution each time, so that the guide groove 110 on the upper side of the trigger rod 109 can pass through the position of the sliding pin 113 at one end of each fixed pin 112 in sequence. A second arc-shaped groove 1102 located at one end of the guide groove 110 first contacts the sliding pin 113. As the trigger rod 109 drives the guide groove 110 to continue rotating, the sliding pin 113 will pass through the inner side of the second arc-shaped groove 1102 through a connected oblique arc-shaped groove 110. 3. Slide into the inner side of the first arc-shaped groove 1101. Since the diameter of the first arc-shaped groove 1101 is smaller than the diameter of the second arc-shaped groove 1102, when the sliding pin 113 slides from the second arc-shaped groove 1102 into the inner side of the first arc-shaped groove 1101, the corresponding fixing pin 112 can be driven to slide along the inside of the support block 111 through the sliding pin 113, so that one end of the fixing pin 112 protrudes from the inner side of the corresponding positioning hole 115, thereby releasing the locking of the upper block 106 at this position. Under the action of the air pressure difference inside and outside the negative pressure chamber 102, the upper block 106 will move downward quickly and compress the spring 105, thereby connecting the upper opening of the negative pressure chamber 102 with the inner side of the negative pressure tank 1. The inner side of the pressure tank 1 is connected to the outside through the conveying hose 3. Therefore, outside air will flow rapidly from the feed hopper 4 into the inner side of the conveying hose 3 under the action of air pressure difference, and then flow rapidly into the inner side of the negative pressure chamber 102 through one end of the conveying hose 3. The rapidly flowing air can have an impact effect, which can quickly transport the silicon powder put into the inner side of the feed hopper 4 to the inner side of the negative pressure chamber 102. This not only greatly increases the collection speed of silicon powder and improves the collection efficiency, but also effectively avoids the silicon powder from clogging the inner side of the conveying hose 3 under the impact of airflow, thus improving the reliability of the device. As the trigger rod 109 and the guide groove 110 continue to rotate, the sliding pin will... 113 slides from the inside of the first arc-shaped groove 1101 through another oblique arc-shaped groove 1103 into the inside of another second arc-shaped groove 1102, thereby pushing the fixing pin 112 to move in the opposite direction. As outside air flows into the inside of the negative pressure chamber 102 quickly, the pressure inside the negative pressure chamber 102 and the negative pressure tank 1 is rebalanced. When the pressure inside and outside the negative pressure chamber 102 returns to balance, the upper block 106 will be pushed to move upward again under the elastic force of the spring 105 to seal the negative pressure chamber 102. At the same time, the positioning hole 115 is aligned with the fixing pin 112. When the fixing pin 112 moves in the opposite direction, it can be reinserted into the inside of the positioning hole 115 to lock the upper block 106 again.

[0048] Then, the trigger rod 109 drives the guide groove 110 to continue rotating. Based on the above principle, when the trigger rod 109 drives the guide groove 110 to rotate one revolution, it can drive each fixed pin 112 to extend out from the inside of each positioning hole 115 and then reinsert it, so that each upper block 106 moves down and then moves up again to reset. This allows each negative pressure chamber 102 to connect with the inside of the negative pressure tank 1 in sequence, so that the outside air can flow into the inside of the conveying hose 3 in segments, achieving a multi-segment jet impact effect. This further avoids blockage on the inside of the conveying hose 3. Moreover, through multiple jet impacts, the small amount of silicon powder adhering to the inside of the feed hopper 4 and the conveying hose 3 can be fully conveyed to the inside of each negative pressure chamber 102, reducing the loss of silicon powder during the collection process.

[0049] After the trigger rod 109 and guide groove 110 rotate one revolution, each negative pressure chamber 102 returns from the negative pressure state to the state of equilibrium with the external air pressure. Then, the telescopic ends of multiple cylinders 301 of the lower sealing mechanism are retracted, which drives the bracket 302 to move down. The bracket 302 drives multiple lower blocking blocks 303 on the upper side to move down and separate from the lower opening of the negative pressure chamber 102, so that the silicon powder collected inside each negative pressure chamber 102 falls into the inside of the collection box 2 under the action of gravity, thus collecting the silicon powder inside the collection box 2. By rotating and removing the tube end cap 6, the silicon powder collected inside the collection box 2 can be unloaded through the discharge pipe 5.

[0050] It should be noted that during the operation of the negative pressure motor 202 of the suction mechanism, each lower block 303 blocks the lower opening of the negative pressure chamber 102, and each upper block 106 blocks the upper opening of the negative pressure chamber 102. The function of the suction mechanism is to create negative pressure in the negative pressure chamber 102 without sucking away the silicon powder. When the upper block 106 moves downward rapidly, the negative pressure motor 202 of the suction mechanism stops, and at this time the suction branch pipe 211 is equivalent to a closed valve state.

[0051] An anti-clogging spring 402 is provided on the inner side of the conveying hose 3. When the high-speed airflow carries the silicon micro powder through the inner side of the conveying hose 3, the anti-clogging spring 402 will swing radially under the impact of the airflow. The anti-clogging spring 402 drives multiple spring sleeves 403 on the outer side to swing radially. Each spring sleeve 403 drives multiple anti-clogging spikes 404 on the outer side to swing. When each anti-clogging spike 404 swings, it can crush the agglomerated silicon micro powder, thereby further preventing the agglomerated silicon micro powder from clogging the inner side of the conveying hose 3 and further improving the reliability of the device.

[0052] The foregoing description enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for collecting silicon micro-powder under negative pressure, comprising a negative pressure tank (1) and a collecting box (2), characterized in that, The inner side of the negative pressure tank (1) is provided with a negative pressure pumping device; The negative pressure pumping device comprises a ring cylinder (101) fixed on the inner side of the negative pressure tank (1), a plurality of upper and lower opening negative pressure cavities (102) are formed in the side wall of the ring cylinder (101), an upper blocking piece (106) is movably arranged on the inner side of each negative pressure cavity (102) at the upper opening, a trigger mechanism is arranged between each upper blocking piece (106) and the ring cylinder (101) for driving each upper blocking piece (106) to move up and down in sequence, an air extraction mechanism is connected to the outer side of the ring cylinder (101), and a lower blocking mechanism is arranged at the lower end of each negative pressure cavity (102); The air extraction mechanism comprises a suction cylinder (201) arranged on the outer side of the negative pressure tank (1), a sliding plate (204) is movably arranged on the inner side of the suction cylinder (201), one end of the suction cylinder (201) is connected with an exhaust pipe (208) and an air extraction pipe (209), one end of the air extraction pipe (209) is connected with a gas collecting spherical shell (210) arranged on the inner side of the ring cylinder (101), and the gas collecting spherical shell (210) is in communication with the inner side of each negative pressure cavity (102) through a plurality of air extraction branch pipes (211); The trigger mechanism comprises a speed reducer motor (107) installed on the inner side of the ring cylinder (101), a fixed block (114) fixed on the upper end of each upper blocking piece (106), and a support block (111) fixed on the upper end of the ring cylinder (101) at a position corresponding to each upper blocking piece (106), a rotating shaft (108) is fixed to the driving end of the speed reducer motor (107), one end of the rotating shaft (108) is fixed with a trigger lever (109), a guide groove (110) is arranged on the upper side of the trigger lever (109), a positioning hole (115) is formed in the inner side of each fixed block (114), a fixed pin (112) matched with the inner side of the positioning hole (115) is slidably connected in the inner side of each support block (111), and one end of each fixed pin (112) is inserted with a sliding pin (113) slidably connected with the inner side of the guide groove (110); The guide groove (110) comprises a first arc-shaped groove (1101) formed on the upper side of the trigger lever (109), two second arc-shaped grooves (1102), and two inclined arc-shaped grooves (1103), the two ends of the first arc-shaped groove (1101) are connected with one end of the two inclined arc-shaped grooves (1103) respectively, one end of the two second arc-shaped grooves (1102) is connected with the other end of the two inclined arc-shaped grooves (1103) respectively, and the diameter of the first arc-shaped groove (1101) is smaller than that of the second arc-shaped groove (1102); A support (103) is fixed on the inner side of each negative pressure cavity (102), a guide rod (104) is fixed on the lower end of each upper blocking piece (106) and inserted into the inner side of the support (103), and the lower end of each upper blocking piece (106) is elastically connected with the upper side of the support (103) at the corresponding position through a spring (105).

2. The device for collecting silicon fine powder under negative pressure according to claim 1, characterized in that: The air extraction mechanism further comprises a negative pressure motor (202) installed at one end outside the suction cylinder (201), an internally threaded cylinder (205) fixed at one side of the sliding plate (204), a screw rod (203) fixed at the driving end of the negative pressure motor (202), the screw rod (203) being threadedly connected to the inside of the internally threaded cylinder (205), and one-way valves installed at the inside of the exhaust pipe (208) and the plurality of air extraction branch pipes (211).

3. The device for collecting silicon fine powder under negative pressure according to claim 2, characterized in that: One side of the sliding plate (204) is fixed with a plurality of sleeve rods (207), one end of each of the sleeve rods (207) being slidably inserted with a slide rod (206), one end of each of the slide rods (206) being fixedly connected to one end of the inside of the suction cylinder (201).

4. The device for collecting silicon fine powder under negative pressure according to claim 1, characterized in that: The lower blocking mechanism comprises a plurality of air cylinders (301) installed at the lower end of the inside of the negative pressure tank (1), a bracket (302) fixed at the telescopic end of each of the air cylinders (301), and a lower blocking block (303) fixed at the upper side of the bracket (302) corresponding to the position of the lower opening of each negative pressure chamber (102).

5. The device for collecting silicon fine powder under negative pressure according to claim 1, characterized in that: The lower end of the negative pressure tank (1) is in communication with the inside of the collection box (2), and the upper end of the negative pressure tank (1) is connected with a conveying hose (3), one end of the conveying hose (3) being connected with a feed hopper (4).

6. The device for collecting silicon fine powder under negative pressure according to claim 5, characterized in that: The inside of the conveying hose (3) is fixed with a plurality of spring frames (401) at equal intervals, an anti-blocking spring (402) being arranged between the plurality of spring frames (401), a plurality of spring sleeves (403) being arranged at equal intervals on the outside of the anti-blocking spring (402), a plurality of anti-blocking spikes (404) being arranged in a circumferential manner on the outside of each of the spring sleeves (403), and the plurality of spring sleeves (403) and the plurality of spring frames (401) being arranged in an interleaved manner.

7. The device for collecting silicon fine powder under negative pressure according to claim 1, characterized in that: The lower side of the collection box (2) is provided with a discharge pipe (5), and a pipe end cover (6) is threadedly installed at the lower end of the discharge pipe (5).

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