A flexible parallel platform with integrated directional vibration isolation

Abstract

The present invention relates to the field of spacecraft technology, and specifically provides a flexible parallel platform with integrated pointing and vibration isolation, comprising a fixed platform component, a moving platform component and six voice coil motor actuator components, wherein the voice coil motor actuator component is fixed to the fixed platform through an actuator fixing seat, and the other end of the voice coil motor actuator component is fixed to the moving platform through a hinge seat, and the voice coil motor actuator component adopts a flexible biaxial hinge and a flexible triaxial hinge to replace a traditional rigid rotary hinge, and each voice coil motor actuator component includes a grating scale system and a force sensor, and closed-loop feedback of the flexible biaxial hinge, the flexible triaxial hinge, the voice coil motor and the three sensors is realized, thereby realizing micro-vibration isolation of six degrees of freedom and high-precision tracking and pointing, overcoming the influence of the traditional hinge rotation gap on micro-vibration isolation and high-precision pointing, and improving the pointing accuracy of the flexible parallel platform.

Description

Technical Field

[0001] The invention relates to the technical field of spacecraft, and specifically provides a flexible parallel platform with integrated directional vibration isolation. Background Art

[0002] Large-aperture spliced ​​space telescopes have the advantages of large light-collecting area, high resolution, strong observation capability, replaceable components, and simple maintenance. They can break through the limitations of the launch vehicle's carrying capacity and the envelope space in the payload cabin fairing. They are becoming the only choice for human exploration of the universe and are increasingly valued by research teams from various countries. However, due to the influence of on-orbit assembly accuracy and changes in environmental conditions during on-orbit operation, the position of the spliced ​​unit will shift to varying degrees, and the micro-vibration generated by the motion and thermal control facilities in the telescope will greatly reduce the imaging quality of the space telescope. Large-aperture space telescopes are more sensitive to micro-vibrations due to their low structural stiffness caused by their spliced ​​structure. In order to ensure the imaging quality of the payload of the ultra-large-aperture space telescope and meet its ultra-high pointing accuracy and pointing stability requirements, it has become a trend to combine pointing and stabilization technologies and design a large-scale, high-precision integrated pointing stabilization platform, which provides important support for the development of my country's ultra-large space optical systems.

[0003] As the aperture of space optical systems increases, the structural stiffness of optical systems continues to decrease. The optical system of spliced ​​telescopes is composed of discrete modules, which will further reduce the stiffness. In this case, the structural response caused by medium and high frequency disturbances will increase significantly, becoming a key factor affecting the stability of the optical system. Compared with low-frequency disturbances, medium and high frequency disturbances are faster, wider, and more complex in source, so stable control is more difficult. The above two aspects make the suppression of medium and high frequency disturbances a major challenge in the development of large-aperture optical systems of spliced ​​primary mirrors. The six-degree-of-freedom parallel precision adjustment platform plays an important role in the adjustment process of optical components of large optical telescopes due to its high precision, no accumulated error and high stiffness. However, the driving method of traditional motors and lead screw nuts cannot meet the requirements of micro-vibration isolation. The vibration isolation platform is limited by the actuator stroke or the motion range of the flexible component, and cannot provide a large range of working space to meet the needs of a wide range of pointing. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a flexible parallel platform with integrated pointing and vibration isolation, which is equipped with a flexible two-axis hinge, a flexible three-axis hinge and a voice coil motor, so that the flexible parallel platform can achieve six degrees of freedom and meet the platform's large-range pointing tracking requirements.

[0005] The flexible parallel platform with integrated directional vibration isolation provided by the present invention comprises:

[0006] a moving platform assembly, a fixed platform assembly, and six voice coil motor actuator assemblies;

[0007] Six voice coil motor actuator assemblies are arranged between the fixed platform assembly and the moving platform assembly, and any two adjacent voice coil motor actuator assemblies are perpendicular to each other;

[0008] The structures of the six voice coil motor actuator assemblies are the same, including: a flexible biaxial hinge, a flexible triaxial hinge, an upper spring leaf, a lower spring leaf, a locking mechanism, a central support rod, a spring leaf support frame and a voice coil motor;

[0009] The lower end of the flexible three-axis hinge is connected to the upper end of the flexible two-axis hinge through a force sensor, and the lower end of the flexible two-axis hinge is connected to the upper spring leaf, and the upper spring leaf and the lower spring leaf are respectively fixed to the upper and lower ends of the spring leaf support frame; the central support rod is arranged inside the spring leaf support frame, and the two ends are respectively connected to the upper spring leaf and the lower spring leaf; the locking mechanism is connected to the central support rod and fits with the inner wall of the spring leaf support frame; the output end of the voice coil motor passes through the lower spring leaf and is connected to the lower end of the central support rod.

[0010] Preferably, the moving platform assembly includes a moving platform, a first sensor group and a hinge seat;

[0011] The first sensor group and the hinge seat are respectively arranged on the upper end surface and the lower end surface of the moving platform, and an upper insulating sheet is arranged between the hinge seat and the moving platform; an upper T-shaped insulating sheet is arranged at the screw connection between the hinge seat and the moving platform;

[0012] Preferably, among the six flexible three-axis hinges, the upper ends of every two flexible three-axis hinges are connected to a hinge seat.

[0013] Preferably, there are three first sensor groups, each group includes two mutually perpendicular moving platform acceleration sensors, and the two moving platform acceleration sensors are respectively arranged along the axial direction and tangential direction of the moving platform.

[0014] Preferably, the fixed platform assembly includes a fixed platform, a second sensor group and an actuator fixing seat;

[0015] The second sensor group and the actuator fixing seat are both arranged on the upper end surface of the fixed platform, and a lower insulating sheet is arranged between the actuator fixing seat and the fixed platform; a lower T-shaped insulating sheet is arranged at the screw connection between the actuator fixing seat and the fixed platform.

[0016] Preferably, the second sensor group includes three groups, each group includes two mutually perpendicular fixed platform acceleration sensors, and the two fixed platform acceleration sensors are respectively arranged along the axial direction and tangential direction of the fixed platform.

[0017] Preferably, the flexible three-axis hinge comprises a hinge upper platform and a three-axis center column, and the lower end surface of the hinge upper platform is connected to the three-axis center column;

[0018] A third gap and a fourth gap are arranged on the three-axis central column, and a fifth gap is arranged on the hinge upper platform.

[0019] Preferably, the upper spring sheet and the lower spring sheet have the same structure, both of which are "cross" shaped.

[0020] Preferably, the locking mechanism includes a fixed beam and a deformable beam, one end of the fixed beam and the deformable beam are both connected to the central support rod, and the other end is in contact with the inner wall of the spring sheet support frame.

[0021] Preferably, the fixed beam includes a first locking piece and a first end surface, and the deformable beam includes a second locking piece and a second end surface; the first locking piece and the second locking piece wrap the central support rod, and the first locking piece and the second locking piece are connected by screws;

[0022] The first end surface and the second end surface are in contact with the inner wall of the spring sheet support frame.

[0023] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0024] The flexible parallel platform of the present invention uses the voice coil motor as a drive. Compared with the piezoelectric actuator, it has the advantages of high resolution and rapid response, and can provide millimeter-level motion stroke and higher vibration isolation bandwidth. The output force of the voice coil motor is converted into the linear displacement output of the actuator by utilizing the load-displacement characteristics of the spring sheet. In addition, the cross-shaped spring sheet can provide a good guiding effect for the voice coil motor. The flexible hinge gap adopts a contour design that combines straight lines and rounded corners, which is obtained by low-speed unidirectional wiring electrospark machining. It can provide a large range of movement while maintaining a low level of shaft drift. The two different flexible hinges can provide five degrees of freedom for the voice coil motor actuator assembly, satisfying the overall degree of freedom distribution relationship of the platform and obtaining a larger working space.

[0025] The present invention also designs a locking mechanism to realize the limiting and locking functions, which can prevent the voice coil motor actuator assembly from exceeding the movement stroke during operation, prevent irreversible damage to the flexible biaxial hinge, the flexible triaxial hinge and the upper and lower spring leaves, and lock the voice coil motor actuator assembly to prevent damage to the structure due to impact during installation and transportation.

[0026] The present invention adopts a multi-sensor fusion design. The voice coil motor actuator assembly is provided with a grating scale and a force sensor. When the grating scale moves with the central support rod, it provides displacement feedback for the voice coil motor actuator assembly. The force sensor can provide force feedback. The moving platform acceleration sensor in the moving platform assembly and the fixed platform acceleration sensor in the fixed platform assembly can provide acceleration feedback for the platform as a whole. The multi-sensor coupling design can provide a hardware foundation for a better control algorithm, better solve the pointing and vibration isolation problems in complex environments, and achieve better pointing and vibration isolation effects.

[0027] The present invention adopts the design of an insulating sheet of phenolic plastic and a T-shaped insulating gasket, which can achieve insulation between the moving platform component, the fixed platform component and the voice coil motor actuator component, prevent the voice coil motor from affecting the moving platform acceleration sensor and the fixed platform acceleration sensor, and overcome the problem of low stiffness of the insulating screw connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic diagram of the structure of a flexible parallel platform provided according to an embodiment of the present invention;

[0029] Figure 2 is a schematic diagram of a fixed platform structure provided according to an embodiment of the present invention;

[0030] Figure 3 is a schematic structural diagram of an actuator fixing seat provided according to an embodiment of the present invention;

[0031] Figure 4 is a schematic structural diagram of a voice coil motor actuator assembly provided according to an embodiment of the present invention;

[0032] Figure 5 is a cross-sectional view of a voice coil motor actuator assembly provided according to an embodiment of the present invention;

[0033] Figure 6 is a schematic diagram of a flexible three-axis hinge structure provided according to an embodiment of the present invention;

[0034] Figure 7 is a schematic diagram of a flexible biaxial hinge structure provided according to an embodiment of the present invention;

[0035] Figure 8 is a schematic diagram of a partial structure of a voice coil motor actuator assembly provided according to an embodiment of the present invention;

[0036] Fig. 9 is a schematic structural diagram of an upper spring sheet (lower spring sheet) provided according to an embodiment of the present invention;

[0037] Fig.10 is a schematic diagram of the locking mechanism and the central support rod structure provided according to an embodiment of the present invention;

[0038] Fig.11 is a schematic diagram of the installation position of the grating ruler provided according to an embodiment of the present invention;

[0039] Fig.12 is a schematic diagram of an upper end surface of a moving platform structure provided according to an embodiment of the present invention;

[0040] Fig.13 It is a schematic diagram of the lower end surface of the moving platform structure provided according to an embodiment of the present invention.

[0041] Reference numerals include:

[0042] Moving platform assembly 1, voice coil motor actuator assembly 2, fixed platform assembly 3, moving platform 11, first sensor group 12, first sensor mounting seat 121, moving platform acceleration sensor 122, hinge seat 13, upper insulating sheet 14, upper T-shaped insulating sheet 15, hinge seat mounting hole 16, flexible biaxial hinge 201, biaxial center column 2011, first gap 2012, second gap 2013, force sensor 202, upper connecting rod 2021, lower connecting rod 2022, flexible triaxial hinge 203, hinge upper platform 2031, triaxial center column 2032, third gap 2033, fourth gap 2034, fifth gap 2035, upper spring sheet 204, spring sheet center platform 2041, spring sheet center hole 2042, spring sheet support frame 205, hollow hole 2051, Spring sheet pressure ring 206, lower spring sheet 207, central support rod 208, first reducing column 2081, second reducing column 2082, fixed beam 209, first locking sheet 2091, first end face 2092, deformable beam 210, second locking sheet 2101, second end face 2102, voice coil motor 211, voice coil motor flange 2111, magnetic steel 2112, voice coil motor coil 2113, motor cabin 212, motor cabin flange 2121, grating scale 213, grating scale mounting seat 214, grating scale reading head 215, reading head mounting seat 216, fixed platform 31, second sensor group 32, second sensor mounting seat 321, fixed platform acceleration sensor 322, actuator fixing seat 33, motor cabin mounting platform 331, lower insulating sheet 34, lower T-shaped insulating sheet 35. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical scheme and advantages of the invention clearer, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and do not constitute a limitation to the invention. Similar components in different embodiments use associated similar component numbers. In the following embodiments, many detailed descriptions are to enable the invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other components, materials, and methods. In some cases, some operations related to the invention are not shown or described in the specification, in order to avoid the core part of the invention being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0044] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a necessary sequence, unless otherwise specified that a certain sequence must be followed.

[0045] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, the meaning of "multiple" is two or more.

[0046] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0047] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0048] like Figure 1 As shown, an embodiment of the present invention provides a flexible parallel platform with integrated directional vibration isolation, including a moving platform component 1, a voice coil motor actuator component 2 and a fixed platform component 3, wherein the fixed platform component 3 is arranged at the bottom, and the moving platform component 1 is arranged at the top, six voice coil motor actuator components 2 are connected between the two, and any two adjacent voice coil motor actuator components 2 are perpendicular to each other.

[0049] like Figure 2-3As shown, the fixed platform assembly 3 includes a fixed platform 31, a second sensor group 32, an actuator fixing seat 33, a lower insulating sheet 34, and a lower T-shaped insulating sheet 35. The second sensor group 32 includes a second sensor mounting seat 321 and a fixed platform acceleration sensor 322. There are three second sensor mounting seats 321, which are evenly mounted on the upper end surface of the fixed platform 31. The center point of the second sensor mounting seat 321 is connected with the center point of the fixed platform 21, and the angle between any two connecting lines is 120°. There are six fixed platform acceleration sensors 322, and each group of two is mounted on a second sensor mounting seat 321. The axes of the two fixed platform acceleration sensors 322 in each group are perpendicular to each other, and the two fixed platform acceleration sensors 322 in each group are respectively arranged along the axial direction and tangential direction of the fixed platform 31, that is, among the two fixed platform acceleration sensors 322, the center line of one fixed platform acceleration sensor 322 is parallel to the center axis of the fixed platform 31, and the center line of the other fixed platform acceleration sensor 322 is perpendicular to the center axis of the fixed platform 31. The two fixed platform acceleration sensors 322 in each group are arranged in an orthogonal form, so that control can be performed within the task space, the control accuracy is improved, and the design of a nonlinear controller is facilitated.

[0050] like Figure 2-3 As shown, there are six actuator fixing seats 33, which are installed on the upper end surface of the fixed platform 31 by screws. When the actuator fixing seat 33 is installed, a lower insulating sheet 34 is arranged between it and the fixed platform 31, and the material of the lower insulating sheet 34 is phenolic plastic. At the same time, a lower T-shaped insulating sheet 35 is arranged between the head of each screw and the actuator fixing seat 33. The setting of multiple insulating structures makes the insulating structure of the fixed platform 31 more perfect and the insulating effect better, thereby preventing the voice coil motor in the voice coil motor actuator assembly 2 from affecting the fixed platform acceleration sensor 322.

[0051] Each actuator fixing seat 33 includes a mounting base and a motor cabin mounting platform 331. The actuator fixing seat 33 is mounted on the fixed platform 31 through the mounting base. The motor cabin mounting platform 331 is a circular ring structure, which is recessed relative to the plane of the mounting base adjacent to it, and is used to accommodate and install the voice coil motor actuator assembly 2. The plane where the motor cabin mounting platform 331 is located is inclined relative to the surface where the mounting base contacts the fixed platform 31, which can ensure that two adjacent voice coil motor actuator assemblies 2 are perpendicular to each other.

[0052] The voice coil motor actuator assembly 2 can be fixedly mounted on the fixed platform 31 through the actuator fixing seat 33. Figure 4 and Figure 5As shown, the six voice coil motor actuator assemblies 2 have the same structure, and all include a flexible biaxial hinge 201, a force sensor 202, an upper connecting rod 2021, a lower connecting rod 2022, a flexible triaxial hinge 203, an upper spring sheet 204, a spring sheet support frame 205, a spring sheet pressure ring 206, a lower spring sheet 207, a central support rod 208, a fixed beam 209, a deformable beam 210, a voice coil motor 211, a motor cabin 212, a grating scale 213, a grating scale mounting seat 214, a grating scale reading head 215 and a reading head mounting seat 216.

[0053] like Figure 6 As shown, the flexible three-axis hinge 203 includes a hinge upper platform 2031, a three-axis center column 2032, a third gap 2033, a fourth gap 2034 and a fifth gap 2035. The lower end surface of the hinge upper platform 2031 is connected to the three-axis center column 2032. The third gap 2033 and the fourth gap 2034 are arranged on the three-axis center column 2032, and the fifth gap 2035 is arranged on the hinge upper platform 2031. There are two third gaps 2033 and the fourth gap 2034. The third gap 2033 and the fourth gap 2034 have the same structure and opposite directions, and can respectively provide approximate degrees of freedom in azimuth and pitch directions. The fifth gap 2035 is opened on the hinge upper platform 2031 and penetrates the hinge upper platform 2031. Its cross section is approximately fan-shaped, and can provide the degree of freedom of axial rotation around the three-axis center column 2032. Therefore, the flexible three-axis hinge 203 can provide three degrees of freedom in total.

[0054] In the flexible three-axis hinge 203, the lower end surface of the three-axis center column 2032 is connected to another truncated cone structure, whose shape is similar to the hinge upper platform 2031. The truncated cone structure is connected to the force sensor 202 through the upper connecting rod 2021, and the force sensor 202 is connected to the flexible two-axis hinge 201 through the lower connecting rod 2022. By setting the force sensor, the integral force feedback function can be realized, so that the high-frequency response is good and the low-frequency noise is small.

[0055] like Figure 7 As shown, the flexible biaxial hinge 201 includes two upper and lower cone structures with larger diameters and a biaxial center column 2011 with smaller diameter sandwiched in the middle. The upper cone structure is connected to the lower connecting rod 2022. Two first gaps 2012 and two second gaps 2013 are opened on the biaxial center column 2011. The first gap 2012 and the second gap 2013 have the same structure and opposite directions, and can provide approximate degrees of freedom in azimuth and pitch directions respectively.

[0056] The flexible biaxial hinge 201 and the flexible triaxial hinge 203 are both integral structures, and the first gap 2012, the second gap 2013, the third gap 2033, the fourth gap 2034 and the fifth gap 2035 thereon are all designed with a contour of a combination of straight lines and rounded corners, and are obtained by low-speed unidirectional wiring electrospark machining. The first gap 2012, the second gap 2013, the third gap 2033 and the fourth gap 2034 have the same shape. The flexible biaxial hinge 201 and the flexible triaxial hinge 203 provide a total of five degrees of freedom for the flexible parallel platform of the embodiment of the present invention. The flexible biaxial hinge 201 and the flexible triaxial hinge 203 can achieve greater rotational compliance and lower stress levels, and have lower rotational axis drift, reducing the impact of rotational axis drift on the entire machine. The flexible triaxial hinge 203 is provided so that the flexible parallel platform can obtain a larger working space and realize the vibration isolation function. Rotational axis drift is the rotation error, which is the deviation between the actual rotation center and the ideal rotation center during the elastic deformation of the flexible hinge.

[0057] like Figure 8 , Fig. 9 and Fig.10 As shown, the middle part structure of the voice coil motor actuator assembly 2, the upper end of which is connected to the flexible biaxial hinge 201, the middle part structure includes an upper spring leaf 204, a spring leaf support frame 205, a spring leaf pressure ring 206, a lower spring leaf 207, a central support rod 208, and a locking mechanism, and the locking mechanism includes a fixed beam 209 and a deformable beam 210. The upper spring leaf 204 is connected to the upper end surface of the spring leaf support frame 205 through the spring leaf pressure ring 206, and the central support rod 208 is arranged inside the spring leaf support frame 205, the upper end of which is connected to the upper spring leaf 204, and the lower end is connected to the lower spring leaf 207, and the lower spring leaf 207 is attached to the lower end surface of the spring leaf support frame 205. Fig. 9 As shown, the upper spring sheet 204 and the lower spring sheet 207 have the same structure, both of which are cross structures, which can provide higher radial stiffness and lower stress levels during axial movement, thereby alleviating stress concentration. The upper spring sheet 204 and the lower spring sheet 207 both include a spring sheet center platform 2041 and a spring sheet center hole 2042. Fig.10 As shown, the central support rod 208 includes a first reducing column 2081 and a second reducing column 2082. The diameter of the second reducing column 2082 is larger than that of the first reducing column 2081. The upper end of the second reducing column 2082 has a cylindrical protrusion, which passes through the central hole of the upper spring sheet 204, and the upper end surface of the second reducing column 2082 is in contact with the lower bottom surface of the spring sheet center platform 2041 of the upper spring sheet 204, and the upper top surface of the spring sheet center platform 2041 is in contact with the lower end surface of the flexible biaxial hinge 201, that is, the spring sheet center platform 2041 of the upper spring sheet 204 is clamped between the second reducing column 2082 and the lower end surface of the flexible biaxial hinge 201, and the three are fixedly connected by screws.

[0058] The first diameter-changing column 2081 of the central support rod 208 is connected to a fixed beam 209 and a deformable beam 210. One end of the fixed beam 209 is an elastic structure, referred to as a first locking piece 2091, and the other end is a rectangular block of a non-elastic structure, and the end face of the rectangular block is referred to as a first end face 2092. One end of the deformable beam 210 is an elastic structure, referred to as a second locking piece 2101, and the other end is a rectangular block of a non-elastic structure, and the end face of the rectangular block is referred to as a second end face 2102. The first locking piece 2091 and the second locking piece 2101 wrap the first reducing column 2081 of the central support rod 208, and the first locking piece 2091 and the second locking piece 2101 are fixed and locked by screws on both sides. When the pre-tightening force of the screws on the first locking piece 2091 and the second locking piece 2101 is less than the force that causes the deformable beam 210 to deform, the first locking piece 2091 and the second locking piece 2101 play a limiting role on the central support rod 208 to achieve locking. The first end face 2092 and the second end face 2102 are fitted with the inner wall of the spring sheet support frame 205, and the positions on the inner wall of the spring sheet support frame 205 where the first end face 2092 and the second end face 2102 are fitted are processed into planes, which are convenient for the installation of the fixed beam 209 and the deformable beam 210, and can make the relative positions of the fixed beam 209 and the deformable beam 210 and the spring sheet support frame 205 more stable, thereby making the central support rod 208 more stable and the locking effect more obvious. The design uses the elastic deformable beam 210 to simultaneously realize the limiting and locking functions of the central support rod 208, so as to guide the movement of the central support rod 208, and can prevent the voice coil motor actuator assembly 2 from exceeding the movement stroke during operation, thereby causing irreversible damage to the flexible biaxial hinge 201, the flexible triaxial hinge 203 and the spring sheet, and can also lock the voice coil motor actuator assembly 2 to prevent the impact during installation and transportation from causing damage to the structure.

[0059] A truncated cone structure is provided at the lower end of the central support rod 208 , and the truncated cone structure can fit with the upper top surface of the spring plate central platform 2041 of the lower spring plate 207 .

[0060] The lower part of the voice coil motor actuator assembly 2 is a voice coil motor structure, which specifically includes a voice coil motor 211 and a motor cabin 212. The voice coil motor 211 includes a magnetic steel 2112 and a voice coil motor coil 2113. A voice coil motor flange 2111 is provided at the upper end of the voice coil motor 211. The voice coil motor flange 2111 is fitted with the lower bottom surface of the spring sheet center platform 2041 of the lower spring sheet 207. The lower end cone structure of the central support rod 208 and the voice coil motor flange 2111 clamp the spring sheet center platform 2041 of the lower spring sheet 207, and the three are fixedly connected by screws.

[0061] The motor compartment 212 contains the voice coil motor 211, the bottom of the motor compartment 212 is connected to the bottom of the voice coil motor 211 by screws, and the outer edge of the upper end of the motor compartment 212 is provided with a motor compartment flange 2121, which can be connected to the lower end of the spring sheet support frame 205 by screws, and the lower spring sheet 207 is clamped between the motor compartment flange 2121 and the spring sheet support frame 205 to fix the lower spring sheet 207. In addition, the voice coil electrical actuator assembly 2 can be connected to the motor compartment mounting platform 331 of the actuator fixing seat 33 of the fixed platform assembly 3 through the motor compartment flange 2121. With the elasticity of the upper spring sheet 204 and the lower spring sheet 207, the voice coil motor 211 can provide power to cause the central support rod 208 to axially displace along the voice coil electrical actuator assembly 2. The load-displacement characteristics of the upper spring sheet 204 and the lower spring sheet 207 are used to convert the output force of the voice coil motor 211 into a linear displacement and output it, thereby providing guidance for the voice coil motor 211 and providing one degree of freedom for the flexible parallel platform. Therefore, the flexible parallel platform of the embodiment of the present invention has a total of six degrees of freedom, so that the flexible parallel platform has high degrees of freedom and high flexibility.

[0062] The spring sheet support frame 205 is provided with a plurality of hollow holes 2051 on its circumference, which can reduce the overall weight and facilitate the installation of the internal components of the spring sheet support frame 205. The spring sheet support frame 205 is provided with a reading head mounting seat 216, and the grating ruler reading head 215 is connected to the spring sheet support frame 205 through the reading head mounting seat 216. Fig.11 As shown, the grating ruler 213 is connected to the central support rod 208 through the grating ruler mounting seat 214. When the voice coil motor 211 drives the central support rod 208 to move, the grating ruler 213 can move with the central support rod 208 to achieve displacement measurement.

[0063] like Figure 1 , 12As shown in Figure 13, the moving platform assembly 1 includes a moving platform 11, a first sensor group 12, a hinge seat 13, a hinge seat mounting hole 16, an upper insulating sheet 14, and an upper T-shaped insulating sheet 15. The first sensor group 12 includes a first sensor mounting seat 121 and a moving platform acceleration sensor 122. There are three first sensor mounting seats 121, which are evenly mounted on the upper end surface of the moving platform 11. When the center point of the first sensor mounting seat 121 is connected to the center point of the moving platform 11, the angle between any two connecting lines is 120°. There are six moving platform acceleration sensors 122, and each group of two is mounted on a first sensor mounting seat 121. The axes of the two moving platform acceleration sensors 122 in each group are perpendicular to each other, and the two moving platform acceleration sensors 122 in each group are respectively arranged along the axial direction and tangential direction of the moving platform 11, that is, among the two moving platform acceleration sensors 122, the center line of one moving platform acceleration sensor 122 is parallel to the center axis of the moving platform 11, and the center line of the other moving platform acceleration sensor 122 is perpendicular to the center axis of the moving platform 11. The moving platform acceleration sensors 122 are arranged in an orthogonal form, which can be controlled in the task space, improve the control accuracy, and facilitate the design of nonlinear controllers.

[0064] There are three hinge seats 13, which are installed on the lower end surface of the moving platform 31 by screws through the hinge seat mounting holes 16. When the hinge seat 13 is installed, an upper insulating sheet 14 is arranged between it and the moving platform 11. The upper insulating sheet 14 is made of phenolic plastic. At the same time, an upper T-shaped insulating sheet 15 is arranged on the hinge seat mounting hole 16. The multiple insulating structures are arranged to make the insulation structure of the moving platform 11 more perfect and the insulation effect better, so as to prevent the voice coil motor 211 in the voice coil motor actuator assembly 2 from affecting the moving platform acceleration sensor 122. Among the six voice coil motor actuator assemblies 2, every two voice coil motor actuator assemblies 2 are connected to a hinge seat 13 through the hinge upper platform 2031 of the flexible three-axis hinge 203, that is, the six voice coil motor actuator assemblies 2 are opposite to each other head to head and tail to tail, and are connected in sequence. Two adjacent voice coil motor actuator assemblies 2 are arranged vertically between the moving platform assembly 1 and the fixed platform assembly 3. In the flexible parallel platform of the embodiment of the present invention, the six voice coil electrical actuator assemblies cooperate to realize the positioning and pointing of the moving platform 11 .

[0065] Although the embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present invention. Those skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

[0066] The above specific implementations of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A flexible parallel platform with integrated directional vibration isolation, characterized in that: include: A moving platform assembly, a fixed platform assembly and six voice coil motor actuator assemblies; the moving platform assembly includes a moving platform, a first sensor group and a hinge seat; The first sensor group and the hinge seat are respectively arranged on the upper end surface and the lower end surface of the moving platform, and an upper insulating sheet is arranged between the hinge seat and the moving platform; an upper T-shaped insulating sheet is arranged at the screw connection between the hinge seat and the moving platform; the first sensor group has three groups, each group includes two mutually perpendicular moving platform acceleration sensors, and the two moving platform acceleration sensors are respectively arranged along the axial direction and tangential direction of the moving platform; The fixed platform assembly includes a fixed platform, a second sensor group and an actuator fixing seat; The second sensor group and the actuator fixing seat are both arranged on the upper end surface of the fixed platform, and a lower insulating sheet is arranged between the actuator fixing seat and the fixed platform; a lower T-shaped insulating sheet is arranged at the screw connection between the actuator fixing seat and the fixed platform; the second sensor group has three groups, each group includes two mutually perpendicular fixed platform acceleration sensors, and the two fixed platform acceleration sensors are respectively arranged along the axial direction and tangential direction of the fixed platform; The six voice coil motor actuator assemblies are arranged between the fixed platform assembly and the moving platform assembly, and any two adjacent voice coil motor actuator assemblies are perpendicular to each other; The six voice coil motor actuator assemblies have the same structure, including: a flexible biaxial hinge, a flexible triaxial hinge, an upper spring sheet, a lower spring sheet, a locking mechanism, a central support rod, a spring sheet support frame and a voice coil motor, as well as a grating ruler, a grating ruler mounting seat and a grating ruler reading head; the grating ruler is connected to the central support rod through the grating ruler mounting seat, and when the voice coil motor drives the central support rod to move, the grating ruler can move with the central support rod to achieve displacement measurement; The lower end of the flexible three-axis hinge is connected to the upper end of the flexible two-axis hinge through a force sensor, and the lower end of the flexible two-axis hinge is connected to the upper spring sheet, and the upper spring sheet and the lower spring sheet are respectively fixed to the upper and lower ends of the spring sheet support frame; the central support rod is arranged inside the spring sheet support frame, and the two ends are respectively connected to the upper spring sheet and the lower spring sheet; the locking mechanism is connected to the central support rod and fits with the inner wall of the spring sheet support frame; the output end of the voice coil motor passes through the lower spring sheet and is connected to the lower end of the central support rod; The upper spring sheet and the lower spring sheet have the same structure, both of which are "cross" shaped; The voice coil motor can provide power to cause the central support rod to move axially along the voice coil electrical actuator assembly, and the output force of the voice coil motor is converted into linear displacement and output by utilizing the load-displacement characteristics of the upper spring sheet and the lower spring sheet; The locking mechanism comprises a fixed beam and a deformable beam, one end of each of the fixed beam and the deformable beam is connected to the central support rod, and the other end is fitted to the inner wall of the spring sheet support frame; the fixed beam comprises a first locking sheet and a first end face, and the deformable beam comprises a second locking sheet and a second end face; the first locking sheet and the second locking sheet wrap the central support rod, and are connected by screws, and the first locking sheet and the second locking sheet are elastic structures; The first end face and the second end face are fitted with the inner wall of the spring sheet support frame; when the pre-tightening force of the screw on the first locking sheet and the second locking sheet is less than the force that causes the deformable beam to deform, the first locking sheet and the second locking sheet play a limiting role on the central support rod.

2. The flexible parallel platform with integrated directional vibration isolation as claimed in claim 1, characterized in that: Among the six flexible three-axis hinges, the upper ends of every two flexible three-axis hinges are connected to one of the hinge seats.

3. The flexible parallel platform with integrated directional vibration isolation as claimed in claim 1, characterized in that: The flexible three-axis hinge comprises a hinge upper platform and a three-axis center column, and the lower end surface of the hinge upper platform is connected to the three-axis center column; The three-axis central column is provided with a third gap and a fourth gap, and the hinge upper platform is provided with a fifth gap.

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