System and method for testing flammability of gas holder

Abstract

The invention discloses a system and method for testing the flammability of a gas holder, the interior of the gas holder comprises a plurality of pipelines, valves and electrical connection points, and the system at least comprises a tracer gas container which is communicated with a gas simulation release point through a tracer gas pipeline and is used for releasing tracer gas at the gas simulation release point; the gas simulation release point is located at the joint of a valve and a pipeline in the gas holder; each detector is communicated with a monitoring point through a sampling pipe; the monitoring points are at least arranged at electrical connection points in the gas holder; the controller is in signal connection with the detector; the plurality of detectors are used for collecting tracer gas concentration values of a plurality of monitoring points and sending the tracer gas concentration values to the controller; and the controller is used for comparing the tracer gas concentration value at the monitoring point with a preset tracer gas concentration value so as to judge whether the flammability test of the gas holder is passed or not. According to the invention, the test accuracy and test efficiency of the flammability test of the gas holder are greatly improved, and the method is environment-friendly and has a wide application prospect.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a system and method for gas cabinet flammability testing. Background Art

[0002] As a core tool for semiconductor manufacturing, the safety of gas cabinets (gas transmission control cabinets) is of vital importance. In the semiconductor production environment, there are many special factors that place extremely stringent requirements on equipment safety. For example, semiconductor manufacturing often needs to be carried out in a special gas environment. For example, flammable and explosive gases such as hydrogen are widely used, and the gas cabinets responsible for controlling the transmission of these gases may generate high temperatures, static electricity and other phenomena during operation. When the flammable and explosive gases reach the explosion limit threshold inside the gas cabinet, serious safety accidents may occur instantly. Once out of control, it will not only cause serious damage to the gas cabinet, but may also cause catastrophic events such as fire and explosion, thereby endangering the life safety of the operator and causing huge economic losses.

[0003] In this context, in order to ensure the safety of gas cabinets, the Semiconductor Equipment and Materials International (SEMI) has developed the SEMI S6 test method. This test method covers two important components, namely the SEMI S6 flammability test and the toxicity test. Among them, the SEMI S6 flammability test is used to evaluate the ventilation capacity of the designed gas cabinet and its related components in the face of flammable gas leakage, and to determine whether the designed gas cabinet can effectively dilute and extract the leaked flammable gas, thereby ensuring the safety of the semiconductor manufacturing environment.

[0004] However, the existing SEMI S6 flammability test method generally uses a mixture of sulfur hexafluoride (SF6) and nitrogen (N2) as a tracer gas, which has many defects: the test method has slow feedback results and cannot provide an efficient basis for the safety assessment of the gas cabinet in a timely manner, which is not conducive to making quick decisions and adjustments in actual test scenarios. In addition, SF6 is a strong greenhouse gas with a global warming potential (GWP) that is thousands of times that of carbon dioxide, and has a significant destructive effect on the atmospheric ozone layer. Using this mixed gas as a tracer gas will undoubtedly cause environmental pollution.

[0005] In summary, the existing SEMI S6 flammability test method is difficult to meet the needs of fast and accurate testing of gas cabinets facing complex working conditions in actual operation, and a more complete, efficient and environmentally friendly test solution is urgently needed to replace it. Summary of the invention

[0006] The purpose of the present invention is to provide a system and method for gas cabinet flammability testing, which can obtain the monitoring results of multiple monitoring points inside the gas cabinet in real time, effectively improve the testing efficiency of the flammability test, and at the same time, adopt an environmentally friendly test gas formula to meet the needs of environmental protection concepts and sustainable development.

[0007] In order to achieve the above object, the present invention provides a system for gas cabinet flammability testing, wherein the gas cabinet includes a plurality of pipelines, a plurality of valves and a plurality of electrical connection points, and is characterized in that it at least includes: A tracer gas container, which is connected to a gas simulation release point through a tracer gas pipeline, and is used to release the tracer gas at the gas simulation release point; the gas simulation release point is located at the connection between the valve and the pipeline inside the gas cabinet; A plurality of detectors, each detector being connected to a monitoring point via a sampling tube; the plurality of monitoring points being arranged at least at the plurality of electrical connection points inside the gas cabinet; A controller, the controller being signal-connected to the plurality of detectors; Among them, the multiple detectors are used to collect the tracer gas concentration values ​​of the multiple monitoring points and send them to the controller; the controller is used to compare the tracer gas concentration values ​​at the monitoring points with preset tracer gas concentration values ​​to determine whether the flammability test of the gas cabinet has passed.

[0008] Optionally, the preset tracer gas concentration values ​​of each monitoring point are different or the same, wherein: when the preset tracer gas concentration values ​​of each monitoring point are the same, the controller receives the tracer gas concentration value of each monitoring point and compares it with the preset tracer gas concentration value; when the preset tracer gas concentration values ​​of each monitoring point are different, the controller receives the tracer gas concentration value of each monitoring point and compares it with the preset tracer gas concentration value corresponding to each monitoring point.

[0009] Optionally, when the number of the detectors is greater than or equal to the number of monitoring points inside the gas cabinet, the detectors with the same number of monitoring points are used to synchronously test the monitoring points inside the gas cabinet; when the number of the detectors is less than the number of monitoring points inside the gas cabinet, the detectors are used to test the monitoring points inside the gas cabinet in batches until all monitoring points inside the gas cabinet have been tested.

[0010] Optionally, the controller calculates the time T taken for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet according to the inherent parameters of the gas cabinet, and outputs a test instruction to the detector at least T hours after the tracer gas is released.

[0011] Optionally, the controller compares the received tracer gas concentration values ​​of the monitoring points with the preset tracer gas concentration values, and outputs a first control instruction when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value.

[0012] Optionally, the gas cabinet is provided with an exhaust device, and the exhaust device is connected to the controller signal. The exhaust device receives the first control instruction and adjusts the exhaust volume inside the gas cabinet so that the tracer gas concentration values ​​of the several monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point.

[0013] Optionally, the system further comprises: a human-machine interaction module, the human-machine interaction module is connected to the controller signal, and the controller receives the inherent parameters of the gas cabinet transmitted from the human-machine interaction module.

[0014] Optionally, the system further comprises: a display module, wherein the display module is connected to the controller signal, and the display module receives a second control instruction outputted from the controller to display the tracer gas concentration value at the monitoring point.

[0015] Optionally, the system further comprises: an alarm module, which is connected to the controller signal, and when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module receives a third control instruction outputted from the controller and issues an alarm signal.

[0016] Optionally, the alarm signal includes: a light signal and / or a sound signal.

[0017] Optionally, the system further comprises: a mass flow controller, which is disposed on the tracer gas pipeline and is used to adjust a release flow rate of the tracer gas at the gas simulation release point.

[0018] Optionally, the system further comprises: a pressure regulating valve, which is disposed on the tracer gas pipeline and is used to adjust the release pressure of the tracer gas to a working pressure range of the mass flow controller.

[0019] Optionally, the tracer gas includes H2, and the detector is a H2 detector.

[0020] Optionally, the total time from the release of the tracer gas to the collection of tracer gas concentration values ​​at several monitoring points by several H2 detectors and sending them to the controller is 30s~1min.

[0021] Optionally, the system further comprises: an integrated box, wherein the controller and the detector are integrated inside the integrated box.

[0022] Optionally, the monitoring point is also arranged at a corner of the cabinet inside the gas cabinet.

[0023] The present invention also provides a method for gas cabinet flammability testing, which is implemented using the above-mentioned system for gas cabinet flammability testing, and the method at least comprises the following steps: The tracer gas is transported from the tracer gas container through the tracer gas pipeline to the gas simulation release point for simulated release; A plurality of detectors receive the test instructions outputted from the controller, and collect and analyze the tracer gas concentration values ​​at the plurality of monitoring points; The controller receives the tracer gas concentration values ​​transmitted from the plurality of detectors, compares them with preset tracer gas concentration values, and determines whether the flammability test of the gas cabinet has passed.

[0024] Optionally, when the number of the detectors is greater than or equal to the number of monitoring points inside the gas cabinet, the detectors with the same number of monitoring points are used to synchronously test the monitoring points inside the gas cabinet; when the number of the detectors is less than the number of monitoring points inside the gas cabinet, the detectors are used to test the monitoring points inside the gas cabinet in batches until all monitoring points inside the gas cabinet have been tested.

[0025] Optionally, the method also includes: the controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet based on the inherent parameters of the gas cabinet, and sends the test instruction to the detector T times after the tracer gas is released.

[0026] Optionally, the inherent parameters of the gas cabinet are transmitted to the controller via a human-computer interaction module.

[0027] Optionally, the intrinsic parameters of the gas cabinet include the volume of the gas cabinet.

[0028] Optionally, when it is determined that the gas cabinet has failed the flammability test, the method further includes: the controller outputting a control instruction so that the tracer gas concentration values ​​of the plurality of monitoring points are all less than a preset tracer gas concentration value corresponding to each monitoring point.

[0029] Optionally, the control instruction includes a first control instruction, which includes: increasing the exhaust volume inside the gas cabinet so that the tracer gas concentration values ​​of the plurality of monitoring points are all smaller than a preset tracer gas concentration value corresponding to each monitoring point.

[0030] Optionally, the control instruction includes a second control instruction, and the second control instruction includes: displaying the tracer gas concentration value of the monitoring point.

[0031] Optionally, the control instruction includes a third control instruction, and the third control instruction includes: when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, issuing an alarm signal.

[0032] Optionally, the tracer gas comprises H2.

[0033] Optionally, the tracer gas is a mixture of H2 and N2, and the volume ratio of H2 in the mixture does not exceed 5.7%.

[0034] Optionally, the method is used for SEMI S6 flammability testing.

[0035] Compared with the prior art, the beneficial effects of the present invention at least include: (1) The present invention can realize multi-point synchronous monitoring inside a gas cabinet with several monitoring points by integrating a controller and several detectors, and the controller can automatically determine whether the flammability test of the gas cabinet has passed according to the tracer gas concentration values ​​of the several monitoring points. On the one hand, the traditional test method adopts a single-point one-by-one detection method, and it takes more than 30 minutes to obtain the test results of all monitoring points inside the gas cabinet. The multi-point synchronous monitoring realized by the present invention shows significant advantages. It only takes 30s to 1min to complete the flammability test of the gas cabinet, avoiding the problems of inaccurate test results and long test time caused by only being able to realize single-point testing in the traditional method, effectively improving the real-time nature of the test results, thereby improving the accuracy and efficiency of the test; on the other hand, the integrated controller has the function of automatically judging whether the test results meet the safety requirements, avoiding errors caused by manual judgment, simplifying the test operation process, and further improving the accuracy and efficiency of the test.

[0036] (2) Furthermore, the system and method provided by the present invention are particularly suitable for flammability testing of gas cabinets with complex internal component layouts. Different preset tracer gas concentration values ​​can be flexibly set according to factors such as the risk level of the location of each monitoring point inside the gas cabinet, and the controller can automatically determine whether the gas cabinet can pass the flammability test, thereby more accurately and efficiently evaluating whether the gas cabinet can pass the flammability test.

[0037] (3) Furthermore, in the system and method provided by the present invention, the controller calculates the time T taken for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet based on the received inherent parameters of the gas cabinet, and sends the test instruction to the detector T hours after the tracer gas is released, so as to ensure that the detector collects the tracer gas concentration value in a stable state, and to eliminate the interference factors caused by the unstable gas concentration at the beginning of the release to the greatest extent, thereby improving the accuracy of the test data.

[0038] (4) Furthermore, the system and method provided by the present invention also integrate an intelligent verification design that can realize the control of different modules or devices by outputting different control instructions. The first control instruction from the operator is used to control the exhaust device and adjust the exhaust volume inside the gas cabinet, thereby adjusting the test results so that the gas cabinet can pass the SEMI S6 flammability test; the second control instruction is used to control the display module to display the tracer gas concentration data of each monitoring point, so that the operator can quickly and intuitively grasp the real-time status of the tracer gas concentration in different areas inside the gas cabinet; the third control instruction is used to control the alarm module to send an alarm signal, so as to promptly notify the operator of abnormal conditions inside the gas cabinet to ensure safety during the test. This intelligent verification design enables the system to respond or handle various situations autonomously, reducing the waste of manpower and energy, making the entire test process more efficient and orderly, reducing human errors, and improving the accuracy and reliability of the test.

[0039] (5) Furthermore, in the system and method of the present invention, a mixture of H2 and N2 is used to replace the traditional mixture of SF6 and N2 as the tracer gas. SF6, as a gas that easily produces a greenhouse effect, is replaced in large quantities after the implementation of this solution. The implementation of this technical solution promotes the green production and sustainable development of enterprises. By adopting more environmentally friendly H2 and N2, the emission of greenhouse gases is reduced, which is environmentally friendly and in line with the current trend of green environmental protection and sustainable development. Enterprises can better respond to the global call for environmental protection and sustainable development, establish a green, environmentally friendly, and low-carbon corporate image, and make positive contributions to the sustainable development of society. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 The figure is a simplified schematic diagram of a system for gas cabinet flammability testing according to the present invention.

[0041] Figure 2 The diagram is a simplified schematic diagram of a system for gas cabinet flammability testing including a human-computer interaction module according to the present invention.

[0042] Figure 3 The present invention is a simplified schematic diagram of a system for gas cabinet flammability testing, which includes a human-computer interaction module and a display module.

[0043] Figure 4 The present invention is a flow chart of a method for gas cabinet flammability testing.

[0044] Figure 5 The flowchart of the method for gas cabinet flammability testing of the present invention includes step S5.1.

[0045] Figure 6 The flowchart of the method for gas cabinet flammability testing of the present invention includes step S5.2.

[0046] Figure 7 The flowchart of the method for gas cabinet flammability testing of the present invention includes step S5.3.

[0047] Figure ID: Gas cabinet 10, pipeline 11, valve 12, electrical connection point 13; Tracer gas container 20, tracer gas pipeline 21, gas simulation release point 22, mass flow controller 211, pressure regulating valve 212; Detector 30, sampling tube 31, monitoring point 32, near-source position point 321, near-source detector D1, first background detector D2, second background detector D3, monitoring point detectors D4-D15; Controller 40; Human-computer interaction module 50; Exhaust device 60; Display module 70; Integrated box 80. DETAILED DESCRIPTION

[0048] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] The term "several" as used herein refers to one or more than one.

[0052] The "gas cabinet" described in this article refers to semiconductor equipment used to store, control and transport various gases used in the semiconductor manufacturing process. The gas cabinet includes a number of pipelines, a number of valves and a number of electrical connection points; the pipelines are used to transport gas; the valves are used to control the flow of gas and adjust the flow and pressure of gas; the electrical connection points are used to provide power supply for the monitoring equipment, valve control devices and other components that require power drive inside the gas cabinet, ensuring that the various functional components of the gas cabinet can operate normally and work together.

[0053] The "explosion limit threshold" described herein refers to the lowest concentration value at which a combustible gas (eg, hydrogen) may explode.

[0054] As described in the background technology, for gasholders involving the control and transmission of flammable gases, their safety performance is a key consideration in the design of the gasholders. The gasholders usually contain a number of pipelines, a number of valves, and a number of electrical connection points, which are arranged in a complex manner. It is difficult to avoid the leakage of flammable gases at the pipelines and valves, and it is easy to generate electric sparks at the electrical connection points. If the concentration of the flammable gas leaked at the electrical connection points reaches the explosion limit threshold, the electrical connection points are very likely to become explosion points, causing severe explosion accidents, damaging the gasholders, and even endangering the safety of on-site operators.

[0055] In view of this, it is necessary to carry out flammable gas leakage detection on several electrical connection points, and evaluate whether the exhaust effect of the gas cabinet can meet the safety requirements based on the measured flammable gas concentration at the monitoring point, so as to determine whether the gas cabinet passes the flammability test, and then guide the design optimization of the gas cabinet structure or the layout of its internal components.

[0056] In the existing method for flammability testing of gas cabinets, a mixture of sulfur hexafluoride (SF6) and nitrogen (N2) is used as a tracer gas; SF6 is used as a detection gas to detect the concentration of the detected equipment; N2 is used as a carrier gas to dilute SF6 to a set concentration and evenly transport SF6 to the target area. However, the present invention finds that the method for flammability testing of gas cabinets has the following main limitations:

[0057] Traditionally, SF6 gas detection uses a detector specifically used for SF6 concentration detection, which has the advantage of obtaining gas concentration values ​​quickly. However, the detection accuracy of existing SF6 detectors is not high, mainly due to the limitations of factors such as the gas characteristics of SF6 itself and the detection capabilities of the equipment itself, resulting in relatively weak detection signals of SF6 detectors, which are easily disturbed by factors such as tiny impurities, small changes in temperature and / or humidity, and may cause large deviations in the detection results, resulting in a decrease in test accuracy, which is prone to misjudgment or missed judgments.

[0058] In order to improve the accuracy of the test, an attempt was made to use gas chromatography (GC) with higher detection accuracy for detection. However, this method requires a sampler to collect a certain volume of tracer gas samples at the monitoring point, and then the tracer gas samples are sent to the laboratory and injected into the GC instrument for analysis. Moreover, it takes at least 3 minutes for the GC instrument to complete the concentration analysis of a single tracer gas sample, which makes the test process cumbersome and time-consuming. In addition, the GC instrument can only allow the concentration data of a tracer gas sample to be analyzed at one time. Therefore, for complex gas cabinets containing several monitoring points, it is necessary to analyze the tracer gas samples collected at each monitoring point one by one in turn, which further leads to a significant extension of the test time. The extension of the test time brings about the problem of delayed feedback of the test results, which makes the method unable to achieve real-time synchronous monitoring of the gas concentration changes at each monitoring point inside the gas cabinet, which may cause the omission of some important instantaneous concentration change information, making the accuracy of the test still unable to meet the needs.

[0059] In addition, in the existing method for flammability testing of gas cabinets, there are defects in the test operation process. Specifically, the operator (tester) is required to compare the SF6 concentration value obtained by the test with a specific set value (for example, the explosion limit threshold) to manually determine whether the flammability test is qualified. This operation method makes the entire test process cumbersome, which not only consumes test time, but also occupies additional human resources and reduces test efficiency.

[0060] In short, the existing methods for flammability testing of gas cabinets have problems such as long testing time, slow feedback results, and low detection accuracy. It is difficult to meet the semiconductor industry's requirements for efficient, accurate, and real-time flammability testing of gas cabinets under complex working conditions, and is not conducive to timely and accurate evaluation of the safety performance of gas cabinets. In addition, SF6 is a recognized greenhouse gas and is harmful to the environment.

[0061] In order to solve the above problems, the present invention designs a system for gas cabinet flammability testing, which integrates several detectors and a controller. The several detectors are connected to several monitoring points inside the gas cabinet, and can collect the tracer gas concentration values ​​of the several monitoring points in real time and send them to the controller; the controller can compare the tracer gas concentration value with the preset tracer gas concentration value, and automatically determine whether the flammability test of the gas cabinet has passed. Therefore, the present invention can realize the synchronous collection and synchronous feedback of the tracer gas concentration values ​​of multiple monitoring points inside the gas cabinet, and the system of the present invention can automatically compare the collected tracer gas concentration value with the preset tracer gas concentration value, and directly output the test results without manual comparison, which effectively improves the real-time and accuracy of the test and simplifies the test operation process. Furthermore, the system of the present invention uses a mixed gas of environmentally friendly hydrogen (H2) and N2 as the tracer gas for the flammability test, eliminating the harm to the environment.

[0062] The following is a description with reference to the accompanying drawings.

[0063] like Figure 1 As shown, the present invention provides a system for gas cabinet flammability testing, wherein the gas cabinet 10 includes a plurality of pipelines 11, a plurality of valves 12 and a plurality of electrical connection points 13, and the system at least includes: A tracer gas container 20, which is connected to a gas simulation release point 22 through a tracer gas pipeline 21, and is used to release the tracer gas at the gas simulation release point 22; the gas simulation release point 22 is located at the connection between the valve 12 and the pipeline 11 inside the gas cabinet 10; A plurality of detectors 30, each detector 30 is connected to a monitoring point 32 via a sampling tube 31; the plurality of monitoring points 32 are at least arranged at the plurality of electrical connection points 13 inside the gas cabinet 10; A controller 40, wherein the controller 40 is signal-connected to the plurality of detectors 30; Among them, the multiple detectors 30 are used to collect the tracer gas concentration values ​​of the multiple monitoring points 32 and send them to the controller 40; the controller 40 is used to compare the tracer gas concentration value with the preset tracer gas concentration value to determine whether the flammability test of the gas cabinet 10 has passed.

[0064] In some embodiments, the system also includes an integrated box 80, and the controller 40 and the detector 30 are integrated inside the integrated box 80. The sampling tube 31 is centrally led out from the inside of the integrated box 40 to each monitoring point 32 inside the gas cabinet 10 to reduce space occupancy. It is also beneficial to the centralized management of the controller 40 and the detector 30, and is convenient for the operator to inspect, debug or maintain.

[0065] In the actual operation process of the gas cabinet 10, the pipeline 11 inside the gas cabinet 10 is used to transport specific gas, and the valve 12 is used to control the flow of specific gas and adjust the flow rate and pressure of specific gas. The connection between the valve 12 and the pipeline 11 is a combination of two different parts, and the combination is prone to sealing problems, which makes the connection between the valve 12 and the pipeline 11 more prone to gas leakage. Therefore, the present invention selects the connection between the valve 12 and the pipeline 11 inside the gas cabinet 10 as the gas simulation release point 22. In the present invention, the tracer gas is simulated and released at the connection between the valve 12 and the pipeline 11 through the tracer gas pipeline 21 to simulate the actual gas leakage situation.

[0066] In the present invention, the principle for selecting the monitoring point 32 is the location inside the gas cabinet 10 where electric sparks may be generated to cause combustion or explosion, such as electrical connection points, cabinet corners, etc.

[0067] In the actual operation process of the gas cabinet 10, the electrical connection point 13 inside the gas cabinet 10 is used to provide power supply for the valve control device, mass flow controller (Mass Flow Controller, MFC) and other components that require electric drive inside the gas cabinet 10, so as to ensure that the various components in the gas cabinet 10 can operate normally and work together. However, due to the power supply at the electrical connection point 13, electric sparks are easily generated. If the specific gas transported by the pipeline 11 in the gas cabinet 10 contains flammable gas, and the concentration of the flammable gas leaked at the electrical connection point 13 reaches the explosion limit threshold, then the electrical connection point 13 is very likely to become an explosion point, causing a severe explosion accident, damaging the gas cabinet and endangering the safety of the operator. Therefore, in the present invention, the several monitoring points 32 inside the gas cabinet 10 are designed to be at least arranged at the several electrical connection points 13 inside the gas cabinet 10, and by real-time monitoring of the changes in the tracer gas concentration in these key areas, it is determined whether the entire gas cabinet 10 has passed the flammability test to meet the safety requirements of the gas cabinet 10.

[0068] In some embodiments, the monitoring point 32 is also provided at the cabinet corner inside the gas cabinet 10. Since the cabinet corner is an area where gas easily accumulates and the flow state is relatively complex, the monitoring point 32 is provided here so as to more comprehensively and accurately capture the distribution and change of gas in the gas cabinet 10. When the gas leaks or operates normally, the gas concentration in the cabinet corner may be different from other parts. The data collected by these monitoring points 32 help to understand the gas characteristics in different spatial positions inside the gas cabinet 10 in more detail, thereby providing a more reliable basis for judging whether the gas cabinet 10 can pass the flammability test, and further improving the accuracy of the system.

[0069] In the present invention, multiple detectors are used to simultaneously collect tracer gas concentration values ​​at multiple monitoring points, thereby monitoring the change in tracer gas concentration at various locations in the gas cabinet (for example, at multiple electrical connection points and / or cabinet corners). Specifically, each detector is connected to a monitoring point through a sampling tube to ensure that the tracer gas information of the corresponding monitoring point can be accurately obtained. In some embodiments, continue to refer to Figure 1 , the multiple detectors include a near-source detector D1, a first background detector D2, a second background detector D3, and 12 monitoring point detectors D4-D15 for monitoring the tracer gas concentration at the monitoring point 32. The near-source detector D1 is connected to a near-source position point 321 with a diameter of 2 cm from the gas simulation release point through a sampling tube 31, and is used to collect the tracer gas concentration at a position 2 cm in diameter from the gas simulation release point 22, so as to check whether the tracer gas pipeline 21 is blocked and whether the gas simulation release point 22 successfully releases the tracer gas. The first background detector D2 is connected to a position point (not shown) inside the integrated box 80 through a sampling tube 31, and is used to collect the tracer gas concentration around the multiple detectors 30; the second background detector D3 is connected to a position point (not shown) around the outside of the gas cabinet 10 through a sampling tube 31, and is used to collect the tracer gas concentration around the outside of the gas cabinet 10. The first background detector D2 and the second background detector D3 are used to observe the test environment background to reduce the influence of the plurality of detectors 30 and the surrounding environment outside the gas cabinet 10 on the test results.

[0070] In the present invention, in order to realize the automation and intelligence of the system, reduce manpower waste, and improve test efficiency, a controller 40 is integrated, and the controller 40 is used to automatically compare the tracer gas concentration of each monitoring point 32 monitored in real time with the preset tracer gas concentration value input in advance, so as to automatically determine whether the flammability test of the gas cabinet 10 has passed. The controller 40 is connected to the plurality of detectors 30 by signal, and the plurality of detectors 30 send the collected tracer gas concentration values ​​of the plurality of monitoring points 32 to the controller 40. As an example, when the tracer gas concentration values ​​of the plurality of monitoring points 32 received by the controller 40 are all less than the preset tracer gas concentration value, it is determined that the flammability test of the gas cabinet 10 has passed. The collection includes collecting the tracer gas and analyzing the concentration value of the tracer gas.

[0071] In the present invention, the preset tracer gas concentration values ​​(not higher than the explosion limit threshold) corresponding to each monitoring point 32 are the same or different. The controller 40 receives the tracer gas concentration values ​​of each monitoring point 32 transmitted from a plurality of detectors 30, and compares them with the preset tracer gas concentration values ​​corresponding to each monitoring point 32 to determine whether the flammability test of the gas cabinet 10 has passed. For a gas cabinet 10 with a relatively simple internal structure and layout of each component, or for the convenience of management, the preset tracer gas concentration values ​​of each monitoring point 32 can be the same. In this case, the controller 40 receives the tracer gas concentration values ​​of each monitoring point 32 and compares them with the preset tracer gas concentration value. However, in some embodiments, in order to further improve the accuracy of the test, considering that there are locations where accidents are prone to occur (for example, where the power connection points 13 are densely packed) and relatively safe locations (for example, at the exhaust port) inside the gas cabinet, the preset tracer gas concentration values ​​of each monitoring point 32 may be different, and as the distance between the monitoring point 32 and the gas simulation release point 22 is different, its preset tracer gas concentration value may also be different. At this time, the controller 40 needs to receive the tracer gas concentration value of each monitoring point 32 and compare it with the preset tracer gas concentration value corresponding to each monitoring point 32. When the tracer gas concentration values ​​of all monitoring points 32 are less than or equal to the preset tracer gas concentration value corresponding to them, the test can be considered to have passed. As an example, in a place where the power connection points 13 are densely packed, since the possibility of explosion or fire in this area is relatively high, the preset tracer gas concentration value corresponding to the monitoring point 32 in this area can be set to be relatively low. By setting different preset tracer gas concentration values ​​according to the characteristics of the monitoring points 32 at different locations, the gas concentration in each key area inside the gas cabinet 10 can be monitored and judged more accurately and sensitively, thereby improving the accuracy and reliability of the flammability test and effectively avoiding test misjudgments and / or missed judgments caused by a single preset tracer gas concentration value.

[0072] The present invention can also flexibly adjust the test method according to the gas cabinet 10 containing different numbers of monitoring points 32. In some embodiments, when the number of the detectors 30 is greater than or equal to the number of monitoring points 32 inside the gas cabinet 10, the detectors 30 with the number of monitoring points 32 are used to synchronously monitor the various monitoring points 32 inside the gas cabinet 10. When the number of the detectors 30 is less than the number of monitoring points 32 inside the gas cabinet 10, the detectors 30 are used to perform batch testing on the various monitoring points 32 inside the gas cabinet 10 until all the monitoring points 32 inside the gas cabinet 10 are tested. As an example, if the following method is used: Figure 1The system shown (comprising 12 monitoring point detectors D4~D15), when the monitoring points of the gas cabinet to be tested are less than or equal to 12, the present system can be used to synchronously complete the flammability test of all the monitoring points inside the gas cabinet to be tested at one time; when the monitoring points of the gas cabinet to be tested are greater than or equal to 12 (i.e., a gas cabinet with complex working conditions), the present system can be used to first complete the flammability test of the 12 monitoring points, and then the present system can be used to perform another batch of tests on the remaining monitoring points of the gas cabinet to be tested, until all the monitoring points inside the gas cabinet to be tested have been tested.

[0073] In order to ensure the accuracy of the test data and avoid misjudgment interference, in some embodiments, the controller 40 calculates the time T for the tracer gas from the gas simulation release point 22 to reach a stable state inside the gas cabinet 10 according to the inherent parameters of the gas cabinet 10, and outputs a test instruction to the detector 30 at least T hours after the tracer gas is released. The interior of the gas cabinet 10 usually has a complex spatial structure and different component layouts. After the tracer gas is released from the gas simulation release point 22, it takes a certain amount of time to fully diffuse throughout the gas cabinet 10 and reach a stable concentration distribution state. If the detection is carried out too early, the tracer gas concentration at each monitoring point 32 is still in a stage of continuous change and has not yet stabilized. At this time, the data obtained by the detector 30 cannot truly reflect the normal distribution of gas in the gas cabinet 10, and it is easy to make misjudgments and / or missed judgments. The controller 40 calculates the time T required to reach a stable state and waits for at least T hours before outputting the test instruction, ensuring that the detector 30 collects the tracer gas concentration value in a stable state, thereby improving the accuracy of the test data and providing a reliable basis for subsequent accurate judgment of the flammability test results of the gas cabinet 10.

[0074] In some embodiments, such as Figure 2 As shown, the system further includes a human-machine interaction module 50, and the human-machine interaction module 50 is connected to the controller 40 by signal. The human-machine interaction module 50 includes an input interface, through which the tester can input the inherent parameters or other instructions of the gas cabinet 10, and the controller 40 receives the inherent parameters of the gas cabinet 10 transmitted from the human-machine interaction module 50. The inherent parameters of the gas cabinet 10 include the volume of the gas cabinet 10 and the structural information of the gas cabinet 10 (for example, the layout of each component and / or whether there is a hierarchical structure, etc.).

[0075] In order to further realize the intelligence of the system and optimize the cooperative operation mode between each module or device during the test, in some embodiments, the controller 40 compares the received tracer gas concentration value of the monitoring point 32 with the preset tracer gas concentration value. When the tracer gas concentration value of each monitoring point 32 is less than or equal to the preset tracer gas concentration value, the test is passed and the flammability test of the gas cabinet is completed. When the tracer gas concentration value of a monitoring point 32 is greater than the preset tracer gas concentration value, the test fails, and there is a safety hazard in the gas cabinet, and the exhaust volume of the exhaust device needs to be adjusted to eliminate the hazard. In order to achieve this purpose, when it is determined that the flammability test of the gas cabinet has failed, the controller itself or the tester outputs various control instructions to respond, and takes different processing measures for the corresponding device and / or module, thereby realizing functions such as ensuring that the tracer gas concentration values ​​monitored at each monitoring point 32 inside the gas cabinet are less than the preset tracer gas concentration value, automatically recording and displaying the monitored tracer gas concentration value, and automatically alarming under specific circumstances. Specifically, the control instructions include a first control instruction, a second control instruction and a third control instruction, and the control instructions may come from a tester or may be actively issued by the controller after judgment, and this application does not impose any specific restrictions here.

[0076] Continue to see Figure 1In this example, the gas cabinet 10 is provided with an exhaust device 60, and the first control instruction is used to control and adjust the exhaust volume of the exhaust device 60. The exhaust device 60 is connected to the controller 40 by signal, and the controller 40 compares the received tracer gas concentration value of the monitoring point 32 with the preset tracer gas concentration value. When the tracer gas concentration value of at least one of the monitoring points 32 is greater than or equal to the corresponding preset tracer gas concentration value, the tester obtains the information that the test fails, and can give the first control instruction, which includes increasing the exhaust volume of the exhaust device 60 inside the gas cabinet 10. The exhaust device 60 receives the first control instruction and adjusts the exhaust volume inside the gas cabinet 10, so that the tracer gas concentration values ​​of several monitoring points 32 are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point 32, so that the exhaust capacity of the gas cabinet 10 meets the flammability test passing standard. In some embodiments, in order to prevent gas from accumulating in certain areas inside the gas cabinet 10, the gas cabinet 10 is also provided with a plurality of exhaust devices (not shown) located at different positions inside the gas cabinet 10, and the plurality of exhaust devices 60 are all connected to the controller 40 by signal, and the first control instruction can control the exhaust volume of the plurality of exhaust devices. It should be noted that, due to the limitations of the prior art, the control of the exhaust volume of the exhaust device still requires manual adjustment by the tester, and at this time, the controller 40 only plays the role of receiving the first control instruction from the tester and adjusting the exhaust device according to the first control instruction, and cannot actively adjust the exhaust device without the tester's instruction.

[0077] In some embodiments, such as Figure 3 As shown, the system further includes a display module 70, and the second control instruction is used to control the display module to display the tracer gas concentration value of each monitoring point monitored in real time. In some preferred embodiments, the human-computer interaction module 50 includes the display module 70. The display module 70 is connected to the controller 40 by signal, and the display module 70 receives the second control instruction output from the controller 40, and displays the tracer gas concentration value of each monitoring point 32, so that the operator can intuitively and timely understand the distribution of tracer gas concentration at different positions inside the gas cabinet 10. In some embodiments, the display module 70 also has a data storage function, which can record the tracer gas concentration data of each monitoring point 32 monitored during the test, so as to facilitate subsequent query and analysis, thereby guiding the optimization of the design of the gas cabinet 10. In some embodiments, the display module 70 includes a display interface, which can display the tracer gas concentration value of each monitoring point 32 in the form of a list or a chart, and can also display the change trend of the tracer gas concentration value of each monitoring point 32. It is understandable that the display interface and the input interface described above can be integrated into a control screen to optimize the human-computer interaction experience.

[0078] In some embodiments, the system further includes an alarm module (not shown in the figure), and the third control instruction is used to control the alarm module to send an alarm signal. The alarm module is connected to the controller 40 by signal. When the tracer gas concentration value of at least one of the monitoring points 32 is greater than or equal to the corresponding preset tracer gas concentration value, the alarm module receives the third control instruction output from the controller 40, sends an alarm signal, and promptly notifies the operator of the possible dangerous conditions inside the gas cabinet. The alarm signal includes but is not limited to a light signal and a sound signal, such as a flashing red warning light and / or a harsh buzzer, to ensure timely avoidance of the risk of safety accidents caused by abnormal tracer gas concentration.

[0079] In some preferred embodiments, see Figure 3 The controller 40, the detector 30, the human-computer interaction module 50, the display module 70, and the alarm module (not shown) are all integrated in the integrated box 80, making the system structure more compact and simple. The integrated layout significantly reduces the signal transmission distance between the devices and / or modules, reduces the possibility of signal interference, and greatly improves the accuracy and timeliness of data transmission, so that the gas cabinet flammability test can be carried out efficiently and accurately.

[0080] In some embodiments, the system further includes a mass flow controller 211 (Mass Flow Controller, MFC). The mass flow controller 211 is arranged on the tracer gas pipeline 21, and is used to adjust the release flow rate of the tracer gas at the gas simulation release point 22. The working principle of the mass flow controller 211 is based on the precise measurement of the fluid flow in the pipeline and the feedback adjustment mechanism. The flow rate, pressure and other parameters of the tracer gas are monitored in real time through the built-in high-precision sensor, and the opening of the built-in valve is driven and adjusted according to the preset flow target value by using an advanced control algorithm, so as to achieve dynamic and stable control of the release flow rate of the tracer gas. This function makes the simulated gas leakage scene highly consistent and repeatable each time the flammability test is performed, so that the test data of different batches or different time periods are comparable.

[0081] In some embodiments, the system further includes a pressure regulating valve 212. The pressure regulating valve 212 is disposed on the tracer gas pipeline 21, and is used to adjust the release pressure of the tracer gas to the working pressure range of the mass flow controller 211. If the initial release pressure of the tracer gas is too high or too low, exceeding the working pressure range of the mass flow controller 211, the mass flow controller 211 may fail to accurately measure and control the flow, resulting in excessive flow fluctuations or even equipment failure. Therefore, the regulating valve 212 is required to control the release pressure of the tracer gas to be stable within the working pressure range required by the mass flow controller 211.

[0082] In some embodiments, the tracer gas includes hydrogen (H2), and the detector 30 is an H2 detector provided by Honeywell. In the present invention, H2 is used as a tracer gas for flammability testing for the first time, and multiple H2 detectors are used to perform synchronous monitoring of multiple monitoring points 32. Compared with the traditional flammability test using SF6, it has at least the following advantages:

[0083] First, the real-time performance of the flammability test is greatly improved. The main reason is that compared with GC technology, the feedback speed of the H2 detector is faster and it can realize the synchronous monitoring of multiple monitoring points. For example, under the premise of ensuring the detection accuracy, the GC technology needs to be used for the detection of SF6 gas. This technology takes at least 3 minutes from injection to obtaining the concentration analysis results. When there are 12 monitoring points inside the gas cabinet, since the GC equipment only allows a single injection, it takes at least 36 minutes to complete the SF6 detection of 12 monitoring points; and for the detection of H2 samples, the H2 detector is used. It takes only 30 seconds from the release of the tracer gas to the collection of the tracer gas concentration values ​​of 12 monitoring points by several H2 detectors and sending them to the controller. Therefore, the use of H2 as a tracer gas and the synchronous monitoring of multiple monitoring points have greatly improved the real-time performance of the test results, greatly shortened the time required for the entire test, and at the same time, avoided the test result errors caused by detection delays or the omission of key information on gas concentration changes. Highly real-time synchronous monitoring can ensure that data from all monitoring points are acquired on the same time scale, accurately reflecting the relationship between gas concentrations at various locations in the gas cabinet, thereby providing a more accurate basis for evaluating whether the gas cabinet has passed the flammability test.

[0084] Secondly, further, the test accuracy of the flammability test is greatly improved. The main reason is that the H2 detector also has high sensitivity and detection accuracy. The H2 detector is usually based on the electrochemical principle, and generates a current signal through the oxidation or reduction reaction of H2 to perform logical operations to obtain the H2 concentration. H2 is relatively active in chemical properties and can react quickly under certain conditions, so that the H2 detector can produce a relatively obvious signal change when detecting the H2 concentration, thereby achieving high sensitivity and high accuracy. Therefore, the detection signal of the H2 detector used for H2 detection is strong, and the interference caused by tiny impurities, temperature and / or humidity changes can be ignored, achieving high-precision detection.

[0085] Third, H2 is more environmentally friendly than SF6. SF6 is a strong greenhouse gas that has a significant negative impact on global warming. H2 is non-toxic and harmless, does not produce a greenhouse gas effect, and the main product of H2 combustion is water, which does not cause additional environmental burden.

[0086] like Figure 4 As shown, the present invention provides a method for gas cabinet flammability testing, which at least comprises the following steps: Step S1, providing a system for gas cabinet flammability testing as described above.

[0087] In some embodiments, step S1 further includes: inputting system test parameters through a human-computer interaction module. The human-computer interaction module includes a control screen for inputting the system test parameters. The system test parameters include, but are not limited to: inherent parameters of the gas cabinet (e.g., the volume inside the gas cabinet, etc.), tracer gas information (e.g., tracer gas components and concentrations of each component, etc.), the number of monitoring points, the location of each monitoring point, and the preset tracer gas concentration value corresponding to each monitoring point.

[0088] Step S2, transporting the tracer gas from the tracer gas container through the tracer gas pipeline to the gas simulation release point for simulated release.

[0089] In some embodiments, the tracer gas is a tracer gas including H2. In this example, the tracer gas is a mixture of H2 and N2, wherein H2 is used as a detection gas and N2 is used as a carrier gas. The tracer gas can also be a mixture of H2 and other carrier gases (e.g., Ar). In view of the fact that the explosion limit threshold of H2 is 5.7%, in order to ensure safety during the test, in the tracer gas formula used in the present invention, the volume ratio of H2 in the mixed gas does not exceed 5.7%, for example, 5.7%, 4.5%, 4%, etc.

[0090] H2 and N2 are usually colorless, odorless, and non-toxic gases. It is understandable that in order to store a mixture of H2 and N2, the tracer gas container can be a self-pressurized tracer gas cylinder. In some embodiments, in order to control the tracer gas flow rate at the gas simulation release point, a pressure regulating valve and a mass flow controller are also provided in sequence on the tracer gas pipeline. The release pressure of the tracer gas from the tracer gas container is adjusted to the working pressure range of the mass flow controller by the pressure regulating valve, and the mass flow controller adjusts the release flow of the tracer gas at the gas simulation release point to simulate the gas leakage of the gas cabinet during actual operation.

[0091] In some embodiments, the release flow rate of the tracer gas at the gas simulation release point may be less than the possible gas flow rate of the pipeline at the gas simulation release point during the actual working process, that is, the release flow rate may simulate the gas flow rate under slight gas leakage conditions such as tiny cracks or local poor sealing in the pipeline. In other embodiments, the release flow rate may also be equivalent to the possible gas flow rate of the pipeline at the gas simulation release point during the actual working process, that is, the release flow rate may simulate the gas flow rate under extreme gas leakage conditions caused by a complete break in the pipeline. Through different simulation methods, it is possible to comprehensively test whether the gas cabinet can pass the flammability test under different leakage scenarios, thereby ensuring the accuracy of the system test of the present invention and ensuring the safety of the gas cabinet.

[0092] Step S3: a plurality of detectors receive the test instructions outputted from the controller, and collect and analyze the tracer gas concentration values ​​at the plurality of monitoring points.

[0093] When the tracer gas is a mixture of H2 and N2, the detector uses an H2 detector (from Honeywell) to collect the tracer gas concentration value of H2 at each monitoring point. As mentioned above, since it only takes 30 seconds from the release of the tracer gas to the collection of the tracer gas concentration value by the H2 detector to the sending to the controller, when the number of the detectors is greater than or equal to the number of monitoring points inside the gas cabinet, the detectors of the number of monitoring points are used to synchronously monitor the various monitoring points inside the gas cabinet, and the tracer gas concentration value of each monitoring point inside the gas cabinet can be obtained within 30 seconds to 1 minute, which greatly improves the test efficiency and reduces the test error caused by the delay in detection. When the number of the detectors is less than the number of monitoring points inside the gas cabinet, the detectors can be used to test the various monitoring points inside the gas cabinet in batches until all the monitoring points inside the gas cabinet have been tested.

[0094] In some embodiments, step S3 further includes: the controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet according to the inherent parameters of the gas cabinet, and sends the test instruction to the detector after T time from the release of the tracer gas to ensure that the detector collects the tracer gas concentration value when the gas concentration reaches a stable state inside the gas cabinet, thereby improving the accuracy of the detection data. In some embodiments, the inherent parameters of the gas cabinet include the volume of the gas cabinet.

[0095] In step S4, the controller receives the tracer gas concentration values ​​transmitted from the plurality of detectors, compares the values ​​with preset tracer gas concentration values, and determines whether the flammability test of the gas cabinet has passed.

[0096] Based on the standard provisions of general gas cabinet flammability tests (for example, SEMI S6 flammability tests), the standard for judging whether the flammability test of the gas cabinet has been passed is: during the entire test process, the tracer gas concentration detected at each monitoring point inside the gas cabinet is always controlled within a safe range, and no phenomenon that may cause combustion or explosion occurs. Therefore, in some embodiments, the preset tracer gas concentration value of each monitoring point is less than or equal to the explosion limit threshold of the tracer gas. When the tracer gas concentration value of at least one of the monitoring points received by the controller is greater than or equal to the explosion limit threshold of the tracer gas, it means that an explosion risk has occurred inside the gas cabinet and the standard for passing the flammability test is not met.

[0097] After the steps S1 to S4, if the collected tracer gas concentration values ​​of each monitoring point inside the gas cabinet are all less than the corresponding preset tracer gas concentration values, the gas cabinet can pass the flammability test.

[0098] In some embodiments, in order to determine the more economical and environmentally friendly exhaust volume of the gas cabinet, Figure 5 As shown, the method for flammability testing of a gas cabinet also includes: step S5.1, the controller outputs a first control instruction, the first control instruction includes: increasing the exhaust volume inside the gas cabinet so that the tracer gas concentration values ​​at the several monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point. The gas cabinet is usually in communication with the outside air and is provided with at least one exhaust device, which is used to adjust the exhaust volume to achieve gas replacement and ventilation inside the gas cabinet. It should be noted that due to the limitations of the prior art, in this embodiment, the first control instruction comes from the tester, and after being set by the tester, the controller outputs it to the exhaust device for execution.

[0099] In some embodiments, in order to enhance the data visualization during the test, such as Figure 6As shown, the method for gas cabinet flammability testing also includes: step S5.2, the controller outputs a second control instruction, and the second control instruction includes: displaying the tracer gas concentration value of the monitoring point.

[0100] In traditional testing methods, whether using GC technology or SF6 detectors, neither has the functional characteristics of real-time synchronous output and display of test data of each monitoring point, making it impossible for operators to fully understand the changes in tracer gas concentration at different locations inside the gas cabinet at the same time.

[0101] In the present invention, the second control instruction can be received through the human-computer interaction module, and the tracer gas concentration value of each monitoring point can be displayed in real time on a control screen, so that the operator can quickly and intuitively obtain the real-time data of the tracer gas concentration of each monitoring point inside the gas cabinet, thereby greatly improving the timeliness and accuracy of the gas cabinet flammability test.

[0102] In some embodiments, the second control instruction further includes: recording the tracer gas concentration value of the monitoring point. The control instruction can be received by the human-computer interaction module to record the tracer gas concentration value of each monitoring point in real time. This is conducive to subsequent data analysis and data tracing, so that the rationality of the gas cabinet design can be verified and optimized.

[0103] In some embodiments, in order to further improve the intelligence level of the test process and ensure the safety of the test process, Figure 7 As shown, the method for gas cabinet flammability testing also includes: step S5.3, the controller outputs a third control instruction, and the third control instruction includes: when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, an alarm signal is issued.

[0104] In the traditional testing method, the operator is required to judge whether the tracer gas concentration value of the monitoring point is abnormal based on the tracer gas concentration value of the monitoring point. Especially when faced with tracer gas concentration value data of several monitoring points, it is very easy to make misjudgments and / or missed judgments.

[0105] In the present invention, the third control instruction can be received by the alarm module. When the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module automatically triggers an alarm and sends an alarm signal, thereby greatly improving the safety of the test process and reducing errors in human judgment.

[0106] In summary, the present invention provides a system and method for gas holder flammability testing, which realizes multi-point synchronous monitoring through an integrated controller and multiple detectors, significantly improving the real-time and accuracy of the test, and only takes 30s to 1min to complete the test, which is much faster than traditional methods. The system can automatically judge the test results, thereby accurately evaluating the safety of the gas holder, and simplifying the test operation process, which is particularly suitable for gas holders with complex layouts. The system also integrates an intelligent verification design to display tracer gas concentration value data and issue alarms, reducing manpower and energy waste, and improving test efficiency and reliability. In addition, the system uses a mixture of H2 and N2 as tracer gas, which is environmentally friendly and in line with the trend of green and sustainable development.

[0107] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A system for testing the flammability of a gas cabinet, wherein the gas cabinet includes a plurality of pipelines, a plurality of valves and a plurality of electrical connection points, characterized in that: At least: A tracer gas container, which is connected to a gas simulation release point through a tracer gas pipeline, and is used to release the tracer gas at the gas simulation release point; the gas simulation release point is located at the connection between the valve and the pipeline inside the gas cabinet; A plurality of detectors, each detector being connected to a monitoring point via a sampling tube; the plurality of monitoring points being arranged at least at the plurality of electrical connection points inside the gas cabinet; A controller, the controller being signal-connected to the plurality of detectors; Among them, the multiple detectors are used to collect the tracer gas concentration values ​​of the multiple monitoring points and send them to the controller; the controller is used to compare the tracer gas concentration values ​​at the monitoring points with preset tracer gas concentration values ​​to determine whether the flammability test of the gas cabinet has passed.

2. The system for gas cabinet flammability testing according to claim 1, characterized in that: The preset tracer gas concentration values ​​of each monitoring point are different or the same, where: When the preset tracer gas concentration values ​​of the various monitoring points are the same, the controller receives the tracer gas concentration value of each monitoring point and compares it with the preset tracer gas concentration value; When the preset tracer gas concentration values ​​of the various monitoring points are different, the controller receives the tracer gas concentration values ​​of the various monitoring points and compares them with the preset tracer gas concentration values ​​corresponding to the various monitoring points.

3. The system for gas cabinet flammability testing according to claim 1, characterized in that: When the number of the detectors is greater than or equal to the number of monitoring points inside the gas cabinet, using the detectors of the number of monitoring points to synchronously test each monitoring point inside the gas cabinet; When the number of the detectors is less than the number of monitoring points inside the gas cabinet, the detectors are used to test the monitoring points inside the gas cabinet in batches until all the monitoring points inside the gas cabinet are tested.

4. The system for gas cabinet flammability testing according to claim 1, characterized in that: The controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet according to the inherent parameters of the gas cabinet, and outputs a test instruction to the detector at least T hours after the tracer gas is released.

5. The system for gas cabinet flammability testing according to claim 1, characterized in that: The controller compares the received tracer gas concentration values ​​of the monitoring points with the preset tracer gas concentration values, and outputs a first control instruction when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to the corresponding preset tracer gas concentration value.

6. The system for gas cabinet flammability testing according to claim 5, characterized in that: The gas cabinet is provided with an exhaust device, which is connected to the controller signal. The exhaust device receives the first control instruction and adjusts the exhaust volume inside the gas cabinet so that the tracer gas concentration values ​​of the several monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point.

7. The system for gas cabinet flammability testing according to claim 1, characterized in that: Also includes: A human-machine interaction module is connected to the controller by signal, and the controller receives the inherent parameters of the gas cabinet transmitted from the human-machine interaction module.

8. The system for gas cabinet flammability testing according to claim 1, characterized in that: Also includes: A display module is connected to the controller signal, and the display module receives a second control instruction outputted from the controller to display the tracer gas concentration value at the monitoring point.

9. The system for gas cabinet flammability testing according to claim 1, characterized in that: Also includes: An alarm module is connected to the controller signal. When the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module receives a third control instruction output from the controller and sends an alarm signal.

10. The system for gas cabinet flammability testing according to claim 9, characterized in that: The alarm signal includes: a light signal and / or a sound signal.

11. The system for gas cabinet flammability testing according to claim 1, characterized in that: Also includes: A mass flow controller is arranged on the tracer gas pipeline and is used to adjust the release flow rate of the tracer gas at the gas simulation release point.

12. The system for gas cabinet flammability testing according to claim 11, characterized in that: Also includes: A pressure regulating valve is provided on the tracer gas pipeline, and is used for adjusting the release pressure of the tracer gas to the working pressure range of the mass flow controller.

13. The system for gas cabinet flammability testing according to claim 1, characterized in that: The tracer gas includes H2, and the detector is a H2 detector.

14. The system for gas cabinet flammability testing according to claim 13, characterized in that: The total time from the release of the tracer gas to the collection of the tracer gas concentration values ​​of several monitoring points by several H2 detectors and sending them to the controller is 30s~1min.

15. The system for gas cabinet flammability testing according to claim 1, characterized in that: Also includes: An integrated box, wherein the controller and the detector are integrated inside the integrated box.

16. The system for gas cabinet flammability testing according to claim 1, characterized in that: The monitoring point is also arranged at a corner of the cabinet inside the gas cabinet.

17. A method for testing the flammability of a gas cabinet, characterized in that: The method is implemented by using a system for gas cabinet flammability testing as described in any one of claims 1 to 16, wherein the method comprises at least the following steps: The tracer gas is transported from the tracer gas container through the tracer gas pipeline to the gas simulation release point for simulated release; A plurality of detectors receive the test instructions outputted from the controller, and collect and analyze the tracer gas concentration values ​​at the plurality of monitoring points; The controller receives the tracer gas concentration values ​​transmitted from the plurality of detectors, compares them with preset tracer gas concentration values, and determines whether the flammability test of the gas cabinet has passed.

18. The method for gas cabinet flammability testing according to claim 17, characterized in that: When the number of the detectors is greater than or equal to the number of monitoring points inside the gas cabinet, using the detectors of the number of monitoring points to synchronously test each monitoring point inside the gas cabinet; When the number of the detectors is less than the number of monitoring points inside the gas cabinet, the detectors are used to test the monitoring points inside the gas cabinet in batches until all the monitoring points inside the gas cabinet are tested.

19. The method for gas cabinet flammability testing according to claim 17, characterized in that: Also includes: The controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet according to the inherent parameters of the gas cabinet, and sends the test instruction to the detector T time after the tracer gas is released.

20. The method for gas cabinet flammability testing according to claim 19, characterized in that: The inherent parameters of the gas cabinet are transmitted to the controller through the human-computer interaction module.

21. The method for gas cabinet flammability testing according to claim 20, characterized in that: The intrinsic parameters of the gas cabinet include the volume of the gas cabinet.

22. The method for gas cabinet flammability testing according to claim 17, characterized in that: When it is determined that the flammability test of the gas cabinet has failed, the method further includes: the controller outputting a control instruction so that the tracer gas concentration values ​​of the plurality of monitoring points are all less than a preset tracer gas concentration value corresponding to each monitoring point.

23. The method for gas cabinet flammability testing according to claim 22, characterized in that: The control instruction includes a first control instruction, which includes: increasing the exhaust volume inside the gas cabinet so that the tracer gas concentration values ​​of the plurality of monitoring points are all smaller than the preset tracer gas concentration values ​​corresponding to the respective monitoring points.

24. The method for gas cabinet flammability testing according to claim 22, characterized in that: The control instruction includes a second control instruction, and the second control instruction includes: displaying the tracer gas concentration value of the monitoring point.

25. The method for gas cabinet flammability testing according to claim 22, characterized in that: The control instructions include a third control instruction, and the third control instruction includes: when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to the corresponding preset tracer gas concentration value, an alarm signal is issued.

26. The method for gas cabinet flammability testing according to claim 17, characterized in that: The tracer gas includes H2.

27. The method for gas cabinet flammability testing according to claim 26, characterized in that: The tracer gas is a mixture of H2 and N2, and the volume ratio of H2 in the mixture does not exceed 5.7%.

28. The method for gas cabinet flammability testing according to claim 17, characterized in that: The method is used for SEMIS6 flammability testing.

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